Vacuum magnetic levitation voice coil motor and magnetic levitation force compensation method

Abstract

The invention provides a vacuum magnetic levitation voice coil motor and a magnetic levitation force compensation method, and relates to the technical field of voice coil motors. The vacuum magnetic levitation voice coil motor provided by the invention comprises a stator module and a mover module, the stator module comprises a stator shell and a stator coil arranged in an accommodating space of the stator shell, and the stator coil is provided with a coil side surface and a coil periphery; wherein a first flow channel for a cooling medium to flow is formed between the stator coil and the inner wall of the stator shell, and the first flow channel covers at least one part of the coil side surface of the stator coil and / or at least one part of the periphery of the coil; the bottom of the accommodating space extends upwards to form a coil mounting shoulder, and the stator coil is arranged on the coil mounting shoulder; the coil mounting shoulder separates a portion of the accommodation space to form a C-shaped portion in the first flow channel. The coil mounting shoulder enables a part of the first flow channel to form a C shape, so that the cooling medium can fully exchange heat with the stator coil.

Description

Technical Field

[0001] The present specification relates to the technical field of voice coil motors, and in particular to a vacuum magnetic levitation voice coil motor and a magnetic levitation force compensation method thereof. Background Art

[0002] In relevant usage scenarios in the field of semiconductor manufacturing and testing, some processes need to be completed in a vacuum environment. Due to the thin air in a vacuum environment, the heat dissipation path of the heating element mainly relies on heat conduction, and the coil assembly, as the heat source of the vacuum motion mechanism, needs to be actively cooled. In some related embodiments, the coil assembly can be air-cooled or cooled by a cooling plate, but the cooling medium involved in air cooling and cooling plate cooling is not in direct contact with the coil assembly. The heat generated by the coil assembly needs to be first conducted to the cooling assembly, and then the cooling assembly takes away the heat to achieve heat dissipation. In the cooling scheme using air cooling or cooling plate cooling, since the heat generated by the coil assembly needs to be transferred through multiple media such as the shell filling medium and the shell, the heat transfer path is long, resulting in limited heat dissipation capacity. Summary of the invention

[0003] One or more embodiments of the present specification provide a vacuum magnetic levitation voice coil motor, comprising: a stator module and a mover module, the mover module comprising: two mover back irons located on both sides of the stator module, a mover magnet arranged on the mover back iron, and a mover bracket connecting the two mover back irons; the stator module comprises: a stator shell and a stator coil arranged inside the accommodating space of the stator shell, the stator coil having a coil side and a coil periphery; wherein a first flow channel for cooling medium to flow is formed between the stator coil and the inner wall of the stator shell, the first flow channel covers at least a portion of the coil side of the stator coil and / or at least a portion of the coil periphery; the bottom of the accommodating space extends upward to form a coil mounting shoulder, the stator coil is arranged on the coil mounting shoulder; the coil mounting shoulder separates a portion of the accommodating space to form a C-shaped portion in the first flow channel.

[0004] In some embodiments, the stator housing is formed with a second flow channel for the cooling medium to flow, and the second flow channel surrounds the accommodating space.

[0005] In some embodiments, the stator housing includes: a stator base plate, a stator frame arranged on the stator base plate, and a sealing cover plate covering the stator frame, wherein the stator frame and the sealing cover plate together form the accommodating space; a cooling medium inlet and a cooling medium outlet connected to the accommodating space are opened on the stator base plate.

[0006] In some embodiments, the coil mounting shoulder is located between the cooling medium inlet and the cooling medium outlet.

[0007] In some embodiments, the stator module further includes: a magnetic buoyancy force adjustment mechanism; the magnetic buoyancy force adjustment mechanism includes a magnetic buoyancy force magnet, the magnetic buoyancy force magnet is used to provide magnetic buoyancy force to the mover module based on the mover magnet, and at least a part of the component of the magnetic buoyancy force is opposite to the load of the mover module.

[0008] In some embodiments, the magnetic levitation force adjustment mechanism also includes: a magnetic levitation force coil, which is surrounded by the magnetic levitation force magnet; the magnetic levitation force coil and the magnetic levitation force magnet as a whole are used to provide dynamic magnetic levitation force to the mover module based on the mover magnet, and at least a part of the component of the dynamic magnetic levitation force is opposite to the load of the mover module; in the dynamic magnetic levitation force, the magnetic levitation force provided by the magnetic levitation force coil is adjusted based on the position of the mover module relative to the stator module.

[0009] In some embodiments, the vacuum magnetic levitation voice coil motor also includes: a force sensor and a drive output unit; the force sensor is used to obtain the force between the mover module and the driven component driven by the mover module; the drive output unit is used to provide a control signal corresponding to the amplitude change of the force to the magnetic levitation coil based on the amplitude change of the force, so that the magnetic levitation coil and the magnetic levitation magnet provide the dynamic magnetic levitation force.

[0010] In some embodiments, the magnetic levitation force regulating mechanism further includes: a coil bracket, the coil bracket is provided with a magnetic levitation force magnet slot, the magnetic levitation force magnet is arranged inside the magnetic levitation force magnet slot, and the magnetic levitation force coil surrounds the coil bracket.

[0011] In some embodiments, one or more coil support locating pins are fixedly disposed inside the stator housing, and a coil support locating pin hole matching the coil support locating pin is opened on the coil support, and the coil support is relatively fixed to the stator housing through the coil support locating pin.

[0012] In some embodiments, the stator coil surrounds the magnetic buoyancy regulating mechanism, and an insulating thermally conductive filler is provided between the stator coil and the magnetic buoyancy regulating mechanism; a gap is provided between the insulating thermally conductive filler and an inner wall of the accommodating space.

[0013] In some embodiments, the mover magnet includes a T-shaped magnet and a central magnet: the T-shaped magnet is mirror-symmetrical with respect to a first plane, and the central magnet is disposed between two T-shaped magnets; the first plane is perpendicular to the movement direction of the mover module.

[0014] In some embodiments, the stator base plate is further provided with a lead-out module for leading out a wire harness inside the stator housing.

[0015] In some embodiments, sealing grooves are provided at both the cooling medium inlet and the cooling medium outlet; the sealing grooves are dovetail grooves or rectangular grooves, and a sealing structure is arranged in the sealing grooves; and the stator frame is integrally formed by using non-magnetic materials.

[0016] One or more embodiments of the present specification provide a vacuum magnetic levitation voice coil motor, comprising: a stator module and a mover module, wherein the mover module comprises: two mover back irons arranged on both sides of the stator module, a mover magnet arranged on the mover back iron, and a mover bracket connecting the two mover back irons; the stator module comprises: a stator shell, a stator coil arranged inside the accommodating space of the stator shell, and a magnetic levitation force adjustment mechanism arranged inside the accommodating space of the stator shell; the magnetic levitation force adjustment mechanism comprises: the magnetic levitation force magnet and the magnetic levitation force coil, the magnetic levitation force coil surrounding the magnetic levitation force magnet; the magnetic levitation force coil and the magnetic levitation force magnet are used to provide dynamic magnetic levitation force to the mover module based on the mover magnet, and at least a part of the component force of the dynamic magnetic levitation force is opposite to the load of the mover module; in the dynamic magnetic levitation force, the magnetic levitation force provided by the magnetic levitation force coil is adjusted based on the position of the mover module relative to the stator module.

[0017] One or more embodiments of the present specification provide a method for compensating the magnetic levitation force of a vacuum magnetic levitation voice coil motor, wherein the vacuum magnetic levitation voice coil motor comprises a stator module and a mover module, wherein the stator module comprises a magnetic levitation magnet and a magnetic levitation coil surrounding the magnetic levitation magnet; the magnetic levitation force compensation method comprises: obtaining the acting force between the mover module of the vacuum magnetic levitation voice coil motor and a driven component driven by the mover module; and providing a control signal corresponding to the amplitude change of the acting force to the magnetic levitation coil based on the amplitude change of the acting force, so that the magnetic levitation coil and the magnetic levitation magnet provide dynamic magnetic levitation force to the mover module.

[0018] The beneficial effects that may be brought about by the embodiments of this specification include but are not limited to: (1) the cooling medium in the first flow channel is in direct contact with the stator coil, the cooling path is short, and the cooling efficiency is high; (2) the first flow channel is compatible with liquid cooling medium and gas cooling medium; (3) the first flow channel and the second flow channel can cool the interior of the accommodating space and the outer wall of the stator shell respectively, which can improve the cooling efficiency of the cooling system; (4) the coil mounting shoulder provides a mounting structure for the stator coil and separates the accommodating space at the same time, so that a part of the first flow channel forms a C shape, so that the cooling medium can fully exchange heat with the stator coil; (5) magnetic levitation force is provided by magnetic levitation magnets to compensate for the gravity of the mover module; (6) dynamic magnetic levitation force is provided by the magnetic levitation coil and the magnetic levitation magnet to compensate for the gravity of the mover module, and the compensation force can be adjusted according to demand; (7) the dynamic magnetic levitation force is adjusted by the magnetic levitation coil and the magnetic levitation magnet to avoid the mover module from being affected by the mover module due to the distance. The problem of reduced magnetic levitation force; (8) The force between the mover module and the driven component is obtained through a force sensor, and the dynamic magnetic levitation force is adjusted through the drive output unit based on the force to achieve dynamic real-time adjustment of magnetic levitation force compensation; (9) The coil bracket is positioned through the coil bracket positioning pin, and the magnetic levitation magnet and the magnetic levitation coil are fixed through the arrangement of the coil bracket; (10) The heat generated by the stator coil and the magnetic levitation force adjustment mechanism is balanced by arranging an insulating thermal conductive filler; (11) The gap between the insulating thermal conductive filler and the inner wall of the accommodating space allows the cooling medium to pass through, thereby allowing the cooling medium to contact the magnetic levitation force adjustment mechanism and take away the heat that may be generated by the magnetic levitation force adjustment mechanism; (12) The magnetic field of the T-shaped magnet is strengthened by arranging a central magnet; (13) The wiring harness of the stator coil and / or the magnetic levitation force coil is led out through a lead-out module; (14) The outgassing rate of the motor in a vacuum environment is reduced by the design of the sealing groove, the material selection of the stator frame and the processing design. It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] This specification will be further explained by way of exemplary embodiments, which will be described in detail by way of the accompanying drawings. The same numbers in the drawings represent the same structures or steps.

