High-precision blade thickness gauge

Abstract

The invention discloses a high-precision blade thickness gauge. The high-precision blade thickness gauge comprises a test table board, the measuring module is arranged on the test table board and provided with an adjustable thickness measuring induction pen, the placement module is arranged on the test table board and provided with an adjustable tool apron table, and the tool apron table is provided with a rotating unit; the visual module is arranged on the test table board and is provided with an adjustable motion capture unit; the thickness measuring induction pen, the tool apron table and the motion capture unit are adjusted through a fine adjustment displacement table. According to the invention, a single or multiple groups of standard or customized fine adjustment displacement tables are reasonably designed on the measurement module, the vision module and the placement module, and accurate fine adjustment is carried out on related components, so that the operation is more convenient; the thickness of the semiconductor processing blade is accurately measured through the high-sensitivity thickness measurement induction pen with the ceramic end, and data are more accurate. Thickness measurement programming is carried out through cooperation of the contact type thickness measurement induction pen and the dynamic capture device, and full-automatic efficient thickness measurement is achieved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and more particularly to a high-precision blade thickness gauge. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. High-purity polysilicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. The production of wafers includes the processes of crystal rod growth, crystal rod cutting and inspection, outer diameter grinding, slicing, rounding, grinding, etching, defect removal, polishing, cleaning, inspection, and packaging. The slicing process requires the use of a special blade. This blade is annular, and the inner diameter edge of the blade is inlaid with hard particles. This structure can better cut silicon crystals. During the slicing process, in order to ensure the consistency of the thickness of each wafer, a special water cooling device is usually used to keep the blade cool. It can be said that the quality of the blade itself will directly affect the processing value of the slicing process.

[0003] The wafer slice thickness is directly related to the thickness and warpage of the blade. For wafer blade manufacturers, ensuring the processing accuracy of finished wafer blades is of utmost importance. In addition to improving the process, subsequent inspection methods are also required to strictly control product quality. Summary of the invention

[0004] In view of the deficiencies in the prior art, an object of the present invention is to provide a high-precision blade thickness gauge to solve one or more of the above-mentioned problems.

[0005] To achieve the above object, the present invention provides the following technical solutions: High-precision blade thickness gauge, including Test bench; The measuring module is arranged on the test table and is provided with an adjustable thickness sensing pen. A placement module, which is arranged on the test table and is provided with an adjustable tool holder, and the tool holder is provided with a rotating unit; A visual module, which is arranged on the test table and is provided with an adjustable motion capture unit; The thickness measuring sensor pen, the tool holder platform and the motion capture unit are all adjusted through a fine-tuning displacement platform.

[0006] Furthermore, the measuring module and the visual module are both arranged corresponding to the placement module, and the test table is a shockproof test table.

[0007] Furthermore, the fine adjustment displacement stage comprises A mounting base, which is fixedly connected with other modules, and has a horizontal fine-tuning slot on the front, with linear ball bearings embedded on both sides of the fine-tuning slot; A sliding platform, which is disposed in the fine-tuning groove and is slidably connected to the mounting base; A knob seat, which is arranged on the outer side of the sliding platform and has a hanging section; the hanging section of the knob seat is provided with a threaded groove which runs horizontally through and points to the mounting base; The fine-tuning knob has a shaft with threads and a spherical end which is matched and connected with the thread groove of the knob seat.

[0008] Furthermore, a gasket ring is provided on the fine-tuning knob, and the gasket ring rotates synchronously with the fine-tuning knob; The fine-tuning knob is arranged at the extreme position of the outward sliding of the sliding platform and the knob seat.

[0009] Furthermore, the placement module also includes A placement base, which is fixed on the test table and docked with a set of transversely adjustable fine-tuning displacement stages; An L-shaped mounting frame, with a mounting groove at its corner, one end of which is connected to the sliding table of the fine adjustment displacement table, and the other end of which is provided with a vertically penetrating mounting cavity; The rotating platform is arranged in the installation cavity of the L-shaped installation frame.

[0010] Furthermore, a truncated cone with a protruding center is provided on the rotating table, and the blade to be measured is embedded outside the truncated cone.

[0011] Furthermore, a U-shaped motor frame is provided in the mounting groove of the L-shaped mounting frame, a rotating motor is provided on the U-shaped motor frame, and a driving end of the rotating motor is belt-connected to a transmission end of the rotating table.

