Cooling disc cleaning method

Abstract

The invention discloses a cooling disc cleaning method. The cooling disc cleaning method specifically comprises the following steps that S1, a gas outlet pipeline of a pulse gas generator communicates with an end face through hole; s2, pulse parameters in a pulse gas generator are set, the circulation period of the pulse parameters is set to be 1 minute, each circulation period comprises a first gas inflation period and a second gas inflation period, the duration of the first gas inflation period is 5-20 seconds, the first gas pressure of gas inflated in the first gas inflation period is 0.2-0.3 Mpa, the duration of the second gas inflation period is 40-55 seconds, and the second gas inflation period is 40-55 seconds; the second gas pressure of the gas filled in the second gas filling period is 0.8 Mpa to 1.0 Mpa; s3, a gas outlet switch of the pulse gas generator is turned on, and low-pressure pulse gas is input into the cooling disc according to the pulse parameters; and S4, after the ventilation duration of the low-pressure pulse gas reaches the preset time, ventilation is ended. By means of the cleaning method, impurities in the runners are effectively cleaned, and meanwhile damage to the runners in the cooling disc can be avoided.

Description

Technical Field

[0001] The invention relates to the technical field of etching processing, and in particular to a cooling disk cleaning method. Background Art

[0002] The cooling plate is an important cooling component in the etcher. It can help control the temperature during the etching process, ensuring the etching quality and the service life of the equipment. The cooling plate is equipped with multi-layer flow channels. During the etching process, a lot of metal chips will fall into the flow channels. When there are too many particles in the flow channels, it will affect the use of the cooling plate. Usually, the standard for judging whether the particle detection of the cooling plate meets the standard in this field is: particles smaller than 0.1um <100,000 particles / square centimeter is up to standard.

[0003] In the prior art, there are two common cooling plate cleaning methods. One is to use high-pressure water flow or high-pressure air flow to continuously clean the internal flow channel of the cooling plate. However, the high-pressure water flow or high-pressure air flow can easily scratch the surface of the cooling plate due to excessive pressure during the cleaning process, thereby affecting the use of the cooling plate. The other method is to use an air gun to purge the internal flow channel of the cooling plate. However, the air pressure will weaken after the gas enters the flow channel, and the air pressure output by the air gun cannot be changed within the same time period, resulting in the airflow being unable to form turbulence in the flow channel, and thus unable to effectively purge the metal chips in the flow channel.

[0004] Therefore, there is an urgent need for a method that can effectively clean the internal flow channel of the cooling disk without causing damage to the cooling disk. Summary of the invention

[0005] The object of the present invention is to provide a cooling disk cleaning method, which can not only effectively clean the internal flow channel of the cooling disk, but also will not cause damage to the cooling disk during the cleaning process.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A cooling disk cleaning method is used to clean a cooling disk, wherein the cooling disk is provided with internal flow channels and end surface through holes that are interconnected, and the cooling disk cleaning method specifically comprises the following steps:

[0008] S1, connecting the gas outlet pipe of the pulse gas generator to the end surface through hole;

[0009] S2. Setting the pulse parameters in the pulse gas generator, wherein the cycle of the pulse parameters is set to 1 minute, wherein each cycle includes a first inflation period and a second inflation period, wherein the first inflation period is 5 seconds to 20 seconds long, wherein the first gas pressure of the gas filled in the first inflation period is 0.2 MPa to 0.3 MPa, wherein the second inflation period is 40 seconds to 55 seconds long, wherein the second gas pressure of the gas filled in the second inflation period is 0.8 MPa to 1.0 MPa;

[0010] S3, turning on the gas outlet switch of the pulse gas generator, and inputting low-pressure pulse gas into the cooling disk according to the pulse parameters;

[0011] S4. When the ventilation duration of the low-pressure pulse gas reaches the preset time, the ventilation is terminated.

