Coating system and coating method

Abstract

The invention discloses a coating system and a coating method, the coating system comprises an air floater system, the air floater system forms an air film in a coating area, so that a substrate floats on the air film; the distance detection assembly is used for detecting the distance between the coating head and the substrate, and the air pressure detection assembly is used for detecting the air pressure value of each area of the air film; the first adjusting assembly is in driving connection with the coating head, so that the coating head reciprocates in the Z-axis direction; the second adjusting assembly is connected with the gas floater system and used for adjusting and controlling the gas pressure values of all the areas of the gas film. According to the coating system and the coating method, the first adjusting assembly and the second adjusting assembly form double adjusting assemblies which work cooperatively, and synchronous regulation and control of the height of the coating head and the pressure of the gas film are achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of perovskite coating equipment, and in particular to a coating system and a coating method. Background Art

[0002] In the field of perovskite solar cell manufacturing, the solution coating process directly determines the conversion efficiency and stability of the optoelectronic device.

[0003] Traditional coating equipment faces three major technical bottlenecks: first, mechanical contact conveying can easily cause damage to ultra-thin substrates (<100μm), with a breakage rate as high as 3%; second, the coating head height control accuracy is insufficient (±5μm), resulting in film thickness unevenness exceeding ±8%; third, the air flotation system has poor stability, causing coating stripe defects.

[0004] The current mainstream coating technologies mainly include slot die, blade coating and air floating coating. Among them, air floating coating technology can solve some technical problems of traditional coating equipment due to its non-contact characteristics, but it still has obvious defects: First, single-point laser detection is difficult to reflect the overall deformation of the substrate. When processing large-size substrates larger than 1.5m, the local height deviation can reach 200μm. Secondly, the air film pressure adopts open-loop control, and the response delay exceeds 50ms, which cannot compensate for substrate fluctuations in real time. Thirdly, traditional time domain analysis methods (such as standard deviation criterion) are insensitive to mechanical vibrations of 10-100Hz, resulting in a stability misjudgment rate of more than 15%.

[0005] In order to solve at least one of the above technical problems, the present application proposes a coating system and a coating method. Summary of the invention

[0006] The object of the present invention is to provide a coating system and a coating method, which realizes synchronous regulation of the coating head height and the air film pressure by forming a dual adjustment component that works in coordination with a first adjustment component and a second adjustment component.

[0007] The purpose of the present invention is achieved by the following technical solutions: In one aspect, the present invention provides a coating system comprising: An air flotation subsystem, wherein the air flotation subsystem forms an air film in the coating area so that the substrate floats on the air film; A distance detection component, wherein the distance detection component is used to detect the distance between the coating head and the substrate; An air pressure detection component, which is used to detect the air pressure value of each area of ​​the air film; A first adjustment component, wherein the first adjustment component drives the coating head to move back and forth along the Z-axis direction; The second adjustment component is connected to the air flotation subsystem and is used to adjust the air pressure value of each area of ​​the air film.

[0008] The beneficial effects of the above scheme are as follows: the present invention forms a uniform air film through the air flotation system to achieve contactless suspension of the substrate (gap 50-500μm), avoiding scratches and contamination of the substrate caused by traditional mechanical contact; the first adjustment component and the second adjustment component form a dual adjustment component that works in coordination to achieve synchronous regulation of the coating head height and the air film pressure.

[0009] Furthermore, the coating system also includes: A power subsystem, wherein the power subsystem drives the coating ineffective area connected to the substrate to move the substrate in the coating area along the coating direction; Wherein, the coating ineffective area is located at the periphery of the substrate.

[0010] The beneficial effects of the above scheme are: the power subsystem of the present invention acts on the ineffective coating area (substrate edge) to avoid affecting the film uniformity of the coating area; in addition, air flotation is used to suspend and stabilize the substrate, and the power subsystem is used to linearly transport the substrate, which can improve system reliability.

[0011] Further, the power subsystem includes: a plurality of groups of suction cup structures, each group of suction cup structures includes: a first suction cup and a second suction cup; When the substrate is moved, at least one of the first suction cups is adsorbed on the periphery of one side of the substrate, and at least one of the second suction cups is adsorbed on the periphery of the other side of the substrate.

[0012] The beneficial effect of the above solution is that the suction cup of the present invention only contacts the periphery of the substrate, thereby ensuring the driving force and minimizing contact contamination.

[0013] Further, the coating system comprises: The third adjustment component adjusts the adsorption height and / or adsorption duration of each suction cup according to the distance between the coating head and different areas of the substrate within a continuous preset time period.

