Processing device and processing method for high-purity copper target material production

Abstract

The invention discloses a processing device and method for high-purity copper target production, and relates to the technical field of high-purity copper target production, the processing device comprises a device protection layer, a device operation layer is arranged on the upper side of the upper end surface of the device protection layer, and circular through grooves are formed in the left side and the right side of the middle of the upper end surface of the device operation layer; exhaust assemblies are arranged on the inner sides of through grooves of the device operation layer, and a vacuum pump assembly is arranged in the middle of the surface of the rear end of the device operation layer by forming a circular through groove; and a placement assembly is arranged in the middle of the bottom end surface of the inner side of the device operation layer. According to the machining device, purification treatment is achieved in a forging mode, the grain size of the copper target can be refined and uniform in the repeated forging machining process, and it can be guaranteed that the machining temperature control range of the copper target is uniform in the forging trial smelting process through a constant-speed sliding structure of a heating structure; the success rate of assembly processing and purification is improved, and therefore the production efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of high-purity copper target material production, and in particular to a processing device and a processing method for high-purity copper target material production. Background Art

[0002] Metal targets are mainly used in the electronic information industry, such as integrated circuits, information storage, liquid crystal displays, etc. Metal targets are mainly made of aluminum alloys and copper alloys. On the contrary, copper has lower resistivity and better conductivity than aluminum, so copper targets have become widely used sputtering metal targets. The microstructure and internal structural uniformity, grain size and orientation distribution of copper targets will have a great impact on the performance of copper targets.

[0003] Copper target is one of the sputtering targets in the vacuum coating industry. It is a product made of high-purity copper material through a series of processes. It has a specific size and shape. High-purity copper material, especially ultra-high purity copper, has many excellent properties. Due to the importance of copper target in application, the preparation of copper target has also received relevant attention.

[0004] The current processing device still has the following deficiencies:

[0005] 1. When processing high-purity copper targets, they need to be clamped and fixed on the upper side of the placement platform inside the equipment. After heating, the two ends of the copper target will have the ductility of the surface copper structure, which will cause the clamping structure to destroy the surface structure of the two ends of the copper target, thereby affecting the subsequent deep processing of the copper target;

[0006] 2. When processing high-purity copper targets, the copper targets need to be placed inside the limiting components of the equipment. To facilitate the user's picking operation, the limiting clamping component needs to have a certain auxiliary guide structure inside to assist the user in picking up the copper targets. At the same time, the structure needs to have a certain adjustment function so that copper targets of different sizes can be clamped and processed;

[0007] 3. When processing high-purity copper targets, in order to facilitate the subsequent deep processing of the targets, after the processing and tempering process, the machined copper targets need to be bound and welded with the back plate components after the correction sandblasting. It is necessary to ensure that the position of the two components is accurately docked to meet the standard requirements of subsequent testing. Summary of the invention

[0008] In view of the deficiencies in the prior art, the present invention provides a processing device and a processing method for producing high-purity copper target materials, and solves the problems raised in the above-mentioned background technology.

[0009] To achieve the above purpose, the present invention is implemented by the following technical scheme: a processing device for producing high-purity copper target materials, comprising a device protection layer, a device operation layer is arranged on the upper side of the upper end surface of the device protection layer, and circular through grooves are opened on both sides of the middle of the upper end surface of the device operation layer, exhaust components are arranged on the inner sides of the through grooves of the device operation layer, and a vacuum pump component is arranged in the middle of the rear end surface of the device operation layer through the circular through groove;

[0010] A placement component is provided in the middle of the inner bottom surface of the device operation layer, and a group of fixed tracks are provided in the middle of the left and right sides of the inner wall of the device operation layer, a rectangular slide groove is provided on the surface of one side of the fixed track close to the inner middle of the device operation layer, and a group of heating nozzle components are provided inside the rectangular slide groove, a stamping shaping component is provided just above the middle of the upper end of the placement component, and a pneumatic driving component is provided just above the middle of the upper end of the stamping shaping component;

[0011] Three groups of rectangular through grooves are equally spaced in the middle of the rear side of the inner bottom surface of the device operation layer, and ventilation valve components are arranged inside the rectangular through grooves. Two groups of gas pressure tanks are symmetrically arranged in the middle of the inner side of the device protection layer, and a pressure component is arranged in the middle of the inner side of the device protection layer. A positioning disc is arranged inside the device operation layer;

[0012] The ventilation valve assembly includes a safety valve, three groups of circular through-connection grooves are evenly spaced in the middle of the inner side of the ventilation valve assembly, and a group of three-way pipes are arranged on the upper side of the upper end of the safety valve, and the upper end of the three-way pipes is connected to the connection valve assembly;

[0013] The placement assembly includes a target material clamping assembly, rectangular grooves are provided on both left and right sides of the middle of the upper end surface of the placement assembly, and an adjusting threaded rod is provided on the inner side of the rectangular groove, a group of spring buffer assemblies are provided on the middle of both left and right ends of the adjusting threaded rod, and an elastic support plate is provided on the middle of the upper end surface of the placement assembly through a circular groove, a rectangular groove is provided on the middle of one side surface of the target material clamping assembly close to the middle of the upper end of the placement assembly, and a group of limiting pulleys are symmetrically provided on the inner side of the rectangular groove, and a group of supporting rollers are provided on the middle of the upper end surface of the elastic support plate;

[0014] The fixed rail includes a spring stabilizing assembly, a reciprocating screw rod is arranged inside the rectangular slide groove of the fixed rail, and a rectangular through slide groove is opened in the middle of the bottom end of the inner wall of the rectangular slide groove of the fixed rail, and a connecting hose is arranged directly below the bottom end of the through slide groove;

[0015] The heating nozzle assembly includes an ignition connection assembly, a locking threaded rod is provided at the inner middle part of the central rotating shaft of the heating nozzle assembly through a slot, and a locking knob is provided at the front end of the locking threaded rod, and locking rings are provided at the middle of the front and rear ends of the locking threaded rod;

[0016] A stamped connecting rod is provided just below the middle of the bottom end of the pneumatic drive assembly, and a processed connecting assembly is sleeved on the end of the bottom end of the pneumatic drive assembly;

[0017] The processing connection assembly comprises a fixed connection ring, four groups of connection gears are arranged at equal intervals on the inner side of the processing connection assembly, and a circular through groove is opened in the middle of the connection gears, a group of worm gear groups are arranged inside the through grooves of the connection gears, and a locking threaded rod is arranged in the middle of the worm gears of the worm gear groups through the circular through grooves;

[0018] The exhaust component includes a serrated ring, and four groups of arc-shaped sealing plates are evenly spaced on the inner upper end of the exhaust component, and a rotating connecting shaft is provided at the middle of one end of the arc-shaped sealing plate close to the inner ring surface of the serrated ring through a circular through groove, and a linkage gear is provided at the bottom end of the rotating connecting shaft, and a group of power gear groups are provided on one side of the serrated ring close to the middle of the upper end of the operating layer of the device, and a motor drive assembly is connected to the middle of the upper end surface of the power gear group.

[0019] Optionally, the rear end portion of the vacuum pump assembly is fixedly connected to the middle portion of the rear end surface of the device operating layer through the vacuum pump, and the bottom end surfaces of the gas pressure tank and the pressure assembly are fixed to the middle portion of the bottom end surface of the inner wall of the device protective layer through bolts, and the front end middle portion of the device operating layer is sealed and connected to a protective glass plate through a rectangular through groove.

[0020] Optionally, the bottom connecting port of the ventilation valve assembly is connected to the upper rear connecting port of the gas pressure tank through a connecting pipe, and the upper and lower end portions of the safety valve are respectively sealed and connected to the inner wall of the inner circular groove of the ventilation valve assembly and the inner wall of the bottom end of the three-way pipe, and the upper end of the three-way pipe is sealed and connected to the bottom middle connecting port of the connecting valve assembly through a connecting pipe, and the other side surface of the connecting valve assembly is respectively fixed to the middle of the left and right sides of the inner wall of the operating layer of the device by bolts.

