Alignment device for mask plate, transmission system and AOI (Automatic Optic Inspection) equipment

Abstract

The invention provides an alignment device for a mask plate, a transmission system and AOI equipment, and is characterized in that a movement module is arranged and used for controlling a to-be-aligned mask plate to rotate by a set angle; the annunciator is used for acquiring first edge information of the to-be-aligned mask before rotation, acquiring second edge information of the to-be-aligned mask after rotation by a set angle, and detecting deviation data according to the first edge information and the second edge information; and the drive controller is used for controlling the motion module to compensate the central position of the mask plate according to the deviation data so as to complete alignment. Compared with an alignment marking system of a mask pattern layer in a traditional semiconductor process device, the overall appearance center of the mask is aligned by using the change of the edge information of the mask before and after rotation, so that the detection efficiency and the detection performance are improved, the appearance size deviation range of the mask can be quickly identified and compensated, and the detection accuracy is improved. Therefore, the collision risk existing in the process of placing the mask plate into different plate boxes by the mechanical arm is avoided.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment, and in particular to an alignment device, a transmission system and an AOI device for a mask. Background Art

[0002] In the field of traditional semiconductor process equipment, the mask transmission process requires manual visual inspection for alignment. However, with the deepening and popularization of industrial automation and intelligentization, the automatic optical inspection equipment (AutoOptical Inspection, referred to as AOI) required for the overall defects of the mask has replaced the traditional manual visual inspection and has become a technological development trend. In the field of AOI equipment, the overall defect detection of the mask is currently an important sub-field; in the overall defect detection AOI equipment of the mask, the transmission of the mask is an indispensable link; in the transmission system, the robot removes the mask from the cassette of the front-end module, passes through the alignment module, and then puts the mask on the mask stage for automatic optical inspection of the AOI equipment; after the inspection is completed, the robot removes the mask from the mask stage, passes through the alignment module, and puts it back into the cassette of the front-end module.

[0003] Currently, mask alignment in the market mainly focuses on identifying the alignment marks of the mask graphic layer. Not only is the detection efficiency and performance low, but there is also a diversity of cassette types on the market. If an alignment mark system for the mask graphic layer is used, the position offset of the mask is uncertain. When the robot places the mask in different cassettes, there is a risk of mask collision, which affects the reliability and detection performance of the AOI equipment.

[0004] Therefore, there is an urgent need for an alignment device, a transmission system and an AOI equipment for a mask to improve the above problems. Summary of the Invention

[0005] The object of the present invention is to provide an alignment device, a transmission system and an AOI device for a mask, which can improve the detection efficiency and detection performance, and can avoid the collision risk when a robot places the mask into different cassettes.

[0006] In a first aspect, the present invention provides an alignment device for a mask, comprising:

[0007] A motion module, used to control the rotation of the mask to be aligned to a set angle;

[0008] an annunciator, configured to obtain first edge information of the mask to be aligned before rotation, obtain second edge information of the mask to be aligned after rotation by a set angle, and obtain deviation data based on the first edge information and the second edge information;

[0009] The driver controller is used to control the motion module to compensate the center position of the mask according to the deviation data to complete the alignment.

[0010] The beneficial effects of the alignment device of the present invention are: by setting a motion module, it is used to control the rotation of the mask to be aligned to a set angle; the signal device is used to obtain the first edge information of the mask to be aligned before rotation, obtain the second edge information of the mask to be aligned after rotation to the set angle, and obtain deviation data based on the first edge information and the second edge information; the driver controller is used to compensate the center position of the mask according to the deviation data to complete the alignment. Compared with the alignment mark system of the mask graphic layer in traditional semiconductor process equipment, the change of the edge information of the mask before and after rotation is used to align the overall shape center of the mask, which not only improves the detection efficiency and detection performance, but also can quickly identify and compensate for the deviation range of the mask's outer size, thereby avoiding the risk of collision when the robot puts the mask into different plate boxes.

[0011] Optionally, the first edge information includes at least three marking information on the mask before rotation that are not on the same straight line;

[0012] The second edge information includes information of at least three marks on the rotated mask that are not on the same straight line.

[0013] Optionally, the marking information is the coordinates of an edge point or the position information of a portion of an edge area.

