Double-shaft flexible sealing movement device based on vacuum environment application

Abstract

The invention relates to the technical field of glass production, and discloses a double-shaft flexible sealing motion device based on vacuum environment application, the double-shaft flexible sealing motion device comprises a box body, the top of the box body is provided with a first sealing gasket, the top of the inner wall of the box body is slidably connected with a top cover, and one side of the box body penetrates through and is slidably connected with a first sealing cover; and one side of the first sealing cover penetrates through and is slidably connected with a second sealing gasket, one side of each of the two ends of the box body is fixedly connected with a flange, and the other side of the box body is provided with a heat dissipation assembly. Evaporated water vapor is conveyed into a steam pipe through a mechanical vacuum pump, the water vapor in the steam pipe is cooled through a cooling pipe, so that the water vapor is converted into water, the water enters a water tank and then enters a box body through a water inlet pipe, a first temperature-uniforming plate, a first heat dissipation fin, a second temperature-uniforming plate and a second heat dissipation fin are sublimated through the water, and the heat dissipation efficiency is improved. And the temperature is taken away, so that the temperature of the servo motor and the speed reducer is taken away.

Description

Technical Field

[0001] The invention relates to the technical field of glass production, in particular to a double-axis flexible sealing motion device based on vacuum environment application. Background Art

[0002] As the FPD industry continues to prosper and develop, the demand for intelligence and smart display continues to grow, and the glass panels have shown a significant growth trend in both quality and quantity. In view of this, the end-customer demand for domestically produced sealed flexible vacuum motion devices is becoming increasingly obvious. In order to respond to market demand and enhance product competitiveness, a flexible sealed power device for use in a vacuum environment was invented.

[0003] In the field of glass production technology, especially in the production process of some high-end glass products, such as optical glass, electronic display glass, etc., specific process operations are often required in a vacuum environment. For example, in the coating process of optical glass, in order to obtain a high-quality, uniform coating layer, it is necessary to perform evaporation coating in a high vacuum environment to ensure that the coating material can be accurately deposited on the glass surface to avoid the mixing of impurities that affect the optical properties of the glass. In the manufacturing process of electronic display glass, processes such as etching and ion implantation in a vacuum environment are crucial for accurately controlling the microstructure and performance of the glass surface.

[0004] However, there are many problems with the existing dual-axis motion devices used in the vacuum environment of glass production. On the one hand, the traditional sealing method is difficult to meet the sealing requirements under complex working conditions. For example, in the high temperature and high vacuum environment of glass production, ordinary mechanical seals are prone to wear and deformation, resulting in seal failure, allowing outside air or impurities to enter the vacuum chamber, affecting the production quality of glass. In addition, when the dual-axis relative motion occurs, the mechanical seal will generate a large friction resistance, affecting the flexibility and precision of the dual-axis motion, and it is difficult to meet the high requirements of the glass production process for motion precision.

[0005] In addition, in the vacuum environment of glass production, there are also high requirements for the adaptability of the device. Different glass production processes may require different working conditions such as temperature and pressure. Existing dual-axis motion devices are often difficult to operate stably under various working conditions, limiting their application scope in glass production. Summary of the invention

[0006] In view of the deficiencies of the prior art, the present invention provides a dual-axis flexible sealing motion device based on vacuum environment application, which solves the problems of sealing requirements and different temperatures.

[0007] To achieve the above objectives, the present invention is realized through the following technical solutions: A biaxial flexible sealing motion device for vacuum environment applications, comprising a box body, a first sealing gasket is provided on the top of the box body, the top inner wall of the box body is slidably connected with a top cover, one side of the box body penetrates and is slidably connected with a first sealing cover, one side of the first sealing cover penetrates and is slidably connected with a second sealing gasket, both sides of one end of the box body are fixedly connected with flanges, a heat dissipation component is provided on the other side of the box body, one side of the bottom of the top cover is fixedly connected with a speed reducer, one end of the speed reducer is fixedly connected with a servo motor, the output end of the servo motor is fixedly connected with a coupling, and one end of the coupling is fixedly connected with the speed reducer, the output ends of the speed reducer are fixedly connected with rotating rods, one end of the rotating rod is fixedly connected with a transmission rod, a flange-type sealed magnetic fluid device is provided in the middle of the outer wall of the transmission rod, and the flange-type sealed magnetic fluid device contacts the flange, both sides of the other end of the box body penetrate and are provided with windows, and one side of the outer circle of the transmission rod is fixedly connected with a synchronous pulley.

