Baking equipment and baking method

Abstract

The invention discloses baking equipment and a baking method. The baking equipment comprises an oven main body, and the oven main body comprises a heating box and a normal temperature box; the transmission assembly is arranged in the oven main body, a first transmission assembly is arranged in the heating box, and a second transmission assembly is arranged in the normal temperature box; the transmission assemblies acquire processing data of a to-be-baked material, and the to-be-baked material is conveyed to the heating box or the normal temperature box corresponding to the processing data through the corresponding transmission assemblies by means of the feeding port of the oven body. In this way, materials to be baked with different requirements can be processed, various production requirements are met, and the production yield and the productivity are further improved.

Description

Technical Field

[0001] The present application relates to the field of integrated circuit production equipment, and in particular to a baking device and a baking method. Background Art

[0002] With the rapid development of modern technology, the demand for the types and performance of integrated circuit products continues to grow. Under the premise of pursuing product performance improvement, in order to maintain product quality while reducing costs, it is necessary to improve product production yield and production efficiency.

[0003] In the process of product production, baking equipment provides necessary heat treatment for various products and materials, so baking equipment is related to the performance and quality of the product, and also directly affects the reliability and stability of the final product. Summary of the invention

[0004] The present application provides baking equipment and baking methods, which can process materials to be baked with different requirements, meet various production needs, and further improve production yield and production capacity.

[0005] In order to solve the above technical problems, the first aspect of the present application provides a baking device; wherein the baking device comprises:

[0006] An oven body, which includes a heating box and a constant temperature box; a transmission component, which is arranged in the oven body, wherein a first transmission component is arranged in the heating box, and a second transmission component is arranged in the constant temperature box; the transmission component obtains processing data of the material to be baked, and uses the feed port of the oven body to move the material to be baked through the corresponding transmission component to the heating box or constant temperature box corresponding to the processing data.

[0007] Among them, the baking equipment also includes: a transfer component, which is arranged on one side of the feed port of the oven and is connected to the transmission component, and is used to classify the materials to be baked and transmit them to the transmission component.

[0008] The baking equipment includes: a heating element is arranged in a heating box to bake the material to be baked; the heating element is arranged on a side of the first transmission component away from the constant temperature box.

[0009] Among them, the oven body includes: a heating box and a constant temperature box stacked together; the transfer component is a lifting mechanism, which is used to transport the materials to be baked upward or downward and classified and transported to the corresponding heating box or constant temperature box.

[0010] Wherein, a heat insulation layer is arranged between the heating box and the normal temperature box.

[0011] To solve the above-mentioned technical problems, the second aspect of the present application provides a baking method, wherein the oven main body of the baking equipment is provided with a heating box and a constant temperature box; a transmission component, the transmission component is arranged in the oven main body, wherein a first transmission component is arranged in the heating box, and a second transmission component is arranged in the constant temperature box, the baking method comprises: obtaining processing data of the material to be baked; based on the processing data, using the transmission component to move the material to be baked to the heating box or the constant temperature box corresponding to the processing data through the feed port of the oven main body.

[0012] Among them, the baking equipment also includes a transfer component. Based on the processing data, the step of using the transmission component to transport the material to be baked to the heating box or the constant temperature box corresponding to the processing data through the feed port of the oven main body includes: based on the processing data, determining that the material to be baked is the material to be baked, and the transfer component transfers the material to be baked to the heating box; or, determining that the material to be baked is an abnormal material to be baked, and the transfer component transfers the material to be baked to the constant temperature box.

[0013] Wherein, after the step of obtaining the processing data of the material to be baked, the step further includes: the oven main body adjusts the heating element of the heating box to maintain the required baking temperature based on the processing data.

[0014] Wherein, the baking method comprises: the material to be baked is a packaging substrate.

[0015] The baking device is connected to the exposure device; the step of obtaining the processing data of the material to be baked includes: the baking device receives the exposure data sent by the exposure device;

[0016] Based on the processing data, before the step of the transmission component moving the material to be baked to the heating box or the constant temperature box corresponding to the processing data through the feed port of the oven body, the method also includes: receiving the material to be baked transmitted by the exposure device.

