Auxiliary platform, multi-directional auxiliary platform and semiconductor device

Abstract

The invention provides an auxiliary platform, a multi-directional auxiliary platform and semiconductor equipment, and relates to the technical field of semiconductors, the auxiliary platform comprises a first base and a first driving mechanism which are movably arranged in sequence in a laminated mode, and the moving end, deviating from the first base, of the first driving mechanism can reciprocate relative to the first base in the first direction; the reading assembly is arranged between the first base and the moving end of the first driving mechanism; wherein the moving end of the first driving mechanism is used for placing an object to be placed, and the reading assembly is used for detecting data information after the moving end of the first driving mechanism deviates.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to an auxiliary platform, a multi-directional auxiliary platform and a semiconductor device. Background Art

[0002] Semiconductor equipment refers to the general term for various equipment and tools used in the manufacturing process of semiconductor devices. These equipment are mainly used for wafer preparation, mask preparation, exposure, substrate processing, wet etching, dry etching, chemical vapor deposition, physical vapor deposition, photolithography, ion implantation, chemical mechanical polishing and other processes.

[0003] With the sophistication and high integration of semiconductor equipment, the space reserved for the alignment platform is slightly compact, and the measurement accuracy of the existing alignment platform is not high.

[0004] Therefore, the above technical problems need to be further resolved. Summary of the invention

[0005] The object of the present invention is to provide an auxiliary platform, a multi-directional auxiliary platform and a semiconductor device to alleviate the technical problems existing in the above-mentioned related technologies.

[0006] The present invention provides an auxiliary platform, comprising:

[0007] A first base and a first driving mechanism are sequentially stacked and movably arranged, wherein a moving end of the first driving mechanism facing away from the first base can reciprocate relative to the first base along a first direction;

[0008] A reading assembly, disposed between the first base and the moving end of the first driving mechanism;

[0009] The mobile end of the first driving mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the mobile end of the first driving mechanism is offset.

[0010] The purpose of this application and the solution of its technical problems can also be further achieved by adopting the following technical measures.

[0011] Optionally, in the aforementioned auxiliary platform, the first driving mechanism comprises:

[0012] A coil plate, disposed on the first base;

[0013] A coil is arranged on the coil plate;

[0014] A magnetic yoke, disposed on the coil;

[0015] A magnetic steel, disposed on the magnetic yoke and located between the magnetic yoke and the first base;

[0016] The magnetic yoke forms a moving end of the first driving mechanism, and drives the object to be placed to reciprocate along the first direction on the first base.

[0017] Optionally, the aforementioned auxiliary platform further includes:

[0018] Two sets of sliding parts are arranged between the magnetic yoke and the first base and are respectively located on both sides of the coil plate;

[0019] Wherein, the magnetic yoke is slidably connected to the first base through the sliding part.

[0020] Optionally, in the aforementioned auxiliary platform, each group of the sliding parts comprises:

[0021] A linear guide rail, the linear guide rail is arranged on the first base along the first direction and is located on one side of the coil plate;

[0022] At least one slider is slidably connected to the linear guide rail, and the slider is connected to the yoke.

[0023] Optionally, in the aforementioned auxiliary platform, the slider of one of the sliding parts is connected to the magnetic yoke through the reading component.

[0024] Optionally, in the aforementioned auxiliary platform, the protective part, the slider of the other sliding part is connected to the magnetic yoke through the protective part.

[0025] Optionally, in the aforementioned auxiliary platform, the reading component comprises:

[0026] A ruler frame connected to the magnetic yoke;

[0027] A grating ruler connected to the ruler frame;

[0028] A reading head bracket connected to the first base;

[0029] A reading head connected to the reading head bracket;

[0030] Wherein, the slider of one of the sliding parts is connected to the magnetic yoke through the ruler frame.