[0020] Figure 1 It is a schematic diagram of a vacuum magnetic levitation voice coil motor according to some embodiments of the present specification.

[0021] Figure 2 It is a schematic side cross-sectional view of a vacuum magnetic levitation voice coil motor according to some embodiments of the present specification.

[0022] Figure 3Schematic diagram of an exploded view of a stator module of a vacuum magnetic levitation voice coil motor according to some embodiments of the present specification.

[0023] Figure 4 It is an exploded schematic diagram of a mover module of a vacuum magnetic levitation voice coil motor according to some embodiments of this specification.

[0024] Figure 5 , Figure 6 It is a schematic diagram of the stator base plate and stator frame of the vacuum magnetic levitation voice coil motor shown in some embodiments of this specification.

[0025] Figure 7 It is a schematic cross-sectional view of a stator base plate and a stator frame of a vacuum magnetic levitation voice coil motor according to some embodiments of the present specification.

[0026] Figure 8 It is a schematic diagram of the first flow channel of the vacuum magnetic levitation voice coil motor shown in some embodiments of the present specification.

[0027] Fig. 9 It is a schematic diagram of the second flow channel of the vacuum magnetic levitation voice coil motor shown in some embodiments of the present specification.

[0028] Fig.10 It is a schematic diagram of the first flow channel and the second flow channel of the vacuum magnetic levitation voice coil motor shown in some embodiments of the present specification.

[0029] Fig.11 It is a curve diagram showing the relationship between the dynamic magnetic levitation force and the input current of the vacuum magnetic levitation voice coil motor shown in some embodiments of this specification.

[0030] Fig.12 It is a schematic diagram of the magnetization direction of each magnet of the vacuum magnetic levitation voice coil motor shown in some embodiments of this specification.

[0031] Fig.13 yes Fig.12 Schematic diagram of the forces acting on the corresponding magnets and magnetic buoyancy adjustment mechanism.

[0032] Fig.14 It is a schematic diagram of the magnetization direction of each magnet of the vacuum magnetic levitation voice coil motor shown in other embodiments of this specification.

[0033] Fig.15 yes Fig.14 Schematic diagram of the forces acting on the corresponding magnets and magnetic buoyancy adjustment mechanism.

[0034] Markings in the figure: 1 stator module; 11 stator housing; 111 first flow channel; 112 second flow channel; 113 stator bottom plate; 114 stator frame; 115 sealing cover plate; 116 cooling medium inlet; 117 cooling medium outlet; 118 coil mounting shoulder; 119 lead wire module; 12 stator coil; 13 magnetic levitation force adjustment mechanism; 131 magnetic levitation force magnet; 132 magnetic levitation force coil; 133 coil bracket; 1331 coil bracket locating pin; 1332 coil bracket locating pin hole; 14 insulating thermal conductive filler; 2 mover module; 21 mover back iron; 22 mover magnet; 221 T-shaped magnet; 222 center magnet; 23 mover bracket; 3 force sensor. DETAILED DESCRIPTION

[0035] In order to more clearly illustrate the technical solutions of the embodiments of this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the contents described below are some examples or embodiments of this specification. For ordinary technicians in this field, without paying creative work, the technical solutions or means disclosed in this specification can also be applied to other scenarios based on these technical contents.

[0036] It should be understood that the "system", "device", "equipment", "part" and / or "piece", "unit" and / or "module" used in this specification are a method for distinguishing different components, elements, parts, portions or assemblies at different levels. However, if other words can achieve the same purpose, the words can be replaced by other expressions.

[0037] Unless otherwise specified, technical terms used in this specification to describe components, elements, etc. do not refer to the singular, but may also include the plural. Generally speaking, terms such as "include", "comprise", etc. only indicate that the steps, elements, or components that have been clearly identified are included, and these steps, elements, and components do not constitute an exclusive list, such as the method or device described may also include other steps or components.

[0038] In the description of this specification, it should be understood that the description of orientation, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In the description of this specification, unless otherwise clearly defined, the terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meaning of the above terms in this specification in combination with the specific content of the technical solution.

[0039] In the use scenarios related to semiconductor manufacturing and testing, some processes need to be completed in a vacuum environment. Since the air in a vacuum environment is thin, the heat dissipation of the heating element mainly relies on heat conduction, and the coil assembly, as the heat source of the vacuum motion mechanism, needs to be actively cooled. In some related embodiments, the coil assembly can be cooled by air or a cooling plate, but the cooling medium involved in air cooling and cooling plate cooling is not in direct contact with the coil assembly. The heat generated by the coil assembly needs to be first conducted to the cooling assembly, and then the cooling assembly takes away the heat to achieve heat dissipation.

[0040] In some related embodiments, a vacuum motion mechanism (such as a vacuum magnetic levitation voice coil motor) may include a stator module and a mover module that moves relative to the stator module. The mover module can be suspended relative to the stator module based on magnetic force to achieve contactless support and eliminate mechanical friction. In some related embodiments, the stator module may include a coil assembly, a shell disposed outside the coil assembly, and a shell filling medium disposed between the coil assembly and the shell. In the above-mentioned cooling scheme using air cooling or cooling plate cooling, since the heat generated by the coil assembly needs to be transferred through multiple media such as the shell filling medium and the shell, the heat transfer path is long, resulting in limited heat dissipation capacity.

[0041] Therefore, it is very important to effectively and reasonably maximize the cooling efficiency of the motor cooling system and effectively control the overall temperature rise of the motor and the platform. One or more embodiments of the present specification provide a vacuum magnetic levitation voice coil motor, which can directly cool the coil assembly without the need for heat transfer through the shell filling medium, the shell and other media, and has a shorter heat transfer path and higher cooling efficiency.

[0042] Figure 1 is a schematic diagram of a vacuum magnetic levitation voice coil motor according to some embodiments of this specification, Figure 2 is a schematic side cross-sectional view of a vacuum magnetic levitation voice coil motor according to some embodiments of the present specification, Figure 3 is an exploded schematic diagram of a stator module of a vacuum magnetic levitation voice coil motor according to some embodiments of this specification, Figure 4 is an exploded schematic diagram of a mover module of a vacuum magnetic levitation voice coil motor according to some embodiments of this specification. Figures 1 to 4 As shown, in one or more embodiments of the present specification, the vacuum magnetic levitation voice coil motor may include: a stator module 1 and a mover module 2, and the mover module 2 may move relative to the stator module 1 to drive the movement of an external mechanism. In some embodiments, the mover module 2 may be suspended relative to the stator module 1 based on magnetic force to achieve contactless support and eliminate mechanical friction. In some embodiments, the mover module 2 is relative to the stator module 1. Figure 3There are gaps in the X-axis direction, the Y-axis direction and the Z-axis direction. In some embodiments, the mover module 2 can produce relative displacement with the stator module 1 under electromagnetic action. In some embodiments, the mover module 2 may include: two mover back irons 21 located on both sides of the stator module 1, a mover magnet 22 provided on the mover back iron 21, and a mover bracket 23 connecting the two mover back irons 21. In some embodiments, a corresponding mover magnet 22 is arranged on each mover back iron 21.

[0043] In some embodiments, the outer side of the mover back iron 21 has a mounting hole that is mechanically fixed to the mover bracket 23. In some embodiments, the mover back iron 21 and the mover bracket 23 can be made of magnetic conductive materials with high magnetic permeability. In some embodiments, the surface of the mover back iron 21 is coated with a single layer or multiple layers of high vacuum applicability film. In some embodiments, the mover magnet 22 can be bonded to the mover back iron 21. In some embodiments, the mover back iron 21 is a magnetic conductive material, and the mover back iron 21 forms a part of the magnetic circuit of the magnet. In some embodiments, the mover back iron 21 also plays a role in enhancing the magnetic field strength at the coil inside the vacuum magnetic levitation voice coil motor.

[0044] In some embodiments, the upper end of the mover back iron 21 is flush with the upper surface of the mover bracket 23 to form a C-shaped structure. In some embodiments, the upper end of the mover back iron 21 may protrude from the upper surface of the mover bracket 23 to form an H-shaped structure.

[0045] In some embodiments, in order to reduce the leakage flux density of the vacuum motor, the mover bracket 23 can be made of a magnetic material with high magnetic permeability. In some embodiments, the surface of the mover bracket 23 is plated with a single layer or multiple layers of high vacuum applicability film. In some embodiments, the upper surface of the mover bracket 23 is provided with a mover module positioning pin hole for positioning the driven object. In some embodiments, the upper surface of the mover bracket 23 is provided with a mover module fixing installation hole for mounting the driven object.

