Double-layer drying equipment and drying method

Abstract

The invention belongs to the technical field of solar cell production groove type cleaning equipment, and particularly relates to double-layer drying equipment and a drying method.The double-layer drying equipment comprises a pair of drying devices, the two drying devices are communicated, one drying device is provided with an air inlet mechanism, and the other drying device is provided with an air return mechanism; the air return mechanism is connected with a circulating mechanism, and an air outlet of the circulating mechanism is arranged close to the air inlet mechanism; the air inlet mechanism sucks air, heats the air and then inputs the air into the corresponding drying device, then the air flows into the other drying device and then is sucked into the circulating mechanism through the air return mechanism, and the air in the circulating mechanism is sucked into the air inlet mechanism after flowing out, so that flowing of the air forms circulation. And therefore, hot air for drying between the two drying devices can be circulated, the hot air can be circularly dried, and the drying effect is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of trough-type cleaning equipment for solar cell production, and in particular relates to double-layer drying equipment and a drying method. Background Art

[0002] In the process of solar cell manufacturing, silicon wafers need to go through cleaning, diffusion, annealing, coating, screen printing and other processes. The cleaning process is usually accompanied by drying. The usual practice is that a cleaning device needs to be equipped with different numbers of drying tanks according to different production capacities, and the drying tanks can only be laid in a single layer in the drying device. With the continuous expansion of production capacity, the drying tanks gradually become independent equipment, and most of them are stacked.

[0003] Chinese patent document CN118066831A discloses a double-layer drying device and a drying method, and proposes a structure of a drying device in the double-layer drying device to perform independent drying of a single layer. However, the drying effect is not ideal, and it is easy to leave water stains on the silicon wafer, affecting the drying effect.

[0004] Therefore, due to the technical problem that the drying effect of the drying device in the double-layer drying equipment is not ideal and water stains remain when the drying device performs single-layer independent drying, it is necessary to design a double-layer drying equipment and a drying method.

[0005] It should be noted that the above information disclosed in this background technology section is only used to understand the background technology of the present application concept, and therefore, the above description is not considered to constitute information of the prior art. Summary of the invention

[0006] The embodiments of the present disclosure at least provide a double-layer drying device and a drying method.

[0007] In a first aspect, an embodiment of the present disclosure provides a double-layer drying device, comprising: A pair of drying devices, the two drying devices are connected, one of the drying devices is provided with an air inlet mechanism, and the other drying device is provided with an air return mechanism; The air return mechanism is connected to a circulation mechanism, and the air outlet of the circulation mechanism is arranged close to the air inlet mechanism; The air inlet mechanism draws in the gas, heats it, and then inputs it into the corresponding drying device. The gas then flows into another drying device and is then drawn into the circulation mechanism by the return air mechanism. The gas in the circulation mechanism flows out and is then drawn into the air inlet mechanism, so that the flow of the gas forms a cycle.

[0008] In an optional embodiment, the air intake mechanism includes: a filter plate, a plurality of air intake fans, and heaters corresponding to the air intake fans; The air inlet fan, heater and filter plate are all arranged on the corresponding drying device; The air inlet fan is connected to the interior of the corresponding drying device; The heater is arranged between the filter plate and the corresponding air inlet fan; The air inlet fan conveys the gas into the heater for heating, and then the heated gas is filtered by the filter plate and then enters the corresponding drying device.

[0009] In an optional embodiment, a heat exchange auxiliary mechanism is provided between the two drying devices, and when the gas flows through the heat exchange auxiliary mechanism, the heat exchange auxiliary mechanism heats the gas.

[0010] In an optional embodiment, the return air mechanism includes: a plurality of return air fans; The return air fan is connected to the interior of the corresponding drying device, and the return air fan extracts the gas in the drying device.

[0011] In an optional embodiment, the circulation mechanism includes: a return air component, a plurality of return air ducts, and an air outlet connector corresponding to the return air ducts; The return air assembly is arranged below the return air fan, and the gas extracted by the return air fan is transported into the return air assembly; One end of the return air duct is connected to the return air assembly, and the air outlet joint is sleeved on the other end of the corresponding return air duct; The air outlet of the air outlet connector is arranged close to the air inlet fan of the air inlet mechanism.