[0014] The beneficial effects of the above scheme are as follows: the present invention adjusts the adsorption parameters according to the distance data through the third adjustment component to solve the over-constraint problem caused by the traditional fixed adsorption force; in addition, the vibration mode of the substrate during transportation can be suppressed by adjusting the adsorption sequence.

[0015] Furthermore, the air flotation subsystem includes: a plurality of groups of air paths, each group of air paths is provided with an air flow inlet, an air flow control valve and an air flow outlet in sequence, and each air flow outlet corresponds to an area of ​​the air film; wherein the air flow inlet is connected to a first outlet of a gas storage tank, and the gas storage tank is provided with an air pressure controller, and the air pressure controller controls the air pressure value of the air flow used to control the first outlet; Further, the distance detection component includes a plurality of distance sensors, and the plurality of distance sensors detect the distance between the coating head and different areas of the substrate; Furthermore, the air pressure detection component includes a plurality of air pressure sensors, and the plurality of air pressure sensors detect the air pressure values ​​of various areas of the air film; Further, the first adjustment assembly includes two groups of adjustment structures, one group of adjustment structures is arranged on one side of the gantry, and the other group of adjustment structures is arranged on the other side of the gantry, and the gantry is connected to the coating head; Furthermore, the second adjustment component is used to regulate the air pressure controller and / or the air flow control valve in the air circuit according to the distance between the coating head and different areas of the substrate and the air pressure value of each area of ​​the air film within a continuous preset time period.

[0016] The beneficial effects of the above scheme are: each air path of the present invention is independently controllable, so as to realize local precise regulation of the air film pressure; the present invention provides more comprehensive working condition monitoring data through distance + air pressure dual detection; the present invention ensures the stability of the coating head posture through bilateral synchronous drive, and avoids deflection caused by unilateral adjustment.

[0017] Furthermore, each group of the adjustment structures includes: A guide rail, wherein the guide rail is slidably connected to the gantry; A first motor is driven and connected to the gantry, and a Z-axis coordinate value of the gantry is adjusted according to the distance between the coating head and different areas of the substrate within a continuous preset time period.

[0018] The beneficial effects of the above scheme are as follows: the present invention achieves nanometer-level positioning accuracy of the coating head through the guide rail + first motor combination; in addition, the heights of both sides of the coating head can be adjusted separately according to the distance data of different areas of the substrate.

[0019] In a second aspect, the present invention provides a coating method, comprising: Obtain the distance between the coating head and different areas of the substrate within a continuous preset time period; determine whether the substrate is stable based on the distance between the coating head and different areas of the substrate within a continuous preset time period: In response to the substrate being unstable, adjusting the air flotation subsystem and / or the power subsystem of the coating system according to the distance between the coating head and different areas of the substrate within a continuous preset time period to stabilize the substrate; In response to the substrate being stable, the distance between the coating head and the substrate is adjusted according to the distance between the coating head and different areas of the substrate within a continuous preset time period, and a coating operation process is started.

[0020] The beneficial effect of the above scheme is that the present invention realizes the control of the coating equipment by forming a closed-loop control method of detection-determination-adjustment-verification.

[0021] Further, the determining whether the substrate is stable according to the distance between the coating head and different areas of the substrate within a continuous preset time period includes: calculating the standard deviation of the distance data of each first detection point; Performing fast Fourier transform on the distance data of each first detection point to extract vibration energy of a preset frequency band; The distance-time curve was fitted using the least squares method, and the slope of the distance-time curve was calculated; When the standard deviation, vibration energy, and slope satisfy the following equation, the substrate is stable, otherwise the substrate is unstable: α(σ / σ0)+β(E / E0)+γ(|k| / k0)≤1 Wherein, α, β, γ are weight coefficients, and α+β+γ=1; σ is the standard deviation; σ0 is the preset error threshold; E is the vibration energy; E0 is the preset energy threshold; k is the slope; k0 is the preset slope threshold.

[0022] The beneficial effect of the above scheme is that the present invention improves the reliability of substrate stability judgment by integrating time domain (standard deviation), frequency domain (vibration energy) and trend (slope) analysis.

[0023] Further, the air flotation subsystem of the coating system is adjusted, including: obtaining the air pressure value of each area of ​​the air film within a continuous preset time period; according to the distance between the coating head and different areas of the substrate and the air pressure value of each area of ​​the air film within the continuous preset time period, regulating the air pressure controller and / or air flow control valve in the air path of the air flotation subsystem; Furthermore, the power subsystem of the coating system is adjusted, including: adjusting the adsorption height and / or adsorption duration of the suction cup in the power subsystem according to the distance between the coating head and different areas of the substrate within a continuous preset time period.

