Device and method for realizing large-range rapid depth analysis based on radio frequency marked monochromatic light

Abstract

The invention provides a device and a method for realizing large-range rapid depth analysis based on radio frequency marked monochromatic light. The device comprises a detection light source, a radio frequency coding unit, a phase modulation unit and a sample excitation detection unit, the radio frequency coding unit is used for carrying out radio frequency coding on the detection light beams emitted by the detection light source to obtain multiple beams of coded detection light, and the amplitudes and modulation frequencies of the coded detection light beams are different; the phase modulation unit is used for performing phase modulation on each beam of coded detection light to obtain a plurality of beams of phase-modulated detection light with different wavefronts; and the sample excitation detection unit is used for focusing each beam of phase-modulated detection light to different depths of the sample and exciting different depths of the sample to generate signal light respectively, and the signal light generated at each depth is simultaneously detected by a single-pixel detector at a time. According to the invention, simultaneous excitation of radio frequency marking monochromatic light in the depth direction is realized, large-range simultaneous excitation in the depth direction is realized, and the depth direction signal identification speed of a megahertz magnitude is realized.

Description

Technical Field

[0001] The present invention belongs to the field of microscopic imaging technology, and in particular relates to a device and method for realizing large-scale rapid depth analysis based on radio frequency labeled monochromatic light. Background Art

[0002] In microscopic imaging technology, imaging speed is an important factor affecting real-time dynamic detection. As fast lateral imaging technology becomes more mature, axial imaging speed has become the main factor limiting the speed of three-dimensional imaging. At present, axial imaging methods mainly include the following: (1) Mechanical scanning imaging. In this method, axial scanning imaging is achieved by moving the objective lens or the sample. The disadvantages of this method are slow scanning speed, large mechanical jitter influence, and inability to randomly select the target depth for measurement; (2) Excitation light wavefront modulation scanning imaging. In this method, the phase modulation device such as deformable mirror and acousto-optic is adjusted by current signal to adjust the wavefront of the excitation light to achieve axial scanning imaging. The disadvantages of this method are that the heat generated by the current causes the phase modulation device to have poor repeatability, the response speed of the deformable mirror is slow, and the scanning range of the acousto-optic device is small; (3) Remote focusing scanning imaging. In this method, the imaging objective lens and the remote focusing objective lens are precisely placed to match their entrance pupils, and the remote focusing objective lens is moved to the fast lateral imaging device. The method converts the axial scanning into a fast axial scanning at the focusing objective end to realize axial scanning imaging. The disadvantage of this method is that it cannot take into account both the scanning speed and the scanning range; (4) Conical lens axial imaging. In this method, a conical lens is used to replace the traditional microscope objective. After passing through the conical lens, the parallel light is focused into a line in the depth direction. According to the reversible principle of the optical path, the signals at different depths are transmitted through the conical lens and converted into parallel light in different radial directions. The use of an array detector to identify the signal in the radial direction can realize the identification of signals at different depths. The disadvantage of this method is that the refresh speed of the array detector is slow; (5) Optical coherence tomography. This method images the sample axially by analyzing the interference signal between the sample arm and the reference arm. The disadvantage of this method is that the use of an array detector or a linear array detector leads to limited imaging speed. Summary of the invention

[0003] In view of the defects of the prior art, the present invention provides a device and method for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light, which can effectively solve the above problems.

[0004] The technical solution adopted by the present invention is as follows: The present invention provides a device for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light, comprising: a detection light source (1), a radio frequency encoding unit, a phase modulation unit and a sample excitation detection unit; The detection light source (1) is used to emit a detection light beam; The radio frequency encoding unit is used to perform radio frequency encoding on the detection light beam emitted by the detection light source (1) to obtain multiple beams of encoded detection light, and the amplitude and modulation frequency of each beam of encoded detection light are different; The phase modulation unit is used to phase modulate each beam of coded detection light to obtain multiple beams of phase modulated detection light with different wavefronts; The sample excitation detection unit comprises a beam splitter / combiner (8), a microscope objective (9) and a single pixel detector (13), and is used to make each beam of phase-modulated detection light reflected by the beam splitter / combiner (8) enter the microscope objective (9), and then be focused by the microscope objective (9) to different depths of the sample, thereby stimulating different depths of the sample to generate signal light respectively, and the signal light generated at each depth is detected simultaneously by the single pixel detector (13) at one time; since the radio frequency frequency of the signal light generated at each depth corresponds to the radio frequency frequency of each phase-modulated detection light, the radio frequency frequency of the signal light generated at each depth detected simultaneously by the single pixel detector (13) is analyzed, thereby achieving analysis of different depths of the sample.

