Object loading instrument for in-situ scanning electron microscope test

Abstract

The invention discloses an objective instrument for in-situ scanning electron microscope testing, and relates to the technical field of sample tables, and the objective instrument can form a vacuum environment in a sample groove through an exhaust assembly and vacuum pumping, reduce gas interference and provide more accurate observation and test results. Microstructures and performance changes of materials under different conditions are observed in real time, the device can automatically control opening and closing of a sealing cover, manual operation steps are reduced, the probability of pollution is reduced, a sample can be prevented from being polluted in the moving process through cooperation of a servo motor and a pull wire, and the device is flexible in design and high in practicability. Different types of samples and experiment requirements can be met, the samples can be placed in the sample groove and observed after the device is moved into the electron microscope sample cabin, more sample treatment and experiment possibilities are provided, the number of times of opening the electron microscope sample cabin can be reduced by using the externally controllable objective instrument, the pollution risk is reduced, and the experiment efficiency is improved. And the experiment efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of sample stages, in particular to an object carrier for in-situ scanning electron microscope testing. Background Art

[0002] In order to find the root cause of the low specific capacity and short cycle life of lithium-ion batteries, performance testing of lithium-ion batteries is an important means. In-situ electron microscopy testing of battery electrode performance is of great significance to the study of the battery's charging and discharging process. In order to study the deposition of lithium ions in the negative electrode during the discharge process, in-situ electron microscopy testing is required. However, the chemical properties of lithium are very active. When placing the sample from the sample preparation room into the scanning electron microscope, lithium will be oxidized in the air, causing great damage to the sample surface. In this way, the observation results of the electron microscope cannot directly show the real situation that people want to see;

[0003] In order to solve the problem of air contamination during sample transportation and placement into an electron microscope, a Chinese invention with the authorization announcement number "CN110514685A" announced a carrier for in-situ scanning electron microscope testing, which includes a cabin, a first sealing ring, a stage, a cover, a thin rope, an exhaust unit, a sealing cover, a battery, a controller and a motor. The stage is installed in the cabin, and the sample is placed on the stage. The cover and the exhaust unit can vacuum-seal the space where the sample is located, and the remote control is used to control the opening of the cover. The opening timing of the cover of the present invention is controllable, which can ensure that the cover is opened after the electron microscope sample cabin reaches a vacuum, thereby ensuring that the sample is not contaminated and realizing vacuum in-situ testing of the sample in the electron microscope;

[0004] The above patent can, to a certain extent, test samples in a vacuum and protect the samples from contamination. However, in actual operation, manual operation is required to tightly fit and fix the cover plate to the test bench. If there is a gap between the cover plate and the test bench, the device will not be able to be emptied smoothly. The operation process is relatively cumbersome, which reduces the overall work efficiency. It is necessary to improve the existing technology. To this end, we propose a carrier for in-situ scanning electron microscope testing to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide an object carrier for in-situ scanning electron microscope testing to solve the problems raised in the above background technology.

[0006] In order to achieve the above-mentioned invention object, the present invention adopts the following technical scheme:

[0007] The present invention provides an object carrier for in-situ scanning electron microscope testing, comprising a workbench, a sample groove is provided on one side of the top of the workbench, a friction pad for stabilizing the sample is fixedly connected to the bottom of the inner cavity of the sample groove, an exhaust component for forming a vacuum environment is provided on one side of the inner cavity of the sample groove, a closing component for closing the sample groove is provided on the side of the top of the workbench away from the sample groove, a pressing component for driving the closing component to contact the sample groove is provided on the side of the top of the workbench away from the closing component, a water drop groove is provided on the side of the top of the workbench close to the sample groove, the tip of the water drop groove faces the closing component, a mounting ring groove is provided on the bottom of one end of the water drop groove close to the pressing component, a sealing ring is built in the mounting ring groove, the axis of the sealing ring coincides with the axis of the sample groove, and the top edge of the water drop groove is provided with an inclined surface for facilitating contact with the closing component.

[0008] Preferably, the exhaust component includes a connecting hole, which is opened on the side wall of the sample slot and is arranged on a side of the sample slot close to the closing component. An assembly channel is opened at one end of the connecting hole away from the sample slot, and the assembly channel surrounds the sample slot, and a plurality of airtight valves are built into the assembly channel.

