Table applied to manufacturing process of display device

Abstract

The present application relates to a stage, which may include: a base plate extending in a first direction and a second direction intersecting the first direction; a moving frame disposed on the base plate and movable in a first direction or in a direction opposite to the first direction; and an error compensation portion disposed between the base plate and the moving frame and including a guide rail extending in the first direction and an electromagnet portion disposed on the guide rail and covering at least a portion of the guide rail.

Description

Technical Field

[0001] Embodiments relate to stages. More particularly, embodiments relate to stages and error compensation systems using the stages. Background Art

[0002] The stage is a device that supports and accurately transfers substrates, wafers, etc. in the manufacturing process of display devices, semiconductors, etc. The stage may include a mover that supports the substrate, wafer, etc. and moves linearly, and a guide for the linear movement of the mover. When the mover performs linear movement, translational motion errors or rotational motion errors may occur in the x-axis direction, the y-axis direction, and the z-axis direction. Summary of the invention

[0003] Embodiments provide a stage with improved reliability.

[0004] Embodiments provide an error compensation system using a stage.

[0005] However, the embodiments are not limited to those set forth herein. The above and other embodiments will become more apparent to those of ordinary skill in the art by referring to the detailed description of the present disclosure given below.

[0006] A table according to an embodiment includes: a base plate extending in a first direction and in a second direction intersecting the first direction; a moving frame disposed on the base plate and movable in the first direction or in a direction opposite to the first direction; and an error compensating portion disposed between the base plate and the moving frame and including a guide rail extending in the first direction and an electromagnet portion disposed on the guide rail and covering at least a portion of the guide rail.

[0007] In an embodiment, the electromagnet part may include a coil provided on at least one surface of the guide rail and a yoke covering the coil.

[0008] In an embodiment, the coil may include a first coil and a second coil adjacent to the first coil in a first direction and wound in a direction opposite to a direction in which the first coil is wound.

[0009] In an embodiment, the yoke may include a cover portion covering the coil and a core portion protruding in a direction toward the guide rail.

[0010] In an embodiment, the coil may be wound around the core portion.

[0011] In an embodiment, the electromagnet portion may further include a cooling line passing through the yoke.

[0012] In an embodiment, the guide rail and the electromagnet portion may be spaced apart from each other.

[0013] In an embodiment, the stage may further include an air bearing disposed on at least one surface of the moving frame.

[0014] In an embodiment, the stage may further include a linear motor fixed to the moving frame and movable in a first direction or in a direction opposite to the first direction. The moving frame may be movable by the linear motor.

[0015] In an embodiment, the guide rail may be fixed to the base plate, and the electromagnet portion may be fixed to the moving frame.

[0016] In an implementation, the error compensating portion may be disposed on an upper surface of the bottom plate.

[0017] In an implementation, the error compensating portion may be disposed on a side surface of the bottom plate.

[0018] The error compensation system according to the embodiment includes a stage. The stage includes: a base plate extending in a first direction and a second direction intersecting the first direction; a moving frame provided on the base plate and movable in the first direction or in a direction opposite to the first direction; and an error compensation part provided between the base plate and the moving frame and including a guide rail extending in the first direction and an electromagnet part provided on the guide rail and covering at least a portion of the guide rail.

[0019] In an embodiment, the electromagnet part may include a coil provided on at least one surface of the guide rail and to which current is applied, a yoke covering the coil, and a cooling line passing through the yoke.

[0020] In an embodiment, the coil may include a first coil wound in one direction and a second coil adjacent to the first coil in the first direction and wound in a direction opposite to the direction in which the first coil is wound.

[0021] In an embodiment, the yoke may include a cover portion covering the coil, and a core portion protruding in a direction toward the guide rail and around which the coil is wound.

[0022] In an embodiment, motion errors of the moving frame may be compensated by controlling the current applied to the coils.

[0023] In an embodiment, an attractive force may be generated between the guide rail and the electromagnet portion by a current applied to the coil, and the magnitude of the attractive force may be adjusted by controlling the magnitude of the current applied to the coil.

[0024] In an embodiment, the heat generated from the coil may be released by flowing a coolant into the cooling line.

[0025] In an embodiment, the guide rail and the electromagnet portion may be spaced apart from each other.

[0026] In an error compensation system according to an embodiment, the error compensation system may include a stage including an error compensation portion. The error compensation portion may include a guide rail extending in one direction and an electromagnet portion generating a magnetic flux. In the event that a linear motion error occurs in the stage, the error may be compensated by controlling the current applied to the coil of the electromagnet portion. For example, in the event that heat is generated from the coil of the electromagnet portion due to the current, the generated heat may be released by flowing a coolant into a cooling line of the electromagnet portion. Therefore, since linear motion errors relative to multiple axes may be accurately compensated, an ultra-precise stage with improved reliability may be realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a schematic plan view showing a stage according to an embodiment.

[0028] Figure 2 It is along Figure 1 A schematic cross-sectional view taken along line II'.

[0029] Figure 3 It is shown that the Figure 1 A schematic three-dimensional diagram of the error compensation portion in the stage.

[0030] Figure 4 It is shown Figure 3 Schematic front view of the error compensation part.

[0031] Figure 5 It is shown that the Figure 3 A schematic three-dimensional view of the electromagnet portion in the error compensation portion.