[0012] Optionally, in step S2, the pulse parameters are set to input gas with a pressure of 0.3 MPa for 20 seconds within 1 minute, and input gas with a pressure of 1.0 MPa for the remaining 40 seconds.

[0013] Optionally, in step S4, the preset time is 10 hours to 12 hours.

[0014] Optionally, step S1 specifically includes the following steps:

[0015] S11, installing an auxiliary tooling between the pulse gas generator and the cooling plate, the auxiliary tooling comprising a connecting body, and a vent hole is opened on the connecting body;

[0016] S12, connecting the vent hole to the gas outlet pipe of the pulse gas generator.

[0017] Optionally, the connecting body is provided with a receiving groove communicating with the vent hole;

[0018] In step S11 , installing the auxiliary tooling between the pulse gas generator and the cooling plate specifically includes: placing the cooling plate in the containing tank, and placing the pulse gas generator outside the auxiliary tooling.

[0019] Optionally, after the cooling plate is disposed in the receiving groove, the method further includes the following step: sealing a gap between the cooling plate and the connecting body by using a first sealing structure.

[0020] Optionally, a limiting hole is further provided on the connecting body, and the following step is further included before step S12: a limiting body is inserted into the limiting hole and the end surface through hole.

[0021] Optionally, at least two limiting holes are formed on the connecting body, and the limiting body is inserted into each limiting hole.

[0022] Optionally, after the limiting bodies are inserted into the limiting holes and the end surface through holes, the following step is further included: using a second sealing structure to seal the gap between the inner wall surface formed on the connecting body on the circumferential outer side of the limiting holes and the cooling plate.

[0023] Optionally, a handle is also provided on the connecting body.

[0024] Beneficial effects of the present invention:

[0025] The present invention provides a cooling disk cleaning method, in which a pulse gas generator can input low-pressure pulse gas into the internal flow channel of the cooling disk according to pulse parameters, so as to clean the internal flow channel, wherein the pulse parameter is a cycle period set to 1 minute, each cycle period includes a first inflation period and a second inflation period, the first inflation period lasts for 5 seconds to 20 seconds, the first gas pressure of the gas filled in the first inflation period is 0.2Mpa to 0.3Mpa, the second inflation period lasts for 40 seconds to 55 seconds, and the second gas pressure of the gas filled in the second inflation period is 0.8Mpa to 1.0Mpa. By using low-pressure pulse gas to clean the cooling disk, damage to the cooling disk caused by inputting high-pressure gas is avoided, and the low-pressure pulse gas can form turbulence in the internal flow channel of the cooling disk, thereby effectively cleaning impurities in the flow channel. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a flow chart of a cooling plate cleaning method provided by an embodiment of the present invention;

[0027] Figure 2 is a schematic structural diagram of an auxiliary tooling provided by an embodiment of the present invention;

[0028] Figure 3 is a side view of the auxiliary tooling provided by an embodiment of the present invention;

[0029] Figure 4 is a top view of the auxiliary tooling provided by an embodiment of the present invention;

[0030] Figure 5 yes Figure 3 Sectional view at AA in the middle;

[0031] Figure 6 yes Figure 4 Cross-sectional view at the middle BB.

[0032] In the figure:

[0033] 1. Auxiliary tooling; 11. Connecting body; 111. Accommodating groove; 112. Ventilation hole; 113. Limiting hole; 12. First sealing structure; 13. Limiting body; 14. Second sealing structure; 15. Handle. DETAILED DESCRIPTION

[0034] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0035] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0037] In the description of this embodiment, the terms "upper", "lower", "right", etc., directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0038] The present invention provides a cooling plate cleaning method for cleaning a cooling plate, wherein the cooling plate is provided with internal flow channels and end surface through holes interconnected with each other, such as Figure 1 As shown, the cleaning method specifically comprises the following steps:

[0039] S1. Connect the gas outlet pipe of the pulse gas generator to the end surface through hole;

[0040] S2. Set the pulse parameters in the pulse gas generator. The cycle of the pulse parameters is set to 1 minute. Each cycle includes a first inflation period and a second inflation period. The duration of the first inflation period is 5 seconds to 20 seconds. The first air pressure of the gas filled in the first inflation period is 0.2 MPa to 0.3 MPa. The duration of the second inflation period is 40 seconds to 55 seconds. The second air pressure of the gas filled in the second inflation period is 0.8 MPa to 1.0 MPa.

