Focus compensation coefficient determination method and system and focus compensation method and system of laser processing equipment

Abstract

The invention provides a focus compensation coefficient determination method and system and a focus compensation method and system of laser processing equipment, which are applied to the laser processing equipment, and the laser processing equipment comprises at least one laser lens. The method comprises the following steps: acquiring temperature change information corresponding to each laser lens; wherein the temperature change information comprises at least one temperature difference value, and each temperature difference value represents the difference between the temperature value of the laser lens under the condition that the laser lens receives the input laser of the target power and the temperature value of the laser lens under the condition that the laser lens does not receive the input laser; wherein the temperature difference values corresponding to the input lasers with different target powers are different; acquiring focus drift information of the laser processing equipment; wherein the focus drift information comprises at least one focus drift distance, and each focus drift distance corresponds to a target power; and according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment, determining a focus compensation coefficient corresponding to each laser lens.

Description

Technical Field

[0001] The present application relates to the field of laser processing technology, and in particular, to a focus compensation coefficient determination method and system, and a focus compensation method and system for laser processing equipment. Background Art

[0002] Laser processing technology is a technology that uses the characteristics of the interaction between laser beams and matter to cut, weld, surface treat, punch, micro-process materials (including metals and non-metals), and to act as a light source and identify objects. Laser processing technology is a technology that uses the characteristics of the interaction between laser beams and matter to cut, weld, surface treat, punch, micro-process materials (including metals and non-metals), and to act as a light source and identify objects.

[0003] As the laser processing market matures, the scope of laser use is also gradually expanding, which has led to a qualitative improvement in the power range of laser use. The power of existing lasers has increased from tens of watts to the current 100,000 watts. The increase in laser power has put higher and higher requirements on the lenses that can withstand it. A significant increase in laser power will make the temperature changes of the lens more drastic, and temperature changes will cause the shape and refractive index of the lens to change, thereby affecting the focal length of the lens, causing the focus point position of the laser to change, and then causing the material processing to fail to meet the processing requirements. For example, after the focal length of the lens changes, the cutting surface of the workpiece cut by the laser will become rougher and messier, resulting in the workpiece failing to meet the cutting requirements. Summary of the invention

[0004] The purpose of the embodiments of the present application is to provide a method and system for determining a focus compensation coefficient and a focus compensation method and system for laser processing equipment, so as to solve the problem that the laser processing is inaccurate and cannot meet the processing requirements due to the significant change in the focus position caused by the drastic change in lens temperature.

[0005] In a first aspect, the present invention provides a method for determining a focus compensation coefficient, which is applied to laser processing equipment, wherein the laser processing equipment includes at least one laser lens; the method includes: obtaining temperature change information corresponding to each laser lens; wherein the temperature change information includes at least one temperature difference, each temperature difference value represents the difference between a temperature value of the laser lens when receiving an input laser of a target power and a temperature value of the laser lens when not receiving the input laser; wherein the temperature difference values ​​corresponding to input lasers of different target powers are different; obtaining focus drift information of the laser processing equipment; wherein the focus drift information includes at least one focus drift amount, each focus drift amount corresponding to a target power; and determining a focus compensation coefficient corresponding to each laser lens based on the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment.

[0006] The focus compensation coefficient determination method designed above, this scheme calculates the focus compensation coefficient corresponding to the laser lens by detecting the temperature difference between the lens in the laser processing equipment when receiving laser input of different powers and when not receiving laser, and the focus drift of the laser processing equipment under the corresponding target power input laser. Then, under actual laser processing conditions, the focus drift corresponding to the laser lens can be obtained based on the temperature difference before and after the laser lens inputs the laser and the focus compensation coefficient obtained by the above calculation. In this way, the focus drift of the laser lens can be accurately compensated by the calculated focus compensation coefficient, reducing the influence of temperature on the lens focus, and improving the accuracy and reliability of laser processing. Since this scheme can calculate and calibrate the focus compensation coefficient of the laser lens in advance, the focus drift compensation under the actual working conditions of the laser processing equipment can be faster and more convenient.

[0007] In an optional implementation of the first aspect, the temperature change information corresponding to each laser lens is obtained, including: obtaining the temperature value of each laser lens when no input laser is received to obtain an initial temperature value; obtaining the temperature value of each laser lens when receiving at least one input laser of target power to obtain at least one power temperature value; calculating the difference between each power temperature value and the corresponding initial temperature value to obtain at least one temperature difference value corresponding to each laser lens.

[0008] In an optional implementation of the first aspect, a temperature field sensor is provided at each laser lens, and different temperature field sensors have the same angle toward the corresponding detected laser lens; the temperature value of each laser lens when receiving at least one input laser of a target power is obtained, and at least one power temperature value is obtained, including: when the corresponding laser lens receives an input laser of each target power, obtaining multiple detection temperature values ​​within a preset temperature grid range with the highest temperature value in the detection area of ​​the temperature field sensor as the center, transmitted by each temperature field sensor; calculating the temperature average of the multiple detection temperature values ​​within the preset temperature grid range, and obtaining the power temperature value corresponding to each temperature field sensor.

[0009] In the above-mentioned implementation mode, this scheme realizes the temperature detection of the laser lens by using the temperature field sensor with the same angle toward the corresponding detected laser lens, thereby reducing the temperature detection difference caused by inconsistent angles, avoiding the inaccuracy caused by angle variables, and further improving the accuracy of determining the focus compensation coefficient.

[0010] In an optional implementation of the first aspect, when the number of laser lenses is 1, the temperature difference corresponding to the laser lens, the input laser of the target power, and the focus drift amount are all 1; based on the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment, the focus compensation coefficient corresponding to each laser lens is determined, including: calculating the quotient of the focus drift amount of the laser equipment corresponding to the laser lens and the temperature difference corresponding to the laser lens, to obtain the focus compensation coefficient corresponding to the laser lens.