[0021] Optionally, the bottom surface of the placement component is fixed to the middle part of the bottom end of the inner wall of the operating layer of the device by bolts, and the middle part of the bottom end of the elastic support plate is connected to the bottom end of the inner wall of the circular groove in the middle part of the upper end of the placement component by a spring telescopic rod, and the bottom surface of the target clamping assembly is slidably connected to the inner wall of the rectangular slide groove at the upper end of the placement component, the middle parts of the left and right ends of the adjusting threaded rod are respectively penetrated and slidably connected to the middle part of the bottom end of the target clamping assembly, and the side surface of the spring buffer assembly close to the target clamping assembly is fixed to the middle part of one side surface of the bottom end of the target clamping assembly, and the middle part of the other end of the spring buffer assembly is connected to the middle part of the left and right ends of the adjusting threaded rod by a slotted thread, the outer ring surface of the spring buffer assembly is slidably connected to the inner wall of the rectangular slide groove of the placement component, and the bottom ends of the left and right sides of the supporting roller shaft are fixed to the left and right sides of the upper end surface of the elastic support plate by bolts, and the ends of the limiting pulley are connected to the middle parts of the upper and lower sides of the inner wall of the rectangular slide groove of the target clamping assembly by a spring telescopic rod.

[0022] Optionally, a side surface of the fixed rail close to the inner wall of the device operating layer is fixed to the middle of the left and right sides of the inner wall of the device operating layer by bolts, and the two end surfaces of the spring stabilizing assembly are respectively fixed to the middle of the front and rear side surfaces of the ignition connection assembly and the middle of the front and rear sides of the inner wall of the rectangular slide groove of the fixed rail, and the end surfaces of the ignition connection assembly are slidably connected to the inner wall of the rectangular slide groove of the fixed rail, the bottom end of the ignition connection assembly is sealed connected to the front end of the connecting hose, and the rear end of the connecting hose is sealed connected to the front connecting end of the connecting valve assembly, and the rear end end of the reciprocating screw is connected to an electric motor through a coupling.

[0023] Optionally, one end of the heating nozzle assembly close to the ignition connection assembly is sealed and connected to the end connection of the ignition connection assembly, and the middle part of the locking knob passes through the bearing and is connected to the front side of the inner wall of the middle circular groove of the heating nozzle assembly, and the front end of the locking threaded rod is fixed to the middle of the rear end surface of the locking knob, the middle parts of the front and rear ends of the locking threaded rod are threaded and connected to the inner wall of the middle circular groove of the locking ring, and the outer ring surface of the locking ring is slidably connected to the inner wall of the circular groove of the heating nozzle assembly, and the ends of the heating nozzle assembly are facing the middle of the upper end surface of the placement assembly.

[0024] Optionally, a support platform is fixed to the middle inner part of the operating layer of the device, and a rectangular through groove is opened in the middle upper part of the support platform, and the bottom end of the pneumatic drive assembly is fixed to the middle upper end surface of the inner support platform of the operating layer of the device by bolts, the bottom end of the pneumatic drive assembly is connected to the upper end of the stamping connecting rod through a connecting assembly, and the bottom end of the stamping connecting rod is connected to the positioning disk and the upper middle connection port of the stamping shaping assembly through a connecting assembly, the upper and lower inner walls of the fixed connecting ring are both sleeved and connected to the outer side of the bottom end of the pneumatic drive assembly and the outer side of the upper end of the stamping connecting rod, and a group of sawtooth blocks are fixed to the middle of the upper and lower ends of the inner surface of the processing connection assembly, and the end of the connecting gear close to the inner wall of the processing connection assembly is meshed and connected to the sawtooth blocks on the inner wall of the processing connection assembly.

[0025] Optionally, the middle parts of the upper and lower ends of the worm gear group are respectively passed through and fixed to the inner wall of the middle circular groove of the connecting gear, and the upper and lower end parts of the worm gear group are respectively bearing-connected to the inner walls of the upper and lower middle ends of the fixed connecting ring, and the ends of the worm wheels of the worm gear group are bearing-connected to the inner wall of the fixed connecting ring, the middle part of the worm wheel of the worm gear group is grooved and fixed to the middle part of the locking threaded rod, and the middle outer ring surface of the locking threaded rod is slidably connected to the inner wall of the fixed connecting ring.

[0026] Optionally, the outer ring surface of the exhaust component is sealed and fixed to the inner wall of the circular groove at the upper end of the operating layer of the device, and the upper and lower end surfaces of the sawtooth ring are bearing-connected to the inner wall of the annular groove in the middle part of the exhaust component, and a group of sawtooth blocks are fixed to the inner and outer surfaces of the sawtooth ring, and the outer ring sawtooth blocks of the sawtooth ring are respectively meshed and connected to the left and right end portions of the power gear group, and the bottom end of the motor drive assembly is connected to the middle part of the upper end surface of the power gear group through a coupling, and the middle part of the rotating connecting shaft passes through and is fixed to the inner wall of the end circular groove of the arc-shaped sealing plate, and the bottom end of the rotating connecting shaft is fixed to the middle part of the upper end surface of the linkage gear, and the outer ends of the linkage gear are meshed and connected to the sawtooth blocks on the inner ring surface of the sawtooth ring.

[0027] The processing method for producing high-purity copper target material comprises the following steps:

[0028] Step 1: First, fuel and gas are respectively added to the gas pressure tank and the gas pressure assembly through the three groups of grooves at the rear end of the device protection layer, so that the fuel can be injected into the inside of the vent valve assembly through the connection port at the upper end of the gas pressure tank, and the fuel is evenly controlled by the three groups of safety valves inside the vent valve assembly to flow to the inner side of the connecting pipe at the upper end of the three-way pipe through the three-way pipe, and then injected into the interior of the connecting valve assembly;

[0029] Step 2: Open the sealed glass plate inside the rectangular groove on the front side of the operating layer of the device, and turn the locking knob on the front side of the middle part of the heating nozzle assembly so that the locking knob can drive the locking threaded rod to rotate, so that the threaded structures in the middle of the front and rear ends of the locking threaded rod in opposite directions can drive the locking ring to slide along the inner wall of the middle circular groove of the heating nozzle assembly to clamp and fix the direction position of the heating nozzle assembly after the angle is adjusted, so that the heating nozzle assembly can align the end portion with the middle of the left and right sides of the upper end of the placement assembly;

[0030] Step three: place the high-purity copper target to be processed on the upper side of the upper end of the placement component, so that the middle part of the bottom end of the target can contact directly above the upper end surface of the elastic support plate, and at the same time start the driving motor on the inside of the placement component, and drive the adjusting threaded rod to rotate through the driving motor, and then drive the spring buffer component to slide away from one end of the target clamping component along the inner wall of the placement component through the threaded structure in the middle of the left and right ends of the adjusting threaded rod, and at the same time, through the elastic force of the spring in the middle of the spring buffer component, the other end of the spring buffer component can push the bottom end of the target clamping component to slide along the rectangular slide groove of the placement component, and make the side surface of the upper end of the target clamping component reach the width of the left and right sides of the target, and then slide the target into the inner side of the rectangular slide groove of the target clamping component through the limiting pulley inside the target clamping component, and start the adjusting threaded rod again, so that the target clamping component can clamp and fix the middle parts of the left and right ends of the target, and at the same time adjust the height of the elastic support plate so that the supporting roller shaft on the upper end of the elastic support plate can be supported on the lower side of the bottom end surface of the target;

