Large-stroke precise-positioning variable-damping vibration isolation mechanism based on magnetostriction driving

Abstract

The invention provides a large-stroke precise-positioning variable-damping vibration isolation mechanism based on magnetostriction driving. The mechanism is composed of a magnetostrictive actuator, a diamond amplification mechanism, a hydraulic amplification mechanism and a magnetofluid damping adjusting mechanism. The magnetostrictive actuator realizes micron-order displacement under the action of a magnetic field. And the rhombic amplification mechanism performs primary amplification on the displacement and provides pre-pressure, so that the force transmission efficiency is improved. The hydraulic amplifying mechanism further enhances displacement output, and the magnetic fluid damping adjusting mechanism optimizes damping characteristics by adjusting magnetic field intensity, so that the system can adapt to different excitation conditions, efficiently isolate high-frequency vibration and keep stable in a low-frequency environment. The mechanism is combined with an acceleration sensor and a displacement sensor, a closed-loop control strategy is adopted, and precise displacement control and self-adaptive vibration isolation are achieved. The vibration isolator has the characteristics of large stroke, high response speed, adjustable damping and excellent vibration isolation performance, and is widely applied to the fields of high-precision optical measurement, space remote sensing cameras, semiconductor manufacturing and the like.

Description

Technical Field

[0001] The invention belongs to the technical field of long-stroke precision positioning and vibration control. Background Art

[0002] In the field of high-precision positioning, magnetostrictive actuators are usually used to drive sensitive elements, and in the traditional field of vibration isolation, they mainly rely on elastic supports and viscous damping elements, such as rubber materials or viscous fluids. These traditional driving and vibration isolation elements are often limited in stroke and load, the damping characteristics are not adjustable, and the response speed is slow. It is difficult to achieve accurate positioning and vibration suppression in a dynamic environment, especially in low-frequency, small-amplitude micro-vibration control. There are certain limitations, and it is difficult to meet the requirements of stability and response speed for high-end applications such as aerospace, precision measurement, and semiconductor manufacturing. Magnetostrictive actuators have been widely used in the field of precision positioning and active vibration isolation due to their high response speed, high precision and large driving force. However, the displacement of a single-stage magnetostrictive drive is usually small, which is difficult to meet the needs of high-precision positioning with a large stroke. Therefore, in practical applications, a multi-stage amplification mechanism is often used to increase the displacement output of the magnetostrictive actuator, making it suitable for a larger range of precision displacement adjustment. On the other hand, the application of variable damping adjustment technology in vibration isolation systems is crucial. Traditional damping elements usually have fixed damping characteristics, which are difficult to adapt to the vibration suppression requirements of different frequency bands. As a smart material, the viscosity of magnetic fluid can be quickly adjusted under the action of an external magnetic field, making it an ideal variable damping medium. By precisely controlling the magnetic field strength, the damping coefficient of the system can be adjusted in real time, so that the vibration isolation mechanism can maintain the best vibration suppression effect under different excitation conditions, effectively isolating high-frequency vibrations and providing good stability in low-frequency environments. Based on the above needs, the present invention proposes a large-stroke precision positioning variable damping vibration isolation mechanism based on magnetostrictive drive. The mechanism integrates a magnetostrictive actuator, a hydraulic and mechanical amplification mechanism, and a magnetic fluid variable damping unit, realizing high-precision displacement amplification positioning, adjustable damping vibration isolation, and dynamic response optimization. Compared with traditional vibration isolation and positioning systems, the device has the advantages of precision positioning capability with a larger stroke, adaptive damping adjustment, and efficient micro-vibration isolation. It can be widely used in high-demand fields such as optical experiments, precision measurement, aerospace remote sensing, and semiconductor manufacturing to improve the stability of the system and the reliability of test data. Summary of the invention

[0003] In view of the shortcomings of the existing precision positioning and vibration isolation systems in terms of response speed, damping adjustment capability and vibration isolation effect, the present invention provides a large-stroke precision positioning variable damping vibration isolation mechanism based on magnetostrictive drive. The mechanism uses a magnetostrictive actuator as a driving element, and applies pre-pressure at its output end with a diamond amplification mechanism while performing a primary displacement amplification on the actuator, and provides high-precision displacement adjustment capability by adjusting the size of the magnetic field; the diamond amplification mechanism and the hydraulic amplification mechanism are connected in series to perform a secondary amplification of the displacement, and the hydraulic fluid is a magnetorheological fluid. By controlling the magnetic field of the damping coil, the damping coefficient is adjusted in real time, so that the vibration isolation system maintains the best damping characteristics under different excitation conditions, and can effectively isolate high-frequency vibrations and maintain good stability under low-frequency conditions. Compared with traditional vibration isolation systems, this mechanism has the characteristics of fast response speed, adjustable damping, and excellent vibration isolation effect, and is widely used in scenes with extremely high stability requirements such as high-precision optical instruments, precision measurement systems, and satellite remote sensing cameras.

