Spray head deformation condition monitoring device and method

Abstract

The invention discloses a device and a method for monitoring the deformation condition of a spray header. The method comprises the following steps: processing a first pressure signal fed back by a spray surface of a to-be-detected spray header in an installation state under the action of an elastic extrusion force; and comparing a first pressure difference distribution curve obtained by subtracting the obtained first pressure distribution from the reference pressure distribution with a threshold value interval to judge whether the deformation condition of the spraying surface of the to-be-measured spraying head is qualified or not, so that damage-free and pollution-free measurement can be carried out under the condition that the spraying head is not disassembled. Errors caused by manual macroscopic visual inspection judgment can be avoided, and the field fault removal efficiency can be improved, so that the problem of wafer damage is effectively prevented. The device has the advantages of being simple in structure, convenient to manufacture, high in use stability and reliability and capable of being used for a long time, and production benefits are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment maintenance, and in particular to a device and method for monitoring the deformation condition of a shower head. Background Art

[0002] During the semiconductor wafer manufacturing process, the process components in the process chamber all need regular maintenance to ensure the normal condition of the equipment hardware and the stability of the process. Therefore, the inspection items and inspection methods used during regular maintenance are very important for whether the regular maintenance can be successfully completed.

[0003] The shower head is an important component in the chemical vapor deposition equipment. Since the distance between the shower head at the top of the process chamber of the chemical vapor deposition equipment and the heating base below is small, if the shower head is deformed, it is easy for the wafer surface to contact the shower head when it is transferred in the narrow space between the shower head and the heating base in the process chamber, resulting in product defects.

[0004] At present, there is a lack of effective detection means to directly reflect the degree of deformation of the sprinkler head after regular maintenance. When monitoring this through a companion piece without a graphic structure, the companion piece has a hard surface and cannot accurately respond to the slight deformation of the sprinkler head. Therefore, it is still difficult to accurately monitor the deformation of the sprinkler head, and it is impossible to effectively prevent the recurrence of the above abnormalities, so the potential risk is extremely high. Summary of the invention

[0005] The purpose of the present invention is to overcome the above-mentioned defects in the prior art and to provide a device and method for monitoring the deformation condition of a sprinkler head.

[0006] To achieve the above object, the technical solution of the present invention is as follows:

[0007] The present invention provides a sprinkler head deformation condition monitoring device, comprising:

[0008] The pressure detection module comprises a stacked pressure detection portion and a first elastic portion, wherein the first elastic portion is used to contact the spray surface of the spray head to be tested in the installed state with a first surface, and to contact the third surface of the pressure detection portion with a second surface opposite to the first surface, the pressure detection portion is provided with a plurality of pressure detection units densely distributed along the third surface, and the detection surface of the pressure detection unit is in contact with the second surface;

[0009] a driving control module, used for driving the pressure detection module to translate a certain distance toward the spray head to be tested, so that the first surface is completely in contact with the spray surface of the spray head to be tested, so that the pressure detection unit can sense the pressure on the spray surface of the spray head to be tested;

[0010] A data processing module is used to process the first pressure signal output by the pressure detection unit to obtain a first pressure distribution when the spray surface of the spray head to be tested is under pressure, and subtract it from a reference pressure distribution to obtain a first pressure difference distribution curve, which is used to characterize the deformation state of the spray surface of the spray head to be tested, and compare it with a threshold range. When the first pressure difference distribution curve is within the threshold range, it is judged that the deformation condition of the spray surface of the spray head to be tested is qualified; otherwise, it is judged that the deformation condition of the spray surface of the spray head to be tested is abnormal.

[0011] Further, the reference pressure distribution is to replace the spray head to be tested with a standard spray head, so that the pressure detection unit is translated toward the standard spray head by the same distance, the pressure on the spray surface of the standard spray head is sensed and output a reference pressure signal, and the pressure distribution of the spray surface of the standard spray head when it is under pressure is obtained through processing by the data processing module; and / or, the threshold interval is to replace the spray head to be tested with a known poorly deformed spray head, so that the pressure detection unit is translated toward the poorly deformed spray head by the same distance, the pressure on the spray surface of the poorly deformed spray head is sensed and output a second pressure signal, and the second pressure distribution of the spray surface of the poorly deformed spray head when it is under pressure is obtained through processing by the data processing module, and the second pressure distribution is subtracted from the reference pressure distribution to obtain a second pressure difference distribution curve, the maximum value and the minimum value on the second pressure difference distribution curve are collected, and the range between the maximum value and the minimum value is used as the threshold interval.

[0012] Furthermore, the pressure detection unit includes a piezoelectric sensor, and the piezoelectric sensors of each pressure detection unit are densely distributed in an array along the third surface, and are signal-connected to the data processing module.

