A shower head shape change condition monitoring device and method

Abstract

The application discloses a kind of spray head shape change condition monitoring device and method, by the first pressure signal that the spray face of the to-be-measured spray head under the action of elastic extrusion force under installation state feedback is handled, the first pressure difference distribution curve that the first pressure distribution obtained after deducting reference pressure distribution is compared with threshold interval, to determine whether the spray face shape change condition of to-be-measured spray head is qualified, can be non-destructive and pollution measurement without disassembling spray head, can avoid the error caused by artificial macroscopic visual inspection judgment, facilitate to improve the efficiency of on-site troubleshooting, to effectively prevent the occurrence of wafer damage problem.The application has the advantages of simple structure, easy to manufacture, high stability and reliability, and can be used for a long time, improves production efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment maintenance technology, and in particular to a device and method for monitoring the deformation of a spray head. Background Technology

[0002] In the semiconductor wafer fabrication process, all process components in the process cavity need to be maintained regularly to ensure the normal operation of the equipment hardware and the stability of the process. Therefore, the inspection items and methods used during regular maintenance are very important for the successful completion of regular maintenance.

[0003] The spray head is an important component in chemical vapor deposition equipment. Because the distance between the spray head at the top of the chemical vapor deposition equipment process chamber and the heating base below is small, if the spray head deforms, the wafer surface may come into contact with the spray head when it is transferred in the narrow space between the spray head and the heating base in the process chamber, resulting in product defects.

[0004] Currently, after routine maintenance, there is a lack of effective detection methods to visually reflect the degree of deformation of the sprinkler heads. When monitoring this using a non-graphical image plate, the plate's hard surface cannot accurately respond to slight deformations of the sprinkler head, making it difficult to accurately monitor the degree of deformation. Consequently, it cannot effectively prevent the recurrence of the aforementioned abnormalities, posing a very high potential risk. Summary of the Invention

[0005] The purpose of this invention is to overcome the above-mentioned defects in the prior art and to provide a device and method for monitoring the deformation of a spray head.

[0006] To achieve the above objectives, the technical solution of the present invention is as follows:

[0007] This invention provides a spray head deformation monitoring device, comprising:

[0008] The pressure detection module includes a stacked pressure detection part and a first elastic part. The first elastic part is used to contact the spray surface of the spray head to be tested in the installed state with a first surface and to contact the third surface of the pressure detection part with a second surface opposite to the first surface. The pressure detection part is provided with a plurality of pressure detection units densely distributed along the third surface, and the detection surface of the pressure detection unit is in contact with the second surface.

[0009] The drive control module is used to drive the pressure detection module to translate a certain distance towards the spray head to be tested, so that the first surface is completely in contact with the spray surface of the spray head to be tested, so that the pressure detection unit can sense the pressure on the spray surface of the spray head to be tested.

[0010] The data processing module processes the first pressure signal output by the pressure detection unit to obtain the first pressure distribution of the spray surface of the spray head under test when it is under pressure. The first pressure distribution is then subtracted from the reference pressure distribution to obtain the first pressure difference distribution curve, which characterizes the deformation state of the spray surface of the spray head under test. The curve is then compared with a threshold range. If the first pressure difference distribution curve is within the threshold range, the deformation state of the spray surface of the spray head under test is determined to be qualified; otherwise, the deformation state of the spray surface of the spray head under test is determined to be abnormal.

[0011] Further, the reference pressure distribution is obtained by replacing the spray head to be tested with a standard spray head, shifting the pressure detection unit to the standard spray head by the same distance, sensing the pressure on the spray surface of the standard spray head and outputting a reference pressure signal, and processing it through the data processing module to obtain the pressure distribution when the spray surface of the standard spray head is under pressure; and / or, the threshold interval is obtained by replacing the spray head to be tested with a known defective spray head, shifting the pressure detection unit to the defective spray head by the same distance, sensing the pressure on the spray surface of the defective spray head and outputting a second pressure signal, and processing it through the data processing module to obtain the second pressure distribution when the spray surface of the defective spray head is under pressure, subtracting it from the reference pressure distribution to obtain a second pressure difference distribution curve, collecting the maximum and minimum values ​​on the second pressure difference distribution curve, and using the range between the maximum and minimum values ​​as the threshold interval.

[0012] Furthermore, the pressure detection unit includes a piezoelectric sensor, and each piezoelectric sensor of the pressure detection unit is densely distributed in an array along the third surface and is signal-connected to the data processing module.

