Tactile sensor and manipulator

Abstract

This application discloses a tactile sensor and a robotic arm, belonging to the field of sensors. The tactile sensor includes: a triboelectric layer, an electrode layer, and a piezoresistive layer; the triboelectric layer, electrode layer, and piezoresistive layer are stacked, with the electrode layer located between the triboelectric layer and the piezoresistive layer; the electrode layer includes a substrate layer, a triboelectric electrode, a temperature layer, and a piezoresistive electrode; the triboelectric layer, temperature layer, and piezoresistive electrode are all disposed on the substrate layer, with the triboelectric electrode facing the triboelectric layer and the piezoresistive electrode facing the piezoresistive layer; the piezoresistive layer includes a piezoresistive substrate and a piezoresistive protrusion disposed on the piezoresistive substrate, the piezoresistive protrusion facing the electrode layer, the piezoresistive protrusion being used to abut against the piezoresistive electrode, and the piezoresistive protrusion being deformable; when the piezoresistive protrusion is in contact with the piezoresistive electrode, the shape of the piezoresistive protrusion changes, the contact area between the piezoresistive protrusion and the piezoresistive electrode changes, and the piezoresistive electrode detects the change in resistance.

Description

Technical Field

[0001] This application belongs to the field of sensors, specifically relating to a tactile sensor and a robotic arm. Background Technology

[0002] With the rapid development of artificial intelligence and robotics, multimodal tactile perception has become an indispensable part of high-performance robotic systems. In the human tactile system, skin can perceive and distinguish various physical stimuli such as pressure, temperature, and material properties in real time. This multimodal perception capability provides the foundation for precise manipulation and complex interactions. In related technologies, tactile sensors are typically installed on the robotic arms of robotic systems. However, in these technologies, tactile sensors have limited functionality and struggle to achieve simultaneous detection of multiple physical parameters. Summary of the Invention

[0003] The purpose of this application is to provide a tactile sensor and a robotic arm, which at least solves the problem that tactile sensors have limited functionality and are difficult to simultaneously detect multiple physical parameters.

[0004] In a first aspect, embodiments of this application provide a tactile sensor, which includes: a triboelectric layer, an electrode layer, and a piezoresistive layer;

[0005] The triboelectric layer, the electrode layer, and the piezoresistive layer are stacked, with the electrode layer located between the triboelectric layer and the piezoresistive layer;

[0006] The electrode layer includes a substrate layer, a triboelectric electrode, a temperature layer, and a piezoresistive electrode; the triboelectric layer, the temperature layer, and the piezoresistive electrode are all disposed on the substrate layer, with the triboelectric electrode facing the triboelectric layer and the piezoresistive electrode facing the piezoresistive layer;

[0007] The piezoresistive layer includes a piezoresistive substrate and a piezoresistive protrusion disposed on the piezoresistive substrate. The piezoresistive protrusion faces the electrode layer and is used to abut against the piezoresistive electrode. The piezoresistive protrusion is deformable.

[0008] When the piezoresistive protrusion contacts the piezoresistive electrode, the shape of the piezoresistive protrusion changes, the contact area between the piezoresistive protrusion and the piezoresistive electrode changes, and the resistance detected by the piezoresistive electrode changes.

[0009] Optionally, the temperature layer includes a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes;

[0010] Along the direction in which the triboelectric layer and the electrode layer are stacked, the substrate layer includes a first surface and a second surface facing away from each other, the first surface facing the triboelectric layer and the second surface facing the piezoresistive layer;

[0011] The first surface is provided with a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes, which are arranged alternately. The second surface is provided with a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes, which are arranged alternately. The P-type temperature electrodes on the first surface and the N-type temperature electrodes on the second surface are positioned opposite each other and electrically connected. The N-type temperature electrodes on the first surface and the P-type temperature electrodes on the second surface are positioned opposite each other and electrically connected. The P-type temperature electrodes on the first surface and the N-type temperature electrodes on the first surface are electrically connected. The P-type temperature electrodes on the second surface and the N-type temperature electrodes on the second surface are electrically connected.

[0012] Optionally, the surface of the triboelectric layer facing away from the electrode layer is provided with a plurality of triboelectric protrusions.

[0013] Optionally, a conductive layer is provided on the surface of the piezoresistive protrusion, and the conductive layer covers the piezoresistive protrusion;

[0014] And / or, the interior of the piezoresistive protrusion is provided with conductive particles.

