Charge management device and method based on disturbance observation sliding mode control

Abstract

The invention discloses a charge management device and method based on interference observation sliding mode control, and belongs to the field of high-precision inertial sensors. Alternating current driving voltage is applied to parallel polar plates in the horizontal direction, and a displacement signal of the inspection mass is measured and converted into a voltage signal; the charge measurement module converts the voltage signal into a charge value of the test mass, subtracts the charge value of the test mass from a set charge value to obtain a charge error signal, and inputs the charge error signal into the interference observation sliding mode control module; then calculating to obtain a charging and discharging rate required for controlling to a set charge value; the ultraviolet irradiation module is driven according to the charging and discharging rate, bias voltage is applied to the parallel polar plates on the two sides in the vertical direction, and the inspection mass charge is controlled to be a set charge value. According to the invention, when external interference exists or parameters change, accurate charge control of the test mass can still be realized, and good charge closed-loop control and robustness can be provided.

Description

Technical Field

[0001] The present invention belongs to the field of high-precision inertial sensors, and in particular relates to a charge management device and method based on interference observation sliding film control. Background Art

[0002] In the field of high-precision inertial sensors (such as gravitational wave detection), the displacement measurement module of the inertial sensor detects the relative displacement between the test mass (TM) and the satellite in the direction of the sensitive axis with extremely high sensitivity. The displacement change information is transmitted to the satellite's thruster system, and the thruster applies precise thrust to make the satellite follow the movement of the test mass to ensure that the relative position between the two remains unchanged. In this state, the test mass serves as an inertial reference point for laser interferometry measurement, and the detection of gravitational waves is achieved by measuring the relative displacement change between it and the satellite.

[0003] However, high-energy particles and cosmic rays in the universe will cause the test mass to gradually accumulate charge, thereby generating electrostatic forces between its surface and the surrounding conductors, interfering with the measurement accuracy. Therefore, the charge on the test mass must be effectively controlled. Taking the charge management scheme used in LISA Pathfinder as an example, its core method is to use ultraviolet illumination to cause electrons to enter or escape from the test mass or the surrounding electrode plates through the photoelectric effect, thereby quickly reducing the surface charge to the desired level. However, due to the disturbance of the cosmic space environment, the attenuation of optical power, the changes in the physical properties of the conductor surface, etc., the charge of the conductor needs to be accurately measured before the illumination is implemented, which poses extremely high technical challenges to the actual operation. Summary of the invention

[0004] The purpose of the present invention is to address the deficiencies of the prior art and provide a charge management device and method based on interference observation sliding film control.

[0005] The object of the present invention is achieved by the following technical solutions: a charge management device based on interference observation sliding mode control, the device comprising: a proof mass, parallel plates, an ultraviolet light irradiation module, a displacement measurement module, a charge measurement module, an interference observation sliding mode control module and a charge actuator module; The parallel plates are placed in the horizontal and vertical directions of the inspection mass, parallel to the surface of the inspection mass, all parallel plates are parallel to the inspection mass and at equal distances, the number of parallel plates placed on both sides of the horizontal direction of the inspection mass is the same, and the number of parallel plates placed on both sides of the vertical direction of the inspection mass is the same; The output end of the parallel electrode plate in the horizontal direction is connected to the displacement measurement module; the output of the displacement measurement module is connected to the charge measurement module; one output end of the charge measurement module is connected to the interference observation sliding mode control module, and the other output end is subtracted from the input set charge value to obtain a charge error signal; the charge error signal is input to the interference observation sliding mode control module; the output end of the interference observation sliding mode control module is connected to the input end of the charge actuator module; the output end of the charge actuator is connected to the ultraviolet light irradiation module; The disturbance observation sliding mode control module includes a disturbance observer, a sliding mode control module and a disturbance observation control module.

