Method and device for constructing structure model of device with fillet

Abstract

The invention discloses a method and device for constructing a structure model of a device with a fillet, and the method comprises the steps: building a sample geometric figure and a cavity figure according to preset geometric structure parameters, and enabling the sample geometric figure to be a geometric structure with a fillet; performing finite element division on the sample geometric figure and the chamber figure to obtain first grid information and second grid information, the first grid information being grid information of the sample geometric figure, and the second grid information being grid information of the chamber figure; and according to preset geometric structure parameters, preset electronic probe parameters, the first grid information, the second grid information and preset device structure material parameters, inputting the parameters into a Nebulla simulator to construct a device structure model with a fillet. According to the method provided by the invention, the construction of the structure model with the rounded corner device can be realized by fully automatically utilizing the Nebula simulator, and meanwhile, the whole process does not need manual participation, so that a batch simulation function can be realized, and the precision and efficiency of CD SEM measurement are improved.

Description

Technical Field

[0001] The invention relates to the technical field of scanning electron microscopes, and in particular to a method and a device for constructing a structure model of a device with rounded corners. Background Art

[0002] The SEM (Scanning Electron Microscope) simulator based on the Monte Carlo method is an important tool for studying and improving the performance of SEM. The simulation and analysis of the interaction between the scanning electron beam and the sample carried out by the SEM simulator is an effective way to improve the measurement precision and accuracy of the advanced electron beam critical dimension measurement equipment (CD SEM) required by the semiconductor industry. The main purpose of the SEM simulator is to simulate the process of SEM collecting sample images and obtain simulated image signals. The SEM simulator generally includes an electron probe module, a sample geometry module, an electron-sample interaction module (physical model), and a signal detection module. The simulator defines the distribution of the scanned sample in space through the sample geometry module.

[0003] Nebula is one of the commonly used SEM simulators. Nebula divides physical processes into three basic types: inelastic scattering, elastic scattering, and material boundary crossing. The first two occur in the bulk of the material; the latter represents the interaction at the interface of two materials. There are a variety of models in the literature to describe the mean free path between scattering events, as well as the detailed scattering behavior (such as energy loss, deflection) when the event occurs. By default, Nebula uses the Penn dielectric constant algorithm to describe inelastic scattering. The secondary electrons generated in the valence band and the corresponding deflection of the primary electrons are treated by the method of Mao et al. The secondary electrons from the inner shell are treated according to the method of Kieft & Bosch and Verduin. The binding energy of the inner shell and its ionization cross section are taken from the LLNL evaluation electron database. In theory, the Nebula simulator can build complex geometric models, but Nebula does not provide a function that can easily and quickly create more realistic geometric structures with rounded corners. In addition, Nebula does not provide a batch simulation function, which is not conducive to improving simulation efficiency. Summary of the invention

[0004] The embodiments of the present invention provide a method and device for constructing a device structure model with rounded corners, so as to solve the problem in the prior art that it is difficult for the Nebula simulator to quickly establish a geometric model with rounded corners, realize batch simulation and improve simulation efficiency, and facilitate the application of new methods such as model library and deep learning in high-precision and high-resolution CD SEM measurement, thereby improving the accuracy and efficiency of CDSEM measurement.

[0005] According to one aspect of the present invention, a method for constructing a device structure model with rounded corners is provided, comprising:

[0006] Establishing a sample geometric figure and a chamber figure according to preset geometric structure parameters, wherein the sample geometric figure is a geometric structure with rounded corners;

[0007] Performing finite element division on the sample geometry and the chamber geometry to obtain first grid information and second grid information, wherein the first grid information is grid information of the sample geometry, and the second grid information is grid information of the chamber geometry;

[0008] According to the preset geometric structure parameters, the preset electron probe parameters, the first grid information, the second grid information and the preset device structure material parameters, a Nebula simulator is input to build a device structure model with rounded corners.

[0009] The present invention first constructs a geometric structure and a chamber graphic, and performs finite element division on it to obtain the corresponding first grid information and second grid information, and then inputs the Nebula simulator based on the first grid information and the second grid information to use the basic functions of the Nebula simulator to realize the establishment of a device structure model with rounded corners. The method of the present invention can realize the full automation of the construction of a device structure model with rounded corners using the Nebula simulator. It only needs to pre-set the geometric structure parameters, electron probe parameters and device structure material parameters to quickly complete the establishment of the model. At the same time, since the entire model building process does not require human participation, batch simulation functions can be realized, which is conducive to the application of new methods such as model libraries and deep learning in high-precision, high-resolution CD SEM measurements, thereby improving the accuracy and efficiency of CD SEM measurements.

[0010] In some embodiments, the geometric structure parameters include structure bottom width, side wall angle, height, fillet radius, adjacent structure spacing, line structure length and substrate size, wherein the structure bottom width, side wall angle, height, fillet radius and adjacent structure spacing all include a parameter starting point, a parameter end point and a step size;

[0011] The step of establishing the sample geometry and chamber geometry according to the preset geometry parameters comprises:

[0012] Establishing a chamber pattern according to the line structure length and substrate size in the preset geometric structure parameters;

[0013] According to the preset geometric structure parameters, the structure bottom width, side wall angle, height, fillet radius and adjacent structure spacing are nested and looped to form several parameter combinations;

[0014] Set the mesh size at the fillet corresponding to each parameter combination;

[0015] The sample geometry is established based on the parameter combinations and their corresponding meshing sizes at the fillets.

