Device and method for removing high-concentration ClF3 in fluorine-containing tail gas by dry method

Abstract

The invention relates to a device and a method for removing high-concentration ClF3 in fluorine-containing tail gas by a dry method. The device comprises a first purification device, a second purification device and a third purification device, a gas inlet of the first purification device is used for being communicated with external fluorine-containing tail gas needing to be treated, a gas outlet of the first purification device is communicated with a gas inlet of the second purification device, and the first purification device is filled with soda lime particles; an air outlet of the second purification device is communicated with an air inlet of the third purification device, and the second purification device is filled with iron oxide particles; and the third purification device is filled with hydroxide particles. According to the invention, first-stage purification is carried out based on soda lime particles, second-stage purification is carried out based on iron oxide particles, and third-time purification is carried out based on hydroxide particles; the purification process is simpler, secondary waste liquid is not generated, the safety is higher, and the purification treatment efficiency is also higher.

Description

Technical Field

[0001] The present invention relates to the technical field of waste gas treatment technology in nuclear industry, and in particular to a device and method for removing high-concentration ClF3 in fluorine-containing tail gas by dry method. Background Art

[0002] ClF3 is an almost colorless gas or slightly yellow liquid (boiling point about 285K) with extremely active chemical properties, strong corrosiveness and strong oxidizing properties. ClF3 can react with most organic and inorganic materials and even plastics, causing many materials to burn without contact with a fire source. These reactions are usually violent and can even explode in some cases. ClF3 is a highly toxic substance and is potentially dangerous even in low concentrations. The main damage is caused by corrosion of the contact surface and the toxic effects of its hydrolysis products. At present, the treatment methods for ClF3 waste gas include: dry dust removal, in which harmful gases flow through a packed column filled with solid adsorbents to eliminate harmful gases; wet dust removal, in which harmful gases are decomposed by contact with alkaline aqueous solutions.

[0003] At present, foreign countries mostly use synthetic zeolite or iron oxide decomposition agent to decompose ClF3, and then absorb the decomposition products through alkaline reactants; China adopts a dry-wet method, using alkaline reactant absorption, activated carbon adsorption and alkali solution washing to treat ClF3 tail gas. Compared with the foreign decomposition-absorption treatment process, the multi-stage absorption-adsorption treatment process used in China has problems such as frequent replacement of absorbents and adsorbents, large amount of secondary waste liquid, easy desorption of harmful substances, and low treatment efficiency. The above problems need to be solved urgently. Summary of the invention

[0004] The invention discloses a device and method for removing high-concentration ClF3 in fluorine-containing tail gas by dry method, aiming to solve the technical problems existing in the prior art.

[0005] The present invention adopts the following technical solutions:

[0006] The present invention provides a device for dryly removing high-concentration ClF3 in fluorine-containing tail gas, which comprises: a first purification device, a second purification device and a third purification device; the air inlet of the first purification device is used to connect to the external fluorine-containing tail gas that needs to be treated, and the air outlet is connected to the air inlet of the second purification device, and the first purification device is filled with soda lime particles; the air outlet of the second purification device is connected to the air inlet of the third purification device, and the second purification device is filled with iron oxide particles; the third purification device is filled with hydroxide particles.

[0007] In the dry method for removing high-concentration ClF3 in fluorine-containing tail gas of the present invention, the weight percentage of calcium oxide in the soda lime particles is greater than or equal to 75%.

[0008] In the device for dry removal of high-concentration ClF3 in fluorine-containing tail gas of the present invention, the iron oxide particles include ferrous oxide particles and iron oxide particles.

[0009] In the device for dry removal of high-concentration ClF3 in fluorine-containing tail gas of the present invention, the weight percentage of the iron oxide particles and the iron oxide is 30-80%.

[0010] In the device for dry removal of high-concentration ClF3 in fluorine-containing tail gas of the present invention, the particle size of the iron oxide particles is 1-15 mm.

[0011] In the device for dry removal of high-concentration ClF3 in fluorine-containing tail gas of the present invention, the hydroxide particles include calcium hydroxide particles, potassium hydroxide particles and sodium hydroxide particles.