[0006] Furthermore, the parallel plates in the horizontal direction are used to receive an AC driving voltage, so that the proof mass rotates, and the AC driving voltages applied to the adjacent parallel plates on the same side are equal in magnitude and opposite in direction; The vertical parallel plates are used to apply a bias voltage; The ultraviolet irradiation module includes a first ultraviolet irradiation submodule, a second ultraviolet irradiation submodule, a third ultraviolet irradiation submodule and a fourth ultraviolet irradiation submodule; The displacement measurement module is used to measure the displacement of the inspection mass relative to the parallel plates in the horizontal direction, and convert the displacement into a voltage signal and transmit it to the charge measurement module; The charge measurement module is used to receive a voltage signal, calculate the charge value of the test mass according to the voltage signal and input it into the interference observation sliding mode control module; at the same time, the charge value of the test mass calculated is subtracted from the set charge value to obtain a charge error signal and input it into the interference observation sliding mode control module; The interference observation sliding mode control module is used to receive the charge value of the test mass, the set charge value and the charge error signal, and based on the charge on-track charging and discharging model, calculate the charge and discharge rate required to control the charge of the test mass to the set charge value and input it to the charge actuator module; The charge actuator module is used to receive the charge and discharge rate, drive the ultraviolet light irradiation module to irradiate the parallel plates or the inspection mass surface in the vertical direction, and apply bias voltages of the same magnitude and opposite direction to the parallel plates on both sides of the vertical direction, respectively, to control the inspection mass charge to the set charge value.

[0007] Furthermore, the number of the parallel plates is 6, including 4 parallel plates in the horizontal direction and 2 parallel plates in the vertical direction; The four parallel plates in the horizontal direction are respectively the first parallel plate, the second parallel plate, the third parallel plate and the fourth parallel plate; the first parallel plate and the third parallel plate are located on one side of the horizontal direction of the inspection mass, and the second parallel plate and the fourth parallel plate are located on the other side of the horizontal direction of the inspection mass; the first parallel plate is directly parallel to the second parallel plate; the third parallel plate is directly parallel to the fourth parallel plate; The two vertical parallel plates are respectively the fifth parallel plate and the sixth parallel plate; the fifth parallel plate is located on one side of the vertical direction of the inspection mass, and the sixth parallel plate is located on the other side of the vertical direction of the inspection mass; the fifth parallel plate is directly parallel to the sixth parallel plate.

[0008] Furthermore, the driving ultraviolet irradiation module irradiates the parallel plates in the vertical direction or the inspection quality surface, specifically: Drive the first ultraviolet irradiation submodule to emit ultraviolet light to the parallel plates on one side of the vertical direction, drive the second ultraviolet irradiation submodule to emit ultraviolet light to the inspection mass surface opposite to the parallel plates on one side of the vertical direction, drive the third ultraviolet irradiation submodule to emit ultraviolet light to the parallel plates on the other side of the vertical direction, and drive the fourth ultraviolet irradiation submodule to emit ultraviolet light to the inspection mass surface opposite to the parallel plates on the other side of the vertical direction.

[0009] The present invention also provides a charge management method based on interference observation sliding film control, which is applied to the charge management device based on interference observation sliding film control, and includes the following steps: Parallel plates are placed in the horizontal direction and the vertical direction of the inspection mass, respectively, wherein all the parallel plates are parallel to the inspection mass and are at equal distances, the number of parallel plates placed on both sides of the horizontal direction of the inspection mass is the same, and the number of parallel plates placed on both sides of the vertical direction of the inspection mass is the same; Applying AC driving voltages of the same magnitude and opposite direction to the parallel plates in the horizontal direction of the inspection mass respectively, driving the inspection mass to rotate, measuring the displacement of the inspection mass relative to the parallel plates in the horizontal direction through the displacement measurement module, and converting the displacement into a voltage signal and transmitting it to the charge measurement module; The voltage signal of the charge measurement module is used to calculate the charge value of the test mass and input it into the interference observation sliding mode control module. At the same time, the charge value of the test mass calculated is subtracted from the set charge value to obtain a charge error signal and input it into the interference observation sliding mode control module. The interference observation sliding mode control module receives the charge value of the inspection mass, the set charge value and the charge error signal, and based on the charge on-track charging and discharging model, calculates the charge and discharge rate required to control the charge of the inspection mass to the set charge value and inputs it to the charge actuator module; The charge actuator module receives the charge and discharge rate, drives the ultraviolet light irradiation module to irradiate the parallel plates or the inspection mass surface in the vertical direction, and applies bias voltages of the same magnitude and opposite directions to the parallel plates on both sides of the vertical direction, respectively, to control the inspection mass charge to the set charge value.