[0009] Preferably, the plurality of airtight valves are symmetrically distributed along the axis of the assembly channel, a connecting column is provided on the side of the assembly channel away from the connecting hole, one end of the connecting column passes through the workbench and extends into the assembly channel, the connecting column is fixedly connected to the workbench, and the connecting column is connected to the assembly channel.

[0010] Preferably, the closing assembly includes a fixing plate, the bottom of which is fixedly connected to a side of the workbench away from the sample slot, and a plurality of mounting seats are fixedly connected to a side of the fixing plate close to the sample slot, and the plurality of mounting seats are evenly distributed along the edge of the fixing plate.

[0011] Preferably, a telescopic spring is sleeved on one end of the mounting seat away from the fixed plate, and a push seat is provided on the other end of the telescopic spring away from the mounting seat. The push seat is placed on the surface of the workbench and is slidably connected thereto. A plurality of positioning grooves matching the telescopic spring are provided on one side of the push seat close to the telescopic spring, and the end of the telescopic spring away from the mounting seat is fixedly connected to the bottom of the inner cavity of the positioning groove.

[0012] Preferably, a sealing cover is provided at one end of the push seat away from the telescopic spring, the sealing cover is slidably connected to the push seat in the vertical direction, the thickness of the sealing cover is greater than the push seat, the bottom of the sealing cover is slidably connected to the workbench, the bottom of the sealing cover is in contact with the sealing ring and completely closes the sample slot.

[0013] Preferably, a pull wire is fixedly connected to the side of the push seat away from the sealing cover, a connecting window is opened in the middle of the fixed plate, and the end of the pull wire away from the push seat passes through the connecting window, and the end of the pull wire away from the push seat is fixedly connected to a winding roller, a servo motor is arranged at the bottom of the winding roller, the outer surface of the servo motor is fixedly connected to the workbench, and the output end of the servo motor is fixedly connected to the winding roller and the axes coincide.

[0014] Preferably, the pressing assembly includes two fixing seats, the bottoms of the two fixing seats are fixedly connected to the side of the top of the workbench away from the closing assembly, the two fixing seats are symmetrically distributed along the axis of the workbench, and the end surfaces of the two fixing seats close to each other are provided with installation grooves.

[0015] Preferably, a rotating rod is rotatably connected to the bottom of the inner cavity of the mounting groove, and torsion springs are sleeved at both ends of the rotating rod. The torsion spring is placed in the mounting groove, and one end of the torsion spring is fixedly connected to the inner wall of the mounting groove, and the other end of the torsion spring is fixedly connected to the rotating rod, and a connecting seat is sleeved on the surface of the rotating rod.

[0016] Preferably, the connecting seat is fixedly connected to the rotating rod, and a lower pressure plate is fixedly connected to one end of the connecting seat away from the rotating rod. The end of the lower pressure plate away from the connecting seat is in contact with the sealing cover, and the contact surfaces of the lower pressure plate and the sealing cover are both provided with inclined surfaces, and the bottom of the lower pressure plate is slidably connected to the sealing cover.

[0017] Compared with the prior art, one or more of the above technical solutions have the following beneficial effects:

[0018] The device of the present invention uses an exhaust component and vacuum extraction, and the carrier can form a vacuum environment inside the sample slot, reduce gas interference, provide more accurate observation and test results, allow direct observation in the electron microscope when the sample is operated or subjected to force, and can observe the microstructure and performance changes of the material under different conditions in real time. The device can automatically control the opening and closing of the sealing cover, reduce manual operation steps, and reduce the probability of contamination. At the same time, through the cooperation of the servo motor and the pull wire, the sample can be kept free from contamination during the movement of the device. The design of the device is flexible and can adapt to different types of samples and experimental requirements. The sample can be placed in the sample slot and observed after the device is moved to the electron microscope sample chamber, providing more possibilities for sample processing and experiments. The use of an externally controllable carrier can reduce the number of times the electron microscope sample chamber is opened, reduces the risk of contamination, and improves experimental efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings in the specification, which constitute a part of the present invention, are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0021] Figure 2 It is a schematic diagram of the assembly structure of the sealing ring and the sample slot of the present invention.

