Radio frequency power measurement and calibration system and method for non-50-ohm impedance load

Abstract

The invention relates to a radio frequency power measurement and calibration system for a non-50-ohm impedance load, and the system comprises a first matcher and a second matcher, the input end of the first matcher is connected with a radio frequency power supply, and the output end of the first matcher is connected with a non-50-ohm device to be measured; the input end of the second matcher is connected with non-50ohm to-be-tested equipment, and the output end of the second matcher is connected with a 50ohm load; a first radio frequency power meter and a second radio frequency power meter, the first radio frequency power meter is installed at the input end of the first matcher, and the second radio frequency power meter is installed at the output end of the second matcher; the two matchers form a conjugate relation by adjusting the adjustable capacitor assembly; by using the conjugate matching principle, the dissipation powers of the two matchers are consistent, so that the total dissipation power is directly calculated based on the measurement values of the two radio frequency power meters, the actual transmission power of the non-50ohm to-be-measured equipment is calculated, the ohm loss and the transmission loss of the matchers do not need to be independently calculated, and the measurement process is greatly simplified.

Description

Technical Field

[0001] The present invention relates to the technical field of radio frequency power measurement of semiconductor equipment, and in particular to a radio frequency power measurement and calibration system and method for a non-50 ohm impedance load. Background Art

[0002] In the field of modern RF technology, especially in related industries such as semiconductor manufacturing, accurate measurement of RF power is crucial to ensure process stability and product quality. However, in practical applications, non-50 ohm impedance loads are often encountered. For example, the impedance load of a semiconductor reaction chamber is often not the standard 50 ohms.

[0003] Traditional RF power measurement technology is mainly designed for 50 ohm impedance loads. Specifically, RF power meters can measure power more accurately, but when faced with non-50 ohm impedance loads, traditional measurement methods are powerless. During the transmission process from the matcher to the non-50 ohm load (such as a semiconductor reaction chamber), due to impedance mismatch, reflection and loss will occur, making power measurement complicated and difficult to perform accurately.

[0004] At present, when estimating non-50 ohm power, it is usually necessary to consider factors such as the ohmic loss of the matcher and the transmission loss. However, the calculation or measurement of the matcher loss is very difficult because it is affected by many factors, such as the structure, material, operating frequency and characteristics of the transmission line of the matcher. As a result, in actual applications, it is impossible to know the exact power input to the non-50 ohm load, which affects the control and optimization of related processes.

[0005] In order to obtain the power of a non-50 ohm impedance load, existing methods often require a large number of complex calculations and measurements. Not only is the measurement process cumbersome, but the calculation process is also prone to errors, making it difficult to ensure the accuracy of the measurement results.

[0006] Therefore, there is an urgent need for a system and method that can accurately measure the RF power of a non-50 ohm impedance load to meet the needs of practical applications. Summary of the invention

[0007] In order to overcome the deficiencies of the prior art, the present invention provides a radio frequency power measurement and calibration system and method for a non-50 ohm impedance load, which is used for accurate online power measurement in a scenario where a matcher is connected to a reaction chamber in a semiconductor process.

[0008] The technical solution of the present invention is as follows:

[0009] A radio frequency power measurement and calibration system for a non-50 ohm impedance load, comprising:

[0010] A first matcher and a second matcher, wherein the input end of the first matcher is connected to a radio frequency power supply, and the output end is connected to a non-50 ohm device under test; the input end of the second matcher is connected to the non-50 ohm device under test, and the output end is connected to a 50 ohm load;

[0011] A first radio frequency power meter and a second radio frequency power meter, wherein the first radio frequency power meter is installed at an input end of the first matching device, and the second radio frequency power meter is installed at an output end of the second matching device;

[0012] An adjustable capacitor component, by adjusting the adjustable capacitor component, the two matchers are made to form a conjugate relationship;

[0013] A calculation module is used to receive the measurement values ​​of the first radio frequency power meter and the second radio frequency power meter, and calculate the actual transmission power of the non-50 ohm device under test based on the total dissipated power.

[0014] Furthermore, the adjustable capacitor component includes a first series adjustable capacitor and a first parallel adjustable capacitor in the first matcher, and a second series adjustable capacitor and a second parallel adjustable capacitor in the second matcher. By adjusting the capacitance value, the impedance of the output end of the first matcher and the impedance of the input end of the second matcher satisfy a conjugate relationship.