[0017] Different from the prior art, the baking equipment and baking method provided in the present application can process materials to be baked with different requirements, meet various production needs, ensure baking quality, further improve production yield and production capacity, improve production efficiency, ensure the performance and reliability of the final product, and reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of an embodiment of a baking device of the present application;

[0019] Figure 2 It is a top view of the structure of another embodiment of the baking device of the present application;

[0020] Figure 3 It is a structural side view of another embodiment of the baking device of the present application;

[0021] Figure 4It is a flow chart of an implementation method of a baking method of a baking device of the present application;

[0022] Figure 5 It is a flow chart of another embodiment of a baking method of a baking device of the present application;

[0023] Figure 6 It is a flow chart of another embodiment of a baking method of a baking device of the present application. DETAILED DESCRIPTION

[0024] The scheme of the embodiment of the present application is described in detail below in conjunction with the drawings of the specification.

[0025] In the following description, for the purpose of explanation rather than limitation, specific details such as specific system structures, interfaces, and technologies are provided to facilitate a thorough understanding of the present application.

[0026] The term "and / or" in this article is only a description of the association relationship of the associated objects. There can be three kinds of relationships. For example, A and / or B can be: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally means that the associated objects before and after are in an "or" relationship. In addition, "more" in this article means two or more than two.

[0027] Figures 1 to 3 The baking equipment in the figure is a schematic diagram of structural logic, and the structure of the specific baking equipment shall be referenced by the baking equipment used in actual production.

[0028] The present application first provides a baking device 100, see Figure 1 , Figure 1 Schematic diagram of the structure of a baking device of the present application; Figure 1 As shown, in order to solve the above technical problems, the technical solution adopted in the present application provides a baking device 100, wherein the baking device 100 includes:

[0029] The oven body 101 includes a heating box 1011 and a constant temperature box 1012; a transmission component is arranged in the oven body 101, wherein a first transmission component 1021 is arranged in the heating box 1011, and a second transmission component 1022 is arranged in the constant temperature box 1012; the transmission component obtains the processing data of the material to be baked, and utilizes the feed port (not shown) of the oven body 101 to move the material to be baked through the corresponding transmission component to the heating box 1011 or the constant temperature box 1012 corresponding to the processing data.

[0030] The heating box 1011 and the constant temperature box 1012 can be placed side by side or in stacked form. In a specific embodiment, the heating box 1011 and the constant temperature box 1012 are placed side by side with the same height to ensure the appearance consistency of the oven main body 101. In other embodiments, the heating box 1011 and the constant temperature box 1012 can also be stacked. The heating box 1011 and the constant temperature box 1012 have the same width to ensure the appearance consistency of the oven main body 101. The heating box 1011 can have the same or different height as the constant temperature box 1012. In order to have sufficient space in the heating box 1011 to set the heating element 103, the hot air circulation system, or the environmental sensing system, the volume of the heating box 1011 can be appropriately increased.

[0031] The oven body 101 receives external materials to be baked, wherein the first transmission component 1021 receives the materials to be baked that need heat treatment from the feed port of the heating box 1011, and transmits the materials that have completed the heat treatment to subsequent production equipment, and the second transmission component 1022 receives the materials that need to be treated at normal temperature or do not need heat treatment temporarily from the feed port of the constant temperature box 1012, and transmits the materials to subsequent production equipment. In other embodiments, the materials that have completed the heat treatment transmitted by the first transmission component 1021 can also be transmitted to the constant temperature box 1012 for normal temperature cooling treatment.

[0032] The first transmission component 1021 and the second transmission component 1022 can be transmission tracks, transmission rollers or clamping devices. The first transmission component 1021 can be partially disposed inside the heating box 1011 or the constant temperature box 1012 and partially beyond the feed port and the discharge port, or can be completely disposed inside the heating box 1011 or the constant temperature box 1012.

[0033] In an optional embodiment, the baking device 100 includes: a heating element 103 is arranged in a heating box 1011 to bake the material to be baked; the heating element 103 is arranged on a side of the first transmission component 1021 away from the constant temperature box 1012.

[0034] The heating element 103 can be an electric heating tube, an infrared lamp, a hot air blower, etc. The heating element 103 radiates heat to heat the gas in the heating box 1011 of the baking device 100, thereby achieving the effect of uniformly heating the material to be baked. The heating element is arranged away from the constant temperature box 1012 to prevent the heat of the heating box 1011 from being lost to the constant temperature box 1012, thereby improving the baking performance of the heating box 1011.

