Arrayed waveguide grating spectrometer dynamic interferometer with amplitude monitoring

Abstract

The application relates to an amplitude monitoring array waveguide optical grating light splitting dynamic interferometer, a fiber beam splitter of which is located on an outgoing light path of a light emitter, the fiber beam splitter is used for splitting a light beam incident on an incident side into two paths and outputting the two paths on an outgoing side, one path is incident on a light intensity detection piece through a fiber, and the other path is incident on an incident end of a collimating piece. A half-wave plate and a light splitting prism are arranged at an outgoing end of the collimating piece. The half-wave plate is located between the outgoing end of the collimating piece and the light splitting prism, the collimated light beam is split by the light splitting prism into a first light beam transmitted along a first light path and a second light beam transmitted along a second light path, the first light beam is reflected back to the light splitting prism through a mirror. The second light beam is reflected back to the light splitting prism through a surface to be measured. The first light beam and the second light beam reflected back to the light splitting prism interfere with each other, and an interference image is recorded on a camera. Precise measurement of a wavefront image of the surface to be measured can be realized.

Description

Technical Field

[0001] The invention belongs to the technical field of optical measurement, and in particular relates to an arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring. Background Art

[0002] As the quality requirements for optical systems in fields such as the national economy, scientific research, and national defense increase, the importance of surface processing and testing of optical components is becoming increasingly prominent. Currently, wavefront testing of planar, spherical, and aspheric surfaces of optical components can be accomplished using interferometers. Interferometers implement interferometric testing technology that utilizes interference phenomena for detection. Due to its advantages such as high precision, high sensitivity, and non-destructive testing, interferometric testing technology is widely used in various related testing fields. However, the interference optical path of traditional interferometers cannot achieve miniaturization and amplitude detection functions. Summary of the Invention

[0003] In view of this, the present invention aims to provide an arrayed waveguide grating spectroscopic dynamic interferometer with amplitude monitoring, which has the function of dynamically monitoring the amplitude of the light beam emitted by the light transmitter, and can realize the precise measurement of the wavefront image of the surface to be measured.

[0004] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0005] An arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring, comprising a light emitter, a fiber beam splitter, a light intensity detection component, a collimator, an imaging system, a camera, and a controller;

[0006] The optical fiber beam splitter is located on the outgoing optical path of the optical transmitter. The optical fiber beam splitter is used to split the incident light beam on the incident side into two paths and output them on the outgoing side. One path is incident to the light intensity detection component through the optical fiber, and the other path is incident to the incident end of the collimator through the optical fiber. The controller is used to adjust the light intensity of the light beam emitted by the optical transmitter according to the difference between the light intensity obtained by the light intensity detection component and the set light intensity.

[0007] The imaging system includes a half-wave plate, a beam splitter and a reflector; the half-wave plate and the beam splitter are arranged at the output end of the collimator; the half-wave plate is located between the output end of the collimator and the beam splitter, and the output end of the collimator is used to emit a collimated light beam. The collimated light beam passes through the half-wave plate and is divided by the beam splitter into a first light beam transmitted along a first optical path and a second light beam transmitted along a second optical path. The first light beam is reflected back to the beam splitter through the reflector; the second light beam passes through the surface to be measured and is reflected back to the beam splitter; the first light beam and the second light beam reflected back to the beam splitter interfere with each other, and the interference image is recorded on the camera.

[0008] Furthermore, it also includes an arrayed waveguide grating and a motion component, wherein the light emitter and the arrayed waveguide grating are arranged in the motion component; the arrayed waveguide grating is located on the outgoing light path of the light emitter and between the light emitter and the optical fiber beam splitter;

[0009] The optical transmitter is connected to the input end of the arrayed waveguide grating through an optical fiber, and a motion component is used to connect any of the multiple output ends of the arrayed waveguide grating to the optical fiber connected to the incident side of the optical fiber splitter.

[0010] Furthermore, the wavelength interval of the arrayed waveguide grating ranges from 0.01 nm to 0.1 nm.

[0011] Furthermore, the motion component includes a drive component and a transmission component. The drive component is used to drive the transmission component to move so that the light emitter and the arrayed waveguide grating move; the transmission component adopts any of the following components: a chain drive component, a gear rack component, and a screw and nut component.

[0012] Furthermore, the imaging system further includes a first quarter-wave plate arranged in the first optical path, the first quarter-wave plate being located between the beam splitter prism and the reflector;

[0013] After passing through the first quarter-wave plate, the first light beam is incident on the surface of the reflector, and after being reflected by the surface of the reflector, it passes through the first quarter-wave plate again and returns to the beam splitter prism.