[0013] Furthermore, it also includes: a fixing module, the fixing module having a base and a cantilever, the pressure detection module being located on the base, the drive control module having a telescopic arm, the telescopic arm being located between the base and the fourth surface of the pressure detection unit opposite to the third surface, the drive control module driving the pressure detection module to move up and down through the telescopic arm, the cantilever being used to suspend the base on the spray head to be tested, so that the pressure detection module carried on the base is located directly below the spray head to be tested.

[0014] Furthermore, the drive control module is connected to the data processing module, and according to the maximum pressure value in the first pressure distribution fed back by the data processing module, the telescopic arm is used to adjust the distance at which the pressure detection module moves toward the spray head to be tested, so as to adjust the compression amount of the first elastic part.

[0015] Furthermore, the two cantilever arms are symmetrically arranged on both sides of the base, and the upper end of each cantilever arm is engaged with the back of the spray head to be tested through a fixing part.

[0016] Furthermore, the fixing part includes an arc-shaped groove on the upper end of the cantilever, the groove being used to engage with the protruding periphery on the back of the spray head to be tested, and the groove on one of the cantilever arms is fixedly connected to the cantilever arm on the corresponding side, while the groove on the other cantilever arm is rotatably connected to the cantilever arm on the corresponding side.

[0017] Furthermore, a second elastic part is provided between the base and the pressure detection part, and / or a third elastic part is provided on the inner wall of the slot.

[0018] Furthermore, the first elastic part includes a polyurethane elastic pad, and / or the second elastic part includes a plurality of springs evenly arranged, and / or the third elastic part includes a rubber pad.

[0019] Furthermore, the first surface, the second surface, and the third surface are contoured to the spray surface of the standard spray head, and the third surface is a rigid surface.

[0020] The present invention also provides a method for monitoring the deformation of a spray head, comprising:

[0021] Acquire the first pressure signal fed back by the spray surface of the spray head under test in the installed state under the action of elastic extrusion force;

[0022] The first pressure signal is processed to obtain the first pressure distribution on the spray surface of the spray head under test, and subtracted from the reference pressure distribution to obtain the first pressure difference distribution curve, which is used to characterize the deformation state of the spray surface of the spray head under test.

[0023] The first pressure difference distribution curve is compared with the threshold range. When the first pressure difference distribution curve is within the threshold range, the deformation of the spray surface of the spray head under test is determined to be qualified; otherwise, the deformation of the spray surface of the spray head under test is determined to be abnormal.

[0024] Furthermore, the reference pressure distribution is the pressure distribution on the spray surface of the standard spray head obtained by replacing the spray head under test with a standard spray head under the same conditions.

[0025] Further, the threshold interval is obtained by replacing the spray head to be tested with a known defective spray head, obtaining the second pressure distribution on the spray surface of the defective spray head under the same conditions, subtracting it from the reference pressure distribution to obtain the second pressure difference distribution curve, collecting the maximum and minimum values ​​on the second pressure difference distribution curve, and using the range between the maximum and minimum values ​​as the threshold interval.

[0026] Furthermore, acquiring the first pressure signal fed back by the spray surface of the spray head under installation under elastic compressive force specifically includes:

[0027] A first elastic portion having opposing first and second surfaces is provided, and a pressure detection portion having a rigid third surface; the third surface is in contact with the second surface, and a plurality of pressure detection units are densely distributed along the third surface;

[0028] The first elastic part is moved a certain distance towards the spray head to be tested in the installed state so that the first surface is completely in contact with the spray surface of the spray head to be tested, and an elastic extrusion force is applied to the spray surface of the spray head to be tested.

[0029] The pressure detection unit senses the elastic pressure on the spray surface of the spray head under test, generates and feeds back the first pressure signal of the spray surface of the spray head under test under the action of elastic extrusion force.

[0030] Furthermore, by placing the pressure detection unit and the first elastic unit on the base, suspending the base on the spray head to be tested, and setting a drive control module between the base and the fourth surface of the pressure detection unit opposite to the third surface, the pressure detection module is driven to translate towards the spray head to be tested by a certain distance relative to the base, so that the first surface is completely in contact with the spray surface of the spray head to be tested.

[0031] Furthermore, by providing a second elastic portion between the base and the fourth surface, the pressure detection portion is damped when the first surface is fully in contact with the spray surface of the spray head under test, and a rebound force is applied to the first elastic portion when the drive control module drives the pressure detection module to return after the test is completed; and / or, by providing a data processing module, the first pressure signal output by the pressure detection unit is processed to obtain the first pressure difference distribution curve, and compared with the threshold range. By connecting the drive control module and the data processing module, the distance at which the pressure detection module moves towards the spray head under test is adjusted according to the maximum pressure value in the first pressure distribution fed back by the data processing module, thereby adjusting the compression amount of the first elastic portion when it is in contact with the spray surface of the spray head under test.