[0012] In the device for removing high-concentration ClF3 in fluorine-containing tail gas by dry method of the present invention, the weight percentage of calcium hydroxide in the hydroxide particles is 50-100%.

[0013] In the device for dry removal of high-concentration ClF3 in fluorine-containing tail gas of the present invention, the particle size of the hydroxide particles is 1-10 mm.

[0014] In the device for dry removal of high concentration ClF3 in fluorine-containing tail gas of the present invention, a dilution device is also included; the dilution device is used to dilute the tail gas entering the first purification device, and includes a receiver, a first feed pipe, a second feed pipe, a first valve, a second valve, a first pressure measuring element and a second pressure measuring element; one end of the first feed pipe is used to connect to the external fluorine-containing tail gas that needs to be treated, and the other end is connected to the receiver, and the first feed pipe is provided with the first valve and the first pressure measuring element; one end of the second feed pipe is used to connect to the external inert gas, and the other end is connected to the receiver, and the second feed pipe is provided with the second valve and the second pressure measuring element; the gas outlet of the receiver is connected to the gas inlet of the first purification device.

[0015] In a second aspect, the present invention also provides a method for dry removal of high concentration ClF3 in fluorine-containing tail gas, which comprises the following steps:

[0016] The fluorine-containing tail gas to be treated is introduced for dilution;

[0017] The diluted fluorine-containing tail gas is treated with soda lime particles, iron oxide particles and hydroxide particles in sequence to obtain purified gas.

[0018] The technical solution adopted by the present invention can achieve the following beneficial effects:

[0019] The present invention mainly provides a device for dry removal of high-concentration ClF3 in fluorine-containing tail gas, based on the first-stage purification with soda lime particles, the second-stage purification with iron oxide particles, and the third-stage purification with hydroxide particles; the purification process is simpler, and no secondary waste liquid is generated, the safety is higher, and the purification treatment efficiency is also higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments, which constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions explain the present invention and do not constitute improper limitations on the present invention. In the drawings:

[0021] Figure 1 The present invention is a schematic structural diagram of a device for removing high-concentration ClF3 in fluorine-containing tail gas by dry method.

[0022] Description of reference numerals:

[0023] 1. First purification device; 2. Second purification device; 3. Third purification device; 4. Dilution device; 41. Receiver; 42. First feed pipe; 43. Second feed pipe; 44. First valve; 45. Second valve; 46. First pressure measuring element; 47. Second pressure measuring element; 48. First flow measuring element; 49. Second flow measuring element. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention and the corresponding drawings. In the description of the present invention, it should be noted that the term "or" is usually used in the sense of including "and / or", unless the content clearly indicates otherwise.

[0025] Unless expressly indicated to the contrary, the numerical parameters in this specification and the appended claims may be approximate values ​​and can be changed according to the desired properties obtained by the content of the present invention. Specifically, all numbers used in the specification and claims to express the content of the composition, reaction conditions, etc., should be understood to be modified by the term "about" in all cases. In general, the meaning of the expression is to include a change of ±10% in some embodiments, a change of ±5% in some embodiments, a change of ±1% in some embodiments, and a change of ±0.5% in some embodiments by a specific number.

[0026] Furthermore, the word "comprising" does not exclude the presence of materials or steps not listed in the claims. Ordinal numbers such as "first", "second", "third" and Arabic numerals, letters, etc. used in the specification and claims to modify corresponding elements or steps do not themselves mean the order of the manufacturing method. The use of these ordinals is only used to make the steps clearly distinguishable.

[0027] In addition, unless the steps are specifically described or must occur in sequence, the order of the above steps is not limited to the above list, and can be changed or rearranged according to the required design. And the above embodiments can be mixed and matched with each other or with other embodiments based on design and reliability considerations, that is, the technical features in different embodiments can be freely combined to form more embodiments.

[0028] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] In order to solve the problems existing in the prior art, the embodiments of the present application provide a device and method for dry removal of high concentration ClF3 in fluorine-containing tail gas.

[0030] A device for dry removal of high-concentration ClF3 in fluorine-containing tail gas, comprising: a first purification device 1, a second purification device 2 and a third purification device 3; the air inlet of the first purification device 1 is used to communicate with the external fluorine-containing tail gas that needs to be treated, and the air outlet is connected to the air inlet of the second purification device 2, and the first purification device 1 is filled with soda lime particles; the air outlet of the second purification device 2 is connected to the air inlet of the third purification device 3, and the second purification device 2 is filled with iron oxide particles; the third purification device 3 is filled with hydroxide particles.

