An apparatus and method for realizing large-range and rapid depth resolution based on radio frequency tags and monochromatic light

Abstract

The present invention provides a device and method for realizing large-range and fast depth resolution based on radio-frequency tagged monochromatic light, including: a detection light source, a radio-frequency coding unit, a phase modulation unit, and a sample excitation and detection unit; the radio-frequency coding unit is configured to perform radio-frequency coding on the detection light beam emitted by the detection light source to obtain multiple coded detection lights, and moreover, the amplitudes and modulation frequencies of each coded detection light are different; the phase modulation unit is configured to perform phase modulation on each coded detection light to obtain multiple phase-modulated detection lights with different wavefronts; the sample excitation and detection unit is configured to focus each phase-modulated detection light on different depths of the sample, respectively excite signal lights at different depths of the sample, and the signal lights generated at each depth are simultaneously detected by a single-pixel detector at one time. The present invention realizes simultaneous excitation of radio-frequency tagged monochromatic light in the depth direction, large-range simultaneous excitation in the depth direction, and a depth-direction signal recognition speed of the order of megahertz.

Description

Technical Field

[0001] The present invention belongs to the field of microscopic imaging technology, and in particular relates to a device and method for realizing large-scale rapid depth analysis based on radio frequency labeled monochromatic light. Background Art

[0002] In microscopic imaging technology, imaging speed is an important factor affecting real-time dynamic detection. As fast lateral imaging technology becomes more mature, axial imaging speed has become the main factor limiting the speed of three-dimensional imaging. At present, axial imaging methods mainly include the following: (1) Mechanical scanning imaging. In this method, axial scanning imaging is achieved by moving the objective lens or the sample. The disadvantages of this method are slow scanning speed, large mechanical jitter influence, and inability to randomly select the target depth for measurement; (2) Excitation light wavefront modulation scanning imaging. In this method, the phase modulation device such as deformable mirror and acousto-optic is adjusted by current signal to adjust the wavefront of the excitation light to achieve axial scanning imaging. The disadvantages of this method are that the heat generated by the current causes the phase modulation device to have poor repeatability, the response speed of the deformable mirror is slow, and the scanning range of the acousto-optic device is small; (3) Remote focusing scanning imaging. In this method, the imaging objective lens and the remote focusing objective lens are precisely placed to match their entrance pupils, and the remote focusing objective lens is moved to the fast lateral imaging device. The method converts the axial scanning into a fast axial scanning at the focusing objective end to realize axial scanning imaging. The disadvantage of this method is that it cannot take into account both the scanning speed and the scanning range; (4) Conical lens axial imaging. In this method, a conical lens is used to replace the traditional microscope objective. After passing through the conical lens, the parallel light is focused into a line in the depth direction. According to the reversible principle of the optical path, the signals at different depths are transmitted through the conical lens and converted into parallel light in different radial directions. The use of an array detector to identify the signal in the radial direction can realize the identification of signals at different depths. The disadvantage of this method is that the refresh speed of the array detector is slow; (5) Optical coherence tomography. This method images the sample axially by analyzing the interference signal between the sample arm and the reference arm. The disadvantage of this method is that the use of an array detector or a linear array detector leads to limited imaging speed. Summary of the invention

[0003] In view of the defects of the prior art, the present invention provides a device and method for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light, which can effectively solve the above problems.

[0004] The technical solution adopted by the present invention is as follows:

[0005] The present invention provides a device for realizing large-scale rapid depth analysis based on radio frequency tagged monochromatic light, comprising: a detection light source (1), a radio frequency encoding unit, a phase modulation unit and a sample excitation detection unit;

[0006] The detection light source (1) is used to emit a detection light beam;

[0007] The radio frequency encoding unit is configured to perform radio frequency encoding on the detection light beam emitted by the detection light source (1) to obtain multiple encoded detection light beams, and the amplitudes and modulation frequencies of the encoded detection light beams are different from each other;

[0008] The phase modulation unit is configured to perform phase modulation on each encoded detection light beam to obtain multiple phase-modulated detection light beams with different wavefronts;

[0009] The sample excitation and detection unit includes a beam splitter / combiner (8), a microscope objective (9), and a single-pixel detector (13). It is configured to reflect each phase-modulated detection light beam by the beam splitter / combiner (8) and then make it incident on the microscope objective (9). After being focused by the microscope objective (9) to different depths of the sample, signal lights are generated respectively at different depths of the sample, and the signal lights generated at each depth are simultaneously detected by the single-pixel detector (13) once. Since the radio frequency frequencies of the signal lights generated at each depth correspond one-to-one to the radio frequency frequencies of the phase-modulated detection light beams, the analysis of the radio frequency frequencies of the signal lights generated at different depths simultaneously detected by the single-pixel detector (13) realizes the analysis of different depths of the sample.