[0005] Preferably, the radio frequency encoding unit comprises an acousto-optic deflector (2), a concave total reflector (3), a beam expander (4) and a beam combiner (5); The acousto-optic deflector (2) is located on the detection light beam transmission path of the detection light source (1); The acousto-optic deflector (2) outputs a plurality of beams of first-order diffracted light and zero-order transmitted light; the concave total reflective mirror (3) is arranged on the transmission path of the first-order diffracted light of the acousto-optic deflector (2); Arranging the beam expander (4) on the zero-order transmission light transmission path of the acousto-optic deflector (2); The beam combiner (5) is arranged at a position where the expanded beam output by the beam expander (4) and the reflection path of the concave total reflection mirror (3) intersect.

[0006] Preferably, the distance between the concave total reflection mirror (3) and the acousto-optic deflector (2) is equal to the focal length of the concave total reflection mirror (3).

[0007] Preferably, the phase modulation unit comprises a beam splitter (6) and a spatial light modulator (7); The beam splitter (6) is arranged on the output light beam transmission path of the beam combiner (5); and the spatial light modulator (7) is arranged on the reflection path of the beam splitter (6).

[0008] Preferably, the structure of the sample excitation detection unit is: The beam splitter / combiner (8) is arranged on the transmission light path of the beam splitter (6); the microscope objective lens (9) is arranged on the reflection path of the beam splitter / combiner (8); a sample is arranged at the focus plane position of the microscope objective lens (9); and the single pixel detector (13) is arranged on the transmission light path of the beam splitter / combiner (8).

[0009] Preferably, the sample excitation detection unit further comprises a filter (11) and a focusing lens (12); The path between the beam splitter / combiner (8) and the single-pixel detector (13) is arranged in sequence according to the light transmission direction, with the filter (11) and the focusing lens (12); and the single-pixel detector (13) is located at the focusing focal plane of the focusing lens (12).

[0010] The present invention also provides a method for depth analysis of the device for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light, comprising the following steps: Step S1, a detection light beam emitted by the detection light source (1) is incident on a radio frequency encoding unit, and the radio frequency encoding unit performs radio frequency encoding on the detection light beam emitted by the detection light source (1) to obtain a plurality of encoded detection light beams, and the amplitude and modulation frequency of each encoded detection light beam are different; Step S2, each beam of coded detection light is phase modulated by a phase modulation unit to obtain multiple beams of phase modulated detection light with different wavefronts; In step S3, each phase-modulated detection light beam is reflected by the beam splitter / combiner (8) and then incident on the microscope objective lens (9). The microscope objective lens (9) is then focused to different depths of the sample to stimulate different depths of the sample to generate signal light. The signal light generated at each depth is detected simultaneously by the single-pixel detector (13). Since the radio frequency frequency of the signal light generated at each depth corresponds to the radio frequency frequency of each phase-modulated detection light beam, the radio frequency frequency of the signal light generated at each depth detected simultaneously by the single-pixel detector (13) is analyzed to achieve analysis of different depths of the sample.

