Anti-micro-vibration large-volume foundation model test technology for large-scale ultra-precision engineering

Abstract

The invention discloses an anti-micro-vibration large-volume foundation model test method for large-scale ultra-precision engineering. The method comprises the following steps: step 1, acquiring field micro-vibration data; 2, according to the vibration requirements of the proposed precision engineering, comparing the field vibration test conditions, and determining the difference between the amplitude and the frequency domain; 3, preliminarily determining the total weight of the foundation; 4, determining the rigidity and damping parameters of a soil spring, and establishing a soil and foundation model; 5, establishing a finite element model on the basis of calculation of the mass elastic resistance theoretical model; step 6, optimizing the basic model; step 7, carrying out reduced scale model manufacturing and design, selecting and leveling a model test area site, and selecting a central zone of a precision project to be built to carry out a test; step 8, cast-in-place and construction of the reduced scale model foundation; and step 9, evaluating the characteristic response of the test vibration of the basic model test and the relationship between output and input.

Description

Technical Field

[0001] The present invention relates to the field of micro-vibration control technology, and more specifically to a large-volume foundation model test technology for preventing micro-vibration in large-scale ultra-precision engineering. For example, it can be used to solve the problem of environmental vibration affecting the accuracy of engineering equipment during the construction and operation of large-scale ultra-precision engineering, ensure that the project can meet the micro-vibration control requirements, and ensure the normal operation and high-precision performance of the equipment. Background Art

[0002] Large-scale ultra-precision projects such as electronic chip manufacturing, precision optical instrument production, and light source science projects have extremely high requirements for micro-vibration control. Vibrations in the environment may come from multiple sources such as transportation, industrial production, and natural phenomena. These vibrations will be transmitted to engineering structures and equipment through the foundation, seriously affecting the accuracy and performance of the equipment.

[0003] In the field of large-scale ultra-precision engineering, it is very important to conduct model tests before actual engineering construction due to its strict requirements for micro-vibration control, high construction costs, and high technical complexity. Model tests can verify and optimize engineering design solutions at a relatively low cost and in a relatively short time. By simulating various working conditions in actual engineering, including different vibration excitation conditions, the interaction between the foundation and the foundation soil, etc., possible problems in the design can be discovered in advance, such as the rationality of the foundation structure, the effectiveness of vibration isolation measures, etc. This helps to avoid significant losses caused by design defects during the actual engineering construction process, such as engineering quality problems, unstable equipment operation, etc., and provides a strong guarantee for the smooth implementation of the actual project.

[0004] Although model tests are widely used in the engineering field, existing model test technologies have many limitations in preventing micro-vibration in large-scale ultra-precision engineering projects. Traditional model tests often find it difficult to accurately simulate the complex multi-source environmental vibration characteristics in large-scale ultra-precision engineering projects, and are not accurate enough in simulating actual vibration conditions with a wide range of vibration frequencies and large amplitude changes. At the same time, in the process of model scaling, it is difficult to simultaneously ensure multiple requirements such as geometric similarity, physical similarity, and dynamic similarity, resulting in a large deviation between the model test results and the actual engineering conditions. For example, when simulating soil-foundation interaction, existing test methods may not accurately reflect the nonlinear characteristics and dynamic changes of the foundation soil in actual engineering projects, thereby affecting the accurate evaluation of the foundation's anti-micro-vibration performance.

[0005] Therefore, there is an urgent need for a large-volume foundation model test technology specifically for anti-micro-vibration of large-scale ultra-precision engineering projects to improve the accuracy and reliability of model tests and provide more effective guidance for engineering design. Summary of the invention

[0006] In view of the above problems, the present invention provides a large-volume foundation model test technology for preventing micro-vibration in large-scale ultra-precision engineering, aiming to solve the micro-vibration problem faced by large-scale ultra-precision engineering.

