Rapid pre-alignment device and method for mask plate

Abstract

The invention relates to the technical field of photoetching equipment, in particular to a rapid pre-alignment device and method for a mask plate. The device comprises an upper computer, a logic controller, a sensor and an actuator. The sensor detects the mask plate to obtain a digital input signal, and uploads the digital input signal to the logic controller and the upper computer; the logic controller enables the actuator to execute actions on the mask plate according to the received digital input signal; and the logic controller receives a verification digital signal sent by the upper computer and compares the digital output signal with the verification digital signal, and when the comparison result is inconsistent, the logic controller interrupts the control of the next action of the actuator and feeds back an interrupt signal to the upper computer. In the delay state of the upper computer, quick response can be realized through the logic controller to complete control on the actuator, so that the pre-alignment processing efficiency of the mask plate is improved.

Description

Technical Field

[0001] The present application relates to the technical field of lithography equipment, and in particular to a rapid pre-alignment device and method for a mask. Background Art

[0002] The existing lithography machine mask pre-alignment process includes structures such as a host computer, sensors, and actuators. The action process performed by the existing structure is mainly divided into several steps, including air floating suspension, scanning clamping alignment, release, and adsorption. The host computer receives the digital signal from the sensor and makes a logical judgment, and then sends the digital signal to the actuator, so that the sensor and actuator can interact with the host computer through digital signals.

[0003] Since the signal transmission of the host computer in the prior art must pass through modules such as the field bus adapter, coupler, and adapter board, the signal transmission time is relatively long. In addition, the host computer also takes a long time to perform logic judgment. The signal transmission time plus the logic judgment time ultimately cause the control delay of the host computer. Therefore, it is difficult for the pre-alignment device to realize the rapid pre-alignment process of the lithography machine mask, thereby affecting the output of the lithography machine. Summary of the invention

[0004] The purpose of the present application is to provide a fast pre-alignment device and method for a mask, which can achieve fast response and complete control of an actuator through a logic controller in a delayed state of a host computer, thereby improving the pre-alignment processing efficiency of the mask.

[0005] The embodiment of the present application is implemented as follows: In a first aspect, an embodiment of the present application provides a rapid pre-alignment device for a mask, comprising a host computer, a logic controller, a sensor, and an actuator; the sensor is electrically connected to the host computer and the logic controller, respectively; the logic controller is electrically connected to the actuator and the host computer, respectively.

[0006] The sensor obtains a digital input signal by detecting the position information and barcode information of the mask, and uploads the digital input signal to the logic controller and the host computer respectively; The host computer determines that the sensor is working properly according to the received digital input signal, and sends a verification digital signal to the logic controller; The logic controller sends a digital output signal to the actuator according to the received digital input signal, so that the actuator performs an action on the mask; and the logic controller receives a verification digital signal sent by the host computer, and compares the digital output signal with the verification digital signal. When the comparison result is inconsistent, the logic controller interrupts the control of the next action of the actuator and feeds back an interrupt signal to the host computer.

[0007] As an optional implementation, the sensor includes a first sensing module, which is used to sense the air path pressure information satisfied by the air flotation and adsorption actions on the mask and obtain a first digital input signal; The logic controller controls the actuator to perform a floating or adsorption action on the mask in response to the received first digital input signal; The actuator comprises a pneumatic unit arranged below the mask plate, and the pneumatic unit provides positive pressure blowing to the lower surface of the mask plate to make the mask plate complete the floating action or provides negative pressure suction to the lower surface of the mask plate to complete the adsorption action.

[0008] As an optional implementation, the sensor further includes a second sensing module, which is used to sense the position information of the mask to obtain a second digital input signal; The sensor further includes a barcode scanning module for acquiring barcode information on the mask to obtain a third digital input signal; The sensor further comprises a pressure switch for detecting the air pressure value of the clamping unit and obtaining a fourth digital input signal; The logic controller controls the actuator to clamp or release the mask in response to the received second digital input signal, third digital input signal, and fourth digital input signal; The actuator comprises a clamping unit arranged on a side of the mask plate, and the clamping unit abuts against the side of the mask plate to clamp or the clamping unit separates from the side of the mask plate to release.

