A silicon core furnace device capable of simultaneously producing multiple crystals

Abstract

The present invention relates to the technical field of silicon core furnaces, and particularly to a silicon core furnace device capable of simultaneously producing multiple crystals, including a base, a furnace tank body, a column, a secondary chamber pipeline and a movable part. A vacuum pipeline is installed in the base, a vacuum pump is installed outside the vacuum pipeline, and a filter tank is arranged on one side of the vacuum pump; the furnace tank body is installed on the top surface of the base, and the furnace tank body includes a lower furnace body, a middle furnace body and a furnace cover. The furnace cover and the lower furnace body are respectively connected to the top end and the bottom end of the middle furnace body, and a crucible is installed in the lower furnace body; In this solution, the possibility of affecting the growth rate and morphology of crystals due to uneven temperature distribution is reduced, the possibility of heat diffusion at the bottom starting is reduced, the possibility that the device can simultaneously draw dozens of silicon cores is improved, the production efficiency is greatly improved, the production cycle is reduced, and the effect of rotational drawing of the device is also improved, making the impurities in the crystal more uniform and the purity of the crystal higher.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon core furnaces, and particularly to a silicon core furnace device capable of simultaneously producing multiple crystals. Background Art

[0002] Silicon core furnaces are mainly used for heating and melting polysilicon raw materials, growing silicon cores through a specific process, and these silicon cores are subsequently used as raw materials in downstream processes. Silicon core furnaces play an important role in the manufacturing business of photovoltaic equipment and are crucial for improving the quality and production efficiency of photovoltaic products. The working mode of silicon core furnaces is similar to that of zone melting systems, using high-frequency induction coils to heat polysilicon rods, melting them and drawing them into silicon cores.

[0003] Currently used silicon core furnace devices can often only draw several or more than a dozen silicon cores during the drawing process, greatly reducing production efficiency and increasing the processing cycle. During the drawing process, the direct drawing method is usually used. During the direct drawing process, the natural convection of the melt may not be fully mixed, resulting in uneven temperature distribution, directly affecting the growth rate and morphology of the crystal, and further reducing the quality of the crystal. Moreover, the internal heat is easily dissipated during drawing. Therefore, a silicon core furnace device capable of simultaneously producing multiple crystals is proposed. Summary of the Invention

[0004] The purpose of the present invention is to solve the deficiencies in the prior art and propose a silicon core furnace device capable of simultaneously producing multiple crystals.

[0005] To achieve the above purpose, the present invention adopts the following technical solutions:

[0006] A silicon core furnace device capable of simultaneously producing multiple crystals includes a base, a furnace tank body, a column, a secondary chamber pipeline, and a movable part. A vacuum pipeline is installed inside the base, a vacuum pump is installed outside the vacuum pipeline, and a filter tank is arranged on one side of the vacuum pump;

[0007] The furnace tank body is installed on the top surface of the base. The furnace tank body includes a lower furnace body, a middle furnace body, and a furnace cover. The furnace cover and the lower furnace body are respectively connected to the top end and the bottom end of the middle furnace body, and a crucible is installed inside the lower furnace body;

[0008] The column is fixedly installed on the top surface of the base. A first lifting device is connected to one side of the column. The first lifting device includes a first lifting shaft, a rotating motor, and a furnace tank lifting motor. The furnace tank lifting motor is installed on the bottom side of the first lifting shaft, and a lifting bracket is installed on the first lifting shaft;

[0009] The auxiliary chamber pipe is connected to the top surface of the furnace cover. A lifting assembly is provided at the top end of the auxiliary chamber pipe. The lifting assembly includes a guiding layer, a lifting layer, and a first lifting motor. The guiding layer is provided at the top end of the auxiliary chamber pipe. The lifting layer is installed on the top side of the guiding layer. The first lifting motor is installed on the top surface of the lifting layer;

[0010] The movable part is movably connected between the auxiliary chamber pipe and the furnace tank body. The movable part includes a high-temperature motor, a gear disk, a growth assembly, a housing, and a toothed ring disk. The housing is installed on the top surface of the gear disk. The growth assembly is rotatably connected to the bottom side of the gear disk. The toothed ring disk is movably connected to the gear disk.

