Integrated angular velocity sensor and signal fusion method thereof

Abstract

The invention provides an integrated angular velocity sensor and a signal fusion method thereof, and relates to the technical field of instruments.The signal fusion method comprises the steps that an angular velocity sensor and a gyroscope are used for collecting signals with unknown angular velocity to obtain a first output voltage and a second output voltage; inputting the first output voltage and the second output voltage into a processor, respectively outputting a first angular velocity signal and a second angular velocity signal, and superposing the first angular velocity signal and the second angular velocity signal to obtain a superposed angular velocity signal; inputting the superposed angular velocity signal into a plurality of candidate band-pass filters to respectively obtain gains corresponding to the plurality of candidate band-pass filters; comparing the plurality of gains with each other by using a comparator, and determining the candidate band-pass filter corresponding to the maximum gain as a target band-pass filter; and processing the superposed angular velocity signal by using a target band-pass filter, and based on the frequency band where the filtered superposed angular velocity signal is located, selecting a fusion algorithm matched with the frequency band where the superposed angular velocity signal is located for fusion to obtain a fusion signal.

Description

Technical Field

[0001] The present invention relates to the technical field of instruments and meters, and more specifically, to an integrated angular velocity sensor and a signal fusion method thereof. Background Art

[0002] Angular velocity sensors based on magnetohydrodynamics (MHD) have the advantages of wide bandwidth, low noise, impact resistance, and small size. They can achieve sub-μrad level measurement of angular vibration in the kHz band and are currently the most suitable components for on-orbit angular velocity measurement. They are of great significance to the development of sensitive payloads such as long-distance laser communications and geostationary orbit remote sensing imaging. However, MHD angular velocity sensors have principle limitations. When the angular rotation frequency is low, the output performance is poor under the action of back electromotive force and viscosity. They cannot meet the wide-band measurement requirements of angular velocity from 0.1Hz to 1kHz when used alone.

[0003] By using a gyroscope with good low-frequency performance and an MHD angular velocity sensor for signal fusion, the low-frequency error of the sensor can be corrected without affecting the stability of the sensor, thereby achieving bandwidth expansion. At present, in the research on signal fusion algorithms, signal fusion is based on the separate installation of the gyroscope and the MHD angular velocity sensor. The separate installation method has low integration, a large signal transmission loop area, and is prone to external noise interference, resulting in uncertainty in angular velocity measurement. Summary of the invention

[0004] In order to solve at least one of the technical problems in the prior art, an embodiment of the present invention provides an integrated angular velocity sensor and a signal fusion method thereof to reduce the uncertainty of angular velocity measurement.

[0005] The present invention provides a signal fusion method based on an integrated angular velocity sensor. The integrated angular velocity sensor includes an angular velocity sensor based on magnetohydrodynamics and a gyroscope coaxially installed with the angular velocity sensor, and a signal fusion circuit. The signal fusion circuit is electrically connected to the angular velocity sensor and the gyroscope. A processor is provided on the signal fusion circuit. A plurality of candidate bandpass filters and comparators are provided in the processor. The signal fusion method is applied to the signal fusion circuit. The signal fusion method includes: using the angular velocity sensor and the gyroscope to collect an unknown angular velocity signal input from the outside to obtain a first output voltage of the angular velocity sensor and a second output voltage of the gyroscope; inputting the first output voltage and the second output voltage into the angular velocity sensor; and The processor outputs the first angular velocity signal of the angular velocity sensor and the second angular velocity signal of the gyroscope respectively; superimposes the first angular velocity signal and the second angular velocity signal to obtain a superimposed angular velocity signal; inputs the superimposed angular velocity signal into the plurality of candidate band-pass filters to obtain gains corresponding to the plurality of candidate band-pass filters respectively; compares the plurality of gains with each other using the comparator, and determines the candidate band-pass filter corresponding to the largest gain among the plurality of gains as the target band-pass filter; processes the superimposed angular velocity signal using the target band-pass filter, and based on the frequency band of the filtered superimposed angular velocity signal, selects a fusion algorithm that matches the frequency band of the superimposed angular velocity signal to perform fusion to obtain a fused signal.

[0006] Optionally, the above-mentioned inputting the above-mentioned first output voltage and the above-mentioned second output voltage into the above-mentioned processor to respectively output the first angular velocity signal of the above-mentioned angular velocity sensor and the second angular velocity signal of the above-mentioned gyroscope includes: inputting the above-mentioned unknown angular velocity signal into the above-mentioned processor to determine the first scale factor of the above-mentioned angular velocity sensor and the second scale factor of the above-mentioned gyroscope; inputting the above-mentioned first output voltage and the above-mentioned first scale factor into the above-mentioned processor to calculate the above-mentioned first angular velocity signal; inputting the above-mentioned second output voltage and the above-mentioned second scale factor into the above-mentioned processor to calculate the above-mentioned second angular velocity signal.

[0007] Optionally, the candidate bandpass filter is constructed based on the first cutoff frequency of the angular velocity sensor, the second cutoff frequency of the gyroscope, and the intersection frequency point between the first cutoff frequency and the second cutoff frequency, and the intersection frequency point serves as the center frequency of the candidate bandpass filter, and the center frequencies of the multiple candidate bandpass filters are different.

[0008] Optionally, the above-mentioned inputting the superimposed angular velocity signal into the multiple candidate band-pass filters to respectively obtain gains corresponding to the multiple candidate band-pass filters includes: inputting the above-mentioned superimposed angular velocity signal into the multiple candidate band-pass filters, and calculating the root mean square value through multiple sliding windows corresponding to the multiple candidate band-pass filters respectively, to respectively obtain gains corresponding to the multiple candidate band-pass filters.

[0009] Optionally, the above-mentioned superimposed angular velocity signal is processed by the above-mentioned target band-pass filter, and based on the frequency band where the above-mentioned superimposed angular velocity signal after filtering is located, a fusion algorithm matching the frequency band where the above-mentioned superimposed angular velocity signal is located is selected for fusion, and the fusion signal obtained includes: when the above-mentioned superimposed angular velocity signal after filtering is in the frequency band of 0.1Hz~1Hz, Kalman filtering is selected for fusion to obtain the above-mentioned fusion signal; when the above-mentioned superimposed angular velocity signal after filtering is in the frequency band of 1Hz~20Hz, adaptive Kalman filtering is selected for fusion to obtain the above-mentioned fusion signal; when the above-mentioned superimposed angular velocity signal after filtering is in the frequency band of 20Hz~1000Hz, complementary filtering is selected for fusion to obtain the above-mentioned fusion signal.

[0010] Optionally, the transfer function of the angular velocity sensor and the transfer function of the gyroscope are constructed by the following steps: testing multiple scale factors and multiple phase information of the angular velocity sensor and the gyroscope at different frequencies respectively; using a model fitting function, based on the multiple scale factors and multiple phase information of the angular velocity sensor and the multiple scale factors and multiple phase information of the gyroscope, respectively obtaining the transfer function of the angular velocity sensor and the transfer function of the gyroscope.