[0016] Therefore, through such a design, it is possible to form several groups of parameter combinations for constructing a device structure model with rounded corners according to the preset geometric structure parameters.

[0017] In some embodiments, the size of the mesh division at the fillet is set to 1 / 6 of the fillet radius.

[0018] Therefore, by such a design, the degree of restoration of the rounded corners of the finally constructed device structure model with rounded corners can be ensured.

[0019] In some embodiments, establishing a sample geometry based on the formed parameter combination comprises:

[0020] Determine the key point coordinates of each fillet at the top of the sample geometric figure according to the parameter combination, wherein the key point coordinates include the center coordinates of the fillet, the arc starting point coordinates and the arc end point coordinates;

[0021] Determine whether the fillet located at the top of the sample geometric figure is established at the top of the sample geometric figure according to the key point coordinates and parameter combination of the fillet located at the top of the sample geometric figure in the sample geometric figure;

[0022] When determining that the fillet located at the top of the sample geometry is established at the top of the sample geometry, determining the key point coordinates of the fillet of the adjacent structure on the sample geometry;

[0023] Construct fillet arcs according to the key point coordinates of each fillet and the mesh division size at the fillet;

[0024] The other parts of each structure in the sample geometric figure are constructed according to the parameter combination to form the sample geometric figure.

[0025] Therefore, through such a design, the automatic construction of the sample geometry can be realized, and it can be judged whether the current parameter combination can construct the sample geometry.

[0026] In some embodiments, determining the key point coordinates of the rounded corners of adjacent structures on the sample geometry includes:

[0027] The key point coordinates of each fillet of adjacent structures on the sample geometry are determined based on the key point coordinates of each fillet of the structure bottom width and the adjacent structure spacing.

[0028] Therefore, through such a design, the process of automatically constructing sample geometry can be reduced and efficiency can be improved.

[0029] In some embodiments, when it is determined that the fillet located at the top of the sample geometry does not hold at the top of the sample geometry, the establishment of the sample geometry corresponding to the current parameter combination is terminated, and the sample geometry is established using the next set of parameter combinations and mesh division size at the fillet.

[0030] Therefore, through such a design, when it is determined that the current parameter combination cannot construct the sample geometry, it can automatically switch to the next set of parameter combinations for construction, thereby realizing automated batch simulation.

[0031] In some embodiments, when performing finite element division on the sample geometry and chamber graphics to obtain first grid information and second grid information, the grid size of the planar portion in the sample geometry and chamber graphics is set to be larger than the grid size of the rounded portion in the sample geometry and chamber graphics.

[0032] Therefore, through such a design, it is possible to reduce the consumption of computing resources and improve the computational efficiency of the simulation.

[0033] In some embodiments, the pre-set electron probe parameters include beam spot scanning interval and electron beam parameters;

[0034] The method of inputting the preset geometric structure parameters, the preset electron probe parameters, the first grid information, the second grid information and the preset device structure material parameters into the Nebula simulator to construct the device structure model with rounded corners includes:

[0035] Convert the first mesh information into a format file required by the Nebula simulator, and specify the material properties inside and outside the mesh when the mesh is used as a boundary, to form a first mesh property information file;

[0036] The second grid information is saved into the first grid attribute information file, and the chamber environment attribute is designated as a detector to form a second grid attribute information file;

[0037] Modify the scanning path in the electron beam file according to the structure bottom width, adjacent structure spacing and beam spot scanning spacing corresponding to the current first grid information, and compile it into a format file required by the Nebula simulator to form an electron beam information file;

[0038] Forming a material information file according to preset device structure material parameters;

[0039] The second grid property information file, the electron beam information file and the material information file are input into the Nebula simulator, and the simulation result file is output to obtain a device structure model with rounded corners.

[0040] Therefore, by designing in this way, it is possible to input the Nebula simulator to construct a device structure model with rounded corners.

[0041] In some implementations, the method further includes: analyzing the obtained device structure model with rounded corners, reading simulation results, and storing the simulation results and corresponding parameter combinations in a database.

[0042] In some embodiments, it further comprises:

[0043] After constructing the device structure model with rounded corners, the next set of parameter combinations is used to establish the sample geometry to construct the device structure model with rounded corners corresponding to the next set of parameter combinations, and all parameter combinations are traversed to construct the device structure model with rounded corners corresponding to each parameter combination.

[0044] Therefore, through such a design, automated batch simulation can be achieved.