[0046] In some embodiments, the stator module 1 includes: a stator housing 11 and a stator coil 12 disposed inside a housing space of the stator housing 11, wherein the stator coil 12 has a coil side surface and a coil periphery. Figure 3 As shown, the coil side of the stator coil 12 may include Figure 3 In some embodiments, see Figure 3 As shown, the outer periphery of the stator coil 12 may include Figure 3 In some embodiments, the outer periphery of the stator coil 12 may further include: Figure 3In some embodiments, the stator coil 12 is at least used to cooperate with the mover magnet 22 to provide driving force to the mover module 2.

[0047] In some embodiments, a first flow channel 111 for cooling medium to flow is formed between the stator coil 12 and the inner wall of the stator housing 11 , and the first flow channel 111 covers at least a portion of the coil side surface and / or at least a portion of the coil periphery of the stator coil 12 .

[0048] In some embodiments, the first flow channel 111 can cover at least a portion of the coil side of the stator coil 12. For example, the first flow channel 111 is located on the left side and / or right side of the stator coil 12 for cooling the left side and / or right side of the stator coil 12.

[0049] In some embodiments, the first flow channel 111 can cover a portion or all of the outer circumference of the stator coil 12, for example, the first flow channel 111 surrounds the upper surface, front side and rear side of the stator coil 12, or for example, the first flow channel 111 surrounds the upper surface, lower surface, front side and rear side of the stator coil 12, and is used to cool part of the outer circumference of the stator coil 12 or the entire outer circumference.

[0050] In some embodiments, the first flow channel 111 may also cover the coil side and the coil periphery of the stator coil 12 at the same time. For example, the first flow channel 111 entirely surrounds the outer surface of the stator coil 12 to cool all surfaces involved in the stator coil 12 .

[0051] In some embodiments, the first flow channel 111 covers the left and right sides of the stator coil 12 symmetrically, and the flow resistances of the two are equal. In some embodiments, the first flow channel 111 covers the upper and lower surfaces of the stator coil 12 symmetrically, and the flow resistances of the two are equal.

[0052] In one or more embodiments of the present specification, the stator housing 11 is formed with a second flow channel 112 for the flow of cooling medium, and the second flow channel 112 surrounds the accommodating space. In some embodiments, the first flow channel 111 and the second flow channel 112 are arranged in parallel. In some embodiments, the second flow channel 112 and the first flow channel 111 can be two relatively independent flow channels. In this embodiment, the cooling medium in the second flow channel 112 and the cooling medium in the first flow channel 111 may not be exchanged. In other embodiments, the second flow channel 112 and the first flow channel 111 may also be interconnected through one or more branches. In this embodiment, the cooling medium in the second flow channel 112 and the cooling medium in the first flow channel 111 may be exchanged. In some embodiments, the cooling medium in the second flow channel 112 and the cooling medium in the first flow channel 111 may be provided by the same cooling medium source, or by different cooling medium sources.

[0053] In some embodiments, the cooling medium in the first flow channel 111 can directly cool the stator coil 12, while the cooling medium in the second flow channel 112 can cool the structure outside the stator coil 12 that is in direct or indirect contact with the stator coil 12 (for example, the shell filling medium between the stator shell 11 and the stator coil 12, or for example, the stator shell 11 itself).

[0054] In some embodiments, see Figure 8 As shown, the vacuum magnetic levitation voice coil motor may only include the first flow channel 111 to reduce the volume of the vacuum magnetic levitation voice coil motor and reduce the difficulty of processing and sealing. Fig.10 As shown, the vacuum magnetic levitation voice coil motor may also include the first flow channel 111 and the second flow channel 112 at the same time, thereby improving the cooling efficiency. Fig. 9 As shown, the vacuum magnetic levitation voice coil motor may only include the second flow channel 112 .

[0055] In some embodiments, the first flow channel 111 and / or the second flow channel 112 are connected to a circulating cooling system via an external flow path. In some embodiments, the cooling medium in the first flow channel 111 and / or the second flow channel 112 circulates in one direction.

[0056] In one or more embodiments of this specification, according to different application scenarios of the vacuum magnetic levitation voice coil motor and the cooling efficiency required by the cooling system of the vacuum magnetic levitation voice coil motor, the cooling medium can be a gas cooling medium or a liquid cooling medium. In some embodiments, the gas cooling medium can be a safe, recyclable gas such as high-pressure air and nitrogen that is harmless to the surrounding environment. In some embodiments, the liquid cooling medium can be a recyclable liquid with a high specific heat capacity such as pure water and ethylene glycol.

[0057] In one or more embodiments of the present specification, the stator housing 11 includes: a stator base plate 113, a stator frame 114 disposed on the stator base plate 113, and a sealing cover plate 115 covering the stator frame 114, wherein the stator frame 114 and the sealing cover plate 115 together form an accommodating space.

[0058] In some embodiments, the second flow channel 112 may be formed inside the outer wall of the stator frame 114. In some embodiments, the second flow channel 112 may be sealed by a vacuum welding solution.

[0059] In some embodiments, the stator base plate 113 and the stator frame 114 can be integrally formed using non-magnetic materials suitable for high vacuum. In some embodiments, the integral processing of non-magnetic materials can ensure the processing accuracy of various internal features of the stator base plate 113 and the stator frame 114 without affecting the normal operation of the internal electromagnetic components. In some embodiments, the use of high vacuum suitable materials can reduce the outgassing rate of the stator base plate 113 and the stator frame 114 and improve the vacuum applicability of the motor. In some embodiments, the non-magnetic material can be 316L stainless steel, titanium alloy and other alloys or synthetic materials.

[0060] In some embodiments, the sealing cover plate 115 may be a thin plate structure, used to cooperate with the stator frame 114 to seal other components inside the accommodating space. In some embodiments, the sealing cover plate 115 may be made of the same material as the stator bottom plate 113 and the stator frame 114 .

[0061] In some embodiments, the stator bottom plate 113 may be perpendicular to the stator frame 114 and the sealing cover plate 115. In some embodiments, the stator bottom plate 113 and the stator frame 114 are integrally connected. In some embodiments, the stator bottom plate 113 and the stator frame 114 may be in a Figure 3 In some embodiments, see Figure 3 As shown, the stator bottom plate 113 can be arranged at Figure 3 The lower side of the moving support 23 can be arranged at Figure 3 In this embodiment, the vacuum magnetic levitation voice coil motor can provide Figure 3 In some other embodiments, the vacuum magnetic levitation voice coil motor can also be arranged along the overall horizontal direction in some usage scenarios to provide a driving force in the horizontal direction.

[0062] In some embodiments, stator mounting holes are provided on the stator bottom plate 113. In some embodiments, the stator mounting holes are distributed at the four corners of the stator bottom plate 113. In some embodiments, the stator mounting holes can be countersunk threaded holes. In some embodiments, both sides of the stator bottom plate 113 protrude from the stator frame 114, and the stator mounting holes are provided at the position where the stator bottom plate 113 protrudes from the stator frame 114, so as to be compatible with a top-down mechanical fixing method or a bottom-up mechanical fixing method.

[0063] In some embodiments, a stator frame positioning pin hole is further provided on the bottom surface of the stator bottom plate 113 , and the stator frame positioning pin hole can be used as a mechanical installation position of the stator module 1 , thereby improving the installation accuracy of the stator module 1 .

[0064] In some embodiments, see Figure 2 , Figure 3 As shown, the two mover back irons 21 can be respectively arranged at Figure 3 The left and right sides of the stator frame 114 and the sealing cover plate 115 are provided with respect to the stator frame 114 and the sealing cover plate 115 (eg Figure 2 , Figure 3 The vertical plane in the middle) forms a symmetrical or substantially symmetrical structure, so that the mover magnet 22 on the mover back iron 21 is Figure 3 The horizontal components of force in the fluid can cancel each other out.

[0065] In some embodiments, a cooling medium inlet 116 and a cooling medium outlet 117 connected to the accommodating space are provided on the stator bottom plate 113. In some embodiments, the cooling medium inlet 116 is used to provide cooling medium to the first flow channel 111 and / or the second flow channel 112. In some embodiments, the cooling medium outlet 117 is used to obtain the cooling medium after heat exchange from the first flow channel 111 and / or the second flow channel 112. In some embodiments, the cooling medium inlet 116 and the cooling medium outlet 117 can be provided on the bottom surface of the stator bottom plate 113. In some embodiments, the cooling medium inlet 116 and the cooling medium outlet 117 can be respectively located on both sides of the stator bottom plate 113, for example Figure 3 The front and back sides.

[0066] In some embodiments, a sealing groove is provided at the cooling medium inlet 116 and the cooling medium outlet 117 to seal the pipeline connected to the cooling medium inlet 116 or the cooling medium outlet 117. In some embodiments, the sealing groove can be a dovetail groove or a rectangular groove, and a sealing structure is arranged in the sealing groove. In some embodiments, the sealing groove in the form of a dovetail groove or a rectangular groove can increase the reliability of the sealing structure and the vacuum applicability of the vacuum motor. In some embodiments, the sealing structure can be made of materials such as rubber and polyurethane.

[0067] In one or more embodiments of the present specification, the stator coil 12 is disposed between the stator frame 114 and the sealing cover plate 115. In some embodiments, there is a gap between the stator coil 12 and the side wall of the stator frame 114, and the gap forms a part of the first flow channel 111 to allow the cooling medium to pass between the stator coil 12 and the side wall of the stator frame 114, so that the cooling medium and the stator coil 12 are in contact with each other. Figure 3 In some embodiments, there is a gap between the stator coil 12 and the sealing cover plate 115, and the gap forms a part of the first flow channel 111 to allow the cooling medium to pass between the stator coil 12 and the sealing cover plate 115, so that the cooling medium and the stator coil 12 are in contact with each other. Figure 3 In other embodiments, there are gaps between the stator coil 12 and the side wall of the stator frame 114 and between the stator coil 12 and the sealing cover plate 115.