[0032] Figure 6 It is along Figure 3 A schematic cross-sectional view taken along line II-II'.

[0033] Figure 7 It is along Figure 3 A schematic stereogram taken along line III-III'.

[0034] Figure 8 It is shown that the Figure 4 A schematic three-dimensional view of the electromagnet portion in the error compensation portion.

[0035] Fig. 9 is a schematic diagram illustrating an error compensation system according to an embodiment.

[0036] Fig.10 is a schematic plan view showing a stage according to another embodiment.

[0037] Fig.11 It is along Fig.10 Schematic cross-sectional view taken along line IV-IV'.

[0038] Fig.12 is a schematic diagram showing an error compensation system according to another embodiment.

[0039] Fig.13 is a schematic plan view showing a stage according to still another embodiment.

[0040] Fig.14 It is along Fig.13 A schematic cross-sectional view taken along line V-V'.

[0041] Fig.15 is a schematic diagram showing an error compensation system according to still another embodiment. DETAILED DESCRIPTION

[0042] In the following description, for the purpose of explanation, many specific details are set forth to provide a thorough understanding of various embodiments or implementations of the present invention. As used herein, "embodiment" and "implementation" are interchangeable words and are non-limiting examples of the devices or methods disclosed herein. However, it is apparent that various embodiments may be practiced without these specific details or with one or more equivalent arrangements. Here, various embodiments do not have to be exclusive and do not limit the present disclosure. For example, specific shapes, configurations, and features of an embodiment may be used or implemented in another embodiment.

[0043] Unless otherwise specified, the illustrated embodiments should be understood to provide features of the present invention. Therefore, unless otherwise specified, the features, components, modules, layers, films, panels, regions and / or aspects, etc. (hereinafter individually or collectively referred to as "elements") of the various embodiments may be combined, separated, interchanged and / or rearranged without departing from the scope of the present invention.

[0044] The use of cross hatching and / or shading in the drawings is generally provided to clarify the boundaries between adjacent elements. Therefore, unless otherwise specified, the presence or absence of cross hatching or shading does not convey or indicate any preference or requirement for a particular material, material property, size, ratio, commonality between the elements shown, and / or any other feature, attribute, property, etc. of the elements. In addition, in the drawings, the size and relative size of the elements may be exaggerated for the purpose of clarity and / or narration. When the embodiment can be implemented differently, a specific process sequence can be performed differently from the described sequence. For example, two processes described in succession can be performed substantially simultaneously or in an order opposite to the described sequence. In addition, the same reference numerals represent the same elements.

[0045] When an element or layer is referred to as being "on", "connected to" or "coupled to" another element or layer, it may be directly on, directly connected to or directly coupled to the other element or layer, or there may be intervening elements or layers. However, when an element or layer is referred to as being "directly" "on", "directly connected to" or "directly coupled to" another element or layer, there are no intervening elements or layers. For this purpose, the term "connected" may refer to a physical, electrical and / or fluid connection, whether or not there are intervening elements. In addition, the axis of the first direction DR1, the axis of the second direction DR2, and the axis of the third direction DR3 are not limited to the three axes of a rectangular coordinate system, such as the X-axis, the Y-axis, and the Z-axis, and may be interpreted in a broader sense. For example, the axis of the first direction DR1, the axis of the second direction DR2, and the axis of the third direction DR3 may be perpendicular to each other, or may represent different directions that are not perpendicular to each other. For the purposes of this disclosure, "at least one of A and B" may be understood to refer to only A, only B, or any combination of A and B. In addition, “at least one of X, Y, and Z” and “at least one selected from the group consisting of X, Y, and Z” may be interpreted as any combination of only X, only Y, only Z, or two or more of X, Y, and Z. As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items.

[0046] Although the terms "first", "second", etc. may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another element. Therefore, without departing from the teachings of the present disclosure, the first element discussed below may be referred to as the second element.

[0047] For descriptive purposes, spatially relative terms such as "below," "below," "lower," "beneath," "above," "upper," "above," "higher," "side" (e.g., in a "sidewall"), etc. may be used herein and thereby describe the relationship of one element to another element(s) as shown in the accompanying drawings. In addition to the orientation depicted in the accompanying drawings, spatially relative terms are intended to also include different orientations of the device in use, operation, and / or manufacture. For example, if the device in the accompanying drawings is flipped, the elements described as being "below" or "below" other elements or features will then be oriented as being "above" the other elements or features. Thus, the term "below" may include both above and below orientations. In addition, the device may be oriented in other ways (e.g., rotated 90 degrees or in other orientations), and therefore, the spatially relative descriptors used herein should be interpreted accordingly.

[0048] The terms used herein are used to describe the purpose of specific embodiments, rather than to limit them. As used herein, the singular forms "one", "an" and "said" are intended to also include plural forms, unless the context clearly indicates otherwise. In addition, when the terms "include", "comprise", "include", "include" and / or "include" are used in this specification, the existence of the stated features, integral bodies, steps, operations, elements, parts and / or its groups is specified, but the existence or addition of one or more other features, integral bodies, steps, operations, elements, parts and / or its groups is not excluded. Please also note that, as used herein, the terms "substantially", "about" and other similar terms are used as approximate terms, rather than as terms of degree, and therefore, are used to explain the inherent deviations of the values ​​that will be recognized by those of ordinary skill in the art in measuring, calculating and / or providing.