[0014] Furthermore, the imaging system further includes a second quarter-wave plate and a converging lens arranged in the second optical path; the second quarter-wave plate is located between the beam splitting prism and the converging lens;

[0015] The second light beam is transmitted through the second quarter-wave plate, and then passes through the converging lens to be incident on the surface to be measured. After being reflected by the surface to be measured, the second light beam passes through the converging lens and the second quarter-wave plate again and returns to the beam splitter prism.

[0016] Furthermore, the imaging system further includes a third quarter-wave plate, the third quarter-wave plate being located between the beam splitter prism and the camera;

[0017] The first light beam and the second light beam reflected back to the beam splitter prism are combined by the beam splitter prism and then pass through the third quarter wave plate, so that the first light beam and the second light beam interfere with each other, and the interference image is recorded on the camera.

[0018] Furthermore, the camera is a polarization mask camera.

[0019] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0020] The amplitude-monitoring arrayed waveguide grating spectroscopic dynamic interferometer created by the present invention has the function of dynamically monitoring the amplitude of the light beam emitted by the light emitter. It can adjust the light intensity of the light beam emitted by the light emitter according to the light intensity detected by the light intensity detection component, so that the light beam emitted by the light emitter remains stable, thereby achieving accurate measurement of the wavefront image of the surface to be measured. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0022] Figure 1 This is an optical structure diagram of the arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring described in an embodiment of the present invention.

[0023] Description of reference numerals:

[0024] Arrayed waveguide grating (AWG) spectroscopic dynamic interferometer 10; light transmitter 11; fiber beam splitter 12; light intensity detector 13; collimator 14; imaging system 15; camera 16; half-wave plate 17; beam splitter prism 18; reflector 19; surface to be measured 20; arrayed waveguide grating 21; first quarter-wave plate 22; second quarter-wave plate 23; converging lens 24; third quarter-wave plate 25. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation to the present invention. Similar elements in different embodiments use associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present invention to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present invention are not shown or described in the specification. This is to avoid the core part of the present invention being overwhelmed by too much description. For those skilled in the art, it is not necessary to describe these related operations in detail. They can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0026] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other to form various implementation methods. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various orders in the description and the drawings are only for the purpose of clearly describing a certain embodiment and are not intended to be a required order, unless otherwise specified that a certain order must be followed.

[0027] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0028] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0029] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0030] See also Figure 1 As shown, an embodiment of the present invention provides an amplitude-monitoring arrayed waveguide grating (AWG) dynamic interferometer 10, which can be used to detect the wavefront shape of optical components. The arrayed waveguide grating (AWG) dynamic interferometer 10 includes a light emitter 11, a fiber beam splitter 12, a light intensity detector 13, a collimator 14, an imaging system 15, a camera 16, and a controller (not shown).

[0031] The light emitter 11 can refer to a laser emitter or an LED light emitter, and the present application does not make any limitation. The optical fiber beam splitter 12 is located on the light path of the light emitter 11, and the optical fiber beam splitter 12 is used to split the light beam incident on the incident side into two paths and output on the exit side, one path is incident on the light intensity detection member 13 through the optical fiber, and the other path is incident on the incident end of the collimating member 14 through the optical fiber. The light beam incident on the light intensity detection member 13 through the optical fiber can be recognized by the light intensity detection member 13, and the light intensity detection member 13 can detect and record the light intensity of the light beam and send it to the controller, so that the controller can obtain the light intensity of the light beam. The light intensity detection member 13 can be a photodiode. The light intensity of the light beam incident on the incident end of the collimating member 14 can be determined according to the distribution ratio of the optical fiber beam splitter 12 and the light intensity of the light beam incident on the light intensity detection member 13. In this embodiment, the ratio of the light intensity of the light beam incident on the light intensity detection member 13 to the light intensity of the light beam incident on the incident end of the collimating member 14 is 1:9. The controller is used to adjust the light intensity of the light beam emitted by the light emitter 11 according to the difference between the light intensity obtained by the light intensity detection member 13 and the set light intensity. The light beam incident on the incident end of the collimating member 14 through the optical fiber can be adjusted by the collimating member 14 into a collimated light beam and output through the exit end of the collimating member 14. The collimating member 14 can be a collimating lens or a collimator.