[0068] In one or more embodiments of the present specification, the stator frame 114 extends upward from the bottom of the accommodating space to form a coil mounting shoulder 118. In some embodiments, the stator coil 12 is disposed on the coil mounting shoulder 118.

[0069] In some embodiments, see Figure 3 , Figure 5 , Figure 7 As shown, the coil mounting shoulder 118 can be a boss extending upward from the bottom of the accommodation space of the stator frame 114, which can serve as a mounting and positioning structure for the stator coil 12, and can also separate the cooling medium in the accommodation space, increase the cooling path and thus increase the cooling efficiency. In some embodiments, the coil mounting shoulder 118 has a platform surface for supporting the stator coil 12, for example Figure 7 In some embodiments, the platform surface of the coil mounting shoulder 118 is Figure 7 The length in the left-right direction is smaller than the length of the stator coil 12 in the Figure 7 In other embodiments, the platform surface of the coil mounting shoulder 118 is Figure 7 The length in the left-right direction matches the length of the stator coil 12 in Figure 7 In some embodiments, the coil mounting shoulder 118 may be in the shape of a rectangle. In some embodiments, the coil mounting shoulder 118 and the bottom of the accommodating space of the stator frame 114 are in an arc transition to guide the flow of the cooling medium and prevent the cooling medium from forming eddies at the corners, which may cause heat accumulation.

[0070] In some embodiments, the coil mounting shoulder 118 is located between the cooling medium inlet 116 and the cooling medium outlet 117. In some embodiments, the cooling medium enters from one side of the coil mounting shoulder 118 and flows out from the other side of the coil mounting shoulder 118.

[0071] In some embodiments, the coil mounting shoulder 118 separates a portion of the accommodation space to form a C-shaped portion in the first flow channel 111. In some embodiments, the C-shaped portion in the first flow channel 111 refers to the first flow channel 111 in the thickness direction of the coil (e.g. Figure 7 In some embodiments, see Figure 7 The dashed line in FIG. 1 shows a C-shaped flow path of the cooling medium. In some embodiments, the first flow channel 111 may further include the aforementioned gap between the stator coil 12 and the stator frame 114 and / or the gap between the stator coil 12 and the sealing cover plate 115 in addition to the C-shaped portion.

[0072] In some embodiments, part or all of the lower surface of the stator coil 12 abuts against the coil mounting shoulder 118, thereby separating the accommodating space, so that the cooling medium entering from the cooling medium inlet 116 cannot leave from the cooling medium outlet 117 from the bottom of the stator coil 12 via a shorter path, and the cooling medium entering from the cooling medium inlet 116 is sequentially discharged along the cooling medium outlet 117. Figure 7 As shown in the dotted line direction in FIG. 1 , the cooling medium passes through a relatively long path and then leaves from the cooling medium outlet 117 , so that sufficient heat exchange can be performed between the cooling medium and the outer peripheral surface of the stator coil 12 .

[0073] In some embodiments, the stator coil 12 can be wound by vacuum-applicable enameled wire. In some embodiments, the stator coil 12 can be a single-layer or multi-layer structure of a racetrack type. In some embodiments, a driving current with adjustable amplitude can be passed through the stator coil 12. Under the excitation of the driving current, the stator coil 12 can generate electromagnetic interaction with the mover module 2, thereby generating a driving force corresponding to the degree of freedom.

[0074] In one or more embodiments of this specification, see Figure 4 As shown, the mover magnet 22 includes a T-shaped magnet 221 and a central magnet 222. In some embodiments, each of the two mover back irons 21 is provided with a T-shaped magnet 221 and a central magnet 222.

[0075] In some embodiments, the T-shaped magnet 221 can be made of neodymium iron boron or samarium cobalt materials with high magnetic energy product, and will be subjected to multi-layer surface treatment to improve its vacuum applicability under different working conditions. In some embodiments, the central magnet 222 is an H magnet. In some embodiments, the magnetic field generated by the central magnet 222 will increase the magnetic induction intensity of the main magnetic field and reduce the leakage flux density of the outer area of ​​the mover back iron 21 after coupling with the magnetic field of the T-shaped magnet 221. In some embodiments, the central magnet 222 can be made of neodymium iron boron or samarium cobalt materials with high magnetic energy product, and will be subjected to multi-layer surface treatment. In some embodiments, the surface treatment method of the central magnet 222 is consistent with the surface treatment method of the T-shaped magnet 221.

[0076] In some embodiments, on the same mover back iron 21, the T-shaped magnet 221 is mirror-symmetrical with respect to the first plane, for example, Figure 4 The first plane A in the embodiment is mirror-symmetrical. In some embodiments, the central magnet 222 is disposed between the two T-shaped magnets 221. In some embodiments, the first plane is perpendicular to the movement direction of the mover module 2 (ie, the movement direction of the mover back iron 21).

[0077] In some embodiments, the magnetization direction of the T-shaped magnet 221 is perpendicular to the plane of the mover back iron 21. In some embodiments, the magnetization direction of the central magnet 222 is parallel to the mover back iron 21.

[0078] Fig.12 Schematic diagram of the magnetization direction of each magnet of the vacuum magnetic levitation voice coil motor according to some embodiments of this specification. Fig.12 As shown, a pair of T-shaped magnets, such as a first T-shaped magnet 911 and a second T-shaped magnet 912, are provided on the left side of the mover back iron 21. In some embodiments, the first T-shaped magnet 911 and the second T-shaped magnet 912 are at an equal distance from the stator coil 12. In some embodiments, another pair of T-shaped magnets, such as a third T-shaped magnet 913 and a fourth T-shaped magnet 914, are provided on the right side of the mover back iron 21. In some embodiments, the third T-shaped magnet 913 and the fourth T-shaped magnet 914 are at an equal distance from the stator coil 12. The first T-shaped magnet 911 and the second T-shaped magnet 912 on the left side are symmetrical with the third T-shaped magnet 913 and the fourth T-shaped magnet 914 on the right side relative to the stator coil plane B where the stator coil 12 is located.

[0079] In some embodiments, see Fig.12 As shown, a left-side central magnet 915 is disposed between the first T-shaped magnet 911 and the second T-shaped magnet 912 , and a right-side central magnet 916 is disposed between the third T-shaped magnet 913 and the fourth T-shaped magnet 914 .

[0080] In some embodiments, the magnetization directions of the two T-shaped magnets symmetrical with respect to the stator coil plane B in the two mover back irons 21 are the same, for example, the magnetization directions of the first T-shaped magnet 911 and the third T-shaped magnet 913 are the same, for example, the magnetization directions of the second T-shaped magnet 912 and the fourth T-shaped magnet 914 are the same. Exemplarily, the magnetization directions of the first T-shaped magnet 911 and the third T-shaped magnet 913 are both Fig.12 In the negative direction of the Y axis, the magnetization directions of the second T-shaped magnet 912 and the fourth T-shaped magnet 914 are both Fig.12 The positive direction of the Y axis.

[0081] In some embodiments, the magnetization directions of the two T-shaped magnets on the same mover back iron 21 are opposite, for example, the magnetization directions of the first T-shaped magnet 911 and the second T-shaped magnet 912 are opposite, for example, the magnetization directions of the third T-shaped magnet 913 and the fourth T-shaped magnet 914 are opposite.

[0082] In the above embodiments, see Fig.12 As shown, the stator coil 12 is arranged in a vertical direction (eg Fig.12 The two T-shaped magnets on the same mover back iron 21 are arranged in the vertical direction (for example Fig.12 Exemplarily, the first T-shaped magnet 911 and the second T-shaped magnet 912 are arranged in the vertical direction, and the third T-shaped magnet 913 and the fourth T-shaped magnet 914 are arranged in the vertical direction.

[0083] Fig.14 Schematic diagram of the magnetization direction of each magnet of the vacuum magnetic levitation voice coil motor according to other embodiments of this specification. Fig.14 As shown, a pair of T-shaped magnets, such as the fifth T-shaped magnet 921 and the sixth T-shaped magnet 922, are provided on the upper side of the mover back iron 21. In some embodiments, the fifth T-shaped magnet 921 and the sixth T-shaped magnet 922 are at an equal distance from the stator coil 12. In some embodiments, another pair of T-shaped magnets, such as the seventh T-shaped magnet 923 and the eighth T-shaped magnet 924, are provided on the lower side of the mover back iron 21. In some embodiments, the seventh T-shaped magnet 923 and the eighth T-shaped magnet 924 are at an equal distance from the stator coil 12. The fifth T-shaped magnet 921 and the sixth T-shaped magnet 922 on the upper side are symmetrical with the seventh T-shaped magnet 923 and the eighth T-shaped magnet 924 on the lower side relative to the stator coil plane C where the stator coil 12 is located.

[0084] In some embodiments, see Fig.14 As shown, an upper center magnet 925 is disposed between the fifth T-shaped magnet 921 and the sixth T-shaped magnet 922 , and a lower center magnet 926 is disposed between the seventh T-shaped magnet 923 and the eighth T-shaped magnet 924 .