[0031] Optionally, in the aforementioned auxiliary platform, the protection part comprises:

[0032] An anti-collision block connected to the magnetic yoke;

[0033] Two pressing blocks, both connected to the magnetic yoke, the anti-collision block is located between the two pressing blocks, the anti-collision block extends toward the direction where the first base is located, and protrudes between the two pressing blocks;

[0034] Two buffer rubbers, both connected to the first base, and the two pressing blocks are located between the two buffer rubbers;

[0035] Wherein, each of the pressing blocks corresponds to a sliding block of another sliding portion and is pressed onto the corresponding sliding block.

[0036] On the other hand, the present application provides a multi-directional auxiliary platform, including:

[0037] At least two auxiliary platforms are stacked in sequence, and the auxiliary platforms include:

[0038] A first base and a first driving mechanism are sequentially stacked and movably arranged, wherein a moving end of the first driving mechanism facing away from the first base can reciprocate relative to the first base along a first direction;

[0039] A reading assembly, disposed between the first base and the moving end of the first driving mechanism;

[0040] The mobile end of the first driving mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the mobile end of the first driving mechanism is offset;

[0041] Among them, the movable end of the auxiliary platform located at the top is used to place the object to be placed, and the movable end of each auxiliary platform can reciprocate along a straight line in the same plane, and the moving directions of the movable end of each auxiliary platform are perpendicular to each other.

[0042] In another aspect, the present application provides a semiconductor device, comprising:

[0043] At least two auxiliary platforms are stacked in sequence, and the auxiliary platforms include:

[0044] A first base and a first driving mechanism are sequentially stacked and movably arranged, wherein a moving end of the first driving mechanism facing away from the first base can reciprocate relative to the first base along a first direction;

[0045] A reading assembly, disposed between the first base and the moving end of the first driving mechanism;

[0046] The mobile end of the first driving mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the mobile end of the first driving mechanism is offset;

[0047] Among them, the movable end of the auxiliary platform located at the top is used to place the object to be placed, and the movable end of each auxiliary platform can reciprocate along a straight line in the same plane, and the moving directions of the movable end of each auxiliary platform are perpendicular to each other.

[0048] By means of the above technical solution, the auxiliary platform, multi-directional auxiliary platform and semiconductor device of the present application have at least the following advantages:

[0049] The auxiliary platform provided in the embodiment of the present application is provided with a first driving mechanism on a first base, and the moving end of the first driving mechanism away from the first base is used to place the object to be placed, so that the object to be placed can be reciprocated along the first direction relative to the first base by the moving end of the first driving mechanism. Through the cooperation of the first driving mechanism and the base, the component composition of the alignment platform in the prior art is effectively reduced, so that the auxiliary platform can be used in a relatively small space and achieve the corresponding alignment effect. In addition, the staff can directly obtain data information through the reading component. This structural design can effectively improve the alignment accuracy of the auxiliary platform to solve the technical problems existing in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the related technologies, the drawings required for use in the specific embodiments or the related technical descriptions will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0051] Figure 1 A schematic diagram of the explosion structure of the auxiliary platform provided in the first embodiment of the present invention;

[0052] Figure 2 This is a schematic diagram of the structure of a multi-directional auxiliary platform provided in Embodiment 2 of the present invention.

[0053] icon:

[0054] 1. Yoke; 2. Magnetic steel; 3. Coil; 4. Coil plate; 5. First base; 6. Linear guide; 7. Lamination frame; 8. Grating scale; 9. Reading head; 10. Reading head bracket; 11. Buffer rubber; 12. Anti-collision block; 13. Pressure block; 14. Guide rail pressure block. DETAILED DESCRIPTION

[0055] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0056] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0057] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0058] Embodiment 1

[0059] like Figure 1 As shown, the auxiliary platform proposed in the first embodiment of the present invention includes:

[0060] A first base 5 and a first driving mechanism are sequentially stacked and movably arranged, wherein a moving end of the first driving mechanism away from the first base 5 can reciprocate relative to the first base 5 along a first direction;

[0061] A reading component, disposed between the first base 5 and the moving end of the first driving mechanism;

[0062] The mobile end of the first driving mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the mobile end of the first driving mechanism is offset.