[0011] Preferably, step S1 specifically comprises: Step S1.1, the radio frequency encoding unit comprises an acousto-optic deflector (2), a concave total reflector (3), a beam expander (4) and a beam combiner (5); Step S1.2, after the detection light beam emitted by the detection light source (1) is acted upon by the acousto-optic deflector (2), a zero-order transmission light and N beams of first-order diffracted light with different deflection angles and frequency shifts are output; Wherein: the zero-order transmitted light propagates along the direction of the incident light incident on the acousto-optic deflector (2); the propagation directions of the N beams of first-order diffracted light are deflected at different angles relative to the direction of the incident light; by controlling the acousto-optic deflector (2) to load driving signals of N frequencies, N beams of first-order diffracted light are generated accordingly, and the frequency of each beam of first-order diffracted light is frequency shifted relative to the incident light, and the frequency shift amount is equal to the frequency of the driving signal loaded on the corresponding acousto-optic deflector (2); Step S1.3, N beams of first-order diffraction light with different deflection angles and frequency shift amounts are reflected by the concave total reflection mirror (3) to obtain N beams of first-order diffraction light after reflection; the N beams of first-order diffraction light after reflection are parallel to each other and are parallel light; The zero-order transmitted light is incident on the beam expander (4), and the zero-order transmitted light is expanded into N beams of zero-order transmitted light by the beam expander (4), and the N beams of zero-order transmitted light are parallel light; In step S1.4, N beams of reflected first-order diffracted light and N beams of zero-order transmitted light are incident on a beam combiner (5) and are combined and beat by the beam combiner (5), that is, each beam of reflected first-order diffracted light and each beam of zero-order transmitted light are combined and beat to obtain a beam of coded detection light, thereby obtaining N beams of coded detection light; the amplitudes and modulation frequencies of the N beams of coded detection light are different, thereby realizing radio frequency tagging.

[0012] Preferably, step S2 specifically comprises: The phase modulation unit comprises a beam splitter (6) and a spatial light modulator (7); after the beams are combined and beat by the beam combiner (5), N beams of coded detection light are obtained; the N beams of coded detection light are reflected by the beam splitter (6) to different pixel units of the spatial light modulator (7); by setting the gray scale of each pixel unit of the spatial light modulator (7), different wavefront modulations are performed on the N beams of coded detection light, thereby obtaining N beams of phase modulated detection light with different wavefronts.

[0013] Preferably, step S3 specifically comprises: Step S3.1, N beams of phase-modulated detection light pass through a beam splitter (6), are then reflected to a microscope objective lens (9) by a beam splitter / combiner (8), are focused to different depths of the sample by the microscope objective lens (9), and stimulate different depths of the sample to generate signal light respectively; The signal light generated at each depth is incident on the microscope objective lens (9), is transmitted through the microscope objective lens (9), then passes through the beam splitter / combiner (8), is filtered out stray light by the filter (11), and then is focused onto the single-pixel detector (13) through the focusing lens (12), so that the single-pixel detector (13) can simultaneously detect the signal light generated at different depths of the sample at a single time.

[0014] The invention provides a device and method for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light, which has the following advantages: (1) RF tag monochromatic light is simultaneously excited in the depth direction The present invention uses an acousto-optic deflector to divide monochromatic light into multiple beams of excitation light labeled with different radio frequency frequencies, and uses a spatial light modulator to focus each beam of excitation light to different depths, thereby achieving simultaneous excitation in the depth direction. The present invention does not require scanning in the depth direction, and has faster speed and better stability than the prior art.

[0015] (2) Simultaneous excitation over a large area in the depth direction The present invention adjusts the wavefront phase of each beam of excitation light through a spatial light modulator, thereby achieving simultaneous excitation in the depth direction. The present invention can achieve large-scale simultaneous excitation by setting the grayscale value of each pixel of the spatial light modulator.

[0016] (3) Depth direction signal recognition speed at the megahertz level In the present invention, a single-pixel detector is used to simultaneously measure the signal light of each depth at a time, and each signal light is identified according to the marked radio frequency. The measurement speed of the single-pixel detector can reach the megahertz level. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The structure diagram of the radio frequency tag monochromatic light technology for realizing large-scale rapid depth analysis provided by the present invention; Figure 2 This is a case diagram of the use of the radio frequency tag monochromatic light depth analysis technology provided by the present invention for layered sample measurement.

