An ion thinning instrument with adjustable focused ion gun

Abstract

An ion thinning instrument with an adjustable focusing ion gun includes a gas introduction unit, an ion generating unit, an adjustment unit, and a high-voltage supply unit; the gas introduction unit uniformly introduces gas into the ion generating unit; the ion generating unit ionizes the gas to emit an ion beam; and the adjustment unit adjusts the direction, angle, and focus position of the ion beam. The present invention adjusts the direction, angle, and focus position of the ion beam by providing an adjustment unit, thereby directly focusing the ion beam onto the central thinning area of ​​the sample in the ion thinning sample chamber, thereby optimizing the problem of needing to adjust the angle every time a sample is placed in the ion thinning sample chamber. At the same time, the annular groove and platform arrangement of the sleeve and the insulating sleeve allow the gas to enter the inner cavity of the ion generating unit more uniformly through the upper and lower ends, making the formation and emission of the ion beam more stable and efficient.

Description

Technical Field

[0001] The present invention relates to the technical field of ion guns, in particular to an ion thinning instrument with an adjustable focusing ion gun. Background Art

[0002] The development of materials science is inseparable from advanced material sample preparation and analysis methods. The ion thinning instrument is a method that uses high-energy ion beams to mechanically impact the surface of the material, thinning the thickness of the solid sample, so as to observe the internal microstructure and composition of the material under a transmission electron microscope (TEM), thereby researching and developing new materials.

[0003] The ion gun is a key component of the ion thinning instrument, and the focusing ability of the ion gun is one of the key factors that determine the performance of the ion thinning instrument.

[0004] In existing technologies, the presence of gas in ion guns prevents uniform entry into the inner cavity, thus affecting the smooth and efficient formation and emission of the ion beam. Furthermore, the size of the ion beam current indicates the number of ions reaching the sample. In existing technologies, secondary acceleration is often employed to achieve a higher beam current. However, the effect of ion beam current on the thinning rate is far less pronounced than the impact of the incident angle and acceleration voltage. Increasing the ion beam current can sometimes increase the thinning area and make the thickness of the thinned area more uniform. However, this increase in ion beam current can cause the sample temperature to rise sharply, affecting the sample's thermal and chemical stability. Furthermore, the structure of traditional ion guns cannot adequately adjust the direction, angle, and focus of the ion beam.

[0005] Therefore, the structure of the existing ion gun has certain technical defects and needs further improvement and development. Summary of the Invention

[0006] (1) Purpose of the invention: To solve the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide an ion gun that can adjust the direction, angle and focusing position of the ion beam emission, while taking into account the uniform entry of the gas in the ion gun into the inner cavity.

[0007] (2) Technical solution: In order to solve the above technical problems, the present technical solution provides an ion thinning instrument with an adjustable focused ion gun, comprising a gas introduction unit, an ion generating unit, an adjustment unit and a high-voltage supply unit; the gas introduction unit uniformly introduces gas into the ion generating unit; the ion generating unit ionizes the gas to emit an ion beam; the adjustment unit adjusts the direction, angle and focusing position of the ion beam.

[0008] The gas introduction unit includes a sleeve, an insulating sleeve, and a threaded straight-through joint; an annular groove is provided on the sleeve to ensure that the gas introduced through the threaded straight-through joint evenly fills the inner cavity of the sleeve; a first platform and a second platform are provided on the insulating sleeve to ensure that the gas enters the inner cavity of the ion generating unit evenly and stably through the upper and lower ends of the insulating sleeve.

[0009] The ion generating unit includes an anode, an anode tube, a cathode sheet and a front end cover, and an adjustment unit is provided between the anode tube and the anode to adjust the distance between the anode and the anode tube;

[0010] The adjustment unit includes an adjustment gasket, which optimizes the electric field formed between the anode and the cathode by adjusting the distance between the anode and the cathode 5, so as to adjust the direction, angle and focus position of the ion beam.

[0011] Preferably, the threaded straight-through connector is vertically embedded in the sleeve through threads, and the inner cavity of the threaded straight-through connector is communicated with the inner cavity of the sleeve.

[0012] Preferably, the annular groove on the sleeve is located directly below the connection point between the sleeve and the threaded straight-through connector, and its width is greater than the diameter of the portion of the threaded straight-through connector embedded in the sleeve.