[0085] In some embodiments, the magnetization directions of the two T-shaped magnets symmetrical with respect to the stator coil plane C in the two mover back irons 21 are the same, for example, the magnetization directions of the fifth T-shaped magnet 921 and the seventh T-shaped magnet 923 are the same, for example, the magnetization directions of the sixth T-shaped magnet 922 and the eighth T-shaped magnet 924 are the same. Exemplarily, the magnetization directions of the fifth T-shaped magnet 921 and the seventh T-shaped magnet 923 are both Fig.14 In the negative direction of the Y axis, the magnetization directions of the sixth T-shaped magnet 922 and the eighth T-shaped magnet 924 are both Fig.14 The positive direction of the Y axis.

[0086] In some embodiments, the magnetizing directions of the two T-shaped magnets on the same mover back iron 21 are opposite, for example, the magnetizing directions of the fifth T-shaped magnet 921 and the sixth T-shaped magnet 922 are opposite, for example, the magnetizing directions of the seventh T-shaped magnet 923 and the eighth T-shaped magnet 924 are opposite.

[0087] In the above embodiments, see Fig.14 As shown, the stator coil 12 is arranged in a horizontal direction (eg Fig.14 The two T-shaped magnets on the same mover back iron 21 are arranged in the horizontal direction (for example Fig.14 Exemplarily, the fifth T-shaped magnet 921 and the sixth T-shaped magnet 922 are arranged in the horizontal direction, and the seventh T-shaped magnet 923 and the eighth T-shaped magnet 924 are arranged in the horizontal direction.

[0088] In one or more embodiments of the present specification, the stator module 1 further includes: a magnetic levitation force regulating mechanism 13. In some embodiments, the magnetic levitation force regulating mechanism 13 includes a magnetic levitation force magnet 131, and the magnetic levitation force magnet 131 has a constant magnetic field. In some embodiments, the magnetic levitation force magnet 131 is used to provide magnetic levitation force to the mover module 2 (and the object carried by the mover module 2 or the mechanism fixedly connected to the mover module 2) based on the mover magnet 22, and at least a part of the component force of the magnetic levitation force is opposite to the load of the mover module 2.

[0089] In some embodiments, the load of the mover module 2 may include the own weight of the mover module 2. In some embodiments, the load of the mover module 2 may include the own weight of the mover module 2 and the weight of the object carried by the mover module 2. In some embodiments, the load of the mover module 2 may include the own weight of the mover module 2 and the force applied to the mover module 2 by other mechanisms.

[0090] In some embodiments, the direction of the magnetic levitation force provided by the magnetic levitation magnet 131 is opposite to the load direction of the mover module 2. In some embodiments, there is an angle between the direction of the magnetic levitation force provided by the magnetic levitation magnet 131 and the load direction of the mover module 2, and at the same time, a certain component of the direction of the magnetic levitation force provided by the magnetic levitation magnet 131 is opposite to the load direction of the mover module 2.

[0091] Fig.13 yes Fig.12 The corresponding force diagram of each magnet and magnetic buoyancy adjustment mechanism. Fig.12 , Fig.13 As shown, the magnetic buoyancy force regulating mechanism 13 (eg, the magnetic buoyancy force magnet 131 ) is located in the middle of the two mover back irons 21 , and the two mover back irons 21 are arranged in mirror symmetry relative to the plane where the magnetic buoyancy force regulating mechanism 13 is located (eg, the stator coil plane B).

[0092] In some embodiments, see Fig.13 As shown, the direction of the magnetic field provided by the magnetic levitation force regulating mechanism 13 (for example, the magnetization direction of the magnetic levitation force magnet 131) is opposite to the magnetization direction of the two T-shaped magnets located above it, so as to provide an upward repulsive force to the two T-shaped magnets located above it. In some embodiments, the direction of the magnetic field provided by the magnetic levitation force regulating mechanism (for example, the magnetization direction of the magnetic levitation force magnet 131) is the same as the magnetization direction of the two T-shaped magnets located below it, so as to provide an upward attractive force to the two T-shaped magnets located below it. Based on the upward repulsive force and the upward attractive force, an upward magnetic levitation force is provided to the entire mover module 2.

[0093] For example, see Fig.13 As shown, the magnetic buoyancy adjustment mechanism 13 provides a repulsive force F to the upper left to the first T-shaped magnet 911. 911 , while providing a repulsive force F upward to the right to the third T-shaped magnet 913 913 . Repulsion F 911 and repulsive force F 913 The components in the Y-axis direction are equal in magnitude and opposite in direction, so they cancel each other out; the repulsive force F 911 and repulsive force F 913 The component forces in the Z-axis direction have the same direction, so they are superimposed on each other, thereby providing a first upward resultant force (F 第一合力 = F 911 + F 913 ).

[0094] The magnetic buoyancy adjustment mechanism 13 provides an upward and rightward gravitational force F to the second T-shaped magnet 912. 912 , while providing an upward left gravitational force F to the fourth T-shaped magnet 914 914 . Gravity F 912 With gravity F 914The forces in the Y-axis direction are equal in magnitude and opposite in direction, so they cancel each other out; the gravitational force F 912 With gravity F 914 The component forces in the Z-axis direction have the same direction, so they are superimposed on each other, thereby providing a second upward resultant force (F 第二合力 = F 912 + F 914 ).

[0095] The total force (F 总合力 = F 第一合力 + F 第二合力 ) obtains an upward movement tendency, so that the mover module 2 can achieve magnetic levitation under the action of the magnetic levitation force provided by the magnetic levitation force adjustment mechanism 13.

[0096] Fig.15 yes Fig.14 The corresponding force diagram of each magnet and magnetic buoyancy adjustment mechanism. Fig.14 , Fig.15 As shown, the magnetic buoyancy force regulating mechanism 13 (eg, magnetic buoyancy force magnet 131 ) is located in the middle of the two mover back irons 21 , and the two mover back irons 21 are arranged in mirror symmetry relative to the plane where the magnetic buoyancy force regulating mechanism 13 is located (eg, stator coil plane C).

[0097] In some embodiments, see Fig.15 As shown, the magnetic field direction provided by the magnetic levitation force adjustment mechanism 13 (for example, the magnetization direction of the magnetic levitation force magnet 131) provides an upward repulsive force to the two T-shaped magnets located above it. In some embodiments, the magnetic field direction provided by the magnetic levitation force adjustment mechanism (for example, the magnetization direction of the magnetic levitation force magnet 131) provides an upward attractive force to the two T-shaped magnets located below it. Based on the upward repulsive force and the upward attractive force, an upward magnetic levitation force is provided to the entire mover module 2.

[0098] For example, see Fig.15 As shown, the magnetic buoyancy adjustment mechanism 13 provides a repulsive force F upward to the right to the fifth T-shaped magnet 921. 921 , while providing a repulsive force F to the upper left to the sixth T-shaped magnet 922 922 . Repulsion F 921 and repulsive force F 922 The components in the Z-axis direction are equal in magnitude and opposite in direction, so they cancel each other out; the repulsive force F 921 and repulsive force F 922 The component forces in the Y-axis direction have the same direction, so they are superimposed on each other, thereby providing a third upward force (F 第三合力 = F 921 + F 922 ).

[0099] The magnetic buoyancy adjustment mechanism 13 provides an upward left gravitational force F to the seventh T-shaped magnet 923. 923 , while providing an upward rightward gravitational force F to the eighth T-shaped magnet 924 924 . Gravity F 923 With gravity F 924 The force components in the Z-axis direction are equal in magnitude and opposite in direction, so they cancel each other out; the gravitational force F 923 With gravity F 924 The component forces in the Y-axis direction have the same direction, so they are superimposed on each other, thereby providing a fourth upward resultant force (F 第四合力 = F 923 + F 924 ).

[0100] The total force (F 总合力 = F 第三合力 + F 第四合力 ) obtains an upward movement tendency, so that the mover module 2 can achieve magnetic levitation under the action of the magnetic levitation force provided by the magnetic levitation force adjustment mechanism 13.

[0101] In vacuum manufacturing and testing equipment, the motion platform (e.g., vertical displacement platform) needs to ensure that the actuator can achieve nanometer-level precision and ultra-high-speed positioning in a vacuum environment. In some related embodiments, the motion platform of the equipment can adopt a coarse and fine motion combined structural solution (e.g., the motion coupling of a motor with a larger stroke and lower precision and a motor with a smaller stroke and higher precision). In some related embodiments, a high-precision motor (e.g., a vacuum magnetic levitation voice coil motor) needs to complete the high-precision positioning of the vertical drive module of the motion platform (e.g., vertical displacement platform) under the premise of compensating for the vertical drive mass.

[0102] In some relevant usage scenarios, since the distance between the motor and the object to be processed is relatively close, the thermal deformation and thermal drift of the motion platform have a more obvious impact on the overall accuracy of the equipment, and the impact of the motor's heating on the overall thermal deformation and accuracy of the equipment cannot be compensated by the algorithm. Therefore, in some relevant embodiments, a high-precision motor (such as a vertical drive motor or a lateral drive motor) can be used in conjunction with a gravity compensation device to provide gravity compensation for the driven object. The vertical drive motor or the lateral drive motor mainly provides a driving force to drive the vertical motion mechanism for vertical displacement or to drive the lateral motion mechanism for lateral displacement, without providing or providing less force to offset the gravity of the driven object (such as a platform component and an object to be processed, etc.). In other related embodiments, the high-precision motor and the gravity compensation device can also be combined together to form an integrated structure.

