Mask storage device

Abstract

The mask storage device comprises a base module and an upper cover module which are arranged in a split mode, a base supporting table for supporting a mask and a limiting table for clamping and fixing the mask are arranged in the base module, and an upper cover supporting table is arranged in the upper cover module; the dynamic sealing mechanism comprises a sealing strip arranged at the frame position of the base module and a hasp assembly connecting the base module and the upper cover module, the hasp assembly comprises a spring hasp and a hasp hook which are arranged on the base module and the upper cover module respectively, and when the base module and the upper cover module are buckled, the upper cover module is in contact with the sealing strip, and the sealing strip is in contact with the hasp hook. When the spring hasp and the hasp hook are buckled, the sealing strip is extruded to deform, so that the upper cover supporting table is in contact with the mask, the spring hasp is provided with a nonlinear elastic piece and has at least two-section type rigidity, and the nonlinear elastic piece provides dynamic sealing force according to the stretching amount. According to the invention, a split modular design and a multi-dimensional dynamic fixing and self-adaptive sealing structure are adopted, so that safe and reliable storage and transportation of the mask are realized.

Description

Technical Field

[0001] The present invention relates to the technical field of mask storage, in particular to a mask storage device. Background Art

[0002] As the core component of the photolithography process, the mask is usually engraved with micron or even nanometer-level circuit patterns on its surface. It is mostly made of quartz glass or chrome film substrates, which have extremely high precision requirements and environmental sensitivity. During storage and transportation, the mask must be protected from physical collisions, vibrations, dust pollution, and changes in temperature and humidity, otherwise it may cause pattern damage or contamination, directly affecting chip yield.

[0003] At present, the mask storage device mainly adopts a fixed cavity structure, which is sealed by rigid buckles or bolts. However, this kind of design has the following significant defects in practical applications: 1. Insufficient multi-dimensional fixation, the mask is easily displaced and damaged: Traditional storage devices usually rely on single-direction positioning (such as a vertical lower support platform or a horizontal side slot), which cannot form a three-dimensional constraint on the mask. During transportation or stacking, the mask may slide horizontally or jump vertically due to vibration or tilt, resulting in edge collision or surface scratches. Although some solutions use multi-point fixation, they lack dynamic adjustment capabilities and are difficult to adapt to masks of different sizes or thicknesses.

[0004] 2. Poor sealing performance and pressure adaptability: Sealing pressure is uncontrollable: When the rigid buckle is locked, the pressure is fixed. If the mask has thickness tolerance or the ambient temperature changes, causing the cavity to deform, the seal may fail due to insufficient pressure (dust and moisture intrusion), or the mask surface may be damaged due to excessive pressure.

[0005] 3. One-piece molding has high production cost and poor stability: The injection molding process is complex and has a long production cycle, which is not conducive to quickly responding to changes in market demand. When faced with diverse mask size requirements, injection molding storage devices often cannot meet them in time, thus affecting production efficiency and cost control; At the same time, due to the limitations of the injection molding process, injection-molded storage devices may also be deficient in structural strength and stability, and may not be able to provide reliable protection for the mask in long-term use or complex transportation environments. Summary of the invention

[0006] To this end, the technical problem to be solved by the present invention is to overcome the defects of the mask storage device in the prior art and provide a mask storage device that adopts a split modular design, multi-dimensional dynamic fixation and an adaptive sealing structure to achieve safer and more reliable storage and transportation of masks.

[0007] In order to solve the above technical problems, the present invention provides a mask storage device, comprising: A base module and an upper cover module are separately arranged, wherein the base module and the upper cover module are buckled together to form a cavity for storing the mask; The base module is provided with a base support platform for supporting the mask and a limit platform for clamping and fixing the mask. The upper cover module is provided with an upper cover support platform corresponding to the position of the base support platform. The base support platform and the upper cover support platform cooperate to limit the mask in the vertical direction, and the limit platform limits the mask in the horizontal direction. A dynamic sealing mechanism comprises a sealing strip arranged at a frame position of the base module and a buckle assembly connecting the base module and the upper cover module, wherein the buckle assembly comprises a spring buckle and a buckle hook respectively arranged on the base module and the upper cover module, wherein when the base module is buckled with the upper cover module, the upper cover module contacts the sealing strip, and when the spring buckle and the buckle hook are buckled, the sealing strip is squeezed to deform, so that the upper cover support platform contacts the mask plate, and the spring buckle is provided with a nonlinear elastic member, wherein the nonlinear elastic member has at least two-stage stiffness, and its stiffness becomes stronger as the stretching amount increases, and the nonlinear elastic member provides a dynamic sealing force according to the stretching amount.