[0015] Optionally, the tactile sensor further includes a flexible support frame;

[0016] The support frame is disposed on the surface of the piezoresistive substrate facing the electrode layer, and the piezoresistive protrusion is located inside the support frame. The thickness of the support frame is less than or equal to the height of the piezoresistive protrusion. The thickness of the support frame is the distance between two opposite surfaces of the support frame along the stacking direction of the triboelectric layer and the electrode layer. The height of the piezoresistive protrusion is the distance between the end of the piezoresistive protrusion facing away from the piezoresistive substrate and the piezoresistive substrate.

[0017] The elastic modulus of the support frame is greater than that of the piezoresistive protrusion.

[0018] Optionally, a first lead and a second lead are provided on the surface of the substrate layer facing the triboelectric layer;

[0019] The first lead is electrically connected to the triboelectric electrode, and the second lead is electrically connected to the piezoresistive electrode.

[0020] Optionally, the second lead is electrically connected to the piezoresistive electrode via a via.

[0021] Optionally, along the direction in which the triboelectric layer and the electrode layer are stacked, the projection of the triboelectric electrode on the substrate layer overlaps with the projection of the triboelectric layer on the substrate layer, or the projection of the triboelectric electrode on the substrate layer is located inside the projection of the triboelectric layer on the substrate layer.

[0022] Optionally, the piezoresistive electrode includes a first piezoresistive electrode layer and a second piezoresistive electrode layer. The first piezoresistive electrode layer has a plurality of first protrusions and a plurality of first recesses, with the first recesses and the first protrusions arranged alternately. The second piezoresistive electrode layer has a plurality of second protrusions and a plurality of second recesses, with the second recesses and the second protrusions arranged alternately. The first protrusions are embedded in the second recesses, and the second protrusions are embedded in the first recesses.

[0023] The first piezoresistive electrode layer and the second piezoresistive electrode layer are used to compress the piezoresistive protrusions.

[0024] Secondly, embodiments of this application provide a robotic arm, which includes the tactile sensor described in any one of the first aspects above.

[0025] In this embodiment, since the triboelectric layer, temperature layer, and piezoresistive electrode are all disposed on the substrate layer, with the triboelectric electrode facing the triboelectric layer and the piezoresistive electrode facing the piezoresistive layer, temperature can be detected through the temperature layer. Furthermore, since the triboelectric electrode faces the triboelectric layer, once the surface of the triboelectric layer away from the substrate layer is subjected to pressure and friction, triboelectric charge can be generated between the triboelectric layer and the triboelectric electrode. This triboelectric charge can then be transferred to the outside of the sensor and detected. In other words, once the surface of the triboelectric layer away from the substrate layer is subjected to pressure, the triboelectric layer generates triboelectric charge at the instant of force application, allowing the tactile sensor to detect transient pressure. Additionally, when objects of different materials touch the triboelectric layer, the magnitude of the triboelectric charge generated varies depending on the material, allowing the tactile sensor to also detect the material of the object touching the sensor. In addition, the piezoresistive layer includes a piezoresistive substrate and piezoresistive protrusions disposed on the piezoresistive substrate. The piezoresistive protrusions face the electrode layer and are used to abut against the piezoresistive electrode. The piezoresistive protrusions are deformable. Therefore, once the surface of the triboelectric layer away from the substrate layer is subjected to pressure, the pressure is transmitted to the substrate layer, which can cause the substrate layer to move the piezoresistive electrode. As a result, the piezoresistive electrode comes into contact with the piezoresistive protrusion and squeezes the piezoresistive protrusion. The piezoresistive protrusion will change shape, that is, the contact area between the piezoresistive protrusion and the piezoresistive electrode will change. This will cause the resistance between the piezoresistive electrode and the electrode to change. As a result, the piezoresistive electrode detects the change in resistance, and thus the voltage output of the tactile sensor changes. By detecting the voltage output of the tactile sensor, the piezoresistive measurement can be realized. Furthermore, when the triboelectric layer is subjected to pressure, the output of the tactile sensor will not change over time, thus enabling the measurement of static pressure. In other words, in this embodiment of the application, by setting a triboelectric layer, a triboelectric electrode, a substrate layer, a temperature layer, a piezoresistive electrode, and a piezoresistive layer, the tactile sensor can not only detect the temperature through the temperature layer, but also detect the material of the object touching the triboelectric layer, and detect the transient and static pressure of the object touching the tactile sensor. In other words, in this embodiment of the application, the tactile sensor has diversified functions and can realize the simultaneous detection of multiple physical parameters. Attached Figure Description

[0026] Figure 1 This represents one of the exploded views of a tactile sensor provided in an embodiment of this application;

[0027] Figure 2 This is a top view of an electrode layer provided in an embodiment of this application;

[0028] Figure 3 This is a bottom view of an electrode layer provided in an embodiment of this application;

[0029] Figure 4 This is a second exploded view of a tactile sensor provided in an embodiment of this application.