[0008] Preferably, the heat dissipation component includes a water tank, the water tank is fixedly connected with the other side of the box body, a cover plate is provided on the top inner wall of the water tank, one side of the top of the cover plate penetrates and is threadedly connected with a second sealing cover, and one side of the top of the cover plate penetrates and is fixedly connected with a steam pipe.

[0009] Preferably, one end of the steam pipe is fixedly connected with a mechanical vacuum pump, and the mechanical vacuum pump penetrates and is fixedly connected with the box body, a cooling pipe penetrates and is fixedly connected with the outer wall of the steam pipe, a water outlet penetrates and is fixedly connected with the top of the outer wall of the cooling pipe, and a water inlet penetrates and is fixedly connected with the bottom of the outer wall of the cooling pipe.

[0010] Preferably, the bottom of the servo motor is fixedly connected with a second temperature equalizing plate, the bottom of the second temperature equalizing plate is fixedly connected with uniformly distributed second heat dissipation fins, the bottom of the speed reducer is fixedly connected with a first temperature equalizing plate, and the bottom of the first temperature equalizing plate is fixedly connected with uniformly distributed first heat dissipation fins.

[0011] Preferably, uniformly distributed first bolts penetrate and are threadedly connected with the top of the top cover, and the first bolts penetrate the first sealing gasket and are threadedly connected with the box body.

[0012] Preferably, uniformly distributed first bolts penetrate and are threadedly connected with one side of the second sealing gasket, and the first bolts penetrate the second sealing gasket and are threadedly connected with the box body.

[0013] Preferably, a water inlet pipe is provided between the water tank and the box body.

[0014] Preferably, one end of the outer wall of the flange-type sealed magnetic fluid device penetrates and is threadedly connected with a second bolt, and the second bolt is threadedly connected with the flange.

[0015] The present invention provides a dual-axis flexible sealing motion device based on vacuum environment application, which has the following beneficial effects: 1. The box body of the present invention is sealed by the first sealing gasket to ensure the sealing of the entire internal chamber. The first sealing cover can seal the spare hole position of the box body as a reserved opening. The servo motor and the reducer are directly connected to form a power mechanism installed in the inner cavity of the box body and are completely isolated from the outside. The flange-type sealed magnetic fluid device is installed on the output shaft of the reducer to play a sealing and isolating role during the rotational movement of the reducer to prevent leakage during continuous high-speed and high-temperature movement. The synchronous wheel is installed on the flange-type sealed magnetic fluid device and can be directly connected to the synchronous belt to transmit power.

[0016] 2. In the present invention, the evaporated water vapor is sent to the steam pipe through a mechanical vacuum pump, and the water vapor in the steam pipe is cooled by a cooling pipe, so that the water vapor is converted into water, and the water enters the water tank and then enters the box through the water inlet pipe. The first temperature averaging plate, the first heat dissipating fin, the second temperature averaging plate and the second heat dissipating fin take away the temperature through water sublimation, thereby taking away the temperature of the servo motor and the reducer. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A perspective view of the present invention; Figure 2 is a side perspective view of the present invention; Figure 3 A top view of the present invention; Figure 4 It is a schematic diagram of the interior of the box of the present invention; Figure 5 It is a schematic diagram of the heat dissipation fin of the present invention; Figure 6 It is a cross-sectional view of the present invention.

[0018] Among them, 1. box body; 2. window; 3. first sealing gasket; 4. top cover; 5. first bolt; 6. second sealing gasket; 7. first sealing cover; 8. flange; 9. water tank; 10. cover plate; 11. second sealing cover; 12. steam pipe; 13. cooling pipe; 14. water inlet; 15. water outlet; 16. mechanical vacuum pump; 17. second bolt; 18. flange-type sealed magnetic fluid device; 19. transmission rod; 20. synchronous wheel; 21. servo motor; 22. coupling; 23. reducer; 24. rotating rod; 25. first temperature averaging plate; 26. first heat dissipation fin; 27. second temperature averaging plate; 28. second heat dissipation fin; 29. ​​water inlet pipe. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the specification of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] Example: Please see attached Figure 1 -Attached Figure 6 The embodiment of the present invention provides a dual-axis flexible sealing motion device based on vacuum environment application, including a box body 1, a first sealing gasket 3 is arranged on the top of the box body 1, a top cover 4 is slidably connected to the top of the inner wall of the box body 1, a first sealing cover 7 is penetrated and slidably connected to one side of the box body 1, a second sealing gasket 6 is penetrated and slidably connected to one side of the first sealing cover 7, a flange 8 is fixedly connected to one side of both ends of the box body 1, a heat dissipation component is arranged on the other side of the box body 1, a reducer 23 is fixedly connected to one side of the bottom of the top cover 4, and one end of the reducer 23 is fixedly connected to the A servo motor 21 is connected, and a coupling 22 is fixedly connected to the output end of the servo motor 21, and one end of the coupling 22 is fixedly connected to a reducer 23, and the output end of the reducer 23 is fixedly connected to a rotating rod 24, and one end of the rotating rod 24 is fixedly connected to a transmission rod 19, and a flange-type sealed magnetic fluid device 18 is arranged in the middle of the outer wall of the transmission rod 19, and the flange-type sealed magnetic fluid device 18 is in contact with the flange 8, and the other sides of both ends of the box body 1 are penetrated and opened with windows 2, and a synchronous wheel 20 is fixedly connected to one side of the outer ring of the transmission rod 19.