[0008] In one embodiment of the present invention, it further comprises: a dynamic buffer mechanism, which is arranged in the base support platform and is used to adjust the support force of the mask, and the dynamic buffer mechanism comprises: A buffer tube embedded in the base support platform and capable of being inflated and deformed, wherein a groove for accommodating the buffer tube is provided on the base support platform, and the top surface of the buffer tube protrudes from the groove. After the buffer tube is inflated, the height protruding from the groove can be adjusted; A pressure sensor array for detecting the force on the buffer tube, wherein the pressure sensor array is embedded in the bottom of the groove; A pneumatic adjustment mechanism is communicated with the inner cavity of the buffer tube, and when the pressure sensor array detects a pressure change, the pneumatic adjustment mechanism is triggered to change the deformation amount of the buffer tube.

[0009] In one embodiment of the present invention, a plurality of base support platforms are arranged in the base module, a dynamic buffer mechanism is arranged in each of the base support platforms, and a plurality of groups of dynamic buffer mechanisms are linked to realize dynamic support adjustment of the mask.

[0010] In one embodiment of the present invention, a limiting slot plate is provided on the limiting platform, the limiting slot plate is slidably provided on the limiting platform, and the relative positions of the limiting slot plate and the limiting platform are fixed by adjusting bolts; The end of the limit slot plate facing the mask plate protrudes from the limit platform and is provided with a limit slot capable of accommodating the mask plate; A flexible member is arranged on the inner wall of the position limiting slot, and the flexible member is in contact with the mask plate.

[0011] In one embodiment of the present invention, a plurality of limit platforms are arranged in the base module, and the plurality of limit platforms are respectively arranged on different frames of the base module around the mask, and the plurality of limit platforms clamp and fix the mask from different directions.

[0012] In one embodiment of the present invention, it further comprises: a linkage mechanism, which is arranged in the base module, the base support platform is slidably arranged in the base module along the vertical direction, and the limit platform is slidably arranged in the base module along the horizontal direction, and the linkage mechanism is used to realize the synchronous action of the base support platform and the limit platform, and the linkage mechanism comprises: An elastic member, used for elastically supporting the base support platform so that the base support platform can float up and down in the base module; An inclined plane transmission block is matched with the bevel cut of the bottom of the base support platform, and the base support platform can push the inclined plane transmission block to move horizontally after the pressure of the mask plate decreases; A bidirectional lead screw passes through the inclined plane transmission block and converts the horizontal power of the inclined plane transmission block into the rotational power of the bidirectional lead screw; A worm gear assembly, wherein the worm wheel is connected to the bidirectional lead screw, and the worm is connected to the limit platform. The worm gear assembly converts the rotational power of the bidirectional lead screw into a horizontal thrust that drives the limit platform to move.

[0013] In one embodiment of the present invention, the photosensitive protection mechanism includes a top filter plate and a side observation window arranged on the upper cover template, and the top filter plate and the side observation window both adopt a multi-layer composite film structure, including a 570-590nm wavelength selective light-transmitting layer.

[0014] In one embodiment of the present invention, a carrying mechanism is further included, and the carrying mechanism includes a handle and rollers arranged on the base module and the upper cover module.

[0015] In one embodiment of the present invention, the base module and the upper cover module can be detachably assembled; The base module includes a base frame and a base corner, the base frame is provided with a base connection hole, the base corner is provided with a base connection boss, and the base connection boss can be inserted into the base connection hole to achieve the splicing of the base frame and the base corner; The upper cover module includes an upper cover frame and an upper cover corner. An upper cover connecting hole is opened in the upper cover frame. An upper cover connecting boss is arranged on the upper cover corner. The upper cover connecting boss can be inserted into the upper cover connecting hole to realize the splicing of the upper cover frame and the upper cover corner.

