An ultrafast gas valve with a switching time less than 100 microseconds suitable for use in a plasma gun

Abstract

The application provides a superfast air valve with a switch time less than 100 microseconds, which is suitable for a plasma gun and relates to the field of superfast air valves of plasma guns.The application comprises a superfast air valve base, a disc spring and a moving assembly;the top of the superfast air valve base is internally and externally provided with an inner sealing groove, an outer sealing groove and a coil groove, the inner sealing groove is provided with an inner sealing ring, the outer sealing groove is provided with an outer sealing ring, the coil groove is provided with a coil, the two ends of the coil pass through the bottom of the superfast air valve base and are used for being connected with a capacitor;the top of the superfast air valve base is also provided with an annular gas storage cavity, the annular gas storage cavity is located between the inner sealing groove and the outer sealing groove;the moving assembly is located at the top of the inner sealing groove, the outer sealing groove, the coil groove and the annular gas storage cavity, and is used for sealing the annular gas storage cavity;the disc spring is located at the top of the moving assembly.The switch time of the superfast air valve provided by the application can be controlled within <100 microseconds, and the air intake amount within one switch time can be kept at 1.0-5.0 mg.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of ultrafast gas valve of plasma gun, in particular to an ultrafast gas valve with switch time less than 100 microseconds for plasma gun. BACKGROUND

[0002] In the field of plasma jet driven magnetic inertial fusion, a special plasma gun is needed to generate plasma jet, and then to converge to generate plasma liner, so as to compress the magnetized plasma target, so as to achieve the condition of fusion reaction.

[0003] The working principle of the plasma gun is to first generate initial plasma between the inner and outer electrodes by glow discharge pre-ionization, and then to accelerate the initial plasma between the inner and outer electrodes of the plasma gun by applying a large current, so as to achieve the required jet quality, speed, density, temperature and core length, etc.

[0004] Before the glow discharge pre-ionization of the plasma gun, an initial voltage is applied between the inner and outer electrodes by a capacitor, and before the glow discharge, the voltage is maintained at a fixed value. After the neutral gas (such as argon Ar) is injected into the inner and outer electrodes through the ultrafast gas valve and reaches a certain gas pressure, the gas breakdown discharge condition is reached, and then the glow discharge plasma is generated (by adding a resistor in the circuit to limit the discharge current of the capacitor).

[0005] Therefore, the ultrafast gas valve plays a crucial role in the glow discharge pre-ionization process. Not only does it relate to the quality of gas injection, but also affects the length and uniformity of gas injection. If the quality of gas injection is too low, the quality of the jet will be insufficient. If the length of gas injection is too long, the length of gas diffusion in the electrode will be too long, and the length of the plasma generated by pre-ionization will also be too long, and finally the length of the plasma ejected under the acceleration of the large current will also be too long. In addition, it also affects the key indicators such as density, speed and temperature of the jet.

[0006] In order to meet the above requirements of gas injection quality, length and uniformity, a special ultrafast gas valve needs to be developed. SUMMARY

[0007] In order to solve the above-mentioned high requirements of gas injection quality, length and uniformity in the plasma gun, the present application provides an ultrafast gas valve with switch time less than 100 microseconds for plasma gun, which can control the switch time within <100 microseconds, and the gas injection amount within one switch time can be maintained at 1.0-5.0 mg.

[0008] The application discloses an ultrafast gas valve with a switch time less than 100 microseconds, which is suitable for a plasma gun and comprises an ultrafast gas valve base, a disc spring and a moving assembly; the top of the ultrafast gas valve base is internally and externally provided with an inner sealing groove, an outer sealing groove and a coil groove; an inner sealing ring is arranged in the inner sealing groove; an outer sealing ring is arranged in the outer sealing groove; a coil is arranged in the coil groove; the two ends of the coil pass through the bottom of the ultrafast gas valve base and are used for being connected with a capacitor; the top of the ultrafast gas valve base is further provided with an annular gas storage cavity, the annular gas storage cavity is located between the inner sealing groove and the outer sealing groove, the bottom of the annular gas storage cavity is provided with an air inlet channel in communication with the annular gas storage cavity, and the air inlet channel is used for being in communication with external air inlet equipment; the moving assembly is located at the top of the inner sealing groove, the outer sealing groove, the coil groove and the annular gas storage cavity, and is used for sealing the annular gas storage cavity; the disc spring is located at the top of the moving assembly and is used for resetting the moving assembly; the top of the disc spring is provided with a support, and the support is used for being connected with an inner electrode.