[0010] Furthermore, the on-track charging and discharging model is: ,in, represents the attenuation coefficient of the actual charging rate of the test mass in space; is the charge value of the test mass; is the derivative of the charge value of the test mass; Indicates the charge and discharge rate output by the sliding mode control module; Indicates the UV charge and discharge rate attenuation coefficient of the actual model; Represents unknown disturbance from the outside world; The charging and discharging rate output by the sliding mode control module for ,in, represents the charge error signal, represents the symbolic function, represents the first gain coefficient of the sliding mode control module, represents the second gain coefficient of the sliding mode control module, represents a sliding surface switching function; the sliding surface switching function for ,in, represents the gain coefficient; The output of the disturbance observer is ; in, Indicates external unknown disturbance The estimate, represents the derivative of the external unknown disturbance estimate, represents an estimate of the charge value of the test mass, is the derivative of the charge estimate of the test mass, represents the charge and discharge rate output by the disturbance observation control module in the disturbance observation sliding mode control module, represents the first gain coefficient of the disturbance observer, represents the second gain coefficient of the disturbance observer; The charge and discharge rate output by the interference observation control module for .

[0011] The present invention also provides a charge management device based on interference observation sliding film control, including one or more processors for implementing the above-mentioned charge management method based on interference observation sliding film control.

[0012] The present invention also provides a computer-readable storage medium on which a program is stored. When the program is executed by a processor, it is used to implement the above-mentioned charge management method based on interference observation sliding film control.

[0013] The beneficial effects of the present invention are as follows: the interference sliding mode control module in the present invention can effectively estimate unknown external disturbances and automatically adjust the control parameters. When the external environment is disturbed or the charging and discharging physical characteristics of the conductor itself change, there is no need to interrupt the target signal detection to remeasure the external charging rate, thus avoiding the interference problem caused by interrupting the target signal detection when measuring the accumulated charge of the inspection mass, and has broad application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a flow chart of a charge management method based on interference observation sliding film control in Example 2; Figure 2 is a structural diagram of the interference observation sliding mode control module in Example 2; Figure 3 It is a structural schematic diagram of a charge management device based on interference observation sliding film control in Example 3; Figure 4 is a schematic diagram of a mechanical structure of a charge management device based on interference observation sliding film control in Example 3; Figure 5 This is a schematic diagram of the structure of a charge management device based on interference observation sliding film control in Example 4. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical scheme and advantages of the present invention more clear, the present invention is further described in detail in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0016] Embodiment 1: The present invention provides a charge management device based on interference observation sliding mode control, the device comprising: a test mass, parallel plates, an ultraviolet light irradiation module, a displacement measurement module, a charge measurement module, an interference observation sliding mode control module and a charge actuator module.

[0017] The parallel plates in the horizontal direction are used to receive an AC driving voltage to cause the inspection mass to rotate, and the AC driving voltages applied to the adjacent parallel plates on the same side are equal in magnitude and opposite in direction.

[0018] The vertical parallel plates are used to apply a bias voltage.

[0019] The ultraviolet irradiation module includes a first ultraviolet irradiation submodule, a second ultraviolet irradiation submodule, a third ultraviolet irradiation submodule and a fourth ultraviolet irradiation submodule.

[0020] The displacement measurement module is used to measure the displacement of the inspection mass relative to the parallel plates in the horizontal direction, and convert the displacement into a voltage signal and transmit it to the charge measurement module.

[0021] The charge measurement module is used to receive a voltage signal and Calculate the charge value of the test mass And input to the interference observation sliding mode control module; at the same time, the charge value of the test mass is calculated and set the charge value Make a difference and get the charge error signal : And input into the disturbance observation sliding mode control module.

[0022] The interference observation sliding mode control module is used to receive the charge value of the test mass , set the charge value and the charge error signal , and based on the charge on-track charging and discharging model, the charge of the inspection mass is controlled to the set charge value. Required charge and discharge rate And input to the charge actuator module.

[0023] The charge actuator module is used to receive the charge and discharge rate , drive the UV irradiation module to irradiate the parallel plates or the test mass surface in the vertical direction, and apply bias voltages of the same magnitude and opposite direction to the parallel plates on both sides of the vertical direction, and control the test mass charge to the set charge value .

[0024] The number of the parallel plates is 6, including 4 parallel plates in the horizontal direction and 2 parallel plates in the vertical direction.

