A system, method, and medium for pulsed molecular beam measurements

Abstract

Embodiments of the present application provide a system, method and medium for pulsed molecular beam measurement, wherein the system comprises: a control module, a pulse valve, an ion gauge and an oscilloscope, the pulse valve, the ion gauge and the oscilloscope being connected with the control module respectively; the control module is used for controlling the pulse valve and the ion gauge to start; the pulse valve is used for spraying gas containing target molecules to a rear vacuum cavity after starting, the gas forms a molecular beam in the vacuum cavity; the ion gauge is used for emitting hot electrons to the vacuum cavity after starting, the molecular beam collides with the hot electrons in the vacuum cavity to form a current signal corresponding to the molecular beam; the control module is further used for collecting the current signal, amplifying and converting the current signal into a voltage signal, and transmitting the voltage signal to the oscilloscope; the oscilloscope is used for collecting and processing the voltage signal to obtain visualized molecular beam data, aiming to suppress noise interference in the process of pulsed molecular beam measurement and improve the accuracy of pulsed molecular beam measurement.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of pulsed molecular beam, and particularly to a system, method and medium for pulsed molecular beam measurement. BACKGROUND

[0002] The basic principle of pulsed molecular beam technology is to generate extremely short time width and high density molecular pulses by quickly opening and closing gas valves, which usually complete within microseconds, helping to avoid other background interference in the experiment, improve the time resolution, and increase the number density of gas samples per unit volume to improve the sensitivity of the experiment.

[0003] Traditional pulsed molecular beam measurement technology mostly uses analog circuits and relies on simple operational amplifier technology. Although this design meets the basic measurement requirements to some extent, it exposes many shortcomings in actual application. Due to its own physical characteristics and design limitations, analog circuits are often susceptible to various noises such as thermal noise and shot noise. These noises not only affect the accuracy of the measurement results, but also increase the uncertainty of the data. At the same time, the measurement system relying on simple operational amplifier technology may have certain limitations in performance parameters such as gain, bandwidth, noise and offset. These limitations will cause large errors and drifts in the measurement process, thereby affecting the reliability and repeatability of the experimental results. SUMMARY

[0004] The main purpose of the embodiments of the present application is to propose a system, method and medium for pulsed molecular beam measurement, which aims to suppress noise interference in the pulsed molecular beam measurement process and improve the accuracy of pulsed molecular beam measurement.

[0005] To achieve the above purpose, a first aspect of the embodiments of the present application proposes a pulsed molecular beam measurement system, which comprises:

[0006] A control module, a pulse valve, an ion gauge and an oscilloscope, wherein the pulse valve, the ion gauge and the oscilloscope are connected with the control module respectively.

[0007] The control module is configured to control the start of the pulse valve and the ion gauge.

[0008] The pulse valve is configured to spray gas containing target molecules into the vacuum chamber after being started, and the gas forms a molecular beam in the vacuum chamber.

[0009] The ion gauge is configured to emit hot electrons into the vacuum chamber after being started, and the molecular beam collides with the hot electrons in the vacuum chamber to form a current signal corresponding to the molecular beam.

[0010] The control module is further configured to collect the current signal, amplify and convert the current signal into a voltage signal, and transmit the voltage signal to an oscilloscope.

[0011] The oscilloscope is configured to collect and process the voltage signal to obtain visual molecular beam data.

[0012] The system provided by the first aspect converts the current signal into a voltage signal after processing by the control module, effectively suppressing noise, current drift and voltage drift in the measurement process, improving the accuracy and stability of the molecular beam time-domain peak type measurement, solving the problem that the performance parameters of the measurement system in the prior art are limited to a certain extent, resulting in a large error and drift in the measurement process, affecting the reliability and repeatability of the experimental results, and suppressing noise interference in the pulsed molecular beam measurement process, thereby improving the accuracy of the pulsed molecular beam measurement.

[0013] In a possible implementation, the control module includes a pulse valve controller and an ion gauge controller.

[0014] The control module is configured to control the start of the pulse valve and the ion gauge, including:

[0015] The pulse valve controller is configured to control the start of the pulse valve, and the ion gauge controller is configured to control the start of the ion gauge.

[0016] The control module is further configured to collect the current signal, amplify and convert the current signal into a voltage signal, and transmit the voltage signal to an oscilloscope, including:

[0017] The ion gauge controller is configured to collect the current signal, amplify and convert the current signal into a voltage signal, and transmit the voltage signal to an oscilloscope.

[0018] In a possible implementation, the ion gauge controller includes an amplification module and a conversion module.

[0019] The ion gauge controller is further configured to collect the current signal, amplify and convert the current signal into a voltage signal, and transmit the voltage signal to an oscilloscope, including:

[0020] The amplification module amplifies the current signal to obtain an amplified current signal, and the conversion module converts the amplified current signal into the voltage signal and transmits the voltage signal to the oscilloscope.