[0049] Various embodiments are described herein with reference to cross-sections and / or exploded illustrations as schematic illustrations of embodiments and / or intermediate structures. Therefore, variations in the shapes of the illustrations resulting from, for example, manufacturing techniques and / or tolerances are to be expected. Therefore, the embodiments disclosed herein should not be interpreted as being limited to the specific illustrated shapes of the regions, but rather include variations in shapes resulting from, for example, manufacturing. In this manner, the regions shown in the accompanying drawings may be schematic in nature, and the shapes of these regions may not reflect the actual shapes of the regions of the device, and therefore, are not necessarily intended to be limiting.

[0050] As is customary in the art, some embodiments are described and shown in the accompanying drawings for functional blocks, units and / or modules. It will be understood by those skilled in the art that these blocks, units and / or modules are physically implemented by electrical (or optical) circuits such as logic circuits, discrete components, microprocessors, hard-wired circuits, memory elements, wiring connectors, etc. that can be formed using semiconductor-based manufacturing technology or other manufacturing technology. In the case where blocks, units and / or modules are implemented by microprocessors or other similar hardware, they can be programmed and controlled using software (e.g., microcode) to perform the various functions discussed herein, and they can be optionally driven by firmware and / or software. In addition, it is also conceivable that each block, unit and / or module can be implemented by dedicated hardware, or implemented as a combination of dedicated hardware for performing some functions and processors for performing other functions (e.g., one or more programmed microprocessors and associated circuits). In addition, without departing from the scope of the present invention, each block, unit and / or module of some embodiments can be physically divided into two or more interactive and discrete blocks, units and / or modules. Furthermore, the blocks, units and / or modules of some embodiments may be physically combined into more complex blocks, units and / or modules without departing from the scope of the invention.

[0051] Hereinafter, the embodiments will be described in more detail with reference to the accompanying drawings. The same reference numerals are used for the same components in the drawings, and redundant description of the same components will be omitted.

[0052] Figure 1 is a schematic plan view showing a stage according to an embodiment. Figure 2 It is along Figure 1 A schematic cross-sectional view taken along line II'.

[0053] refer to Figure 1 and Figure 2 The stage 10 may include a base plate BS, a moving frame MF, a linear motor LM, a linear motor track LMT, a linear scale LS, a horizontal air bearing HAB, a vertical air bearing VAB, and an error compensation part CP.

[0054] The stage 10 may be used in a manufacturing process of a display device. For example, the stage 10 may be used in an inkjet process during the manufacturing process of a display device. For another example, the stage 10 may be used in an exposure process during the manufacturing process of a display device. However, the embodiment is not limited thereto, and the stage 10 may be used in various processes that require precise control during the manufacturing process of a display device.

[0055] The bottom plate BS may extend in a first direction DR1 and a second direction DR2 intersecting the first direction DR1. For example, the second direction DR2 may be perpendicular to the first direction DR1. The bottom plate BS may define (or provide) a space recessed from an upper surface toward a lower surface of the bottom plate BS. For example, the bottom plate BS may include granite.

[0056] The mobile frame MF may be disposed on the base plate BS. A portion of the mobile frame MF may be accommodated in a space of the base plate BS. The mobile frame MF may be spaced apart from the base plate BS in a third direction DR3 intersecting each of the first direction DR1 and the second direction DR2. For example, the third direction DR3 may be perpendicular to each of the first direction DR1 and the second direction DR2. The mobile frame MF may be movable in the first direction DR1 or in a direction opposite to the first direction DR1.

[0057] Although Figure 1 and Figure 2 It is shown that the mobile frame MF includes a first frame layer MF_1 and a second frame layer MF_2 disposed on the first frame layer MF_1, and each of the first frame layer MF_1 and the second frame layer MF_2 has a rectangular planar shape in a plan view, but the embodiment is not limited thereto. Figure 1 and Figure 2It is shown that the length of the first frame layer MF_1 in the first direction DR1 is greater than the length of the second frame layer MF_2 in the first direction DR1, and the length of the first frame layer MF_1 in the second direction DR2 is less than the length of the second frame layer MF_2 in the second direction DR2, but the embodiment is not limited thereto. In another embodiment, the mobile frame MF may have a single-layer or multi-layer structure, or may also have various shapes or sizes.

[0058] The linear motor LM may be disposed on a surface of the moving frame MF. For example, the linear motor LM may be disposed on a side surface (eg, side surfaces opposite to each other) of the moving frame MF. The linear motor LM may be fixed (or attached) to the moving frame MF. For example, the linear motor LM may include a coil.

[0059] The linear motor track LMT may be disposed on the base plate BS. The linear motor track LMT may extend in the first direction DR1. The linear motor track LMT may define (or provide) a space in which a portion of the linear motor LM may be accommodated. The linear motor track LMT may not contact the linear motor LM. For example, the linear motor track LMT and the linear motor LM may be spaced apart from each other. For example, the linear motor track LMT may include a magnet.

[0060] The linear motor LM may be movable along the linear motor track LMT in a first direction DR1 or in a direction opposite to the first direction DR1. In an embodiment, the linear motor LM and the linear motor track LMT may move the moving frame MF. For example, the linear motor LM and the linear motor track LMT may move the moving frame MF by using an electromagnetic force. The moving frame MF may be movable in the first direction DR1 or in a direction opposite to the first direction DR1 by the linear motor LM and the linear motor track LMT. For example, the moving frame MF may be linearly moved by the linear motor LM and the linear motor track LMT.

