Heating device for preparing thermal barrier coating through electron beam physical vapor deposition (EB-PVD)

Abstract

The invention relates to the technical field of electron beam preparation, and discloses a heating device for preparing a thermal barrier coating through electron beam physical vapor deposition (EB-PVD). The heating device comprises a fixing frame, a heating chamber is fixedly installed at the top of the fixing frame, an air suction pump is fixedly installed at the top of the heating chamber, and an air suction pipe is arranged on the outer side of the air suction pump; a sealing block is fixedly installed at the other end of the air suction pipe, and a transfer box is fixedly installed on the outer side of the air suction pump. According to the heating device for preparing the thermal barrier coating through electron beam physical vapor deposition (EB-PVD), when a second screw rod rotates, due to the fact that a fixing plate is in threaded connection with the second screw rod and a sliding block is in sliding connection with a sliding rail, rotation of the fixing plate can be limited, the fixing plate can move in the axial direction of the second screw rod, and when a crucible is not placed in the fixing plate, the crucible can be conveniently taken out; and meanwhile, electric control can be adopted, so that the front and back positions of the crucible in the heating chamber are realized, and the heating process is better controlled.

Description

Technical Field

[0001] The invention relates to the technical field of electron beam preparation, in particular to a heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD). Background Art

[0002] With the rapid development of modern aerospace, energy and other fields, the performance requirements for high-temperature components are getting higher and higher. Thermal barrier coatings, as an important high-temperature protection technology, can effectively increase the working temperature of high-temperature components, reduce thermal stress, and extend service life. Electron beam physical vapor deposition (EB-PVD) is an advanced thermal barrier coating preparation technology with the advantages of high coating quality, good bonding strength, and the ability to prepare coatings with complex shapes. The EB-PVD process needs to be carried out within a specific temperature range to ensure the quality and performance of the coating. In order to ensure its quality and performance, a heating device is often used. The heating device can accurately control the temperature of the deposition area to meet the requirements of coating growth. The appropriate temperature can promote the evaporation and deposition of the coating material, improve the density and bonding strength of the coating, and at the same time, it can also control the crystallinity and microstructure of the coating, thereby improving the thermal physical properties of the coating.

[0003] In the prior art, although the heating of electron beam physical vapor deposition can be achieved, it is not convenient to adjust the front and rear position of the crucible in the heating chamber before or after processing. It is not only inconvenient to quickly remove the crucible, but also easy to be blocked by the heating component. It is not convenient to remove the crucible. In addition, in the current technology, no clamping component is designed, and the crucible is easy to move or shake during the heating process, and it is impossible to ensure the stability of the preparation process of the thermal barrier coating. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a heating device for preparing thermal barrier coatings by electron beam physical vapor deposition (EB-PVD), which can effectively solve the problem in the prior art that it is inconvenient to adjust the front and rear position of the crucible in the heating chamber before or after processing, which is not only inconvenient to quickly remove the crucible, but also easy to be blocked by the heating component, making it inconvenient to remove the crucible. In addition, in the current technology, no clamping component is designed, and the crucible is prone to move or shake during the heating process, making it impossible to ensure the stable preparation process of the thermal barrier coating.

[0005] The technical solution adopted by the present invention is: a heating device for preparing thermal barrier coatings by electron beam physical vapor deposition, comprising a fixed frame, a heating chamber is fixedly installed on the top of the fixed frame, an exhaust pump is fixedly installed on the top of the heating chamber, an exhaust pipe is arranged on the outside of the exhaust pump, a sealing block is fixedly installed on the other end of the exhaust pipe, a transfer box is fixedly installed on the outside of the exhaust pump, an exhaust pipe is arranged on the outside of the transfer box, a hinge is fixedly installed on the front side of the heating chamber, a rotating door is fixedly installed on the other end of the hinge, a handle is fixedly installed on the front side of the rotating door, a temperature monitor is fixedly installed on the outside of the heating chamber, a monitoring probe is fixedly installed on the outside of the temperature monitor, a moving component is fixedly installed on the inside of the heating chamber, a crucible is arranged on the inside of the moving component, a heating component is fixedly installed inside the heating chamber, a support column is fixedly installed on the top of the fixed frame, and a control switch is fixedly installed on the top of the support column; The moving assembly includes a slide rail and a screw rod 2, a slide block is slidably connected to the top of the slide rail, a fixed plate is fixedly installed on the top of the slide block, a baffle is fixedly installed on the top of the fixed plate, a screw rod 1 is threadedly connected to the outer side of the baffle, a rotating wheel 1 is fixedly installed on the other end of the screw rod 1, a sliding column is fixedly installed on the outer side of the baffle, a limited block is slidably connected to the outer side of the sliding column, a rotating wheel 2 is fixedly installed on the outer side of the screw rod 2, and a slot is provided on the top of the limit block; The heating assembly comprises a mounting plate, a fixing seat is fixedly mounted on the top of the mounting plate, a connecting block is fixedly mounted on the top of the fixing seat, a rotating column is rotatably mounted on the outer side of the connecting block, an evaporation electron gun is fixedly mounted on the top of the rotating column, and a heating head is fixedly mounted on the bottom of the evaporation electron gun.