[0021] In a possible implementation, the ion gauge controller further includes a multi-stage filtering module configured to eliminate noise output by a power supply.

[0022] In a possible implementation, the system further comprises an ionization vacuum gauge and a synchronous trigger, the control module further comprises an ionization vacuum gauge controller connected with the ionization vacuum gauge and the ion ionization gauge controller, and the synchronous trigger is connected with the pulse valve controller and the oscilloscope.

[0023] The ionization vacuum gauge controller is configured to control the ionization vacuum gauge to monitor a vacuum degree of the vacuum chamber.

[0024] The synchronous trigger is configured to send a trigger signal to the pulse valve controller and the oscilloscope.

[0025] In a possible implementation, the ion ionization gauge comprises a grid, a collector and a filament core, the grid and the collector are composed of tungsten filaments, and the filament core is composed of iridium filaments.

[0026] In a possible implementation, the system further comprises an electronic device connected with the ion ionization gauge controller.

[0027] The ion ionization gauge controller is configured to control the ion ionization gauge to start up, and the starting up comprises:

[0028] The electronic device sets parameters of the ion ionization gauge, and the ion ionization gauge controller controls the ion ionization gauge to start up based on the parameters of the ion ionization gauge.

[0029] In a possible implementation, the electronic device comprises a memory and a processor, the memory is configured to store the visualized molecular beam data, and the processor is configured to fit the visualized molecular beam data stored in the memory to obtain fitting data.

[0030] To achieve the above object, a second aspect of the embodiment of the present application provides a pulse molecular beam measurement method, and the method comprises:

[0031] A gas containing target molecules is sprayed into a vacuum chamber, and the gas forms a molecular beam in the vacuum chamber.

[0032] Hot electrons are emitted into the vacuum chamber by an ion ionization gauge, and the molecular beam collides with the hot electrons in the vacuum chamber to form a current signal corresponding to the molecular beam.

[0033] The current signal is collected, amplified and converted into a voltage signal, and then transmitted to an oscilloscope.

[0034] The voltage signal is collected and processed by the oscilloscope to obtain visualized molecular beam data.

[0035] The method provided by the second aspect converts the current signal into a voltage signal after processing by the control module, effectively suppresses noise, current drift and voltage drift in the measurement process, improves the accuracy and stability of the molecular beam time-domain peak type measurement, solves the problem that the performance parameters of the measurement system in the prior art are limited to a certain extent, thereby causing large errors and drifts in the measurement process and affecting the reliability and repeatability of the experimental results, suppresses noise interference in the pulsed molecular beam measurement process, and improves the accuracy of the pulsed molecular beam measurement.

[0036] In a third aspect, a computer-readable storage medium is provided, and the storage medium stores a computer program. When the computer program is executed by a processor, the pulsed molecular beam measurement method in any possible implementation manner of the second aspect is implemented.

[0037] As can be seen from the technical solutions provided by one or more embodiments of the present specification, the pulsed molecular beam measurement system provided by the embodiments of the present application includes a control module, a pulse valve, an ion gauge and an oscilloscope, the pulse valve, the ion gauge and the oscilloscope are connected with the control module respectively; the control module is used to control the start of the pulse valve and the ion gauge; the pulse valve is used to spray a gas containing target molecules to a vacuum chamber after being started, and the gas forms a molecular beam in the vacuum chamber; the ion gauge is used to emit hot electrons to the vacuum chamber after being started, and the molecular beam collides with the hot electrons in the vacuum chamber to form a current signal corresponding to the molecular beam; the control module is further used to collect the current signal, amplify and convert the current signal into a voltage signal, and then transmit the voltage signal to the oscilloscope; the oscilloscope is used to collect and process the voltage signal to obtain visual molecular beam data. The present application solves the problem that the performance parameters of the measurement system in the prior art are limited to a certain extent, thereby causing large errors and drifts in the measurement process and affecting the reliability and repeatability of the experimental results, suppresses noise interference in the pulsed molecular beam measurement process, and improves the accuracy of the pulsed molecular beam measurement. Other features and advantages of the present application will be described in the following specification, and some of them will become apparent from the specification, or will be understood by those skilled in the art through implementation of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the one or more embodiments of the present specification or the prior art, the drawings needed in the description of the one or more embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments described in the present specification, and those skilled in the art can also obtain other drawings according to these drawings without paying creative labor.

[0039] Figure 1is a first structural schematic diagram of a pulse molecular beam measurement system provided by an embodiment of the present application;

[0040] Figure 2 is a second structural schematic diagram of a pulse molecular beam measurement system provided by an embodiment of the present application;

[0041] Figure 3 is a mechanical diagram of a grid, a collector, and a filament core wire provided by an embodiment of the present application;

[0042] Figure 4 is a fitting curve schematic diagram provided by an embodiment of the present application.