[0103] However, the compensation force provided by the gravity compensation device will change with the vertical displacement or lateral displacement. In addition, in vertical drive, the compensation force provided by the gravity compensation device is also difficult to fully match the vertical drive mass in real time. Based on this, in one or more embodiments of the present specification, a vacuum magnetic levitation voice coil motor capable of providing an adjustable compensation force is provided based on the design of the magnetic levitation force adjustment mechanism 13. In some embodiments, a vacuum magnetic levitation voice coil motor capable of fully matching the vertical drive mass in real time is further provided based on the design of the magnetic levitation force adjustment mechanism 13 and the force sensor 3.

[0104] Based on this, in one or more embodiments of the present specification, the vacuum magnetic levitation voice coil motor includes a magnetic levitation force adjustment mechanism 13 with adjustable compensation force, which can dynamically and in real time adjust the gravity compensation (for example, to achieve dynamic and real-time adjustment of the vertical compensation force of the vertical drive motor). In some embodiments, the magnetic levitation force adjustment mechanism 13 includes: a magnetic levitation force magnet 131 and a magnetic levitation force coil 132, and the magnetic levitation force coil 132 surrounds the magnetic levitation force magnet 131. In some embodiments, the magnetic field of the magnetic levitation force coil 132 is superimposed on the magnetic field of the magnetic levitation force magnet 131. In some embodiments, the magnetic levitation force coil 132 and the magnetic levitation force magnet 131 are used as a whole to provide dynamic magnetic levitation force to the mover module 2 based on the mover magnet 22, and at least a part of the component force of the dynamic magnetic levitation force is opposite to the load of the mover module 2.

[0105] In some embodiments, the load of the mover module 2 may include the own weight of the mover module 2. In some embodiments, the load of the mover module 2 may include the own weight of the mover module 2 and the weight of the object carried by the mover module 2. In some embodiments, the load of the mover module 2 may include the own weight of the mover module 2 and the force applied to the mover module 2 by other mechanisms.

[0106] In some embodiments, the direction of the dynamic magnetic levitation force provided by the magnetic levitation coil 132 and the magnetic levitation magnet 131 as a whole is opposite to the load direction of the mover module 2. In some embodiments, there is an angle between the direction of the dynamic magnetic levitation force provided by the magnetic levitation coil 132 and the magnetic levitation magnet 131 as a whole and the load direction of the mover module 2, and at the same time, a certain component of the direction of the dynamic magnetic levitation force provided by the magnetic levitation coil 132 and the magnetic levitation magnet 131 as a whole is opposite to the load direction of the mover module 2.

[0107] In some embodiments, the magnetic levitation magnet 131 provides a first magnetic levitation force to the mover module 2 based on the mover magnet 22, and the magnetic levitation coil 132 provides a second magnetic levitation force to the mover module 2 based on the mover magnet 22. In some embodiments, the first magnetic levitation force and the second magnetic levitation force are superimposed to form the aforementioned dynamic magnetic levitation force. In some embodiments, the magnitude of the second magnetic levitation force provided by the magnetic levitation coil 132 to the mover module 2 based on the mover magnet 22 is variable, adjustable and controllable, thereby achieving dynamic adjustment. In some embodiments, the magnitude of the second magnetic levitation force acting on the mover module 2 is adjusted by adjusting the current intensity of the magnetic levitation coil 132.

[0108] In some embodiments, in the dynamic magnetic levitation force provided to the mover module 2 by the magnetic levitation coil 132 and the magnetic levitation magnet 131 as a whole, the second magnetic levitation force provided by the magnetic levitation coil 132 is adjusted (eg, actively adjusted) based on the position of the mover module 2 relative to the stator module 1 .

[0109] In some embodiments, when the mover module 2 is away from the magnetic levitation magnet 131, the first magnetic levitation force provided by the magnetic levitation magnet 131 to the mover module 2 is reduced because the position and magnetic field of the magnetic levitation magnet 131 are relatively constant. At this time, the second magnetic levitation force provided by the magnetic levitation coil 132 is adjusted to increase the second magnetic levitation force based on the position change of the mover module 2 relative to the stator module 1 (for example, the mover module 2 is away from the stator module 1), so that the dynamic magnetic levitation force is equal to or matches the designed compensation force.

[0110] In some embodiments, when the mover module 2 approaches the magnetic levitation magnet 131, the first magnetic levitation force provided by the magnetic levitation magnet 131 to the mover module 2 increases because the position and magnetic field of the magnetic levitation magnet 131 are relatively constant. At this time, the second magnetic levitation force provided by the magnetic levitation coil 132 is adjusted to reduce the second magnetic levitation force based on the position change of the mover module 2 relative to the stator module 1 (for example, the mover module 2 approaches the stator module 1), so that the dynamic magnetic levitation force is equal to or matches the designed compensation force.

[0111] In some embodiments, matching the dynamic magnetic buoyancy force with the designed compensation force may include: keeping the magnitude of the dynamic magnetic buoyancy force acting on the mover module 2 constant.

[0112] In some embodiments, matching the dynamic magnetic levitation force with the designed compensation force may include: keeping the magnitude of the dynamic magnetic levitation force equal to or in constant proportion to the magnitude of the gravity of the mover module 2 , and keeping the direction of the dynamic magnetic levitation force opposite to the direction of the gravity of the mover module 2 .

[0113] In some embodiments, matching the dynamic magnetic levitation force with the designed compensation force may include: keeping the magnitude of the dynamic magnetic levitation force equal to or in constant proportion to the magnitude of the gravity of the mover module 2 and the components thereon, and keeping the direction of the dynamic magnetic levitation force opposite to the direction of the gravity of the mover module 2 and the components thereon, etc.

[0114] In some embodiments, matching the dynamic magnetic levitation force with the designed compensation force may include: adjusting the magnitude of the dynamic magnetic levitation force based on designed usage requirements, such as increasing or decreasing the dynamic magnetic levitation force.

[0115] In some embodiments, the direction of the second magnetic buoyancy force provided by the magnetic buoyancy coil 132 may be opposite to or the same as the direction of the gravity of the mover module 2 or the direction of the gravity of the mover module 2 and components thereon.

[0116] Exemplarily, the first magnetic levitation force provided by the magnetic levitation magnet 131 to the mover module 2 is greater than the gravity of the mover module 2 or the gravity of the mover module 2 and the components thereon, and the direction of the second magnetic levitation force provided by the magnetic levitation coil 132 is set to be the same as the direction of the gravity of the mover module 2 or the direction of the gravity of the mover module 2 and the components thereon, so that the resultant force of the first magnetic levitation force, the second magnetic levitation force and the load is zero.

[0117] Exemplarily, the first magnetic levitation force provided by the magnetic levitation magnet 131 to the mover module 2 is smaller than the gravity of the mover module 2 or the gravity of the mover module 2 and the components thereon, and the direction of the second magnetic levitation force provided by the magnetic levitation coil 132 is set to be opposite to the direction of the gravity of the mover module 2 or the direction of the gravity of the mover module 2 and the components thereon, so that the resultant force of the first magnetic levitation force, the second magnetic levitation force and the load is zero.

[0118] In some embodiments, the direction of providing the second magnetic levitation force to the mover module 2 is adjusted based on the current direction of the magnetic levitation coil 132 .

[0119] For example, see Fig.12As shown, the current direction of the upper part of the magnetic levitation coil 132 is perpendicular to the paper surface and outward. Since the direction of the magnetic flux lines of the magnetic field in which the upper part of the magnetic levitation coil 132 is located (i.e., the direction of the magnetic flux lines of the first T-shaped magnet 911 and the third T-shaped magnet 913) is to the left, based on the Ampere force principle, the upper part of the magnetic levitation coil 132 is subjected to a downward Ampere force, thereby providing an upward second magnetic levitation force to the mover module 2 when the stator module 1 is fixed. At the same time, the current direction of the lower part of the magnetic levitation coil 132 is perpendicular to the paper surface and inward. Since the direction of the magnetic flux lines of the magnetic field in which the lower part of the magnetic levitation coil 132 is located (i.e., the direction of the magnetic flux lines of the second T-shaped magnet 912 and the fourth T-shaped magnet 914) is to the right, based on the Ampere force principle, the lower part of the magnetic levitation coil 132 is also subjected to a downward Ampere force, thereby providing an upward second magnetic levitation force to the mover module 2 when the stator module 1 is fixed. Conversely, in other embodiments, the current direction of the upper portion of the magnetic levitation coil 132 may be perpendicular to the paper surface and inward, while the current direction of the lower portion of the magnetic levitation coil 132 is perpendicular to the paper surface and outward, thereby providing a second downward magnetic levitation force to the mover module 2 based on a similar principle.

[0120] For example, see Fig.14 As shown, the current direction of the right side of the magnetic levitation coil 132 is perpendicular to the paper surface and outward. Since the direction of the magnetic flux lines of the magnetic field on the right side of the magnetic levitation coil 132 (i.e., the direction of the magnetic flux lines of the fifth T-shaped magnet 921 and the seventh T-shaped magnet 923) is upward, based on the Ampere force principle, the right side of the magnetic levitation coil 132 is subjected to the left Ampere force, thereby providing the second right magnetic levitation force to the mover module 2 when the stator module 1 is fixed. At the same time, the current direction of the left side of the magnetic levitation coil 132 is perpendicular to the paper surface and inward. Since the direction of the magnetic flux lines of the magnetic field on the left side of the magnetic levitation coil 132 (i.e., the direction of the magnetic flux lines of the sixth T-shaped magnet 922 and the eighth T-shaped magnet 924) is downward, based on the Ampere force principle, the left side of the magnetic levitation coil 132 is also subjected to the left Ampere force, thereby providing the second right magnetic levitation force to the mover module 2 when the stator module 1 is fixed. Conversely, in other embodiments, the current direction on the right side of the magnetic levitation coil 132 can be perpendicular to the paper surface and inward, while the current direction on the left side of the magnetic levitation coil 132 is perpendicular to the paper surface and outward, thereby providing a second magnetic levitation force to the left to the mover module 2 based on a similar principle.

