Actuator component for droplet ejection head and method of manufacturing same

By sucking or blowing gas through the gas orifice in the droplet ejection head, the flow around the droplet is solved, and the problem of increased droplet flight time and wood grain effect caused by increasing throwing distance is achieved, and effective control of the properties of the droplet is achieved.

CN119998129APending Publication Date: 2025-05-13SCIL TECH GMBH
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Patent Information

Application Number
CN202380070066.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2022-09-30
Filing Date
2023-09-29
Publication Date
2025-05-13

AI Technical Summary

Technical Problem

In the droplet ejection head, the increased throwing distance leads to an increase in droplet flight time and an enhanced wood grain effect, and it is difficult to effectively control the properties of the droplets.

Method used

By sucking or blowing gas through the gas orifices adjacent to the nozzle, the complex flow around the jet droplets is changed to mitigate the impact of throwing distance and avoiding the wood grain effect while controlling the composition and performance of the droplets.

Benefits of technology

It effectively reduces the droplet flight time, reduces the wood grain effect, and improves the characteristics of droplets during flight and on the substrate by controlling the gas environment.

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Abstract

An actuator component for a droplet ejection head includes an actuator assembly and a nozzle plate; wherein the actuator assembly comprises a plurality of liquid chambers arranged in an array of liquid chambers extending in an array direction, the plurality of liquid chambers being arranged to be fluidly connectable to a liquid supply. The actuator component further includes a plurality of gas channels arranged in an array of gas channels extending in an array direction; wherein the plurality of gas channels are arranged to be fluidly connectable to a gas supply. The array of liquid chambers and the array of gas channels are fluidly independent of each other. The nozzle plate includes a plurality of droplet ejection nozzles arranged in a nozzle array extending in an array direction and a plurality of gas orifices arranged in an orifice array extending in the array direction, wherein the gas orifices and the droplet ejection nozzles are arranged in a repeating pattern extending in the array direction. Each liquid chamber is arranged to be fluidly connected to one or more droplet ejection nozzles and is actuatable for ejecting droplets of liquid. The plurality of gas channels are arranged to be fluidly connected to respective one or more gas orifices for gas flow; and the actuator component is configured such that, in use, gas flowing through the gas orifice controls one or more properties of liquid ejected from the droplet ejection nozzle. The invention also relates to a method for manufacturing the actuator component. A droplet ejection apparatus includes one or more of the actuator components, and further includes a liquid supply source and a gas supply source, where the gas supply source may be arranged as a positive or negative gas supply source. A method of operating the droplet ejection apparatus.
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Description

[0001] The present disclosure relates to an actuator component for a droplet ejection head. The actuator component can be particularly suitable for use in a droplet ejection head as a drop-on-demand inkjet print head, or more generally, in a droplet ejection device, and specifically, in a droplet ejection device including one or more actuator components or a droplet ejection device including one or more (including one or more actuator components as described herein) droplet ejection heads. The actuator component provides a liquid chamber array, each of which has an actuator and a nozzle, and the actuator can be a piezoelectric actuator element. The piezoelectric element can, for example, include lead zirconate titanate (PZT), but any suitable material can be used. The actuator is operable to respond to an electrical signal to release a liquid droplet through a nozzle in a jetting direction. The actuator component also provides an array of gas channels, wherein the gas channels have corresponding gas orifices. The actuator component is operable to allow gas to flow through the gas orifices, thereby controlling the characteristics or properties of the liquid droplet. The present disclosure also relates to a method of operating a droplet ejection apparatus and a method of manufacturing an actuator component for a droplet ejection head.

[0002] background

[0003] Droplet ejection heads are now widely used, both in more traditional applications such as inkjet printing and in 3D printing or other rapid prototyping technologies. Thus, liquids, such as inks, can have new chemical properties to adhere to new substrates and increase the functionality of the deposited material. Droplet ejection heads that can be used in industrial applications have been developed, for example, for printing directly onto substrates such as tiles or textiles, or forming elements for color filters in flat-panel televisions such as LCD or OLED displays. This industrial printing technology using droplet ejection heads allows short-run production, product customization, and even custom-designed printing. Therefore, it should be understood that droplet ejection heads continue to develop and specialize in order to adapt to new and / or increasingly challenging applications. However, despite the many advances that have been made in the field of droplet ejection heads, there is still room for improvement.

[0004] In recent years, there has been increasing interest in printing at greater distances from the substrate to be printed, thereby increasing the so-called throw distance from the droplet ejection head to the substrate. There is also interest in controlling the properties of the environment surrounding the droplet in order to provide favorable conditions or mitigate unfavorable conditions.

[0005] Overview

[0006] Traditional markets (such as ceramics) and new applications (such as direct forming (DTS)) require that the distance between the print head and the substrate (i.e., the throwing distance) is constantly increasing. A larger throwing distance may lead to a larger drop position error, which can be partially explained by an increase in the drop flight time. A larger throwing distance may also lead to an increase in the wood grain effect, which is the result of the complex flow in the gap between the nozzle plate and the substrate due to the interaction between the airflow caused by the lower drop curtain (e.g., the jetted droplets) and the airflow caused by the moving substrate. An obvious way to reduce the flight time is to increase the (initial) drop velocity. However, the drop velocity is limited by the available drive voltage (and increasing this voltage may have undesirable side effects, such as increased heating), as well as the formation of satellite droplets above a certain critical speed (typically 5m / s). In addition, the increased drop velocity may lead to a stronger interaction between the airflow caused by the lower drop curtain and the airflow caused by the moving substrate. Possible solutions previously used may include increasing the spacing between nozzles in the printing direction or the cross-printing direction, but this undesirably reduces the print density and thus reduces the image quality.

[0007] The present invention proposes a method to mitigate the effects of increased throw distance and avoid wood grain effects by modifying the complex flow around the sprayed droplets, by sucking or blowing gas through gas orifices adjacent to the nozzle.

[0008] Another area of ​​interest is controlling the properties of the droplets. Such control may include controlling the humidity or temperature or the amount of oxygen present, or otherwise providing favorable conditions (or mitigating unfavorable conditions) so that the composition or properties of the droplets are controlled. For example, the purpose may be to reduce the evaporation of solvent or carrier liquid from a droplet in flight in order to control the properties of the droplet in flight or as it dries on a substrate. Or the purpose may be to reduce or prevent oxidation or curing that occurs in flight by changing the oxygen balance in the atmosphere surrounding the droplet. Still further, the purpose may be to protect the droplets from dust particles in a dusty environment.

[0009] The present invention proposes a method of modifying the complex flow around a sprayed droplet by sucking or blowing gas through a gas orifice adjacent to the nozzle and / or providing a device suitable for further controlling the environment near the droplet and / or the composition of the droplet in flight and / or on the substrate. This may be in addition to or in lieu of mitigating the wood grain effect.

[0010] Aspects of the invention are set out in the accompanying independent claims, while details of specific embodiments of the invention are set out in the accompanying dependent claims.

[0011] According to a first aspect of the present invention, there is provided an actuator component for a droplet ejection head, comprising:

[0012] An actuator assembly and a nozzle plate; wherein the actuator assembly includes a plurality of liquid chambers, the plurality of liquid chambers being arranged in a liquid chamber array extending in an array direction;

[0013] wherein the plurality of liquid chambers are arranged to be fluidly connectable to a liquid supply; and

[0014] a plurality of gas channels, the plurality of gas channels being arranged in a gas channel array extending in the array direction;

[0015] wherein the plurality of gas channels are arranged to be fluidly connectable to a gas supply;

[0016] wherein the array of liquid chambers and the array of gas channels are fluidly independent of each other;

[0017] wherein the nozzle plate comprises a plurality of droplet ejecting nozzles, the plurality of droplet ejecting nozzles being arranged in a nozzle array extending in an array direction;

[0018] and a plurality of gas orifices arranged in an orifice array extending in the array direction;

[0019] wherein the gas orifices and the droplet ejection nozzles are arranged in a repeating pattern extending along an array direction;

[0020] wherein each liquid chamber is arranged to be fluidly connected to one or more of said droplet ejection nozzles and is actuatable to eject liquid droplets;

[0021] wherein the plurality of gas channels are arranged to be fluidly connected to respective one or more gas orifices for gas flow; and

[0022] Wherein the actuator component is configured such that, in use, gas flowing through the gas orifice controls one or more properties of liquid ejected from the drop ejection nozzle.

[0023] According to a second aspect of the present invention, there is provided a droplet ejection device comprising one or more actuator components according to the first aspect; and further comprising a liquid supply source and a gas supply source, wherein the gas supply source can be arranged as a positive gas supply source or a negative gas supply source.

[0024] According to a third aspect of the present invention, there is provided a method of operating a droplet ejection device according to the second aspect, comprising:

[0025] ejecting liquid droplets from one or more of the droplet ejection nozzles in accordance with a print instruction; and

[0026] A gas is flowed through the gas orifice to control the liquid droplets ejected from the droplet ejection nozzle.

[0027] According to a fourth aspect of the present invention, there is provided a method of manufacturing the actuator component for a liquid droplet ejection head according to the first aspect, wherein the method comprises the following steps:

[0028] - forming an actuator assembly, comprising:

[0029] - forming one or more arrays of liquid chambers in one or more strips of piezoelectric material extending along the array direction,

[0030] wherein each of the liquid chambers forms an open channel in the piezoelectric material strip, the open channel opening in the liquid chamber height direction and opening at both ends along the liquid chamber extension direction;

[0031] - forming one or more arrays of gas channels in said one or more strips of piezoelectric material extending along said array direction,

[0032] wherein each of the gas channels forms an open channel in the piezoelectric material strip, the open channel opening in the height direction of the liquid chamber and opening at both ends along the extension direction of the liquid chamber;

[0033] wherein the array of liquid chambers and the array of gas channels are fluidly independent of each other; and

[0034] - fixedly attaching a nozzle plate to said actuator assembly; and

[0035] - before or after the step of fixedly attaching the nozzle plate to the actuator assembly, forming a droplet ejection nozzle and a gas orifice in the nozzle plate so that when assembled, the actuator assembly includes a droplet ejection nozzle fluidly connected to the liquid chamber and a gas orifice fluidly connected to the gas channel,

[0036] The gas orifices and the droplet ejection nozzles are arranged in a repeating pattern extending along an array direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1A Depicted is a schematic diagram of an actuator assembly for a drop ejection head with one side removed to show some of the fluid paths (liquid and gas) therein, according to an embodiment.

[0039] Figure 1B Describes the basis Figure 1A A schematic diagram of a droplet ejection device of an embodiment of the present invention, the droplet ejection device including an actuator component for a droplet ejection head with another portion removed, the droplet ejection device also including liquid and gas supply paths and liquid and gas supply sources.

[0040] Figure 2A Depicted is a schematic diagram of a droplet ejection device according to another embodiment, which includes a portion of an actuator component for a droplet ejection head, with one side removed to show the fluid paths (liquid and gas) therein, and details of the liquid and supply gas paths and liquid and gas supplies.

[0041] Figure 2B Depicted Figure 2A A portion of the schematic diagram of , with the Figure 2A AA and BB indicate further parts to provide further details about the fluid paths therein.

[0042] Figure 2C Depicted Figure 2B A portion of the schematic diagram of , with the Figure 2B The CC in the figure indicates more parts to provide further details about the fluid paths therein.

[0043] Figure 3A Describes something like Figure 1A and Figure 1B An actuator component of an actuator component of an embodiment of the present invention shows a nozzle plate wherein the gas orifice is offset in the y-direction relative to the nozzle.

[0044] Figure 3B Depicted are actuator components showing a similar Figure 3A The nozzle plate of the actuator component of the present invention is a nozzle plate of the present invention, but wherein the gas orifice outlet is circular and smaller than the droplet ejection nozzle, and wherein the gas channel is narrower than the liquid chamber in the array direction.

[0045] Figure 3C An actuator component is depicted showing a nozzle plate where the gas orifice outlets are circular and larger than the droplet ejection nozzles, and there is more than one gas orifice outlet per gas channel, where the gas orifices are offset from the nozzles in the y-direction.

[0046] Figure 3D An actuator component is depicted showing a nozzle plate wherein the nozzles are staggered in the y-direction and are larger than the gas orifice outlets, and wherein there is more than one gas orifice outlet per gas channel such that each nozzle is located proximate to multiple gas orifices, and further wherein the gas channel is narrower than the liquid chamber in the array direction.

[0047] Figure 3E An actuator component is depicted showing a nozzle plate wherein the nozzles are staggered in the y-direction and are larger than the gas orifice outlets, and wherein there is more than one gas orifice outlet per gas channel such that each nozzle is located proximate to a plurality of gas orifices wherein the gas orifices are arranged radially around the nozzle.

[0048] Figure 4 Describes something like Figure 2A-2C The actuator component of the embodiment of , but in which there are two gas manifolds and multiple gas ports and multiple fluid inlets and fluid outlets.

[0049] Figure 5 is a schematic diagram of a droplet ejection apparatus including an actuator component and a moving device according to an embodiment.

[0050] Fig. 6A A first step in a manufacturing process of an actuator component according to an embodiment is depicted, including forming cutouts in one or more strips of piezoelectric material and fixedly attaching the strips of piezoelectric material to a substrate to form a gas manifold.

[0051] Figure 6B A second step in the manufacturing process of an actuator component according to an embodiment is depicted, including forming one or more gas channel arrays in one or more piezoelectric material strips to produce a plurality of open-ended gas channels in the one or more piezoelectric material strips, wherein the gas channels are aligned in an array direction along the one or more piezoelectric material strips.

[0052] Figure 6C A third step in the manufacturing process of an actuator component according to an embodiment is depicted, including forming one or more covering components that are conformal to at least some of the one or more piezoelectric material strips and at least some of the substrate, and fixedly attaching the covering components to the one or more piezoelectric material strips and at least some of the substrate.

[0053] Fig.6D A fourth step in the manufacturing process of an actuator component according to an embodiment is depicted, comprising forming a liquid chamber such that the liquid chamber continuously passes through the cover component and the strip of piezoelectric material, and forming an open channel in the strip of piezoelectric material and in the cover component.

[0054] Fig. 6E A fifth step in the manufacturing process of an actuator component according to an embodiment is depicted, including attaching a nozzle plate to an actuator assembly to form the actuator component.

[0055] Figure 7 Describes the Figure 2C Schematic diagram of sections of an actuator component of another embodiment of an actuator component (including two thermal control fluid manifolds).

[0056] Figure 8 This includes based on Figure 7 Schematic diagram of an actuator component of an embodiment of an actuator component and a moving device of a droplet ejection device.

[0057] It should be noted that the drawings are not drawn to scale and that certain features may be shown at exaggerated dimensions so that these features are more clearly visible.

[0058] Detailed description of the drawings

[0059] The embodiment and its various implementations will now be described with reference to the accompanying drawings. Throughout the following description, similar reference numerals are used for similar elements where appropriate.

[0060] Figure 1A and Figure 1B A schematic diagram of an actuator component 100 for a droplet ejection head according to an embodiment is depicted. Figure 1A In FIG. 1 , one side of the actuator component 100 has been removed in order to illustrate some of the fluid paths (liquid and gas) therein. Figure 1B Further description includes Figure 1A A liquid drop ejecting device 1 of the actuator component 100. Figure 1B The actuator component 100 is schematically shown with the top portion removed, as shown in FIG. Figure 1A The dashed line XX in FIG. 1 is shown to allow more of the internal fluid path to be seen.

[0061] The actuator assembly 100 includes a nozzle plate 70 and an actuator assembly 80. The nozzle plate 70 has a thickness T. Figure 1A It can be seen that the nozzle plate 70 includes a plurality of droplet ejection nozzles 121 (hereinafter referred to as nozzles) arranged in a nozzle array 120, and a plurality of gas orifices 221 arranged in a gas orifice array 220, through which liquid can be ejected. Both the nozzles 121 and the gas orifices 221 extend in a straight line in the array direction 10, and the nozzles 121 and the gas orifices 221 are arranged in an alternating pattern at regular intervals in the array direction 10.