[0043] The reference signs: control module 100, pulse valve 200, ion gauge 300, oscilloscope 400, pulse valve controller 500, ion gauge controller 600, ionization vacuum gauge 700, synchronous trigger 800, ionization vacuum gauge controller 900. DETAILED DESCRIPTION

[0044] In order to enable the person skilled in the art to better understand the technical solutions in the specification, the technical solutions in one or more embodiments of the specification will be clearly and completely described below in conjunction with the drawings in one or more embodiments of the specification. Obviously, the described one or more embodiments are only a part of the embodiments of the specification, not all the embodiments. Based on one or more embodiments in the specification, all other embodiments obtained by the person skilled in the art without creative labor should belong to the protection scope of the present document.

[0045] It should be noted that although the functional modules are divided in the device schematic diagram, and the logical order is shown in the flowchart, in some cases, the steps shown or described can be executed in a different order than the module division in the device or the order in the flowchart. The terms "first", "second", etc. in the specification and claims and the above drawings are used to distinguish similar objects, and do not necessarily describe a specific order or sequence.

[0046] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used herein are only for the purpose of describing the embodiments of the present application, and are not intended to limit the present application.

[0047] In addition, the technical features involved in each embodiment of the present application described below can be combined with each other as long as there is no conflict. The embodiments of the present application are further described below in conjunction with the drawings.

[0048] In a first aspect, as shown in the drawings, a pulse molecular beam measurement system is provided, which comprises: Figure 1 a pulse molecular beam measurement system, comprising:

[0049] The control module 100, the pulse valve 200, the ion gauge 300 and the oscilloscope 400 are connected with the control module 100 respectively; the control module 100 is used for controlling the pulse valve 200 and the ion gauge 300 to start; the pulse valve 200 is used for spraying the gas containing target molecules to the vacuum cavity after starting, and the gas forms a molecular beam in the vacuum cavity; the ion gauge 300 is used for emitting hot electrons to the vacuum cavity after starting, and the molecular beam and the hot electrons collide in the vacuum cavity to form a current signal corresponding to the molecular beam; the control module 100 is also used for collecting the current signal, amplifying and converting the current signal into a voltage signal, and then transmitting the voltage signal to the oscilloscope 400; and the oscilloscope 400 is used for collecting and processing the voltage signal to obtain visual molecular beam data.

[0050] It should be noted that the pulse valve 200 refers to a valve body device driven by electromagnetic effect of an electromagnetic coil or controlled by piezoelectric effect of a piezoelectric material, which can produce a pulse gas beam by instantaneously opening and closing a high-pressure gas source; when the pulse valve 200 starts, the gas containing target molecules is allowed to pass through the valve and is sprayed to the vacuum cavity, and the gas containing target molecules forms a molecular beam in the vacuum cavity. The ion gauge 300 is placed at a downstream position about 15 cm away from the nozzle of the pulse valve 200 in the vacuum cavity, and the probe of the ion gauge 300 is inserted into the vacuum cavity; under the action of a high-voltage power supply, the probe of the ion gauge 300 generates an electric field, and the cathode of the ion gauge 300 emits hot electrons to the vacuum cavity under the action of the electric field. Under the action of the electric field, the hot electrons in the vacuum cavity collide with the gas molecules of the molecular beam to form a current proportional to the number density of the gas molecules, which is collected by the control module 100. After receiving the current signal corresponding to the molecular beam, the control module 100 amplifies and processes the current signal, converts the amplified current signal into a voltage signal, and then transmits the voltage signal to the oscilloscope 400; the oscilloscope 400 receives the relevant voltage signal and time data, and displays the intensity of the molecular beam and the time-domain pulse peak curve in real time.

[0051] Through the system provided by the first aspect, the current signal is processed by the control module 100 and then converted into a voltage signal, which effectively suppresses the noise, current drift and voltage drift in the measurement process, improves the accuracy and stability of the time-domain peak measurement of the molecular beam, solves the problem that the performance parameters of the measurement system in the prior art are limited to a certain extent, which leads to large errors and drifts in the measurement process and affects the reliability and repeatability of the experimental results, suppresses the noise interference in the measurement process of the pulse molecular beam, and improves the accuracy of the measurement of the pulse molecular beam.

[0052] In a possible implementation, the control module 100 includes a pulse valve controller 500 and an ion gauge controller 600; the control module 100 is configured to control the pulse valve 200 and the ion gauge 300 to start, including that the pulse valve controller 500 is configured to control the pulse valve 200 to start, and the ion gauge controller 600 is configured to control the ion gauge 300 to start; and the control module 100 is further configured to collect the current signal, amplify the current signal, and convert the current signal into a voltage signal and then transmit the voltage signal to the oscilloscope 400, including that the ion gauge controller 600 is configured to collect the current signal, and convert the current signal into a voltage signal and then transmit the voltage signal to the oscilloscope 400.

