High-purity silicon tetrafluoride separation and purification equipment

Abstract

The invention relates to the technical field of purification equipment, and discloses high-purity silicon tetrafluoride separation and purification equipment which comprises a filter cartridge and a separation tank and further comprises a molecular sieve filled in the filter cartridge, a hollow pipe is fixedly connected to the center of the inner bottom surface of the filter cartridge, a locking rod is inserted into the hollow pipe in a penetrating mode, and a cover plate is attached to the top end of the hollow pipe. The top end of the locking rod is in threaded connection with a rotary knob, the outer surface of the filter cylinder is sleeved with an upper lantern ring and a lower lantern ring, a vertical plate is fixedly connected between the upper lantern ring and the lower lantern ring, and a scraper is installed on the outer surface of the vertical plate. Through combination of the filter cartridge and the molecular sieve filled in the filter cartridge, dust, moisture, hydrogen fluoride and other impurities in a silicon tetrafluoride gas phase substance can be effectively removed, and when the molecular sieve needs to be replaced, the sealing cover is opened, the knob is screwed to be separated from the locking rod, and the cover plate is taken up, so that the top end of the filter cartridge is exposed to facilitate replacement of the molecular sieve.

Description

Technical Field

[0001] The invention relates to the technical field of purification equipment, in particular to high-purity silicon tetrafluoride separation and purification equipment. Background Art

[0002] Silicon tetrafluoride has extremely critical application value in many high-tech fields such as semiconductor manufacturing and optical fiber production. With the rapid development of these industries, the demand for high-purity silicon tetrafluoride has risen sharply. Since silicon tetrafluoride contains a large amount of impurities in the preparation process, purification equipment is needed to purify it in the production process of silicon tetrafluoride.

[0003] According to the search, the Chinese patent document, announcement number: CN219023659U, discloses a high-purity silicon tetrafluoride separation and purification device. By setting five layers of filtering devices equidistantly along the extension direction of the filter shell; the filtering path of the silicon tetrafluoride gas can be extended; the through holes on any two adjacent filtering devices are staggered, which can make the newly produced silicon tetrafluoride gas perform "S" rotational motion in the multiple filtering devices set; through the above-mentioned setting, the silicon tetrafluoride gas can perform rotational motion along the path defined in the filter shell, and the dust impurities doped in the silicon tetrafluoride gas can be intercepted or captured.

[0004] However, during actual use of the above-mentioned purification equipment, dust and impurities will continue to accumulate on the outer surface of the filter device, causing the effect of the filter device to gradually deteriorate. In addition, there is a lack of structure for cleaning the filter device, and there is no structure that is convenient for replacing the filter device, which shortens the service life of the entire device and has poor filtering effect. Summary of the invention

[0005] 1. Technical issues to be resolved

[0006] In view of the deficiencies in the prior art, the present invention provides a high-purity silicon tetrafluoride separation and purification device, which has the advantages of being easy to clean and filter out impurities, and is beneficial to extending the service life of the equipment, thereby solving the above-mentioned technical problems.

[0007] (II) Technical solution

[0008] To achieve the above-mentioned purpose, the present invention provides the following technical scheme: a high-purity silicon tetrafluoride separation and purification equipment, comprising a filter cartridge and a separation tank, and also comprising a molecular sieve filled in the filter cartridge, a hollow tube is fixedly connected to the center of the inner bottom surface of the filter cartridge, a locking rod is inserted into the interior of the hollow tube, and a cover plate is attached to the top of the hollow tube, a knob is threadedly connected to the top of the locking rod, an upper ring and a lower ring are sleeved on the outer surface of the filter cartridge, a vertical plate is fixedly connected between the upper ring and the lower ring, a scraper is installed on the outer surface of the vertical plate, a positioning pulley is fixedly connected to the inner wall of the separation tank, a gear ring is fixedly connected to the lower surface of the upper ring, the gear ring is meshedly connected to a transmission gear, a rotating shaft is fixedly connected to the end center of the transmission gear, a sealing cover is installed on the top of the separation tank, a driving motor is installed on the top surface of the sealing cover, a discharge pipe is fixedly connected to the bottom of the separation tank, and a valve is installed at the bottom of the discharge pipe.