[0031] Step 4: Close the glass protection plate on the front side of the device operating layer, detect the risk of gas leakage inside the device operating layer through the upper end of the exhaust assembly, and then start the motor drive assembly so that the motor drive assembly can drive the power gear set at the bottom to rotate, and drive the meshing serrated ring to rotate through the gear structures on the left and right sides of the power gear set, so that the serrated ring drives the meshing linkage gear on the inner side to rotate, and then drives the rotating connection shaft fixed at the upper end to rotate through the linkage gear to adjust the rotation position of the arc sealing plate until the arc sealing plate is completely closed, so that the inside of the device operating layer is completely in a sealed structure, and then start the vacuum pump assembly at the rear end of the device operating layer to put the inside of the device operating layer into a vacuum environment;

[0032] Step 5: Start the connecting valve assemblies on the left and right sides, so that the connecting valve assemblies can transport the gas inside the pipeline to the inside of the ignition connecting assembly through the connecting hose, and at the same time start the driving motors on the inner sides of the fixed rails on the left and right sides, so that the driving motors can drive the reciprocating screw rod to rotate, so that the reciprocating screw rod drives the ignition connecting assembly in the middle to slide along the rectangular slide groove of the fixed rail through the threaded structure, and the gas is processed by the ignition connecting assembly and ignited and sprayed through the heating nozzle assembly, so that the flame continuously heats the surface of the target material on the upper side of the assembly until 300-500°C;

[0033] Step 6: Then start the pneumatic drive assembly, and at the same time, continuously add gas to the inside of the pneumatic drive assembly through the ventilation valve assembly connected to the upper end of the pneumatic drive assembly to ensure stable air pressure, so that the stamping connecting rod at the bottom of the pneumatic drive assembly can drive the stamping shaping assembly connected to the bottom to continuously stamp downward, so that the stamping shaping assembly can be continuously forged. After forging and shaping, close the heating nozzle assembly, and open the exhaust assembly and the vacuum pump assembly. After the inside of the device operating layer is completely cooled down, take out the target material through the tool, and perform multiple cold rolling treatments on the target material. After treatment, place the target material inside the device operating layer, repeat steps 3 and 5 again, so that the target material can be heated to 250-450°C, and then perform heat preservation treatment, so as to obtain a high-purity copper target material;

[0034] Step 7: The surface of the processed high-purity copper target is uneven after forging and needs to be fine-processed. You can wait for the internal cooling of the operating layer of the device, open the glass baffle on the front side of the operating layer of the device, and then rotate the processing connection component in the middle of the fixed connecting ring at the bottom of the pneumatic drive component, and then drive the inner connecting gear to rotate through the serrated block on the inside of the processing connection component, so that the worm of the worm gear group in the middle of the connecting gear rotates, and the worm gear of the worm gear group drives the engaging threaded rod to rotate through the threaded structure so that the engaging threaded rod can be engaged with the connecting notch of the stamping connecting rod on the inner side of the fixed connecting ring and the bottom of the pneumatic drive component, so as to replace the stamping shaping component with a positioning disc to position the target.

[0035] The present invention provides a processing device and a processing method for producing high-purity copper target materials, which have the following beneficial effects:

[0036] The processing device and processing method for high-purity copper target production are provided with a placement component and a spring buffer component. An adjusting threaded rod is provided inside a rectangular slide groove at the upper end of the placement component, so that the threaded structures on the left and right sides of the adjusting threaded rod can drive the spring buffer component to slide along the slide groove, and then the other end of the spring buffer component can drive the target clamping component to slide and clamp and fix the two ends of the copper target, avoiding direct locking of the threaded structure to damage the two ends of the copper target, and a limiting pulley is set on the basis of this structure to provide a guiding effect for the feeding and discharging process of copper processing. At the same time, a supporting roller is provided on the upper side of the placement component, and the supporting and rolling structure of the supporting roller is used, so that when the copper target is limited to the upper side of the placement component for processing, the upper end of the copper target can be subjected to more uniform force during the forging process, so that the flatness of the surface of the copper target after forging can meet the detection requirements of subsequent deep processing, and at the same time, there is still a certain adjustable space at the end of the limiting pulley and the supporting roller structure inside, so as to realize the correction operation of the flatness of copper targets of different sizes.

[0037] The processing device and processing method for producing high-purity copper target materials are provided with a fixed track and an ignition connection component. A driving motor is provided inside the rectangular slide groove of the fixed track so that the driving motor can drive the reciprocating screw rod to rotate, and then the reciprocating screw rod drives the ignition connection component with a threaded connection in the middle to slide forward and backward along the rectangular slide groove of the fixed track through the reciprocating thread structure in the middle, so that the heating nozzle component at the end of the ignition connection component can continuously adjust the ignition position, so that the surface of the copper target material can be heated evenly, and the impurities of the copper target material can be fully purified through the process of continuous heating and forging, and the grain size of the copper target material can be refined and uniform through the process of repeated forging processing for many times, and the uniform sliding structure of the heating structure can ensure that the processing temperature control range of the copper target material can be uniform during the forging trial, so as to improve the success rate of component processing and purification, thereby improving production efficiency.

[0038] The processing device and processing method for high-purity copper target production are provided with an ignition connection assembly and a locking threaded rod. By rotating the locking knob at the front end of the circular groove in the middle of the heating nozzle assembly, the locking knob can drive the locking threaded rod at the rear end to rotate, and then the threaded structure in the middle of the front and rear ends of the locking threaded rod can drive the locking ring to slide along the inner wall of the circular groove of the heating nozzle assembly, so that the locking ring can be clamped and fixed on the front and rear sides of the middle of the heating nozzle assembly, so that the locking ring can lock the adjustment angle of the rotation of the end of the heating nozzle assembly, so that the end of the heating nozzle assembly can face the middle of the upper surface of the copper target material, and the heating assembly can focus on processing each more difficult-to-process part of the copper target material by adjusting the angle of the spraying fire, so that the straightness of the final product can be maintained within the standard range of detection.

[0039] The processing device and processing method for producing high-purity copper target materials are provided with a processing connection component and a clamping threaded rod. By rotating the processing connection component on the outside of a fixed connection ring connected between the bottom end of a pneumatic drive component and the upper end of a stamping connection rod, a sawtooth block on the inside of the processing connection component can be rotated to drive the connection gear to rotate, and by rotating the worm gear group in the middle of the connecting gear, the worm gear of the worm gear group can drive the clamping threaded rod to rotate. At the same time, the threaded structure of the clamping threaded rod allows the clamping threaded rod to slide and clamp inside a circular groove of the fixed connection ring, thereby facilitating the user to replace processing tools according to the situation, so that the processing and production of the target material can be more comprehensive. By pressing and holding the positioning component, the target material can be quickly welded with the back plate inside the equipment, thereby improving the production efficiency of the copper target material.

[0040] The processing device and processing method for producing high-purity copper target materials are provided with an arc-shaped sealing plate and a power gear set. The motor driving component at the inner middle of the upper end of the device operation layer can drive the power gear set at the bottom end to rotate through the coupling at the bottom end, and the meshing structures at the left and right ends of the power gear set can drive the sawtooth rings on both sides to rotate, so that the sawtooth ring drives the four groups of linkage gears on the inner side to rotate through the sawtooth blocks on the inner wall, and then the rotation angle of the arc-shaped sealing plate can be adjusted by rotating the connecting shaft to open the closed channel of the exhaust component, quickly perform heat removal treatment on the inside of the equipment, and at the same time perform heat preservation treatment on the copper target material after forging. The large temperature difference on the surface affects the flatness of the target material surface, so that the rapid cooling causes the surface of the finished product to crack or wrinkle, so that the forging process flatness is flawed. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 It is a schematic diagram of the overall structure of the invention;

[0042] Figure 2 It is a schematic diagram of the overall expanded structure of the invention;

[0043] Figure 3 It is a structural schematic diagram of the ventilation valve assembly in the invention;

[0044] Figure 4 It is a structural schematic diagram of the placement components in the invention;

[0045] Figure 5 It is a structural schematic diagram of the heating nozzle assembly in the invention;

[0046] Figure 6 For the invention Figure 5 The enlarged structural diagram at A in the middle;

[0047] Figure 7 It is an enlarged structural diagram of the pneumatic drive assembly in the invention;

[0048] Figure 8 It is a structural schematic diagram of the processing connection component in the invention;

[0049] Fig. 9 It is a schematic diagram of the structure of the exhaust component in the invention.