[0030] Figure label:

[0031] 001: Via; 10: Triboelectric layer; 101: Triboelectric protrusion; 20: Electrode layer; 21: Substrate layer; 22: Triboelectric electrode; 23: Temperature layer; 24: Piezoresistive electrode; 211: First lead; 212: Second lead; 231: P-type temperature electrode; 232: N-type temperature electrode; 241: First piezoresistive electrode layer; 242: Second piezoresistive electrode layer; 2411: First protrusion; 2412: First recess; 2421: Second protrusion; 2422: Second recess; 30: Piezoresistive layer; 31: Piezoresistive substrate; 32: Piezoresistive protrusion; 40: Support frame. Detailed Implementation

[0032] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise stated, "multiple" means two or more. Furthermore, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0033] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0034] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0035] like Figures 1 to 4 As shown, the tactile sensor includes a triboelectric layer 10, an electrode layer 20, and a piezoresistive layer 30.

[0036] A triboelectric layer 10, an electrode layer 20, and a piezoresistive layer 30 are stacked, with the electrode layer 20 located between the triboelectric layer 10 and the piezoresistive layer 30. The electrode layer 20 includes a substrate layer 21, a triboelectric electrode 22, a temperature layer 23, and a piezoresistive electrode 24. The triboelectric layer 10, the temperature layer 23, and the piezoresistive electrode 24 are all disposed on the substrate layer 21, with the triboelectric electrode 22 facing the triboelectric layer 10 and the piezoresistive electrode 24 facing the piezoresistive layer 30. The piezoresistive layer 30 includes a piezoresistive substrate 31 and a piezoresistive protrusion 32 disposed on the piezoresistive substrate 31. The piezoresistive protrusion 32 faces the electrode layer 20 and is used to abut against the piezoresistive electrode 24. The piezoresistive protrusion 32 is deformable. When the piezoresistive protrusion 32 is in contact with the piezoresistive electrode 24, the shape of the piezoresistive protrusion 32 changes, the contact area between the piezoresistive protrusion 32 and the piezoresistive electrode 24 changes, and the piezoresistive electrode 24 detects the change in resistance.

[0037] In this embodiment, since the triboelectric layer 10, the temperature layer 23, and the piezoresistive electrode 24 are all disposed on the substrate layer 21, with the triboelectric electrode 22 facing the triboelectric layer 10 and the piezoresistive electrode 24 facing the piezoresistive layer 30, temperature can be detected through the temperature layer 23. Since the triboelectric electrode 22 faces the triboelectric layer 10, once the surface of the triboelectric layer 10 away from the substrate layer 21 is subjected to pressure and friction, triboelectric layer 10 and triboelectric electrode 22 can generate triboelectric charge. This triboelectric charge can then be transferred to the outside of the sensor and detected. In other words, once the surface of the triboelectric layer 10 away from the substrate layer 21 is subjected to pressure, the triboelectric layer 10 can generate triboelectric charge at the instant of force application, thus enabling the tactile sensor to detect transient pressure. Furthermore, when objects of different materials touch the triboelectric layer 10, the magnitude of the triboelectric charge generated by the triboelectric layer 10 varies depending on the material, allowing the tactile sensor to also detect the material of the object touching the sensor. Additionally, the piezoresistive layer 30 includes a piezoresistive substrate 31 and piezoresistive protrusions 32 disposed on the piezoresistive substrate 31. The piezoresistive protrusions 32 face the electrode layer 20 and are used to abut against the piezoresistive electrode 24. The piezoresistive protrusions 32 are deformable. Therefore, once the triboelectric layer 10 is subjected to pressure away from the surface of the substrate layer 21, the pressure is transmitted to the substrate layer 21, which can cause the substrate layer 21 to move the piezoresistive electrode 24. As a result, the piezoresistive electrode 24 contacts the piezoresistive protrusion 32, squeezing the piezoresistive protrusion 32. 2. The piezoresistive protrusion 32 will change shape, that is, the contact area between the piezoresistive protrusion 32 and the piezoresistive electrode 24 changes, causing a change in the resistance of the piezoresistive electrode 24. The piezoresistive electrode 24 detects this resistance change, which in turn causes a change in the voltage output of the tactile sensor. By detecting the voltage output of the tactile sensor, piezoresistive measurement can be achieved. Furthermore, when the triboelectric layer 10 is subjected to pressure, the output of the tactile sensor does not change over time, thus enabling the measurement of static pressure. In other words, in this embodiment, by setting the triboelectric layer 10, triboelectric electrode 22, substrate layer 21, temperature layer 23, piezoresistive electrode 24, and piezoresistive layer 30, the tactile sensor can not only detect temperature through the temperature layer 23, but also detect the material of the object touching the triboelectric layer 10, and detect both transient and static pressure. Therefore, in this embodiment, the tactile sensor has diversified functions and can achieve simultaneous detection of multiple physical parameters.

