An on-chip microfluidic micro-H2 sensor and its fabrication method

By coating a Pd thin film with an MOF thin film to form a three-dimensional microtube structure, the problem of reduced sensitivity of Pd-based H2 sensors in air was solved, enabling rapid detection of low-concentration H2 and miniaturized integration of the sensor.

CN120044081BActive Publication Date: 2026-06-02FUDAN UNIVERSITY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
FUDAN UNIVERSITY
Filing Date
2025-02-21
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

Existing Pd-based H2 sensors exhibit reduced sensitivity in the presence of interfering gases such as O2, SO2, and H2S in the air, and their large size makes it difficult to achieve efficient miniaturization and integration of microfluidic detection at room temperature.

Method used

A Pd film is coated with a MOF film to form a three-dimensional microtube structure. The microporous structure of the MOF film allows H2 molecules to pass through selectively while isolating other gas molecules. Combined with the Pd film, this enables rapid detection of low-concentration H2.

Benefits of technology

It achieves sensitive and rapid detection of low concentrations of H2, avoids the influence of interfering gases, is suitable for modern semiconductor integrated devices, and has high sensitivity and fast response capabilities.

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Abstract

The application discloses a microfluidic micro H2 sensor on a chip and a preparation method thereof, and belongs to the technical field of gas sensing. The method grows a Pd film between two MOF films, and rolls the three-layer composite film into a tubular structure, so that pipeline type rapid detection of microfluidic micro H2 on the chip is realized. By using the micropore structure of the MOF film, small-molecule target H2 molecules are selectively permeated, and other gas molecules larger than the micropore are isolated outside, so that sensitive detection and rapid response to low-concentration H2 are realized.
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