[0009] In an implementation, the lower outer edge of the disc spring is in contact with the top of the moving assembly, and the upper inner edge of the disc spring is in contact with the bottom of the support.

[0010] In some implementations, a pressure gasket is further arranged between the disc spring and the support, and is used for adjusting the initial load of the disc spring; and / or an isolation pressing plate is further arranged between the coil groove and the moving assembly.

[0011] In an implementation, the bottom of the ultrafast gas valve base is further provided with a temperature measuring groove, the temperature measuring groove is located below the coil groove, and a temperature sensor is arranged in the temperature measuring groove.

[0012] In some possible embodiments, the switching time of the motion assembly is < 100 microseconds; and / or, the stroke of the motion assembly is 0.2-1.5 mm, and the air intake amount reached by one switching of the motion assembly is 1.0-5.0 mg; and / or, the instantaneous current generated in the coil is 8-12 kA, and the repulsive force of the instantaneous magnetic field generated in the coil is > 10 kN; and / or, the stiffness coefficient of the disc spring is > 5000 N / mm; and / or, the yield strength of the disc spring is > 1000 MPa; and / or, the material of the motion assembly is any one of a metal alloy, a composite structure between metal alloys, or a composite structure between a metal alloy and a non-metal alloy; and / or, the electrical conductivity of the motion assembly is 17.7 MS / m-20.6 MS / m; and / or, the outer diameter of the motion assembly is 90-110 mm, the inner diameter is 70-80 mm, the thickness is 0.5-2.0 mm, and the mass is 20-50 g; and / or, the number of turns of the coil is 2-6 turns, the outer diameter of the coil is 90-110 mm, and the extension length at both ends of the coil is 180-220 mm; and / or, the material of the coil is an enameled copper coil; and / or, the withstand voltage of the coil is > 6 kV; and / or, the wire diameter of the coil is 1.0-2.0 mm; and / or, the diameter of the air inlet channel is 4-8 mm, and the number of air inlet channels is 1-3; and / or, the materials of the inner sealing ring and the outer sealing ring are fluororubber materials; and / or, the material of the super-fast air valve is PEEK; and / or, the diameter of the outer sealing ring is 1-5 mm; and / or, the diameter of the inner sealing ring is 1-3 mm.

[0013] In some possible embodiments, the thickness of the isolation pressure plate is 0.5-1.5 mm; and / or, the outer diameter of the isolation pressure plate is 90-110 mm; and / or, the material of the isolation pressure plate is a fluororubber material; and / or, the material of the pressure gasket is metal; and / or, an M5-M7 internal thread is arranged in the temperature measuring groove; and / or, the temperature sensor has a withstand voltage > 6 kV; and / or, the temperature sensor and the temperature measuring groove are connected through a heat-conducting adhesive; and / or, the model of the temperature sensor is a Pt100 platinum resistance.

[0014] In one possible embodiment, a capacitor is further included, the capacitor comprises a sub-capacitor and a thyristor connected to each other, and the capacitor is located below the bottom of the super-fast air valve; and the two ends of the coil are connected to the sub-capacitor and the thyristor, respectively.

[0015] In some possible implementation manners, the capacitor comprises 6-10 mutually connected capacitors, each sub-capacitor has a capacitance of 5-10 mu F, and the capacitor has a capacitance of 60-80 mu F; and / or, the thyristor has a withstand voltage value of >3 kV, and a maximum withstand current value of >10 kA; and / or, the thyristor has a current rise time of <20 mu s; and / or, the number of the gas inlet grooves is 40-120.

[0016] The application further provides a method for using the super-fast gas valve with a switching time of less than 100 microseconds for a plasma gun, comprising the following steps:

[0017] Step 1) the coil is powered and a magnetic field is generated, the repulsive force of the magnetic field pushes the moving assembly upward, and the neutral gas flows out of the annular gas storage cavity;

[0018] Step 2) the disc spring presses the moving assembly downward, and the moving assembly seals the annular gas storage cavity.

