System and method for testing breaking pressure value of mechanical gas testing element

Abstract

The invention discloses a system and a method for testing opening and closing pressure values of a mechanical gas testing element. The system comprises a gas pipeline, a first diaphragm valve, a product testing interface and a pump, one end of the gas pipeline is connected with the pump, the other end is a blind end, the first diaphragm valve is arranged at the blind end of the gas pipeline, and the product testing interface is arranged on the gas pipeline between the pump and the first diaphragm valve and used for connecting a mechanical gas testing element product; a pressure regulating valve is arranged between the product test interface and the pump and is used for regulating the gas pressure in the gas pipeline; a second diaphragm valve is arranged between the product test interface and the pressure regulating valve, a third diaphragm valve is arranged between the pump and the pressure regulating valve, and the first diaphragm valve, the second diaphragm valve and the third diaphragm valve are used for regulating the opening and closing of the gas pipeline; a measuring pressure gauge is arranged between the first diaphragm valve and the product testing interface and is used for detecting the vacuum pressure of the gas pipeline to obtain a product opening and closing pressure value; the device replaces and simulates the air pressure change working condition when the semiconductor vacuum cavity works, saves the cost, is convenient and simple, and is accurate and reliable in test.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and more particularly to a test system and method for the opening and closing pressure values of a mechanical gas sensor element. Background Art

[0002] Mechanical gas sensor elements are applied in semiconductor PVD equipment to detect changes in the gas pressure inside the vacuum chamber. During the production of mechanical gas sensor elements, it is necessary to measure the opening value and closing value of the mechanical gas sensor elements.

[0003] During the research and development of semiconductor equipment, it is necessary to test the products. Currently, each product needs to be placed at the client side for testing. Therefore, the company needs to spend a high price to purchase semiconductor equipment and supporting systems.

[0004] Therefore, how to design a test system that can simulate the working conditions of a semiconductor vacuum chamber and measure the opening and closing pressure values of a mechanical gas sensor element is an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0005] In view of this, the present invention provides a test system and method for the opening and closing pressure values of a mechanical gas sensor element to solve some of the technical problems mentioned in the background art.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] A test system for the opening and closing pressure values of a mechanical gas sensor element, comprising: a gas pipeline, a first diaphragm valve, a product test interface, and a pump;

[0008] One end of the gas pipeline is connected to the pump, the other end of the gas pipeline is a blind end, the first diaphragm valve is arranged at the blind end of the gas pipeline, and the product test interface is arranged on the gas pipeline between the pump and the first diaphragm valve;

[0009] The product test interface is used to connect the mechanical gas sensor element product;

[0010] A pressure regulating valve is arranged between the product test interface and the pump, and the pressure regulating valve is used to adjust the gas pressure in the gas pipeline;

[0011] A second diaphragm valve is arranged between the product test interface and the pressure regulating valve, and a third diaphragm valve is arranged between the pump and the pressure regulating valve. The first diaphragm valve, the second diaphragm valve, and the third diaphragm valve are used to adjust the opening and closing of the gas pipeline;

[0012] A measuring pressure gauge is arranged between the first diaphragm valve and the product test interface, and the measuring pressure gauge is used to detect the vacuum pressure of the gas pipeline so as to obtain the opening and closing pressure values of the mechanical gas sensor element product.

[0013] Preferably, the gas pipeline is connected to the pump through a corrugated pipe.

[0014] Preferably, the product test interface is connected to the gas inlet end of the mechanical gas measuring element, and the electrical interface end of the mechanical gas measuring element is connected to a resistance meter, which is used to detect the on-off state of the internal circuit of the mechanical gas measuring element.

[0015] Preferably, the two measured pressure gauge values corresponding to the transition from a conductive state to an open state and from an open state to a conductive state detected by the resistance meter are the opening and closing pressure values of the mechanical gas measuring element product.

[0016] Preferably, a micro switch is provided inside the mechanical gas measuring element product. If the air pressure at the gas inlet end is low, the micro switch inside the mechanical gas measuring element closes, and the resistance meter detects that the circuit is connected; if the air pressure at the gas inlet end is high, the micro switch inside the mechanical gas measuring element opens, and the resistance meter detects that the circuit is disconnected.

[0017] A method for testing the opening and closing pressure value of a mechanical gas measuring element includes the following steps:

[0018] S1. Install the mechanical gas measuring element product at the product test interface, and connect the electrical interface end plug of the mechanical gas measuring element with a resistance meter.

