Device for improving grabbing and conveying stability of flower basket and grabbing method

Abstract

The invention relates to the technical field of wafer processing, in particular to a device for improving grabbing and conveying stability of a flower basket and a grabbing method. At least two clamping units are mounted below the fixing plate; wherein the clamping unit comprises a driving part, a swing mechanism and a grabbing part, the swing mechanism is installed below the driving part, a fixing plate is directly connected with a mechanical arm, two long rotating rods in a transmission grabbing device are omitted, in this way, force arm distribution is optimized to be in a 0 + 4 mode from a 2 + 4 mode, and therefore the mechanical arm can be stably and stably clamped. The transverse inertia increase caused by the influence of the arm operation speed in the operation process of the flower basket is avoided, the stability and the clamping efficiency are improved, and after the clamping transmission stability is improved, the flower basket slippage caused by the inertia effect can be avoided without depending on the flower basket bayonet design; and secondly, the design can adapt to most of flower baskets such as bayonet-free flower baskets, the adaptability is higher, and the adaptability of operation is optimized.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer processing, and in particular to a device and a grasping method for improving the grasping and transmission stability of a flower basket. Background Art

[0002] In the semiconductor manufacturing process, wafer handling and transmission are crucial links. Traditional wafer handling equipment, the current wafer basket grabbing and transmission robot uses a cylinder to drive two long rotating rods to control the gripper to grab the basket, as shown in the attached figure of the specification. Figure 1 As shown, the wafer can be clamped and placed. However, this traditional robot has several significant shortcomings.

[0003] First, when the existing wafer handling robot is in operation, the wafer basket will be affected by the lateral inertia due to the fast lateral movement speed of the robot arm. This inertia is closely related to the running speed of the robot arm. The faster the speed, the greater the inertia. At the same time, since a certain amount of liquid will inevitably remain in the wafer and the clamp during the wet processing, the friction between the clamp and the basket is reduced, further exacerbating the instability and slipping risk of the wafer basket during the handling process.

[0004] Secondly, in order to solve the problem of slippage, the existing technology needs to design a special clip at the contact position between the clamp and the flower basket. Although this design can prevent slippage to a certain extent, it also brings new problems. For example, in order to ensure that the clamp can correctly clamp the flower basket at the clip position, the robot arm needs to increase the extra depth when descending, which not only increases the complexity and control difficulty of the robot arm, but also may cause instability during the clamping process. Summary of the invention

[0005] The purpose of the present invention is to solve the shortcomings of the prior art, such as the need to design a special clip at the contact position between the clamp and the flower basket, which increases the complexity and control difficulty of the robot arm and may also cause instability during the clamping process. A device and a grasping method for improving the stability of flower basket grasping and transmission are proposed.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions: Design a device to improve the stability of flower basket grabbing and transmission: including a fixing plate connected to the robot arm; At least two clamping units are installed below the fixing plate; The clamping unit includes a driving member, a swinging mechanism and a grabbing member. The swinging mechanism is installed below the driving member. Two grabbing members are provided and are respectively connected to both sides of the swinging mechanism. The driving member is used to drive the swinging mechanism to move, so as to drive the two grabbing members to rotate synchronously and clamp the flower basket.

[0007] Further, the swing mechanism includes an upper mounting seat mounted on the lower end of the driving member and a lower mounting seat located at the lower side of the upper mounting seat; Two active arms are rotatably connected to both sides of the upper mounting seat, and two connecting arms are rotatably connected to both sides of the lower mounting seat. The other ends of the connecting arms are pin-connected and rotatably connected to the active arms.

[0008] Further, the grabbing member includes a connecting portion and a clamping portion; An escape opening is provided on the end surface of the connecting portion, and the escape opening is sleeved on the connecting arm and fixed to the connecting arm through a connecting structure.

[0009] Furthermore, the connection structure includes a locking shaft passing between the connection part and the connection arm, a guide protrusion is formed on the outer side of the locking shaft, and a slot matching the guide protrusion is formed in the inner holes of the connection part and the connection arm.