[0013] Furthermore, it also includes: a fixing module, the fixing module is provided with a base and a cantilever, the pressure detection module is located on the base, the driving control module is provided with a telescopic arm, the telescopic arm is provided between the base and a fourth surface of the pressure detection part opposite to the third surface, the driving control module drives the pressure detection module to move up and down through the telescopic arm, and the cantilever is used to suspend the base on the sprinkler head to be tested, so that the pressure detection module carried on the base is correspondingly located directly below the sprinkler head to be tested.

[0014] Furthermore, the drive control module is connected to the data processing module, and according to the maximum pressure value in the first pressure distribution fed back by the data processing module, the telescopic arm is used to adjust the distance when the pressure detection module moves toward the sprinkler head to be tested, so as to adjust the compression amount of the first elastic part.

[0015] Furthermore, the two cantilevers are symmetrically arranged on both sides of the base in the circumferential direction, and the upper end of each cantilever is clamped with the back side of the shower head to be tested through a fixing portion.

[0016] Furthermore, the fixing portion includes an arc-shaped slot provided on the upper end of the cantilever, the slot being used to form a snap connection with a protruding periphery on the back side of the sprinkler head to be tested, and the slot on one of the cantilevers is fixedly connected to the cantilever on the corresponding side, and the slot on the other cantilever is rotatably connected to the cantilever on the corresponding side.

[0017] Furthermore, a second elastic portion is provided between the base and the pressure detection portion, and / or a third elastic portion is provided on the inner wall of the card slot.

[0018] Further, the first elastic part includes a polyurethane elastic pad, and / or the second elastic part includes a plurality of springs that are evenly arranged, and / or the third elastic part includes a rubber pad.

[0019] Furthermore, the first surface, the second surface and the third surface are contoured to the spraying surface of the standard spray head, and the third surface is a rigid surface.

[0020] The present invention also provides a method for monitoring the deformation condition of a sprinkler head, comprising:

[0021] Acquire a first pressure signal fed back by the spraying surface of the spray head to be tested in the installed state under the action of the elastic extrusion force;

[0022] Processing the first pressure signal to obtain a first pressure distribution on the spray surface of the spray head to be tested, and subtracting the first pressure distribution from a reference pressure distribution to obtain a first pressure difference distribution curve for characterizing a deformation state of the spray surface of the spray head to be tested;

[0023] The first pressure difference distribution curve is compared with a threshold interval, and when the first pressure difference distribution curve is within the threshold interval, the deformation condition of the spray surface of the tested sprinkler head is judged to be qualified, otherwise, the deformation condition of the spray surface of the tested sprinkler head is judged to be abnormal.

[0024] Furthermore, the reference pressure distribution is the pressure distribution on the spraying surface of the standard sprinkler head obtained by replacing the sprinkler head to be tested with a standard sprinkler head under the same conditions.

[0025] Furthermore, the threshold interval is to replace the shower head to be tested with a known poorly deformed shower head, and obtain a second pressure distribution on the shower surface of the poorly deformed shower head under the same conditions, and subtract it from the reference pressure distribution to obtain a second pressure difference distribution curve, collect the maximum and minimum values ​​on the second pressure difference distribution curve, and use the range between the maximum and minimum values ​​as the threshold interval.

[0026] Furthermore, the obtaining of the first pressure signal fed back by the spraying surface of the spray head to be tested in the installed state under the action of the elastic extrusion force specifically includes:

[0027] A first elastic part having a first surface and a second surface opposite to each other, and a pressure detection part having a rigid third surface are provided; the third surface is in contact with the second surface, and a plurality of densely distributed pressure detection units are provided along the third surface;

[0028] The first elastic part is translated toward the installed shower head to be tested by a certain distance, so that the first surface is completely in contact with the shower surface of the shower head to be tested, and an elastic extrusion force is applied to the shower surface of the shower head to be tested;

[0029] The elastic pressure on the spray surface of the spray head to be tested is sensed by the pressure detection unit, and a first pressure signal of the spray surface of the spray head to be tested under the elastic squeezing force is generated and fed back.

[0030] Furthermore, by arranging the pressure detection part and the first elastic part on a base, and suspending the base on the shower head to be tested, and arranging a driving control module between the base and a fourth surface of the pressure detection part opposite to the third surface, the pressure detection module can be driven by the driving control module to translate a certain distance relative to the base toward the shower head to be tested, so that the first surface is completely in contact with the spraying surface of the shower head to be tested.

[0031] Furthermore, a second elastic portion is provided between the base and the fourth surface to dampen the pressure detection portion when the first surface is completely in contact with the spray surface of the shower head to be tested, and a rebound force is applied to the first elastic portion when the drive control module drives the pressure detection module to return after the detection is completed; and / or, a data processing module is provided to process the first pressure signal output by the pressure detection unit to obtain the first pressure difference distribution curve, and compare it with the threshold range, and the drive control module is connected to the data processing module to adjust the distance when the pressure detection module is moved toward the shower head to be tested according to the maximum pressure value in the first pressure distribution fed back by the data processing module, so as to adjust the compression amount of the first elastic portion when it is in contact with the spray surface of the shower head to be tested.