[0024] The beneficial effect of the above solution is that the present invention stabilizes the substrate by adjusting the air flotation subsystem and the power subsystem of the coating system.

[0025] Further, adjusting the distance between the coating head and the substrate according to the distance between the coating head and different areas of the substrate within a continuous preset time period includes: Calculating an average value of the distance between the coating head and the substrate and an average value of the distance between the coating head and the different regions of the substrate according to the distance between the coating head and the different regions of the substrate within a continuous preset time period; The coating head is moved for the first time, with the average value of the distance between the coating head and the substrate as the first reference height, and one side of the coating head corresponding to different areas of the substrate moves the first displacement: First displacement = average value of distances between the coating head and different areas of the substrate - first reference height; The coating head is moved for the second time, with the preset spacing as the second reference height, and one side of the coating head corresponding to different areas of the substrate moves a second displacement: Second displacement=first reference height-second reference height.

[0026] The beneficial effect of the above scheme is that the present invention first eliminates the overall tilt of the substrate based on the average value of the coating head and the substrate, and then adjusts the distance between the coating head and the substrate for a second time based on the preset spacing, thereby improving the adjustment efficiency.

[0027] Compared with the prior art, the beneficial effects of the present invention include at least: The present invention forms a uniform air film through an air flotation system to achieve contactless suspension of the substrate (gap 50-500μm), avoiding scratches and contamination of the substrate caused by traditional mechanical contact; the first adjustment component and the second adjustment component form a double adjustment component that works in coordination to achieve synchronous regulation of the coating head height and the air film pressure. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of a coating system according to an embodiment of the present invention.

[0029] Figure 2 Schematic diagram of another structure of a coating system according to an embodiment of the present invention.

[0030] Figure 3 It is a schematic flow chart of a coating method according to an embodiment of the present invention.

[0031] Figure 4 It is the detection data of the first sensor of the embodiment of the present invention in one embodiment.

[0032] Figure 5 is detection data of the second sensor in one embodiment of the present invention.

[0033] Figure 6 is detection data of the third sensor in one embodiment of the present invention.

[0034] Figure 7 is detection data of the fourth sensor in one embodiment of the present invention.

[0035] In the figure: 1. air flotation system; 2. distance detection component; 3. first adjustment component; 4. air pressure detection component; 5. second adjustment component; 6. gantry; 7. coating head. DETAILED DESCRIPTION

[0036] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.

[0037] The words expressing positions and directions described in the present invention are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of the present invention.

[0038] The coating system of the present invention can be applied to a perovskite coating device, and the coating method of the present invention can be applied to control the coating system of the present invention.

[0039] When used, the perovskite coating device includes a coating head 7, a gantry 6 and a substrate. Figure 2 , the coating head 7 is installed on the gantry 6.

[0040] In actual application, the substrate is rectangular or square, including an effective coating area and an ineffective coating area. The effective coating area is located in the middle of the substrate and below the coating head 7; the ineffective coating area is located at the periphery of the substrate, that is, the edge of the substrate.

[0041] refer to Figure 1 and Figure 2 The coating system of the present invention comprises: an air flotation subsystem 1, a detection module and an adjustment module. Furthermore, the coating system of the present invention may also comprise: a power subsystem.

[0042] When used, the detection module includes a distance detection component 2 and an air pressure detection component 4; the adjustment module includes a first adjustment component 3 and a second adjustment component 5; further, the adjustment module may also include: a third adjustment component.

[0043] The air flotation subsystem 1 of the present invention forms an air film in the coating area, so that the substrate floats on the air film.

[0044] When used, the air flotation subsystem 1 includes: multiple groups of independently controllable air paths. Each group of air paths is provided with an air flow inlet, an air flow control valve, and an air flow outlet in sequence. Furthermore, the cross-section of the air film is rectangular or square, including multiple second measurement sub-areas, and the multiple second measurement sub-areas are arranged in a dot matrix. Each air flow outlet corresponds to a second measurement sub-area of ​​the air film, so as to realize zoned pressure regulation.

[0045] In actual application, the air flow inlet is connected to the first outlet of the gas storage tank, and the gas storage tank is provided with an air pressure controller, and the air pressure controller controls the air flow pressure value of the first outlet. Specifically, when the air flow pressure value of the first outlet is kept unchanged, the opening of the air flow control valve is adjusted to adjust the wind resistance in the air path, and then adjust the air pressure value of the air flow outlet. When the opening of the air flow control valve is kept unchanged, the air pressure value of the air flow at the first outlet is adjusted by the air pressure controller to adjust the air pressure value of the air flow inlet, and then adjust the air pressure value of the air flow outlet. The distance detection component 2 of the present invention is used to detect the distance between the coating head 7 and the substrate.