[0032] As can be seen from the above technical solution, this invention uses a pressure measurement method to qualitatively monitor the deformation state of the spray surface of the spray head under test. It processes the first pressure signal fed back from the spray surface of the spray head under installation under elastic compressive force, and compares the resulting first pressure distribution curve (obtained by subtracting a reference pressure distribution from the first pressure distribution) with a threshold range to determine whether the deformation state of the spray surface of the spray head is qualified. This method allows for non-destructive and non-contamination measurement without disassembling the spray head, avoiding errors caused by human macroscopic visual inspection, improving the efficiency of on-site troubleshooting, and effectively preventing wafer damage. This invention has the advantages of simple structure, convenient manufacturing, high stability and reliability, and can be used for a long time, improving production efficiency. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of a spray head deformation monitoring device according to a preferred embodiment of the present invention.

[0034] Figure 2 This is a schematic diagram of the arrangement structure of a piezoelectric sensor according to a preferred embodiment of the present invention.

[0035] Figure 3 This is a schematic diagram illustrating data analysis of the deformation state of the spray surface of the spray head under test, according to a preferred embodiment of the present invention.

[0036] Figure 4 This is a flowchart of a method for monitoring the deformation of a spray head according to a preferred embodiment of the present invention. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects.

[0038] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0039] refer to Figures 1-2 The present invention provides a spray head deformation monitoring device, comprising: a pressure detection module 16, a drive control module 21, and a data processing module 19.

[0040] The pressure detection module 16 includes a first elastic part 17 and a pressure detection part 18 stacked vertically. The first elastic part 17 is configured to have its first surface fully in contact with the spray surface of the spray head 15 under installation, and its second surface, opposite to the first surface, fully in contact with the third surface of the pressure detection part 18. The pressure detection part 18 is provided with a plurality of pressure detection units 23 densely distributed along the third surface; the detection surface of the pressure detection unit 23 is in contact with the second surface.

[0041] The drive control module 21 is used to drive the pressure detection module 16 to translate a certain height distance H towards the spray head 15 to be tested, so that the first surface of the first elastic part 17 is completely in contact with the spray surface of the spray head 15 to be tested, and is in a state of squeezing the spray surface of the spray head 15 to be tested, so that the pressure detection unit 23 can sense the pressure on the spray surface of the spray head 15 to be tested and generate a first pressure signal to be output to the data processing module 19.

[0042] The data processing module 19 processes the first pressure signal output by the pressure detection unit 23 to obtain the first pressure distribution of the spray surface of the spray head 15 under test when it is under pressure. This first pressure distribution is then subtracted from the reference pressure distribution to obtain the first pressure difference distribution curve. This first pressure difference distribution curve characterizes the deformation state of the spray surface of the spray head 15 under test. The data processing module 19 also compares the first pressure difference distribution curve with a threshold range. When the first pressure difference distribution curve is within the threshold range, the deformation state of the spray surface of the spray head 15 under test is deemed acceptable; conversely, when the first pressure difference distribution curve is outside the threshold range, the deformation state of the spray surface of the spray head 15 under test is deemed abnormal.

[0043] The reference pressure distribution can be formed by replacing the spray head 15 to be tested with a standard spray head, and driving the pressure detection module 16 (pressure detection unit 23) to translate to the standard spray head in the installed state by the same height distance H, so that the first surface of the first elastic part 17 is completely in contact with the spray surface of the standard spray head and is in a state of squeezing the spray surface of the standard spray head, so that the pressure detection unit 23 senses the pressure on the spray surface of the standard spray head and generates a reference pressure signal, which is output to the data processing module 19. Then, the data processing module 19 processes the reference pressure signal to obtain the pressure distribution when the spray surface of the standard spray head is compressed, which is used as the reference pressure distribution.

[0044] The threshold interval can be formed by replacing the spray head 15 to be tested with a known deformed spray head, and driving the pressure detection module 16 (pressure detection unit 23) to translate to the deformed spray head in the installation state by the same height distance H, so that the first surface of the first elastic part 17 is completely in contact with the spray surface of the deformed spray head and is in a state of squeezing the spray surface of the deformed spray head, so that the pressure detection unit 23 senses the pressure on the spray surface of the deformed spray head and generates a second pressure signal, which is output to the data processing module 19. Then, the data processing module 19 processes the second pressure signal to obtain the second pressure distribution when the spray surface of the deformed spray head is compressed, and subtracts it from the reference pressure distribution to obtain the second pressure difference distribution curve. The maximum and minimum values ​​on the second pressure difference distribution curve are collected, and the range between the maximum and minimum values ​​is used as the threshold interval.