[0062] The actuator assembly 80 includes a plurality of liquid chambers 131 arranged in a liquid chamber array 130, wherein the respective liquid chambers 131 are fluidly connected to one or more nozzles 121. The actuator assembly 80 also includes a plurality of gas channels 231 arranged in a gas channel array 230, wherein the respective gas channels 231 are fluidly connected to one or more gas orifices 221. The actuator assembly 80 may include one or more components made of a piezoelectric material. For example, one or more of the walls of the respective liquid chambers 131 may include a piezoelectric material that is actuatable so as to eject liquid through the respective nozzles 121 in response to a print instruction. It is understood that this is by no means limiting, and other devices or methods may be used to eject liquid through the respective nozzles 121.

[0063] Figure 1AThe actuator component 100 is a so-called end-emitter actuator, in which the nozzle plate 70 and the nozzle 121 are located at one end of the liquid chamber 131 in the liquid chamber extension direction 5. It can be seen that the nozzle plate 70 is positioned so as to fluidically seal the liquid chamber 131 and the gas channel 231 in the liquid chamber extension direction 5. It can also be seen that in this arrangement, the droplet ejection direction 16 is aligned with the liquid chamber extension direction 5 and the negative y-direction. It can be understood that, generally, in operation, the surface 118 facing the medium will be properly aligned with the medium so that the droplets ejected along the ejection direction 16 fall at the desired position on the medium.

[0064] The nozzles 121 are spaced apart by a nozzle spacing ns, and the gas orifices 221 are also spaced apart by a nozzle spacing ns, such that the spacing between a nozzle 121 and its adjacent gas orifices 221 is ns / 2, for example, the centers of substantially all gas orifices 221 are spaced apart from the centers of adjacent droplet ejection nozzles 121 in the array direction 10. The nozzle spacing ns in the array direction 10 can be conveniently measured from the center of a nozzle 121 or a gas orifice 221 to the center of an adjacent nozzle or gas orifice, as the case may be. In some arrangements, the centers of substantially all gas orifices 221 are spaced apart by a nozzle spacing ns / 2 from the center of the nearest droplet ejection nozzle 121 in the array direction 10. In the actuator component 100, both the nozzles 121 and the gas orifices 221 have circular outlets, for example, Figure 1A The gas orifice 221 has substantially the same shape as the nozzle 121. However, it can be seen that the gas orifice 221 has a smaller cross-sectional outlet area than the nozzle 121, although it can be understood that this is not limiting and other arrangements can have the same cross-sectional area at the outlet of both, or the gas orifice 221 can have a larger cross-sectional outlet area than the nozzle 121. For clarity, it can be understood that the outlets of the nozzles and orifices are located in the media-facing surface 118 of the nozzle plate 70.

[0065] exist Figure 1A In the embodiment of the present invention, the nozzle array 120 includes three nozzles 121_i-121-iii, and the gas orifice array 220 includes three gas orifices 221_i-221_iii. It will be understood that this is by no means limiting, and in other arrangements, the nozzle array 120 may include one or more nozzles, and the gas orifice array 220 may include one or more gas orifices 221. The nozzle array 120 may include 121_i-121_n nozzles, where n is any integer, and the gas orifice array 220 may include 221_i-221_m gas orifices, where m is any integer. The nozzles may be substantially identical to each other, or identical to each other within the limitations of manufacturing capabilities. Similarly, the gas orifices may be substantially identical to each other, or identical to each other within the limitations of manufacturing capabilities.

[0066] For simplicity, the actuator assembly 80 is shown as a unitary component, but those skilled in the art will appreciate that it may include several components joined together in any suitable manner. Alternatively, it will be appreciated that some or all of the actuator assembly 80, or some or all of the actuator component 100, may be manufactured as a single piece using additive manufacturing techniques such as 3D printing, for example. It can be seen that the actuator assembly 80 has a liquid manifold 101 and a gas manifold 201, the liquid manifold 101 being fluidly connected to the liquid chamber 131 ( Figure 1A ), the gas manifold 201 is fluidly connected to the gas channel array 230 and thus fluidly connected to each respective gas channel 231 (as seen from a cross section through the first gas channel 231_i). It can also be seen that the gas channels 231_i are fluidly connected to the gas orifices 221_i.

[0067] In this embodiment, the gas manifold 201 is located below the liquid chamber 131 in the z direction, which is antiparallel to the liquid chamber (and gas channel) height direction 15. The gas manifold 201 is also located at the base of the gas channel 231 in the liquid chamber height direction 15, so that the gas manifold 201 intersects with the gas channel 231 and is fluidly connected to the gas channel 231.

[0068] It will generally be appreciated that such a spatial arrangement is by no means required, and other arrangements of the gas manifold 201 relative to the liquid chambers 131 are contemplated. Furthermore, any suitable spatial arrangement of the gas manifold 201 relative to the liquid manifold 101 may be utilized. It will be appreciated that such a suitable spatial arrangement may be achieved as long as the gas manifold 201 is fluidly connected to the gas channel array 230, and the liquid manifold 101 is fluidly connected to the liquid chamber array 130, and the gas paths 243 and the liquid paths 143 remain fluidly separated from each other.

[0069] The liquid chamber 131 and the gas channel 231 may include one or more layers deposited on some or all of their inner surfaces, such as one or more metal layers capable of actuating the piezoelectric material, and one or more protective coatings for preventing fluids such as ink from damaging (e.g., corroding) the metal layers and / or passivating the electronics. Thus, the actuator component 100 includes electrical tracks and connections.

[0070] Now go to Figure 1B , the nozzle 121, the gas orifice 221, the nozzle array 120 and the gas orifice array 220 are as described above with respect to Figure 1A For simplicity, Figure 1B, the actuator assembly 100 has been depicted as a single component, wherein the positions of the nozzle plate 70 and the actuator assembly 80 are indicated, but it will be appreciated that Figure 1B The actuator component 100 includes the following Figure 1A . The actuator component 100 includes an array 130 of liquid chambers extending in an array direction 10. The array 130 of liquid chambers 131 includes a plurality of liquid chambers 131. The liquid chambers (131_i-131_iii) extend side by side in the array direction 10; the array direction 10 is substantially perpendicular to the liquid chamber height in the liquid chamber height direction 15. Each liquid chamber 131 is elongated in the liquid chamber extension direction 5, and in this embodiment, the liquid chamber extension direction 5 is perpendicular to the liquid chamber height direction 15. More generally, the liquid chamber 131 is elongated in the liquid chamber extension direction 5 that is not parallel to the liquid chamber height H1, and each liquid chamber 131 opens into the liquid manifold 101 in the liquid chamber extension direction 5 at a first end.

[0071] In this embodiment, the liquid chamber extension direction 5 is perpendicular to the array direction 10, but this is by no means necessary, and in other arrangements, the liquid chamber extension direction 5 may be at a different angle, for example to achieve a longer liquid chamber within a given droplet ejection head footprint. Thus, more generally, the liquid chamber extension direction 5 may be at an angle different from 90° to the array direction 10.

[0072] The actuator component 100 also includes an array 230 of gas channels 231 extending along the array direction 10. A plurality of gas flow paths 231_i-231_iii extend side by side in the array direction 10. Each gas channel 231 is elongated in the liquid chamber extension direction 5 that is angled with the array direction 10. The liquid chamber 131 and the gas channel 231 extend side by side in the array direction 10 so that they are arranged parallel to each other, but this is by no means necessary and other arrangements can be envisaged. In this embodiment, the array direction 10 is perpendicular to the liquid chamber extension direction 5, but it should be understood that this is by no means necessary and in other embodiments, the liquid chamber 131 can be arranged at an angle that is not 90° to the array direction, for example, the liquid chamber 131 can be elongated in a direction that is not parallel to the array direction 10. Similarly, the gas channel 231 can be elongated in a direction that is not parallel to the array direction 10.

[0073] The liquid chamber 131 has a width Wl in the array direction 10 and a height Hl in the liquid chamber height direction 15 (negative z direction). Similarly, the gas channel 231 has a width Wg in the array direction 10 and a height Hg in the liquid chamber height direction 15. Each gas channel 231 leads to the gas manifold 201 at its base along the liquid chamber height direction 15. In order to allow the gas channel 231 to be fluidically connected to the gas manifold 201 without the liquid chamber impacting the gas manifold 201, the height Hg is greater than the height Hl (Hg>Hl), for example, in order to achieve fluid independence, the gas channel 231 is deeper than the liquid chamber in the liquid chamber height direction 15. Further, since the gas manifold 201 intersects with the gas channel 231 in this arrangement (for example, see the cross section of 231_i), the gas channel height Hg minus the gas manifold height Hm is greater than the liquid chamber height Hl (Hg-Hm>Hl). Furthermore, in this arrangement, in order to prevent the gas passage 231 from impacting the liquid manifold 101 , the gas passage 231 is shorter than the liquid chamber 131 in the liquid chamber extension direction 5 (Lg<Ll).

[0074] Figure 1B The droplet ejection device 1 may include one or more actuator components as described herein. More generally, the droplet ejection device 1 may include one or more droplet ejection heads, which include one or more actuator components as described herein. The droplet ejection device 1 may also include a liquid supply source 140 and a gas supply source 240, respectively. The liquid supply source 140 may be fluidly connected to the nozzle 121 via a liquid path 143, and the gas supply source 240 may be fluidly connected to the gas orifice 221 via a gas path 243. The liquid supply source 140 may be fluidly connected to a liquid reservoir 146. The gas supply source 240 may be arranged as a positive or negative gas supply source, which means that it can supply gas to the gas orifice 221 (positive gas supply source) or suck gas into the actuator component 100 through the gas orifice 221 (negative gas supply source). The gas supply source 240 may be fluidly connected to a gas reservoir 246.

[0075] It can be seen that the liquid path 143 includes an inlet liquid path 141 that fluidly connects the liquid supply source 140 to a liquid inlet 144 in the actuator component 100 (as shown by the shaded arrow 148). In the actuator component 100, the liquid path 143 includes a liquid manifold 101 that is fluidly connected to a plurality of liquid chambers 131 arranged in a liquid chamber array 130, wherein each liquid chamber 131 is fluidly connected to the nozzle 121. As previously described, Figure 1A and Figure 1BThe actuator component 100 is a so-called end-launcher actuator component, in which the nozzle 121 is located at one end of the liquid chamber 131. Figure 1A and Figure 1B In the embodiment of FIG. 1 , the ejection direction 16 is in the negative y direction, and furthermore, the ejection direction 16 is aligned with the longitudinal liquid chamber direction 5 and is perpendicular to the array direction 10. The liquid chambers 131 each include at least one actuator and at least one nozzle 121, the actuators may be piezoelectric actuator elements. The respective actuators for each liquid chamber 131 are operable to respond to an electrical signal (e.g., Figure 1B The droplets Dp121_iii ejected from the nozzle 121_iii (as shown in FIG. 1 ) release one or more liquid droplets along the ejection direction 16 through the corresponding nozzle 121.

[0076] It can also be seen that in Figure 1B In the device 1, the gas path 243 includes a gas path 241, which can be fluidly connected between the gas supply source 240 and the actuator component 100 (see white arrow 248). In the actuator component 100, the gas path 243 includes a gas manifold 201 that is fluidly connected to a plurality of gas channels 231, wherein each gas channel 231 is fluidly connected to a gas orifice 221. In other words, the gas channel 231 can be fluidly connected to the gas supply source 240 via the gas manifold 201. As previously described, the gas supply source 240 can be arranged as a positive or negative gas supply source, which can be operated to cause the gas to flow through the gas orifice 221 in a positive or negative direction (flowing out of or into the gas orifice 221, respectively). One or more gas ports 244 (not shown) may be present to connect the gas path 241 to the gas manifold 201 and, in operation, enable gas to be supplied from the gas path 241 to the gas manifold 201, or to be removed from the gas manifold 201 and thereby moved to the gas path 241, depending on whether the gas supply source 240 is operated as a positive gas supply source or a negative gas supply source.

[0077] The liquid path 143 and the gas path 243 are fluidly separated from each other, ensuring that there is no mixing of the two fluids at any stage between the liquid supply source 140 and the outlet of the nozzle 121 or at any stage between the gas supply source 240 and the outlet of the gas orifice 221. In other words, the liquid path 143 and the gas path 243 are both fluid-tight and separated from each other (or fluidically independent). As part of this, as described in more detail above, the height Hl of the liquid chamber 131 and the height Hg of the gas channel 231 are different, and their respective lengths Ll and Lg are also different, wherein the gas manifold 201 is located below the liquid chamber 131 in the negative liquid chamber height direction 15. In embodiments where the actuator is a shear mode piezoelectric actuator, an additional advantage of keeping the two paths fluidly independent is that for a droplet ejection head where the fluid is an aqueous (i.e., water-based) fluid, some or all of the drive electrodes used to drive the individual actuators can be located in the gas channel 221. In this way, they are physically isolated from contact with the fluid (e.g., ink), thereby reducing or preventing electrical shorts.

[0078] In operation, the device 1 may include a liquid flowing from a liquid supply source 140 via a liquid path 143 to an outlet of the nozzle 121. For example, the liquid may flow from the liquid supply source 140 via an inlet liquid path 141 and into a droplet ejection head including an actuator component 100. The liquid enters the actuator component 100 and enters the liquid manifold 101 via a liquid inlet 144. The liquid enters the corresponding liquid chamber 131 at one end of the liquid manifold 101 and flows along the liquid chamber 131 in the liquid chamber extension direction 5. In other words, the actuator component 100 for a droplet ejection head includes one or more liquid manifolds 101; wherein the liquid chambers (131_i-o) may be fluidly connected to the liquid supply source 140 via the one or more liquid manifolds (101, 102).

[0079] Then, in accordance with the printing instructions, the droplet ejection device 1 may eject droplets from one or more of the nozzles 121 (along the ejection direction 16). At the same time, the droplet ejection device 1 may cause gas to flow through the gas orifice 221 to control the liquid droplets ejected from the nozzle 121. Such control may be to control the droplet trajectory, or to otherwise control the environment around the droplet or the droplet characteristics or composition.

[0080] Depending on the type of gas supply 240 or the mode of operation of the gas supply 240, the device 1 can be arranged so that the gas flows from the gas supply 240 via the gas path 243 and flows through the gas path 243 and flows through the gas orifice 221 in the injection direction 16 (e.g., flows out of the gas orifice 221) so as to control the liquid droplets; such a gas supply 240 can be referred to as a "positive gas supply" 240. Alternatively, the device 1 can be arranged so that the gas supply 240 causes the gas to flow through the gas orifice 221 in the negative injection direction 16 (e.g., from outside the actuator component 100, through the gas orifice 221, and into the actuator component 100) and flows to the gas supply 240 via the gas path 243 so as to control the liquid droplets. Such a gas supply 240 can be referred to as a "negative gas supply" 240.

[0081] Without wishing to be bound by any particular theory, the inventors suggest that in order to understand the effect of positive gas flow on the control of droplet trajectory, Stokes' drag should be considered. Stokes' drag is the force acting on a small spherical object (such as a droplet) when it moves relative to the surrounding medium. Due to Stokes' drag, the velocity of the droplet will be reduced from the initial falling velocity at the nozzle plate 70 to a minimum value at the substrate. The proposed solution described herein may be aimed at increasing the falling velocity by reducing the velocity difference between the droplet and the surrounding medium.