[0015] Furthermore, the first matcher is also configured with a first inductor and a second inductor, and the second matcher is also configured with a third inductor and a fourth inductor; the RF power supply, the first inductor, the first series adjustable capacitor, the second inductor and the first matcher output are connected in sequence, one end of the first parallel adjustable capacitor is connected between the first series adjustable capacitor and the second inductor, and the other end is grounded; the second matcher output, the third inductor, the second series adjustable capacitor, the fourth inductor and the second matcher input are connected in sequence, one end of the second parallel adjustable capacitor is connected between the second series adjustable capacitor and the fourth inductor, and the other end is grounded; the non-50 ohm device under test is connected between the first matcher output and the second matcher input, one end of the 50 ohm load is connected between the second matcher output and the third inductor, and the other end is grounded.

[0016] Furthermore, it also includes a vector network analyzer, wherein a first impedance measurement point is set at the output end of the first matcher, and a second impedance measurement point is set at the input end of the second matcher.

[0017] Furthermore, the impedance of the output end of the first matcher and the impedance of the input end of the second matcher satisfy a conjugate relationship:

[0018] If the impedance at the output end of the first matcher is Z1=a+jb, the impedance at the input end of the second matcher is adjusted to Z1=a-jb, where a is the resistance component, b is the reactance component, and a>0.

[0019] Furthermore, the actual transmission power calculation formula of the calculation module is: Pout=P1-(P1-P2) / 2;

[0020] Wherein, P1 is the measurement value of the first RF power meter, and P2 is the measurement value of the second RF power meter.

[0021] Furthermore, the non-50 ohm device under test is an impedance load of a semiconductor reaction chamber.

[0022] The present invention also provides a calibration method for the radio frequency power measurement calibration system of the non-50 ohm impedance load based on the above scheme, characterized in that it comprises the following steps:

[0023] Step 1, constructing a symmetrical conjugate matching system, including a first matcher and a second matcher, wherein the input end of the first matcher is connected to a radio frequency power supply, and the output end is connected to a non-50 ohm device under test; the input end of the second matcher is connected to the non-50 ohm device under test, and the output end is connected to a 50 ohm load;

[0024] Step 2, adjusting the first matcher and the second matcher to impedance conjugate matching;

[0025] Step 3: using a first radio frequency power meter and a second radio frequency power meter to detect the input power of the first matching device and the output power of the second matching device respectively;

[0026] Step 4: Calculate the total dissipated power of the first matching device and the second matching device based on the difference between the input power of the first matching device and the output power of the second matching device;

[0027] Step 5: Use the total dissipated power to calibrate the actual input power of the non-50 ohm device under test.

[0028] Wherein, the step 2 specifically includes the following steps:

[0029] Step 201, adjusting a plurality of adjustable capacitors of the first matcher so that the output end of the first matcher presents a target impedance;

[0030] Step 202: Adjust a plurality of adjustable capacitors of the second matcher so that the input end of the second matcher presents a conjugate impedance of the target impedance.

[0031] The specific steps of adjusting the plurality of adjustable capacitors of the first matcher and the second matcher are as follows:

[0032] Using a vector network analyzer to measure the output impedance of the first matcher, adjusting the first series adjustable capacitor and the first parallel adjustable capacitor until the output impedance of the first matcher is adjusted to a target impedance, and calculating a conjugate impedance according to the target impedance;

[0033] The input impedance of the second matcher is measured by using a vector network analyzer, and the first series adjustable capacitor and the first parallel adjustable capacitor are adjusted until the impedance of the input end of the second matcher is adjusted to the conjugate impedance.

[0034] The present invention according to the above scheme has the following beneficial effects:

[0035] The present invention sets a first matcher, a second matcher and two radio frequency power meters, and uses the conjugate matching principle to make the dissipated powers of the two matchers consistent, thereby directly calculating the total dissipated power based on the measured values ​​of the two radio frequency power meters, and then calculating the actual transmission power of the non-50 ohm device to be tested, without the need to separately calculate the ohmic loss and transmission loss of the matcher, greatly simplifying the measurement process, eliminating the complicated calculation process, and solving the problem that the non-50 ohm impedance load cannot accurately measure the power;

[0036] Furthermore, the system of the present invention can accurately measure different non-50 ohm impedance loads simply by adjusting the adjustable capacitor component to make the two matchers reach a conjugate matching state. It has strong versatility and is easy to promote and use in different application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a structural schematic diagram of the present invention;

[0038] Figure 2 is a flow chart of the method of the present invention;

[0039] Figure 3 The flowchart of the method for adjusting two matchers to impedance conjugate matching in the present invention. DETAILED DESCRIPTION

[0040] In order to better understand the purpose, technical scheme and technical effect of the present invention, the present invention is further explained in conjunction with the accompanying drawings and embodiments. It should be noted that similar numbers and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. At the same time, it is stated that the embodiments described below are only used to explain the present invention and are not used to limit the present invention.