[0063] Specifically, the alignment platforms used in existing semiconductor devices mostly use telescopic cylinders to drive the placement plates to move. With the sophistication and high integration of semiconductor equipment, the space reserved for the alignment platform is slightly compact, and the measurement accuracy of the existing alignment platform is not high. Therefore, this application reduces the components of the alignment platform to ensure that the alignment platform can be used in a smaller space, and improves the measurement accuracy of the alignment platform, so as to solve the technical problems existing in the prior art.

[0064] The first driving mechanism is arranged on the first base 5, and the first base 5 is used to support and fix the first driving mechanism. The moving end of the first driving mechanism away from the first base 5 is used to place the object to be placed, so the object to be placed can be reciprocated along the first direction relative to the first base 5 through the moving end of the first driving mechanism. Through the cooperation of the first driving mechanism and the base, the component structure of the alignment platform in the prior art is effectively reduced, so that the auxiliary platform can be used in a relatively small space and achieve the corresponding alignment effect.

[0065] The reading component is arranged between the first base 5 and the moving end of the first driving mechanism. The reading component is used to detect the data information generated by the moving end of the first driving mechanism from the initial position to the desired position, and the data information includes the moving distance, etc. Among them, the staff can directly obtain the data information by observing the indication displayed by the reading component, and / or can also obtain the data information through an electronic device connected to the reading component, such as a computer, etc. This structural design can effectively improve the alignment accuracy of the auxiliary platform to solve the technical problems existing in the prior art.

[0066] In addition, the first direction is any straight line direction located in the same plane as the first base 5 , and the straight line direction is used to be consistent with the alignment direction required by the semiconductor device.

[0067] like Figure 1 As shown, in a specific implementation, the first driving mechanism includes:

[0068] The coil plate 4 is arranged on the first base 5;

[0069] The coil 3 is arranged on the coil plate 4;

[0070] A magnetic yoke 1 is arranged on the coil 3;

[0071] The magnetic steel 2 is disposed on the magnetic yoke 1 and located between the magnetic yoke 1 and the first base 5;

[0072] The magnetic yoke 1 forms the moving end of the first driving mechanism, and drives the object to be placed to reciprocate along the first direction on the first base 5 .

[0073] Specifically, the present application provides an implementation of a first driving mechanism, that is, the first driving mechanism includes a magnetic yoke 1, a magnet 2, a coil 3 and a coil plate 4. The installation methods of the magnetic yoke 1, the magnet 2, the coil 3 and the coil plate 4 are all conventional connection methods. The specific connection methods are mastered by technical personnel and will not be repeated here.

[0074] The yoke 1, magnet 2, coil 3 and coil plate 4 are a power system. The coil 3 generates a traveling wave magnetic field through three-phase alternating current, and the constant magnetic field generated by the magnet 2 forms an electromagnetic force, thereby driving the mover (magnet 2 and yoke 1) to move.

[0075] like Figure 1 As shown, in a specific implementation, it also includes:

[0076] Two sets of sliding parts are arranged between the yoke 1 and the first base 5 and are respectively located on both sides of the coil plate 4;

[0077] The yoke 1 is slidably connected to the first base 5 via the sliding portion.

[0078] Specifically, the yoke 1 is slidably connected to the first base 5 via a sliding portion, and this structural design can facilitate improving the stability of the movement of the yoke 1 on the first base 5. The number of sliding portions can be single or multiple, but the preferred number in this application is two.

[0079] like Figure 1 As shown, in a specific implementation, each group of the sliding parts includes:

[0080] A linear guide rail 6, wherein the linear guide rail 6 is arranged on the first base 5 along the first direction and is located on one side of the coil plate 4;

[0081] At least one slider is slidably connected to the linear guide rail 6 , and the slider is connected to the yoke 1 .

[0082] Specifically, the present application provides an implementation of a sliding part, that is, each group of sliding parts includes: a linear guide rail 6 and at least one sliding block.

