Millisecond-femtosecond laser integrated secondary processing device

Abstract

The invention discloses a millisecond-femtosecond laser integrated secondary processing device, and belongs to the field of laser processing. The device specifically comprises first to eighth laser reversing devices, a back plate, an optical control device, a precise Z shaft, a laser head, a workbench, a mounting table, a short-pulse millisecond laser, an ultra-short-pulse femtosecond laser and a base. The first to sixth light transmission pipes are used for transmitting laser; the third to eighth laser reversing devices and the precise Z shaft are installed on the upper surface of the installation table, the precise Z shaft is located in the front middle of the installation table, the back plate is installed below the precise Z shaft and connected with the precise Z shaft, the optical control device is installed in front of the back plate, and the laser head is installed below the optical control device. The coaxial focusing design is adopted for the double laser beams, secondary positioning is not needed, the complex tool setting process of traditional double-station machining is avoided, and the positioning precision is improved. Compared with split equipment, the integrated machining mode saves the machining time and reduces the occupied area.

Description

Technical Field

[0001] The invention belongs to the field of laser processing, and in particular relates to a millisecond-femtosecond laser integrated secondary processing device. Background Art

[0002] Laser processing technology is one of the more advanced mechanical manufacturing technologies. It uses related equipment technology to convert light energy into other forms of energy. After the material absorbs the energy, it undergoes physical and chemical changes and then deforms to meet the preset processing requirements. At present, the practical application of this technology has touched many industries, especially in advanced manufacturing equipment, precision medical equipment and cutting-edge aerospace equipment. Although its processing efficiency is very high, due to the long pulse duration, the thermal effect during the processing is very significant, so it is difficult to achieve high-quality processing. As an ultrashort pulse laser, femtosecond laser has an extremely short pulse duration and extremely high peak power density, which can perform high-quality processing on various materials. However, due to its low single pulse energy, it is difficult to achieve high-efficiency processing. Summary of the invention

[0003] In view of the problems existing in the prior art, the present invention provides a millisecond-femtosecond laser integrated secondary processing device, which can change the direction of the laser so that two lasers can process the material alternately without the need for secondary clamping and positioning, thereby improving work efficiency.

[0004] In order to solve the above technical problems, the present invention provides the following technical solutions: a millisecond-femtosecond laser integrated secondary processing device, comprising: a first laser reversing device, a second laser reversing device, a third laser reversing device, a fourth laser reversing device, a fifth laser reversing device, a sixth laser reversing device, a seventh laser reversing device, an eighth laser reversing device, a back plate, an optical control device, a precision Z axis, a laser head, a workbench, a mounting table, a short pulse millisecond laser, an ultrashort pulse femtosecond laser, and a base;

[0005] The workbench is installed on the upper surface of the base. The workbench guide rail drives the workpiece to move in the X-axis and Y-axis directions, and the workbench fixture drives the workpiece to rotate and tilt.

[0006] The mounting table is installed in the middle of the base, the third laser reversing device, the fourth laser reversing device, the fifth laser reversing device, the sixth laser reversing device, the seventh laser reversing device, the eighth laser reversing device, the precision Z axis is installed on the upper surface of the mounting table, the precision Z axis is located in the front middle of the mounting table, the back plate is installed below the precision Z axis and connected to the precision Z axis, the optical control device is installed on the back plate (in front, and the laser head is installed below the optical control device;

[0007] The third laser reversing device is located at the left rear of the upper surface of the mounting platform, and the fourth laser reversing device is symmetrically arranged with the third laser reversing device on the X axis, and is located at the right rear of the upper surface of the mounting platform;

[0008] The fifth laser reversing device is located at the left front of the upper surface of the mounting platform, and the sixth laser reversing device is arranged horizontally symmetrically with the fifth laser reversing device on the X axis and is located at the right front of the upper surface of the mounting platform;

[0009] The third laser reversing device and the fifth laser reversing device are symmetrically arranged on the Y axis, and the fourth laser reversing device and the sixth laser reversing device are symmetrically arranged on the Y axis;

[0010] The first laser reversing device is arranged on the base and is collinear with the third laser reversing device on the Z axis. The second laser reversing device is arranged on the base and is collinear with the fourth laser reversing device on the Z axis. The first laser reversing device and the second laser reversing device are collinear with the X axis.