[0011] In an optional implementation of the first aspect, the focus compensation coefficient corresponding to each laser lens is determined according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment, including: using the focus compensation calculation formula According to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment, the focus compensation coefficient corresponding to each laser lens is determined, where the focus compensation calculation formula is for:

[0012]

[0013] Where k represents the total number of laser lenses, T ji It represents the power temperature value corresponding to the jth laser lens under the input laser of the ith target power, T 0 Indicates the initial temperature value corresponding to all laser lenses; represents the focus drift corresponding to the input laser of the i-th target power; K j represents the focus compensation coefficient corresponding to the j-th laser lens, i and j are variables, and their value ranges are both integers in [1, k].

[0014] In the above implementation mode, the focus compensation calculation formula designed in this scheme can calculate the focus compensation coefficients of any number of laser lenses in the laser processing equipment according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment, thereby significantly improving the applicability of this scheme.

[0015] In a second aspect, the present application provides a focus compensation method for laser processing equipment, the method comprising: obtaining a current temperature difference corresponding to each laser lens; wherein the current temperature difference represents the difference between the temperature value of the laser lens when it receives an input laser of current power and the temperature value of the laser lens when it does not receive an input laser; obtaining a focus compensation coefficient corresponding to each laser lens; wherein the focus compensation coefficient corresponding to each laser lens is determined according to the focus compensation coefficient determination method described in any optional implementation manner in the first aspect; calculating a current focus drift amount of the laser processing equipment according to the current temperature difference value corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens; and compensating the focus of the laser processing equipment according to the current focus drift amount of the laser processing equipment.

[0016] The focus compensation method of the laser processing equipment designed above, this scheme calculates the focus compensation coefficient corresponding to the laser lens by detecting the temperature difference between the lens in the laser processing equipment when receiving laser input of different powers and when not receiving laser, and the focus drift of the laser processing equipment under the corresponding target power input laser. Then, under actual laser processing conditions, the focus drift corresponding to the laser lens can be obtained based on the temperature difference before and after the laser lens inputs the laser and the focus compensation coefficient obtained by the above calculation. In this way, the focus drift of the laser lens can be accurately compensated by the calculated focus compensation coefficient, reducing the influence of temperature on the lens focus, and improving the accuracy and reliability of laser processing. Since this scheme can calculate and calibrate the focus compensation coefficient of the laser lens in advance, the focus drift compensation under the actual working conditions of the laser processing equipment can be faster and more convenient.

[0017] In an optional implementation of the second aspect, the current focus drift of the laser processing equipment is calculated based on the current temperature difference corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens, including: calculating the product of the current temperature difference corresponding to each laser lens and the focus compensation coefficient of the corresponding laser lens to obtain the lens focus drift corresponding to each laser lens; calculating the sum of the lens focus drifts corresponding to all laser lenses to obtain the current focus drift of the laser processing equipment.

[0018] In an optional implementation of the second aspect, the focus of the laser processing equipment is compensated according to the current focus drift of the laser processing equipment, including: calculating the current compensation distance corresponding to the focus drift actuator according to the current focus drift of the laser processing equipment; controlling the focus drift actuator to drive the target laser lens to move the current compensation distance to compensate for the focus of the laser processing equipment.

[0019] In a third aspect, the present application provides a focus compensation coefficient determination system, which includes a laser processing device, at least one temperature detection device, a focus drift detector and a computing device, wherein the laser processing device includes at least one laser lens, each temperature detection device is arranged at a laser lens, and the computing device is respectively connected to each temperature detection device and the focus drift detector for communication; the temperature detection device is used to collect the temperature value of the corresponding laser lens when it receives the input laser of the target power and the temperature value of the laser lens when it does not receive the input laser, and transmit the collected temperature value to the computing device; the focus drift detector is used to collect the focus drift information of the laser processing device, and transmit the focus drift information to the computing device, wherein the focus The point drift information includes at least one focus drift amount, each focus drift amount corresponds to a target power, and different focus drift amounts correspond to different target powers; a computing device is used to determine the temperature change information corresponding to each laser lens based on the temperature value transmitted by each temperature detection device, wherein the temperature change information includes at least one temperature difference value, each temperature difference value represents the difference between the temperature value of the laser lens when receiving an input laser with a target power and the temperature value of the laser lens when not receiving the input laser, wherein different temperature differences correspond to different target powers of the input laser; the computing device is also used to determine the focus compensation coefficient corresponding to each laser lens based on the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment.

[0020] The focus compensation coefficient determination system designed above, this scheme calculates the focus compensation coefficient corresponding to the laser lens by detecting the temperature difference between the lens in the laser processing equipment when receiving laser input of different powers and when not receiving laser, and the focus drift of the laser processing equipment under the corresponding target power input laser. Then, under actual laser processing conditions, the focus drift corresponding to the laser lens can be obtained based on the temperature difference before and after the laser lens inputs the laser and the focus compensation coefficient obtained by the above calculation. In this way, the focus drift of the laser lens can be accurately compensated by the calculated focus compensation coefficient, reducing the influence of temperature on the lens focus, and improving the accuracy and reliability of laser processing. Since this scheme can calculate and calibrate the focus compensation coefficient of the laser lens in advance, the focus drift compensation under the actual working conditions of the laser processing equipment can be faster and more convenient.

[0021] In a fourth aspect, the present application provides a focus compensation system for a laser processing device, the focus compensation system for the laser processing device comprising: a laser processing device, at least one temperature detection device, a computing device and a focus drift actuator; the computing device is respectively connected to each temperature detection device and the focus drift actuator in communication, the laser processing device comprises at least one laser lens, each temperature detection device is arranged at a laser lens; the temperature detection device is used to collect the temperature value of the corresponding laser lens when it receives the input laser of the current power and the temperature value of the laser lens when it does not receive the input laser, and transmit the collected temperature values ​​to the computing device; the computing device is used to obtain the current temperature difference value corresponding to each laser lens, wherein the current temperature difference The value represents the difference between the temperature value of the laser lens when it receives the input laser of the current power and the temperature value of the laser lens when it does not receive the input laser; obtaining the focus compensation coefficient corresponding to each laser lens, wherein the focus compensation coefficient corresponding to each laser lens is determined according to the focus compensation coefficient determination method described in any optional implementation manner in the first aspect; calculating the current focus drift amount of the laser processing equipment according to the current temperature difference value corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens; calculating the current compensation distance corresponding to the focus drift actuator according to the current focus drift amount of the laser processing equipment; and controlling the focus drift actuator to drive the target laser lens to move the current compensation distance to compensate for the focus of the laser processing equipment.

