Gas laser device and method for manufacturing electronic device

Abstract

This gas laser device is provided with: a chamber device which is provided with an electrode in the interior of a laser gas sealed therein, and which emits light, which is generated from the laser gas by applying a voltage to the electrode, to the outside via a window; a mirror that is disposed outside the chamber device and reflects a portion of the light emitted from the chamber device; a holding unit that holds the mirror and is movable in a predetermined direction perpendicular to the optical axis of the light; a frame member that is movable in a predetermined direction and includes an opening through which the mirror is exposed; a moving mechanism that moves the frame member; and an elastic connection part that connects the holding part and the frame member by means of elastic force.

Description

Technical Field

[0001] The present disclosure relates to a gas laser device and a method for manufacturing an electronic device. Background Art

[0002] In recent years, in semiconductor exposure devices, as semiconductor integrated circuits become smaller and more highly integrated, there is a demand for higher resolution. Therefore, the wavelength of light emitted from the exposure light source is being shortened. For example, as a gas laser device for exposure, a KrF excimer laser device that outputs a laser with a wavelength of about 248.0 nm and an ArF excimer laser device that outputs a laser with a wavelength of about 193.4 nm are used.

[0003] The spectral line width of the natural oscillation light of the KrF excimer laser device and the ArF excimer laser device is as wide as 350pm to 400pm. Therefore, if the projection lens is made of a material that allows ultraviolet rays such as KrF and ArF lasers to pass through, chromatic aberration may sometimes occur. As a result, the resolution may be reduced. Therefore, it is necessary to narrow the spectral line width of the laser output from the gas laser device to a level where chromatic aberration can be ignored. Therefore, in order to narrow the spectral line width, a narrowing module (Line Narrowing Module: LNM) including narrowing elements (etalon, grating, etc.) is sometimes provided in the laser resonator of the gas laser device. Hereinafter, a gas laser device with a narrowed spectral line width is referred to as a narrowed gas laser device.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 11-330592

[0007] Patent Document 2: Japanese Patent Application Laid-Open No. 6-224498

[0008] Patent Document 3: U.S. Patent No. 6792014 Summary of the invention

[0009] A gas laser device according to one embodiment of the present invention may include: a chamber device including an electrode inside which laser gas is sealed, and emitting light generated from the laser gas by applying voltage to the electrode to the outside through a window; a mirror, which is arranged outside the chamber device and reflects a portion of the light emitted from the chamber device; a holding portion, which holds the mirror and is capable of moving along a specified direction perpendicular to the optical axis of the light; a frame member, which is capable of moving along a specified direction and includes an opening for exposing the mirror; a moving mechanism, which moves the frame member; and an elastic connecting portion, which connects the holding portion and the frame member using elastic force.

[0010] A method for manufacturing an electronic device according to one embodiment of the present invention may include the following steps: generating a laser using a gas laser device; outputting the laser to an exposure device; and exposing the laser on a photosensitive substrate in the exposure device to manufacture the electronic device, wherein the gas laser device comprises: a chamber device having an electrode inside which a laser gas is sealed, and emitting light generated from the laser gas by applying a voltage to the electrode to the outside through a window; a mirror arranged outside the chamber device and reflecting a portion of the light emitted through the window; a holding portion which holds the mirror and is movable in a specified direction perpendicular to the optical axis of the light; a frame member which is movable in a specified direction and includes an opening for exposing the mirror; a moving mechanism which moves the frame member; and an elastic connecting portion which connects the holding portion and the frame member using an elastic force. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Hereinafter, several embodiments of the present disclosure will be described with reference to the accompanying drawings, merely as examples.

[0012] Figure 1 It is a schematic diagram showing an example of the overall schematic configuration of an electronic device manufacturing apparatus.

[0013] Figure 2 It is a schematic diagram showing an overall schematic configuration example of a gas laser device according to a comparative example.

[0014] Figure 3 It is a front view of the output-side holding unit of the comparative example.

[0015] Figure 4 yes Figure 3 A cross-sectional view of the output-side holding unit taken along line IV-IV is shown.

[0016] Figure 5 yes Figure 3 A cross-sectional view of the output-side holding unit taken along line VV is shown.

[0017] Figure 6 This is the front view of the output coupling mirror.

[0018] Figure 7 This is a front view of the output-side holding unit according to the first embodiment.

[0019] Figure 8 yes Figure 7 A cross-sectional view of the output-side holding unit taken along line VIII-VIII is shown.

[0020] Fig. 9 yes Figure 7 A cross-sectional view taken along line IX-IX of the output-side holding unit is shown.

[0021] Fig.10 It is a diagram showing a state where the angle of the holding portion is adjusted.

[0022] Fig.11 This is a front view of the output-side holding unit according to the second embodiment.

[0023] Fig.12 yes Fig.11 A cross-sectional view of the output-side holding unit taken along line XII-XII is shown.

[0024] Fig.13 yes Fig.11 A cross-sectional view of the output-side holding unit taken along line XIII-XIII is shown.

[0025] Fig.14 It is a front view of the output-side holding unit of Embodiment 3.

[0026] Fig.15 yes Fig.14 A cross-sectional view of the output-side holding unit taken along line XV-XV is shown. DETAILED DESCRIPTION

[0027] 1. Description of an electronic device manufacturing apparatus used in an exposure process of an electronic device

[0028] 2. Description of the gas laser device of the comparative example

[0029] 2.1 Structure

[0030] 2.2 Actions

[0031] 2.3 Topics

[0032] 3. Description of the Gas Laser Device of Embodiment 1

[0033] 3.1 Structure

[0034] 3.2 Actions

[0035] 3.3 Function and effect

[0036] 4. Description of the Gas Laser Device of Embodiment 2

[0037] 4.1 Structure

[0038] 4.2 Actions

[0039] 4.3 Function and effect

[0040] 5. Description of the gas laser device according to Embodiment 3

[0041] 5.1 Structure

[0042] 5.2 Actions

[0043] 5.3 Function and effect

[0044] Hereinafter, the embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. The embodiments described below represent several examples of the present disclosure and do not limit the content of the present disclosure. In addition, not all of the structures and actions described in each embodiment are required as the structures and actions of the present disclosure. In addition, the same reference numerals are marked on the same constituent elements, and repeated descriptions are omitted.