[0019] The application further provides a use of the super-fast gas valve with a switching time of less than 100 microseconds for a plasma gun.

[0020] The super-fast gas valve with a switching time of less than 100 microseconds for a plasma gun provided by the application has the following beneficial effects: the repulsive force of the magnetic field generated when the coil is powered can push the moving assembly upward, and the disc spring can press the moving assembly downward after the moving assembly is pushed upward, the switching time of the super-fast gas valve can be controlled to be less than 100 microseconds, and the gas inlet amount in one switching time can be maintained at 1.0-5.0 mg. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a sectional view of the overall structure of the first embodiment of the application.

[0022] Figure 2 It is a sectional view of the local structure of the first embodiment of the application.

[0023] REFERENCE NUMERALS

[0024] Base of super-fast gas valve 1

[0025] Inner sealing ring 11

[0026] Inner sealing groove 11.1

[0027] Outer sealing ring 12

[0028] Outer sealing groove 12.1

[0029] Coil 13

[0030] Coil groove 13.1

[0031] Isolation pressing plate 13.2

[0032] Annular gas storage cavity 14

[0033] Air inlet channel 14.1

[0034] Temperature measurement groove 14.2

[0035] Disc spring 2

[0036] Motion assembly 3

[0037] Support 4

[0038] Pressure gasket 5

[0039] Temperature sensor 6

[0040] Inner electrode 7

[0041] Mounting groove 71

[0042] Air inlet channel 72

[0043] Outer electrode 8

[0044] Capacitor 9

[0045] Capacitor 91

[0046] Thyristor 92

[0047] Gap channel Gc DETAILED DESCRIPTION

[0048] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application. In the description of the present application, it should be noted that the terms "left side", "right side", "upper side", "lower side", "upper", "lower" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the purpose of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0049] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0050] In addition, in the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specified.

[0051] The embodiment of the present application provides a super-fast gas valve with a switching time less than 100 microseconds suitable for a plasma gun, in combination with reference to Figure 1 and Figure 2 , comprising a super-fast gas valve base 1, a disc spring 2 and a moving assembly 3, the moving assembly 3 can generally be a ring-shaped flying disc; the top of the super-fast gas valve base 1 is provided with an inner sealing groove 11.1, an outer sealing groove 12.1 and a coil groove 13.1 from inside to outside, which can be understood as from the central axis of the super-fast gas valve base 1 to the outside in turn, the inner sealing groove 11.1, the outer sealing groove 12.1 and the coil groove 13.1 are all annular grooves, the inner sealing groove 11.1 is provided with an inner sealing ring 11, the outer sealing groove 12.1 is provided with an outer sealing ring 12, and the coil groove 13.1 is provided with a coil 13, both ends of the coil 13 pass through the bottom of the super-fast gas valve base 1 and are used for being connected with a capacitor 9, the coil 13 is generally formed by winding a wire body, so that the coil 13 can form a loop after both ends of the coil 13 are connected with the external capacitor 9; the top of the super-fast gas valve base 1 is also provided with an annular gas storage cavity 14, the annular gas storage cavity 14 is located between the inner sealing groove 11.1 and the outer sealing groove 12.1, the bottom of the annular gas storage cavity 14 is provided with a gas inlet channel 14.1 in communication therewith, and the gas inlet channel 14.1 is used for being in communication with external gas inlet equipment; the moving assembly 3 is located at the top of the inner sealing groove 11.1, the outer sealing groove 12.1, the coil groove 13.1 and the annular gas storage cavity 14, and is used for closing the annular gas storage cavity 14; the disc spring 2 is located at the top of the moving assembly 3 and is used for resetting the moving assembly 3; the top of the disc spring 2 is provided with a support 4, and the support 4 is used for being connected with an inner electrode 7.