[0011] Preferably, one end of the vacuum pipe is connected to the bottom side of the lower furnace body through pipeline. The other end of the vacuum pipe is connected to a filter tank, and the filter tank is in mutual communication with a vacuum pump. The lower furnace body, the middle furnace body, and the furnace cover are all detachably connected.

[0012] Preferably, the first lifting device is installed on the front side of the column. The furnace tank lifting motor is arranged at the bottom side of the column. A first lead screw nut is connected to the output end of the furnace tank lifting motor. The first lifting shaft is connected to the outside of the first lead screw nut. The rotating motor is arranged on the outside of the first lifting shaft. Rotating gears are installed on the output ends of the first lifting shaft and the rotating motor respectively, and the two rotating gears are meshed with each other. One side of the lifting bracket is installed on the outer surface of the first lifting shaft, and the other side of the lifting bracket is fixedly installed on the outer surface of the auxiliary chamber pipe. A second lifting device is also installed on the side wall surface of the column. The second lifting device includes a middle furnace lifting motor, a second lifting shaft, a steering motor, and a connecting block. The middle furnace lifting motor is installed at the bottom end of the side wall surface of the column. A second lead screw nut is also connected to the output end of the middle furnace lifting motor. The second lifting shaft is connected to the outside of the second lead screw nut. One end of the connecting block is fixed to the second lifting shaft, and the other end is connected to the middle furnace body. An adjusting motor is also arranged on the outside of the second lifting shaft. Adjusting gears are installed on the output end of the adjusting motor and the second lifting shaft respectively, and the two adjusting gears are meshed with each other.

[0013] Preferably, a winding motor is installed on the outside of the guiding layer. The output end of the winding motor is connected to the inside of the guiding layer, and a winding drum is installed thereon. A motor wire is wound around the winding drum. A sub-chamber flange is fixedly installed on the inner wall at the bottom side of the auxiliary chamber pipe. Multiple steel wires are fixedly installed between the sub-chamber flange and the inner wall of the guiding layer. The lifting layer is stacked on the guiding layer. Two winding motors are symmetrically installed on the lifting layer. Winding rollers are arranged on the output ends of the winding motors respectively. Winding wires are arranged on the winding rollers. The bottom ends of the winding wires are connected to a bottom frame, and a bottom heat preservation device is installed on the bottom frame. The first lifting motor is located at the center position of the top surface of the lifting layer. A lifting steel wire is connected inside the first lifting motor.

[0014] Preferably, the toothed ring disc is rotatably connected to the top surface of the gear disc. The toothed ring disc includes an inner toothed ring, a first outer toothed ring, and a second outer toothed ring. The inner toothed ring is welded and installed on the top surface of the first outer toothed ring. The second outer toothed ring is welded and installed on the bottom surface of the first outer toothed ring. The diameter of the second outer toothed ring is smaller than that of the first outer toothed ring. A rotating ring is further fixed to the bottom side of the second outer toothed ring. The rotating ring is movably connected to the top surface of the gear disc. A lower heat preservation base is fixedly installed on the bottom surface of the gear disc. A plurality of through holes are correspondingly opened on the lower heat preservation base and the gear disc. The plurality of through holes are divided into inner ring holes and outer ring holes. A rotating rod is rotatably connected in each through hole. A bearing is connected between each rotating rod and the lower heat preservation base. A transmission gear is fixedly installed on the top end of each rotating rod. The transmission gears are respectively meshed with the first outer toothed ring and the second outer toothed ring. A growth assembly is connected to the bottom end of each rotating rod.

[0015] Preferably, the housing is detachably installed on the gear disc. The high-temperature motor is fixedly installed on one side of the top surface of the housing. The output end of the high-temperature motor penetrates to the inner side of the housing, and a transmission tooth piece is fixedly installed thereon. The transmission tooth piece is meshed with the inner wall surface of the inner toothed ring. A counterweight is arranged on the other side of the top surface of the housing. A plurality of guide frames are annularly installed on the top surface of the housing. Guide wheels are installed on the top ends of the guide frames. The guide wheels are all rollingly connected to the steel wire rope. The bottom end of the motor wire is connected to the high-temperature motor. A lifting head is installed at the central position of the gear disc. The bottom end of the lifting steel wire is connected to the lifting head.