[0032] The imaging system 15 includes a half-wave plate 17, a light splitting prism 18 and a mirror 19. The exit end of the collimating member 14 is arranged with the half-wave plate 17 and the light splitting prism 18. The half-wave plate 17 is located between the exit end of the collimating member 14 and the light splitting prism 18, and the exit end of the collimating member 14 is used to emit a collimated light beam. The collimated light beam passes through the half-wave plate 17 and is split by the light splitting prism 18 into a first light beam along a first light path and a second light beam along a second light path. In this embodiment, the collimated light beam passes through the half-wave plate 17 and is incident on the light splitting prism 18, and is split by the light splitting prism 18 into two light beams with mutually perpendicular polarization directions, i.e. a first light beam P light along a first light path and a second light beam S light along a second light path. The first light beam is reflected by the mirror 19 back to the light splitting prism 18. The second light beam is reflected by the surface to be measured 20 back to the light splitting prism 18. The first light beam and the second light beam reflected back to the light splitting prism 18 interfere with each other and record an interference image on the camera 16.

[0033] The amplitude monitoring arrayed waveguide grating light splitting dynamic interferometer 10 of the present application has the function of dynamically monitoring the amplitude of the light beam emitted by the light emitter 11, and can adjust the light intensity of the light beam emitted by the light emitter 11 according to the light intensity detected by the light intensity detection member 13, so that the light beam emitted by the light emitter 11 remains stable, so that the wavefront image of the surface to be measured 20 can be accurately measured.

[0034] In one embodiment, the arrayed waveguide grating (AWG) spectroscopic dynamic interferometer 10 further includes an arrayed waveguide grating (AWG) 21 and a motion assembly (not shown). The light emitter 11 and the AWG 21 are disposed within the motion assembly. The AWG 21 is located on the outgoing optical path of the light emitter 11 and between the light emitter 11 and the fiber beam splitter 12.

[0035] The optical transmitter 11 is connected to the input end of the arrayed waveguide grating 21 via an optical fiber. The light beam emitted by the optical transmitter 11 can be transmitted to the input end of the arrayed waveguide grating 21 via a pigtail. After diffraction and splitting by the arrayed waveguide grating 21, light beams of different wavelengths are output through different output channels of the arrayed waveguide grating 21 with narrow linewidth beams of corresponding wavelengths. Each output channel is correspondingly provided with an output end. That is, the arrayed waveguide grating 21 has multiple output ends, and different output ends can output light beams of different wavelengths. In one embodiment, the wavelength interval of the arrayed waveguide grating 21 ranges from 0.01nm to 0.1nm. In this embodiment, the wavelength interval of the arrayed waveguide grating 21 is 0.01nm, that is, the wavelength difference between adjacent output channels is 0.01nm. And through a motion component, any of the multiple output ends of the arrayed waveguide grating 21 is connected to the optical fiber connected to the incident side of the optical fiber beam splitter 12. The motion component can drive the light emitter 11 and the arrayed waveguide grating 21 to move, and can make the light emitter 11 and the arrayed waveguide grating 21 move laterally along the arrayed waveguide grating 21 to switch different output channels of the arrayed waveguide grating 21, so that different output ports are connected to the optical fiber on the incident side of the optical fiber splitter 12. The light beam output from the output end of the arrayed waveguide grating 21 can be coupled into the optical fiber connected to the incident side of the optical fiber splitter 12. In this way, the wavelength of the light beam emitted by the light emitter 11 can be stabilized and screened by the arrayed waveguide grating 21, thereby achieving accurate measurement of the wavefront image of the surface to be measured 20. By accurately controlling the wavelength of the light beam emitted by the light emitter 11, a basis can be provided for surface shape detection of the surface to be measured 20 of the optical element. The light beam emitted by the light emitter 11 undergoes diffraction and splitting by the arrayed waveguide grating 21, allowing light beams of different wavelengths to be output through different output channels of the arrayed waveguide grating 21. As a result, each output end of the arrayed waveguide grating 21 can output a light beam with a narrow linewidth and stable wavelength. Furthermore, the light emitter 11 and the arrayed waveguide grating 21 are disposed within a motion assembly. The motion assembly can be used to drive the light emitter 11 and the arrayed waveguide grating 21 to move, thereby switching the output end of the arrayed waveguide grating 21 that interfaces with the optical fiber connected to the incident side of the optical fiber beam splitter 12. Different output ends of the arrayed waveguide grating 21 can output light beams of different wavelengths, thereby utilizing the motion assembly to achieve rapid multi-wavelength measurement, thereby obtaining a more accurate wavefront image of the surface 20 to be measured.