[0038] It should be noted that the triboelectric electrode 22 and the triboelectric layer 10 are connected by adhesive bonding, that is, the triboelectric electrode 22 and the triboelectric layer 10 are bonded together by adhesive.

[0039] Furthermore, in this embodiment, the number of triboelectric layers 10 can be greater than or equal to 2. For example, the number of triboelectric layers 10 is 2, or even 3 or 5. The specific number of triboelectric layers 10 is not limited in this embodiment. The number of triboelectric electrodes 22 is equal to the number of triboelectric layers 10.

[0040] Furthermore, by setting the number of triboelectric layers 10 to be greater than or equal to two, the accuracy of determining the material of an object when the tactile sensor outputs the charge of the triboelectric layers 10 to determine the material of the object touching the triboelectric layers 10 can be effectively improved. Specifically, when the number of triboelectric layers is greater than or equal to two, the different triboelectric layers 10 have different materials. Therefore, when an object touches the tactile sensor, the charge signals generated by the triboelectric layers 10 of different materials can be combined to verify the material information of the object touching the tactile sensor, thus improving the accuracy of determining the material of the object touching the tactile sensor.

[0041] In addition, in this embodiment, after the triboelectric layer 10 and the triboelectric electrode 22 are bonded together, the triboelectric layer 10 and the triboelectric electrode 22 are equivalent to forming a triboelectric generator, thereby generating different charge signals when in contact with and separating from different objects. By detecting the charge signals, the material of the item in contact with the friction pad can be identified.

[0042] In addition, in this embodiment, the piezoresistive protrusion 32 and the piezoresistive substrate 31 can be made of the same material, that is, the piezoresistive protrusion 32 and the piezoresistive substrate 31 are made of the same material. Of course, the piezoresistive protrusion 32 and the piezoresistive substrate 31 can also be made of different materials, that is, the piezoresistive protrusion 32 and the piezoresistive substrate 31 are made of different materials. In this case, the piezoresistive protrusion 32 can be connected to the piezoresistive substrate 31 by adhesive bonding.

[0043] Furthermore, in this embodiment, the number of piezoresistive protrusions 32 can be set according to actual needs. For example, the number of piezoresistive protrusions 32 may be 10, or even 15. This embodiment does not limit the specific number of piezoresistive protrusions 32.

[0044] Furthermore, the shape of the piezoresistive protrusion 32 can be set according to actual needs. For example, the piezoresistive protrusion 32 can be conical, or prism-shaped. The specific shape of the piezoresistive protrusion 32 is not limited in this embodiment.

