Calibration device and calibration method of hydrogen fluoride alarm

Abstract

The invention provides a calibration device and a calibration method of a hydrogen fluoride alarm. The calibration device comprises a standard gas steel cylinder (1) used for storing zero standard gas or hydrogen fluoride standard gas with different concentrations; the pressure reducing valve (2) is used for reducing pressure and adjusting gas flow; the gas path switch (3) is used for opening and closing a gas path; the purging cavity (4) is used for purging a sensor of the alarm; the alarm interface (5) is used for connecting a sensor shell of an alarm; the hydrogen fluoride adsorber (6) is used for adsorbing hydrogen fluoride in the tail gas; the residual hydrogen fluoride monitor (7) is used for detecting the content of residual hydrogen fluoride in the tail gas; and a housing (8) and a cover (9) for fitting, carrying and protecting the calibration device. The calibration device for the hydrogen fluoride alarms can calibrate a plurality of hydrogen fluoride alarms at the same time, can effectively avoid harm of hydrogen fluoride gas to human bodies, and reduces environmental pollution.

Description

Technical Field

[0001] The invention relates to the field of measurement and detection, and in particular to a calibration device and a calibration method for a hydrogen fluoride alarm. Background Art

[0002] Hydrogen fluoride (HF) is a highly toxic substance that can penetrate the skin and cause serious damage to mucous membranes such as the eyes, respiratory tract and digestive tract. Exposure to high concentrations can quickly lead to breathing difficulties, pulmonary edema and even cardiac arrest. It combines with cations such as calcium and magnesium in the body to form insoluble fluorides, which interfere with the normal function of cells. It has adverse effects on the central nervous system, causing symptoms such as headaches, dizziness, nausea, vomiting, and in severe cases, leading to coma and convulsions.

[0003] As an important chemical raw material, hydrogen fluoride is widely used in industrial production such as semiconductor manufacturing, electronics industry, atomic energy industry and new energy manufacturing. Even a small amount of leakage is enough to cause immeasurable harm to life and the environment. Under the severe challenges of production safety and environmental protection, the accurate early warning of hydrogen fluoride gas leakage by hydrogen fluoride alarm has become an indispensable safety line.

[0003] To ensure accurate warning of hydrogen fluoride alarm, metrology verification institutions need to calibrate hydrogen fluoride alarm. Existing calibration devices can only calibrate one alarm at a time, frequent ventilation causes waste of standard gas, and hydrogen fluoride tail gas is directly discharged into the ambient air, which can easily cause acute poisoning of metrology technicians and pollute the environment, which is not in line with the green and environmentally friendly metrology work concept.

[0004] In summary, a calibration device needs to be designed that can calibrate multiple hydrogen fluoride alarms at one time. The calibration device should include a hydrogen fluoride exhaust gas treatment component to physically adsorb or convert the emitted hydrogen fluoride gas into hydrogen fluoride derivatives to avoid environmental pollution and effectively protect metrological technicians from being harmed by hydrogen fluoride gas. Summary of the invention

[0005] In view of the above technical problems, the present invention proposes a calibration device for a hydrogen fluoride alarm, which can calibrate multiple hydrogen fluoride alarms at the same time, effectively reduce the emission of hydrogen fluoride in tail gas and avoid direct contact of measurement technicians with hydrogen fluoride gas.

[0006] Another technical problem to be solved by the present invention is a calibration method for calibrating a hydrogen fluoride alarm using the calibration device.

[0007] The purpose of the present invention can be achieved through the following technical solutions:

[0008] A calibration device for a hydrogen fluoride alarm comprises a shell and a cover, and is characterized in that a standard gas cylinder, a pressure reducing valve, and a gas circuit switch are arranged outside the shell; a purge cavity, an alarm interface, a hydrogen fluoride adsorber, and a hydrogen fluoride residual monitor are arranged inside the shell.

[0009] The purpose of the present invention can also be achieved by the following technical solutions:

[0010] Furthermore, the standard gas cylinder, the pressure reducing valve, the gas circuit switch, the purge cavity, the hydrogen fluoride adsorber and the hydrogen fluoride residual monitor are connected in sequence through a gas pipeline to form a calibration gas circuit of the alarm.

[0011] Furthermore: the standard gas cylinder can be replaced by a cylinder with the same interface; the cylinder with the same interface stores zero-point standard gas and hydrogen fluoride standard gas of different concentrations respectively.

[0012] Furthermore: the pressure reducing valve is provided with a float flowmeter.

[0013] Furthermore: the purge cavity is a tubular cavity with multiple alarm interfaces; the tubular cavity is a straight tube cavity or a bent tube cavity, with an air inlet hole at the head end and an air outlet hole at the tail end; the alarm interface is a cylindrical tube interface.