[0041] S3, turn on the gas outlet switch of the pulse gas generator, and input pulse gas into the cooling plate according to the pulse parameters;

[0042] S4. When the ventilation duration reaches the preset time, end the ventilation.

[0043] The present invention provides a cooling disk cleaning method, which avoids damage to the cooling disk caused by the input of high-pressure gas by inputting low-pressure pulse gas into the internal flow channel of the cooling disk. At the same time, the low-pressure pulse gas can form turbulence in the internal flow channel of the cooling disk, thereby effectively cleaning impurities inside the flow channel.

[0044] In some embodiments, the duration of the first inflation period can be 5 seconds, 6 seconds, 7 seconds, 8 seconds, 9 seconds, 10 seconds, 11 seconds, 12 seconds, 13 seconds, 14 seconds, 15 seconds, 16 seconds, 17 seconds, 18 seconds, 19 seconds or 20 seconds. Of course, the duration of the first inflation period can also be other non-integer seconds between 5 seconds and 20 seconds.

[0045] In some embodiments, the first air pressure of the gas filled in the first inflation period may be 0.2 MPa or 0.3 MPa. Of course, the first air pressure may also be other non-integer air pressures within the range of 0.2 MPa to 0.3 MPa.

[0046] In some embodiments, the duration of the second inflation period can be 40 seconds, 41 seconds, 42 seconds, 43 seconds, 44 seconds, 45 seconds, 46 seconds, 47 seconds, 48 ​​seconds, 49 seconds, 50 seconds, 51 seconds, 52 seconds, 53 seconds, 54 seconds or 55 seconds. Of course, the duration of the second inflation period can also be other non-integer seconds between 40 seconds and 55 seconds.

[0047] In some embodiments, the second air pressure of the gas filled in the second filling period may be 0.8 MPa, 0.9 MPa or 1.0 MPa. Of course, the second air pressure may also be other non-integer air pressures within the range of 0.8 MPa to 1.0 MPa.

[0048] Preferably, in step S2, the pulse parameters are set to input gas at a pressure of 0.3Mpa for 20 seconds within 1 minute, and input gas at a pressure of 1.0Mpa for the remaining 40 seconds. By using the low-pressure pulse gas with this pulse parameter to clean the cooling disk, the turbulent cleaning effect formed in the internal flow channel of the cooling disk is the best, and the internal flow channel of the cooling disk will not be damaged.

[0049] Furthermore, in step S4, the preset time is 10 hours to 12 hours. When using low-pressure pulse gas to clean the cooling disk, a longer cleaning time is required. The cleaning time must be at least 10 hours to achieve the expected cleaning effect. However, when the cleaning time exceeds 12 hours, the change in the particle detection in the cooling disk is not obvious, so there is no need to clean for a longer time.

[0050] In some embodiments, the duration of the preset time can be 10 hours, 11 hours or 12 hours. Of course, the duration of the preset time can also be other non-integer hours between 10 hours and 12 hours.

[0051] When verifying the cleaning effect of the cooling plate cleaning method on the cooling plate, if the particle detection of the cooling plate after cleaning can meet the requirement that particles smaller than 0.1um are less than 100,000 particles / square centimeter, and there are no obvious scratches on the surface of the cooling plate, then the cleaning requirements are met.