[0032] It can be seen from the above technical scheme that the present invention uses a pressure measurement method to qualitatively monitor the deformation state of the spray surface of the spray head to be tested. The first pressure signal fed back by the spray surface of the spray head to be tested under the action of the elastic extrusion force in the installed state can be processed, and the first pressure difference distribution curve obtained by subtracting the first pressure distribution from the reference pressure distribution can be compared with the threshold interval to determine whether the deformation state of the spray surface of the spray head to be tested is qualified. It can perform damage-free and pollution-free measurements without disassembling the spray head, avoid errors caused by macroscopic visual inspection, and improve the efficiency of on-site troubleshooting, thereby effectively preventing the occurrence of wafer damage problems. The present invention has the advantages of simple structure, convenient manufacture, high stability and reliability in use, and can be used for a long time, thereby improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 The figure is a schematic structural diagram of a device for monitoring the deformation of a shower head according to a preferred embodiment of the present invention.

[0034] Figure 2 The figure is a schematic diagram of the configuration structure of a piezoelectric sensor according to a preferred embodiment of the present invention.

[0035] Figure 3 It is a schematic diagram of performing data analysis on the deformation state of the spraying surface of a spray head to be tested according to a preferred embodiment of the present invention.

[0036] Figure 4 The figure is a flow chart of a method for monitoring the deformation condition of a shower head according to a preferred embodiment of the present invention. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0038] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings.

[0039] refer to Figure 1-Figure 2 The device for monitoring the deformation condition of a shower head of the present invention comprises: a pressure detection module 16 , a drive control module 21 , and a data processing module 19 .

[0040] The pressure detection module 16 includes a first elastic part 17 and a pressure detection part 18 stacked up and down. The first elastic part 17 is used to completely contact the spray surface of the spray head 15 to be tested in the installed state with a first surface, and completely contact the third surface of the pressure detection part 18 with a second surface opposite to the first surface. The pressure detection part 18 is provided with a plurality of pressure detection units 23 densely distributed along the third surface; the detection surface of the pressure detection unit 23 is in contact with the second surface.

[0041] The drive control module 21 is used to drive the pressure detection module 16 to translate a certain height distance H toward the spray head to be tested 15, so that the first surface of the first elastic part 17 is completely in contact with the spray surface of the spray head to be tested 15, and is in a state of squeezing the spray surface of the spray head to be tested 15, so that the pressure detection unit 23 can sense the pressure on the spray surface of the spray head to be tested 15, and generate a first pressure signal to output to the data processing module 19.

[0042] The data processing module 19 is used to process the first pressure signal output by the pressure detection unit 23, obtain the first pressure distribution when the spray surface of the spray head 15 to be tested is under pressure, and subtract it from the reference pressure distribution to obtain the first pressure difference distribution curve. The deformation state of the spray surface of the spray head 15 to be tested is characterized by the first pressure difference distribution curve. The data processing module 19 also compares the first pressure difference distribution curve with the threshold interval. When the first pressure difference distribution curve is within the threshold interval, the deformation state of the spray surface of the spray head 15 to be tested is judged to be qualified; conversely, when the first pressure difference distribution curve is outside the threshold interval, the deformation state of the spray surface of the spray head 15 to be tested is judged to be abnormal.

[0043] The reference pressure distribution may be formed by replacing the spray head 15 to be tested with a standard spray head, and driving the pressure detection module 16 (pressure detection unit 23) to translate the same height distance H to the standard spray head in the installed state through the driving control module 21, so that the first surface of the first elastic part 17 is completely in contact with the spray surface of the standard spray head, and is in a state of squeezing the spray surface of the standard spray head, so that the pressure detection unit 23 senses the pressure on the spray surface of the standard spray head, and generates a reference pressure signal to output to the data processing module 19. Then, the reference pressure signal is processed by the data processing module 19 to obtain the pressure distribution when the spray surface of the standard spray head is under pressure, which is used as the reference pressure distribution.

[0044] The threshold interval can be formed by replacing the spray head 15 to be tested with a known badly deformed spray head after use, and driving the pressure detection module 16 (pressure detection unit 23) to translate the same height distance H to the badly deformed spray head in the installed state through the driving control module 21, so that the first surface of the first elastic part 17 is completely in contact with the spray surface of the badly deformed spray head, and is in a state of squeezing the spray surface of the badly deformed spray head, so that the pressure detection unit 23 senses the pressure on the spray surface of the badly deformed spray head, and generates a second pressure signal to output to the data processing module 19. Then, the second pressure signal is processed by the data processing module 19 to obtain the second pressure distribution when the spray surface of the badly deformed spray head is under pressure, and subtracted from the reference pressure distribution to obtain a second pressure difference distribution curve, collect the maximum value and the minimum value on the second pressure difference distribution curve, and use the range between the maximum value and the minimum value as the threshold interval.