[0009] As an optional embodiment, the clamping unit includes a pneumatic telescopic rod, and the pneumatic telescopic rod performs a clamping or releasing action by telescoping.

[0010] As an optional implementation, the logic controller includes any one of a programmable logic device, a digital signal processor and a microcontroller.

[0011] In a second aspect, an embodiment of the present application provides a method for rapid pre-alignment of a mask, the method comprising: Receiving a digital input signal of the mask plate acquired by a sensor, wherein the digital input signal includes gas path pressure information, position information of the mask plate, and barcode information; Sending a digital output signal to the actuator according to the digital input signal, so that the actuator performs a corresponding action on the mask according to the digital output signal; Receiving a verification digital signal sent by a host computer, wherein the verification digital signal is verification request information sent by the host computer after the host computer determines that the sensor is in a normal working state according to the received digital input signal; Perform a logic comparison between the digital output signal and the verification digital signal, and send a corresponding execution signal to the actuator based on the logic comparison result.

[0012] As an optional implementation, the performing of a logic comparison between the digital output signal and the verification digital signal, and sending a corresponding execution signal to the actuator according to the logic comparison result includes: Perform logical AND judgment on the digital output signal and the verification digital signal sent by the host computer; When the digital output signal is consistent with the verification digital signal, the logic controller continues to control the actuator to perform the next action; When the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop executing the next action and feeds back an interrupt signal to the host computer.

[0013] As an optional implementation, the sensor includes a first sensing module; the actuator includes a pneumatic unit; The sending of a digital output signal to the actuator according to the digital input signal so that the actuator performs a corresponding action on the mask according to the digital output signal comprises: The logic controller receives a first digital input signal generated by the first sensing module, and controls the pneumatic unit to perform a floating or adsorption action on the mask.

[0014] As an optional implementation, the sensor includes a second sensing module, a code scanning module and a pressure switch; the actuator includes a clamping unit; The sending of a digital output signal to the actuator according to the digital input signal so that the actuator performs a corresponding action on the mask according to the digital output signal comprises: The logic controller receives the second digital input signal generated by the second sensing module, the third digital input signal generated by the scanning module, and the air pressure value of the clamping unit detected by the pressure switch to obtain a fourth digital input signal, and controls the clamping unit to clamp or release the mask.

[0015] As an optional implementation, sending a digital output signal to an actuator according to the digital input signal so that the actuator performs a corresponding action on the mask according to the digital output signal includes: The logic controller controls the actuator to perform floating, clamping, releasing and adsorbing actions on the mask in sequence.

[0016] As an optional implementation, when the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop executing the next action and feeds back an interrupt signal to the host computer, and the method further includes: The logic controller receives the instruction from the host computer, and the logic controller controls the actuator to continue to perform the action.

[0017] The beneficial effects of the embodiments of the present application include: The embodiment of the present application adds a logic controller between the actuator and the sensor. The logic controller can perform a simple state latch on the sensor signal and directly control the actuator, thereby reducing the signal transmission time and logic judgment time. Therefore, the embodiment of the present application can significantly reduce the time of signal transmission and logic judgment, and improve the speed and efficiency of the lithography machine mask pre-alignment process. At the same time, through the instruction synchronization and verification mechanism, the accuracy of the operation is ensured and potential operational errors are avoided. The improvement of the embodiment of the present application not only improves the response speed of the system, but also enhances the reliability and stability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is a schematic diagram of a module of a rapid pre-alignment device according to an embodiment of the present application; Figure 2 This is one of the flow charts of the rapid pre-alignment device according to an embodiment of the present application; Figure 3 This is the second flow chart of the rapid pre-alignment device according to the embodiment of the present application; Figure 4 This is a logic block diagram of a fast pre-alignment device according to an embodiment of the present application; Figure 5 It is a schematic diagram of the logic OR gate triggering of an embodiment of the present application. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0022] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0023] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0024] The existing pre-alignment process of the mask of the lithography machine includes structures such as the host computer, sensors and actuators. The action process performed by the existing structure is mainly divided into several steps such as flotation, clamping, release and adsorption. The host computer receives the digital signal sent by the sensor and makes a logical judgment, and then sends the digital signal to the actuator, so that the sensor and actuator can interact with the host computer through digital signals.