[0006] Preferably, the vacuum pump, vacuum pipe, sealing block, transfer box and exhaust pipe are connected, the other end of the sealing block is fixedly installed with the heating chamber, and the sealing block is made of rubber material.

[0007] Through the above technical scheme, through the cooperation of the vacuum pump, the vacuum pipe, the sealing block, the transfer box and the exhaust pipe, when in use, the vacuum pump draws out the air in the heating chamber through the vacuum pipe and the sealing block, and discharges it through the exhaust pipe after passing through the transfer box, which can create a high vacuum environment in the heating chamber, which is beneficial to the electron beam physical vapor deposition process and avoids the impurities in the air from having an adverse effect on the quality of the thermal barrier coating.

[0008] Preferably, the heating chamber and the rotating door are made of heat-insulating materials, the rotating door is rotatably mounted with the heating chamber via hinges, and the control switch, vacuum pump, heating assembly, and temperature monitor are electrically connected.

[0009] Through the above technical scheme, through the design of the rotating door, the rotating door is rotatably installed with the heating chamber through hinges, and the crucible and other components can be placed in or taken out by opening the rotating door. The heating chamber and the rotating door are made of heat-insulating materials, which can effectively reduce heat loss and reduce energy consumption. At the same time, it is convenient to operate and improve work efficiency. It can also increase the service life of the heating chamber and the rotating door, avoid excessive internal temperature, which may cause the heating chamber and the rotating door to be easily damaged, and the vacuum pump, heating component, and temperature monitor can be opened and closed by controlling the switch.

[0010] Preferably, two of the temperature monitors and monitoring probes are provided, and the two temperature monitors and monitoring probes are respectively located on both sides of the heating chamber, and the two monitoring probes both penetrate the heating chamber and extend to the inner side thereof.

[0011] Through the above technical solution, the temperature in the heating chamber is monitored in real time by the temperature monitor through the monitoring probe. The two temperature monitors and monitoring probes are located on both sides of the heating chamber respectively, which can monitor the temperature more accurately, provide data support for precise control of the heating process, and ensure the stable quality of the thermal barrier coating.

[0012] Preferably, the slide rail and the slider are slidably connected, the fixed plate and the second screw are threadedly connected, the length of the slider is shorter than the length of the slide rail, the other end of the second screw is rotatably connected to the heating chamber, and the outer side of the slide rail and the inner wall of the heating chamber are fixedly installed.

[0013] Through the above technical solution, when the second screw rotates, since the fixed plate is threadedly connected to the second screw and the slider is slidably connected to the slide rail, the rotation of the fixed plate can be limited, so that the fixed plate moves along the axial direction of the second screw. When the crucible is not placed, the crucible can be easily moved out and kept away from the heating component. At the same time, electric control can also be used to realize the front and rear position of the crucible in the heating chamber, so as to better control the heating process.

[0014] Preferably, the limit block is matched with the sliding column, the limit block is threadedly connected with the second screw, the slot is matched with the crucible, and the cross section of the slot is a "C"-shaped structure.

[0015] Through the above technical solution, when the screw rod 2 is rotated, the limit block will move along the axial direction of the screw rod 2 because the limit block is threadedly connected to the screw rod 2. At the same time, the limit block is matched with the sliding column, and the sliding column plays a guiding role to ensure the stability of the movement of the limit block. When the two limit blocks are close to each other, the "C"-shaped slot will gradually clamp the crucible, which can firmly fix the crucible to prevent the crucible from moving or shaking during the heating process, thereby ensuring the stable preparation process of the thermal barrier coating. The matching slot and crucible can fit better, improve the clamping effect, and further enhance the reliability of the device.