[0014] Furthermore: the hydrogen fluoride adsorber is a tubular cavity with an air inlet at the front end and an air outlet at the rear end; the tubular cavity is filled with hydrogen fluoride gas adsorption material.

[0015] Furthermore: the hydrogen fluoride residual monitor can set an alarm value, and is provided with a numerical display component, an audible and visual alarm component and a sensor housing; the alarm value is a threshold value of the hydrogen fluoride emission content in the exhaust gas; the numerical display component can display the numerical value of the hydrogen fluoride residual content in real time; the audible and visual alarm component emits a physical audible and visual warning when the detected hydrogen fluoride content exceeds the alarm value; the sensor housing is provided with an air inlet and an air outlet, and seals and covers the sensor of the hydrogen fluoride residual monitor.

[0016] Furthermore: the shell and the cover are connected by a connecting shaft and have a lock; the cover is provided with a hole for accommodating the alarm sensor housing at a position aligned with the alarm interface, and a visual window is provided at a position aligned with the hydrogen fluoride residual monitor.

[0017] Furthermore: the alarm interface is equipped with an adapter assembly and a sealing assembly, the adapter assembly is an elastic adapter sleeve and a fastening ring; the two ends of the elastic adapter sleeve are respectively connected to the alarm interface and the sensor housing of the fixed alarm; the fastening ring is made of metal and has a fastening screw and a knob; the sealing assembly is a single-opening cylindrical cover.

[0018] Further: the calibration method for calibrating the hydrogen fluoride alarm by the calibration device is characterized by comprising the following steps:

[0019] Step S1. Turn on the hydrogen fluoride residual monitor and set the alarm value.

[0020] Step S2. Connect multiple fixed alarms to multiple alarm interfaces one by one through the adapter assembly, and seal the remaining alarm interfaces with a cylindrical cover through the adapter assembly.

[0021] Step S3. Open the valve and gas line switch of the standard gas cylinder; adjust the float flowmeter flow of the pressure reducing valve to be consistent with the alarm manual; if the manual has no clear requirements for the flow, it shall be consistent with the technical requirements of the referenced metrological verification procedures or calibration specifications.

[0022] Step S4. Calibrate the alarm with zero-point standard gas and hydrogen fluoride standard gas of different concentrations according to the calibration items and calibration steps of the referenced metrological verification procedure or calibration specification; when replacing hydrogen fluoride standard gas of different concentrations, purge the entire calibration gas circuit with zero-point standard gas in the middle, and then calibrate the alarm with hydrogen fluoride standard gas of the next concentration; before replacing the standard gas, close the valve and gas circuit switch of the standard gas cylinder. After the replacement is completed, adjust the float flowmeter flow of the pressure reducing valve with reference to step 3 and continue the calibration work.

[0023] Step S5. After the alarm is calibrated, the calibration gas circuit is purged with the zero-point standard gas; after the purging is completed, the gas circuit switch is turned off, the hydrogen fluoride residual monitor is turned off, and all alarm interfaces are sealed with a cylindrical cover through an adapter assembly, and the hydrogen fluoride standard gas is properly stored.

[0024] The beneficial effects of the present invention include:

[0025] 1) The alarm interface and the alarm sensor housing are sealed by an elastic adapter sleeve, and the connection port is tightened with a fastening ring to prevent leakage at the connection port due to excessive purge gas pressure, thereby sealing the calibration gas path and avoiding environmental pollution caused by hydrogen fluoride gas and possible physical harm to metrological technicians.

[0026] 2) Multiple hydrogen fluoride alarms can be calibrated simultaneously through the multiple alarm interfaces on the purge chamber, which not only saves hydrogen fluoride standard gas, but also reduces frequent repeated operations, improves work efficiency, and thus reduces the risk of poisoning of metrological technicians, and further avoids hydrogen fluoride gas polluting the environment and possible harm to the bodies of metrological technicians.

[0027] 3) By using the hydrogen fluoride adsorption material in the hydrogen fluoride adsorber, the emitted hydrogen fluoride gas is physically adsorbed or converted into hydrogen fluoride derivatives, which can avoid the direct emission of hydrogen fluoride gas into the ambient air, basically achieving zero emission, and further avoiding hydrogen fluoride gas from polluting the environment and possible harm to the body of metrological technicians.