[0041] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element, and when an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "first", "second", "third" and "fourth" are used only for the purpose of convenience of description and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features.

[0042] In the semiconductor manufacturing process, the semiconductor reaction chamber is a key device, and its impedance load is usually not the standard 50 ohms. The system of the present invention sets the non-50 ohm device under test as the impedance load of the semiconductor reaction chamber to achieve accurate measurement and calibration of its radio frequency power.

[0043] like Figure 1 As shown, a radio frequency power measurement and calibration system for a non-50 ohm impedance load includes a first matcher, a second matcher, a first radio frequency power meter, a second radio frequency power meter, an adjustable capacitor component, and a calculation module.

[0044] A first matcher and a second matcher, wherein the input end (INPUT1) of the first matcher is connected to an RF power supply, and the output end (OUTPUT1) is connected to a non-50 ohm device under test; the input end (INPUT2) of the second matcher is connected to the non-50 ohm device under test, and the output end (OUTPUT2) is connected to a 50 ohm load; a first RF power meter and a second RF power meter, wherein the first RF power meter is installed at the input end of the first matcher, and the second RF power meter is installed at the output end of the second matcher; an adjustable capacitor component, wherein the two matchers form a conjugate relationship by adjusting the adjustable capacitor component; a calculation module, which is used to receive the measurement values ​​of the first RF power meter and the second RF power meter, and calculate the actual transmission power of the non-50 ohm device under test based on the total dissipated power.

[0045] In the RF power measurement, this system uses the characteristics of conjugate matching to solve the problem of power measurement of non-50 ohm impedance loads. The first RF power meter measures the power input by the RF power supply at the input end of the first matcher, and the second RF power meter measures the power received by the 50 ohm load connected to the output end of the second matcher. When the first matcher and the second matcher are adjusted to form a conjugate relationship through the adjustable capacitor component, the dissipated power of their internal components has a corresponding conjugate matching law, and the dissipated power of the two matchers is equal. Based on this, the calculation module calculates the total dissipated power (the total dissipated power is the difference between the measured values ​​of the two power meters) through the two measured values ​​of the first RF power meter and the second RF power meter, and further derives the actual transmission power of the non-50 ohm device under test. The actual transmission power is equal to the power at the input end of the first matcher minus half of the total dissipated power.

[0046] In the above process, the present invention eliminates the error caused by the difficulty in calculating or measuring the loss of the matching device, directly and accurately obtains the actual transmission power of the non-50 ohm device to be tested, avoids the separate calculation of various losses of the matching device, greatly simplifies the measurement process, and improves the measurement efficiency. The system structure of the present invention is relatively simple, and only needs to configure the first matching device, the second matching device, two RF power meters, an adjustable capacitor component and a calculation module to achieve it. And for different non-50 ohm impedance loads, it is only necessary to adjust the adjustable capacitor component so that the two matching devices reach a conjugate matching state, so that accurate measurements can be performed, which has strong versatility and is convenient for promotion and use in different application scenarios.

[0047] In the present invention, the adjustable capacitor assembly includes a first series adjustable capacitor C11 and a first parallel adjustable capacitor C12 in the first matcher, and a second series adjustable capacitor C21 and a second parallel adjustable capacitor C22 in the second matcher, and the impedance of the output end of the first matcher and the impedance of the input end of the second matcher are adjusted by adjusting the capacitance value. Fine adjustment is performed using the first series adjustable capacitor C11, the first parallel adjustable capacitor C12 in the first matcher, and the second series adjustable capacitor C21 and the second parallel adjustable capacitor C22 in the second matcher. When these capacitance values ​​are adjusted, the impedance of the output end of the first matcher and the input end of the second matcher will be changed until the impedance of the output end of the first matcher and the impedance of the input end of the second matcher meet a conjugate relationship. The present invention provides engineers with more adjustment dimensions and parameter selections by setting multiple adjustable capacitors. When facing different non-50 ohm impedance devices to be tested, the capacitance values ​​of different positions can be adjusted in a targeted manner according to the specific impedance characteristics to quickly achieve conjugate matching.

