Light splitting distance regulation and control device
By designing a spectroscopic pitch control device including a laser input unit, a beam expansion unit, a spectroscopic prism and a spectroscopic adjustment component, the existing device has complex structure, low regulation accuracy and large energy loss, and efficient and accurate spectroscopic pitch control is achieved.
Patent Information
- Application Number
- CN202510390260.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-31
- Publication Date
- 2025-05-23
AI Technical Summary
The existing spectroscopic pitch control devices have complex structures, high investment costs, difficult to accurately regulate, low regulation accuracy, and large energy loss during spectroscopic regulation.
A spectroscopic pitch control device is designed, including a laser input unit, a beam expansion unit, a first and second spectroscopic prism, a first and second spectroscopic adjustment components, through which precise control of the laser beam spacing is achieved. The device uses a high-precision motor to drive an adjustable base and reflector to achieve high-precision rotation and regulation.
It achieves the effect of simple structure, accurate regulation, high regulation accuracy, low loss during spectral output beam regulation and high working efficiency.
Smart Images
Figure CN120023456A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of laser processing, and in particular to a light splitting spacing control device. Background Art
[0002] In the field of laser technology, adjusting the beam splitting distance is a key step in optimizing the beam splitting effect of laser beams. By precisely controlling the position or angle of the beam splitting element, the spacing of the sub-beams can be precisely controlled, thereby improving the laser processing efficiency, spectral analysis accuracy, and scientific research experiment reliability. However, the existing beam splitting distance control device has the following defects:
[0003] 1. The structure is complex and the investment cost is high.
[0004] 2. It is difficult to precisely control and the control accuracy is low.
[0005] 3. The energy loss during the regulation process is large. Summary of the invention
[0006] In view of the deficiencies of the prior art, the purpose of the present invention is to provide a spectroscopic spacing control device, which has a simple structure, can be precisely controlled, has high control accuracy, generates little loss during the spectroscopic control process, and has high working efficiency.
[0007] The embodiments of the present invention are implemented by the following technical solutions:
[0008] A light splitting spacing control device, comprising:
[0009] A laser input unit for outputting a laser beam;
[0010] A beam expansion unit and a first beam splitter prism are sequentially arranged along the output direction of the laser beam, and the laser beam is respectively emitted as a first beam and a second beam through the first beam splitter prism;
[0011] a second beam splitter prism for adjusting the output of the first light beam, the second beam splitter prism being arranged on one side of the first beam splitter prism, and the first light beam is emitted through the second beam splitter prism;
[0012] A first light splitting adjustment component and a second light splitting adjustment component for adjusting the output path of the second light beam, wherein the first light splitting adjustment component is located at the rear side of the first light splitting prism, and the second light splitting adjustment component is disposed at the rear side of the second light splitting prism, and the second light beam is incident on the second light splitting prism after passing through the first light splitting adjustment component and the second light splitting adjustment component in sequence; the first light splitting adjustment component includes a first reflector and a first adjustable base, and the second light splitting adjustment component includes a second reflector and a second adjustable base;
[0013] A laser output unit, wherein the first light beam and the second light beam are both output toward the laser output unit after passing through the second beam splitter prism.
[0014] According to a preferred embodiment, the laser input unit includes a laser and an aperture arranged in sequence;
[0015] The laser output unit comprises a galvanometer mirror and a field mirror which are arranged in sequence.
[0016] According to a preferred embodiment, the first adjustable base includes a first motor and a first base, and the first motor causes the first reflector to rotate through the first base.
[0017] According to a preferred embodiment, the second adjustable base includes a second motor and a second base, and the second motor causes the second reflector to rotate through the second base.
[0018] According to a preferred embodiment, the first base and the second base both include a motor plate and a rotating base, the top of the rotating base is provided with an output end, and the side wall of the rotating base is provided with an input end.
[0019] According to a preferred embodiment, a first beam-cutting mirror is arranged between the first beam-splitting prism and the second beam-splitting prism.