[0016] In one embodiment of the present invention, the top of the upper cover module is provided with a circumferential bevel boss, and the bottom of the base module is provided with a circumferential bevel pit. When multiple storage devices are stacked, the bevel boss and the bevel pit are coupled to each other.

[0017] The above technical solution of the present invention has the following advantages compared with the prior art: The mask storage device described in the present invention discloses a base module and an upper cover module that are separately arranged, and a buckle assembly is used to achieve rapid locking of the base module and the upper cover module. Compared with the integrated structure of traditional storage devices, the modular design facilitates rapid opening and closing, cleaning and maintenance, and at the same time, damaged modules can be transported independently or replaced, thereby reducing the cost of use.

[0018] A base support platform and an upper cover support platform are respectively arranged at the corresponding positions of the base module and the upper cover module. The coordinated use of the base support platform and the upper cover support platform can limit the movement of the mask in the vertical direction. At the same time, a limit platform for clamping and fixing the mask in the base module can limit the movement of the mask in the horizontal direction. Through the coordinated limitation in the vertical direction (base and upper cover support platform) and the horizontal direction (limit platform), a three-dimensional constraint is formed to prevent the mask from shifting or colliding during transportation or stacking.

[0019] A dynamic sealing mechanism is formed by a spring buckle composed of a sealing strip and a nonlinear elastic member. When the upper cover module and the base module are buckled, the frame of the upper cover module first contacts the sealing strip on the frame of the base module. At this time, the bottom surface of the mask plate contacts the base support platform, and the front surface of the mask plate does not contact the upper cover support platform. At this time, the upper cover module and the base module have been sealed closed by the sealing strip, and the mask plate is not squeezed. In the process of buckling the buckle assembly, the frame of the base module and the frame of the upper cover module are squeezed by the tensile force of the buckle assembly to squeeze the sealing strip, so that the sealing strip is elastically deformed to fill the gap between the contact surfaces. , enhance the dust and moisture proof performance. At the same time, the downward movement of the frame of the upper cover module drives the upper cover support platform to move downward, so that the upper cover support platform contacts the top surface of the mask plate. The mask plate is fixed in the vertical direction due to the extrusion effect. At this time, although the mask plate is squeezed, the extrusion is a flexible extrusion caused by the elastic deformation of the sealing strip, and it will not exert excessive extrusion force on the mask plate to cause damage to the mask plate. When the buckle assembly is fully closed, the spring buckle in the buckle assembly is stretched, thereby ensuring that the frames of the base module and the upper cover module are subjected to a continuous and constant extrusion force to maintain sealing; In addition, the spring buckle adopts a nonlinear elastic member with at least two-stage stiffness. The stiffness of the nonlinear elastic member increases with the increase of the stretching amount. The low stiffness is convenient for labor-saving closure during the initial buckling. The high stiffness provides a stable sealing force after closing to adapt to the thickness tolerance of the mask and environmental deformation. The nonlinear elastic member can also realize dynamic compensation. For example, in a transportation vibration environment, the base module and the upper cover module are separated due to vibration. When the sealing gap becomes larger, the nonlinear elastic member is stretched and its stiffness becomes stronger, so that it has a larger elastic force to keep the base module and the upper cover module in a buckled state at all times, thereby improving the sealing effect of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to make the content of the present invention more clearly understood, the present invention is further described in detail below according to specific embodiments of the present invention in conjunction with the accompanying drawings, wherein: Figure 1 It is a schematic diagram of the overall structure of the mask storage device of the present invention; Figure 2 is a schematic diagram of the internal structure of the base module of the present invention; Figure 3 It is a schematic diagram of the internal structure of the upper cover module of the present invention; Figure 4 is a schematic structural diagram of a buckle assembly of the present invention; Figure 5 It is a structural schematic diagram of the dynamic buffer mechanism of the present invention; Figure 6 It is a structural schematic diagram of the limit platform of the present invention; Figure 7 It is a structural schematic diagram of the linkage mechanism of the present invention; Figure 8 It is a schematic diagram of the splicing structure of the base module of the present invention; Fig. 9 It is a schematic diagram of the structure of the mask storage device of the present invention when stacked.