[0045] refer to Figure 3 In conjunction with references Figures 1-2The data processing module 19, based on the first pressure distribution of the spray surface of the spray head 15 under pressure obtained through processing, can fit a contour map of the spray surface of the spray head 15 under stress and form a three-dimensional cross-sectional view. By observing the three-dimensional cross-sectional view, it is possible to confirm whether there is significant deformation of the spray surface of the spray head 15 under test, thus achieving a qualitative analysis of the deformation status of the spray surface of the spray head 15 under test. Furthermore, based on the reference pressure distribution and threshold range, the cross-section where the deformation area is located is extracted from the three-dimensional cross-sectional view, and the first pressure difference distribution curve P is plotted. M The pressure-length curve between the pull-out area length and the pressure-length curve, such as Figure 3 As shown, it can be achieved by... Figure 3 The first pressure difference distribution curve P in M With threshold interval (P) U -P L By performing comparative calculations, the deformation of the spray surface of the spray head 15 under test can be quantitatively analyzed, thereby enabling a quantitative analysis of the magnitude of the deformation of the spray surface of the spray head 15 under test.

[0046] The aforementioned threshold range can also be obtained by replacing the spray head 15 to be tested with a spray head whose service life is close to the regular maintenance cycle, and using the same method as described above.

[0047] refer to Figures 1-2 In some embodiments, the pressure detection unit 23 includes a piezoelectric sensor 231. The piezoelectric sensors 231 of each pressure detection unit 23 are densely distributed in an array along the third surface of the pressure detection module 16. The formed piezoelectric sensor array can be arranged in rows and columns, or multiple ring-shaped piezoelectric sensor arrays can be formed by concentrically arranging the piezoelectric sensors 231, with a central piezoelectric sensor 231 at the center of the array. The other piezoelectric sensors 231 in the array are arranged around this central piezoelectric sensor 231 to sense and transmit pressure signals from above. Each piezoelectric sensor 231 in the piezoelectric sensor array is signal-connected to the data processing module 19.

[0048] In some embodiments, the first elastic portion 17 includes an elastic pad 171. For example, the elastic pad 171 may be a highly elastic flexible polyurethane pad with uniform thickness. When the polyurethane pad comes into contact with the spray surface of the spray head 15 to be tested, it can prevent damage or contamination of the spray surface of the spray head 15 to be tested.

[0049] In some embodiments, the data processing module 19 may be a host computer 191. Alternatively, the data processing module 19 may be located within the host computer 191.

[0050] In some embodiments, the device further includes a fixing module 10. The fixing module 10 has a base 11 and a cantilever 12; the pressure detection module 16 is suspended on the base 11 to ensure stability during measurement. The drive control module 21 has a telescopic arm 22; the telescopic arm 22 is located between the base 11 and the fourth surface of the pressure detection unit 18 opposite to the third surface, and is positioned at the center between the base 11 and the pressure detection unit 18. The drive control module 21 drives the pressure detection module 16 to move up and down at a uniform speed via the telescopic arm 22, so that the first elastic part 17 of the pressure detection module 16 moves up and down, ensuring the effectiveness and accuracy of the pressure measurement. The cantilever 12 is used to suspend the base 11 on the spray head 15 to be tested, so that the pressure detection module 16 carried on the base 11 is positioned directly below the spray head 15 to be tested.

[0051] In some embodiments, a second elastic part 20 is further provided between the base 11 and the pressure detection part 18. The second elastic part 20 may be, for example, a plurality of high-elasticity damping springs 201 evenly arranged between the base 11 and the pressure detection part 18, used to generate rebound damping during pressure measurement, ensuring that the signal is uniform without spike interference caused by sudden changes, ensuring that the data has a certain stable acquisition time, and can also be used for rebound after the measurement is completed.

[0052] In some embodiments, the drive control module 21 includes a dual servo sensing system capable of controlling the movement of the telescopic arm 22. The drive control module 21 is connected to the data processing module 19 and, based on the maximum pressure value in the first pressure distribution fed back by the data processing module 19, adjusts the height distance H of the telescopic arm 22 when the pressure detection module 16 moves towards the spray head 15 under test, thereby adjusting the compression amount of the first elastic part 17. For example, when the first elastic part 17 compresses the spray head 15 under test, causing a sudden increase in pressure or excessive pressure, the data processing module 19 can provide feedback to control the movement of the telescopic arm 22 to reduce the pressure and ensure that the spray head 15 under test is not damaged due to excessive force.