[0053] It should be noted that the pulse valve controller 500 can accurately control the opening and closing time, frequency and other parameters of the pulse valve 200, so as to realize accurate regulation of the gas flow. By accurately controlling the opening and closing of the pulse valve 200, the pulse valve controller 500 can optimize the operation efficiency of the system, effectively reduce the energy consumption of the system, and reduce unnecessary opening and closing operations of the pulse valve 200.

[0054] It should be further noted that the ion gauge controller 600 can accurately control the measurement process of the ion gauge 300, so as to ensure the accuracy and stability of the measurement results. In addition, the ion gauge 300 can help users to discover potential safety hazards in time and take corresponding measures by monitoring and controlling the state of the ion gauge 300 in real time. For example, when an abnormal vacuum degree is monitored, the ion gauge controller 600 can trigger an alarm and shut down the corresponding equipment to prevent accidents. The ion gauge controller 600 also has a variety of functions and setting options to adapt to different measurement requirements and application scenarios, such as supporting multiple measurement units, measurement ranges, and different correction and filtering options. Such versatility enables the ion gauge controller 600 to adapt to various complex measurement environments. After receiving the current signal corresponding to the molecular beam, the ion gauge controller 600 amplifies the current signal and converts the amplified current signal into a voltage signal, and then transmits the voltage signal to the oscilloscope 400. The oscilloscope 400 receives the relevant voltage signal and time data, and displays the intensity and time-domain pulse peak curve of the molecular beam in real time.

[0055] In a possible implementation, the ion gauge controller 600 includes an amplification module and a conversion module; and the ion gauge controller 600 is configured to collect the current signal, amplify the current signal, and convert the current signal into a voltage signal and then transmit the voltage signal to the oscilloscope 400, including that the amplification module amplifies the current signal to obtain an amplified current signal, and the conversion module converts the amplified current signal into the voltage signal and then transmits the voltage signal to the oscilloscope.

[0056] It should be noted that the amplification module includes an operational amplifier for amplifying weak current signals. The prior art molecular beam measurement system mainly relies on simple operational amplifier technology, and the performance parameters such as gain, bandwidth, noise and offset may have certain limitations, which will cause larger errors and drifts in the measurement process, thereby affecting the reliability and repeatability of the experimental results. The embodiments of the present application realize the rapid and accurate measurement of the molecular beam intensity and pulse time by setting the amplification module in the ion regulation controller 600, that is, combining the fast ion detection technology with the signal amplification and acquisition technology, effectively suppressing the noise, current drift and voltage drift in the measurement process, and improving the accuracy and stability of the pulse molecular beam time-domain peak type measurement.

[0057] In a possible implementation manner, the ion regulation controller 600 further includes a multi-stage filtering module for eliminating the noise output by the power supply.

[0058] It should be noted that the ion regulation controller 600 further includes a multi-stage filtering module, and the multi-stage filtering module is composed of an inductor and a capacitor. The inductor plays a key role in the multi-stage filtering module. The inductor has the energy storage characteristic. When the current passes through the inductor, it will generate a magnetic field around the inductor. When the current changes, the magnetic field also changes, thereby generating a counter electromotive force to resist the change of the current. This characteristic enables the inductor to smooth the current fluctuation in the direct current power supply and reduce the noise generated due to the sudden change of the current. The inductor has a relatively large impedance to high-frequency signals, and thus can effectively prevent high-frequency noise from passing through the circuit. The inductor provides different impedances at different frequencies and cooperates with the capacitor to realize a wider filtering bandwidth and a higher filtering efficiency. The multi-stage filtering module can attenuate or prevent high-frequency noise signals from passing through. Each stage of the filtering circuit can further reduce the noise level in the power supply output.

[0059] In a possible implementation manner, as shown in Figure 2 The system further includes an ionization vacuum gauge 700 and a synchronous trigger 800, the control module 100 further includes an ionization vacuum gauge controller 900, the ionization vacuum gauge controller 900 is connected with the ionization vacuum gauge 700 and the ion regulation controller 600, and the synchronous trigger 800 is connected with the pulse valve controller 500 and the oscilloscope 400; the ionization vacuum gauge controller 900 is configured to control the ionization vacuum gauge 700 to monitor the vacuum degree of the vacuum chamber; and the synchronous trigger 800 is configured to send a trigger signal to the pulse valve controller 500 and the oscilloscope 400.