[0016] Preferably, through holes are symmetrically opened on both sides of the housing, the gear disc, and the lower heat preservation base. The growth assembly surrounds the outside of the bottom heat preservation device. Connection holes corresponding to the growth assembly are opened on the bottom frame. The bottom end of the winding wire penetrates through the through hole and is connected to both ends of the bottom heat preservation device.

[0017] Preferably, the growth assembly includes a flexible shaft, a weight, a graphite chuck, and a seed crystal. A flexible shaft is arranged at the bottom end of each rotating rod. A weight is installed at the bottom end of the flexible shaft. The graphite chuck is connected to the bottom end of the weight. A seed crystal is installed at the bottom end of the graphite chuck.

[0018] The beneficial effects of the present invention are as follows:

[0019] In this solution, since a plurality of growth assemblies are annularly arranged, the effect of simultaneously drawing dozens of silicon cores can be achieved, greatly improving the production efficiency and saving a large amount of time;

[0020] Due to the setting of the high-temperature motor, the gear ring disk can be driven to rotate continuously, and the meshing of the surrounding transmission gears can achieve the effect of self-rotation of the growth components one by one. Centrifugal force will be generated during the rotation process, which can optimize the convection pattern in the melt, making the heat transfer more uniform, which is conducive to the growth of the crystal. In addition, the rotation can make the impurities in the crystal more uniform, thereby reducing the aggregation of impurities to a certain extent and improving the purity of the crystal.

[0021] Due to the setting of the bottom insulation device, the upward transfer of heat can be reduced, so that the temperature of the bottom can be maintained for a longer time.

[0022] This solution reduces the possibility of uneven temperature distribution affecting the growth rate and morphology of the crystal, reduces the possibility of heat from the bottom starting to diffuse, increases the possibility of the device being able to simultaneously draw dozens of silicon cores, greatly improves production efficiency and reduces production cycle, and also improves the effect of the device's rotational pulling, making the impurities in the crystal more uniform and the crystal purity higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 The left side structural schematic diagram of a silicon core furnace device capable of producing multiple crystals simultaneously proposed by the present invention;

[0024] Figure 2 The right side structural schematic diagram of a silicon core furnace device capable of producing multiple crystals simultaneously proposed by the present invention;

[0025] Figure 3 This is a schematic diagram of the main structure of a silicon core furnace device capable of producing multiple crystals at the same time, as proposed by the present invention;

[0026] Figure 4 It is a schematic diagram of the internal structure of the movable part, the guide layer and the lifting layer;

[0027] Figure 5 for Figure 4 A schematic diagram of the structure of the upper part;

[0028] Figure 6 for Figure 4 A schematic diagram of the structure of the lower part;

[0029] Figure 7 for Figure 6 A schematic diagram of the main structure of the part;

[0030] Figure 8 for Figure 7 Schematic diagram of the structure of part A;

[0031] Figure 9 FIG. 1 is a schematic diagram of the structure of the movable parts;

[0032] Figure 10Schematic structural diagram of the gear disc part;

[0033] Figure 11 Schematic structural diagram of the tooth ring disc part;

[0034] Figure 12 For Figure 11 Front view structural schematic diagram of the part.