[0035] In other embodiments, the baking device 100 may also be provided with a hot air circulation system to improve the heat convection effect in the heating box 1011, form hot air circulation, and promote uniform heat distribution. The baking device 100 may also be provided with an environmental sensing system in the heating box 1011 or in the constant temperature box 1012 to sense the temperature and humidity inside the oven body 101 or the temperature and humidity, position and shape of the material, etc., to achieve timely feedback and adjustment.

[0036] In an optional embodiment, a heat insulation layer 105 is provided between the heating box 1011 and the constant temperature box 1012 .

[0037] The heat insulation layer 105 is provided to prevent the heat of the heating box 1011 from being lost to the constant temperature box 1012, which not only improves the baking performance of the heating box 1011, but also affects the temperature of the constant temperature box 1012. The heat insulation layer 105 can be a heat insulation material such as aluminum silicate ceramic fiber board, rock wool, glass wool, polyurethane foam (PU), vacuum insulation layer 105, aerogel felt, calcium silicate board, etc. In other embodiments, a heat insulation material can also be provided outside the oven body 101.

[0038] In an optional embodiment, the baking device 100 is also provided with a control panel and a control system, so that the production parameters can be directly obtained or adjusted during the production process, and the communication and interconnection between the various production equipment can be more conveniently realized, so as to realize production automation and enhance production efficiency.

[0039] See also Figure 2 , Figure 2 2 is a top view of the structure of another embodiment of the baking device of the present application; Figure 2 As shown, in order to solve the above technical problems, the technical solution adopted in the present application provides a baking device 100, wherein the baking device 100 includes:

[0040] The oven body 101 includes a heating box 1011 and a constant temperature box 1012; a transmission component is arranged in the oven body 101, wherein a first transmission component 1021 is arranged in the heating box 1011, and a second transmission component 1022 is arranged in the constant temperature box 1012; the transmission component obtains the processing data of the material to be baked, and utilizes the feed port (not shown) of the oven body 101 to move the material to be baked through the corresponding transmission component to the heating box 1011 or the constant temperature box 1012 corresponding to the processing data.

[0041] The heating box 1011 and the constant temperature box 1012 can be placed side by side or in stacked form. In a specific embodiment, the heating box 1011 and the constant temperature box 1012 are placed side by side with the same height to ensure the appearance consistency of the oven main body 101. In other embodiments, the heating box 1011 and the constant temperature box 1012 can also be stacked, with the heating box 1011 having the same width as the constant temperature box 1012 to ensure the appearance consistency of the oven main body 101. The heating box 1011 can have the same or different height as the constant temperature box 1012. In order to have sufficient space in the heating box 1011 to set the heating element (not shown), the hot air circulation system, or the environmental sensing system, etc., the volume of the heating box 1011 can be appropriately increased.

[0042] The oven body 101 receives external materials to be baked, wherein the first transmission component 1021 receives the materials to be baked that need heat treatment from the feed port of the heating box 1011, and transmits the materials that have completed the heat treatment to subsequent production equipment, and the second transmission component 1022 receives the materials that need to be treated at normal temperature or do not need heat treatment temporarily from the feed port of the constant temperature box 1012, and transmits the materials to subsequent production equipment. In other embodiments, the materials that have completed the heat treatment transmitted by the first transmission component 1021 can also be transmitted to the constant temperature box 1012 for normal temperature cooling treatment.

[0043] The first transmission component 1021 and the second transmission component 1022 can be transmission tracks, transmission rollers or clamping devices. The first transmission component 1021 can be partially disposed inside the heating box 1011 or the constant temperature box 1012, partially beyond the feed port and the discharge port, or completely disposed inside the heating box 1011 or the constant temperature box 1012.

[0044] In an optional embodiment, the baking device 100 further includes: a transfer component 104, which is disposed on one side of the feed port of the oven body 101 and connected to the transmission component for classifying the materials to be baked and transmitting them to the transmission component.

[0045] The transport component 104 can be a transmission track or a transmission roller provided with a switch or a diverter plate, or a lifting device, a suction cup device or a clamping device. The transport component 104 can be selected according to the position of the heating box 1011 and the constant temperature box 1012 to achieve the classification and transmission of the materials to be baked.

[0046] In a specific embodiment, the heating box 1011 and the constant temperature box 1012 are arranged horizontally, and a transfer component 104 with a transmission track or a transmission roller having a switch or a diverter plate may be correspondingly arranged. In other embodiments, the heating box 1011 and the constant temperature box 1012 are arranged in a stacked manner, and a lifting device, a suction cup device or a clamping device may also be arranged as the transfer component 104.