[0013] Preferably, the outer surface of the side wall of the insulating sleeve is stepped, the end close to the high-voltage supply unit is the upper step, and the end away from the high-voltage supply unit is the lower step. The outer diameter of the upper step is larger than the outer diameter of the lower step, and the upper step and the lower step are transitioned by an inclined surface; the first platform is arranged at the upper and lower ends of the upper step, and the second platform is arranged at the upper and lower ends of the lower step; the first platform is located directly below the connection between the sleeve and the threaded straight-through joint, and the second platform is arranged parallel to the first platform; the width of the first platform is greater than the width of the annular groove on the sleeve; a gap is formed between the first platform, the second platform and the transition inclined surfaces of the upper and lower steps and the sleeve for gas to pass through.

[0014] Preferably, the cathode plate is a disc structure with a step on the outer edge; the small diameter side of the cathode plate faces the insulating sleeve and a cathode groove is provided on the outer edge of the surface; the large diameter side of the cathode plate is provided with an inwardly conical surface; a center hole is provided at the center position of the cathode plate disc for the passage and emission of ions; the cathode groove is semi-conical and is used for the gas to pass through the upper and lower ends of the insulating sleeve.

[0015] Preferably, the anode is a hollow cylindrical structure with a stepped outer surface. The side close to the cathode sheet is the outer surface large step portion, and the side away from the cathode sheet is the outer surface small step portion. The outer diameter of the outer surface large step portion is larger than the outer diameter of the outer surface small step portion, and the outer wall of the outer surface large step portion is close to the inner wall of the insulating sleeve.

[0016] Preferably, the hollow part of the inner cavity of the anode is a stepped cylinder, the side close to the cathode sheet is a hollow small step part, and the side away from the cathode sheet is a hollow large step part, the inner diameter of the hollow large step part is larger than the inner diameter of the hollow small step part, and a chamfered transition is used between the hollow large step part and the hollow small step part.

[0017] Preferably, the anode tube has a cylindrical structure, and is divided into a large cylindrical part and a small cylindrical part. The large cylindrical part is located on the side close to the anode, and the small cylindrical part is located on the side away from the anode, and the outer diameter of the large cylindrical part is larger than the outer diameter of the small cylindrical part; the large cylindrical part is a hollow structure, and its hollow part is a stepped cylinder, the side close to the anode is a hollow large step part, and the side away from the anode is a hollow small step part, and the inner diameter of the hollow large step part is larger than the hollow small step part; the inner wall of the hollow large step part of the anode tube is in close contact with the small step part of the outer surface of the anode, and the end of the hollow small step part of the anode tube away from the anode is conical.

[0018] Preferably, the adjusting gasket is located between the large step portion of the outer surface of the anode and the large cylindrical portion of the anode tube, and includes multiple small annular gaskets; the inner diameter of the adjusting gasket is equal to the outer diameter of the small step portion of the outer surface of the anode, and the outer diameter of the adjusting gasket is equal to the inner diameter of the insulating sleeve.

[0019] Preferably, the high-voltage supply unit includes a protective cover, an insulating block, a banana plug, and a high-voltage cable, and is used to provide a DC high voltage for ionizing the gas to the ion generating unit.

[0020] (III) Beneficial Effects: By providing an adjustment unit to adjust the direction, angle, and focal position of the ion beam, the present invention can directly focus the ion beam onto the central thinning area of ​​the sample in the ion thinning chamber, thus eliminating the need to adjust the angle each time a sample is placed in the ion thinning chamber. Furthermore, the annular grooves and platforms of the sleeve and insulating sleeve allow gas to enter the inner cavity of the ion generating unit more evenly through the upper and lower ends, resulting in smoother and more efficient ion beam formation and emission. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a cross-sectional view of the system structure of the present invention;

[0022] Figure 2 is a cross-sectional view of the sleeve of the present invention;

[0023] Figure 3 It is a structural schematic diagram of the insulating sleeve of the present invention;

[0024] Figure 4 It is a schematic structural diagram of the cathode sheet of the present invention.