[0045] According to a second aspect of the present invention, there is also provided a device for constructing a structure model of a device with rounded corners, comprising:

[0046] A graphics construction module, used to establish a sample geometry and a chamber geometry according to preset geometry parameters, wherein the sample geometry is a geometry with rounded corners;

[0047] A finite element division module, used for performing finite element division on the sample geometry and the chamber geometry to obtain first grid information and second grid information, wherein the first grid information is the grid information of the sample geometry, and the second grid information is the grid information of the chamber geometry;

[0048] The model building module inputs the Nebula simulator to build a device structure model with rounded corners according to preset geometric structure parameters, preset electron probe parameters, first grid information, second grid information and preset device structure material parameters. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying any creative work.

[0050] Figure 1 An overall structural diagram of a device structure constructed in a method for constructing a device structure model with rounded corners according to an embodiment of the present invention;

[0051] Figure 2 A cross-sectional structural diagram of a device structure constructed in a method for constructing a device structure model with rounded corners according to an embodiment of the present invention;

[0052] Figure 3 A flowchart of a method for constructing a device structure model with rounded corners according to an embodiment of the present invention;

[0053] Figure 4 This is a flowchart of step S11 in a method for constructing a device structure model with rounded corners according to an embodiment of the present invention;

[0054] Figure 5 This is a flowchart of step S24 in a method for constructing a device structure model with rounded corners according to an embodiment of the present invention;

[0055] Figure 6 This is a flowchart of step S13 in a method for constructing a device structure model with rounded corners according to an embodiment of the present invention;

[0056] Figure 7 It is a principle block diagram of a device for constructing a structure model of a device with rounded corners according to one embodiment of the present invention;

[0057] Figure 8 It is a schematic structural diagram of an embodiment of an electronic device of the present invention. DETAILED DESCRIPTION

[0058] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0059] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other.

[0060] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include" and "comprise" include not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such processes, methods, articles or equipment. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the existence of other identical elements in the process, method, article or equipment that includes the elements.

[0061] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0062] In the present invention, the preset geometric structure parameters are set by the user according to the parameters of the rounded corner device structure model constructed as needed, referring to Figure 1 and Figure 2 As shown, the geometric structure parameters may include the structure bottom width (bcd), side wall angle (swa), height (h), fillet radius (r), adjacent structure spacing (d), line structure length and substrate size. Usually, the line structure length and substrate size remain unchanged and are parameters for constructing chamber graphics. As for the structure bottom width, side wall angle, height, fillet radius and adjacent structure spacing, they are parameters for constructing sample geometry. These parameters will vary depending on the different device structure models with rounded corners to be constructed. Therefore, when batch simulation is required to construct device structure models with rounded corners, the above parameters for constructing sample geometry need to set multiple different values ​​to construct different device structure models with rounded corners. At this time, the value of the corresponding parameter can be represented by the parameter starting point, parameter end point and step size. For example, the structure bottom width bcd can be set to parameter starting point = 20, parameter end point = 30.1, step size = 0.5, which means that the value of the structure bottom width setting includes 20, 20.5...29.5, 30.

[0063] In the present invention, the pre-set electron probe parameters include beam spot scanning interval (pixel_size) and electron beam parameters.

[0064] In the present invention, the preset device structure material parameters include line structure material, substrate material and the like.

[0065] Figure 3 The process of constructing a device structure model with rounded corners according to an embodiment of the present invention is schematically shown. Figure 3 As shown, the process of the method for constructing a device structure model with rounded corners of the present invention includes the following steps:

[0066] Step S11: establishing a sample geometric figure and a chamber figure according to preset geometric structure parameters, wherein the sample geometric figure is a geometric structure with rounded corners;

[0067] Step S12: performing finite element division on the sample geometry and the chamber geometry to obtain first grid information and second grid information, wherein the first grid information is grid information of the sample geometry, and the second grid information is grid information of the chamber geometry;

[0068] Step S13: inputting the Nebula simulator to construct a device structure model with rounded corners according to the preset geometric structure parameters, the preset electron probe parameters, the first grid information, the second grid information and the preset device structure material parameters.

[0069] In the solution of the present invention, it should be noted that there is no need for a fixed order between step S11 and step S12. It can be understood that in step S11, a sample geometry and a chamber geometry need to be established, and in step S12, first grid information and second grid information need to be obtained based on the sample geometry and the chamber geometry. Therefore, step S11 and step S12 can also be implemented as first establishing a sample geometry and obtaining the first grid information, then establishing a chamber geometry and obtaining the second grid information, and so on. These execution orders can be set according to actual conditions, and the embodiments of the present invention do not limit this.

[0070] Step S11 is a step of constructing sample geometry and chamber graphics. Figure 4 The step flow of step S11 in the method for constructing a device structure model with rounded corners according to an embodiment of the present invention is schematically shown. Figure 4 As shown, the step flow can be implemented as including the following steps:

[0071] Step S21: establishing a chamber pattern according to the line structure length and substrate size in the preset geometric structure parameters;

[0072] Step S22: forming a plurality of parameter combinations by nesting loops according to the preset geometric structure parameters, including the structure bottom width, the side wall angle, the height, the fillet radius and the adjacent structure spacing;

[0073] Step S23: Establish sample geometry based on parameter combination.