[0047] In an optional embodiment, the transfer component 104 may be provided with a sensor and a counter, which can better identify the material to be baked transmitted to the baking device 100, achieve better classification and transmission, and further improve the yield rate of the product.

[0048] In an optional embodiment, the baking device 100 includes: a heating element is arranged in the heating box 1011 to bake the material to be baked; the heating element is arranged on a side of the first transmission component 1021 away from the constant temperature box 1012.

[0049] The heating element may be an electric heating tube, an infrared lamp, a hot air blower, etc. The heating element radiates heat to heat the gas in the heating box 1011 of the baking equipment 100, thereby achieving the effect of uniformly heating the substrate to be baked.

[0050] In other embodiments, the baking device 100 may also be provided with a hot air circulation system to improve the heat convection effect in the heating box 1011, form hot air circulation, and promote uniform heat distribution. The baking device 100 may also be provided with an environmental sensing system in the heating box 1011 or in the constant temperature box 1012 to sense the temperature and humidity inside the oven body 101 or the temperature and humidity, position and shape of the material, etc., to achieve timely feedback and adjustment.

[0051] In an optional embodiment, a heat insulation layer 105 is provided between the heating box 1011 and the constant temperature box 1012 .

[0052] The heat insulation layer 105 is provided to prevent the heat of the heating box 1011 from being lost to the constant temperature box 1012, which not only improves the baking performance of the heating box 1011, but also affects the temperature of the constant temperature box 1012. The heat insulation layer 105 can be a heat insulation material such as aluminum silicate ceramic fiber board, rock wool, glass wool, polyurethane foam (PU), vacuum insulation layer 105, aerogel felt, calcium silicate board, etc. In other embodiments, a heat insulation material can also be provided outside the oven body 101.

[0053] In an optional embodiment, the baking device 100 is also provided with a control panel and a control system, so that the production parameters can be directly obtained or adjusted during the production process, and the communication and interconnection between the various production equipment can be more conveniently realized, so as to realize production automation and enhance production efficiency.

[0054] See also Figure 3 , Figure 3 2 is a structural side view of another embodiment of the baking device of the present application; Figure 3 As shown, in order to solve the above technical problems, the technical solution adopted in the present application provides a baking device 100, wherein the baking device 100 includes:

[0055] The oven body 101 includes a heating box 1011 and a constant temperature box 1012; a transmission component is arranged in the oven body 101, wherein a first transmission component 1021 is arranged in the heating box 1011, and a second transmission component 1022 is arranged in the constant temperature box 1012; the transmission component obtains the processing data of the material to be baked, and utilizes the feed port (not shown) of the oven body 101 to move the material to be baked through the corresponding transmission component to the heating box 1011 or the constant temperature box 1012 corresponding to the processing data.

[0056] The heating box 1011 and the constant temperature box 1012 can be placed side by side or in stacked form. In a specific embodiment, the heating box 1011 and the constant temperature box 1012 are placed side by side with the same height to ensure the appearance consistency of the oven main body 101. In other embodiments, the heating box 1011 and the constant temperature box 1012 can also be stacked, with the heating box 1011 having the same width as the constant temperature box 1012 to ensure the appearance consistency of the oven main body 101. The heating box 1011 can have the same or different height as the constant temperature box 1012. In order to have sufficient space in the heating box 1011 to set the heating element (not shown), the hot air circulation system, or the environmental sensing system, etc., the volume of the heating box 1011 can be appropriately increased.

[0057] The oven body 101 receives external materials to be baked, wherein the first transmission component 1021 receives the materials to be baked that need heat treatment from the feed port of the heating box 1011, and transmits the materials that have completed the heat treatment to subsequent production equipment, and the second transmission component 1022 receives the materials that need to be treated at normal temperature or do not need heat treatment temporarily from the feed port of the constant temperature box 1012, and transmits the materials to subsequent production equipment. In other embodiments, the materials that have completed the heat treatment transmitted by the first transmission component 1021 can also be transmitted to the constant temperature box 1012 for normal temperature cooling treatment.

[0058] The first transmission component 1021 and the second transmission component 1022 can be transmission tracks, transmission rollers or clamping devices. The first transmission component 1021 can be partially disposed inside the heating box 1011 or the constant temperature box 1012 and partially beyond the feed port and the discharge port, or can be completely disposed inside the heating box 1011 or the constant temperature box 1012.