[0009] Preferably, a gas phase inlet pipe is fixedly connected to a position near the bottom end of the outer surface of the separation tank, and a conveying device is connected to the end of the gas phase inlet pipe away from the separation tank.

[0010] Preferably, a through hole is formed through the top surface of the cover plate, and a silicon tetrafluoride outlet tube is fixedly connected to the top surface of the sealing cover.

[0011] Preferably, three vertical plates are arranged in an array around the axial direction between the upper and lower rings, and the outer surfaces of the three vertical plates are connected with scrapers through bolts, and one side of the scraper is attached to the outer surface of the filter cartridge.

[0012] Preferably, the output shaft of the driving motor is fixedly connected with a shaft head, the top end of the rotating shaft is fixedly connected with a shaft sleeve, and the shaft head and the shaft sleeve can be engaged with each other.

[0013] Preferably, a plurality of positioning pulleys are arranged on the inner wall of the separation tank in an array around the axial direction thereof, and the positioning pulleys are in sliding contact with the lower collar.

[0014] Compared with the prior art, the present invention provides a high-purity silicon tetrafluoride separation and purification device, which has the following beneficial effects:

[0015] 1. The present invention can effectively remove impurities such as dust, moisture and hydrogen fluoride in the silicon tetrafluoride gas phase by combining the filter cartridge with the molecular sieve filled inside. When the molecular sieve needs to be replaced, open the sealing cover, turn the knob to disengage the locking rod, pick up the cover plate, and expose the top of the filter cartridge to replace the molecular sieve.

[0016] 2. The present invention starts the driving motor, and its output shaft drives the sleeve to rotate, the sleeve drives the rotating shaft and the transmission gear to rotate, the transmission gear drives the gear ring to rotate, and under the limiting guidance of the positioning pulley on the lower ring, the upper ring drives the vertical plate and the scraper to rotate, scraping off impurities on the outer surface of the filter cartridge, and the impurities fall to the bottom of the separation tank and are discharged through the discharge pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional schematic diagram of the structure of the present invention;

[0018] Figure 2 It is a front schematic diagram of the structure of the present invention;

[0019] Figure 3 It is a three-dimensional cross-sectional schematic diagram of the structure of the present invention;

[0020] Figure 4 For the present invention Figure 3 A is a partial enlarged schematic diagram;

[0021] Figure 5 It is a partial stereoscopic schematic diagram of the present invention.

[0022] Among them: 1. filter cartridge; 2. hollow tube; 3. locking rod; 4. cover plate; 5. knob; 6. upper collar; 7. lower collar; 8. vertical plate; 9. scraper; 10. separation tank; 11. positioning pulley; 12. gear ring; 13. transmission gear; 14. rotating shaft; 15. sealing cover; 16. driving motor; 17. discharge pipe; 18. valve; 19. gas phase inlet pipe; 20. silicon tetrafluoride outlet pipe; 21. shaft head; 22. shaft sleeve. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] See also Figure 1-Figure 5A high-purity silicon tetrafluoride separation and purification device includes a filter cartridge 1 and a separation tank 10, and also includes a molecular sieve filled in the filter cartridge 1. A hollow tube 2 is fixedly connected to the center of the inner bottom surface of the filter cartridge 1. A locking rod 3 is inserted into the hollow tube 2, and a cover plate 4 is attached to the top of the hollow tube 2. A knob 5 is threadedly connected to the top of the locking rod 3. An upper ring 6 and a lower ring 7 are sleeved on the outer surface of the filter cartridge 1. A vertical plate 8 is fixedly connected between the upper ring 6 and the lower ring 7. The vertical plate 8 is A scraper 9 is installed on the outer surface, a positioning pulley 11 is fixedly connected to the inner wall of the separation tank 10, a gear ring 12 is fixedly connected to the lower surface of the upper ring 6, a transmission gear 13 is meshingly connected to the gear ring 12, a rotating shaft 14 is fixedly connected to the end center of the transmission gear 13, a sealing cover 15 is installed on the top of the separation tank 10, a driving motor 16 is installed on the top surface of the sealing cover 15, a discharge pipe 17 is fixedly connected to the bottom of the separation tank 10, and a valve 18 is installed at the bottom of the discharge pipe 17.