[0010] Preferably, the radio frequency encoding unit includes an acousto-optic deflector (2), a concave total reflector (3), a beam expander (4), and a combiner (5);

[0011] The acousto-optic deflector (2) is located on the detection light beam transmission path of the detection light source (1);

[0012] The acousto-optic deflector (2) outputs multiple first-order diffracted light beams and a zero-order transmitted light beam; the concave total reflector (3) is arranged on the first-order diffracted light beam transmission path of the acousto-optic deflector (2);

[0013] The beam expander (4) is arranged on the zero-order transmitted light beam transmission path of the acousto-optic deflector (2);

[0014] The combiner (5) is arranged at the intersection position of the expanded light beam output by the beam expander (4) and the reflection path of the concave total reflector (3).

[0015] Preferably, the distance from the concave total reflector (3) to the acousto-optic deflector (2) is equal to the focal length of the concave total reflector (3).

[0016] Preferably, the phase modulation unit includes a beam splitter (6) and a spatial light modulator (7);

[0017] The beam splitter (6) is arranged on the output light beam transmission path of the combiner (5); the spatial light modulator (7) is arranged on the reflection path of the beam splitter (6).

[0018] Preferably, the structure of the sample excitation and detection unit is as follows:

[0019] The beam splitter / combiner (8) is arranged on the transmission light path of the beam splitter (6); the microscope objective (9) is arranged on the reflection path of the beam splitter / combiner (8); the sample is arranged at the focusing focal plane position of the microscope objective (9); the single-pixel detector (13) is arranged on the transmission light path of the beam splitter / combiner (8).

[0020] Preferably, the sample excitation and detection unit further includes a filter (11) and a focusing lens (12);

[0021] On the path between the beam splitter / combiner (8) and the single-pixel detector (13), the filter (11) and the focusing lens (12) are arranged in sequence according to the light transmission direction; and, the single-pixel detector (13) is located at the focusing focal plane position of the focusing lens (12).

[0022] The present invention also provides a depth analysis method for the large-range and rapid depth analysis device based on radio frequency-tagged monochromatic light as described above, including the following steps:

[0023] Step S1, the detection light beam emitted by the detection light source (1) is incident on the radio frequency encoding unit, and the radio frequency encoding unit performs radio frequency encoding on the detection light beam emitted by the detection light source (1) to obtain multiple encoded detection light beams, and moreover, the amplitudes and modulation frequencies of each encoded detection light beam are all different;

[0024] Step S2, each encoded detection light beam is phase-modulated by the phase modulation unit to obtain multiple phase-modulated detection light beams with different wavefronts;

[0025] Step S3, after each phase-modulated detection light beam is reflected by the beam splitter / combiner (8), it is incident on the microscope objective (9), and then is focused by the microscope objective (9) to different depths of the sample, and signal light is respectively generated by exciting different depths of the sample. The signal light generated at each depth is simultaneously detected by the single-pixel detector (13) once; since the radio frequency frequencies of the signal light generated at each depth correspond one-to-one with the radio frequency frequencies of each phase-modulated detection light beam, by analyzing the radio frequency frequencies of the signal light generated at different depths simultaneously detected by the single-pixel detector (13) once, the analysis of different depths of the sample is realized.

[0026] Preferably, step S1 is specifically:

[0027] Step S1.1, the radio frequency encoding unit includes an acousto-optic deflector (2), a concave total reflector (3), a beam expander (4) and a combiner (5);

[0028] Step S1.2: After the detection light beam emitted by the detection light source (1) is affected by the acousto-optic deflector (2), zero-order transmitted light and N first-order diffracted light beams with different deflection angles and frequency shift amounts are output;

[0029] Among them: The zero-order transmitted light propagates along the incident light direction incident on the acousto-optic deflector (2); the propagation directions of the N first-order diffracted light beams are deflected by different angles relative to the incident light direction; by controlling the acousto-optic deflector (2) to load drive signals of N frequencies, N first-order diffracted light beams are correspondingly generated, and the frequency of each first-order diffracted light beam has a frequency shift relative to the incident light, and the frequency shift amount is equal to the frequency of the drive signal loaded by the corresponding acousto-optic deflector (2);