[0025] The four horizontal parallel plates are respectively the first parallel plate, the second parallel plate, the third parallel plate and the fourth parallel plate; the first parallel plate and the third parallel plate are located on one side of the horizontal direction of the inspection mass, and the second parallel plate and the fourth parallel plate are located on the other side of the horizontal direction of the inspection mass; the first parallel plate is directly parallel to the second parallel plate; the third parallel plate is directly parallel to the fourth parallel plate.

[0026] The two vertical parallel plates are respectively the fifth parallel plate and the sixth parallel plate; the fifth parallel plate is located on one side of the vertical direction of the inspection mass, and the sixth parallel plate is located on the other side of the vertical direction of the inspection mass; the fifth parallel plate is directly parallel to the sixth parallel plate.

[0027] Example 2: Figure 1 As shown, the present invention also provides a charge management method based on interference observation sliding film control, comprising the following steps: Parallel plates are placed in the horizontal and vertical directions of the inspection mass, respectively, wherein all parallel plates are parallel to the inspection mass and are equidistant from each other, the number of parallel plates placed on both sides of the inspection mass in the horizontal direction is the same, and the number of parallel plates placed on both sides of the inspection mass in the vertical direction is the same.

[0028] AC driving voltages of equal magnitude and opposite direction are applied to the parallel plates in the horizontal direction of the test mass to drive the test mass to rotate. The displacement of the test mass relative to the parallel plates in the horizontal direction is measured by the displacement measurement module, and the displacement is converted into a voltage signal and transmitted to the charge measurement module.

[0029] The voltage signal of the charge measurement module calculates the charge value of the test mass and inputs it into the interference observation sliding mode control module. At the same time, the charge value of the test mass calculated is subtracted from the set charge value to obtain a charge error signal and input it into the interference observation sliding mode control module.

[0030] The interference observation sliding mode control module receives the charge value of the inspection mass, the set charge value and the charge error signal, and based on the on-track charge and discharge model, calculates the charge and discharge rate required to control the charge of the inspection mass to the set charge value and inputs it to the charge actuator module.

[0031] The charge actuator module receives the charge and discharge rate, drives the ultraviolet irradiation module to irradiate the parallel plates in the vertical direction or the inspection mass surface, and applies the bias voltage of the same magnitude and opposite direction to the and It is applied to the parallel plates on both sides of the vertical direction respectively to control the test mass charge to the set charge value.

[0032] like Figure 2 As shown, the disturbance observation sliding mode control module includes a disturbance observer, a sliding mode control module and a disturbance observation control module.

[0033] The on-track charging and discharging model is: ,in, represents the attenuation coefficient of the actual charging rate of the test mass in space; is the charge value of the test mass; is the derivative of the charge value of the test mass; Indicates the charge and discharge rate output by the sliding mode control module; Indicates the UV charge and discharge rate attenuation coefficient of the actual model; Represents unknown disturbance from the outside world.

[0034] The charging and discharging rate output by the sliding mode control module for ,in, represents the charge error signal, represents the symbolic function, represents the first gain coefficient of the sliding mode control module, represents the second gain coefficient of the sliding mode control module, represents a sliding surface switching function; the sliding surface switching function for ,in, Represents the gain factor.

[0035] The output of the disturbance observer is ; in, Indicates external unknown disturbance The estimate, represents the derivative of the external unknown disturbance estimate, represents an estimate of the charge value of the test mass, is the derivative of the charge estimate of the test mass, represents the charge and discharge rate output by the disturbance observation control module in the disturbance observation sliding mode control module, represents the first gain coefficient of the disturbance observer, represents the second gain coefficient of the disturbance observer.

[0036] The input of the disturbance observer is the charge value of the test mass , the charge and discharge rate output by the disturbance observation control module is ,according to , we can get: ; then Substitution , can be obtained , in this formula only is an unknown quantity and the rest are known quantities, then we can get , then according to ,get The value of .

[0037] The charge and discharge rate output by the interference observation control module for .

[0038] Example 3: Figure 3 As shown, the present invention provides a charge management device based on interference observation sliding mode control, the device comprising: a mechanical structure, a displacement measurement module, a charge measurement module, an interference observation sliding mode control module and a charge actuator module.