[0019] S2. Close the first diaphragm valve, open the second diaphragm valve and the third diaphragm valve, turn on the measuring pressure gauge, adjust the appropriate pressure unit, and turn on the pump by energizing.

[0020] S3. Gradually adjust the gas pipeline pressure to the closing value range of the mechanical gas measuring element through the manual pressure regulating valve, and detect the value of the measuring pressure gauge corresponding to the transition from a conductive state to an open state of the mechanical gas measuring element product through the resistance meter; gradually adjust the gas pipeline pressure to the opening value range of the mechanical gas measuring element through the manual pressure regulating valve, and detect the value of the measuring pressure gauge corresponding to the transition from an open state to a conductive state of the mechanical gas measuring element product through the resistance meter. The two values of the measuring pressure gauge are the opening and closing pressure values of the mechanical gas measuring element product.

[0021] Preferably, the method for testing the opening and closing pressure value of a mechanical gas measuring element further includes: S4. Compare the measured opening and closing pressure value of the mechanical gas measuring element product with the opening value and closing value range of the mechanical gas measuring element product. If it is within the opening value and closing value range of the product, it is qualified.

[0022] Preferably, the specific content of step S4 is:

[0023] When the manual pressure regulating valve adjusts the gas pipeline pressure to the closing value range of the mechanical gas measuring element, the pipeline vacuum degree is high, the measuring pressure gauge shows a small reading, and at this time the resistance meter is in the connected state, indicating that the lower limit value of the mechanical gas measuring element meets the requirements;

[0024] When the manual pressure regulating valve adjusts the gas pipeline pressure to increase to the opening value range of the mechanical gas measurement element, the ohmmeter is in the off state at this time, indicating that the upper limit value of the mechanical gas measurement element meets the requirements;

[0025] Otherwise, if one of the two values is not within the corresponding opening value and closing value ranges, it indicates that the mechanical gas measurement element is unqualified.

[0026] As can be seen from the above technical solutions, compared with the prior art, the present invention discloses a mechanical gas measurement element opening and closing pressure value test system and method. By simulating the working condition of the air pressure change when the semiconductor vacuum cavity works, the opening and closing values of the mechanical gas measurement element are measured. The test system can replace the working condition of the detection part of the semiconductor PVD equipment, without having to spend a high price to purchase semiconductor equipment and supporting systems, and there is no need to place each product at the client for testing, saving costs and being convenient and simple; the data tested by the present invention has a small difference from that of the client, the test results meet the requirements of the client, and the test is accurate and reliable. Brief Description of the Drawings

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained according to the provided drawings without creative efforts.

[0028] Figure 1 It is a schematic structural diagram of a mechanical gas measurement element opening and closing pressure value test system provided by the present invention;

[0029] Figure 2 It is a schematic diagram of a method for a mechanical gas measurement element opening and closing pressure value test system provided by the present invention;

[0030] Among them, 1 - first diaphragm valve, 2 - measuring pressure gauge, 3 - product test interface, 4 - second diaphragm valve, 5 - gas pipeline, 6 - pressure regulating valve, 7 - third diaphragm valve, 8 - bellows, 9 - pump. Detailed Embodiments

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0032] The embodiments of the present invention disclose a mechanical gas measurement element opening and closing pressure value test system, as Figure 1, including: a gas pipeline 5, a first diaphragm valve 1, a product test interface 3, and a pump 9;

[0033] One end of the gas pipeline 5 is connected to the pump 9, the other end of the gas pipeline 5 is a blind end, the first diaphragm valve 1 is arranged at the blind end of the gas pipeline 5, and the product test interface 3 is arranged on the gas pipeline 5 between the pump 9 and the first diaphragm valve 1;

[0034] The product test interface 3 is used to connect the mechanical gas measurement element product;

[0035] A pressure regulating valve 6 is arranged between the product test interface 3 and the pump 9, and the pressure regulating valve 6 is used to adjust the gas pressure in the gas pipeline 5;

[0036] A second diaphragm valve 4 is arranged between the product test interface 3 and the pressure regulating valve 6, and a third diaphragm valve 7 is arranged between the pump 9 and the pressure regulating valve 6. The first diaphragm valve 1, the second diaphragm valve 4, and the third diaphragm valve 7 are used to adjust the opening and closing of the gas pipeline 5;

[0037] A measuring pressure gauge 2 is arranged between the first diaphragm valve 1 and the product test interface 3, and the measuring pressure gauge 2 is used to detect the vacuum pressure of the gas pipeline 5 to obtain the opening and closing pressure value of the mechanical gas measurement element product.