[0022] The focus compensation system of the laser processing equipment designed as above, this scheme calculates the focus compensation coefficient corresponding to the laser lens by detecting the temperature difference between the lens in the laser processing equipment when receiving laser input of different powers and when not receiving laser, and the focus drift of the laser processing equipment under the corresponding target power input laser. Then, under actual laser processing conditions, the focus drift corresponding to the laser lens can be obtained based on the temperature difference before and after the laser lens inputs the laser and the focus compensation coefficient obtained by the above calculation. In this way, the focus drift of the laser lens can be accurately compensated by the calculated focus compensation coefficient, reducing the influence of temperature on the lens focus, and improving the accuracy and reliability of laser processing. Since this scheme can calculate and calibrate the focus compensation coefficient of the laser lens in advance, the focus drift compensation under the actual working conditions of the laser processing equipment can be faster and more convenient.

[0023] In a fifth aspect, the present invention provides an electronic device comprising a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, the method described in the first aspect, any optional implementation of the first aspect, or the second aspect, any optional implementation of the second aspect is executed.

[0024] In a sixth aspect, the present invention provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the method described in the first aspect, any optional implementation of the first aspect, or the second aspect, any optional implementation of the second aspect is performed.

[0025] In the seventh aspect, the present invention provides a computer program product, comprising a computer program / instruction, which, when executed by a processor, performs the method described in the first aspect, any optional implementation of the first aspect, or the second aspect, any optional implementation of the second aspect.

[0026] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 A schematic diagram of the structure of a focus compensation coefficient determination system provided in an embodiment of the present application;

[0029] Figure 2 A schematic diagram of a flow chart of a method for determining a focus compensation coefficient provided in an embodiment of the present application;

[0030] Figure 3 A schematic diagram of the structure of a focus compensation system for a laser processing device provided in an embodiment of the present application;

[0031] Figure 4 A schematic flow chart of a focus compensation method for laser processing equipment provided in an embodiment of the present application;

[0032] Figure 5 A schematic diagram of the structure of a focus compensation coefficient determination device provided in an embodiment of the present application;

[0033] Figure 6 A schematic diagram of the structure of a focus compensation device for laser processing equipment provided in an embodiment of the present application;

[0034] Figure 7 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application.

[0035] Icons: 10 - laser processing equipment; 110 - laser lens; 20 - temperature detection equipment; 30 - focus drift detector; 40 - computing equipment; 50 - focus drift actuator; 500 - first acquisition module; 510 - determination module; 600 - second acquisition module; 610 - computing module; 620 - compensation module; 7 - electronic equipment; 701 - processor; 702 - memory; 703 - communication bus. DETAILED DESCRIPTION

[0036] The following embodiments of the technical solution of the present application are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0037] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned figure descriptions and any variations thereof are intended to cover non-exclusive inclusions.

[0038] In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0039] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0040] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of the associated objects, indicating that there may be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0041] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0042] In the description of the embodiments of the present application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the embodiments of the present application.

[0043] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0044] Laser processing technology is a technology that uses the characteristics of the interaction between laser beams and matter to cut, weld, surface treat, punch, micro-process materials (including metals and non-metals), and to act as a light source and identify objects. Laser processing technology is a technology that uses the characteristics of the interaction between laser beams and matter to cut, weld, surface treat, punch, micro-process materials (including metals and non-metals), and to act as a light source and identify objects.

[0045] As the laser processing market matures, the scope of laser use is also gradually expanding, which has led to a qualitative improvement in the power range of laser use. The power of existing lasers has increased from tens of watts to the current 100,000 watts. The increase in laser power has put higher and higher requirements on the lenses that can withstand it. A significant increase in laser power will make the temperature changes of the lens more drastic, and temperature changes will cause the shape and refractive index of the lens to change, thereby affecting the focal length of the lens, causing the focus point position of the laser to change, and then causing the material processing to fail to meet the processing requirements. For example, after the focal length of the lens changes, the cutting surface of the workpiece cut by the laser will become rougher and messier, resulting in the workpiece failing to meet the cutting requirements.

[0046] Based on the above problems, the present application designs a focus compensation coefficient determination method and system and a focus compensation method and system for laser processing equipment. The present solution calculates the focus compensation coefficient corresponding to the laser lens by detecting the temperature difference between the lens in the laser processing equipment when receiving laser input of different powers and when not receiving laser, as well as the focus drift of the laser processing equipment under the corresponding target power input laser. Then, under actual laser processing conditions, the focus drift corresponding to the laser lens can be obtained based on the temperature difference before and after the laser lens inputs the laser and the focus compensation coefficient obtained by the above calculation. In this way, the focus drift of the laser lens can be accurately compensated by the calculated focus compensation coefficient, thereby reducing the influence of temperature on the lens focus and improving the accuracy and reliability of laser processing. Since the present solution can calculate and calibrate the focus compensation coefficient of the laser lens in advance, the focus drift compensation under the actual working conditions of the laser processing equipment can be faster and more convenient.