[0045] In some embodiments, the temperature layer 23 may include a plurality of P-type temperature electrodes 231 and a plurality of N-type temperature electrodes 232; along the stacking direction of the triboelectric layer 10 and the electrode layer 20, the substrate layer 21 includes a first surface and a second surface facing away from each other, the first surface facing the triboelectric layer 10 and the second surface facing the piezoresistive layer 30; the first surface is provided with a plurality of P-type temperature electrodes 231 and a plurality of N-type temperature electrodes 232, the P-type temperature electrodes 231 and N-type temperature electrodes 232 being arranged alternately, and the second surface is provided with a plurality of P-type temperature electrodes 231 and N-type temperature electrodes 232. The substrate 21 includes multiple N-type temperature electrodes 232, P-type temperature electrodes 231, and N-type temperature electrodes 232 arranged alternately. The P-type temperature electrodes 231 on the first surface and the N-type temperature electrodes 232 on the second surface are positioned opposite each other and electrically connected. Similarly, the N-type temperature electrodes 232 on the first surface and the P-type temperature electrodes 231 on the second surface are positioned opposite each other and electrically connected. The P-type temperature electrodes 231 on the first surface and the N-type temperature electrodes 232 on the first surface are also electrically connected. The P-type temperature electrodes 231 on the second surface and the N-type temperature electrodes 232 on the second surface are also electrically connected. With this arrangement, the temperature layer 23 can detect temperature through the P-type temperature electrodes 231 and N-type temperature electrodes 232. Furthermore, since different types of temperature electrodes are arranged on opposite surfaces of the substrate 21, compared to the same-surface arrangement of the temperature layer 23 in related technologies, this arrangement greatly saves space for the tactile sensor, allowing the tactile sensor to increase its output voltage within a limited space.

[0046] It should be noted that the P-type temperature electrode 231 on the first surface and the N-type temperature electrode 232 on the second surface can be connected through a via 001. That is, a through hole is opened in the substrate layer 21, and a conductive element or conductive layer is provided in the through hole. The conductive element or conductive layer is connected to the P-type temperature electrode 231 and the N-type temperature electrode 232 respectively, so that the P-type temperature electrode 231 on the first surface and the N-type temperature electrode 232 on the second surface are connected through the via 001. In addition, the N-type temperature electrode 232 on the first surface and the P-type temperature electrode 231 on the second surface can be connected through a via 001. That is, a through hole is opened in the substrate layer 21, and a conductive element or conductive layer is provided in the through hole. The conductive element or conductive layer is connected to the P-type temperature electrode 231 and the N-type temperature electrode 232 respectively, so that the P-type temperature electrode 231 on the first surface and the N-type temperature electrode 232 on the second surface are connected through the via 001. In addition, the P-type temperature electrode 231 on the first surface and the N-type temperature electrode 232 on the first surface can be connected through a conductive layer, and the P-type temperature electrode 231 on the second surface and the N-type temperature electrode 232 on the second surface can be connected through a conductive layer.

[0047] In addition, in this embodiment, the P-type temperature electrode 231 and N-type temperature electrode 232 on the first surface and the P-type temperature electrode 231 and N-type temperature electrode 232 on the second surface can be connected in series. That is, one P-type temperature electrode 231 on the first surface is electrically connected to one N-type temperature electrode 232 on the second surface, the N-type temperature electrode 232 on the second surface is electrically connected to the P-type temperature electrode 231 on the second surface, the P-type temperature electrode 231 on the second surface is electrically connected to the N-type temperature electrode 232 on the first surface, and the N-type temperature electrode 232 on the first surface is electrically connected to another P-type temperature electrode 231 on the first surface. Specifically, when the P-type temperature electrode 231 and N-type temperature electrode 232 on the first surface and the P-type temperature electrode 231 and N-type temperature electrode 232 on the second surface are connected in series end-to-end.

[0048] In addition, in some embodiments, the surface of the triboelectric layer 10 facing away from the electrode layer 20 is provided with a plurality of triboelectric protrusions 101.

[0049] With this configuration, the multiple friction protrusions 101 can effectively increase the effective contact area of ​​the triboelectric layer 10, thereby effectively increasing the amount of triboelectric charge generated by the triboelectric layer 10 and enhancing the intensity of the triboelectric charge. This effectively improves the output performance of the triboelectric generator formed by the triboelectric layer 10 and the triboelectric electrode 22. In addition, the presence of the friction protrusions 101 can also cause a higher local electric field intensity, improving the separation and transfer efficiency of the triboelectric charge.

[0050] In addition, in this embodiment, the friction protrusion 101 can be elastic, thereby improving the elastic recovery of the friction protrusion 101, enhancing the contact and separation effect of the friction protrusion 101, reducing energy loss, and improving the mechanical durability of the tactile sensor.

[0051] Furthermore, in this embodiment, the number of friction protrusions 101 can be set according to actual needs. For example, the number of friction protrusions 101 may be 13, or for another example, the number of friction protrusions 101 may be 20. The specific number of friction protrusions 101 is not limited in this embodiment.

[0052] Furthermore, the shape of the friction protrusion 101 can be set according to actual needs. For example, the friction protrusion 101 can be conical, or prism-shaped. The specific shape of the friction protrusion 101 is not limited in this embodiment.