[0053] In some embodiments, two cantilever arms 12 are symmetrically arranged on both sides of the base 11 in the circumferential direction; the upper end of each cantilever arm 12 is engaged with the back of the spray head 15 to be tested through a fixing part 13.

[0054] Furthermore, the fixing part 13 includes an arc-shaped groove 131 provided on the upper end of the cantilever 12, the groove 131 being used to engage with the protruding periphery on the back of the spray head 15 (spray head) to be tested. Additionally, the groove 131 on one cantilever 12 is fixedly connected to the cantilever 12 on the corresponding side, and the groove 131 on the other cantilever 12 is rotatably connected to the cantilever 12 on the corresponding side, so as to facilitate position adjustment during engagement.

[0055] In some embodiments, a third elastic portion 14 is provided on the inner wall of the slot 131. The third elastic portion 14 may be, for example, a rubber pad 141, which can serve as a shock absorber, improve measurement accuracy, and prevent particles from falling off due to wear or scratches between the slot 131 and the spray head 15 to be tested.

[0056] In some embodiments, the first, second, and third surfaces are contoured to the spray surface of a standard spray head. For example, when the spray surface of the standard spray head is a circular plane, the first, second, and third surfaces are also corresponding circular planes. Furthermore, the third surface is a rigid surface to generate uniform pressure on the second surface of the first elastic portion 17.

[0057] The following detailed description of a spray head deformation monitoring method of the present invention, with reference to specific embodiments and accompanying drawings, provides a further detailed explanation.

[0058] refer to Figure 4 The present invention provides a method for monitoring the deformation of a spray head, comprising the following steps:

[0059] Step S1: Obtain the first pressure signal fed back by the spray surface of the spray head 15 under the action of elastic extrusion force in the installed state.

[0060] refer to Figures 1-2 The above-described spray head deformation monitoring device of the present invention can be used to implement a spray head deformation monitoring method of the present invention.

[0061] Before the process chamber needs to be opened for regular maintenance, or when troubleshooting is required, the device is suspended and clipped onto the back of the spray head 15 to be tested via the cantilever 12 on the device's fixing module 10, and kept stable, so that the base 11 and the pressure detection part 18 and the first elastic part 17 located on the base 11 are directly below the spray head 15 to be tested, and maintain a certain distance.

[0062] Then, the power is turned on, causing the drive control module 21 to drive the mechanical telescopic arm 22 to move upward a certain height distance H, which in turn causes the first elastic part 17 (elastic pad 171) to move the corresponding height distance H towards the spray head 15 under test in the installed state, thereby contacting the spray surface of the spray head 15 under test. The telescopic arm 22 is then manipulated to apply uniform pressure, applying elastic extrusion force to the spray surface of the spray head 15 under test, so that the first surface of the first elastic part 17 is completely in contact with the spray surface of the spray head 15 under test. The pressure detection unit 23 (piezoelectric sensor 231) senses the elastic pressure on the spray surface of the spray head 15 under test, generating and feeding back the first pressure signal of the spray surface of the spray head 15 under test under the action of elastic extrusion force.

[0063] The above steps can be repeated multiple times (e.g., 3 times) to eliminate errors caused by initial measurement instability. The final calculation is based on the average value.

[0064] Step S2: Process the first pressure signal to obtain the first pressure distribution on the spray surface of the spray head 15 under test, and subtract it from the reference pressure distribution to obtain the first pressure difference distribution curve, which is used to characterize the deformation state of the spray surface of the spray head 15 under test.

[0065] refer to Figure 3 The data processing module 19 acquires and processes the first pressure signal, fitting a force contour map (three-dimensional cross-sectional view) of the spray surface of the spray head 15 under test. By observing the image, it can be confirmed whether there is significant deformation of the spray surface of the spray head 15 under test, thus achieving a qualitative analysis of the deformation status of the spray surface of the spray head 15 under test. Furthermore, based on the reference pressure distribution and threshold range, the section where the deformation area is located is extracted from the three-dimensional cross-sectional view, and the first pressure difference distribution curve P is plotted. M The pressure-length curve between the pull-out area length and the pressure-length curve, such as Figure 3 As shown.

[0066] The baseline pressure distribution is the pressure distribution (Golden deformation, i.e., P) on the spray surface of the standard spray head obtained under the same conditions after replacing the test spray head 15 with a standard spray head (a brand new, compliant spray head). base ).