[0021] Explanation of the reference numerals in the specification: 1. Base module; 101. Base frame; 102. Base corner; 103. Base middle lining plate; 104. Base reinforcement beam; 2. Upper cover module; 3. Buckle assembly; 301. Spring buckle; 302. Buckle hook; 4. Base support platform; 5. Limit platform; 6. Upper cover support platform; 7. Sealing strip; 8. Buffer tube; 9. Flat touch panel; 10. Limit slot plate; 11. Adjusting bolt; 12. Flexible part; 13. Elastic part; 14. Inclined transmission block; 15. Bidirectional lead screw; 16. Worm gear assembly; 17. Top filter plate; 18. Side observation window; 19. Handle; 20. Roller; 21. Bevel boss; 22. Bevel pit. DETAILED DESCRIPTION

[0022] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0023] Reference Figure 1 As shown, the present invention discloses a mask storage device, including: a base module 1, an upper cover module 2 and a buckle assembly 3, wherein the base module 1 and the upper cover module 2 are separate independent modules, which can be independently produced and transported, and the buckle assembly 3 is used to realize the rapid locking of the base module 1 and the upper cover module 2. After the base module 1 and the upper cover module 2 are buckled together, a cavity for storing the mask is formed therein.

[0024] Reference Figure 2 As shown, the base module 1 is provided with a base support platform 4 for supporting the mask and a limit platform 5 for clamping and fixing the mask. The mask and the mask storage device of this embodiment are rectangular structures. Therefore, base support platforms 4 are respectively provided at the four corners thereof. The mask is supported by four groups of base support platforms 4 to ensure the stability of the mask support. Similarly, limit platforms 5 are respectively provided at the four sides of the mask storage device to clamp and fix the mask from different directions to ensure the stability of the mask clamping. Figure 3 As shown, the upper cover module 2 is provided with an upper cover support platform 6 corresponding to the position of the base support platform 4. When the base module 1 is buckled with the upper cover module 2, the base support platform 4 and the upper cover support platform 6 cooperate to clamp and fix the mask from the upper and lower sides; In this embodiment, the base support platform 4 and the upper cover support platform 6 are used to cooperate to limit the mask in the vertical direction, and the limit platform 5 is used to limit the mask in the horizontal direction. Through the coordinated limitation in the vertical direction (the base and the upper cover support platform 6) and the horizontal direction (the limit platform 5), a three-dimensional constraint is formed to prevent the mask from shifting or colliding during transportation or stacking.

[0025] Specifically, a sealing strip 7 is also provided in the base module 1. The sealing strip 7 is arranged around the base module 1 at the frame position thereof. When the base module 1 and the upper cover module 2 are buckled together, the sealing strip 7 is used to seal the gap between the base module 1 and the upper cover module 2. In the present embodiment, the sealing strip 7 and the buckle assembly 3 together constitute a dynamic sealing mechanism.

[0026] Reference Figure 4 As shown, the buckle assembly 3 includes a spring buckle 301 and a buckle hook 302 respectively arranged on the base module 1 and the upper cover module 2. The process of buckling the base module 1 and the upper cover module 2 is divided into three stages: The first stage: the frame of the upper cover module 2 first contacts the sealing strip 7 on the frame of the base module 1. At this time, the bottom surface of the mask plate contacts the base support platform 4, and the front surface of the mask plate does not contact the upper cover support platform 6. The sealing strip 7 has made the upper cover module 2 and the base module 1 sealed and closed, and no extrusion is caused to the mask plate; The second stage: in the process of fastening the buckle assembly 3, the frame of the base module 1 and the frame of the upper cover module 2 are squeezed by the tensile force of the buckle assembly 3 to squeeze the sealing strip 7, so that the sealing strip 7 is elastically deformed, further filling the contact surface gap, and enhancing the dustproof and moisture-proof performance. At the same time, the downward movement of the frame of the upper cover module 2 drives the upper cover support platform 6 to move downward, so that the upper cover support platform 6 contacts the top surface of the mask plate, and the mask plate is fixed in the vertical direction due to the squeezing effect. At this time, although the mask plate is squeezed, the squeezing is a flexible squeezing caused by the elastic deformation of the sealing strip 7, and it will not exert excessive squeezing force on the mask plate to cause damage to the mask plate; The third stage: when the buckle assembly 3 is completely closed, the spring buckle 301 in the buckle assembly 3 is stretched, thereby ensuring that the frames of the base module 1 and the upper cover module 2 are subjected to a continuous and constant extrusion force to maintain sealing; In addition, the spring buckle 301 is provided with a nonlinear elastic member having at least two-stage stiffness. The stiffness of the nonlinear elastic member increases with the increase of the stretching amount. The low stiffness during the initial fastening facilitates effortless closing. The high stiffness after closing provides a stable sealing force to adapt to the thickness tolerance of the mask and environmental deformation. The nonlinear elastic member can also achieve dynamic compensation. For example, in a transportation vibration environment, the base module 1 and the upper cover module 2 are separated due to vibration. When the sealing gap becomes larger, the nonlinear elastic member is stretched and its stiffness becomes stronger, so that it has a greater elastic force to keep the base module 1 and the upper cover module 2 always in a fastened state, thereby improving the sealing effect of the device.