[0045] refer to Figure 3 Combined with reference Figure 1-Figure 2The data processing module 19 can fit the contour map of the spray surface of the spray head 15 to be tested when it is under pressure based on the first pressure distribution obtained by processing, and form a three-dimensional cross-sectional diagram. In this way, by observing the three-dimensional cross-sectional diagram, it can be confirmed whether the spray surface of the spray head 15 to be tested has obvious deformation, and a qualitative analysis of the deformation condition of the spray surface of the spray head 15 to be tested can be achieved. Further, according to the reference pressure distribution and the threshold range, the section where the deformation area is located is pulled from the three-dimensional cross-sectional diagram to make a first pressure difference distribution curve P M The pressure-length curve between the pulling area length, such as Figure 3 As shown, by Figure 3 The first pressure difference distribution curve P M and threshold interval (P U -P L ) is used for comparative calculation to achieve quantitative analysis on the deformation condition of the spray surface of the spray head 15 to be tested, so that the deformation amount of the spray surface of the spray head 15 to be tested can be quantitatively analyzed.

[0046] The above threshold interval can also be obtained by replacing the sprinkler head 15 to be tested with a sprinkler head whose service life is close to the regular maintenance cycle and adopting the same method as above.

[0047] refer to Figure 1-Figure 2 . In some embodiments, the pressure detection unit 23 includes a piezoelectric sensor 231. The piezoelectric sensors 231 of each pressure detection unit 23 are densely distributed in an array along the third surface of the pressure detection module 16. The formed piezoelectric sensor array can be arranged in rows and columns, or the piezoelectric sensors 231 can be arranged in concentric circles to form a plurality of annular piezoelectric sensor arrays, and a central piezoelectric sensor 231 is arranged in the center of the array, so that the other piezoelectric sensors 231 in the array are arranged around the central piezoelectric sensor 231, for sensing and transmitting pressure signals from above. The signals of each piezoelectric sensor 231 in the piezoelectric sensor array are connected to the data processing module 19.

[0048] In some embodiments, the first elastic part 17 includes an elastic pad 171. For example, the elastic pad 171 can be a highly elastic and flexible polyurethane pad with uniform thickness. When the polyurethane pad contacts the spraying surface of the spray head 15 to be tested, it can avoid damaging or contaminating the spraying surface of the spray head 15 to be tested.

[0049] In some embodiments, the data processing module 19 may be a host computer 191. Alternatively, the data processing module 19 may be disposed in the host computer 191.

[0050] In some embodiments, the device also includes a fixing module 10. The fixing module 10 is provided with a base 11 and a cantilever 12; the pressure detection module 16 is suspended on the base 11 to ensure stability during measurement. The driving control module 21 is provided with a telescopic arm 22; the telescopic arm 22 is provided between the base 11 and the fourth surface of the pressure detection part 18 opposite to the third surface, and is located at the center position between the base 11 and the pressure detection part 18. The driving control module 21 drives the pressure detection module 16 to move up and down at a uniform speed through the telescopic arm 22, so that the first elastic part 17 of the pressure detection module 16 translates up and down to ensure the effectiveness and accuracy of the pressure measurement. The cantilever 12 is used to suspend the base 11 on the sprinkler head 15 to be tested, so that the pressure detection module 16 carried on the base 11 is correspondingly located directly below the sprinkler head 15 to be tested.

[0051] In some embodiments, a second elastic part 20 is further provided between the base 11 and the pressure detection part 18. The second elastic part 20 may be, for example, a plurality of high-elasticity shock-absorbing springs 201 evenly arranged between the base 11 and the pressure detection part 18, and is used to generate rebound shock absorption during pressure measurement, to ensure that the signal is uniform without spike interference caused by sudden changes, to ensure that the data has a certain stable collection time, and can also be used for rebound after the measurement is completed.

[0052] In some embodiments, the drive control module 21 is equipped with a dual servo sensing system capable of controlling the movement of the telescopic arm 22. The drive control module 21 is connected to the data processing module 19, and according to the maximum pressure in the first pressure distribution fed back by the data processing module 19, the telescopic arm 22 is used to adjust the height distance H when the pressure detection module 16 moves toward the sprinkler head 15 to be tested, so as to adjust the compression amount of the first elastic part 17. For example, when the first elastic part 17 squeezes the sprinkler head 15 to be tested and a sudden increase in pressure or excessive pressure occurs, information can be fed back through the data processing module 19 to control the movement of the telescopic arm 22 to reduce the pressure, so as to ensure that the sprinkler head 15 to be tested will not be damaged due to excessive force.