[0022] Figure 3 It is a schematic diagram of the assembly structure of the lower pressing plate and the sealing cover of the present invention.

[0023] Figure 4 It is a schematic diagram of the exhaust assembly structure of the present invention.

[0024] Figure 5 It is a schematic diagram of the assembly structure of the lower pressing plate and the workbench of the present invention.

[0025] Figure 6 The present invention Figure 5 Enlarged structural diagram at A in the middle.

[0026] Figure 7 It is a schematic diagram of the structure of the closed component of the present invention.

[0027] In the figure:

[0028] 1. Workbench; 101. Sample slot; 102. Friction pad; 103. Water drop slot; 104. Mounting ring groove; 105. Sealing ring; 106. Inclined surface; 2. Exhaust assembly; 201. Connecting hole; 202. Assembly channel; 203. Airtight valve; 204. Connecting column; 3. Closing assembly; 301. Fixed plate; 302. Mounting seat; 303. Telescopic spring; 304. Push seat; 305. Positioning slot; 306. Pull wire; 307. Connecting window; 308. Winding roller; 309. Servo motor; 310. Sealing cover; 4. Pressing assembly; 401. Fixed seat; 402. Mounting slot; 403. Rotating rod; 404. Torsion spring; 405. Connecting seat; 406. Lower pressure plate. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0030] See also Figure 1-Figure 7The present invention provides an object carrier for in-situ scanning electron microscope testing, including a workbench 1, a sample slot 101 is opened on one side of the top of the workbench 1, a friction pad 102 for stabilizing the sample is fixedly connected to the bottom of the inner cavity of the sample slot 101, an exhaust component 2 for forming a vacuum environment is arranged on one side of the inner cavity of the sample slot 101, a closing component 3 for closing the sample slot 101 is arranged on the side of the top of the workbench 1 away from the sample slot 101, and a pressing component 4 for driving the closing component 3 to contact the sample slot 101 is arranged on the side of the top of the workbench 1 away from the closing component 3, the sample to be tested is placed in the sample slot 101 on the top of the workbench 1, and subsequent operation and observation are carried out.

[0031] In order to seal the sample slot 101, a water drop groove 103 is provided on one side of the top of the workbench 1 close to the sample slot 101, and the tip of the water drop groove 103 faces the closing component 3. A mounting ring groove 104 is provided at the bottom of one end of the water drop groove 103 close to the pressing component 4, and a sealing ring 105 is built into the mounting ring groove 104. The axis of the sealing ring 105 coincides with the axis of the sample slot 101, and an inclined surface 106 is provided on the top edge of the water drop groove 103 for easy contact with the closing component 3, wherein the closing component 3 includes a fixing plate 301, the bottom of the fixing plate 301 is fixedly connected to a side of the workbench 1 away from the sample slot 101, and a plurality of mounting seats 302 are fixedly connected to a side of the fixing plate 301 close to the sample slot 101, and the plurality of mounting seats 302 are arranged along The edge of the fixed plate 301 is evenly distributed, and the end of the mounting seat 302 away from the fixed plate 301 is sleeved with a telescopic spring 303, and the end of the telescopic spring 303 away from the mounting seat 302 is provided with a push seat 304, and the push seat 304 is placed on the surface of the workbench 1 and is slidably connected thereto. A plurality of positioning grooves 305 matching therewith are provided on the side of the push seat 304 close to the telescopic spring 303, and the end of the telescopic spring 303 away from the mounting seat 302 is fixedly connected to the bottom of the inner cavity of the positioning groove 305, and a sealing cover 310 is provided at the end of the push seat 304 away from the telescopic spring 303, and the sealing cover 310 is slidably connected to the push seat 304 in the vertical direction, and the thickness of the sealing cover 310 is greater than that of the push seat 304, and the bottom of the sealing cover 310 is slidably connected to the workbench 1, and the sealing cover 310 is 0 bottom contacts with the sealing ring 105 and completely closes the sample slot 101, a pull wire 306 is fixedly connected to the side of the push seat 304 away from the sealing cover 310, a connecting window 307 that runs through the fixed plate 301 is opened in the middle of the fixed plate 301, the end of the pull wire 306 away from the push seat 304 passes through the connecting window 307, the end of the pull wire 306 away from the push seat 304 is fixedly connected to a winding roller 308, a servo motor 309 is arranged at the bottom of the winding roller 308, the outer surface of the servo motor 309 is fixedly connected to the workbench 1, the output end of the servo motor 309 is fixedly connected to the winding roller 308 and the axis coincides, the sample to be tested is placed in the sample slot 101 on the top of the workbench 1, and the sealing cover 310 and the push seat 304 are controlled by the pull wire 306 on one side The lower pressure plate 406 will not move, and the lower pressure plate 406 will fall on the top of the sample groove 101 again under the cooperation of the torsion spring 404 on one side and the rotating rod 403. There is a gap between the lower pressure plate 406 and the sample groove 101, and it is at the top of the water drop groove 103. By starting the servo motor 309, the pull wire 306 wrapped around the surface of the winding roller 308 is loosened, and the push seat 304 will drive the sealing cover 310 into the water drop groove 103 under the elastic force of multiple telescopic springs 303 on one side. The inclined surface 106 is provided to facilitate the sealing cover 310 to enter the bottom of the lower pressure plate 406. The sealing cover 310 cannot fall at the tip of the water drop groove 103 until it reaches the tail of the water drop groove 103 and coincides with the axis of the sample groove 101.The sealing cover 310 will completely seal the sample slot 101 under the force of its own gravity and the lower pressing plate 406, and maintain close contact with the sealing ring 105 under the pressure of the lower pressing plate 406, thus completing the sealing of the sample slot 101.