[0030] Step S1.3: The N first-order diffracted light beams with different deflection angles and frequency shift amounts are reflected by the concave total reflector (3) to obtain N reflected first-order diffracted light beams; the N reflected first-order diffracted light beams are parallel to each other and are parallel light;

[0031] The zero-order transmitted light is incident on the beam expander (4), and after being expanded by the beam expander (4), the zero-order transmitted light is expanded into N zero-order transmitted light beams, and the N zero-order transmitted light beams are parallel light;

[0032] Step S1.4: The N reflected first-order diffracted light beams and the N zero-order transmitted light beams are all incident on the beam combiner (5), and after being combined and beat-frequency by the beam combiner (5), that is: each reflected first-order diffracted light beam and each zero-order transmitted light beam are combined and beat-frequency to obtain a beam of encoded detection light, and thus N beams of encoded detection light are obtained; the amplitudes and modulation frequencies of the N beams of encoded detection light are different, thereby realizing radio frequency marking.

[0033] Preferably, step S2 is specifically as follows:

[0034] The phase modulation unit includes a beam splitter (6) and a spatial light modulator (7); after being combined and beat-frequency by the beam combiner (5), N beams of encoded detection light are obtained. The N beams of encoded detection light are reflected by the beam splitter (6) to different pixel units of the spatial light modulator (7). By setting the gray levels of the respective pixel units of the spatial light modulator (7), different wavefront modulations are performed on the N beams of encoded detection light to obtain N beams of phase-modulated detection light with different wavefronts.

[0035] Preferably, step S3 is specifically as follows:

[0036] Step S3.1: The N beams of phase-modulated detection light pass through the beam splitter (6), and then are reflected by the beam splitter / combiner (8) to the microscope objective (9), and are focused by the microscope objective (9) to different depths of the sample, and signal light is respectively generated by exciting different depths of the sample;

[0037] The signal light generated at each depth is incident on the microscope objective lens (9). After being transmitted through the microscope objective lens (9), it then passes through the beam splitter / combiner (8). After the stray light is filtered by the filter (11), it is focused onto the single-pixel detector (13) through the focusing lens (12), enabling the single-pixel detector (13) to simultaneously detect the signal light generated at different depths of the sample in a single shot.

[0038] The device and method for realizing large-range and fast depth resolution based on radio-frequency tagged monochromatic light provided by the present invention have the following advantages:

[0039] (1) The radio-frequency tagged monochromatic light is simultaneously excited in the depth direction

[0040] In the present invention, the acousto-optic deflector is used to divide the monochromatic light into multiple beams of excitation light tagged with different radio-frequency frequencies, and the spatial light modulator is used to focus each beam of excitation light to different depths, realizing simultaneous excitation in the depth direction. The present invention does not require scanning in the depth direction and has a faster speed and better stability compared with the prior art.

[0041] (2) Large-range simultaneous excitation is achieved in the depth direction

[0042] In the present invention, the wavefront phase of each beam of excitation light is adjusted by the spatial light modulator, thereby realizing simultaneous excitation in the depth direction. The present invention can achieve large-range simultaneous excitation by setting the gray-scale values of each pixel of the spatial light modulator.

[0043] (3) Signal recognition speed in the depth direction of the order of megahertz

[0044] In the present invention, the single-pixel detector is used to simultaneously measure the signal light at each depth in a single shot, and each signal light is identified according to the tagged radio-frequency frequency. The measurement speed of the single-pixel detector can reach the order of megahertz. Description of the Drawings

[0045] Figure 1 It is a structural diagram of the radio-frequency tagged monochromatic light for realizing large-range and fast depth resolution provided by the present invention;

[0046] Figure 2 It is a case diagram of the radio-frequency tagged monochromatic light depth resolution technology provided by the present invention for measuring a layered sample.