[0046] When used, the distance detection component 2 adopts an array laser displacement sensor layout to achieve multi-point synchronous detection of the distance between the coating head 7 and the substrate surface through distributed measurement. Specifically, the distance detection component 2 includes multiple distance sensors, and the multiple distance sensors detect the distance between the coating head 7 and different areas of the substrate.

[0047] In actual application, according to the process requirements of the substrate coating area, the coating effective area is divided into multiple first measurement sub-areas, and each sub-area is equipped with an independent distance sensor. The coating effective area is square or rectangular, and the multiple first measurement sub-areas are arranged in a dot matrix.

[0048] In a specific implementation, the substrate is divided into four first measurement sub-areas arranged in a dot matrix, and at least four distance sensors are provided, namely, a first sensor, a second sensor, a third sensor and a fourth sensor, each sensor detecting the distance from the coating head to a first measurement sub-area, referring to Figure 4-Figure 7 .

[0049] The air pressure detection component 4 of the present invention is used to detect the air pressure value of each area of ​​the air film.

[0050] When used, the air pressure detection component 4 includes multiple air pressure sensors, which detect the air pressure values ​​of each area of ​​the air film. Specifically, the air film is divided into multiple second measurement sub-areas arranged in a dot matrix, and each air pressure sensor corresponds to a second measurement sub-area of ​​the air film.

[0051] In actual application, the air pressure detection component 4 adopts a distributed air pressure sensor array, which is composed of multiple high-precision micro-pressure difference sensors, each sensor corresponding to a second measurement sub-area of ​​the air film. The first adjustment component 3 of the present invention drives the coating head 7 to reciprocate along the Z-axis direction.

[0052] When in use, the first adjustment component 3 includes two groups of adjustment structures, one group of adjustment structures is arranged on one side of the gantry 6 , and the other group of adjustment structures is arranged on the other side of the gantry 6 , and the gantry 6 is connected to the coating head 7 .

[0053] In practical application, each group of adjustment structures includes: a guide rail and a first motor. Preferably, the guide rail is a linear guide rail, and the first motor is a servo motor. Specifically, the guide rail is slidably connected to the gantry 6, and the first motor is driven to connect to the gantry 6, and the Z-axis coordinate value of the gantry 6 is adjusted according to the distance between the coating head 7 and different areas of the substrate.

[0054] In specific implementation, a bilaterally symmetrical first adjustment component 3 is used, including two sets of independent and synchronously controlled adjustment mechanisms. The two sets of adjustment mechanisms are respectively arranged on the left and right sides of the gantry 6 to eliminate the unbalanced load problem caused by unilateral force on the gantry 6 and the coating head 7 thereon.

[0055] The second adjustment component 5 of the present invention is connected to the air flotation subsystem 1 and is used to adjust the air pressure value of each area of ​​the air film.

[0056] When used, the second adjustment component 5 is used to adjust the air pressure controller and / or the air flow control valve in the air circuit according to the distance between the coating head 7 and different areas of the substrate and the air pressure value of each area of ​​the air film within a continuous preset time period.

[0057] In actual application, the second adjustment component 5 and the air flow control valves and air pressure controller of multiple air paths of the air flotation subsystem 1 form a cascade control system, integrating a two-stage actuator of the air pressure controller (main regulator) and the air flow control valve (fine-tuning unit).

[0058] In specific implementation, firstly perform a rough adjustment, and adjust the total pressure of the gas source through the gas pressure controller (for example: the adjustment range is 0.1-0.5MPa); then perform a fine adjustment, and perform regional fine adjustment through the PWM-driven air flow control valve (for example: the resolution is ±10Pa).

[0059] The power subsystem of the present invention drives the coating ineffective area of ​​the connection substrate.

[0060] When used, the power subsystem moves the substrate in the coating area along the coating direction. Preferably, the coating direction is the Y-axis direction, and the X-axis, Y-axis, and Z-axis are perpendicular to each other.

[0061] In actual application, the power subsystem is used for the interactive movement between adjacent substrates, that is, when the next substrate to be coated is loaded onto the machine, the previously coated substrate is unloaded from the machine.

[0062] The power subsystem of the present invention comprises: a plurality of groups of suction cup structures arranged along the coating direction. Each group of suction cup structures comprises: a first suction cup and a second suction cup.

[0063] When the substrate is moved, at least one first suction cup is adsorbed on the periphery of one side of the substrate, and at least one second suction cup is adsorbed on the periphery of the other side of the substrate.