[0028] 4) The adsorption or conversion effect of the hydrogen fluoride adsorber on hydrogen fluoride gas is detected by a hydrogen fluoride residual monitor. When the concentration of hydrogen fluoride gas in the exhaust gas exceeds the alarm value, the sound and light alarm will be activated. At this time, the valve switch of the standard gas cylinder should be closed in time, the calibration should be stopped, and the calibration work can be continued after the hydrogen fluoride adsorption material is replaced, so as to further avoid hydrogen fluoride gas polluting the environment and possible harm to the body of the metrological technicians. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 Schematic diagram of the structure of the hydrogen fluoride alarm calibration device of this embodiment.

[0030] Figure 2 Schematic diagram of connecting the alarm to the alarm interface

[0031] Figure 3 Schematic diagram of configuring the adapter component for the alarm interface

[0032] Figure 4 Schematic diagram of the alarm interface

[0033] Figure 5 Schematic diagram of the structure of the elastic transition sleeve

[0034] Figure 6 Schematic diagram of the structure of the fastening ring

[0035] Figure 7 Schematic diagram of the structure of a fixed alarm

[0036] Figure 8 Schematic diagram of the structure of connecting the cylindrical cover to the alarm interface

[0037] Fig. 9 Schematic diagram of the structure of the cylindrical cover DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solutions and advantages of the embodiments of the invention clearer, the technical solutions in the embodiments of the invention are clearly and completely described below in conjunction with the drawings of the invention. Obviously, the described embodiments are only part of the embodiments of the invention, not all of the embodiments. Based on the embodiments of the invention, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the invention. Specific embodiment:

[0040] like Figure 1 A calibration device for a hydrogen fluoride alarm is shown, comprising a shell 8 and a cover 9, wherein the shell 8 and the cover 9 are connected by a connecting shaft and have a lock; a standard gas cylinder 1, a pressure reducing valve 2, and a gas circuit switch 3 are arranged outside the shell 8; a purge cavity 4, an alarm interface 5, a hydrogen fluoride adsorber 6, and a hydrogen fluoride residual monitor 7 are arranged inside the shell 8; the cover 9 is provided with a hole for accommodating the alarm sensor housing at a position aligned with the alarm interface 5, and a visual window is provided at a position aligned with the hydrogen fluoride residual monitor 7, so as to facilitate the connection of the alarm sensor housing and the observation of the indication of the hydrogen fluoride residual monitor 7.

[0041] like Figure 1 The standard gas cylinder 1, pressure reducing valve 2, gas circuit switch 3, purge chamber 4, hydrogen fluoride adsorber 6 and hydrogen fluoride residual monitor 7 shown are connected in sequence through a polytetrafluoroethylene gas pipeline to form a calibration gas circuit of the alarm.

[0042] like Figure 1 The standard gas cylinder 1 shown can be replaced by a cylinder with the same interface; the cylinder with the same interface stores zero-point standard gas and hydrogen fluoride standard gas of different concentrations respectively.

[0043] like Figure 1 The pressure reducing valve 2 shown is provided with a float flow meter.

[0044] like Figures 1 to 9 The purge cavity 4 shown is a tubular cavity; it has multiple alarm interfaces 5 and can connect multiple fixed alarms at the same time; the tubular cavity is a straight tube cavity or a bent tube cavity, with an air inlet hole at the head end and an air outlet hole at the tail end; the alarm interface 5 is a cylindrical tube interface, equipped with a adapter assembly and a sealing assembly; the adapter assembly is an elastic adapter sleeve and a fastening ring; the two ends of the elastic adapter sleeve are respectively connected to the alarm interface and the sensor housing of the fixed alarm; the fastening ring is made of metal and has a fastening screw and a knob; the sealing assembly is a single-opening cylindrical cover.

[0045] like Figure 1 The hydrogen fluoride adsorber 6 is a tubular cavity with an air inlet at the front end and an air outlet at the rear end; the tubular cavity is filled with hydrogen fluoride gas adsorption material, which can be selected from soda lime, special activated carbon, modified molecular sieve and alumina powder.

[0046] like Figure 1The hydrogen fluoride residual monitor 7 shown can set an alarm value, is started by a lithium battery, and is equipped with a numerical display component, an audible and visual alarm component, and a sensor housing; the alarm value is a threshold value of the hydrogen fluoride emission content in the exhaust gas; the numerical display component can display the numerical value of the hydrogen fluoride residual content in real time; the audible and visual alarm component emits a physical audible and visual warning when the detected hydrogen fluoride content exceeds the alarm value; the sensor housing is provided with an air inlet and an air outlet, which seals and covers the sensor of the hydrogen fluoride residual monitor 7.