[0016] Preferably, the screw rod 1, the rotating wheel 1, the sliding column and the limiting block are provided in two identical ones, and the two screw rods 1, the rotating wheel 1, the sliding column and the limiting block are symmetrically distributed about the center line of the fixed plate.

[0017] Through the above technical solution, through the design of two screws, a rotating wheel, a sliding column and a limit block, when clamping the crucible, force can be applied from both sides at the same time, so that the clamping force is more evenly distributed on the crucible, ensuring that the crucible is firmly fixed in the slot of the limit block, and can effectively prevent the crucible from shifting or shaking due to uneven force during the heating process, thereby ensuring the stability and reliability of the thermal barrier coating preparation process, and the symmetrical distribution makes the operation more balanced and stable, whether it is adjusting the clamping degree or performing other operations, the force and direction can be better controlled, and the accuracy and efficiency of the operation can be improved.

[0018] Preferably, the mounting plate is located inside the heating chamber, the mounting plate and the fixing seat are fixedly mounted by bolts, the evaporation electron gun is rotatably mounted by a rotating column and a connecting block, and the heating head is located on top of the limiting block.

[0019] Through the above technical solution, the mounting plate is located inside the heating chamber, so that the evaporation electron gun can be closer to the heated crucible, reducing heat loss and improving heating efficiency. The mounting plate is fixed by bolts, and this connection method is firm and reliable, which can ensure that the position of the evaporation electron gun is stable during the heating process and will not be offset due to vibration or other external forces, which helps to maintain the uniformity and stability of heating. The evaporation electron gun is rotatably mounted through the rotating column and the connecting block, so that the heating head can flexibly adjust the angle. When not in use, the evaporation electron gun can be rotated to prevent fooling around.

[0020] Preferably, the fixing seat, the evaporation electron gun, the rotating column and the connecting block are provided in equal numbers, and the four fixing seats, the evaporation electron gun, the rotating column and the connecting block are arranged to be equidistantly distributed.

[0021] Through the above technical solution, through the design of four fixed seats, evaporation electron guns, rotating columns and connecting blocks, more powerful heating power can be provided, the evaporation rate of the material in the crucible can be accelerated, and the preparation efficiency of the thermal barrier coating can be improved. The equidistant distribution design makes the heating more uniform. The four evaporation electron guns heat the crucible from different angles, which can ensure that all parts of the material in the crucible can receive uniform heat, reduce the adverse effects caused by temperature differences, and can improve the density and uniformity of the thermal barrier coating and enhance its performance.

[0022] Compared with the prior art, the present invention provides a heating device for preparing thermal barrier coatings by electron beam physical vapor deposition (EB-PVD), which has the following beneficial effects: 1. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) can limit the rotation of the fixed plate when the screw rod 2 rotates because the fixed plate is threadedly connected to the screw rod 2 and the slider is slidably connected to the slide rail, so that the fixed plate moves along the axial direction of the screw rod 2. When the crucible is not placed, the crucible can be easily transferred out to keep the crucible away from the heating component. At the same time, electric control can be adopted to realize the front and rear positions of the crucible in the heating chamber, so as to better control the heating process. 2. This heating device used for preparing thermal barrier coatings by electron beam physical vapor deposition (EB-PVD), when the screw rod 2 is rotated, the limit block will move along the axial direction of the screw rod 2 because the limit block is threadedly connected to the screw rod 2. At the same time, the limit block is matched with the sliding column, and the sliding column plays a guiding role to ensure the stability of the movement of the limit block. When the two limit blocks are close to each other, the "C"-shaped slot will gradually clamp the crucible, which can firmly fix the crucible to prevent the crucible from moving or shaking during the heating process, thereby ensuring the stable preparation process of the thermal barrier coating. The matching slot and crucible can fit better, improve the clamping effect, and further enhance the reliability of the device; 3. The heating device used for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) can provide stronger heating power through the design of fixed seat, evaporation electron gun, rotating column and connecting block, accelerate the evaporation rate of the material in the crucible, and improve the preparation efficiency of thermal barrier coating. The equidistant distribution design makes the heating more uniform. The four evaporation electron guns heat the crucible from different angles, which can ensure that all parts of the material in the crucible can receive uniform heat, reduce the adverse effects caused by temperature differences, and improve the density and uniformity of the thermal barrier coating, thereby enhancing its performance; 4. The heating device used for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) has a rotating door design. The rotating door is rotatably installed with the heating chamber through hinges. The crucible and other components can be placed in or taken out by opening the rotating door. The heating chamber and the rotating door are made of heat-insulating materials, which can effectively reduce heat loss and energy consumption. At the same time, it is convenient to operate and improve work efficiency. It can also increase the service life of the heating chamber and the rotating door, and avoid excessive internal temperature, which may cause the heating chamber and the rotating door to be easily damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 It is a schematic diagram of the rotating structure of the rotating door of the present invention; Figure 3 This is a schematic diagram of the split structure of the temperature monitor of the present invention; Figure 4 This is a schematic diagram of the split structure of the heating chamber and the vacuum pump of the present invention; Figure 5This is a schematic diagram of the installation structure of the heating chamber and the moving assembly of the present invention; Figure 6 Schematic diagram of the split structure of the moving component and the heating component of the present invention Figure 1 ; Figure 7 Schematic diagram of the split structure of the moving component and the heating component of the present invention Figure 2 ; Figure 8 Schematic diagram of the three-dimensional structure of the moving component and the heating component of the present invention Figure 1 ; Fig. 9 Schematic diagram of the three-dimensional structure of the moving component and the heating component of the present invention Figure 2 .