[0011] According to an embodiment of another aspect of the present invention, there is also provided an integrated angular velocity sensor for implementing the above-mentioned signal fusion method based on the integrated angular velocity sensor, wherein the above-mentioned integrated angular velocity sensor comprises: a shell; a cylinder, installed in the above-mentioned shell; an angular velocity sensor based on magnetohydrodynamics, installed in the above-mentioned cylinder, wherein the above-mentioned angular velocity sensor is configured to output a first output voltage in response to a signal of unknown angular velocity input from the outside; a gyroscope, installed above the above-mentioned angular velocity sensor and coaxially arranged with the above-mentioned angular velocity sensor, wherein the above-mentioned gyroscope is configured to output a second output voltage in response to the signal of unknown angular velocity; a signal fusion circuit, installed above the above-mentioned gyroscope and electrically connected to the above-mentioned angular velocity sensor and the above-mentioned gyroscope, wherein the above-mentioned signal fusion circuit is configured to obtain a fusion signal based on the above-mentioned first output voltage and the above-mentioned second output voltage.

[0012] Optionally, the signal fusion circuit includes: a signal acquisition unit electrically connected to the angular velocity sensor and the gyroscope, the signal acquisition unit being configured to acquire the first output voltage and the second output voltage; a processor including: a first signal processing unit electrically connected to the signal acquisition unit, the first signal processing unit being configured to output the first angular velocity signal of the angular velocity sensor and the second angular velocity signal of the gyroscope respectively based on the first output voltage and the second output voltage; a second signal processing unit electrically connected to the first signal processing unit, the second signal processing unit being configured to superimpose the first angular velocity signal and the second angular velocity signal to obtain a superimposed angular velocity signal, and superimpose the superimposed angular velocity signal. The angular velocity signal is input into multiple candidate band-pass filters to obtain gains corresponding to the multiple candidate band-pass filters respectively; a third signal processing unit is electrically connected to the second signal processing unit, and the third signal processing unit is configured to use a comparator to compare the multiple gains with each other, and determine the candidate band-pass filter corresponding to the largest gain among the multiple gains as the target band-pass filter; a signal output unit is electrically connected to the third signal processing unit, and the signal output unit is configured to use the target band-pass filter to process the superimposed angular velocity signal, and based on the frequency band of the filtered superimposed angular velocity signal, select a fusion algorithm that matches the frequency band of the superimposed angular velocity signal to perform fusion to obtain a fused signal.

[0013] Optionally, the integrated angular velocity sensor further includes: a signal detection circuit installed in the above-mentioned cylinder and located above the above-mentioned angular velocity sensor, and the above-mentioned signal detection circuit is configured to amplify the above-mentioned first output voltage output by the above-mentioned angular velocity sensor.

[0014] According to an embodiment of another aspect of the present invention, a system for measuring angular velocity is provided, comprising: a vibration isolation table fixed on the ground; an angular vibration table disposed on the vibration isolation table, the angular vibration table being configured to generate angular vibration in response to a control signal issued by a controller; an integrated angular velocity sensor disposed on the angular vibration table, the integrated angular velocity sensor being configured to obtain a fused signal by executing the signal fusion method based on the angular vibration; a controller disposed on the ground and electrically connected to the angular vibration table and the integrated angular velocity sensor, the controller being configured to obtain the fused signal and compare the fused signal with the angular velocity of the angular vibration generated by the angular vibration table, thereby performing error analysis.

[0015] According to an embodiment of the present invention, an integrated angular velocity sensor and a signal fusion method thereof, the integrated angular velocity sensor includes an angular velocity sensor based on magnetohydrodynamics and a gyroscope coaxially installed with the angular velocity sensor, and a signal fusion circuit, which reduces the signal transmission loop area and avoids the introduction of external noise interference. The signal fusion circuit is electrically connected to the angular velocity sensor and the gyroscope, and a processor is provided on the signal fusion circuit. The processor is provided with a plurality of candidate bandpass filters and comparators. The signal fusion method is applied to the signal fusion circuit, and the angular velocity sensor and the gyroscope are used to collect an unknown angular velocity signal input from the outside to obtain a first output voltage of the angular velocity sensor and a second output voltage of the gyroscope. The first output voltage and the second output voltage are input into the processor to output the angular velocity signals respectively. The first angular velocity signal of the angular velocity sensor and the second angular velocity signal of the gyroscope are superimposed to obtain a superimposed angular velocity signal, and the superimposed angular velocity signal is input into multiple candidate band-pass filters to obtain gains corresponding to the multiple candidate band-pass filters respectively, and the multiple gains are compared with each other by a comparator, and the candidate band-pass filter corresponding to the largest gain among the multiple gains is determined as a target band-pass filter, and the superimposed angular velocity signal is processed by the target band-pass filter, and based on the frequency band where the superimposed angular velocity signal after filtering is located, a fusion algorithm matching the frequency band where the superimposed angular velocity signal is located is selected for fusion to obtain a fused signal, and a suitable fusion algorithm is adaptively selected for signal fusion in multiple frequency bands, thereby reducing the uncertainty of angular velocity measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a flow chart of a signal fusion method based on an integrated angular velocity sensor according to an embodiment of the present invention;

[0017] Figure 2 is a software simulation diagram of a signal fusion method based on an integrated angular velocity sensor according to an embodiment of the present invention;

[0018] Figure 3 is a three-dimensional cross-sectional view of an MHD angular velocity sensor according to an embodiment of the present invention;

[0019] Figure 4 is an amplitude frequency response curve diagram of an MHD angular velocity sensor and a gyroscope according to an embodiment of the present invention;

[0020] Figure 5 is a frequency response curve diagram of three candidate bandpass filters according to an embodiment of the present invention;

[0021] Figure 6 is a flowchart of sub-steps of outputting a first angular velocity signal of an MHD angular velocity sensor and a second angular velocity signal of a gyroscope according to an embodiment of the present invention;

[0022] Figure 7 is a block diagram of frequency band estimation according to an embodiment of the present invention;

[0023] Figure 8 is a cross-sectional view of an integrated angular velocity sensor according to an embodiment of the present invention;

[0024] Fig. 9 is a block diagram of a signal fusion circuit according to an embodiment of the present invention;

[0025] Fig.10 is a block diagram of a signal detection circuit according to an embodiment of the present invention;

[0026] Fig.11 FIG. 4 is a schematic diagram of a system for measuring angular velocity according to an embodiment of the present invention.