[0061] The linear scale LS may be disposed on the base plate BS. For example, the linear scale LS may be disposed below the moving frame MF. The linear scale LS may extend in the first direction DR1. The linear scale LS may detect (or measure) information such as the position, moving distance, moving speed, etc. of the linear motor LM. For example, the linear scale LS may provide feedback information.

[0062] Each of the horizontal air bearing HAB and the vertical air bearing VAB may be provided on the surface of the moving frame MF. For example, the horizontal air bearing HAB may be provided on the lower surface of the moving frame MF, and the vertical air bearing VAB may be provided on the side surface of the moving frame MF. Each of the horizontal air bearing HAB and the vertical air bearing VAB may be fixed (or attached) to the moving frame MF.

[0063] For example, each of the horizontal air bearing HAB and the vertical air bearing VAB may be accommodated in the space of the base plate BS. For example, the horizontal air bearing HAB may be disposed between an upper surface (e.g., an inner upper surface) of the base plate BS and a lower surface of the moving frame MF, and the vertical air bearing VAB may be disposed between a side surface (e.g., an inner side surface) of the base plate BS and a side surface of the moving frame MF.

[0064] Although Figure 1 and Figure 2 The stage 10 is shown to include four horizontal air bearings HAB and four vertical air bearings VAB, but the embodiment is not limited thereto. In another embodiment, the stage 10 may include three or less, or five or more horizontal air bearings HAB or three or less, or five or more vertical air bearings VAB.

[0065] The error compensating part CP may be disposed between the base plate BS and the moving frame MF. The error compensating part CP may be accommodated in the space of the base plate BS. In an embodiment, the error compensating part CP may be disposed between an upper surface (eg, an inner upper surface) of the base plate BS and a lower surface of the moving frame MF.

[0066] The error compensating part CP may include a guide rail RL and an electromagnet part EM. The guide rail RL may be disposed on the base plate BS and may extend in the first direction DR1. The electromagnet part EM may be disposed on the guide rail RL. In an embodiment, the guide rail RL may be fixed (or attached) to the base plate BS, and the electromagnet part EM may be fixed (or attached) to the moving frame MF. A detailed description of the error compensating part CP will be described later.

[0067] Although Figure 1 and Figure 2 It is shown that the stage 10 includes two error compensating parts CP, and the error compensating part CP includes two electromagnet parts EM disposed on one guide rail RL, but the embodiment is not limited thereto. In another embodiment, the stage 10 may include one or more error compensating parts CP, and the error compensating part CP may include one or more electromagnet parts EM disposed on one or more guide rails RL.

[0068] Figure 3 It is shown that the Figure 1 A schematic three-dimensional diagram of the error compensation portion in the stage. Figure 4 It is shown Figure 3 Schematic front view of the error compensation part. Figure 5 It is shown that the Figure 3 A schematic three-dimensional view of the electromagnet portion in the error compensation portion. Figure 6 It is along Figure 3A schematic cross-sectional view taken along line II-II'. Figure 7 It is along Figure 3 A schematic stereogram taken along line III-III'. Figure 8 It is shown that the Figure 4 A schematic three-dimensional view of the electromagnet portion in the error compensation portion.

[0069] refer to Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8 , the error compensating part CP may include a guide rail RL and an electromagnet part EM. In an embodiment, the guide rail RL and the electromagnet part EM may be spaced apart from each other without contacting each other.

[0070] The guide rail RL may extend in the first direction DR1. The guide rail RL may include a material having a relatively high magnetic permeability. For example, the guide rail RL may include iron (Fe). The guide rail RL may include a fixing portion RL1 and a track portion RL2.

[0071] The fixing portion RL1 may be fixed (or attached) to the base plate BS. For example, the guide rail RL may be fixed (or attached) to the base plate BS through the fixing portion RL1. The rail portion RL2 may be disposed on the fixing portion RL1. The rail portion RL2 may protrude from the fixing portion RL1 in the third direction DR3.

[0072] In an embodiment, the guide rail RL may have a T-shaped cross-sectional shape. For example, the fixing portion RL1 may protrude farther than the track portion RL2 in the second direction DR2 and in a direction opposite to the second direction DR2 (or may extend beyond the track portion RL2), and the track portion RL2 may have a rectangular cross-sectional shape in which edge portions of the upper surface (e.g., edge portions opposite to each other) are chamfered. In another embodiment, the guide rail RL may have a rectangular cross-sectional shape. In yet another embodiment, the guide rail RL may have a triangular cross-sectional shape. However, the embodiment is not limited thereto, and the shape and size of each of the fixing portion RL1 and the track portion RL2 may be changed differently, and therefore, the shape and size of the guide rail RL may be changed differently.

[0073] The electromagnet portion EM may be disposed on the guide rail RL. The electromagnet portion EM may cover at least a portion of the guide rail RL.