[0025] Since the signal transmission of the host computer in the prior art must pass through modules such as the field bus adapter, coupler, and adapter board, the signal transmission time is relatively long. In addition, the host computer also takes a long time to perform logic judgment. The signal transmission time plus the logic judgment time ultimately cause the control delay of the host computer. Therefore, it is difficult for the pre-alignment device to realize the rapid pre-alignment process of the lithography machine mask, thereby affecting the output of the lithography machine.

[0026] In order to solve the above technical problems, the embodiments of the present application provide a rapid pre-alignment device and method for a mask.

[0027] Reference Figure 1 As shown, an embodiment of the present application provides a rapid pre-alignment device for a mask, comprising a host computer, a logic controller, a sensor and an actuator; the sensor is electrically connected to the host computer and the logic controller respectively; the logic controller is electrically connected to the actuator and the host computer respectively.

[0028] The sensor obtains a digital input signal by detecting the air path pressure information, the position information and the barcode information of the mask plate satisfied by the flotation and adsorption actions of the mask plate, and uploads the digital input signal to the logic controller and the host computer respectively; The host computer determines that the sensor is working properly based on the received digital input signal and sends a verification digital signal to the logic controller; The logic controller sends a digital output signal to the actuator based on the received digital input signal, so that the actuator performs an action on the mask; and the logic controller receives a verification digital signal sent by the host computer, and compares the digital output signal with the verification digital signal. When the comparison result is inconsistent, the logic controller interrupts the control of the next action of the actuator and feeds back an interrupt signal to the host computer.

[0029] It should be noted that the host computer and the logic controller receive the digital input signals obtained by the sensor respectively. The logic controller directly outputs the signal according to the digital input signal to control the action of the actuator. The host computer performs complex logic judgment according to the digital input signal, with the purpose of judging whether the signal given by the sensor is abnormal, which is used to eliminate the safety risks caused by abnormal sensor failure, and can eliminate the action conflict with other modules to avoid motion interference. Since the actuator has been controlled by the logic controller, the host computer sends a verification digital signal to the logic controller after completing the complex logic judgment, and then the logic controller performs a simple logic comparison judgment. When the verification digital signal is consistent with the digital output signal sent by the logic controller, it means that the sensor is not faulty and there is no action conflict with other modules, which effectively avoids motion interference. The digital output signal of the logic controller is controlled correctly, without interruption, and the logic controller completes the fast action control. When the verification digital signal is inconsistent with the digital output signal sent by the logic controller, it proves that the sensor is faulty (or conflicts with other modules or has motion interference), the logic controller interrupts the next action control and feedbacks to the host computer. The staff can troubleshoot the fault according to the fault error and then re-send the start action command from the host computer.

[0030] In addition, it should be noted that, in the embodiment of the present application, the host computer can also directly send control commands to the actuator. In other words, the embodiment of the present application has two control modes, one is direct control by the host computer, and the other is the logic controller access control mode that is the key protection implemented in this application. In specific applications, technicians in this field can make a choice according to the specific situation.

[0031] It should be noted that the rapid pre-alignment device provided in the embodiment of the present application includes a host computer, a logic controller, a sensor and an actuator. The embodiment of the present application can directly process the sensor signal and control the actuator by adding a logic controller between the sensor and the actuator without going through multiple intermediate modules such as field bus adapters, couplers, etc., thereby greatly reducing the signal transmission time.