[0004] To achieve the above-mentioned purpose, the present invention provides a large-stroke precision positioning variable damping vibration isolation mechanism based on magnetostrictive drive, which is composed of a magnetostrictive actuator, a diamond-shaped amplification mechanism, a hydraulic amplification mechanism and a magnetorheological damping adjustment mechanism, and can achieve large-stroke precision positioning and adjustable damping vibration isolation. Among them, the magnetostrictive actuator is used as the core driving element, and the expansion and contraction deformation of the actuator is accurately controlled by applying an external magnetic field to achieve micron-level precision positioning. The diamond-shaped amplification mechanism is used to preliminarily amplify the displacement of the magnetostrictive actuator and provide an efficient force transmission path to improve the dynamic response capability of the system. The hydraulic amplification mechanism further amplifies the displacement output, and the magnetorheological damping adjustment mechanism changes the rheological properties of the magnetorheological fluid by adjusting the magnetic field strength to achieve real-time adjustable damping coefficient, so that the system can adaptively adjust the damping characteristics under different working conditions, which can not only efficiently absorb high-frequency vibrations, but also maintain stability in low-frequency environments. This mechanism can receive external excitation signals or environmental disturbance signals. The control system adjusts the driving magnetic field of the magnetostrictive actuator according to the feedback information of the displacement sensor and vibration sensor to achieve precise displacement control, and optimizes the vibration isolation performance by adjusting the magnetorheological damping characteristics. Compared with traditional positioning and vibration isolation mechanisms, this mechanism has high response speed, large stroke precision positioning, variable damping adjustment and excellent vibration isolation effect. It can be widely used in high-precision optical measurement, space remote sensing cameras, semiconductor manufacturing and precision instruments, etc., providing a more stable working environment for precision equipment and improving the reliability of test data.

[0005] A working process of a large-stroke precision positioning variable damping vibration isolation mechanism based on magnetostrictive drive: This process can be divided into a displacement amplification precision positioning process and a vibration isolation control process. The two work together to ensure that sensitive loads can achieve a large range of stable displacement control and excellent vibration isolation effects when they are subjected to external vibration or require high-precision adjustment. Displacement amplification precision positioning process: When the position of the load needs to be adjusted, the control system receives the position signal, the magnetostrictive actuator starts to work, the magnetostrictive coil is energized to generate a magnetic field, the magnetostrictive material is deformed, and the diamond amplification mechanism is driven to perform a first-level displacement amplification. The diamond amplification mechanism continues to drive the output piston of the hydraulic amplification mechanism to perform a second-level displacement amplification. The output piston of the hydraulic amplification mechanism causes the sensitive load to undergo a micron-level precise displacement. The displacement sensor monitors the position of the load platform and continuously adjusts the driving force of the actuator through a closed-loop control system to ensure that the final positioning accuracy meets the requirements. Vibration isolation control process: When a disturbance is applied to the bottom plate, the acceleration sensor monitors the disturbance signal of the bottom plate and feeds the data back to the control system; the control system analyzes the vibration data, adjusts the magnetic field of the damping coil, and changes the viscosity of the magnetic fluid near the output piston to adapt the damping to the current vibration characteristics. When the vibration frequency is low, the magnetic fluid damping is small, and the system mainly relies on the magnetostrictive actuator to actively compensate for the displacement; when the vibration frequency is high, the magnetic fluid damping is enhanced, absorbing the vibration energy and improving the vibration isolation effect; the magnetostrictive actuator and the magnetic fluid damping work together to accurately compensate or absorb the vibration and keep the load stable. The entire system is adjusted in a real-time closed loop to ensure that the displacement error of the load is minimized, achieving the dual goals of precise positioning and wide-band vibration isolation. Compared with traditional vibration isolation systems, the present invention has the advantages of fast response speed, large-stroke displacement precision positioning, adjustable damping, and excellent vibration isolation effect. It can provide high-precision, high-stability positioning and vibration isolation capabilities under complex working conditions, and can be widely used in high-end fields such as optical platforms, precision measuring instruments, satellite remote sensing cameras, and semiconductor manufacturing equipment.