[0048] In this embodiment, the first matcher is also configured with a first inductor L1 and a second inductor L2, and the second matcher is also configured with a third inductor L3 and a fourth inductor L4; the RF power supply, the first inductor L1, the first series adjustable capacitor C11, the second inductor L2 and the first matcher output are connected in sequence, one end of the first parallel adjustable capacitor C12 is connected between the first series adjustable capacitor C11 and the second inductor L2, and the other end is grounded. The second matcher output, the third inductor L3, the second series adjustable capacitor C21, the fourth inductor L4 and the second matcher input are connected in sequence, one end of the second parallel adjustable capacitor C22 is connected between the second series adjustable capacitor C21 and the fourth inductor L4, and the other end is grounded. The non-50 ohm device under test is connected between the first matcher output and the second matcher input, and one end of the 50 ohm load is connected between the second matcher output and the third inductor L3, and the other end is grounded.

[0049] In the first matcher, the RF signal output by the RF power supply passes through the first inductor L1, the first series adjustable capacitor C11 and the second inductor L2 in turn, and reaches the output end of the first matcher to connect to the non-50 ohm device under test. The first parallel adjustable capacitor C12 is connected between the first series adjustable capacitor C11 and the second inductor L2 and grounded, and works together with the series inductor and capacitor to adjust the impedance of the circuit more finely. The inductor has the characteristic of hindering the change of current, and the capacitor has the characteristic of storing and releasing charge. They cooperate with each other to change the transmission characteristics of the signal in the circuit, thereby changing the impedance of the output end of the first matcher.

[0050] Similarly, in the second matcher, starting from the input end of the second matcher, the signal passes through the fourth inductor L4, the second series adjustable capacitor C21, the third inductor L3, and the standard 50 ohm load in sequence to reach the output end of the second matcher. The second parallel adjustable capacitor C22 is connected between the second series adjustable capacitor C21 and the fourth inductor L4 and grounded, and works together with the series inductor and capacitor to change the impedance of the second matcher input end.

[0051] In the present invention, the system also includes a vector network analyzer, whose first impedance measurement point (TP1) is set at the output end of the first matcher, and whose second impedance measurement point (TP2) is set at the input end of the second matcher. The vector network analyzer can accurately measure the impedance characteristics of different positions in the circuit, and its first impedance measurement point TP1 is located at the output end of the first matcher, and the second impedance measurement point TP2 is located at the input end of the second matcher. Through these two measurement points, the impedance information of the output end of the first matcher and the input end of the second matcher can be obtained in real time. In the process of adjusting the adjustable capacitor component to make the two matchers form a conjugate relationship, the operator can operate according to the impedance data measured by the vector network analyzer.

[0052] In a specific embodiment, the impedance of the output end of the first matcher and the impedance of the input end of the second matcher satisfy the conjugate relationship condition: if the impedance of the output end of the first matcher is Z1=a+jb, the impedance of the input end of the second matcher is adjusted to Z1=a-jb, where a is the resistance component, b is the reactance component, and a>0. The actual transmission power calculation formula of the calculation module is: Pout=P1-(P1-P2) / 2; where P1 is the measurement value of the first RF power meter, and P2 is the measurement value of the second RF power meter.

[0053] P1-P2 represents the total dissipated power of the entire system (including two matchers and a non-50 ohm device under test). Since the two matchers dissipate equal power under conjugate matching, the dissipated power of each matcher is (P1-P2) / 2. Then, the actual transmission power of the non-50 ohm device under test is equal to the power at the input end of the first matcher minus the dissipated power of one matcher, that is, Pout = P1-(P1-P2) / 2. It can be seen that the present invention uses conjugate matching to ensure the consistency of the dissipated power of the two matchers, so that the calculation formula based on the measurement values ​​of the two power meters has a solid theoretical basis, and can accurately calculate the actual transmission power of the non-50 ohm device under test, meeting the application scenarios with high requirements for power measurement accuracy; at the same time, the formula is simple, which greatly simplifies the calculation process, eliminates the need for complex theoretical derivation and calculation, reduces calculation errors, and improves measurement efficiency.