[0027] In the drawings, the meanings of the reference numerals are as follows:

[0028] 1. Shell;

[0029] 2. Cylinder;

[0030] 3. MHD angular velocity sensor;

[0031] 31. Top cover;

[0032] 32. Shell;

[0033] 33. End cap;

[0034] 34. Intermediate bushing;

[0035] 35. Inner insulation layer;

[0036] 36. Outer insulation layer;

[0037] 37. First pad;

[0038] 38. Second pad;

[0039] 39. Conductive fluid;

[0040] 310. Permanent magnet;

[0041] 311. a first electrode;

[0042] 312, a second electrode;

[0043] 4. Gyroscope;

[0044] 5. Packaging circuit boards;

[0045] 6. Signal detection circuit;

[0046] 7. Signal fusion circuit;

[0047] 8. Wire;

[0048] 9. Conductive column;

[0049] 10. Connectors;

[0050] 11. Preamplifier circuit;

[0051] 12. Low-pass filter circuit;

[0052] 13. Single-ended to differential circuit;

[0053] 14. AC coupling circuit;

[0054] 15. Threaded hole;

[0055] 16. Integrated angular velocity sensor;

[0056] 17. Angular vibration table;

[0057] 18. Vibration isolation table;

[0058] 19. Controller;

[0059] 20. Platform. DETAILED DESCRIPTION

[0060] Below, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present invention. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of embodiments of the present invention. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known structures and technologies are omitted to avoid unnecessary confusion of concepts of the present invention.

[0061] The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. The terms "comprise", "include", etc. used herein indicate the existence of the features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0062] All terms (including technical and scientific terms) used herein have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0063] In the case of using expressions such as "at least one of A, B, and C, etc.", it should generally be interpreted in accordance with the meaning of the expression generally understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.). In the case of using expressions such as "at least one of A, B, or C, etc.", it should generally be interpreted in accordance with the meaning of the expression generally understood by those skilled in the art (for example, "a system having at least one of A, B, or C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0064] In order to solve the problems of low integration of angular velocity sensor and gyroscope installed separately, large signal transmission loop area, easy introduction of external noise interference, and uncertainty in angular velocity measurement after signal fusion, according to the inventive concept of one aspect of the present invention, an integrated angular velocity sensor includes an angular velocity sensor based on magnetohydrodynamics and a gyroscope installed coaxially with the angular velocity sensor, and a signal fusion circuit, which reduces the signal transmission loop area and avoids the introduction of external noise interference. The signal fusion circuit is electrically connected to the angular velocity sensor and the gyroscope, and a processor is provided on the signal fusion circuit. The processor is provided with multiple candidate bandpass filters and comparators. A signal fusion method is applied to the signal fusion circuit, and the angular velocity sensor and the gyroscope are used to collect an unknown angular velocity signal input from the outside to obtain a first output voltage of the angular velocity sensor and a second output voltage of the gyroscope. The first output voltage and the second output voltage are input to a processor, which outputs a first angular velocity signal of the angular velocity sensor and a second angular velocity signal of the gyroscope respectively, superimposes the first angular velocity signal and the second angular velocity signal to obtain a superimposed angular velocity signal, inputs the superimposed angular velocity signal into a plurality of candidate band-pass filters, obtains gains corresponding to the plurality of candidate band-pass filters respectively, compares the plurality of gains with each other using a comparator, determines the candidate band-pass filter corresponding to the largest gain among the plurality of gains as a target band-pass filter, processes the superimposed angular velocity signal using the target band-pass filter, and based on the frequency band where the filtered superimposed angular velocity signal is located, selects a fusion algorithm that matches the frequency band where the superimposed angular velocity signal is located to perform fusion to obtain a fused signal, and adaptively selects a suitable fusion algorithm for signal fusion in a plurality of frequency bands, thereby reducing the uncertainty of angular velocity measurement.

[0065] Figure 1 is a flow chart of a signal fusion method based on an integrated angular velocity sensor according to an embodiment of the present invention. Figure 8 is a cross-sectional view of an integrated angular velocity sensor according to an embodiment of the present invention.

[0066] According to an embodiment of the present invention, a signal fusion method based on an integrated angular velocity sensor is provided. Figure 8 As shown, the integrated angular velocity sensor 16 includes an angular velocity sensor based on magnetohydrodynamics (MHD angular velocity sensor 3), a gyroscope 4 coaxially mounted with the MHD angular velocity sensor 3, and a signal fusion circuit 7. The signal fusion circuit 7 is electrically connected to the MHD angular velocity sensor 3 and the gyroscope 4. The signal fusion circuit 7 is provided with a processor, and the processor is provided with a plurality of candidate bandpass filters and comparators. The signal fusion method is applied to the signal fusion circuit 7, as shown in FIG. Figure 1 As shown, the signal fusion method includes the following steps S1 to S6.

[0067] Step S1 : using the MHD angular velocity sensor 3 and the gyroscope 4 to collect an externally inputted signal with unknown angular velocity, so as to obtain a first output voltage of the MHD angular velocity sensor 3 and a second output voltage of the gyroscope 4 .

[0068] Step S2: input the first output voltage and the second output voltage into the processor, and output the first angular velocity signal of the MHD angular velocity sensor 3 and the second angular velocity signal of the gyroscope 4 respectively.

[0069] Step S3: superimpose the first angular velocity signal and the second angular velocity signal to obtain a superimposed angular velocity signal.

[0070] Step S4: inputting the superimposed angular velocity signal into a plurality of candidate band-pass filters to obtain gains corresponding to the plurality of candidate band-pass filters respectively.

[0071] Step S5: using a comparator to compare the multiple gains with each other, and determining the candidate band-pass filter corresponding to the largest gain among the multiple gains as the target band-pass filter.

[0072] Step S6: Process the superimposed angular velocity signal using the target bandpass filter, and based on the frequency band of the filtered superimposed angular velocity signal, select a fusion algorithm that matches the frequency band of the superimposed angular velocity signal to perform fusion to obtain a fused signal.

[0073] Figure 2 It is a software simulation diagram of a signal fusion method based on an integrated angular velocity sensor according to an embodiment of the present invention.

[0074] According to an embodiment of the present invention, Figure 2 As shown, first, the software simulates the turntable to generate a rotation signal (angular velocity is unknown), the MHD angular velocity sensor 3 and the gyroscope 4 simultaneously collect the rotation signal and superimpose it to obtain a superimposed angular velocity signal, and the superimposed angular velocity signal is respectively input into multiple bandpass filters (such as Figure 2The bandpass filter 1, bandpass filter 2 and bandpass filter 3 in the filter are processed and the processed multiple signals are input to the comparator to compare the maximum gain signal, that is, the output signal of the bandpass filter with the maximum gain. The signal of the corresponding frequency band is input to the input port of the corresponding fusion algorithm through the fusion selector. When the superimposed angular velocity signal after filtering is in the frequency band of 0.1Hz~1Hz (low frequency band), Kalman filtering is selected for fusion. When the superimposed angular velocity signal after filtering is in the frequency band of 1Hz~20Hz (medium frequency band), adaptive Kalman filtering is selected for fusion. When the superimposed angular velocity signal after filtering is in the frequency band of 20Hz~1000Hz (high frequency band), complementary filtering is selected for fusion, and it is fused with the input signal of MHD angular velocity sensor 3 and the input signal of gyroscope 4, and the fused signal is output to the oscilloscope for observation.

[0075] Figure 3 FIG. 4 is a perspective cross-sectional view of an MHD angular velocity sensor according to an embodiment of the present invention.