[0007] More specifically, the present invention provides a large-volume foundation model test method for large-scale ultra-precision engineering anti-micro-vibration, comprising:

[0008] Step 1: Conduct site vibration test on the planned large-scale ultra-precision project to collect site micro-vibration data under the influence of multiple environmental vibration sources;

[0009] Step 2: Compare the site vibration test conditions according to the vibration requirements of the proposed precision engineering project to determine the amplitude and frequency domain differences;

[0010] Step 3: Preliminarily determine the total weight of the foundation based on the design weight of the large ultra-precision engineering structure and the vibration control mass ratio requirements;

[0011] Step 4: determine the soil spring stiffness and damping parameters and establish the soil and foundation model;

[0012] Step 5: Based on the mass-elastic-drag theoretical model calculation, a finite element model is established, and modal and time-frequency domain response calculations are carried out to evaluate the accuracy of the finite element model;

[0013] Step 6, optimization of the foundation model, including inputting the actual vibration time domain sequence collected at the site in step 1 after determining the finite element model, evaluating the foundation's inherent vibration characteristics and the output-input ratio relationship. If the vibration output is not amplified, it can be considered that the foundation meets the anti-micro-vibration requirements. Otherwise, the foundation design needs to be adjusted and return to step 4 for optimization;

[0014] Step 7: Carry out the design of scale model production. The scale model is designed according to the geometric and physical similarity ratio; then carry out the site selection and leveling of the model test area, and select the central area of ​​the planned precision engineering for the test;

[0015] Step 8: On-site pouring and construction of the scaled model foundation, placing vibration test sensors on the top of the model foundation and on the site for vibration monitoring; and

[0016] Step nine, evaluate the characteristic response of the vibration and the relationship between output and input of the basic model test.

[0017] According to an embodiment of the present invention, the step 2 includes computational analysis of the one-third octave band spectrum and evaluation based on the vc curve.

[0018] According to an embodiment of the present invention, step three includes calculation of a representative value of gravity load and mass ratio design.

[0019] According to an embodiment of the present invention, step four includes optimizing the foundation design according to the soil and foundation model conditions and the gradient change of the plate thickness.

[0020] According to an embodiment of the present invention, in step six, when the vibration output is not amplified, the output / input is approximately 1.

[0021] According to the implementation scheme of the present invention, the foundation test site is divided into exposed and buried foundations, and step seven also includes the design of exposed and buried foundations and the different stiffness effects of the interaction between the two and the soil; for buried foundations, step seven also includes the calculation of soil spring parameter characteristics of the buried foundation pit in three-way contact with the foundation.

[0022] According to an embodiment of the present invention, in step eight, the vibration monitoring should be conducted for no less than 24 consecutive hours.

[0023] According to an embodiment of the present invention, wherein the step nine includes evaluating the vibration output and input amplification characteristics, and performing superimposed evaluation based on a one-third octave spectrum and a vc curve.

[0024] The present invention makes the parameter optimization process faster and more effective by proposing an effective target fitness function (objective function); in addition, the range of parameter optimization is also optimized one by one, and finally a relatively accurate and effective parameter optimization range is obtained, thereby ensuring the efficiency and accuracy of parameter optimization; on the basis of obtaining the identification parameters, polynomial fitting of different currents and identification parameters is performed, aiming to predict the model parameters under different currents, thereby realizing the accurate identification of 8 unknown parameters of the mechanical model of the magnetorheological damper.

[0025] The present invention can accurately control micro-vibrations in large-scale ultra-precision engineering projects through comprehensive site vibration testing and analysis combined with a carefully designed foundation optimization process. Starting from the site vibration test, advanced technology is used to analyze the multi-source environmental vibration components, determine the differences with equipment requirements, and provide an accurate basis for subsequent design. In the foundation design, the iterative effects of various factors such as soil spring parameters and plate thickness gradient changes are considered, so that the foundation can effectively resist environmental vibrations, ensure that engineering equipment operates in an extremely low vibration environment, and greatly improve equipment operation accuracy and product quality.