[0050] In the figure: 1. Device protection layer; 2. Device operation layer; 3. Placement component; 301. Elastic support plate; 302. Adjustment threaded rod; 303. Spring buffer component; 304. Target clamping component; 305. Limiting pulley; 306. Support roller; 4. Fixed track; 401. Spring stabilization component; 402. Reciprocating screw rod; 403. Connecting hose; 5. Heating nozzle component; 501. Ignition connection component; 502. Locking knob; 503. Locking threaded rod; 504. Locking ring; 6. Stamping shaping component; 7. Exhaust component; 701. Arc seal Plate; 702, rotating connecting shaft; 703, linkage gear; 704, serrated ring; 705, power gear set; 706, motor drive assembly; 8, vacuum pump assembly; 9, ventilation valve assembly; 901, safety valve; 902, three-way pipe; 903, connecting valve assembly; 10, gas pressure tank; 11, pneumatic assembly; 12, pneumatic drive assembly; 1201, stamped connecting rod; 13, processed connecting assembly; 1301, fixed connecting ring; 1302, connecting gear; 1303, worm gear set; 1304, engaging threaded rod; 14, positioning disc. DETAILED DESCRIPTION

[0051] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0052] In the description of the present invention, unless otherwise specified, "plurality" means two or more than two; the orientations or positional relationships indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0053] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] See also Figures 1 to 9 The present invention provides a technical solution: a processing device for producing high-purity copper target materials, comprising a device protection layer 1, a device operation layer 2 is arranged on the upper side of the upper end surface of the device protection layer 1, and circular through grooves are opened on both sides of the middle of the upper end surface of the device operation layer 2, exhaust components 7 are arranged inside the through grooves of the device operation layer 2, and a vacuum pump component 8 is arranged in the middle of the rear end surface of the device operation layer 2 through the circular through groove;

[0055] A placement component 3 is provided in the middle of the inner bottom surface of the device operation layer 2, and a group of fixed rails 4 are provided in the middle of the left and right sides of the inner wall of the device operation layer 2, and a rectangular slide groove is provided on the surface of the fixed rail 4 close to the inner middle of the device operation layer 2, and a group of heating nozzle components 5 are provided inside the rectangular slide groove, and a stamping shaping component 6 is provided just above the middle of the upper end of the placement component 3, and a pneumatic driving component 12 is provided just above the middle of the upper end of the stamping shaping component 6;

[0056] Three groups of rectangular through grooves are equally spaced in the middle of the rear side of the inner bottom surface of the device operation layer 2, and ventilation valve components 9 are arranged inside the rectangular through grooves. Two groups of gas pressure tanks 10 are symmetrically arranged in the middle of the inner side of the device protection layer 1, and a gas pressure component 11 is arranged in the middle of the inner side of the device protection layer 1. A positioning disc 14 is arranged inside the device operation layer 2;

[0057] The ventilation valve assembly 9 includes a safety valve 901. Three groups of circular through-connection grooves are evenly spaced in the middle of the inner side of the ventilation valve assembly 9. A group of three-way pipes 902 are arranged on the upper side of the upper end of the safety valve 901. The upper end of the three-way pipe 902 is connected to a connection valve assembly 903.

[0058] The placement component 3 includes a target material clamping component 304, a rectangular slide groove is provided on both sides of the middle of the upper end surface of the placement component 3, and an adjusting threaded rod 302 is provided on the inner side of the rectangular slide groove, a group of spring buffer components 303 are provided in the middle of the left and right ends of the adjusting threaded rod 302, and an elastic support plate 301 is provided in the middle of the upper end surface of the placement component 3 through a circular groove, a rectangular slide groove is provided in the middle of one side surface of the target material clamping component 304 close to the middle of the upper end of the placement component 3, and a group of limiting pulleys 305 are symmetrically provided on the inner side of the rectangular slide groove, and a group of supporting rollers 306 are provided in the middle of the upper end surface of the elastic support plate 301;

[0059] The fixed rail 4 includes a spring stabilizing assembly 401, a reciprocating screw rod 402 is arranged inside the rectangular slide groove of the fixed rail 4, and a rectangular through slide groove is opened in the middle of the bottom end of the inner wall of the rectangular slide groove of the fixed rail 4, and a connecting hose 403 is arranged just below the bottom end of the through slide groove;

[0060] The heating nozzle assembly 5 includes an ignition connection assembly 501, a locking threaded rod 503 is provided at the inner middle part of the central rotating shaft of the heating nozzle assembly 5 through a slot, and a locking knob 502 is provided at the front end of the locking threaded rod 503, and locking rings 504 are provided at the middle of the front and rear ends of the locking threaded rod 503;

[0061] A stamped connecting rod 1201 is provided just below the middle of the bottom end of the pneumatic drive assembly 12, and a processed connecting assembly 13 is sleeved on the bottom end of the pneumatic drive assembly 12;

[0062] The processing connection component 13 includes a fixed connection ring 1301, and four groups of connection gears 1302 are arranged at equal intervals on the inner side of the processing connection component 13, and the middle part of the connection gears 1302 is provided with a circular through groove, and a group of worm gear groups 1303 are arranged inside the through groove of the connection gear 1302, and the middle part of the worm gear of the worm gear group 1303 is provided with a locking threaded rod 1304 through the circular through groove;

[0063] The exhaust component 7 includes a sawtooth ring 704, and four groups of arc-shaped sealing plates 701 are evenly spaced at the inner upper end of the exhaust component 7, and a rotating connecting shaft 702 is provided in the middle of one end of the arc-shaped sealing plate 701 close to the inner ring surface of the sawtooth ring 704 through a circular through groove, and a linkage gear 703 is provided at the bottom end of the rotating connecting shaft 702, and a group of power gear groups 705 are provided on one side of the sawtooth ring 704 close to the middle of the upper end of the device operating layer 2, and a motor drive component 706 is connected to the middle of the upper end surface of the power gear group 705.

[0064] In this embodiment, Figure 1 and Figure 2As shown, the rear end portion of the vacuum pump assembly 8 is fixedly connected to the middle portion of the rear end surface of the device operating layer 2 through the vacuum pump, and the bottom end surfaces of the gas pressure tank 10 and the pressure assembly 11 are fixed to the middle portion of the bottom end surface of the inner wall of the device protective layer 1 through bolts, and the front end middle portion of the device operating layer 2 is sealed and connected to a protective glass plate through a rectangular through groove; the vacuum pump assembly 8 is arranged in a groove at the rear end of the device operating layer 2, and the protective glass plate is arranged on the front side, so that the interior of the device operating layer 2 can be in a vacuum sealed state.

[0065] In this embodiment, Figure 3 As shown, the bottom connection port of the ventilation valve assembly 9 is connected to the upper rear connection port of the gas pressure tank 10 through a connecting pipe, and the upper and lower end portions of the safety valve 901 are respectively sealed and connected to the inner wall of the inner circular groove of the ventilation valve assembly 9 and the inner wall of the bottom end of the three-way pipe 902, and the upper end of the three-way pipe 902 is sealed and connected to the bottom middle connection port of the connecting valve assembly 903 through a connecting pipe, and the other side surface of the connecting valve assembly 903 is respectively fixed to the middle of the left and right sides of the inner wall of the device operating layer 2 by bolts; by arranging three groups of safety valves 901 on the inner side of the ventilation valve assembly 9, the safety valve 901 can evenly transport the gas inside the gas pressure tank 10 at the bottom of the ventilation valve assembly 9 into the inside of the three-way pipe 902.