[0018] Among them: 1 is the detection light source, 2 is the acousto-optic deflector, 3 is the concave total reflection mirror, 4 is the beam expander, 5 is the beam combiner, 6 is the beam splitter, 7 is the spatial light modulator, 8 is the beam splitter / combiner, 9 is the microscope objective, 10 is the layered sample, 11 is the filter, 12 is the focusing lens, and 13 is the single pixel detector. DETAILED DESCRIPTION

[0019] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0020] See also Figure 1 , the present invention provides a device for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light, comprising: a detection light source 1, a radio frequency encoding unit, a phase modulation unit and a sample excitation detection unit; The detection light source 1 is used to emit a detection light beam; The radio frequency encoding unit is used to perform radio frequency encoding on the detection light beam emitted by the detection light source 1 to obtain multiple beams of encoded detection light, and the amplitude and modulation frequency of each beam of encoded detection light are different; The phase modulation unit is used to phase modulate each beam of coded detection light to obtain multiple beams of phase modulated detection light with different wavefronts; The sample excitation detection unit includes a beam splitter / combiner 8, a microscope objective 9 and a single-pixel detector 13, which is used to make each beam of phase-modulated detection light reflected by the beam splitter / combiner 8 enter the microscope objective 9, and then be focused to different depths of the sample by the microscope objective 9, so as to stimulate different depths of the sample to generate signal light respectively, and the signal light generated at each depth is detected simultaneously by the single-pixel detector 13 at a single time; since the radio frequency frequency of the signal light generated at each depth corresponds one-to-one to the radio frequency frequency of each beam of phase-modulated detection light, the radio frequency frequency of the signal light generated at each depth detected simultaneously by the single-pixel detector 13 is analyzed, so as to achieve analysis of different depths of the sample.

[0021] The structures of the radio frequency encoding unit, phase modulation unit and sample excitation detection unit are introduced below: 1. Radio frequency encoding unit The radio frequency encoding unit includes an acousto-optic deflector 2, a concave total reflector 3, a beam expander 4 and a beam combiner 5; The acousto-optic deflector 2 is located on the detection light beam transmission path of the detection light source 1; The acousto-optic deflector 2 outputs multiple beams of first-order diffracted light and zero-order transmitted light; the concave total reflector 3 is arranged on the first-order diffracted light transmission path of the acousto-optic deflector 2; wherein the distance from the concave total reflector 3 to the acousto-optic deflector 2 is equal to the focal length of the concave total reflector 3.

[0022] Arranging the beam expander 4 on the zero-order transmission light transmission path of the acousto-optic deflector 2; The beam combiner 5 is arranged at a position where the expanded beam output by the beam expander 4 and the reflection path of the concave total reflection mirror 3 intersect.

[0023] (II) Phase modulation unit The phase modulation unit includes a beam splitter 6 and a spatial light modulator 7; The beam splitter 6 is arranged on the output light beam transmission path of the beam combiner 5 ; the spatial light modulator 7 is arranged on the reflection path of the beam splitter 6 .

[0024] 3. Sample excitation and detection unit The structure of the sample excitation detection unit is: The beam splitter / combiner 8 is arranged on the transmission light path of the beam splitter 6; the microscope objective 9 is arranged on the reflection path of the beam splitter / combiner 8; the sample is arranged at the focusing focal plane position of the microscope objective 9; and the single pixel detector 13 is arranged on the transmission light path of the beam splitter / combiner 8.

[0025] Furthermore, the sample excitation detection unit also includes a filter 11 and a focusing lens 12; The path between the beam splitter / combiner 8 and the single-pixel detector 13 is arranged with the filter 11 and the focusing lens 12 in sequence according to the light transmission direction; and the single-pixel detector 13 is located at the focusing focal plane position of the focusing lens 12.