[0045] 1. Description of an electronic device manufacturing apparatus used in an exposure process of an electronic device

[0046] Figure 1 Schematic diagram showing an overall schematic configuration example of an electronic device manufacturing apparatus used in an exposure process of an electronic device. Figure 1 As shown, the manufacturing device used in the exposure process includes a gas laser device 100 and an exposure device 200. The exposure device 200 includes an illumination optical system 210 and a projection optical system 220, and the illumination optical system 210 has a plurality of mirrors 211, 212, and 213. The illumination optical system 210 illuminates the mask pattern of the mask stage RT using the laser light incident from the gas laser device 100. The projection optical system 220 performs reduced projection of the laser light transmitted through the mask so that it is imaged on a workpiece (not shown) arranged on the workpiece stage WT. The workpiece is a photosensitive substrate such as a semiconductor wafer coated with a photoresist. The exposure device 200 exposes the workpiece with the laser light reflecting the mask pattern by moving the mask stage RT and the workpiece stage WT in parallel in synchronization. By transferring the device pattern to the semiconductor wafer using the above exposure process, a semiconductor device as an electronic device can be manufactured.

[0047] 2. Description of the gas laser device of the comparative example

[0048] 2.1 Structure

[0049] A gas laser device of a comparative example will be described. In addition, the comparative examples of the present disclosure are methods that the applicant recognizes are only known to the applicant, and are not examples that the applicant himself considers to be publicly known.

[0050] Figure 2: is a schematic diagram showing an overall schematic structural example of the gas laser device 100 of this example. The gas laser device 100 is, for example, an ArF excimer laser device using a mixed gas containing argon (Ar), fluorine (F2) and neon (Ne). The gas laser device 100 outputs a laser having a central wavelength of approximately 193.4 nm. In addition, the gas laser device 100 may also be a gas laser device other than the ArF excimer laser device, for example, it may also be a KrF excimer laser device using a mixed gas containing krypton (Kr), F2 and Ne. In this case, the gas laser device 100 emits a laser having a central wavelength of approximately 248.0 nm. A mixed gas containing Ar, F2 and Ne as a laser medium, and a mixed gas containing Kr, F2 and Ne as a laser medium are sometimes referred to as laser gas. In addition, helium (He) may also be used instead of Ne in the mixed gases used in the ArF excimer laser device and the KrF excimer laser device, respectively.

[0051] The gas laser device 100 of this example includes a shell 110, a laser oscillator 130 as a master oscillator arranged in the internal space of the shell 110, an optical transmission unit 141, an amplifier 160 as a power oscillator, a detection unit 153, a display unit 180, a processor 190, a laser gas exhaust device 701 and a laser gas supply device 703 as main structures.

[0052] The laser oscillator 130 includes a chamber device CH1 , a charger 41 , a pulse power module 43 , a narrowband module 60 , and an output coupling mirror 70 as main structures.

[0053] exist Figure 2 , the internal structure of the chamber device CH1 viewed from a direction substantially perpendicular to the traveling direction of the laser light is shown. The chamber device CH1 includes a housing 30, a pair of windows 31a, 31b, a pair of electrodes 32a, 32b, an insulating portion 33, a feedthrough portion 34, and an electrode holding portion 36 as main components.

[0054] The laser gas is supplied from the laser gas supply device 703 via the pipe to the inner space of the housing 30, and the laser gas is sealed in the inner space. The inner space is a space where light is generated by excitation of the laser medium in the laser gas. The light travels toward the windows 31a and 31b.

[0055] The window 31a is arranged on the front wall surface of the housing 30 in the direction of travel of the laser light from the gas laser device 100 to the exposure device 200, and the window 31b is arranged on the rear wall surface of the housing 30 in the direction of travel. The windows 31a and 31b are inclined so as to form a Brewster angle with the direction of travel of the laser light to suppress reflection of the P polarized light of the laser light. The emission surfaces of the windows 31a and 31b are flat surfaces.

[0056] The electrodes 32a and 32b are arranged opposite to each other in the internal space of the housing 30, and the length direction of the electrodes 32a and 32b is along the traveling direction of the light generated by the high voltage applied between the electrodes 32a and 32b. The space between the electrodes 32a and 32b in the housing 30 is sandwiched by the window 31a and the window 31b. The electrodes 32a and 32b are discharge electrodes for exciting the laser medium by glow discharge. In this example, the electrode 32a is a cathode and the electrode 32b is an anode.

[0057] The electrode 32a is supported by the insulating portion 33. The insulating portion 33 closes the opening formed in the housing 30. The insulating portion 33 includes an insulator. In addition, a feed-through portion 34 composed of a conductive member is arranged on the insulating portion 33. The feed-through portion 34 applies the voltage supplied from the pulse power module 43 to the electrode 32a. The electrode 32b is supported by the electrode holding portion 36 and is electrically connected to the electrode holding portion 36.

[0058] The charger 41 is a DC power supply device that charges a capacitor (not shown) disposed inside the pulse power module 43 with a predetermined voltage. The charger 41 is arranged outside the housing 30 and is connected to the pulse power module 43. The pulse power module 43 includes a switch (not shown) controlled by the processor 190. The pulse power module 43 is a voltage application circuit as follows: when the switch is changed from off to on by the control, the voltage applied from the charger 41 is boosted to generate a pulse-shaped high voltage, and the high voltage is applied to the electrodes 32a and 32b. When the high voltage is applied, a discharge occurs between the electrode 32a and the electrode 32b. The laser medium in the housing 30 is excited by the energy of the discharge. When the excited laser gas transitions to the ground state, light is emitted, and the emitted light is emitted to the outside of the housing 30 through the windows 31a and 31b.

[0059] The narrowband module 60 includes a housing 65, a prism 61, a grating 63, and a rotating stage (not shown) arranged in an internal space of the housing 65. The housing 65 has an opening, and the housing 65 is connected to the rear side of the housing 30 via the opening.

[0060] The prism 61 expands the beam width of the light emitted from the window 31b and causes the light to be incident on the grating 63. In addition, the prism 61 reduces the beam width of the reflected light from the grating 63 and causes the light to return to the internal space of the housing 30 via the window 31b. The prism 61 is supported on a rotating stage and rotates by the rotating stage. The rotation of the prism 61 changes the incident angle of the light to the grating 63. Therefore, by rotating the prism 61, it is possible to select the wavelength of the light that returns from the grating 63 via the prism 61 to the housing 30. Figure 2 Although an example in which one prism 61 is arranged is shown, two or more prisms may be arranged.

[0061] The surface of the grating 63 is made of a material with high reflectivity, and a plurality of grooves are provided on the surface at predetermined intervals. The grating 63 is a dispersed optical element. The cross-sectional shape of each groove is, for example, a right triangle. The light incident on the grating 63 from the prism 61 is reflected by these grooves and diffracted in a direction corresponding to the wavelength of the light. The grating 63 is configured by Littrow so that the incident angle of the light incident on the grating 63 from the prism 61 is consistent with the diffraction angle of the diffracted light of the desired wavelength. Thus, the light of the desired wavelength is returned to the housing 30 via the prism 61.

