High-precision sample holder and sample table for micro-area analysis

Abstract

The invention discloses a high-precision sample holder and sample stage for micro-area analysis, and belongs to the field of measurement and testing, the high-precision sample holder and sample stage for micro-area analysis comprises a displacement table base mounting flange, a corrugated pipe, a differential component mounting flange, a sample rod and a customized sample stage arranged at one end of the sample rod; the displacement table base mounting flange and the differential component are respectively arranged at two ends of the sample rod; the corrugated pipe is arranged between the displacement table base mounting flange and the differential component mounting flange; a temperature control module is arranged on one side, close to the displacement table base mounting flange, of the sample rod. According to the high-precision sample holder and the four-axis displacement table for micro-area analysis, a sample can be kept stable in the analysis process, and movement in the X direction, movement in the Y direction and movement in the Z direction and angle rotation can be achieved at the same time; meanwhile, the adjustable temperature control device can adjust the temperature of the sample, so that the sample is always in a constant-temperature state, and the precision and temperature requirements of the sample during micro-area analysis test can be ensured at the same time.

Description

Technical Field

[0001] The invention relates to the field of measurement and testing technology, in particular to a high-precision sample rack and a sample stage for micro-area analysis. Background Art

[0002] Conventional sample testing and high-precision micro-area analysis testing have very high requirements for the accuracy of the sample holder. However, due to the needs of the experiment and the improvement of actual demand, the accuracy of the current sample holder cannot meet the accuracy requirements of the micro-area analysis test. Summary of the invention

[0003] In order to solve the problem in the prior art that the accuracy of the current sample holder cannot meet the actual needs, the present invention provides a high-precision sample holder for micro-area analysis.

[0004] To realize the above technical scheme, the present invention provides a high-precision sample holder for micro-area analysis, comprising a translation stage base mounting flange, a bellows, a differential component mounting flange, a sample rod, and a customized sample stage arranged at one end of the sample rod; the translation stage base mounting flange is arranged at one end close to the customized sample stage, and a bellows and a differential component mounting flange are sequentially arranged upward from the translation stage base mounting flange, an XY translation stage base mounting position is reserved between the translation stage base mounting flange and the bellows, and a differential component mounting position is reserved between the bellows and the differential component mounting flange; the translation stage base mounting flange, the bellows, and the differential component mounting flange are assembled along the same axis, and the sample rod is arranged in the axial direction of each component.

[0005] Furthermore, a temperature control module is provided on the customized sample stage.

[0006] Furthermore, the working temperature of the sample holder is 100-1000K, and the diameter of the sample rod is 45mm.

[0007] Furthermore, a cooling pipe and a vacuum feedthrough connection are provided on the differential component mounting flange.

[0008] Furthermore, a high-precision sample stage for micro-area analysis includes a four-axis translation stage and a high-precision servo control chassis. The high-precision servo control chassis is arranged outside the four-axis translation stage and is connected to and controls the four-axis translation stage through lines.

[0009] Furthermore, the high-precision servo control chassis has a maximum power of 1000W and an operating voltage of 220V / AC±5% / 50Hz.

[0010] Furthermore, the tabletop of the translation stage is made of granite.

[0011] In summary, the present invention has the following beneficial effects compared with the prior art:

[0012] The high-precision sample holder for micro-area analysis provided by the present invention can keep the sample stable during the analysis process, and can simultaneously realize movement in the three directions of X, Y, and Z and rotation of the angle; at the same time, the adjustable temperature control device can adjust the temperature of the sample so that the sample is always in a constant temperature state, and can simultaneously ensure the accuracy and temperature requirements of the sample during micro-area analysis testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0014] Figure 1 A schematic diagram of the overall structure of a high-precision sample holder for micro-area analysis provided by the present invention;

[0015] Figure 2 Schematic diagram of the overall structure when the high-precision sample holder for micro-area analysis is installed on a four-axis translation stage.

[0016] The above drawings include the following reference numerals:

[0017] 1. Mounting flange of the translation stage base; 2. Bellows; 3. Mounting flange of the differential component; 31. Cooling tube; 32. Vacuum feedthrough wiring; 4. Sample rod; 5. Customized sample stage; 6. Temperature control module; 7. Four-axis translation stage. DETAILED DESCRIPTION

[0018] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0019] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form can also include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0020] See also Figure 1As shown, the present invention provides a high-precision sample holder for micro-area analysis, comprising a translation stage base mounting flange 1, a bellows 2, a differential component mounting flange 3, a sample rod 4, and a customized sample stage 5 arranged at one end of the sample rod 4; the translation stage base mounting flange 1 is arranged at one end close to the customized sample stage 5, and the bellows 2 and the differential component mounting flange 3 are arranged in sequence from the translation stage base mounting flange 1 upward, an XY translation stage base mounting position is reserved between the translation stage base mounting flange 1 and the bellows 2, and a differential component mounting position is reserved between the bellows 2 and the differential component mounting flange 3; the translation stage base mounting flange 1, the bellows 2, and the differential component mounting flange 3 are assembled along the same axis, and the sample rod 4 is arranged in the axial direction of each component.

[0021] The four-dimensional high-precision sample holder system mainly consists of three parts: a differential component that provides angle rotation, a bellows 2 for lifting in the Z direction, and a translation stage base that provides movement in the X and Y directions. After being fixed to the translation stage base mounting flange 1, it can simultaneously achieve movement in the X, Y, and Z directions and angle rotation.