[0074] Among them, step S21 is a step of constructing a chamber pattern, and steps S22 to S24 are steps of constructing a sample geometric pattern. Similarly, the execution of step S21 and the execution of steps S22 to S24 do not need to have a fixed order.

[0075] In step S21, when the chamber pattern is established according to the preset geometric structure parameters, the function in the pygmsh library based on Gmsh can be used to implement it. For example, a rectangular two-dimensional plane can be created according to the line structure length and substrate size in the geometric structure parameters, and then the extrude function in the library is called to stretch the plane into a three-dimensional solid pattern.

[0076] In step S22 to step S24, step S22 is a step of forming a parameter combination for constructing a sample geometry based on the values ​​of each parameter in the preset geometric structure parameters. Since the structure bottom width, side wall angle, height, fillet radius and adjacent structure spacing in the preset geometric structure parameters are all represented by parameter starting point, parameter end point and step length, when forming a parameter combination, the values ​​of these parameters can be first formed into an array. Specifically, it can be established by an automated script, such as the arange function in the numpy library of the Python language. The parameter starting point, parameter end point and step length are used as input to obtain an array formed by the values ​​of the corresponding parameters. For example, the structure bottom width bcd is set to parameter starting point = 20, parameter end point = 30.1, step length = 0.5, and the obtained array is [20, 20.5, 21........ 29, 29.5, 30]. After obtaining the arrays corresponding to the various parameters, a nested loop can be used to obtain several groups of parameter combinations corresponding to different values ​​of the various parameters.

[0077] After obtaining several groups of parameter combinations in step S22, step S23 can be executed to establish sample geometries one by one according to the formed groups of parameter combinations. In some possible implementations, after forming each group of parameter combinations, the mesh division size at the fillet in various parameter combinations can be further set accordingly to obtain the parameters at the fillet used to construct the sample geometry. When setting the mesh division size at the fillet, it can be set to 1 / 6 of the fillet radius to ensure the restoration degree of the fillet part of the device structure model with fillets that is finally constructed. Finally, each group of parameter combinations and the mesh division size at the fillet can be numbered and stored.

[0078] Figure 5 The step flow of step S23 in the method for constructing a device structure model with rounded corners according to an embodiment of the present invention is schematically shown. Figure 5 As shown, the step flow can be implemented as including the following steps:

[0079] Step S31: determining the key point coordinates of each fillet in the sample geometric figure according to the parameter combination, wherein the key point coordinates include the center coordinates of the fillet, the arc starting point coordinates and the arc end point coordinates;

[0080] Step S32: determining whether the rounded corner located at the top of the sample geometric figure is at the top of the sample geometric figure according to the key point coordinates and parameter combination of the rounded corner located at the top of the sample geometric figure in the sample geometric figure;

[0081] Step S33: when it is determined that the fillet located at the top of the sample geometric figure is established at the top of the sample geometric figure, determine the key point coordinates of the fillet of the adjacent structure on the sample geometric figure;

[0082] Step S34: constructing fillet arcs according to the key point coordinates of each fillet;

[0083] Step S35: Construct other parts of each structure in the sample geometric figure according to the parameter combination to form the sample geometric figure.

[0084] In step S31, it is necessary to determine the key point coordinates of each fillet in the sample geometry. The key point coordinates of the fillet include the center coordinates of the fillet, the arc start coordinates and the arc end coordinates. Specifically, the fillet can be defined as tangent to the top, bottom and side wall, a coordinate system can be constructed, and according to the set bcd, swa, h and r, a unique fillet arc can be found by the mathematical relationship in the geometric structure, thereby determining the three key point coordinates of the fillet.

[0085] Step S32 is a step for determining whether the fillet at the top of the sample geometry constructed by the current parameter combination can be established in the sample geometry. It can be understood that in the sample geometry, a single structure is provided with four fillets, which are located at the upper left of the structure, the upper right of the structure, the lower left of the structure and the lower right of the structure. Since the radius of the fillet is fixed, when some values ​​in the parameter combination used to construct the sample geometry are inappropriate, the fillets located at the upper left of the structure and the upper right of the structure will interfere, and thus cannot be established in the sample geometry. Specifically, step S32 can be determined by a conditional statement. Exemplarily, it can be determined based on the relationship between the three key point coordinates of the fillet at the top of the sample geometry and the axis of symmetry of the structure in the sample geometry. When the key point coordinates of the fillet at the upper left of the structure in the sample geometry are all located on the left side of the axis of symmetry, and the key point coordinates of the fillet at the upper right of the structure in the sample geometry are all located on the right side of the axis of symmetry, then it is determined that the fillet constructed by the current parameter combination is established in the sample geometry, otherwise it is determined that the fillet constructed by the current parameter combination is not established in the sample geometry. A coordinate system can also be established with the location of the symmetry axis of the structure in the sample geometry as the x-axis origin to determine whether the x-axis coordinates of the key points of the rounded corners on the top left are all less than 0, and whether the x-axis coordinates of the key points of the rounded corners on the right are all greater than 0. When it is determined that the rounded corners constructed by the current parameter combination do not hold in the sample geometry, the establishment of the sample geometry corresponding to the current parameter combination is terminated, and the sample geometry is established using the next set of parameter combinations.