[0047] Among them: 1 is the detection light source, 2 is the acousto-optic deflector, 3 is the concave total reflector, 4 is the beam expander, 5 is the combiner, 6 is the beam splitter, 7 is the spatial light modulator, 8 is the beam splitter / combiner, 9 is the microscope objective lens, 10 is the layered sample, 11 is the filter, 12 is the focusing lens, and 13 is the single-pixel detector. Detailed Embodiments

[0048] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention more clear and understandable, the present invention will be further described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0049] Referring to Figure 1 , the present invention provides a device for realizing large-range and rapid depth resolution based on radio frequency tagged monochromatic light, including: a detection light source 1, a radio frequency coding unit, a phase modulation unit, and a sample excitation and detection unit;

[0050] The detection light source 1 is used to emit a detection beam;

[0051] The radio frequency coding unit is used to perform radio frequency coding on the detection beam emitted by the detection light source 1 to obtain multiple coded detection lights, and the amplitude and modulation frequency of each coded detection light are different;

[0052] The phase modulation unit is used to perform phase modulation on each coded detection light to obtain multiple phase-modulated detection lights with different wavefronts;

[0053] The sample excitation and detection unit includes a beam splitter / combiner 8, a microscopic objective lens 9, and a single-pixel detector 13. It is used to make each phase-modulated detection light be reflected by the beam splitter / combiner 8 and then incident on the microscopic objective lens 9, and then be focused by the microscopic objective lens 9 to different depths of the sample, and signal lights are respectively generated by exciting different depths of the sample. The signal lights generated at each depth are detected simultaneously by the single-pixel detector 13 once; since the radio frequency frequencies of the signal lights generated at each depth correspond one-to-one to the radio frequency frequencies of each phase-modulated detection light, by analyzing the radio frequency frequencies of the signal lights generated at different depths detected simultaneously by the single-pixel detector 13 once, the resolution of different depths of the sample is realized.

[0054] The structures of the radio frequency coding unit, the phase modulation unit, and the sample excitation and detection unit will be introduced respectively below:

[0055] (1) Radio frequency coding unit

[0056] The radio frequency coding unit includes an acousto-optic deflector 2, a concave total reflector 3, a beam expander 4, and a combiner 5;

[0057] The acousto-optic deflector 2 is located on the transmission path of the detection beam of the detection light source 1;

[0058] The acousto-optic deflector 2 outputs multiple first-order diffracted lights and a zero-order transmitted light; the concave total reflector 3 is arranged on the transmission path of the first-order diffracted light of the acousto-optic deflector 2; wherein, the distance from the concave total reflector 3 to the acousto-optic deflector 2 is equal to the focal length of the concave total reflector 3.

[0059] The beam expander 4 is arranged on the zero-order transmitted light transmission path of the acousto-optic deflector 2;

[0060] The beam combiner 5 is arranged at the position where the expanded beam output by the beam expander 4 intersects with the reflection path of the concave total reflector 3.

[0061] (2) Phase modulation unit

[0062] The phase modulation unit includes a beam splitter 6 and a spatial light modulator 7;

[0063] The beam splitter 6 is arranged on the output beam transmission path of the beam combiner 5; the spatial light modulator 7 is arranged on the reflection path of the beam splitter 6.

[0064] (3) Sample excitation and detection unit

[0065] The structure of the sample excitation and detection unit is as follows:

[0066] The beam splitter / combiner 8 is arranged on the transmitted light path of the beam splitter 6; the microscopic objective lens 9 is arranged on the reflection path of the beam splitter / combiner 8; a sample is arranged at the focusing focal plane position of the microscopic objective lens 9; the single-pixel detector 13 is arranged on the transmitted light path of the beam splitter / combiner 8.

[0067] Furthermore, the sample excitation and detection unit further includes a filter 11 and a focusing lens 12;

[0068] The filter 11 and the focusing lens 12 are sequentially arranged on the path between the beam splitter / combiner 8 and the single-pixel detector 13 in the light transmission direction; and the single-pixel detector 13 is located at the focusing focal plane position of the focusing lens 12.

[0069] The present invention also provides a depth analysis method for a large-range and fast depth analysis device based on radio frequency tagged monochromatic light, including the following steps:

[0070] Step S1, detecting that the detection beam emitted by the light source 1 is incident on the radio frequency encoding unit, and the radio frequency encoding unit performs radio frequency encoding on the detection beam emitted by the light source 1 to obtain multiple encoded detection lights, and the amplitudes and modulation frequencies of each encoded detection light are different;

[0071] Step S1 is specifically as follows:

[0072] Step S1.1, the radio frequency encoding unit includes an acousto-optic deflector 2, a concave total reflector 3, a beam expander 4 and a beam combiner 5;