[0053] In some embodiments, a conductive layer is provided on the surface of the piezoresistive protrusion 32, covering the piezoresistive protrusion 32; and / or, conductive particles are provided inside the piezoresistive protrusion 32. With this configuration, once the piezoresistive electrode 24 contacts the piezoresistive protrusion 32, the piezoresistive electrode 24 can compress the piezoresistive protrusion 32, thereby causing the piezoelectric layer on the piezoresistive protrusion 32 to change with the shape of the piezoresistive protrusion 32, and / or causing changes in the conductive particles inside the piezoresistive protrusion 32. This helps to change the resistance of the pathway connected by the piezoresistive electrode, thereby causing the tactile sensor to output different voltages to determine the static pressure. In other words, by providing a conductive layer on the surface of the piezoresistive protrusion 32, covering the piezoresistive protrusion 32; and / or providing conductive particles inside the piezoresistive protrusion 32, the tactile sensor can easily detect static pressure.

[0054] It should be noted that, in the embodiments of this application, a conductive layer may be provided only on the surface of the piezoresistive protrusion 32, or conductive particles may be provided only inside the piezoresistive protrusion 32. Of course, a conductive layer may be provided on the surface of the piezoresistive protrusion 32, and conductive particles may be provided inside the piezoresistive protrusion 32. The embodiments of this application do not limit this to any particular method.

[0055] In addition, in this embodiment, a conductive layer may be provided on the surface of the piezoresistive substrate 31, and / or conductive particles may be provided inside the piezoresistive substrate 31. With such a configuration, once the piezoresistive protrusion 32 is excessively compressed, the piezoresistive electrode 24 may come into contact with the piezoresistive substrate 31, thereby increasing the voltage output of the tactile sensor, which helps the tactile sensor detect larger static pressures and improves the detection range of the tactile sensor.

[0056] It should be noted that, in the embodiments of this application, a conductive layer may be provided only on the surface of the piezoresistive substrate 31, or conductive particles may be provided only inside the piezoresistive substrate 31. Of course, a conductive layer may also be provided on the surface of the piezoresistive substrate 31, and conductive particles may be provided inside the piezoresistive substrate 31. The embodiments of this application do not limit this to any particular method.

[0057] In some embodiments, the tactile sensor may also include an elastic support frame 40; the support frame 40 is disposed on the surface of the piezoresistive substrate 31 facing the electrode layer 20, and the piezoresistive protrusion 32 is located inside the support frame 40. The thickness of the support frame 40 is less than or equal to the height of the piezoresistive protrusion 32. The thickness of the support frame 40 is the distance between two opposite surfaces of the support frame 40 along the stacking direction of the triboelectric layer 10 and the electrode layer 20. The height of the piezoresistive protrusion 32 is the distance between the end of the piezoresistive protrusion 32 away from the piezoresistive substrate 31 and the piezoresistive substrate 31. The elastic modulus of the support frame 40 is greater than the elastic modulus of the piezoresistive protrusion 32.

[0058] Since the thickness of the support frame 40 is less than or equal to the height of the piezoresistive protrusion 32, it can be ensured that in the initial state of the tactile sensor, once the tactile sensor is touched by force, the piezoresistive electrode 24 can contact the piezoresistive protrusion 32, thereby allowing the tactile sensor to output voltage and detect static pressure. This enables the tactile sensor to detect relatively small pressures, helping to increase the detection range of the tactile sensor. In addition, the elastic modulus of the support frame 40 is greater than that of the piezoresistive protrusion 32, thus ensuring that the support frame 40 can quickly rebound after the pressure on the tactile sensor disappears, giving the tactile sensor a good recovery response.

[0059] In addition, in this embodiment, the thickness of the support frame 40 can be adjusted as needed, thereby changing the contact area between the piezoresistive protrusion 32 and the piezoresistive electrode 24, so that the initial detection value of the tactile sensor is adjusted.

[0060] Furthermore, in this embodiment, the thickness of the support frame 40 can be less than the height of the piezoresistive protrusion 32. This arrangement ensures that once the tactile sensor is touched, the piezoresistive electrode 24 can contact the piezoresistive protrusion 32, allowing the tactile sensor to output data. This avoids the problem of the tactile sensor failing to output data when touched due to an excessively large gap between the piezoresistive protrusion 32 and the piezoresistive electrode 24, thus preventing the tactile sensor from detecting static pressure.