[0012] Furthermore, the visual module also includes A motion capture base, which is fixed to the test table, and is connected in sequence with a group of longitudinally adjustable fine-tuning displacement stages and a group of vertically adjustable fine-tuning displacement stages; the sliding platform of the longitudinally adjustable fine-tuning displacement stage and the mounting base of the vertically adjustable fine-tuning displacement stage are integrally formed; The clamping seat has an end face connected to the sliding table of the vertically adjustable fine-tuning displacement table, a sink groove is horizontally provided and connected to the motion capture unit, and the placement module is located in the capture area of ​​the motion capture unit.

[0013] Furthermore, the measurement module also includes A measuring base, which is fixed on the test table and connected to a set of vertically adjustable fine-tuning displacement stages; An arched connecting frame, whose side is connected to the sliding table of the fine adjustment displacement table on the measuring base, the bridge plane at the upper end is connected to the fixed mounting frame, and the bridge plane at the lower end is connected to the transition mounting frame; the thickness measuring sensor pen is fixedly installed on the fixed mounting frame, and the adjustable thickness measuring sensor pen is installed on the transition mounting frame, and the sensing ends of the two thickness measuring sensor pens are arranged facing each other.

[0014] Furthermore, a group of transversely adjustable fine-adjustment displacement platforms are provided on the transition mounting frame, a group of longitudinally adjustable fine-adjustment displacement platforms are provided on the sliding platform of the transversely adjustable fine-adjustment displacement platform, a sensing mounting frame is provided on the sliding platform of the longitudinally adjustable fine-adjustment displacement platform, and the thickness measuring sensing pen is installed on the sensing mounting frame.

[0015] In summary, the present invention has the following beneficial effects: By rationally designing single or multiple sets of standard or customized fine-tuning stages on the measurement module, vision module and placement module, the relevant components can be precisely fine-tuned, making the operation more convenient; The thickness of semiconductor processing blades can be accurately measured by a highly sensitive thickness sensor pen with a ceramic tip, and the data is more accurate; Through the contact thickness sensing pen and dynamic capture equipment, thickness measurement programming is carried out to achieve fully automated and efficient thickness measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of a three-dimensional structure of an embodiment of the present invention; Figure 2 A schematic diagram of the structure of a measurement module in an embodiment of the present invention; Figure 3 A schematic diagram of the structure of a placement module in an embodiment of the present invention; Figure 4 A schematic diagram of the structure of a visual module in an embodiment of the present invention; Figure 5 A schematic diagram of the structure of a special fine-tuning displacement stage in a vision module in an embodiment of the present invention.

[0017] In the figure: 10, test table; 20, measurement module; 21, thickness sensing pen; 22, measurement base; 23, arched connecting frame; 24, fixed mounting frame; 25, transition mounting frame; 26, sensing mounting frame; 30, placement module; 31, tool holder platform; 32, rotation unit; 33, placement base; 34, L-shaped mounting frame; 35, rotation table; 36, frustum; 37, U-shaped motor frame; 38, rotation motor; 40, vision module; 41, motion capture unit; 42, motion capture base; 43, clamping seat; 50, fine adjustment displacement stage; 51, mounting base; 52, fine adjustment slot; 53, sliding table; 54, knob seat; 55, fine adjustment knob; 56, gasket ring. DETAILED DESCRIPTION Example

[0018] The following is combined with Figure 1-5 The present invention is described in further detail.

[0019] The high-precision blade thickness gauge comprises a test table 10, a measuring module 20, a placement module 30 and a visual module 40, such as Figure 1 As shown, the anti-vibration test table 10 is arranged horizontally, the measuring module 20 is installed at the upper left corner of the test table 10, the placement module 30 is installed at the lower left corner of the test table 10, and the visual module 40 is installed at the upper right corner of the test table 10. The placement module 30 is provided with a tool holder table 31 that can be adjusted horizontally, and the tool holder table 31 is provided with a rotating unit 32 to ensure that the blade to be tested can be automatically rotated later to perform circumferential point thickness measurement instead of single point thickness measurement. The visual module 40 is provided with a motion capture unit 41 that can be adjusted vertically and longitudinally. The motion capture unit 41 is generally a high-precision image capture camera, which is combined with relevant software to complete image capture, fixed-point tracking, early warning prompts and other functions. Here, it is required that the motion capture unit 41 must be set corresponding to the tool holder table 31 of the placement module 30, that is, the tool holder table 31 must be completely in the capture area of ​​the motion capture unit 41. The measuring module 20 is provided with a thickness sensing pen 21 that can be adjusted horizontally, longitudinally and vertically, and the thickness sensing pen 21 is generally a combination of two sensing pens arranged oppositely. Both thickness sensing pens 21 can be moved, but generally one is fixed and the other is moved, which is the most reasonable, with less operation, less structural design difficulty, and less equipment space occupation. The thickness sensing pen 21 must also be set corresponding to the knife stand 31, that is, the knife stand 31 must be completely within the adjustment range of the thickness sensing pen 21.