[0025] Specifically, a gas phase inlet pipe 19 is fixedly connected to the outer surface of the separation tank 10 near the bottom end, and a conveying device is connected to the end of the gas phase inlet pipe 19 away from the separation tank 10. A through hole is opened through the top surface of the cover plate 4, and a silicon tetrafluoride outlet pipe 20 is fixedly connected to the top surface of the sealing cover 15.

[0026] The prepared silicon tetrafluoride gas is transported to the gas phase inlet pipe 19 by a conveying device which may be a corrosion-resistant pump body, and then the gas phase enters the separation tank 10. Under continuous pumping pressure, the gas phase passes through the filter cartridge 1 and the molecular sieve inside the filter cartridge 1, so that the filter cartridge 1 filters the dust in the gas phase, and the internal molecular sieve adsorbs impurities such as moisture and hydrogen fluoride in the silicon tetrafluoride gas phase. The silicon tetrafluoride after impurity removal passes through the through hole on the top of the cover plate 4, and then is discharged from the silicon tetrafluoride outlet pipe 20. By connecting the silicon tetrafluoride outlet pipe 20 to a storage device, it is convenient to collect the silicon tetrafluoride after impurity removal; by opening the sealing cover 15 and twisting the knob 5 to disengage it from the locking rod 3, the cover plate 4 can be lifted, thereby exposing the top of the filter element 1, so that it is convenient to replace the molecular sieve inside it.

[0027] Specifically, three vertical plates 8 are arranged in an array around the axial direction between the upper ring 6 and the lower ring 7. The outer surfaces of the three vertical plates 8 are connected with scrapers 9 by bolts. One side of the scraper 9 is attached to the outer surface of the filter cartridge 1. The output shaft of the drive motor 16 is fixedly connected with a sleeve 22. The top of the rotating shaft 14 is fixedly connected with a shaft head 21. The shaft head 21 and the sleeve 22 can be clamped with each other. A plurality of positioning pulleys 11 are arranged on the inner wall of the separation tank 10 around the axial direction. The positioning pulleys 11 are in sliding contact with the lower ring 7.

[0028] By starting the driving motor 16, the shaft head 21 is driven to rotate, the shaft head 21 drives the shaft sleeve 22 to rotate, the shaft sleeve 22 drives the rotating shaft 14 to rotate, the rotating shaft 14 drives the transmission gear 13 to rotate, and the transmission gear 13 drives the ring gear 12 to rotate. Since a plurality of positioning pulleys 11 are provided to limit and guide the lower ring 7, the upper ring 6 can be driven to rotate under the drive of the ring gear 12, and the upper ring 6 drives the vertical plate 8, and the vertical plate 8 drives the scraper 9 to rotate so as to scrape off the impurities accumulated on the outer surface of the filter cartridge 1. The scraped ash will fall to the bottom end of the separation tank 10 and enter the discharge pipe 17. When the valve 18 is opened, the scraped impurities can be discharged. By connecting the bottom end of the valve 18 to a special collection box for collecting impurities, it is beneficial to restore the filtering effect of the filter cartridge 1 by scraping off the impurities adhered to the outer surface of the filter cartridge 1.