[0011] The seventh laser reversing device is arranged directly below the fifth laser reversing device and is collinear with the fifth laser reversing device on the Z axis. The eighth laser reversing device is arranged directly below the sixth laser reversing device and is collinear with the sixth laser reversing device on the Z axis.

[0012] The seventh laser reversing device, the eighth laser reversing device, and the optical control device are collinear on the X-axis;

[0013] The short pulse millisecond laser is arranged directly below the fourth laser reversing device and installed on the base; the ultrashort pulse femtosecond laser is arranged above the short pulse millisecond laser, the laser outlet of the ultrashort pulse femtosecond laser emits femtosecond laser to the second laser reversing device, and the laser outlet of the short pulse millisecond laser emits millisecond laser to the first laser reversing device.

[0014] Furthermore, the aforementioned short pulse millisecond laser is arranged directly below the fourth laser reversing device and installed on the base; the ultrashort pulse femtosecond laser is arranged above the short pulse millisecond laser, and the laser outlet of the ultrashort pulse femtosecond laser emits femtosecond laser toward the second laser reversing device, and the laser outlet of the short pulse millisecond laser emits millisecond laser toward the first laser reversing device.

[0015] Furthermore, the aforementioned millisecond-to-femtosecond laser integrated secondary processing device further includes: a first light transmission tube, a second light transmission tube, a third light transmission tube, a fourth light transmission tube, a fifth light transmission tube, and a sixth light transmission tube, each light transmission tube being used to transmit laser light;

[0016] The first laser reversing device is connected to the third laser reversing device through a first light transmission tube.

[0017] The second laser reversing device is connected to the fourth laser reversing device through a second light transmission tube.

[0018] The third laser reversing device is connected to the fifth laser reversing device through a third light transmission tube.

[0019] The fourth laser reversing device is connected to the sixth laser reversing device via a fourth light transmission tube.

[0020] The seventh laser reversing device optical control device is connected through the fifth light transmission tube,

[0021] The eighth laser reversing device is connected to the optical control device via the sixth light transmission tube.

[0022] Furthermore, the aforementioned first laser reversing device receives the millisecond laser from the outlet of the short-pulse millisecond laser, and changes the direction of the millisecond laser upward through an internal reflector, and transmits it through the first light transmission tube. The third laser reversing device receives the millisecond laser from the first light transmission tube, changes the direction of the millisecond laser forward through an internal reflector, and transmits it through the third light transmission tube. The fifth laser reversing device receives the millisecond laser from the third light transmission tube, changes the direction of the millisecond laser downward through an internal reflector. The seventh laser reversing device receives the millisecond laser reflected by the fifth laser reversing device, changes the direction of the millisecond laser to the right through an internal reflector, and enters the optical control device through the fifth light transmission tube.

[0023] Furthermore, the aforementioned second laser reversing device receives the femtosecond laser from the outlet of the femtosecond laser, and changes the direction of the femtosecond laser upward through an internal reflector, and transmits it through the second light transmission tube. The fourth laser reversing device receives the femtosecond laser from the second light transmission tube, changes the direction of the femtosecond laser forward through an internal reflector, and transmits it through the fourth light transmission tube. The sixth laser reversing device receives the femtosecond laser from the fourth light transmission tube, changes the direction of the femtosecond laser downward through an internal reflector, and the eighth laser reversing device receives the femtosecond laser reflected by the sixth laser reversing device, changes the direction of the femtosecond laser to the right through an internal reflector, and enters the optical control device through the sixth light transmission tube.

[0024] Furthermore, the aforementioned optical control device receives the millisecond laser in the fifth light transmission tube, changes the direction of the millisecond laser to be emitted downward into the laser head, and performs millisecond laser processing on the workpiece.

[0025] Furthermore, after the aforementioned short-pulse millisecond laser processing is completed, the optical control device receives the femtosecond laser in the sixth light transmission tube, and changes the angle of the internal rotating reflector to change the direction of the femtosecond laser downward, so that the femtosecond laser enters the laser head and performs femtosecond laser processing on the workpiece.