[0086] Step S33 is a step executed when determining whether the fillet constructed by the current parameter combination is established in the sample geometry. Since there may be multiple structures arranged in parallel in a device structure, it is necessary to determine the key point coordinates of the fillets of adjacent structures on the sample geometry in step S33. Specifically, in step S33, it can be obtained by repeatedly executing the above step S31. In other possible implementations, step S33 can also be implemented as determining the key point coordinates of the fillets of adjacent structures on the sample geometry based on the key point coordinates of the fillets of the bottom width of the structure and the spacing between adjacent structures. Since the distance between adjacent structures can be calculated by the bottom width of the structure and the spacing between adjacent structures, it is only necessary to offset the key point coordinates of the fillets of the currently obtained structure in the positive or negative direction.

[0087] Then, step S34 is executed to construct a fillet arc according to the key point coordinates of each fillet, and step S35 is executed to construct the other parts of each structure in the sample geometry according to the parameter combination to form the sample geometry. Wherein, when constructing the fillet arc and the other parts of each structure in the sample geometry, the mesh size of the corresponding part formed when performing the subsequent finite element division step can be controlled by adding points in the geometric space corresponding to the fillet arc, the top, bottom and sidewall of the structure. Specifically, when constructing the fillet arc, the add_point function of the pygmsh library can be called to add points in the geometric space according to the key point coordinates of each fillet, and the mesh size of the two end points of the arc can be controlled, and then the add_circle_arc function is used to connect the fillet key points to obtain the arc. When constructing the other parts of the lattice structure in the sample geometry, i.e., the top, bottom and sidewall, etc., points can be created in the center of the structure top, bottom and sidewall and the mesh size nearby can be controlled, and then the add_curve_loop function of the pygmsh library is called to connect each point into a closed curve in a front-to-back order. Wherein, when controlling the mesh size of the constructed fillet arc, it can be set according to the size of the mesh division at the fillet set in the previous step. When controlling the mesh size of other parts of the lattice structure in the constructed sample geometry, i.e. the top, bottom and sidewalls, etc., the controlled mesh size can be set to be larger than the size of the mesh division at the fillet to reduce the amount of calculation. After controlling the mesh size of the corresponding part formed during the subsequent finite element division step, the sample geometry can be formed according to the constructed fillet arc and other parts of the lattice structure in the sample geometry, i.e. the top, bottom and sidewalls, and stretched. Specifically, the curves of each part can be converted into faces using the add_plane_surface function, the obtained surface can be stretched according to the set structure length using the extrude function, the substrate two-dimensional plane can be created according to the set substrate size using the add_rectangle function and the extrude function, and the structure can be stretched to obtain the substrate.

[0088] Step S12 is a step of performing finite element division on the sample geometry and the chamber graphics to obtain the first grid information and the second grid information. When performing finite element division on the chamber graphics, the generate_mesh function of the pygmsh library can be called and the grid division dimension can be specified as two-dimensional to obtain the finite element division result of the chamber graphics. When performing finite element division on the sample geometry, the generate_mesh function of the pygmsh library can also be called and the grid division dimension can be specified as two-dimensional, and finite element division can be performed according to the points that control the grid size when constructing the sample geometry to obtain the finite element division result of the sample geometry. The finite element division result of the chamber graphics obtained and the finite element division result of the sample geometry can both be saved in stl file format. In some possible embodiments, when executing step S12, the grid size of the plane part in the sample geometry and the chamber graphics can be set to be larger than the grid size of the fillet part in the sample geometry and the chamber graphics. This is because if the more grids are divided, in addition to consuming more computing resources when dividing, more computing resources are also consumed during simulation. Therefore, by limiting the grid size when calling the function, the grid can be as large as possible on the flat surface, so that the flat surface can be composed of fewer grids. At the rounded corners, that is, on the curved surface, to ensure that the rounded corners are restored realistically to a certain extent, the grid size should be made smaller, so that more grids can be used to form the curved surface.

[0089] After obtaining the first grid information and the second grid information, step S13 may be executed to simulate and obtain a device structure model with rounded corners. Figure 6 The step flow of step S13 in the method for constructing a device structure model with rounded corners according to an embodiment of the present invention is schematically shown. Figure 6 As shown, the step flow can be implemented as including the following steps:

[0090] Step S41: converting the first mesh information into a format file required by the Nebula simulator, and specifying the material properties inside and outside the mesh when the mesh is used as a boundary, to form a first mesh property information file;

[0091] Step S42: saving the second grid information into the first grid attribute information file, and specifying the chamber environment attribute as a detector, to form a second grid attribute information file;

[0092] Step S43: modifying the scanning path in the electron beam file according to the structure bottom width, adjacent structure spacing and beam spot scanning spacing corresponding to the current first grid information, and compiling it into a format file required by the Nebula simulator to form an electron beam information file;

[0093] Step S44: forming a material information file according to the preset device structure material parameters;

[0094] Step S45: input the second grid attribute information file, the electron beam information file and the material information file into the Nebula simulator, output the simulation result file, and obtain a device structure model with rounded corners.