[0062] The output coupling mirror 70 faces the window 31a, transmits part of the laser light emitted from the window 31a, and reflects the other part to return to the inner space of the housing 30 through the window 31a. The output coupling mirror 70 is fixed to a holding portion (not shown) and is arranged in the inner space of the housing 110.

[0063] The grating 63 and the output coupling mirror 70 disposed with the housing 30 interposed therebetween constitute a Fabry-Perot type resonator. The housing 30 is disposed on the optical path of the resonator.

[0064] The optical transmission unit 141 includes high reflective mirrors 141b and 141c as main structures. The high reflective mirrors 141b and 141c are respectively fixed to holders (not shown) in a state where their respective inclination angles are adjusted, and are arranged in the internal space of the housing 110. The high reflective mirrors 141b and 141c highly reflect the laser. The high reflective mirrors 141b and 141c are arranged on the optical path of the laser from the output coupling mirror 70. The laser is reflected by the high reflective mirrors 141b and 141c and travels toward the rear mirror 371 of the amplifier 160. At least a portion of the laser passes through the rear mirror 371.

[0065] The amplifier 160 amplifies the energy of the laser light output from the laser oscillator 130. The basic structure of the amplifier 160 is substantially the same as that of the laser oscillator 130. In order to distinguish the components of the amplifier 160 from the components of the laser oscillator 130, the chamber device, housing, a pair of windows, a pair of electrodes, an insulating portion, a feedthrough portion, an electrode holding portion, a charger, a pulse power module, and an output coupling mirror of the amplifier 160 are described as a chamber device CH3, a housing 330, a pair of windows 331a, 331b, a pair of electrodes 332a, 332b, an insulating portion 333, a feedthrough portion 334, an electrode holding portion 336, a charger 341, a pulse power module 343, and an output coupling mirror 370. The electrodes 332a, 332b generate discharge for amplifying the laser light from the laser oscillator 130. The pulse power module 343 is a voltage application circuit similar to the pulse power module 43.

[0066] The amplifier 160 is different from the laser oscillator 130 in that it does not include the narrowband module 60 , but includes a rear mirror 371 , a support member 400 , an output-side holding unit 500 , and a rear-side holding unit 600 .

[0067] The rear mirror 371 is disposed between the high reflective mirror 141c and the window 331b, facing them respectively. The rear mirror 371 transmits a portion of the laser light from the laser oscillator 130 toward the space between the electrodes 332a and 332b, and reflects a portion of the laser light amplified by the electrodes 332a and 332b toward the space between the electrodes 332a and 332b.

[0068] The output coupling mirror 370 is disposed between the window 331a and the beam splitter 153b, facing them respectively. The output coupling mirror 370 reflects a portion of the laser light emitted after being amplified by the electrodes 332a and 332b toward the space between the electrodes 332a and 332b, and transmits another portion of the laser light toward the detection unit 153. Therefore, a partial reflection film having a predetermined reflectivity is coated on the surface of the output coupling mirror 370 facing the window 331a. In the following description of each component, the surface on the side opposite to the chamber device CH3 is referred to as the main surface. In the output coupling mirror 370, the surface coated with the partial reflection film is set as the main surface.

[0069] The output coupling mirror 370 is circular in shape. The surface of the output coupling mirror 370 facing the window 331 a and the surface opposite to the surface are flat. The rear mirror 371 and the output coupling mirror 70 are similar in structure to the output coupling mirror 370 .

[0070] The rear mirror 371 and the output coupling mirror 370 sandwiching the housing 330 form a resonator in which the laser light amplified by the electrodes 332a and 332b resonates. The housing 330 is arranged on the optical path of the resonator, and the laser light emitted from the housing 330 after being amplified reciprocates between the rear mirror 371 and the output coupling mirror 370. The reciprocating laser light is amplified each time it passes through the laser gain space between the electrode 332a and the electrode 332b. A part of the amplified laser light passes through the output coupling mirror 370.

[0071] The supporting member 400 includes a bottom plate member 410, an output side supporting member 420, and a rear side supporting member 430. The bottom plate member 410 is a flat plate longer than the housing 330 and extends in the direction of travel of the laser. One end of the bottom plate member 410 is located at a position closer to the beam splitter 153b of the detection unit 153 than the window 331a, and the other end is located at a position closer to the high reflector 141c than the window 331b. At one end of the bottom plate member 410, the output side supporting member 420 is vertically connected to the bottom plate member 410, and at the other end of the bottom plate member 410, the rear side supporting member 430 is vertically connected to the bottom plate member 410. The output side supporting member 420 and the rear side supporting member 430 are respectively plate-shaped members extending to a position overlapping with the window 331a and the window 331b.

[0072] The output side holding unit 500 is arranged on the output side supporting member 420, and holds the output coupling mirror 370. The rear side holding unit 600 is arranged on the rear side supporting member 430, and holds the rear mirror 371. The output coupling mirror 370 is arranged between the window 331a and the beam splitter 153b, and the rear mirror 371 is arranged between the window 331b and the high reflection mirror 141c by the supporting member 400, the output side holding unit 500 and the rear side holding unit 600. In addition, the output coupling mirror 370 and the rear mirror 371 are relatively positioned by the supporting member 400, the output side holding unit 500 and the rear side holding unit 600. The details of the output side holding unit 500 and the rear side holding unit 600 will be described later. The laser light passing through the output coupling mirror 370 travels toward the detection unit 153.

[0073] The detection section 153 includes a beam splitter 153 b and a light sensor 153 c as main structures.

[0074] The beam splitter 153b is disposed on the optical path of the laser light transmitted through the output coupling mirror 370. The beam splitter 153b allows the laser light transmitted through the output coupling mirror 370 to pass through the emission window 173 with high transmittance, and reflects a part of the laser light toward the light receiving surface of the optical sensor 153c.

[0075] The optical sensor 153c measures the pulse energy of the laser beam incident on the light receiving surface of the optical sensor 153c. The optical sensor 153c is electrically connected to the processor 190 and outputs a signal indicating the measured pulse energy to the processor 190. The processor 190 controls the voltage applied to the electrodes 32a and 32b of the amplifier 160 based on the signal.

[0076] An emission window 173 is provided on the side opposite to the output coupling mirror 370 with respect to the beam splitter 153b of the detection unit 153. The emission window 173 is provided on the wall of the housing 110. The light transmitted through the beam splitter 153b is emitted from the emission window 173 to the exposure device 200 outside the housing 110. The laser is, for example, a pulse laser having a central wavelength of 193.4 nm.