[0053] In some embodiments, two cantilevers 12 are symmetrically arranged on two circumferential sides of the base 11 ; the upper end of each cantilever 12 is clamped with the back side of the shower head 15 to be tested via a fixing portion 13 .

[0054] Furthermore, the fixing portion 13 includes an arc-shaped slot 131 provided on the upper end of the cantilever 12, and the slot 131 is used to form a snap connection with the protruding periphery on the back of the spray head 15 (spray head) to be tested. In addition, the slot 131 on one cantilever 12 is fixedly connected to the cantilever 12 on the corresponding side, and the slot 131 on the other cantilever 12 is rotatably connected to the cantilever 12 on the corresponding side, so as to facilitate position adjustment during snap connection.

[0055] In some embodiments, a third elastic portion 14 is disposed on the inner wall of the slot 131. The third elastic portion 14 may be, for example, a rubber pad 141, which can prevent shock and improve measurement accuracy, while preventing particles from falling due to wear or scratches between the slot 131 and the shower head 15 to be tested.

[0056] In some embodiments, the first surface, the second surface and the third surface are contoured with the spray surface of a standard spray head. For example, when the spray surface of a standard spray head is a circular plane, the first surface, the second surface and the third surface are also corresponding circular planes. Further, the third surface is a rigid surface so as to generate uniform pressure on the second surface of the first elastic portion 17.

[0057] A method for monitoring the deformation condition of a shower head of the present invention is further described in detail below through specific implementation modes and in conjunction with the accompanying drawings.

[0058] refer to Figure 4 A method for monitoring the deformation condition of a shower head according to the present invention comprises the following steps:

[0059] Step S1: obtaining a first pressure signal fed back by the spraying surface of the spray head 15 to be tested in the installed state under the action of the elastic squeezing force.

[0060] refer to Figure 1-Figure 2 The above-mentioned shower head deformation condition monitoring device of the present invention can be used to implement a shower head deformation condition monitoring method of the present invention.

[0061] When the process chamber needs to be opened for regular maintenance or troubleshooting, the device is suspended and clamped on the back of the shower head 15 to be tested through the cantilever 12 on the fixed module 10 of the device, and kept stable, so that the base 11 and the pressure detection part 18 and the first elastic part 17 located on the base 11 are located directly below the shower head 15 to be tested and maintain a certain distance.

[0062] Then, the power is turned on, so that the drive control module 21 drives the mechanical telescopic arm 22 to translate upward a certain height distance H, driving the first elastic part 17 (elastic pad 171) to translate the corresponding height distance H toward the installed sprinkler head 15 to be tested, so as to contact the spray surface of the sprinkler head 15 to be tested, and the telescopic arm 22 is operated to press at a uniform speed to apply elastic extrusion force to the spray surface of the sprinkler head 15 to be tested, so that the first surface of the first elastic part 17 is completely in contact with the spray surface of the sprinkler head 15 to be tested. The elastic pressure on the spray surface of the sprinkler head 15 to be tested is sensed by the pressure detection unit 23 (piezoelectric sensor 231), and the first pressure signal of the spray surface of the sprinkler head 15 to be tested under the elastic extrusion force is generated and fed back.

[0063] The above steps can be repeated multiple times (for example, 3 times) to eliminate errors caused by initial instability in the measurement, and the final calculation is performed using the average value.

[0064] Step S2: Process the first pressure signal to obtain a first pressure distribution on the spraying surface of the spray head 15 to be tested, and subtract it from the reference pressure distribution to obtain a first pressure difference distribution curve for characterizing the deformation state of the spraying surface of the spray head 15 to be tested.

[0065] refer to Figure 3 The first pressure signal is collected and processed by the data processing module 19, and a force contour map (three-dimensional cross-sectional map) on the spray surface of the spray head 15 to be tested is fitted. By observing the graph, it can be confirmed whether there is obvious deformation on the spray surface of the spray head 15 to be tested, and a qualitative analysis of the deformation condition of the spray surface of the spray head 15 to be tested is achieved. Further, according to the reference pressure distribution and the threshold range, the section where the deformation area is located is pulled from the three-dimensional cross-sectional map to make a first pressure difference distribution curve P M The pressure-length curve between the pulling area length, such as Figure 3 shown.

[0066] The reference pressure distribution is the pressure distribution (Golden deformation, i.e., P) on the spraying surface of the standard sprinkler head obtained under the same conditions when the sprinkler head 15 to be tested is replaced with a standard sprinkler head (a brand new sprinkler head that meets the standards). base ).

