Multi-pitch adjustable four-sided needling device

Abstract

The application discloses a kind of multi-Pitch adjustable four-face needle equipment, to provide a kind of simple structure, with independent adjusting mechanism, cooperate visual positioning system multi-face independent adjustable probe test multi-Pitch adjustable four-face needle equipment.The application includes machine, probe adjustment module and transmission correction module, four groups probe adjustment module are arranged on the upper end of the machine, the transmission correction module is arranged on the lower end of the machine, the lower needle avoidance opening is arranged on the upper end of the machine, and the probe end of the four groups probe adjustment module is respectively matched with the corresponding lower needle position on the product on the transmission correction module.The application is applied to the technical field of product testing.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of product testing, and particularly relates to a multi-Pitch adjustable four-side needle clamping device. BACKGROUND

[0002] In the modern semiconductor testing field, chip testing is a key link to ensure product quality and reliability. With the continuous improvement of integrated circuit integration and the continuous reduction of chip size, the testing technology faces many challenges: the number of chip I / Os is increasing, the pitch between test points (pads) is continuously decreasing, the chip packaging form is diversified, from the traditional single-sided contact to multi-sided contact, the demand for testing frequency is increasing, the requirements for contact resistance and signal integrity are more stringent, the testing cost pressure is increasing, and higher parallel testing capability and faster testing period are required. The traditional testing techniques such as probe card and test socket have been difficult to meet these requirements, especially in high-density, multi-sided contact application scenarios. Therefore, it is of important industrial application value to develop an intelligent needle clamping system that can adapt to different pitch requirements and support multi-sided simultaneous testing.

[0003] The current needle clamping system on the market cannot realize synchronous testing of the east, south, west and north, and it is difficult to meet the testing requirements; the pitch adjustment capability is insufficient: either the fixed pitch needs to be frequently replaced with hardware, or the adjustment range is limited (usually <±30%); the contradiction between high-frequency performance and density: high-density probe array often sacrifices signal integrity, and it is difficult to balance GHz-level testing and small pitch; the degree of automation is low: probe reconfiguration relies on manual intervention, the changeover time is long, and the equipment utilization rate is low. For example, the Chinese patent with the application number “202510872981.7” discloses a multi-directional self-adaptive adjusting chip probe testing fixture, which comprises a base, and a probe testing assembly is installed at the top end of the base. The self-adaptive adjustment of the direction and inclination angle of the chip is realized through an adjusting mechanism, the stable clamping of the chip is realized through a clamping mechanism, and the chip can be accurately rotated by 90° when the clamping is released. The application realizes independent testing of multiple needle points of the chip by rotating multiple directions of a single probe assembly, cannot realize pitch adjustment between probes in a multi-specification chip testing line, and cannot realize multi-point synchronous testing of the chip. If a multi-Pitch adjustable four-side needle clamping device with simple structure, independent adjustment mechanism and multi-sided independently adjustable probe testing cooperating with a visual positioning system can be designed, the above problems can be solved. SUMMARY

[0004] The technical problem to be solved by the present application is to overcome the shortcomings of the prior art, and to provide a multi-Pitch adjustable four-side needle clamping device with simple structure, independent adjustment mechanism and multi-sided independently adjustable probe testing cooperating with a visual positioning system.

[0005] The technical scheme adopted by the present application is: the present application comprises a machine table, a probe adjusting module and a conveying and correcting module, a plurality of sets of the probe adjusting module are arranged on the upper end of the machine table, the conveying and correcting module is arranged on the lower end of the machine table, a lower needle avoiding opening is arranged in the middle of the upper end of the machine table, the probe ends of the plurality of sets of the probe adjusting module pass through the lower needle avoiding opening and are matched with corresponding lower needle positions on the products on the conveying and correcting module.

[0006] Further, four sets of the probe adjusting module arrays are arranged on the outer side of the upper end face of the machine table, the probe adjusting module comprises an adjusting support frame, a pushing-out air cylinder, a side pushing clamping jaw module and a probe module, the pushing-out air cylinder is arranged on one side of the upper end face of the machine table, the adjusting support frame is connected with the movable end of the pushing-out air cylinder, the probe module is arranged on one side of the upper end of the adjusting support frame, the side pushing clamping jaw module is arranged on the lower end of the adjusting support frame and is matched with the probe module, and four sets of the probe module are matched with the lower needle positions of the four edges of the product through the lower needle avoiding opening.