[0036] The arrayed waveguide grating spectroscopic dynamic interferometer 10 for amplitude monitoring created by the present invention has the functions of screening and stabilizing the wavelength of the light beam emitted by the light emitter 11 and dynamically monitoring the amplitude of the light beam emitted by the light emitter 11. On the one hand, the wavelength of the light beam of the light emitter 11 can be modulated by the arrayed waveguide grating 21 to achieve precise control of the wavelength of the light beam. On the other hand, the amplitude of the light beam of the light emitter 11 can be monitored by the light intensity detection element 13, so as to keep the frequency output by the light emitter 11 stable. At the same time, the arrayed waveguide grating spectroscopic dynamic interferometer 10 has the advantages of miniaturization, and can be optimized for system integration and miniaturization through optical fiber waveguides. The various devices are connected by optical fiber waveguides to integrate different devices into a miniaturized system, so as to achieve precise measurement of the wavefront image of the surface to be measured, thereby providing a basis for high-precision detection of the surface shape of optical elements.

[0037] The invention is based on the fast vibration-resistant measurement capability of the dynamic interferometer itself and the high-resolution wavelength separation characteristics of the arrayed waveguide grating 21. Through the fiber optic optical path design and the amplitude monitoring of the light beam emitted by the optical transmitter 11, it can solve the problem of insufficient adaptability of the traditional interference measurement optical path in the existing technology and fill the technical gap in the high-dynamic measurement system.

[0038] In one embodiment, the motion assembly includes a drive assembly and a transmission assembly. The drive assembly is configured to drive the transmission assembly to move the optical transmitter 11 and the arrayed waveguide grating 21. The transmission assembly can be any of the following: a chain drive assembly, a rack and pinion assembly, a screw and nut assembly, etc. The present invention is not limited to the specific structure of the transmission assembly; any of the multiple output ports of the arrayed waveguide grating 21 can be connected to the optical fiber connected to the incident side of the optical fiber beam splitter 12.

[0039] In one embodiment, the imaging system 15 further includes a first quarter-wave plate 22 disposed in the first optical path, the first quarter-wave plate 22 being located between the beam splitter prism 18 and the reflector 19. After transmitting through the first quarter-wave plate 22, the first light beam is incident on the surface of the reflector 19. After being reflected from the surface of the reflector 19, the first light beam passes through the first quarter-wave plate 22 again and returns to the beam splitter prism 18. In this embodiment, the first light beam P can serve as reference light. After transmitting through the first quarter-wave plate 22, the first light beam is converted into right-handed polarized light, is incident on the surface of the reflector 19, and after being reflected from the surface of the reflector 19, passes through the first quarter-wave plate 22 again, is modulated into S light, and returns to the beam splitter prism 18.

[0040] In one embodiment, the imaging system 15 further includes a second quarter-wave plate 23 and a converging lens 24 arranged in the second optical path. The second quarter-wave plate 23 is located between the beam splitter 18 and the converging lens 24. After the second light beam is transmitted through the second quarter-wave plate 23, it passes through the converging lens 24 and is incident on the surface to be measured 20. After being reflected from the surface of the surface to be measured 20, it passes through the converging lens 24 and the second quarter-wave plate 23 again and returns to the beam splitter 18. In this embodiment, the second light beam S can be used as detection light. After being transmitted through the second quarter-wave plate 23, it is converted into left-handed polarized light. After passing through the converging lens 24, it is incident on the surface to be measured 20. After being reflected from the surface of the surface to be measured 20, it passes through the converging lens 24 and the second quarter-wave plate 23 again, is modulated into P light, and returns to the beam splitter 18.

[0041] In one embodiment, the imaging system 15 further includes a third quarter-wave plate 25, which is positioned between the beam splitter prism 18 and the camera 16. The first light beam and the second light beam reflected back to the beam splitter prism 18 are combined by the beam splitter prism 18 and then pass through the third quarter-wave plate 25, causing the first light beam and the second light beam to interfere with each other, and an interference image is recorded on the camera 16. In this embodiment, the modulated first light beam S and the second light beam P return to the beam splitter prism 18 for combination and pass through the third quarter-wave plate 25, converting the S light of the first light beam into right-handed polarized light and the P light of the second light beam into left-handed polarized light, thereby causing the first light beam and the second light beam to interfere with each other and recording an interference image on the camera 16. The interference image can be recorded on the target surface of the camera 16.

[0042] In this embodiment, the half-wave plate 17 and the second quarter-wave plate 23 are located on opposite sides of the beam splitter prism 18 along a first direction, and the first quarter-wave plate 22 and the third quarter-wave plate 25 are located on opposite sides of the beam splitter prism 18 along a second direction; wherein the first direction is the direction along the second optical path, and the first direction is perpendicular to the second direction.