[0083] The linear guide rail 6 is connected to the first base 5 along the first direction. The linear guide rail 6 and the first base 5 can be connected directly or indirectly. The connection method can be detachable or fixed, such as bolt connection or welding.

[0084] The linear guide rail 6 is slidably connected to the slider. In the present application, the number of sliders is preferably two. The slider and the yoke 1 can be connected directly or indirectly. The connection method can be detachable or fixed, for example, by bolt connection or welding.

[0085] The present application provides another implementation method of the sliding part (not shown in the figure), that is, each group of sliding parts includes a slider and a slideway, and a slideway along the first direction is opened on the first base 5 along the first direction, and the slideway is located on one side of the coil plate 4. A slider corresponding to the slideway is provided on the yoke 1, and the slider is embedded in the corresponding slideway and is slidably connected with the corresponding slideway.

[0086] like Figure 1 As shown, in a specific implementation, the slider of one of the sliding parts is connected to the magnetic yoke 1 through the reading component;

[0087] A protection part, wherein the slider of the other sliding part is connected to the yoke 1 through the protection part.

[0088] The reading components include:

[0089] A ruler frame connected to the magnetic yoke 1;

[0090] A grating ruler 8, connected to the ruler frame;

[0091] A reading head bracket 10, connected to the first base 5;

[0092] A reading head 9 connected to the reading head bracket 10;

[0093] Wherein, the slider of one of the sliding parts is connected to the magnetic yoke 1 through the ruler frame;

[0094] The protection department includes:

[0095] An anti-collision block 12, connected to the magnetic yoke 1;

[0096] Two pressing blocks 13 are connected to the yoke 1, the anti-collision block 12 is located between the two pressing blocks 13, the anti-collision block 12 extends toward the direction where the first base 5 is located, and protrudes between the two pressing blocks 13;

[0097] Two buffer rubbers 11 are both connected to the first base 5, and the two pressing blocks 13 are located between the two buffer rubbers 11;

[0098] Each of the pressing blocks 13 corresponds to a slider of another sliding portion and is pressed onto the corresponding slider.

[0099] Specifically, the scale holder is used to fix the grating scale 8 on the yoke 1, and the reading head 9 holder is used to fix the reading head 9 on the first base 5. The surface of the grating scale 8 is engraved with dense equidistant lines (the grating pitch is usually 20μm or less), and light and dark moiré fringes are formed through the principle of optical interference or diffraction. The reading head 9 includes components such as a light source, a lens, an indicating grating, and a photoelectric element, which are responsible for receiving the displacement signal of the grating scale 8 and converting it into an electrical signal (such as a sine wave or a square wave).

[0100] The grating scale 8 is mounted on the yoke 1, and the reading head 9 is fixed on the first base 5. When the grating scale 8 moves, the fine lines on the grating interact with the sensor inside the reading head 9 to produce moiré fringes, which are converted into electrical signals through photoelectric devices. Light source irradiation: The light emitted by the light source irradiates the scale grating. The stripe width and spacing of the scale grating are extremely small, usually in the range of tens or hundreds of microns. Moiré fringes formation: When the indicator grating and the scale grating form a certain angle and overlap, light and dark moiré fringes will be generated in the direction perpendicular to the grating line. The displacement change of these fringes is proportional to the displacement of the grating. Signal conversion: The moiré fringes are converted into electrical signals by photoelectric devices. After amplification and shaping by the circuit, two sine wave or square wave signals A and B with a phase difference of 90 degrees are obtained. There is a proportional relationship between the number of cycles of these signals and the moving distance of the scale body.

[0101] In addition, the sliding part located on the same side as the reading component is connected to the slider of the sliding part on the corresponding side through the ruler frame.

[0102] A limiting groove is formed on the side of the first base 5 opposite to the anti-collision block 12, and the limiting groove is used to limit the movement range of the yoke 1 relative to the first base 5. The first base 5 cooperates with the anti-collision block 12 to limit the movement range of the yoke 1.