[0031] The invention discloses a device for removing high-concentration ClF3 in fluorine-containing tail gas by dry method. The device is based on first-stage purification with soda lime particles, second-stage purification with iron oxide particles, and third-stage purification with hydroxide particles. The purification process is simpler, no secondary waste liquid is generated, the safety is higher, and the purification treatment efficiency is also higher. Soda lime particles mainly composed of calcium oxide are used for the first-stage purification, which has higher reaction activity and lower cost, and is conducive to industrial application. Iron oxide particles are used for the second-stage purification. When ClF3 reacts with iron oxide, ClF3 is fixed on the surface of the iron oxide particles in the form of iron fluoride or iron chloride, and by-products such as gaseous fluoride and chloride exist. Finally, hydroxide particles are used to remove hydrogen fluoride, chlorine trifluoride and chlorine gas that are not removed by the first-stage purification treatment and the second-stage purification treatment.

[0032] In some preferred embodiments, the weight percentage of calcium oxide in the soda lime particles is greater than or equal to 75%.

[0033] In some preferred embodiments, the first purification device 1 is used to remove chlorine trifluoride, hydrogen fluoride, chlorine monofluoride and chlorine by soda lime (components are calcium oxide, water, sodium hydroxide and potassium hydroxide), and the following reactions occur:

[0034] 5ClF3+8H2O==15HF+HCl+4ClO2;

[0035] 2ClO2==Cl2+2O2;

[0036] Cl2+H2O==HCl+HClO;

[0037] 2F2+2H2O==4HF+O2;

[0038] CaO+2HCl==CaCl2+H2O;

[0039] CaO+2HClO==Ca(ClO)2+H2O;

[0040] CaO+2HF==CaF2+H2O.

[0041] Taking the complete decomposition of ClO2 as an example, the total reaction between ClF3 and CaO is:

[0042] 20CaO+10ClF3==8O2+15CaF2+3CaCl2+2Ca(ClO)2;

[0043] The overall reaction of ClF3 with NaOH or KOH is:

[0044] ClF3+4NaOH==NaCl+3NaF+O2+2H2O;

[0045] ClF3+4KOH==KCl+3KF+O2+2H2O.

[0046] In some preferred embodiments, the iron oxide particles include ferrous oxide particles and ferric oxide particles; based on this, further reaction of gases such as ClO2 is catalyzed, and gases such as chlorine trifluoride that are not completely purified are removed; the specific reaction is as follows:

[0047] 2ClO2==Cl2+2O2;

[0048] 3ClF3+2Fe2O3==FeCl3+3FeF3+3O2.

[0049] Preferably, the weight percentage of iron oxide in the iron oxide is 30-80%, and the absorption efficiency is higher based on iron oxide as the main reaction component.

[0050] Preferably, the particle size of the iron oxide is 1-15 mm; within this particle size range, both good gas flowability and reaction specific surface area can be achieved; more preferably, the particle size of the iron oxide is 5 mm.

[0051] In some preferred embodiments, the hydroxide particles include calcium hydroxide particles, potassium hydroxide particles and sodium hydroxide particles. The specific reaction is as follows:

[0052] 2Ca(OH)2+Cl2==CaCl2+Ca(ClO)2+2H2O;

[0053] Ca(OH)2+2HF==CaF2+2H2O;

[0054] Ca(OH)2+2HCl==CaCl2+2H2O.

[0055] Preferably, the weight percentage of calcium hydroxide in the hydroxide particles is 50-100%, and the rest is water; using calcium hydroxide as the main reaction component can ensure that there are no residual ClF3 and other harmful components in the passing gas.

[0056] Preferably, the particle size of the hydroxide particles is 1-10 mm; more preferably, the particle size of the hydroxide particles is 5 mm.