[0066] In this embodiment, Figure 4 As shown, the bottom surface of the placement component 3 is fixed to the middle of the bottom end of the inner wall of the device operation layer 2 by bolts, and the middle of the bottom end of the elastic support plate 301 is connected to the bottom end of the inner wall of the circular groove in the middle of the upper end of the placement component 3 by a spring telescopic rod, and the bottom surface of the target clamping component 304 is slidably connected to the inner wall of the rectangular slide groove at the upper end of the placement component 3, the middle parts of the left and right ends of the adjusting threaded rod 302 are respectively penetrated and slidably connected to the middle of the bottom end of the target clamping component 304, and the side surface of the spring buffer component 303 close to the target clamping component 304 is fixed to the middle of the side surface of the bottom end of the target clamping component 304, and the middle part of the other end of the spring buffer component 303 is connected to the adjusting threaded rod 302 by a slotted thread. In the middle of the left and right ends, the outer ring surface of the spring buffer assembly 303 is slidably connected to the inner wall of the rectangular slide groove of the placement assembly 3, and the bottom ends of the left and right sides of the support roller shaft 306 are fixed to the left and right sides of the upper end surface of the elastic support plate 301 by bolts, and the ends of the limiting pulley 305 are connected to the middle of the upper and lower sides of the inner wall of the rectangular slide groove of the target clamping assembly 304 through a spring telescopic rod; by arranging a driving assembly inside the placement assembly 3, the adjusting threaded rod 302 inside the groove of the placement assembly 3 can drive the spring buffer assembly 303 to adjust the position of the target clamping assembly 304 through the threaded structure in the middle, so that the target clamping assembly 304 can clamp and engage the copper target on the upper side of the placement assembly 3.

[0067] In this embodiment, Figure 5 As shown, the side surface of the fixed rail 4 close to the inner wall of the device operating layer 2 is fixed to the middle of the left and right sides of the inner wall of the device operating layer 2 by bolts, and the two end surfaces of the spring stabilizing component 401 are respectively fixed to the middle of the front and rear side surfaces of the ignition connection component 501 and the middle of the front and rear sides of the inner wall of the rectangular slide groove of the fixed rail 4, and the end surfaces of the ignition connection component 501 are slidably connected to the inner wall of the rectangular slide groove of the fixed rail 4, the bottom end of the ignition connection component 501 is sealed and connected to the front end of the connecting hose 403, and the rear end of the connecting hose 403 is sealed and connected to the front connecting end of the connecting valve assembly 903, and the rear end end of the reciprocating screw rod 402 is connected to an electric motor through a coupling; the driving motor on the inner side of the fixed rail 4 can drive the reciprocating screw rod 402 on the inner side of the fixed rail 4 to drive the ignition connection component 501 to slide back and forth along the rectangular slide groove of the fixed rail 4.

[0068] In this embodiment, Figure 6 As shown, one end of the heating nozzle assembly 5 close to the ignition connection assembly 501 is sealed and connected to the end connection of the ignition connection assembly 501, and the middle part of the locking knob 502 passes through the bearing to be connected to the front side of the inner wall of the middle circular groove of the heating nozzle assembly 5, and the front end of the locking threaded rod 503 is fixed to the middle part of the rear end surface of the locking knob 502, and the middle parts of the front and rear ends of the locking threaded rod 503 pass through the thread to be connected to the inner wall of the middle circular groove of the locking ring 504, and the outer ring surface of the locking ring 504 They are all slidably connected to the inner wall of the circular groove of the heating nozzle assembly 5, and the ends of the heating nozzle assembly 5 are all facing the middle of the upper end surface of the placement assembly 3; by rotating the locking knob 502 on the front side of the circular groove in the middle of the heating nozzle assembly 5, the locking knob 502 can drive the locking threaded rod 503 at the rear end to rotate, and then the locking ring 504 threadedly connected at the middle of the front and rear ends of the locking threaded rod 503 can slide along the inner wall of the circular groove of the heating nozzle assembly 5 to engage the rotating shaft in the middle of the heating nozzle assembly 5.

[0069] In this embodiment, Figure 7 and Figure 8As shown, a support platform is fixed to the middle of the inner side of the device operation layer 2, and a rectangular through groove is opened in the middle of the upper end of the support platform, and the bottom end of the pneumatic drive component 12 is fixed to the middle of the upper end surface of the inner side support platform of the device operation layer 2 by bolts, and the bottom end of the pneumatic drive component 12 is connected to the upper end of the stamping connecting rod 1201 through a connecting component, and the bottom end of the stamping connecting rod 1201 is connected to the positioning disk 14 and the upper middle connection port of the stamping shaping component 6 through a connecting component, and the inner walls of the upper and lower ends of the fixed connecting ring 1301 are sleeved and connected to the outer side of the bottom end of the pneumatic drive component 12 and the upper end of the stamping connecting rod 1201. A group of sawtooth blocks are fixed on the outside of the end and in the middle of the upper and lower ends of the inner surface of the processing and connecting component 13, and the end of the connecting gear 1302 close to the inner wall of the processing and connecting component 13 is meshed and connected to the sawtooth blocks on the inner wall of the processing and connecting component 13; a pneumatic drive component 12 is arranged in the middle of the inner support platform of the device operation layer 2, so that the pneumatic drive component 12 can drive the stamping shaping component 6 to stamp downward through the stamping connecting rod 1201 at the bottom, and the bottom end of the upper pneumatic drive component 12 and the upper end of the stamping connecting rod 1201 can be connected together through the fixed connecting ring 1301, so as to facilitate the user to replace and repair.

[0070] In this embodiment, Figure 8 As shown, the middle parts of the upper and lower ends of the worm gear set 1303 are respectively passed through and fixed to the inner wall of the middle circular groove of the connecting gear 1302, and the upper and lower end parts of the worm gear set 1303 are respectively bearing-connected to the middle inner walls of the upper and lower ends of the fixed connecting ring 1301, and the ends of the worm wheels of the worm gear set 1303 are bearing-connected to the inner wall of the fixed connecting ring 1301, the middle parts of the worm wheels of the worm gear set 1303 are grooved and fixed to the middle part of the engaging threaded rod 1304, and the middle outer ring surfaces of the engaging threaded rod 1304 are slidably connected to the inner wall of the fixed connecting ring 1301; by processing the serrated blocks on the inner side of the connecting component 13, the four groups of connecting gears 1302 on the inner side can be driven to rotate, and then the position of the engaging threaded rod 1304 is adjusted through the worm gear set 1303, and the fixed connecting ring 1301 is slidably engaged through the engaging threaded rod 1304.

[0071] In this embodiment, Fig. 9As shown, the outer ring surface of the exhaust component 7 is sealed and fixed to the inner wall of the circular groove at the upper end of the device operation layer 2, and the upper and lower end surfaces of the sawtooth ring 704 are bearing-connected to the inner wall of the annular groove in the middle of the exhaust component 7, and a group of sawtooth blocks are fixed to the inner and outer surfaces of the sawtooth ring 704, and the outer ring sawtooth blocks of the sawtooth ring 704 are respectively meshed and connected to the left and right end portions of the power gear group 705, and the bottom end of the motor drive component 706 is connected to the middle part of the upper end surface of the power gear group 705 through a coupling, and the middle part of the rotating connecting shaft 702 passes through and is fixed to the inner wall of the end circular groove of the arc-shaped sealing plate 701, and the rotating The bottom end of the dynamic connecting shaft 702 is fixed to the middle of the upper end surface of the linkage gear 703, and the outer end of the linkage gear 703 is meshed and connected to the sawtooth block on the inner ring surface of the sawtooth ring 704; by arranging a motor drive component 706 at the upper end of the device operation layer 2, the motor drive component 706 drives the sawtooth rings 704 on both sides to rotate through the power gear set 705 in the bottom end, and then the sawtooth ring 704 drives the linkage gear 703 to rotate through the inner meshing structure, so that the linkage gear 703 drives the arc sealing plate 701 to adjust the rotation angle through the rotating connecting shaft 702 at the upper end.