[0026] Furthermore, the aforementioned short pulse millisecond laser is: Nd:YAG millisecond laser.

[0027] Furthermore, the aforementioned ultrashort pulse femtosecond laser is: Acitive Fiber femtosecond laser.

[0028] Compared with the prior art, the beneficial technical effects of the above technical solution adopted by the present invention are as follows: Based on the traditional short-pulse millisecond laser processing technology, the present invention innovatively introduces ultra-short pulse femtosecond laser for secondary processing. The alternating processing control of dual lasers is realized through equipment construction. This technical solution not only has a compact system structure and is easy to implement, but also has the following core advantages: the dual laser beams adopt a coaxial focusing design and do not require secondary positioning, which not only avoids the complex tool setting process of traditional dual-station processing, but also improves positioning accuracy. Compared with split equipment, this integrated processing mode saves processing time and reduces floor space. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a front view of the secondary processing device of the present invention.

[0030] Figure 2 It is a left view of the secondary processing device of the present invention.

[0031] Figure 3 It is the right view of the secondary processing device of the present invention.

[0032] Figure 4 This is a schematic diagram of the interior of the optical control device.

[0033] In the figure: 1-the fifth laser reversing device, 2-the seventh laser reversing device, 3-the fifth light transmission tube, 4-the optical control device, 5-the sixth laser reversing device, 6-the eighth laser reversing device, 7-the sixth light transmission tube, 8-the back plate, 9-the precision Z axis, 10-the mounting table, 11-the first laser reversing device, 12-the first light transmission tube, 13-the third laser reversing device, 14-the third light transmission tube, 15-the working table, 16-the short pulse millisecond laser, 17-the ultrashort pulse femtosecond laser, 18-the second laser reversing device, 19-the second light transmission tube, 20-the fourth laser reversing device, 21-the fourth light transmission tube, 22-the laser head, 23-the base, 24-the millisecond laser, 25-the femtosecond laser, 26-the reflecting mirror. DETAILED DESCRIPTION

[0034] In order to better understand the technical content of the present invention, specific embodiments are given and described as follows in conjunction with the accompanying drawings.

[0035] Various aspects of the invention are described herein with reference to the accompanying drawings, in which many illustrative embodiments are shown. The embodiments of the invention are not limited to those described in the accompanying drawings. It should be understood that the invention is implemented by any of the various concepts and embodiments described above, as well as the concepts and embodiments described in detail below, because the concepts and embodiments disclosed in the invention are not limited to any implementation. In addition, some aspects disclosed in the invention may be used alone or in any appropriate combination with other aspects disclosed in the invention.

[0036] refer to Figure 1 , Figure 2 ,and Figure 3 The present invention provides a millisecond-femtosecond laser integrated secondary processing device, including: a first laser reversing device 11, a second laser reversing device 18, a third laser reversing device 13, a fourth laser reversing device 20, a fifth laser reversing device 1, a sixth laser reversing device 5, a seventh laser reversing device 2, an eighth laser reversing device 6, a back plate 8, an optical control device 4, a precision Z axis 9, a laser head 22, a workbench 15, a mounting table 10, a short pulse millisecond laser 16, an ultrashort pulse femtosecond laser 17, a base 23, and also includes: a first light transmission tube 12, a second light transmission tube 19, a third light transmission tube 14, a fourth light transmission tube 21, a fifth light transmission tube 3, and a sixth light transmission tube 7, each of which is used to transmit laser light. The short pulse second laser 16 used in this embodiment is: Nd:YAG millisecond laser, and the ultrashort pulse femtosecond laser 17 is: Acitive Fiber femtosecond laser.

