Vibration isolation component for dilution refrigerator and dilution refrigerator

Abstract

The invention provides a vibration isolation component for a dilution refrigerator and the dilution refrigerator, and relates to the technical field of vibration reduction and dilution refrigerators. The vibration isolation component for the dilution refrigerator comprises a vibration isolation body and a connecting assembly. A plurality of cavities used for absorbing vibration waves are formed in the vibration isolation body. The connecting assembly comprises a first base and a second base which are connected with the two ends of the vibration isolation body correspondingly. The connecting assembly further comprises a first set of side plates and a second set of side plates which are arranged around the vibration isolation body, the first ends of the first set of side plates are connected with the first base, and the second ends of the first set of side plates extend out of the second base and are connected with an isolation target. The first ends of the second group of side plates are connected with the second base, and the second ends of the second group of side plates extend out of the first base and are connected with a vibration source.

Description

Technical Field

[0001] The present invention relates to the technical field of vibration reduction and dilution refrigerators, and more particularly to a vibration isolation component for a dilution refrigerator and a dilution refrigerator. Background Art

[0002] The working principle of the dilution refrigerator is based on the dilution refrigeration effect, that is, the refrigeration purpose is achieved by mixing quantum liquids of different components. Quantum liquids have superfluidity at low temperatures. When two quantum liquids of different components are mixed, entropy changes will occur due to the interaction between the components, thereby achieving refrigeration.

[0003] The dilution refrigerator currently in widespread use uses helium-3 ( 3 He) and helium-4 ( 4 The unique properties of He) mixtures enable extremely low temperatures (usually below 100mK). Its core principle is 3 He and 4 At 0.86K, the He mixture will separate into two phases. The upper phase is the concentrated phase, and its main components are 3 He, that is 3 He solution. The lower layer is the dilute phase, the main components are 3 He and 4 He mixture, where 3 He accounts for about 6.4%-6.6%. 3 He draws out and makes 3 He vapor condenses into 3 The He solution then flows back into the concentrated phase, and then passes through the interface separating the concentrated phase and the dilute phase to form dilution refrigeration, continuously absorbing heat to reach the mK level or even lower temperature.

[0004] In the related art, the main body of the dilution refrigerator will inevitably generate vibration during operation. For example, the vacuum pump, booster pump, throttle valve, etc. may generate mechanical vibration. 3 The flow of He gas and liquid may cause vibrations in the pipeline, which can have many negative effects on the operation of quantum computers. Therefore, how to provide a vibration-reducing structure has become a technical problem that needs to be solved urgently. Summary of the invention

[0005] In view of this, the present invention provides a vibration isolation component for a dilution refrigerator and a dilution refrigerator, which can effectively extend and disperse the transmission path of vibration so that the vibration can gradually dissipate during the transmission process.

[0006] In order to achieve the above-mentioned purpose, the present invention provides a vibration isolation component for a dilution refrigerator, comprising a vibration isolation body, wherein a plurality of cavities for absorbing vibration waves are formed inside the vibration isolation body; a connecting component, comprising: a first base and a second base, respectively connected to two ends of the vibration isolation body; a first group of side plates and a second group of side plates, arranged around the vibration isolation body, a first end of the first group of side plates connected to the first base, a second end of the first group of side plates extending out of the second base and connected to an isolation target; a first end of the second group of side plates connected to the second base, a second end of the second group of side plates extending out of the first base and connected to a vibration source.

[0007] According to an embodiment of the present invention, the upper end cover is suspended above the above-mentioned first base, and the above-mentioned second group of side plates are connected to the above-mentioned vibration source through the above-mentioned upper end cover; the lower end cover is suspended below the above-mentioned second base, and the above-mentioned first group of side plates are connected to the above-mentioned isolation target through the above-mentioned lower end cover.

[0008] According to an embodiment of the present invention, the first group of side plates includes a plurality of first side plates, the second group of side plates includes a plurality of second side plates, and the first side plates and the second side plates are alternately distributed along the circumferential direction.

[0009] According to an embodiment of the present invention, the first side plate and the second side plate are staggered with each other in the length direction of the vibration isolation body to form a toothed structure.

[0010] According to an embodiment of the present invention, a plurality of strip grooves are formed on the first side plate and the second side plate, which are suitable for extending the transmission path of the vibration wave on the first side plate and the second side plate.