[0035] In the figure: 1, base; 11, filter tank; 12, vacuum pump; 13, vacuum pipeline; 2, furnace tank body; 21, middle furnace body; 22, furnace cover; 23, lower furnace body; 24, crucible; 3, auxiliary chamber pipeline; 31, auxiliary chamber flange; 4, column; 41, first lifting shaft; 42, furnace tank lifting motor; 43, lifting bracket; 5, second lifting device; 51, middle furnace lifting motor; 6, first lifting motor; 7, guiding layer; 71, winding motor; 72, steel wire rope; 73, winding drum; 8, lifting layer; 81, winding-up motor; 82, winding-up wire; 83, bottom heat preservation device; 84, chassis; 85, winding-up roller; 9, moving part; 91, high-temperature motor; 92, counterweight; 93, internal tooth ring; 94, first external tooth ring; 941, second external tooth ring; 95, gear disc; 951, through hole; 96, lower heat preservation base; 97, housing; 971, guiding frame; 972, guiding wheel; 98, lifting head; 99, through hole; 10, seed crystal; 101, transmission gear; 102, graphite chuck; 103, weight; 104, flexible shaft. Specific implementation mode

[0036] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0037] Embodiment: Refer to Figure 1-12 , a silicon core furnace device capable of simultaneously producing multiple crystals, including a base 1, a furnace tank body 2, a column 4, an auxiliary chamber pipeline 3 and a moving part 9. A vacuum pipeline 13 is installed in the base 1. One end of the vacuum pipeline 13 is connected to the bottom side of the lower furnace body 23 through a pipeline to evacuate the equipment to avoid the influence of gas on the drawing process. The other end of the vacuum pipeline 13 is connected to the filter tank 11 to filter the extracted gas. The filter tank 11 and the vacuum pump 12 are interconnected. The lower furnace body 23, the middle furnace body 21 and the furnace cover 22 are all detachably connected for convenient installation, disassembly and material addition. A vacuum pump 12 is installed outside the vacuum pipeline 13, and a filter tank 11 is arranged on one side of the vacuum pump 12;

[0038] The furnace pot body 2 is installed on the top surface of the base 1. The furnace pot body 2 includes a lower furnace body 23, a middle furnace body 21 and a furnace cover 22. The furnace cover 22 and the lower furnace body 23 are respectively connected to the top end and the bottom end of the middle furnace body 21. A crucible 24 is installed inside the lower furnace body 23;

[0039] The column 4 is fixedly installed on the top surface of the base 1. A first lifting device is connected to one side of the column 4. The first lifting device includes a first lifting shaft 41, a rotating motor and a furnace pot lifting motor 42. The furnace pot lifting motor 42 is installed on the bottom side of the first lifting shaft 41. A lifting bracket 43 is installed on the first lifting shaft 41;

[0040] The auxiliary chamber pipe 3 is connected to the top surface of the furnace cover 22. A lifting assembly is provided at the top end of the auxiliary chamber pipe 3. The lifting assembly includes a guiding layer 7, a lifting layer 8 and a first lifting motor 6. The guiding layer 7 is provided at the top end of the auxiliary chamber pipe 3. The lifting layer 8 is installed on the top side of the guiding layer 7. The first lifting motor 6 is installed on the top surface of the lifting layer 8;

[0041] The movable part 9 is movably connected between the auxiliary chamber pipe 3 and the furnace pot body 2. The movable part 9 includes a high-temperature motor 91, a gear disc 95, a growth assembly, a housing 97 and a toothed ring disc. The housing 97 is installed on the top surface of the gear disc 95. The growth assembly is rotatably connected to the bottom side of the gear disc 95. The toothed ring disc is movably connected to the gear disc 95.

[0042] Specifically, the first lifting device is installed on the front side of the column 4. The furnace pot lifting motor 42 is arranged at the bottom side of the column 4. A first screw nut is connected to the output end of the furnace pot lifting motor 42. The first lifting shaft 41 is threadedly connected to the first screw nut to facilitate the lifting of the auxiliary chamber pipe 3 for material taking. The rotating motor is arranged outside the first lifting shaft 41. Rotating gears are installed on the output ends of the first lifting shaft 41 and the rotating motor. The two rotating gears are meshed with each other to control the outward rotation of the auxiliary chamber pipe 3. The outer end of the lifting bracket 43 is fixedly installed on the outer surface of the first lifting shaft 41. The other side of the lifting bracket 43 is fixedly installed on the outer surface of the auxiliary chamber pipe 3 to connect the auxiliary chamber pipe 3 and the first lifting shaft 41 to achieve the effect of synchronous movement. A second lifting device 5 is also installed on the side wall surface of the column 4. The second lifting device 5 includes a middle furnace lifting motor 51, a second lifting shaft, a steering motor and a connecting block. The middle furnace lifting motor 51 is installed at the bottom end of the side wall surface of the column 4. A second screw nut is also connected to the output end of the middle furnace lifting motor 51. The second lifting shaft is connected to the outside of the second screw nut. One end of the connecting block is fixed to the second lifting shaft, and the other end is connected to the middle furnace body 21 to realize the support connection between the middle furnace body 21 and the second lifting shaft. An adjusting motor is also provided outside the second lifting shaft. Adjusting gears are installed on the output end of the adjusting motor and the second lifting shaft to act on the rotation of the middle furnace body 21.