[0024] Wherein: 1. fixed frame; 2. heating chamber; 3. vacuum pump; 4. vacuum pipe; 5. sealing block; 6. transfer box; 7. exhaust pipe; 8. hinge; 9. rotating door; 10. handle; 11. temperature monitor; 12. monitoring probe; 13. moving assembly; 1301. slide rail; 1302. slider; 1303. fixed plate; 1304. baffle; 1305. screw rod one; 1306. rotating wheel one; 1307. sliding column; 1308. limit block; 1309. screw rod two; 1310. rotating wheel two; 1311. slot; 14. crucible; 15. heating assembly; 1501. mounting plate; 1502. fixing seat; 1503. connecting block; 1504. rotating column; 1505. evaporation electron gun; 1506. heating head; 16. supporting column; 17. control switch. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] Embodiment 1: Figure 1-9As shown, a heating device for preparing a thermal barrier coating by electron beam physical vapor deposition EB-PVD provided by the present invention comprises a fixed frame 1, a heating chamber 2 is fixedly installed on the top of the fixed frame 1, an exhaust pump 3 is fixedly installed on the top of the heating chamber 2, an exhaust pipe 4 is arranged on the outside of the exhaust pump 3, a sealing block 5 is fixedly installed on the other end of the exhaust pipe 4, a transfer box 6 is fixedly installed on the outside of the exhaust pump 3, an exhaust pipe 7 is arranged on the outside of the transfer box 6, a hinge 8 is fixedly installed on the front side of the heating chamber 2, a rotating door 9 is fixedly installed on the other end of the hinge 8, a handle 10 is fixedly installed on the front side of the rotating door 9, a temperature monitor 11 is fixedly installed on the outside of the heating chamber 2, a monitoring probe 12 is fixedly installed on the outside of the temperature monitor 11, a moving component 13 is fixedly installed on the inside of the heating chamber 2, a crucible 14 is arranged on the inside of the moving component 13, a heating component 15 is fixedly installed inside the heating chamber 2, a support column 16 is fixedly installed on the top of the fixed frame 1, and a control switch 17 is fixedly installed on the top of the support column 16; The moving assembly 13 includes a slide rail 1301 and a second screw rod 1309, the top of the slide rail 1301 is slidably connected with a slider 1302, the top of the slider 1302 is fixedly installed with a fixed plate 1303, the top of the fixed plate 1303 is fixedly installed with a baffle 1304, the outer side of the baffle 1304 is threadedly connected with a screw rod 1305, the other end of the screw rod 1305 is fixedly installed with a rotating wheel 1306, the outer side of the baffle 1304 is fixedly installed with a sliding column 1307, the outer side of the sliding column 1307 is slidably connected with a limiting block 1308, the outer side of the screw rod 1309 is fixedly installed with a rotating wheel 2 1310, and the top of the limiting block 1308 is provided with a slot 1311; The heating assembly 15 includes a mounting plate 1501, a fixing seat 1502 is fixedly mounted on the top of the mounting plate 1501, a connecting block 1503 is fixedly mounted on the top of the fixing seat 1502, a rotating column 1504 is rotatably mounted on the outer side of the connecting block 1503, an evaporation electron gun 1505 is fixedly mounted on the top of the rotating column 1504, and a heating head 1506 is fixedly mounted on the bottom of the evaporation electron gun 1505.