[0032] In order to form a vacuum environment in the sample tank 101, a connecting hole 201 is provided in the exhaust component 2. The connecting hole 201 is opened on the side wall of the sample tank 101, and the connecting hole 201 is arranged on the side of the sample tank 101 close to the sealing component 3. An assembly channel 202 is opened at the end of the connecting hole 201 away from the sample tank 101. The assembly channel 202 surrounds the sample tank 101. A plurality of airtight valves 203 are built into the assembly channel 202. The plurality of airtight valves 203 are symmetrically distributed along the axis of the assembly channel 202. A connecting column 204 is provided on the side of the assembly channel 202 away from the connecting hole 201. One end of the connecting column 204 penetrates the connecting column 204. It extends through the workbench 1 to the assembly channel 202, and the connecting column 204 is fixedly connected to the workbench 1. The connecting column 204 is connected to the assembly channel 202. When the sample is placed in the sample slot 101 and sealed, after the sealing is completed, the exhaust component 2 can be started, and the internal space of the sample slot 101 is connected to the external vacuum pump through the connecting hole 201, the assembly channel 202 and the connecting column 204, and the airtight valve 203 is cooperated to exhaust the air inside the sample slot 101 to form a vacuum environment. The sealing cover 310 will also completely seal the sample slot 101 under atmospheric pressure, and then the entire device will be moved to the electron microscope sample cabin.

[0033] In order to make the sealing cover 310 fit tightly with the sample slot 101 when the sample slot 101 is closed and improve the sealing performance, two fixing seats 401 are arranged in the pressing component 4, the bottom of the two fixing seats 401 are fixedly connected to the side of the top of the workbench 1 away from the sealing component 3, the two fixing seats 401 are symmetrically distributed along the axis of the workbench 1, and the end surfaces of the two fixing seats 401 close to each other are provided with mounting grooves 402, the bottom of the inner cavity of the mounting groove 402 is rotatably connected with a rotating rod 403, and the two ends of the rotating rod 403 are sleeved with torsion springs 404, the torsion spring 404 is placed in the mounting groove 402, and one end of the torsion spring 404 is fixedly connected to the inner wall of the mounting groove 402, and the torsion spring 404 The other end is fixedly connected to the rotating rod 403, and a connecting seat 405 is sleeved on the surface of the rotating rod 403. The connecting seat 405 is fixedly connected to the rotating rod 403. The end of the connecting seat 405 away from the rotating rod 403 is fixedly connected to a lower pressure plate 406. The end of the lower pressure plate 406 away from the connecting seat 405 is in contact with the sealing cover 310. The contact surfaces of the lower pressure plate 406 and the sealing cover are both provided with inclined surfaces 106. The bottom of the lower pressure plate 406 is slidably connected to the sealing cover 310. The sealing cover 310 will completely close the sample slot 101 under the drive of its own gravity and the lower pressure plate 406, and maintain close contact with the sealing ring 105 under the pressure of the lower pressure plate 406 to complete the sealing.