[0027] As mentioned above, during storage and transportation, the mask plate must be protected from physical collision, vibration, etc., otherwise it may cause pattern damage or contamination, directly affecting the chip yield. In order to solve this problem, refer to Figure 5As shown, a dynamic buffer mechanism is also provided in the mask storage device of the present embodiment, for realizing the adjustment of the mask supporting force, the dynamic buffer mechanism comprises: a buffer tube 8, a pressure sensor array and a pneumatic adjustment mechanism, a groove for accommodating the buffer tube 8 is provided on the base support platform 4, the buffer tube 8 is embedded in the groove, the buffer tube 8 is made of silicone material, the buffer tube 8 has a cavity that can be inflated and deformed, the top surface of the buffer tube 8 protrudes from the groove, the height of the buffer tube 8 protruding from the groove can be adjusted after the buffer tube 8 is inflated, when the mask is placed on the base support platform 4, the buffer tube 8 flexibly supports the mask to avoid hard friction and damage to the surface; the pressure sensor array is embedded in the bottom of the groove to detect the pressure change of the buffer tube 8, the pneumatic adjustment mechanism is connected with the inner cavity of the buffer tube 8, when the pressure sensor array detects the pressure change, the pneumatic adjustment mechanism is triggered to change the deformation of the buffer tube 8, which can ensure the transportation posture of the mask and avoid squeezing and damage.

[0028] The dynamic buffer mechanism described in the present invention can pneumatically adjust the height of the buffer tube 8 during static support. During actual use, it can be compatible with the support of masks of different thicknesses (such as 0.25mm to 1.0mm) to avoid overpressure or suspension. During dynamic adjustment, multi-point pressure sensing can be used to accurately identify the pressure imbalance caused by the offset, partial suspension or tilt of the mask. The air is automatically inflated / deflated according to the sensor feedback, and the deformation of the buffer tube 8 is adjusted in real time to balance the support pressure. The vibration impact is dynamically offset during transportation, thereby reducing the risk of collision between the mask and the inner wall of the cavity.

[0029] It should be further explained that the mask of this embodiment is fixed in the vertical direction by the base support platform 4 and the upper cover support platform 6, and a buffer tube 8 is provided on the base support platform 4 to flexibly support and dynamically adjust the mask. Figure 3 As shown, a flat touch panel 9 made of a flexible material is also provided on the upper cover support platform 6. The flat touch panel 9 prevents the upper cover support platform 6 from directly pressing against the mask rigidly, thereby avoiding extrusion and damage to the mask.

[0030] Specifically, as mentioned above, a plurality of base support platforms 4 are arranged in the base module 1 of the present embodiment, and a dynamic buffer mechanism is correspondingly arranged in each of the base support platforms 4. A plurality of groups of dynamic buffer mechanisms are linked to realize dynamic support adjustment of the mask plate, and the linkage mechanism enables each support point to be synchronously inflated / deflated according to the pressure sensor data to jointly offset the multi-dimensional vibration impact during transportation, thereby realizing precise compensation and self-balancing in use. For the uneven weight distribution of the mask plate itself (such as a mask plate with a metal frame), the linkage adjustment can differentially distribute the supporting force to avoid local collapse, and when the pressure in a certain area is abnormal (such as the tilt of the mask plate causing the pressure on one side to increase), the linkage adjustment can quickly balance the overall supporting force to prevent the mask plate from deformation.