[0121] In some embodiments, the principle that the stator coil 12 provides a driving force to the mover module 2 is similar to the principle that the magnetic levitation coil 132 provides a second magnetic levitation force to the mover module 2 , and therefore will not be described in detail.

[0122] In some embodiments, the magnetic levitation magnet 131 and the magnetic levitation coil 132 can be used to provide gravity compensation for a portion of the mover module 2 or the mover module 2 and the components thereon, and the stator coil 12 provides another portion of gravity compensation and driving force. In some embodiments, the magnetic levitation magnet 131 and the magnetic levitation coil 132 can be used to provide all of the gravity compensation for the mover module 2 or the mover module 2 and the components thereon, and the stator coil 12 only needs to provide its driving force.

[0123] In some embodiments, the magnetic levitation coil 132 can be wound by vacuum-suitable enameled wire. In some embodiments, there is a gap between the magnetic levitation coil 132 and the inner walls on both sides of the accommodating space. In some embodiments, the magnetic levitation coil 132 can be a runway-type single-layer or multi-layer structure. In some embodiments, a driving current with adjustable amplitude can be passed through the magnetic levitation coil 132, and the dynamic magnetic field of the magnetic levitation coil 132 is superimposed with the magnetic field of the magnetic levitation magnet 131, and interacts with the magnetic field of the mover module 2 to generate a dynamic and real-time adjustable dynamic magnetic levitation force.

[0124] In some embodiments, taking a vacuum magnetic levitation voice coil motor for realizing vertical drive as an example, the interaction between the magnetic levitation magnet 131 and the mover magnet 22 of the mover module 2 can generate a vertical magnetic levitation compensation force (e.g., a first magnetic levitation force). Ideally, the magnetic levitation compensation force is equal to and opposite to the gravity of the vertical drive mass, but within the vertical stroke range, the output curve of the first magnetic levitation force is a parabola, and the resultant force of the first magnetic levitation force and the gravity changes with the stroke. In some embodiments, the introduction of the magnetic levitation coil 132 can dynamically and real-time adjust the amplitude of the magnetic levitation compensation force of the vertically driven vacuum magnetic levitation voice coil motor (e.g., the amplitude of the resultant force of the first magnetic levitation force and the second magnetic levitation force), so that the dynamic magnetic levitation force within the stroke range can completely compensate for the gravity of the vertical drive mass, thereby improving the control accuracy of the vertical drive module (e.g., the vertically driven vacuum magnetic levitation voice coil motor).

[0125] In some embodiments, the magnetic levitation magnet 131 may be a magnetic levitation magnet steel. In some embodiments, the magnetic levitation magnet steel may be made of high magnetic energy product neodymium iron boron or samarium cobalt material, and may be subjected to multi-layer surface treatment to improve its vacuum applicability under different working conditions.

[0126] In one or more embodiments of the present specification, the vacuum magnetic levitation voice coil motor further includes: a force sensor 3 and a drive output unit. In some embodiments, the force sensor 3 is used to obtain the force between the driven member driven by the mover module 2 and the passive submodule 2, which reflects the force that requires additional real-time compensation, that is, the dynamic magnetic levitation force that the magnetic levitation coil 132 and the magnetic levitation magnet 131 need to provide. In some embodiments, the force sensor 3 feeds back the dynamic magnetic levitation force that requires additional real-time compensation to the drive output unit. In some embodiments, the drive output unit is used to provide a control signal corresponding to the amplitude change of the force to the magnetic levitation coil 132 based on the amplitude change of the force between the driven member driven by the mover module 2 and the passive submodule 2, thereby changing the magnitude of the second magnetic levitation force to change the magnitude of the dynamic magnetic levitation force provided by the magnetic levitation coil 132 and the magnetic levitation magnet 131 to the mover module 2 and the driven member.

[0127] In some embodiments, the drive output unit inputs a current with a dynamically changing amplitude to the magnetic levitation coil 132 in real time based on the amplitude change of the dynamic magnetic levitation force provided by the force sensor 3 that requires additional real-time compensation (for example, based on the amplitude change of the second magnetic levitation force provided by the magnetic levitation coil 132 in the dynamic magnetic levitation force). The output magnetic field of the magnetic levitation coil 132 is linearly related to the amplitude of its current. For example, see Fig.11 As shown, from F=BIL (F is Ampere force, B is magnetic induction intensity, I is the current intensity of the magnetic levitation coil 132, and L is the effective length of the magnetic levitation coil 132 in the magnetic field), it can be seen that the second magnetic levitation force provided by the magnetic levitation coil 132 is linearly related to the amplitude of its current.

[0128] In some embodiments, see Figure 2 As shown, the force sensor 3 can be installed on the top of the mover module 2. In some embodiments, the force sensor 3 can be specifically installed on the mover bracket 23. In some embodiments, the mover bracket 23 provides a mounting surface for the driven object, and the force sensor 3 is arranged above the mounting surface and close to the mounting surface.

[0129] In some embodiments, the force sensor 3 may adopt a patch-type structure or a pin-type structure, which has the advantages of small size and easy installation.

[0130] In one or more embodiments of the present specification, the magnetic levitation adjustment mechanism 13 further includes: a coil bracket 133, the coil bracket 133 is provided with a magnetic levitation magnet groove, the magnetic levitation magnet 131 is arranged inside the magnetic levitation magnet groove, and the magnetic levitation coil 132 surrounds the coil bracket 133. In some embodiments, the coil bracket 133 is a strip-shaped structure. In some embodiments, the magnetic levitation magnet groove is opened in the middle of the coil bracket 133, and the size of the magnetic levitation magnet groove is slightly larger than the size of the magnetic levitation magnet 131. In some embodiments, the magnetic levitation magnet groove can pass through the coil bracket 133. In some embodiments, the thickness of the coil bracket 133 is greater than the thickness of the magnetic levitation magnet 131, for example Figure 2 The thickness of the middle coil support 133 in the Y-axis direction is greater than the thickness of the magnetic levitation magnet 131 in the Y-axis direction, so that the position of the magnetic levitation magnet 131 in the coil support 133 can be adjusted during assembly, so that the magnetic levitation magnet 131 can be located in the middle position between the stator frame 114 and the sealing cover plate 115. In some embodiments, the length of the magnetic levitation magnet slot is greater than the length of the magnetic levitation magnet 131.

[0131] In some embodiments, one or more coil support locating pins 1331 are fixedly disposed inside the stator housing 11, and a coil support locating pin hole 1332 matching the coil support locating pin 1331 is provided on the coil support 133, and the coil support 133 is relatively fixed to the stator housing 11 through the coil support locating pin 1331. In some embodiments, two coil support locating pins 1331 are fixedly disposed inside the stator housing 11. In some embodiments, two coil support locating pin holes 1332 are provided on the coil support 133. In some embodiments, the two coil support locating pin holes 1332 are located on both sides of the magnetic buoyancy magnet slot.

[0132] In some embodiments, the coil support 133 is made of insulating material with low electrical conductivity and thermal conductivity. In some embodiments, the coil support 133 is made of high polymer suitable for vacuum, such as ceramic, polytetrafluoroethylene, polyimide, polyetheretherketone, etc.

[0133] In some embodiments, the stator coil 12 surrounds the magnetic buoyancy adjustment mechanism 13, and an insulating thermal conductive filler 14 is disposed between the stator coil 12 and the magnetic buoyancy adjustment mechanism 13. In some embodiments, the insulating thermal conductive filler 14 and the inner wall of the accommodating space (e.g. Figure 3 There is a gap between the inner wall of the stator frame 114 in the Y-axis direction and the inner wall of the sealing cover plate 115 in the Y-axis direction. In some embodiments, the gap between the insulating thermally conductive filler 14 and the inner wall of the accommodating space allows the cooling medium to pass through and allows the cooling medium to contact the magnetic levitation coil 132.

[0134] In some embodiments, the insulating thermally conductive filler 14 is made of a material with extremely low electrical conductivity, extremely high thermal conductivity, and strong remodelability. In some embodiments, the insulating thermally conductive filler 14 can be used as a component for balancing the heat distribution inside the motor, and ideally can make the temperature gradient of the stator coil 12 and the magnetic levitation coil 132 extremely low. In some embodiments, the insulating thermally conductive filler 14 can be filled between the stator coil 12 and the magnetic levitation coil 132 after they are positioned and fixed.

[0135] In some embodiments, see Figure 3 As shown, in the ZoX plane, the stator coil 12, the insulating thermal conductive filler 14, the magnetic levitation coil 132, the coil bracket 133 and the magnetic levitation magnet 131 are sequentially sleeved from outside to inside in the concave cavity of the stator frame 114. In some embodiments, the sealing cover plate 115 is arranged on the top surface of the concave cavity of the stator frame 114 by mechanical fixing or vacuum welding to form a sealed accommodation space.