[0038] To further implement the above technical solution, the gas pipeline 5 is connected to the pump 9 through a bellows 8.

[0039] To further implement the above technical solution, the product test interface 3 is connected to the gas inlet end of the mechanical gas measurement element, and the electrical interface end of the mechanical gas measurement element is connected to a resistance meter. The resistance meter is used to detect the on-off of the internal circuit of the mechanical gas measurement element.

[0040] To further implement the above technical solution, the two values of the measuring pressure gauge corresponding to the change from the on state to the off state and from the off state to the on state detected by the resistance meter are the opening and closing pressure values of the mechanical gas measurement element product.

[0041] In this embodiment, the pressure regulating valve adopts a manual pressure regulating valve. By adjusting the manual pressure regulating valve, the value shown on the measuring pressure gauge is displayed, and the opening and closing of the circuit are shown by the resistance meter.

[0042] To further implement the above technical solution, a micro switch is arranged inside the mechanical gas measurement element product. If the air pressure at the gas inlet end is small, the micro switch inside the mechanical gas measurement element closes, and the resistance meter detects that the circuit is connected; if the air pressure at the gas inlet end is large, the micro switch inside the mechanical gas measurement element opens, and the resistance meter detects that the circuit is disconnected.

[0043] A method for testing the opening and closing pressure value of a mechanical gas measurement element, as Figure 2 , includes the following steps:

[0044] S1. Install the mechanical gas measurement element product at the product test interface 3, and connect the electrical interface end plug of the mechanical gas measurement element with a resistance meter.

[0045] S2. Close the first diaphragm valve 1, open the second diaphragm valve 4 and the third diaphragm valve 7, turn on the measuring pressure gauge 2, adjust the appropriate pressure unit (Torr), and turn on the pump 9 by electrifying.

[0046] S3. Gradually adjust the pressure of the gas pipeline 5 to decrease to the lower limit spec range, i.e., the closing value range of the mechanical gas measurement element, through the manual pressure regulating valve 6, and detect the value of the measuring pressure gauge 2 corresponding to the mechanical gas measurement element product changing from a conducting state to an open state through the resistance meter; gradually adjust the pressure of the gas pipeline 5 to increase to the upper limit spec range, i.e., the opening value range of the mechanical gas measurement element, through the manual pressure regulating valve 6, and detect the value of the measuring pressure gauge 2 corresponding to the mechanical gas measurement element product changing from an open state to a conducting state through the resistance meter. The two values of the measuring pressure gauge 2 are the opening and closing pressure values of the mechanical gas measurement element product.

[0047] To further implement the above technical solution, a method for testing the opening and closing pressure values of a mechanical gas measurement element further includes: S4. Compare the measured opening and closing pressure values of the mechanical gas measurement element product with the spec range of the mechanical gas measurement element product, i.e., the opening value and the closing value range. If it is within the product spec range, it is qualified.

[0048] To further implement the above technical solution, the specific content of step S4 is:

[0049] When the manual pressure regulating valve 6 adjusts the pressure of the gas pipeline 5 to decrease to the lower limit spec range, i.e., the closing value range of the mechanical gas measurement element, the vacuum degree of the pipeline is high and the reading shown on the measuring pressure gauge 2 is small. At this time, the resistance meter is in the connected state, indicating that the lower limit value of the mechanical gas measurement element meets the requirements.

[0050] When the manual pressure regulating valve 6 adjusts the pressure of the gas pipeline 5 to increase to the upper limit spec range, i.e., the opening value range of the mechanical gas measurement element, at this time the resistance meter is in the disconnected state, indicating that the upper limit value of the mechanical gas measurement element meets the requirements.

[0051] Otherwise, if one of the two values is not within the corresponding spec range, i.e., the opening value and the closing value range, it indicates that the mechanical gas measurement element is unqualified.

[0052] In this specification, each embodiment is described in a progressive manner. Each embodiment focuses on the differences from other embodiments. For the same or similar parts among the embodiments, reference can be made to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and reference can be made to the description of the method part for the relevant parts.