[0067] For example, taking a case where 49 piezoelectric sensors 231 are provided (one of which is the central piezoelectric sensor 231, and the other 48 are arranged around the central piezoelectric sensor 231 to form a plurality of concentric ring arrays), a force contour map (three-dimensional profile map) is generated according to the pressure signals transmitted by the piezoelectric sensors 231 at each point, and a reference pressure distribution P is obtained. base Pull the cross section where the deformation area is located to draw a pressure-length curve, then the first pressure difference distribution curve P M The deformation of each point on the surface is equal to the actual pressure measurement value P at each point M Subtract P base , that is, ΔP=|P M -P base |. Among them, if the spraying surface of the spray head 15 to be tested is convex, then (P M -P base ) is a positive value, otherwise, if it is a concave deformation, then (P M -P base ) is a negative value (the spraying surface of the sprinkler head faces downward).

[0068] Step S3: comparing the first pressure difference distribution curve with the threshold interval, and when the first pressure difference distribution curve is within the threshold interval, judging that the deformation condition of the spray surface of the spray head 15 to be tested is qualified, otherwise, judging that the deformation condition of the spray surface of the spray head 15 to be tested is abnormal.

[0069] like Figure 3 As shown, the reference pressure distribution line P of the data processing module 19 in the pressure-length curve diagram base The upper and lower sides of the threshold interval generate the upper control limit P U and the lower control limit P L , and draw the first pressure difference distribution curve P in the pressure-length curve diagram M , you can pass Figure 3 The first pressure difference distribution curve P M and threshold interval (P U -P L ) is used for comparative calculation, and the deformation condition of the spray surface of the spray head 15 to be tested is quantitatively analyzed, so that the deformation amount of the spray surface of the spray head 15 to be tested can be quantitatively analyzed.

[0070] The threshold interval is the maximum value (upper control limit P) on the second pressure difference distribution curve obtained by replacing the test shower head 15 with the discovered poorly deformed shower head and obtaining the second pressure distribution on the shower surface of the poorly deformed shower head under the same conditions and subtracting it from the reference pressure distribution. U ) and the minimum value (lower control limit P L ) in the range between .

[0071] For example, Figure 3 The first pressure difference distribution curve P formed by intercepting M Some line segments are consistent with the reference pressure distribution line P base coincides or is close to each other, indicating that the spraying surface of the spray head 15 to be tested has not or substantially has not deformed. M There is a positive peak P peak and a negative peak -P peak , and the two peaks have reached the upper control limit P U and the lower control limit P L , indicating that the deformation amount of the corresponding area on the spray surface of the spray head 15 to be tested is too large, which means that the spray head 15 to be tested is in an abnormal state, which may affect the process or cause wafer scratches and needs to be replaced.

[0072] The present invention adopts a piezoelectric sensing measurement method, and forms a piezoelectric elastic pad (pressure detection module 16) by designing a pressure detection part 18 (with piezoelectric sensors 231 evenly distributed inside) and an elastic pad 171 that are similar in shape to the spray surface of the spray head, and covers the spray surface of the spray head 15 to be tested with a clean and flexible elastic pad 171 as a medium. Within a reasonable pressure range, by adjusting the pressure applied, the force of the spray surface of the spray head 15 to be tested on the piezoelectric elastic pad is sensed, and the pressure signal is converted into a digital signal through a data processing module 19 (with a piezoelectric signal processor), and the three-dimensional cross-sectional diagram of the piezoelectric elastic pad is simulated by a computer, and the concave and convex pressure difference is calculated to quantify the deformation degree of the spray surface of the spray head 15 to be tested. Or the degree of matching compared with the three-dimensional cross-sectional curve of the force of the standard / initial spray head before use is used to control the deformation amount of the spray head 15 to be tested. Since the coverage size of the piezoelectric elastic pad is close to the size of the spray surface, it can reflect the overall deformation of the spray head 15 to be tested to the greatest extent.

[0073] Furthermore, by arranging the pressure detection part 18 and the elastic pad 171 on the base 11, suspending the base 11 on the sprinkler head to be tested 15, and arranging a telescopic arm 22 between the base 11 and the pressure detection part 18, the telescopic arm 22 can be driven by the driving control module 21 to drive the pressure detection module 16 to translate toward the sprinkler head to be tested at a certain height distance H relative to the base 11, so that the first surface of the elastic pad 171 is completely in contact with the spraying surface of the sprinkler head 15 to be tested.

[0074] Furthermore, by evenly arranging a plurality of high-elasticity shock-absorbing springs 201 between the base 11 and the pressure detection part 18, the piezoelectric sensor 231 can be damped when the elastic pad 171 is completely in contact with the spraying surface of the spray head 15 to be tested, and after the detection is completed, when the drive control module 21 drives the telescopic arm 22 to drive the pressure detection module 16 to return, a rebound force is applied to the elastic pad 171.