[0103] Two buffer rubbers 11 are arranged in the limiting grooves, and the anti-collision block 12 is located between the two buffer rubbers 11. The arrangement of the buffer rubber 11 can reduce the damage caused by the anti-collision block 12 to the first base 5 when limiting, thereby improving the use effect of the device.

[0104] The linear guide rail 6 of the sliding part located on the same side as the protective part is stably pressed onto the first base 5 by the guide rail pressing block 14. The setting of the guide rail pressing block 14 can not only play a secondary fixing effect, but also facilitate the positioning and installation of the linear guide rail 6.

[0105] The number of the pressing blocks 13 is the same as the number of the sliders of the sliding part on the same side of the protection part, and they correspond one to one. The arrangement of the pressing blocks 13 enables stable sliding between the linear guide rail 6 and the slider, thereby improving the use effect of the device.

[0106] However, it should be noted that in this application, the height of the auxiliary platform is greatly reduced by embedding the coil 3 in the first base 5. The repeatability accuracy (that is, the error range) of the auxiliary platform of this application is ±0.5μm, that is, the repeatability accuracy can achieve better results. Secondly, any component in this application can be adaptively adjusted in size according to actual needs to meet the needs of different working conditions, which will not be repeated here.

[0107] Embodiment 2

[0108] like Figure 1 - Figure 2 As shown, the second embodiment of the present invention proposes a multi-directional auxiliary platform, including: at least two auxiliary platforms are stacked in sequence, and the auxiliary platform includes:

[0109] A first base 5 and a first driving mechanism are sequentially stacked and movably arranged, wherein a moving end of the first driving mechanism away from the first base 5 can reciprocate relative to the first base 5 along a first direction;

[0110] A reading component, disposed between the first base 5 and the moving end of the first driving mechanism;

[0111] The mobile end of the first driving mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the mobile end of the first driving mechanism is offset;

[0112] Among them, the movable end of the auxiliary platform located at the top is used to place the object to be placed, and the movable end of each auxiliary platform can reciprocate along a straight line in the same plane, and the moving directions of the movable end of each auxiliary platform are perpendicular to each other.

[0113] Specifically, the alignment platforms used in existing semiconductor devices mostly use telescopic cylinders to drive the placement plates to move. With the sophistication and high integration of semiconductor equipment, the space reserved for the alignment platform is slightly compact, and the measurement accuracy of the existing alignment platform is not high. Therefore, this application reduces the components of the alignment platform to ensure that the alignment platform can be used in a smaller space, and improves the measurement accuracy of the alignment platform, so as to solve the technical problems existing in the prior art.

[0114] The first driving mechanism is arranged on the first base 5, and the first base 5 is used to support and fix the first driving mechanism. The moving end of the first driving mechanism away from the first base 5 is used to place the object to be placed, so the object to be placed can be reciprocated along the first direction relative to the first base 5 through the moving end of the first driving mechanism. Through the cooperation of the first driving mechanism and the base, the component structure of the alignment platform in the prior art is effectively reduced, so that the auxiliary platform can be used in a relatively small space and achieve the corresponding alignment effect.

[0115] The reading component is arranged between the first base 5 and the moving end of the first driving mechanism. The reading component is used to detect the data information generated by the moving end of the first driving mechanism from the initial position to the desired position, and the data information includes the moving distance, etc. Among them, the staff can directly obtain the data information by observing the indication displayed by the reading component, and / or can also obtain the data information through an electronic device connected to the reading component, such as a computer, etc. This structural design can effectively improve the alignment accuracy of the auxiliary platform to solve the technical problems existing in the prior art.

[0116] Multiple auxiliary platforms are stacked in sequence. This structural design can facilitate the multi-directional auxiliary platforms to achieve multi-directional alignment effects. The following example takes two auxiliary platforms stacked in sequence as an example:

[0117] The moving end of the first driving mechanism of the auxiliary platform located at the bottom is connected to the first base 5 of the auxiliary platform located at the top, and the moving end of the first driving mechanism of the auxiliary platform located at the bottom can drive the auxiliary platform located at the top to reciprocate along a straight line;

[0118] The moving end of the first driving mechanism of the upper auxiliary platform is used to place the object to be placed, and the moving end of the first driving mechanism of the upper auxiliary platform can drive the object to be placed to reciprocate along another straight line;

[0119] The moving direction of the moving end of the first driving mechanism of the auxiliary platform located at the bottom and the moving direction of the moving end of the first driving mechanism of the auxiliary platform located at the top are both two directions in the same plane, and the two directions are perpendicular to each other.