[0034] How it works

[0035] In actual use, the entire device needs to be placed in a glove box, and the lower pressure plate 406 is pushed upward to place the sample to be tested into the sample slot 101 on the top of the workbench 1. The sealing cover 310 and the push seat 304 will not move under the control of the pull wire 306 on one side. The lower pressure plate 406 is released, and the lower pressure plate 406 falls on the top of the sample slot 101 again under the cooperation of the torsion spring 404 on one side and the rotating rod 403. There is a gap between the lower pressure plate 406 and the sample slot 101, and it is at the top of the water drop groove 103. By starting the servo motor 309, the winding is released. The pull wire 306 wound on the surface of the winding roller 308 and its push seat 304 will drive the sealing cover 310 into the water drop groove 103 under the elastic force of multiple telescopic springs 303 on one side, and an inclined surface 106 is provided to facilitate the sealing cover 310 to enter the bottom of the lower pressure plate 406. The sealing cover 310 cannot fall at the tip of the water drop groove 103 until it reaches the tail of the water drop groove 103 and coincides with the axis of the sample groove 101. The sealing cover 310 will completely close the sample groove 101 under its own gravity and the driving force of the lower pressure plate 406, and the sealing cover 310 will be pressed against the lower pressure plate 406 under the pressure of the sealing cover 310. The sealing ring 105 maintains close contact to complete the sealing. After the sealing is completed, the exhaust component 2 can be started, and the internal space of the sample tank 101 is connected to the external vacuum pump through the connecting hole 201, the assembly channel 202 and the connecting column 204, and the airtight valve 203 is cooperated to exhaust the air inside the sample tank 101 to form a vacuum environment. The sealing cover 310 will also completely seal the sample tank 101 under atmospheric pressure. Then, the whole device is moved to the electron microscope sample chamber, the electron microscope sample chamber is evacuated, and the servo motor 309 is controlled to drive the winding roller 308 to pull the wire 30 6 is rolled up. At this moment, both the inside and outside of the sample slot 101 are in a vacuum environment, and the air pressure is balanced, which facilitates the movement of the sealing cover 310. Due to the special structure of the water drop slot 103 and the inclined surface 106 at the edge, it is convenient for the sealing cover 310 to be discharged from the water drop slot 103, so that the sample is exposed in the electron microscope sample cabin. The device can keep the sample from being contaminated during the movement, and can automatically control the opening and closing of the sealing cover 310, so as to realize the vacuum in-situ test of the sample in the electron microscope, and at the same time further reduce the operating steps of the personnel and the number of times the electron microscope sample cabin is opened, thereby reducing the probability of contamination.

[0036] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A carrier for in-situ scanning electron microscope testing, characterized in that: The invention comprises a workbench (1), wherein a sample groove (101) is provided on one side of the top of the workbench (1), a friction pad (102) for stabilizing the sample is fixedly connected to the bottom of the inner cavity of the sample groove (101), an exhaust component (2) for forming a vacuum environment is provided on one side of the inner cavity of the sample groove (101), a sealing component (3) for sealing the sample groove (101) is provided on the side of the top of the workbench (1) away from the sample groove (101), and a pressure relief device (3) for driving the sealing component (3) and the sample groove (101) to move ... ), a water drop groove (103) is provided on one side of the top of the workbench (1) close to the sample groove (101), the tip of the water drop groove (103) faces the closing component (3), a mounting ring groove (104) is provided at the bottom of one end of the water drop groove (103) close to the pressing component (4), a sealing ring (105) is built in the mounting ring groove (104), the axis of the sealing ring (105) coincides with the axis of the sample groove (101), and the top edge of the water drop groove (103) is provided with an inclined surface (106) that is convenient for contacting with the closing component (3).

2. The object carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: The exhaust component (2) comprises a connecting hole (201), the connecting hole (201) is opened on the side wall of the sample tank (101), and the connecting hole (201) is arranged on a side of the sample tank (101) close to the closing component (3), and an assembly channel (202) is opened at one end of the connecting hole (201) away from the sample tank (101), the assembly channel (202) surrounds the sample tank (101), and a plurality of airtight valves (203) are built into the assembly channel (202).