[0010] Furthermore, at least one positioning glass bead is embedded on the outer side of the locking shaft, a positioning hole is opened on the end surface of the connecting portion, and the telescopic end of the positioning glass bead is snap-fitted with the positioning hole.

[0011] Furthermore, the driving member is a cylinder fixed to the lower side of the fixed plate, the upper mounting seat is fixed to the lower side of the cylinder, a fixing rod is fixedly mounted on the axial end of the cylinder, and the bottom end of the fixing rod is fixedly connected to the lower mounting seat.

[0012] Further, it also includes a synchronization mechanism; The synchronization mechanism is installed below the fixed plate and is used to drive the fixed rods on the driving members on both sides to move synchronously.

[0013] Furthermore, the synchronization mechanism includes a support frame fixed to the lower side of the fixed plate, a rotating shaft is rotatably connected to the middle of the support frame, and gears are fixedly installed at both ends of the rotating shaft; A rack portion is provided on the outer circumference of the fixing rod along the length direction, and the rack portion is meshed with the gear.

[0014] Furthermore, an air pump is fixedly installed above the fixed plate, and an output end of the air pump is connected to the two driving components through an air pipe.

[0015] In addition, the present invention also proposes a grasping method for improving the grasping and transmission stability of a flower basket, which uses the above-mentioned device and specifically includes the following steps: Connect the fixed plate to the robot arm, and move the grabbed flower basket by the movement of the robot arm; When grabbing a flower basket with a bayonet, confirm the bayonet height, and set the descending value of the mechanical arm to be greater than the bayonet height. The driving member drives the two grabbing members to clamp the flower basket. During the clamping process, due to the effect of gravity, the flower basket automatically falls and the grabbing members are clamped on the bayonet. When grabbing a flower basket without a clip, you only need to confirm the connection position between the flower basket and the grabbing piece, and then clamp the flower basket normally.

[0016] The present invention proposes a device and a grasping method for improving the stability of flower basket grasping and transmission, and the beneficial effects are: in the present invention, by directly connecting a fixed plate with a mechanical arm, the two long rotating rods in the transmission grasping device are eliminated, thereby optimizing the force arm distribution from a "2+4" mode to a "0+4" mode, thereby avoiding the increase of the lateral inertia of the flower basket due to the influence of the arm running speed during operation, improving the stability and the clamping efficiency, and after the clamping transmission stability is improved, the flower basket can be prevented from slipping due to inertia without relying on the flower basket bayonet design, and secondly, the design can be adapted to most flower baskets such as flower baskets without bayonet, with stronger adaptability and optimized operation adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of a grabbing device in the prior art; Figure 2 The three-dimensional Figure 1 ; Figure 3 The three-dimensional Figure 2 ; Figure 4 is a side view of the present invention; Figure 5 It is a schematic diagram of the structure of the synchronization mechanism of the present invention; Figure 6 It is a schematic diagram of the structure of the grabbing member of the present invention; Figure 7 It is a schematic diagram of the locking shaft structure of the present invention.

[0018] In the figure: 1. fixed plate; 2. clamping unit; 21. driving member; 211. fixing rod; 212. rack portion; 22. swing mechanism; 221. upper mounting seat; 222. lower mounting seat; 223. active arm; 224. connecting arm; 225. locking shaft; 226. guide protrusion; 227. slot; 228. positioning glass bead; 229. positioning hole; 23. grabbing member; 231. connecting portion; 232. clamping portion; 233. avoidance port; 3. synchronization mechanism; 31. support frame; 32. rotating shaft; 33. gear; 4. air pump. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0020] Reference Figure 2-7 An embodiment of the present invention discloses a device for improving the stability of flower basket grasping and transmission, and the device specifically comprises a fixing plate 1 connected to a mechanical arm; At least two clamping units 2 are installed below the fixing plate 1, that is, in the present invention, the fixing plate 1 is directly connected to the mechanical arm, and the two long rotating rods in the transmission grasping device are eliminated, so that the force arm distribution is optimized from the "2+4" mode to the "0+4" mode, so as to avoid the increase of the lateral inertia of the flower basket due to the influence of the arm running speed during the operation process, and improve the stability, wherein 2 refers to the two long rotating rods, and 4 refers to the four grasping members; Reference Figure 2 , wherein the clamping unit 2 includes a driving member 21, a swinging mechanism 22 and a grabbing member 23, wherein the swinging mechanism 22 is installed below the driving member 21, and two grabbing members 23 are provided and respectively connected to both sides of the swinging mechanism 22, and the driving member 21 is used to drive the swinging mechanism 22 to move, so as to drive the two grabbing members 23 to rotate synchronously and clamp the flower basket.