[0120] The connected auxiliary platforms can be connected in a detachable manner. This structural design can facilitate the later maintenance of the device and the application of the device in different scenarios. For example, when a single-direction alignment platform is required, technicians can use one auxiliary platform for alignment operations; when two or more alignment platforms are required, technicians can select the number of auxiliary platforms for stacking and assembly according to actual needs to achieve a multi-directional adjustable alignment effect.

[0121] The multi-directional auxiliary platform in the second embodiment can directly use the auxiliary platform provided in the first embodiment. The specific implementation structure can refer to the relevant content described in the first embodiment, which will not be repeated here.

[0122] Embodiment 3

[0123] like Figure 1 - Figure 2 As shown, the third embodiment of the present invention provides a semiconductor device, including:

[0124] At least two auxiliary platforms are stacked in sequence, and the auxiliary platforms include:

[0125] A first base 5 and a first driving mechanism are sequentially stacked and movably arranged, wherein a moving end of the first driving mechanism away from the first base 5 can reciprocate relative to the first base 5 along a first direction;

[0126] A reading component, disposed between the first base 5 and the moving end of the first driving mechanism;

[0127] The mobile end of the first driving mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the mobile end of the first driving mechanism is offset;

[0128] Among them, the movable end of the auxiliary platform located at the top is used to place the object to be placed, and the movable end of each auxiliary platform can reciprocate along a straight line in the same plane, and the moving directions of the movable end of each auxiliary platform are perpendicular to each other.

[0129] Specifically, the alignment platforms used in existing semiconductor devices mostly use telescopic cylinders to drive the placement plates to move. With the sophistication and high integration of semiconductor equipment, the space reserved for the alignment platform is slightly compact, and the measurement accuracy of the existing alignment platform is not high. Therefore, this application reduces the components of the alignment platform to ensure that the alignment platform can be used in a smaller space, and improves the measurement accuracy of the alignment platform, so as to solve the technical problems existing in the prior art.

[0130] The first driving mechanism is arranged on the first base 5, and the first base 5 is used to support and fix the first driving mechanism. The moving end of the first driving mechanism away from the first base 5 is used to place the object to be placed, so the object to be placed can be reciprocated along the first direction relative to the first base 5 through the moving end of the first driving mechanism. Through the cooperation of the first driving mechanism and the base, the component structure of the alignment platform in the prior art is effectively reduced, so that the auxiliary platform can be used in a relatively small space and achieve the corresponding alignment effect.

[0131] The reading component is arranged between the first base 5 and the moving end of the first driving mechanism. The reading component is used to detect the data information generated by the moving end of the first driving mechanism from the initial position to the desired position, and the data information includes the moving distance, etc. Among them, the staff can directly obtain the data information by observing the indication displayed by the reading component, and / or can also obtain the data information through an electronic device connected to the reading component, such as a computer, etc. This structural design can effectively improve the alignment accuracy of the auxiliary platform to solve the technical problems existing in the prior art.

[0132] Multiple auxiliary platforms are stacked in sequence. This structural design can facilitate the multi-directional auxiliary platforms to achieve multi-directional alignment effects. The following example takes two auxiliary platforms stacked in sequence as an example:

[0133] The moving end of the first driving mechanism of the auxiliary platform located at the bottom is connected to the first base 5 of the auxiliary platform located at the top, and the moving end of the first driving mechanism of the auxiliary platform located at the bottom can drive the auxiliary platform located at the top to reciprocate along a straight line;

[0134] The moving end of the first driving mechanism of the upper auxiliary platform is used to place the object to be placed, and the moving end of the first driving mechanism of the upper auxiliary platform can drive the object to be placed to reciprocate along another straight line;

[0135] The moving direction of the moving end of the first driving mechanism of the auxiliary platform located at the bottom and the moving direction of the moving end of the first driving mechanism of the auxiliary platform located at the top are both two directions in the same plane, and the two directions are perpendicular to each other.