[0052] Embodiment 1:

[0053] This embodiment provides a cooling plate cleaning method, comprising the following steps:

[0054] S1. Connect the gas outlet pipe of the pulse gas generator to the end surface through hole;

[0055] S2. Set the pulse parameters in the pulse gas generator. The cycle of the pulse parameters is set to 1 minute. Each cycle includes a first inflation period and a second inflation period. The duration of the first inflation period is 5 seconds. The first gas pressure of the gas filled in the first inflation period is 0.2 MPa. The duration of the second inflation period is 55 seconds. The second gas pressure of the gas filled in the second inflation period is 0.8 MPa.

[0056] S3, turn on the gas outlet switch of the pulse gas generator, and input pulse gas into the cooling plate according to the pulse parameters;

[0057] S4. When the ventilation duration reaches the preset time, end the ventilation.

[0058] Embodiment 2:

[0059] This embodiment provides a cooling plate cleaning method. The cooling plate cleaning method in this embodiment is different from the cleaning method in Embodiment 1 only in that: in step S2, the first gas pressure of the gas filled in the first inflation period is 0.3Mpa, and the second gas pressure of the gas filled in the second inflation period is 1.0Mpa.

[0060] Embodiment 3:

[0061] The present embodiment provides a cooling plate cleaning method. The cooling plate cleaning method in the present embodiment differs from the cleaning method in Embodiment 1 only in that: in step S2, the duration of the first inflation period is 10 seconds, and the first air pressure of the gas filled in the first inflation period is 0.2 MPa. The duration of the second inflation period is 50 seconds, and the second air pressure of the gas filled in the second inflation period is 0.9 MPa.

[0062] Embodiment 4:

[0063] The present embodiment provides a cooling plate cleaning method. The cooling plate cleaning method in the present embodiment differs from the cleaning method in Embodiment 1 only in that: in step S2, the duration of the first inflation period is 15 seconds, and the first air pressure of the gas filled in the first inflation period is 0.3 MPa. The duration of the second inflation period is 45 seconds, and the second air pressure of the gas filled in the second inflation period is 0.9 MPa.

[0064] Embodiment 5:

[0065] The present embodiment provides a cooling plate cleaning method. The cooling plate cleaning method in the present embodiment differs from the cleaning method in Embodiment 1 only in that: in step S2, the duration of the first inflation period is 20 seconds, and the first air pressure of the gas filled in the first inflation period is 0.2 MPa. The duration of the second inflation period is 40 seconds, and the second air pressure of the gas filled in the second inflation period is 0.8 MPa.

[0066] Embodiment 6:

[0067] The present embodiment provides a cooling plate cleaning method. The cooling plate cleaning method in the present embodiment differs from the cleaning method in Embodiment 1 only in that: in step S2, the duration of the first inflation period is 20 seconds, and the first air pressure of the gas filled in the first inflation period is 0.3 MPa. The duration of the second inflation period is 40 seconds, and the second air pressure of the gas filled in the second inflation period is 1.0 MPa.

[0068] Comparative Example 1:

[0069] This comparative example provides a cooling plate cleaning method. The cooling plate cleaning method in this comparative example differs from the cleaning method in Example 1 only in that: in step S2, the first gas pressure of the gas filled in the first inflation period is 0.3Mpa, and the second gas pressure of the gas filled in the second inflation period is 1.1Mpa.

[0070] Comparative Example 2:

[0071] This comparative example provides a cooling plate cleaning method. The cooling plate cleaning method in this comparative example differs from the cleaning method in Example 1 only in that in step S2, the second gas pressure of the gas filled in the second filling period is 0.7 MPa.

[0072] Comparative Example 3:

[0073] This comparative example provides a cooling plate cleaning method. The cooling plate cleaning method in this comparative example differs from the cleaning method in Example 1 only in that: in step S2, the duration of the first inflation period is 20 seconds, and the first air pressure of the gas filled in the first inflation period is 0.3 MPa. The duration of the second inflation period is 40 seconds, and the second air pressure of the gas filled in the second inflation period is 1.1 MPa.