[0027] Specifically, the vacuum pump 3, the vacuum pipe 4, the sealing block 5, the transfer box 6 and the exhaust pipe 7 are connected, and the other end of the sealing block 5 is fixedly installed on the heating chamber 2. The sealing block 5 is made of rubber material. The advantage is that through the cooperation of the vacuum pump 3, the vacuum pipe 4, the sealing block 5, the transfer box 6 and the exhaust pipe 7, when in use, the vacuum pump 3 extracts the air in the heating chamber 2 through the vacuum pipe 4 and the sealing block 5, and discharges it through the exhaust pipe 7 after passing through the transfer box 6, which can create a high vacuum environment in the heating chamber 2, which is conducive to the electron beam physical vapor deposition process and avoids the impurities in the air from having an adverse effect on the quality of the thermal barrier coating.

[0028] Specifically, the heating chamber 2 and the rotating door 9 are made of heat-insulating materials, and the rotating door 9 is rotatably installed with the heating chamber 2 through the hinge 8. The control switch 17, the vacuum pump 3, the heating component 15, and the temperature monitor 11 are electrically connected. The advantage is that through the design of the rotating door 9, the rotating door 9 is rotatably installed with the heating chamber 2 through the hinge 8. The crucible 14 and other components can be placed in or taken out by opening the rotating door 9. The heating chamber 2 and the rotating door 9 are made of heat-insulating materials, which can effectively reduce heat loss and reduce energy consumption. At the same time, it is convenient to operate and improve work efficiency. It can also increase the service life of the heating chamber 2 and the rotating door 9, avoid excessive internal temperature, which may cause the heating chamber 2 and the rotating door 9 to be easily damaged, and the vacuum pump 3, the heating component 15, and the temperature monitor 11 can be opened and closed by the control switch 17.

[0029] Embodiment 2: Figure 2-9 As shown, as an improvement to the previous embodiment.

[0030] Specifically, two identical temperature monitors 11 and monitoring probes 12 are provided, and the two temperature monitors 11 and monitoring probes 12 are respectively located on both sides of the heating chamber 2. The two monitoring probes 12 both penetrate the heating chamber 2 and extend to the inner side thereof. The advantage is that the temperature in the heating chamber 2 can be monitored in real time by the temperature monitor 11 through the monitoring probe 12. The two temperature monitors 11 and monitoring probes 12 are respectively located on both sides of the heating chamber 2, which can monitor the temperature more accurately, provide data support for the precise control of the heating process, and ensure the stable quality of the thermal barrier coating.

[0031] Specifically, the slide rail 1301 and the slider 1302 are slidably connected, the fixed plate 1303 and the second screw 1309 are threadedly connected, the length of the slider 1302 is shorter than the length of the slide rail 1301, the other end of the second screw 1309 is rotatably connected to the heating chamber 2, and the outer side of the slide rail 1301 and the inner wall of the heating chamber 2 are fixedly installed. The advantage is that when the second screw 1309 rotates, since the fixed plate 1303 and the second screw 1309 are threadedly connected, and the slider 1302 and the slide rail 1301 are slidably connected, the rotation of the fixed plate 1303 can be limited, so that the fixed plate 1303 moves along the axial direction of the second screw 1309. When the crucible 14 is not placed, the crucible 14 can be easily called out, so that the crucible 14 is away from the heating assembly 15. At the same time, electrical control can also be used to realize the front and rear positions of the crucible 14 in the heating chamber 2, so as to better control the heating process.

[0032] Specifically, the limit block 1308 is matched with the sliding column 1307, the limit block 1308 is threadedly connected to the screw rod 1309, the slot 1311 is matched with the crucible 14, and the cross-section of the slot 1311 is a "C"-shaped structure. The advantage is that when the screw rod 1309 is rotated, since the limit block 1308 is threadedly connected to the screw rod 1309, the limit block 1308 will move along the axial direction of the screw rod 1309. At the same time, the limit block 1308 is matched with the sliding column 1307, and the sliding column 1307 plays a guiding role to ensure the stability of the movement of the limit block 1308. When the two limit blocks 1308 are close to each other, the "C"-shaped slot 1311 will gradually clamp the crucible 14, which can firmly fix the crucible 14 and prevent the crucible 14 from moving or shaking during the heating process, thereby ensuring that the preparation process of the thermal barrier coating is carried out stably. The matching slot 1311 and crucible 14 can fit better, improve the clamping effect, and further enhance the reliability of the device.