[0031] Reference Figure 6 As shown, a limit slot plate 10 is provided on the limit platform 5, and the limit slot plate 10 is slidably set on the limit platform 5. The relative positions of the limit slot plate 10 and the limit platform 5 are fixed by adjusting bolts 11. The position of the limit slot plate 10 can be adjusted by sliding, and can be compatible with masks of different widths (such as 5 inches to 7 inches) without replacing parts, so that a single storage device can be adapted to masks of multiple specifications, reducing the number of equipment configurations, and is particularly suitable for semiconductor production lines with multiple varieties and small batches. In addition, after the adjusting bolts 11 are locked, the position of the limit slot plate 10 is fixed to avoid displacement during transportation and resulting in clamping failure.

[0032] Specifically, the end of the limit slot plate 10 toward the mask plate protrudes from the limit platform 5, and is provided with a limit slot capable of accommodating the mask plate. The limit slot plate 10 protrudes from the limit platform 5, and a limit slot is formed at the end, so that the mask plate can be inserted into the limit slot from the side, and the mask plate can be limited from both the vertical and horizontal directions to eliminate the degree of freedom.

[0033] Specifically, in this embodiment, the limit slot plate 10 is also in direct contact with the mask plate. Therefore, a flexible component 12 (such as silicone or polyurethane) is provided on the inner wall of the limit slot. The flexible component 12 is in contact with the mask plate. The flexible component 12 can absorb vibration energy to avoid hard collision between the mask plate and the limit slot plate 10.

[0034] In actual use, the inventor found that in order to place the mask, it is necessary to first adjust the limit card slot plate 10 to avoid the mask, and after placing the mask on the base support platform 4, manually adjust the limit card slot plate 10 to move toward the mask so that the side of the mask is inserted into the limit card slot of the limit card slot plate 10. This operation is cumbersome and complicated. In actual operation, the operator is prone to forget, resulting in the situation that the fixation is not in place. Therefore, in order to further improve the storage device of the present invention and make it more convenient to use in actual applications, refer to Figure 7As shown, in this embodiment, the base support platform 4 is slidably arranged in the base module 1 along the vertical direction, and the limit platform 5 is slidably arranged in the base module 1 along the horizontal direction. At the same time, a linkage mechanism is also arranged in the base module 1 to realize the synchronous action of the base support platform 4 and the limit platform 5. The linkage mechanism includes: an elastic member 13, an inclined plane transmission block 14, a bidirectional lead screw 15 and a worm gear assembly 16, wherein: the elastic member 13 is used to elastically support the base support platform 4 so that the base support platform 4 can float up and down in the base module 1. Before the mask is placed on the base support platform 4, the elastic member 13 supports the base support platform 4 in a high position. The inclined plane transmission block 14 is arranged below the base support platform 4. Cooperating with the bevel cut at the bottom of the base support platform 4, after the mask is placed on the base support platform 4, the base support platform 4 compresses the elastic part 13 after the pressure of the mask drops, and at the same time can push the inclined plane transmission block 14 to move horizontally, and the bidirectional lead screw 15 passes through the inclined plane transmission block 14. When the inclined plane transmission block 14 moves horizontally, the horizontal power of the inclined plane transmission block 14 can be converted into the rotational power of the bidirectional lead screw 15 through the bidirectional lead screw 15. The bidirectional lead screw 15 is connected to the turbine in the worm gear assembly 16. The rotation of the bidirectional lead screw 15 can drive the worm wheel to rotate. The worm in the worm gear assembly 16 is connected to the limit platform 5, and then the rotational power of the bidirectional lead screw 15 is converted into the horizontal thrust to push the limit platform 5 to move through the worm gear assembly 16.

[0035] By adopting the linkage mechanism of this embodiment, when placing the mask, the base support platform 4 is pressed down to automatically trigger the limit platform 5 to clamp, thereby realizing the synchronous action of the base support platform 4 and the limit platform 5, improving the operational efficiency and reliability of mask storage, and avoiding the situation where the limit platform 5 fails to clamp the mask due to operator error.