[0082] In a typical case, without control, the air near the droplets moves only in the direction of the droplet ejection because momentum is transferred from the droplets to the air, i.e., because the droplets are slowed down. By injecting the gas through a gas orifice 221 adjacent to the nozzle 121, the relative motion between the droplets and the surrounding medium is reduced because the surrounding medium moves in the same direction and transfers less momentum. In some arrangements, the gas velocity may be less than the droplet ejection velocity (initial falling velocity) when the gas leaves the gas orifice. In other arrangements, the falling velocity may be increased by injecting gas through the gas orifice 221 at a velocity exceeding the initial falling velocity. In some arrangements, the gas velocity may be controlled so that it is used to reduce or prevent satellite formation from liquid droplets, or so that the delay of satellite formation exceeds a threshold velocity at which it normally occurs. In other arrangements, the satellite formation threshold may be a limiting gas velocity.

[0083] If the induced velocity of the surrounding medium is significant compared to the relative motion between the droplet ejection head and the substrate (both of which may be in motion), the ejected gas may also have a significant positive effect on the complex flow leading to the woodgrain effect.

[0084] In still other arrangements, gas may be drawn into the actuator component through the gas orifice 221. It will be appreciated that whether the gas is blown through the orifice or drawn into the actuator component may be determined based on the specific environmental and operating conditions and configuration of the droplet ejection head, droplet ejection velocity, print duty cycle, substrate velocity, and / or droplet ejection head velocity, etc. It will be appreciated that the addition of a tertiary flow, such as a gas flow (where the primary flow is generated by the ejected droplets and the secondary flow is caused by the moving substrate / print head) will allow for a positive impact on the complex flow between the droplet ejection head and the substrate.

[0085] In other arrangements, the gas supply 240 may be used to supply a gas having specific properties, such as an inert gas, which reduces the exposure of the droplets to oxygen and thus changes the reaction rate of any oxygen-reactive compounds in the droplets (thereby, for example, changing the drying time on the substrate). Alternatively, for example, using a solvent in gaseous form (where the solvent is also a component of the liquid being sprayed) may change the rate at which the solvent evaporates from the droplets and advantageously change the droplet drying rate.

[0086] Now go to Figure 2A , which depicts a schematic diagram of a droplet ejection device 2 including an actuator component 200 for a droplet ejection head according to another embodiment. It can be seen that the ejection direction 16 is in the direction of extension 5 of the liquid chamber. Figure 1A and Figure 1B Compared to the end emitter actuator component 100, the actuator component 200 is a side emitter actuator component, wherein the ejection direction 16 is in the liquid chamber height direction 15. Figure 1B In the device 1, the device 2 also includes a liquid path 143 and a gas path 243 and liquid and gas supply sources 140, 240 respectively. One side of the actuator component 200 has been removed to show some details of the fluid path. Figure 1B In the embodiment, the actuator component 200 is shown as a single component, wherein the positions of the nozzle plate 70 and the actuator assembly 80 are indicated, but it is understood that the actuator component 200 may include a plurality of components such as Figure 1A , or more separate components as described above.

[0087] As in Figure 2A-2CAs can be seen in the cross section through the gas channel 231_i, the gas orifice 221_i is arranged at a midway position along the gas channel 231_i in the gas channel extension direction 5 (which is the same direction as the liquid chamber extension direction 5 in this arrangement). The other gas orifices 221_ii-iii and the gas channels 231_ii-iii are arranged similarly. Similarly, in this embodiment, the nozzles 121_i-iii are arranged along their corresponding liquid chambers 131_i-iii (see Figure 2C ) rather than Figure 1A and Figure 1B Thus, the nozzle plate 70 is located on top of the actuator component 200, rather than on the top of the actuator component 200 as in the embodiment of FIG. Figure 1A and Figure 1B 1. It can also be seen that the nozzle plate 70 is positioned so as to fluidly seal the liquid chamber 131 and the gas channel 231 in the liquid chamber height direction 15. Further, the spray direction 16 is in the negative z-direction, aligned with the liquid chamber height direction 15 and perpendicular to the array direction 10. As previously described, typically, in operation, the surface 118 facing the medium will be properly aligned with the medium so that droplets sprayed along the spray direction 16 land at desired locations on the medium.

[0088] It can also be seen that the actuator component 200 has a generally known recirculation or through-flow design, whereby, in operation, the actuator component 200 is fluidly connected to the liquid path 143 so that liquid flows from the liquid supply source 140 to the actuator component 200 via the liquid path, and then returns to the liquid supply source 140 via the liquid path 143 (as shown by the shaded arrow 148).

[0089] exist Figure 2B and Figure 2C A portion of the liquid path 143 can be seen more clearly in FIG. Figure 2B and Figure 2C include Figure 2ADetail of the actuator component 200, parts of which have been removed, as shown by the dotted lines AA, BB and CC. In operation, liquid travels from the liquid supply source 140 to the liquid inlet 144 via the inlet liquid path 141, and the liquid is supplied to the liquid manifold 101 from the liquid inlet 144. It will be understood that the liquid path 143 may include additional fluid components within the droplet ejection head, as well as fluid connections outside the droplet ejection head and additional fluid components for transporting liquid from the actuator component, out of the droplet ejection head and back to the liquid supply source 140. Liquid is supplied from the liquid manifold 101 to one end of the plurality of liquid chambers 131 along the liquid chamber extension direction 5. The corresponding actuator for each liquid chamber 131 is operable to release one or more liquid droplets through the corresponding nozzle 121 along the ejection direction 16 in response to an electrical signal. For example, a print command may cause an electrical signal to be sent to an actuator in a selected liquid chamber 131_ii, thereby causing the actuator to actuate and eject liquid via a corresponding nozzle 121_ii and form a droplet (eg, Figure 2C (indicated by the droplet Dp121_ii in the Figure 5).

[0090] It will be appreciated that, depending on the print instructions, at any given time, no nozzle 121 may eject liquid, or one or more nozzles 121 may eject liquid in order to form a desired image. The remaining un-ejected liquid continues through the corresponding liquid chamber 131 in the liquid chamber extension direction 5, and leaves the corresponding liquid chamber 131 at the opposite end from where it enters, and thus enters the liquid manifold 102. The liquid leaves the liquid manifold 102 via one or more liquid outlets 145 (not shown). The liquid outlet 145 may also be a point where the liquid leaves the actuator component 200 and returns to the liquid supply source 140 via the return liquid path 142. Alternatively, the return liquid path 142 may include additional fluid components within the actuator component 200 and / or within the droplet ejection head, as well as a fluid connection outside the droplet ejection head and additional fluid components for transporting the liquid back to the liquid supply source 140.

[0091] In some arrangements of the actuator assembly 200 for a recirculating droplet ejection head, there may be an array of one or more liquid chambers 131 and one or more liquid manifolds 101, 102, wherein at least one of the one or more liquid manifolds is an inlet liquid manifold 101 and at least one of the one or more liquid manifolds is an outlet liquid manifold 102, such that in operation, liquid flows from the liquid supply source 140 through the inlet liquid manifold 101, through the liquid chamber array 130 and returns to the liquid supply source 140 via the outlet liquid manifold 102.

[0092] In other words, the liquid chambers 131 are open at opposite ends in the liquid chamber extension direction 5, and are fluidly connected to the liquid manifold 101 at a first end and to the liquid manifold 102 at a second end. When operating in the recirculation mode, liquid flows out of the inlet liquid manifold 101 via the corresponding first end of each liquid chamber 131, flows through the plurality of liquid chambers 131, and flows into the outlet liquid manifold 102 via the corresponding second end of each liquid chamber 131. According to the printing instruction, a droplet may be ejected from one or more of the corresponding nozzles 121 in the nozzle array 120, wherein the nozzles 121 are located at a midway position of the corresponding liquid chamber 131 in the liquid chamber extension direction 5.

[0093] Now consider the gas path 243, such as Figure 2A 2, which includes a gas path 241 connecting a gas supply source 240 to the actuator component 200. When the gas supply source 240 is a positive gas supply source, the gas path 243 supplies gas to the gas orifice 221 for injection in the injection direction 16 (as shown by the white arrow 248), and the gas path 241 is an inlet gas path 241. Alternatively, when the gas supply source 240 is a negative gas supply source, the gas path 243 draws gas into the gas supply source 240 through the gas orifice 221 and via the gas path 243, in which case the gas path 241 operates as a return gas path 241.

[0094] In some arrangements, such as Figure 2C As shown, the gas path 243 of the droplet ejection device 2 includes a gas path 241 and a gas path 242 that are fluidly connected to the gas manifold 201. In the case where the gas supply source 240 is a positive gas supply source 240, the gas path 243 can be a recirculation path, so that the gas path 241 is an inlet gas path 241, and the gas path 242 is a return gas path 242. In this arrangement, the gas is supplied to the gas manifold 201 via the inlet gas path 241 and is supplied to the plurality of gas channels 231 therefrom. Some of the gas flows through the gas orifice 221, while the remaining gas returns to the gas supply source 240 via the return gas path 242. This may be a desirable arrangement in, for example, a dusty environment, because the gas flow rate can be higher than a design without a return gas path, because only a portion of the gas flows through the gas orifice 221. The higher flow rate can help remove unwanted particles that may otherwise enter and accumulate in the gas path of the actuator component 200.

[0095] Instead of operating in a recirculation mode, both the gas path 241 and the gas path 242 may operate as inlet gas paths, thereby supplying gas to the manifold 201 and from there to the plurality of gas channels 231. In some operating schemes, a negative pressure may be induced at the gas orifices in the gas channels 231 by having a positive flow at the rear of the gas orifices. Alternatively, where the gas supply source 240 is a negative gas supply source, then both gas paths 241, 242 may operate as return gas paths 241, 242, thereby sucking gas from either end of the actuator component 200, which may help provide a more uniform suction through the gas orifices 221. Still further, where the gas supply source 240 is a positive gas supply source, then both gas paths 241, 242 may operate as supply gas paths 241, 242, thereby supplying gas at either end of the actuator component 200.

[0096] It can also be seen that Figure 1A and Figure 1B As shown, Figure 2A-2C The nozzles 121 and gas orifices 221 of the actuator component 200 are arranged in an alternating relationship extending in the array direction (10). In addition, they are arranged in a regularly spaced alternating pattern, wherein the nozzles 121 are spaced apart by a nozzle spacing ns, and the gas orifices 221 are also spaced apart by a nozzle spacing ns, so that the spacing between the nozzle 121 and its adjacent gas orifice 221 measured from center to center in the array direction 10 is ns / 2 in the array direction 10. Figure 2A-2C The gas orifice 221 and the nozzle 121 are aligned at their centers in the liquid chamber extension direction 5. However, Figure 1A and Figure 1B Unlike the gas orifice 221 (which has substantially the same shape as the nozzle 121), Figure 2A-2C The gas orifices 221 have an elongated shape, in this case a rectangular slot, and extend beyond the nozzles 121 in the positive and negative liquid chamber extension directions 5. This arrangement can allow gas to flow through the gas orifices 221 to create a larger "wall" or gas curtain between adjacent nozzles 121 and reduce fluid interactions between droplets ejected from adjacent nozzles 121. This arrangement can also reduce flooding on the nozzle plate 70 by reducing or preventing any leakage from one nozzle 121 from spreading to another nozzle 121, and thereby reduce nozzle clogging and improve the reliability of the actuator component 200.

[0097] Figure 2A-2C Various other features of the embodiments of Figure 1A and Figure 1BAs described, for example, in order to prevent the gas channel 231 from impacting the liquid manifolds 101, 102, the gas channel 231 is shorter than the liquid chamber 131 in the liquid chamber extension direction 5 (Lg < Ll). Similarly, the gas channel 231 is deeper in the liquid chamber height direction 15, so that their height Hg is greater than the height Hl of the liquid chamber 131, Hg < Hm > Hl, wherein the gas manifold 201 is located below the liquid chamber 131 in the z-direction (or the negative liquid chamber (and gas channel) height direction 15). The gas manifold 201 is also located at the base of the gas channel 231 in the liquid chamber height direction 15, so that the gas manifold 201 intersects with the gas channel 231 and is fluidly connected to the gas channel 231. However, other arrangements are contemplated, provided that the gas manifold 201 is fluidly connected to the gas channel 221 and is fluidly separated from (i.e., not fluidly connected to) the liquid chamber 131 or the liquid path 143. It can also be seen that in this side emitter actuator arrangement, the gas manifold 201 is opposite the nozzle plate 70, i.e., the gas manifold 201 is located on opposite sides of the gas channel 231 and the liquid chamber 131 from the nozzle plate 70 in the liquid chamber height direction 15.

[0098] Now go to Figure 3A-3E , these figures show the actuator components 300 to 600 so that the medium-facing surface 118 of the nozzle plate 70 can be seen, wherein the positions of the liquid chambers 131 and the gas channels 231 are indicated by dashed lines. Figure 3A , when the gas orifices 221 and the nozzles 121 are equally spaced apart in the array direction 10, it can be seen that the gas orifices 221_1-221_7 are offset by an offset distance Oo relative to the nozzles 121_1-121_6 in the positive y-direction (the liquid chamber extension direction 5), so that the gas orifice 221 is spaced apart from the center of the nozzle 121 in the liquid chamber extension direction 5. If the actuator assembly 300 is arranged in the droplet ejection device 1, 2, 9 so that the positive y-direction is aligned with the medium movement direction 109, the gas orifice array 220 will be downstream of the nozzle array 120. Alternatively, if the actuator assembly 300 is arranged in the droplet ejection device 1, 2, 9 so that the negative y-direction is aligned with the medium movement direction 109, the gas orifice array 220 will be upstream of the nozzle array 120.

[0099] You can also see that, as mentioned above Figure 2A-2C As described in the embodiments, Figure 3A In the actuator component 300, the gas channel 231 is shorter than the liquid chamber 131 in the liquid chamber extension direction 5, so that Ll>Lg, thereby preventing the gas channel from impacting the liquid manifolds 101, 102 (in Figure 3A ) to allow fluid separation of the gas channel 243 and the liquid path 143.

[0100] Now consider Figure 3B , it can be seen that the gas orifices 221 and the nozzles 121 are equally spaced in the array direction 10 and are not offset in the y direction. However, it can be seen from the dotted line that the gas channel 231 is narrower than the liquid chamber 131 in the array direction 10 (Wg < Wl). This is similar to Figure 3A (where Wg=Wl) reduces the nozzle pitch ns compared to 1 / 2 and also reduces the spacing ns / 2 between a nozzle 121 and its adjacent gas orifice 221. This arrangement may be desirable because it increases printing resolution because the nozzles 121 are closer together. Figure 3B The gas orifice 221 in the nozzle 121 is also smaller than the nozzle 121, but this is not limiting. It is understood that, depending on the respective gas and liquid flow rates required for a given application, the gas orifice 221 can be larger or smaller than the nozzle 121, where the width of the narrower gas channel 231 allows this. More generally, the cross-sectional area of ​​the gas orifice 221 can be larger or smaller than the cross-sectional area of ​​the nozzle 121, depending on the requirements of a particular application.

[0101] It can also be seen that Figure 3A The actuator component 300 is different in Figure 3B In the actuator component 400, the gas channel 231 is longer than the liquid chamber 131 in the liquid chamber extension direction 5, so that Ll < Lg, so as to prevent the gas channel from impacting the liquid manifolds 101, 102 ( Figure 3B The arrangement is not shown in the figure) to allow fluid separation of the gas path 243 and the liquid path 143. In this arrangement, the gas path 243 can have two manifolds 201, 202, respectively located at the two ends of the gas channel 231 along the liquid chamber extension direction 5, and the manifolds are fluidly connected so that in use, the gas can flow from the gas manifold 201 along the multiple gas channels 231 in the liquid chamber extension direction 5, and then enter the gas manifold 202. This arrangement can additionally have a single liquid manifold 101 below the liquid chamber 131 along the z direction (for example, similar to FIG. 2A to FIG. 2C arrangement, but the gas path 143 and the liquid path 243 are swapped).