[0021] Reference Figure 4 In some embodiments, the swing mechanism 22 of the present invention includes an upper mounting seat 221 mounted on the lower end of the driving member 21 and a lower mounting seat 222 located at the lower side of the upper mounting seat 221; Two active arms 223 are rotatably connected to both sides of the upper mounting seat 221, and two connecting arms 224 are rotatably connected to both sides of the lower mounting seat 222. The other end of the connecting arm 224 is pin-connected and rotatably connected to the active arm 223. Further, the grabbing member 23 described in the present invention is connected to the connecting arm 224, and the lower mounting seat 222 is driven to move by the driving member 21. When the lower mounting seat 222 moves, it will drive the connecting arms 224 on both sides to rotate, thereby driving the two grabbing members 23 to perform a rotational clamping action.

[0022] Reference Figure 4 , Figure 6 It is further explained that the grabbing member 23 of the present invention includes a connecting portion 231 and a clamping portion 232. The clamping portion 232 described in the present embodiment is preferably configured as a "mountain"-shaped structural member, the bottom of which is clamped on the side of the flower basket. Of course, in order to avoid the detection of the clamping force during the clamping process, a pressure sensor can be embedded on the inner side of the clamping portion 232 in the present embodiment. The pressure sensor is electrically connected to an external control unit through a signal line, so that the grasping force of the flower basket can be visually checked during the process of grasping the flower basket. An escape opening 233 is formed on the end surface of the connecting portion 231 . The escape opening 233 is sleeved on the connecting arm 224 and fixed to the connecting arm 224 through a connecting structure.

[0023] Reference Figure 5 , Figure 6 On the basis of the above embodiment, the connection structure in this embodiment includes a locking shaft 225 inserted between the connection portion 231 and the connection arm 224, and a guide protrusion 226 is formed on the outer side of the locking shaft 225. A card slot 227 adapted to the guide protrusion 226 is provided in the inner holes of the connection portion 231 and the connection arm 224. Specifically, in this embodiment, the structure of the guide protrusion 226 and the card slot 227 is adopted, and its purpose is to lock the circumferential position of the connection portion 231, that is, when connecting the grasping member 23, the avoidance opening 233 on the connection portion 231 is first aligned with the connection arm 224 and inserted. Since corresponding through holes are provided on the connection portion 231 and the connection arm 224, the locking shaft 225 can be directly inserted between the opposite through holes, and the circumferential locking of the connection portion 231 can be locked by the above-mentioned guide protrusion 226 and the card slot 227.

[0024] Reference Figure 7In order to prevent the locking shaft 225 from slipping out and falling off after the locking shaft 225 is inserted, at least one positioning glass bead 228 is embedded in the outer side of the locking shaft 225 in this embodiment, and a positioning hole 229 is opened on the end surface of the connecting portion 231, and the telescopic end of the positioning glass bead 228 is snap-fitted into the positioning hole 229.

[0025] That is to say, in this embodiment, a positioning glass bead 228 is installed on the locking shaft 225. The specific structure of the positioning glass bead 228 is a conventional method used by technicians in the relevant field and will not be elaborated here. The positioning glass bead 228 and the positioning hole 229 are engaged with each other to complete the locking and fixation of the locking shaft 225 and the connecting portion 231. In this way, lateral movement of the locking shaft 225 can be avoided to achieve assembly stability.

[0026] Reference Figure 4 In some embodiments, the driving member 21 in the present invention is a cylinder fixed on the lower side of the fixed plate 1, the upper mounting seat 221 is fixed on the lower side of the cylinder, a fixing rod 211 is fixedly installed on the axial end of the cylinder, and the bottom end of the fixing rod 211 is fixedly connected to the lower mounting seat 222.