[0061] It should be noted that the support frame 40 can be connected to the surface of the piezoresistive substrate 31 by adhesive bonding. Of course, the support frame 40 and the surface of the piezoresistive substrate 31 can also be connected by bonding. The specific way in which the support frame 40 is disposed on the surface of the piezoresistive substrate 31 is not limited in this embodiment.

[0062] In addition, in the embodiments of this application, when using tactile sensors, multiple tactile sensors can form a sensor array. When the sensor array is then applied to a robotic arm, the support frames 40 of two adjacent tactile sensors can abut against each other, thereby the support frames 40 can isolate the two adjacent tactile sensors and avoid the problem of possible interference between the two adjacent tactile sensors.

[0063] In addition, in some embodiments, a first lead 211 and a second lead 212 are provided on the surface of the substrate layer 21 facing the triboelectric layer 10; the first lead 211 is electrically connected to the triboelectric electrode 22, and the second lead 212 is electrically connected to the piezoresistive electrode 24.

[0064] This setup is equivalent to setting leads on the same surface of the substrate layer 21, which facilitates the subsequent connection of the tactile sensor to the external processing circuit and makes it easier to set the leads, avoiding complex and difficult processes such as soldering and wire bonding.

[0065] In addition, in this embodiment, a temperature lead may also be provided on the surface of the substrate layer 21 facing the triboelectric layer 10, and the temperature lead is electrically connected to the P-type temperature electrode 231 and / or the N-type temperature electrode 232.

[0066] Furthermore, in this embodiment, the second lead 212 is electrically connected to the piezoresistive electrode 24 via a via 001. This arrangement facilitates the electrical connection between the second lead 212 and the piezoresistive electrode 24, avoiding the need for additional wiring to connect them, thus helping to reduce the size of the tactile sensor. Additionally, the via 001 ensures that the first lead 211 and the second lead 212 are located on the same surface.

[0067] It should be noted that through holes can be formed in the substrate layer 21, and conductive elements or conductive layers can be provided in the through holes. The conductive elements or conductive layers are respectively connected to the second lead 212 and the piezoresistive electrode 24, so that the second lead 212 and the piezoresistive electrode 24 are connected through the via 001.

[0068] In some embodiments, along the stacking direction of the triboelectric layer 10 and the electrode layer 20, the projection of the triboelectric electrode 22 on the substrate layer 21 overlaps with the projection of the triboelectric layer 10 on the substrate layer 21, or the projection of the triboelectric electrode 22 on the substrate layer 21 is located inside the projection of the triboelectric layer 10 on the substrate layer 21. This arrangement ensures that when the triboelectric layer 10 is touched, it makes appropriate contact with the triboelectric electrode 22, thereby generating triboelectric charge. This, in turn, helps to detect the material of the object touching the triboelectric layer 10 using a tactile sensor.

[0069] In some embodiments, the piezoresistive electrode 24 may include a first piezoresistive electrode layer 241 and a second piezoresistive electrode layer 242. The first piezoresistive electrode layer 241 has a plurality of first protrusions 2411 and a plurality of first recesses 2412, with the first recesses 2412 and the first protrusions 2411 arranged alternately. The second piezoresistive electrode layer 242 has a plurality of second protrusions 2421 and a plurality of second recesses 2422, with the second recesses 2422 and the second protrusions 2421 arranged alternately. The first protrusions 2411 are embedded in the second recesses 2422, and the second protrusions 2421 are embedded in the first recesses 2412. The first piezoresistive electrode layer 241 and the second piezoresistive electrode layer 242 are used to compress the piezoresistive protrusions 32. With this configuration, the first piezoresistive electrode layer 241 and the second piezoresistive electrode layer 242 form an interdigitated shape. When the piezoresistive electrode 24 contacts the piezoresistive protrusion 32, the interdigitated piezoresistive electrode 24 can easily detect different resistances, thereby helping the tactile sensor to detect static pressure.

[0070] This application provides a robotic arm that includes the tactile sensor found in any of the above embodiments.

[0071] It should be noted that the robotic arm can be a robotic arm on a robot. Additionally, the tactile sensor can be attached to the surface of the robotic arm.