[0032] It should be noted that the embodiment of the present application can quickly perform simple logic judgments locally through the logic controller without waiting for the response of the host computer, thereby further reducing the overall delay time.

[0033] The signals sent by the host computer and the signals sent by the logic controller are logically ANDed to ensure the consistency of the instructions. If the instructions are inconsistent, the logic controller will interrupt the next process to avoid erroneous operations. At the same time, the logic controller will upload the error status to the host computer to prompt the process interruption. This helps to discover and correct problems in a timely manner and avoid further operational errors.

[0034] The embodiment of the present application adds a logic controller between the actuator and the sensor. The logic controller can perform a simple state latch on the sensor signal and directly control the actuator, thereby reducing the signal transmission time and the logic judgment time.

[0035] Therefore, the embodiment of the present application can significantly reduce the time of signal transmission and logic judgment, and improve the speed and efficiency of the lithography machine mask pre-alignment process. At the same time, the verification mechanism of the host computer for fault detection of sensor signals ensures the accuracy of the operation and avoids operational errors caused by sensor failure. The improvement of the embodiment of the present application not only improves the response speed of the system, but also enhances the reliability and stability of the system.

[0036] Reference Figure 2 , Figure 3 As shown, in the embodiment of the present application, the method corresponding to the logic controller is: Receive a digital input signal of the mask obtained by the sensor, the digital input signal including the position information and barcode information of the mask, and information on whether the gas pressure of the gas path reaches a threshold range of flotation or adsorption; Sending a digital output signal to the actuator according to the digital input signal, so that the actuator performs a corresponding action on the mask according to the digital output signal; Receive a verification digital signal sent by the host computer, where the verification digital signal is a verification request information sent by the host computer after the host computer determines that the sensor is in a normal working state based on the received digital input signal; Perform a logic comparison between the digital output signal and the verification digital signal, and send a corresponding execution signal to the actuator based on the logic comparison result.

[0037] Specifically, performing a logic comparison on the digital output signal and the verification digital signal, and sending a corresponding execution signal to the actuator according to the logic comparison result includes: Perform logical AND judgment on the digital output signal and the verification digital signal sent by the host computer; When the digital output signal is consistent with the verification digital signal, the logic controller continues to control the actuator to perform the next action; When the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop executing the next action and feeds back an interrupt signal to the host computer.

[0038] As an optional implementation, the sensor includes a first sensing module, which is used to sense the air path pressure information satisfied by the air flotation and adsorption actions on the mask and obtain a first digital input signal; The logic controller controls the actuator to perform a floating or adsorption action on the mask in response to the received first digital input signal; The actuator includes a pneumatic unit arranged under the mask plate, which provides positive pressure blowing to the lower surface of the mask plate to make the mask plate complete the floating action or provides negative pressure suction to the lower surface of the mask plate to complete the adsorption action.

[0039] In the embodiments of the present application, a pneumatic unit is used to perform an air floating action on the mask so that the mask can be suspended, or an adsorption action is used to enable the mask to be adsorbed and fixed.

[0040] It should be noted that before starting the action, the host computer sends a start signal to select the control mode, that is, whether it is controlled by the host computer directly or by the logic controller. Before starting the action, the host computer must first send a "pre-alignment process start signal"; during the validity period of the "process start signal", whether it is a signal sent by the "host computer direct control mode" or a signal sent by the "logic controller control mode", any signal sent can send instructions to the actuator. See Figure 5 , logic triggers the OR gate; when signal A, that is, the process start signal, is valid; signals B and C, that is, the signals under the two control modes, perform an "OR" logic operation, and if either signal under the B or C control mode is valid, an effective control instruction can be issued. The direct control of the host computer in this solution is mainly used for debugging and manual intervention when a fault occurs; during the normal operation of the equipment, after the host computer sends a control signal, the logic controller automatically controls according to the preset program.