[0053] The foregoing description of the disclosed embodiments enables those skilled in the art to practice or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A mechanical gas measuring element breaking pressure value testing system, characterized in that: include: Gas pipeline, first diaphragm valve, product test interface and pump; One end of the gas pipeline is connected to the pump, the other end of the gas pipeline is a blind end, the first diaphragm valve is arranged at the blind end of the gas pipeline, and the product test interface is arranged on the gas pipeline between the pump and the first diaphragm valve; Product test interface, used to connect mechanical gas testing component products; A pressure regulating valve is provided between the product test interface and the pump, and the pressure regulating valve is used to adjust the gas pressure in the gas pipeline; A second diaphragm valve is provided between the product test interface and the pressure regulating valve, and a third diaphragm valve is provided between the pump and the pressure regulating valve. The first diaphragm valve, the second diaphragm valve and the third diaphragm valve are used to adjust the opening and closing of the gas pipeline; A measuring pressure gauge is provided between the first diaphragm valve and the product test interface, and the measuring pressure gauge is used to detect the vacuum pressure of the gas pipeline to obtain the trip pressure value of the mechanical gas measuring element product.

2. A mechanical gas measuring element breaking pressure value testing system according to claim 1, characterized in that: The gas pipeline is connected to the pump via a bellows.

3. A mechanical gas measuring element breaking pressure value testing system according to claim 1, characterized in that: The product test interface is connected to the gas inlet end of the mechanical gas measuring element, and the electrical interface end of the mechanical gas measuring element is connected to an ohmmeter, which is used to detect the continuity of the internal circuit of the mechanical gas measuring element.

4. A mechanical gas measuring element breaking pressure value testing system according to claim 3, characterized in that: The two values ​​of the measured pressure gauge corresponding to the connection to the open circuit and the open circuit to the connection detected by the resistance meter are the breaking pressure values ​​of the mechanical gas measuring element product.

5. A mechanical gas measuring element breaking pressure value testing system according to claim 4, characterized in that: The mechanical gas measuring component is equipped with a micro switch inside. If the air pressure at the air inlet is low, the micro switch inside the mechanical gas measuring component is closed, and the resistance meter detects that the circuit is connected; if the air pressure at the air inlet is high, the micro switch inside the mechanical gas measuring component is disconnected, and the resistance meter detects that the circuit is disconnected.

6. A method for testing the breaking pressure value of a mechanical gas measuring element, characterized in that: The following steps are involved: S1. Install the mechanical gas measuring component product at the product test interface, and connect the electrical interface plug of the mechanical gas measuring component with an ohmmeter; S2. Close the first diaphragm valve, open the second diaphragm valve and the third diaphragm valve, turn on the measuring pressure gauge, adjust the pressure unit to a suitable level, and power on the pump; S3. Use a manual pressure regulating valve to gradually adjust the gas pipeline pressure to the closing value range of the mechanical gas measuring element, and use a resistance meter to detect the value of the measuring pressure gauge corresponding to the mechanical gas measuring element product from passage to open circuit; use a manual pressure regulating valve to gradually adjust the gas pipeline pressure to the opening value range of the mechanical gas measuring element, and use a resistance meter to detect the value of the measuring pressure gauge corresponding to the mechanical gas measuring element product from open circuit to passage. The two values ​​of the measuring pressure gauge are the starting and breaking pressure values ​​of the mechanical gas measuring element product.

7. A method for testing the breaking pressure value of a mechanical gas measuring element according to claim 6, characterized in that: Also includes: S4. Compare the measured trip pressure value of the mechanical gas measuring component product with the opening value and closing value range of the mechanical gas measuring component product. If it is within the opening value and closing value range of the product, it is qualified.

8. A method for testing the breaking pressure value of a mechanical gas measuring element according to claim 7, characterized in that: The specific content of step S4 is: When the manual pressure regulating valve adjusts the gas pipeline pressure to the closing value range of the mechanical gas measuring element, the pipeline vacuum is large, the measuring pressure gauge displays a small reading, and the resistance meter is in the on state, indicating that the lower limit value of the mechanical gas measuring element meets the requirements; When the manual pressure regulating valve adjusts the gas pipeline pressure to the opening value range of the mechanical gas measuring element, the resistance meter is in the disconnected state, indicating that the upper limit value of the mechanical gas measuring element meets the requirements; Otherwise, if one of the two values ​​is not within the corresponding opening value and closing value range, it means that the mechanical gas measuring element is unqualified.

Images