[0039] A mechanical structure of a charge management device based on interference observation sliding film control Figure 4 As shown, the mechanical structure includes a test mass (TM), parallel plates and an ultraviolet light irradiation module; in this embodiment, the number of the parallel plates is 6, including 4 horizontal parallel plates and 2 vertical parallel plates.

[0040] The four parallel plates in the horizontal direction are respectively the first parallel plates , the second parallel plate , the third parallel plate and the fourth parallel plate ; The first parallel electrode plate and the third parallel electrode plate are located on one side of the horizontal direction of the inspection mass, and the second parallel electrode plate and the fourth parallel electrode plate are located on the other side of the horizontal direction of the inspection mass; the first parallel electrode plate is directly parallel to the second parallel electrode plate; the third parallel electrode plate is directly parallel to the fourth parallel electrode plate.

[0041] The two vertical parallel plates are respectively the fifth parallel plates and the sixth parallel plate ; The fifth parallel electrode plate is located on one side of the vertical direction of the inspection mass, and the sixth parallel electrode plate is located on the other side of the vertical direction of the inspection mass; the fifth parallel electrode plate is parallel to the sixth parallel electrode plate.

[0042] The first parallel plate in the mechanical structure , the second parallel plate , the third parallel plate and the fourth parallel plate Output , , and They are respectively connected to the displacement measurement modules.

[0043] The ultraviolet light irradiation module includes a first ultraviolet light irradiation submodule UV light 1 , a second ultraviolet light irradiation submodule UV light 2 , a third ultraviolet light irradiation submodule UV light 3 and a fourth ultraviolet light irradiation submodule UV light 4 .

[0044] The charge actuator module is respectively connected to the first ultraviolet irradiation submodule UV light 1, the second ultraviolet irradiation submodule UV light 2, the third ultraviolet irradiation submodule UV light 3 and the fourth ultraviolet irradiation submodule UV light 4, and is used to drive the first ultraviolet irradiation submodule UV light 1 to emit ultraviolet light to irradiate the parallel plates on one side of the vertical direction, drive the second ultraviolet irradiation submodule UV light 2 to emit ultraviolet light to irradiate the inspection mass surface opposite to the parallel plates on one side of the vertical direction, drive the third ultraviolet irradiation submodule UV light 3 to emit ultraviolet light to irradiate the parallel plates on the other side of the vertical direction, and drive the fourth ultraviolet irradiation submodule UV light 4 to emit ultraviolet light to irradiate the inspection mass surface opposite to the parallel plates on the other side of the vertical direction.

[0045] The output of the displacement measurement module is connected to the charge measurement module; one output end of the charge measurement module is connected to the interference observation sliding mode control module, and the other output end is subtracted from the input set charge value to obtain a charge error signal; the charge error signal is input to the interference observation sliding mode control module; the output end of the interference observation sliding mode control module is connected to the input end of the charge actuator module; the output end of the charge actuator is connected to the ultraviolet light irradiation module.

[0046] Embodiment 4: Corresponding to the aforementioned embodiment 2 of a charge management method based on interference observation sliding film control, the present invention further provides an embodiment of a charge management device based on interference observation sliding film control.

[0047] See also Figure 5 An embodiment of the present invention provides a charge management device based on interference observation sliding film control, including one or more processors, which are used to implement a charge management method based on interference observation sliding film control in the above embodiment.

[0048] An embodiment of a charge management device based on interference observation synovial control of the present invention can be applied to any device with data processing capability, and the device with data processing capability can be a device or apparatus such as a computer. The device embodiment can be implemented through software, or through hardware or a combination of software and hardware. Taking software implementation as an example, as a device in a logical sense, it is formed by the processor of any device with data processing capability in which it is located reading the corresponding computer program instructions in the non-volatile memory into the internal memory for execution. From the hardware level, if Figure 5 As shown, it is a hardware structure diagram of a charge management device based on interference observation sliding film control of the present invention in any device with data processing capability, except Figure 5In addition to the processor, memory, network interface, and non-volatile memory shown, any device with data processing capabilities in which the apparatus in the embodiments is located may also include other hardware, generally based on the actual functions of the device with data processing capabilities, which will not be described in detail.

[0049] The implementation process of the functions and effects of each unit in the above-mentioned device is specifically described in the implementation process of the corresponding steps in the above-mentioned method, and will not be repeated here.