[0057] In some preferred embodiments, a dilution device 4 is further included; the dilution device 4 is used to dilute the tail gas entering the first purification device 1, and includes a receiver 41, such as a tank structure, a first feed pipe 42, a second feed pipe 43, a first valve 44, a second valve 45, a first pressure measuring element 46 and a second pressure measuring element 47; one end of the first feed pipe 42 is used to connect to the external fluorine-containing tail gas to be treated, and the other end is connected to the receiver 41, and the first feed pipe 42 is provided with a first valve 44 and a first pressure measuring element 46; one end of the second feed pipe 43 is used to connect to the external inert gas The other end is connected to the receiver 41, and the second feed pipe 43 is provided with a second valve 45 and a second pressure measuring element 47; the gas outlet of the receiver 41 is connected to the gas inlet of the first purification device 1; based on the dilution of the fluorine-containing tail gas containing high concentration of ClF3 with inert gas, the chemical reaction rate is effectively controlled and the risk is reduced, so that the three-stage purification consisting of soda lime absorption, iron oxide adsorption and calcium hydroxide adsorption can be fully reacted, and the gas discharged after the reaction meets the emission requirements, such as the requirements in the "Integrated Emission Standard of Air Pollutants" (GB16297-1996).

[0058] Preferably, the first valve 44 and the second valve 45 are both one-way valves.

[0059] Preferably, the first feed pipe 42 and the second feed pipe 43 are respectively provided with stop valves to control the passage or disconnection.

[0060] Preferably, it also includes a first flow measuring element 48 and a second flow measuring element 49, wherein the first flow measuring element 48 is installed on the first feed pipe 42 to measure the gas flow in the first feed pipe 42, and the second flow measuring element 49 is installed on the second feed pipe 43 to measure the gas flow in the second feed pipe 43.

[0061] A method for dry removal of high concentration ClF3 in fluorine-containing tail gas, comprising the following steps:

[0062] The fluorine-containing tail gas to be treated is introduced for dilution;

[0063] The diluted fluorine-containing tail gas is treated with soda lime particles, iron oxide particles and hydroxide particles in sequence to obtain purified gas.

[0064] The invention discloses a method for removing high-concentration ClF3 in fluorine-containing tail gas by dry method. The method is based on first-stage purification with soda lime particles, second-stage purification with iron oxide, and third-stage purification with hydroxide particles. The purification process is simpler, no secondary waste liquid is generated, the safety is higher, and the purification treatment efficiency is also higher. Soda lime particles mainly composed of calcium oxide are used for the first-stage purification, which has higher reaction activity and lower cost, and is conducive to industrial application. Iron oxide particles are used for the second-stage purification. When ClF3 reacts with the iron oxide particles, ClF3 is fixed on the surface of the iron oxide particles in the form of iron fluoride or iron chloride, and by-products such as gaseous fluoride and chloride exist. Finally, hydroxide particles are used to remove hydrogen fluoride, chlorine trifluoride and chlorine gas that are not removed by the first-stage purification treatment and the second-stage purification treatment.

[0065] Preferably, the method is implemented by the above-mentioned device:

[0066] The fluorine-containing tail gas to be treated is introduced into the dilution device 4 for dilution;

[0067] The diluted fluorine-containing tail gas is processed by the first purification device 1, the second purification device 2 and the third purification device 3 in sequence to obtain purified gas;

[0068] in,

[0069] The first purification device 1 is filled with soda lime particles;

[0070] The second purification device 2 is filled with iron oxide particles;

[0071] The third purification device 3 is filled with hydroxide particles.

[0072] Example 1

[0073] 360 L / h of dry nitrogen and 360 L / h of fluorine-containing tail gas (volume percentage of each component is: nitrogen: about 45%, fluorine: about 25%, hydrogen fluoride: about 3%, chlorine monofluoride: about 15%, chlorine trifluoride: about 6%, chlorine: about 6%) are mixed into the receiver 41, and then pass through the first purification device 1, the second purification device 2 and the third purification device 3 in sequence;

[0074] in,

[0075] The mass percentage of each component of the soda lime particles in the first purification device 1 is 75% CaO, 20% H2O, 3% NaOH, 1% KOH, the adsorption temperature of the first purification device 1 is 75°C, the adsorption pressure is 0.3 kPa; the filling amount is 10 kg;

[0076] The iron oxide particles in the second purification device 2 are composed of 80% Fe2O3 and 20% FeO; the adsorption temperature of the second purification device 2 is 75°C, and the adsorption pressure is 0.3 kPa; the particle size of the iron oxide particles is 5 mm; and the loading amount is 24 kg;

[0077] The hydroxide particle composition of the third purification device 3 is 80% Ca(OH)2 particles and 20% NaOH particles; the adsorption temperature of the third purification device 3 is 75°C, and the adsorption pressure is 0.3 kPa; the particle size of the hydroxide particles is 5 mm; and the loading amount is 10 kg.