[0043] Furthermore, a winding motor 71 is installed outside the guiding layer 7. The output end of the winding motor 71 is connected to the inside of the guiding layer 7, and a winding drum 73 is installed thereon to facilitate the recycling of the motor wire and avoid pendulum. The motor wire wound around the winding drum 73 is used for the electrical connection of the high-temperature motor 91. A secondary chamber flange 31 is fixedly installed between the inner walls of the bottom side of the secondary chamber pipe 3. A plurality of steel wire ropes 72 are vertically installed between the secondary chamber flange 31 and the guiding layer 7. The lifting layer 8 is stacked on the top surface of the guiding layer 7. Two winding motors 81 are symmetrically installed in the lifting layer 8 to facilitate the lifting of the position of the bottom heat preservation device 83 for convenient refeeding of raw materials. Winding rollers 85 are provided on the output ends of the winding motors 81. Winding wires 82 are provided on the winding rollers 85. The bottom ends of the winding wires 82 are connected to a chassis 84. A bottom heat preservation device 83 is installed on the chassis 84 to reduce the upward heat and maintain the temperature at the bottom. The first lifting motor 6 is located at the center of the top surface of the lifting layer 8. A winding rod is provided in the first lifting motor 6, and a lifting steel wire is connected thereto for the lifting of the movable part 9.

[0044] In this embodiment, the toothed ring plate is rotatably connected to the top surface of the gear plate 95. The toothed ring plate includes an inner toothed ring 93, a first outer toothed ring 94, and a second outer toothed ring 941. The inner toothed ring 93 is welded and installed on the top surface of the first outer toothed ring 94. The second outer toothed ring 941 is welded and installed on the bottom surface of the first outer toothed ring 94. The diameter of the second outer toothed ring 941 is smaller than that of the first outer toothed ring 94 to simultaneously control the rotation of the rotating rods in the inner and outer holes. A rotating ring is further fixed to the bottom side of the second outer toothed ring 941. The rotating ring is movably connected to the top surface of the gear plate 95 to ensure the stable rotation of the toothed ring plate. A lower heat preservation base 96 is fixedly installed on the bottom surface of the gear plate 95 to maintain the lower temperature while reducing the temperature rise. A plurality of through holes 951 are correspondingly opened on the lower heat preservation base 96 and the gear plate 95. The plurality of through holes 951 are divided into inner and outer holes. Rotating rods are rotatably connected in the through holes 951 to drive the growth components to rotate one by one to achieve the effect of improving the crystal quality. Bearings are connected between the outer surfaces of the rotating rods and the lower heat preservation base 96 for stability during rotation. Driving gears 101 are fixedly installed on the top ends of the rotating rods. The driving gears 101 are meshed with the first outer toothed ring 94 and the second outer toothed ring 941 respectively to enable the rotation of each growth component. Growth components are connected to the bottom ends of the rotating rods.