[0076] According to an embodiment of the present invention, Figure 3As shown, the MHD angular velocity sensor 3 includes a top cover 31, a housing 32, an end cover 33, an intermediate sleeve 34, an inner insulating layer 35, an outer insulating layer 36, a first pad 37, a second pad 38, a conductive fluid 39, a permanent magnet 310, a first electrode 311, and a second electrode 312. The permanent magnet 310 is a radially magnetized annular structure, which is used to provide a static magnetic field required for the normal operation of the MHD angular velocity sensor 3. The inner insulating layer 35 is arranged outside the permanent magnet 310, and the cross section of the inner insulating layer 35 is L-shaped. The permanent magnet 310 is embedded in the groove of the outer wall of the inner insulating layer 35. The first electrode 311 is an annular structure, and the upper end surface of the first electrode 311 is flush with the upper end surface of the inner insulating layer 35. A through hole is opened on the first electrode 311, and the through hole is used to realize the filling of the conductive fluid 39. The inner wall surface of the first electrode 311 and the outer wall surface of the inner insulating layer 35 are fixed by gluing. The outer insulating layer 36 is arranged on the outer side of the first electrode 311, the upper end surface of the outer insulating layer 36 is flush with the upper end surface of the inner insulating layer 35, the outer wall surface of the first electrode 311 and the inner wall surface of the outer insulating layer 36 are fixed by gluing, the outer side of the outer insulating layer 36 is provided with a stepped groove, and the outer wall surface of the first electrode 311 and the inner wall surface of the outer insulating layer 36 are fixed by gluing. The second electrode 312 is an annular structure, embedded in the stepped hole on the outer side of the outer insulating layer 36, the outer wall surface of the second electrode 312 and the inner wall surface of the outer insulating layer 36 are fixed by gluing, and the inner wall surface of the second electrode 312 and the outer wall surface of the inner insulating layer 35 are fixed by gluing. The conductive fluid 39 is poured into the annular closed cavity formed by the inner insulating layer 35, the outer insulating layer 36, the first electrode 311, and the second electrode 312 through the through hole on the first electrode 311. The intermediate sleeve 34 is arranged on the inner side of the permanent magnet 310, and the outer wall surface of the intermediate sleeve 34 is transitionally matched with the inner wall surface of the permanent magnet 310. The material of the intermediate sleeve 34 is a soft magnetic alloy. The top cover 31, the outer shell 32 and the end cover 33 are arranged on the outermost side of the angular velocity sensor, and the material is a soft magnetic alloy, and they form a closed magnetic circuit with the intermediate sleeve 34. Four threaded holes (not shown in the figure) are opened on the top cover 31, and the first pad 37 and the second pad 38 are used to fix the components inside the MHD angular velocity sensor 3.

[0077] According to an embodiment of the present invention, when the carrier of the MHD angular velocity sensor 3 rotates, the conductive fluid 39 remains relatively still with the inertial space due to fluidity and inertia, and forms a relative flow velocity with the rotating magnetic flux generated by the permanent magnet 310, thereby inducing a motional electromotive force proportional to the input angular velocity between the first electrode 311 and the second electrode 312.

[0078] According to the embodiment of the present invention, after the design of the MHD angular velocity sensor 3 is completed, a multi-physical field coupling analysis method is used to perform simulation analysis to verify its design indicators. First, a magnetic field simulation based on MAXWELL is performed, the three-dimensional structure of the MHD angular velocity sensor 3 is imported into MAXWELL, the balloon boundary conditions are set, no current and voltage excitation sources are added, and the tetrahedron grid is used for meshing to solve the magnetic field distribution inside the MHD angular velocity sensor 3. Then, a magnetic field, flow field, and electric field coupling simulation based on FLUENT is performed, the upper and lower walls of the fluid channel are set to be conductive, the inner and outer walls are insulated, and they remain stationary with the relative rotating coordinate system. A custom function is used to simulate the sensitive sinusoidal motion of the MHD angular velocity sensor 3 in actual work, and the weak voltage signal output by the MHD angular velocity sensor 3 is solved, and the output frequency response characteristics of the MHD angular velocity sensor 3 are further obtained to verify the design results.

[0079] According to an embodiment of the present invention, based on the low-frequency error modeling of the MHD angular velocity sensor 3 and comprehensive consideration of various factors such as measurement bandwidth, output amplitude, sensor volume, magnetic field interference, temperature compensation, noise suppression, etc., the selection is completed, and the gyroscope 4 is used to complete the low-frequency measurement compensation of the MHD angular velocity sensor 3.

[0080] According to an embodiment of the present invention, the integrated angular velocity sensor 16 includes an MHD angular velocity sensor 3 and a gyroscope 4 coaxially installed with the MHD angular velocity sensor 3, and a signal fusion circuit 7, which reduces the signal transmission loop area and avoids the introduction of external noise interference. The signal fusion circuit 7 is electrically connected to the MHD angular velocity sensor 3 and the gyroscope 4. A processor is provided on the signal fusion circuit 7. The processor is provided with a plurality of candidate bandpass filters and comparators. A signal fusion method is applied to the signal fusion circuit 7. The MHD angular velocity sensor 3 and the gyroscope 4 are used to collect an unknown angular velocity signal input from the outside to obtain a first output voltage of the MHD angular velocity sensor 3 and a second output voltage of the gyroscope 4. The first output voltage and the second output voltage are input into the processor to output the MHD angular velocity signal, respectively. The first angular velocity signal of the velocity sensor 3 and the second angular velocity signal of the gyroscope 4 are superimposed to obtain a superimposed angular velocity signal, and the superimposed angular velocity signal is input into multiple candidate band-pass filters to obtain gains corresponding to the multiple candidate band-pass filters respectively, and the multiple gains are compared with each other by a comparator, and the candidate band-pass filter corresponding to the largest gain among the multiple gains is determined as the target band-pass filter, and the superimposed angular velocity signal is processed by the target band-pass filter, and based on the frequency band of the superimposed angular velocity signal after filtering, a fusion algorithm matching the frequency band of the superimposed angular velocity signal is selected for fusion to obtain a fused signal, and multiple frequency bands adaptively select appropriate fusion algorithms for signal fusion, thereby reducing the uncertainty of angular velocity measurement.

[0081] According to an embodiment of the present invention, the transfer function of the MHD angular velocity sensor 3 and the transfer function of the gyroscope 4 are constructed by the following steps: first, multiple scale factors and multiple phase information of the MHD angular velocity sensor 3 and the gyroscope 4 are tested respectively at different frequencies. Then, based on the multiple scale factors and multiple phase information of the MHD angular velocity sensor 3 and the multiple scale factors and multiple phase information of the gyroscope 4, the transfer function of the MHD angular velocity sensor 3 and the transfer function of the gyroscope 4 are obtained respectively by using a model fitting function.