[0052] The motion assembly 3 in the application has two states in total, the first state is the state maintained by the motion assembly 3 when no air is introduced, in this state, the motion assembly 3 is firmly pressed on the coil 13, the inner sealing ring 11 and the outer sealing ring 12 by the disc spring 2, at the same time, because the inner sealing ring 11 and the outer sealing ring 12 are respectively located on both sides of the annular gas storage cavity 14, in this state, the motion assembly 3 can close the top of the annular gas storage cavity 14, so that the neutral gas can only temporarily stay in the annular gas storage cavity 14, generally, the external air inlet device continuously introduces the neutral gas into the annular gas storage cavity 14 to maintain the high pressure state in the annular gas storage cavity 14, facilitating the subsequent outflow of the neutral gas. When the application is used to introduce air into the plasma gun, the motion assembly 3 will be instantly pushed up, so that the gas in the annular gas storage cavity 14 can flow out from the top of the annular gas storage cavity 14, over the top of the inner sealing ring 11 and the top of the coil 13, and then flow out from the super-fast gas valve base 1 and flow into the plasma channel between the inner electrode 7 and the outer electrode 8, the force for pushing up the motion assembly 3 is provided by the coil 13, after the external capacitor 9 is electrified, an instantaneous current of 8-12 kA will be generated in the coil 13, and at this time, the repulsive force of the magnetic field generated in the coil 13 is >10 kN, the repulsive force of the magnetic field will push up the motion assembly 3 by 0.2-1.5 mm within <50 μs, and the gas staying in the annular gas storage cavity 14 will escape from the super-fast gas valve base 1 at this time, then the external capacitor 9 stops electrifying the coil 13, the disc spring 2 will firmly press the motion assembly 3 on the coil 13, the inner sealing ring 11 and the outer sealing ring 12 again, and then close the annular gas storage cavity 14 again. Once the motion assembly 3 moves in this way, it is a switch of the super-fast gas valve, the amount of neutral gas introduced in the switch time of the super-fast gas valve can reach 1.0-5.0 mg, in addition, the rigidity coefficient of the disc spring 2 is >5000 N / mm, the yield strength is >1000 Mpa, generally, the disc spring 2 can be made of metal to ensure that the rigidity coefficient and the yield strength meet the standards, so that the disc spring 2 can press down the motion assembly 3 within <50 μs, the metal is preferably 51CrV4, the yield strength of this material is >1000 Mpa, and the performance is excellent.

[0053] In summary, the switch time of the super-fast gas valve should be the sum of the time when the motion assembly 3 is pushed up and the time when the motion assembly 3 is pressed down, therefore, the motion assembly 3 in the super-fast gas valve provided by the application can be pushed up within <50 μs and pressed down within <50 μs, the switch time of the super-fast gas valve can be controlled within <100 μs, and the amount of air introduced in the switch time can be kept at 1.0-5.0 mg.

[0054] In some possible embodiments of the motion assembly 3, the material of the motion assembly 3 is any one of a metal alloy, a composite structure between metal alloys, or a composite structure between a metal alloy and a non-metal alloy, the outer diameter of the motion assembly 3 is 90-110 mm, the inner diameter of the motion assembly 3 is 70-80 mm, the thickness of the motion assembly 3 is 0.5-2.0 mm, and the mass of the motion assembly 3 is 20-50 g. In a specific embodiment of the motion assembly 3, in order to meet the requirements of light weight, high conductivity, and high strength, the material of the motion assembly 3 is preferably 7075 aluminum alloy, and the motion assembly 3 is formed by cutting a bar, so that the isotropy of the material itself can be better guaranteed, the outer diameter of the motion assembly 3 is 108 mm, the inner diameter of the motion assembly 3 is 72 mm, the thickness of the motion assembly 3 is 1.5 mm, and the mass of the motion assembly 3 is about 20 g.

[0055] In some possible embodiments of the coil 13, the number of turns of the coil 13 is 2-6, the outer diameter of the coil 13 is 90-110 mm, the extension length of each end of the coil 13 is 180-220 mm, the withstand voltage of the coil 13 is > 6 kV, and the wire diameter of the coil 13 is 1.0-2.0 mm. In a specific embodiment of the coil 13, the material of the coil 13 is an enameled copper coil, the withstand voltage of the coil 13 is > 6 kV, the wire diameter of the coil 13 is 1.2 mm, the number of turns of the coil 13 is 4, the outer diameter of the coil 13 is about 108 mm, the coil 13 is formed by winding on a dedicated winding tool, and the extension length of each end of the coil 13 is about 200 mm.