[0045] Moreover, the housing 97 is detachably mounted on the gear disk 95, which can prevent dust from entering the gear disk 95 and limit the position of the gear ring disk. The high-temperature motor 91 is fixedly installed on one side of the top surface of the housing 97. The output end of the high-temperature motor 91 penetrates to the inner side of the housing 97, and a transmission gear piece is fixedly installed thereon. The transmission gear piece meshes with the inner wall surface of the internal gear ring 93, so as to drive the gear ring disk to rotate. A counterweight 92 is arranged on the other side of the top surface of the housing 97 to keep the gear disk 95 balanced. A plurality of guide frames 971 are annularly installed on the top surface of the housing 97, and guide wheels 972 are installed on the tops of the guide frames 971. The guide wheels 972 are all in rolling connection with the steel wire rope 72 to achieve the purpose of stable guiding, so as to keep the movable member 9 stable during the lifting movement. The bottom end of the motor wire is connected to the high-temperature motor 91. A lifting head 98 is installed at the central position of the gear disk 95. The bottom end of the lifting steel wire is connected to the lifting head 98 to facilitate the lifting of the movable member 9. The growth assembly includes a flexible shaft 104, a weight 103, a graphite chuck 102 and a seed crystal 10. Flexible shafts 104 are arranged at the bottom ends of the rotating rods to avoid the influence on the materials during shaking and tilting. A weight 103 is installed at the bottom end of the flexible shaft 104 to keep a certain weight at the lower part. The graphite chuck 102 is connected to the bottom end of the weight 103. A seed crystal 10 is installed at the bottom end of the graphite chuck 102 to grow crystals. Through holes 99 are symmetrically formed on both sides of the housing 97, the gear disk 95 and the lower heat preservation base 96. The growth assembly surrounds the outside of the bottom heat preservation device 83 to realize the possibility of uniform heat preservation. Connection holes corresponding to the growth assembly are formed on the bottom frame 84. The bottom end of the winding wire 82 penetrates through the through holes 99 and is connected to both ends of the bottom heat preservation device 83 to realize the lifting control during feeding.

[0046] Working principle: When the equipment works, the first lifting motor 6 will start to rotate, and the lifting steel wire will gradually lower the movable member 9. The guide wheels 972 will roll downward along the steel wire rope 72. At the same time, the winding motor 71 is controlled to rotate, and the motor wire will also be lowered simultaneously. When the movable member 9 is placed at the specified position, the first lifting motor 6 and the winding motor 71 stop. At this time, the seed crystal 10 will be inserted into the melt in the crucible 24. During the process of the seed crystal 10 fusing with the melt, the high-temperature motor 91 is controlled to rotate. The rotation drives the gear ring disk to rotate, and the transmission gear 101 will start to rotate, so as to drive the growth assembly to rotate. After complete fusion, the first lifting motor 6, the winding motor 81 and the winding motor 71 are controlled to rotate in the reverse direction at the same time. The motor wire will be wound up, and the movable member 9 and the bottom heat preservation device 83 will gradually move upward. The seed crystal 10 will be slowly pulled upward, and crystals will grow at the lower end of the seed crystal 10 and can be continuously heat-preserved. The gradual upward movement will lift the movable member 9 and the bottom heat preservation device 83 into the auxiliary chamber pipe 3. At this time, the furnace tank lifting motor 42 can be controlled to rotate to lift the entire auxiliary chamber pipe 3 upward, and then the rotation motor is controlled to rotate to adjust the position of the auxiliary chamber pipe 3 to facilitate the removal of the crystals.

[0047] During the crystal growth process, the bottom heat preservation device 83 absorbs the generated high temperature, thereby maintaining the temperature at the bottom for a long time and preventing a large amount of heat from rising. While making the temperature more uniform during the growth process, it can prevent the damage of other components caused by the diffusion of high temperature. When it is necessary to re-inject raw materials, control the winding motor 81 to lift the bottom heat preservation device 83 upward, then control the first lifting shaft 41 and the second lifting shaft to move upward simultaneously, and control the rotation motor and the adjustment motor to rotate it to facilitate the re-injection of raw materials.

[0048] The content not described in detail in this specification belongs to the prior art well-known to those skilled in the art.

[0049] The standard parts used in the present invention can all be purchased from the market. The special-shaped parts can be customized according to the descriptions in the specification and the drawings. The specific connection methods of each part all adopt conventional means such as bolts, rivets, and welding that are mature in the prior art. The machines, parts, and equipment all adopt conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be elaborated here.

[0050] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered within the protection scope of the present invention.