[0102] Alternatively, the two liquid manifolds 101, 102 may be arranged below the liquid chambers 131 in the liquid chamber height direction 15 and fluidly connected so that, in use, liquid may flow from the liquid manifold 101 along the plurality of liquid chambers 131 in the liquid chamber extension direction 5 and then into the liquid manifold 102. Alternatively, any other suitable arrangement of the liquid manifolds 101, 102 and the gas manifolds 201, 202 may be used, as long as the two fluid paths 143, 243 remain fluidly separated while allowing gas and liquid to be supplied to their respective plurality of gas channels 231 and plurality of liquid chambers 131. In the case where the arrangement of the gas paths 243 is for a recirculating flow arrangement, then the gas may be removed from the plurality of gas channels 231 via any suitable fluid path, such as described above with respect to Figure 2A-2C Similarly, where the liquid paths 143 are used in a recirculating flow arrangement, then any suitable fluid path arrangement may be used to remove liquid from the plurality of liquid chambers 131 .

[0103] Now go to Figure 3C , which depicts something like Figure 3A , but wherein the actuator component 500 includes two rows of gas orifices 221 (labeled a and b), offset from the nozzle 121 in the positive y direction and the negative y direction by offsets Oo1 and Oo2, respectively, so that each nozzle 121 has two or more gas orifices 221. It is understood that this is not restrictive, and there may be multiple gas orifices 221 for each droplet ejection nozzle 121, so that the multiple gas orifices 221 of each droplet ejection nozzle 121 are spaced apart from the nozzle center in the liquid chamber extension direction 5. This means that each gas channel 231 includes two or more or more gas orifices 221. The multiple gas orifices 221 of each droplet ejection nozzle 121 are also spaced apart from the nozzle center in the array direction 10. Using this arrangement, the nozzle 121 can be surrounded by a larger amount of gas flow, thereby enabling improved control of the droplet trajectory and / or the composition of the gas surrounding the droplet, and thus enabling improved control of the properties and / or characteristics of the droplet (such as the evaporation rate caused by the droplet trajectory and / or the composition of the gas surrounding the droplet). In addition, Figure 3C In FIG. 2 , the cross-sectional area of ​​the gas orifice 221 is larger than the nozzle 121 , but this is by no means limiting and other sized gas orifices may be used, as previously discussed.

[0104] Now go to Figure 3D , which depicts something like Figure 3Barrangement, in which the gas channel 231 is narrower than the liquid chamber 131. The main difference is that the alternating nozzles 121 are staggered in the y direction at a staggered distance sd, so that all odd-numbered nozzles 121_1, 121_3, etc. are at a y position y1, and all even-numbered nozzles 121_2, 121_4, etc. are at a y position y1+sd. It can also be seen that each nozzle 121 is arranged adjacent to four gas orifices, and each gas channel 231 includes four gas orifices 221 (marked from a to d), except for the gas channels 221_1 and 221_7 at the outermost edges of the gas channel array 230 along the array direction 10, and the gas channels 221_1 and 221_7 each include two gas orifices. In other words, in Figure 3D In the actuator component 600, each droplet ejection nozzle 121 has at least two gas orifices 221 spaced apart from the nozzle center in the array direction 10, and each droplet ejection nozzle 121 has at least two gas orifices 221 spaced apart from the nozzle center in the liquid chamber extension direction 5, so that the droplet ejection nozzle 121 is substantially surrounded by the gas orifices 221. This arrangement of each nozzle 121 having a plurality of gas orifices 221 may be beneficial, wherein the flow rate and / or fluid properties or medium velocity of the liquid may require a larger amount of gas or a larger number of gas orifices to be arranged around each nozzle in order to provide control around a larger proportion of the circumference of each nozzle to control the falling velocity or other properties of the droplets, such as controlling the humidity around the droplets.

[0105] It can be seen that in Figure 3C The actuator component 500 and Figure 3D In the actuator component 600, the gas channel 231 and the liquid chamber 131 have the same length in the liquid chamber extension direction 5. It can be understood that for the previously described embodiments, any suitable arrangement of the liquid manifolds 101, 102 and the gas manifolds 201, 202 can be used to supply liquid and gas to the corresponding gas channel 231 and liquid chamber 131 while maintaining fluid separation of the gas path 243 and the liquid path 143. For example, the liquid manifold and the gas manifold can be located at different vertical heights in the z-direction, and the liquid chamber 131 and the gas channel 231 can also be located at different vertical heights in the z-direction, so that the fluid paths 143, 243 do not impact each other. As is known in the art, a descender can be used in the fluid paths 143, 243 to fluidly connect the gas orifice 221 and / or the nozzle 121 to their respective gas channels 231 and liquid chambers 131. It will be appreciated that, more generally, any suitable arrangement of fluid pathways 143, 243 is contemplated as long as fluid separation of the two pathways is maintained.

[0106] Figure 3E Describes something like Figure 3D The actuator component 700 of the actuator component of the embodiment of the present invention shows a nozzle plate 70, wherein the nozzles 121 are staggered in the liquid chamber extension direction 5 and are larger than the gas orifice 221 outlet, and wherein there is more than one gas orifice 221 in each gas channel 231, so that each nozzle 121 is located near multiple gas orifices 221. Figure 3D Different, in Figure 3E In the embodiment, a plurality of gas orifices 221 are arranged at a radius R from a center C of the nozzle 121 , such that the gas orifices 221 substantially surround the nozzle 121 .

[0107] Now consider Figure 4 , which depicts something like Figure 2A-2C The actuator component 800 of the actuator component of the embodiment of the present invention mainly differs in that there are two gas manifolds 201, 202 arranged at the bottom (in the liquid chamber height direction 15) and fluidly connected to the plurality of gas channels 231, so that gas can be supplied from the gas manifold 201 to the gas channels 231 at one end along the liquid chamber extension direction 5, and gas can be removed from the gas channels 231 into the gas manifold 202 at the opposite end along the liquid chamber extension direction 5. The gas manifolds 201, 202 can be connected to one or more gas ports 244 and one or more gas ports 245, respectively. For example, there can be gas ports 244_a-244_j connected to the gas manifold 201 and gas ports 245_a-245_k (in Figure 4 In this arrangement, multiple gas ports 244, 245 are arranged below the gas manifolds 201, 202 along the liquid chamber height direction 15. They can be conveniently connected to additional gas paths within the droplet ejection device 1, 2, 9.

[0108] In other arrangements, the gas port 244 and the gas port 245 may be located in alternative locations, provided that fluid separation of the gas path 243 and the liquid path 143 is maintained. In operation, an arrangement such as this may supply gas to and remove gas from the plurality of gas channels 231, with the gas supply source 240 operating as a positive gas supply source 240. For example, in this arrangement, the gas port 244 operates as an inlet gas port 244 to supply the gas manifold 201, and the gas manifold 201 then supplies gas to the plurality of gas channels 231. A portion of the gas may exit the gas channels 231 via the corresponding gas orifices 221, and the remaining gas may return to the gas supply source 240 via the gas manifold 202 and the gas port 245, which operates as an outlet gas port 245 (see Figure 4248 in FIG. 1 ). Alternatively, when operating as a negative gas supply 240, gas may enter gas channel 231 via gas orifice 221 and then flow to gas supply 240 via gas manifolds 201, 202 and then via both gas port 244 and gas port 245, which may operate as outlets to remove gas from gas manifolds 201, 202, respectively.

[0109] exist Figure 4 It can also be seen that there are multiple liquid inlets 144_a, 144_b fluidly connected to the liquid manifold 101 and multiple liquid outlets 145_a, 145_b fluidly connected to the liquid manifold 102. In this arrangement, the multiple liquid inlets 144 and the multiple liquid outlets 145 are arranged below the liquid manifolds 101, 102 along the liquid chamber height direction 15. They can be conveniently connected to additional liquid paths within the droplet ejection device 1, 2, 9. It will be appreciated that in other arrangements, the liquid inlets 144 and the liquid outlets 145 can be located in alternative positions, provided that the fluid separation of the gas path 243 and the liquid path 143 is maintained. In operation, an arrangement such as this can supply liquid from a liquid supply source 140 via a liquid path 143 to a plurality of liquid chambers 131, wherein the liquid enters the liquid chambers 131 from the liquid manifold 101, which is fed with liquid via the liquid inlet 144. A portion of the liquid may be ejected from the liquid chamber 131 via the nozzle 121 in response to a print command, and the remainder of the liquid may be returned to the liquid supply 140 via the liquid manifold 202 and then via the liquid outlet 145 .

[0110] Now go to Figure 5 , which is a schematic diagram of a droplet ejection device 9 including an actuator component 900 according to an embodiment, the actuator component 900 having an actuator assembly 80 and a nozzle plate 70 arranged in a droplet ejection head 902. The droplet ejection device 9 also includes a conveying mechanism 105 for moving a deposition medium 103 and a controller 104. The droplet ejection head 902 is installed above the deposition medium 103 so that there is a gap G between the droplet ejection head 902 and the deposition medium 103. The deposition medium 103 moves along a medium moving direction 109. The nozzle plate 70 has a surface 118 facing the medium, and outlets of one or more nozzles 121 are located in the surface 118 facing the medium. The actuator component 900 is arranged to eject droplets toward the deposition medium 103 via one or more nozzles 121 in response to a signal sent by the controller 104. The controller 104 can also control the conveying mechanism 105.

[0111] Alternatively, there may be a main controller to control all aspects of the droplet ejection device 9. In addition, there may be a media encoder circuit 107. The droplet ejection device 9 also includes a liquid supply source 140, a liquid path 143 including an inlet liquid path 141, a gas supply source 240, and a gas path 243 including a gas path 241. Although in Figure 5 1, but the actuator assembly 900 also includes one or more gas orifices 221 for allowing gas to flow through the gas orifice outlet in the medium-facing surface 118. Similarly, the actuator assembly 900 includes one or more liquid chambers 131, one or more gas channels 231, etc. as described herein. The droplet ejection head 902 can include one or more actuator assemblies 900. It is generally understood that any of the actuator assemblies 100-1000 described herein can be used in the droplet ejection device 9.

[0112] How to operate

[0113] The method of operating any of the devices 1, 2, 9 described herein may include ejecting liquid droplets from the nozzle 121 in accordance with printing instructions and causing gas to flow through the gas orifice 221 so as to control the liquid droplets ejected from the droplet ejection nozzle 121. In the case where the gas supply source 240 is a positive gas supply source 240, the method may further include arranging the gas supply source 240 so as to supply gas from the positive gas supply source 240 to the actuator component 100-900 via the gas flow path 243, and causing the gas to flow from the inside of the actuator component 100-900 to the outside of the actuator component 100-900 through the gas orifice 221. In the case where the gas supply source 240 is a negative gas supply source 240, the method may further include arranging the gas supply source 240 so as to draw gas into the actuator component 100-900 through the gas orifice 221 and draw gas into the negative gas supply source 240 via the gas path 243. The method may also include controlling the droplet composition by means of interaction with the gas flowing through the gas orifice 221. Additionally or alternatively, the method may include controlling the droplet ejection velocity as a function of the velocity of the gas flowing through the gas orifice 221. The method may include adjusting the velocity of the gas as it flows through the gas orifice 221 as a function of the droplet ejection velocity. In some applications, the velocity of the gas as it flows through the gas orifice 221 may be greater than the droplet ejection velocity.

[0114] The gas supply source 240 may be continuous, such that the flow of gas through the gas orifice 221 is substantially continuous, or the flow may alternatively be pulsed. For example, it may be advantageous to pulse the gas supply to facilitate purging of the gas path 243 or cleaning of the nozzle plate 70. The gas supply source 240 may be adjustable to operate as a positive or negative gas supply source depending on operational requirements.

[0115] In the case where the apparatus 1, 2, 9 includes a return liquid path 142, the method may further include causing the non-ejected liquid to flow from the liquid chamber 131 to the liquid supply 140 via the return liquid path 142. The liquid may flow, for example, from the plurality of liquid chambers 131 into the return liquid manifold 102 and from there into the return liquid path 142. Similarly, in the case where the apparatus 1, 2, 9 includes a return gas path 242, the method may further include causing the gas to flow from the gas channel 231 to the gas supply 240 via the return gas path 242. The liquid may flow, for example, from the plurality of gas channels 231 into the gas manifold 201 and from there into the return gas path 242.

[0116] Alternatively, in the presence of the second gas manifold 202, the gas may flow from the plurality of gas channels 231 to the return gas manifold 202 and from there to the return gas path 242. It will generally be appreciated that the liquid used in the printing method may be one of many types of suitable liquids, depending on the application, for example it may be a printing ink, it may be an ink for printing on glass, or on plastic, or on ceramics, or on textiles, or on paper or cardboard, for example.

[0117] Alternatively, the liquid may be suitable for more novel applications, such as for printing electrical components, or for 3D printing applications to manufacture 3D printed parts. Alternatively, the liquid may be suitable for printing onto a vehicle, or a building or other 3D object. It will also be appreciated that the method may involve the use of a gas, wherein the gas may include one or more of the following: atmospheric air, air heated to a temperature above ambient or cooled to a temperature below ambient, humid air having a humidity greater than ambient temperature, dehumidified air having a humidity less than ambient temperature, an inert gas, a solvent used as a component of the liquid, wherein the solvent is in gaseous form.

[0118] Manufacturing method

[0119] Now go to Figure 6A-6D , these figures summarize the main steps in the method of manufacturing an actuator assembly 80 for an actuator component 100-900 for a droplet ejection head, as described herein. The main steps are as follows:

[0120] Step 1: Fig. 6AAs shown, one or more cutouts 81 are formed in one or more piezoelectric material strips 82, and the piezoelectric material strips 82 are fixedly attached to a substrate 83 to form one or more gas manifolds 201. The piezoelectric material strips 82 may, for example, include lead zirconate titanate (PZT), but any suitable material may be used. This step may also include fixedly attaching a larger piece of piezoelectric material to a substrate 83, and then cutting or shaping or machining the larger piece of piezoelectric material to form one or more piezoelectric material strips 82, wherein one or more cutouts 81 have been preformed in the larger piece of piezoelectric material to provide one or more gas manifolds 201.

[0121] Alternatively, the one or more gas manifolds 201 may be formed as one or more cutouts 81 (not shown) in the substrate 83 prior to attaching the one or more piezoelectric material strips 82. In another embodiment of the method, there may be one or more cutouts 81a in the substrate 83 and one or more cutouts 81b in the one or more piezoelectric material strips 82, such that when the two components are joined together, the one or more gas manifolds 201 are formed by aligning the two cutouts 81a, 81b (see Fig. 6E The cutout 81 may be arranged adjacent to or at an interface or boundary between the substrate 83 and the corresponding piezoelectric material strip 82 in the liquid chamber height direction 15 .

[0122] Step 2: If Figure 6B As shown, one or more gas channel arrays 230 are formed in one or more piezoelectric material strips 82 so as to produce a plurality of open-ended gas channels 231 in the one or more piezoelectric material strips 82 , wherein the gas channels 231 are aligned in the array direction 10 along the one or more piezoelectric material strips 82 .

[0123] Each gas channel 231 is formed so that it includes an open channel in the piezoelectric material strip 82, which has openings at both ends in the liquid chamber extension direction 5, and so that the gas channel 231 is also open along its range on the opposite side of the substrate (i.e., along the liquid chamber height direction 15). In addition, each gas channel 231 opens to the gas manifold 201 on one side of the piezoelectric strip 82 facing the substrate 83 and is fluidly connected to the gas manifold 201. For example, they can be formed to be deep enough to intersect with the cutout 81 forming the gas manifold 201, that is, they can be partially or completely open on one side facing the substrate 83 so as to be fluidly connected to the gas manifold 201. Any suitable method can be used to form the gas channel 231, such as laser cutting, or cutting with a cutting blade or saw, or using a water jet cutter or any other suitable cutting tool. As an example, a cutting blade with a width between 3 μm and 160 μm can be used. Depending on the desired design, the gas channels 231 may be formed to have any suitable width Wg; for example, their width may be between 3 μm and 160 μm, more preferably between 50 μm and 100 μm. The gas channels 231 may be narrower than the liquid chambers 131 in the array direction 10 (Wg < Wl).