[0037] As shown in FIG. 2 , the workbench 15 is mounted on the upper surface of the base 23 , the workbench guide rail drives the workpiece to move in the X-axis direction and the Y-axis direction, and the workbench fixture drives the workpiece to rotate and tilt;

[0038] The mounting platform 10 is installed in the middle position of the base 23, the third laser reversing device 13, the fourth laser reversing device 20, the fifth laser reversing device 1, the sixth laser reversing device 5, the seventh laser reversing device 2, the eighth laser reversing device 6, and the precision Z axis 9 are installed on the upper surface of the mounting platform 10, the precision Z axis 9 is located in the front middle of the mounting platform 10, the back plate 8 is installed below the precision Z axis 9 and connected to the precision Z axis 9, the optical control device 4 is installed in front of the back plate 8, and the laser head 22 is installed below the optical control device 4;

[0039] The third laser reversing device 13 is located at the left rear of the upper surface of the mounting platform 10, and the fourth laser reversing device 20 is symmetrically arranged with the third laser reversing device 13 on the X axis, and is located at the right rear of the upper surface of the mounting platform 10;

[0040] The fifth laser reversing device 1 is located at the left front of the upper surface of the mounting platform 10, and the sixth laser reversing device 5 is arranged horizontally symmetrically with the fifth laser reversing device 1 on the X axis and is located at the right front of the upper surface of the mounting platform 10;

[0041] The third laser reversing device 13 and the fifth laser reversing device 1 are arranged horizontally symmetrically on the Y axis, and the fourth laser reversing device 20 and the sixth laser reversing device 5 are arranged horizontally symmetrically on the Y axis;

[0042] The first laser reversing device 11 is arranged on the base and is collinear with the third laser reversing device 13 on the Z axis. The second laser reversing device 18 is arranged on the base and is collinear with the fourth laser reversing device 20 on the Z axis. The first laser reversing device 11 is collinear with the second laser reversing device 18 on the X axis.

[0043] The seventh laser reversing device 2 is arranged directly below the fifth laser reversing device 1 and is collinear with the fifth laser reversing device 1 on the Z axis. The eighth laser reversing device 6 is arranged directly below the sixth laser reversing device 5 and is collinear with the sixth laser reversing device 5 on the Z axis.

[0044] The seventh laser reversing device 2, the eighth laser reversing device 6, and the optical control device 4 are collinear on the X axis;

[0045] The short pulse millisecond laser 16 is arranged directly below the fourth laser reversing device 20 and installed on the base 23; the ultrashort pulse femtosecond laser 17 is arranged above the short pulse millisecond laser 16, and the laser outlet of the ultrashort pulse femtosecond laser 17 emits femtosecond laser to the second laser reversing device 18, and the laser outlet of the short pulse millisecond laser 16 emits millisecond laser to the first laser reversing device 11.

[0046] After the laser device starts working, the first laser reversing device 11 receives the millisecond laser from the outlet of the short-pulse millisecond laser 16, and changes the direction of the millisecond laser upward through an internal reflector, and transmits it through the first light transmission tube 12. The third laser reversing device 13 receives the millisecond laser from the first light transmission tube 12, changes the direction of the millisecond laser forward through an internal reflector, and transmits it through the third light transmission tube 14. The fifth laser reversing device 1 receives the millisecond laser from the third light transmission tube 14, and changes the direction of the millisecond laser downward through an internal reflector. The seventh laser reversing device 2 receives the millisecond laser reflected by the fifth laser reversing device 1, changes the direction of the millisecond laser to the right through an internal reflector, and enters the optical control device 4 through the fifth light transmission tube 3.

[0047] The second laser reversing device 18 receives the femtosecond laser from the outlet of the femtosecond laser 17, and changes the direction of the femtosecond laser upward through an internal reflector, and transmits it through the second light transmission tube 19. The fourth laser reversing device 20 receives the femtosecond laser from the second light transmission tube 19, changes the direction of the femtosecond laser forward through an internal reflector, and transmits it through the fourth light transmission tube 21. The sixth laser reversing device 5 receives the femtosecond laser from the fourth light transmission tube 21, and changes the direction of the femtosecond laser downward through an internal reflector. The eighth laser reversing device 6 receives the femtosecond laser reflected by the sixth laser reversing device 5, changes the direction of the femtosecond laser to the right through an internal reflector, and enters the optical control device 4 through the sixth light transmission tube 7.