[0136] The connected auxiliary platforms can be connected in a detachable manner. This structural design can facilitate the later maintenance of the device and the application of the device in different scenarios. For example, when a single-direction alignment platform is required, technicians can use one auxiliary platform for alignment operations; when two or more alignment platforms are required, technicians can select the number of auxiliary platforms for stacking and assembly according to actual needs to achieve a multi-directional adjustable alignment effect.

[0137] The semiconductor device in the third embodiment can directly use the multi-directional auxiliary platform provided in the second embodiment. The specific implementation structure can refer to the relevant content described in the second embodiment, which will not be repeated here.

[0138] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An auxiliary platform, characterized in that: include: A first base and a first driving mechanism are sequentially stacked and movably arranged, wherein a moving end of the first driving mechanism facing away from the first base can reciprocate relative to the first base along a first direction; A reading assembly, disposed between the first base and the moving end of the first driving mechanism; The moving end of the first driving mechanism is used to place the object to be placed, and the reading component is used to detect the data information after the moving end of the first driving mechanism is offset.

2. The auxiliary platform according to claim 1, characterized in that: The first driving mechanism comprises: A coil plate, disposed on the first base; A coil is arranged on the coil plate; A magnetic yoke, disposed on the coil; A magnetic steel, disposed on the magnetic yoke and located between the magnetic yoke and the first base; The magnetic yoke forms a moving end of the first driving mechanism and drives the object to be placed to reciprocate along the first direction on the first base.

3. The auxiliary platform according to claim 2, characterized in that: Also includes: Two sets of sliding parts are arranged between the magnetic yoke and the first base and are respectively located on both sides of the coil plate; Wherein, the magnetic yoke is slidably connected to the first base through the sliding part.

4. The auxiliary platform according to claim 3, characterized in that: Each group of sliding parts comprises: A linear guide rail, the linear guide rail is arranged on the first base along the first direction and is located on one side of the coil plate; At least one slider is slidably connected to the linear guide rail, and the slider is connected to the yoke.

5. The auxiliary platform according to claim 4, characterized in that: The slider of one of the sliding parts is connected to the yoke through the reading component.

6. The auxiliary platform according to claim 5, characterized in that: Also includes: A protection part, wherein the slider of the other sliding part is connected to the yoke through the protection part.

7. The auxiliary platform according to claim 5, characterized in that: The reading component includes: A ruler frame connected to the magnetic yoke; A grating ruler connected to the ruler frame; A reading head bracket connected to the first base; A reading head connected to the reading head bracket; Wherein, the slider of one of the sliding parts is connected to the magnetic yoke through the ruler frame.

8. The auxiliary platform according to claim 6, characterized in that: The protection part comprises: An anti-collision block connected to the magnetic yoke; Two pressing blocks, both connected to the magnetic yoke, the anti-collision block is located between the two pressing blocks, the anti-collision block extends toward the direction where the first base is located, and protrudes between the two pressing blocks; Two buffer rubbers, both connected to the first base, and the two pressing blocks are located between the two buffer rubbers; Wherein, each of the pressing blocks corresponds to a sliding block of another sliding portion and is pressed onto the corresponding sliding block.

9. A multi-directional auxiliary platform, characterized in that: include: At least two auxiliary platforms as described in any one of claims 1 to 8 are stacked in sequence; Among them, the movable end of the auxiliary platform located at the top is used to place the object to be placed, and the movable end of each auxiliary platform can reciprocate along a straight line in the same plane, and the moving directions of the movable end of each auxiliary platform are perpendicular to each other.

10. A semiconductor device, characterized in that: include: A multi-directional auxiliary platform as described in claim 9 above.

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