[0021] The box body 1 is sealed by the first sealing gasket 3 to ensure the sealing of the entire internal chamber. The first sealing cover 7 can seal the spare hole position of the box body 1 as a reserved opening. The servo motor 21 and the reducer 23 are directly connected to form a power mechanism installed in the inner cavity of the box body 1, which is completely isolated from the outside. The flange-type sealed magnetic fluid device 18 is installed on the output shaft of the reducer 23, which plays a sealing and isolating role during the rotational movement of the reducer 23 to prevent leakage during continuous high-speed and high-temperature movement. The synchronous wheel 19 is installed on the flange-type sealed magnetic fluid device 18 and can be directly connected to the synchronous belt to transmit power.

[0022] Please see attached Figure 2 -Attached Figure 6The heat dissipation component includes a water tank 9, which is fixedly connected to the other side of the box body 1. A cover plate 10 is provided on the top of the inner wall of the water tank 9. A second sealing cover 11 is penetrated and threadedly connected to one side of the top of the cover plate 10. A steam pipe 12 is penetrated and fixedly connected to one side of the top of the cover plate 10. A mechanical vacuum pump 16 is fixedly connected to one end of the steam pipe 12, and the mechanical vacuum pump 16 is penetrated and fixedly connected to the box body 1. A cooling pipe 13 is penetrated and fixedly connected to the outer wall of the steam pipe 12. A water outlet 15 is penetrated and fixedly connected to the top of the outer wall of the cooling pipe 13. A water inlet 14 is penetrated and fixedly connected to the bottom of the outer wall of the cooling pipe 13. A second temperature averaging plate 27 is fixedly connected to the bottom of the servo motor 21. A uniformly distributed second heat dissipation fin 28 is fixedly connected to the bottom of the second temperature averaging plate 27. A first temperature averaging plate 25 is fixedly connected to the bottom of the reducer 23. A uniformly distributed first heat dissipation fin 26 is fixedly connected to the bottom of the first temperature averaging plate 25. A water inlet pipe 29 is opened between the water tank 9 and the box body 1.

[0023] Open the second sealing cover 11 and add pure water into the water tank 9. When the temperature of the servo motor 21 and the reducer 23 rises, because the pressure is extremely low in a vacuum environment, the boiling point of water will be significantly reduced, so that the water can evaporate or sublimate quickly at a relatively low temperature. The sublimation process will absorb more heat, thereby achieving the purpose of heat dissipation. Then the evaporated water vapor is sent to the steam pipe 12 through the mechanical vacuum pump 16, and the water vapor in the steam pipe 12 is cooled through the cooling pipe 13, so that the water vapor 12 is converted into water, so that the water enters the water tank 9, and then enters the box body 1 through the water inlet pipe 29. The first temperature averaging plate 25, the first heat dissipation fin 26, the second temperature averaging plate 27 and the second heat dissipation fin 28 take away the temperature through water sublimation, thereby taking away the temperature of the servo motor 21 and the reducer 23, and the water in the cooling pipe 13 is replaced through the water inlet 14 and the water outlet 15.

[0024] Please see attached Figure 1 -Attached Figure 3 The top of the top cover 4 is penetrated and threadedly connected with evenly distributed first bolts 5, and the first bolts 5 penetrate the first sealing gasket 3 and are threadedly connected to the box body 1.

[0025] The top cover 4 can be mounted on the box body 1 by means of the first bolts 5 , and the first sealing gasket 3 can be clamped by means of the first bolts 5 and the top cover 4 .

[0026] Please see attached Figure 1 One side of the second sealing gasket 6 is penetrated and threadedly connected with the evenly distributed first bolts 5 , and the first bolts 5 penetrate the second sealing gasket 6 and are threadedly connected with the box body 1 .