[0095] Among them, step S41 and step S42 are steps for forming a mesh attribute information file for inputting into the Nebula simulator, step S43 is a step for forming an electron beam information file for inputting into the Nebula simulator, and step S44 is a step for forming a material information file for inputting into the Nebula simulator. It can be understood that the above steps for generating the information files for inputting into the Nebula simulator do not need to have a fixed order.

[0096] In step S41, the first mesh information needs to be converted into a format file required by the Nebula simulator. Specifically, step S41 can be implemented by calling a custom specimen_convert function, reading the mesh information in the stl file containing the first mesh information corresponding to the sample geometry, and converting it into a format file required by the Nebula simulator, such as a tri file, to form a first mesh attribute information file. Among them, it is also necessary to specify the material properties inside and outside when the mesh is used as a boundary. The material properties are specified according to the rules of Nebula. In the first mesh attribute information file obtained after the first mesh information is converted, each line defines 1 triangular face element. For example, the material properties inside and outside the mesh are specified as silicon, which is represented by the number 0, and then the coordinates of the 3 vertices of the triangular face element are specified.

[0097] In step S42, it is necessary to save the relevant information corresponding to the second grid information into the first grid attribute information file to form a second grid attribute information file that contains both the first grid information corresponding to the sample geometry and the second grid information corresponding to the chamber graphics. Specifically, step S42 can be implemented by calling a custom detector_convert function, reading the grid information in the stl file containing the second grid information corresponding to the chamber graphics, and saving it to the first grid attribute information file in which the first grid information corresponding to the sample geometry has been saved in step S41, to form a second grid attribute information file. Among them, it is also necessary to specify the chamber environment attribute as a detector. Specifically, the chamber environment attribute can be specified as a secondary electron detector, that is, its attribute is known to be the number -125. By specifying its attribute as a secondary electron detector, electrons passing through the triangular face element can be calculated as secondary electrons.

[0098] In step S43, an electron beam information file for inputting into the Nebula simulator needs to be formed. Specifically, it can be implemented by calling a custom create_batch_simulation function, modifying the scanning path parameters in the electron beam file according to the set structure bottom width, adjacent structure spacing and beam spot scanning spacing, and calling a shell command to compile the electron beam file to obtain a pri file, that is, an electron beam information file.

[0099] In step S44, a material information file for inputting into the Nebula simulator needs to be generated. Specifically, based on the cstool component in the Nebula simulator, a mat file, ie, a material information file, can be generated according to the preset device structure material parameters.

[0100] In step S45, the second grid attribute information file, the electron beam information file and the material information file formed in the above steps need to be input into the Nebula simulator to simulate and construct a device structure model with rounded corners. After the device structure model with rounded corners is constructed, the result file can be analyzed using the analysis result program, the simulation results can be read, and the simulation results and their corresponding parameter combinations can be saved in the database by calling pymysql to connect to the MySQL database.

[0101] In some possible implementations, since the number of values ​​of each parameter in the pre-set geometric structure parameters is large, the number of parameter combinations formed is large, and thus batch simulation and construction of device structure models with rounded corners can be performed. Specifically, in this implementation, after the device structure model with rounded corners is constructed, the redundant files in the above process can be removed, such as the grid attribute information file, electron beam information file, and material information file in the Nebula simulator after the construction is completed, and the sample geometry of the next group of parameter combinations is constructed, and steps S12 and S13 are executed to construct the device structure model with rounded corners corresponding to the next group of parameter combinations. After traversing all parameter combinations, the device structure model with rounded corners corresponding to each parameter combination can be constructed, and the total simulation time and the number of results can be recorded.

[0102] The present invention first constructs a geometric structure and a chamber graphic, and performs finite element division on it to obtain the corresponding first grid information and second grid information, and then inputs the Nebula simulator based on the first grid information and the second grid information to use the basic functions of the Nebula simulator to realize the establishment of a device structure model with rounded corners. The method of the present invention can realize the full automation of the construction of a device structure model with rounded corners using the Nebula simulator. It only needs to pre-set the geometric structure parameters, electron probe parameters and device structure material parameters to quickly complete the establishment of the model. At the same time, since the entire model building process does not require human participation, batch simulation functions can be realized, which is conducive to the application of new methods such as model libraries and deep learning in high-precision, high-resolution CD SEM measurements, thereby improving the accuracy and efficiency of CD SEM measurements.

[0103] Figure 7 The principle block diagram of the device for constructing a structure model of a device with rounded corners according to one embodiment of the present invention is schematically shown. Figure 7 As shown, the device for constructing a structure model of a device with rounded corners specifically includes the following modules:

[0104] A graphics construction module 1, used to establish a sample geometric figure and a chamber figure according to preset geometric structure parameters, wherein the sample geometric figure is a geometric structure with rounded corners;

[0105] Finite element division module 2, used for performing finite element division on the sample geometry and the chamber geometry to obtain first grid information and second grid information, wherein the first grid information is the grid information of the sample geometry, and the second grid information is the grid information of the chamber geometry;

[0106] Model building module 3, according to the preset geometric structure parameters, the preset electron probe parameters, the first grid information, the second grid information and the preset device structure material parameters, inputs the Nebula simulator to build a device structure model with rounded corners.