[0011] According to an embodiment of the present invention, the first side plate and the second side plate are both configured as trapezoidal side plates.

[0012] According to an embodiment of the present invention, the strip-shaped groove extends from one side edge of the trapezoidal side plate to the other side edge.

[0013] According to an embodiment of the present invention, an extending direction of the strip groove is parallel to a bottom side of the trapezoidal side plate.

[0014] According to an embodiment of the present invention, the cross section of the vibration isolation body is configured in a honeycomb shape.

[0015] The present invention also provides a dilution refrigerator, comprising cold plates arranged in multiple stages along the length direction, each cold plate having a clearance hole in the middle; a refrigerator body suspended in the clearance hole, suitable for cooling the cold plate; and a plurality of vibration isolation components as in any of the above embodiments, arranged between two adjacent cold plates to prevent vibration from being transmitted between the two adjacent cold plates.

[0016] The vibration isolation component for a dilution refrigerator provided by the present invention prevents the vibration source from transmitting vibration to the isolation target as much as possible by setting a conduction path of the second set of side plates-the second base-the vibration isolation body-the first base-the first set of side plates, and makes the vibration be gradually absorbed by the vibration isolation body during the transmission process. In addition, such a connection method also has a certain blocking effect on heat transfer, and has high structural stability and strong tensile and compressive resistance. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional schematic diagram of a vibration isolation component for a dilution refrigerator provided by the present invention;

[0018] Figure 2 is a schematic cross-sectional view of a vibration isolation component for a dilution refrigerator provided by the present invention;

[0019] Figure 3 yes Figure 1 A perspective schematic diagram of the exemplary embodiment shown in FIG. 1 after the vibration isolation body, a portion of the first side plate, and a portion of the second side plate are removed;

[0020] Figure 4 It is a three-dimensional schematic diagram of the dilution refrigerator provided by the present invention.

[0021] In the drawings, the meanings of the reference numerals are as follows:

[0022] 1. Vibration isolation body;

[0023] 11. Cavity;

[0024] 2. Connect components;

[0025] 20. Strip groove;

[0026] 21. First base;

[0027] 22. Second base;

[0028] 23. The first set of side panels;

[0029] 24. The second set of side panels;

[0030] 25. Upper end cover;

[0031] 26. Lower end cover;

[0032] 3. Cold dishes;

[0033] 4. Refrigerator body;

[0034] 5. Vibration isolation components. DETAILED DESCRIPTION

[0035] Below, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present invention. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of embodiments of the present invention. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known structures and technologies are omitted to avoid unnecessary confusion of concepts of the present invention.

[0036] The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. The terms "comprise", "include", etc. used herein indicate the existence of the features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0037] All terms (including technical and scientific terms) used herein have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0038] When using expressions such as "at least one of A, B, and C, etc.", they should generally be interpreted according to the meaning of the expression commonly understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0039] Figure 1 is a three-dimensional schematic diagram of a vibration isolation component for a dilution refrigerator provided by the present invention, Figure 2 is a schematic cross-sectional view of a vibration isolation component for a dilution refrigerator provided by the present invention, Figure 3 yes Figure 1 The three-dimensional schematic diagram of the exemplary embodiment shown in the figure is a diagram in which the vibration isolation body, a part of the first side plate and a part of the second side plate are removed. Figure 4 It is a three-dimensional schematic diagram of the dilution refrigerator provided by the present invention.

[0040] An exemplary embodiment of the present invention provides a vibration isolation member 5 for a dilution refrigerator, such as Figure 1-Figure 4As shown, it includes a vibration isolation body 1 and a connection component 2. A plurality of cavities 11 for absorbing vibration waves are formed inside the vibration isolation body 1. The connection component 2 includes a first base 21 and a second base 22, which are respectively connected to the two ends of the vibration isolation body 1. The connection component 2 also includes a first group of side panels 23 and a second group of side panels 24, which are arranged around the vibration isolation body 1, and the first end of the first group of side panels 23 is connected to the first base 21, and the second end of the first group of side panels 23 extends out of the second base 22 and is connected to the isolation target. The first end of the second group of side panels 24 is connected to the second base 22, and the second end of the second group of side panels 24 extends out of the first base 21 and is connected to the vibration source.