[0006] Preferably, magnetostrictive materials are used as the driving device, which have high energy density and the ability to withstand large loads;

[0007] Preferably, the magnetostrictive actuator is used in combination with a magnetic fluid variable damper to accurately position the load, while the magnetic fluid variable damper can broaden the vibration isolation frequency band and enhance the energy dissipation capability;

[0008] Preferably, a diamond-shaped amplifying mechanism is used as the primary amplifying mechanism, which can amplify the displacement and apply pre-pressure to the magnetostrictive rod at the same time;

[0009] Preferably, the displacement amplitude is further improved on the basis of the diamond-shaped amplification mechanism, and efficient energy transfer is achieved through the flow characteristics of the liquid medium, while providing additional damping effect;

[0010] Preferably, the magnetostrictive actuator uses an annular permanent magnet to apply a bias magnetic field and a coil to apply a driving magnetic field, which can effectively reduce energy loss;

[0011] Preferably, magnetorheological fluid is used as the adjustable damping medium, and the damping coefficient is quickly adjusted by adjusting the external magnetic field strength, so that the system can adaptively optimize the vibration isolation characteristics according to different excitation conditions, which can not only effectively isolate high-frequency vibrations, but also maintain stability in low-frequency environments;

[0012] Preferably, an acceleration sensor and a displacement sensor are used to collect signals to form an active control system combining feedforward and feedback to achieve precise positioning of the load and variable damping vibration isolation;

[0013] Preferably, the device housing is made of a material with high thermal conductivity to improve magnetic conductivity and increase heat dissipation capacity.

[0014] The present invention is a large-stroke precision positioning variable damping vibration isolation mechanism based on magnetostrictive drive. It uses magnetostrictive actuators to achieve large-stroke high-precision positioning, and uses the variable damping characteristics of magnetic fluids to achieve vibration control, providing high dynamic response, precise and adjustable damping adjustment, and excellent micro-vibration isolation effects to meet the stringent requirements of high-end precision instruments. The mechanism uses magnetostrictive actuators to achieve high-precision active positioning, and combines magnetic fluid variable damping technology for adaptive vibration isolation. Compared with traditional vibration isolation devices, it has the advantages of fast response, adjustable damping, and adaptability to a variety of vibration environments. It is widely used in high-precision optical instruments, precision measurement systems, satellite remote sensing cameras, and other scenes with extremely high stability requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention is described below in conjunction with the accompanying drawings.

[0016] Figure 1 It is a stereoscopic diagram of a large-stroke precision positioning variable damping vibration isolation mechanism based on magnetostrictive drive according to one embodiment of the present invention;

[0017] Figure 2 is an exploded view of a magnetostrictive driven large stroke precision positioning variable damping vibration isolation mechanism constructed according to one embodiment of the present invention;

[0018] Figure 3 is a cross-sectional view of a magnetostrictive driven large stroke precision positioning variable damping vibration isolation mechanism according to one embodiment of the present invention;

[0019] Figure 4 is a control principle diagram of a magnetostrictively driven large-stroke precision positioning variable damping vibration isolation mechanism according to an embodiment of the present invention; DETAILED DESCRIPTION

[0020] Referring to the accompanying drawings, wherein like reference numerals denote corresponding parts throughout the views, a magnetostrictive driven multi-stage displacement positioning variable damping vibration isolation mechanism constructed according to one embodiment of the present invention is shown in FIG. Figure 1 It should be understood that the embodiments described below are merely exemplary and not restrictive.

[0021] like Figure 1 As shown, it is a stereoscopic diagram of a large-stroke precision positioning variable damping vibration isolation mechanism based on magnetostrictive drive, including: a base plate 1, a connecting member 2, a diamond frame 11, a shell 14, a support seat 23, a support column 21, a platform 20, an acceleration sensor 27, and a displacement sensor 28. The connecting member 2 connects the base plate 1 and the shell 14 as a whole through bolts, the upper end of the diamond frame 11 is fixed to the connecting member 2 by screws, and the lower end is connected to the fixing plate 3 as a whole, the support seat 23 is fixed to the shell 14 by screws, one end of the support column 21 is sleeved in the support seat 23, and the other end supports and fixes the platform 20 by bolts, the acceleration sensor 27 is installed on the base plate 1 to collect vibration signals, and the displacement sensor 28 is installed in the center of the platform 20 to collect displacement output signals.