[0026] Comprehensively consider factors such as the weight of the engineering structure, the vibration control mass ratio, and the geotechnical characteristics of the site to determine the reasonable total weight of the foundation and the optimized foundation structure. The soil spring stiffness and damping parameters are calculated based on the site survey report and relevant standards, and dynamically adjusted according to the change in the thickness of the foundation plate to achieve the best interaction between the foundation and the foundation soil. This optimized design not only improves the anti-micro-vibration performance of the foundation, but also ensures that the foundation remains stable and reliable while bearing the weight of the engineering structure, extending the service life of the project and reducing maintenance costs.

[0027] The finite element model based on accurate parameter acquisition and reasonable design can simulate the vibration characteristics of the foundation more accurately by comparing and verifying with the actual vibration test data. The scaled model is designed according to the geometric and physical similarity ratios, and considers multiple similarity ratio relationships, so that the model test can more realistically reflect the actual engineering situation. During the test, the reasonable arrangement of vibration test sensors, the effective processing of long-term monitoring data, and the analysis based on scientific evaluation standards (such as one-third octave spectrum and vc curve superposition evaluation) all help to improve the accuracy and reliability of the model test results and provide stronger support for engineering design.

[0028] Discover and solve potential problems in engineering design and foundation selection in advance, and avoid risks such as equipment failure and engineering quality degradation caused by vibration problems during actual engineering construction and operation. Repeated optimization and verification of foundation design through model tests ensures that the foundation meets the requirements for anti-micro-vibration, providing a solid guarantee for the smooth implementation and efficient operation of large-scale ultra-precision projects, helping to improve the overall benefits of the project and enhance the competitiveness of enterprises in related fields.

[0029] It fills the gap in the field of large-volume foundation model test technology for anti-micro-vibration of large-scale ultra-precision engineering, and provides a set of systematic and scientific technical methods for engineering construction in this field. Its application will promote the development of micro-vibration control technology in large-scale ultra-precision engineering related industries, prompt enterprises and research institutions to pay more attention to the impact of micro-vibration on engineering, drive the entire industry to continuously innovate and progress in foundation design, vibration control technology, etc., and improve my country's technical level in the field of large-scale ultra-precision engineering construction. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 The present invention is a schematic diagram of the technical process of large-volume foundation model testing for anti-micro-vibration of large-scale ultra-precision engineering projects according to an implementation plan of the present invention. DETAILED DESCRIPTION

[0031] The present invention is further described in detail below through specific embodiments in conjunction with the accompanying drawings. The shown contents are used to fully illustrate the contents of the present invention, but are not used to limit the present invention.

[0032] It should be understood that the models, tools, and technical terms involved in the present invention, such as wavelet transform, finite element model, vc curve, soil spring, mode, time-frequency domain response, etc., are themselves known. Therefore, the present invention focuses on how to utilize the above-mentioned various tools or models in combination and optimization to design the process of the present invention for large-scale ultra-precision engineering anti-micro-vibration large-volume foundation model test technology.

[0033] Figure 1The figure is a schematic diagram of the technical process of large-volume foundation model test for anti-micro-vibration of large-scale ultra-precision engineering according to the implementation scheme of the present invention. Figure 1 According to an embodiment of the present invention, a large-volume foundation model test method for large-scale ultra-precision engineering anti-microvibration may include:

[0034] Vibration testing and analysis of proposed sites

[0035] First, conduct site vibration tests for planned large-scale ultra-precision projects. Professional vibration test equipment can be used to set up measurement points at multiple key locations of the planned large-scale ultra-precision project site, conduct long-term continuous monitoring of multi-source environmental vibrations, and collect a large amount of vibration data. Use wavelet transform technology to conduct in-depth analysis of the collected data to accurately identify the vibration components generated by different vibration sources, such as traffic vibration, industrial vibration, natural vibration, etc. The respective frequency, amplitude and phase characteristics. By calculating the one-third octave spectrum, the distribution of vibration in different frequency bands is analyzed in detail, and based on the vc curve evaluation standard, the site vibration level is carefully compared with the micro-vibration requirements of the key process precision equipment of the project, and the differences between the two in amplitude and frequency domain are determined, so as to comprehensively and accurately evaluate the site vibration conditions and provide reliable basic data for subsequent foundation design.