[0014] Optionally, the deviation data includes a deviation value in the horizontal direction, a deviation value in the vertical direction, and an angular deviation value.

[0015] Optionally, controlling the motion module to compensate the center position of the mask according to the deviation data is specifically as follows:

[0016] Controlling the motion module to control the mask to rotate in the opposite direction according to the set angle, so that the orientation of the mask is restored to the orientation before the rotation;

[0017] The motion module is controlled according to the deviation data to compensate the center position of the mask at the initial position.

[0018] Optionally, compensating the center position of the mask according to the deviation data is specifically performed as follows:

[0019] Controlling the motion module to compensate the center position of the mask in the rotated position after rotation according to the deviation data;

[0020] The motion module is controlled to control the mask to rotate in the opposite direction according to the set angle, so that the orientation of the mask is restored to the orientation before the rotation.

[0021] In a second aspect, a transmission system for a mask includes an alignment device of any possible combination according to the first aspect, a front-end module, and a robot module;

[0022] The robot module is used to take out the mask from the first plate box of the front-end module and place the mask on the alignment device based on the set coordinates, so that the alignment device can detect and compensate the center position of the mask; and take out the mask that has been detected and compensated by the alignment device according to the set coordinates, and place it on the mask table for detection.

[0023] The beneficial effect of the transmission system of the present invention is that after the robot module takes out the mask from the first cassette, the center position of the mask is first detected and compensated by the alignment device, which facilitates the alignment of the mask stage and the mask and improves the efficiency of the mask stage in detecting the mask.

[0024] Compared with the alignment mark system of the mask graphic layer in traditional semiconductor process equipment, the change in the edge information of the mask before and after rotation is used to align the overall shape center of the mask, which not only improves the detection efficiency and detection performance, but also can quickly identify and compensate for the dimensional deviation range of the mask, thereby avoiding the risk of collision when the robot puts the mask into different cassettes.

[0025] Optionally, the robot module is further configured to remove the inspected reticle from the mask stage and place it on the alignment device based on set coordinates, so that the alignment device detects and compensates the center position of the reticle; and to remove the inspected and compensated reticle based on the set coordinates and place it into the second cassette of the front-end module. This advantageously allows the alignment device to detect and compensate the center position of the reticle after the robot module removes the inspected reticle from the mask stage, facilitating alignment of the reticle and the second cassette, and avoiding the risk of collision when the robot module places the reticle into different cassettes.

[0026] Optionally, a buffer module is also included;

[0027] The buffer module is used for temporarily placing the mask.

[0028] In a third aspect, an AOI device includes a transmission system of any possible combination according to the second aspect.

[0029] For the beneficial effects of the third aspect, please refer to the description of the second aspect. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic structural diagram of a mask alignment device provided by the present invention;

[0031] Figure 2 A schematic structural diagram of a transmission system for a mask provided by the present invention;

[0032] Figure 3 A schematic diagram of the working principle of a transmission system for a mask provided by the present invention. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the present invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0034] like Figure 1 As shown, the present invention provides an alignment device 200 for a mask, comprising: a motion module 202, for controlling a mask 201 to be aligned to rotate to a set angle; a signal device 204, for obtaining first edge information of the mask 201 to be aligned before rotation, obtaining second edge information of the mask 201 to be aligned after rotation to a set angle, and detecting deviation data based on the first edge information and the second edge information; a driver 203, for controlling the motion module 202 to compensate for the center position of the mask 201 based on the deviation data, for example, the driver 203 sends a corresponding control instruction to the motion module 202. The moving module 202 is used to compensate the center position of the mask 201 in multiple degrees of freedom (such as horizontal, vertical and rotational) to complete the alignment. Compared with the alignment mark system of the mask graphic layer in traditional semiconductor process equipment, the change in the edge information of the mask before and after rotation can be used to quickly detect whether there is a deviation in the overall center position of the mask and the specific deviation data, thereby improving the detection efficiency and detection performance. The use of the driver 203 to compensate for the center position of the mask 201 can improve the repeatability of the mask handover, thereby avoiding the risk of collision when the robot puts the mask into different plate boxes.