[0077] The internal space of the housing 30, 330 is filled with a purge gas. The purge gas contains an inert gas such as high-purity nitrogen with reduced impurities such as oxygen. The purge gas is supplied to the internal space of the housing 30, 330 from a purge gas supply source (not shown) disposed outside the housing 110 through a pipe (not shown).

[0078] The display unit 180 is a monitor that displays the control state of the processor 190 based on a signal from the processor 190 .

[0079] The processor 190 of the present disclosure is a processing device including a storage device for storing a control program and a CPU (Central Processing Unit) for executing the control program. The processor 190 is specially configured or programmed to execute various processes included in the present disclosure. In addition, the processor 190 controls the gas laser device 100 as a whole. In addition, the processor 190 is electrically connected to an exposure processor (not shown) of the exposure device 200, and sends and receives various signals to and from the exposure processor.

[0080] The laser gas exhaust device 701 and the laser gas supply device 703 are electrically connected via the processor 190. The laser gas exhaust device 701 includes an exhaust pump (not shown) and exhausts the laser gas from the internal space of the housing 30, 330 through the pipe by suction of the exhaust pump according to a control signal from the processor 190. The laser gas supply device 703 supplies the laser gas from a laser gas supply source (not shown) disposed outside the housing 110 to the internal space of the housing 30, 330 through the pipe according to a control signal from the processor 190.

[0081] Next, the output-side holding unit 500 will be described.

[0082] Figure 3 It is a front view of the output-side holding unit 500 of the comparative example. Figure 4 yes Figure 3 The cross-sectional view of the output side holding unit 500 at the line IV-IV is shown, Figure 5 yes Figure 3 The output side holding unit 500 is a cross-sectional view taken along the line VV shown in FIG. The output side holding unit 500 includes a holding portion 510 for holding the output coupling mirror 370, a base member 520, an angle adjustment mechanism 540, and a moving mechanism 550. Figure 3In the figure, the output side supporting member 420 is omitted.

[0083] The holding portion 510 includes a main body 511 for holding the output coupling mirror 370 and a mounting plate 513 for mounting the main body 511. The main body 511 is fixed to the mounting plate 513 by screws (not shown). Figure 2 The holding portion 510 is simplified in the figure, and the angle adjustment mechanism 540 and the moving mechanism 550 are omitted.

[0084] A through hole 511a is provided in the main body 511. The through hole 511a includes a circular large diameter portion 511b and a circular small diameter portion 511c. The large diameter portion 511b is located closer to the window 331a than the small diameter portion 511c, and is connected to the small diameter portion 511c. The diameter of the large diameter portion 511b is larger than the diameter of the small diameter portion 511c, and is substantially the same size as the output coupling mirror 370. The output coupling mirror 370 is arranged on the large diameter portion 511b. Light from the output coupling mirror 370 or light toward the output coupling mirror 370 passes through the small diameter portion 511c.

[0085] Figure 6 370 is a front view of the output coupling mirror 370. The effective area 370a overlapping with the small diameter portion 511c in the output coupling mirror 370 is a circular area illuminated by the light from the window 331a. In addition, an ineffective area 370b is provided outside the effective area 370a in the output coupling mirror 370. The ineffective area 370b is an annular area that overlaps with the step surface between the large diameter portion 511b and the small diameter portion 511c and is opaque.

[0086] The light traveling from the window 331a to the output coupling mirror 370 is not irradiated to the entire effective area 370a of the output coupling mirror 370, but is irradiated to a part of the effective area 370a. Therefore, the irradiation point S of the light in the effective area 370a is smaller than the effective area 370a. The shape of the irradiation point S is formed by a mask (not shown) arranged between the window 331a and the output coupling mirror 370. The mask is, for example, a plate-shaped component that has a rectangular-shaped transmission hole for a part of the laser to pass through and shields the other part of the laser. In addition, the shape of the transmission hole is not limited thereto. The transmission hole is smaller than the circular effective area 370a of the output coupling mirror 370, and the laser passes through the transmission hole, thereby making the irradiation point S of the light in the effective area 370a become rectangular.

[0087] The mounting plate 513 is a plate-shaped member, and when the holding portion 510 is viewed from the front, the mounting plate 513 is larger than the main body 511. The mounting plate 513 is provided with a through hole 513a that is the same as the small diameter portion 511c of the through hole 511a. The mounting plate 513 is mounted on the base member 520 via a moving mechanism 550 that can move the mounting plate 513 relative to the base member 520. The details of the moving mechanism 550 will be described later. When the holding portion 510 is viewed from the front, the mounting plate 513 is smaller than the base member 520.

[0088] The base member 520 is a plate-shaped member, and is provided with a through hole 520a that is the same as the through hole 513a of the mounting plate 513. The base member 520 is disposed on the main surface of the output-side support member 420 via the angle adjustment mechanism 540.

[0089] The output side support member 420 is provided with a through hole 420a identical to the through hole 520a of the base member 520. The main surface of the output side support member 420 is substantially perpendicular to the optical axis of the laser light emitted from the window 331a and the extending direction of the support member 400. The base member 520 is arranged on the main surface of the output side support member 420 on the side of the window 331a.

[0090] The small diameter portion 511c of the main body 511, the through hole 513a of the mounting plate 513, the through hole 520a of the base member 520, and the through hole 420a of the output side support member 420 are connected to each other. These through holes 513a, 520a, 420a allow light to pass through in the same manner as the through hole 511a.

[0091] The angle adjustment mechanism 540 adjusts the angle of the base member 520 relative to the output side support member 420 to a predetermined angle and maintains the angle. Therefore, the angle adjustment mechanism 540 maintains the tilt angle of the holding portion 510 mounted on the base member 520 via the moving mechanism 550 relative to the output side support member 420 at a predetermined angle. The output coupling mirror 370 is held in the holding portion 510, and the position of the output side support member 420 is fixed relative to the chamber device CH3, so the angle adjustment mechanism 540 adjusts the angle of the output coupling mirror 370 relative to the optical axis of the laser to a predetermined angle and maintains the angle. The angle adjustment mechanism 540 uses, for example, a plurality of adjustment screws 541, and the adjustment screws 541 are screwed into the threaded holes of the base member 520, and the front ends are engaged with the output side support member 420. Thus, the output side support member 420 supports the holding portion 510 via the base member 520. By adjusting the screwing amount of each adjustment screw 541, the angle of the base member 520 relative to the output side support member 420 is adjusted, and the angle of the output coupling mirror 370 relative to the optical axis of the laser light is adjusted. The predetermined angle may be, for example, an angle at which the energy of the laser light emitted from the gas laser device 100 is the highest. In this case, for example, the main surfaces of the output coupling mirror 370, the mounting plate 513, and the base member 520, which are irradiated with the light from the window 331a, are substantially perpendicular to the optical axis of the light. The structure of the angle adjustment mechanism 540 is not limited to the adjustment screw 541, and a gimbal mechanism or a kinematic bracket may also be used.