[0041] In such an embodiment, the two ends of the vibration isolation member 5 are respectively connected to the vibration source and the isolation target to prevent the vibration from being transmitted to the isolation target. Specifically, the vibration source is connected to the second group of side plates 24, the second group of side plates 24 is connected to the second base 22, the second base 22 is connected to the vibration isolation body 1, the vibration isolation body 1 is connected to the first base 21, the first base 21 is connected to the first group of side plates 23, and the first group of side plates 23 is connected to the isolation target. In terms of spatial position, the transmission path of the vibration wave is roughly N-shaped or S-shaped, and the vibration absorption cavity 11 in the vibration isolation body 1 is used to effectively suppress the vibration wave from the vibration source to the isolation target. At the same time, by connecting the first base 21 located at the two ends of the vibration isolation body 1 to the isolation target, the second base 22 to the vibration source, and the first base 21 and the second base 22 are rigidly connected by the vibration isolation body 1, the vibration wave can be effectively blocked no matter from which direction it is transmitted, and the structural stability is high, and the tensile and compressive resistance is strong.

[0042] In some other embodiments, the material of the vibration isolation body 1 includes but is not limited to copper, nickel, titanium and aluminum, preferably nickel, because nickel has good ductility and is easy to be welded to the first base 21 and the second base 22.

[0043] Furthermore, the material of the first set of side plates 23 and the second set of side plates 24 is preferably stainless steel, and the material of the first base 21 and the second base 22 is preferably copper. Since the working temperature of the dilution refrigerator is extremely low (usually lower than 100mk), stainless steel with high stability at extremely low temperatures is used to provide sufficient support strength, and since the first base 21 and the second base 22 need to be connected to the first set of side plates 23 and the second set of side plates 24, such as a screw connection, and the first base 21 and the second base 22 also need to be connected to the vibration isolation body 1, such as a soldering connection, copper with a relatively moderate thermal expansion coefficient is selected in combination with stainless steel.

[0044] In addition, in a dilution refrigerator, the vibration source and isolation target are usually the upper cold plate and the lower cold plate (the temperature of the upper cold plate is higher than that of the lower cold plate). Therefore, while isolating the vibration, it is also necessary to have a heat leakage prevention function. The low-temperature thermal conductivity of stainless steel is low, and the low-temperature thermal conductivity of nickel is also lower than that of copper. In addition, the length of the heat conduction path is about three times the actual length of the structure. Therefore, it can effectively reduce the heat transfer from the upper cold plate to the lower cold plate, avoiding affecting the cooling performance of the lower cold plate.

[0045] In an exemplary embodiment, Figure 2 and Figure 3 As shown, the vibration isolation member 5 further includes an upper end cover 25 and a lower end cover 26, wherein the upper end cover 25 is suspended above the first base 21, and the second set of side plates 24 are connected to the vibration source through the upper end cover 25. The lower end cover 26 is suspended below the second base 22, and the first set of side plates 23 are connected to the isolation target through the lower end cover 26.

[0046] In such an embodiment, the upper end cover 25 and the lower end cover 26 are used as intermediate connecting members, so that the connection between the entire vibration isolation component 5 and the vibration source and the isolation target is more stable.

[0047] Exemplarily, the upper end cover 25 and the lower end cover 26 are also made of stainless steel. The upper end cover 25, the lower end cover 26 and the vibration source and the isolation target, as well as the upper end cover 25, the lower end cover 26 and the second group of side plates 24 and the first group of side plates 23 are all connected by bolts to improve the connection stability.

[0048] In an exemplary embodiment, Figure 1 and Figure 3 As shown, the first group of side plates 23 includes a plurality of first side plates, and the second group of side plates 24 includes a plurality of second side plates, and the first side plates and the second side plates are alternately distributed along the circumferential direction.

[0049] In such an embodiment, the vibration isolation body 1 is constructed into a cylindrical shape, and the first side plate and the second side plate surrounding the vibration isolation body 1 are side plates with a certain curvature, and the first side plate and the second side plate are respectively distributed at intervals along the circumferential direction. On the projection surface along the axial direction of the vibration isolation body 1, the first side plate and the second side plate are alternately distributed along the circumferential direction, so that the vibration wave or heat is more dispersed and uniform when it is transmitted along the side plate.

[0050] In some other embodiments, such as Figure 2 and Figure 3 As shown, the surfaces of the first base 21 and the second base 22 facing the vibration isolation body 1 are formed with receiving grooves for receiving the end of the vibration isolation body 1. Accordingly, the cross section of the receiving groove is configured to be circular to match the vibration isolation body 1.