[0026] The present invention also provides a method for realizing a depth analysis device for large-scale rapid depth analysis based on radio frequency tagged monochromatic light, comprising the following steps: Step S1, the detection light beam emitted by the detection light source 1 is incident on the radio frequency encoding unit, and the radio frequency encoding unit performs radio frequency encoding on the detection light beam emitted by the detection light source 1 to obtain multiple beams of encoded detection light, and the amplitude and modulation frequency of each beam of encoded detection light are different; Step S1 is specifically as follows: Step S1.1, the radio frequency encoding unit includes an acousto-optic deflector 2, a concave total reflector 3, a beam expander 4 and a beam combiner 5; Step S1.2, after the detection light beam emitted by the detection light source 1 is acted upon by the acousto-optic deflector 2, a zero-order transmission light and N beams of first-order diffracted light with different deflection angles and frequency shifts are output; Wherein: the zero-order transmitted light propagates along the direction of the incident light incident on the acousto-optic deflector 2; the propagation directions of the N beams of first-order diffracted light are deflected at different angles relative to the direction of the incident light; by controlling the acousto-optic deflector 2 to load driving signals of N frequencies, N beams of first-order diffracted light are generated accordingly, and the frequency of each beam of first-order diffracted light is frequency shifted relative to the incident light, and the frequency shift amount is equal to the frequency of the corresponding driving signal loaded by the acousto-optic deflector 2; Step S1.3, N beams of first-order diffraction light with different deflection angles and frequency shifts are reflected by the concave total reflection mirror 3 to obtain N beams of first-order diffraction light after reflection; the N beams of first-order diffraction light after reflection are parallel to each other and are parallel light; The zero-order transmitted light is incident on the beam expander 4, and is expanded into N beams of zero-order transmitted light by the beam expander 4, and the N beams of zero-order transmitted light are parallel light; In step S1.4, N beams of reflected first-order diffraction light and N beams of zero-order transmission light are all incident on the beam combiner 5, and are combined and beat by the beam combiner 5, that is, each beam of reflected first-order diffraction light and each beam of zero-order transmission light are combined and beat to obtain a beam of coded detection light, thereby obtaining N beams of coded detection light; the amplitudes and modulation frequencies of the N beams of coded detection light are different, thereby realizing radio frequency tagging.

[0027] Step S2, each beam of coded detection light is phase modulated by a phase modulation unit to obtain multiple beams of phase modulated detection light with different wavefronts; Step S2 is specifically as follows: The phase modulation unit includes a beam splitter 6 and a spatial light modulator 7; after the beams are combined and beat by the beam combiner 5, N beams of coded detection light are obtained, and the N beams of coded detection light are reflected by the beam splitter 6 to different pixel units of the spatial light modulator 7. By setting the gray scale of each pixel unit of the spatial light modulator 7, different wavefront modulations are performed on the N beams of coded detection light, so as to obtain N beams of phase modulated detection light with different wavefronts.

[0028] In step S3, each beam of phase-modulated detection light is reflected by the beam splitter / combiner 8 and then incident on the microscope objective 9, and then focused to different depths of the sample by the microscope objective 9, so as to stimulate different depths of the sample to generate signal light respectively, and the signal light generated at each depth is detected simultaneously by the single-pixel detector 13 at a single time; since the radio frequency frequency of the signal light generated at each depth corresponds one-to-one to the radio frequency frequency of each beam of phase-modulated detection light, the radio frequency frequency of the signal light generated at each depth detected simultaneously by the single-pixel detector 13 is analyzed, so as to realize the analysis of different depths of the sample.

[0029] Step S3 is specifically as follows: Step S3.1, N phase-modulated detection lights pass through the beam splitter 6, and then are reflected to the microscope objective lens 9 by the beam splitter / combiner 8, and are focused to different depths of the sample by the microscope objective lens 9, so as to stimulate different depths of the sample to generate signal lights respectively; The signal light generated at each depth is incident on the microscope objective lens 9, transmitted through the microscope objective lens 9, and then passes through the beam splitter / combiner 8. After the stray light is filtered out by the filter 11, it is focused onto the single-pixel detector 13 through the focusing lens 12, so that the single-pixel detector 13 can detect the signal light generated at different depths of the sample at a single time.

[0030] The effects that can be achieved by the present invention are as follows: (1) RF tag monochromatic light is simultaneously excited in the depth direction The present invention uses an acousto-optic deflector to divide monochromatic light into multiple beams of excitation light labeled with different radio frequency frequencies, and uses a spatial light modulator to focus each beam of excitation light to different depths, thereby achieving simultaneous excitation in the depth direction. The present invention does not require scanning in the depth direction, and has faster speed and better stability than the prior art.

[0031] (2) Simultaneous excitation over a large area in the depth direction The present invention adjusts the wavefront phase of each beam of excitation light through a spatial light modulator, thereby achieving simultaneous excitation in the depth direction. The present invention can achieve large-scale simultaneous excitation by setting the grayscale value of each pixel of the spatial light modulator.