[0074] Comparative Example 4:

[0075] This comparative example provides a cooling plate cleaning method. The cooling plate cleaning method in this comparative example differs from the cleaning method in Example 1 only in that: in step S2, the duration of the first inflation period is 20 seconds, and the first air pressure of the gas filled in the first inflation period is 0.2 MPa. The duration of the second inflation period is 40 seconds, and the second air pressure of the gas filled in the second inflation period is 0.7 MPa.

[0076] After the cooling disks of Examples 1-6 and Comparative Examples 1-4 were cleaned, the internal flow channels of the cooling disks were tested for particles. The results are shown in Table 1.

[0077] Table 1:

[0078]

[0079] Examples 1-6 adopt the cleaning method provided by the present invention, and by further controlling the parameters in the cleaning process, the particle detection of the cooling disk after cleaning can meet the standard, and it can be concluded from the particle detection results that the turbulent cleaning effect formed by the pulse gas in Example 6 is the best. In Comparative Examples 1 and 3, the second gas pressure was increased and set to 1.1Mpa. Although a good cleaning effect was also achieved, the excessive gas pressure caused scratches on the surface of the cooling disk. Comparative Examples 2 and 4 reduced the second gas pressure and set it to 0.7Mpa. Due to the low gas pressure, the cleaning effect was poor, and the final particle detection result did not meet the standard.

[0080] From the above embodiments and comparative examples, it can be seen that the cleaning method provided by the present invention is adopted, and the cooling plate is cleaned by using pulse gas, and the cycle period of the pulse parameters is set to 1 minute, and each cycle period includes a first inflation period and a second inflation period, the duration of the first inflation period is 5 seconds to 20 seconds, and the first air pressure of the gas filled in the first inflation period is 0.2Mpa to 0.3Mpa, the duration of the second inflation period is 40 seconds to 55 seconds, and the second air pressure of the gas filled in the second inflation period is 0.8Mpa to 1.0Mpa. While avoiding damage to the cooling plate caused by the input high-pressure gas, the pulse gas can form turbulence in the internal flow channel of the cooling plate, and then can effectively clean the impurities inside the flow channel, so that the particle detection of the cooling plate after cleaning can meet the requirement of particles smaller than 0.1um <100,000 particles / square centimeter.

[0081] Since the number of through holes on the end surface of the cooling plate is relatively large, if the pulse gas generator is directly connected to the cooling plate, too many gas pipelines are required. Therefore, in order to facilitate the connection between the pulse gas generator and the cooling plate, the cooling plate cleaning method provided by the present invention, step S1 further specifically includes the following steps:

[0082] S11, installing the auxiliary tooling 1 between the pulse gas generator and the cooling plate;

[0083] S12, connecting the vent hole 112 to the gas outlet pipe of the pulse gas generator.

[0084] like Figure 2 As shown, the auxiliary tooling 1 includes a connecting body 11 , on which a vent hole 112 is provided, and thus the pulse gas generator only needs to be connected to one vent hole 112 on the auxiliary tooling 1 .

[0085] Furthermore, if Figure 5 and Figure 6 As shown, the connecting body 11 is also provided with a receiving groove 111 connected to the vent hole 112, and the cooling plate can be arranged in the receiving groove 111. When the pulse gas generated by the pulse gas generator enters the receiving groove 111 through the vent hole 112, it can enter the internal flow channel of the cooling plate through the end surface through hole on the cooling plate. Therefore, step S11 also includes: arranging the cooling plate in the receiving groove 111 and arranging the pulse gas generator outside the auxiliary tooling 1.

[0086] Furthermore, in order to prevent the gas in the receiving groove 111 from escaping from the gap between the cooling plate and the connecting body 11, as Figure 5As shown, a first sealing structure 12 is also provided between the cooling disk and the connecting body 11. By providing the first sealing structure 12, the low-pressure pulse gas can only enter the end surface through hole of the cooling disk after passing through the vent hole 112, thereby avoiding the reduction of air pressure caused by gas leakage, and ensuring that the cleaning effect will not be affected by the reduction of air pressure. Therefore, after the cooling disk is arranged in the receiving groove 111, the following step is also included: the gap between the cooling disk and the connecting body 11 is sealed by using the first sealing structure 12.