[0033] Embodiment 2: Figure 2-9 As shown, as an improvement to the previous embodiment.

[0034] Specifically, the screw rod 1305, the rotating wheel 1306, the sliding column 1307 and the limit block 1308 are provided with the same two, and the two screw rods 1305, the rotating wheel 1306, the sliding column 1307 and the limit block 1308 are symmetrically distributed about the center line of the fixed plate 1303. The advantage is that, through the design of the two screw rods 1305, the rotating wheel 1306, the sliding column 1307 and the limit block 1308, when clamping the crucible 14, force can be applied from both sides at the same time, so that the clamping force is more evenly distributed on the crucible 14, ensuring that the crucible 14 is firmly fixed in the slot 1311 of the limit block 1308, which can effectively prevent the crucible 14 from deflecting or shaking due to uneven force during the heating process, ensuring the stability and reliability of the thermal barrier coating preparation process, and the symmetrical distribution makes the operation more balanced and stable, whether it is adjusting the clamping degree or performing other operations, the force and direction can be better controlled, and the accuracy and efficiency of the operation are improved.

[0035] Specifically, the mounting plate 1501 is located inside the heating chamber 2, the mounting plate 1501 and the fixing seat 1502 are fixedly installed by bolts, the evaporation electron gun 1505 is rotatably installed by the rotating column 1504 and the connecting block 1503, and the heating head 1506 is located on the top of the limit block 1308. The advantage is that the mounting plate 1501 is located inside the heating chamber 2, so that the evaporation electron gun 1505 can be closer to the heated crucible 14, reducing heat loss and improving heating efficiency. In addition, the mounting plate 1501 is fixedly installed by bolts, and this connection method is firm and reliable, which can ensure that the position of the evaporation electron gun 1505 is stable during the heating process and will not be offset due to vibration or other external forces, which helps to maintain the uniformity and stability of heating. In addition, the evaporation electron gun 1505 is rotatably installed by the rotating column 1504 and the connecting block 1503, so that the heating head 1506 can be flexibly adjusted in angle. When not in use, the evaporation electron gun 1505 can be rotated to play a fool-proof role.

[0036] Specifically, the fixed seat 1502, the evaporation electron gun 1505, the rotating column 1504 and the connecting block 1503 are provided with the same four, and the four fixed seats 1502, the evaporation electron gun 1505, the rotating column 1504 and the connecting block 1503 are arranged in an equidistant distribution. The advantage is that through the design of the four fixed seats 1502, the evaporation electron gun 1505, the rotating column 1504 and the connecting block 1503, a more powerful heating power can be provided, the evaporation rate of the material in the crucible 14 can be accelerated, and the preparation efficiency of the thermal barrier coating can be improved. The equidistant distribution design makes the heating more uniform. The four evaporation electron guns 1505 heat the crucible 14 from different angles, which can ensure that all parts of the material in the crucible 14 can be subjected to uniform heat, reduce the adverse effects caused by temperature differences, and can improve the density and uniformity of the thermal barrier coating and enhance its performance.