[0032] (3) Depth direction signal recognition speed at the megahertz level In the present invention, a single-pixel detector is used to simultaneously measure the signal light of each depth at a time, and each signal light is identified according to the marked radio frequency. The measurement speed of the single-pixel detector can reach the megahertz level.

[0033] Two embodiments are described below: Embodiment 1:

[0034] The embodiment of the present invention realizes large-scale rapid depth analysis by radio frequency tagging of monochromatic light. The structure of the embodiment of the present invention is as follows: Figure 1 As shown, the hardware includes a detection light source 1, an acousto-optic deflector 2, a concave total reflection mirror 3, a beam expander 4, a beam combiner 5, a beam splitter 6, a spatial light modulator 7, a beam splitter / combiner 8, a microscope objective 9, a filter 11, a focusing lens 12, and a single pixel detector 13.

[0035] in: The detection light source 1 is a monochromatic light source, which is used to excite the sample.

[0036] The acousto-optic deflector 2, the concave total reflector 3, the beam expander 4 and the beam combiner 5 are used to perform radio frequency encoding on the output light beam of the detection light source 1. After encoding, the detection light is divided into multiple beams and the amplitude modulation frequency of each beam is different.

[0037] The beam splitter 6 and the spatial light modulator 7 are used to perform phase modulation on each encoded detection light beam. After modulation, each light beam has a different wavefront and can be focused to different depths.

[0038] The beam splitter / combiner 8 is used to reflect each beam of excitation light and transmit the signal light generated by each beam of excitation light; The microscope objective lens 9 is used to focus each beam of excitation light to different depths and collect signal light generated by each beam of excitation light.

[0039] The filter 11 is used to filter out stray light in the signal light.

[0040] The focusing lens 12 is used to focus the signal light onto the single pixel detector 13 , and the single pixel detector 13 is used to measure the signal light.

[0041] The dynamic working process of the present invention is: Turn on the detection light source 1, set the driving signal of the acousto-optic deflector 2 to generate multiple first-order diffraction beams with different frequency shifts, and each first-order diffraction beam is combined with the zero-order transmission beam directly passing through the acousto-optic deflector 2 through the beam combiner 5 to achieve radio frequency tagging. Set the gray scale of each pixel of the spatial light modulator 7 to perform different phase modulation on each beam of detection light after radio frequency tagging, and then each beam of detection light is focused to different depths of the sample through the microscope objective 9. The signal light generated at each depth is measured simultaneously by the single-pixel detector 13, and each signal light is identified according to the marked radio frequency frequency. Embodiment 2:

[0042] The present invention can be used to perform depth analysis on layered samples in a single measurement. Figure 2 An example diagram of the implementation of depth resolution technology using radio frequency labeled monochromatic light for measuring layered samples.

[0043] The detection light source 1, whose output light is divided into zero-order transmitted light and first-order diffracted light after passing through the acousto-optic deflector 2, wherein the zero-order transmitted light propagates along the direction of the incident light, and the propagation direction of the first-order diffracted light is deflected. When the acousto-optic deflector 2 is loaded with driving signals of multiple frequencies, multiple beams of first-order diffracted light are generated, and the frequency of each beam of first-order diffracted light is frequency shifted relative to the incident light, and the frequency shift amount is equal to the frequency of the corresponding acousto-optic deflector 2 driving signal.

[0044] The concave total reflection mirror 3 is used to reflect the first-order diffraction light. The distance between the concave total reflection mirror 3 and the acousto-optic deflector 2 is equal to its focal length. The first-order diffraction light becomes parallel light after being reflected by the concave total reflection mirror 3.

[0045] The beam expander 4 is used to expand the zero-order transmitted light. The expanded zero-order transmitted light and the reflected first-order diffracted light are combined and beat by the beam combiner 5. After the beat, the amplitude modulation frequency of each combined light beam is different, thereby realizing radio frequency tagging. Each beam of beat light is reflected to different pixel units of the spatial light modulator 7 by the beam splitter 6. By setting the gray scale of each pixel unit of the spatial light modulator 7, different wavefront modulation is performed on each beam of beat light. The modulated beat light passes through the beam splitter 6, is reflected by the beam splitter / combiner 8, and then is focused to different layers of the layered sample 10 through the microscope objective 9. The microscope objective 9 simultaneously collects the signal light generated by each layer of the layered sample 10. Each signal light passes through the beam splitter / combiner 8 and the filter 11, and then is focused to the single pixel detector 13 by the lens 12. The filter 11 is used to filter out stray light other than the signal light. The single pixel detector 13 measures the signal light generated by each layer at a time. Since the radio frequency frequency of each signal light corresponds to the radio frequency frequency of its excitation light one by one, depth analysis can be performed according to the radio frequency frequency of the signal light.