[0107] It should be noted that the implementation process and implementation principle of the device with rounded corners structure model construction apparatus of the embodiment of the present invention can be specifically referred to the corresponding description of the above method embodiment, such as the corresponding description of the construction of sample geometry and chamber graphics, the acquisition of grid information, etc. in the method embodiment, so they are not repeated here. Exemplarily, the device with rounded corners structure model construction apparatus of the embodiment of the present invention can be any intelligent device with a processor, including but not limited to computers, smart phones, personal computers, robots, cloud servers, etc.

[0108] In some embodiments, an embodiment of the present invention provides a non-volatile computer-readable storage medium, in which one or more programs including execution instructions are stored. The execution instructions can be read and executed by an electronic device (including but not limited to a computer, a server, or a network device, etc.) to execute the method for constructing a device structure model with rounded corners according to any of the above embodiments of the present invention.

[0109] In some embodiments, an embodiment of the present invention further provides a computer program product, which includes a computer program stored on a non-volatile computer-readable storage medium, and the computer program includes program instructions. When the program instructions are executed by a computer, the computer executes the method for constructing a device structure model with rounded corners according to any of the above embodiments.

[0110] In some embodiments, an embodiment of the present invention further provides an electronic device, comprising: at least one processor, and a memory communicatively connected to the at least one processor, wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the method for constructing a device structure model with rounded corners of any of the above embodiments.

[0111] In some embodiments, an embodiment of the present invention further provides a storage medium having a computer program stored thereon, wherein the program, when executed by a processor, implements the method for constructing a device structure model with rounded corners according to any of the above embodiments.

[0112] Figure 8 is a schematic diagram of the hardware structure of an electronic device for executing a method for constructing a device structure model with rounded corners provided by another embodiment of the present application, such as Figure 8 As shown, the device includes:

[0113] One or more processors 610 and memory 620, Figure 8 A processor 610 is taken as an example.

[0114] The device for executing the method for constructing a device structure model with rounded corners may further include: an input device 630 and an output device 640 .

[0115] The processor 610, the memory 620, the input device 630 and the output device 640 may be connected via a bus or other means. Figure 8 The example of connecting through bus is taken in the following.

[0116] The memory 620, as a non-volatile computer-readable storage medium, can be used to store non-volatile software programs, non-volatile computer executable programs and modules, such as program instructions / modules corresponding to the method for constructing a device structure model with rounded corners in the embodiment of the present application. The processor 610 executes various functional applications and data processing of the server by running the non-volatile software programs, instructions and modules stored in the memory 620, that is, the method for constructing a device structure model with rounded corners in the above method embodiment is implemented.

[0117] The memory 620 may include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required by at least one function; the data storage area may store data created according to the use of the method for building a device structure model with rounded corners, etc. In addition, the memory 620 may include a high-speed random access memory, and may also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other non-volatile solid-state storage device. In some embodiments, the memory 620 may optionally include a memory remotely arranged relative to the processor 610, and these remote memories may be connected to the electronic device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0118] The input device 630 may receive input digital or character information and generate signals related to user settings and function control of the image processing device. The output device 640 may include a display device such as a display screen.

[0119] The one or more modules are stored in the memory 620 , and when executed by the one or more processors 610 , the method for constructing a device structure model with rounded corners in any of the above method embodiments is executed.

[0120] The above-mentioned product can execute the method provided in the embodiment of the present application, and has the functional modules and beneficial effects corresponding to the execution method. For technical details not fully described in this embodiment, please refer to the method provided in the embodiment of the present application.

[0121] The electronic devices of the embodiments of the present application exist in various forms, including but not limited to:

[0122] (1) Mobile communication devices: These devices are characterized by their mobile communication functions and their main purpose is to provide voice and data communications. These terminals include: smart phones (such as iPhone), multimedia phones, functional phones, and low-end phones.

[0123] (2) Ultra-mobile personal computer devices: These devices fall into the category of personal computers, have computing and processing capabilities, and generally also have mobile Internet access features. These terminals include: PDA, MID and UMPC devices, such as iPad.

[0124] (3) Portable entertainment devices: These devices can display and play multimedia content. They include audio and video players (such as iPods), handheld game consoles, e-books, as well as smart toys and portable car navigation devices.

[0125] (4) Server: A device that provides computing services. The server consists of a processor, hard disk, memory, system bus, etc. The server is similar to a general computer architecture, but because it needs to provide highly reliable services, it has higher requirements in terms of processing power, stability, reliability, security, scalability, and manageability.

[0126] (5) Other electronic devices with data interaction functions.

[0127] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0128] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a general hardware platform, and of course, by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the relevant technology can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0129] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A method for constructing a device structure model with rounded corners, characterized in that: include: Establishing a sample geometric figure and a chamber figure according to preset geometric structure parameters, wherein the sample geometric figure is a geometric structure with rounded corners; Performing finite element division on the sample geometry and the chamber geometry to obtain first grid information and second grid information, wherein the first grid information is grid information of the sample geometry, and the second grid information is grid information of the chamber geometry; According to the preset geometric structure parameters, the preset electron probe parameters, the first grid information, the second grid information and the preset device structure material parameters, a Nebula simulator is input to build a device structure model with rounded corners.