[0124] This step may also include forming the liquid chambers 131 so that each liquid chamber 131 may include an open channel in the piezoelectric material strip 82, the open channel having openings at both ends along the liquid chamber extension direction 5, and so that the liquid chambers 131 may also be open along their extent on the opposite side from the substrate 83 (i.e., along the liquid chamber height direction 15). The liquid chambers 131 may be formed using any suitable method, such as laser cutting, or cutting with a cutting blade or saw, or using a water jet cutter or any other suitable cutting tool. Depending on the desired design, the liquid chambers 131 may be formed to have any suitable width Wl; for example, their width may be between 3 μm and 160 μm, more preferably between 50 μm and 100 μm. The liquid chambers 131 may be formed so that their height is lower than the gas channels 231 so as not to impact the gas manifolds 201, 202. Preferably, the same method may be used to form both the gas channels 231 and the liquid chambers 131. In the case where both have the same width (Wl=Wg), the same cutting blade may be used to form both the gas channel 231 and the liquid chamber 131. Alternatively, the liquid chamber 131 may be formed later (see step 4 below).

[0125] The open design of the piezoelectric material strip 82 mounted on the substrate 83 can allow the cutting blade to enter, for example, from the side and traverse the entire length of the liquid chamber 131 from one end to the other in the liquid chamber extension direction 5 to form the open channel, that is, the liquid chamber can have a constant height Hl (and cross-sectional area) along its entire length in the liquid chamber extension direction 5. This can lead to a more uniform flow along the liquid chamber 131. This is different from other designs, in which, for example, the cutting blade must be lowered from above to cut the liquid chamber 131, resulting in a lower height of the channel at its end in the liquid chamber extension direction 5. Therefore, this different design changes the liquid flow rate at the end of the liquid chamber 131 as the depth changes. The gas channels 231 can be formed similarly to the liquid chamber 131 so that they also have a constant height Hg (and cross-sectional area) along their entire length in the liquid chamber extension direction 5.

[0126] Step 3: Form one or more covering parts 84_a, 84_b conformal to at least some of the one or more piezoelectric material strips 82 and at least some of the substrate 83. The method may include fixedly attaching a first covering part 84_a to each of the one or more piezoelectric material strips 82 at a first end in the liquid chamber extension direction 5, and fixedly attaching a second covering part 84_b to each of the one or more piezoelectric material strips 82 at a second opposite end in the liquid chamber extension direction 5. Step 3 may also include fixedly attaching one or more covering parts 84_a, 84_b to at least some of the substrate 83, such as Figure 6C As shown. The covering parts 84_a, 84_b may include a single layer of material, or may be formed by multiple layers of material fixedly attached together. Alternatively, the covering parts 84_a, 84_b may include multiple parts that have been preformed to conform to specific portions of the piezoelectric material strip 82 or substrate 83, and then the covering parts 84_a, 84_b and these specific portions are fixedly attached together.

[0127] The covering parts 84_a, 84_b can be formed by machining or molding or any suitable manufacturing technology (such as cutting or grinding or laser ablation). The material of the covering parts 84_a, 84_b can be the same material as the piezoelectric material strip, or it can be a different material. The material of the covering parts 84_a, 84_b may include a material that is acoustically the same or similar to the piezoelectric material strip 82 and / or the substrate 83. The covering parts 84_a, 84_b can be fixedly attached using any suitable method, for example, the attachment method may include bonding using any suitable bonding material. The bonding method may include depositing or 3D printing the bonding material in place. The bonding material may be curable, such as a heat-curable material, or, if the covering parts 84_a, 84_b are formed of a UV transparent material, a UV curable material may be used. Epoxy resins can be used-bonding materials that are curable within a temperature range that does not damage or otherwise damage the performance of the PZT; for example, they can be cured at less than 140°C, more preferably less than 120°C. Depending on the design of the actuator component being manufactured, whether with or without flow recirculation, an end emitter or a side emitter actuator, there may be covering components on one or both sides of the strip of piezoelectric material in the direction 5 of extension of the liquid chamber.

[0128] In the case where there is a covering member 84_a (such as in Figure 1A to Figure 1B In the embodiment of the present invention, the method may include fixedly attaching a first covering member 84_a to each of the one or more piezoelectric material strips 82 at a first end along the liquid chamber extension direction 5. In the case where there are two covering members 84_a, 84_b (such as in Figure 2A-2C , Figure 4 In the embodiments and as Figure 6C-6E ), the method may further include fixedly attaching a second covering member 84_b to each of the one or more piezoelectric material strips 82 at a second opposite end along the liquid chamber extension direction 5.

[0129] Step 4 - Once the cover members 84_a, 84_b are attached, holes 85_a, 85_b may be formed in the cover members 84_a, 84_b. Thus, the manufacturing method may include forming a plurality of holes 85_a, 85_b in the first cover member 84_a and the second cover member 84_b such that the first cover member 84_a and the second cover member 84_b include at least one hole 85_a, 85_b corresponding to each liquid chamber 131 in a majority of the liquid chamber array 130. The respective holes 85_a, 85_b for each liquid chamber 131 are paired such that for each liquid chamber 131, there is a continuous liquid path through the first hole 85_a in the first cover member 84_a at the first end of the liquid chamber 131, through the liquid chamber 131, and through the hole 85_b in the second cover member 84_b at the second end of the liquid chamber 131. As described above, with respect to forming the liquid chamber, the holes 85_a, 85_b can be formed using a cutting blade that enters from the side and traverses the entire length of each hole so as to form each hole 85_a, 85_b having a constant height Ha, which height can be the same as the height of the adjacent liquid chamber 131 (Ha=Hl) or it can be smaller (Ha﹥Hl) to allow for limiters at the inlet and / or outlet of the liquid chamber in the liquid chamber extension direction 5.

[0130] Forming the holes 85_a, 85_b may include passing the cutting blade through the covering members 84_a, 84_b at appropriate locations in the array direction 10. If the liquid chambers are not formed as part of step 2 (see above), this step may also include forming the liquid chambers 131, in which case the step may be performed by passing the cutting blade through one or more covering members 84_a, 84_b and the piezoelectric material strip 82 in a single pass of each liquid chamber 131 to form a continuous liquid path therethrough. The liquid chambers 131 and the holes 85_a, 85_b may be formed so that they pass continuously through the covering members 84_a, 84_b and the piezoelectric material strip 82. The liquid chambers 131 and the holes 85_a, 85_b may be formed so that their height is lower than the gas channels 231 so that they do not impact the gas manifolds 201, 202. Like the holes 85_a, 85_b, the liquid chamber 131 is also open along a range on opposite sides of the substrate 83 in the liquid chamber height direction 15.

[0131] To form the gas channels 231 and / or the liquid chambers 131, the cutting blade may be lowered toward the substrate 83 to one side of the piezoelectric material strip 82, and then moved across the piezoelectric material strip 82 in the liquid chamber extension direction 5. In the case where there is more than one piezoelectric material strip 82, the cutting blade may be moved so as to simultaneously form all of the liquid chambers 131 and / or gas channels 231 at a given position in the array direction 10. The cutting blade may then be raised and returned to its original position, and the actuator assembly 80 may be incrementally moved in the array direction 10 so that the next row of liquid chambers 131 and / or gas channels 231 may be formed. When forming the liquid chambers 131, the cutting blade may be lowered to a smaller extent than when forming the gas channels 231, so that the liquid chamber height H1 is less than the gas channel height Hg (H1 < Hg). Depending on the manner and location of the gas manifold 201, the liquid chamber height H1 may also be less than the gas channel height Hg minus the gas manifold height Hm (ie, H1 < (Hg - Hm)).

[0132] Alternative methods of forming the gas channels 231 and the liquid chambers 131 can be envisioned. For example, both the liquid chamber array 130 and the gas channel array 230 can be formed simultaneously using a cutting blade to cut open channels (grooves) in one or more piezoelectric material strips 82, as described above in step 2. For example, by appropriately changing the depth setting as the blade moves incrementally along the piezoelectric material strip 82 in the array direction 10, the cutting blade can be used to cut alternating deeper grooves for the gas channels 231 and shallower grooves for the liquid chambers 131. One or more cover members 84_a, 84_b can then be attached, and the liquid chamber holes 85_a, 85_b can then be formed through the cover members 84_a, 84_b in a second cutting operation. Alternatively, the liquid chamber holes 85_a, 85_b can be formed before the cover members 84_a, 84_b are attached to the piezoelectric material strip 82. Alternatively, the liquid chamber holes 85_a, 85_b can be formed simultaneously with the liquid chamber 131 in a single operation, such as using the same cutting blade to cut through both one or more cover members 84_a, 84_b and one or more piezoelectric material strips 82.

[0133] Typically, the manufacturing method includes selectively forming a plurality of holes 85_a in a first covering member 84_a, wherein the first covering member 84_a includes at least one hole 85_a corresponding to each liquid chamber 131 in a majority of the liquid chamber array 130, and, where present, selectively forming a plurality of holes 85_b in a second covering member 84_b, wherein the second covering member 84_b includes at least one hole 85_b corresponding to each liquid chamber 131 in a majority of the liquid chamber array 130. It will be appreciated that in the case of an embodiment including two covering members 84_a, 84_b for each piezoelectric material strip 82, the holes 85_a, 85_b may be aligned, for example, at the first end and the second end of each corresponding liquid chamber 131, so that liquid may flow therethrough, entering at the first end and exiting at the second end.

[0134] Instead of cutting grooves to form holes 85_a, 85_b, alternatively, they can be formed using different methods, such as laser etching or drilling or drilling. The holes 85_a, 85_b may not extend the entire height of the liquid chamber 131. The holes 85_a, 85_b can be one or more holes or orifices in one or more covering parts 84_a, 84_b, which connect the liquid manifold 101 to the first end of the liquid chamber 131, and, if present, connect the liquid manifold 102 to the second end of the liquid chamber 131. In the case where the gas channel 231 is longer than the liquid chamber 131, the above method steps can be appropriately modified so that the gas channel holes are cut through the covering parts 84_a, 84_b.

[0135] Step 5 - Once the actuator assembly 80 has been formed as desired using any additional steps and stages that may be necessary (such as forming electrical traces and connections, or adding protective layers for chemical / electrical isolation of the components, or adding additional components to complete the formation of the liquid manifolds 101, 102), the nozzle plate 70 can be attached to the actuator assembly 80 to form the actuator component 100-900. The gas orifices 221 and / or nozzles 121 can be formed as desired before the attachment stage and / or after the nozzle plate 70 is in place. The gas orifices 221 and / or nozzles 121 can be formed using any suitable method, such as laser ablation or etching.

[0136] It will generally be appreciated that the electrical traces, drive electrodes, and connectors may be constructed one at a time on some or all of the outer surfaces of the actuator components 100-900, such as on the substrate 83 and the piezoelectric material strip 82, as a continuous layer deposition using any suitable method; for example, electroless plating or metal sputtering / evaporation. Cutting or other removal techniques may then be used to remove some of the metal layers or some of the metal layers to form electrically isolated electrical traces, drive electrodes, and connectors. If electroless plating is used to form the electrical traces, drive electrodes, and connectors, a shallow cut that does not connect the gas channel 231 to the gas manifold 201 may initially be used to form the gas channel 231. The gas channel 231 and the liquid chamber 131 may then be metallized, and another cut may then be used to connect the gas channel 231 to the gas manifolds 201, 202. These steps will prevent metallization of the gas manifolds 201, 202 (which may result in electrical shorts).

[0137] An alternative method would be to use line of sight plating of metal, a method that allows control over the location and depth of any metal that can be deposited into the gas channel 231. Still further, the gas manifolds 201, 202 could have a disintegrable / removable plug formed within them, and the gas channels could be cut in the usual manner, connected to the gas manifolds 201, 202 and the plug. Metallization would then be performed, and the plug subsequently dissolved / removed along with any metal deposited on the plug, enabling connection between the gas channel 231 and the now open gas manifolds 201, 202.

[0138] If the actuator assembly is used for an end launcher, such as Figure 1A to Figure 1B As shown, the nozzle plate 70 can be fixedly attached to the piezoelectric material strip 82 at a second end opposite to the covering part 84_a along the liquid chamber extension direction 5, so that the nozzle plate 70 is used to fluidly seal the gas channel 231 and the liquid chamber 131 in the liquid chamber extension direction 5.

[0139] If the actuator component is used for example Figure 2A-2C If the nozzle plate 70 is a side emitter, the nozzle plate 70 can be fixedly attached to the piezoelectric material strip 82 at one side along the liquid chamber height direction 15 (i.e., at the opposite side from the substrate 83), so that the nozzle plate 70 is used to fluidically seal the liquid chamber 131 and the gas channel 231 in the liquid chamber height direction 15, as shown in FIG. Fig. 6E As shown. It can also be seen that Fig. 6EIn the arrangement of the nozzle plate 70, the nozzle plate 70 can further seal the holes 85_a, 85_b in the cover parts 84_a, 84_b, which connect the liquid manifolds 101, 102 to the liquid chamber 131. The nozzle plate 70 can also seal the liquid manifolds 101, 102 in the liquid chamber height direction 15, although this is not required and other arrangements can be used to form and / or seal the liquid manifolds 101, 102. It can be understood that the actuator component 100-900 can include additional components, for example, to seal the liquid manifolds 101, 102 at either side along the liquid chamber extension direction 5 and at either end in the array direction 10.

[0140] Furthermore, it will be appreciated that in other arrangements, e.g. Figure 1A to Figure 1B The nozzle plate 70 may be attached to the piezoelectric material strip 82 at one side along the liquid chamber extension direction 5 so as to fluidically seal the liquid chamber 131 and the gas channel 231 at the second end of the liquid chamber 131 along the liquid chamber extension direction 5. It is understood that in this design, the covering member 84_a may be arranged on the opposite side of the piezoelectric material strip 82 along the liquid chamber extension direction 5 from the nozzle plate 70, that is, at the first end of the liquid chamber 131. Holes 85_a may be formed in the covering member 84_a to connect to the plurality of liquid chambers 131 and fluidly connect the plurality of liquid chambers 131 to the liquid manifold 101. For example, the manufacturing method may include fixedly attaching a first covering member 84_a to each of the one or more piezoelectric material strips 82 at a first end along the liquid chamber extension direction 5, and selectively forming a plurality of holes 85_a in the first covering member 84_a so that the first covering member 84_a includes at least one hole 85_a corresponding to each liquid chamber 131 in a majority of the liquid chamber array 130.

[0141] It will also be appreciated that where the actuator component does not include a return liquid path 142 or a second (return) liquid manifold 102 (i.e., the actuator component is not a recirculation actuator component for liquid path 143), then only a first covering component 84_a having an aperture 85_a at the first end of the liquid chamber 131 may be required, and the above steps may be adjusted accordingly.

[0142] It will also be appreciated that the end launcher actuator assembly may also require a top member 86 (see Figure 1A ), a top member 86 may be attached to the side of the piezoelectric material strip opposite the substrate 83 and the one or more gas manifolds 201, 202 to fluidically seal the gas channel 231 and the liquid chamber 131 in the liquid chamber height direction 15. The top member 86 may be attached before or after the nozzle plate 70.