[0025] Figure numerals: 1-sleeve, 2-insulating sleeve, 3-threaded straight connector, 4-anode, 5-anode tube, 6-cathode piece, 7-front end cover, 8-adjusting gasket, 9-protective cover, 10-insulating block, 11-banana plug, 12-high voltage cable, 13-groove, 14-cathode groove, 15-center hole. DETAILED DESCRIPTION

[0026] The present invention is further described in detail below in conjunction with preferred embodiments. More details are set forth in the following description to facilitate a full understanding of the present invention. However, the present invention can obviously be implemented in a variety of other ways different from the description. Those skilled in the art can make similar generalizations and deductions based on actual application situations without violating the connotation of the present invention. Therefore, the scope of protection of the present invention should not be limited by the content of this specific embodiment.

[0027] The accompanying drawings are schematic diagrams of embodiments of the present invention. It should be noted that the drawings are merely examples and are not drawn to scale, and should not be used to limit the actual scope of protection claimed in the present invention.

[0028] This embodiment provides an ion thinning instrument with an adjustable focused ion gun, which includes a gas introduction unit, an ion generation unit, an adjustment unit, and a high-voltage supply unit.

[0029] The gas introduction unit uniformly introduces gas into the ion generating unit, the ion generating unit ionizes the gas to emit an ion beam, the adjustment unit adjusts the direction, angle and focus position of the ion beam, and the high voltage supply unit provides a high voltage current for ionizing the gas to the ion generating unit.

[0030] like Figure 1 As shown, the gas introduction unit includes a sleeve 1, an insulating sleeve 2, and a threaded straight-through joint 3; the ion generating unit includes an anode 4, an anode tube 5, a cathode plate 6, and a front end cover 7; the adjustment unit includes an adjustment gasket 8; and the high-voltage supply unit includes a protective cover 9, an insulating block 10, a banana plug 11, and a high-voltage cable 12.

[0031] like Figure 2As shown, the sleeve 1 is a hollow cylindrical structure with a stepped outer surface. The outer surface of the sleeve 1 connected to the high-pressure supply unit has a larger outer diameter, and the outer surface of the side away from the high-pressure supply unit has a smaller outer diameter. The threaded straight-through connector 3 is a hollow cylindrical structure. The outer surface of one end of the threaded straight-through connector 3 is provided with threads. The threaded straight-through connector 3 is vertically embedded in the end with the larger outer diameter of the sleeve 1 through the threads, and the inner cavity of the threaded straight-through connector 3 is connected to the inner cavity of the sleeve 1, which is used to pass the gas into the inner cavity of the sleeve 1 through the threaded straight-through connector 3. The inner cavity of the sleeve 1 is provided with an annular groove 13 with an inner diameter. The groove 13 is located directly below the connection point between the sleeve 1 and the threaded straight-through connector 3. The width of the groove 13 is greater than the diameter of the part of the threaded straight-through connector 3 embedded in the sleeve 1. Preferably, the width of the groove is 4mm~6mm. The groove 13 can make the gas introduced by the threaded straight-through connector 3 evenly fill the inner cavity of the sleeve 1.

[0032] The insulating sleeve 2 is a hollow cylindrical structure, located in the inner cavity of the sleeve 1 and tightly attached to the inner wall of the sleeve 1, and a sealing ring is provided between the insulating sleeve 2 and the sleeve 1. Figure 3 As shown, the insulating sleeve 2 is adapted to the inner cavity shape of the sleeve 1; the outer surface of the side wall of the insulating sleeve 2 is stepped, the end close to the high-voltage supply unit is the upper step, and the end away from the high-voltage supply unit is the lower step, and the outer diameter of the upper step is larger than the outer diameter of the lower step; the upper step and the lower step are transitioned by an inclined plane, and a first platform is provided at the upper and lower ends of the upper step, and a second platform is provided at the upper and lower ends of the lower step. The first platform is located directly below the connection between the sleeve 1 and the threaded straight-through connector 3, and the second platform is arranged parallel to the first platform. The width of the first platform is greater than the width of the groove 13, and a gap is formed between the first platform, the second platform and the transition inclined plane of the upper and lower steps and the sleeve 1 for gas to pass through.

[0033] like Figure 4 As shown, the cathode plate 6 is a disc structure with a step on the outer edge, with its small diameter side facing the insulating sleeve 2 and a cathode groove 14 provided on the outer edge of the side, and a large diameter side provided with an inward conical surface, and a center hole 15 provided at the center of the disc. The cathode groove 14 is semi-conical and is used for passing the gas at the upper and lower ends of the insulating sleeve. The center hole 15 is used for the passage and emission of the ion beam. The step edge of the small diameter side is close to the insulating sleeve 2. The front end cover 7 is an annular stepped buckle cover, and the inner diameter of the front end cover 7 is smaller than the large diameter of the cathode plate 6. The front end cover 7 buckles the cathode plate 6 on the sleeve 1, and a sealing ring is provided at the contact point between the step of the cathode plate 6 and the sleeve 1 to prevent leakage of gas entering the interior of the ion gun.