[0072] The processing method for producing high-purity copper target material comprises the following steps:

[0073] Step 1: First, fuel and gas are respectively added to the gas pressure tank 10 and the gas pressure assembly 11 through the three groups of grooves at the rear end of the device protection layer 1, so that the fuel can be injected into the vent valve assembly 9 through the connection port at the upper end of the gas pressure tank 10, and the fuel is evenly controlled by the three groups of safety valves 901 inside the vent valve assembly 9 to flow to the inner side of the connecting pipe at the upper end of the three-way pipe 902 through the three-way pipe 902, and then can be injected into the connection valve assembly 903;

[0074] Step 2: Open the sealed glass plate inside the rectangular groove on the front side of the device operating layer 2, and rotate the locking knob 502 on the front side of the middle of the heating nozzle assembly 5, so that the locking knob 502 can drive the locking threaded rod 503 to rotate, and then the threaded structures in the middle of the front and rear ends of the locking threaded rod 503 in opposite directions can drive the locking ring 504 to slide along the inner wall of the middle circular groove of the heating nozzle assembly 5 to clamp and fix the direction position of the heating nozzle assembly 5 after the angle is adjusted, so that the heating nozzle assembly 5 can align the end portion with the middle of the left and right sides of the upper end of the placement assembly 3;

[0075] Step 3: Place the high-purity copper target to be processed on the upper side of the upper end of the placement component 3, so that the middle of the bottom end of the target can contact the upper surface of the elastic support plate 301, and start the driving motor inside the placement component 3 at the same time, and drive the adjusting threaded rod 302 to rotate through the driving motor, and then drive the spring buffer component 303 away from one end of the target clamping component 304 to slide along the inner wall of the placement component 3 through the threaded structure in the middle of the left and right ends of the adjusting threaded rod 302, and at the same time, the elastic force of the spring in the middle of the spring buffer component 303 enables the other end of the spring buffer component 303 to push The bottom end of the target clamping assembly 304 slides along the rectangular slot of the placement assembly 3, and the side surface of the upper end of the target clamping assembly 304 can reach the width of the left and right sides of the target, and then the target is slid into the inner side of the rectangular slot of the target clamping assembly 304 through the limiting pulley 305 inside the target clamping assembly 304, and the adjusting threaded rod 302 is started again, so that the target clamping assembly 304 can clamp and fix the middle of the left and right ends of the target, and at the same time adjust the height of the elastic support plate 301 so that the support roller 306 at the upper end of the elastic support plate 301 can be supported on the lower side of the bottom end surface of the target;

[0076] Step 4: Close the glass protection plate on the front side of the device operating layer 2, detect the risk of gas leakage inside the device operating layer 2 through the upper end of the exhaust component 7, and then start the motor drive component 706, so that the motor drive component 706 can drive the power gear set 705 at the bottom to rotate, and drive the meshing connected serrated ring 704 to rotate through the gear structures on the left and right sides of the power gear set 705, so that the serrated ring 704 drives the meshing connected linkage gear 703 on the inner side to rotate, and then drives the upper fixedly connected rotating connecting shaft 702 to rotate through the linkage gear 703, so as to adjust the rotation position of the arc sealing plate 701, until the arc sealing plate 701 is completely closed, so that the inside of the device operating layer 2 is completely in a sealed structure, and then start the vacuum pump component 8 at the rear end of the device operating layer 2 to put the inside of the device operating layer 2 into a vacuum environment;

[0077] Step 5: Start the connection valve components 903 on the left and right sides, so that the connection valve components 903 can transport the gas inside the pipeline to the inside of the ignition connection component 501 through the connection hose 403, and at the same time start the drive motors inside the fixed rails 4 on the left and right sides, so that the drive motors can drive the reciprocating screw rod 402 to rotate, so that the reciprocating screw rod 402 drives the middle ignition connection component 501 to slide along the rectangular slide groove of the fixed rail 4 through the threaded structure, and the gas is processed by the ignition connection component 501 and ignited and sprayed through the heating nozzle component 5, so that the flame continuously heats the surface of the target material on the upper side of the placement component 3 until 300-500°C;

[0078] Step six: then start the pneumatic drive component 12, and at the same time, continuously add gas to the inside of the pneumatic drive component 12 through the ventilation valve component 9 connected to the upper end of the pneumatic drive component 11 to ensure stable air pressure, so that the stamping connecting rod 1201 at the bottom of the pneumatic drive component 12 can drive the stamping shaping component 6 connected to the bottom to continuously stamp downward, so that the stamping shaping component 6 can be continuously forged. After forging and shaping, close the heating nozzle component 5, and open the exhaust component 7 and the vacuum pump component 8. After the temperature inside the device operating layer 2 is completely reduced, take out the target material through the tool, and perform multiple cold rolling treatments on the target material. After treatment, place the target material into the inside of the device operating layer 2, repeat steps three and five again, so that the target material can be heated to 250-450°C, and then perform heat preservation treatment to obtain a high-purity copper target material;

[0079] Step 7: The surface of the processed high-purity copper target is uneven after forging and needs to be fine-processed. After waiting for the internal cooling of the device operating layer 2, open the glass baffle on the front side of the device operating layer 2, and then rotate the processing connection component 13 in the middle of the fixed connecting ring 1301 at the bottom of the pneumatic drive component 12, and then drive the inner connecting gear 1302 to rotate through the sawtooth block inside the processing connection component 13, so that the worm gear 1303 in the middle of the connecting gear 1302 rotates, and the worm gear of the worm gear group 1303 drives the engaging threaded rod 1304 to rotate through the threaded structure so that the engaging threaded rod 1304 can be engaged with the connecting groove of the stamping connecting rod 1201 on the inner side of the fixed connecting ring 1301 and the bottom end of the pneumatic drive component 12, so as to replace the stamping shaping component 6 with the positioning disc 14 to position the target material, and at the same time, the target material is bound and welded to the back plate after the correction sandblasting.