[0143] It will be appreciated that the order of the above steps may be altered as desired, depending on the type of actuator component being manufactured, and additional steps may be inserted as needed to form other features of the actuator components and drop ejection heads, such as forming electrical traces and connections or providing insulation and protective coatings. It will generally be appreciated that the above manufacturing method may be used with appropriate adjustments whether each respective strip of piezoelectric material 82 has one covering member 84_a (i.e., for an end-launch actuator component) or each respective strip of piezoelectric material has two covering members 84_a, 84_b (i.e., for a side-launch actuator component).

[0144] Generally, the manufacturing method may include forming one or more cutouts 81 in a substrate 83 and / or a strip of piezoelectric material 82;

[0145] - fixedly attaching one or more piezoelectric material strips 82 to a substrate 83 such that each of the one or more cutouts 81 is arranged adjacent an interface between the substrate 83 and a respective piezoelectric material strip 82 so as to form one or more gas manifolds 201, 202, wherein each of the arrays 130 of one or more liquid chambers 131 is fluidly separated from the one or more gas manifolds 201, 202; and

[0146] Each of the one or more arrays 230 of gas channels 231 is fluidly connected to at least one of the one or more gas manifolds 201 , 202 .

[0147] General considerations

[0148] It will be generally appreciated that the actuator components 100-900 for a droplet ejection head described herein include an actuator assembly 80 and a nozzle plate 70. It will be appreciated that the actuator components may include additional components as desired.

[0149] The actuator assembly 80 may include a plurality of liquid chambers 131 arranged in a liquid chamber array 130, the plurality of liquid chambers 131 extending in an array direction 10, wherein the plurality of liquid chambers 131 are arranged to be fluidically connected to a liquid supply source 140. The actuator assembly 80 may also include a plurality of gas channels 231 arranged in a gas channel array 230, the plurality of gas channels 231 also extending in the array direction 10, wherein the plurality of gas channels 231 are arranged to be fluidically connected to a gas supply source 240. The liquid chamber array 130 and the gas channel array 230 are arranged to be fluidically independent of each other.

[0150] The nozzle plate 70 may include: a plurality of droplet ejecting nozzles 121 arranged in a nozzle array 120 extending in an array direction 10; and a plurality of gas orifices 221 arranged in an orifice array 220 extending in the array direction 10. The gas orifices 221 and the droplet ejecting nozzles 121 may be arranged in a repeating pattern extending in the array direction 10.

[0151] Each liquid chamber 131 can be arranged to be fluidly connected to one or more of the droplet ejection nozzles 121 and can be actuated to eject liquid droplets. A plurality of gas channels 231 can be arranged to be fluidly connected to corresponding one or more gas orifices 221 for gas flow. In use, the actuator component 100-900 can be configured so that the gas flowing through the gas orifice 221 controls one or more properties of the liquid ejected from the droplet ejection nozzle 121.

[0152] The actuator assembly 80 may include a substrate 83 and one or more piezoelectric material strips 82 fixedly attached to the substrate 83. Each piezoelectric material strip 82 may have one or more cutouts 81 arranged at a boundary between the piezoelectric material strip and the substrate 83, wherein each cutout 81 may be formed completely in the substrate 83, completely in the piezoelectric material strip 82, or as alignment cutouts 81a, 81b formed in the substrate 83 and the piezoelectric material strip 82, respectively. The cutouts 81 may form the gas manifolds 201, 202 and may be fluidly connected to the plurality of gas channels 231 while remaining fluidically isolated from the plurality of liquid chambers 131.

[0153] In some arrangements, the gas orifice array 220 may start before the nozzle array 120 along the array direction 10 and end after the nozzle array 120, so that there are gas orifices 221 at the outermost sides of the positive array direction 10 and the negative array direction 10. In such an arrangement, the total number of gas orifices 221 will be one more than the number of nozzles 121, for example, m=n+1. In addition, it will be appreciated that the piezoelectric strip 82 may include a buffer region in the array direction 10. The buffer region may include a dummy liquid chamber and a dummy gas channel, each of which does not have a nozzle or an orifice. The dummy liquid chamber and the dummy gas channel may not eject ink through the nozzle 121, or allow gas to flow through the orifice 221, but allow fluid (liquid or gas, respectively) to pass therethrough during use. The buffer region including these may be found, for example, at the outer end of the actuator component 100-900 along the array direction 10. Thus, they can improve flow uniformity along the actuator components 100-900 in the array direction 10, and can also help improve stress distribution along the actuator components 100-900 in the array direction 10. Therefore, they can improve droplet ejection performance and print quality (because stress in actuator components such as described herein can cause flow non-uniformities, which "print" into observable defects in the printed image or product). Buffer regions can also be used to create gaps between nozzle clusters for controlling, for example, wood grain effects. In some cases, buffer regions can include areas without liquid chambers 131 or gas channels 231.

[0154] In some of the embodiments described herein, the outlet of the nozzle 121 and the gas orifice 221 in the medium-facing surface 118 is circular in cross-section, but it is understood that this is by no means limiting, and in other arrangements, the nozzle 121 and / or the gas orifice 221 may have other shapes at its outlet. The gas orifice 221 may have any suitable shape, such as a rectangular, circular, elliptical, or a more complex geometric shape. As described herein with reference to any of the embodiments and arrangements disclosed, the gas orifice 221 may have the same or a different cross-sectional shape as the nozzle 121. In addition, the cross-sectional area of ​​the outlet of the gas orifice 221 may be greater than or less than the cross-sectional area of ​​the outlet of the nozzle 121, and it is understood that the cross-sectional areas of the gas orifice 221 and the nozzle 121 may be selected according to operational requirements.

[0155] The cross-sectional shape and area of ​​the nozzle 121 and / or the gas orifice 221 can be the same across the nozzle plate 70 (e.g., across the nozzle plate thickness T along the ejection direction 16), or they can vary across the nozzle plate 70 (e.g., across the nozzle plate thickness T) from the inlet to the outlet (e.g., there can be a tapered hole such that the cross-sectional area increases (or decreases)). In addition, the gas orifice 221 and / or the nozzle 121 can be angled such that they pass through the nozzle plate 70 at an angle relative to the nozzle plate thickness T. For example, the gas orifice 221 can be angled so as to direct the gas flowing through the gas orifice 221 toward the nozzle 121. In the case where there are multiple gas orifices 221 surrounding the nozzle 121, such angled gas orifices 221 can improve the control of the droplet trajectory.

[0156] With respect to the gas orifices 221, where the direction of gas flow depends on the operation or type of the gas supply source 240, it is generally understood that the terms "inlet" and "outlet" of the gas orifices 221 refer to the gas orifice openings inside the actuator component 100-900 and outside the actuator component 100-900, respectively (e.g., the "outlet" is in the surface 118 facing the medium). The minimum diameter or width of any hole in the nozzle plate 70 (whether a gas orifice 221 or a nozzle 121) depends in part on the material of the nozzle plate 70 and the available manufacturing methods. For example, a minimum of 18 μm may be achievable using laser drilling, while for silicon nozzle plates, deep reactive ion etching (DRIE) may be used so that the holes can be smaller, for example, as small as 10 μm.

[0157] It will be appreciated that in a staggered arrangement of the nozzles 121 in a given array 120, one or more adjacent nozzles 121 in the array direction 10 are offset from one another in the liquid chamber extension direction 5 (see, e.g. Figure 3D , Figure 3E and Fig. 6E ), the nozzle spacing ns can be measured by projecting the center lines of the nozzles 121 onto a common line parallel to the array direction 10. In the case where the gas orifices 221 are also staggered in the liquid chamber extension direction 5 (see e.g. Figure 3C , Figure 3D ), similar operations can be performed.

[0158] It is generally understood that the droplet ejection head may include one or more actuator components 100-900 as described herein. In addition, it is generally understood that in the case where the actuator component 100-900 is installed in the droplet ejection head, or is installed in a device 1, 2, 9 including multiple actuator components 100-900 and / or multiple droplet ejection heads, wherein the droplet ejection head includes one or more actuator components 100-900 as described herein, the liquid path 143 and the gas path 243 may be different from those described herein. The path may be more complex and may include additional external sections to connect the fluid supply source 140, 240 to multiple actuator components 100-900 and / or to multiple droplet ejection heads. In addition, there may be additional components in the fluid path within one or more droplet ejection heads to connect the fluid supply (gas and liquid) to one or more actuator components 100-900 located within the droplet ejection head. There may also be additional components of the fluid path to remove fluid (liquid and / or gas) from the actuator component 100-900. Further, it will be appreciated that the fluid path layouts 143, 243 may differ from those described herein while still performing the basic task of supplying fluid to the gas channel 231 and the liquid chamber 131. It will also be generally appreciated that no matter what other components the liquid path 143 and the gas path 243 may include, or what different layouts they may have, the liquid path 143 and the gas path 243 are always fluidly separated from each other.

[0159] It is generally understood that a liquid may be a liquid suitable for being ejected as a droplet, i.e. a liquid for droplet ejection; for example a printing ink. It is understood that the composition of a printing ink varies widely. This may depend on the color being printed, the pigment in the printing ink (if any), the desired properties on the print medium (e.g. opacity, distribution, absorption, light reflection, etc.), and the type of medium being printed on, e.g. paper, card, glass, cloth or fiber, metal, ceramic, etc. In addition, the liquid may be a functional fluid suitable for building textures or for printing electronic components such as circuit boards or for building three-dimensional objects (i.e. for 3D printing).

[0160] In addition to or in lieu of the above-described control of droplet trajectories, the gas path 243 and the gas orifice 221 can generally be used to control other properties of the ejected droplets or the environment surrounding the droplets. For example, the gas can be used to control the humidity / drying rate of the droplets by using a gas that is more humid or less humid than the surrounding environment around the droplet ejection device 1, 2, 9. Similarly, heated or cooled gas can be used to change the environment in close proximity to the droplets. Alternatively, for example, the gas can be used to form a controlled environment to help / prevent reactions in the droplets, such as by using an inert gas or a gas containing one or more components of the liquid. For example, a specific solvent can be used as part of a printing ink, and the same solvent in gaseous form can be ejected through a gas orifice to change (e.g., slow down) the rate at which the solvent evaporates from the droplets. Passing an inert gas through the gas orifice can be used to reduce the oxygen level near the droplets, delaying or inhibiting any oxygen-based solidification that occurs in the droplets in flight. In addition, the ejected gas can simply be used to help keep contaminants (e.g., dust) from the environment away from the nozzle plate 70. For example, this may be advantageous when printing in some industrial environments where there are a lot of particles in the air.

[0161] The actuator components 100-900 for droplet ejection heads described herein may include liquid chambers 131, wherein an actuator is associated with each liquid chamber 131 and is actuatable to eject droplets via one or more droplet ejection nozzles 121 associated with the respective liquid chamber 131. For example, one or more walls of the liquid chamber 131 may be actuatable to eject liquid droplets via the one or more droplet ejection nozzles 121. For example, one or more side walls of each liquid chamber 131 may include a PZT and a suitable drive electrode arrangement, or the liquid chamber 131 may include a roof mode actuator arrangement. However, it will be appreciated that other forms of actuators may also be used, as long as they are suitable for causing the ejection of liquid from a separate liquid chamber 131 via a corresponding nozzle 121 in response to a print instruction.

[0162] It is generally understood that the liquid supply source 140 and the gas supply source 240 may include a liquid source and a gas source, respectively, such as an internal liquid reservoir and a gas compressor, respectively, or they may be connected to reservoirs 146, 246, respectively. Additionally, the liquid supply source 140 and the gas supply source 240 may include pumps, scrubbers, and any other components required to supply liquids and gases.

[0163] It will be appreciated that while the actuator components 100-1000 described herein include an actuator assembly 80 formed of a substrate 83 and a piezoelectric material strip 82, this is by no means limiting, and the actuator assembly 80 may include, for example, one or more substrates 83 and a plurality of piezoelectric material strips 82, each of which includes one or more liquid chamber arrays 130 and one or more gas channel arrays 230. Where appropriate, adjacent piezoelectric material strips 82 may share a liquid manifold 101 or 102. For example, two piezoelectric material strips 82 arranged on a substrate 83 may share a liquid manifold 101 arranged between them in the direction in which the liquid chambers extend. In the case where the actuator component is a recirculating head, the piezoelectric material strip 82 may also include a corresponding liquid manifold 102 on its outer edge along the direction in which the liquid chambers extend 5. Other arrangements of manifolds for two or more piezoelectric material strips 82 are contemplated. It will also be understood that the embodiments described herein may be combined in any suitable manner and, more generally, when any of the actuator components 100-900 described herein are incorporated into a droplet ejection head, the head may include additional components not shown, such as liquid connections, print head electronics, external electrical connections, etc.

[0164] It will also be appreciated that in some arrangements, the gas passage 231 may not be connected to the corresponding one or more gas orifices 221, but may be provided with a gas flow through the gas passage 231 for thermal control purposes. Further, a thermal control fluid may flow through the gas passage 231, which may then generally be referred to as a thermal control fluid passage 231T, wherein the thermal control fluid may be a gas or a liquid. Thus, the arrangement may include an actuator component as described herein and / or an apparatus including an actuator component as described herein. Methods of operating such an actuator component and / or apparatus may include controlling the thermal properties of the thermal control fluid, and thus controlling the thermal properties of the droplets ejected from the nozzle 121. Such control may include, for example, cooling or heating the thermal control fluid before the thermal control fluid enters the actuator component, depending on the operating conditions and the desired properties of the liquid for ejection. Thus, the actuator component and / or the liquid path 143 and / or the thermal control fluid path 243T may include one or more temperature sensors linked to one or more controllers. Cooling may include the transfer of thermal energy from the liquid in the liquid chamber 131 to the thermal control fluid in the thermal control fluid channel 231T, while to heat the liquid for ejection, the transfer of thermal energy will be from the thermal control fluid in the thermal control fluid channel 231T to the liquid in the liquid chamber 131. Whether heating or cooling, it is generally understood that the transfer of thermal energy can be via conduction through the structure of the actuator component, in particular, via the common wall 132 separating the liquid chamber 131 from the thermal control fluid channel 231T. It is understood that controlling the temperature of the liquid can control other properties of the liquid, such as viscosity. It is understood that the method of constructing an actuator component for such an arrangement can be similar to the method described above, wherein the step of forming the gas orifice 221 in the nozzle plate 70 is omitted.

[0165] Generally speaking, an actuator component for a thermally controlled droplet ejection head may include:

[0166] an actuator assembly and a nozzle plate; wherein the actuator assembly includes a plurality of liquid chambers arranged in a liquid chamber array extending in an array direction; and a plurality of thermal control fluid channels arranged in a thermal control fluid channel array extending in the array direction; wherein the plurality of liquid chambers and the plurality of thermal control fluid channels are fluidically independent;

[0167] wherein the plurality of liquid chambers are arranged to be fluidly connectable to a liquid supply;

[0168] wherein the plurality of thermal control fluid channels are arranged to be fluidly connectable to a thermal control fluid supply source;

[0169] wherein the nozzle plate includes a plurality of droplet ejection nozzles, the plurality of droplet ejection nozzles being arranged in a nozzle array extending in an array direction;

[0170] wherein each liquid chamber is arranged to be fluidly connected to one or more droplet ejection nozzles and is actuatable to eject liquid droplets;

[0171] wherein the plurality of thermal control fluid channels and the plurality of liquid chambers are arranged in a repeating pattern extending in an array direction; and

[0172] Therein, the actuator assembly is configured such that, in use, the thermal control fluid flowing through the thermal control fluid channel controls the thermal properties of the liquid flowing through the liquid chamber, thereby controlling the thermal properties of the liquid ejected from the drop ejection nozzle.

[0173] A droplet ejection head may include one or more actuator components for thermal control. A droplet ejection device may include one or more actuator components for thermal control, or one or more droplet ejection heads including one or more actuator components for thermal control; the droplet ejection device may also include a liquid supply source and a liquid path and a thermal control fluid path. The droplet ejection device may also include a thermal control fluid supply source.