[0073] Step S1.2: After the detection light beam emitted by the light source 1 is affected by the acousto-optic deflector 2, zero-order transmitted light and N first-order diffracted light beams with different deflection angles and frequency shift amounts are output;

[0074] Among them: The zero-order transmitted light propagates along the incident light direction incident on the acousto-optic deflector 2; the propagation directions of the N first-order diffracted light beams are deflected by different angles relative to the incident light direction; by controlling the acousto-optic deflector 2 to load drive signals of N frequencies, N first-order diffracted light beams are correspondingly generated, and the frequency of each first-order diffracted light beam has a frequency shift relative to the incident light, and the frequency shift amount is equal to the frequency of the corresponding drive signal loaded by the acousto-optic deflector 2;

[0075] Step S1.3: The N first-order diffracted light beams with different deflection angles and frequency shift amounts are reflected by the concave total reflector 3 to obtain N reflected first-order diffracted light beams; the N reflected first-order diffracted light beams are parallel to each other and are parallel light;

[0076] The zero-order transmitted light is incident on the beam expander 4, and through the beam expansion effect of the beam expander 4, the zero-order transmitted light is expanded into N zero-order transmitted light beams, and the N zero-order transmitted light beams are parallel light;

[0077] Step S1.4: The N reflected first-order diffracted light beams and the N zero-order transmitted light beams are all incident on the combiner 5, and are combined and beat-frequency by the combiner 5, that is: each reflected first-order diffracted light beam and each zero-order transmitted light beam are combined and beat-frequency to obtain a beam of encoded detection light, and thus N beams of encoded detection light are obtained; the amplitudes and modulation frequencies of the N beams of encoded detection light are different, thereby realizing radio frequency marking.

[0078] Step S2: Each beam of encoded detection light is phase-modulated by the phase modulation unit to obtain multiple beams of phase-modulated detection light with different wavefronts;

[0079] Step S2 is specifically as follows:

[0080] The phase modulation unit includes a beam splitter 6 and a spatial light modulator 7; after being combined and beat-frequency by the combiner 5, N beams of encoded detection light are obtained. The N beams of encoded detection light are reflected by the beam splitter 6 to different pixel units of the spatial light modulator 7. By setting the gray levels of the respective pixel units of the spatial light modulator 7, different wavefront modulations are performed on the N beams of encoded detection light to obtain N beams of phase-modulated detection light with different wavefronts.

[0081] In step S3, after each beam of phase-modulated detection light is reflected by the beam splitter / combiner 8, it is incident on the microscope objective 9, and then focused by the microscope objective 9 to different depths of the sample, exciting the sample to generate signal light at different depths respectively. The signal light generated at each depth is detected simultaneously once by the single-pixel detector 13. Since the radio frequency (RF) frequencies of the signal light generated at each depth correspond one-to-one with the RF frequencies of each beam of phase-modulated detection light, by analyzing the RF frequencies of the signal light generated at different depths detected simultaneously once by the single-pixel detector 13, the analysis of different depths of the sample is realized.

[0082] Specifically, step S3 is as follows:

[0083] In step S3.1, N beams of phase-modulated detection light pass through the beam splitter 6, and then are reflected by the beam splitter / combiner 8 to the microscope objective 9, and are focused by the microscope objective 9 to different depths of the sample, exciting the sample to generate signal light at different depths respectively.

[0084] The signal light generated at each depth is incident on the microscope objective 9, transmitted through the microscope objective 9, then passes through the beam splitter / combiner 8, and after the stray light is filtered by the filter 11, it is focused on the single-pixel detector 13 through the focusing lens 12, realizing that the single-pixel detector 13 simultaneously detects the signal light generated at different depths of the sample once.

[0085] The effects that can be achieved by the present invention are as follows:

[0086] (1) Simultaneous excitation of RF-labeled monochromatic light in the depth direction

[0087] In the present invention, the acousto-optic deflector is used to divide the monochromatic light into multiple beams of excitation light labeled with different RF frequencies, and the spatial light modulator is used to focus each beam of excitation light to different depths, realizing simultaneous excitation in the depth direction. The present invention does not require scanning in the depth direction and has faster speed and better stability compared with the prior art.

[0088] (2) Realization of large-range simultaneous excitation in the depth direction

[0089] In the present invention, the wavefront phase of each beam of excitation light is adjusted by the spatial light modulator, thereby realizing simultaneous excitation in the depth direction. The present invention can realize large-range simultaneous excitation by setting the gray scale values of each pixel of the spatial light modulator.