[0087] Optionally, the first sealing structure 12 is a sealing ring. It is understandable that in some other embodiments, the first sealing structure 12 can also be other sealing structures, such as a sealing strip, which is not limited here.

[0088] Furthermore, in order to prevent the cooling disk from shaking back and forth in the receiving groove 111 when being flushed by the low-pressure pulse gas, thereby causing the cleaning effect to deteriorate, as shown in FIG. Figure 5 and Figure 6 As shown, a limiting hole 113 is also provided on the connecting body 11, and a limiting body 13 is inserted in the limiting hole 113, and one end of the limiting body 13 passes through the limiting hole 113 and can be inserted into the through hole on the end face of the cooling disk, and then the cooling disk in the receiving groove 111 is limited by the limiting body 13. By limiting the cooling disk, it can be ensured that the cooling disk remains stationary during the cleaning process, and the low-pressure pulse gas can stably enter the internal flow channel of the cooling disk, thereby achieving a better cleaning effect. Therefore, before step S12, the following steps are also included: inserting a limiting body 13 in the limiting hole 113 and the through hole on the end face.

[0089] Of course, it is understandable that in some other embodiments, the limiter 13 can also be directly set on the connecting body 11, and when the cooling plate is placed in the receiving groove 111, the limiter 13 on the connecting body 11 can be directly inserted into the end face through hole of the cooling plate.

[0090] Furthermore, to ensure the stability of the cooling plate limit, as Figure 4 and Figure 6 As shown, at least two limiting holes 113 are provided on the connection body 11, and a limiting body 13 is inserted into each limiting hole 113. It is understandable that in some other embodiments, the number of limiting holes 113 and limiting bodies 13 can be set according to actual needs, and is not limited here. It is also understandable that in some other embodiments, when the limiting body 13 is directly provided on the connection body 11, at least two limiting bodies 13 are provided on the connection body 11.

[0091] Furthermore, in order to prevent the gas that has entered the containing groove 111 from escaping from the gap between the limiting body 13 and the inner wall of the limiting hole 113, as shown in FIG. Figure 6As shown, at one end where the limiting hole 113 is connected to the receiving groove 111, a second sealing structure 14 is also arranged around the limiting hole 113. When the cooling plate is placed in the receiving groove 111, the second sealing structure 14 can seal the gap between the inner wall surface formed on the outer side of the limiting hole 113 on the connecting body 11 and the cooling plate.

[0092] Of course, it is understandable that in some other embodiments, the second sealing structure 14 can also be arranged between the limiting body 13 and the inner wall surface of the limiting hole 113, so as to seal the gap between the limiting body 13 and the inner wall surface of the limiting hole 113, which can achieve the same effect and is not limited here.

[0093] Optionally, the second sealing structure 14 is a sealing ring. It is understandable that in some other embodiments, the second sealing structure 14 can also be other sealing structures, such as a sealing strip, which is not limited here.

[0094] Therefore, after the limiting body 13 is inserted into the limiting hole 113 and the end surface through hole, the following step is also included: using the second sealing structure 14 to seal the gap between the inner wall surface formed on the outer side of the limiting hole 113 on the connecting body 11 and the cooling plate.

[0095] To facilitate the operator to move the auxiliary tooling 1, such as Figure 2 and Figure 3 As shown, a handle 15 is also provided on the connecting body 11. In this embodiment, two handles 15 are provided, and are arranged at intervals on the connecting body 11, so that when the operator moves the auxiliary tooling 1, he only needs to lift the two handles 15 with both hands. It can be understood that the number of handles 15 is not limited to two, and can be adaptively set according to actual needs, and is not limited here.