[0074] In an embodiment, the electromagnet portion EM may cover the upper surface and the side surface of the track portion RL2. For example, the electromagnet portion EM may have a U-shaped cross-sectional shape. In another embodiment, the electromagnet portion EM may cover the upper surface and one of the side surfaces of the track portion RL2. For example, the electromagnet portion EM may have an L-shaped cross-sectional shape. In yet another embodiment, the electromagnet portion EM may be disposed on the upper surface of the track portion RL2. For example, the electromagnet portion EM may have an I-shaped cross-sectional shape. However, the embodiment is not limited thereto, and the area of ​​the guide rail RL covered by the electromagnet portion EM may be variously changed according to the shape of the track portion RL2, etc.

[0075] The electromagnet portion EM may be movable along the guide rail RL in a first direction DR1 or in a direction opposite to the first direction DR1. For example, the electromagnet portion EM may be linearly movable along the guide rail RL while covering the upper and side surfaces of the track portion RL2. The electromagnet portion EM may include a coil CL, a yoke YK, and a cooling circuit CT.

[0076] The coil CL may be disposed on the rail portion RL2. Current may be applied to the coil CL. The coil CL may be disposed on at least one surface of the rail portion RL2. For example, one coil CL may be disposed on one surface of the rail portion RL2.

[0077] In an embodiment, each of the coils CL may be disposed on the upper surface and the side surface of the rail portion RL2. In another embodiment, each of the coils CL may be disposed on the upper surface and one of the side surfaces of the rail portion RL2. In yet another embodiment, the coils CL may be disposed only on the upper surface of the rail portion RL2. However, the embodiment is not limited thereto, and the area of ​​the rail portion RL2 on which the coils CL are disposed may be variously changed according to the shape of the rail portion RL2, etc.

[0078] The coil CL may include a first coil CL1 and a second coil CL2. The second coil CL2 may be adjacent to the first coil CL1 in a first direction DR1. In an embodiment, the first coil CL1 and the second coil CL2 may be wound in opposite directions. For example, the first coil CL1 may be wound in a clockwise direction, and the second coil CL2 may be wound in a counterclockwise direction.

[0079] The yoke YK may be disposed on the rail portion RL2 and the coil CL. The yoke YK may cover the coil CL. The yoke YK may include a material having a relatively high magnetic permeability. For example, the yoke YK may include iron. The yoke YK may include a cover portion YK1 and an iron core portion YK2.

[0080] The cover portion YK1 may cover the coil CL. For example, the cover portion YK1 may cover the upper surface and the side surface of the coil CL.

[0081] The core portion YK2 may protrude from the cover portion YK1 in a direction toward the guide rail RL. For example, the core portion YK2 may have a cylindrical shape.

[0082] For example, when the cover YK1 covers the coil CL disposed on the upper surface of the track portion RL2, the core portion YK2 may protrude from the cover YK1 toward the upper surface of the track portion RL2. For another example, when the cover YK1 covers the coil CL disposed on the side surface of the track portion RL2, the core portion YK2 may protrude from the cover YK1 toward the side surface of the track portion RL2.

[0083] In an embodiment, the coil CL may be wound around the core part YK2. For example, the coil CL may be wound around the core part YK2. The first coil CL1 and the second coil CL2 may be wound around different core parts YK2, respectively. For example, the first coil CL1 may be wound around the core part YK2 in a clockwise direction, and the second coil CL2 may be wound around the core part YK2 in a counterclockwise direction.

[0084] Since the first coil CL1 and the second coil CL2 can be wound in opposite directions, when current is applied to each of the first coil CL1 and the second coil CL2, the first coil CL1 and the second coil CL2 can respectively generate magnetic flux in opposite directions. For example, when the coil CL is disposed on the upper surface of the rail portion RL2, the first coil CL1 can generate a magnetic flux in a direction opposite to the third direction DR3, and the second coil CL2 can generate a magnetic flux in the third direction DR3.

[0085] For example, the electromagnet part EM and the guide rail RL may be spaced apart from each other, but the distance between the electromagnet part EM and the guide rail RL may be relatively small. For example, the electromagnet part EM and the guide rail RL may be spaced apart from each other by a distance of about tens of micrometers (μm) to about hundreds of micrometers.

[0086] For example, since each of the yoke YK and the guide rail RL may include a material having a relatively high magnetic permeability, the magnetic flux generated by the coil CL may circulate along the yoke YK and the guide rail RL without loss. For example, when current is applied to the coil CL, since the density of the magnetic flux circulating through the yoke YK and the guide rail RL is high, a large attraction force may be generated between the electromagnet portion EM and the guide rail RL (see Figure 6 ).

[0087] The cooling line CT may be disposed on the coil CL. The cooling line CT may be disposed adjacent to the coil CL. In an embodiment, the cooling line CT may penetrate the yoke YK. For example, the cooling line CT may penetrate the cover portion YK1 in the first direction DR1. The coolant may flow into the cooling line CT. The coolant may circulate within the yoke YK through the cooling line CT.

[0088] Fig. 9 is a schematic diagram illustrating an error compensation system according to an embodiment.

[0089] For example, refer to Fig. 9 The description of the error compensation system 100 can be found in reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8 Description of the described station 10. Hereinafter, for the convenience of description, redundant descriptions will be omitted or simplified.

[0090] refer to Figure 6 and Fig. 9 , the error compensation system 100 may include a stage 10. The stage 10 may include a base plate BS, a moving frame MF, a linear motor LM, a linear motor track LMT, a linear scale LS, a horizontal air bearing HAB, a vertical air bearing VAB, and an error compensation part CP.