Claims

1. A silicon core furnace device capable of producing multiple crystals simultaneously, characterized in that: include: A base (1), wherein a vacuum pipe (13) is installed inside the base (1), a vacuum pump (12) is installed outside the vacuum pipe (13), and a filter tank (11) is provided on one side of the vacuum pump (12); A furnace pot body (2), the furnace pot body (2) being mounted on the top surface of the base (1), the furnace pot body (2) comprising a lower furnace body (23), a middle furnace body (21) and a furnace cover (22), the furnace cover (22) and the lower furnace body (23) being connected to the top and bottom ends of the middle furnace body (21) respectively, and a crucible (24) being mounted in the lower furnace body (23); A column (4), the column (4) being fixedly mounted on the top surface of the base (1); a first lifting device being connected to one side of the column (4); the first lifting device comprising a first lifting shaft (41), a rotating motor and a furnace tank lifting motor (42); the furnace tank lifting motor (42) being mounted on the bottom side of the first lifting shaft (41); and a lifting bracket (43) being mounted on the first lifting shaft (41); A secondary chamber pipeline (3), the secondary chamber pipeline (3) being connected to the top surface of the furnace cover (22), a lifting component being arranged on the top of the secondary chamber pipeline (3), the lifting component comprising a guide layer (7), a lifting layer (8) and a first lifting motor (6), the guide layer (7) being arranged on the top of the secondary chamber pipeline (3), the lifting layer (8) being installed on the top side of the guide layer (7), and the first lifting motor (6) being installed on the top surface of the lifting layer (8); A movable part (9), the movable part (9) being movably connected between the auxiliary chamber pipeline (3) and the furnace tank body (2), the movable part (9) comprising a high-temperature motor (91), a gear plate (95), a growth component, a cover (97) and a gear ring plate, the cover (97) being mounted on the top surface of the gear plate (95), the growth component being rotatably connected to the bottom side of the gear plate (95), and the gear ring plate being movably connected to the gear plate (95); Two winding motors (81) are symmetrically mounted on the lifting layer (8), and winding rollers (85) are mounted on the output ends of the winding motors (81). A winding line (82) is mounted on the winding rollers (85). The bottom end of the winding line (82) is connected to a bottom frame (84), and a bottom heat preservation device (83) is mounted on the bottom frame (84). The growth assembly surrounds the outside of the bottom heat preservation device (83); The gear ring disk is rotatably connected to the top surface of the gear disk (95), and the gear ring disk comprises an inner gear ring (93), a first outer gear ring (94), and a second outer gear ring (941). The inner gear ring (93) is welded and mounted on the top surface of the first outer gear ring (94), and the second outer gear ring (941) is welded and mounted on the bottom surface of the first outer gear ring (94). The diameter of the second outer gear ring (941) is smaller than that of the first outer gear ring (94). A rotating ring is also fixed on the bottom side of the second outer gear ring (941), and the rotating ring is movably connected to the top surface of the gear disk (95). The bottom surface of the gear disk (95) A lower heat-insulating seat (96) is fixedly mounted on the upper portion, and a plurality of through holes (951) are correspondingly opened on the lower heat-insulating seat (96) and the gear plate (95), and the plurality of through holes (951) are divided into inner circle holes and outer circle holes, and a rotating rod is rotatably connected in each of the through holes (951), and a bearing is connected between the rotating rod and the lower heat-insulating seat (96), and a transmission gear (101) is fixedly mounted on the top end of the rotating rod, and the transmission gear (101) is respectively meshed with the first outer gear ring (94) and the second outer gear ring (941), and a growth component is connected to the bottom end of the rotating rod.

2. The silicon core furnace equipment capable of producing multiple crystals simultaneously according to claim 1, characterized in that: One end of the vacuum pipe (13) is connected to the bottom side of the lower furnace body (23), and the other end of the vacuum pipe (13) is connected to the filter tank (11). The filter tank (11) and the vacuum pump (12) are interconnected, and the lower furnace body (23), the middle furnace body (21) and the furnace cover (22) are all detachably connected.