[0080] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A processing device for producing high-purity copper target material, comprising a device protection layer (1), characterized in that: A device operating layer (2) is arranged on the upper surface of the upper end of the device protection layer (1), and circular through grooves are provided on both left and right sides of the middle of the upper end of the device operating layer (2), exhaust components (7) are provided inside the through grooves of the device operating layer (2), and a vacuum pump component (8) is provided in the middle of the rear end surface of the device operating layer (2) through the circular through groove; A placement component (3) is provided in the middle of the inner bottom surface of the device operation layer (2), and a group of fixed rails (4) are provided in the middle of the left and right sides of the inner wall of the device operation layer (2), and a rectangular slide groove is provided on the surface of one side of the fixed rail (4) close to the inner middle of the device operation layer (2), and a group of heating nozzle components (5) are provided inside the rectangular slide groove, and a stamping and shaping component (6) is provided just above the middle of the upper end of the placement component (3), and a pneumatic driving component (12) is provided just above the middle of the upper end of the stamping and shaping component (6); Three groups of rectangular through grooves are provided at equal intervals in the middle of the rear side of the inner bottom surface of the device operating layer (2), and ventilation valve components (9) are provided inside the rectangular through grooves; two groups of gas pressure tanks (10) are symmetrically provided in the middle of the inner side of the device protection layer (1), and a pressure component (11) is provided in the middle of the inner side of the device protection layer (1); and a positioning disc (14) is provided inside the device operating layer (2); The ventilation valve assembly (9) comprises a safety valve (901), three groups of circular through-connection grooves are provided at equal intervals in the middle of the inner side of the ventilation valve assembly (9), and a group of three-way pipes (902) are provided on the upper side of the upper end of the safety valve (901), and the upper end of the three-way pipe (902) is connected to the connection valve assembly (903); The placement component (3) comprises a target material clamping component (304), rectangular grooves are arranged on both left and right sides of the middle of the upper end surface of the placement component (3), and an adjusting threaded rod (302) is arranged on the inner side of the rectangular groove, a group of spring buffer components (303) are arranged on the middle of both left and right ends of the adjusting threaded rod (302), and an elastic support plate (301) is arranged on the middle of the upper end surface of the placement component (3) through a circular groove, a rectangular groove is arranged on the middle of one side surface of the target material clamping component (304) close to the middle of the upper end of the placement component (3), and a group of limiting pulleys (305) are symmetrically arranged on the inner side of the rectangular groove, and a group of supporting rollers (306) are arranged on the middle of the upper end surface of the elastic support plate (301); The fixed track (4) comprises a spring stabilizing assembly (401), a reciprocating screw rod (402) is arranged on the inner side of the rectangular slide groove of the fixed track (4), and a rectangular through slide groove is opened in the middle of the bottom end of the inner wall of the rectangular slide groove of the fixed track (4), and a connecting hose (403) is arranged directly below the bottom end of the through slide groove; The heating nozzle assembly (5) comprises an ignition connection assembly (501), a locking threaded rod (503) is provided at the middle of the inner side of the central rotating shaft of the heating nozzle assembly (5) through a slot, and a locking knob (502) is provided at the front end of the locking threaded rod (503), and locking rings (504) are provided at the middle of the front and rear ends of the locking threaded rod (503); A stamped connecting rod (1201) is provided just below the middle of the bottom end of the pneumatic drive component (12), and a processed connecting component (13) is sleeved on the bottom end of the pneumatic drive component (12); The processing connection assembly (13) comprises a fixed connection ring (1301), four groups of connection gears (1302) are arranged at equal intervals on the inner side of the processing connection assembly (13), and a circular through-groove is opened in the middle of each of the connection gears (1302), a group of worm gear groups (1303) are arranged inside the through-groove of each of the connection gears (1302), and a locking threaded rod (1304) is arranged in the middle of each of the worm wheels of the worm gear groups (1303) through the circular through-groove; The exhaust assembly (7) comprises a sawtooth circular ring (704), and four groups of arc-shaped sealing plates (701) are arranged at equal intervals on the inner upper end of the exhaust assembly (7), and a rotating connecting shaft (702) is arranged in the middle of one end of the arc-shaped sealing plate (701) close to the inner ring surface of the sawtooth circular ring (704) through a circular through groove, and a linkage gear (703) is arranged at the bottom end of the rotating connecting shaft (702), and a group of power gear groups (705) are arranged on one side of the sawtooth circular ring (704) close to the middle of the upper end of the device operation layer (2), and a motor drive assembly (706) is connected to the middle of the upper end surface of the power gear group (705).

2. The processing device for producing high-purity copper target according to claim 1, characterized in that: The rear end of the vacuum pump assembly (8) is fixedly connected to the middle of the rear end surface of the device operating layer (2) through the vacuum pump, and the bottom end surfaces of the gas pressure tank (10) and the pressure assembly (11) are fixed to the middle of the bottom end surface of the inner wall of the device protective layer (1) through bolts, and the front end middle of the device operating layer (2) is sealed and connected to a protective glass plate through a rectangular through groove.

3. The processing device for producing high-purity copper target according to claim 1, characterized in that: The bottom connection port of the ventilation valve assembly (9) is connected to the upper rear connection port of the gas pressure tank (10) through a connecting pipe, and the upper and lower ends of the safety valve (901) are respectively sealed and connected to the inner wall of the inner circular groove of the ventilation valve assembly (9) and the inner wall of the bottom end of the three-way pipe (902), and the upper end of the three-way pipe (902) is sealed and connected to the middle connection port of the bottom end of the connecting valve assembly (903) through a connecting pipe, and the other side surface of the connecting valve assembly (903) is respectively fixed to the middle of the left and right sides of the inner wall of the operating layer (2) of the device by bolts.

4. The processing device for producing high-purity copper target according to claim 1, characterized in that: The bottom surface of the placement component (3) is fixed to the middle of the bottom of the inner wall of the device operation layer (2) by bolts, and the middle of the bottom of the elastic support plate (301) is connected to the bottom of the inner wall of the circular groove in the middle of the upper end of the placement component (3) by a spring telescopic rod, and the bottom surface of the target clamping component (304) is slidably connected to the inner wall of the rectangular slide groove at the upper end of the placement component (3), the middle of the left and right ends of the adjusting threaded rod (302) are respectively penetrated and slidably connected to the middle of the bottom of the target clamping component (304), and the side surface of the spring buffer component (303) close to the target clamping component (304) is fixed to The middle of one side surface of the bottom end of the target material clamping assembly (304) and the middle of the other end of the spring buffer assembly (303) are connected to the middle of the left and right ends of the adjusting threaded rod (302) through slotted threads, the outer ring surface of the spring buffer assembly (303) is slidably connected to the inner wall of the rectangular slide groove of the placement assembly (3), and the bottom ends of the left and right sides of the supporting roller shaft (306) are fixed to the left and right sides of the upper end surface of the elastic support plate (301) by bolts, and the ends of the limiting pulley (305) are connected to the middle of the upper and lower sides of the inner wall of the rectangular slide groove of the target material clamping assembly (304) through spring telescopic rods.

5. The processing device for producing high-purity copper target according to claim 1, characterized in that: The surface of one side of the fixed track (4) close to the inner wall of the device operating layer (2) is fixed to the middle of the left and right sides of the inner wall of the device operating layer (2) by bolts, and the two end surfaces of the spring stabilizing component (401) are respectively fixed to the middle of the front and rear side surfaces of the ignition connection component (501) and the middle of the front and rear sides of the inner wall of the rectangular slide groove of the fixed track (4), and the end surfaces of the ignition connection component (501) are slidably connected to the inner wall of the rectangular slide groove of the fixed track (4), the bottom end of the ignition connection component (501) is sealed to the front end of the connecting hose (403), and the rear end of the connecting hose (403) is sealed to the front connecting end of the connecting valve component (903), and the rear end of the reciprocating screw rod (402) is connected to an electric motor through a coupling.

6. The processing device for producing high-purity copper target according to claim 1, characterized in that: One end of the heating nozzle assembly (5) close to the ignition connection assembly (501) is sealed and connected to the end connection of the ignition connection assembly (501), and the middle part of the locking knob (502) passes through the bearing and is connected to the front side of the inner wall of the middle circular groove of the heating nozzle assembly (5), and the front end of the locking threaded rod (503) is fixed to the middle part of the rear end surface of the locking knob (502), the middle parts of the front and rear ends of the locking threaded rod (503) are threadedly connected to the inner wall of the middle circular groove of the locking ring (504), and the outer ring surface of the locking ring (504) is slidably connected to the inner wall of the circular groove of the heating nozzle assembly (5), and the ends of the heating nozzle assembly (5) are facing the middle part of the upper end surface of the placement assembly (3).

7. The processing device for producing high-purity copper target according to claim 1, characterized in that: A support platform is fixed to the middle of the inner side of the device operation layer (2), and a rectangular through groove is opened in the middle of the upper end of the support platform, and the bottom end of the pneumatic drive component (12) is fixed to the middle of the upper end surface of the support platform inside the device operation layer (2) by bolts, and the bottom end of the pneumatic drive component (12) is connected to the upper end of the stamping connecting rod (1201) by a connecting component, and the bottom end of the stamping connecting rod (1201) is connected to the positioning disc (14) and the stamping disc (14) by a connecting component. The middle connection port at the upper end of the compression molding component (6), the inner walls of the upper and lower ends of the fixed connection ring (1301) are both sleeved and connected to the outer side of the bottom end of the pneumatic drive component (12) and the outer side of the upper end of the stamping connecting rod (1201), and a group of sawtooth blocks are fixed in the middle of the upper and lower ends of the inner surface of the processing connection component (13), and the end of the connecting gear (1302) close to the inner wall of the processing connection component (13) is meshed and connected to the sawtooth block on the inner wall of the processing connection component (13).