[0059] Specifically, the structure of the baking device 100 may refer to another embodiment of the baking device 100, which will not be described in detail herein.

[0060] In an optional embodiment, the oven body 101 includes: a heating box 1011 and a constant temperature box 1012 are stacked; the transfer component 104 is a lifting mechanism, which is used to transport the materials to be baked upward or downward to the corresponding heating box 1011 or constant temperature box 1012.

[0061] In a specific embodiment, the constant temperature box 1012 is arranged on the upper layer of the heating box 1011, and the material to be baked is transported by a lifting mechanism; the lifting mechanism can be a symmetrical one or two groups of hydraulic rods or pneumatic rods arranged under a group of transmission rollers or transmission tracks, and the height of the transmission rollers or transmission tracks is controlled by the hydraulic rods or pneumatic rods to achieve the classification of the material to be baked by transporting it up or down.

[0062] The baking equipment 100 provided in the above embodiment can be capable of processing materials to be baked with different requirements, meet various production needs, ensure baking quality, further improve production yield and production capacity, ensure the efficiency and reliability of the production process, improve production efficiency, ensure the performance and reliability of the final product, and reduce production costs.

[0063] See also Figure 4 , Figure 4 1 is a flow chart of a baking method of a baking device of the present application. It should be noted that the baking method described in this embodiment is not limited to the following steps. The execution subject of the baking method of this embodiment is the baking device, refer to Figure 1 , Figure 2 or Figure 3 The baking device 100 of the above embodiment.

[0064] The oven body of the baking equipment is provided with a heating box and a constant temperature box; the transmission component is provided in the oven body, wherein the heating box is provided with a first transmission component, and the constant temperature box is provided with a second transmission component. The material to be baked can be a wafer, a package substrate, a circuit board, or an electronic component such as a capacitor, a resistor, and an inductor; the baking method includes:

[0065] S11: Acquire processing data of the material to be baked.

[0066] The processing data may be a preset set of processing data, or it may be processing data obtained by identifying big data during the prefix process during the processing, or it may be processing data transmitted by external electronic components, such as to a coupled computer, mobile terminal, etc.

[0067] S12: Based on the processing data, the material to be baked is transported to a heating box or a constant temperature box corresponding to the processing data through a material inlet of the oven body by using a transmission component.

[0068] After obtaining the processing data, the heat treatment time of the batch of materials is obtained according to the processing data, and the running speed of the transmission component is adjusted, or the environmental parameters of the heat treatment such as humidity, temperature, etc. are obtained to adjust the internal environment of the oven.

[0069] The first transmission component receives the to-be-baked material that needs heat treatment from the feed port of the heating box, runs into the heating box, and transmits the material that has completed the heat treatment to subsequent production equipment. The second transmission component receives the material that needs normal temperature treatment or temporarily does not need heat treatment from the feed port of the constant temperature box, runs into the constant temperature box, and transmits the material to subsequent production equipment. In other embodiments, the material that has completed the heat treatment transmitted by the first transmission component can also be transmitted to the constant temperature box for normal temperature cooling treatment.

[0070] See also Figure 5 , Figure 5 1 is a flow chart of another embodiment of a baking method of a baking device of the present application. It should be noted that the baking method described in this embodiment is not limited to the following steps. The execution subject of the baking method of this embodiment is the baking device, refer to Figure 1 , Figure 2 or Figure 3 The baking device 100 of the above embodiment.

[0071] The material to be baked may be a wafer, a package substrate, a circuit board, or electronic components such as capacitors, resistors, and inductors; the baking method includes:

[0072] S21: Acquire processing data of the material to be baked.

[0073] Specifically, the source of the processing data of the material to be baked can be referred to S11, which will not be described in detail here.

[0074] In an optional embodiment, the baking device further includes a transfer component. The transfer component may be a transmission track or a transmission roller provided with a switch or a diverter plate, or may be a lifting device, a suction cup device, or a clamping device. The transfer component may be selected according to the position of the heating box and the constant temperature box to achieve the classification and transmission of the materials to be baked.

[0075] S22: Based on the processing data, it is determined that the material to be baked is a material to be baked, and the transfer component transfers the material to be baked to the heating box; or, it is determined that the material to be baked is an abnormal material to be baked, and the transfer component transfers the material to be baked to a normal temperature box.