[0020] According to a preferred embodiment, a second light-cutting mirror is arranged between the first light-splitting adjustment component and the second light-splitting adjustment component.
[0021] According to a preferred embodiment, the rotation angle unit of the first reflector and the rotation angle unit of the second reflector are 0.01 degrees.
[0022] The technical solution of the embodiment of the present invention has at least the following advantages and beneficial effects:
[0023] The present invention has a simple structure, and can achieve precise control of the spacing of output light beams through the first light splitting adjustment component and the second light splitting adjustment component. The first adjustable base can drive the first reflector to rotate with high precision, and the second adjustable base drives the second reflector to rotate with high precision. The control accuracy is high, less loss is generated during the control process of the light splitting output light beam, and the working efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.
[0025] Figure 1 A schematic diagram of the structure of a light splitting spacing control device provided by an embodiment of the present invention;
[0026] Figure 2 A schematic diagram of the side structure of a light splitting spacing control device provided in an embodiment of the present invention;
[0027] Figure 3 for Figure 1 Schematic diagram of the local structure in.
[0028] Icon: 1-laser, 2-aperture, 3-beam expansion unit, 4-first beam splitter prism, 5-second beam splitter prism, 6-galvanometer, 7-field mirror, 8-first motor, 9-first base, 10-first reflecting mirror, 11-second motor, 12-second base, 13-second reflecting mirror, 14-motor board, 15-first beam cutting mirror, 16-second beam cutting mirror, A-first light beam, B-second light beam, G-laser beam. DETAILED DESCRIPTION
[0029] For better understanding and implementation, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.
[0030] In the description of the present invention, it should be noted that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc. indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.
[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.
[0032] Example
[0033] Please refer to Figures 1 to 3A device for controlling a splitting distance comprises: a laser input unit for outputting a laser beam; a beam expansion unit and a first beam splitter prism which are sequentially arranged along the output direction of the laser beam, the laser beam respectively emits a first beam and a second beam through the first beam splitter prism; a second beam splitter prism for adjusting the output of the first beam, the second beam splitter prism being arranged on one side of the first beam splitter prism, the first beam passing through the second beam splitter prism and being emitted; a first beam splitter adjustment component and a second beam splitter adjustment component for adjusting the output path of the second beam, the first beam splitter adjustment component being located at the rear side of the first beam splitter prism, the second beam splitter adjustment component being arranged at the rear side of the second beam splitter prism, the second beam sequentially passes through the first beam splitter adjustment component and the second beam splitter adjustment component and then is emitted into the second beam splitter prism; the first beam splitter adjustment component comprises a first reflector and a first adjustable base, the second beam splitter adjustment component comprises a second reflector and a second adjustable base; a laser output unit, the first beam and the second beam both pass through the second beam splitter prism and then are output toward the laser output unit.
[0034] Preferably, the laser input unit comprises a laser and an aperture which are arranged in sequence; and the laser output unit comprises a galvanometer and a field lens which are arranged in sequence.
[0035] Preferably, the first adjustable base comprises a first motor and a first base, and the first motor causes the first reflector to rotate via the first base.
[0036] Preferably, the second adjustable base comprises a second motor and a second base, and the second motor causes the second reflector to rotate via the second base.
[0037] Preferably, the first base and the second base both include a motor plate and a rotating base, the top of the rotating base is provided with an output end, and the side wall of the rotating base is provided with an input end.
[0038] Preferably, a first beam-cutting mirror is arranged between the first beam-splitting prism and the second beam-splitting prism.
[0039] Preferably, a second light-cutting mirror is arranged between the first light-splitting adjustment component and the second light-splitting adjustment component.
[0040] Preferably, the rotation angle unit of the first reflector and the rotation angle unit of the second reflector are 0.01 degrees.
[0041] Working principle of the present invention:
[0042] In this embodiment, the first motor and the second motor are both high-precision motors, and servo motors can be selected.