[0078] Finally, the volume percentages of the components in the purified non-toxic tail gas at the outlet of the three-stage device 3 were measured to be: nitrogen: about 90%, oxygen: about 9%, and the average treatment efficiency of ClF3 was 400g / h.

[0079] Example 2

[0080] The difference between this embodiment and the embodiment 1 is that the iron oxide particles in the second purification device 2 are composed of 30% Fe2O3 and 70% FeO; the rest is the same as the embodiment 1.

[0081] Finally, the volume percentages of the components in the purified non-toxic tail gas at the outlet of the three-stage device 3 were measured to be: nitrogen: about 90%, oxygen: about 9%, and the average treatment efficiency of ClF3 was 200g / h.

[0082] Example 3

[0083] The difference between this embodiment and embodiment 1 is that the iron oxide particles in the second purification device 2 are composed of 60% Fe2O3 and 40% FeO; the rest is the same as embodiment 1.

[0084] Finally, the volume percentages of the components in the non-toxic tail gas at the outlet of the three-stage purification device 3 were measured to be: nitrogen: about 90%, oxygen: about 9%, and the average treatment efficiency of ClF3 was 250g / h.

[0085] Example 4

[0086] The difference between this embodiment and the embodiment 1 is that the particle size of the iron oxide particles in the second purification device 2 is 1 mm; the rest is the same as the embodiment 1.

[0087] Finally, the volume percentages of the non-toxic tail gas at the outlet of the three-stage purification device 3 were measured to be: nitrogen: about 90%, oxygen: about 9%, and the average treatment efficiency of ClF3 was 300g / h.

[0088] Example 5

[0089] The difference between this embodiment and embodiment 1 is that the particle size of the iron oxide particles in the second purification device 2 is 15 mm; the rest is the same as embodiment 1.

[0090] Finally, the volume percentages of the non-toxic tail gas at the outlet of the three-stage purification device 3 were measured to be: nitrogen: about 90%, oxygen: about 9%, and the average treatment efficiency of ClF3 was 350g / h.

[0091] Example 6

[0092] The difference between this embodiment and embodiment 1 is that the hydroxide particles of the third purification device 3 are composed of 100% Ca(OH)2; the rest is the same as embodiment 1.

[0093] Finally, the volume percentages of the non-toxic tail gas at the outlet of the three-stage purification device 3 were measured to be: nitrogen: about 90%, oxygen: about 9%, and the average treatment efficiency of ClF3 was 400g / h.

[0094] Example 7

[0095] The difference between this embodiment and embodiment 1 is that the hydroxide particles of the third purification device 3 are composed of 50% Ca(OH)2 and 50% NaOH; the rest is the same as embodiment 1.

[0096] Finally, the volume percentages of the non-toxic tail gas at the outlet of the three-stage purification device 3 were measured to be: nitrogen: about 90%, oxygen: about 9%, and the average treatment efficiency of ClF3 was 250g / h.

[0097] Example 8

[0098] The difference between this embodiment and embodiment 1 is that the hydroxide particles of the third purification device 3 are composed of 80% NaOH and 20% H2O; the rest is the same as embodiment 1.

[0099] Finally, the volume percentage of the tail gas at the outlet of the three-stage purification device 3 was measured as follows: nitrogen: about 89%, oxygen: about 9%, chlorine and hydrogen chloride: about 1%, hydrogen fluoride: about 1%, and the average treatment efficiency of ClF3 was 200g / h.

[0100] Example 9

[0101] The difference between this embodiment and the embodiment 1 is that the particle size of the hydroxide particles of the third purification device 3 is 1 mm; the rest is the same as the embodiment 1.