[0047] Based on the above ideas, the present application first provides a method for determining a focus compensation coefficient, which can be applied to a focus compensation coefficient determination system, such as Figure 1 As shown, the focus compensation coefficient determination system includes a laser processing device 10, at least one temperature detection device 20, a focus drift detector 30 and a computing device 40. The laser processing device 10 includes at least one laser lens 110. Each temperature detection device 20 is arranged at a laser lens 110. The computing device 40 is respectively connected to each temperature detection device 20 and the focus drift detector 30 for communication. The method is applied to the computing device 40, and the computing device 40 may include a computer, a server, a chip, a host computer and a controller. Figure 2 As shown, the method can be implemented by the following methods, including:

[0048] Step S200: Acquire temperature change information corresponding to each laser lens.

[0049] Step S210: Acquire focus drift information of laser processing equipment.

[0050] Step S220: determining a focus compensation coefficient corresponding to each laser lens according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment.

[0051] In the above embodiment, the laser lens refers to a lens in the laser processing device 10 that modulates the optical path of the input laser. The number of laser lenses may be one or more, and may be adjusted according to the application scenario of the laser processing device 10 in actual situations. The temperature change information of the laser lens includes at least one temperature difference value, and each temperature difference value represents the difference between the temperature value of the laser lens when receiving the input laser of the target power and the temperature value of the laser lens when not receiving the input laser. The temperature difference values ​​corresponding to the input lasers of different target powers are different.

[0052] As a possible implementation method, the present invention can first obtain the temperature value of each laser lens when no input laser is received to obtain the initial temperature value. Specifically, the initial temperature values ​​of all laser lenses of the laser processing equipment at room temperature are the same and are all at room temperature. Assuming that the initial temperature values ​​are all T 0 Then, this solution can obtain the temperature value of each laser lens when it receives at least one target power input laser, and obtain at least one power temperature value T ji , where T ji It represents the power temperature value corresponding to the jth laser lens under the input laser of the ith target power, and then calculates each power temperature value T ji Corresponding to the initial temperature value T 0 The temperature value of each laser lens can be detected by a temperature detection device 20 disposed at the corresponding laser lens position, and the detected temperature value can be transmitted to a computing device to obtain the temperature difference value.

[0053] For example, assuming that the laser processing device 10 includes two laser lenses 110, namely, laser lens 110A and laser lens 110B, and the laser processing device 10 successively receives two input lasers with target power P1 and target power P2. In this case, the laser lens 110A includes two temperature difference values, which are T A1 -T0 and T A2 -T0; The laser lens 110B includes two temperature differences, which are T B1 -T0 and T B2 -T0.

[0054] Specifically, as a possible implementation, the temperature detection device 20 provided in the present solution may be a temperature field sensor. Different temperature field sensors have the same angle θ toward the corresponding detection laser lens, which can reduce the inaccuracy caused by variables.

[0055] Specifically, in the case of obtaining power temperature values, this solution can obtain multiple detection temperature values ​​within a preset temperature grid range, centered on the highest temperature value within the detection area of ​​the temperature field sensor, transmitted by each temperature field sensor when the corresponding laser lens receives an input laser of each target power; calculate the temperature average of the multiple detection temperature values ​​within the preset temperature grid range to obtain the power temperature value corresponding to each temperature field sensor.

[0056] As a possible example, the temperature field sensor of each laser lens can present a 32x24 temperature detection grid (detection area). This solution can capture the temperature grid I1 with the highest temperature, and radiate a 3x3 nine-square grid with the grid I1 with the highest temperature as the center, and then calculate the average temperature value of the 3x3 nine-square grid with the grid I1 with the highest temperature as the center, so as to obtain the power temperature value corresponding to each laser lens.

[0057] This solution can also obtain the focus drift information of the laser processing equipment, wherein the focus drift information includes at least one focus drift amount, each focus drift amount corresponds to a target power, that is, a focus drift amount can be obtained under each target power input laser. Specifically, when a target power input laser is input to the laser processing equipment, the overall focus drift information of the laser output by the laser processing equipment can be detected and obtained by the focus drift detector described above, thereby obtaining a focus drift amount.

[0058] It should be noted here that the step of obtaining the focus drift amount in this solution and the step of obtaining the temperature change information of the lens in the previous text can be performed in sequence or simultaneously, and can be adjusted according to the actual application scenario.

[0059] When the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment are obtained in the above manner, this scheme can determine the focus compensation coefficient corresponding to each laser lens based on the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment.

[0060] Specifically, this solution can use the focus compensation calculation formula According to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment, the focus compensation coefficient corresponding to each laser lens is determined, wherein the focus compensation calculation formula is for:

[0061]

[0062] Where k represents the total number of laser lenses, T jiIt represents the power temperature value corresponding to the jth laser lens under the input laser of the ith target power, T 0 Indicates the initial temperature value corresponding to all laser lenses; represents the focus drift corresponding to the input laser of the i-th target power; K j represents the focus compensation coefficient corresponding to the j-th laser lens, i and j are variables, and their value ranges are both integers in [1, k].

[0063] The above calculation process can be explained by the following example:

[0064] Assume that there is only one laser lens in the laser processing equipment, that is, k = 1. In this case, the input laser can only have one target power, which is assumed to be P1, that is, i and j are also equal to 1. Assume that after the input laser with target power P1 is input to the laser processing equipment, the focus drift amount obtained by the output laser detection of the laser processing equipment is In this case, the above formula can be:

[0065]

[0066] because is the detected focus drift, T 11 -T 0 To detect the temperature change information of the laser lens, the focus compensation coefficient K corresponding to the lens can be calculated. 1 The value of .

[0067] Further, it is assumed that there are two laser lenses in the laser processing equipment, namely, laser lens 110A and laser lens 110B. In this case, the input laser can be input using two input lasers with different target powers. It is assumed that the target powers are P1 and P2, that is, i and j vary between 1 and 2. The above formula can be transformed into the following simultaneous formula:

[0068]

[0069] because as well as The focus drift is detected when the input laser target power is P1 and P2, which is a known quantity, T A1 -T 0 is the temperature change information detected by the laser lens 110A when the input laser has the target power P1, T A1 -T 0 is the temperature change information detected by the laser lens 110A when the input laser has the target power P1, T B1 -T 0is the temperature change information detected by the laser lens 110B when the input laser has the target power P1, T A2 -T 0 is the temperature change information detected by the laser lens 110A when the input laser has the target power P2, T B2 -T 0 is the temperature change information detected by the laser lens 110B when the input laser has the target power P2. Therefore, the focus compensation coefficient K corresponding to the laser lens 110A can be calculated by combining the two formulas. 1 And the focus compensation coefficient K corresponding to the laser lens 110B 2 The value of .