3. The silicon core furnace equipment capable of producing multiple crystals simultaneously according to claim 1, characterized in that: The first lifting device is mounted on the front side of the column (4); the furnace tank lifting motor (42) is arranged on the bottom side of the column (4); the output end of the furnace tank lifting motor (42) is connected to a first screw nut; the first lifting shaft (41) is connected to the outside of the first screw nut; the rotary motor is arranged on the outside of the first lifting shaft (41); rotary gears are mounted on the output ends of the first lifting shaft (41) and the rotary motor; the two rotary gears are meshed with each other; one side of the lifting bracket (43) is mounted on the outer surface of the first lifting shaft (41); the other side of the lifting bracket (43) is fixedly mounted on the outer surface of the auxiliary chamber pipe (3); A second lifting device (5) is also installed on the side wall of the column (4), and the second lifting device (5) includes a middle furnace lifting motor (51), a second lifting shaft, a steering motor and a connecting block. The middle furnace lifting motor (51) is installed on the bottom end of the side wall of the column (4), and a second screw nut is also connected to the output end of the middle furnace lifting motor (51). The second lifting shaft is connected to the outside of the second screw nut. One end of the connecting block is fixed to the second lifting shaft, and the other end is connected to the middle furnace body (21). An adjusting motor is also arranged on the outside of the second lifting shaft, and two mutually meshing adjusting gears are installed on the output end of the adjusting motor and the second lifting shaft.

4. The silicon core furnace equipment capable of producing multiple crystals simultaneously according to claim 1, characterized in that: A winding motor (71) is installed on the outer side of the guide layer (7), the output end of the winding motor (71) is connected to the inner side of the guide layer (7), and a winding drum (73) is installed thereon, and a motor wire is wound on the winding drum (73). A sub-chamber flange (31) is fixedly installed on the inner wall of the bottom side of the sub-chamber pipe (3), and a plurality of steel wire ropes (72) are fixedly installed between the sub-chamber flange (31) and the inner wall of the guide layer (7). The lifting layer (8) is stacked on the guide layer (7), and the first lifting motor (6) is located at the center of the top surface of the lifting layer (8), and a lifting wire is connected inside the first lifting motor (6).

5. The silicon core furnace equipment capable of producing multiple crystals simultaneously according to claim 4, characterized in that: The cover shell (97) is detachably mounted on the gear plate (95), and the high-temperature motor (91) is fixedly mounted on one side of the top surface of the cover shell (97). The output end of the high-temperature motor (91) passes through the inner side of the cover shell (97) and is fixedly mounted with a transmission gear plate thereon. The transmission gear plate and the inner wall surface of the inner gear ring (93) are meshed with each other. A counterweight block (92) is arranged on the other side of the top surface of the cover shell (97). A plurality of guide frames (971) are also annularly mounted on the top surface of the cover shell (97), and guide wheels (972) are mounted on the top of the guide frames (971). The guide wheels (972) are rollingly connected to the steel wire rope (72). The bottom end of the motor line is connected to the high-temperature motor (91). A lifting head (98) is mounted at the center of the gear plate (95), and the bottom end of the lifting wire is connected to the lifting head (98).

6. The silicon core furnace equipment capable of producing multiple crystals simultaneously according to claim 5, characterized in that: Through holes (99) are symmetrically provided on both sides of the cover shell (97), the gear plate (95) and the lower heat-insulating seat (96); a connecting hole corresponding to the growing assembly is provided on the bottom frame (84); the bottom end of the winding wire (82) passes through the through hole (99) and is connected to the two ends of the bottom heat-insulating device (83).

7. The silicon core furnace equipment capable of producing multiple crystals simultaneously according to claim 1, characterized in that: The growth assembly comprises a soft shaft (104), a weight (103), a graphite chuck (102) and a seed crystal (10); the bottom end of the rotating rod is provided with a soft shaft (104); the bottom end of the soft shaft (104) is mounted with a weight (103); the graphite chuck (102) is connected to the bottom end of the weight (103); and the seed crystal (100) is mounted on the bottom end of the graphite chuck (102).

Images