[0007] Further, the probe module comprises a bottom plate, a plurality of shifting blocks and a plurality of probes, the plurality of shifting blocks are connected with the bottom plate through sliding shafts, the plurality of probes are respectively arranged at the ends of the plurality of shifting blocks, the lower end of the bottom plate is provided with a plurality of sliding grooves, and the clamping jaw end of the side pushing clamping jaw module is matched with the plurality of shifting blocks through the sliding grooves.

[0008] Further, the side pushing clamping jaw module comprises a lifting air cylinder, a lifting frame, a side pushing air cylinder and a micro clamping jaw, the lifting air cylinder is arranged on the lower end of the adjusting support frame, the lifting frame is connected with the movable end of the side pushing air cylinder, the side pushing air cylinder is arranged on the upper end of the lifting frame, the micro clamping jaw is connected with the movable end of the side pushing air cylinder, and the clamping jaw end of the micro clamping jaw is matched with the shifting block through the sliding groove.

[0009] Further, a plurality of sets of the screw rod pressing-down modules are arranged on the upper end of the adjusting support frame, the screw rod pressing-down module comprises a rotating motor, a screw rod, a moving block and a pressing module, the rotating motor is arranged on the upper end of the adjusting support frame, the screw rod is connected with the movable end of the rotating motor, the moving block is matched with the screw rod, the pressing module is connected with one end of the moving block, and the pressing end of the pressing module is matched with the upper ends of the plurality of shifting blocks.

[0010] Further, the pressing module comprises a supporting block, a film air cylinder and a pressing-down block, the pressing-down block is floatingly connected with the lower end of the supporting block, the film air cylinder is arranged on the lower end of the supporting block and drives the pressing-down block to be matched with the upper ends of the plurality of shifting blocks.

[0011] Further, the conveying and correcting module comprises an X-axis movement module, a Y-axis movement module, a Z-axis movement module, a rotating platform and a product carrier, the X-axis movement module is arranged at the lower end of the machine table, the Z-axis movement module is connected with the movable end of the X-axis movement module, the rotating platform is connected with the movable end of the Z-axis movement module, the Y-axis movement module is connected with the movable end of the rotating platform, the product carrier is connected with the movable end of the Y-axis movement module, and the X-axis movement module, the Z-axis movement module and the rotating platform drive the product at the upper end of the product carrier to cooperate with the probe ends of the plurality of groups of probe adjusting modules.

[0012] Further, the upper end of the machine table is provided with a downward-looking visual module, the downward-looking visual module comprises a downward-looking support, a Z-axis adjusting sliding table and a downward-looking camera, the downward-looking support is arranged at the upper end of the machine table, the Z-axis adjusting sliding table is arranged on the downward-looking support, the downward-looking camera is connected with the movable end of the Z-axis adjusting sliding table and cooperates with the probe module and the product on the product carrier.

[0013] Further, the upper end of the machine table is provided with a feeding opening, and the feeding opening cooperates with the product carrier.

[0014] Further, the product carrier is provided with a vacuum adsorption module, and the adsorption end of the vacuum adsorption module is adsorbed and cooperated with the product at the upper end of the product carrier.

[0015] The beneficial effects of the present application are: the present application adopts a four-face synchronous test architecture: single-device four-face (east, south, west and north) synchronous test is realized, 25 needles are arranged on a single face, and up to 100 needles of the whole machine can be synchronously tested; ultra-large range pitch adjustment: the independent adjustment range of a single needle is 0-7.5mm, different pitches (such as region A: 0.15mm pitch, region B: 0.4mm pitch) are supported in different regions of the same chip; ultra-high-precision alignment system: the demand of tip chip testing is met; high-frequency test performance: high-speed interface test is supported; intelligent adaptive control: the probe path is automatically planned through image combined with AI algorithm. These innovations enable the present application to effectively solve the core pain points in current semiconductor testing and provide an efficient, flexible and reliable test solution for the next generation of chips. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a perspective view of the present application;

[0017] Figure 2 is a perspective view of the probe adjusting module;