[0070] Furthermore, assuming that the number of laser lenses in the laser processing equipment is Figure 1 The six laser lenses shown are laser lens 110A, laser lens 110B, laser lens 110C, laser lens 110D, laser lens 110E and laser lens 110F. In this case, the input laser can be input with six different target powers. Assuming that the target powers are P1, P2, P3, P4, P5 and P6, that is, i and j vary between 1 and 6, the above formula can be transformed into the following simultaneous formula:

[0071]

[0072] because as well as The focus drift is detected when the input laser target power is P1 to P6, which is a known quantity, T A1 -T 0 is the temperature change information detected by the laser lens 110A when the input laser has the target power P1, T A1 -T 0 is the temperature change information detected by the laser lens 110A when the input laser has the target power P1, T B1 -T 0 is the temperature change information detected by the laser lens 110B when the input laser has the target power P1, T A2 -T 0 is the temperature change information detected by the laser lens 110A when the input laser has the target power P2, T B2 -T 0 is the temperature change information detected by the laser lens 110B when the input laser has the target power P2. Similarly, the focus compensation coefficient K corresponding to the laser lens 110A can be calculated by combining the six formulas: 1, the focus compensation coefficient K corresponding to the laser lens 110B 2 , the focus compensation coefficient K corresponding to the laser lens 110C 3 , the focus compensation coefficient K corresponding to the laser lens 110D 4 , the focus compensation coefficient K corresponding to the laser lens 110E 5 And the focus compensation coefficient K corresponding to the laser lens 110F 6 The value of .

[0073] Specifically, this solution can use Gaussian elimination and matrix inversion methods to quickly solve the above-mentioned simultaneous equations. Of course, it can also be solved quickly with the help of software. For example, in Matlab, you can use the backslash operator to solve, or use functions such as rref (row simplest form function) combined with Gaussian elimination to solve; in Python, you can use functions of the NumPy library such as linalg.solve to solve the linear equations.

[0074] Through the above calculation formula, this solution can calculate the focus compensation coefficient of any number of laser lenses in the laser processing equipment according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment, thereby significantly improving the applicability of this solution.

[0075] The focus compensation coefficient determination method designed above, this scheme calculates the focus compensation coefficient corresponding to the laser lens by detecting the temperature difference between the lens in the laser processing equipment when receiving laser input of different powers and when not receiving laser, and the focus drift of the laser processing equipment under the corresponding target power input laser. Then, under actual laser processing conditions, the focus drift corresponding to the laser lens can be obtained based on the temperature difference before and after the laser lens inputs the laser and the focus compensation coefficient obtained by the above calculation. In this way, the focus drift of the laser lens can be accurately compensated by the calculated focus compensation coefficient, reducing the influence of temperature on the lens focus, and improving the accuracy and reliability of laser processing. Since this scheme can calculate and calibrate the focus compensation coefficient of the laser lens in advance, the focus drift compensation under the actual working conditions of the laser processing equipment can be faster and more convenient.

[0076] The present application also provides a focus compensation method for laser processing equipment, which can be applied to a focus compensation system of a laser processing equipment, such as Figure 3As shown, the focus compensation system of the laser processing equipment includes: a laser processing equipment 10, at least one temperature detection device 20, a computing device 40 and a focus drift actuator 50; the computing device 40 is respectively connected to each temperature detection device 20 and the focus drift actuator 50 for communication, the laser processing equipment 10 includes at least one laser lens 110, each temperature detection device 20 is arranged at a laser lens 110, and the focus compensation method designed in this scheme can be applied to the computing device 40, and the computing device 40 may include a computer, a server, a chip, a host computer and a controller, etc. Figure 4 As shown, the method can be implemented by the following methods, including:

[0077] Step S400: Obtain the current temperature difference corresponding to each laser lens.

[0078] Step S410: Obtaining the focus compensation coefficient corresponding to each laser lens.

[0079] Step S420: Calculate the current focus drift of the laser processing equipment according to the current temperature difference corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens.

[0080] Step S430: Compensating the focus of the laser processing equipment according to the current focus drift of the laser processing equipment.

[0081] The above-mentioned embodiment represents the scenario of the laser processing equipment 10 under actual processing conditions. The current temperature difference of the laser lens represents the difference between the temperature value of the laser lens when it receives the input laser of the current power and the temperature value of the laser lens when it does not receive the input laser under actual conditions. The temperature value of the laser lens can be obtained by detection through a temperature detection device, and its detection principle is consistent with the detection principle described above, which will not be repeated here.

[0082] The focus compensation coefficient corresponding to the laser lens is the focus compensation coefficient determined by the focus compensation coefficient determination method described above, wherein the focus compensation coefficient of each lens can be stored in advance in the computing device 40, for example, the focus compensation coefficient K corresponding to the laser lens 110A is 1 , the focus compensation coefficient K corresponding to the laser lens 110B 2 , the focus compensation coefficient K corresponding to the laser lens 110C 3 , the focus compensation coefficient K corresponding to the laser lens 110D 4 , the focus compensation coefficient K corresponding to the laser lens 110E 5 And the focus compensation coefficient K corresponding to the laser lens 110F 6 , can all be stored in the computing device 40, and the value of each focus compensation coefficient can be mapped to the label of the corresponding laser lens.

[0083] When the current temperature difference corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens are obtained in the above manner, this scheme can calculate the current focus drift of the laser processing equipment based on the current temperature difference corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens.