[0050] For the device embodiment, since it basically corresponds to the method embodiment, the relevant parts can refer to the partial description of the method embodiment. The device embodiment described above is only schematic, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of the present invention. Ordinary technicians in this field can understand and implement it without paying creative work.

[0051] An embodiment of the present invention also provides a computer-readable storage medium, on which a program is stored. When the program is executed by a processor, a charge management method based on interference observation synovial control in the above embodiment is implemented. The computer-readable storage medium can be an internal storage unit of any device with data processing capability described in any of the above embodiments, such as a hard disk or a memory. The computer-readable storage medium can also be an external storage device of any device with data processing capability, such as a plug-in hard disk, a smart memory card (Smart Media Card, SMC), an SD card, a flash card (Flash Card), etc. equipped on the device. Further, the computer-readable storage medium can also include both an internal storage unit and an external storage device of any device with data processing capability. The computer-readable storage medium is used to store the computer program and other programs and data required by any device with data processing capability, and can also be used to temporarily store data that has been output or is to be output.

[0052] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A charge management device based on interference observation sliding film control, characterized in that: The device comprises: a test mass, parallel plates, an ultraviolet light irradiation module, a displacement measurement module, a charge measurement module, an interference observation sliding mode control module and a charge actuator module; The parallel plates are placed in the horizontal and vertical directions of the inspection mass, parallel to the surface of the inspection mass, all parallel plates are parallel to the inspection mass and at equal distances, the number of parallel plates placed on both sides of the horizontal direction of the inspection mass is the same, and the number of parallel plates placed on both sides of the vertical direction of the inspection mass is the same; The output end of the parallel electrode plate in the horizontal direction is connected to the displacement measurement module; the output of the displacement measurement module is connected to the charge measurement module; one output end of the charge measurement module is connected to the interference observation sliding mode control module, and the other output end is subtracted from the input set charge value to obtain a charge error signal; the charge error signal is input to the interference observation sliding mode control module; the output end of the interference observation sliding mode control module is connected to the input end of the charge actuator module; the output end of the charge actuator is connected to the ultraviolet light irradiation module; The disturbance observation sliding mode control module includes a disturbance observer, a sliding mode control module and a disturbance observation control module.

2. The charge management device based on interference observation sliding film control according to claim 1, characterized in that: The parallel plates in the horizontal direction are used to receive an AC driving voltage, so that the proof mass rotates, and the AC driving voltages applied to the adjacent parallel plates on the same side are equal in magnitude and opposite in direction; The vertical parallel plates are used to apply a bias voltage; The ultraviolet irradiation module includes a first ultraviolet irradiation submodule, a second ultraviolet irradiation submodule, a third ultraviolet irradiation submodule and a fourth ultraviolet irradiation submodule; The displacement measurement module is used to measure the displacement of the inspection mass relative to the parallel plates in the horizontal direction, and convert the displacement into a voltage signal and transmit it to the charge measurement module; The charge measurement module is used to receive a voltage signal, calculate the charge value of the inspection mass according to the voltage signal and input it into the interference observation sliding mode control module; At the same time, the charge value of the calculated inspection mass is subtracted from the set charge value to obtain a charge error signal and input it into the interference observation sliding mode control module; The interference observation sliding mode control module is used to receive the charge value of the test mass, the set charge value and the charge error signal, and based on the charge on-track charging and discharging model, calculate the charge and discharge rate required to control the charge of the test mass to the set charge value and input it to the charge actuator module; The charge actuator module is used to receive the charge and discharge rate, drive the ultraviolet light irradiation module to irradiate the parallel plates or the inspection mass surface in the vertical direction, and apply bias voltages of the same magnitude and opposite direction to the parallel plates on both sides of the vertical direction, respectively, to control the inspection mass charge to the set charge value.

3. The charge management device based on interference observation sliding film control according to claim 2, characterized in that: The number of the parallel plates is 6, including 4 parallel plates in the horizontal direction and 2 parallel plates in the vertical direction; The four parallel plates in the horizontal direction are respectively the first parallel plate, the second parallel plate, the third parallel plate and the fourth parallel plate; the first parallel plate and the third parallel plate are located on one side of the horizontal direction of the inspection mass, and the second parallel plate and the fourth parallel plate are located on the other side of the horizontal direction of the inspection mass; the first parallel plate is directly parallel to the second parallel plate; the third parallel plate is directly parallel to the fourth parallel plate; The two vertical parallel plates are respectively the fifth parallel plate and the sixth parallel plate; the fifth parallel plate is located on one side of the vertical direction of the inspection mass, and the sixth parallel plate is located on the other side of the vertical direction of the inspection mass; the fifth parallel plate is directly parallel to the sixth parallel plate.