[0035] In some embodiments, in order to further improve detection efficiency and detection performance, the first edge information includes at least three marks on the mask 201 before rotation that are not on the same straight line; the second edge information includes at least three marks on the mask 201 after rotation that are not on the same straight line. For example, Figure 1 As shown, for the square mask 201, two marking information X1 and X2 on the left side of the mask 201 and one marking information Y on the upper side of the mask 201 can be selected. Of course, the three marking information can also be distributed on three different sides.

[0036] In some specific embodiments, the marking information is the coordinates of an edge point or the position information of a partial edge area. When the marking information is a partial edge area, the center point of the area can be used as the coordinates of the entire area, or the average value of the coordinates of the entire edge area can be calculated comprehensively, for example, by selecting the coordinates of the two points with the farthest / shortest distance in the area and calculating the average value, and using the average value as the coordinates of the entire area.

[0037] In some embodiments, the deviation data includes horizontal deviation values, vertical deviation values, and angular deviation values. It is worth noting that, in order to reduce computational complexity and improve production efficiency, in actual production, a set angle of 180° is preferably set. This ensures that data is obtained in all four directions of the reticle before and after rotation, thereby facilitating rapid calculation of deviation data for the center position of the reticle 201 and improving calculation accuracy. Furthermore, a set angle of 180° facilitates algorithm implementation. It should be understood that calculation of deviation data can also be achieved when the set angle is set to any value other than 0° and 360°, but this increases the complexity of the algorithm and may result in larger errors.

[0038] In some embodiments, controlling the motion module 202 to compensate for the center position of the mask 201 according to the deviation data is specifically as follows: controlling the motion module 202 to rotate the mask 201 in the opposite direction according to the set angle so that the orientation of the mask 201 is restored to the orientation before rotation; and controlling the motion module 202 to compensate for the center position of the mask 201 in the initial position according to the deviation data.

[0039] In other embodiments, controlling the motion module 202 to compensate for the center position of the mask 201 according to the deviation data is specifically as follows: controlling the motion module 202 to compensate for the center position of the mask 201 in the rotated position after rotation according to the deviation data; and controlling the motion module 202 to control the mask 201 to rotate in the opposite direction according to the set angle, so that the orientation of the mask 201 is restored to the orientation before rotation.

[0040] like Figure 2 As shown, the present invention also provides a transmission system for a mask, comprising the above-mentioned alignment device 200, as well as a front-end module 100 and a robot module 300; the loading process of the transmission system is as follows: the robot module 300 is used to take out the mask 201 from the first plate box of the front-end module 100, and place the mask 201 on the alignment device 200 based on the set coordinates, so that the alignment device 200 detects and compensates the center position of the mask 201; and take out the mask 201 detected and compensated by the alignment device 200 according to the set coordinates, and place it on the mask stage 500 for detection.

[0041] In some embodiments, the unloading process of the transmission system is as follows: the robot module 300 is also used to take out the inspected mask 201 from the mask table 500, and place the mask 201 on the alignment device 200 based on the set coordinates, so that the alignment device 200 can detect and compensate for the center position of the mask 201; and take out the mask 201 that has been inspected and compensated by the alignment device 200 according to the set coordinates, and place it in the second plate box of the front-end module 100.

[0042] The beneficial effect of the embodiment of the present invention is that the alignment device is used to align the mask in both the loading process and the unloading process, which improves the repeatability of the mask handover and avoids the risk of collision when the robot module 300 places the mask 201 in different plate boxes.

[0043] It is worth noting that the first plate box and the second plate box are different types of plate boxes, but can be the same type of plate box.

[0044] In some embodiments, a buffer module 400 is further included; the buffer module 400 is used to temporarily place the mask 201. Since the existing mask stage 500 is usually used to detect a single mask 201 (such as detecting the graphic features of the mask 201), the buffer module 400 is set. When there is already a mask 201 on the mask stage 500, the buffer module 400 can be used to temporarily store other masks 201 to be detected.

[0045] For ease of understanding, this embodiment further describes the working process and principle of the manipulator module 300 of the above-mentioned transmission system for placing the mask 201 on the alignment device 200 and removing the mask 201 in combination with a specific application scenario system. Figure 3 As shown:

[0046] In step 1, the robot module 300 places the mask 201 to be aligned on the alignment device 200 based on the set coordinates.