[0084] Specifically, as a possible implementation method, the present scheme can calculate the product of the current temperature difference corresponding to each laser lens and the focus compensation coefficient of the corresponding laser lens to obtain the lens focus drift corresponding to each laser lens; calculate the sum of the lens focus drifts corresponding to all laser lenses to obtain the current focus drift of the laser processing equipment.

[0085] For example, the laser lenses of the laser processing equipment are respectively laser lens 110A, laser lens 110B, laser lens 110C, laser lens 110D, laser lens 110E and laser lens 110F. Assuming that the incident power of the input laser is Pn, the temperature value of the laser lens 110A under the input laser is T An The temperature of the laser lens 110B under the input laser is T Bn The temperature of the laser lens 110C under the input laser is T Cn The temperature of the laser lens 110D under the input laser is T Dn The temperature of the laser lens 110E under the input laser is T En The temperature of the laser lens 110F under the input laser is T Fn , in this case, the current focus drift of the laser processing equipment is:

[0086]

[0087] Among them, T 0 Indicates that the initial temperature of all laser lenses is a known quantity. Therefore, the temperature difference of each laser lens is a known quantity, and the focus compensation coefficient of each laser lens is also a known quantity. From this, the current focus drift of the laser processing equipment can be calculated.

[0088] The current focus drift of the laser processing equipment is calculated by the above method In this case, the current focus drift is calculated based on Compensate the focus of laser processing equipment.

[0089] Specifically, as a possible implementation method, this solution can calculate the current compensation distance corresponding to the focus drift actuator according to the current focus drift amount of the laser processing equipment; control the focus drift actuator to drive the target laser lens to move the current compensation distance, thereby realizing the focus compensation of the laser processing equipment. Among them, the focus drift actuator drives the laser lens to move for compensation. Any of the currently mature compensation methods can be adopted, and the specific method can be adjusted according to the actual application scenario, and this application does not limit this.

[0090] The focus compensation method of the laser processing equipment designed above, this scheme calculates the focus compensation coefficient corresponding to the laser lens by detecting the temperature difference between the lens in the laser processing equipment when receiving laser input of different powers and when not receiving laser, and the focus drift of the laser processing equipment under the corresponding target power input laser. Then, under actual laser processing conditions, the focus drift corresponding to the laser lens can be obtained based on the temperature difference before and after the laser lens inputs the laser and the focus compensation coefficient obtained by the above calculation. In this way, the focus drift of the laser lens can be accurately compensated by the calculated focus compensation coefficient, reducing the influence of temperature on the lens focus, and improving the accuracy and reliability of laser processing. Since this scheme can calculate and calibrate the focus compensation coefficient of the laser lens in advance, the focus drift compensation under the actual working conditions of the laser processing equipment can be faster and more convenient.

[0091] Figure 5 The present application provides a schematic structural block diagram of a focus compensation coefficient determination device. It should be understood that the device is applied to the computing device described above. Figure 2The method embodiment executed in corresponds to the method embodiment, and the steps involved in the aforementioned method can be executed. The specific functions of the device can be referred to the description above. To avoid repetition, detailed description is appropriately omitted here. The device includes at least one software function module that can be stored in a memory or fixed in the operating system (OS) of the device in the form of software or firmware. Specifically, the device includes: a first acquisition module 500 and a determination module 510, the first acquisition module 500 is used to obtain temperature change information corresponding to each laser lens; wherein the temperature change information includes at least one temperature difference value, each temperature difference value represents the difference between the temperature value of the laser lens when receiving the input laser of the target power and the temperature value of the laser lens when not receiving the input laser; wherein the temperature difference values ​​corresponding to the input lasers of different target powers are different; obtain the focus drift information of the laser processing equipment; wherein the focus drift information includes at least one focus drift amount, each focus drift amount corresponds to a target power; the determination module 510 is used to determine the focus compensation coefficient corresponding to each laser lens according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment.

[0092] The focus compensation coefficient determination device designed above, this scheme calculates the focus compensation coefficient corresponding to the laser lens by detecting the temperature difference between the lens in the laser processing equipment when receiving laser input of different powers and when not receiving laser, and the focus drift of the laser processing equipment under the corresponding target power input laser. Then, under actual laser processing conditions, the focus drift corresponding to the laser lens can be obtained based on the temperature difference before and after the laser lens inputs the laser and the focus compensation coefficient obtained by the above calculation. In this way, the focus drift of the laser lens can be accurately compensated by the calculated focus compensation coefficient, reducing the influence of temperature on the focus of the lens, and improving the accuracy and reliability of laser processing. Since this scheme can calculate and calibrate the focus compensation coefficient of the laser lens in advance, the focus drift compensation under the actual working conditions of the laser processing equipment can be faster and more convenient.

[0093] In an optional implementation of the present embodiment, the first acquisition module 500 is specifically used to obtain the temperature value of each laser lens when no input laser is received to obtain an initial temperature value; obtain the temperature value of each laser lens when it receives at least one input laser of target power to obtain at least one power temperature value; calculate the difference between each power temperature value and the corresponding initial temperature value to obtain at least one temperature difference value corresponding to each laser lens.

[0094] In an optional implementation of the present embodiment, a temperature field sensor is provided at each laser lens, and different temperature field sensors have the same angle toward the corresponding detection laser lens; the first acquisition module 500 is also specifically used to obtain, when the corresponding laser lens receives an input laser of each target power, a plurality of detection temperature values ​​within a preset temperature grid range centered on the highest temperature value within the detection area of ​​the temperature field sensor, transmitted by each temperature field sensor; and calculate the temperature average of the plurality of detection temperature values ​​within the preset temperature grid range to obtain the power temperature value corresponding to each temperature field sensor.

[0095] In an optional implementation of the present embodiment, when the number of laser lenses is 1, the temperature difference corresponding to the laser lens, the input laser of the target power, and the focus drift are all 1; the determination module 510 is specifically used to calculate the quotient of the focus drift of the laser device corresponding to the laser lens and the temperature difference corresponding to the laser lens, and obtain the focus compensation coefficient corresponding to the laser lens.