[0051] According to an embodiment of the present invention, the first side plate and the second side plate are staggered with each other in the length direction of the vibration isolation body 1 to form a toothed structure.

[0052] In such an implementation mode, see Figure 1 As shown, in the length direction of the vibration isolation body 1, the first end of the first side plate is roughly flush with the position of the first base 21, and the second end of the first side plate is roughly flush with the position of the lower end cover 26; the first end of the second side plate is roughly flush with the position of the second base 22, and the second end of the second side plate is roughly flush with the position of the upper end cover 25, and the upper end cover 25 is higher than the first base 21, and the lower end cover 26 is lower than the second base 22. The toothed structure formed in this way is conducive to extending the transmission path of vibration and improving structural stability.

[0053] In an exemplary embodiment, Figure 1 and Figure 3 As shown, a plurality of strip grooves 20 are formed on the first side plate and the second side plate, which are suitable for extending the transmission path of the vibration wave on the first side plate and the second side plate.

[0054] In such an embodiment, the strip grooves 20 are provided to allow the vibration wave and heat to deviate from the original single path during transfer, that is, transfer from the first end of the first side plate or the second side plate to the second end, and become an irregular transfer path.

[0055] According to an embodiment of the present invention, Figure 1 and Figure 3 As shown, the first side plate and the second side plate are both constructed as trapezoidal side plates.

[0056] In such an implementation, the trapezoidal side panels have better stability when subjected to bending and torsion forces, and the stiffness distribution is more reasonable, thereby reducing the probability of resonance. Figure 1 and Figure 3 As shown, the first side plate and the second side plate are both trapezoidal side plates with a certain curvature to surround the vibration isolation body 1. The longer bottom side of the trapezoidal side plate is close to the upper end cover 25 / lower end cover 26, and the shorter bottom side is close to the second base 22 / first base 21.

[0057] In some other embodiments, the first side plate and the second side plate may also be rectangular plates or other shapes that are easy to manufacture.

[0058] According to the embodiment of the present invention, the strip groove 20 extends from one side edge of the trapezoidal side plate to the other side edge.

[0059] In such an implementation, Figure 1 and Figure 3As shown, the strip groove 20 extends from one side of the trapezoidal side panel to the other side, so that the entire trapezoidal side panel is constructed into an S shape or a plurality of S shapes connected end to end. This can reduce the design difficulty, while reducing the structural complexity of the trapezoidal side panel and reducing the occurrence of abnormal vibration transmission or resonance.

[0060] According to the embodiment of the present invention, the extending direction of the strip groove 20 is parallel to the bottom side of the trapezoidal side plate.

[0061] In such an embodiment, by making the strip groove 20 parallel to the bottom edge of the trapezoidal side plate, the difficulty of designing and processing the trapezoidal side plate and the strip groove 20 is further reduced.

[0062] In an exemplary embodiment, the cross section of the vibration isolation body 1 is configured in a honeycomb shape.

[0063] In such an embodiment, the vibration isolation body 1 is composed of the vibration isolation material and the cavity 11. When one end of the vibration isolation body 1 is subjected to vibration excitation, the honeycomb structure composed of the material and the cavity 11 can disperse the vibration energy and convert the vibration energy into heat energy by means of the elastic deformation of the material itself, thereby effectively preventing the vibration from being transmitted from one end to the other end of the vibration isolation body 1. At the same time, the honeycomb structure is also characterized by light weight and stable structure, and can resist strong impact.

[0064] Exemplarily, the cross-section of the cavity 11 in the vibration isolation body 1 is preferably a hexagon, because its production and manufacturing technology is mature, the cost is low, and it is easy to promote.

[0065] An exemplary embodiment of the present invention further provides a dilution refrigerator, such as Figure 4 As shown, it includes cold plates 3 arranged at intervals in multiple stages along the length direction, a refrigerator body 4, and a plurality of vibration isolation components 5 as in any of the above embodiments. A clearance hole is opened in the middle of each cold plate 3, and the refrigerator body 4 is suspended in the clearance hole, which is suitable for cooling the cold plate 3. A plurality of vibration isolation components 5 are arranged between two adjacent cold plates 3 to prevent vibration from being transmitted between the two adjacent cold plates 3.