[0047] In step 2, the alignment device 200 determines whether the mask 201 is on the motion module 202 .

[0048] Step 3: If the mask 201 exists, the signal detector 204 will first collect the information of the edges X1, X2 and Y of the mask 201, that is, the first edge information.

[0049] In step 4, the motion module 202 rotates 180° with the mask 201 .

[0050] In step 5, the signal detector 204 collects information of the edges X1 ′, X2 ′, and Y′ of the mask 201 again, ie, second edge information.

[0051] In step 6, the motion module 202 rotates 180° in the opposite direction with the mask 201 .

[0052] In step 7, the signal generator 204 fits the horizontal deviation value X, the vertical deviation value Y, and the angular deviation value Rz of the center of the entire mask 201 .

[0053] In step 8, the driver controller 203 controls the motion module 202 to compensate the overall center position of the mask 201 to complete the alignment.

[0054] In step 9, the robot module 300 takes away the mask 201 on the alignment module based on the set coordinates.

[0055] The present invention also provides an AOI device, including: Figure 2 The transmission system shown.

[0056] The beneficial effect of the embodiment of the present invention is that, by utilizing the above-mentioned transmission system, not only the diversity of the compatible cassettes of the AOI equipment is increased, but also the detection efficiency and detection performance of the AOI equipment can be improved.

[0057] While the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations of these embodiments are possible. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the claims. Furthermore, the invention described herein is susceptible to other embodiments and may be practiced or implemented in a variety of ways.

Claims

1. An alignment device for a mask, characterized in that: include: A motion module, used to control the rotation of the mask to be aligned to a set angle; an annunciator, configured to obtain first edge information of the mask to be aligned before rotation, obtain second edge information of the mask to be aligned after rotation by a set angle, and obtain deviation data based on the first edge information and the second edge information; The driver controller is used to control the motion module to compensate the center position of the mask according to the deviation data to complete the alignment.

2. The device according to claim 1, characterized in that The first edge information includes at least three marking information on the mask before rotation that are not on the same straight line; The second edge information includes information of at least three marks on the rotated mask that are not on the same straight line.

3. The device according to claim 2, characterized in that The marking information is the coordinates of the edge points or the position information of a portion of the edge area.

4. The device according to claim 1, characterized in that The deviation data includes a deviation value in the horizontal direction, a deviation value in the vertical direction, and an angular deviation value.

5. The device according to any one of claims 1 to 4, characterized in that: Controlling the motion module to compensate the center position of the mask according to the deviation data is specifically as follows: Controlling the motion module to control the mask to rotate in the opposite direction according to the set angle, so that the orientation of the mask is restored to the orientation before the rotation; The motion module is controlled according to the deviation data to compensate the center position of the mask at the initial position.

6. The device according to any one of claims 1 to 4, characterized in that: Controlling the motion module to compensate the center position of the mask according to the deviation data is specifically as follows: Controlling the motion module to compensate the center position of the mask in the rotated position after rotation according to the deviation data; The motion module is controlled to control the mask to rotate in the opposite direction according to the set angle, so that the orientation of the mask is restored to the orientation before the rotation.

7. A transmission system for a mask, characterized in that: comprising the alignment device according to any one of claims 1 to 6, as well as a front-end module and a manipulator module; The robot module is used to take out the mask from the first plate box of the front-end module and place the mask on the alignment device based on the set coordinates, so that the alignment device can detect and compensate the center position of the mask; and take out the mask that has been detected and compensated by the alignment device according to the set coordinates, and place it on the mask table for detection.

8. The system according to claim 7, characterized in that The robot module is also used to take out the inspected mask from the mask table and place the mask on the alignment device based on the set coordinates, so that the alignment device can detect and compensate the center position of the mask; and take out the mask that has been inspected and compensated by the alignment device according to the set coordinates, and place it in the second plate box of the front-end module.

9. The system according to claim 7, wherein: Also includes a buffer module; The buffer module is used for temporarily placing the mask.

10. An AOI device, characterized in that: Comprising a transmission system as described in any one of claims 7-9.

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