[0046] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be considered as the scope of protection of the present invention.

Claims

1. A device for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light, characterized in that: include: A detection light source (1), a radio frequency encoding unit, a phase modulation unit and a sample excitation detection unit; The detection light source (1) is used to emit a detection light beam; The radio frequency encoding unit is used to perform radio frequency encoding on the detection light beam emitted by the detection light source (1) to obtain multiple beams of encoded detection light, and the amplitude and modulation frequency of each beam of encoded detection light are different; The phase modulation unit is used to phase modulate each beam of coded detection light to obtain multiple beams of phase modulated detection light with different wavefronts; The sample excitation detection unit comprises a beam splitter / combiner (8), a microscope objective (9) and a single pixel detector (13), and is used to make each beam of phase-modulated detection light reflected by the beam splitter / combiner (8) enter the microscope objective (9), and then be focused by the microscope objective (9) to different depths of the sample, thereby stimulating different depths of the sample to generate signal light respectively, and the signal light generated at each depth is detected simultaneously by the single pixel detector (13) at one time; since the radio frequency frequency of the signal light generated at each depth corresponds to the radio frequency frequency of each phase-modulated detection light, the radio frequency frequency of the signal light generated at each depth detected simultaneously by the single pixel detector (13) is analyzed, thereby achieving analysis of different depths of the sample.

2. According to claim 1, a device for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light, characterized in that: The radio frequency encoding unit comprises an acousto-optic deflector (2), a concave total reflector (3), a beam expander (4) and a beam combiner (5); The acousto-optic deflector (2) is located on the detection light beam transmission path of the detection light source (1); The acousto-optic deflector (2) outputs a plurality of beams of first-order diffracted light and zero-order transmitted light; the concave total reflective mirror (3) is arranged on the transmission path of the first-order diffracted light of the acousto-optic deflector (2); Arranging the beam expander (4) on the zero-order transmission light transmission path of the acousto-optic deflector (2); The beam combiner (5) is arranged at a position where the expanded beam output by the beam expander (4) and the reflection path of the concave total reflection mirror (3) intersect.

3. The device for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light according to claim 2, characterized in that: The distance between the concave total reflection mirror (3) and the acousto-optic deflector (2) is equal to the focal length of the concave total reflection mirror (3).

4. The device for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light according to claim 2, characterized in that: The phase modulation unit comprises a beam splitter (6) and a spatial light modulator (7); The beam splitter (6) is arranged on the output light beam transmission path of the beam combiner (5); and the spatial light modulator (7) is arranged on the reflection path of the beam splitter (6).

5. The device for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light according to claim 4, characterized in that: The structure of the sample excitation detection unit is: The beam splitter / combiner (8) is arranged on the transmission light path of the beam splitter (6); the microscope objective lens (9) is arranged on the reflection path of the beam splitter / combiner (8); a sample is arranged at the focus plane position of the microscope objective lens (9); and the single pixel detector (13) is arranged on the transmission light path of the beam splitter / combiner (8).

6. The device for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light according to claim 5, characterized in that: The sample excitation detection unit also includes a filter (11) and a focusing lens (12); The path between the beam splitter / combiner (8) and the single-pixel detector (13) is arranged in sequence according to the light transmission direction, with the filter (11) and the focusing lens (12); and the single-pixel detector (13) is located at the focusing focal plane of the focusing lens (12).