[0018] Figure 3 is a perspective view of the side pushing clamp jaw module;

[0019] Figure 4 This is a three-dimensional view of the probe module;

[0020] Figure 5 This is a stereoscopic view of the probe module from another perspective;

[0021] Figure 6 This is a perspective view of the lead screw pressing module;

[0022] Figure 7 This is a three-dimensional view of the transmission correction module;

[0023] Figure 8 This is a three-dimensional view of the machine tool;

[0024] Figure 9 This is a stereoscopic view of the overhead visual module. Detailed Implementation

[0025] like Figures 1 to 8 As shown, in this embodiment, the present invention includes a machine base 1, a probe adjustment module 2, and a conveying and correcting module 3. Several sets of the probe adjustment modules 2 are disposed on the upper end of the machine base 1, and the conveying and correcting module 3 is disposed on the lower end of the machine base 1. A needle-avoiding opening 4 is provided in the middle of the upper end of the machine base 1. The probe ends of the several sets of probe adjustment modules 2 respectively cooperate with the corresponding needle positions on the product 5 on the conveying and correcting module 3 through the needle-avoiding opening 4. Therefore, the four sets of probe adjustment modules are respectively disposed in the four cardinal directions (north, south, east, and west) on the upper end of the machine base 1, allowing for simultaneous needle-piercing tests on the four sides of the product 5. The conveying and correcting module 3 can achieve synchronous adjustment with the four sets of probe adjustment modules 2, enabling the product 5 to accurately align with the four sets of probe adjustment modules 2. The structure is simple and the testing efficiency is high.

[0026] like Figure 2 As shown, in this embodiment, four sets of probe adjustment modules 2 are arrayed on the outer side of the upper surface of the machine base 1. Each probe adjustment module 2 includes an adjustment support frame 21, an ejection cylinder 22, a side-push gripper module 23, and a probe module 24. The ejection cylinder 22 is located on one side of the upper surface of the machine base 1. The adjustment support frame 21 is connected to the movable end of the ejection cylinder 22. The probe module 24 is located on one side of the upper end of the adjustment support frame 21. The side-push gripper module 23 is located at the lower end of the adjustment support frame 21 and cooperates with the probe module 24. The four sets of probe modules 24 cooperate with the needle insertion positions on the four sides of the product 5 through the needle insertion avoidance opening 4. Thus, the ejection cylinder 22 and the side-push gripper module 23 respectively drive the probe module 24 to be ejected as a whole and adjust the lateral movement of the probe spacing to achieve precise positioning of the needle insertion point on the same side of the product.

[0027] likeFigure 4 And Figure 5 As shown in

[0028] As shown in Figure 2 And Figure 3 As shown in

[0029] As shown in Figure 2 And Figure 6 As shown in

[0030] As shown in Figure 6As shown in the embodiment, the pressing module 26 comprises a support block 261, a film air cylinder 262, and a pressing block 263, the pressing block 263 is floatingly connected with the lower end of the support block 261, and the film air cylinder 262 is arranged at the lower end of the support block 261 and drives the pressing block 263 to cooperate with the upper ends of the plurality of pressing blocks 242. Thus, the film air cylinder 262 drives the pressing block 263 to press down so that the pressing blocks 242 can be stably positioned at the positions where the needles need to be pressed.

[0031] As shown in the embodiment, the pressing module 26 comprises a support block 261, a film air cylinder 262, and a pressing block 263, the pressing block 263 is floatingly connected with the lower end of the support block 261, and the film air cylinder 262 is arranged at the lower end of the support block 261 and drives the pressing block 263 to cooperate with the upper ends of the plurality of pressing blocks 242. Thus, the film air cylinder 262 drives the pressing block 263 to press down so that the pressing blocks 242 can be stably positioned at the positions where the needles need to be pressed. Figure 2 and Figure 7 As shown in the embodiment, the pressing module 26 comprises a support block 261, a film air cylinder 262, and a pressing block 263, the pressing block 263 is floatingly connected with the lower end of the support block 261, and the film air cylinder 262 is arranged at the lower end of the support block 261 and drives the pressing block 263 to cooperate with the upper ends of the plurality of pressing blocks 242. Thus, the film air cylinder 262 drives the pressing block 263 to press down so that the pressing blocks 242 can be stably positioned at the positions where the needles need to be pressed.