[0047] like Figure 1 The calibration method for calibrating a hydrogen fluoride alarm by the calibration device is characterized in that it comprises the following steps:

[0048] Step S1. The metrological technician wears hydrogen fluoride protective equipment, turns on the hydrogen fluoride residual monitor 7, and sets the alarm value with reference to the concentration valve limit of hydrogen fluoride gas emission;

[0049] Step S2. Connect multiple fixed alarms to multiple alarm interfaces 5 one by one through the adapter assembly, and seal the remaining alarm interfaces 5 with a cylindrical cover through the adapter assembly.

[0050] Step S3. Open the valve of the standard gas cylinder 1 and the gas circuit switch 3; adjust the float flowmeter flow of the pressure reducing valve 2 to be consistent with the alarm manual; if the manual has no clear requirements for the flow, it shall be consistent with the technical requirements of the referenced metrological verification procedures or calibration specifications.

[0051] Step S4. According to the calibration items and calibration steps of the referenced metrological verification procedures or calibration specifications, the alarm is calibrated with zero-point standard gas and hydrogen fluoride standard gas of different concentrations; when replacing hydrogen fluoride standard gas of different concentrations, the entire calibration gas path is purged with zero-point standard gas in the middle, and then the alarm is calibrated with the next concentration of hydrogen fluoride standard gas; before replacing the standard gas, the valve of the standard gas cylinder 1 and the gas path switch 3 are closed. After the replacement is completed, the float flowmeter flow of the pressure reducing valve 2 is adjusted according to step 3, and the calibration work is continued. During the calibration process, the sound and light alarm component of the hydrogen fluoride residual monitor 7 emits a physical sound and light warning, and the calibration should be stopped immediately. After the entire calibration gas path is purged with zero-point standard gas, the hydrogen fluoride adsorption material is replaced, and the calibration work is continued.

[0052] Step S5. After the alarm is calibrated, the entire calibration gas circuit is purged with the zero-point standard gas; after the purging is completed, the gas circuit switch 3 is closed, the hydrogen fluoride residual monitor 7 is closed, and all the alarm interfaces 5 are sealed with a cylindrical cover through an adapter assembly, and the hydrogen fluoride standard gas is properly stored in accordance with the toxic standard gas management system.

[0053] The working principle of the calibration device in this embodiment:

[0054] 1) After the standard gas in the standard gas cylinder 1 is adjusted in flow by the float flowmeter of the pressure reducing valve 2, the alarm sensor is purged through the gas circuit switch 3, the purge cavity 4, and the alarm interface 5. The alarm interface 5 is sealed and connected to the sensor housing of the fixed alarm through an elastic adapter sleeve, and is reinforced with a fastening ring to prevent leakage due to excessive gas pressure; during the purging of hydrogen fluoride gas, the metrological technicians calibrate and calibrate multiple hydrogen fluoride alarms at the same time according to the technical requirements of the referenced metrological verification procedures or calibration specifications; during the whole process, no hydrogen fluoride gas leaks through the alarm interface 5.

[0055] 2) The purge tail gas enters the hydrogen fluoride adsorber 6 through the gas outlet of the purge chamber 4. The hydrogen fluoride adsorbent material in the hydrogen fluoride adsorber 6 physically adsorbs or converts the hydrogen fluoride gas into hydrogen fluoride derivatives; the concentration of the hydrogen fluoride standard gas is generally in the range of (5-100) μmol / mol, and the concentration is low, so the adsorption or conversion effect of the hydrogen fluoride adsorbent material is obvious.

[0056] 3) The purge tail gas enters the hydrogen fluoride residual monitor 7 through the gas outlet of the hydrogen fluoride adsorber 6. The purge tail gas is directly discharged into the ambient air after passing through the hydrogen fluoride residual monitor 7. If the sound and light alarm component of the hydrogen fluoride residual monitor 7 sends out a physical sound and light warning, it means that the effect of the hydrogen fluoride adsorption material in adsorbing or converting hydrogen fluoride gas has decreased, and the concentration of hydrogen fluoride gas exceeds the concentration threshold value of the emission; the calibration should be stopped, and the entire calibration gas path should be purged with zero standard gas to remove the residual hydrogen fluoride gas, and the hydrogen fluoride adsorption material should be replaced to ensure the adsorption or conversion effect of hydrogen fluoride.

Claims

1. A calibration device for a hydrogen fluoride alarm, comprising a housing (8) and a cover (9), characterized in that: A standard gas cylinder (1), a pressure reducing valve (2), and a gas circuit switch (3) are arranged outside the shell (9); a purge cavity (4), an alarm interface (5), a hydrogen fluoride adsorber (6), and a hydrogen fluoride residue monitor (7) are arranged inside the shell.