[0092] The moving mechanism 550 is a member capable of moving the holding portion 510 relative to the output-side support member 420 in a predetermined direction perpendicular to the optical axis of light emitted from the window 331 a to the outside. The moving mechanism 550 includes a guide unit 551 , a pair of cylinders 553 , and a housing 555 .

[0093] The guide unit 551 guides the linear movement of the holding portion 510 along a predetermined direction perpendicular to the optical axis of the laser. The guide unit 551 in this example is a linear guide. In this example, the guide unit 551 has: a rail 551a, which is provided at the bottom of the groove 521 of the base member 520 and extends along a predetermined direction; and a sliding member 551b, which is provided on the back side of the mounting plate 513 in a manner spanning the rail 551a and slides on the rail 551a. The groove 521 and the guide unit 551 are provided in a manner not to overlap with the through holes 513a and 520a. In addition, in Figure 5 In the figure, for easy understanding, the guide unit 551 which does not appear in the cross section is recorded.

[0094] The housing 555 is arranged on the main surface side of the output side support member 420, and surrounds the main body 511, the mounting plate 513, and the base member 520 in the output side holding unit 500. The upper surface of the housing 555 is open, and when the housing 555 is viewed from the front, the output coupling mirror 370 is exposed from the opening 555a of the housing 555. Therefore, the light from the window 331a passes through the output coupling mirror 370 via the opening 555a. The cylinder 553 is fixed to the housing 555, and the shaft 553s of each cylinder 553 passes through the housing 555.

[0095] The shaft 553s of each of the pair of cylinders 553 extends in a predetermined direction. The front end of each shaft 553s clamps the mounting plate 513 from both sides along the moving direction of the retaining portion 510, pressing the mounting plate 513. As the cylinder 553, for example, a pneumatic cylinder can be cited. The cylinder 553 is electrically connected to the processor 190, and pushes and pulls the mounting plate 513 by the movement of each shaft 553s based on the control of the processor 190. Specifically, each cylinder 553 is linked to each other, and each shaft 553s moves in the length direction. In this case, one cylinder 553 presses the mounting plate 513 via the shaft 553s, and the other cylinder 553 pulls the mounting plate 513 via the shaft 553s. The pressing amount of one cylinder 553 is approximately the same as the pulling amount of the other cylinder 553, and the amount of pushing and pulling of the cylinder 553 is the movement amount of the retaining portion 510. The cylinder 553 may not be connected to the processor 190, and the mounting plate 513 may be moved by the operator of the gas laser device 100 operating the cylinder 553. The cylinder 553 moves the holding portion 510, thereby moving the output coupling mirror 370 in a predetermined direction.

[0096] The angle adjustment mechanism 540 of this example maintains the inclination angle of the holding portion 510 with respect to the output-side supporting member 420 at a predetermined angle regardless of the position of the holding portion 510 .

[0097] The rear holding unit 600 holds the rear mirror 371. The rear holding unit 600 is configured on the main surface of the rear support member 430 near the window 331b. The other structures are the same as those of the output side holding unit 500, so the description thereof is omitted. Therefore, a through hole for light to pass through is provided in the rear support member 430.

[0098] 2.2 Action

[0099] Next, the operation of the gas laser device 100 according to the comparative example will be described.

[0100] In the state before the gas laser device 100 emits laser light, laser gas is supplied from the laser gas supply device 703 to the internal space of the housing 30. In addition, the angle adjustment mechanism 540 in the output side holding unit 500 adjusts the inclination angle of the main surface of the output coupling mirror 370 relative to the output side support member 420 to a predetermined angle and maintains this state by adjusting the screwing amount of the adjustment screw 541. Similarly, the angle adjustment mechanism 540 in the rear side holding unit 600 adjusts the inclination angle of the main surface of the rear mirror 371 relative to the rear side support member 430 to a predetermined angle and maintains this state.

[0101] When the gas laser device 100 emits laser light, the processor 190 receives a signal indicating the target energy Et and a light emission trigger signal from an exposure processor (not shown) of the exposure device 200. The target energy Et is a target value of the energy of the laser used in the exposure process. The processor 190 sets a predetermined charging voltage to the charger 41 so that the energy E becomes the target energy Et, and turns on the switch of the pulse power module 43 in synchronization with the light emission trigger signal. As a result, the pulse power module 43 generates a pulsed high voltage based on the electric energy retained in the charger 41, and applies the high voltage between the electrode 32a and the electrode 32b. When the high voltage is applied, discharge is caused between the electrode 32a and the electrode 32b, and the laser medium contained in the laser gas between the electrode 32a and the electrode 32b becomes an excited state, and emits light when the laser medium returns to the ground state. The emitted light resonates between the grating 63 and the output coupling mirror 70, and is amplified each time it passes through the discharge space in the internal space of the housing 30, causing laser oscillation. A portion of the laser light passes through the output coupling mirror 70 , is reflected by the high reflection mirrors 141 b and 141 c , passes through the rear mirror 371 and the window 31 b , and travels into the housing 330 .

[0102] The processor 190 turns on the switch of the pulse power module 343 to generate discharge when the laser light from the laser oscillator 130 travels to the discharge space in the housing 330. The processor 190 controls the pulse power module 343 so that a high voltage is applied to the electrodes 332a and 332b after a predetermined delay time has passed relative to the timing of turning on the switch of the pulse power module 43.

[0103] Thus, the laser light incident on the amplifier 160 is amplified and oscillated in the amplifier 160. In addition, the laser light that has traveled to the internal space of the housing 330 passes through the windows 331a and 331b as described above and travels to the rear mirror 371 and the output coupling mirror 370. In this way, the laser light of a predetermined wavelength travels back and forth between the rear mirror 371 and the output coupling mirror 370. Each time the laser light passes through the discharge space inside the housing 30, it is amplified, causing laser oscillation, and a part of the laser light becomes amplified laser light.

[0104] In addition, the amplified laser light from the amplifier 160 passes through the output coupling mirror 370 and travels toward the beam splitter 153 b .

[0105] A portion of the amplified laser light that has traveled to the beam splitter 153 b passes through the beam splitter 153 b and the emission window 173 and travels to the exposure device 200 , while the other portion is reflected by the beam splitter 153 b and travels to the optical sensor 153 c .