[0091] Each of the horizontal air bearing HAB and the vertical air bearing VAB may be fixed (or attached) to the moving frame MF. In an embodiment, each of the horizontal air bearing HAB and the vertical air bearing VAB may float (or suspend) the moving frame MF from the base plate BS by exhausting air. For example, each of the horizontal air bearing HAB and the vertical air bearing VAB may exhaust air toward the base plate BS to separate the moving frame MF from the base plate BS.

[0092] When the moving frame MF linearly moves along an axis parallel to the first direction DR1, a translational motion error (e.g., a flatness error or a straightness error) and a rotational motion error (e.g., a rolling error, a pitch error, or a yaw error) may occur along each axis parallel to each of the first direction DR1, the second direction DR2, and the third direction DR3. In an embodiment, the error compensation system 100 may compensate for the motion error by the error compensation part CP.

[0093] The linear scale LS may be disposed below the moving frame MF. The linear scale LS may detect and provide feedback information such as the position of the moving frame MF. For example, the linear scale LS may detect and provide feedback information such as a translational motion error occurring in the moving frame MF along an axis parallel to the first direction DR1.

[0094] The error compensation system 100 may further include an interferometer. The interferometer may detect and provide feedback information such as the position of the moving frame MF. For example, the interferometer may detect and provide feedback information such as translational motion errors and rotational motion errors occurring in the moving frame MF along axes parallel to each of the first direction DR1, the second direction DR2, and the third direction DR3.

[0095] In an embodiment, the error compensation system 100 can control the error compensation part CP according to the error value provided by the linear scale LS and the error value provided by the interferometer. For example, the current applied to the error compensation part CP can be controlled to compensate the error. For example, the current applied to the coil CL of the error compensation part CP can be controlled to compensate the error.

[0096] In the case where the current applied to the coil CL increases, the attraction between the electromagnet portion EM and the guide rail RL may increase, and the distance between the electromagnet portion EM and the guide rail RL may decrease. In the case where the current applied to the coil CL decreases, the attraction between the electromagnet portion EM and the guide rail RL may decrease, and the distance between the electromagnet portion EM and the guide rail RL may increase. For example, the error compensation system 100 can compensate for the error regarding the linear motion of the stage 10 by controlling the magnitude of the current applied to the coil CL included in the error compensation part CP to control the attraction between the electromagnet portion EM and the guide rail RL.

[0097] For example, in the event of an error (such as a deviation of the moving frame MF in a linear direction (i.e., the first direction DR1 or a direction opposite to the first direction DR1), a horizontal direction (i.e., the second direction DR2 or a direction opposite to the second direction DR2), or a vertical direction (i.e., the third direction DR3 or a direction opposite to the third direction DR3), the moving frame MF rotates around an axis parallel to each of the first direction DR1, the second direction DR2, and the third direction DR3, etc.), the error compensation system 100 can compensate for the error by adjusting the current applied to the coil CL.

[0098] For example, since the error compensation part CP can be set between the upper surface of the base plate BS and the lower surface of the moving frame MF, the error can be compensated more effectively when an error occurs (such as deviation of the moving frame MF in a straight direction or a vertical direction, rotation of the moving frame MF around each axis parallel to each of the first direction DR1 and the second direction DR2, etc.).

[0099] For example, since a current for generating magnetic flux is applied to the coil CL, heat may be generated from the coil CL. In an embodiment, the error compensation system 100 may flow a coolant into the cooling line CT of the error compensation part CP. Since the coolant may circulate through the cooling line CT, the heat generated from the coil CL may be effectively released while compensating for the error.

[0100] The error compensation system 100 according to the embodiment may include a stage 10 including an error compensation part CP. The error compensation part CP may include a guide rail RL and an electromagnet part EM. In the event that a linear motion error occurs in the stage 10, the error may be compensated by controlling a current applied to a coil CL of the electromagnet part EM. For example, heat generated from the coil CL may be released by flowing a coolant into a cooling line CT of the electromagnet part EM. Therefore, since linear motion errors with respect to multiple axes may be accurately compensated, a stage 10 with improved reliability may be implemented.

[0101] Fig.10 is a schematic plan view showing a stage according to another embodiment. Fig.11 It is along Fig.10 Schematic cross-sectional view taken along line IV-IV'.

[0102] In addition to the arrangement of the error compensation part CP, refer to Fig.10 and Fig.11 The described station 20 can be used with reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8 The described stations 10 are substantially the same or similar. Hereinafter, for the convenience of description, redundant descriptions will be omitted or simplified.

[0103] refer to Fig.10 and Fig.11 The stage 20 may include a base plate BS, a moving frame MF, a linear motor LM, a linear motor track LMT, a linear scale LS, a horizontal air bearing HAB, a vertical air bearing VAB, and an error compensation part CP.

[0104] The moving frame MF may be disposed on the base plate BS. The moving frame MF may be spaced apart from the base plate BS in the third direction DR3. The moving frame MF may be movable in the first direction DR1 or in a direction opposite to the first direction DR1.

[0105] The linear motor LM may be disposed on the surface of the moving frame MF, and the linear motor track LMT may be disposed on the base plate BS. For example, the linear motor LM may include a coil, and the linear motor track LMT may include a magnet. The linear motor LM and the linear motor track LMT may not contact each other.