[0054] like Figure 2 As shown, the present invention also provides a calibration method for the radio frequency power measurement calibration system of the non-50 ohm impedance load based on the above scheme, comprising the following steps:

[0055] Step 1, construct a symmetrical conjugate matching system, including a first matcher and a second matcher, wherein the input end of the first matcher is connected to a radio frequency power supply, and the output end is connected to a non-50 ohm device under test; the input end of the second matcher is connected to a non-50 ohm device under test, and the output end is connected to a 50 ohm load;

[0056] Step 2, adjusting the first matcher and the second matcher to impedance conjugate matching;

[0057] Step 3: using a first radio frequency power meter and a second radio frequency power meter to detect the input power of the first matching device and the output power of the second matching device respectively;

[0058] Step 4: Calculate the total dissipated power of the first matching device and the second matching device based on the difference between the input power of the first matching device and the output power of the second matching device;

[0059] Step 5: Use the total dissipated power to calibrate the actual input power of the non-50 ohm device under test.

[0060] This calibration method focuses on building and adjusting a symmetrical conjugate matching system to achieve calibration of the actual input power of the non-50 ohm device under test. First, build a system architecture, connect the RF power supply, the first matcher, the non-50 ohm device under test, the second matcher, and the 50 ohm load in sequence to form a complete power transmission link. By adjusting the impedance of the first matcher and the second matcher, the two matchers are made to reach a conjugate matching state. The characteristic that the two matchers dissipate equal power under conjugate matching is used, combined with the power values ​​measured by the first RF power meter and the second RF power meter, the total dissipated power is calculated, and then the actual input power of the non-50 ohm device under test is calibrated.

[0061] Wherein, step 2 specifically includes the following steps:

[0062] Step 201, adjusting a plurality of adjustable capacitors of a first matcher so that an output end of the first matcher presents a target impedance;

[0063] Step 202: Adjust a plurality of adjustable capacitors of the second matcher so that the input end of the second matcher presents a conjugate impedance of the target impedance.

[0064] like Figure 3 As shown, the specific steps of adjusting the plurality of adjustable capacitors of the first matcher and the second matcher are:

[0065] The output impedance of the first matcher is measured by using a vector network analyzer, and the first series adjustable capacitor C11 and the first parallel adjustable capacitor C12 are adjusted until the output impedance of the first matcher is adjusted to the target impedance, and the conjugate impedance is calculated according to the target impedance;

[0066] The input impedance of the second matcher is measured by using a vector network analyzer, and the first series adjustable capacitor C11 and the first parallel adjustable capacitor C12 are adjusted until the impedance of the input end of the second matcher is adjusted to a conjugate impedance.

[0067] The method has clear adjustment steps and uses real-time monitoring of the vector network analyzer, which makes the calibration process more efficient. The operator can quickly adjust the value of the adjustable capacitor according to the measurement result, reducing the time for repeated debugging. In addition, the standardized calibration method has good repeatability. Different operators can obtain consistent calibration results by performing calibration according to the method under the same conditions.

[0068] In summary, the method of the present invention adapts to different non-50 ohm devices under test by adjusting the impedance of the matcher. No matter how the impedance characteristics of the non-50 ohm device under test change, the matcher can be adjusted to a conjugate matching state by adjusting the adjustable capacitor, thereby realizing power calibration of different non-50 ohm loads, thereby improving the versatility and adaptability of the system.

[0069] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0070] The above embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for those of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A radio frequency power measurement and calibration system for non-50 ohm impedance loads, characterized in that: include: A first matcher and a second matcher, wherein the input end of the first matcher is connected to a radio frequency power supply, and the output end is connected to a non-50 ohm device under test; The input end of the second matcher is connected to the non-50 ohm device under test, and the output end is connected to a 50 ohm load; A first radio frequency power meter and a second radio frequency power meter, wherein the first radio frequency power meter is installed at an input end of the first matching device, and the second radio frequency power meter is installed at an output end of the second matching device; An adjustable capacitor component, by adjusting the adjustable capacitor component, the two matchers are made to form a conjugate relationship; A calculation module is used to receive the measurement values ​​of the first radio frequency power meter and the second radio frequency power meter, and calculate the actual transmission power of the non-50 ohm device under test based on the total dissipated power.