[0022] like Figure 2 and Figure 3 As shown, an exploded view and a cross-sectional view of a magnetostrictive driven large stroke precision positioning variable damping vibration isolation mechanism according to an embodiment of the present invention include: a fixed plate 3, a pressure rod 4, an end cover 5, a permanent magnet 6, a magnetostrictive rod 7, a coil skeleton 8, a coil 9, an actuator housing 10, an input piston 12, a large sealing ring 13, a small sealing ring 15, a damping coil 16, an output piston 17, a restoring spring 18, a cover plate 19, a support spring 22, a pressure regulating hole 24, a wire channel 25, a hydraulic chamber 26, an acceleration sensor 27, and a displacement sensor 28;

[0023] The magnetostrictive rod 7 is located at the center of the rhombus frame 11, the coil frame 8 is sleeved on the outside of the magnetostrictive rod 7, the coil 9 is evenly wound on the coil frame 8, the two ends of the magnetostrictive rod 7 are pressed by the pressure rod 4, the permanent magnets 6 are respectively located at the two ends of the magnetostrictive rod 7 to provide a bias magnetic field, the actuator housing 10 wraps the coil and the permanent magnet 6, the end cover 5 is connected to the actuator housing 10 by a thread and presses the permanent magnets 6 at both ends, one end of the pressure rod 4 passes through the end covers 5 at both ends and is fixed to the rhombus frame 11 by screws, and the other end presses the magnetostrictive Rod 7, by adjusting the radial screws of the diamond frame, a pre-tightening force is applied to the magnetostrictive rod 7 to improve the uniformity of the magnetic field and the bidirectional output displacement capacity of the magnetostrictive rod; the four corners of the fixing plate 3 are fixedly connected to the input piston 12 by four screws, and the center is connected to the lower end of the diamond frame 11 by bolts. The hydraulic chamber 26 is formed by the concave cylindrical feature of the shell 14, and the upper end surface of the shell 14 is provided with a pressure regulating hole 24 for liquid filling and pressure regulation. When the diamond frame 11 is radially extended under the action of the actuator, its axial direction will be shortened, and the diamond frame 11 The upper end is fixed, so the lower end will bring the fixed plate 3 and the input piston 12 to produce an upward displacement, squeezing the magnetic fluid in the hydraulic chamber 26 to drive the output piston 17 to produce an output; the large sealing ring 13 is embedded in the groove of the input piston 12 and provides sealing, the small sealing ring 15 is embedded in the groove of the output piston 17 and provides sealing, the output piston 17 is placed in the channel above the shell 14, and the output piston 17 is processed with a wire channel 25 inside, the wire is wound around the lower part of the output piston 17 through the wire channel 25 to form a damping coil 16, and the magnetic fluid damping is adjusted to adapt to different vibration characteristics by changing the magnetic field of the damping coil 16. The upper end surface of the shell 14 is provided with a pressure regulating hole 24 for liquid filling and pressure regulation, the boss of the output piston 17 is connected to the cover plate 19 by a restoring spring 18, and the cover plate 19 is fixed on the shell 14 to compress the restoring spring 18, the output piston 17 is connected to the platform 20 by screws, and the support column 21 is sleeved inside the support seat 23 and supported by the support spring 22, providing a guiding and auxiliary support function for the platform 20.

[0024] like Figure 4 As shown, it is a control principle diagram of a large-stroke precision positioning variable damping vibration isolation mechanism driven by magnetostriction. A given position signal and a disturbance signal collected by an acceleration sensor 27 are used as inputs of the system and transmitted to a controller, wherein the disturbance signal is used as a feedforward signal to directly adjust the magnetic field of the damping coil 16 to generate appropriate damping to adapt to different vibration characteristics. The position signal is used as a control signal of the magnetostrictive actuator to adjust the current of the coil 9 to generate an induced magnetic field to control the output of the magnetostrictive rod 7. The output diamond frame 11 and the hydraulic mechanism are amplified to precisely position and isolate the load, and the displacement sensor 28 collects the displacement signal of the platform 20 and inputs the signal as a feedback signal to the controller, forming a displacement amplification positioning variable damping vibration isolation control mechanism combining feedforward and feedback.