[0096] In an optional implementation of this embodiment, the determination module 510 is further specifically configured to use a focus compensation calculation formula: According to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment, the focus compensation coefficient corresponding to each laser lens is determined, where the focus compensation calculation formula is for: 1≤i≤k; where k represents the total number of laser lenses, T ji It represents the power temperature value corresponding to the jth laser lens under the input laser of the ith target power, T 0 Indicates the initial temperature value corresponding to all laser lenses; represents the focus drift corresponding to the input laser of the i-th target power; K j represents the focus compensation coefficient corresponding to the j-th laser lens, i and j are variables, and their value ranges are both integers in [1, k].

[0097] Figure 6 The present application provides a schematic structural block diagram of a focus compensation device for a laser processing device. It should be understood that the device is applied to the computing device described above. Figure 4The method embodiment executed in the embodiment corresponds to the method embodiment, and the steps involved in the aforementioned method can be executed. The specific functions of the device can be referred to the description above. To avoid repetition, the detailed description is appropriately omitted here. The device includes at least one software function module that can be stored in the memory in the form of software or firmware or solidified in the operating system (OS) of the device. Specifically, the device includes: a second acquisition module 600, a calculation module 610 and a compensation module 620, the second acquisition module 600 is used to obtain the current temperature difference corresponding to each laser lens; wherein the current temperature difference represents the difference between the temperature value of the laser lens when receiving the input laser of the current power and the temperature value of the laser lens when not receiving the input laser; obtain the focus compensation coefficient corresponding to each laser lens; wherein the focus compensation coefficient corresponding to each laser lens is determined according to the focus compensation coefficient determination method described in any optional embodiment of the first aspect; the calculation module 610 is used to calculate the current focus drift of the laser processing equipment according to the current temperature difference corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens; the compensation module 620 is used to compensate the focus of the laser processing equipment according to the current focus drift of the laser processing equipment.

[0098] The focus compensation device of the laser processing equipment designed as above, this scheme calculates the focus compensation coefficient corresponding to the laser lens by detecting the temperature difference between the lens in the laser processing equipment when receiving laser input of different powers and when not receiving laser, and the focus drift of the laser processing equipment under the corresponding target power input laser. Then, under actual laser processing conditions, the focus drift corresponding to the laser lens can be obtained based on the temperature difference before and after the laser lens inputs the laser and the focus compensation coefficient obtained by the above calculation. In this way, the focus drift of the laser lens can be accurately compensated by the calculated focus compensation coefficient, reducing the influence of temperature on the focus of the lens, and improving the accuracy and reliability of laser processing. Since this scheme can calculate and calibrate the focus compensation coefficient of the laser lens in advance, the focus drift compensation under the actual working conditions of the laser processing equipment can be faster and more convenient.

[0099] In an optional implementation of the present embodiment, the calculation module 610 is specifically used to calculate the product of the current temperature difference corresponding to each laser lens and the focus compensation coefficient of the corresponding laser lens to obtain the lens focus drift corresponding to each laser lens; calculate the sum of the lens focus drifts corresponding to all laser lenses to obtain the current focus drift of the laser processing equipment.

[0100] In an optional implementation of this embodiment, the compensation module 620 is specifically used to calculate the current compensation distance corresponding to the focus drift actuator according to the current focus drift of the laser processing equipment; control the focus drift actuator to drive the target laser lens to move the current compensation distance to compensate for the focus of the laser processing equipment.

[0101] According to some embodiments of the present application, Figure 7 As shown, the present application provides an electronic device 7, including: a processor 701 and a memory 702, the processor 701 and the memory 702 are interconnected and communicate with each other through a communication bus 703 and / or other forms of connection mechanisms (not shown), the memory 702 stores a computer program executable by the processor 701, when the computing device is running, the processor 701 executes the computer program, and executes a method of any optional implementation method, such as steps S200 to S220: obtaining temperature change information corresponding to each laser lens; obtaining focus drift information of the laser processing device; determining the focus compensation coefficient corresponding to each laser lens according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing device. Or executing steps S400 to S430: obtaining the current temperature difference corresponding to each laser lens; obtaining the focus compensation coefficient corresponding to each laser lens; calculating the current focus drift amount of the laser processing device according to the current temperature difference corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens; and compensating the focus of the laser processing device according to the current focus drift amount of the laser processing device.

[0102] The present application provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the method in any of the aforementioned optional implementations is executed.

[0103] Among them, the storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable red-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, disk or optical disk.

[0104] The present application provides a computer program product. When the computer program product is run on a computer, the computer is enabled to execute the method in any optional implementation manner.

[0105] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should all be included in the scope of the claims and specification of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in the various embodiments can be combined in any way. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

Claims

1. A method for determining a focus compensation coefficient, characterized in that: The method is applied to a laser processing device, the laser processing device comprising at least one laser lens; The method comprises: Acquire temperature change information corresponding to each laser lens; wherein the temperature change information includes at least one temperature difference value, each temperature difference value represents the difference between the temperature value of the laser lens when receiving an input laser of a target power and the temperature value of the laser lens when not receiving the input laser; wherein the temperature difference values ​​corresponding to input lasers of different target powers are different; Acquiring focus drift information of the laser processing equipment; wherein the focus drift information includes at least one focus drift amount, and each focus drift amount corresponds to a target power; The focus compensation coefficient corresponding to each laser lens is determined according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment.

2. The method according to claim 1, characterized in that The obtaining of temperature change information corresponding to each laser lens includes: Obtaining the temperature value of each laser lens when no input laser is received to obtain an initial temperature value; Acquire a temperature value of each laser lens when receiving at least one input laser of target power, and obtain at least one power temperature value; The difference between each power temperature value and the corresponding initial temperature value is calculated to obtain at least one temperature difference value corresponding to each laser lens.