[0037] Working principle: When in use, through the cooperation of the vacuum pump 3, the vacuum pipe 4, the sealing block 5, the transfer box 6 and the exhaust pipe 7, when in use, the vacuum pump 3 extracts the air in the heating chamber 2 through the vacuum pipe 4 and the sealing block 5, and then exhausts it through the transfer box 6 and the exhaust pipe 7, which can create a high vacuum environment in the heating chamber 2, which is conducive to the electron beam physical vapor deposition process and avoids the impurities in the air from having a bad effect on the quality of the thermal barrier coating. Through the design of the rotating door 9, the rotating door 9 is rotatably installed with the heating chamber 2 through the hinge 8, and the door is opened. The rotating door 9 can be used to put in or take out the crucible 14 and other components, and the heating chamber 2 and the rotating door 9 are made of heat-insulating materials, which can effectively reduce heat loss and energy consumption, and are convenient to operate and improve work efficiency. It can also increase the service life of the heating chamber 2 and the rotating door 9, and avoid excessive internal temperature, which may cause the heating chamber 2 and the rotating door 9 to be easily damaged. The vacuum pump 3, the heating component 15, and the temperature monitor 11 can be turned on and off by the control switch 17, and the temperature of the heating chamber can be monitored in real time by the temperature monitor 11 through the monitoring probe 12. 2, two temperature monitors 11 and monitoring probes 12 are respectively located on both sides of the heating chamber 2, which can monitor the temperature more accurately, provide data support for accurately controlling the heating process, and ensure the quality stability of the thermal barrier coating. When the screw rod 1309 rotates, since the fixed plate 1303 and the screw rod 1309 are threadedly connected, and the slider 1302 and the slide rail 1301 are slidably connected, the rotation of the fixed plate 1303 can be limited, so that the fixed plate 1303 moves along the axial direction of the screw rod 1309. When the crucible 14 is not placed , the crucible 14 can be easily brought out, so that the crucible 14 is away from the heating assembly 15, and electric control can also be used to realize the front and rear positions of the crucible 14 in the heating chamber 2, so as to better control the heating process. When the screw rod 1309 is rotated, since the limit block 1308 is threadedly connected to the screw rod 1309, the limit block 1308 will move along the axial direction of the screw rod 1309. At the same time, the limit block 1308 is adapted to the sliding column 1307, and the sliding column 1307 plays a guiding role to ensure the stability of the movement of the limit block 1308.When the two limit blocks 1308 are close to each other, the "C"-shaped slot 1311 will gradually clamp the crucible 14, which can firmly fix the crucible 14 to prevent the crucible 14 from moving or shaking during the heating process, thereby ensuring the stable preparation process of the thermal barrier coating. The matching slot 1311 and the crucible 14 can fit better, improve the clamping effect, and further enhance the reliability of the device. Through the design of the two screws 1305, the rotating wheel 1306, the sliding column 1307 and the limit block 1308, when clamping the crucible 14, force can be applied from both sides at the same time. The clamping force is more evenly distributed on the crucible 14, ensuring that the crucible 14 is firmly fixed in the slot 1311 of the limit block 1308, which can effectively prevent the crucible 14 from deflecting or shaking due to uneven force during the heating process, ensuring the stability and reliability of the thermal barrier coating preparation process, and the symmetrical distribution makes the operation more balanced and stable. Whether adjusting the clamping degree or performing other operations, the force and direction can be better controlled, and the accuracy and efficiency of the operation are improved. The mounting plate 1501 is located inside the heating chamber 2 , which can make the evaporation electron gun 1505 closer to the heated crucible 14, reduce heat loss, and improve heating efficiency. It is fixed and installed by bolts. This connection method is firm and reliable, which can ensure that the position of the evaporation electron gun 1505 is stable during the heating process and will not be offset due to vibration or other external forces, which helps to maintain the uniformity and stability of heating. The evaporation electron gun 1505 is rotatably installed through the rotating column 1504 and the connecting block 1503, so that the heating head 1506 can be flexibly adjusted in angle. When not in use, the evaporation electron gun 1505 can be rotated to prevent fooling around. Through the design of four fixed seats 1502, the evaporation electron gun 1505, the rotating column 1504 and the connecting block 1503, a more powerful heating power can be provided, the evaporation rate of the material in the crucible 14 can be accelerated, and the preparation efficiency of the thermal barrier coating can be improved. The equidistant distribution design makes the heating more uniform. The four evaporation electron guns 1505 heat the crucible 14 from different angles, which can ensure that all parts of the material in the crucible 14 can receive uniform heat.