[0041] Specifically, refer to Figure 1 As shown, the first sensing module includes an air floating pressure switch and an adsorption pressure switch. The logic controller adopts CPLD. The pneumatic unit includes an air floating solenoid valve and an adsorption solenoid valve.

[0042] Reference Figure 2 , Figure 3 as well as Figure 4 As shown, in the control mode of the logic controller, when the air flotation action is performed, the air flotation pressure switch uploads the first digital input signal to the host computer and the CPLD respectively. While the host computer performs signal transmission and logic judgment, the CPLD sends an opening signal to the air flotation solenoid valve according to the first digital input signal, so that the air flotation solenoid valve performs the air flotation action on the mask.

[0043] In the control mode of the logic controller, when the adsorption action is performed, the adsorption pressure switch uploads the first digital input signal to the host computer and the CPLD respectively. While the host computer performs signal transmission and logic judgment, the CPLD sends an opening signal to the adsorption solenoid valve according to the first digital input signal, so that the adsorption solenoid valve performs the adsorption action on the mask.

[0044] It should be noted that continuous monitoring can be performed. Specifically, the CPLD sends a flotation instruction and continuously monitors the signal of the flotation pressure (positive pressure) switch to ensure that the flotation state is maintained. Similarly, the CPLD sends an adsorption instruction and continuously monitors the signal of the adsorption pressure (negative pressure) switch to ensure that the adsorption state is maintained.

[0045] After a certain signal transmission time, the host computer sends a verification digital signal to the CPLD, and the CPLD performs a logical AND operation on the verification digital signal and the digital output signal generated by itself.

[0046] If the logic verification result is "1", it means that the actuator signals are consistent and the next action sequence is allowed to continue.

[0047] If they are inconsistent, the CPLD will interrupt the signal of the next action process and upload the inconsistent status as an interrupt signal to the host computer, indicating that the process is interrupted.

[0048] As an optional implementation, the sensor includes a second sensing module, which is used to sense the position information of the mask and convert it into a second digital input signal; wherein the position information can be interpreted as height position information and horizontal position information of the mask.

[0049] The sensor includes a barcode scanning module, which is used to obtain the barcode information on the mask and convert it into a third digital input signal; The actuator includes a clamping unit for clamping or releasing the mask; the sensor also includes a clamping and releasing pressure switch for detecting the air pressure value in the clamping unit and obtaining a fourth digital input signal; After receiving the second digital input signal, the third digital input signal and the fourth digital input signal, the logic controller controls the clamping unit to perform a clamping or releasing action on the mask.

[0050] Furthermore, the clamping unit includes a pneumatic telescopic rod, which is used as a power source for clamping or releasing; wherein the clamping unit is arranged on the side of the mask plate, that is, it is arranged around the circumference of the mask plate. The clamping unit abuts against the side of the mask plate to clamp or separates from the side of the mask plate to release.

[0051] Specifically, the second sensing module includes an optical fiber sensor. The scanning module specifically uses a barcode scanner, wherein the host computer can identify the two-dimensional code on the mask through the barcode scanner and compare it with the information in the database.

[0052] Reference Figure 2 , Figure 3 As shown, the optical fiber sensor performs alignment detection on the mask and uploads a second digital input signal to the CPLD and the host computer respectively. The barcode scanner scans the barcode information on the mask and uploads a third digital input signal to the CPLD and the host computer respectively. The clamping and releasing pressure switch is used to detect the air pressure threshold signal of the clamping unit and upload a fourth digital input signal to the CPLD and the host computer respectively.

[0053] If the previous action step, that is, the air flotation action, is completed correctly, the CPLD directly sends a digital output signal to the clamping unit, causing the pneumatic telescopic rod of the clamping unit to move and perform the clamping action. After a certain signal transmission time, the host computer completes the logic judgment and sends a verification digital signal to the CPLD. The CPLD performs a logic check on the verification digital signal and its own digital output signal. After the check is correct, proceed to the next action. If the check is inconsistent, the CPLD will interrupt the signal of the next action and upload the check result as an interrupt signal to the host computer, indicating that the process is interrupted. The staff will start the action after eliminating the problem.