[0056] In some possible embodiments of the super-fast gas valve, the diameter of the outer sealing ring 12 is 1-5 mm, the diameter of the inner sealing ring 11 is 1-3 mm, the diameter of the gas inlet channel 14.1 is 4-8 mm, and the number of the gas inlet channels 14.1 is 1-3. In a specific embodiment of the super-fast gas valve, the material of the super-fast gas valve is PEEK, the materials of the inner sealing ring 11 and the outer sealing ring 12 are both fluororubber materials, the fluororubber is widely used in vacuum equipment, the diameter of the outer sealing ring 12 is 4 mm, the diameter of the inner sealing ring 11 is 2 mm, the diameter of the outer sealing ring 12 is greater than that of the inner sealing ring 11, which can slow down the damage to the sealing ring material when the plasma flows back, thereby improving the service life of the outer sealing ring 12 and the inner sealing ring 11, the diameter of the gas inlet channel 14.1 is 6 mm, and the number of the gas inlet channels 14.1 is 2, and the joint adopts an M6 thread.

[0057] In the super-fast gas valve with a switching time of less than 100 microseconds suitable for the plasma gun provided in the embodiments of the present application, in combination with reference to Figure 1 and Figure 2 , the Figure 2The lower outer edge of the disc spring 2 contacts the top of the moving component 3, and the upper inner edge of the disc spring 2 contacts the bottom of the support member 4. It can be understood that the lower outer edge of the disc spring 2 is its outer edge, and the upper inner edge is its inner edge. Both the lower outer edge and the upper inner edge of the disc spring 2 are key parts for load transmission and stress distribution. In this invention, contacting the lower outer edge of the disc spring 2 with the top of the moving component 3 and the upper inner edge of the disc spring 2 with the bottom of the support member 4 allows for downward pressure on the moving component 3 within <50μs. Additionally, the disc spring 2 is typically designed with a dedicated connecting hole for mechanical connection with the support member 4. In a specific embodiment, see reference... Figure 1 and Figure 2 A pressure pad 5 is provided between the disc spring 2 and the support member 4. The pressure pad 5 is used to adjust the initial load of the disc spring 2. It is understood that the upper inner edge of the disc spring 2 contacts the bottom of the support member 4, and the support member 4 is usually fixedly connected to the inner electrode 7. Therefore, adjusting the thickness of the pressure pad 5 can adjust the initial load of the disc spring 2. When the thickness of the pressure pad 5 is large, the initial compression of the disc spring 2 by the pressure pad 5 is large, and the initial load is large; when the thickness of the pressure pad 5 is small, the initial compression of the disc spring 2 by the pressure pad 5 is small, and the initial load is small. By changing the initial compression, the intake volume of neutral gas and the opening and closing time of the ultra-fast gas valve can be adjusted. Additionally, the pressure pad 5 is made of metal, preferably 304 stainless steel. In another specific embodiment, see reference... Figure 1 and Figure 2 For key points, please refer to the following. Figure 2 An isolation plate 13.2 is also provided between the coil groove 13.1 and the moving component 3. The isolation plate 13.2 serves two purposes: firstly, it insulates the coil 13 from the moving component 3; secondly, it acts as a buffer and shock absorber, preventing the moving component 3 from impacting the coil 13 during resetting and effectively preventing damage to the coil 13. In some feasible embodiments of the isolation plate 13.2, its thickness is 0.5–1.5 mm, and its outer diameter is 90–110 mm. In a specific embodiment of the isolation plate 13.2, its thickness is 1 mm, its outer diameter is 108 mm, and its material is fluororubber.