[0106] The optical sensor 153c receives the amplified laser light and measures the energy E of the received amplified laser light. The optical sensor 153c outputs a signal indicating the measured energy E to the processor 190. The processor 190 performs feedback control on the charging voltage of the charger 41,341 so that the difference ΔE between the energy E and the target energy Et is within the allowable range. The laser light having the difference ΔE within the allowable range is incident on the exposure device 200 through the beam splitter 153b and the emission window 173.

[0107] When the output coupling mirror 370 is moved, the processor 190 sets the charger 41 and the charger 341 to a stopped state, and sets the switches of the pulse power module 43 and the pulse power module 343 to an off state. Therefore, the emission of light stops. Next, the processor 190 causes the cylinder 553 to push and pull the mounting plate 513, so that the holding portion 510 moves in a direction perpendicular to the optical axis of the laser emitted from the window 331a. In this example, the holding portion 510 moves in a prescribed direction, which is the direction along the short side of the rectangular irradiation point S, that is, the direction perpendicular to the optical axis of the light emitted from the chamber device CH3. At this time, the holding portion 510 is guided by the guide unit 551 in the moving direction. The output coupling mirror 370 is also moved by the movement of the holding portion 510. At this time, even if the holding portion 510 and the output coupling mirror 370 move, the position of the irradiation point S does not move. Therefore, as Figure 6 As shown by the dashed line in the middle, the position of the irradiation point S moves within the effective area 370a of the output coupling mirror 370. In this example, the prescribed direction is the direction along the short side of the rectangular irradiation point S, but it may also be the direction along the long side of the irradiation point S. Figure 6 On the contrary, a part of the irradiation point S after the movement overlaps with the irradiation point S before the movement. In this way, after the position of the irradiation point S is moved, the gas laser device 100 operates in the same manner as described above.

[0108] When the rear mirror 371 is moved, the same operation as that when the output coupling mirror 370 is moved is performed.

[0109] 2.3 Topics

[0110] In the comparative example, the cylinder 553 clamps the mounting plate 513 from both sides in the moving direction of the holding portion 510 and presses the mounting plate 513. Due to the pressing force, the mounting plate 513 may be elastically deformed. When the mounting plate 513 is deformed, the mounting angles of the output coupling mirror 370 and the rear mirror 371 relative to the optical axis of the laser light emitted from the window 331a may change, and there is a concern that the emission direction and output of the laser light may change, and the emitted laser light may become unstable.

[0111] Therefore, in the following embodiments, a gas laser device capable of stably emitting laser light is exemplified.

[0112] 3. Description of the Gas Laser Device of Embodiment 1

[0113] Next, the gas laser device 100 according to Embodiment 1 is described. The same reference numerals are used for the same structures as those described above, and the repeated description is omitted unless otherwise specified. In addition, in some drawings, some components are omitted or simplified for easier viewing.

[0114] 3.1 Structure

[0115] Figure 7 It is a front view of the output-side holding unit 500 of this embodiment. Figure 8 yes Figure 7 The cross-sectional view of the output side holding unit 500 at the line VIII-VIII is shown, Fig. 9 yes Figure 7 1 is a cross-sectional view of the output-side holding unit 500 taken along line IX-IX.

[0116] The output-side holding unit 500 of the present embodiment is different from the output-side holding unit 500 of the comparative example in that the output-side holding unit 500 includes a frame member 560 and an elastic coupling portion 570 .

[0117] The frame member 560 is a member that can move in a direction perpendicular to the optical axis of the light emitted from the chamber device CH3, and includes an opening 560a. In the present embodiment, the shape of the frame member 560 is a rectangular frame shape. However, the shape of the frame member 560 may not be rectangular. In addition, a part of the frame member 560 may be broken, and the shape of the frame member 560 may be, for example, C-shaped. The frame member 560 is arranged on the side opposite to the output side support member 420 side with respect to the holding portion 510 as a reference, and the output coupling mirror 370 is exposed from the opening 560a of the frame member 560. Therefore, the light incident on the output coupling mirror 370 or the light reflected by the output coupling mirror 370 passes through the opening 560a. In the present embodiment, the opening 560a is larger than the main body 511 of the holding portion 510 and smaller than the mounting plate 513. Therefore, the entire main body 511 is exposed from the opening 560a. In the present embodiment, a portion of the outer periphery of the mounting plate 513 overlaps with the frame member 560 , and another portion of the mounting plate 513 is located outside the outer periphery of the frame member 560 .

[0118] The frame member 560 is sandwiched by the shafts 553s of the pair of cylinders 553. Therefore, in the present embodiment, the frame member 560 can be moved along the longitudinal direction of the shaft 553s by pushing and pulling the shaft 553s.

[0119] The elastic coupling portion 570 includes a pair of arm portions 571 , a pair of elastic members 572 , and a pin member 573 .

[0120] The pair of arm portions 571 is substantially L-shaped, one end of which is fixed to the outer peripheral surface of the frame member 560, and the other ends of which are opposite to each other. An elastic member 572 is disposed at the other end of each arm portion 571, and the pair of elastic members 572 are opposite to each other. As the elastic member 572, for example, a coil spring or a plunger can be cited. In the present embodiment, a hole is formed at the other end of the arm portion 571, a part of the elastic member 572 enters the hole, and the other part of the elastic member 572 is exposed from the hole.

[0121] The pin member 573 is a cylindrical member fixed to the holding portion 510. In the present embodiment, the pin member 573 stands upright in a region of the mounting plate 513 that is located outside the outer periphery of the frame member 560, and extends to a position higher than the frame member 560. The side surfaces of the pin member 573 are sandwiched by the elastic member 572 and pressed by the elastic member 572. Alternatively, the pin member 573 may be a prism-shaped member.

[0122] 3.2 Action

[0123] When the shaft 553s of the cylinder 553 pushes and pulls the frame member 560 according to the instruction from the processor 190, the frame member 560 moves in a predetermined direction perpendicular to the optical axis of the light emitted from the chamber device CH3. Therefore, the arm 571 fixed to the frame member 560 moves, and the pin member 573 is pressed by the elastic member 572 and moves in the direction in which the frame member 560 moves. As the pin member 573 moves, the holding portion 510 to which the pin member 573 is fixed moves, and the output coupling mirror 370 moves. In this way, as shown in FIG. Figure 6 As shown by the middle dashed line, the position of the irradiation point S moves within the effective area 370 a of the output coupling mirror 370 .

[0124] 3.3 Function and effect

[0125] The gas laser device 100 of this embodiment includes: a frame member 560 that can move along a predetermined direction perpendicular to the optical axis of the light emitted from the chamber device CH3 and includes an opening 560a that exposes the output coupling mirror 370; a moving mechanism 550 that moves the frame member 560; and an elastic connecting portion 570 that connects the holding portion 510 and the frame member 560 using an elastic force. Therefore, even if the frame member 560 is deformed by a force applied to the frame member 560 from the moving mechanism 550, the influence of the deformation of the frame member 560 is absorbed by the elastic connecting portion 570, so that the deformation of the holding portion 510 can be suppressed. Therefore, the change in the installation angle of the output coupling mirror 370 can be suppressed. Therefore, according to the gas laser device 100 of this embodiment, laser light can be stably emitted.