4. The charge management device based on interference observation sliding film control according to claim 2, characterized in that: The driving ultraviolet irradiation module irradiates the parallel plates or the inspection quality surface in the vertical direction, specifically: Drive the first ultraviolet irradiation submodule to emit ultraviolet light to the parallel plates on one side of the vertical direction, drive the second ultraviolet irradiation submodule to emit ultraviolet light to the inspection mass surface opposite to the parallel plates on one side of the vertical direction, drive the third ultraviolet irradiation submodule to emit ultraviolet light to the parallel plates on the other side of the vertical direction, and drive the fourth ultraviolet irradiation submodule to emit ultraviolet light to the inspection mass surface opposite to the parallel plates on the other side of the vertical direction.

5. A charge management method based on interference observation sliding film control, characterized in that: The method uses the device according to any one of claims 1 to 4, and comprises the following steps: Parallel plates are placed in the horizontal direction and the vertical direction of the inspection mass, respectively, wherein all the parallel plates are parallel to the inspection mass and are at equal distances, the number of parallel plates placed on both sides of the horizontal direction of the inspection mass is the same, and the number of parallel plates placed on both sides of the vertical direction of the inspection mass is the same; Applying AC driving voltages of the same magnitude and opposite direction to the parallel plates in the horizontal direction of the inspection mass respectively, driving the inspection mass to rotate, measuring the displacement of the inspection mass relative to the parallel plates in the horizontal direction through the displacement measurement module, and converting the displacement into a voltage signal and transmitting it to the charge measurement module; The voltage signal of the charge measurement module is used to calculate the charge value of the test mass and input it into the interference observation sliding mode control module. At the same time, the charge value of the test mass calculated is subtracted from the set charge value to obtain a charge error signal and input it into the interference observation sliding mode control module. The interference observation sliding mode control module receives the charge value of the inspection mass, the set charge value and the charge error signal, and based on the charge on-track charging and discharging model, calculates the charge and discharge rate required to control the charge of the inspection mass to the set charge value and inputs it to the charge actuator module; The charge actuator module receives the charge and discharge rate, drives the ultraviolet light irradiation module to irradiate the parallel plates or the inspection mass surface in the vertical direction, and applies bias voltages of the same magnitude and opposite directions to the parallel plates on both sides of the vertical direction, respectively, to control the inspection mass charge to the set charge value.

6. The charge management method based on interference observation sliding film control according to claim 5, characterized in that: The on-track charging and discharging model is: ,in, represents the attenuation coefficient of the actual charging rate of the test mass in space; is the charge value of the test mass; is the derivative of the charge value of the test mass; Indicates the charge and discharge rate output by the sliding mode control module; Indicates the UV charge and discharge rate attenuation coefficient of the actual model; Represents unknown disturbance from the outside world; The charging and discharging rate output by the sliding mode control module for ,in, represents the charge error signal, represents the symbolic function, represents the first gain coefficient of the sliding mode control module, represents the second gain coefficient of the sliding mode control module, represents a sliding surface switching function; the sliding surface switching function for ,in, represents the gain coefficient; The output of the disturbance observer is ; in, Indicates external unknown disturbance The estimate, represents the derivative of the external unknown disturbance estimate, represents an estimate of the charge value of the test mass, is the derivative of the charge estimate of the test mass, represents the charge and discharge rate output by the disturbance observation control module in the disturbance observation sliding mode control module, represents the first gain coefficient of the disturbance observer, represents the second gain coefficient of the disturbance observer; The charge and discharge rate output by the interference observation control module for .

7. A charge management device based on interference observation sliding film control, characterized in that: It comprises one or more processors for implementing the charge management method based on interference observation sliding film control as described in any one of claims 5-6.

8. A computer-readable storage medium having a program stored thereon, characterized in that: When the program is executed by a processor, it is used to implement the charge management method based on interference observation sliding film control described in any one of claims 5-6.

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