7. A method for deep analysis based on a radio frequency tagged monochromatic light device for realizing large-scale rapid deep analysis according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step S1, a detection light beam emitted by the detection light source (1) is incident on a radio frequency encoding unit, and the radio frequency encoding unit performs radio frequency encoding on the detection light beam emitted by the detection light source (1) to obtain a plurality of encoded detection light beams, and the amplitude and modulation frequency of each encoded detection light beam are different; Step S2, each beam of coded detection light is phase modulated by a phase modulation unit to obtain multiple beams of phase modulated detection light with different wavefronts; In step S3, each phase-modulated detection light beam is reflected by the beam splitter / combiner (8) and then incident on the microscope objective lens (9). The microscope objective lens (9) is then focused to different depths of the sample to stimulate different depths of the sample to generate signal light. The signal light generated at each depth is detected simultaneously by the single-pixel detector (13). Since the radio frequency frequency of the signal light generated at each depth corresponds to the radio frequency frequency of each phase-modulated detection light beam, the radio frequency frequency of the signal light generated at each depth detected simultaneously by the single-pixel detector (13) is analyzed to achieve analysis of different depths of the sample.

8. The method for depth analysis based on radio frequency tagged monochromatic light to achieve large-scale rapid depth analysis according to claim 7, characterized in that: Step S1 is specifically as follows: Step S1.1, the radio frequency encoding unit comprises an acousto-optic deflector (2), a concave total reflector (3), a beam expander (4) and a beam combiner (5); Step S1.2, after the detection light beam emitted by the detection light source (1) is acted upon by the acousto-optic deflector (2), a zero-order transmission light and N beams of first-order diffracted light with different deflection angles and frequency shifts are output; Wherein: the zero-order transmitted light propagates along the direction of the incident light incident on the acousto-optic deflector (2); the propagation directions of the N beams of first-order diffracted light are deflected at different angles relative to the direction of the incident light; by controlling the acousto-optic deflector (2) to load driving signals of N frequencies, N beams of first-order diffracted light are generated accordingly, and the frequency of each beam of first-order diffracted light is frequency shifted relative to the incident light, and the frequency shift amount is equal to the frequency of the driving signal loaded on the corresponding acousto-optic deflector (2); Step S1.3, N beams of first-order diffraction light with different deflection angles and frequency shift amounts are reflected by the concave total reflection mirror (3) to obtain N beams of first-order diffraction light after reflection; the N beams of first-order diffraction light after reflection are parallel to each other and are parallel light; The zero-order transmitted light is incident on the beam expander (4), and the zero-order transmitted light is expanded into N beams of zero-order transmitted light by the beam expander (4), and the N beams of zero-order transmitted light are parallel light; In step S1.4, N beams of reflected first-order diffracted light and N beams of zero-order transmitted light are incident on a beam combiner (5) and are combined and beat by the beam combiner (5), that is, each beam of reflected first-order diffracted light and each beam of zero-order transmitted light are combined and beat to obtain a beam of coded detection light, thereby obtaining N beams of coded detection light; the amplitudes and modulation frequencies of the N beams of coded detection light are different, thereby realizing radio frequency tagging.

9. The method for depth analysis based on radio frequency tagged monochromatic light to achieve large-scale rapid depth analysis according to claim 8, characterized in that: Step S2 is specifically as follows: The phase modulation unit comprises a beam splitter (6) and a spatial light modulator (7); after the beams are combined and beat by the beam combiner (5), N beams of coded detection light are obtained; the N beams of coded detection light are reflected by the beam splitter (6) to different pixel units of the spatial light modulator (7); by setting the gray scale of each pixel unit of the spatial light modulator (7), different wavefront modulations are performed on the N beams of coded detection light, thereby obtaining N beams of phase modulated detection light with different wavefronts.

10. The method for depth analysis based on radio frequency tagged monochromatic light to achieve large-scale rapid depth analysis according to claim 9, characterized in that: Step S3 is specifically as follows: Step S3.1, N beams of phase-modulated detection light pass through a beam splitter (6), are then reflected to a microscope objective lens (9) by a beam splitter / combiner (8), are focused to different depths of the sample by the microscope objective lens (9), and stimulate different depths of the sample to generate signal light respectively; The signal light generated at each depth is incident on the microscope objective lens (9), is transmitted through the microscope objective lens (9), then passes through the beam splitter / combiner (8), is filtered out stray light by the filter (11), and then is focused onto the single-pixel detector (13) through the focusing lens (12), so that the single-pixel detector (13) can simultaneously detect the signal light generated at different depths of the sample at a single time.

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