[0029] When in use, first, the prepared silicon tetrafluoride gas is transported to the interior of the separation tank 10 through the corrosion-resistant pump body and the gas phase inlet pipe 19. Under the action of the pumping pressure, the gas phase passes through the filter cartridge 1 and the molecular sieve therein. The filter cartridge 1 filters dust, and the molecular sieve absorbs impurities such as moisture and hydrogen fluoride. The silicon tetrafluoride after impurity removal is discharged from the silicon tetrafluoride outlet pipe 20 through the through hole at the top of the cover plate 4 and connected to the storage device for collection; when the molecular sieve needs to be replaced, open the sealing cover 15, turn the knob 5 to disengage it from the locking rod 3, pick up the cover plate 4, and make the top of the filter cartridge 1 Expose to replace the molecular sieve; if you want to clean the impurities on the outer surface of the filter cartridge 1, start the drive motor 16, its output shaft drives the sleeve 22 to rotate, the sleeve 22 drives the rotating shaft 14 and the transmission gear 13 to rotate, the transmission gear 13 drives the ring gear 12 to rotate, under the limiting guidance of the positioning pulley 11 on the lower ring 7, the upper ring 6 drives the vertical plate 8 and the scraper 9 to rotate, scrape off the impurities on the outer surface of the filter cartridge 1, the impurities fall to the bottom of the separation tank 10 and are discharged through the discharge pipe 17, open the valve 18 and connect the collection box to collect the impurities to restore the filtering effect of the filter cartridge 1.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-purity silicon tetrafluoride separation and purification device, comprising a filter cartridge (1) and a separation tank (10), characterized in that: It also includes a molecular sieve filled in the filter cartridge (1), a hollow tube (2) is fixedly connected to the center of the inner bottom surface of the filter cartridge (1), a locking rod (3) is inserted into the interior of the hollow tube (2), and a cover plate (4) is attached to the top of the hollow tube (2), a knob (5) is threadedly connected to the top of the locking rod (3), an upper sleeve ring (6) and a lower sleeve ring (7) are sleeved on the outer surface of the filter cartridge (1), a vertical plate (8) is fixedly connected between the upper sleeve ring (6) and the lower sleeve ring (7), a scraper (9) is installed on the outer surface of the vertical plate (8), and the separation A positioning pulley (11) is fixedly connected to the inner wall of the tank (10); a gear ring (12) is fixedly connected to the lower surface of the upper ring (6); the gear ring (12) is meshingly connected to a transmission gear (13); a rotating shaft (14) is fixedly connected to the center of the end surface of the transmission gear (13); a sealing cover (15) is installed on the top of the separation tank (10); a driving motor (16) is installed on the top surface of the sealing cover (15); a discharge pipe (17) is fixedly connected to the bottom of the separation tank (10); and a valve (18) is installed at the bottom of the discharge pipe (17).

2. A high-purity silicon tetrafluoride separation and purification equipment according to claim 1, characterized in that: A gas phase inlet pipe (19) is fixedly connected to a position near the bottom of the outer surface of the separation tank (10), and a conveying device is connected to the end of the gas phase inlet pipe (19) away from the separation tank (10).

3. A high-purity silicon tetrafluoride separation and purification equipment according to claim 1, characterized in that: A through hole is formed through the top surface of the cover plate (4), and a silicon tetrafluoride outlet pipe (20) is fixedly connected to the top surface of the sealing cover (15).

4. A high-purity silicon tetrafluoride separation and purification equipment according to claim 1, characterized in that: Three vertical plates (8) are arranged in an array around the axial direction between the upper collar (6) and the lower collar (7), and the outer surfaces of the three vertical plates (8) are connected with scrapers (9) by bolts, and one side of the scraper (9) is in contact with the outer surface of the filter cartridge (1).

5. A high-purity silicon tetrafluoride separation and purification equipment according to claim 1, characterized in that: The output shaft of the driving motor (16) is fixedly connected to a shaft head (21), the top end of the rotating shaft (14) is fixedly connected to a shaft sleeve (22), and the shaft head (21) and the shaft sleeve (22) can be mutually engaged.

6. A high-purity silicon tetrafluoride separation and purification equipment according to claim 1, characterized in that: A plurality of positioning pulleys (11) are arranged in an array around the axial direction of the inner wall of the separation tank (10), and the positioning pulleys (11) are in sliding contact with the lower sleeve ring (7).

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