[0067] For example, taking an array of 49 piezoelectric sensors 231 (with one as the central piezoelectric sensor 231 and the other 48 arranged in concentric rings around it), a force contour map (three-dimensional profile) is generated based on the pressure signals transmitted from the piezoelectric sensors 231 at each point, and the baseline pressure distribution P is obtained. base Plot a pressure-length curve on the cross-section where the deformation region is located, then the first pressure difference distribution curve P is obtained. M The deformation at each point is equal to the actual pressure measurement value P at that point. M Subtract P base That is, ΔP = |P M -P base |. Where the spray surface of the spray head 15 to be tested is convexly deformed, then (P M -P base (P) is positive; conversely, if it is an inward concave deformation, then (P) is negative. M -P base ) is a negative value (the spray surface of the spray head is facing down).

[0068] Step S3: Compare the first pressure difference distribution curve with the threshold range. If the first pressure difference distribution curve is within the threshold range, the deformation of the spray surface of the spray head 15 under test is deemed qualified. Otherwise, the deformation of the spray surface of the spray head 15 under test is deemed abnormal.

[0069] like Figure 3 As shown, the reference pressure distribution line P in the pressure-length curve diagram is represented by data processing module 19. base The upper and lower sides are generated as the upper control limit P of the threshold interval. U and lower control limit P L And plot the first pressure difference distribution curve P in the pressure-length curve. M That is, by means of Figure 3 The first pressure difference distribution curve P in M With threshold interval (P) U -P L By comparing and calculating, the deformation of the spray surface of the spray head 15 under test is quantitatively analyzed, thereby enabling a quantitative analysis of the magnitude of the deformation of the spray surface of the spray head 15 under test.

[0070] The threshold range is determined by replacing the test spray head 15 with a defective spray head that has been identified, obtaining the second pressure distribution on the spray surface of the defective spray head under the same conditions, and subtracting it from the reference pressure distribution. The maximum value (upper control limit P) on the second pressure difference distribution curve is then calculated. U ) and minimum value (lower control limit P) L The range between ).

[0071] For example, Figure 3 The first pressure difference distribution curve P formed by intercepting the middle M Some line segments intersect with the reference pressure distribution line P. base The overlap or proximity indicates that the spray surface of the spray head 15 under test has not undergone or has undergone minimal deformation. Simultaneously, the first pressure difference distribution curve P... M Each of the above has a positive peak value P. peak And a negative peak -P peak Furthermore, both peak values ​​have reached the upper control limit P. U and lower control limit P L This indicates that the deformation of the corresponding area on the spray surface of the spray head 15 under test is too large, which reflects that the spray head 15 under test is in an abnormal state, which may affect the process or cause wafer scratches, and needs to be replaced.

[0072] This invention employs a piezoelectric sensing measurement method. A pressure detection unit 18 (with uniformly distributed piezoelectric sensors 231 inside) and an elastic pad 171, designed to approximate the shape of the spray surface of the shower head, are used to form a piezoelectric elastic pad (pressure detection module 16). The clean, flexible elastic pad 171 serves as the medium, covering the spray surface of the shower head 15 under test. Within a reasonable pressure range, the applied pressure is adjusted to sense the force exerted on the spray surface of the shower head 15 on the piezoelectric elastic pad. The pressure signal is converted into a digital signal by a data processing module 19 (equipped with a piezoelectric signal processor). A three-dimensional cross-sectional view of the piezoelectric elastic pad under stress is simulated by a computer, and the difference in pressure between the concave and convex surfaces is calculated to quantify the degree of deformation of the spray surface of the shower head 15 under test. Alternatively, the degree of matching between this and the three-dimensional cross-sectional view curve of the standard / initial shower head before use is used to control the deformation of the shower head 15 under test. Since the piezoelectric elastic pad covers an area close to the size of the spray surface, it can reflect the overall deformation of the spray head 15 under test to the greatest extent.

[0073] Furthermore, by placing the pressure detection unit 18 and the elastic pad 171 on the base 11, suspending the base 11 on the spray head 15 to be tested, and setting a telescopic arm 22 between the base 11 and the pressure detection unit 18, the telescopic arm 22 can be driven by the drive control module 21 to move the pressure detection module 16 to the spray head 15 to be tested by a certain height distance H relative to the base 11, so that the first surface of the elastic pad 171 is completely in contact with the spray surface of the spray head 15 to be tested.

[0074] Furthermore, by uniformly arranging multiple high-elasticity damping springs 201 between the base 11 and the pressure detection unit 18, the piezoelectric sensor 231 can be damped when the elastic pad 171 is in complete contact with the spray surface of the spray head 15 to be tested, and a rebound force is applied to the elastic pad 171 when the drive control module 21 drives the telescopic arm 22 to drive the pressure detection module 16 back after the test is completed.