[0027] The first sealing cover 7 can be installed on the box body 1 through the first bolts 5 , and the second sealing gasket 6 can be clamped through the first bolts 5 and the first sealing cover 7 .

[0028] Please see attached Figure 3 A second bolt 17 penetrates and is threadedly connected to one end of the outer wall of the flange-type sealing magnetic fluid device 18 , and the second bolt 17 is threadedly connected to the flange 8 .

[0029] The flange-type sealing magnetic fluid device 18 can be installed on the flange 8 by means of the second bolts 17 .

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A dual-axis flexible sealing motion device for vacuum environment application, comprising a box (1), characterized in that: A first sealing gasket (3) is arranged on the top of the box body (1), a top cover (4) is slidably connected to the top of the inner wall of the box body (1), a first sealing cover (7) is passed through and slidably connected to one side of the box body (1), a second sealing gasket (6) is passed through and slidably connected to one side of the first sealing cover (7), flanges (8) are fixedly connected to one side of both ends of the box body (1), a heat dissipation component is arranged on the other side of the box body (1), a reducer (23) is fixedly connected to one side of the bottom of the top cover (4), a servo motor (21) is fixedly connected to one end of the reducer (23), and the servo motor (21) is fixedly connected to one end of the reducer (21). The output end of the housing (1) is fixedly connected to a coupling (22), and one end of the coupling (22) is fixedly connected to a reducer (23), the output end of the reducer (23) is fixedly connected to a rotating rod (24), one end of the rotating rod (24) is fixedly connected to a transmission rod (19), a flange-type sealed magnetic fluid device (18) is arranged in the middle of the outer wall of the transmission rod (19), and the flange-type sealed magnetic fluid device (18) is in contact with the flange (8), the other side of both ends of the housing (1) is penetrated and provided with a window (2), and one side of the outer ring of the transmission rod (19) is fixedly connected to a synchronous wheel (20).

2. A dual-axis flexible sealing motion device based on vacuum environment application according to claim 1, characterized in that: The heat dissipation assembly comprises a water tank (9), the water tank (9) being fixedly connected to the other side of the box body (1), a cover plate (10) being provided at the top of the inner wall of the water tank (9), a second sealing cover (11) penetrating through one side of the top of the cover plate (10) and being threadedly connected, and a steam pipe (12) penetrating through one side of the top of the cover plate (10) and being fixedly connected.

3. A dual-axis flexible sealing motion device based on vacuum environment application according to claim 2, characterized in that: One end of the steam pipe (12) is fixedly connected to a mechanical vacuum pump (16), and the mechanical vacuum pump (16) penetrates and is fixedly connected to the box body (1); the outer wall of the steam pipe (12) penetrates and is fixedly connected to a cooling pipe (13); the top of the outer wall of the cooling pipe (13) penetrates and is fixedly connected to a water outlet (15); and the bottom of the outer wall of the cooling pipe (13) penetrates and is fixedly connected to a water inlet (14).

4. The dual-axis flexible sealing motion device based on vacuum environment application according to claim 1, characterized in that: The bottom of the servo motor (21) is fixedly connected to a second temperature averaging plate (27), the bottom of the second temperature averaging plate (27) is fixedly connected to evenly distributed second heat dissipation fins (28), the bottom of the reducer (23) is fixedly connected to a first temperature averaging plate (25), the bottom of the first temperature averaging plate (25) is fixedly connected to evenly distributed first heat dissipation fins (26).

5. The dual-axis flexible sealing motion device based on vacuum environment application according to claim 1, characterized in that: The top of the top cover (4) is penetrated by and threadedly connected with evenly distributed first bolts (5), and the first bolts (5) penetrate the first sealing gasket (3) and are threadedly connected to the box body (1).

6. The dual-axis flexible sealing motion device based on vacuum environment application according to claim 1, characterized in that: One side of the second sealing gasket (6) is penetrated by and threadedly connected with evenly distributed first bolts (5), and the first bolts (5) penetrate the second sealing gasket (6) and are threadedly connected to the box body (1).

7. The dual-axis flexible sealing motion device based on vacuum environment application according to claim 2, characterized in that: A water inlet pipe (29) is provided between the water tank (9) and the box body (1).

8. The dual-axis flexible sealing motion device based on vacuum environment application according to claim 1, characterized in that: A second bolt (17) penetrates and is threadedly connected to one end of the outer wall of the flange-type sealed magnetic fluid device (18), and the second bolt (17) is threadedly connected to the flange (8).

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