[0054] Reference Figure 2 , Figure 3 As shown, after the clamping action is completed, the release action is performed. When the release action is performed, the optical fiber sensor performs alignment detection on the mask and uploads the second digital input signal to the CPLD and the host computer respectively. The clamping release pressure switch is used to detect the air pressure threshold signal of the clamping unit and upload the fourth digital input signal to the CPLD and the host computer respectively.

[0055] If the previous action step, that is, the clamping is completed correctly, the CPLD sends a signal to the clamping unit to perform the release operation. After a certain signal transmission time, the host computer completes the logic judgment and sends a verification digital signal to the CPLD. The CPLD performs a logic check on this signal and its own control signal. After the check is correct, it continues to the next action. If the check is inconsistent, the CPLD will interrupt the signal of the next action and upload the check result as an interrupt signal to the host computer, indicating that the process is interrupted.

[0056] When the release action is completed correctly, the CPLD sends a signal to start the adsorption action process, so that the actuator performs the adsorption action, so that the mask is adsorbed and fixed.

[0057] It should be noted that, in addition to the above-mentioned CPLD, the logic controller may also use other types of programmable logic devices, and may also use controllers such as digital signal processors, microcontrollers and PLCs as needed. In addition, the above-mentioned first sensing module and second sensing module may also use other types of sensors as needed.

[0058] The fast pre-alignment method for a mask provided in an embodiment of the present application includes: Receiving a digital input signal of the mask plate obtained by the sensor, the digital input signal includes air path pressure information satisfied for performing air flotation and adsorption actions on the mask plate, position information of the mask plate and barcode information; Sending a digital output signal to the actuator according to the digital input signal, so that the actuator performs a corresponding action on the mask according to the digital output signal; Receive a verification digital signal sent by the host computer, where the verification digital signal is a verification request information sent by the host computer after the host computer determines that the sensor is in a normal working state based on the received digital input signal; Perform a logic comparison between the digital output signal and the verification digital signal, and send a corresponding execution signal to the actuator based on the logic comparison result.

[0059] Among them, performing a logic comparison on the digital output signal and the verification digital signal, and sending a corresponding execution signal to the actuator according to the logic comparison result includes: Perform logical AND judgment on the digital output signal and the verification digital signal sent by the host computer; When the digital output signal is consistent with the verification digital signal, the logic controller continues to control the actuator to perform the next action; When the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop executing the next action and feeds back an interrupt signal to the host computer.

[0060] Further, the sensor includes a first sensing module; the actuator includes a pneumatic unit; Sending a digital output signal to the actuator according to the digital input signal so that the actuator performs a corresponding action on the mask according to the digital output signal includes: The logic controller receives the first digital input signal generated by the first sensing module and controls the pneumatic unit to perform flotation or adsorption on the mask. The gas circuit pressure information specifically refers to whether the positive pressure or negative pressure at the air nozzle of the pneumatic unit meets the pressure requirement of flotation or adsorption and whether it is within the pressure threshold range.

[0061] Further, the sensor includes a second sensing module, a code scanning module and a pressure switch; the actuator includes a clamping unit; Sending a digital output signal to the actuator according to the digital input signal so that the actuator performs a corresponding action on the mask according to the digital output signal includes: The logic controller receives the second digital input signal generated by the second sensing module, the third digital input signal generated by the scanning module, and the air pressure value of the clamping unit detected by the pressure switch to obtain a fourth digital input signal, and controls the clamping unit to clamp or release the mask.

[0062] Further, sending a digital output signal to the actuator according to the digital input signal so that the actuator performs a corresponding action on the mask according to the digital output signal includes: The logic controller controls the actuator to perform floating, clamping, releasing and adsorbing actions on the mask in sequence.