[0075] Furthermore, by setting up the data processing module 19, the first pressure signal output by the piezoelectric sensor 231 is processed to obtain the first pressure difference distribution curve, which is compared with the threshold range. By connecting the drive control module 21 to the data processing module 19, the height distance H of the pressure detection module 16 moving towards the spray head 15 under test is adjusted according to the maximum pressure value in the first pressure distribution fed back by the data processing module 19, thereby adjusting the compression amount of the elastic pad 171 when it is attached to the spray surface of the spray head 15 under test.

[0076] In summary, this invention uses a pressure measurement method to qualitatively monitor the deformation state of the spray surface of the spray head 15 under test. This can be achieved by processing the first pressure signal fed back from the spray surface of the spray head 15 under elastic compressive force in its installed state, and then subtracting the obtained first pressure distribution from the reference pressure distribution to obtain the first pressure difference distribution curve P. M With threshold interval (P) U -P L By comparing the two methods, the deformation of the spray surface of the spray head 15 under test can be determined to be qualified. This allows for measurement without disassembling the spray head, avoiding damage and contamination, and eliminating errors caused by manual macroscopic visual inspection. This improves the efficiency of on-site troubleshooting and effectively prevents wafer damage. This invention has the advantages of simple structure, easy manufacturing, high stability and reliability, and long-term use, thus improving production efficiency.

[0077] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A device for monitoring the deformation of a spray head, characterized in that, include: The pressure detection module includes a stacked pressure detection part and a first elastic part. The first elastic part is used to contact the spray surface of the spray head to be tested in the installed state with a first surface and to contact the third surface of the pressure detection part with a second surface opposite to the first surface. The pressure detection part is provided with a plurality of pressure detection units densely distributed along the third surface, and the detection surface of the pressure detection unit is in contact with the second surface. The drive control module is used to drive the pressure detection module to translate a certain distance towards the spray head to be tested, so that the first surface is completely in contact with the spray surface of the spray head to be tested, so that the pressure detection unit can sense the pressure on the spray surface of the spray head to be tested. The data processing module processes the first pressure signal output by the pressure detection unit to obtain the first pressure distribution of the spray surface of the spray head under test when it is under pressure. The first pressure distribution is then subtracted from the reference pressure distribution to obtain the first pressure difference distribution curve, which characterizes the deformation state of the spray surface of the spray head under test. The curve is then compared with a threshold range. If the first pressure difference distribution curve is within the threshold range, the deformation state of the spray surface of the spray head under test is determined to be qualified; otherwise, the deformation state of the spray surface of the spray head under test is determined to be abnormal.

2. The spray head deformation monitoring device according to claim 1, characterized in that, The reference pressure distribution is obtained by replacing the spray head under test with a standard spray head, shifting the pressure detection unit to the same distance as the standard spray head, sensing the pressure on the spray surface of the standard spray head, outputting a reference pressure signal, and processing it through the data processing module to obtain the pressure distribution when the spray surface of the standard spray head is under pressure; and / or, the threshold interval is obtained by replacing the spray head under test with a known defective spray head, shifting the pressure detection unit to the defective spray head to the same distance, sensing the pressure on the spray surface of the defective spray head, outputting a second pressure signal, processing it through the data processing module to obtain the second pressure distribution when the spray surface of the defective spray head is under pressure, subtracting it from the reference pressure distribution to obtain a second pressure difference distribution curve, collecting the maximum and minimum values ​​on the second pressure difference distribution curve, and using the range between the maximum and minimum values ​​as the threshold interval.

3. The spray head deformation monitoring device according to claim 1, characterized in that, The pressure detection unit includes a piezoelectric sensor, and the piezoelectric sensors of each pressure detection unit are densely distributed in an array along the third surface and are signal-connected to the data processing module.

4. The spray head deformation monitoring device according to claim 1, characterized in that, Also includes: The fixed module includes a base and a cantilever. The pressure detection module is located on the base. The drive control module includes a telescopic arm, which is located between the base and the fourth surface of the pressure detection unit opposite to the third surface. The drive control module drives the pressure detection module to move up and down through the telescopic arm. The cantilever is used to suspend the base on the spray head to be tested, so that the pressure detection module carried on the base is located directly below the spray head to be tested.

5. The spray head deformation monitoring device according to claim 4, characterized in that, The drive control module is connected to the data processing module, and according to the maximum pressure value in the first pressure distribution fed back by the data processing module, the telescopic arm is used to adjust the distance that the pressure detection module moves toward the spray head to be tested, so as to adjust the compression of the first elastic part.