[0036] Determination of total base weight

[0037] According to the detailed structural design drawings of large-scale ultra-precision engineering, the representative value of the gravity load of the structure is accurately calculated, including the design calculation of permanent loads (such as the deadweight of the building structure and the deadweight of the equipment, etc.) and variable live loads (such as personnel activities, material transportation, etc.). Combined with the strict mass ratio requirements of the project for vibration control, while fully considering the influence of the foundation plane layout (such as the shape, size, relationship with the surrounding structure, etc.) on vibration transmission and bearing capacity, the total weight of the foundation is preliminarily determined according to the established calculation method to ensure that the foundation can provide a suitable quality foundation for anti-micro-vibration control while meeting the bearing requirements.

[0038] Soil parameter acquisition and foundation optimization design implementation

[0039] Based on the geotechnical survey report of the proposed site provided by a professional geotechnical survey team, combined with national and industry specifications such as the "Design Standard for Power Machinery Foundations", the soil spring stiffness and damping parameters can be calculated for foundation soils of different depths, taking into account the depth of influence of the foundation. That is, those skilled in the art can use appropriate theoretical or empirical methods to calculate according to actual conditions, so it will not be repeated here. According to the actual conditions of the soil and foundation model, starting from the initial plate thickness, the plate thickness can be gradually increased in a gradient between 1m-2m to optimize the foundation design. After each plate thickness adjustment, the foundation mass change caused by the change in plate thickness and the resulting impact on the soil spring parameters are recalculated (because the mass change will change the interaction between the foundation and the foundation soil, thereby affecting the soil spring parameters). Through multiple iterative calculations, the plate thickness and corresponding soil spring parameter combination that optimizes the foundation's micro-vibration resistance performance are found.

[0040] Finite element model establishment and verification implementation

[0041] On the basis of completing the calculation of the mass-elastic-resistance theoretical model, professional finite element analysis software (such as ANSYS, ABAQUS, etc.) is used to construct a three-dimensional finite element model of soil-foundation. The calculated three-dimensional stiffness and damping parameters of the soil spring are accurately applied to the corresponding positions in the finite element model to simulate the actual interaction relationship between soil and foundation. Reasonable boundary conditions and loading conditions are set, modal analysis is carried out to obtain the natural vibration characteristics of the foundation, time-frequency domain response calculations are performed, and the dynamic response of the foundation under different vibration excitations is simulated. The finite element calculation results are compared with the actual site vibration test data, and the accuracy of the finite element model is evaluated from multiple aspects such as vibration amplitude, frequency response, phase change, etc. The model is adjusted and improved as necessary according to the comparison results to ensure that the model can truly reflect the actual engineering situation.

[0042] Basic model optimization and evaluation implementation

[0043] The actual vibration time domain sequence collected at the site is fully input into the verified finite element model, and the response results of the foundation under actual vibration excitation are obtained after running the calculation. The natural vibration characteristic parameters of the foundation (such as natural frequency, vibration mode, etc.) are calculated, and the ratio relationship between output and input is analyzed, focusing on the amplification or attenuation of the vibration amplitude. The key judgment basis is that the vibration output is not amplified (output / input ≈ 1, based on a large number of major engineering practice experiences, this standard is determined to be more in line with actual engineering needs). If the calculation result does not meet this standard, return to the foundation optimization design step, readjust the foundation plate thickness, soil spring parameters, etc., and perform finite element analysis and evaluation again until the foundation model meets the anti-micro-vibration requirements.