3. The object carrier for in-situ scanning electron microscope testing according to claim 2, characterized in that: The plurality of airtight valves (203) are symmetrically distributed along the axis of the assembly channel (202); a connecting column (204) is provided on a side of the assembly channel (202) away from the connecting hole (201); one end of the connecting column (204) passes through the workbench (1) and extends into the assembly channel (202); the connecting column (204) is fixedly connected to the workbench (1); and the connecting column (204) is in communication with the assembly channel (202).

4. The object carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: The sealing component (3) comprises a fixing plate (301), the bottom of which is fixedly connected to a side of the workbench (1) away from the sample slot (101), and a side of the fixing plate (301) close to the sample slot (101) is fixedly connected to a plurality of mounting seats (302), wherein the plurality of mounting seats (302) are evenly distributed along the edge of the fixing plate (301).

5. The object carrier for in-situ scanning electron microscope testing according to claim 4, characterized in that: The end of the mounting seat (302) away from the fixed plate (301) is sleeved with a telescopic spring (303), and the end of the telescopic spring (303) away from the mounting seat (302) is provided with a push seat (304), and the push seat (304) is placed on the surface of the workbench (1) and slidably connected thereto, and a side of the push seat (304) close to the telescopic spring (303) is provided with a plurality of positioning grooves (305) matching therewith, and the end of the telescopic spring (303) away from the mounting seat (302) is fixedly connected to the bottom of the inner cavity of the positioning groove (305).

6. The object carrier for in-situ scanning electron microscope testing according to claim 5, characterized in that: A sealing cover (310) is provided at one end of the push seat (304) away from the telescopic spring (303), and the sealing cover (310) is slidably connected to the push seat (304) in the vertical direction. The thickness of the sealing cover (310) is greater than that of the push seat (304), and the bottom of the sealing cover (310) is slidably connected to the workbench (1), and the bottom of the sealing cover (310) is in contact with the sealing ring (105) and completely closes the sample slot (101).

7. The object carrier for in-situ scanning electron microscope testing according to claim 6, characterized in that: A pull wire (306) is fixedly connected to the side of the push seat (304) away from the sealing cover (310), and a connecting window (307) penetrating the fixed plate (301) is opened in the middle of the fixed plate (301). One end of the pull wire (306) away from the push seat (304) passes through the connecting window (307), and one end of the pull wire (306) away from the push seat (304) is fixedly connected to a winding roller (308). A servo motor (309) is arranged at the bottom of the winding roller (308), and the outer surface of the servo motor (309) is fixedly connected to the workbench (1), and the output end of the servo motor (309) is fixedly connected to the winding roller (308) and the axes coincide.

8. The object carrier for in-situ scanning electron microscope testing according to claim 1, characterized in that: The pressing assembly (4) comprises two fixing seats (401), the bottoms of the two fixing seats (401) being fixedly connected to a side of the top of the workbench (1) away from the closing assembly (3), the two fixing seats (401) being symmetrically distributed along the axis of the workbench (1), and the end surfaces of the two fixing seats (401) close to each other are provided with mounting grooves (402).

9. The object carrier for in-situ scanning electron microscope testing according to claim 8, characterized in that: A rotating rod (403) is rotatably connected to the bottom of the inner cavity of the installation groove (402), and torsion springs (404) are sleeved at both ends of the rotating rod (403). The torsion spring (404) is placed in the installation groove (402), and one end of the torsion spring (404) is fixedly connected to the inner wall of the installation groove (402), and the other end of the torsion spring (404) is fixedly connected to the rotating rod (403), and a connecting seat (405) is sleeved on the surface of the rotating rod (403).

10. The object carrier for in-situ scanning electron microscope testing according to claim 9, characterized in that: The connecting seat (405) is fixedly connected to the rotating rod (403), and one end of the connecting seat (405) away from the rotating rod (403) is fixedly connected to a lower pressing plate (406), and one end of the lower pressing plate (406) away from the connecting seat (405) is in contact with the sealing cover (310), and the contact surfaces of the lower pressing plate (406) and the sealing cover are both provided with inclined surfaces (106), and the bottom of the lower pressing plate (406) is slidably connected to the sealing cover (310).

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