[0066] In such an embodiment, more specifically, the cold plate 3 is provided with four levels, and the high-temperature cold plate (usually 20K-50K level) is cooled by an external refrigerator (such as a pulse tube refrigerator) to provide pre-cooling for the next level cold plate. 4 He evaporative cooling, the temperature drops to about 4K. Low temperature cold plate (usually 1K level) uses 4 He is cooled by evaporation under reduced pressure, and the temperature drops to about 1K. The ultra-low temperature cold plate (usually milliK level) is cooled by 3 He- 4He dilution refrigeration, the temperature drops to 0.8mK or even lower. Since each level of cold plate 3 is in direct contact with the refrigerator body 4, effective vibration isolation measures are required, especially for the extremely low temperature cold plate used to cool the quantum chip. By setting a vibration isolation component 5 between adjacent cold plates 3, vibration is prevented from being transmitted between adjacent cold plates 3. The high temperature cold plate at the top will be subject to more vibration from the external refrigerator, so the vibration isolation component 5 can also make this part of the vibration gradually attenuate during the downward transmission process.

[0067] In addition, the vibration isolation component 5 can also prevent the heat of the upper cold plate from being transferred to the lower cold plate by extending the heat transfer path, thereby ensuring the cooling effect.

[0068] It will be appreciated by those skilled in the art that the features described in the various embodiments of the present invention may be combined and / or combined in various ways, even if such combinations or combinations are not explicitly described in the present invention. In particular, without departing from the spirit and teachings of the present invention, the features described in the various embodiments of the present invention may be combined and / or combined in various ways. All of these combinations and / or combinations fall within the scope of the present invention.

[0069] The embodiments of the present invention are described above. However, these embodiments are only for the purpose of illustration, and are not intended to limit the scope of the present invention. Although each embodiment is described above, it does not mean that the measures in each embodiment cannot be used in combination advantageously. Without departing from the scope of the present invention, those skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present invention.

Claims

1. A vibration isolation component for a dilution refrigerator, characterized in that: include: A vibration isolation body, wherein a plurality of cavities are formed inside the vibration isolation body for absorbing vibration waves; Connectivity components, including: A first base and a second base are connected to two ends of the vibration isolation body respectively; The first group of side panels and the second group of side panels are arranged around the vibration isolation body, the first end of the first group of side panels is connected to the first base, the second end of the first group of side panels extends out of the second base and is connected to the isolation target; the first end of the second group of side panels is connected to the second base, the second end of the second group of side panels extends out of the first base and is connected to the vibration source.

2. The vibration isolation member according to claim 1, characterized in that: Also includes: an upper end cover, suspended above the first base, wherein the second set of side plates is connected to the vibration source through the upper end cover; The lower end cover is suspended below the second base, and the first set of side plates is connected to the isolation target through the lower end cover.

3. The vibration isolation member according to claim 1, characterized in that: The first group of side plates includes a plurality of first side plates, the second group of side plates includes a plurality of second side plates, and the first side plates and the second side plates are alternately distributed along a circumferential direction.

4. The vibration isolation member according to claim 3, characterized in that: The first side plate and the second side plate are staggered with each other in the length direction of the vibration isolation body to form a toothed structure.

5. The vibration isolation member according to claim 3, characterized in that: A plurality of strip grooves are formed on the first side plate and the second side plate, which are suitable for extending the transmission path of the vibration wave on the first side plate and the second side plate.

6. The vibration isolation member according to claim 5, characterized in that: The first side plate and the second side plate are both configured as trapezoidal side plates.

7. The vibration isolation member according to claim 6, characterized in that: The strip groove extends from one side edge of the trapezoidal side plate to the other side edge.

8. The vibration isolation member according to claim 7, characterized in that: The extending direction of the strip groove is parallel to the bottom edge of the trapezoidal side plate.

9. The vibration isolation member according to claim 1, characterized in that: The cross section of the vibration isolation body is configured in a honeycomb shape.

10. A dilution refrigerator, characterized in that: include: The cold plates are arranged in multiple stages along the length direction, and a clearance hole is opened in the middle of each stage of the cold plate; A refrigerator body is suspended in the clearance hole and is suitable for cooling the cold plate; A plurality of vibration isolation components according to any one of claims 1 to 9 are disposed between two adjacent stages of the cold plates to prevent vibration from being transmitted between the two adjacent stages of the cold plates.

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