[0034] The anode 4 is a hollow cylindrical structure located within the inner cavity of the insulating sleeve 2, with a cavity between the anode 4 and the cathode plate 6. The outer surface of the anode 4 is stepped, with a large stepped portion near the cathode plate 6 and a small stepped portion away from the cathode plate 6. The outer diameter of the large stepped portion is larger than the outer diameter of the small stepped portion, and the outer wall of the large stepped portion is in close contact with the inner wall of the insulating sleeve 2. The inner cavity of the anode 4 is hollow and has a stepped hollow portion. The small stepped portion near the cathode plate 6 and the large stepped portion away from the cathode plate 6 have an inner diameter larger than the inner diameter of the small stepped portion. The transition between the large stepped portion and the small stepped portion is chamfered. The anode 4 and cathode plate 6 jointly create an electric field, ionizing the gas to form a plasma, providing the required ions, accelerating the movement of the ions, and maintaining the stability of the plasma. The energy and intensity of the ion beam can be controlled by adjusting the voltage of the anode 4.

[0035] The anode tube 5 is a cylindrical structure located within the inner cavity of the insulating sleeve 2. It consists of a large cylindrical portion and a small cylindrical portion. The large cylindrical portion is located closer to the anode 4, while the small cylindrical portion is located farther away from the anode 4. The outer diameter of the large cylindrical portion is larger than that of the small cylindrical portion. The small cylindrical portion passes through the insulating sleeve 2 and contacts the high-voltage cable 12 via a banana plug 11. The small cylindrical portion is secured to the insulating sleeve 2 via a nut. A sealing ring is provided at the contact point between the insulating sleeve 2 and the anode tube 5 to improve sealing. An insulating block is provided between the small cylindrical portion and the high-voltage cable. The outer wall of the large cylindrical portion of the anode tube 5 is in close contact with the inner wall of the insulating sleeve 2. The large cylindrical portion of the anode tube 5 is a hollow structure, wherein the hollow portion is stepped. The side close to the anode 4 is the hollow large step portion, and the side away from the anode 4 is the hollow small step portion. The inner diameter of the hollow large step portion is larger than the hollow small step portion. The inner wall of the hollow large step portion of the anode tube 5 is in close contact with the outer surface small step portion of the anode 4. The end of the hollow small step portion of the anode tube 5 away from the anode 4 is conical. The anode tube 5 is used to transmit the high voltage provided by the high-voltage supply unit to the anode 4. At the same time, a seal is designed at the tail of the anode tube 5 to ensure the vacuum degree of the anode.

[0036] The adjusting gasket 8 is located between the large stepped portion on the outer surface of the anode 4 and the large cylindrical portion of the anode tube 5, and includes a plurality of small annular gaskets. The inner diameter of the adjusting gasket 8 is equal to the outer diameter of the small stepped portion on the outer surface of the anode 4, and the outer diameter of the adjusting gasket 8 is equal to the inner diameter of the insulating sleeve 2. By adjusting the adjusting gasket 8 to adjust the direction, angle and focusing position of the ion beam emission, the ion beam can be directly focused on the central thinning area of ​​the sample in the ion thinning sample chamber, optimizing the problem that the ion thinning sample chamber needs to adjust the angle every time a sample is placed. The adjusting gasket 8 adjusts the distance between the anode 4 and the anode tube 5 by adjusting the number and thickness of the small annular gaskets, so as to optimize the electric field strength and discharge characteristics between the anode 4 and the cathode plate 6, the direction angle and focusing position of the ion beam emission, improve the efficiency of the equipment, and meet the needs of different experiments and applications.

[0037] The small annular gaskets are preferably made of copper, with a number of 5 to 8, which can be adjusted according to actual needs. The thickness is 0.5mm, 0.2mm, and 0.1mm, and can be used in combination to achieve an adjustment accuracy of 0.1mm.