[0136] In some embodiments, the stator bottom plate 113 is further provided with a lead-out module 119 for leading out the wire harness inside the stator housing 11. In some embodiments, the lead-out module 119 may be located on the side of the bottom of the stator module 1. In some embodiments, the lead-out module 119 is used to lead out the wire harness of the stator coil 12 and / or the wire harness of the magnetic levitation coil 132 inside the stator housing 11. In some embodiments, the wire outlet of the lead-out module 119 may be along Figure 2 In some embodiments, the cooling medium inlet 116 and the outlet of the lead wire module 119, and the cooling medium outlet 117 and the outlet of the lead wire module 119 may be spaced apart in the X-axis direction. In some embodiments, the cooling medium inlet 116 and the cooling medium outlet 117 may be spaced apart in the X-axis direction. Figure 3 The YoZ plane in is mirror symmetric.

[0137] In some embodiments, the lead wire module 119 can be sealed with the stator housing 11 by rubber sealing or ultra-high vacuum metal welding. In some embodiments, the enameled wire of the motor is connected to the lead wire module 119 through the frame outlet. In some embodiments, the cable of the lead wire module 119 is a cable suitable for ultra-high vacuum, which can transmit the current or voltage signal of the motor from the inside of the motor to the outside of the motor. In some embodiments, the cable of the lead wire module 119 can be a twisted pair with a shielding layer. In some embodiments, the number of cores of the cable of the lead wire module 119 can depend on the number of signals required to be transmitted in the motor.

[0138] In one or more embodiments of the present specification, a method for compensating the magnetic levitation force of a vacuum magnetic levitation voice coil motor is provided. The vacuum magnetic levitation voice coil motor includes a stator module 1 and a mover module 2. The stator module 1 includes a magnetic levitation magnet 131 and a magnetic levitation coil 132 surrounding the magnetic levitation magnet 131. In some embodiments, the method for compensating the magnetic levitation force includes: obtaining the force between the mover module 2 of the vacuum magnetic levitation voice coil motor and the driven component driven by the passive module 2; based on the amplitude change of the force, providing a control signal corresponding to the amplitude change of the force to the magnetic levitation coil 132, so that the magnetic levitation coil 132 and the magnetic levitation magnet 131 provide dynamic magnetic levitation force to the mover module 2. In this embodiment, the method for obtaining the force is similar to the above, and the method for providing dynamic magnetic levitation force is also similar to the above, so it is not repeated.

[0139] In one or more embodiments of the present specification, a displacement platform is provided, which is suitable for a high vacuum environment or an ultra-high vacuum environment, and includes a base portion, a platform portion that can be displaced relative to a base, and a vacuum magnetic levitation voice coil motor that drives the platform portion to displace relative to the base portion. In some embodiments, since the displacement platform works in a high vacuum environment or an ultra-high vacuum environment, the outgassing rate and gas composition of the displacement platform in a vacuum environment are particularly critical. Excessive outgassing rates and unfriendly gas compositions will not only disrupt the vacuum conditions of the entire device, but will also cause product defects. The vacuum magnetic levitation voice coil motor in one or more embodiments of the present specification greatly reduces the outgassing rate of the vacuum motor in a vacuum environment and effectively controls the outgassing gas composition by selecting a reasonable process path and sealing solution as well as raw materials and surface treatment methods with high vacuum applicability.

[0140] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this specification. Such modifications, improvements and corrections are taught in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A vacuum magnetic levitation voice coil motor, characterized in that: include: A stator module and a mover module, wherein the mover module comprises: two mover back irons located on both sides of the stator module, a mover magnet disposed on the mover back irons, and a mover bracket connecting the two mover back irons; The stator module includes: a stator housing and a stator coil disposed inside a housing space of the stator housing, wherein the stator coil has a coil side surface and a coil outer periphery; Wherein, a first flow channel for cooling medium to flow is formed between the stator coil and the inner wall of the stator housing, and the first flow channel covers at least a portion of the coil side surface of the stator coil and / or at least a portion of the outer periphery of the coil; The bottom of the accommodating space extends upward to form a coil mounting shoulder, and the stator coil is arranged on the coil mounting shoulder; The coil mounting shoulder partitions a portion of the accommodating space to form a C-shaped portion in the first flow channel.

2. The vacuum magnetic levitation voice coil motor according to claim 1, characterized in that: The stator housing is formed with a second flow channel for cooling medium to flow, and the second flow channel surrounds the accommodating space.

3. The vacuum magnetic levitation voice coil motor according to claim 1 or 2, characterized in that: The stator housing comprises: a stator bottom plate, a stator frame arranged on the stator bottom plate, and a sealing cover plate covering the stator frame, wherein the stator frame and the sealing cover plate together form the accommodating space; The stator bottom plate is provided with a cooling medium inlet and a cooling medium outlet which are connected to the accommodating space.

4. The vacuum magnetic levitation voice coil motor according to claim 3, characterized in that: The coil mounting shoulder is located between the cooling medium inlet and the cooling medium outlet.

5. The vacuum magnetic levitation voice coil motor according to claim 1 or 2, characterized in that: The stator module further includes: a magnetic buoyancy force adjustment mechanism; The magnetic buoyancy force adjustment mechanism includes a magnetic buoyancy force magnet, which is used to provide magnetic buoyancy force to the mover module based on the mover magnet, and at least a part of the component force of the magnetic buoyancy force is opposite to the load of the mover module.

6. The vacuum magnetic levitation voice coil motor according to claim 5, characterized in that: The magnetic buoyancy adjustment mechanism further includes: a magnetic buoyancy coil, the magnetic buoyancy coil surrounding the magnetic buoyancy magnet; The magnetic levitation coil and the magnetic levitation magnet are integrally used to provide a dynamic magnetic levitation force to the mover module based on the mover magnet, and at least a part of the component force of the dynamic magnetic levitation force is opposite to the load of the mover module; In the dynamic magnetic levitation force, the magnetic levitation force provided by the magnetic levitation coil is adjusted based on the position of the mover module relative to the stator module.

7. The vacuum magnetic levitation voice coil motor according to claim 6, characterized in that: Also includes: Force sensor and drive output unit; The force sensor is used to obtain the acting force between the mover module and the driven component driven by the mover module; The drive output unit is used to provide a control signal corresponding to the amplitude change of the force to the magnetic levitation coil based on the amplitude change of the force, so that the magnetic levitation coil and the magnetic levitation magnet provide the dynamic magnetic levitation force.

8. The vacuum magnetic levitation voice coil motor according to claim 6, characterized in that: The magnetic levitation force regulating mechanism further includes: a coil bracket, the coil bracket is provided with a magnetic levitation force magnet groove, the magnetic levitation force magnet is arranged inside the magnetic levitation force magnet groove, and the magnetic levitation force coil surrounds the coil bracket.

9. The vacuum magnetic levitation voice coil motor according to claim 8, characterized in that: One or more coil support positioning pins are fixedly disposed inside the stator housing. The coil support is provided with coil support positioning pin holes matching the coil support positioning pins. The coil support is relatively fixed to the stator housing via the coil support positioning pins.

10. The vacuum magnetic levitation voice coil motor according to claim 5, characterized in that: The stator coil surrounds the magnetic buoyancy adjustment mechanism, and an insulating heat-conducting filler is provided between the stator coil and the magnetic buoyancy adjustment mechanism; A gap is formed between the insulating heat-conducting filler and the inner wall of the accommodating space.

11. The vacuum magnetic levitation voice coil motor according to claim 1, characterized in that: The mover magnet includes a T-shaped magnet and a central magnet: The T-shaped magnets are mirror-symmetrical with respect to the first plane, and the central magnet is arranged between the two T-shaped magnets; The first plane is perpendicular to the moving direction of the mover module.

12. The vacuum magnetic levitation voice coil motor according to claim 3, characterized in that: The stator bottom plate is also provided with a lead-out wire module for leading out a wire harness inside the stator housing.

13. The vacuum magnetic levitation voice coil motor according to claim 3, characterized in that: The cooling medium inlet and the cooling medium outlet are both provided with sealing grooves; The sealing groove is a dovetail groove or a rectangular groove, and a sealing structure is arranged in the sealing groove; The stator frame is integrally formed by using non-magnetic material.

14. A vacuum magnetic levitation voice coil motor, characterized in that: include: A stator module and a mover module, wherein the mover module comprises: two mover back irons arranged on both sides of the stator module, a mover magnet arranged on the mover back iron, and a mover bracket connecting the two mover back irons; The stator module comprises: a stator housing, a stator coil disposed inside a housing space of the stator housing, and a magnetic buoyancy force adjustment mechanism disposed inside the housing space of the stator housing; The magnetic levitation force regulating mechanism comprises: the magnetic levitation force magnet and a magnetic levitation force coil, wherein the magnetic levitation force coil surrounds the magnetic levitation force magnet; The magnetic levitation coil and the magnetic levitation magnet are used to provide a dynamic magnetic levitation force to the mover module based on the mover magnet, and at least a part of the component force of the dynamic magnetic levitation force is opposite to the load of the mover module; In the dynamic magnetic levitation force, the magnetic levitation force provided by the magnetic levitation coil is adjusted based on the position of the mover module relative to the stator module.

15. A method for compensating the magnetic buoyancy of a vacuum magnetic levitation voice coil motor, characterized in that: The vacuum magnetic levitation voice coil motor comprises a stator module and a mover module, wherein the stator module comprises a magnetic levitation magnet and a magnetic levitation coil surrounding the magnetic levitation magnet; The magnetic buoyancy compensation method comprises: Acquiring the acting force between the mover module of the vacuum magnetic levitation voice coil motor and a driven component driven by the mover module; Based on the change in the amplitude of the force, a control signal corresponding to the change in the amplitude of the force is provided to the magnetic levitation coil, so that the magnetic levitation coil and the magnetic levitation magnet provide dynamic magnetic levitation force to the mover module.

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