[0048] The optical control device 4 receives the millisecond laser 24 in the fifth light transmission tube 3, changes the direction of the millisecond laser 24 to emit it downward into the laser head 22, and performs millisecond laser processing on the workpiece.

[0049] like Figure 4 As shown, after the millisecond laser processing is completed, the optical control device 4 receives the femtosecond laser 25 in the sixth light transmission tube 7, and changes the angle of the internal rotating reflector 26 to change the direction of the femtosecond laser 25 downward, enters the laser head 22, and performs femtosecond laser processing on the workpiece.

[0050] Although the present invention has been described above with preferred embodiments, it is not intended to limit the present invention. A person skilled in the art of the present invention may make various modifications and improvements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the definition of the claims.

Claims

1. A millisecond-femtosecond laser integrated secondary processing device, characterized in that: include: A first laser reversing device (11), a second laser reversing device (18), a third laser reversing device (13), a fourth laser reversing device (20), a fifth laser reversing device (1), a sixth laser reversing device (5), a seventh laser reversing device (2), an eighth laser reversing device (6), a back plate (8), an optical control device (4), a precision Z axis (9), a laser head (22), a workbench (15), a mounting table (10), a short pulse millisecond laser (16), an ultrashort pulse femtosecond laser (17), and a base (23); The workbench (15) is mounted on the upper surface of the base (23), the workbench guide rail drives the workpiece to move in the X-axis direction and the Y-axis direction, and the workbench fixture drives the workpiece to rotate and tilt; The mounting platform (10) is installed in the middle position of the base (23); the third laser reversing device (13), the fourth laser reversing device (20), the fifth laser reversing device (1), the sixth laser reversing device (5), the seventh laser reversing device (2), the eighth laser reversing device (6), and the precision Z axis (9) are installed on the upper surface of the mounting platform (10); the precision Z axis (9) is located in the front middle of the mounting platform (10); the back plate (8) is installed below the precision Z axis (9) and connected to the precision Z axis (9); the optical control device (4) is installed in front of the back plate (8); and the laser head (22) is installed below the optical control device (4); The third laser reversing device (13) is located at the left rear of the upper surface of the mounting platform (10); the fourth laser reversing device (20) is arranged horizontally symmetrically with the third laser reversing device (13) on the X axis and is located at the right rear of the upper surface of the mounting platform (10); The fifth laser reversing device (1) is located at the left front of the upper surface of the mounting platform (10); the sixth laser reversing device (5) is arranged horizontally symmetrically with the fifth laser reversing device (1) on the X-axis and is located at the right front of the upper surface of the mounting platform (10); The third laser reversing device (13) and the fifth laser reversing device (1) are arranged symmetrically on the Y axis, and the fourth laser reversing device (20) and the sixth laser reversing device (5) are arranged symmetrically on the Y axis; The first laser reversing device (11) is arranged on the base and is collinear with the third laser reversing device (13) on the Z axis; the second laser reversing device (18) is arranged on the base and is collinear with the fourth laser reversing device (20) on the Z axis; the first laser reversing device (11) and the second laser reversing device (18) are collinear on the X axis, The seventh laser reversing device (2) is arranged directly below the fifth laser reversing device (1) and is collinear with the fifth laser reversing device (1) on the Z axis; the eighth laser reversing device (6) is arranged directly below the sixth laser reversing device (5) and is collinear with the sixth laser reversing device (5) on the Z axis; The seventh laser reversing device (2), the eighth laser reversing device (6), and the optical control device (4) are collinear on the X-axis; The short pulse millisecond laser (16) is arranged directly below the fourth laser reversing device (20) and is installed on a base (23); the ultrashort pulse femtosecond laser (17) is arranged above the short pulse millisecond laser (16); the laser outlet of the ultrashort pulse femtosecond laser (17) emits femtosecond laser toward the second laser reversing device (18), and the laser outlet of the short pulse millisecond laser (16) emits millisecond laser toward the first laser reversing device (11).