[0174] A method of operating such a drop ejection device may include: ejecting liquid droplets from one or more drop ejection nozzles in accordance with a print instruction; and

[0175] A thermal control fluid is flowed through the thermal control fluid passage to control, by heat transfer, thermal properties of liquid flowing through the liquid chamber and thereby controlling thermal properties of liquid ejected from the drop ejection nozzle.

[0176] A method of manufacturing an actuator component for thermal control may include the following steps:

[0177] - forming an actuator assembly, comprising:

[0178] - forming one or more liquid chamber arrays in one or more piezoelectric material strips extending along the array direction, wherein each of the liquid chambers forms an open channel in the piezoelectric material strip, the open channel being open in the liquid chamber height direction and being open at a first end and a second end in the liquid chamber extension direction;

[0179] - forming one or more arrays of thermal control fluid channels in the one or more piezoelectric material strips extending along the array direction, wherein each of the thermal control fluid channels forms an open channel in the piezoelectric material strip, the open channel opening in the liquid chamber height direction and opening at a first end and a second end in the liquid chamber extension direction; wherein the liquid chamber array and the thermal control fluid channel array are fluidically independent of each other; and

[0180] - fixedly attaching the nozzle plate to the actuator assembly;

[0181] - before or after the step of fixedly attaching the nozzle plate to the actuator assembly, forming a drop ejection nozzle in the nozzle plate such that when assembled, the actuator assembly includes a drop ejection nozzle fluidly connected to the liquid chamber.

[0182] A thermally controlled actuator assembly for a drop ejection head may include an actuator assembly and a nozzle plate;

[0183] wherein the actuator assembly comprises a plurality of liquid chambers arranged in an array of liquid chambers extending in an array direction; wherein the plurality of liquid chambers are arranged to be fluidly connectable to a liquid supply source;

[0184] wherein the nozzle plate includes a plurality of droplet ejection nozzles arranged in a nozzle array extending in an array direction;

[0185] wherein each liquid chamber is arranged to be fluidly connected to one or more droplet ejection nozzles and actuatable to eject liquid droplets; wherein the actuator assembly further comprises two or more liquid manifolds arranged below the liquid chamber in a height direction of the liquid chamber;

[0186] wherein a first liquid manifold among the liquid manifolds is fluidly connected to one end of a plurality of liquid chambers in a direction in which the liquid chambers extend; wherein a second liquid manifold among the two or more liquid manifolds is fluidly connected to a second opposite end of a plurality of liquid chambers in a direction in which the liquid chambers extend; and is arranged so that in use, liquid flows from the first liquid manifold along the plurality of liquid chambers from the first end to the second end and into the second manifold.

[0187] consider Figure 7 , which is similar to another embodiment according to Figure 2C Schematic diagram of a section of an actuator component 900 of a section. This embodiment is similar to Figure 2A-2C, but includes two thermal control fluid manifolds 201T, 202T. The thermal control fluid manifolds 201T, 202T are located below the liquid chamber 131 in the z-direction or the negative liquid chamber (and thermal control fluid channel) height direction 15. The thermal control fluid manifolds 201T, 202T are also located at the base of the thermal control fluid channel 231T in the liquid chamber height direction 15, so that they intersect with the thermal control fluid channel 231T and are fluidically connected to the thermal control fluid channel 231T. Therefore, the actuator component 900 includes two (or more) thermal control fluid manifolds (201T, 202T), and the two (or more) thermal control fluid manifolds are arranged so that the first thermal control fluid manifold 201T is fluidically connected to the first end of the plurality of thermal control fluid channels 231T, and the second thermal control fluid manifold 202T is fluidically connected to the second opposite end of the plurality of thermal control fluid channels 231T, so that in use, the thermal control fluid flows from the first thermal control fluid control manifold 201T along the plurality of thermal control fluid channels 231T from the first end to the second end and flows into the second thermal control fluid manifold 202T.

[0188] The thermal control fluid passage 231T may be fluidly connected to a thermal control fluid supply source 240 (see, e.g., Figure 8 ).from Figure 7 As can be seen, there are a plurality of thermal control fluid ports 244T_a-244T_c to connect the thermal control fluid path 243T to the thermal control fluid manifold 201T of the actuator component 900. In operation, this enables the thermal control fluid to be supplied from the thermal control fluid supply source 240T to the thermal control fluid manifold 201T via the inlet thermal control fluid path 241T (as indicated by the white arrow 248T). The thermal control fluid channel 231T may be fluidly connected to the return thermal control fluid path 242T via the thermal control fluid manifold 202T. The second thermal control fluid manifold 202T may include one or more thermal control fluid ports 245T (not shown in this view) to fluidly connect the thermal control fluid manifold 202T to the return thermal control fluid path 242T.

[0189] Now go to Figure 8, which is a schematic diagram of a droplet ejection device 7 including an actuator component 1000 according to an embodiment, the actuator component 900 having an actuator assembly 80 and a nozzle plate 70 arranged in a droplet ejection head 1002. The droplet ejection device 7 also includes a conveying mechanism 105 and a controller 104 for moving a deposition medium 103. The droplet ejection head 1002 is installed above the deposition medium 103 so that there is a gap G between the droplet ejection head 902 and the deposition medium 103. The deposition medium 103 moves along a medium moving direction 109. The nozzle plate 70 has a surface 118 facing the medium, and outlets of one or more nozzles 121 are located in the surface 118 facing the medium.

[0190] The actuator assembly 1000 is arranged to eject droplets toward the deposition medium 103 via one or more nozzles 121 in response to a signal sent by the controller 104. The controller 104 may also control the delivery mechanism 105. Alternatively, there may be a main controller to control all aspects of the droplet ejection device 7. In addition, there may be a media encoder circuit 107. The droplet ejection device 7 may also include a liquid supply source 140, a liquid path 143 including an inlet liquid path 141 and a return liquid path 142, a thermal control fluid supply source 240T and a thermal control fluid path 243T, the thermal control fluid path 243T including a thermal control fluid path 241T and a thermal control fluid path 242T. Similarly, the actuator assembly 1000 may include one or more liquid chambers 131 and one or more thermal control fluid channels 231T as described herein, etc.

[0191] The droplet ejection device 7 may also include one or more temperature sensors (not shown). The temperature sensor may be disposed in the thermal control fluid path 243 and / or the liquid path 143. The temperature sensor may be disposed adjacent to the thermal control fluid supply source 240 and / or adjacent to the liquid supply source 140. The temperature sensor may be disposed on the inlet thermal control fluid path 241 and the thermal control fluid return path 242. Additionally or alternatively, the temperature sensor may be disposed on the liquid supply path 141. For example, the thermal control fluid path 243 may include a temperature sensor at the inlet and / or outlet of the actuator component 100 and / or at the inlet and / or outlet of the droplet ejection head. Similarly, the liquid path 143 may include a temperature sensor on the liquid path 143 and / or at the inlet of the actuator component 100 and / or at the inlet of the droplet ejection head. In the case where the thermal control fluid path 243 includes a thermal control device 247 and / or a reservoir 246b, there may be one or more temperature sensors adjacent to the thermal control device 247 and / or the reservoir 246b.

[0192] The temperature measurement can be provided to a controller (not shown). The controller can control the droplet ejection device 1 to adjust the temperature of the liquid. For example, the controller can control the thermal control fluid supply source 240 to change the flow rate of the thermal control fluid. In addition, the controller can control the thermal control device 247 to heat or cool the thermal control fluid. The controller can determine the required temperature and / or flow rate of the thermal control fluid to give the desired liquid temperature, for example, using a lookup table or calibration routine.

[0193] The droplet ejection head 1002 may include one or more actuator components 1000. It will generally be appreciated that any of the flow-allowing actuator components described herein may be used in the droplet ejection device 7 and in the droplet ejection head 1002 for thermal control of the fluid in the fluid chamber 131 and / or in the case where a gas orifice 231 is also present in the actuator component, for control of ejected droplets as described herein. It will generally be appreciated that any of the actuator components 100-700 described herein may be modified to form a thermal control fluid path 243T, wherein the thermal control fluid is a gas or a liquid. Depending on the type of thermal control fluid and the desired operating conditions, it will be appreciated that the orifice 231 may be retained or omitted. The thermal control fluid path 243T may include one or more thermal control fluid devices 247T, such as a heater and / or a cooler.

[0194] The actuator components for thermal control as described above can be described using the following numbered terms:

[0195] 1. An actuator component 100-1000 for a droplet ejection head, comprising:

[0196] Actuator assembly 80 and nozzle plate 70;

[0197] The actuator assembly 80 includes a plurality of liquid chambers 131, and the plurality of liquid chambers 131 are arranged into a liquid chamber array 130 extending in an array direction 10;

[0198] and a plurality of thermal control fluid channels 231, the plurality of thermal control fluid channels 231 being arranged into a thermal control fluid channel array 230 extending in the array direction 10;

[0199] wherein the plurality of liquid chambers 131 and the plurality of thermal control fluid channels 231 are fluidically independent;

[0200] wherein the plurality of liquid chambers 131 are arranged to be fluidly connectable to a liquid supply source 140;

[0201] wherein the plurality of thermal control fluid channels are arranged to be fluidly connectable to a thermal control fluid supply source 240;

[0202] The nozzle plate 70 includes a plurality of droplet ejecting nozzles 121, and the plurality of droplet ejecting nozzles 121 are arranged into a nozzle array 120 extending in an array direction 10;

[0203] wherein each liquid chamber 131 is arranged to be fluidly connected to one or more of said droplet ejection nozzles 121 and actuatable to eject liquid droplets;

[0204] wherein the plurality of thermal control fluid channels 231 and the plurality of liquid chambers 131 are arranged in a repeating pattern extending in the array direction 10; and

[0205] The actuator component 100 - 1000 is configured such that, in use, the thermal control fluid flowing through the thermal control fluid channel 231 controls the thermal properties of the liquid flowing through the liquid chamber 131 , thereby controlling the thermal properties of the liquid ejected from the droplet ejection nozzle 121 .

[0206] 2. An actuator component 100 - 1000 according to clause 1 , wherein the liquid chamber 131 is elongated in a direction that is not parallel to the array direction 10 .

[0207] 3. The actuator component 100 - 1000 according to clause 1 or clause 2, wherein the thermal control fluid channel 231 is elongated in a direction that is not parallel to the array direction 10 .

[0208] 4. The actuator component 100-1000 according to any of the preceding clauses, wherein the thermal control fluid channel 231 has a greater height than the liquid chamber 131 in the liquid chamber height direction 15 so as to achieve fluid independence.

[0209] 5. The actuator component 100-1000 according to any of the preceding clauses, further comprising one or more liquid manifolds 101, 102 and one or more thermal control fluid manifolds 201T, 202T, wherein the one or more liquid manifolds 101, 102 are fluidly independent of the one or more thermal control fluid manifolds 201T, 202T.

[0210] 6. The actuator component 100-1000 of clause 5, wherein the one or more liquid manifolds 101, 102 are fluidly independent from the plurality of thermal control fluid channels 231T.

[0211] 7. The actuator component 100 - 1000 of clause 5 or clause 6, wherein the one or more thermal control fluid manifolds 201T, 202T are fluidly independent from the plurality of liquid chambers 131 .

[0212] 8. An actuator component according to any of clauses 5 to 7, wherein the thermal control fluid channel 231T is fluidly connectable to the thermal control fluid supply source 240T via at least one of the one or more thermal control fluid manifolds 201T, 202T.

[0213] 9. An actuator component 100-1000 according to any one of clauses 5 to 8, comprising two or more thermal control fluid manifolds 201T, 202T, wherein the two or more thermal control fluid manifolds are arranged so that a first thermal control fluid manifold 201T is fluidically connected to a first end of a plurality of thermal control fluid channels 231T, and a second thermal control fluid manifold 202T is fluidically connected to a second opposite end of a plurality of thermal control fluid channels 231T, so that in use, the thermal control fluid flows from the first thermal control fluid control manifold 201T along the plurality of thermal control fluid channels 231T from the first end to the second end and flows into the second thermal control fluid manifold 202T.

[0214] 10. The actuator component 100-1000 according to any of the preceding clauses, wherein the liquid chamber 131 and the thermal control fluid channel 231T are arranged parallel to each other.

[0215] 11. An actuator component 100-1000 according to any of the preceding clauses, wherein the thermal control fluid channels 231T and the liquid chambers 131 are arranged in an alternating relationship extending in the array direction 10.

[0216] 12. An actuator component 100-1000 according to any of the preceding clauses, wherein the thermal control fluid channel 231T is provided with drive electrodes and / or electrical traces.

[0217] 13. The actuator component 100-1000 according to any of the preceding clauses, wherein the thermal control fluid channel 231T is narrower than the liquid chamber 131 in the array direction 10.

[0218] 14. A droplet ejection head comprising one or more actuator components 100-1000 according to any one of clauses 1 to 13.

[0219] 15. A droplet ejection device 1, 2, 7, 9, comprising one or more actuator components 100-1000 according to any one of clauses 1 to 13 or one or more droplet ejection heads according to clause 14, and further comprising a liquid supply source 140 and a liquid path 143 and a thermal control fluid path 243T.

[0220] 16. The droplet ejection device 1, 2, 7, 9 according to clause 15, further comprising a thermal control fluid supply source 240T.

[0221] 17. The droplet ejection device 1, 2, 7, 9 of clause 15 or clause 16, wherein the thermal control fluid path 243T comprises a return thermal control fluid path 242T.

[0222] 18. The drop ejection device 1 , 2 , 7 , 9 of any one of clauses 15 to 17, wherein the liquid path 143 comprises a return liquid path 142 .

[0223] 19. The drop ejection device 1, 2, 7, 9 of any one of clauses 15 to 18, further comprising a thermal control fluid reservoir 246bT.

[0224] 20. A droplet ejection device 1, 2, 7, 9 according to any one of clauses 15 to 19, wherein the fluid path 143, 243T is arranged so that in use the thermal control fluid flows along the thermal control fluid channel 231T in a direction opposite to the flow direction of the liquid in the liquid chamber 131.

[0225] 21. The drop ejection apparatus 1 , 2, 7, 9 of any of clauses 15 to 20, further comprising one or more thermal control devices 247T.

[0226] 22. A method of operating a droplet ejection device 1, 2, 7, 9 according to any one of clauses 15 to 21, comprising:

[0227] ejecting liquid droplets from one or more of the droplet ejection nozzles 121 according to a print instruction; and

[0228] A thermal control fluid is caused to flow through the thermal control fluid channel 231T to control the thermal properties of the liquid flowing through the liquid chamber 131 by heat transfer, and thereby control the thermal properties of the liquid ejected from the liquid drop ejecting nozzle 121 .

[0229] 23. The method according to clause 22, wherein the liquid is a liquid for droplet ejection.

[0230] 24. A method according to clause 22 or clause 23, wherein the thermal control fluid is a liquid.

[0231] 25. The method of clause 22 or clause 23, wherein the liquid and the thermal control fluid are supplied from a common liquid supply source 140.

[0232] 26. A method according to any one of clauses 22 to 25, wherein the flow rates of the liquid and the thermal control fluid through the droplet ejection device 1, 2, 7, 9 are independently controlled.

[0233] 27. A method according to any one of clauses 22 to 26, wherein the temperature of the liquid and the thermal control fluid flowing through the droplet ejection device 1 , 2, 7, 9 are independently controlled.

[0234] 28. A method according to any one of clauses 22 to 27, wherein the thermal control fluid comprises one or more of the following: atmospheric air, air heated to a temperature higher than ambient temperature or cooled to a temperature lower than ambient temperature, humid air having a humidity greater than ambient humidity, dehumidified air having a humidity less than ambient humidity, an inert gas, a rare gas.

[0235] 29. The method of any one of clauses 22 to 27, wherein the thermal control fluid comprises a refrigerant fluid.