[0012] In an optional embodiment, there is a gap between the inner wall of the air outlet connector and the outer wall of the return air duct, so that cold air can be introduced into the air outlet connector through the gap.

[0013] In an optional embodiment, a hot air supplement interface is provided on the drying device to introduce hot air into the drying device.

[0014] In an optional embodiment, the drying devices are arranged up and down, and a transfer platform is provided in each of the drying devices, and the transfer platform is suitable for sending the flower baskets into and out of the drying device.

[0015] In an optional embodiment, a cylinder door is provided on the side wall of the drying device, and the cylinder door is opened when the transfer platform sends the flower basket into and out of the drying device.

[0016] In a second aspect, the present disclosure also provides a drying method using the above-mentioned double-layer drying device, comprising: The air inlet mechanism draws in the gas, heats it, and then inputs it into the corresponding drying device. The gas then flows into another drying device and is drawn into the circulation mechanism by the return air mechanism. The gas in the circulation mechanism flows out and is drawn into the air inlet mechanism, so that the flow of the gas forms a cycle.

[0017] The beneficial effect of the present invention is that the double-layer drying equipment comprises: a pair of drying devices, the two drying devices are connected, one of the drying devices is provided with an air inlet mechanism, and the other drying device is provided with an air return mechanism; the air return mechanism is connected to a circulation mechanism, and the air outlet of the circulation mechanism is arranged close to the air inlet mechanism; the air inlet mechanism draws in gas and heats the gas before inputting it into the corresponding drying device, and then the gas flows into the other drying device and is drawn into the circulation mechanism by the air return mechanism, and the gas in the circulation mechanism flows out and is drawn into the air inlet mechanism, so that the flow of the gas forms a cycle, thereby realizing that the hot air used for drying can circulate between the two drying devices, so that the hot air can circulate for drying, thereby improving the drying effect and avoiding residual water stains.

[0018] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0019] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, this article specifically cites preferred embodiments and provides detailed descriptions as follows in conjunction with the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the structure of a double-layer drying device provided in an embodiment of the present disclosure; Figure 2 A schematic diagram of the structure of a gas circulation part between two layers of drying devices provided in an embodiment of the present disclosure; Figure 3 A flow chart of a drying method provided in an embodiment of the present disclosure.

[0022] In the figure: 1 drying device, 11 hot air supplement interface, 12 transfer platform, 13 cylinder door; 2 air inlet mechanism, 21 filter plate, 22 air inlet fan, 23 heater; 3. Heat exchange auxiliary mechanism; 4 return air mechanism, 41 return air fan; 5 circulation mechanism, 51 return air assembly, 52 return air duct, 53 air outlet connector; 6 flower baskets. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] As used herein, the phrases "in one embodiment," "according to one embodiment," "in some embodiments," and the like generally refer to the fact that the particular feature, structure, or characteristic following the phrase may be included in at least one embodiment of the present disclosure. Therefore, a particular feature, structure, or characteristic may be included in more than one embodiment of the present disclosure, so that these phrases do not necessarily refer to the same embodiment. As used herein, the terms "example," "exemplary," and the like are used to "serve as an example, instance, or illustration." Any implementation, aspect, or design described herein as "example" or "exemplary" is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. On the contrary, the use of the terms "example," "exemplary," and the like is intended to present concepts in a concrete manner.

[0025] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0026] like Figure 1 and Figure 2 As shown, at least one disclosed embodiment provides a double-layer drying device, comprising: a pair of drying devices 1, the two drying devices 1 are connected, one of the drying devices 1 is provided with an air inlet mechanism 2, and the other drying device 1 is provided with a return air mechanism 4; the return air mechanism 4 is connected to a circulation mechanism 5, and the air outlet of the circulation mechanism 5 is arranged close to the air inlet mechanism 2; the air inlet mechanism 2 draws in the gas and heats it before inputting it into the corresponding drying device 1, and then the gas flows into the other drying device 1 and is drawn into the circulation mechanism 5 by the return air mechanism 4, and the gas in the circulation mechanism 5 flows out and is drawn into the air inlet mechanism 2, so that the flow of the gas forms a cycle, thereby realizing that the hot air used for drying can circulate between the two drying devices 1, so that the hot air can circulate for drying, thereby improving the drying effect and avoiding water stains.