[0044] Scale model making and test preparation and implementation

[0045] According to the actual needs of the project and the conditions of the test site, determine the appropriate geometric similarity ratio (such as 1:10, 1:20, etc.) and physical similarity ratio (including stiffness similarity ratio, damping similarity ratio, etc.), and design the size, material properties and other parameters of the scaled model according to these similarity ratios. In the central area of ​​the proposed precision engineering, carefully select and level the test site to ensure that the flatness and stability of the site meet the test requirements. For the exposed foundation test site, prepare the corresponding support structure and boundary conditions to simulate the one-way contact between the foundation and the soil, mainly used to study the vertical vibration transmission relationship; for the buried foundation test site, excavate and process the foundation pit according to the design requirements, calculate and set the soil spring parameter characteristics of the three-way contact between the foundation pit and the foundation, and simulate the actual foundation The buried conditions and vibration characteristics.

[0046] Scaled model foundation construction and testing implementation

[0047] In accordance with the design requirements and construction specifications, the model foundation is cast on site at the test site. During the construction process, the construction quality is strictly controlled, including the flatness, verticality, and quality of concrete pouring (such as density, strength, etc.) of the foundation, to ensure that there are no defects such as cracks and holes. High-precision vibration test sensors are accurately installed at key locations on the top of the model foundation and on the site (bottom of the pit), connected to a stable and reliable data acquisition system, and long-term vibration monitoring is carried out for no less than 24 hours. During the monitoring process, data processing technology (such as smoothing method) is used to remove zero drift (trend term) in the long-term vibration test data to improve the accuracy of the data. Based on the superposition evaluation of the one-third octave spectrum and the vc curve, the characteristic response of the basic model test vibration and the output-input relationship are comprehensively analyzed from multiple angles such as vibration frequency, amplitude, and energy distribution, and the anti-micro-vibration performance of the basic model is accurately evaluated.

[0048] The technology of the embodiments of this aspect can achieve beneficial technical effects:

[0049] 1. Carry out effective vibration control of precision equipment

[0050] Accurately construct a composite vibration control system, combined with accurate displacement amplitude transmissibility derivation and peak displacement calculation, to achieve accurate grasp and effective control of precision equipment vibration. Significantly reduce the adverse effects of vibration on precision equipment, ensure that the precision parts inside the equipment are protected from excessive vibration damage, thereby extending the service life of the equipment, ensuring that the equipment always maintains high precision and high stability during operation, effectively improving product production quality, and enhancing the company's market competitiveness.

[0051] 2. Optimize equipment layout and production process

[0052] The equipment layout is optimized with the four-point vibration displacement variance as the objective function, fully considering the uniformity and coordination of the precision equipment vibration to ensure the stable operation of the equipment. By obtaining the optimal placement position, the optimal process layout of the precision equipment on the upper floor is achieved, the mutual interference between equipment is reduced, the smoothness and efficiency of the production process are improved, and then the industrial production efficiency is improved, the production cost is reduced, and more considerable economic benefits are created for the enterprise.

[0053] 3. Ensure the safety and stability of the industrial floor structure

[0054] It effectively suppresses the transmission of vibration to the floor structure, reduces the risk of cracks, deformation and even damage to the floor due to long-term vibration, and effectively ensures the safety and durability of industrial building structures. It provides enterprises with a stable and reliable production environment, avoids production interruptions and equipment damage due to structural problems, and ensures normal production operations of enterprises.

[0055] 4. Promote technological progress in the industrial building industry

[0056] It fills the gap in the vibration control and process layout optimization methods of the structure-precision equipment coupling system in the field of industrial building, and provides innovative solutions for precision equipment vibration control. Its application will promote the development of precision equipment layout and vibration control technology in related industries, prompt enterprises to focus on production environment optimization and equipment management refinement, and improve the technical level and production management level of the entire industry.

[0057] 5. Adapt to diverse needs and flexible applications

[0058] Considering single-stage or two-stage vibration isolation systems, and using multi-objective particle swarm optimization algorithms to flexibly adjust vibration isolation parameters, it can adapt to the characteristics and needs of different types of precision equipment and floor structures. Whether it is a new industrial floor project or an existing project renovation and upgrade, it has strong practicality and operability, providing enterprises with diversified choices and helping them to formulate the most suitable vibration control and equipment layout plan according to their actual situation.