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD), comprising a fixing frame (1), characterized in that: A heating chamber (2) is fixedly mounted on the top of the fixed frame (1), an air extraction pump (3) is fixedly mounted on the top of the heating chamber (2), an air extraction pipe (4) is arranged outside the air extraction pump (3), a sealing block (5) is fixedly mounted on the other end of the air extraction pipe (4), a transfer box (6) is fixedly mounted outside the air extraction pump (3), an exhaust pipe (7) is arranged outside the transfer box (6), a hinge (8) is fixedly mounted on the front side of the heating chamber (2), a rotating door (9) is fixedly mounted on the other end of the hinge (8), and the rotating door (9) A handle (10) is fixedly mounted on the front side, a temperature monitor (11) is fixedly mounted on the outside of the heating chamber (2), a monitoring probe (12) is fixedly mounted on the outside of the temperature monitor (11), a moving component (13) is fixedly mounted on the inside of the heating chamber (2), a crucible (14) is arranged on the inside of the moving component (13), a heating component (15) is fixedly mounted inside the heating chamber (2), a support column (16) is fixedly mounted on the top of the fixed frame (1), and a control switch (17) is fixedly mounted on the top of the support column (16); The moving assembly (13) comprises a slide rail (1301) and a second screw rod (1309); the top of the slide rail (1301) is slidably connected to a slider (1302); the top of the slider (1302) is fixedly mounted with a fixing plate (1303); the top of the fixing plate (1303) is fixedly mounted with a baffle (1304); the outer side of the baffle (1304) is threadedly connected to a first screw rod (1305); the other end of the first screw rod (1305) is fixedly mounted with a first rotating wheel (1306); the outer side of the baffle (1304) is fixedly mounted with a sliding column (1307); the outer side of the sliding column (1307) is slidably connected to a limiting block (1308); the outer side of the second screw rod (1309) is fixedly mounted with a second rotating wheel (1310); and the top of the limiting block (1308) is provided with a slot (1311); The heating component (15) comprises a mounting plate (1501), a fixing seat (1502) is fixedly mounted on the top of the mounting plate (1501), a connecting block (1503) is fixedly mounted on the top of the fixing seat (1502), a rotating column (1504) is rotatably mounted on the outside of the connecting block (1503), an evaporation electron gun (1505) is fixedly mounted on the top of the rotating column (1504), and a heating head (1506) is fixedly mounted on the bottom of the evaporation electron gun (1505).

2. A heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 1, characterized in that: The vacuum pump (3), the vacuum pipe (4), the sealing block (5), the transfer box (6) and the exhaust pipe (7) are connected to each other. The other end of the sealing block (5) is fixedly mounted on the heating chamber (2). The sealing block (5) is made of rubber material.

3. A heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 2, characterized in that: The heating chamber (2) and the rotating door (9) are made of heat-insulating materials; the rotating door (9) is rotatably mounted on the heating chamber (2) via a hinge (8); and the control switch (17), the vacuum pump (3), the heating component (15), and the temperature monitor (11) are electrically connected.

4. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 3, characterized in that: Two identical temperature monitors (11) and monitoring probes (12) are provided, and the two temperature monitors (11) and monitoring probes (12) are respectively located on both sides of the heating chamber (2), and the two monitoring probes (12) both penetrate the heating chamber (2) and extend to the inside thereof.

5. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 4, characterized in that: The slide rail (1301) and the slider (1302) are slidably connected, the fixed plate (1303) and the second screw rod (1309) are threadedly connected, the length of the slider (1302) is shorter than the length of the slide rail (1301), the other end of the second screw rod (1309) is rotationally connected to the heating chamber (2), and the outer side of the slide rail (1301) and the inner wall of the heating chamber (2) are fixedly installed.

6. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 5, characterized in that: The limit block (1308) is matched with the sliding column (1307), the limit block (1308) is threadedly connected with the second screw rod (1309), the clamping groove (1311) is matched with the crucible (14), and the cross section of the clamping groove (1311) is a "C"-shaped structure.

7. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 6, characterized in that: The screw rod 1 (1305), the rotating wheel 1 (1306), the sliding column (1307) and the limiting block (1308) are provided in two identical ones, and the two screw rods 1 (1305), the rotating wheel 1 (1306), the sliding column (1307) and the limiting block (1308) are symmetrically distributed about the center line of the fixed plate (1303).

8. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 7, characterized in that: The mounting plate (1501) is located inside the heating chamber (2); the mounting plate (1501) and the fixing seat (1502) are fixedly mounted by bolts; the evaporation electron gun (1505) is rotatably mounted via a rotating column (1504) and a connecting block (1503); the heating head (1506) is located on top of the limiting block (1308); and the fixing seat (1502), the evaporation electron gun (1505), the rotating column (1504) and the connecting block (1503) are provided in equal numbers, and the four fixing seats (1502), the evaporation electron gun (1505), the rotating column (1504) and the connecting block (1503) are arranged to be equidistantly distributed.

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