[0036] In other embodiments, other linkage modes may also be provided, for example, a transmission mode of connecting rods and gears, or a transmission mode of induction and electric control, all of which can realize synchronous movement of the base support platform 4 and the limit platform 5.

[0037] Specifically, the mask is an optical etching plate, and its surface is coated with different types of photoresists. The photosensitivity range of these photoresists is between 13.5-500nm. Light within the photosensitivity range will produce a chemical reaction with the photoresist, resulting in abnormal mask quality. However, during transportation, it is also necessary to observe the state of the mask in the storage device. Therefore, the mask storage device of the present invention is also provided with a photosensitive protection mechanism. Figure 1As shown, the photosensitive protection mechanism includes a top filter plate 17 and a side observation window 18 arranged on the upper cover template. The top filter plate 17 and the side observation window 18 both adopt a multi-layer composite film structure, including a 570-590nm wavelength selective light-transmitting layer, which only allows 570-590nm yellow light to pass through (photolithography process safety wavelength), completely blocks ultraviolet light (<400nm) and high-energy blue light (450-500nm), and prevents pre-exposure of photoresist or oxidation of chromium film.

[0038] Specifically, in order to facilitate the handling and movement of the storage device, refer to Figure 1 As shown, the mask storage device of the present invention is further provided with a transport mechanism, and the transport mechanism includes a handle 19 and a roller 20 provided on the base module 1 and the upper cover module 2 .

[0039] Specifically, the base module 1 and the upper cover module 2 can be disassembled and assembled. Figure 8 As shown, taking the splicing of the base module 1 as an example, the base module 1 includes a base frame 101 and a base corner 102, a base connection hole is opened in the base frame 101, and a base connection boss is provided on the base corner 102, and the base connection boss can be inserted into the base connection hole to realize the splicing of the base frame 101 and the base corner 102; Similarly, the upper cover module 2 includes an upper cover frame and an upper cover corner. An upper cover connecting hole is opened in the upper cover frame, and an upper cover connecting boss is arranged on the upper cover corner. The upper cover connecting boss can be inserted into the upper cover connecting hole to realize the splicing of the upper cover frame and the upper cover corner.

[0040] Furthermore, in order to improve the supporting performance of the base module 1 , a base middle lining plate 103 and a base reinforcement beam 104 are also provided in the base module 1 , which can improve the supporting strength of the base module 1 .

[0041] The base module 1 and the upper cover module 2 are made of detachable splicing, and can be quickly assembled to adapt to storage devices for masks of different sizes (such as 6 inches to 12 inches) by increasing or decreasing the number of frames or adjusting the corner connections. During maintenance, only damaged frames or corners need to be replaced, reducing maintenance costs.

[0042] Specifically, during actual storage and transportation, multiple mask storage devices need to be stacked and placed. Fig. 9 As shown, the top of the upper cover module 2 is provided with a circle of beveled bosses 21, and the bottom of the base module 1 is provided with a circle of beveled pits 22. When multiple storage devices are stacked, the beveled bosses 21 and the beveled pits 22 are coupled with each other to ensure the stability of the stacking.

[0043] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the present invention.

Claims

1. A mask storage device, characterized in that: include: A base module and an upper cover module are separately arranged, wherein the base module and the upper cover module are buckled together to form a cavity for storing the mask; The base module is provided with a base support platform for supporting the mask and a limit platform for clamping and fixing the mask. The upper cover module is provided with an upper cover support platform corresponding to the position of the base support platform. The base support platform and the upper cover support platform cooperate to limit the mask in the vertical direction, and the limit platform limits the mask in the horizontal direction. A dynamic sealing mechanism comprises a sealing strip arranged at a frame position of the base module and a buckle assembly connecting the base module and the upper cover module, wherein the buckle assembly comprises a spring buckle and a buckle hook respectively arranged on the base module and the upper cover module, wherein when the base module is buckled with the upper cover module, the upper cover module contacts the sealing strip, and when the spring buckle and the buckle hook are buckled, the sealing strip is squeezed to deform, so that the upper cover support platform contacts the mask plate, and the spring buckle is provided with a nonlinear elastic member, wherein the nonlinear elastic member has at least two-stage stiffness, and its stiffness becomes stronger as the stretching amount increases, and the nonlinear elastic member provides a dynamic sealing force according to the stretching amount.