[0027] Reference Figure 2 , Figure 3 Of course, considering providing a power source for the cylinder, an air pump 4 is fixedly installed above the fixed plate 1 in this embodiment. The output end of the air pump 4 is connected to the two driving members 21 through an air pipe. When performing the grabbing action, the air pump 4 first outputs air pressure to make the two cylinders move. When the cylinder moves, the shaft end will push out the fixed rod 211, and the fixed rod 211 will drive the lower mounting seat 222 to move. When the position of the lower mounting seat 222 changes, it will drive the two connecting arms 224 on both sides to swing, so that the grabbing action of the grabbing member 23 can be controlled to complete the clamping of the flower basket.

[0028] Reference Figure 5 As a preference, the present invention further includes a synchronization mechanism 3; The synchronization mechanism 3 is installed below the fixed plate 1 and is used to drive the fixed rods 211 on the driving members 21 on both sides to move synchronously.

[0029] Specifically, the synchronization mechanism 3 in the embodiment of the present invention includes a support frame 31 fixed to the lower side of the fixed plate 1, a rotating shaft 32 is rotatably connected to the middle of the support frame 31, and gears 33 are fixedly installed at both ends of the rotating shaft 32; A rack portion 212 is provided on the outer circumference of the fixing rod 211 along the length direction, and the rack portion 212 is meshed with the gear 33 .

[0030] Specifically, in the present invention, two gears 33 and two rack parts 212 are meshed. Since the two gears 33 are coaxially connected, when the fixed rod 211 on one side moves too fast or too slow, it can be freely corrected through the rotating shaft 32 to ensure that under the rotation of the rotating shaft 32, the two fixed rods 211 on both sides can be driven to move synchronously, thereby ensuring the synchronous clamping action of the two clamping units 2 on the two flower baskets.

[0031] That is, the present invention adopts the design of a synchronization mechanism 3 to ensure that the two clamping units 2 on both sides can maintain synchronous clamping. The design purpose of this structure is that when the robot arm drives the device to transfer from the process tank to the water tank for loading, it can ensure that the two clamping units 2 can complete the clamping synchronously in the process tank, and the grasping action time can be further controlled. At the same time, it can avoid the problem that one clamping unit 2 completes the grasping while the other clamping unit 2 fails to grasp, causing the flower basket to slip during movement, thereby further improving the grasping and loading stability of the flower basket.

[0032] In addition, the present invention also proposes a grasping method for improving the grasping and transmission stability of a flower basket, the method using the above-mentioned device, and the specific method comprises the following steps: Connect the fixed plate 1 to the robot arm, and transfer the grabbed flower basket by moving the robot arm; When grabbing a flower basket with a bayonet, the height of the bayonet is confirmed, and the descending value of the mechanical arm is set to be greater than the bayonet height. The driving member 21 drives the two grabbing members 23 to clamp the flower basket. During the clamping process, due to the effect of gravity, the flower basket automatically falls and the grabbing members 23 are clamped on the bayonet. When grabbing a flower basket without a clip, it is only necessary to confirm the connection position between the flower basket and the grabbing member 23 and then clamp the flower basket normally.

[0033] In summary, in the present invention, the fixing plate 1 is directly connected to the robot arm, and the two long rotating rods in the transmission grasping device are eliminated, so that the force arm distribution is optimized from the "2+4" mode to the "0+4" mode, thereby avoiding the increase of the lateral inertia of the flower basket due to the influence of the arm running speed during the operation, improving the stability and the clamping efficiency. After the clamping transmission stability is improved, the flower basket slipping caused by inertia can be avoided without relying on the flower basket bayonet design. Secondly, the design can be adapted to most flower baskets such as flower baskets without bayonet, with stronger adaptability and optimized operation adaptability.