[0060] It should be noted that when the gas molecules in the vacuum cavity contact the electrode, the gas molecules are ionized into ions and free electrons, and the ionization process can be achieved by electron bombardment of gas molecules through an electric field, or by particle bombardment of gas molecules using radioactive substances. The ions and electrons are then captured by the collector to form a measurable current. By measuring the size of the current, the gas pressure inside the vacuum cavity can be calculated, and thus the vacuum degree can be determined. Specifically, the ionization vacuum gauge 700 usually includes a cathode, a grid and a collector. When the cathode is powered and heated to a high temperature, it will emit hot electrons. These electrons accelerate under the action of an electric field and collide with gas molecules, causing ionization. The positive ions produced by ionization are absorbed by the negatively charged collector to form an ion current. The size of the ion current is directly proportional to the concentration of gas molecules in the vacuum cavity. Therefore, by measuring the size of the ion current, the vacuum degree can be determined. By determining the vacuum degree, the change in gas pressure in the vacuum cavity can be accurately reflected. Moreover, the ionization vacuum gauge 700 has a fast response speed, generally in the order of milliseconds, which can quickly capture changes in the vacuum degree and improve the response speed of the pulsed molecular beam measurement.

[0061] It should also be noted that the synchronization trigger 800 is a special trigger structure whose triggering action is synchronized with a certain specific moment (such as the rising edge or the falling edge) of the clock signal. When the clock signal reaches this specific moment, the synchronization trigger 800 outputs a trigger signal. The synchronization trigger 800 ensures that the pulse valve controller 500 and the oscilloscope 400 receive the trigger signal in the same clock cycle, i.e. when the synchronization trigger 800 outputs the trigger signal, the pulse valve controller 500 will perform the corresponding action, and at the same time, the oscilloscope 400 will start recording or displaying the electrical signal. When the oscilloscope 400 is synchronized with the synchronization trigger 800, it can be ensured that the signal is recorded at the correct moment, thereby improving the accuracy of the measurement.

[0062] In some embodiments, a dry pump is used to pump down the experimental chamber to a low vacuum, and when the vacuum degree reaches <10 -2 mbar, a molecular pump is turned on to continue pumping to a high vacuum. The ionization vacuum gauge 700 is used to detect the vacuum degree of the vacuum cavity. When the vacuum degree in the vacuum cavity is lower than the preset upper limit of the vacuum degree (<10 -5 mbar), the ion gauge controller 600 can control the ion gauge 300 to be normally turned on, thereby providing a kind of vacuum overpressure protection for the filament core and other components of the ion gauge 300.

[0063] In some embodiments, when the chamber vacuum reaches the experimental requirements, the synchronous trigger 800, the pulse valve controller 500, the pulse valve 200, the ion gauge 300, the ion gauge controller 600, the oscilloscope 400 and the electronic device are started. In the experiment, the pulse valve 200, the ion gauge controller 600 and the oscilloscope 400 are synchronized by time synchronization means. Since the nozzle of the pulse valve 200 is a certain distance away from the ionization center of the ionization vacuum gauge 700, the pulse molecular beam needs to fly for a certain time to reach the ionization area. The average speed of the molecular beam can be used to estimate the flight time of the gas beam, so as to determine the trigger delay time of the oscilloscope 400, so that the oscilloscope 400 can detect the pulse signal within a reasonable time domain range.

[0064] In a possible implementation manner, the ion gauge 300 comprises a grid, a collector and a filament core wire, the grid and the collector are composed of tungsten wires, and the filament core wire is composed of iridium wires.

[0065] In some embodiments, as Figure 3As shown, the ion gauge 300 includes a grid, a collector and a filament core, wherein the grid and the collector are composed of tungsten wires, the diameter of the tungsten wire of the grid is 0.2mm, and the assembly size is 30 turns, the diameter of the tungsten wire of the collector is 0.15mm, and the filament core is composed of iridium wire, the diameter of the iridium wire is 0.15mm, and the assembly size is 15 turns. The main function of the grid is to control the trajectory of the electrons, so that the electrons can collide with the gas molecules more effectively and produce ionization. At the same time, the grid also protects the collector from direct electron bombardment, prolonging the service life of the collector. The main function of the collector is to collect the ions and electrons produced by ionization and convert them into a current signal, the size of which is proportional to the gas pressure in the vacuum chamber, so it can be used to measure the vacuum degree. The main function of the filament core is to heat the cathode and produce hot electron emission. These hot electrons accelerate under the action of the electric field and collide with the gas molecules to produce ionization. The charged particles produced by ionization are then collected by the grid and the collector and converted into a current signal. The grid and the collector are made of tungsten wire. Because the melting point of tungsten wire is as high as 3410℃, it can still maintain good mechanical strength at high temperature, which makes the tungsten wire grid and collector able to operate stably in a high-temperature environment. Tungsten wire has excellent anti-creep performance and is not easy to deform or damage. Tungsten wire also has good chemical stability and is not easy to react with other substances, thereby ensuring the stable performance of the grid and the collector during long-term use. When tungsten wire is used as a cathode material, it can stably emit electrons because the work function of tungsten is low, making it easy for electrons to escape from the surface. When the grid is made of tungsten wire, the electron flow emitted by the cathode can be more effectively controlled. The grid and the collector are made of tungsten wire, which can more effectively collect electrons and ions. Because the tungsten wire has good electrical conductivity, the transmission efficiency of electrons between the grid and the collector is higher, thereby improving the performance of the ion gauge 300. The filament core is made of iridium wire, which has a very high melting point of 2454℃. When the filament core is made of iridium wire, the service life of the filament core can be improved. Iridium wire has excellent thermal electron emission capability, which means that it can emit more electrons at the same temperature. By optimizing the mechanical size of the ion gauge 300, the response speed of the pulsed molecular beam measurement is improved.