[0022] In order to achieve the high-precision adjustment requirements of micron-level spectroscopy imaging scanning, the design of the high-precision sample holder adopts an additional clamping structure: the top of the sample rod 4 in the entire high-precision sample holder is installed on the DN100CF flange (differential component mounting flange 3), and the lower end is fixed to the upper flange of the XY translation stage (translation stage base mounting flange 1) through a PEEK clamping and stabilizing structure; this can ensure that the sample rod 4 inside the entire high-precision sample holder has two fixed clamping points, on the one hand, it can reduce the vibration of the sample rod 4 in the high-precision sample holder, and on the other hand, it can increase the mechanical strength and reduce the shaking of the sample rod 4 caused by the sample transfer mechanism when transferring samples. When designing the entire experimental station, in order to reduce the influence of external vibration during micro-area spectroscopy acquisition, the present invention uses a solid granite table as the support of the analysis chamber to reduce the interference of high-frequency vibration. When considering the influence of the vibration of the entire experimental station on the analysis chamber, the present invention uses a decoupling soft connection method for the analysis chamber and other sample transfer chambers, pretreatment chambers, fast sample injection chambers, etc. to reduce the transmission of vibration of other systems to the analysis chamber. The present invention adds a pneumatic plug valve between the molecular pump and the analysis chamber. When testing the micro-area spectroscopy experiment, the present invention further reduces the vibration effect by closing the pneumatic plug valve, molecular pump and front-stage pumping system. After considering all interference factors that may cause micro-area spectroscopy data collection, the designed high-precision sample holder can be guaranteed to work within the optimal accuracy range.

[0023] As a preferred embodiment, a temperature control module 6 is provided on the customized sample stage 5. The sample rack temperature control module 6 adopts a conventional K-type temperature control combined power supply, PID control, temperature control accuracy of ±0.1K, and is equipped with a 10m long cable; the temperature control software uses a PC to control heating / cooling, manual / automatic mode can be switched freely, PID, SP / OP Limits, UP / down Rate can be written / read, visual temperature curve can be displayed in real time, temperature data can be automatically collected and saved, and the current and voltage values ​​of the programmable power supply can be monitored and saved at the same time.

[0024] The sample holder and chamber mounting flanges are DN63CF and DN100CF respectively, with XY diameter of 102mm and R1 diameter of 66mm; the X / Y moving range is ±19mm, the moving accuracy is better than 1μm (with grating ruler), the Z moving range is 100mm, the moving accuracy is better than 1μm (with grating ruler), the R1 axial rotation range is ±175°; the rotation accuracy is 0.005° (with grating ruler).

[0025] As a preferred embodiment, the working temperature of the sample holder is 100-1000K (compatible with liquid nitrogen refrigeration), and the diameter of the sample rod 4 is 45 mm.

[0026] As a preferred embodiment, a cooling pipe 31 and a vacuum feedthrough connection 32 are provided on the differential component mounting flange 3 .

[0027] See also Figure 2 As shown, a high-precision sample stage for micro-area analysis is used to assemble the high-precision sample holder for micro-area analysis, which includes a four-axis displacement stage 7 and a high-precision servo control chassis. Seven electrode interfaces (two thermocouple interfaces, two heating wire interfaces, two bias interfaces and one independent interface) are reserved on the four-axis displacement stage 7. The high-precision servo control chassis and the electrode interfaces set on the four-axis displacement stage 7 are connected by lines to realize the control of the four-axis displacement stage 7. In addition, the four-axis displacement stage 7 is fitted with the sample holder by using a spring piece plus a small ball, and the middle of the four-axis displacement stage 7 is hollowed out to reserve the upgrade space for laser heating.

[0028] As a preferred embodiment, the customized four-axis translation stage 7 can realize four degrees of freedom of X, Y, Z, and R1, all of which are automatically controlled through servo motors and grating ruler feedback. The maximum power of the servo motor is 1000W, the working voltage is 220V / AC±5% / 50Hz, and the three-way positive and negative limit of X, Y, and Z can accurately control the moving position.

[0029] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A high-precision sample holder for micro-area analysis, characterized in that: The invention comprises a displacement stage base mounting flange (1), a bellows (2), a differential component mounting flange (3), a sample rod (4) and a customized sample stage (5) arranged at one end of the sample rod (4); the displacement stage base mounting flange (1) is arranged at one end close to the customized sample stage (5), and the bellows (2) and the differential component mounting flange (3) are arranged in sequence upward from the displacement stage base mounting flange (1); an XY displacement stage base mounting position is reserved between the displacement stage base mounting flange (1) and the bellows (2), and a differential component mounting position is reserved between the bellows (2) and the differential component mounting flange (3); the displacement stage base mounting flange (1), the bellows (2) and the differential component mounting flange (3) are assembled along the same axis, and the sample rod (4) is arranged in the axial direction of each component.

2. The high-precision sample holder for micro-area analysis according to claim 1, characterized in that: The customized sample stage (5) is provided with a temperature control module (6).

3. The high-precision sample holder for micro-area analysis according to claim 1, characterized in that: The working temperature of the sample holder is 100-1000K, and the diameter of the sample rod (4) is 45mm.

4. The high-precision sample holder for micro-area analysis according to claim 1, characterized in that: The differential component mounting flange (3) is provided with a cooling pipe (31) and a vacuum feedthrough connection (32).

5. A high-precision sample stage for micro-area analysis, which is used to assemble the high-precision sample holder for micro-area analysis according to any one of claims 1 to 4, characterized in that: It comprises a four-axis displacement platform (7) and a high-precision servo control chassis, wherein the high-precision servo control chassis is arranged outside the four-axis displacement platform (7) and is connected to and controls the four-axis displacement platform (7) through a line.

6. The high-precision sample stage for micro-area analysis according to claim 5, characterized in that: The high-precision servo control chassis has a maximum power of 1000W and an operating voltage of 220V / AC±5% / 50Hz.

7. The high-precision sample stage for micro-area analysis according to claim 5, characterized in that: The tabletop of the four-axis translation table (7) is made of granite.

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