[0236] 30. The method of any one of clauses 22 to 27, wherein the thermal control fluid comprises water.

[0237] 31. A method according to any one of clauses 23 to 27 when dependent on clause 23, wherein the thermal control fluid comprises the liquid used for droplet ejection.

[0238] 32. A method of manufacturing an actuator assembly 100-1000 for a droplet ejection head, wherein the method comprises the following steps:

[0239] - forming an actuator assembly 80, comprising:

[0240] - one or more arrays 130 of liquid chambers 131 formed in one or more strips 82 of piezoelectric material extending in the array direction 10,

[0241] wherein each of the liquid chambers 131 forms an open channel in the piezoelectric material strip 82, the open channel opening in the liquid chamber height direction 15 and opening at a first end and a second end in the liquid chamber extension direction 5;

[0242] - forming one or more arrays of thermal control fluid channels 231T in said one or more strips of piezoelectric material 82 extending along said array direction 10,

[0243] wherein each of the thermal control fluid channels 231T forms an open channel in the piezoelectric material strip 82, the open channel opening in the liquid chamber height direction 15 and opening at a first end and a second end in the liquid chamber extension direction 5;

[0244] wherein the liquid chamber array 130 and the thermal control fluid channel array 230T are fluidically independent of each other; and

[0245] - fixedly attaching the nozzle plate 70 to the actuator assembly 80;

[0246] - before or after the step of fixedly attaching the nozzle plate 70 to the actuator assembly 80, forming the drop ejection nozzles 121 in the nozzle plate 70, so that when assembled, the actuator assembly includes the drop ejection nozzles 121 fluidly connected to the liquid chamber 131.

[0247] 33. The method according to clause 32, further comprising

[0248] - forming one or more cutouts 81 in the substrate 83 and / or in the strip 82 of piezoelectric material;

[0249] - fixedly attaching the one or more piezoelectric material strips 82 to the substrate 83 such that each of the one or more cutouts 81 is arranged adjacent to an interface between the substrate 83 and a respective piezoelectric material strip 82 so as to form one or more thermal control fluid manifolds 201T, 202T,

[0250] wherein each of the one or more arrays 130 of liquid chambers 131 is fluidly separated from the one or more thermal control fluid manifolds 201T, 202T; and

[0251] Each of the one or more arrays 230T of thermal control fluid channels 231T is fluidly connected to at least one of the one or more thermal control fluid manifolds 201T, 202T.

[0252] 34. The method according to clause 32 or clause 33, further comprising:

[0253] - fixedly attaching a first covering part 84_a to each of the one or more piezoelectric material strips 82 at a first end in the liquid chamber extension direction 5.

[0254] 35. The method according to clause 34, further comprising:

[0255] - selectively forming a plurality of holes 85 in the first covering member 84 , wherein the first covering member 84 comprises at least one hole 85 corresponding to each liquid chamber 131 in a majority of the array of liquid chambers 131 .

[0256] 36. A method according to claim 35, wherein fixedly attaching the nozzle plate 70 includes attaching it to the piezoelectric material strip 82 at a second end along the liquid chamber extension direction 5, so that the nozzle plate 70 is used to fluidly seal the thermal control fluid channel 231T and the liquid chamber 131 in the liquid chamber extension direction 5.

[0257] 37. The method according to clause 34, further comprising:

[0258] - Fixedly attaching a second covering member 84_b to each of the one or more piezoelectric material strips 82 at a second opposite end in the liquid chamber extension direction 5.

[0259] 38. The method according to clause 37, further comprising:

[0260] - selectively forming a plurality of holes 85 in the first and second covering members 84 , wherein the first and second covering members 84 include at least one hole corresponding to each liquid chamber 131 in a majority of the liquid chamber array 130 .

[0261] 39. A method according to claim 38, wherein fixedly attaching the nozzle plate 70 includes attaching it to the piezoelectric material strip 82 on one side along the liquid chamber height direction 15, so that the nozzle plate 70 is used to fluidly seal the thermal control fluid channel 231T and the liquid chamber 131 in the liquid chamber extension direction 15.

[0262] 40. An actuator component 100-1000 for a droplet ejection head, comprising:

[0263] Actuator assembly 80 and nozzle plate 70;

[0264] The actuator assembly 80 includes a plurality of liquid chambers 131, and the plurality of liquid chambers 131 are arranged into a liquid chamber array extending in an array direction;

[0265] wherein the plurality of liquid chambers 131 are arranged to be fluidly connectable to a liquid supply source;

[0266] The nozzle plate 70 includes a plurality of droplet ejecting nozzles 121, and the plurality of droplet ejecting nozzles 121 are arranged into a nozzle array 120 extending in an array direction 10;

[0267] wherein each liquid chamber 131 is arranged to be fluidly connected to one or more of the droplet ejection nozzles 121 and actuatable to eject liquid droplets;

[0268] The actuator assembly 80 further includes two or more liquid manifolds 101, 102 arranged below the liquid chamber 131 along the liquid chamber height direction 15;

[0269] wherein the first liquid manifold 101 of the liquid manifolds 101 is fluidly connected to one end of the plurality of liquid chambers 131 in the liquid chamber extension direction 5;

[0270] wherein a second liquid manifold 102 of the two or more liquid manifolds 102 is fluidly connected to a second opposite end of the plurality of liquid chambers 131 in the liquid chamber extension direction 5; and

[0271] The arrangement is such that in use liquid flows from the first liquid manifold 101 along the plurality of liquid chambers 131 from the first end to the second end and into the second manifold 102 .

[0272] 41. An actuator component 100-1000 according to claim 40, wherein the actuator assembly 80 includes one or more piezoelectric material strips 82 and a substrate 83, and wherein the two or more liquid manifolds 101, 102 include one or more cutouts 81 in the substrate 83 and / or the one or more piezoelectric material strips 82.

[0273] 42. An actuator component 100-1000 according to claim 40 or claim 41, wherein the actuator assembly 80 includes a plurality of thermal control fluid channels 231T, the plurality of thermal control fluid channels 231T being arranged as a thermal control fluid channel array 230T extending in an array direction 10, and the actuator assembly being configured such that, during use, the thermal control fluid flowing through the thermal control fluid channels 231 controls the thermal properties of the liquid flowing through the liquid chamber 131, thereby controlling the thermal properties of the liquid ejected from the droplet ejection nozzle 121.

Claims

1. An actuator component for a droplet ejection head, the actuator component comprising: an actuator assembly and a nozzle plate; wherein the actuator assembly comprises a plurality of liquid chambers, the plurality of liquid chambers being arranged in a liquid chamber array extending in an array direction; wherein the plurality of liquid chambers are arranged to be fluidly connectable to a liquid supply; and a plurality of gas channels arranged in a gas channel array extending in the array direction; wherein the plurality of gas channels are arranged to be fluidly connectable to a gas supply; wherein the array of liquid chambers and the array of gas channels are fluidly independent of each other; wherein the nozzle plate comprises a plurality of droplet ejecting nozzles, the plurality of droplet ejecting nozzles being arranged in a nozzle array extending in the array direction; and a plurality of gas orifices arranged in an orifice array extending in the array direction; wherein said gas orifices and said droplet ejection nozzles are arranged in a repeating pattern extending along said array direction; wherein each liquid chamber is arranged to be fluidly connected to one or more of said droplet ejection nozzles and is actuatable to eject liquid droplets; wherein the plurality of gas channels are arranged to be fluidly connected to respective one or more gas orifices for gas flow; and Wherein the actuator component is configured such that, in use, gas flowing through the gas orifice controls one or more properties of liquid ejected from the drop ejection nozzle.

2. The actuator component for a liquid droplet ejection head according to claim 1, wherein: The gas orifice has an elongated shape.

3. The actuator component for a liquid droplet ejection head according to claim 1, wherein: The gas orifice has substantially the same shape as the droplet ejection nozzle.

4. An actuator component for a drop ejection head according to any one of the preceding claims, comprising a plurality of gas orifices per drop ejection nozzle.

5. The actuator component for a liquid droplet ejection head according to claim 4, wherein: The plurality of gas orifices of each droplet ejecting nozzle are spaced apart from a nozzle center in the array direction.

6. The actuator component for droplet ejection according to claim 4 or claim 5, wherein: The plurality of gas orifices of each droplet ejecting nozzle are spaced apart from a nozzle center in a direction in which the liquid chamber extends.

7. An actuator component for droplet ejection according to any one of the preceding claims, wherein: One or more droplet ejection nozzles include at least two gas orifices for each droplet ejection nozzle spaced from the nozzle center in the array direction and at least two gas orifices for each droplet ejection nozzle spaced from the nozzle center in the liquid chamber extension direction, so that the droplet ejection nozzle is basically surrounded by the gas orifices.

8. An actuator component for a droplet ejection head according to any one of the preceding claims, wherein: The centers of substantially all of the gas orifices are spaced apart from the center of the nearest droplet ejecting nozzle by a nozzle spacing ns / 2 in the array direction.

9. An actuator component for a droplet ejection head according to any one of the preceding claims, wherein: The liquid chamber is elongated in a direction non-parallel to the array direction.

10. An actuator component for a droplet ejection head according to any one of the preceding claims, wherein: The gas channel is elongated in a direction non-parallel to the array direction.

11. An actuator component for a droplet ejection head according to any one of the preceding claims, wherein: The gas channel is deeper than the liquid chamber in the height direction of the liquid chamber to achieve fluid independence.

12. An actuator component for a droplet ejection head according to any one of the preceding claims, wherein: The liquid chamber and the gas channel are arranged parallel to each other.

13. An actuator component for a droplet ejection head according to any one of the preceding claims, wherein: The gas channels and the liquid chambers are arranged in an alternating relationship extending along the array direction.

14. An actuator component for a droplet ejection head according to any one of the preceding claims, wherein: The liquid chambers include an actuator associated with each liquid chamber and actuatable to eject a droplet via the one or more drop ejection nozzles.

15. An actuator component for a droplet ejection head according to any one of the preceding claims, wherein: One or more walls of the liquid chamber are actuatable to eject liquid droplets through the one or more drop ejection nozzles.

16. An actuator component for a droplet ejection head according to any one of the preceding claims, further comprising one or more gas manifolds; wherein the gas channel is fluidly connectable to the gas supply via the one or more gas manifolds.

17. An actuator component for a droplet ejection head according to any one of the preceding claims, wherein: The gas channel includes drive electrodes / electrical traces.

18. An actuator component for a droplet ejection head according to any one of the preceding claims, wherein: The gas passage is narrower than the liquid chamber in the array direction.

19. A drop ejection head comprising one or more actuator components according to any one of the preceding claims.

20. A droplet ejection device, comprising one or more actuator components according to any one of claims 1 to 18 or one or more droplet ejection heads according to claim 19; and further comprising a liquid supply source and a gas supply source, wherein the gas supply source can be arranged as a positive gas supply source or a negative gas supply source.

21. A method of operating a droplet ejection device according to claim 20, comprising: ejecting liquid droplets from one or more of the drop ejection nozzles in accordance with print instructions; and A gas is flowed through the gas orifice to control the liquid droplets ejected from the droplet ejection nozzle.

22. The method according to claim 21, wherein: The method further comprises arranging the gas supply as a negative gas supply so as to draw gas into the actuator component through the gas orifice.

23. The method according to claim 21, wherein: The method further comprises arranging the gas supply as a positive gas supply to supply gas to the actuator component such that gas flows from the actuator component through the gas orifice.

24. The method according to any one of claims 21 to 23, wherein: The liquid is a droplet jetting liquid.

25. The method according to any one of claims 21 to 24, wherein: The droplet composition is controlled by means of interaction with the gas flowing through the gas orifices.

26. The method according to any one of claims 21 to 25, wherein: The gas includes one or more of the following: atmospheric air, air heated to a temperature higher than ambient temperature or cooled to a temperature lower than ambient temperature, humid air having a humidity greater than ambient humidity, dehumidified air having a humidity less than ambient humidity, an inert gas, a solvent in gaseous form as a component part of the liquid.

27. The method according to any one of claims 21 to 26, wherein: The flow of the gas through the gas orifices is substantially continuous.

28. The method according to any one of claims 21 to 27, wherein: The droplet ejection velocity is controlled as a function of the velocity of the gas flowing through the gas orifice.

29. The method according to any one of claims 21 to 28, wherein: The gas velocity as it flows through the gas orifice is adjusted as a function of the droplet ejection velocity.

30. The method according to any one of claims 21 to 29, wherein: The gas velocity when the gas flows through the gas orifice is greater than the droplet ejection velocity.

31. A method of manufacturing an actuator assembly for a droplet ejection head, wherein: The method comprises the following steps: An actuator assembly is formed, comprising: forming one or more liquid chamber arrays in one or more piezoelectric material strips extending along the array direction, wherein each of the liquid chambers forms an open channel in the piezoelectric material strip, the open channel opening in the liquid chamber height direction and opening at both ends along the liquid chamber extension direction; forming one or more gas channel arrays in the one or more piezoelectric material strips extending along the array direction, wherein each of the gas channels forms an open channel in the piezoelectric material strip, the open channel opening in the height direction of the liquid chamber and opening at both ends along the extension direction of the liquid chamber; wherein the array of liquid chambers and the array of gas channels are fluidly independent of each other; and fixedly attaching a nozzle plate to the actuator assembly; before or after the step of fixedly attaching the nozzle plate to the actuator assembly, forming a droplet ejection nozzle and a gas orifice in the nozzle plate such that when assembled, the actuator assembly includes a droplet ejection nozzle fluidly connected to the liquid chamber and a gas orifice fluidly connected to the gas channel, The gas orifices and the droplet ejection nozzles are arranged in a repeating pattern extending along an array direction.

32. The manufacturing method according to claim 31, wherein: Fixedly attaching the nozzle plate includes attaching the nozzle plate to the strip of piezoelectric material at one end along the direction in which the liquid chamber extends, such that the nozzle plate serves to fluidly seal the gas channel and the liquid chamber in the direction in which the liquid chamber extends.

33. The manufacturing method according to claim 32, further comprising: fixedly attaching a cover member to each of the one or more piezoelectric material strips at an end opposite the nozzle plate in the direction in which the liquid chamber extends, and A plurality of holes are selectively formed in the cover member, wherein the cover member includes at least one opening corresponding to each liquid chamber in a majority of the array of liquid chambers.

34. The manufacturing method according to claim 31, wherein: Fixedly attaching the nozzle plate includes attaching the nozzle plate to the strip of piezoelectric material along the liquid chamber height direction such that the nozzle plate serves to fluidly seal the gas channel and the liquid chamber along the liquid chamber height direction.

35. The manufacturing method according to claim 34, further comprising: fixedly attaching a first covering member to each of the one or more piezoelectric material strips in a direction in which the liquid chamber extends, and A plurality of holes are selectively formed in the one or more cover members, wherein the cover members include at least one hole corresponding to each liquid chamber in a majority of the array of liquid chambers.

36. The manufacturing method according to claim 35, further comprising: fixedly attaching a second covering member to each of the one or more piezoelectric material strips at an end opposite to the first covering member in the direction in which the liquid chamber extends, and A plurality of holes are formed in the second covering member so that the plurality of liquid chambers include at least one hole at each end portion in a direction in which the liquid chambers extend.

37. The method according to any one of claims 31 to 36, further comprising: forming one or more cutouts in a substrate and / or the strip of piezoelectric material; fixedly attaching the one or more strips of piezoelectric material to the substrate such that each of the one or more cutouts is arranged adjacent an interface between the substrate and a corresponding strip of piezoelectric material to form one or more gas manifolds, Wherein each of the one or more liquid chamber arrays is fluidly separated from the one or more gas manifolds, and wherein each of the one or more gas channel arrays is fluidly connected to at least one of the one or more gas manifolds.