[0058] The ultrafast gas valve with an on / off time of less than 100 microseconds suitable for plasma guns provided in this embodiment of the invention is described in reference to... Figure 1The bottom of the super-fast air valve base 1 is also provided with a temperature measuring groove 14.2 located below the coil groove 13.1, and a temperature sensor 6 is arranged in the temperature measuring groove 14.2. It can be understood that the temperature sensor 6 is used to monitor the temperature of the super-fast air valve base 1 in real time. Since some heat is generated on the coil 13 and related components during the emission process of the plasma gun, and some heat is generated on the inner and outer electrodes 8, both parts of heat will be transferred to the super-fast air valve base 1 to cause temperature rise, so as to understand whether the working state is within the allowable range. In a specific embodiment, the temperature sensor 6 selects a Pt100 platinum resistance as a temperature sensing element, adopts a grade A precision, and the head is installed in the temperature measuring groove 14.2 through a dedicated M6 size threaded plug. An M6 size internal thread is designed on the inner wall of the temperature measuring groove 14.2, and the temperature measuring groove 14.2 is matched and installed with the M6 threaded plug. At the same time, the inside of the temperature measuring groove 14.2 is coated with a heat-conducting gel to ensure good contact between the temperature probe of the temperature sensor 6 and the super-fast air valve base 1 (usually made of PEEK material). As an illustration, the platinum resistance connecting line adopts an insulation layer resistant to 6kV or more to ensure that it is not broken down under high voltage. The insulation layer can adopt a PU (polyurethane) sleeve.

[0059] In the super-fast air valve provided by the embodiment of the present application and applicable to the plasma gun, referring to Figure 1 The capacitor 9 includes sub-capacitors 91 and thyristors 92 connected to each other, and is located below the super-fast air valve base 1. The two ends of the coil 13 are connected to the sub-capacitors 91 and the thyristors 92, respectively. It can be understood that the sub-capacitors 91 are used to provide voltage and current, and the thyristors 92 are used to achieve rapid conduction and reach a peak current after receiving an external trigger signal, so as to achieve rapid discharge of the capacitor 9. In some feasible embodiments, the capacitor 9 includes 6-10 sub-capacitors 91 connected to each other, the capacitance value of the capacitor 9 is 72μF, the capacitance value of each sub-capacitor 91 is 5-10μF, the withstand voltage value of the thyristor 92 is >3kV, the maximum current value that the thyristor 92 can withstand is >10kA, and the current rise time of the thyristor 92 is <20μs. In a specific embodiment, the capacitor 9 includes 8 sub-capacitors 91, and the capacitance value of each sub-capacitor 91 is 9μF. The capacitance value of the capacitor 9 is 72μF.

[0060] The present application also provides a use method of the super-fast air valve with a switching time less than 100 microseconds and applicable to the plasma gun, which includes the following steps:

[0061] Step 1) Coil 13 is energized and generates a magnetic field by the right hand rule, the repulsive force of the magnetic field pushes the moving assembly 3 upward, the neutral gas flows out of the annular gas cavity 14. Further, the capacitor 9 is discharged rapidly, the current rising time of the thyristor 92 is less than 20 μs, the moving assembly 3 is pushed up in less than 50 μs.

[0062] Step 2) The disc spring 2 presses the moving assembly 3 downward, the moving assembly 3 seals the annular gas cavity 14. Further, the moving assembly 3 is pressed down in less than 50 μs.

[0063] The application also provides a use of the ultrafast gas valve with a switching time less than 100 μs for the plasma gun, wherein, referring to Figure 1 , the application can be assisted by referring to Figure 1 and Figure 2 , including an inner electrode 7, an outer electrode 8 and an ultrafast gas valve with a switching time less than 100 μs for the plasma gun, a gap channel Gc is formed between the inner electrode 7 and the outer electrode 8, the bottom of the inner electrode 7 is provided with a mounting groove 71, and the ultrafast gas valve is arranged in the mounting groove 71; the top of the support 4 is connected with the inner top surface of the slotted gas valve, a plurality of gas inlet through grooves 72 are arranged in the side wall of the inner electrode 7, the gas inlet end of the gas inlet through groove 72 is connected with the mounting groove 71, and the gas outlet end of the gas inlet through groove 72 is connected with the gap channel Gc; the gas inlet end of the gas inlet through groove 72 is aligned with the moving assembly 3. When the moving assembly 3 is pushed up, the gas inlet through groove 72 is connected with the annular gas cavity 14, the neutral gas can escape from the annular gas cavity 14, pass through the top of the outer sealing ring 12 and the top of the coil 13, enter the gas inlet through groove 72, and then enter the annular gas cavity 14 from the gas inlet through groove 72, so as to realize one-time gas inlet.