[0038] The high-voltage supply unit includes a protective cover 9, an insulating block 10, banana plugs 11, and a high-voltage cable 12, which is used to provide DC high voltage. The DC high voltage threshold range is 0.1 to 10 kV. The insulating block 10 is placed between the high-voltage cable 12 and the protective cover 9 for insulation isolation. The high-voltage cable 12 is connected to the anode tube 5 via the banana plug 11 to provide DC high voltage to the anode. The protective cover 9 is located outside the insulating block 10 for dust protection and stability.

[0039] In this embodiment, the anode 4 , the anode tube 5 , the cathode sheet 6 , and the banana plug 11 are all made of conductive materials, and the insulating sleeve 2 , the front end cover 7 , the adjusting gasket 8 , and the insulating block 10 are all made of insulating materials.

[0040] The gas enters the inner cavity of the sleeve 1 through the opening of the sleeve 1 from the threaded straight-through joint 3. The annular groove 13 provided on the sleeve 1 transports the gas evenly and stably to the upper and lower ends of the insulating sleeve 2. Then the gas passes through the first platform, the transition slope of the upper and lower steps and the second platform of the insulating sleeve 2, and enters the cavity between the cathode piece 6 and the anode 4 from the cathode groove 14 on the cathode piece 6. The gas enters the hollow part of the anode tube 5 through the hollow part of the anode 4 and fills the inner cavity of the ion generating unit. The gas is ionized under the high voltage current provided by the high voltage supply unit to form an ion beam. The gasket 8 is adjusted to adjust the direction, angle and focusing position of the ion beam so that the ion beam is emitted from the center hole 15 on the cathode piece 6 and focused on the central thinning area of ​​the sample.

[0041] Working principle: Under vacuum state, after gas is connected, high voltage power is turned on, and DC high voltage is applied between the anode, anode tube and cathode, causing the cathode to emit electrons. In the process of accelerating to the anode and anode tube, due to the long free path of the gas electrons, the electrons have sufficient flight distance and kinetic energy. When they collide with gas molecules, they are sufficient to ionize the molecules, causing gas ionization to form plasma. The positive ions and electrons formed at this time migrate to the cathode and anode respectively, ionizing other molecules on the way. This process is repeated to ionize the entire atmosphere. The ions generated in the electric field are ejected from the central hole of the cathode plate to form an ion beam.

[0042] The present invention adjusts the distance between the anode and the anode tube by adjusting the number and thickness of the annular small gaskets of the adjustment unit, thereby optimizing the electric field strength and discharge characteristics between the anode and cathode plates, the direction angle and focusing position of the ion beam emission, and directly focusing the ion beam onto the central thinning area of ​​the sample in the ion thinning sample chamber. This solves the problem of the ion thinning sample chamber requiring angle adjustment each time a sample is placed, improves the efficiency of the equipment, and meets the needs of different experiments and applications. At the same time, the annular grooves and platform configurations of the sleeve and insulating sleeve allow gas to enter the inner cavity of the ion generating unit more evenly through the upper and lower ends, making the formation and emission of the ion beam more stable and efficient.

[0043] The above content is an explanation of the preferred embodiments of the present invention, which can help those skilled in the art to more fully understand the technical solutions of the present invention. However, these embodiments are merely illustrative, and it cannot be determined that the specific implementation methods of the present invention are limited to the description of these embodiments. For those skilled in the art of the present invention, without departing from the concept of the present invention, several simple deductions and transformations can be made, which should be deemed to fall within the scope of protection of the present invention.