[0032] As shown in the embodiment, the pressing module 26 comprises a support block 261, a film air cylinder 262, and a pressing block 263, the pressing block 263 is floatingly connected with the lower end of the support block 261, and the film air cylinder 262 is arranged at the lower end of the support block 261 and drives the pressing block 263 to cooperate with the upper ends of the plurality of pressing blocks 242. Thus, the film air cylinder 262 drives the pressing block 263 to press down so that the pressing blocks 242 can be stably positioned at the positions where the needles need to be pressed. Figure 2 and Figure 9 As shown in the embodiment, the pressing module 26 comprises a support block 261, a film air cylinder 262, and a pressing block 263, the pressing block 263 is floatingly connected with the lower end of the support block 261, and the film air cylinder 262 is arranged at the lower end of the support block 261 and drives the pressing block 263 to cooperate with the upper ends of the plurality of pressing blocks 242. Thus, the film air cylinder 262 drives the pressing block 263 to press down so that the pressing blocks 242 can be stably positioned at the positions where the needles need to be pressed.

[0033] As shown in the embodiment, the pressing module 26 comprises a support block 261, a film air cylinder 262, and a pressing block 263, the pressing block 263 is floatingly connected with the lower end of the support block 261, and the film air cylinder 262 is arranged at the lower end of the support block 261 and drives the pressing block 263 to cooperate with the upper ends of the plurality of pressing blocks 242. Thus, the film air cylinder 262 drives the pressing block 263 to press down so that the pressing blocks 242 can be stably positioned at the positions where the needles need to be pressed. Figure 8As shown, in the embodiment, the machine table 1 is provided with an upper feeding opening 7 at the upper end, which is matched with the product carrier 35.

[0034] As shown, in the embodiment, the product carrier 35 is provided with a vacuum adsorption module 8, the adsorption end of which is matched with the product 5 at the upper end of the product carrier 35. Figure 7 As shown, in the embodiment, the product carrier 35 is provided with a vacuum adsorption module 8, the adsorption end of which is matched with the product 5 at the upper end of the product carrier 35.

[0035] The working principle of the present application is as follows: the product 5 is placed on the product carrier 35 by the artificial or mechanical hand through the upper feeding opening 7, the product 5 is adsorbed on the product carrier 35 by the vacuum adsorption module 8 and is transmitted to the intermediate test position, and the product 5 is corrected in position in the XYR axis direction by cooperating with the low-angle camera 63, the Pad points needing to be tested are automatically selected according to the test items of the product 5, the position of each probe 243 is cooperated with the low-angle camera 63, the micro clamping jaw 234 adjusts the push stroke according to the interval of the Pad points and clamps the push block 242 to make the probe 243 side push to the accurate needle spacing, after the clamping side pushing is completed, the push block 242 is positioned by the downward pushing of the downward pushing block 263, and the probe side pushing positioning adjustment and the push block downward pushing steps are repeatedly alternated, after the positioning of the four groups of probes 24 on the four edges of the product 5 is completed, the product carrier 35 is driven to rise by the Z-axis movement module 33, and the needle downward pushing test is realized, after the test is completed, each module is reset, the product 5 to be tested is replaced, and the above steps are repeated, so that the multi-Pitch adjustable four-side needle piercing of the product can be realized.

[0036] Although the embodiments of the present application are described in actual schemes, but do not constitute a limitation on the meaning of the present application, and it is obvious for those skilled in the art to modify the embodiments thereof and combine them with other schemes according to the present specification.