[0075] Furthermore, by setting up a data processing module 19, the first pressure signal output by the piezoelectric sensor 231 is processed to obtain a first pressure difference distribution curve, and the first pressure difference distribution curve is compared with the threshold range. The drive control module 21 is connected to the data processing module 19, so as to adjust the height distance H when the pressure detection module 16 moves toward the spray head 15 to be tested according to the maximum pressure in the first pressure distribution fed back by the data processing module 19, so as to adjust the compression amount when the elastic pad 171 is attached to the spray surface of the spray head 15 to be tested.

[0076] In summary, the present invention uses a pressure measurement method to qualitatively monitor the deformation state of the spray surface of the spray head 15 to be tested. The first pressure signal fed back by the spray surface of the spray head 15 to be tested under the action of the elastic extrusion force in the installed state is processed, and the first pressure difference distribution curve P is obtained by subtracting the first pressure distribution from the reference pressure distribution. M and threshold interval (P U -P L ) comparison to determine whether the deformation condition of the spray surface of the spray head 15 to be tested is qualified, and can perform damage-free and pollution-free measurement without disassembling the spray head, which can avoid errors caused by human macroscopic visual inspection and judgment, and is convenient for improving the efficiency of on-site troubleshooting, thereby effectively preventing the occurrence of wafer damage problems. The present invention has the advantages of simple structure, convenient manufacture, high stability and reliability in use, and can be used for a long time, thereby improving production efficiency.

[0077] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A sprinkler head deformation monitoring device, characterized in that: include: The pressure detection module comprises a stacked pressure detection portion and a first elastic portion, wherein the first elastic portion is used to contact the spray surface of the spray head to be tested in the installed state with a first surface, and to contact the third surface of the pressure detection portion with a second surface opposite to the first surface, the pressure detection portion is provided with a plurality of pressure detection units densely distributed along the third surface, and the detection surface of the pressure detection unit is in contact with the second surface; a driving control module, used for driving the pressure detection module to translate a certain distance toward the spray head to be tested, so that the first surface is completely in contact with the spray surface of the spray head to be tested, so that the pressure detection unit can sense the pressure on the spray surface of the spray head to be tested; A data processing module is used to process the first pressure signal output by the pressure detection unit to obtain a first pressure distribution when the spray surface of the spray head to be tested is under pressure, and subtract it from a reference pressure distribution to obtain a first pressure difference distribution curve, which is used to characterize the deformation state of the spray surface of the spray head to be tested, and compare it with a threshold range. When the first pressure difference distribution curve is within the threshold range, it is judged that the deformation condition of the spray surface of the spray head to be tested is qualified; otherwise, it is judged that the deformation condition of the spray surface of the spray head to be tested is abnormal.

2. The sprinkler head deformation monitoring device according to claim 1, characterized in that: The reference pressure distribution is to replace the spray head to be tested with a standard spray head, so that the pressure detection unit is translated toward the standard spray head by the same distance, the pressure on the spray surface of the standard spray head is sensed and output a reference pressure signal, and the pressure distribution of the spray surface of the standard spray head when it is under pressure is obtained through processing by the data processing module; and / or, the threshold interval is to replace the spray head to be tested with a known poorly deformed spray head, so that the pressure detection unit is translated toward the poorly deformed spray head by the same distance, the pressure on the spray surface of the poorly deformed spray head is sensed and output a second pressure signal, and the second pressure distribution of the spray surface of the poorly deformed spray head when it is under pressure is obtained through processing by the data processing module, and the second pressure distribution is subtracted from the reference pressure distribution to obtain a second pressure difference distribution curve, the maximum value and the minimum value on the second pressure difference distribution curve are collected, and the range between the maximum value and the minimum value is used as the threshold interval.

3. The sprinkler head deformation monitoring device according to claim 1, characterized in that: The pressure detection unit includes a piezoelectric sensor. The piezoelectric sensors of the pressure detection units are densely distributed in an array along the third surface and are signal-connected to the data processing module.

4. The sprinkler head deformation monitoring device according to claim 1, characterized in that: Also includes: A fixing module, wherein the fixing module is provided with a base and a cantilever, the pressure detection module is located on the base, the driving control module is provided with a telescopic arm, the telescopic arm is provided between the base and a fourth surface of the pressure detection portion opposite to the third surface, the driving control module drives the pressure detection module to move up and down through the telescopic arm, and the cantilever is used to suspend the base on the sprinkler head to be tested so that the pressure detection module carried on the base is correspondingly located directly below the sprinkler head to be tested.

5. The sprinkler head deformation monitoring device according to claim 4, characterized in that: The drive control module is connected to the data processing module, and according to the maximum pressure value in the first pressure distribution fed back by the data processing module, the telescopic arm is used to adjust the distance when the pressure detection module moves toward the sprinkler head to be tested, so as to adjust the compression amount of the first elastic part.