[0126] Fig.10 5 is a diagram showing a state where the angle of the holding portion 510 is adjusted. Fig.10 As shown in FIG. 1 , even when the angle of the output coupling mirror 370 is adjusted by adjusting the angle of the holding portion 510 by the angle adjustment mechanism 540, the influence of the adjustment is absorbed by the elastic connecting portion 570. Specifically, for example, one side of the elastic member 572 is stretched and the other side is contracted. In this way, by adjusting the angle of the holding portion 510, deformation of the holding portion 510 or the frame member 560 can be suppressed.

[0127] In addition, in the present embodiment, the elastic connection part 570 includes: a pin member 573 fixed to the holding part 510; a pair of arm parts 571 fixed to the frame part 560; and a pair of elastic members 572 provided on the arm parts 571 and sandwiching the pin member 573 along a predetermined direction. According to such a structure, even if the frame part 560 is deformed in the surface direction, the connection with the holding part 510 is difficult to be released.

[0128] In this embodiment, the arm 571 is fixed to the outer peripheral surface of the frame member 560, but the arm 571 may be fixed to a portion other than the outer peripheral surface of the frame member 560. In addition, the arm 571 may not be L-shaped, but may be columnar, for example, as long as the elastic member 572 is provided.

[0129] 4. Description of the Gas Laser Device of Embodiment 2

[0130] Next, the gas laser device 100 according to Embodiment 2 is described. The same reference numerals are used for the same structures as those described above, and the repeated description is omitted unless otherwise specified. In addition, in some drawings, some components are omitted or simplified for easier viewing.

[0131] 4.1 Structure

[0132] Fig.11 is a front view of the output side holding unit 500 of this embodiment, Fig.12 yes Fig.11 FIG. 5 is a cross-sectional view of the output-side holding unit 500 taken along the line XII-XII.

[0133] The structure of the elastic connection portion 570 of the output-side holding unit 500 of the present embodiment is different from the structure of the elastic connection portion 570 of Embodiment 1. The elastic connection portion 570 of the present embodiment includes a restraining member 575 and a supporting member 576 .

[0134] The support member 576 is provided on the surface of the frame member 560 on the side of the holding portion 510, that is, the bottom surface. Specifically, it is provided at a position overlapping with the mounting plate 513 on the bottom surface of the frame member 560. The support member 576 is composed of, for example, a plunger screw. The plunger screw has the following structure: a coil spring, a ball, or a pin with a round tip is provided inside a cylindrical member, and the ball or the pin can move along the length direction of the cylindrical member while being pressed by the coil spring.

[0135] Fig.13 yes Fig.11 The output side holding unit 500 is shown in the cross-sectional view taken along the line XIII-XIII. Fig.13 In FIG. 5 , only the holding portion 510, the frame member 560 and the supporting member 576 are described. Fig.13 As shown, the mounting plate 513 of this embodiment is provided with a recess 513r. Fig.13In the example, the recess 513r is a V-groove. The length direction of the V-groove extends in a direction perpendicular to the predetermined direction in which the frame member 560 moves. In addition, the recess 513r may be a conical depression. A portion of the support member 576 enters the recess 513r. For example, in the case where the support member 576 is composed of a plunger screw as described above, the ball or pin of the plunger screw enters the recess 513r. Therefore, when the support member 576 moves in the predetermined direction, the inclined surface of the V-groove is pressed by the support member 576 in the predetermined direction.

[0136] The restraining member 575 is disposed at a position overlapping with the mounting plate 513 on the bottom surface of the frame member 560, and is fixed to the holding portion 510 and the frame member 560. In this example, the restraining member 575 is columnar, one end of which is fixed to the holding portion 510, and the other end of which is fixed to the frame member 560. In this embodiment, when the output coupling mirror 370 is viewed from the front, the supporting member 576 and the restraining member 575 are disposed at a position sandwiching the output coupling mirror 370. Moreover, in this embodiment, the supporting member 576 and the restraining member 575 are disposed at positions symmetrical with respect to the central axis of the shaft 553s of the cylinder 553. The restraining member 575 is made of a material with a high elastic constant, and uses an elastic force to press the supporting member 576 toward the holding portion 510 via the frame member 560. That is, the restraining member 575 includes an elastic member having an elastic force in a direction of pressing the supporting member 576 toward the mounting plate 513 of the holding portion 510. In addition, as described above, in the case where the support member 576 is a plunger screw, since there is a spring inside that presses the ball or pin, the support member 576 includes an elastic member having elastic force in the direction of being pressed toward the mounting plate 513 of the retaining portion 510. In addition, the support member 576 may also be composed of a member other than a plunger screw, but it is preferable to include an elastic member having such elastic force. In this example, in the direction from the frame member 560 toward the mounting plate 513, the length of the support member 576 is longer than the restraining member 575, and the amount of the extension is the amount of entering the recess 513r. Since the restraining member 575 presses the support member 576 toward the retaining portion 510, when the frame member 560 moves in a specified direction, the support member 576 presses the side of the recess 513r in the specified direction.

[0137] 4.2 Action

[0138] As in Embodiment 1, the frame member 560 is pushed and pulled by the shaft 553s of the cylinder 553, and the frame member 560 moves in a prescribed direction. Therefore, the supporting member 576 presses the side surface of the recess 513r in a prescribed direction. In the case where the recess 513r is a V-groove or a hammer-shaped depression, the side surface is an inclined surface. In this way, the force generated by the movement of the frame member 560 is transmitted to the holding portion 510. In addition, the restraining member 575 also transmits the force generated by the movement of the frame member 560 to the holding portion 510. Therefore, the holding portion 510 moves, and the output coupling mirror 370 moves.

[0139] 4.3 Function and effect

[0140] In this embodiment, the holding portion 510 includes a recessed portion 513r provided on the side of the frame member 560, and the elastic coupling portion 570 includes: a supporting member 576 fixed to the frame member 560 and partially inserted into the recessed portion 513r; and a restraining member 575 fixed to the holding portion 510 and the frame member 560, and pressing the supporting member 576 toward the holding portion 510. Therefore, the holding portion 510 is moved by applying a force to the holding portion 510 by the supporting member 576 and the restraining member 575, so that the holding portion 510 can be stably moved.