[0063] It should be noted that when the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop executing the next action and feeds back an interrupt signal to the host computer. The method also includes: The logic controller receives the instruction from the host computer and controls the actuator to continue to perform the action.

[0064] The technical solution of the embodiment of the present application adds a logic controller between the actuator and the sensor. The logic controller can perform simple state latching and signal output on the sensor signal to directly control the actuator. The mask pre-alignment process temporarily skips the control of the host computer. The actuator can receive the next digital output signal without waiting for the host computer to feedback the digital input signal sent by the previous sensor, which reduces the transmission time and logic judgment time of the input and output signals. At the same time, the logic and judgment of the signal sent by the host computer and the signal sent by the logic controller in the current structure ensure the correct execution of the instruction, reduce the transmission time of the signal in the existing structure, and speed up the process of mask pre-alignment of the lithography machine.

[0065] As an optional implementation, the sensor includes a first sensing module; the actuator includes a pneumatic unit; Converting a digital input signal into a digital output signal and sending the digital output signal to an actuator so that the actuator performs an action on the mask according to the digital output signal includes: The logic controller receives the first digital input signal generated by the pneumatic unit detected by the first sensing module, and controls the pneumatic unit to perform a floating or adsorption action on the mask.

[0066] Wherein, the sensor includes a second sensing module and a code scanning module; the actuator includes a clamping unit; Converting a digital input signal into a digital output signal and sending the digital output signal to an actuator so that the actuator performs an action on the mask according to the digital output signal includes: The logic controller receives the second digital input signal generated by the second sensing module, the third digital input signal generated by the scanning module, and the fourth digital input signal obtained by the pressure switch detecting the air pressure value of the clamping unit, and controls the clamping unit to perform clamping, alignment or release action on the mask.

[0067] It should be noted that, refer to Figure 2 , Figure 3 As shown, in the absence of an interrupt signal, the logic controller controls the sensor and the actuator to sequentially perform air floating, in-situ code scanning, clamping and alignment, release, and adsorption actions on the mask.

[0068] As an optional implementation, when the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop executing the next action and uploads an interrupt signal to the host computer, and the method further includes: The logic controller receives the instruction from the host computer and controls the actuator to continue to perform the action.

[0069] The purpose of the present application is to provide a fast pre-alignment device and method for a mask, so as to achieve fast response and complete control of an actuator through a logic controller in a delayed state of a host computer, thereby improving the pre-alignment processing efficiency of the mask.

[0070] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A rapid pre-alignment device for a mask, characterized in that: It includes a host computer, a logic controller, a sensor and an actuator; the sensor is electrically connected to the host computer and the logic controller respectively; the logic controller is electrically connected to the actuator and the host computer respectively; The sensor obtains a digital input signal by detecting the air path pressure information, the position information and the barcode information of the mask plate satisfied by the air flotation and adsorption actions of the mask plate, and uploads the digital input signal to the logic controller and the host computer respectively; The host computer determines that the sensor is working properly according to the received digital input signal, and sends a verification digital signal to the logic controller; The logic controller sends a digital output signal to the actuator according to the received digital input signal, so that the actuator performs an action on the mask; and the logic controller receives a verification digital signal sent by the host computer, and compares the digital output signal with the verification digital signal. When the comparison result is inconsistent, the logic controller interrupts the control of the next action of the actuator and feeds back an interrupt signal to the host computer.

2. The rapid pre-alignment device for a mask according to claim 1, characterized in that: The sensor includes a first sensing module for sensing the air path pressure information satisfied by the air flotation and adsorption actions on the mask and obtaining a first digital input signal; The logic controller controls the actuator to perform a floating or adsorption action on the mask in response to the received first digital input signal; The actuator comprises a pneumatic unit arranged under the mask plate, and the pneumatic unit provides positive pressure blowing to the lower surface of the mask plate to make the mask plate complete the floating action or provides negative pressure suction to the lower surface of the mask plate to complete the adsorption action.