[0064] In actual application, both the first suction cup and the second suction cup are vacuum suction cups. Specifically, the vacuum suction cup includes: a vacuum cavity, a sealing ring, and a vacuum channel. The sealing ring fills the connection of the vacuum cavity, the first end of the vacuum channel is connected to the entrance of the vacuum cavity, the second end of the vacuum channel is connected to the external vacuum pumping device, and the suction hole of the vacuum cavity is connected to the periphery of the substrate. In addition, a vacuum valve is provided on the vacuum channel.

[0065] In a specific implementation, the power subsystem includes a first circular track and a second circular track, wherein the first circular track is arranged on the first side of the substrate, and the second circular track is arranged on the second side of the substrate. In addition, one side of the first circular track is close to the first side of the substrate and parallel to the coating direction; one side of the second circular track is close to the second side of the substrate and parallel to the coating direction. Furthermore, a plurality of first suction cups are sequentially arranged on the first circular track, and a plurality of second suction cups are sequentially arranged on the second circular track. Preferably, a corresponding driving device is provided to drive the first suction cup to move clockwise or counterclockwise on the first circular track, and to drive the second suction cup to move clockwise or counterclockwise on the second circular track.

[0066] The third adjustment component of the present invention adjusts the adsorption height and / or adsorption duration of each suction cup according to the distance between the coating head 7 and different areas of the substrate within a continuous preset time period.

[0067] When used, the third adjustment component includes a second motor and a vacuum valve controller, wherein the second motor is a servo motor; and the vacuum valve controller controls the opening of the vacuum valve.

[0068] In actual application, the second motor drives the suction cup to move back and forth in the Z-axis direction.

[0069] refer to Figure 3 The coating method of the present invention comprises: step SS1 to step SS4.

[0070] Step SS1: Obtain the distance between the coating head 7 and different areas of the substrate within a continuous preset time period.

[0071] When applied, according to the process requirements of the substrate coating area, the effective coating area of ​​the substrate is divided into a plurality of first measurement sub-areas, namely, first detection points. In addition, a continuous preset time period includes a plurality of detection moments.

[0072] In specific implementation, the heights of both sides of the coating head can be adjusted to be the same before collecting data.

[0073] In actual application, within a continuous preset time period, at each detection moment, the distance detection component 2 is used to detect the distance between the coating head 7 and each first measurement sub-area.

[0074] Step SS2: Determine whether the substrate is stable according to the distance between the coating head 7 and different areas of the substrate within a continuous preset time period.

[0075] When used, whether the substrate is stable is determined according to the relationship between the distance between the coating head 7 at each first detection point and the corresponding first measurement sub-area and the threshold parameter.

[0076] In actual application, step SS2 includes steps SS21 to SS24.

[0077] Step SS21: Calculate the standard deviation of the distance data of each first detection point.

[0078] When applied, the standard deviation of the distance data of each first detection point is calculated according to the distance between the coating head 7 and each first measuring sub-area at each detection moment within a continuous preset time period.

[0079] Step SS22: Perform fast Fourier transform on the distance data of each first detection point to extract the vibration energy of a preset frequency band.

[0080] When applied, a fast Fourier transform is performed on the distance between the coating head 7 and each first measuring sub-area at each detection moment within a continuous preset time period to extract the vibration energy in the frequency band of 0.1-10 Hz.

[0081] In actual application, the preset frequency band is 0.1-10Hz.

[0082] Step SS23: Fit the distance-time curve using the least square method, and calculate the slope of the distance-time curve.

[0083] When applied, based on the least square method, a distance-time curve is fitted according to the distance between the coating head 7 and each first measuring sub-area at each detection moment within a continuous preset time period.

[0084] Step SS24: When the standard deviation, vibration energy and slope satisfy the following equation, the substrate is stable, otherwise the substrate is unstable: α(σ / σ0)+β(E / E0)+γ(|k| / k0)≤1; Wherein, α, β, γ are weight coefficients, and α+β+γ=1; σ is the standard deviation; σ0 is the preset error threshold; E is the vibration energy; E0 is the preset energy threshold; k is the slope; k0 is the preset slope threshold.

[0085] When applied, σ0, E0 and k0 can be adjusted according to the substrate material, size and coating process parameters. Preferably, k0 is positively correlated with the coating speed.

[0086] In actual application, when α(σ / σ0)+β(E / E0)+γ(|k| / k0)>1, the substrate is unstable and an alarm signal is issued; when α(σ / σ0)+β(E / E0)+γ(|k| / k0)≤0.8, the substrate is stable; when 0.8<α(σ / σ0)+β(E / E0)+γ(|k| / k0)≤1, the substrate is stable and an early warning signal is issued to warn that the parameters are on the edge of the critical value and need to be inspected or optimized.