[0082] According to an embodiment of the present invention, multiple scale factors and multiple phase information of the MHD angular velocity sensor 3 and the gyroscope 4 at different frequencies are tested experimentally, and then the transfer function G of the MHD angular velocity sensor 3 is obtained based on the multiple scale factors and multiple phase information of the MHD angular velocity sensor 3 and the multiple scale factors and multiple phase information of the gyroscope 4 by using the model fitting function. MHD (s) and the transfer function G of the gyroscope 4 MEMS (s). According to the transfer function G of the MHD angular velocity sensor 3 MHD (s) and the transfer function G of the gyroscope 4 MEMS (s) Draw an amplitude frequency response curve and establish the mathematical model of the MHD angular velocity sensor 3 and the mathematical model of the gyroscope 4.

[0083] According to an embodiment of the present invention, the transfer function G of the MHD angular velocity sensor 3 is constructed by using multiple scale factors and multiple phase information of the MHD angular velocity sensor 3 and multiple scale factors and multiple phase information of the gyroscope 4. MHD (s) and the transfer function G of the gyroscope 4 MEMS (s) so as to facilitate the subsequent call when the scale factor of the MHD angular velocity sensor 3 is unified with the scale factor of the gyroscope 4.

[0084] According to an embodiment of the present invention, a candidate bandpass filter is constructed based on the first cutoff frequency of the MHD angular velocity sensor 3, the second cutoff frequency of the gyroscope 4, and the intersection frequency point between the first cutoff frequency and the second cutoff frequency. The intersection frequency point serves as the center frequency of the candidate bandpass filter, and the center frequencies of multiple candidate bandpass filters are different.

[0085] Figure 4 is an amplitude frequency response curve diagram of an MHD angular velocity sensor and a gyroscope according to an embodiment of the present invention, Figure 5 is a frequency response curve diagram of three candidate bandpass filters according to an embodiment of the present invention.

[0086] According to an embodiment of the present invention, Figure 4 As shown, Figure 4 The middle curve A is the amplitude frequency response curve of the MHD angular velocity sensor 3. Figure 4 Curve B in the middle is the amplitude frequency response curve of the gyroscope 4. The -3dB value of the amplitude frequency response curve is used as the cutoff frequency of the MHD angular velocity sensor 3 and the gyroscope 4. Then, three candidate band-pass filters (BPF1, BPF2 and BPF3) are established based on the first cutoff frequency of the MHD angular velocity sensor 3 (the first cutoff frequency is the low-frequency cutoff frequency), the second cutoff frequency of the gyroscope 4 (the second cutoff frequency is the high-frequency cutoff frequency) and the intersection frequency point of the MHD angular velocity sensor 3 and the gyroscope 4 as the center frequency. Figure 5 As shown, Figure 5 The middle curve BPF1 is a first candidate bandpass filter (BPF1) established according to the first cutoff frequency of the MHD angular velocity sensor 3. Figure 5 The middle curve BPF2 is a second candidate bandpass filter (BPF2) established according to the second cutoff frequency of the gyroscope 4. Figure 5 The middle curve BPF3 is a third candidate bandpass filter (BPF3) established based on the intersection frequency point of the MHD angular velocity sensor 3 and the gyroscope 4 as the center frequency. The first scale factor k of the MHD angular velocity sensor 3 at a frequency of 10 Hz is obtained and recorded through experimental testing. MHD and the second scale factor k of the gyroscope 4 at a frequency of 0.1 Hz MEMS .

[0087] According to an embodiment of the present invention, the MHD angular velocity sensor 3 is used to measure high-frequency angular vibration information, the gyroscope 4 is used to measure low-frequency angular vibration information, and the gyroscope 4 is used to complete the low-frequency measurement compensation of the MHD angular velocity sensor 3, so that the integrated angular velocity sensor 16 can achieve wide-band angular velocity measurement of 0.1 Hz to 1 kHz.

[0088] Figure 6 is a flowchart of sub-steps of outputting a first angular velocity signal of an MHD angular velocity sensor and a second angular velocity signal of a gyroscope according to an embodiment of the present invention, Figure 7 is a block diagram of frequency band estimation according to an embodiment of the present invention.

[0089] According to an embodiment of the present invention, Figure 6 As shown, the process includes the following steps S21 to S23.

[0090] Step S21 : Inputting the signal with unknown angular velocity into the processor to determine the first scale factor of the MHD angular velocity sensor 3 and the second scale factor of the gyroscope 4 .

[0091] According to an embodiment of the present invention, the first scaling factor is the first scaling factor k of the MHD angular velocity sensor 3 at a frequency of 10 Hz of the constructed mathematical model of the MHD angular velocity sensor 3. MHD , the second scale factor is the second scale factor k of the gyroscope 4 at a frequency of 0.1 Hz of the mathematical model of the constructed gyroscope 4 MEMS .

[0092] Step S22: inputting the first output voltage and the first scaling factor into a processor to calculate and obtain a first angular velocity signal.

[0093] According to an embodiment of the present invention, Figure 7 As shown, the MHD angular velocity sensor 3 is used to collect an unknown angular velocity signal input from the outside to obtain a first output voltage U of the MHD angular velocity sensor 3. MHD , the first output voltage U MHD Divide by the first scaling factor k MHD , get the first angular velocity signal ω MHD .

[0094] Step S23: inputting the second output voltage and the second scaling factor into the processor to calculate and obtain a second angular velocity signal.

[0095] According to an embodiment of the present invention, Figure 7 As shown, the gyroscope 4 is used to collect the unknown angular velocity signal input from the outside to obtain the second output voltage U of the gyroscope 4. MEMS , the second output voltage U MEMS Divide by the second scaling factor k MEMS , and get the second angular velocity signal ω MEMS .

[0096] According to the embodiment of the present invention, the scale factor of the MHD angular velocity sensor 3 is unified with the scale factor of the gyroscope 4 by dividing the first output voltage by the first scale factor and the second output voltage by the second scale factor.

[0097] According to an embodiment of the present invention, the superimposed angular velocity signal is input into a plurality of candidate bandpass filters, and gains corresponding to the plurality of candidate bandpass filters are obtained respectively, including: the superimposed angular velocity signal is input into a plurality of candidate bandpass filters, and the root mean square value is calculated through a plurality of sliding windows corresponding to the plurality of candidate bandpass filters respectively, so as to obtain gains corresponding to the plurality of candidate bandpass filters respectively.

[0098] According to an embodiment of the present invention, Figure 7 As shown, the first angular velocity signal ω MHD and the second angular velocity signal ω MEMSThe superposition is performed to obtain a superimposed angular velocity signal, which is input into three candidate band-pass filters (BPF1, BPF2 and BPF3), and the root mean square value is calculated through three sliding windows corresponding to the three candidate band-pass filters, respectively, to obtain the gains corresponding to the three candidate band-pass filters, and the three gains are input into a comparator for judgment and comparison, and the candidate band-pass filter corresponding to the largest gain among the three gains is determined as the target band-pass filter, thereby completing the frequency band estimation.