3. The rapid pre-alignment device for a mask according to claim 2, characterized in that: The sensor further comprises a second sensing module, which is used to sense the position information of the mask plate to obtain a second digital input signal; The sensor further includes a barcode scanning module for acquiring barcode information on the mask to obtain a third digital input signal; The actuator includes a clamping unit arranged on the side of the mask plate, and the sensor also includes a pressure switch for detecting the air pressure value of the clamping unit and obtaining a fourth digital input signal; The logic controller controls the actuator to perform an action on the mask in response to the received second digital input signal, third digital input signal and fourth digital input signal; the clamping unit abuts against the side of the mask to clamp or the clamping unit separates from the side of the mask to release.

4. The rapid pre-alignment device for a mask according to claim 3, characterized in that: The clamping unit comprises a pneumatic telescopic rod, and the pneumatic telescopic rod performs a clamping or releasing action by telescoping.

5. The rapid pre-alignment device for a mask according to claim 1, characterized in that: The logic controller includes any one of a programmable logic device, a digital signal processor and a microcontroller.

6. A fast pre-alignment method for a mask, characterized in that: The method comprises: Receiving a digital input signal of the mask plate acquired by a sensor, wherein the digital input signal includes gas path pressure information, position information of the mask plate, and barcode information; Sending a digital output signal to the actuator according to the digital input signal, so that the actuator performs a corresponding action on the mask according to the digital output signal; Receiving a verification digital signal sent by a host computer, wherein the verification digital signal is verification request information sent by the host computer after the host computer determines that the sensor is in a normal working state according to the received digital input signal; Perform a logic comparison between the digital output signal and the verification digital signal, and send a corresponding execution signal to the actuator based on the logic comparison result.

7. The rapid pre-alignment method for a mask according to claim 6, characterized in that: The performing of a logic comparison between the digital output signal and the verification digital signal, and sending a corresponding execution signal to the actuator according to the logic comparison result comprises: Perform logical AND judgment on the digital output signal and the verification digital signal sent by the host computer; When the digital output signal is consistent with the verification digital signal, the logic controller continues to control the actuator to perform the next action; When the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop executing the next action and feeds back an interrupt signal to the host computer.

8. The rapid pre-alignment method for a mask according to claim 7, characterized in that: The sensor includes a first sensing module; the actuator includes a pneumatic unit; The sending of a digital output signal to the actuator according to the digital input signal so that the actuator performs a corresponding action on the mask according to the digital output signal comprises: The logic controller receives a first digital input signal generated by the first sensing module, and controls the pneumatic unit to perform a floating or adsorption action on the mask.

9. The rapid pre-alignment method for a mask according to claim 7, characterized in that: The sensor includes a second sensing module, a code scanning module and a pressure switch; the actuator includes a clamping unit; The sending of a digital output signal to the actuator according to the digital input signal so that the actuator performs a corresponding action on the mask according to the digital output signal comprises: The logic controller receives the second digital input signal generated by the second sensing module, the third digital input signal generated by the scanning module, and the air pressure value of the clamping unit detected by the pressure switch to obtain a fourth digital input signal, and controls the clamping unit to clamp or release the mask.

10. The rapid pre-alignment method for a mask according to claim 7, characterized in that: The sending of a digital output signal to the actuator according to the digital input signal so that the actuator performs a corresponding action on the mask according to the digital output signal comprises: The logic controller controls the actuator to perform floating, clamping, releasing and adsorbing actions on the mask in sequence.

11. The rapid pre-alignment method for a mask according to claim 7, characterized in that: When the digital output signal is inconsistent with the verification digital signal, the logic controller controls the actuator to stop executing the next action and feeds back an interrupt signal to the host computer, and the method further includes: The logic controller receives the instruction from the host computer, and the logic controller controls the actuator to continue to perform the action.

Images