[0020] The thickness sensing pen 21, the knife holder 31, and the motion capture unit 41 are all adjusted by the fine adjustment displacement stage 50. Figure 5As shown, the standard fine adjustment displacement stage 50 is composed of a mounting base 51, a sliding table 53, a knob seat 54, a fine adjustment knob 55 and a gasket ring 56. The mounting base 51 is a basic pad-type base with bolt holes on both sides for docking with other modules for fixing. A horizontal through-going fine adjustment groove 52 is provided on the front of the mounting base 51, and linear ball bearings are embedded on both sides of the fine adjustment groove 52. A loop groove is provided on both sides of the fine adjustment groove 52, and the outer side of the loop groove is through-through to ensure that the ball rolls cyclically in the loop groove, and the ball end face extends out of the through-hole and contacts with other components to complete the transmission. The linear ball bearing docks with the sliding table 53 set in the fine adjustment groove 52 in a spherical contact manner, so that the sliding table 53 is driven to move linearly along the fine adjustment groove 52 by means of the cyclic rolling of the balls in the linear ball bearing. Compared with the traditional method, the force loss is less, the displacement controllability is stronger, and the natural adjustment accuracy is higher. An integrally formed knob seat 54 is provided on the outer side of one end in the sliding direction of the sliding platform 53. The knob seat 54 has a drooping section. The drooping section is provided with a threaded groove that runs horizontally through and is linearly mounted on the base 51. That is, the threaded groove is in the same direction as the fine-tuning groove 52, and matches the movement of the sliding platform 53. The fine-tuning knob 55 is arranged in this threaded groove. The shaft of the fine-tuning knob 55 is provided with a thread, and the end is a spherical surface. When it is needed, the spherical surface at the end of the fine-tuning knob 55 is against the side of the mounting base 51. When the fine-tuning knob 55 is rotated, the fine-tuning knob 55 rotates in place relative to the mounting base 51 because it is against the fixed mounting base 51. The threaded structure is transmitted, so that the sliding platform 53 integrally formed with the knob seat 54 begins to move. The corresponding scale line can be marked on the fine-tuning knob 55 for easy operation. A gasket ring 56 is provided on the fine-tuning knob 55, and the gasket ring 56 rotates synchronously with the fine-tuning knob 55, mainly playing a limiting role. When the rotation of the fine-tuning knob 55 causes the knob seat 54 to slide closer to the gasket ring 56 until they collide, the fine-tuning knob 55 cannot continue to rotate in the same direction; the limit on the other side can be achieved by the length of the thread of the fine-tuning knob 55, the design of the sliding platform 53 and the block of the mounting base 51. Therefore, the gasket ring 56 corresponds to the limit adjustment position of the fine-tuning knob 55. The placement module 30 and the measurement module 20 are adjusted using the standard fine-tuning displacement stage 50, and only the vision module 40 uses a fine-tuning displacement stage 50 with a special structure.

[0021] like Figure 3As shown, the placement module 30 is the basis of the entire test bench, and other modules are arranged based on the placement module 30, and the blade to be tested is installed on the tool holder platform 31. The placement module 30 includes a tool holder platform 31, a rotating unit 32, a placement base 33, and an L-shaped mounting frame 34, wherein the rotating unit 32 includes a rotating table 35, a frustum 36, a U-shaped motor frame 37, a rotating motor 38, etc. Specifically, the placement module 30 is fixedly arranged at the lower left corner of the test table 10, and a set of horizontally adjustable fine-tuning displacement platforms 50 are docked on the top. One end of the L-shaped mounting frame 34 docks with the sliding table 53 of the fine-tuning displacement platform 50, and the other end points to the upper left and is provided with an installation cavity that runs through the top and bottom, and the rotating table 35 is installed in the installation cavity. A protruding frustum 36 is provided on the top of the rotating table 35 to align and fix the ring control of the center of the blade to be tested. An installation groove is provided at the corner of the L-shaped mounting frame 34, and the installation groove runs through the front end surface. The opening of the U-shaped motor frame 37 faces the back, and the upper end of the U-shaped motor frame 37 is installed in the installation slot. The lower end of the U-shaped motor frame 37 is provided with a corner hole for installing and fixing the rotating motor 38. A through slot is also provided in the center. The driving end of the rotating motor 38 passes through the slot upward and corresponds to the force transmission end at the bottom of the rotating table 35. The output end of the rotating motor 38 and the force transmission end of the rotating table 35 are connected by a belt. The movement process of the placement module 30 is that the output of the rotating motor 38 is transmitted to the rotating table 35 through the belt to drive the installed blade to be tested to rotate, and the position of the rotating table 35 on the sliding table 53 is adjusted horizontally by rotating the fine adjustment knob 55 of the fine adjustment displacement table 50.