[0087] Step SS3: In response to the substrate being unstable, the air flotation subsystem 1 and / or the power subsystem of the coating system is adjusted according to the distance between the coating head 7 and different regions of the substrate within a continuous preset time period to stabilize the substrate.

[0088] When applied, the continuous preset time period includes at least a first time period and a second time period. Among them, the first time period includes the time period of the interactive replacement of substrates by the suction cup structure of the power subsystem, and the second time period does not include the time period of the interactive replacement of substrates by the suction cup structure of the power subsystem. In other words, the first time period includes the suction cup interaction period and the air flotation period; the second time period only includes the air flotation period. Both the first time period and the second time period include multiple detection moments. In addition, the interactive replacement of substrates by the suction cup structure is the interactive movement between adjacent substrates, for example: putting the next substrate to be coated on the machine and taking the previous coated substrate off the machine.

[0089] In actual application, in response to X>Y and Y<Z, only the power subsystem of the coating system is adjusted; in response to X>Y and Y≥Z, the air flotation subsystem 1 and the power subsystem of the coating system are adjusted; otherwise, only the air flotation subsystem 1 of the coating system is adjusted.

[0090] Wherein, X is the maximum value of the distance between the coating head 7 and the substrate in the first time period; Y is the standard deviation of the distance between the coating head 7 and the substrate in the second time period; and Z is a preset standard deviation threshold.

[0091] In some embodiments, adjusting the air flotation subsystem 1 of the coating system includes: step SS311 - step SS312.

[0092] Step SS311: Obtain the air pressure value of each area of ​​the air film within a continuous preset time period.

[0093] When used, the air film includes a plurality of second measurement sub-areas arranged in a dot matrix, namely, second detection points. In addition, the second measurement sub-areas correspond to the first detection sub-areas one by one.

[0094] In actual application, the air pressure detection component 4 is used to detect the air pressure value of each second measurement sub-area within a continuous preset time period.

[0095] Step SS312: regulating the air pressure controller and / or air flow control valve in the air path of the air flotation subsystem 1 according to the distance between the coating head 7 and different areas of the substrate and the air pressure value of each area of ​​the air film within a continuous preset time period.

[0096] When applied, step SS312 includes: step SS3121-step SS3123.

[0097] Step SS3121: Establish an air film pressure distribution matrix P(x, y, t) according to the air pressure value of each second detection point, establish a distance distribution matrix H(x, y, t) according to the distance between the coating head 7 and the substrate at each first detection point, and establish a reference distribution matrix H0(x, y, t) according to the average value of the distance between the coating head 7 and the substrate at each first detection point. Wherein, x and y are the plane coordinates of the substrate, and t is the detection time.

[0098] Step SS3122: Calculate the pressure-distance coupling coefficient matrix C(x,y,t) using the air film pressure distribution matrix P(x,y,t) and the distance distribution matrix H(x,y,t).

[0099] When applied, C(x,y,t)=cov(P(x,y,t),H(x,y,t)) / var(P(x,y,t)), where cov() is the covariance and var() is the variance term.

[0100] Step SS3123: Use the PID control algorithm to adjust the air pressure controller and air flow control valve of each air path in real time, so that the pressure adjustment amount ΔP(x,y,t)=-Kp·C(x,y,t)·ΔH(x,y,t), for example: the corresponding air flow control valve adjusts ΔP. ​​Among them, Kp is the proportional coefficient, and ΔH(x,y,t) is the deviation.

[0101] When applied, ΔH(x,y,t) = H (x,y,t) – H0 (x,y,t).

[0102] In some embodiments, adjusting the power subsystem of the coating system includes: step SS321.

[0103] Step SS321: adjusting the adsorption height and / or adsorption duration of the suction cup in the power subsystem according to the distance between the coating head 7 and different areas of the substrate within a continuous preset time period.

[0104] When applied, step SS321 includes steps SS3211 to SS3213.

[0105] Step SS3211: Calculate the adsorption height adjustment amount Δh according to the difference Δd between the average value of the distance between the coating head 7 and different regions of the substrate and the average value of the distance between the coating head 7 and the substrate, and the material stiffness coefficient K.

[0106] When applied, Δh = K·Δd.

[0107] Step SS3212: Adjust the suction time Δt of the suction cup according to the speed v of the substrate moving along the coating direction.

[0108] When applied, Δt = + k·v( is the benchmark duration, and k is the process coefficient).