6. The sprinkler head deformation monitoring device according to claim 4, characterized in that: The two cantilevers are symmetrically arranged on both sides of the base in the circumferential direction, and the upper end of each cantilever is clamped with the back side of the shower head to be tested through a fixing portion.

7. The sprinkler head deformation monitoring device according to claim 6, characterized in that: The fixing portion includes an arc-shaped slot provided on the upper end of the cantilever, and the slot is used to form a snap connection with a protruding periphery on the back side of the spray head to be tested, and the slot on one of the cantilevers is fixedly connected to the cantilever on the corresponding side, and the slot on the other cantilever is rotatably connected to the cantilever on the corresponding side.

8. The sprinkler head deformation monitoring device according to claim 7, characterized in that: A second elastic portion is further provided between the base and the pressure detection portion, and / or a third elastic portion is provided on the inner wall of the card slot.

9. The sprinkler head deformation monitoring device according to claim 8, characterized in that: The first elastic part includes a polyurethane elastic pad, and / or the second elastic part includes a plurality of springs that are evenly arranged, and / or the third elastic part includes a rubber pad.

10. The sprinkler head deformation monitoring device according to claim 2, characterized in that: The first surface, the second surface and the third surface are contoured to the spraying surface of the standard spray head, and the third surface is a rigid surface.

11. A method for monitoring the deformation of a shower head, characterized in that: include: Acquire a first pressure signal fed back by the spraying surface of the spray head to be tested in the installed state under the action of the elastic extrusion force; Processing the first pressure signal to obtain a first pressure distribution on the spray surface of the spray head to be tested, and subtracting the first pressure distribution from a reference pressure distribution to obtain a first pressure difference distribution curve for characterizing a deformation state of the spray surface of the spray head to be tested; The first pressure difference distribution curve is compared with a threshold interval, and when the first pressure difference distribution curve is within the threshold interval, the deformation condition of the spray surface of the tested sprinkler head is judged to be qualified, otherwise, the deformation condition of the spray surface of the tested sprinkler head is judged to be abnormal.

12. The method for monitoring the deformation of a shower head according to claim 11, characterized in that: The reference pressure distribution is the pressure distribution on the spraying surface of the standard spray head obtained by replacing the spray head to be tested with a standard spray head under the same conditions.

13. The method for monitoring the deformation of a shower head according to claim 11, characterized in that: The threshold interval is to replace the shower head to be tested with a known poorly deformed shower head, and obtain a second pressure distribution on the shower surface of the poorly deformed shower head under the same conditions, and subtract it from the reference pressure distribution to obtain a second pressure difference distribution curve, collect the maximum and minimum values ​​on the second pressure difference distribution curve, and use the range between the maximum and minimum values ​​as the threshold interval.

14. The method for monitoring the deformation of a shower head according to claim 11, characterized in that: The step of obtaining a first pressure signal fed back by the spray surface of the spray head to be tested in the installed state under the action of the elastic extrusion force specifically includes: A first elastic part having a first surface and a second surface opposite to each other, and a pressure detection part having a rigid third surface are provided; the third surface is in contact with the second surface, and a plurality of densely distributed pressure detection units are provided along the third surface; The first elastic part is translated toward the installed shower head to be tested by a certain distance, so that the first surface is completely in contact with the shower surface of the shower head to be tested, and an elastic extrusion force is applied to the shower surface of the shower head to be tested; The elastic pressure on the spray surface of the spray head to be tested is sensed by the pressure detection unit, and a first pressure signal of the spray surface of the spray head to be tested under the elastic squeezing force is generated and fed back.

15. The method for monitoring the deformation of a shower head according to claim 14, characterized in that: The pressure detection part and the first elastic part are arranged on a base, and the base is suspended on the shower head to be tested, and a driving control module is arranged between the base and a fourth surface of the pressure detection part opposite to the third surface, so that the pressure detection module is driven by the driving control module to translate toward the shower head to be tested at a certain distance relative to the base, so that the first surface is completely fitted with the spraying surface of the shower head to be tested.

16. The method for monitoring the deformation of a shower head according to claim 15, characterized in that: By setting a second elastic part between the base and the fourth surface, the pressure detection part is shock-absorbing when the first surface is completely in contact with the spray surface of the spray head to be tested, and a rebound force is applied to the first elastic part when the drive control module drives the pressure detection module to return after the detection is completed; and / or, by setting a data processing module, the first pressure signal output by the pressure detection unit is processed to obtain the first pressure difference distribution curve, and the first pressure difference distribution curve is compared with the threshold range, and the drive control module is connected with the data processing module to adjust the distance when the pressure detection module is moved toward the spray head to be tested according to the maximum pressure value in the first pressure distribution fed back by the data processing module, so as to adjust the compression amount of the first elastic part when it is in contact with the spray surface of the spray head to be tested.

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