[0027] like Figure 2As shown, in an optional embodiment, the air intake mechanism 2 includes: a filter plate 21, a plurality of air intake fans 22, and a heater 23 corresponding to the air intake fans 22; the air intake fans 22, the heater 23 and the filter plate 21 are all arranged on the corresponding drying device 1; the air intake fan 22 is connected to the interior of the corresponding drying device 1; the heater 23 is arranged between the filter plate 21 and the corresponding air intake fan 22; the air intake fan 22 transports the gas into the heater 23 for heating, and then the heated gas enters the corresponding drying device 1 after being filtered by the filter plate 21.

[0028] In this embodiment, the air inlet fan 22 can also be fixed on the frame. It only needs to ensure that the heater 23 is located between the air inlet fan 22 and the filter plate 21, and the gas heated by the heater 23 can enter the upper drying device 1.

[0029] In this embodiment, two drying devices 1 can be arranged up and down to reduce the floor space and make it easier to place.

[0030] In this embodiment, the heater 23 can heat the gas so that the gas introduced into the drying device 1 is a high-temperature gas that meets the required drying temperature, so as to dry the silicon wafer by the high-temperature gas.

[0031] In this embodiment, the air inlet fan 22 is arranged at the top of the upper drying device 1, and the air inlet fan 22 is evenly and equidistantly arranged to make the hot air transported into the drying device 1 more uniform and improve the drying effect. A corresponding drying station can be arranged under each air inlet fan 22 inside the drying device 1, and a flower basket 6 can be placed at the drying station so that the hot air can enter the drying device 1 and dry the silicon wafers in the flower basket 6 on the drying station.

[0032] In this embodiment, the filter plate 21 can filter the hot air to prevent impurities from entering the drying device 1 and prevent the impurities from affecting the quality of the silicon wafers.

[0033] In an optional embodiment, a heat exchange auxiliary mechanism 3 is provided between the two drying devices 1 , and when the gas flows through the heat exchange auxiliary mechanism 3 , the heat exchange auxiliary mechanism 3 heats the gas.

[0034] In this embodiment, the heat exchange auxiliary mechanism 3 can be a heat exchange tube coil or other heat exchange auxiliary devices. When the gas flows through the heat exchange auxiliary mechanism 3 and enters the lower drying device 1, the heat exchange auxiliary mechanism 3 can heat the gas again. The temperature upper limit is increased by the double heating of the heater 23 and the heat exchange auxiliary mechanism 3, thereby improving the drying effect.

[0035] In an optional embodiment, the return air mechanism 4 includes: a plurality of return air fans 41 ; the return air fans 41 are connected to the interior of the corresponding drying device 1 , and the return air fans 41 extract the gas in the drying device 1 .

[0036] In this embodiment, the return air fan 41 can be set at the bottom of the lower drying device 1 and evenly arranged at equal intervals. The gas in the lower drying device 1 is extracted through the return air fan 41, increasing the gas circulation inside the two drying devices 1 and facilitating the circulation of hot air.

[0037] In this embodiment, the drying stations in the upper and lower drying devices 1 correspond to each other, and the return air fan 41 can correspond to the drying station in the lower drying device 1. The return air fan 41 is located below the corresponding drying station to extract the gas in the lower drying device 1.

[0038] In an optional embodiment, the circulation mechanism 5 includes: a return air component 51, a plurality of return air ducts 52, and an air outlet connector 53 corresponding to the return air ducts 52; the return air component 51 is arranged below the return air fan 41, and the gas extracted by the return air fan 41 is transported into the return air component 51; one end of the return air duct 52 is connected to the return air component 51, and the air outlet connector 53 is sleeved on the other end of the corresponding return air duct 52; the air outlet of the air outlet connector 53 is arranged close to the air inlet fan 22 of the air inlet mechanism 2.

[0039] In this embodiment, the return air chamber of the return air assembly 51 has an approximately plate-like contour, and an air guide port is provided at the bottom of the return air chamber, which is connected to the return air duct 52. A return air port is provided at the top of the return air chamber, and the return air port is directly opposite the drying station, so that the gas enters the return air chamber through the return air port, and then the gas enters the return air duct 52 through the air guide port. A conical return air plate is provided in the return air chamber, so that the return air is faster.

[0040] In this embodiment, the air outlet of the air outlet connector 53 may be located between two adjacent air inlet fans 22 , so that the gas output from the air outlet connector 53 can be transported to the heater 23 by the air inlet fans 22 faster and better.