[0022] like Figure 4 As shown, the vision module 40 includes a motion capture unit 41, a motion capture base 42 and a clamping seat 43. The motion capture base 42 is fixedly installed at the upper right corner of the test table 10 to lift the motion capture unit 41 to the required height. The vision module 40 is equipped with a customized fine-tuning displacement stage 50, which is composed of a group of longitudinal adjustment and a group of vertical adjustment fine-tuning displacement stages 50. The sliding table 53 in the longitudinal adjustment fine-tuning displacement stage 50 and the mounting base 51 in the vertical adjustment fine-tuning displacement stage 50 are integrally formed, and the two form an L-shaped component. The back of the sliding table 53 in the vertical adjustment fine-tuning displacement stage 50 is also connected to the clamping seat 43. The clamping seat 43 is a sink groove that is horizontally opened to adapt to the motion capture unit 41. The motion capture unit 41 is fixed in the sink groove of the clamping seat 43 by a clamp.

[0023] like Figure 2As shown, the measuring module 20 includes a measuring base 22, an arched connecting frame 23, a fixed mounting frame 24, a transition mounting frame 25, a sensing mounting frame 26 and two core thickness sensing pens 21. The measuring base 22 is fixedly mounted at the upper left corner of the test table 10, and a group of vertically adjustable fine-adjustment displacement platforms 50 are connected to the front end. The front side of the sliding table 53 in the vertically adjustable fine-adjustment displacement platform 50 is installed with an arched connecting frame 23, the bridge surface of the arched connecting frame 23 is set to the right, and the pier side of the arched connecting frame 23 is connected to the sliding table 53, and the two bridge planes are one above and one below. The bridge section surface at the upper end is connected to the fixed mounting frame 24, and the bridge section surface at the lower end is connected to the transition mounting frame 25. A group of horizontally adjustable fine-adjustment displacement platforms 50 and a group of longitudinally adjustable fine-adjustment displacement platforms 50 are installed in sequence on the transition mounting frame 25. In order to facilitate the installation of the fine adjustment displacement stage 50, a through groove is transversely opened at the lower end of the arched connecting frame 23, and the end of the fine adjustment knob 55 in the transverse adjustment fine adjustment displacement stage 50 passes through the corresponding groove. The sliding table 53 in the transverse adjustment fine adjustment displacement stage 50 is fixedly connected to the mounting base 51 of the longitudinal adjustment fine adjustment displacement stage 50. The top surface of the sliding table 53 of the longitudinal adjustment fine adjustment displacement stage 50 is connected to a fixed sensing mounting frame 26. The sensing mounting frame 26 and the fixed mounting frame are respectively fixedly mounted with a thickness measuring induction pen 21, and the two ceramic ends of the thickness measuring induction pen 21 are arranged opposite to each other. Compared with the existing induction components on the market, the thickness measuring induction pen 21 has better sensitivity and better test effect.

[0024] When measuring the thickness of the blade to be measured, install the blade to be measured on the tool holder 31 to ensure that there is sufficient operating space for measurement. Reasonably adjust the height position of the motion capture unit 41 and adjust it forward and backward to align the measurement area. First, completely move the thickness sensing pen 21 at the lower end forward and backward and left and right. By moving the arched connecting frame 23 as a whole and moving the tool holder 31 horizontally, adjust the thickness sensing pen 21 at the upper end to the contact position, and then reset the thickness sensing pen 21 at the lower end. The two thickness sensing pens 21 are used together with the motion capture unit 41 on the right to measure the thickness of the blade to be measured, and the rotating motor 38 is controlled to rotate the blade to be measured to measure points on the circumference. The tool holder 31 can be fine-tuned left and right to measure the circumference of different areas. After completion, remove the equipment first, and then take out the current blade to be measured.

[0025] It should be noted that this specific embodiment is only an explanation of the present invention, and it is not a limitation of the present invention. After reading this specification, those skilled in the art can make non-creative modifications to this embodiment as needed, but as long as it is within the scope of the claims of the present invention, it is protected by the patent law.

Claims

1. High-precision blade thickness gauge, characterized by: include Test table (10); A measuring module (20) is disposed on the test table (10) and is provided with an adjustable thickness sensing pen (21). A placement module (30), which is arranged on the test table (10) and is provided with an adjustable tool holder platform (31), wherein the tool holder platform (31) is provided with a rotating unit (32); A visual module (40), which is disposed on the test table (10) and is provided with an adjustable motion capture unit (41); The thickness measuring sensing pen (21), the tool holder platform (31) and the motion capture unit (41) are all adjusted via a fine adjustment displacement platform (50).