[0099] According to an embodiment of the present invention, a target bandpass filter is used to process a superimposed angular velocity signal, and based on a frequency band where the filtered superimposed angular velocity signal is located, a fusion algorithm matching the frequency band where the superimposed angular velocity signal is located is selected for fusion to obtain a fused signal, including: when the filtered superimposed angular velocity signal is in a frequency band of 0.1 Hz to 1 Hz, a Kalman filter is selected for fusion to obtain a fused signal; when the filtered superimposed angular velocity signal is in a frequency band of 1 Hz to 20 Hz, an adaptive Kalman filter is selected for fusion to obtain a fused signal; when the filtered superimposed angular velocity signal is in a frequency band of 20 Hz to 1000 Hz, a complementary filter is selected for fusion to obtain a fused signal.

[0100] According to an embodiment of the present invention, when the frequency band estimates that the superimposed angular velocity signal after filtering is within the frequency band of 0.1Hz~1Hz (low frequency band), Kalman filtering is selected for fusion, which can achieve a better signal fusion effect. When the frequency band estimates that the superimposed angular velocity signal after filtering is within the frequency band of 1Hz~20Hz (medium frequency band), adaptive Kalman filtering is selected for fusion, which can achieve a better signal fusion effect. When the frequency band estimates that the superimposed angular velocity signal after filtering is within the frequency band of 20Hz~1000Hz (high frequency band), complementary filtering is selected for fusion, which can achieve a better signal fusion effect. Introducing frequency band estimation, estimating the frequency band in which the superimposed angular velocity signal is located, and adaptively selecting a suitable fusion algorithm for signal fusion, it is possible to achieve wideband angular velocity measurement from 0.1Hz to 1kHz, reducing the uncertainty of angular velocity measurement.

[0101] According to another embodiment of the present invention, Figure 8As shown, an integrated angular velocity sensor 16 is provided for realizing the above-mentioned signal fusion method based on the integrated angular velocity sensor. The integrated angular velocity sensor 16 includes a housing 1, a barrel 2, an MHD angular velocity sensor 3, a gyroscope 4 and a signal fusion circuit 7. The barrel 2 is installed in the housing 1. The MHD angular velocity sensor 3 is installed in the barrel 2, and the MHD angular velocity sensor 3 is configured to output a first output voltage in response to a signal of unknown angular velocity input from the outside. The gyroscope 4 is installed above the MHD angular velocity sensor 3 and is coaxially arranged with the MHD angular velocity sensor 3 (the axis direction of the integrated angular velocity sensor 16 is Figure 8 The gyroscope 4 is configured to output a second output voltage in response to a signal of unknown angular velocity. The signal fusion circuit 7 is installed above the gyroscope 4 and is electrically connected to the MHD angular velocity sensor 3 and the gyroscope 4. The signal fusion circuit 7 is configured to obtain a fusion signal based on the first output voltage and the second output voltage.

[0102] According to an embodiment of the present invention, the threaded hole 15 at the bottom of the housing 1 is used when the integrated angular velocity sensor 16 is fixed on the angular vibration table, the cylinder 2 is fixed to the bottom of the housing 1 by threaded connection, and the MHD angular velocity sensor 3 is installed in the cylinder 2. Figure 3 and Figure 8 As shown, the end cap 33 and the housing 32 of the MHD angular velocity sensor 3 are also fixed by threaded connection to ensure that the magnetic fluid structure maintains stability.

[0103] According to an embodiment of the present invention, in order to reduce the volume of the integrated angular velocity sensor 16, the gyroscope 4 uses a chip-type MEMS gyroscope to complete low-frequency angular velocity measurement. The chip-type MEMS gyroscope model is MGZ33X. The chip-type MEMS gyroscope is a 48-pin ceramic package of 11×11×1.65mm. The detection rotation axis is perpendicular to the chip surface. The counterclockwise rotation along the rotation axis is the positive direction, and the clockwise rotation along the rotation axis is the negative direction. After the chip-type MEMS gyroscope is welded to the package circuit board 5, it is fixed to the top of the cylinder 2 through the conductive column 9. The material of the conductive column 9 can be copper. One side of the signal fusion circuit 7 is fixed to the top of the chip-type MEMS gyroscope through the conductive column 9, and the other side of the signal fusion circuit 7 is fixed to the bottom of the top of the housing 1 through the conductive column 9 and the threaded connection to ensure that the sensitive axis of the MHD angular velocity sensor 3, the sensitive axis of the chip-type MEMS gyroscope, and the center line of the integrated angular velocity sensor 16 are collinear.

[0104] According to an embodiment of the present invention, a hole is provided on the barrel 2, and the hole is used to install a connector 10. The MHD angular velocity sensor 3 is electrically connected to the connector 10 on the barrel 2 through a wire 8, and the connector 10 on the barrel 2 is electrically connected to the signal fusion circuit 7 through a wire 8, so as to facilitate signal transmission between the MHD angular velocity sensor 3 and the signal fusion circuit 7. The chip-type MEMS gyroscope is electrically connected to the signal fusion circuit 7 through a wire 8, so as to facilitate signal transmission between the chip-type MEMS gyroscope and the signal fusion circuit 7. The signal fusion circuit 7 is electrically connected to the connector 10 on the housing 1 through a wire 8, so as to output a fusion signal. The connector 10 can also be led out as a power supply interface of the integrated angular velocity sensor 16.

[0105] According to an embodiment of the present invention, the signal fusion circuit 7 includes a signal acquisition unit and a processor. The signal acquisition unit is electrically connected to the MHD angular velocity sensor 3 and the gyroscope 4, and the signal acquisition unit is configured to acquire a first output voltage and a second output voltage. The processor includes a first signal processing unit, a second signal processing unit, a third signal processing unit and a signal output unit. The first signal processing unit is electrically connected to the signal acquisition unit, and the first signal processing unit is configured to output a first angular velocity signal of the MHD angular velocity sensor 3 and a second angular velocity signal of the gyroscope 4 based on the first output voltage and the second output voltage, respectively. The second signal processing unit is electrically connected to the first signal processing unit, and the second signal processing unit is configured to superimpose the first angular velocity signal and the second angular velocity signal to obtain a superimposed angular velocity signal, and input the superimposed angular velocity signal into a plurality of candidate bandpass filters, and obtain gains corresponding to the plurality of candidate bandpass filters, respectively. The third signal processing unit is electrically connected to the second signal processing unit, and the third signal processing unit is configured to compare the plurality of gains with each other using a comparator, and determine the candidate bandpass filter corresponding to the largest gain among the plurality of gains as the target bandpass filter. The signal output unit is electrically connected to the third signal processing unit. The signal output unit is configured to process the superimposed angular velocity signal using a target bandpass filter, and based on the frequency band of the filtered superimposed angular velocity signal, select a fusion algorithm that matches the frequency band of the superimposed angular velocity signal to perform fusion to obtain a fused signal.

[0106] Fig. 9 is a block diagram of a signal fusion circuit according to an embodiment of the present invention.