[0106] The linear motor LM may be movable along the linear motor rail LMT in a first direction DR1 or in a direction opposite to the first direction DR1. The moving frame MF may be linearly moved by the linear motor LM and the linear motor rail LMT.

[0107] The linear scale LS may be disposed on the base plate BS. The linear scale LS may detect and provide feedback information such as the position, moving distance, moving speed, etc. of the linear motor LM.

[0108] Each of the horizontal air bearing HAB and the vertical air bearing VAB may be disposed on a surface of the moving frame MF. For example, the horizontal air bearing HAB may be disposed on a lower surface of the moving frame MF, and the vertical air bearing VAB may be disposed on a side surface of the moving frame MF.

[0109] The error compensating part CP may be disposed between the base plate BS and the moving frame MF. In an embodiment, the error compensating part CP may be disposed between a side surface (eg, an inner side surface) of the base plate BS and a side surface of the moving frame MF.

[0110] The error compensating part CP may include a guide rail RL and an electromagnet part EM. The guide rail RL may be disposed on the base plate BS, and the electromagnet part EM may be disposed on the guide rail RL. In an embodiment, the guide rail RL may be fixed (or attached) to the base plate BS, and the electromagnet part EM may be fixed (or attached) to the moving frame MF. The guide rail RL and the electromagnet part EM may not contact each other and may be spaced apart from each other.

[0111] Fig.12 is a schematic diagram showing an error compensation system according to another embodiment.

[0112] For example, refer to Fig.12 The error compensation system 200 described may be used with reference to Fig.10 and Fig.11 For example, except for the arrangement of the error compensation part CP, refer to Fig.12 The error compensation system 200 described can be used with reference Fig. 9 The error compensation system 100 described is substantially the same or similar. In the following, for the convenience of description, redundant descriptions will be omitted or simplified.

[0113] refer to Fig.10 , Fig.11 and Fig.12 , the error compensation system 200 may include a stage 20. The stage 20 may include a base plate BS, a moving frame MF, a linear motor LM, a linear motor track LMT, a linear scale LS, a horizontal air bearing HAB, a vertical air bearing VAB, an error compensation part CP, and an interferometer.

[0114] The error compensation system 200 may float (or suspend) the moving frame MF from the base plate BS through the horizontal air bearing HAB and the vertical air bearing VAB, respectively. The error compensation system 200 may compensate for the linear motion error of the moving frame MF through the error compensation part CP.

[0115] The linear scale LS can detect and provide feedback information such as translational motion errors occurring in the moving frame MF along an axis parallel to the first direction DR1. The interferometer can detect and provide feedback information such as translational motion errors and rotational motion errors occurring in the moving frame MF along axes parallel to each of the first direction DR1, the second direction DR2, and the third direction DR3.

[0116] In an embodiment, the error compensation system 200 may control the error compensation part CP according to the error value provided by the linear scale LS and the error value provided by the interferometer. For example, the magnitude of the current applied to the electromagnet part EM of the error compensation part CP may be controlled to compensate for the error. For example, in the event of an error (such as the mobile frame MF being deflected in a linear direction, a horizontal direction, or a vertical direction, the mobile frame MF rotating around each axis parallel to each of the first direction DR1, the second direction DR2, and the third direction DR3, etc.), the error compensation system 200 may compensate for the error by adjusting the current applied to the electromagnet part EM.

[0117] Since the error compensation part CP can be set between the side surface of the base plate BS and the side surface of the moving frame MF, the error can be compensated more effectively when an error occurs (such as deviation of the moving frame MF in a straight direction or a horizontal direction, rotation of the moving frame MF around an axis parallel to the third direction DR3, etc.).

[0118] Fig.13 is a schematic plan view showing a stage according to still another embodiment. Fig.14 It is along Fig.13 A schematic cross-sectional view taken along line V-V'.

[0119] In addition to the arrangement of the error compensation part CP, refer to Fig.13 and Fig.14 The described station 30 can be used with reference Figure 1 , Figure 2 , Figure 3 , Figure 4, Figure 5 , Figure 6 , Figure 7 and Figure 8 The described stations 10 are substantially the same or similar. Hereinafter, for the convenience of description, redundant descriptions will be omitted or simplified.

[0120] refer to Fig.13 and Fig.14 The stage 30 may include a base plate BS, a moving frame MF, a linear motor LM, a linear motor track LMT, a linear scale LS, a horizontal air bearing HAB, a vertical air bearing VAB, and an error compensation part CP.

[0121] The moving frame MF may be disposed on the base plate BS. The moving frame MF may be spaced apart from the base plate BS in the third direction DR3. The moving frame MF may be movable in the first direction DR1 or in a direction opposite to the first direction DR1.

[0122] The linear motor LM may be disposed on the surface of the moving frame MF, and the linear motor track LMT may be disposed on the base plate BS. For example, the linear motor LM may include a coil, and the linear motor track LMT may include a magnet. The linear motor LM and the linear motor track LMT may not contact each other.

[0123] The linear motor LM may be movable along the linear motor rail LMT in a first direction DR1 or in a direction opposite to the first direction DR1. The moving frame MF may be linearly moved by the linear motor LM and the linear motor rail LMT.

[0124] The linear scale LS may be disposed on the base plate BS. The linear scale LS may detect and provide feedback information such as the position, moving distance, moving speed, etc. of the linear motor LM.