6. The spray head deformation monitoring device according to claim 4, characterized in that, The two cantilever arms are symmetrically arranged on both sides of the base, and the upper end of each cantilever arm is engaged with the back of the spray head to be tested through a fixing part.

7. The spray head deformation monitoring device according to claim 6, characterized in that, The fixing part includes an arc-shaped slot on the upper end of the cantilever. The slot is used to engage with the protruding periphery on the back of the spray head to be tested. The slot on one of the cantilever arms is fixedly connected to the cantilever arm on the corresponding side, and the slot on the other cantilever arm is rotatably connected to the cantilever arm on the corresponding side.

8. The spray head deformation monitoring device according to claim 7, characterized in that, A second elastic part is provided between the base and the pressure detection part, and / or a third elastic part is provided on the inner wall of the slot.

9. The spray head deformation monitoring device according to claim 8, characterized in that, The first elastic part includes a polyurethane elastic pad, and / or the second elastic part includes a plurality of springs evenly arranged, and / or the third elastic part includes a rubber pad.

10. The spray head deformation monitoring device according to claim 2, characterized in that, The first surface, the second surface, and the third surface are contoured to the spray surface of the standard spray head, and the third surface is a rigid surface.

11. A method for monitoring the deformation of a spray head, characterized in that, The method using the spray head deformation monitoring device according to any one of claims 1 to 10 includes: Acquire the first pressure signal fed back by the spray surface of the spray head under test in the installed state under the action of elastic extrusion force; The first pressure signal is processed to obtain the first pressure distribution on the spray surface of the spray head under test, and subtracted from the reference pressure distribution to obtain the first pressure difference distribution curve, which is used to characterize the deformation state of the spray surface of the spray head under test. The first pressure difference distribution curve is compared with the threshold range. When the first pressure difference distribution curve is within the threshold range, the deformation of the spray surface of the spray head under test is determined to be qualified; otherwise, the deformation of the spray surface of the spray head under test is determined to be abnormal.

12. The method for monitoring the deformation of a spray head according to claim 11, characterized in that, The reference pressure distribution is the pressure distribution on the spray surface of the standard spray head obtained by replacing the spray head under test with a standard spray head under the same conditions.

13. The method for monitoring the deformation of a spray head according to claim 11, characterized in that, The threshold interval is obtained by replacing the spray head to be tested with a known defective spray head, obtaining the second pressure distribution on the spray surface of the defective spray head under the same conditions, subtracting it from the reference pressure distribution to obtain the second pressure difference distribution curve, collecting the maximum and minimum values ​​on the second pressure difference distribution curve, and using the range between the maximum and minimum values ​​as the threshold interval.

14. The method for monitoring the deformation of a spray head according to claim 11, characterized in that, The acquisition of the first pressure signal fed back by the spray surface of the spray head under test in the installed state under the action of elastic extrusion force specifically includes: A first elastic portion having opposing first and second surfaces is provided, and a pressure detection portion having a rigid third surface; the third surface is in contact with the second surface, and a plurality of pressure detection units are densely distributed along the third surface; The first elastic part is moved a certain distance towards the spray head to be tested in the installed state so that the first surface is completely in contact with the spray surface of the spray head to be tested, and an elastic extrusion force is applied to the spray surface of the spray head to be tested. The pressure detection unit senses the elastic pressure on the spray surface of the spray head under test, generates and feeds back the first pressure signal of the spray surface of the spray head under test under the action of elastic extrusion force.

15. The method for monitoring the deformation of a spray head according to claim 14, characterized in that, By placing the pressure detection unit and the first elastic unit on the base, suspending the base on the spray head to be tested, and setting a drive control module between the base and the fourth surface of the pressure detection unit opposite to the third surface, the pressure detection module is driven to translate towards the spray head to be tested by a certain distance relative to the base, so that the first surface is completely in contact with the spray surface of the spray head to be tested.

16. The method for monitoring the deformation of a spray head according to claim 15, characterized in that, By providing a second elastic portion between the base and the fourth surface, the pressure detection portion is damped when the first surface is fully in contact with the spray surface of the spray head under test. A rebound force is applied to the first elastic portion when the drive control module drives the pressure detection module back after testing. Alternatively, by providing a data processing module, the first pressure signal output by the pressure detection unit is processed to obtain the first pressure difference distribution curve, which is then compared with a threshold range. By connecting the drive control module to the data processing module, the distance the pressure detection module moves towards the spray head under test is adjusted according to the maximum pressure value in the first pressure distribution fed back by the data processing module, thereby adjusting the compression amount of the first elastic portion when it is in contact with the spray surface of the spray head under test.

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