Claims

1. A multi-pitch adjustable four-sided needle insertion device, comprising a machine base (1), a probe adjustment module (2), and a conveying and correction module (3), characterized in that: The four sets of probe adjustment modules (2) are set on the upper end of the machine base (1), and the conveying and correction module (3) is set on the lower end of the machine base (1). The upper end of the machine base (1) is provided with a needle avoidance port (4). The probe ends of the four sets of probe adjustment modules (2) are respectively matched with the corresponding needle positions on the product (5) on the conveying and correction module (3) through the needle avoidance port (4). The probe adjustment module (2) includes an adjustment support frame (21), a push cylinder (22), a side push gripper module (23), and a probe module (24). The push cylinder (22) is set on one side of the upper end face of the machine base (1). The adjustment support frame (21) is connected to the movable end of the push cylinder (22). The probe module (24) is set on the adjustment support frame (21). On one side, the side-push gripper module (23) is located at the lower end of the adjusting support frame (21) and cooperates with the probe module (24). The four sets of probe modules (24) cooperate with the lower needle positions on the four sides of the product (5) through the lower needle avoidance port (4). The probe module (24) includes a base plate (241), a number of levers (242) and a number of probes (243). The levers (242) are connected to the base plate (241) through the sliding shaft (244). The probes (243) are respectively located at the ends of the levers (242). The lower end of the base plate (241) is provided with a number of sliding grooves (245). The gripper end of the side-push gripper module (23) cooperates with the levers (242) through the sliding grooves (245). The side-push gripper module (23) includes a lifting cylinder (231), a lifting frame (232), a side-push cylinder (233), and a miniature gripper (234). The lifting cylinder (231) is located at the lower end of the adjusting support frame (21). The lifting frame (232) is connected to the movable end of the side-push cylinder (233). The side-push cylinder (233) is located at the upper end of the lifting frame (232). The miniature gripper (234) is connected to the movable end of the side-push cylinder (233). The gripper end of the miniature gripper (234) cooperates with the lever block (242) through the sliding groove (245).

2. The multi-pitch adjustable four-sided needle insertion device according to claim 1, characterized in that: The upper end of the adjustment support frame (21) is provided with several sets of lead screw pressing modules (25). The lead screw pressing module (25) includes a rotating motor (251), a lead screw (252), a moving block (253), and a pressing module (26). The rotating motor (251) is located on the upper end of the adjustment support frame (21). The lead screw (252) is connected to the movable end of the rotating motor (251). The moving block (253) cooperates with the lead screw (252). The pressing module (26) is connected to one end of the moving block (253), and the pressing end of the pressing module (26) cooperates with the upper end of several of the levers (242).

3. The multi-pitch adjustable four-sided needle insertion device according to claim 2, characterized in that: The pressing module (26) includes a support block (261), a diaphragm cylinder (262), and a lower pressing block (263). The lower pressing block (263) is floatingly connected to the lower end of the support block (261). The diaphragm cylinder (262) is located at the lower end of the support block (261) and drives the lower pressing block (263) to cooperate with the upper ends of a plurality of the push blocks (242).

4. The multi-pitch adjustable four-sided needle insertion device according to claim 1, characterized in that: The transmission and correction module (3) includes an X-axis motion module (31), a Y-axis motion module (32), a Z-axis motion module (33), a rotating platform (34), and a product stage (35). The X-axis motion module (31) is located at the lower end of the machine tool (1). The Z-axis motion module (33) is connected to the movable end of the X-axis motion module (31). The rotating platform (34) is connected to the movable end of the Z-axis motion module (33). The Y-axis motion module (32) is connected to the movable end of the rotating platform (34). The product stage (35) is connected to the movable end of the Y-axis motion module (32). The X-axis motion module (31), the Z-axis motion module (33), and the rotating platform (34) drive the product (5) on the upper end of the product stage (35) to cooperate with the probe ends of several sets of probe adjustment modules (2).

5. The multi-pitch adjustable four-sided needle insertion device according to claim 4, characterized in that: The machine tool (1) is equipped with a top-down vision module (6). The top-down vision module (6) includes a top-down support (61), a Z-axis adjustment slide (62), and a top-down camera (63). The top-down support (61) is located on the machine tool (1). The Z-axis adjustment slide (62) is located on the top-down support (61). The top-down camera (63) is connected to the movable end of the Z-axis adjustment slide (62) and cooperates with the probe module (24) and the product (5) on the product platform (35).

6. The multi-pitch adjustable four-sided needle insertion device according to claim 4, characterized in that: The upper end of the machine platform (1) is provided with a feeding port (7), which is in conjunction with the product carrier (35).

7. The multi-pitch adjustable four-sided needle insertion device according to claim 4, characterized in that: The product stage (35) is provided with a vacuum adsorption module (8), and the adsorption end of the vacuum adsorption module (8) is adsorbed and cooperates with the product (5) on the upper end of the product stage (35).

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