2. The RF power measurement and calibration system for non-50 ohm impedance load according to claim 1, characterized in that: The adjustable capacitor assembly includes a first series adjustable capacitor and a first parallel adjustable capacitor in the first matcher, and a second series adjustable capacitor and a second parallel adjustable capacitor in the second matcher. The impedance of the output end of the first matcher and the impedance of the input end of the second matcher satisfy a conjugate relationship by adjusting the capacitance value.

3. The RF power measurement and calibration system for non-50 ohm impedance loads according to claim 2, characterized in that: The first matcher is further configured with a first inductor and a second inductor, and the second matcher is further configured with a third inductor and a fourth inductor; the RF power supply, the first inductor, the first series adjustable capacitor, the second inductor and the output end of the first matcher are connected in sequence, one end of the first parallel adjustable capacitor is connected between the first series adjustable capacitor and the second inductor, and the other end is grounded; The second matching device output end, the third inductor, the second series adjustable capacitor, the fourth inductor and the second matching device input end are connected in sequence, one end of the second parallel adjustable capacitor is connected between the second series adjustable capacitor and the fourth inductor, and the other end is grounded; The non-50 ohm device under test is connected between the first matcher output terminal and the second matcher input terminal, one end of the 50 ohm load is connected between the second matcher output terminal and the third inductor, and the other end is grounded.

4. The radio frequency power measurement and calibration system for non-50 ohm impedance load according to any one of claims 1 to 3, characterized in that: It also includes a vector network analyzer, wherein a first impedance measurement point of the vector network analyzer is arranged at the output end of the first matcher, and a second impedance measurement point of the vector network analyzer is arranged at the input end of the second matcher.

5. The radio frequency power measurement and calibration system for non-50 ohm impedance loads according to claim 4, characterized in that: The impedance of the output end of the first matcher and the impedance of the input end of the second matcher satisfy the conjugate relationship condition: If the impedance at the output end of the first matcher is Z1=a+jb, the impedance at the input end of the second matcher is adjusted to Z1=a-jb, where a is the resistance component, b is the reactance component, and a>0.

6. The RF power measurement and calibration system for non-50 ohm impedance loads according to claim 1, characterized in that: The actual transmission power calculation formula of the calculation module is: Pout=P1-(P1-P2) / 2; Wherein, P1 is the measurement value of the first RF power meter, and P2 is the measurement value of the second RF power meter.

7. The radio frequency power measurement and calibration system for non-50 ohm impedance load according to claim 1, characterized in that: The non-50 ohm device under test is an impedance load of a semiconductor reaction chamber.

8. A calibration method for a radio frequency power measurement calibration system based on a non-50 ohm impedance load according to any one of claims 1 to 7, characterized in that: The following steps are involved: Step 1, constructing a symmetrical conjugate matching system, including a first matcher and a second matcher, wherein the input end of the first matcher is connected to a radio frequency power supply, and the output end is connected to a non-50 ohm device under test; the input end of the second matcher is connected to the non-50 ohm device under test, and the output end is connected to a 50 ohm load; Step 2, adjusting the first matcher and the second matcher to impedance conjugate matching; Step 3: using a first radio frequency power meter and a second radio frequency power meter to detect the input power of the first matching device and the output power of the second matching device respectively; Step 4: Calculate the total dissipated power of the first matching device and the second matching device based on the difference between the input power of the first matching device and the output power of the second matching device; Step 5: Use the total dissipated power to calibrate the actual input power of the non-50 ohm device under test.

9. The radio frequency power measurement and calibration method for non-50 ohm impedance load according to claim 8, characterized in that: The step 2 specifically includes the following steps: Step 201, adjusting a plurality of adjustable capacitors of the first matcher so that the output end of the first matcher presents a target impedance; Step 202: Adjust a plurality of adjustable capacitors of the second matcher so that the input end of the second matcher presents a conjugate impedance of the target impedance.

10. The radio frequency power measurement and calibration method for non-50 ohm impedance load according to claim 9, characterized in that: The specific steps of adjusting the plurality of adjustable capacitors of the first matcher and the second matcher are: Using a vector network analyzer to measure the output impedance of the first matcher, adjusting the first series adjustable capacitor and the first parallel adjustable capacitor until the output impedance of the first matcher is adjusted to a target impedance, and calculating a conjugate impedance according to the target impedance; The input impedance of the second matcher is measured by using a vector network analyzer, and the first series adjustable capacitor and the first parallel adjustable capacitor are adjusted until the impedance of the input end of the second matcher is adjusted to the conjugate impedance.

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