2. The calibration device for a hydrogen fluoride alarm according to claim 1, characterized in that: The standard gas cylinder (1), the pressure reducing valve (2), the gas circuit switch (3), the purge chamber (4), the hydrogen fluoride adsorber (6) and the hydrogen fluoride residue monitor (7) are connected in sequence through a gas pipeline to form a calibration gas circuit of the alarm.

3. The calibration device for a hydrogen fluoride alarm according to claim 1, characterized in that: The standard gas cylinder (1) can be replaced with a cylinder with the same interface; the cylinder with the same interface respectively stores zero-point standard gas and hydrogen fluoride standard gas of different concentrations.

4. The calibration device for a hydrogen fluoride alarm according to claim 1, characterized in that: The pressure reducing valve (2) is provided with a float flow meter.

5. The calibration device for a hydrogen fluoride alarm according to claim 1, characterized in that: The purge cavity (4) is a tubular cavity with a plurality of alarm interfaces (5); the tubular cavity is a straight tube cavity or a bent tube cavity, with an air inlet hole at the head end and an air outlet hole at the tail end; the alarm interface (5) is a cylindrical tube interface.

6. The calibration device for a hydrogen fluoride alarm according to claim 1, characterized in that: The hydrogen fluoride adsorber (6) is a tubular cavity with an air inlet opening at the front end and an air outlet opening at the rear end; the interior of the tubular cavity is filled with hydrogen fluoride gas adsorption material.

7. The calibration device for a hydrogen fluoride alarm according to claim 1, characterized in that: The hydrogen fluoride residue monitor (7) can be set with an alarm value, and is provided with a numerical display component, an audible and visual alarm component, and a sensor housing; the alarm value is a threshold value of the hydrogen fluoride emission content in the tail gas; the numerical display component can display the numerical value of the hydrogen fluoride residue content in real time; the audible and visual alarm component emits a physical audible and visual warning when the detected hydrogen fluoride content exceeds the alarm value; the sensor housing is provided with an air inlet and an air outlet, and seals and covers the sensor of the hydrogen fluoride residue monitor (7).

8. The calibration device for a hydrogen fluoride alarm according to claim 1, characterized in that: The shell (8) and the cover (9) are connected via a connecting shaft and are provided with a lock; the cover is provided with a hole for accommodating the alarm sensor housing at a position aligned with the alarm interface (5), and a visual window at a position aligned with the hydrogen fluoride residue monitor (7).

9. The calibration device for a hydrogen fluoride alarm according to claim 5, characterized in that: The alarm interface (5) is equipped with an adapter component and a sealing component, wherein the adapter component is an elastic adapter sleeve and a fastening ring; the two ends of the elastic adapter sleeve are respectively connected to the alarm interface (5) and the sensor housing of the fixed alarm; the fastening ring is made of metal and has a fastening screw and a knob; the sealing component is a single-opening cylindrical cover.

10. The calibration method for calibrating a hydrogen fluoride alarm using a calibration device according to any one of claims 1 to 9, characterized in that: The following steps are involved: Step S1. Turn on the hydrogen fluoride residual monitor (7) and set the alarm value. Step S2. Connect the plurality of fixed alarms to the plurality of alarm interfaces (5) one by one through the adapter assembly, and seal the remaining alarm interfaces (5) with a cylindrical cover through the adapter assembly. Step S3. Open the valve of the standard gas cylinder (1) and the gas circuit switch (3); adjust the float flowmeter flow rate of the pressure reducing valve (2) to be consistent with the alarm manual; if the manual has no clear requirements for the flow rate, it shall be consistent with the technical requirements of the referenced metrological verification procedures or calibration specifications. Step S4. According to the calibration items and calibration steps of the referenced metrological verification procedures or calibration specifications, the alarm is calibrated with zero-point standard gas and hydrogen fluoride standard gas of different concentrations; when replacing hydrogen fluoride standard gas of different concentrations, the entire calibration gas circuit is purged with zero-point standard gas in the middle, and then the alarm is calibrated with hydrogen fluoride standard gas of the next concentration; before replacing the standard gas, the valve of the standard gas cylinder (1) and the gas circuit switch (3) are closed. After the replacement is completed, the float flowmeter flow of the pressure reducing valve (2) is adjusted according to step 3, and the calibration work is continued. Step S5. After the alarm is calibrated, the calibration gas circuit is purged with the zero-point standard gas; after the purging is completed, the gas circuit switch (3) is closed, the hydrogen fluoride residual monitor (7) is closed, and all the alarm interfaces (5) are sealed with a cylindrical cover through an adapter assembly, and the hydrogen fluoride standard gas is properly stored.

Images