[0072] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0073] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A tactile sensor, characterized in that, The tactile sensor includes: a triboelectric layer, an electrode layer, and a piezoresistive layer; The triboelectric layer, the electrode layer, and the piezoresistive layer are stacked, with the electrode layer located between the triboelectric layer and the piezoresistive layer; The electrode layer includes a substrate layer, a triboelectric electrode, a temperature layer, and a piezoresistive electrode; the triboelectric layer, the temperature layer, and the piezoresistive electrode are all disposed on the substrate layer, with the triboelectric electrode facing the triboelectric layer and the piezoresistive electrode facing the piezoresistive layer; The piezoresistive layer includes a piezoresistive substrate and a piezoresistive protrusion disposed on the piezoresistive substrate. The piezoresistive protrusion faces the electrode layer and is used to abut against the piezoresistive electrode. The piezoresistive protrusion is deformable. When the piezoresistive protrusion contacts the piezoresistive electrode, the shape of the piezoresistive protrusion changes, the contact area between the piezoresistive protrusion and the piezoresistive electrode changes, and the resistance detected by the piezoresistive electrode changes. The tactile sensor also includes an elastic support frame; The support frame is disposed on the surface of the piezoresistive substrate facing the electrode layer, and the piezoresistive protrusion is located inside the support frame. The thickness of the support frame is less than or equal to the height of the piezoresistive protrusion. The thickness of the support frame is the distance between two opposite surfaces of the support frame along the stacking direction of the triboelectric layer and the electrode layer. The height of the piezoresistive protrusion is the distance between the end of the piezoresistive protrusion facing away from the piezoresistive substrate and the piezoresistive substrate. The elastic modulus of the support frame is greater than that of the piezoresistive protrusion.

2. The tactile sensor according to claim 1, characterized in that, The temperature layer includes multiple P-type temperature electrodes and multiple N-type temperature electrodes; Along the direction in which the triboelectric layer and the electrode layer are stacked, the substrate layer includes a first surface and a second surface facing away from each other, the first surface facing the triboelectric layer and the second surface facing the piezoresistive layer; The first surface is provided with a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes, which are arranged alternately. The second surface is provided with a plurality of P-type temperature electrodes and a plurality of N-type temperature electrodes, which are arranged alternately. The P-type temperature electrodes on the first surface and the N-type temperature electrodes on the second surface are positioned opposite each other and electrically connected. The N-type temperature electrodes on the first surface and the P-type temperature electrodes on the second surface are positioned opposite each other and electrically connected. The P-type temperature electrodes on the first surface and the N-type temperature electrodes on the first surface are electrically connected. The P-type temperature electrodes on the second surface and the N-type temperature electrodes on the second surface are electrically connected.

3. The tactile sensor according to claim 1, characterized in that, The surface of the triboelectric layer opposite to the electrode layer has multiple triboelectric protrusions.

4. The tactile sensor according to claim 1, characterized in that, A conductive layer is provided on the surface of the piezoresistive protrusion, and the conductive layer covers the piezoresistive protrusion; And / or, the interior of the piezoresistive protrusion is provided with conductive particles.

5. The tactile sensor according to claim 1, characterized in that, The substrate layer has a first lead and a second lead on its surface facing the triboelectric layer; The first lead is electrically connected to the triboelectric electrode, and the second lead is electrically connected to the piezoresistive electrode.

6. The tactile sensor according to claim 5, characterized in that, The second lead is electrically connected to the piezoresistive electrode through a via.

7. The tactile sensor according to any one of claims 1-6, characterized in that, Along the direction in which the triboelectric layer and the electrode layer are stacked, the projection of the triboelectric electrode on the substrate layer overlaps with the projection of the triboelectric layer on the substrate layer, or the projection of the triboelectric electrode on the substrate layer is located inside the projection of the triboelectric layer on the substrate layer.

8. The tactile sensor according to any one of claims 1-6, characterized in that, The piezoresistive electrode includes a first piezoresistive electrode layer and a second piezoresistive electrode layer. The first piezoresistive electrode layer has a plurality of first protrusions and a plurality of first recesses, with the first recesses and the first protrusions arranged alternately. The second piezoresistive electrode layer has a plurality of second protrusions and a plurality of second recesses, with the second recesses and the second protrusions arranged alternately. The first protrusions are embedded in the second recesses, and the second protrusions are embedded in the first recesses. The first piezoresistive electrode layer and the second piezoresistive electrode layer are used to compress the piezoresistive protrusions.

9. A robotic arm, characterized in that, The robotic arm includes the tactile sensor according to any one of claims 1-8.

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