[0043] In this embodiment, the first beam splitter prism splits a laser beam into two laser beams (a first beam and a second beam), the first beam is transmitted to the first reflector, and the second beam is transmitted to the second beam splitter prism at the same time. The second beam passing through the first reflector is transmitted to the second reflector, and the laser passing through the second reflector passes through the second beam splitter prism. The two beams (the first beam and the second beam) pass through the second beam splitter prism and are then converged at the laser output unit (galvanometer) to form two laser beams with adjustable light spots that enter the galvanometer. Finally, they are converged by the laser output unit (field mirror) to form two laser beams on the surface to process the substrate. When the number of processed lines is an odd number, the unnecessary beam of light can be cut off by the first beam cutter or the second beam cutter. When it is an even number of lines, there is no need to start the light cutting function of the first beam cutter or the second beam cutter.
[0044] Specifically, this embodiment can control the transmission of reflected light (second light beam) by adjusting the angle of the high-precision motor (first motor) to rotate the first reflector, and then control the angle of the reflected light (second light beam) by adjusting the high-precision motor (second motor) to rotate the second reflector, and finally transmit it to the galvanometer port through the second beam splitter to collect two light spots. The first motor and the second motor can be precisely controlled by software, and the rotation angle can be as high as 0.01 degrees, and the corresponding spacing can be adjusted from 10um to 10mm. Figure 3 As shown, the arrow directions are the transmission directions of the laser beam, the first beam, and the second beam.
[0045] In this embodiment, the output end of the first motor is connected to the input end of the first base side wall through the motor plate. Similarly, the output end of the second motor is connected to the input end of the second base side wall through the motor plate.
[0046] The technical means disclosed in the scheme of the present invention are not limited to the technical means disclosed in the above-mentioned implementation mode, but also include technical schemes composed of any combination of the above-mentioned technical features. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications are also regarded as the protection scope of the present invention.
Claims
1. A light splitting spacing control device, characterized in that: include: A laser input unit for outputting a laser beam; A beam expansion unit and a first beam splitter prism are sequentially arranged along the output direction of the laser beam, and the laser beam is respectively emitted as a first beam and a second beam through the first beam splitter prism; a second beam splitter prism for adjusting the output of the first light beam, the second beam splitter prism being arranged on one side of the first beam splitter prism, and the first light beam is emitted through the second beam splitter prism; A first light splitting adjustment component and a second light splitting adjustment component for adjusting the output path of the second light beam, wherein the first light splitting adjustment component is located at the rear side of the first light splitting prism, and the second light splitting adjustment component is disposed at the rear side of the second light splitting prism, and the second light beam is incident on the second light splitting prism after passing through the first light splitting adjustment component and the second light splitting adjustment component in sequence; the first light splitting adjustment component includes a first reflector and a first adjustable base, and the second light splitting adjustment component includes a second reflector and a second adjustable base; A laser output unit, wherein the first light beam and the second light beam are both output toward the laser output unit after passing through the second beam splitter prism.
2. The light splitting spacing control device according to claim 1, characterized in that: The laser input unit includes a laser and an aperture which are arranged in sequence; The laser output unit comprises a galvanometer mirror and a field mirror which are arranged in sequence.
3. The light splitting spacing control device according to claim 1, characterized in that: The first adjustable base includes a first motor and a first base, and the first motor causes the first reflector to rotate through the first base.
4. The light splitting spacing control device according to claim 3, characterized in that: The second adjustable base includes a second motor and a second base, and the second motor causes the second reflector to rotate through the second base.
5. The light splitting spacing control device according to claim 4, characterized in that: The first base and the second base both include a motor plate and a rotating base. The top of the rotating base is provided with an output end, and the side wall of the rotating base is provided with an input end.
6. The light splitting spacing control device according to claim 1, characterized in that: A first beam-cutting mirror is arranged between the first beam-splitting prism and the second beam-splitting prism.
7. The light splitting spacing control device according to claim 6, characterized in that: A second light-cutting mirror is arranged between the first light-splitting adjustment component and the second light-splitting adjustment component.
8. The light splitting spacing control device according to claim 1, characterized in that: The rotation angle unit of the first reflector and the rotation angle unit of the second reflector are 0.01 degrees.