[0066] In one possible implementation, the system further comprises an electronic device connected with the ion gauge controller 600; the ion gauge controller 600 is configured to control the ion gauge 300 to start, including: setting parameters of the ion gauge 300 by the electronic device, and controlling the ion gauge 300 to start based on the parameters of the ion gauge 300 by the ion gauge controller 600.

[0067] It should be noted that in some embodiments, the electronic device includes an ion gauge 300 driving program for setting parameters of the ion gauge 300, including but not limited to: grid current, filament voltage, filament current, etc. For example, in some embodiments, the grid voltage is first set to 300V, and then the filament current is set to 2000mA to monitor the emission current. Adjust the grid voltage and filament current to the appropriate emission current. When the grid voltage is greater than 200V and the filament current is greater than 900mA, the stable emission current mode can be started. The ion gauge controller 600 controls the ion gauge 300 to start according to the ion gauge 300 parameters set by the ion gauge 300 driving program installed on the electronic device. The parameters of the ion gauge 300 are set by the ion gauge 300 driving program to control the start of the ion gauge 300, which realizes accurate control and adjustment of the parameters, and automation of data acquisition and processing of the test system, and improves the test efficiency and accuracy.

[0068] It should also be noted that in some embodiments, the electronic device further comprises: an input / output interface for realizing information input and output; a communication interface for realizing communication interaction between the device and other devices, which can realize communication through wired means (such as USB, network cable, etc.) or wireless means (such as mobile network, WI FI, Bluetooth, etc.); a bus for transmitting information between various components of the device.

[0069] In one possible implementation manner, the electronic device includes a memory and a processor, the memory is used to store the visualized molecular beam data, and the processor is used to fit the visualized molecular beam data stored in the memory to obtain fitting data.

[0070] It should be noted that, as Figure 4 The fitting curve diagram provided by the embodiment of the present application is shown in the figure. By fitting the visualized molecular beam data, the model of the data can adapt to the time series data pattern. By fitting the model, the noise and interference in the experimental data are filtered out, the measurement result is more reliable, the internal relationship and rules between the data are revealed, the experimental data are accurately approximated by the mathematical model, and more accurate parameter estimation is obtained, which helps users to observe the time domain peak type and relative intensity of the molecular beam.

[0071] The memory, as a non-transitory network system, can be used to store non-transitory software programs and non-transitory computer executable programs. In addition, the memory can include high-speed random access memory and can also include non-transitory memory, such as at least one magnetic disk storage device, a flash memory device, or other non-transitory solid-state memory device. In some embodiments, the memory can optionally include a memory that is remotely arranged relative to the processor, and these remote memories can be connected to the processor through a network. Examples of the above-mentioned network include but are not limited to the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0072] The memory can be implemented in the form of a read only memory (ROM), a static storage device, a dynamic storage device, or a random access memory (RAM). The memory can store an operating system and other application programs. When the technical solutions provided by the embodiments of the present specification are implemented by software or firmware, the related program codes are saved in the memory and are called and executed by the processor to implement the method of the embodiments of the present application.

[0073] The processor can be implemented in the form of a general-purpose CPU (central processing unit), a microprocessor, an application specific integrated circuit (ASIC), or one or more integrated circuits, and is used to execute related programs to implement the technical solutions provided by the embodiments of the present application.

[0074] To achieve the above-mentioned purpose, a second aspect of the embodiments of the present application proposes a pulsed molecular beam measurement method, which comprises: spraying a gas containing target molecules into a vacuum chamber, the gas forming a molecular beam in the vacuum chamber; emitting thermal electrons into the vacuum chamber through an ion rule 300, the molecular beam colliding with the thermal electrons in the vacuum chamber to form a current signal corresponding to the molecular beam; collecting the current signal, amplifying and converting the current signal into a voltage signal, and then transmitting the voltage signal to an oscilloscope 400; collecting and processing the voltage signal through the oscilloscope 400 to obtain visual molecular beam data.

[0075] Specifically, the hot electrons and the gas molecules of the molecular beam collide, causing the gas molecules to ionize to generate positive ions and free electrons, and the positive ions generated in the ionization process are guided to the collecting electrode under the action of the electric field, forming an electric current proportional to the number density of the gas molecules and being collected. The conversion of the current signal into a voltage signal includes amplifying the tiny current signal through an amplification module inside the ion rule controller 600, converting the amplified current signal into a voltage signal through a conversion module, and then transmitting the voltage signal to the oscilloscope 400. The oscilloscope 400 receives relevant voltage and time data, and displays the molecular beam intensity and time-domain pulse peak curve in real time.