8. The processing device for producing high-purity copper target according to claim 1, characterized in that: The middle parts of the upper and lower ends of the worm gear group (1303) are respectively passed through and fixed to the inner wall of the middle circular groove of the connecting gear (1302), and the upper and lower ends of the worm gear group (1303) are respectively bearing-connected to the inner walls of the upper and lower ends of the fixed connecting ring (1301), and the ends of the worm wheel of the worm gear group (1303) are bearing-connected to the inner wall of the fixed connecting ring (1301), the middle part of the worm wheel of the worm gear group (1303) is grooved and fixed to the middle part of the locking threaded rod (1304), and the middle outer ring surface of the locking threaded rod (1304) is slidably connected to the inner wall of the fixed connecting ring (1301).

9. The processing device for producing high-purity copper target according to claim 1, characterized in that: The outer ring surface of the exhaust assembly (7) is sealed and fixed to the inner wall of the circular groove at the upper end of the operating layer (2) of the device, and the upper and lower end surfaces of the sawtooth ring (704) are bearing-connected to the inner wall of the annular groove in the middle of the exhaust assembly (7), and a group of sawtooth blocks are fixed to the inner and outer surfaces of the sawtooth ring (704), and the outer ring sawtooth blocks of the sawtooth ring (704) are respectively meshed and connected to the left and right end portions of the power gear set (705), and the motor drive assembly The bottom end of (706) is connected to the middle of the upper end surface of the power gear set (705) through a coupling, and the middle part of the rotating connecting shaft (702) passes through and is fixed to the inner wall of the end circular groove of the arc-shaped sealing plate (701), the bottom end of the rotating connecting shaft (702) is fixed to the middle of the upper end surface of the linkage gear (703), and the outer end of the linkage gear (703) is meshed and connected to the sawtooth block on the inner ring surface of the sawtooth ring (704).

10. A processing method for producing high-purity copper target materials according to claims 1 to 9, comprising the following steps: Step 1: Fuel and gas are respectively added to the interior of the gas pressure tank (10) and the gas pressure assembly (11) through the three groups of grooves at the rear end of the device protection layer (1), so that the fuel can be injected into the interior of the ventilation valve assembly (9) through the connection port at the upper end of the gas pressure tank (10), and the fuel is evenly controlled by the three groups of safety valves (901) inside the ventilation valve assembly (9) to flow to the inner side of the connecting pipe at the upper end of the three-way pipe (902) through the three-way pipe (902), and then can be injected into the interior of the connecting valve assembly (903); Step 2: Open the sealed glass plate inside the rectangular groove on the front side of the device operating layer (2), and rotate the locking knob (502) on the front side of the middle of the heating nozzle assembly (5) so that the locking knob (502) can drive the locking threaded rod (503) to rotate, thereby enabling the threaded structures in the middle of the front and rear ends of the locking threaded rod (503) in opposite directions to drive the locking ring (504) to slide along the inner wall of the middle circular groove of the heating nozzle assembly (5) to clamp and fix the direction position of the heating nozzle assembly (5) after the angle is adjusted, so that the end of the heating nozzle assembly (5) can be aligned with the middle of the left and right sides of the upper end of the placement assembly (3); Step 3: placing the high-purity copper target to be processed on the upper side of the upper end of the placement component (3), so that the middle of the bottom end of the target can contact the upper surface of the elastic support plate (301), and at the same time starting the driving motor inside the placement component (3), driving the adjusting threaded rod (302) to rotate through the driving motor, and then driving the spring buffer component (303) away from the end of the target clamping component (304) to slide along the inner wall of the placement component (3) through the threaded structure in the middle of the left and right ends of the adjusting threaded rod (302), and at the same time, through the elastic force of the spring in the middle of the spring buffer component (303), the other end of the spring buffer component (303) can push the target The bottom end of the target material clamping assembly (304) slides along the rectangular slide groove of the placement assembly (3), and the side surface of the upper end of the target material clamping assembly (304) can reach the width of the left and right sides of the target material, and then the target material is slid into the inner side of the rectangular slide groove of the target material clamping assembly (304) through the limiting pulley (305) inside the target material clamping assembly (304), and the adjusting threaded rod (302) is started again, so that the target material clamping assembly (304) can clamp and fix the middle part of the left and right ends of the target material, and at the same time, the height of the elastic support plate (301) is adjusted so that the support roller (306) at the upper end of the elastic support plate (301) can be supported on the lower side of the bottom end surface of the target material; Step 4: Close the glass protection plate on the front side of the device operating layer (2), detect the risk of gas leakage inside the device operating layer (2) through the upper end of the exhaust assembly (7), and then start the motor drive assembly (706) so that the motor drive assembly (706) can drive the power gear set (705) at the bottom to rotate, and drive the meshing sawtooth ring (704) to rotate through the gear structures on the left and right sides of the power gear set (705), so that the sawtooth ring (704) drives the meshing linkage gear (703) on the inner side to rotate, and then drives the upper fixed rotating connection shaft (702) to rotate through the linkage gear (703) to adjust the rotation position of the arc sealing plate (701) until the arc sealing plate (701) is completely closed, so that the inside of the device operating layer (2) is completely in a sealed structure, and then start the vacuum pump assembly (8) at the rear end of the device operating layer (2) to place the inside of the device operating layer (2) in a vacuum environment; Step 5: Start the connecting valve components (903) on the left and right sides, so that the connecting valve components (903) can transport the gas inside the pipeline to the inside of the ignition connecting component (501) through the connecting hose (403), and at the same time start the driving motors inside the fixed tracks (4) on the left and right sides, so that the driving motors can drive the reciprocating screw rod (402) to rotate, so that the reciprocating screw rod (402) drives the ignition connecting component (501) in the middle to slide along the rectangular slide groove of the fixed track (4) through the threaded structure, and the gas is processed by the ignition connecting component (501) and ignited and sprayed through the heating nozzle component (5), so that the flame continuously heats the surface of the target material on the upper side of the placement component (3) until 300-500°C; Step 6: Then, the air pressure drive component (12) is started, and at the same time, the air valve component (9) connected to the upper end of the air pressure component (11) can continuously add gas to the inside of the air pressure drive component (12) to ensure stable air pressure, so that the stamping connecting rod (1201) at the bottom end of the air pressure drive component (12) can drive the stamping shaping component (6) connected to the bottom end to continuously stamp downward, so that the stamping shaping component (6) can be continuously forged. After forging and shaping, the heating nozzle component (5) is closed, and the exhaust component (7) and the vacuum pump component (8) are opened. After the temperature inside the device operating layer (2) is completely reduced, the target material is taken out by a tool, and the target material is subjected to multiple cold rolling treatments. After the treatment, the target material is placed inside the device operating layer (2), and steps 3 and 5 are repeated again, so that the target material can be heated to 250-450°C, and then the heat preservation treatment is carried out to obtain a high-purity copper target material; Step 7: The surface of the processed high-purity copper target is uneven after forging and needs to be fine-processed. After the internal cooling of the device operating layer (2), the glass baffle on the front side of the device operating layer (2) can be opened, and then the processing connection component (13) in the middle of the connecting ring (1301) is fixed by rotating the bottom end of the air pressure drive component (12), and then the sawtooth block inside the processing connection component (13) drives the inner connecting gear (1302) to rotate, so that the worm gear in the middle of the connecting gear (1302) is The worm gear of the worm gear group (1303) rotates, and the worm gear of the worm gear group (1303) drives the engaging threaded rod (1304) to rotate through the threaded structure so that the engaging threaded rod (1304) can be engaged with the connecting groove at the bottom end of the stamped connecting rod (1201) on the inner side of the fixed connecting ring (1301) and the pneumatic drive component (12), so as to replace the stamped shaping component (6) with the positioning disc (14) to position the target material, and at the same time, the target material is bound and welded to the back plate after the correction sandblasting.

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