[0107] According to an embodiment of the present invention, Fig. 9 As shown, the signal acquisition unit uses two analog-to-digital conversion chips ADS1256 to realize the analog signal (the first output voltage U MHD ) and the analog signal of the gyroscope 4 (the second output voltage U MEMS) and sends it through SPI communication. The processor is implemented based on the FPGA chip EP4CE40F23C8N, and receives the first output voltage U sent by two ADS1256 chips through two SPI communications. MHD and the second output voltage U MEMS , multiple frequency bands adaptively select appropriate fusion algorithms to fuse signals, and send the fused signals through SPI communication. The signal output unit in the processor uses the digital-to-analog conversion chip DAC8552 to receive the digital signal sent by the third signal processing unit, and then feedback verifies the fused signal through the experimental test results of frequency response, noise, and drift in a wide frequency band. Finally, the fused signal Y (s) is converted into an analog signal output.

[0108] According to an embodiment of the present invention, the integrated angular velocity sensor 16 integrates the MHD angular velocity sensor 3, the gyroscope 4 and the signal fusion circuit 7, thereby reducing the signal transmission loop area and avoiding the introduction of external noise interference. The MHD angular velocity sensor 3 is used to measure high-frequency angular vibration information, and the gyroscope 4 is used to measure low-frequency angular vibration information. The gyroscope 4 is used to complete the low-frequency measurement compensation of the MHD angular velocity sensor 3, thereby realizing wide-band angular velocity measurement of 0.1 Hz to 1 kHz by a single sensor.

[0109] According to an embodiment of the present invention, Figure 8 As shown, the integrated angular velocity sensor 16 further includes a signal detection circuit 6. The signal detection circuit 6 is installed in the barrel 2 and located above the angular velocity sensor. The signal detection circuit 6 is configured to amplify the first output voltage output by the angular velocity sensor.

[0110] According to the embodiment of the present invention, the signal detection circuit 6 is connected between the top cover 31 of the MHD angular velocity sensor 3 and the top of the barrel 2 through the conductive column 9. The MHD angular velocity sensor 3 is electrically connected to the signal detection circuit 6 through the wire 8, and the signal detection circuit 6 is electrically connected to the connector 10 on the barrel 2 through the wire 8, so that the signal detection circuit 6 amplifies the first output voltage output by the MHD angular velocity sensor 3 and outputs it to the signal fusion circuit 7.

[0111] Fig.10 is a block diagram of a signal detection circuit according to an embodiment of the present invention.

[0112] According to an embodiment of the present invention, Fig.10As shown, the signal detection circuit 6 includes a preamplifier circuit 11 and a low-pass filter circuit 12. The preamplifier circuit 11 includes three bipolar transistors SSM-2220 connected in parallel and cascaded with an integrated operational amplifier OP27. The low-pass filter circuit 12 includes a second-order voltage-controlled voltage source low-pass filter circuit constructed by a low-noise integrated operational amplifier AD797. The signal detection circuit 6 also includes an AC coupling circuit 14 constructed using an integral feedback structure and a single-ended to differential circuit 13 constructed using a low-distortion operational amplifier, so as to realize the function of low-noise amplification preprocessing of the first output voltage output by the MHD angular velocity sensor 3.

[0113] According to an embodiment of the present invention, Figure 8 and Fig. 9 As shown, the signal fusion circuit 7 receives the analog signal output by the MHD angular velocity sensor 3 through the signal detection circuit 6 and the analog signal output by the gyroscope 4 through the wire 8, and converts the analog signal into a digital signal using the analog-to-digital conversion module in the signal acquisition unit to complete the signal acquisition, and sends it to the processor through SPI communication. The core of the processor is FPGA. The first signal processing unit in the processor receives two SPI communication data of the signal acquisition unit. The second signal processing unit and the third signal processing unit construct a frequency band estimation signal fusion algorithm to perform signal processing, and send the data to the signal output unit through SPI communication. The signal output unit receives the SPI communication data by a digital-to-analog converter and converts it into a differential signal to complete the output of the fusion signal.

[0114] According to the embodiment of the present invention, the integrated angular velocity sensor 16 can form a new generation of micro-angular vibration sensitive devices that meet the development needs of space exploration technology, provide data support for on-orbit spacecraft structural health monitoring and attitude control, and thus contribute to the innovative development of cutting-edge aerospace science and technology fields such as quantum communication, interstellar exploration, and lunar exploration.

[0115] Fig.11 FIG. 4 is a schematic diagram of a system for measuring angular velocity according to an embodiment of the present invention.

[0116] According to another embodiment of the present invention, Fig.11As shown, a system for measuring angular velocity is provided, and the system for measuring angular velocity includes a vibration isolation table 18, an angular vibration table 17, an integrated angular velocity sensor 16 and a controller 19. The vibration isolation table 18 is fixed on the ground. The angular vibration table 17 is arranged on the vibration isolation table 18, and the angular vibration table 17 is configured to generate angular vibration in response to a control signal sent by the controller 19. The integrated angular velocity sensor 16 is arranged on the angular vibration table 17, and the integrated angular velocity sensor 16 is configured to obtain a fusion signal by executing the above-mentioned signal fusion method based on the angular vibration. The controller 19 is arranged on the ground and is electrically connected to the angular vibration table 17 and the integrated angular velocity sensor 16. The controller 19 is configured to obtain a fusion signal, and compare the fusion signal with the angular velocity of the angular vibration generated by the angular vibration table 17, so as to perform error analysis.

[0117] According to the embodiment of the present invention, a platform 20 is arranged on the ground, a controller 19 is placed on the platform 20, and an angular vibration table 17 is arranged on a vibration isolation table 18, so that the ground, the angular vibration table 17 and the integrated angular velocity sensor 16 can be isolated, and the influence of ground vibration on the angular velocity of the angular vibration table 17 measured by the integrated angular velocity sensor 16 is reduced. The controller 19 controls the angular vibration table 17 arranged on the vibration isolation table 18 to generate angular vibration, and the integrated angular velocity sensor 16 arranged on the angular vibration table 17 measures the angular velocity of the angular vibration table 17 in real time by executing the above-mentioned signal fusion method to obtain a fusion signal, and transmits the fusion signal to the controller 19 through the connector 10 on the housing 1, and the controller 19 receives the fusion signal and compares the angular velocity information represented in the fusion signal with the angular velocity of the angular vibration generated by the angular vibration table 17 to verify the consistency of the waveform, thereby performing error analysis.

[0118] The embodiments of the present invention are described above. However, these embodiments are only for the purpose of illustration, and are not intended to limit the scope of the present invention. Although each embodiment is described above, it does not mean that the measures in each embodiment cannot be used in combination. The scope of the present invention is defined by the attached claims and their equivalents. Without departing from the scope of the present invention, those skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present invention.