[0076] After obtaining the processing data, the heat treatment time of the batch of materials is obtained according to the processing data, and the running speed of the transmission component is adjusted, or the environmental parameters of the heat treatment such as humidity, temperature, etc. are obtained to adjust the internal environment of the oven.

[0077] When it is found that the identification of the materials to be baked is unclear or missing, the specific information of the materials and the baking requirements cannot be confirmed, or during the quality inspection, it is found that the materials are deteriorating, damaged, the processing pattern is unclear, etc., the materials to be baked are identified as abnormal materials to be baked, and it is considered that heat treatment is not required temporarily, and they are classified and transferred to the normal temperature box.

[0078] S23: Using the transmission component, the material to be baked is transported to the heating box or the normal temperature box corresponding to the processing data through the material inlet of the oven body.

[0079] Specifically, the first transmission component receives the to-be-baked material that needs heat treatment from the feed port of the heating box, runs into the heating box, and transmits the material that has completed the heat treatment to subsequent production equipment. The second transmission component receives the material that needs normal temperature treatment or temporarily does not need heat treatment from the feed port of the constant temperature box, runs into the constant temperature box, and transmits the material to subsequent production equipment. In other embodiments, the material that has completed the heat treatment transmitted by the first transmission component can also be transmitted to the constant temperature box for normal temperature cooling treatment.

[0080] See also Figure 6 , Figure 6 1 is a flow chart of another embodiment of a baking method of a baking device of the present application. It should be noted that the baking method described in this embodiment is not limited to the following steps. The execution subject of the baking method of this embodiment is the baking device, refer to Figure 1 , Figure 2 or Figure 3 The baking device 100 of the above embodiment.

[0081] In an optional embodiment, the material to be baked is a packaging substrate.

[0082] In an optional embodiment, the baking device is connected to the exposure device. During the processing of the packaging substrate, it is necessary to coat the surface of the packaging substrate with photoresist to form the required pattern. Since a standing wave effect may occur at the boundary between the exposure area and the non-exposure area, the side wall of the dry film may be uneven, resulting in the pattern size and resolution of the transition area being affected. After exposure, the polymer compounds at the boundary between the exposure and non-exposure can be redistributed by baking, and finally reach a balance, which can basically eliminate the standing wave effect.

[0083] S31: The baking device receives the exposure data sent by the exposure device and obtains the processing data of the material to be baked;

[0084] Different packaging substrates have different process types and different exposure dry film types, so the baking conditions are also inconsistent. Different baking times and temperatures will affect the photoacid reaction rate, thereby affecting the morphology of the graphics. The baking equipment can automatically call up the baking parameters of different dry films, correctly use the processing parameters, avoid or reduce the number of manual operations, improve the accuracy of the baking process, improve the performance of the exposure dry film and the quality of the final product, and reduce production costs.

[0085] In an optional embodiment, the baking device further includes a transfer component. The transfer component may be a transmission track or a transmission roller provided with a switch or a diverter plate, or may be a lifting device, a suction cup device, or a clamping device. The transfer component may be selected according to the position of the heating box and the constant temperature box to achieve the classification and transmission of the materials to be baked.

[0086] In an optional implementation, S32: receiving the material to be baked transmitted by the exposure device.

[0087] The transfer component directly receives the materials to be baked from the exposure equipment, which is conducive to production monitoring and quality tracking, avoiding operational errors caused by manual transfer, conducting standardized production, effectively reducing processing time and improving production stability.

[0088] S33: Based on the processing data, it is determined that the material to be baked is the material to be baked, and the transfer component transfers the material to be baked to the heating box; or, it is determined that the material to be baked is an abnormal material to be baked, and the transfer component transfers the material to be baked to the normal temperature box.

[0089] When target abnormalities such as positioning holes or optical point abnormalities occur during the exposure step and the packaging substrate is rejected for exposure, the processing data will record it as an abnormal material to be baked, and it will be classified and transported to a constant temperature box through the transfer component, reducing the risk of the packaging substrate being baked multiple times and improving the yield rate.

[0090] In an optional embodiment, the oven adjusts the heating element of the heating box to maintain the desired baking temperature according to the processing data, and the heating element keeps the heating box above 110 degrees Celsius to bake the material to be baked.

[0091] S34: Using the transmission component, the material to be baked is transported to the heating box or the normal temperature box corresponding to the processing data through the material inlet of the oven body.