[0076] In some embodiments, the method further comprises averaging the visualized molecular beam data multiple times and storing the molecular beam data into the memory of the electronic device, and analyzing and fitting the molecular beam data through the processor of the electronic device to obtain fitting data, so that the model of the data can adapt to the timing data pattern, and through the fitting model, the noise and interference in the experimental data are filtered out, the measurement result is more reliable, the internal relationship and regularity between the data are revealed, the experimental data are accurately approximated through the mathematical model, thereby obtaining more accurate parameter estimation, and helping the user to observe the time-domain peak type and relative intensity of the molecular beam.

[0077] Through the method provided by the second aspect, the current signal is converted into a voltage signal after being processed by the control module 100, effectively suppressing the noise, current drift and voltage drift in the measurement process, improving the accuracy and stability of the molecular beam time-domain peak measurement, solving the problem that the performance parameters of the measurement system in the prior art are limited to a certain extent, thereby causing larger errors and drifts in the measurement process, affecting the reliability and repeatability of the experimental results, suppressing the noise interference in the pulsed molecular beam measurement process, and improving the accuracy of the pulsed molecular beam measurement.

[0078] An embodiment of the present application further provides a computer readable storage medium, which stores computer executable instructions, and the computer executable instructions are used to execute the pulsed molecular beam measurement method provided by any one of the embodiments of the present application.

[0079] An embodiment of the present application further provides a computer program product, which comprises a computer program or computer instructions, and the computer program or computer instructions are stored in a computer readable storage medium. A processor of a computer device reads the computer program or computer instructions from the computer readable storage medium, and the processor executes the computer program or computer instructions, so that the computer device executes the pulsed molecular beam measurement method provided by any one of the embodiments of the present application.

[0080] The system architecture and application scenarios described in the embodiments of the present application are used to more clearly illustrate the technical solutions of the embodiments of the present application, and do not constitute a limitation on the technical solutions provided by the embodiments of the present application. Those skilled in the art can know that, with the evolution of system architecture and the appearance of new application scenarios, the technical solutions provided by the embodiments of the present application are also applicable to similar technical problems.

[0081] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer readable storage medium, and when the computer program is executed, the processes of the above-mentioned embodiments of the methods can be included. In the embodiments of the present application, any reference to memory, storage, database or other medium can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration but not as a limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synch link) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM), etc.

[0082] As will be appreciated by one of ordinary skill in the art, all or some steps, systems of the above-disclosed methods can be implemented as software, firmware, hardware, or a suitable combination thereof. Some or all of the physical components or modules can be implemented as software executed by a processor, such as a central processing unit, a digital signal processor, or a microprocessor, or as hardware, or as an integrated circuit, such as an application specific integrated circuit. Such software can be distributed on computer readable media, which can comprise computer storage media (or non-transitory media), and communication media (or transitory media). As is well known to those of ordinary skill in the art, computer storage media includes volatile and non-volatile, removable and non-removable media implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data. Computer storage media includes, but is not limited to, RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, digital versatile disks (DVD) or other optical disk storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other medium which can be used to store the desired information and which can be accessed by a computer. Further, as is well known to those of ordinary skill in the art, communication media typically embodies computer readable instructions, data structures, program modules or other data in a modulated data signal such as a carrier wave or other transport mechanism and includes any information delivery media.

[0083] The above description of certain examples of the application has been presented for the purposes of illustration and description. It is not intended to be exhaustive or to limit the scope of the application to the precise form described, and many modifications, equivalents and variations are possible in light of these teachings. It is intended that the scope of the application be limited not with this detailed description, but rather by the claims appended hereto.

[0084] As will be appreciated by one of ordinary skill in the art, all or some steps, systems, functional modules / units of the above-disclosed methods can be implemented as software, firmware, hardware, or a suitable combination thereof.

[0085] The terms "first", "second", "third", "fourth" etc. (if any) in the description and the claims hereof are used for distinguishing between similar elements and not necessarily for describing a sequential or chronological order. It is to be understood that the use of these terms herein is to distinguish one feature from another and not necessarily for describing a sequential or chronological order. It is further to be understood that the data used herein can be interchanged, where appropriate, without departing from the scope of the embodiments described herein. Furthermore, the terms "comprise", "comprising", "include", "including", and "has", "having" and variants thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises, has or includes an item or list of items that does not include other non-specified items or steps, can still be deemed to include such other non-specified items or steps, for example, a process, method, article, or apparatus that comprises, has or includes an item or list of items can still include other non-specified items or steps, without placing a restriction on the items or steps that such process, method, article, or apparatus includes, has or comprises.