2. The high-precision blade thickness gauge according to claim 1, characterized in that: The measuring module (20) and the visual module (40) are both arranged corresponding to the placement module (30), and the test table (10) is a shockproof test table.

3. The high-precision blade thickness gauge according to claim 1, characterized in that: The fine adjustment displacement stage (50) comprises A mounting base (51) fixedly docked with other modules, with a horizontally penetrating fine-tuning groove (52) provided on the front, and linear ball bearings embedded on both sides of the fine-tuning groove (52); A sliding platform (53) disposed in the fine-tuning groove (52) and slidably connected to the mounting base (51); a knob seat (54) disposed on the outer side of the sliding platform (53) and having a hanging section; the hanging section of the knob seat (54) is provided with a threaded groove that runs horizontally through and points toward the mounting base (51); The fine-tuning knob (55) has a shaft with threads and a spherical end, which is matched and connected with the thread groove of the knob seat (54).

4. The high-precision blade thickness gauge according to claim 3, characterized in that: A gasket ring (56) is provided on the fine-tuning knob (55), and the gasket ring (56) rotates synchronously with the fine-tuning knob (55); The fine-tuning knob (55) is arranged at the extreme position of the outward sliding of the sliding platform (53) and the knob seat (54).

5. The high-precision blade thickness gauge according to claim 3, characterized in that: The placement module (30) also includes A placement base (33) is fixedly arranged on the test table (10) and is docked with a set of transversely adjustable fine-tuning displacement stages (50); An L-shaped mounting frame (34) is provided with a mounting groove at a corner thereof, one end of which is butted against the sliding table (53) of the fine adjustment displacement table (50), and the other end of which is provided with a vertically penetrating mounting cavity; A rotating platform (35) is disposed in the mounting cavity of the L-shaped mounting frame (34).

6. The high-precision blade thickness gauge according to claim 5, characterized in that: The rotating table (35) is provided with a centrally protruding truncated cone (36), and the blade to be measured is embedded outside the truncated cone (36).

7. The high-precision blade thickness gauge according to claim 5, characterized in that: A U-shaped motor frame (37) is provided in the mounting groove of the L-shaped mounting frame (34), a rotating motor (38) is provided on the U-shaped motor frame (37), and a driving end of the rotating motor (38) is belt-connected to a transmission end of the rotating platform (35).

8. The high-precision blade thickness gauge according to claim 3, characterized in that: The visual module (40) also includes A motion capture base (42) is fixedly arranged on the test table (10), and is connected in sequence to a group of longitudinally adjustable fine-adjustment displacement stages (50) and a group of vertically adjustable fine-adjustment displacement stages (50); the sliding stage (53) of the longitudinally adjustable fine-adjustment displacement stage (50) and the mounting base (51) of the vertically adjustable fine-adjustment displacement stage (50) are integrally formed; The clamping seat (43) has an end face connected to the sliding table (53) of the vertically adjustable fine-tuning displacement table (50), a sink groove is horizontally provided and connected to the motion capture unit (41), and the placement module (30) is located in the capture area of ​​the motion capture unit (41).

9. The high-precision blade thickness gauge according to claim 3, characterized in that: The measuring module (20) also includes A measuring base (22) fixedly mounted on the test table (10) and connected to a set of vertically adjustable fine-tuning displacement stages (50); An arched connecting frame (23) has a side surface butted against the sliding table (53) of the fine adjustment displacement table (50) on the measuring base (22); a bridge plane at the upper end is connected to a fixed mounting frame (24); and a bridge plane at the lower end is connected to a transition mounting frame (25); the thickness measuring induction pen (21) is fixedly mounted on the fixed mounting frame (24); an adjustable thickness measuring induction pen (21) is mounted on the transition mounting frame (25); and the sensing ends of the two thickness measuring induction pens (21) are arranged facing each other.

10. The high-precision blade thickness gauge according to claim 9, characterized in that: A group of transversely adjustable fine-adjustment displacement platforms (50) are provided on the transition mounting frame (25); a group of longitudinally adjustable fine-adjustment displacement platforms (50) are provided on the sliding table (53) of the transversely adjustable fine-adjustment displacement platform (50); a sensing mounting frame (26) is provided on the sliding table (53) of the longitudinally adjustable fine-adjustment displacement platform (50); and the thickness measuring sensing pen (21) is installed on the sensing mounting frame (26).

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