[0025] Based on this disclosure, many variations in the configuration and operational sequence of the illustrated and described features will be apparent to those skilled in the art. Therefore, it should be appreciated that various changes can be made to this patent without departing from the spirit and scope of the claimed subject matter.

Claims

1. A large-stroke precision positioning variable damping vibration isolation mechanism based on magnetostrictive drive, characterized in that include: Base plate (1), connecting piece (2), fixing plate (3), pressure rod (4), end cover (5), permanent magnet (6), magnetostrictive rod (7), coil frame (8), coil (9), actuator housing (10), diamond-shaped amplifying mechanism (11), input piston (12), large sealing ring (13), housing (14), small sealing ring (15), damping coil (16), output piston (17), restoring spring (18), cover plate (19), platform (20), support column (21), support spring (22), support seat (23), pressure regulating hole (24), wire channel (25), hydraulic chamber (26), acceleration sensor (27), displacement sensor (28); The connecting member (2) connects the bottom plate (1) and the housing (14) as a whole by means of bolts; the upper end of the diamond frame (11) is fixed to the connecting member (2) by means of screws, and the lower end is connected to the fixing plate (3) as a whole; the support seat (23) is fixed to the housing (14) by means of screws; one end of the support column (21) is sleeved in the support seat (23) and the other end is supported and fixed to the platform (20) by means of bolts; an acceleration sensor (27) is installed on the bottom plate (1) to collect vibration signals; and a displacement sensor (28) is installed at the center of the platform (20) to collect displacement output signals; The magnetostrictive rod (7) is located at the center of a rhombus-shaped amplifying mechanism (11), a coil frame (8) is sleeved on the outside of the magnetostrictive rod (7), a coil (9) is evenly wound on the coil frame (8), two ends of the magnetostrictive rod (7) are pressed by a pressure rod (4), permanent magnets (6) are respectively located at two ends of the magnetostrictive rod (7) to provide a bias magnetic field, an actuator housing (10) wraps the coil (9) and the permanent magnet (6), an end cover (5) is connected to the actuator housing (10) through a thread and presses the permanent magnets (6) at two ends, one end of the pressure rod (4) passes through the end covers (5) at two ends and is fixed to the rhombus-shaped amplifying mechanism (11) through screws, and the other end presses the magnetostrictive rod (7), and a pre-tightening force is applied to the magnetostrictive rod (7) by adjusting the radial screws of the rhombus-shaped amplifying mechanism, thereby improving the magnetic field uniformity and bidirectional output displacement capacity of the magnetostrictive rod; The four corners of the fixed plate (3) are fixedly connected to the input piston (12) by four screws, and the center is connected to the lower end of the diamond-shaped amplifying mechanism (11) by bolts. The hydraulic chamber (26) is formed by the concave cylindrical feature of the shell (14). The upper end surface of the shell (14) is provided with a pressure regulating hole (24) for liquid filling and pressure regulation. When the diamond-shaped amplifying mechanism (11) is radially extended under the action of the actuator, its axial direction will be shortened. The upper end of the diamond-shaped amplifying mechanism (11) is fixed, so the lower end will cause the fixed plate (3) and the input piston (12) to produce an upward displacement, squeezing the magnetic fluid in the hydraulic chamber (26) to drive the output piston (17) to produce output. The large sealing ring (13) is embedded in the groove of the input piston (12) and provides sealing, the small sealing ring (15) is embedded in the groove of the output piston (17) and provides sealing, the output piston (17) is placed in the channel above the housing (14), and a wire channel (25) is processed inside the output piston (17), the wire is wound around the lower part of the output piston (17) through the wire channel (25) to form a damping coil (16), and the magnetic fluid damping is adjusted to adapt to different vibration characteristics by changing the magnetic field of the damping coil (16), the boss of the output piston (17) is connected to the cover plate (19) through a restoring spring (18), the cover plate (19) is fixed on the housing (14) to press the restoring spring (18), the output piston (17) is connected to the platform (20) through screws, and the support column (21) is sleeved inside the support seat (23) and supported by the support spring (22), providing guidance and auxiliary support for the platform (20).

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