[0102] Finally, the volume percentages of the non-toxic tail gas at the outlet of the three-stage purification device 3 were measured to be: nitrogen: about 90%, oxygen: about 9%, and the average treatment efficiency of ClF3 was 400g / h.

[0103] Example 10

[0104] The difference between this embodiment and the embodiment 1 is that the particle size of the hydroxide particles of the third purification device 3 is 10 mm; the rest is the same as the embodiment 1.

[0105] The volume percentages of the non-toxic tail gas at the outlet of the final three-stage purification device 3 are: nitrogen: about 90%, oxygen: about 9%, and the average treatment efficiency of ClF3 is 300g / h.

[0106] Comparative Example 1

[0107] The difference between this comparative example and Example 1 is that the second purification device 2 is filled with soda lime particles, wherein the soda lime is composed of 50% calcium hydroxide, 35% sodium hydroxide and 15% forming agent (by weight percentage), and the rest is the same as Example 1.

[0108] Finally, the volume percentages of the non-toxic tail gas at the outlet of the three-stage purification device 3 were measured to be: nitrogen: about 90%, oxygen: about 9%, and the average treatment efficiency of ClF3 was 250g / h.

[0109] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation modes, which are merely illustrative rather than restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the present invention and the claims, all of which are within the protection of the present invention.

Claims

1. A device for removing high concentration ClF3 in fluorine-containing tail gas by dry method, characterized in that: include: a first purification device, a second purification device, and a third purification device; The air inlet of the first purification device is used to communicate with the external fluorine-containing tail gas that needs to be treated, and the air outlet is connected to the air inlet of the second purification device, and the first purification device is filled with soda lime particles; The air outlet of the second purification device is connected to the air inlet of the third purification device, and the second purification device is filled with iron oxide particles; The third purification device is filled with hydroxide particles.

2. The device for dry removal of high concentration ClF3 in fluorine-containing tail gas according to claim 1, characterized in that: The weight percentage of calcium oxide in the soda lime particles is greater than or equal to 75%.

3. The device for dry removal of high concentration ClF3 in fluorine-containing tail gas according to claim 1, characterized in that: The iron oxide particles include ferrous oxide particles and ferric oxide particles.

4. The device for dry removal of high concentration ClF3 in fluorine-containing tail gas according to claim 3, characterized in that: The weight percentage of iron oxide in the iron oxide particles is 30-80%.

5. The device for dry removal of high concentration ClF3 in fluorine-containing tail gas according to claim 3, characterized in that: The particle size of the iron oxide particles is 1-15 mm.

6. The device for dry removal of high concentration ClF3 in fluorine-containing tail gas according to claim 1, characterized in that: The hydroxide particles include calcium hydroxide particles, potassium hydroxide particles and sodium hydroxide particles.

7. The device for dry removal of high concentration ClF3 in fluorine-containing tail gas according to claim 6, characterized in that: The weight percentage of calcium hydroxide in the hydroxide particles is 50-100%.

8. The device for dry removal of high concentration ClF3 in fluorine-containing tail gas according to claim 1, characterized in that: The particle size of the hydroxide particles is 1-10 mm.

9. The device for dry removal of high concentration ClF3 in fluorine-containing tail gas according to claim 1, characterized in that: Also included is a dilution device; The dilution device is used to dilute the tail gas entering the first purification device, and includes a receiver, a first feed pipe, a second feed pipe, a first valve, a second valve, a first pressure measuring element and a second pressure measuring element; One end of the first feed pipe is used to connect to the external fluorine-containing tail gas that needs to be treated, and the other end is connected to the receiver, and the first valve and the first pressure measuring element are arranged on the first feed pipe; One end of the second feed pipe is used to connect with the external inert gas, and the other end is connected with the receiver, and the second valve and the second pressure measuring element are arranged on the second feed pipe; The air outlet of the receiver is connected to the air inlet of the first purification device.

10. A method for removing high concentration ClF3 in fluorine-containing tail gas by dry method, characterized in that: The steps include: The fluorine-containing tail gas to be treated is introduced for dilution; The diluted fluorine-containing tail gas is treated with soda lime particles, iron oxide particles and hydroxide particles in sequence to obtain purified gas.

Images