[0096] The present invention provides a cooling disk cleaning method, which avoids the damage of the cooling disk caused by the input of high-pressure gas by inputting low-pressure pulse gas into the internal flow channel of the cooling disk. At the same time, the low-pressure pulse gas can form turbulence in the internal flow channel of the cooling disk, thereby effectively cleaning the impurities in the flow channel. At the same time, by setting an auxiliary tool 1 between the pulse gas generator and the cooling disk, the connection between the pulse gas generator and the cooling disk is greatly facilitated, thereby improving the cleaning efficiency of the cooling disk.

[0097] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A cooling plate cleaning method for cleaning a cooling plate, wherein the cooling plate is provided with internal flow channels and end surface through holes that are interconnected, characterized in that: The cooling plate cleaning method specifically comprises the following steps: S1, connecting the gas outlet pipe of the pulse gas generator to the end surface through hole; S2. Setting the pulse parameters in the pulse gas generator, wherein the cycle of the pulse parameters is set to 1 minute, wherein each cycle includes a first inflation period and a second inflation period, wherein the first inflation period is 5 seconds to 20 seconds long, wherein the first gas pressure of the gas filled in the first inflation period is 0.2 MPa to 0.3 MPa, wherein the second inflation period is 40 seconds to 55 seconds long, wherein the second gas pressure of the gas filled in the second inflation period is 0.8 MPa to 1.0 MPa; S3, turning on the gas outlet switch of the pulse gas generator, and inputting low-pressure pulse gas into the cooling disk according to the pulse parameters; S4. When the ventilation duration of the low-pressure pulse gas reaches the preset time, the ventilation is terminated.

2. The cooling plate cleaning method according to claim 1, characterized in that: In step S2, the pulse parameters are set to input gas with a pressure of 0.3 MPa for 20 seconds within 1 minute, and input gas with a pressure of 1.0 MPa for the remaining 40 seconds.

3. The cooling plate cleaning method according to claim 1, characterized in that: In step S4, the preset time is 10 hours to 12 hours.

4. The cooling plate cleaning method according to claim 1, characterized in that: Step S1 specifically includes the following steps: S11, installing an auxiliary tool (1) between the pulse gas generator and the cooling plate, the auxiliary tool (1) comprising a connecting body (11), and a vent hole (112) is provided on the connecting body (11); S12, connecting the vent hole (112) to the gas outlet pipe of the pulse gas generator.

5. The cooling plate cleaning method according to claim 4, characterized in that: The connecting body (11) is provided with a receiving groove (111) which is in communication with the vent hole (112); In step S11, the auxiliary tooling (1) is installed between the pulse gas generator and the cooling disk, specifically by placing the cooling disk in the receiving groove (111) and placing the pulse gas generator outside the auxiliary tooling (1).

6. The cooling plate cleaning method according to claim 5, characterized in that: After the cooling plate is arranged in the receiving groove (111), the following steps are also included: A first sealing structure (12) is used to seal the gap between the cooling plate and the connecting body (11).

7. The cooling plate cleaning method according to claim 4, characterized in that: The connecting body (11) is also provided with a limiting hole (113), and the following steps are also included before step S12: A limiting body (13) is inserted into the limiting hole (113) and the end surface through hole.

8. The cooling plate cleaning method according to claim 7, characterized in that: At least two limiting holes (113) are provided on the connecting body (11), and the limiting body (13) is inserted into each limiting hole (113).

9. The cooling plate cleaning method according to claim 7, characterized in that: After the limiting body (13) is inserted into the limiting hole (113) and the end surface through hole, the following steps are also included: A second sealing structure (14) is used to seal the gap between the inner wall surface formed on the connecting body (11) on the circumferential outer side of the limiting hole (113) and the cooling plate.

10. The cooling plate cleaning method according to claim 4, characterized in that: The connecting body (11) is also provided with a handle (15).

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