[0090] (3) Signal recognition speed in the depth direction of the order of megahertz

[0091] In the present invention, the single-pixel detector is used to simultaneously measure the signal light at each depth once, and each signal light is identified according to the labeled RF frequency. The measurement speed of the single-pixel detector can reach the order of megahertz.

[0092] Two embodiments are introduced below: Embodiment 1:

[0093] In the embodiments of the present invention, large - range and rapid depth resolution is achieved by radio - frequency marking of monochromatic light. The structure of the embodiments of the present invention is as Figure 1 shown. The hardware includes a detection light source 1, an acousto - optic deflector 2, a concave total - reflecting mirror 3, a beam expander 4, a beam combiner 5, a beam splitter 6, a spatial light modulator 7, a beam splitting / combining device 8, a microscope objective 9, a filter 11, a focusing lens 12, and a single - pixel detector 13.

[0094] Among them:

[0095] The detection light source 1 is a monochromatic light source for exciting the sample.

[0096] The acousto - optic deflector 2, the concave total - reflecting mirror 3, the beam expander 4, and the beam combiner 5 are used to perform radio - frequency coding on the output beam of the detection light source 1. After coding, the detection light is divided into multiple beams and the amplitude - modulation frequencies of each beam are different.

[0097] The beam splitter 6 and the spatial light modulator 7 are used to perform phase modulation on each beam of the coded detection light. After modulation, the wavefronts of each beam are different and can be focused to different depths.

[0098] The beam splitting / combining device 8 is used to reflect each beam of excitation light and transmit the signal light generated by each beam of excitation light;

[0099] The microscope objective 9 is used to focus each beam of excitation light to different depths and collect the signal light generated by each beam of excitation light.

[0100] The filter 11 is used to filter out the stray light in the signal light.

[0101] The focusing lens 12 is used to focus the signal light onto the single - pixel detector 13, and the single - pixel detector 13 is used to measure the signal light.

[0102] The dynamic working process of the present invention is as follows:

[0103] Turn on the detection light source 1, set the drive signal of the acousto - optic deflector 2 to generate multiple first - order diffracted beams with different frequency shifts. Each first - order diffracted beam is combined with the zero - order transmitted beam directly passing through the acousto - optic deflector 2 by the beam combiner 5 to achieve radio - frequency marking. Set the gray levels of each pixel of the spatial light modulator 7 to perform different phase modulations on each beam of the detection light after radio - frequency marking. Then each beam of the detection light is focused to different depths of the sample by the microscope objective 9. The signal light generated at each depth is simultaneously measured by the single - pixel detector 13, and each signal light is identified according to the marked radio - frequency frequency. Embodiment Two:

[0104] The present invention can be used for depth resolution of layered samples in a single measurement. Figure 2 It is a schematic diagram of an implementation case of the depth - resolution technology for radio - frequency - marked monochromatic light used to measure layered samples.

[0105] The detection light source 1 outputs light which is divided into a zero-order transmitted light and a first-order diffracted light after passing through the acousto-optic deflector 2. Among them, the zero-order transmitted light propagates along the incident light direction, and the propagation direction of the first-order diffracted light is deflected. When the acousto-optic deflector 2 is loaded with driving signals of multiple frequencies, multiple beams of first-order diffracted light are generated. The frequency of each beam of first-order diffracted light has a frequency shift relative to the incident light, and the frequency shift amount is equal to the frequency of the driving signal of the corresponding acousto-optic deflector 2.

[0106] The concave total reflector 3 is used to reflect the first-order diffracted light, and the distance between it and the acousto-optic deflector 2 is equal to its focal length. The first-order diffracted light becomes parallel light after being reflected by the concave total reflector 3.