3. The method according to claim 2, characterized in that in, A temperature field sensor is provided at each laser lens, and different temperature field sensors have the same angle toward the corresponding laser lens to be detected; The step of obtaining the temperature value of each laser lens when receiving at least one input laser of target power to obtain at least one power temperature value comprises: When the corresponding laser lens receives the input laser of each target power, a plurality of detected temperature values ​​within a preset temperature grid range, centered on the highest temperature value in the detection area of ​​the temperature field sensor, transmitted by each temperature field sensor are obtained; The temperature average value of multiple detected temperature values ​​within the preset temperature grid range is calculated to obtain the power temperature value corresponding to each temperature field sensor.

4. The method according to claim 1, characterized in that: When the number of laser lenses is 1, the temperature difference, the input laser of the target power, and the focus drift amount corresponding to the laser lens are all 1; Determining the focus compensation coefficient corresponding to each laser lens according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment includes: The quotient of the focus drift amount of the laser device corresponding to the laser lens and the temperature difference corresponding to the laser lens is calculated to obtain the focus compensation coefficient corresponding to the laser lens.

5. The method according to claim 1, characterized in that Determining the focus compensation coefficient corresponding to each laser lens according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment includes: Use focus compensation calculation formula According to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment, the focus compensation coefficient corresponding to each laser lens is determined, wherein the focus compensation calculation formula is for: Where k represents the total number of laser lenses, T ji represents the power temperature value corresponding to the j-th laser lens under the input laser of the i-th target power, and T0 represents the initial temperature value corresponding to all laser lenses; represents the focus drift corresponding to the input laser of the i-th target power; K j represents the focus compensation coefficient corresponding to the j-th laser lens, i and j are variables, and their value ranges are both integers in [1, k].

6. A focus compensation method for laser processing equipment, characterized in that: The method comprises: Obtaining a current temperature difference value corresponding to each laser lens; wherein the current temperature difference value represents a difference between a temperature value of the laser lens when receiving an input laser of current power and a temperature value of the laser lens when not receiving an input laser; Obtaining a focus compensation coefficient corresponding to each laser lens; wherein the focus compensation coefficient corresponding to each laser lens is determined according to the focus compensation coefficient determination method described in any one of claims 1 to 5; Calculating the current focus drift of the laser processing equipment according to the current temperature difference corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens; The focus of the laser processing equipment is compensated according to the current focus drift of the laser processing equipment.

7. The method according to claim 6, characterized in that The method of calculating the current focus drift of the laser processing equipment according to the current temperature difference corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens includes: Calculate the product of the current temperature difference corresponding to each laser lens and the focus compensation coefficient of the corresponding laser lens to obtain the lens focus drift corresponding to each laser lens; The sum of the lens focus drift amounts corresponding to all laser lenses is calculated to obtain the current focus drift amount of the laser processing equipment.

8. The method according to claim 6, characterized in that The compensating the focus of the laser processing equipment according to the current focus drift of the laser processing equipment comprises: Calculating a current compensation distance corresponding to a focus drift actuator according to a current focus drift amount of the laser processing equipment; The focus drift actuator is controlled to drive the target laser lens to move the current compensation distance to compensate the focus of the laser processing equipment.

9. A focus compensation coefficient determination system, characterized in that: The focus compensation coefficient determination system comprises a laser processing device, at least one temperature detection device, a focus drift detector and a computing device, wherein the laser processing device comprises at least one laser lens, each temperature detection device is arranged at a laser lens, and the computing device is respectively connected to each temperature detection device and the focus drift detector in communication; The temperature detection device is used to collect the temperature value of the corresponding laser lens when receiving the input laser of the target power and the temperature value of the laser lens when not receiving the input laser, and transmit the collected temperature values ​​to the calculation device; The focus drift detector is used for focus drift information of laser processing equipment and transmits the focus drift information to the computing device, wherein the focus drift information includes at least one focus drift amount, each focus drift amount corresponds to a target power, and different focus drift amounts correspond to different target powers; The computing device is used to determine the temperature change information corresponding to each laser lens according to the temperature value transmitted by each temperature detection device, wherein the temperature change information includes at least one temperature difference value, each temperature difference value represents the difference between the temperature value of the laser lens when receiving the input laser of the target power and the temperature value of the laser lens when not receiving the input laser, wherein different temperature difference values ​​correspond to different target powers of the input laser; The calculation device is also used to determine the focus compensation coefficient corresponding to each laser lens according to the temperature change information corresponding to each laser lens and the focus drift information of the laser processing equipment.

10. A focus compensation system for laser processing equipment, characterized in that: The focus compensation system of the laser processing equipment comprises: a laser processing equipment, at least one temperature detection device, a computing device and a focus drift actuator; the computing device is respectively connected to each temperature detection device and the focus drift actuator in communication, the laser processing equipment comprises at least one laser lens, and each temperature detection device is arranged at a laser lens; The temperature detection device is used to collect the temperature value of the corresponding laser lens when it receives the input laser of the current power and the temperature value of the laser lens when it does not receive the input laser, and transmit the collected temperature values ​​to the calculation device; The calculation device is used to obtain a current temperature difference value corresponding to each laser lens, wherein the current temperature difference value represents a difference between a temperature value of the laser lens when receiving an input laser of current power and a temperature value of the laser lens when not receiving an input laser; obtain a focus compensation coefficient corresponding to each laser lens, wherein the focus compensation coefficient corresponding to each laser lens is determined according to a focus compensation coefficient determination method according to any one of claims 1 to 5; calculate a current focus drift amount of the laser processing device according to the current temperature difference value corresponding to each laser lens and the focus compensation coefficient corresponding to each laser lens; The current compensation distance corresponding to the focus drift actuator is calculated according to the current focus drift amount of the laser processing equipment; the focus drift actuator is controlled to drive the target laser lens to move the current compensation distance to compensate the focus of the laser processing equipment.

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