[0041] In an optional embodiment, there is a gap between the inner wall of the air outlet connector 53 and the outer wall of the return air duct 52 so that cold gas can be introduced into the air outlet connector 53 through the gap. The temperature of the cold gas can be slightly lower than the temperature of the gas in the return air duct 52.

[0042] In this embodiment, air is supplied through the gaps, which can reduce the loss of hot air temperature, so that the gas flowing out of the air outlet joint 53 retains a certain initial temperature, and then the gas drawn in by the air inlet fan 22 to the heater 23 retains a certain initial temperature, thereby reducing the heating time of the heater 23 and improving the drying efficiency.

[0043] In an optional embodiment, a hot air supplement interface 11 is provided on the drying device 1 to introduce hot air into the drying device 1 .

[0044] In this embodiment, hot air can be directly introduced into the drying device 1 through the hot air supplement interface 11, thereby further improving the drying effect.

[0045] like Figure 1 As shown, in an optional embodiment, the drying device 1 is arranged up and down, and a transfer platform 12 is provided in the drying device 1. The transfer platform 12 is suitable for sending the flower basket 6 into and out of the drying device 1. The drying device 1 arranged up and down reduces the floor space and is convenient for placing the drying device 1.

[0046] In an optional embodiment, a cylinder door 13 is provided on the side wall of the drying device 1 , and when the transfer platform 12 sends the flower basket 6 into and out of the drying device 1 , the cylinder door 13 opens.

[0047] In this embodiment, cylinder doors 13 are provided on both sides of the drying device 1 located at the upper layer, so that the upper drying device 1 can be fed from one side and discharged from the other side. Cylinder doors 13 are provided on either side of the drying device 1 located at the lower layer, and the lower drying device 1 can be fed and discharged on the same side through the cylinder doors 13. The cylinder door 13 is opened when transporting the flower basket 6, and is closed during the drying process to avoid the loss of hot air in the drying device 1 and ensure the drying effect.

[0048] like Figure 3 As shown, in this embodiment, the air inlet fan 22 is started, and the hot air with the initial temperature is transported to the heater 23. The hot air after the first heating by the heater 23 is input into the drying device 1 for drying. The gas in the upper drying device 1 flows through the heat exchange auxiliary mechanism 3 and enters the lower drying device 1. At this time, the gas is heated for the second time by the heat exchange auxiliary mechanism 3, thereby increasing the upper temperature limit and enhancing the drying effect. The gas in the lower drying device 1 is extracted by the return air fan 41 and flows to the air inlet fan 22 through the return air mechanism 4 to form a cycle.

[0049] In this embodiment, the air inlet fan 22, the transfer platform 12, the heater 23, the return air fan 41, the cylinder door 13, etc. are all electrically connected to the control module and controlled by the control module.

[0050] At least one other disclosed embodiment also provides a drying method using the above-mentioned double-layer drying equipment, including: the air intake mechanism 2 draws in the gas and heats it before inputting it into the corresponding drying device 1, and then the gas flows into another drying device 1 and is drawn into the circulation mechanism 5 by the return air mechanism 4, and the gas in the circulation mechanism 5 flows out and is drawn into the air intake mechanism 2, so that the flow of the gas forms a cycle.

[0051] In summary, the double-layer drying equipment includes: a pair of drying devices 1, the two drying devices 1 are connected, one of the drying devices 1 is provided with an air inlet mechanism 2, and the other drying device 1 is provided with an air return mechanism 4; the air return mechanism 4 is connected to a circulation mechanism 5, and the air outlet of the circulation mechanism 5 is arranged close to the air inlet mechanism 2; the air inlet mechanism 2 draws in the gas and heats it before inputting it into the corresponding drying device 1, and then the gas flows into the other drying device 1 and is drawn into the circulation mechanism 5 by the air return mechanism 4, and the gas in the circulation mechanism 5 flows out and is drawn into the air inlet mechanism 2, so that the flow of the gas forms a cycle, thereby realizing that the hot air used for drying between the two drying devices 1 can circulate, so that the hot air can be circulated for drying, thereby improving the drying effect.