[0107] The beam expander 4 is used to expand the zero-order transmitted light. The expanded zero-order transmitted light and the reflected first-order diffracted light are combined by the beam combiner 5 to generate beat frequencies. The amplitude modulation frequencies of the combined light after beating are different, thus realizing radio frequency tagging. Each beam of beat light is reflected by the beam splitter 6 to different pixel units of the spatial light modulator 7. By setting the gray levels of each pixel unit of the spatial light modulator 7, different wavefront modulations are performed on each beam of beat light. The modulated beat light passes through the beam splitter 6, is reflected by the beam splitter / combiner 8, and then is focused by the microscope objective 9 onto different layers of the layered sample 10. The microscope objective 9 simultaneously collects the signal light generated by each layer of the layered sample 10. Each signal light passes through the beam splitter / combiner 8 and the filter 11 and is then focused by the lens 12 onto the single-pixel detector 13. The filter 11 is used to filter out stray light other than the signal light. The single-pixel detector 13 simultaneously measures the signal light generated by each layer at one time. Since the radio frequency of each signal light corresponds one-to-one to the radio frequency of its excitation light, depth analysis can be performed according to the radio frequency of the signal light.

[0108] The above is only the preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. A device for realizing large-range and fast depth analysis based on radio frequency tags and monochromatic light, characterized in that Comprising: A detection light source (1), a radio frequency encoding unit, a phase modulation unit, and a sample excitation and detection unit; The detection light source (1) is used to emit a detection light beam; The radio frequency encoding unit is used to perform radio frequency encoding on the detection light beam emitted by the detection light source (1) to obtain multiple encoded detection light beams, and the amplitudes and modulation frequencies of the encoded detection light beams are all different; The phase modulation unit is used to perform phase modulation on each encoded detection light beam to obtain multiple phase-modulated detection light beams with different wavefronts; The sample excitation and detection unit includes a beam splitter / combiner (8), a microscope objective (9), and a single-pixel detector (13), and is used to reflect each phase-modulated detection light beam by the beam splitter / combiner (8) and then incident on the microscope objective (9), and then focus it by the microscope objective (9) to different depths of the sample to excite signal light generated respectively at different depths of the sample, and the signal light generated at each depth is detected simultaneously by the single-pixel detector (13) once; since the radio frequency frequencies of the signal light generated at each depth correspond one-to-one to the radio frequency frequencies of the phase-modulated detection light beams, by analyzing the radio frequency frequencies of the signal light generated at each depth detected simultaneously by the single-pixel detector (13) once, the analysis of different depths of the sample is realized; The radio frequency encoding unit includes an acousto-optic deflector (2), a concave total reflector (3), a beam expander (4), and a combiner (5); The acousto-optic deflector (2) is located on the transmission path of the detection light beam of the detection light source (1); The acousto-optic deflector (2) outputs multiple first-order diffracted light beams and a zero-order transmitted light beam; the concave total reflector (3) is arranged on the transmission path of the first-order diffracted light beam of the acousto-optic deflector (2); The beam expander (4) is arranged on the transmission path of the zero-order transmitted light beam of the acousto-optic deflector (2); The combiner (5) is arranged at the position where the expanded light beam output by the beam expander (4) intersects with the reflection path of the concave total reflector (3).

2. The large-range and fast depth parsing device based on radio frequency tag monochromatic light according to claim 1, wherein The distance from the concave total reflector (3) to the acousto-optic deflector (2) is equal to the focal length of the concave total reflector (3).

3. The large-range and fast depth parsing device based on radio frequency tags and monochromatic light according to claim 1, characterized in that, The phase modulation unit includes a beam splitter (6) and a spatial light modulator (7); The beam splitter (6) is arranged on the transmission path of the output light beam of the combiner (5); the spatial light modulator (7) is arranged on the reflection path of the beam splitter (6).

4. The large-range and fast depth analysis device based on radio frequency tags and monochromatic light according to claim 3, characterized in that, The structure of the sample excitation and detection unit is: The beam splitter / combiner (8) is arranged on the transmission path of the transmitted light beam of the beam splitter (6); the microscope objective (9) is arranged on the reflection path of the beam splitter / combiner (8); the sample is arranged at the focal plane position of the microscope objective (9); the single-pixel detector (13) is arranged on the transmission path of the transmitted light beam of the beam splitter / combiner (8).

5. The large-range rapid depth analysis device based on radio frequency tags and monochromatic light according to claim 4, wherein, The sample excitation and detection unit further includes a filter (11) and a focusing lens (12); In the path between the beam splitter / combiner (8) and the single-pixel detector (13), the filter (11) and the focusing lens (12) are arranged in sequence along the optical transmission direction; and, the single-pixel detector (13) is located at the focal plane position of the focusing lens (12).