[0109] Step SS3213: Add a compensating tension ΔF to the flexible substrate according to the elastic modulus e and thickness a of the substrate.

[0110] When applied, ΔF = e·a·Δε, where Δε is the strain change.

[0111] In some embodiments, when the power subsystem and the flotation subsystem 1 of the coating system are adjusted simultaneously, the following further includes: step SS331.

[0112] Step SS331: Establish an air-floating-dynamic coupling control model to obtain the optimal values ​​of the adsorption height adjustment amount Δh, the pressure adjustment amount ΔP, the adsorption time Δt of the suction cup, and the compensation tension ΔF added to the flexible substrate.

[0113] When applied, the air-float-dynamic coupling control model includes the following formula: min∫(w1|Δh|²+w2|ΔP|²+w3|Δt|²+w4|ΔF |²)dt; Among them, w1, w2, w3 and w4 are weight coefficients, and multi-parameter collaborative optimization is achieved through model predictive control (MPC).

[0114] Step SS4: In response to the substrate being stable, the distance between the coating head 7 and the substrate is adjusted according to the distance between the coating head 7 and different areas of the substrate within a continuous preset time period, and the coating operation process is started.

[0115] When applied, step SS4 includes: step SS41-step SS43.

[0116] Step SS41: Calculate the average value of the distance between the coating head 7 and the substrate and the average value of the distance between the coating head 7 and the different regions of the substrate according to the distance between the coating head 7 and the different regions of the substrate in a continuous preset time period.

[0117] Step SS42: moving the coating head 7 for the first time, taking the average value of the distance between the coating head 7 and the substrate as the first reference height, and moving one side of the coating head 7 corresponding to different areas of the substrate by a first displacement.

[0118] When applied, the first displacement = the average value of the distance between the coating head 7 and different areas of the substrate - the first reference height.

[0119] In actual application, the tilt between the coating head and the substrate is initially eliminated.

[0120] Step SS43: moving the coating head 7 for the second time, with the preset spacing as the second reference height, and one side of the coating head 7 corresponding to different areas of the substrate moves a second displacement.

[0121] When applied, the second displacement = the first reference height - the second reference height.

[0122] In actual application, match the process spacing and further adjust the coating gap.

[0123] In summary, the coating system and coating method of the present invention realize the substrate stability judgment, dynamic adjustment and precise control of the coating gap during the coating process through a multi-modal collaborative control system. A three-level stability judgment model is realized by integrating time domain (standard deviation), frequency domain (vibration energy) and trend (slope) analysis to reduce the misjudgment rate (for example, <0.1%). First, globally adjust the stability of the substrate to eliminate the tilt of the substrate, and then adjust the distance between the coating head and the substrate in two steps to significantly improve the leveling efficiency (for example, by 50%). By collaboratively controlling the stability of the substrate through air flotation and power, the vibration amplitude of the substrate can be significantly reduced (for example, by 70%).

[0124] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, substitute and modify the above embodiments within the scope of the invention without departing from the principles and purpose of the present invention. All such changes should fall within the scope of protection of the claims of the present invention.

Claims

1. A coating system, characterized in that: include: An air flotation subsystem (1), wherein the air flotation subsystem (1) forms an air film in the coating area so that the substrate floats on the air film; A distance detection component (2), the distance detection component (2) being used to detect the distance between the coating head (7) and the substrate; An air pressure detection component (4), the air pressure detection component (4) being used to detect the air pressure value of each area of ​​the air film; A first adjustment component (3), the first adjustment component (3) driving the coating head (7) to make the coating head (7) reciprocate along the Z-axis direction; A second adjustment component (5), the second adjustment component (5) is connected to the air flotation subsystem (1) and is used to adjust the air pressure value of each area of ​​the air film.

2. The coating system according to claim 1, characterized in that: The coating system also includes: A power subsystem, wherein the power subsystem drives the coating ineffective area connected to the substrate to move the substrate in the coating area along the coating direction; Wherein, the coating ineffective area is located at the periphery of the substrate.

3. The coating system according to claim 2, characterized in that: The power subsystem comprises: a plurality of groups of suction cup structures, each group of suction cup structures comprises: a first suction cup and a second suction cup; When the substrate is moved, at least one of the first suction cups is adsorbed on the periphery of one side of the substrate, and at least one of the second suction cups is adsorbed on the periphery of the other side of the substrate.

4. The coating system according to claim 3, characterized in that: The coating system comprises: A third adjustment component, wherein the third adjustment component adjusts the adsorption height and / or adsorption duration of each suction cup according to the distance between the coating head (7) and different areas of the substrate within a continuous preset time period.