[0125] Each of the horizontal air bearing HAB and the vertical air bearing VAB may be disposed on a surface of the moving frame MF. For example, the horizontal air bearing HAB may be disposed on a lower surface of the moving frame MF, and the vertical air bearing VAB may be disposed on a side surface of the moving frame MF.

[0126] The error compensating part CP may be disposed between the base plate BS and the moving frame MF. In an embodiment, the error compensating part CP may be disposed between an upper surface of the base plate BS and a lower surface of the moving frame MF and between a side surface of the base plate BS and a side surface of the moving frame MF.

[0127] The error compensating part CP may include a guide rail RL and an electromagnet part EM. The guide rail RL may be disposed on the base plate BS, and the electromagnet part EM may be disposed on the guide rail RL. In an embodiment, the guide rail RL may be fixed (or attached) to the base plate BS, and the electromagnet part EM may be fixed (or attached) to the moving frame MF. The guide rail RL and the electromagnet part EM may not contact each other and may be spaced apart from each other.

[0128] Fig.15 is a schematic diagram showing an error compensation system according to still another embodiment.

[0129] For example, refer to Fig.15 The error compensation system 300 described may be used with reference to Fig.13 and Fig.14 For example, except for the arrangement of the error compensation part CP, refer to Fig.15 The error compensation system 300 described can be used with reference Fig. 9 The error compensation system 100 described is substantially the same or similar. In the following, for the convenience of description, redundant descriptions will be omitted or simplified.

[0130] refer to Fig.13 , Fig.14 and Fig.15 , the error compensation system 300 may include a stage 30. The stage 30 may include a base plate BS, a moving frame MF, a linear motor LM, a linear motor track LMT, a linear scale LS, a horizontal air bearing HAB, a vertical air bearing VAB, an error compensation part CP, and an interferometer.

[0131] The error compensation system 300 may float (or suspend) the moving frame MF from the base plate BS through the horizontal air bearing HAB and the vertical air bearing VAB, respectively. The error compensation system 300 may compensate for the linear motion error of the moving frame MF through the error compensation part CP.

[0132] The linear scale LS can detect and provide feedback information such as translational motion errors occurring in the moving frame MF along an axis parallel to the first direction DR1. The interferometer can detect and provide feedback information such as translational motion errors and rotational motion errors occurring in the moving frame MF along axes parallel to each of the first direction DR1, the second direction DR2, and the third direction DR3.

[0133] In an embodiment, the error compensation system 300 may control the error compensation part CP according to the error value provided by the linear scale LS and the error value provided by the interferometer. For example, the magnitude of the current applied to the electromagnet part EM of the error compensation part CP may be controlled to compensate for the error. For example, in the event of an error (such as the mobile frame MF deflecting in a linear direction, a horizontal direction, or a vertical direction, the mobile frame MF rotating around each axis parallel to each of the first direction DR1, the second direction DR2, and the third direction DR3, etc.), the error compensation system 300 may compensate for the error by adjusting the current applied to the electromagnet part EM.

[0134] Since the error compensating part CP may be disposed between the upper surface of the base plate BS and the lower surface of the moving frame MF and between the side surface of the base plate BS and the side surface of the moving frame MF, a motion error that may occur in the stage 30 may be more effectively compensated.

[0135] The embodiments may be applied to the manufacturing process of various display devices. For example, the embodiments may be applied to the manufacturing process of various display devices such as display devices for vehicles, ships and aircraft, portable communication devices, display devices for exhibitions or information transmission, medical display devices, etc.

[0136] At the end of the detailed description, those skilled in the art will appreciate that various changes and modifications may be made to the embodiments without substantially departing from the principles, spirit and scope of the present disclosure. Therefore, the disclosed embodiments are used in a general and descriptive sense only and not for a limiting purpose.

Claims

1. Taiwan, including: a bottom plate extending in a first direction and in a second direction intersecting the first direction; a moving frame disposed on the bottom plate and movable in the first direction or in a direction opposite to the first direction; as well as An error compensation part is arranged between the bottom plate and the moving frame, and the error compensation part comprises: a guide rail extending in the first direction; as well as The electromagnet portion is disposed on the guide rail and covers at least a portion of the guide rail.

2. The station according to claim 1, wherein The electromagnet portion comprises: a coil disposed on at least one surface of the guide rail; and A yoke covers the coil.

3. The station according to claim 2, wherein: The coil comprises: a first coil; and A second coil is adjacent to the first coil in the first direction and is wound in a direction opposite to the direction in which the first coil is wound.

4. The station according to claim 2, wherein: The yoke comprises: a cover portion covering the coil; and an iron core portion protruding in a direction toward the guide rail, and The coil is wound around the core portion.

5. The station according to claim 2, wherein: The electromagnet portion also includes a cooling line passing through the yoke.

6. The station according to claim 1, wherein: The guide rail and the electromagnet portion are spaced apart from each other.

7. The station of claim 1, further comprising: An air bearing is disposed on at least one surface of the moving frame.

8. The station according to claim 1, wherein: The guide rail is fixed to the base plate, and The electromagnet portion is fixed to the moving frame.

9. The station according to claim 1, wherein: The error compensation portion is disposed on an upper surface of the bottom plate.

10. The station according to claim 1, wherein: The error compensating portion is disposed on a side surface of the bottom plate.

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