[0043] In one embodiment, camera 16 is a polarization mask camera. The polarization mask camera can capture four interference images at different phases in real time and send them to a computer for processing. The computer can then calculate the wavefront image of the surface 20 under test at the current wavelength through a four-step phase shift solution. By utilizing a motion assembly to connect the different output ends of the arrayed waveguide grating 21 to the optical fiber connected to the incident side of the fiber beam splitter 12, wavefront images of the surface 20 under test at multiple different wavelengths can be rapidly acquired. The computer can process these wavefront images of the surface 20 under test at multiple different wavelengths to obtain a wavefront image of the surface 20 under test, thereby enabling precise measurement of the wavefront image of the surface 20 under test.

[0044] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present disclosure can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solutions disclosed in the present disclosure can be achieved. This is not limited herein.

[0045] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. An arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring, characterized in that: Including light transmitter, fiber optic beam splitter, light intensity detection component, collimation component, imaging system, camera and controller; The optical fiber beam splitter is located on the outgoing optical path of the optical transmitter, and is used to split the incident light beam on the incident side into two paths and output them on the outgoing side, one path is incident to the light intensity detection element through the optical fiber, and the other path is incident to the incident end of the collimator through the optical fiber; the controller is used to adjust the light intensity of the light beam emitted by the optical transmitter according to the difference between the light intensity obtained by the light intensity detection element and the set light intensity; The imaging system includes a half-wave plate, a beam splitter and a reflector; the half-wave plate and the beam splitter are arranged at the output end of the collimator; the half-wave plate is located between the output end of the collimator and the beam splitter, and the output end of the collimator is used to emit a collimated light beam, which passes through the half-wave plate and is divided by the beam splitter into a first light beam transmitted along a first optical path and a second light beam transmitted along a second optical path, the first light beam is reflected back to the beam splitter by the reflector; the second light beam is reflected back to the beam splitter by the surface to be measured; the first light beam and the second light beam reflected back to the beam splitter interfere with each other, and the interference image is recorded on the camera.

2. The arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring according to claim 1, characterized in that: It also includes an arrayed waveguide grating and a motion component, wherein the light emitter and the arrayed waveguide grating are provided in the motion component; the arrayed waveguide grating is located on the outgoing light path of the light emitter and between the light emitter and the optical fiber beam splitter; The optical transmitter is connected to the input end of the arrayed waveguide grating through an optical fiber, and the motion component is used to connect any one of the multiple output ends of the arrayed waveguide grating to the optical fiber connected to the incident side of the optical fiber splitter.

3. The arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring according to claim 2, characterized in that: The wavelength interval of the arrayed waveguide grating ranges from 0.01 nm to 0.1 nm.

4. The arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring according to claim 2, characterized in that: The motion component includes a drive component and a transmission component. The drive component is used to drive the transmission component to move so as to move the light emitter and the arrayed waveguide grating. The transmission component adopts any of the following components: a chain drive component, a gear rack component, and a screw and nut component.

5. The arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring according to claim 1, characterized in that: The imaging system further comprises a first quarter wave plate arranged in the first optical path, wherein the first quarter wave plate is located between the beam splitter prism and the reflector; After transmitting through the first quarter-wave plate, the first light beam is incident on the surface of the reflector, and after being reflected on the surface of the reflector, it passes through the first quarter-wave plate again and returns to the beam splitter prism.

6. The arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring according to claim 1, characterized in that: The imaging system further comprises a second quarter wave plate and a converging lens arranged in the second optical path; the second quarter wave plate is located between the beam splitting prism and the converging lens; After passing through the second quarter-wave plate, the second light beam passes through the converging lens and is incident on the surface to be measured. After being reflected from the surface to be measured, the second light beam passes through the converging lens and the second quarter-wave plate again and returns to the beam splitter prism.

7. The arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring according to claim 1, characterized in that: The imaging system further includes a third quarter wave plate, wherein the third quarter wave plate is located between the beam splitter prism and the camera; The first light beam and the second light beam reflected back to the beam splitter prism are combined by the beam splitter prism and then pass through the third quarter wave plate, so that the first light beam and the second light beam interfere with each other, and the interference image is recorded on the camera.

8. The arrayed waveguide grating spectroscopic dynamic interferometer for amplitude monitoring according to claim 1, characterized in that: The camera is a polarization mask camera.

Images