[0141] 5. Description of the gas laser device according to Embodiment 3

[0142] Next, the gas laser device 100 according to Embodiment 3 is described. The same reference numerals are used for the same structures as those described above, and the repeated description is omitted unless otherwise specified. In addition, in some drawings, some components are omitted or simplified for easier viewing.

[0143] 5.1 Structure

[0144] Fig.14 It is a front view of the output-side holding unit 500 of this embodiment. Fig.15 yes Fig.14 2 is a cross-sectional view of the output side holding unit 500 at the line XV-XV. In the gas laser device 100 of this embodiment, the elastic connecting portion 570 has the structure of the elastic connecting portion 570 of Embodiment 1 and the structure of the elastic connecting portion 570 of Embodiment 2. Therefore, the holding portion 510 of this embodiment has a recessed portion 513r into which a part of the supporting member 576 enters.

[0145] 5.2 Action

[0146] As in the first embodiment, the frame member 560 is pushed and pulled by the shaft 553s of the cylinder 553, and the frame member 560 moves in a predetermined direction. In this embodiment, as in the first embodiment, the arm portion 571 moves, and the pin member 573 pressed by the elastic member 572 moves in the direction in which the frame member 560 moves. Also, as in the second embodiment, the support member 576 presses the side surface of the recess 513r in a predetermined direction, and the restraint member 575 also transmits the force generated by the movement of the frame member 560 to the holder 510. Therefore, the holder 510 moves, and the output coupling mirror 370 moves.

[0147] 5.3 Function and effect

[0148] In this embodiment, the elastic connection part 570 includes: a pin member 573 fixed to the holding part 510; a pair of arm parts 571 fixed to the frame part 560; a pair of elastic members 572 provided on the arm parts 571 and sandwiching the pin member 573 along a predetermined direction; a support member 576 fixed to the frame part 560 and a part of which enters the recess 513r; and a restraining member 575 fixed to the holding part 510 and the frame part 560 and pressing the support member 576 toward the holding part 510. Therefore, compared with the first embodiment and the second embodiment, the force generated by the movement of the frame part 560 is transmitted to the holding part 510 from more parts. Therefore, the holding part 510 can move stably.

[0149] The structure of the output-side holding unit 500 of Embodiments 1 to 3 can also be applied to the rear-side holding unit 600 .

[0150] The above description is not limiting but only illustrative. Therefore, it is obvious to those skilled in the art that changes can be applied to the embodiments of the present disclosure without departing from the scope of the claims. In addition, it is obvious to those skilled in the art that the embodiments of the present disclosure are used in combination. Unless otherwise specified, the terms used in this specification and the claims should be interpreted as "non-restrictive" terms. For example, terms such as "including", "having", "having", "having" should be interpreted as "not excluding the existence of constituent elements other than the recorded constituent elements". In addition, the modifier "1" should be interpreted as "at least 1" or "1 or more". In addition, terms such as "at least one of A, B and C" should be interpreted as "A", "B", "C", "A+B", "A+C", "B+C" or "A+B+C", and should also be interpreted as including combinations of them with contents other than "A", "B" and "C".

Claims

1. A gas laser device, wherein: The gas laser device comprises: A chamber device having an electrode inside which laser gas is sealed, and emitting light generated from the laser gas by applying a voltage to the electrode to the outside through a window; a mirror disposed outside the chamber device and reflecting a portion of the light emitted from the chamber device; a holding portion that holds the mirror and is movable in a predetermined direction perpendicular to the optical axis of the light; a frame member movable along the prescribed direction and including an opening for exposing the mirror; a moving mechanism that moves the frame member; as well as An elastic connection portion connects the holding portion and the frame member using elastic force.

2. The gas laser device according to claim 1, wherein: The gas laser device further includes an angle adjustment mechanism capable of adjusting an angle of the mirror relative to the optical axis.

3. The gas laser device according to claim 1, wherein: The gas laser device further includes a base member that holds the holding portion movably. The moving mechanism includes a slide guide provided between the base member and the holding portion and configured to move the holding portion in the predetermined direction relative to the base member.

4. The gas laser device according to claim 1, wherein: The moving mechanism includes a pair of cylinders whose axes sandwich the frame member along the moving direction.

5. The gas laser device according to claim 1, wherein: The elastic connection portion includes: a pin member fixed to the holding portion; a pair of arm portions fixed to the frame member; and a pair of elastic members provided on the arm portions and sandwiching the pin member along the predetermined direction.

6. The gas laser device according to claim 5, wherein: The arm portion is fixed to the outer peripheral surface of the frame member.

7. The gas laser device according to claim 1, wherein: The holding portion includes a recessed portion provided on the frame member side. The elastic coupling portion includes: a supporting member fixed to the frame member and partially inserted into the recess; and a restraining member fixed to the holding portion and the frame member and pressing the supporting member toward the holding portion.

8. The gas laser device according to claim 7, wherein: The support member and the restraint member are provided at positions sandwiching the mirror when the mirror is viewed from the front.

9. The gas laser device according to claim 7, wherein: The moving mechanism further includes a pair of cylinders whose axes sandwich the frame member along the moving direction. The support member and the restraint member are provided at positions symmetrical with respect to the central axis of the shaft.

10. The gas laser device according to claim 7, wherein: The recessed portion is a V-groove whose longitudinal direction extends in a direction perpendicular to the predetermined direction.

11. The gas laser device according to claim 7, wherein: The supporting member includes an elastic member having elastic force in a direction in which the supporting member is pressed toward the holding portion.

12. The gas laser device according to claim 1, wherein: The holding portion includes a recessed portion provided on the frame member side. The elastic connecting portion includes: a pin member fixed to the holding portion; a pair of arm portions fixed to the frame portion; a pair of elastic members arranged on the arm portions and clamping the pin member along the specified direction; a supporting member fixed to the frame portion and a portion of which enters the recess; and a restraining member fixed to the holding portion and the frame portion and pressing the supporting member toward the holding portion.

13. A method for manufacturing an electronic device, wherein: The manufacturing method of the electronic device comprises the following steps: Generating laser light using a gas laser device; outputting the laser light to an exposure device; and exposing the laser on a photosensitive substrate in the exposure device to manufacture an electronic device, The gas laser device comprises: A chamber device having an electrode inside which laser gas is sealed, and emitting light generated from the laser gas by applying a voltage to the electrode to the outside through a window; a mirror disposed outside the chamber device and reflecting a portion of the light emitted through the window; a holding portion that holds the mirror and is movable in a predetermined direction perpendicular to the optical axis of the light; a frame member movable along the prescribed direction and including an opening for exposing the mirror; a moving mechanism that moves the frame member; as well as An elastic connection portion connects the holding portion and the frame member using elastic force.

Images