6. A depth analysis method for a device for realizing large-range and fast depth analysis based on radio frequency tags and monochromatic light according to any one of claims 1-5, characterized in that It includes the following steps: Step S1, detecting that the detection beam emitted by the light source (1) is incident on the radio frequency encoding unit, and the radio frequency encoding unit performs radio frequency encoding on the detection beam emitted by the light source (1) to obtain multiple encoded detection lights, and moreover, the amplitudes and modulation frequencies of each encoded detection light are different; Step S2, each encoded detection light undergoes phase modulation through the phase modulation unit to obtain multiple phase-modulated detection lights with different wavefronts; Step S3, after each phase-modulated detection light is reflected by the beam splitter / combiner (8), it is incident on the microscope objective lens (9), and then is focused by the microscope objective lens (9) to different depths of the sample, and signal lights are respectively generated by exciting different depths of the sample. The signal lights generated at each depth are simultaneously detected by the single-pixel detector (13) once; since the radio frequency frequencies of the signal lights generated at each depth correspond one-to-one to the radio frequency frequencies of each phase-modulated detection light, by analyzing the radio frequency frequencies of the signal lights generated at each depth simultaneously detected by the single-pixel detector (13) once, the analysis of different depths of the sample is realized.

7. The depth analysis method of a large-range and fast depth analysis device based on radio frequency tags and monochromatic light according to claim 6, characterized in that Specifically, step S1 is as follows: Step S1.1, the radio frequency encoding unit includes an acousto-optic deflector (2), a concave total reflector (3), a beam expander (4), and a combiner (5); Step S1.2, after the detection beam emitted by the light source (1) acts on the acousto-optic deflector (2), zero-order transmitted light and N first-order diffracted lights with different deflection angles and frequency shift amounts are output; Among them: the zero-order transmitted light propagates along the incident light direction incident on the acousto-optic deflector (2); the propagation directions of the N first-order diffracted lights are deflected by different angles relative to the incident light direction; by controlling the acousto-optic deflector (2) to load drive signals of N frequencies, N first-order diffracted lights are correspondingly generated, and the frequency of each first-order diffracted light has a frequency shift relative to the incident light, and the frequency shift amount is equal to the frequency of the corresponding drive signal loaded by the acousto-optic deflector (2); Step S1.3, the N first-order diffracted lights with different deflection angles and frequency shift amounts are reflected by the concave total reflector (3) to obtain N reflected first-order diffracted lights; the N reflected first-order diffracted lights are parallel to each other and are parallel lights; The zero-order transmitted light is incident on the beam expander (4), and through the beam expansion effect of the beam expander (4), the zero-order transmitted light is expanded into N zero-order transmitted lights, and the N zero-order transmitted lights are parallel lights; Step S1.4, the N reflected first-order diffracted lights and the N zero-order transmitted lights are both incident on the combiner (5), and are combined and beat-frequency by the combiner (5), that is: each reflected first-order diffracted light and each zero-order transmitted light are combined and beat-frequency to obtain an encoded detection light, and thus N encoded detection lights are obtained; the amplitudes and modulation frequencies of the N encoded detection lights are different, thereby realizing radio frequency marking.

8. The depth parsing method of a large-range and fast depth parsing device based on radio frequency tags and monochromatic light according to claim 7, characterized in that Specifically, step S2 is as follows: The phase modulation unit includes a beam splitter (6) and a spatial light modulator (7); after the N coded detection lights are combined by the beam combiner (5) to generate beat frequencies, the N coded detection lights are reflected by the beam splitter (6) to different pixel units of the spatial light modulator (7). By setting the gray levels of the respective pixel units of the spatial light modulator (7), different wavefront modulations are performed on the N coded detection lights, and N detection lights with different wavefronts after phase modulation are obtained.

9. The depth analysis method of a large-range and fast depth analysis device based on radio frequency tags and monochromatic light according to claim 8, characterized in that Step S3 is specifically as follows: In step S3.1, the N detection lights after phase modulation pass through the beam splitter (6), and then are reflected by the beam splitter / combiner (8) to the microscope objective (9), and are focused by the microscope objective (9) to different depths of the sample, and signal lights are respectively generated at different depths of the sample. The signal lights generated at each depth are incident on the microscope objective (9), after being transmitted by the microscope objective (9), then pass through the beam splitter / combiner (8), after the stray light is filtered by the filter (11), and then are focused on the single-pixel detector (13) through the focusing lens (12), so that the single-pixel detector (13) can simultaneously detect the signal lights generated at different depths of the sample in a single shot.

Images