Claims

1. An ion thinning instrument with an adjustable focused ion gun, characterized in that: It includes a gas introduction unit, an ion generating unit, an adjustment unit and a high-voltage supply unit; the gas introduction unit uniformly introduces gas into the ion generating unit; the ion generating unit ionizes the gas to emit an ion beam; the adjustment unit adjusts the direction, angle and focus position of the ion beam; The gas introduction unit includes a sleeve, an insulating sleeve, and a threaded straight-through joint; the sleeve is provided with an annular groove for evenly filling the inner cavity of the sleeve with gas introduced through the threaded straight-through joint; the insulating sleeve is provided with a first platform and a second platform for evenly and stably allowing the gas to enter the inner cavity of the ion generating unit through the upper and lower ends of the insulating sleeve; The ion generating unit includes an anode, an anode tube, a cathode sheet and a front end cover, and an adjustment unit is provided between the anode tube and the anode to adjust the distance between the anode and the anode tube; The adjustment unit includes an adjustment gasket, which optimizes the electric field formed between the anode and the cathode plate by adjusting the distance between the anode and the anode tube, so as to adjust the direction, angle and focus position of the ion beam; The outer surface of the side wall of the insulating sleeve is stepped, the end close to the high-voltage supply unit is the upper step, and the end away from the high-voltage supply unit is the lower step. The outer diameter of the upper step is larger than the outer diameter of the lower step, and the upper step and the lower step are transitioned by an inclined surface; the first platform is arranged at the upper and lower ends of the upper step, and the second platform is arranged at the upper and lower ends of the lower step; the first platform is located directly below the connection between the sleeve and the threaded straight-through joint, and the second platform is arranged parallel to the first platform; the width of the first platform is greater than the width of the annular groove on the sleeve; a gap is formed between the first platform, the second platform and the transition inclined surfaces of the upper and lower steps and the sleeve for gas to pass through.

2. The ion thinning instrument with an adjustable focused ion gun according to claim 1, characterized in that: The threaded straight-through connector is vertically embedded in the sleeve through threads, and the inner cavity of the threaded straight-through connector is communicated with the inner cavity of the sleeve.

3. The ion thinning instrument with an adjustable focused ion gun according to claim 1, characterized in that: The annular groove on the sleeve is located directly below the connection point between the sleeve and the threaded straight-through joint, and its width is greater than the diameter of the portion of the threaded straight-through joint embedded in the sleeve.

4. The ion thinning instrument with an adjustable focused ion gun according to claim 1, characterized in that: The cathode plate is a disc structure with a step on the outer edge; the small diameter side of the cathode plate faces the insulating sleeve and a cathode groove is provided on the outer edge of the surface; the large diameter side of the cathode plate is provided with an inwardly conical surface; a center hole is provided at the center of the cathode plate disc for the passage and ejection of ions; the cathode groove is semi-conical and is used for the gas to pass through the upper and lower ends of the insulating sleeve.

5. The ion thinning instrument with an adjustable focused ion gun according to claim 1, characterized in that: The anode is a hollow cylindrical structure with a stepped outer surface. The side close to the cathode sheet is the outer surface large step portion, and the side away from the cathode sheet is the outer surface small step portion. The outer diameter of the outer surface large step portion is larger than the outer diameter of the outer surface small step portion, and the outer wall of the outer surface large step portion is in close contact with the inner wall of the insulating sleeve.

6. The ion thinning instrument with an adjustable focused ion gun according to claim 1 or 5, characterized in that: The hollow part of the inner cavity of the anode is a stepped cylinder, the side close to the cathode sheet is a hollow small step part, and the side away from the cathode sheet is a hollow large step part. The inner diameter of the hollow large step part is larger than the inner diameter of the hollow small step part, and a chamfered transition is used between the hollow large step part and the hollow small step part.

7. The ion thinning instrument with an adjustable focused ion gun according to claim 1, characterized in that: The anode tube has a cylindrical structure and is divided into a large cylindrical part and a small cylindrical part. The large cylindrical part is located on the side close to the anode, and the small cylindrical part is located on the side away from the anode. The outer diameter of the large cylindrical part is larger than the outer diameter of the small cylindrical part. The large cylindrical part has a hollow structure, and its hollow part is a stepped cylinder. The side close to the anode is a hollow large step part, and the side away from the anode is a hollow small step part. The inner diameter of the hollow large step part is larger than that of the hollow small step part. The inner wall of the hollow large step part of the anode tube is in close contact with the small step part on the outer surface of the anode, and the end of the hollow small step part of the anode tube away from the anode is conical.

8. The ion thinning instrument with an adjustable focused ion gun according to claim 1, characterized in that: The adjusting gasket is located between the large step portion of the outer surface of the anode and the large cylindrical portion of the anode tube, and includes multiple small annular gaskets; the inner diameter of the adjusting gasket is equal to the outer diameter of the small step portion of the outer surface of the anode, and the outer diameter of the adjusting gasket is equal to the inner diameter of the insulating sleeve.

9. The ion thinning instrument with an adjustable focused ion gun according to claim 1, characterized in that: The high-voltage supply unit includes a protective cover, an insulating block, a banana plug, and a high-voltage cable, and is used to provide a DC high voltage for ionizing gas to the ion generating unit.

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