[0064] Example one

[0065] In the embodiment, the material of the coil 13 is enameled copper coil 13, the voltage resistance of the coil 13 is greater than 6kV, the wire diameter of the coil 13 is 1.2mm, the number of turns of the coil 13 is 4, the outer diameter of the coil 13 is about 108mm, the extension length of both ends of the coil 13 is about 200mm, the instantaneous current generated in the coil 13 is 8-12kA, and the repulsion of the magnetic field generated in the coil 13 is greater than 10kN. The lower outer edge of the disc spring 2 is in contact with the top of the moving assembly 3, the upper inner edge of the disc spring 2 is in contact with the bottom of the support 4, the material of the disc spring 2 is 51CrV4, the stiffness coefficient of the disc spring 2 is greater than 5000N / mm, and the yield strength of the disc spring 2 is greater than 1000Mpa. The material of the moving assembly 3 is 7075 aluminum alloy, the thickness is 1.5mm, and the mass is about 20g. The capacitor 9 is composed of 8 sub-capacitors 91, the capacitance of each sub-capacitor 91 is 9μF, the capacitance of the capacitor 9 is 72μF, the voltage resistance of the thyristor 92 is greater than 3kV, the maximum current value that the thyristor 92 can withstand is greater than 10kA, and the current rise time of the thyristor 92 is less than 20μs. In summary, the switching time of the super-fast air valve provided by the application is less than 100μs, and the air intake amount in one switching time can be maintained at 1.0-5.0mg.

[0066] The above only describes the preferred embodiments of the present application, and it should be noted that those skilled in the art can make several improvements and replacements without departing from the technical principles of the present application, and these improvements and replacements should also be considered as the protection scope of the present application.

Claims

1. An ultrafast gas valve with a switching time less than 100 microseconds suitable for use in a plasma gun, characterized in that: It includes an ultra-fast air valve base (1), a disc spring (2), and a motion component (3), wherein the motion component (3) is a ring-shaped flying disc; The top of the ultra-fast air valve base (1) is provided with an inner sealing groove (11.1), an outer sealing groove (12.1), and a coil groove (13.1) from the inside to the outside. An inner sealing ring (11) is provided in the inner sealing groove (11.1), an outer sealing ring (12) is provided in the outer sealing groove (12.1), and a coil (13) is provided in the coil groove (13.1). The two ends of the coil (13) extend out of the bottom of the ultra-fast air valve base (1) and are used to connect to a capacitor. The top of the ultra-fast air valve base (1) is also provided with an annular air storage chamber (14). The annular air storage chamber (14) is located in the inner sealing groove (11.1). Between 11.1) and the outer sealing groove (12.1), the bottom of the annular gas storage chamber (14) is provided with an air inlet channel (14.1) connected to it. The air inlet channel (14.1) is used to connect with an external air inlet device. When the ultrafast gas valve is used to inlet air, the motion component (3) will be pushed upward instantly, so that the gas in the annular gas storage chamber (14) can flow out from the top of the annular gas storage chamber (14), pass over the top of the inner sealing ring (11) and the top of the coil (13), and then flow out from the ultrafast gas valve base (1) and flow into the plasma channel between the inner electrode and the outer electrode. The motion component (3) is located at the top of the inner sealing groove (11.1), the outer sealing groove (12.1), the coil groove (13.1) and the annular air storage cavity (14), and the motion component (3) is used to close the annular air storage cavity (14); the disc spring (2) is located at the top of the motion component (3) and is used to reset the motion component (3); The disc spring (2) is provided with a support member (4) at its top, and the support member (4) is used to connect with the inner electrode; The switching time of the motion component (3) is <100 µs; The stroke of the motion component (3) is 0.2~1.5mm, and the air intake volume achieved by the motion component (3) once is 1.0~5.0 mg; The electrical conductivity of the motion component (3) is 17.7 MS / m to 20.6 MS / m; The outer diameter of the motion component (3) is 90~110 mm, the inner diameter is 70~80 mm, the thickness is 0.5~2.0 mm, and the mass is 20~50 g.