[0092] After obtaining the processing data, the heat treatment time of the batch of materials is obtained according to the processing data, and the running speed of the transmission component is adjusted, or the environmental parameters of the heat treatment such as humidity, temperature, etc. are obtained to adjust the internal environment of the oven.

[0093] Specifically, the first transmission component receives the to-be-baked material that needs heat treatment from the feed port of the heating box, runs into the heating box, and transmits the material that has completed the heat treatment to subsequent production equipment. The second transmission component receives the material that needs normal temperature treatment or temporarily does not need heat treatment from the feed port of the constant temperature box, runs into the constant temperature box, and transmits the material to subsequent production equipment. In other embodiments, the material that has completed the heat treatment transmitted by the first transmission component can also be transmitted to the constant temperature box for normal temperature cooling treatment.

[0094] Different from the prior art, the baking equipment and baking method provided in the present application carry out standardized production, improve production stability, increase production yield, meet production needs, and improve production efficiency.

[0095] In the several embodiments provided in the present application, it should be understood that the disclosed systems and devices can be implemented in other ways. For the technical solutions in the embodiments of the present application, it is obvious that the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application. For example, the device implementation described above is only schematic. For example, the division of the modules or units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be indirect coupling or communication connection through some interfaces, devices or units, which can be electrical, mechanical or other forms.

[0096] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0097] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "coupled", "connected", "connected", "set", and "installed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0098] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the present embodiment.

[0099] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0100] The above description is only an implementation method of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A baking device, characterized in that: The baking equipment comprises: An oven main body, the oven main body comprising a heating box and a constant temperature box; A transmission component, wherein the transmission component is arranged in the oven body, wherein a first transmission component is arranged in the heating box, and a second transmission component is arranged in the normal temperature box; The transmission component obtains the processing data of the material to be baked, and uses the feed port of the oven body to move the material to be baked through the corresponding transmission component to the heating box or the constant temperature box corresponding to the processing data.

2. The baking device according to claim 1, characterized in that: The baking equipment also includes: A transfer component is arranged on one side of the feed port of the oven and is connected to the transmission component, and is used for classifying the materials to be baked and transferring them to the transmission component.

3. The baking device according to claim 1, characterized in that: The baking equipment comprises: The heating box is provided with a heating element for baking the material to be baked; The heating element is arranged on a side of the first transmission component away from the constant temperature box.

4. The baking device according to claim 2, characterized in that: The oven body comprises: the heating box and the constant temperature box are stacked; The transfer component is a lifting mechanism, which is used to transport the materials to be baked upward or downward and classify them to the corresponding heating box or the constant temperature box.

5. The baking device according to claim 1, characterized in that: A heat insulation layer is provided between the heating box and the constant temperature box.

6. A baking method for baking equipment, characterized in that: The oven body of the baking equipment is provided with a heating box and a constant temperature box; The transmission component is arranged in the oven body, wherein the heating box is provided with a first transmission component, and the constant temperature box is provided with a second transmission component, and the baking method comprises: Obtain processing data of the material to be baked; Based on the processing data, the material to be baked is transported to a heating box or a constant temperature box corresponding to the processing data through a material inlet of the oven body by using the transmission component.

7. The baking method according to claim 6, characterized in that: The baking equipment further includes a transfer component, and the step of using the transfer component to move the material to be baked to a heating box or a constant temperature box corresponding to the processing data through a feed port of the oven body based on the processing data includes: Based on the processing data, it is determined that the material to be baked is a material to be baked, and the transport component transfers the material to be baked to the heating box; or, It is determined that the material to be baked is an abnormal material to be baked, and the transport component transfers the material to be baked to the constant temperature box.

8. The baking method according to claim 6 or 7, characterized in that: After the step of obtaining the processing data of the material to be baked, the following steps are further included: The oven main body adjusts the heating element of the heating box to maintain the required baking temperature based on the processing data.

9. The baking method according to claim 6, characterized in that: The baking method comprises: the material to be baked is a packaging substrate.

10. The baking method according to claim 7, characterized in that: The baking device is connected to the exposure device; The step of obtaining processing data of the material to be baked includes: the baking device receiving exposure data sent by the exposure device; Before the step of the transmission component moving the material to be baked to a heating box or a constant temperature box corresponding to the processing data through the feed port of the oven body based on the processing data, the method further includes: receiving the material to be baked transmitted by the exposure device.

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