[0052] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, terms such as "first", "second" and other numerical terms do not imply an order or sequence when used in this document unless explicitly indicated above. Therefore, without departing from the teachings of the example embodiments, the first element, component, region, layer or section discussed above may be referred to as a second element, component, region, layer or section.

[0054] Spatially relative terms, such as "inside", "outside", "below", "below", "down", "above", "on", etc., may be used herein to facilitate description of the relationship of one element or feature to another element or feature as illustrated in the figure. In addition to the orientation depicted in the figure, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is turned over, the elements described as "below" or "below" other elements or features will be oriented to be "above" other elements or features. Therefore, the example term "below" can cover the orientation above and below. The device can be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0055] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A double-layer drying equipment, characterized in that: include: A pair of drying devices (1), the two drying devices (1) are connected to each other, one of the drying devices (1) is provided with an air inlet mechanism (2), and the other drying device (1) is provided with an air return mechanism (4); The air return mechanism (4) is connected to a circulation mechanism (5), and the air outlet of the circulation mechanism (5) is arranged close to the air inlet mechanism (2); The air inlet mechanism (2) draws in the gas, heats it, and then inputs it into the corresponding drying device (1). The gas then flows into another drying device (1) and is then drawn into the circulation mechanism (5) by the return air mechanism (4). The gas in the circulation mechanism (5) flows out and is then drawn into the air inlet mechanism (2), so that the flow of the gas forms a cycle.

2. The double-layer drying device according to claim 1, characterized in that: The air intake mechanism (2) comprises: a filter plate (21), a plurality of air intake fans (22), and heaters (23) corresponding to the air intake fans (22); The air inlet fan (22), the heater (23) and the filter plate (21) are all arranged on the corresponding drying device (1); The air inlet fan (22) is in communication with the interior of the corresponding drying device (1); The heater (23) is arranged between the filter plate (21) and the corresponding air inlet fan (22); The air inlet fan (22) conveys the gas into the heater (23) for heating, and the heated gas is then filtered by the filter plate (21) and enters the corresponding drying device (1).

3. The double-layer drying device according to claim 2, characterized in that: A heat exchange auxiliary mechanism (3) is provided between the two drying devices (1); when the gas flows through the heat exchange auxiliary mechanism (3), the heat exchange auxiliary mechanism (3) heats the gas.

4. The double-layer drying device according to claim 1, characterized in that: The air return mechanism (4) comprises: a plurality of air return fans (41); The return air fan (41) is connected to the interior of the corresponding drying device (1), and the return air fan (41) extracts the gas in the drying device (1).

5. The double-layer drying device according to claim 4, characterized in that: The circulation mechanism (5) comprises: a return air component (51), a plurality of return air ducts (52), and air outlet connectors (53) corresponding to the return air ducts (52); The return air component (51) is arranged below the return air fan (41), and the gas extracted by the return air fan (41) is transported into the return air component (51); One end of the return air duct (52) is connected to the return air assembly (51), and the air outlet connector (53) is sleeved on the other end of the corresponding return air duct (52); The air outlet of the air outlet connector (53) is arranged close to the air inlet fan (22) of the air inlet mechanism (2).

6. The double-layer drying device according to claim 5, characterized in that: There is a gap between the inner wall of the air outlet joint (53) and the outer wall of the return air duct (52), so that cold air can flow into the air outlet joint (53) through the gap.

7. The double-layer drying device according to claim 1, characterized in that: The drying device (1) is provided with a hot air supplement interface (11) for introducing hot air into the drying device (1).

8. The double-layer drying device according to claim 1, characterized in that: The drying devices (1) are stacked up and down, and each of the drying devices (1) is provided with a transfer platform (12), and the transfer platform (12) transports the flower basket (6) into and out of the drying device (1).

9. The double-layer drying device according to claim 8, characterized in that: A cylinder door (13) is provided on the side wall of the drying device (1), and when the transfer platform (12) sends the flower basket (6) into and out of the drying device (1), the cylinder door (13) opens.

10. A drying method using the double-layer drying device as claimed in claim 1, characterized in that: include: The air inlet mechanism (2) draws in the gas, heats it, and then inputs it into the corresponding drying device (1). The gas then flows into another drying device (1) and is then drawn into the circulation mechanism (5) by the return air mechanism (4). The gas in the circulation mechanism (5) flows out and is then drawn into the air inlet mechanism (2), so that the flow of the gas forms a cycle.

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