[0034] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A device for improving the stability of flower basket grabbing and transmission, characterized in that: It includes a fixing plate (1) connected to the robot arm; At least two clamping units (2) are installed below the fixing plate (1); The clamping unit (2) comprises a driving member (21), a swing mechanism (22) and a grabbing member (23); the swing mechanism (22) is installed below the driving member (21); two grabbing members (23) are provided and are respectively connected to two sides of the swing mechanism (22); the driving member (21) is used to drive the swing mechanism (22) to move, so as to drive the two grabbing members (23) to rotate synchronously to clamp the flower basket.

2. The device for improving the stability of flower basket grabbing and transmission according to claim 1, characterized in that: The swing mechanism (22) comprises an upper mounting seat (221) mounted on the lower end of the driving member (21) and a lower mounting seat (222) located at the lower side of the upper mounting seat (221); Two active arms (223) are rotatably connected to both sides of the upper mounting seat (221), and two connecting arms (224) are rotatably connected to both sides of the lower mounting seat (222), and the other ends of the connecting arms (224) are rotatably connected to the active arms (223) by pins.

3. The device for improving the stability of flower basket grabbing and transmission according to claim 2, characterized in that: The grabbing member (23) comprises a connecting portion (231) and a clamping portion (232); An escape opening (233) is provided on the end surface of the connecting portion (231); the escape opening (233) is sleeved on the connecting arm (224) and fixed to the connecting arm (224) via a connecting structure.

4. The device for improving the stability of flower basket grabbing and transmission according to claim 3, characterized in that: The connection structure comprises a locking shaft (225) passing between the connection portion (231) and the connection arm (224); a guide protrusion (226) is formed on the outer side of the locking shaft (225); and a slot (227) matching the guide protrusion (226) is provided in the inner holes of the connection portion (231) and the connection arm (224).

5. The device for improving the stability of flower basket grabbing and transmission according to claim 4, characterized in that: At least one positioning glass bead (228) is embedded on the outer side of the locking shaft (225), a positioning hole (229) is provided on the end surface of the connecting portion (231), and the telescopic end of the positioning glass bead (228) is snap-fitted to the positioning hole (229).

6. The device for improving the stability of flower basket grabbing and transmission according to claim 2, characterized in that: The driving member (21) is a cylinder fixed to the lower side of the fixing plate (1), the upper mounting seat (221) is fixed to the lower side of the cylinder, a fixing rod (211) is fixedly mounted on the shaft end of the cylinder, and the bottom end of the fixing rod (211) is fixedly connected to the lower mounting seat (222).

7. The device for improving the stability of flower basket grabbing and transmission according to claim 6, characterized in that: Also includes a synchronization mechanism (3); The synchronization mechanism (3) is installed below the fixed plate (1) and is used to drive the fixed rods (211) on the driving members (21) on both sides to move synchronously.

8. The device for improving the stability of flower basket grabbing and transmission according to claim 7, characterized in that: The synchronization mechanism (3) comprises a support frame (31) fixed to the lower side of the fixed plate (1), a rotating shaft (32) is rotatably connected to the middle of the support frame (31), and gears (33) are fixedly mounted on both ends of the rotating shaft (32); A rack portion (212) is provided on the outer periphery of the fixing rod (211) along the length direction, and the rack portion (212) is meshed with the gear (33).

9. A device for improving the stability of flower basket grabbing and transmission according to any one of claims 1 to 8, characterized in that: An air pump (4) is fixedly mounted above the fixed plate (1), and an output end of the air pump (4) is connected to the two driving members (21) via an air pipe.

10. A grasping method for improving the grasping and transmission stability of a flower basket, using a device as claimed in any one of claims 1 to 9, characterized in that: The steps include: The fixing plate (1) is connected to the robot arm, and the grasped flower basket is transferred by the movement of the robot arm; When grabbing a flower basket with a bayonet, the height of the bayonet is confirmed, and the descending value of the mechanical arm is set to be greater than the bayonet height. The driving member (21) drives the two grabbing members (23) to clamp the flower basket. During the clamping process, due to the effect of gravity, the flower basket automatically falls and the grabbing members (23) are clamped on the bayonet. When grabbing a flower basket without a bayonet, it is only necessary to confirm the position of the connection between the flower basket and the grabbing member (23), and then clamp the flower basket normally.

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