Claims

1. A signal fusion method based on an integrated angular velocity sensor, characterized in that: The integrated angular velocity sensor includes an angular velocity sensor based on magnetohydrodynamics and a gyroscope coaxially mounted with the angular velocity sensor, and a signal fusion circuit, wherein the signal fusion circuit is electrically connected to the angular velocity sensor and the gyroscope, wherein a processor is provided on the signal fusion circuit, wherein a plurality of candidate bandpass filters and comparators are provided in the processor, and the signal fusion method is applied to the signal fusion circuit, and the signal fusion method includes: Using the angular velocity sensor and the gyroscope to collect an externally input signal with unknown angular velocity, so as to obtain a first output voltage of the angular velocity sensor and a second output voltage of the gyroscope; Inputting the first output voltage and the second output voltage into the processor, and outputting a first angular velocity signal of the angular velocity sensor and a second angular velocity signal of the gyroscope respectively; Superimposing the first angular velocity signal and the second angular velocity signal to obtain a superimposed angular velocity signal; Inputting the superimposed angular velocity signal into the plurality of candidate band-pass filters to obtain gains corresponding to the plurality of candidate band-pass filters respectively; Using the comparator to compare the multiple gains, and determining the candidate band-pass filter corresponding to the largest gain among the multiple gains as the target band-pass filter; The superimposed angular velocity signal is processed by using the target bandpass filter, and based on the frequency band of the filtered superimposed angular velocity signal, a fusion algorithm matching the frequency band of the superimposed angular velocity signal is selected for fusion to obtain a fused signal.

2. The signal fusion method according to claim 1, characterized in that: The step of inputting the first output voltage and the second output voltage into the processor to respectively output a first angular velocity signal of the angular velocity sensor and a second angular velocity signal of the gyroscope comprises: Inputting the unknown angular velocity signal into the processor to determine a first scale factor of the angular velocity sensor and a second scale factor of the gyroscope; Inputting the first output voltage and the first scale factor into the processor to calculate and obtain the first angular velocity signal; The second output voltage and the second scale factor are input into the processor to calculate and obtain the second angular velocity signal.

3. The signal fusion method according to claim 1, characterized in that: The candidate bandpass filter is constructed based on the first cutoff frequency of the angular velocity sensor, the second cutoff frequency of the gyroscope, and the intersection frequency point between the first cutoff frequency and the second cutoff frequency. The intersection frequency point serves as the center frequency of the candidate bandpass filter, and the center frequencies of the multiple candidate bandpass filters are different.

4. The signal fusion method according to claim 3, characterized in that: Inputting the superimposed angular velocity signal into the plurality of candidate bandpass filters to obtain gains corresponding to the plurality of candidate bandpass filters respectively comprises: The superimposed angular velocity signal is input into the plurality of candidate band-pass filters, and the root mean square value is calculated through a plurality of sliding windows respectively corresponding to the plurality of candidate band-pass filters, so as to obtain gains corresponding to the plurality of candidate band-pass filters respectively.

5. The signal fusion method according to claim 4, characterized in that: The step of processing the superimposed angular velocity signal by using the target bandpass filter and selecting a fusion algorithm matching the frequency band of the superimposed angular velocity signal to perform fusion based on the frequency band of the filtered superimposed angular velocity signal to obtain a fused signal comprises: When the filtered superimposed angular velocity signal is within a frequency band of 0.1 Hz to 1 Hz, Kalman filtering is selected for fusion to obtain the fused signal; When the filtered superimposed angular velocity signal is within a frequency band of 1 Hz to 20 Hz, an adaptive Kalman filter is selected for fusion to obtain the fused signal; When the filtered superimposed angular velocity signal is within the frequency band of 20 Hz to 1000 Hz, complementary filtering is selected for fusion to obtain the fused signal.

6. The signal fusion method according to claim 1, characterized in that: The transfer function of the angular velocity sensor and the transfer function of the gyroscope are constructed by the following steps: testing a plurality of scale factors and a plurality of phase information of the angular velocity sensor and the gyroscope at different frequencies respectively; The transfer function of the angular velocity sensor and the transfer function of the gyroscope are obtained respectively based on the multiple scale factors and multiple phase information of the angular velocity sensor and the multiple scale factors and multiple phase information of the gyroscope by using the model fitting function.

7. An integrated angular velocity sensor, characterized in that: Used to implement the signal fusion method based on the integrated angular velocity sensor according to any one of claims 1 to 6, the integrated angular velocity sensor comprising: case; A cylinder body, installed in the shell; An angular velocity sensor based on magnetohydrodynamics is installed in the barrel, and the angular velocity sensor is configured to output a first output voltage in response to an externally inputted signal of unknown angular velocity; a gyroscope mounted above the angular velocity sensor and coaxially disposed with the angular velocity sensor, the gyroscope being configured to output a second output voltage in response to the signal of unknown angular velocity; A signal fusion circuit is installed above the gyroscope and is electrically connected to the angular velocity sensor and the gyroscope. The signal fusion circuit is configured to obtain a fusion signal based on the first output voltage and the second output voltage.

8. The integrated angular velocity sensor according to claim 7, characterized in that: The signal fusion circuit comprises: a signal acquisition unit, electrically connected to the angular velocity sensor and the gyroscope, the signal acquisition unit being configured to acquire the first output voltage and the second output voltage; Processor, including: a first signal processing unit, electrically connected to the signal acquisition unit, wherein the first signal processing unit is configured to output a first angular velocity signal of the angular velocity sensor and a second angular velocity signal of the gyroscope based on the first output voltage and the second output voltage, respectively; a second signal processing unit, electrically connected to the first signal processing unit, the second signal processing unit being configured to superimpose the first angular velocity signal and the second angular velocity signal to obtain a superimposed angular velocity signal, and input the superimposed angular velocity signal into a plurality of candidate band-pass filters to respectively obtain gains corresponding to the plurality of candidate band-pass filters; a third signal processing unit, electrically connected to the second signal processing unit, wherein the third signal processing unit is configured to compare the multiple gains with each other using a comparator, and determine the candidate band-pass filter corresponding to the largest gain among the multiple gains as the target band-pass filter; A signal output unit is electrically connected to the third signal processing unit, and the signal output unit is configured to use the target bandpass filter to process the superimposed angular velocity signal, and based on the frequency band of the filtered superimposed angular velocity signal, select a fusion algorithm that matches the frequency band of the superimposed angular velocity signal to perform fusion to obtain a fused signal.

9. The integrated angular velocity sensor according to claim 7, characterized in that: Also includes: The signal detection circuit is installed in the cylinder and located above the angular velocity sensor. The signal detection circuit is configured to amplify the first output voltage output by the angular velocity sensor.

10. A system for measuring angular velocity, characterized in that: include: A vibration isolation table, fixed on the ground; an angular vibration table, disposed on the vibration isolation table, the angular vibration table being configured to generate angular vibration in response to a control signal sent by a controller; An integrated angular velocity sensor, disposed on the angular vibration table, wherein the integrated angular velocity sensor is configured to obtain a fused signal based on the angular vibration by executing the signal fusion method according to any one of claims 1 to 6; A controller is arranged on the ground and is electrically connected to the angular vibration table and the integrated angular velocity sensor. The controller is configured to obtain the fusion signal and compare the fusion signal with the angular velocity of the angular vibration generated by the angular vibration table, so as to perform error analysis.

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