2. The millisecond-to-femtosecond laser integrated secondary processing device according to claim 1, characterized in that: The short pulse millisecond laser (16) is arranged directly below the fourth laser reversing device (20) and is installed on a base (23); the ultrashort pulse femtosecond laser (17) is arranged above the short pulse millisecond laser (16); the laser outlet of the ultrashort pulse femtosecond laser (17) emits femtosecond laser toward the second laser reversing device (18), and the laser outlet of the short pulse millisecond laser (16) emits millisecond laser toward the first laser reversing device (11).

3. A millisecond-to-femtosecond laser integrated secondary processing device according to claim 1 or 2, characterized in that: Also includes: A first light transmission tube (12), a second light transmission tube (19), a third light transmission tube (14), a fourth light transmission tube (21), a fifth light transmission tube (3), and a sixth light transmission tube (7), each light transmission tube being used to transmit laser light; The first laser reversing device (11) is connected to the third laser reversing device (13) via a first light transmission tube (12). The second laser reversing device (18) is connected to the fourth laser reversing device (20) via a second light transmission tube (19). The third laser reversing device (13) is connected to the fifth laser reversing device (1) via a third light transmission tube (14). The fourth laser reversing device (20) is connected to the sixth laser reversing device (5) via a fourth light transmission tube (21). The seventh laser reversing device (2) and the optical control device (4) are connected via the fifth light transmission tube (3). The eighth laser reversing device (6) and the optical control device (4) are connected via a sixth light transmission tube (7).

4. The millisecond-to-femtosecond laser integrated secondary processing device according to claim 3, characterized in that: The first laser reversing device (11) receives the millisecond laser from the outlet of the short pulse millisecond laser (16), and changes the direction of the millisecond laser upward through an internal reflector, and transmits it through the first light transmission tube (12). The third laser reversing device (13) receives the millisecond laser from the first light transmission tube (12), changes the direction of the millisecond laser forward through an internal reflector, and transmits it through the third light transmission tube (14). The fifth laser reversing device (1) receives the millisecond laser from the third light transmission tube (14), and changes the direction of the millisecond laser downward through an internal reflector. The seventh laser reversing device (2) receives the millisecond laser reflected by the fifth laser reversing device (1), changes the direction of the millisecond laser to the right through an internal reflector, and enters the optical control device (4) through the fifth light transmission tube (3).

5. The millisecond-to-femtosecond laser integrated secondary processing device according to claim 4, characterized in that: The second laser reversing device (18) receives the femtosecond laser from the outlet of the femtosecond laser (17), and changes the direction of the femtosecond laser upward through an internal reflection mirror, and transmits it through the second light transmission tube (19); the fourth laser reversing device (20) receives the femtosecond laser from the second light transmission tube (19), changes the direction of the femtosecond laser forward through an internal reflection mirror, and transmits it through the fourth light transmission tube (21); the sixth laser reversing device (5) receives the femtosecond laser from the fourth light transmission tube (21), and changes the direction of the femtosecond laser downward through an internal reflection mirror; the eighth laser reversing device (6) receives the femtosecond laser reflected by the sixth laser reversing device (5), changes the direction of the femtosecond laser to the right through an internal reflection mirror, and enters the optical control device (4) through the sixth light transmission tube (7); The optical control device (4) receives the millisecond laser (24) in the fifth light transmission tube (3), changes the direction of the millisecond laser (24) to be emitted downward into the laser head (22), and performs millisecond laser processing on the workpiece.

6. The millisecond-to-femtosecond laser integrated secondary processing device according to claim 5, characterized in that: After the millisecond laser processing is completed, the optical control device (4) receives the femtosecond laser (25) in the sixth light transmission tube (7), and changes the angle of the internal rotating reflector (26) to change the direction of the femtosecond laser (25) downward, so that the femtosecond laser enters the laser head (22) and performs femtosecond laser processing on the workpiece.

7. The millisecond-to-femtosecond laser integrated secondary processing device according to claim 1, characterized in that: The short pulse millisecond laser (16) is: Nd:YAG millisecond laser.

8. The millisecond-to-femtosecond laser integrated secondary processing device according to claim 1, characterized in that: The ultrashort pulse femtosecond laser (17) is: Acitive Fiber femtosecond laser.

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