[0086] In addition, each functional unit in each embodiment of the present application can be integrated in one processing unit, or each unit can exist physically, or two or more units can be integrated in one unit. The integrated unit can be realized in the form of hardware or in the form of a software functional unit.

[0087] Each embodiment in the specification is described in a progressive manner, and the same or similar parts between each embodiment can be referred to each other. Each embodiment focuses on the difference from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant part can be referred to the part of the method embodiment.

[0088] The above describes specific embodiments of the specification. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be executed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multi-task processing and parallel processing are possible or can be advantageous.

[0089] The preferred embodiments of the embodiments of the present application are described above with reference to the accompanying drawings, and the scope of the rights of the embodiments of the present application is not limited thereto. Any modifications, equivalent replacements and improvements made by those skilled in the art without departing from the scope and essence of the embodiments of the present application shall be within the scope of the rights of the embodiments of the present application.

Claims

1. A pulsed molecular beam measurement system, comprising: The system comprises: a control module, a pulse valve, an ion gauge and an oscilloscope, the pulse valve, the ion gauge and the oscilloscope being connected with the control module respectively; the control module is configured to control the pulse valve and the ion gauge to start; the pulse valve is configured to spray a gas containing target molecules into a backward vacuum cavity after starting, the gas forming a molecular beam in the vacuum cavity; the ion gauge is configured to emit hot electrons into the vacuum cavity after starting, the molecular beam colliding with the hot electrons in the vacuum cavity to form a current signal corresponding to the molecular beam; the control module is further configured to collect the current signal, amplify and convert the current signal into a voltage signal, and then transmit the voltage signal to the oscilloscope; the oscilloscope is configured to collect and process the voltage signal to obtain visualized molecular beam data.

2. The system of claim 1, wherein, The control module comprises a pulse valve controller and an ion gauge controller; the control module is configured to control the pulse valve and the ion gauge to start, comprising: the pulse valve controller is configured to control the pulse valve to start, and the ion gauge controller is configured to control the ion gauge to start; the control module is further configured to collect the current signal, amplify and convert the current signal into a voltage signal, and then transmit the voltage signal to the oscilloscope, comprising: the ion gauge controller is configured to collect the current signal, amplify and convert the current signal into a voltage signal, and then transmit the voltage signal to the oscilloscope.

3. The system of claim 2, wherein, The ion gauge controller comprises an amplification module and a conversion module; the ion gauge controller is configured to collect the current signal, amplify and convert the current signal into a voltage signal, and then transmit the voltage signal to the oscilloscope, comprising: the amplification module amplifies the current signal to obtain an amplified current signal, and the conversion module converts the amplified current signal into the voltage signal and then transmits the voltage signal to the oscilloscope.

4. The system of claim 3, wherein, The ion gauge controller further comprises a multi-stage filtering module for eliminating noise output by a power supply.

5. The system of claim 2, wherein, The system further comprises an ionization vacuum gauge and a synchronous trigger, the control module further comprises an ionization vacuum gauge controller, the ionization vacuum gauge controller being connected with the ionization vacuum gauge and the ion gauge controller, and the synchronous trigger being connected with the pulse valve controller and the oscilloscope; the ionization vacuum gauge controller is configured to control the ionization vacuum gauge to monitor the vacuum degree of the vacuum cavity; the synchronous trigger is configured to send a trigger signal to the pulse valve controller and the oscilloscope.

6. The system of claim 1, wherein, The ion gauge comprises a grid, a collector and a filament core, the grid and the collector being composed of tungsten filaments, and the filament core being composed of iridium filaments.

7. The system of claim 2, wherein, The system further comprises an electronic device, the electronic device being connected with the ion gauge controller; the ion gauge controller is configured to control the ion gauge to start, comprising: the electronic device sets parameters of the ion gauge, and the ion gauge controller controls the ion gauge to start based on the parameters of the ion gauge.

8. The system of claim 7, wherein, The electronic device comprises a memory and a processor, the memory being configured to store the visualized molecular beam data, and the processor being configured to fit the visualized molecular beam data stored in the memory to obtain fitting data.

9. A method of pulsed molecular beam measurement, characterized by, The method comprises: injecting a gas containing target molecules into a vacuum chamber, the gas forming a molecular beam in the vacuum chamber; emitting thermal electrons into the vacuum chamber by an ion guillotine, the molecular beam colliding with the thermal electrons in the vacuum chamber to form a current signal corresponding to the molecular beam; collecting the current signal, amplifying and converting the current signal into a voltage signal, and transmitting the voltage signal to an oscilloscope; collecting and processing the voltage signal by the oscilloscope to obtain visualized molecular beam data.

10. A computer readable storage medium, the storage medium having stored thereon a computer program, characterized in that, The computer program, when executed by a processor, implements the method of claim 9 for measuring a molecular beam.

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