2. The ultrafast gas valve of claim 1, wherein: The lower outer edge of the disc spring (2) is in contact with the top of the motion component (3), and the upper inner edge of the disc spring (2) is in contact with the bottom of the support member (4).

3. The ultra-fast air valve according to claim 1, characterized in that: A pressure pad (5) is provided between the disc spring (2) and the support member (4), and the pressure pad (5) is used to adjust the initial load of the disc spring (2); an isolation pressure plate (13.2) is provided between the coil groove (13.1) and the motion component (3).

4. The ultra-fast air valve according to claim 3, characterized in that: The bottom of the ultra-fast air valve base (1) is also provided with a temperature measuring groove, which is located below the coil groove (13.1), and a temperature sensor (6) is provided in the temperature measuring groove.

5. The ultra-fast air valve according to claim 1, characterized in that: And / or, the instantaneous current generated in the coil (13) is 8~12 kA, and the repulsive force of the instantaneous magnetic field generated in the coil (13) is >10kN; And / or, the stiffness coefficient of the disc spring (2) is >5000 N / mm; And / or, the yield strength of the disc spring (2) is >1000 MPa; And / or, the coil (13) has 2 to 6 turns, the outer diameter of the coil (13) is 90 to 110 mm, and the extension length at both ends of the coil (13) is 180 to 220 mm; And / or, the coil (13) is made of enameled copper coil; And / or, the coil (13) has a withstand voltage > 6 kV; And / or, the wire diameter of the coil (13) is 1.0~2.0 mm; And / or, the diameter of the air intake channel (14.1) is 4 to 8 mm, and the number of air intake channels (14.1) is 1 to 3; And / or, the inner sealing ring (11) and the outer sealing ring (12) are both made of fluororubber; And / or, the ultra-fast air valve is made of PEEK; And / or, the diameter of the outer sealing ring (12) is 1~5 mm; And / or, the diameter of the inner sealing ring (11) is 1~3 mm.

6. The ultrafast air valve according to claim 4, characterized in that: The thickness of the isolation plate (13.2) is 0.5~1.5 mm; And / or, the outer diameter of the isolation plate (13.2) is 90~110 mm; And / or, the material of the isolation plate (13.2) is fluororubber; And / or, the pressure pad (5) is made of metal; And / or, the temperature measuring groove is provided with an internal thread of M5 to M7; And / or, the withstand voltage of the connection wire of the temperature sensor (6) is >6 kV; And / or, the temperature sensor (6) is connected to the temperature measuring tank by thermally conductive adhesive; And / or, the temperature sensor (6) is a Pt100 platinum resistance thermometer.

7. The ultra-fast air valve according to claim 1, characterized in that: It also includes a capacitor (9), which includes a sub-capacitor (91) and a thyristor (92) connected to each other. The capacitor (9) is located below the ultra-fast air valve base (1), and the two ends of the coil (13) are connected to the sub-capacitor (91) and the thyristor (92) respectively.

8. The ultra-fast air valve according to claim 7, characterized in that: The capacitor (9) includes 6 to 10 interconnected sub-capacitors (91), each sub-capacitor (91) has a capacitance value of 5 to 10 µF, and the capacitor (9) has a capacitance value of 60 to 80 µF. And / or, the withstand voltage of the thyristor (92) is >3 kV, and the maximum withstand current of the thyristor (92) is >10 kA; And / or, the current rise time of the thyristor (92) is <20 µs.

9. A method of using an ultrafast gas valve with an on / off time of less than 100 µs suitable for a plasma gun, as described in any one of claims 1 to 8, characterized in that, It includes the following steps: Step 1) The coil (13) is energized and generates a magnetic field. The repulsive force of the magnetic field pushes the moving component (3) upward, and the neutral gas flows out of the annular gas storage chamber (14). Step 2) The disc spring (2) presses the motion component (3) downward, and the motion component (3) closes the annular air storage chamber (14).

10. The use of an ultrafast gas valve with an on / off time of less than 100 µs, as described in any one of claims 1 to 8, in a plasma gun.

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