5. The coating system according to claim 1, characterized in that: The air flotation subsystem (1) comprises: a plurality of groups of air paths, each group of air paths being provided with an air flow inlet, an air flow control valve and an air flow outlet in sequence, each air flow outlet corresponding to an area of ​​the air film; wherein the air flow inlet is connected to a first outlet of a gas storage tank, the gas storage tank being provided with an air pressure controller, the air pressure controller controlling the air flow pressure value of the first outlet; And / or, the distance detection component (2) comprises a plurality of distance sensors, and the plurality of distance sensors detect the distance between the coating head (7) and different areas of the substrate; And / or, the air pressure detection component (4) comprises a plurality of air pressure sensors, and the plurality of air pressure sensors detect the air pressure values ​​of various areas of the air film; And / or, the first adjustment assembly (3) comprises two groups of adjustment structures, one group of adjustment structures is arranged on one side of the gantry (6), and the other group of adjustment structures is arranged on the other side of the gantry (6), and the gantry (6) is connected to the coating head (7); And / or, the second adjustment component (5) is used to regulate the air pressure controller and / or the air flow control valve in the air circuit according to the distance between the coating head (7) and different areas of the substrate and the air pressure value of each area of ​​the air film within a continuous preset time period.

6. The coating system according to claim 5, characterized in that: Each set of the adjustment structures includes: A guide rail, the guide rail being slidably connected to the gantry (6); A first motor, the first motor drivingly connected to the gantry (6), adjusts the Z-axis coordinate value of the gantry (6) according to the distance between the coating head (7) and different areas of the substrate within a continuous preset time period.

7. A coating method, characterized in that: include: Obtaining the distance between the coating head (7) and different areas of the substrate within a continuous preset time period; Determine whether the substrate is stable based on the distance between the coating head (7) and different areas of the substrate during a continuous preset time period: In response to the instability of the substrate, adjusting the air flotation subsystem (1) and / or the power subsystem of the coating system according to the distance between the coating head (7) and different areas of the substrate within a continuous preset time period to stabilize the substrate; In response to the substrate being stable, the distance between the coating head (7) and the substrate is adjusted according to the distance between the coating head (7) and different areas of the substrate within a continuous preset time period, and a coating operation process is started.

8. The coating method according to claim 7, characterized in that: The method of determining whether the substrate is stable according to the distance between the coating head (7) and different regions of the substrate within a continuous preset time period includes: Calculate the standard deviation of the distance data of each first detection point; Performing fast Fourier transform on the distance data of each first detection point to extract vibration energy of a preset frequency band; The distance-time curve was fitted using the least squares method, and the slope of the distance-time curve was calculated; When the standard deviation, vibration energy, and slope satisfy the following equation, the substrate is stable, otherwise the substrate is unstable: α(σ / σ0)+β(E / E0)+γ(|k| / k0)≤1 Wherein, α, β, γ are weight coefficients, and α+β+γ=1; σ is the standard deviation; σ0 is the preset error threshold; E is the vibration energy; E0 is the preset energy threshold; k is the slope; k0 is the preset slope threshold.

9. The coating method according to claim 7, characterized in that: The air flotation subsystem (1) for adjusting the coating system comprises: obtaining the air pressure value of each area of ​​the air film within a continuous preset time period; and regulating the air pressure controller and / or air flow control valve in the air path of the air flotation subsystem (1) according to the distance between the coating head (7) and different areas of the substrate and the air pressure value of each area of ​​the air film within the continuous preset time period; And / or, the power subsystem of the coating system is adjusted, comprising: adjusting the adsorption height and / or adsorption duration of the suction cup in the power subsystem according to the distance between the coating head (7) and different areas of the substrate within a continuous preset time period.

10. The coating method according to claim 7, characterized in that: The step of adjusting the distance between the coating head (7) and the substrate according to the distance between the coating head (7) and different areas of the substrate within a continuous preset time period comprises: Calculating an average value of the distance between the coating head (7) and the substrate and an average value of the distance between the coating head (7) and the different regions of the substrate according to the distance between the coating head (7) and the different regions of the substrate within a continuous preset time period; The coating head (7) is moved for the first time, with the average value of the distance between the coating head (7) and the substrate being used as the first reference height, and one side of the coating head (7) corresponding to different regions of the substrate is moved by a first displacement: First displacement=average value of distances between the coating head (7) and different regions of the substrate-first reference height; The coating head (7) is moved for the second time, with the preset spacing as the second reference height, and one side of the coating head (7) corresponding to different areas of the substrate is moved by a second displacement: Second displacement=first reference height-second reference height.

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