2. The mask storage device according to claim 1, characterized in that: Also includes: A dynamic buffer mechanism is arranged in the base support platform and is used to adjust the support force of the mask. The dynamic buffer mechanism includes: A buffer tube embedded in the base support platform and capable of being inflated and deformed, wherein a groove for accommodating the buffer tube is provided on the base support platform, and the top surface of the buffer tube protrudes from the groove. After the buffer tube is inflated, the height protruding from the groove can be adjusted; A pressure sensor array for detecting the force on the buffer tube, wherein the pressure sensor array is embedded in the bottom of the groove; A pneumatic adjustment mechanism is communicated with the inner cavity of the buffer tube, and when the pressure sensor array detects a pressure change, the pneumatic adjustment mechanism is triggered to change the deformation amount of the buffer tube.

3. The mask storage device according to claim 2, characterized in that: A plurality of base support platforms are arranged in the base module, and a dynamic buffer mechanism is arranged in each of the base support platforms. The plurality of groups of dynamic buffer mechanisms are linked to realize dynamic support adjustment of the mask.

4. The mask storage device according to claim 1, characterized in that: The limiting platform is provided with a limiting slot plate, the limiting slot plate is slidably arranged on the limiting platform, and the relative positions of the limiting slot plate and the limiting platform are fixed by adjusting bolts; The end of the limit slot plate facing the mask plate protrudes from the limit platform and is provided with a limit slot capable of accommodating the mask plate; A flexible member is arranged on the inner wall of the position limiting slot, and the flexible member is in contact with the mask plate.

5. The mask storage device according to claim 1, characterized in that: A plurality of groups of limit platforms are arranged in the base module, and the plurality of groups of limit platforms are arranged on different frames of the base module around the mask respectively, and the plurality of groups of limit platforms clamp and fix the mask from different directions.

6. The mask storage device according to claim 1, characterized in that: Also includes: A linkage mechanism is arranged in the base module, the base support platform is slidably arranged in the base module along the vertical direction, and the limit platform is slidably arranged in the base module along the horizontal direction. The linkage mechanism is used to realize the synchronous action of the base support platform and the limit platform, and the linkage mechanism includes: An elastic member, used for elastically supporting the base support platform so that the base support platform can float up and down in the base module; An inclined plane transmission block is matched with the bevel cut of the bottom of the base support platform, and the base support platform can push the inclined plane transmission block to move horizontally after the pressure of the mask plate decreases; A bidirectional lead screw passes through the inclined plane transmission block and converts the horizontal power of the inclined plane transmission block into the rotational power of the bidirectional lead screw; A worm gear assembly, wherein the worm wheel is connected to the bidirectional lead screw, and the worm is connected to the limit platform. The worm gear assembly converts the rotational power of the bidirectional lead screw into a horizontal thrust that drives the limit platform to move.

7. The mask storage device according to claim 1, characterized in that: Also includes: The photosensitive protection mechanism comprises a top filter plate and a side observation window arranged on the upper cover template, wherein the top filter plate and the side observation window both adopt a multi-layer composite film structure and comprise a 570-590nm wavelength selective light transmission layer.

8. The mask storage device according to claim 1, characterized in that: It also includes a carrying mechanism, which includes a handle and rollers arranged on the base module and the upper cover module.

9. The mask storage device according to claim 1, characterized in that: The base module and the upper cover module can be disassembled and spliced; The base module includes a base frame and a base corner, the base frame is provided with a base connection hole, the base corner is provided with a base connection boss, and the base connection boss can be inserted into the base connection hole to achieve the splicing of the base frame and the base corner; The upper cover module includes an upper cover frame and an upper cover corner. An upper cover connecting hole is opened in the upper cover frame. An upper cover connecting boss is arranged on the upper cover corner. The upper cover connecting boss can be inserted into the upper cover connecting hole to realize the splicing of the upper cover frame and the upper cover corner.

10. The mask storage device according to claim 1, characterized in that: The top of the upper cover module is provided with a beveled boss which surrounds a circle, and the bottom of the base module is provided with a beveled pit which surrounds a circle. When multiple storage devices are stacked, the beveled boss and the beveled pit are coupled to each other.

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