[0059] The above description of the embodiments is to facilitate the understanding and application of the present invention by those skilled in the art. It is obvious that those skilled in the art can easily make various modifications to these embodiments and apply the general principles described herein to other embodiments without creative work. Therefore, the present invention is not limited to the embodiments herein, and improvements and modifications made by those skilled in the art based on the disclosure of the present invention without departing from the scope of the present invention should be within the scope of protection of the present invention.

Claims

1. A large-volume foundation model test method for large-scale ultra-precision engineering anti-micro-vibration, characterized in that: include: Step 1: Conduct site vibration test on the planned large-scale ultra-precision project to collect site micro-vibration data under the influence of multiple environmental vibration sources; Step 2: Compare the site vibration test conditions according to the vibration requirements of the proposed precision engineering project to determine the amplitude and frequency domain differences; Step 3: Preliminarily determine the total weight of the foundation based on the design weight of the large ultra-precision engineering structure and the vibration control mass ratio requirements; Step 4: determine the soil spring stiffness and damping parameters and establish the soil and foundation model; Step 5: Based on the mass-elastic-drag theoretical model calculation, a finite element model is established, and modal and time-frequency domain response calculations are carried out to evaluate the accuracy of the finite element model; Step 6, optimization of the foundation model, including inputting the actual vibration time domain sequence collected at the site in step 1 after determining the finite element model, evaluating the foundation's inherent vibration characteristics and the output-input ratio relationship. If the vibration output is not amplified, it can be considered that the foundation meets the anti-micro-vibration requirements. Otherwise, the foundation design needs to be adjusted and return to step 4 for optimization; Step 7: Carry out the design of scale model production. The scale model is designed according to the geometric and physical similarity ratio; then carry out the site selection and leveling of the model test area, and select the central area of ​​the planned precision engineering for the test; Step 8: On-site pouring and construction of the scaled model foundation, placing vibration test sensors on the top of the model foundation and on the site for vibration monitoring; as well as Step nine, evaluate the characteristic response of the vibration and the relationship between output and input of the basic model test.

2. A large-volume foundation model test method for large-scale ultra-precision engineering anti-microvibration according to claim 1, characterized in that: The second step includes calculation and analysis of the one-third octave band spectrum and evaluation based on the vc curve.

3. A large-volume foundation model test method for large-scale ultra-precision engineering anti-microvibration according to claim 1, characterized in that: The step three includes calculation of the representative value of the gravity load and mass ratio design.

4. A large-volume foundation model test method for large-scale ultra-precision engineering anti-microvibration according to claim 1, characterized in that: The step four includes optimizing the foundation design according to the soil and foundation model conditions and the slab thickness gradient change.

5. A large-volume foundation model test method for large-scale ultra-precision engineering anti-microvibration according to claim 1, characterized in that: In step six, when the vibration output is not amplified, the output / input is approximately 1.

6. A large-volume foundation model test method for large-scale ultra-precision engineering anti-microvibration according to claim 1, characterized in that: The foundation test site is divided into exposed and buried foundations. Step seven also includes the design of exposed and buried foundations and the different stiffness effects of the interaction between the two and the soil. For buried foundations, step seven also includes the calculation of soil spring parameter characteristics of the buried foundation pit in three-dimensional contact with the foundation.

7. A large-volume foundation model test method for large-scale ultra-precision engineering anti-microvibration according to claim 1, characterized in that: In step eight, the vibration monitoring should be carried out for no less than 24 consecutive hours.

8. The method for testing a large-volume foundation model for anti-microvibration of large-scale ultra-precision engineering according to claim 1 is characterized by: The step nine includes evaluating the vibration output and input amplification characteristics, and performing superimposed evaluation based on the one-third octave spectrum and the vc curve.

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