2. The method for constructing a device structure model with rounded corners according to claim 1, characterized in that: The geometric structure parameters include structure bottom width, side wall angle, height, fillet radius, adjacent structure spacing, line structure length and substrate size, wherein the structure bottom width, side wall angle, height, fillet radius and adjacent structure spacing all include parameter starting point, parameter end point and step length; The step of establishing the sample geometry and chamber geometry according to the preset geometry parameters comprises: Establishing a chamber pattern according to the line structure length and substrate size in the preset geometric structure parameters; According to the preset geometric structure parameters, the structure bottom width, side wall angle, height, fillet radius and adjacent structure spacing are nested and looped to form several parameter combinations; The sample geometry is established based on the parameter combination.

3. The method for constructing a device structure model with rounded corners according to claim 2, characterized in that: The size of the mesh division at the fillet is set to 1 / 6 of the fillet radius.

4. The method for constructing a device structure model with rounded corners according to claim 2, characterized in that: The step of establishing a sample geometry according to a combination of parameters comprises: Determine the key point coordinates of each fillet in the sample geometric figure according to the parameter combination, wherein the key point coordinates include the center coordinates of the fillet, the arc starting point coordinates and the arc end point coordinates; Determine whether the fillet located at the top of the sample geometric figure is established at the top of the sample geometric figure according to the key point coordinates and parameter combination of the fillet located at the top of the sample geometric figure in the sample geometric figure; When determining that the fillet located at the top of the sample geometry is established at the top of the sample geometry, determining the key point coordinates of the fillet of the adjacent structure on the sample geometry; Construct fillet arcs according to the coordinates of the key points of each fillet; The other parts of each structure in the sample geometric figure are constructed according to the parameter combination to form the sample geometric figure.

5. The method for constructing a device structure model with rounded corners according to claim 4, characterized in that: The step of determining the key point coordinates of the fillets of adjacent structures on the sample geometry includes: The key point coordinates of each fillet of adjacent structures on the sample geometry are determined based on the key point coordinates of each fillet of the structure bottom width and the adjacent structure spacing.

6. The method for constructing a device structure model with rounded corners according to claim 4, characterized in that: When it is determined that the fillet located at the top of the sample geometry does not hold at the top of the sample geometry, the establishment of the sample geometry corresponding to the current parameter combination is terminated, and the sample geometry is established using the next set of parameter combinations and their corresponding meshing dimensions at the fillet.

7. The method for constructing a device structure model with rounded corners according to claim 1, characterized in that: When performing finite element division on the sample geometry and the chamber graphics to obtain the first grid information and the second grid information, the grid size of the planar portion in the sample geometry and the chamber graphics is set to be larger than the grid size of the rounded corner portion in the sample geometry and the chamber graphics.

8. The method for constructing a device structure model with rounded corners according to claim 2, characterized in that: The pre-set electron probe parameters include beam spot scanning interval and electron beam parameters; The method of inputting the preset geometric structure parameters, the preset electron probe parameters, the first grid information, the second grid information and the preset device structure material parameters into the Nebula simulator to construct the device structure model with rounded corners includes: Convert the first mesh information into a format file required by the Nebula simulator, and specify the material properties inside and outside the mesh when the mesh is used as a boundary, to form a first mesh property information file; The second grid information is saved into the first grid attribute information file, and the chamber environment attribute is designated as a detector to form a second grid attribute information file; Modify the scanning path in the electron beam file according to the structure bottom width, adjacent structure spacing and beam spot scanning spacing corresponding to the current first grid information, and compile it into a format file required by the Nebula simulator to form an electron beam information file; Forming a material information file according to preset device structure material parameters; The second grid property information file, the electron beam information file and the material information file are input into the Nebula simulator, and the simulation result file is output to obtain a device structure model with rounded corners.

9. The method for constructing a device structure model with original valence band rounded corners according to claim 2, characterized in that: Also includes: After constructing the device structure model with rounded corners, the next set of parameter combinations is used to establish the sample geometry to construct the device structure model with rounded corners corresponding to the next set of parameter combinations, and all parameter combinations are traversed to construct the device structure model with rounded corners corresponding to each parameter combination.

10. A device for constructing a structure model of a device with rounded corners, characterized in that: include: A graphics construction module, used to establish a sample geometry and a chamber geometry according to preset geometry parameters, wherein the sample geometry is a geometry with rounded corners; A finite element division module, used for performing finite element division on the sample geometry and the chamber geometry to obtain first grid information and second grid information, wherein the first grid information is the grid information of the sample geometry, and the second grid information is the grid information of the chamber geometry; The model building module inputs the Nebula simulator to build a device structure model with rounded corners according to preset geometric structure parameters, preset electron probe parameters, first grid information, second grid information and preset device structure material parameters.

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