Multi-point milling path design method for full-surface feature structure of thin-wall spherical shell type micro component

Abstract

The invention discloses a multi-point milling path design method for a full-surface feature structure of a thin-wall spherical shell type micro-component, relates to the technical field of micro-component machining, and can meet the requirement of a high-precision, stable and controllable removal process for the full-surface feature structure of the thin-wall spherical shell type micro-component under the constraint of a micro space scale. According to the technical key points, the method comprises the steps of feature structure space uniform distribution, microstructure machining sequence planning and multi-point milling path generation. The thin-wall spherical shell micro-component to be machined is observed off line through an optical microscope, the contour edge feature point coordinates of the micro-component are obtained, and the diameter of the micro-component is obtained through fitting. And based on a secondary development platform of UG software, a microstructure machining sequence planning method driven by the shortest machining path is established, and machining sequence planning of the microstructure on the whole surface of the micro component is completed. Based on point set coordinates optimized by a spherical point set uniform distribution iterative algorithm and a processing sequence under the driving of a shortest processing path, and in combination with ultra-precision shape control processing equipment configuration characteristics and microstructure processing technology requirements, a plurality of uniformly distributed point set coordinates with a micro-component sphere center as an original point are converted into a processing coordinate system with a tool setting point as an original point; and obtaining the original coordinates of the microstructure point set and the corresponding feature angles. The full-surface milling device is used for full-surface milling of the thin-wall spherical shell type micro component.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-component processing, and particularly to a method for designing multi-point milling paths for full-surface feature structures of thin-walled spherical shell micro-components. Background Art

[0002] With the increasingly frequent scientific and technological cooperation among countries around the world in the fields of aerospace, biomedicine, mechatronics, etc., various precision and integrated complex micro-components have been widely used. For example, a polymer micro-component with a diameter of 1 mm to 5 mm and a wall thickness of 20 μm to 200 μm has an increasing demand in the field of new energy exploration due to its excellent characteristics such as low density and atomic number, high deposition rate, and good thermal stability. Dozens to more than a hundred feature micro-structures at the micron scale are distributed on the entire surface of this type of micro-component, and the surface shape is required to reach micron-level shape accuracy, nano-level surface roughness, and micron-level pit spacing error, which poses severe challenges to the ultra-precision manufacturing process under micro-space scale constraints, the generation method of multi-point milling paths for complex micro-structures, and the generation strategy.

[0003] At present, the five-axis precision manufacturing technology with a relatively high technology maturity level and the ultra-precision manufacturing technology mainly based on two-axis and three-axis cannot meet the actual engineering requirements of high-precision generation of micro-components due to factors such as insufficient manufacturing process capabilities and insufficient coupling degree between manufacturing processes and equipment. For the high-precision machining requirements under such narrow space constraints, it is necessary to design the full-surface micro-structure processing technology based on the configuration characteristics of a dedicated multi-axis linkage micro-component ultra-precision shape control machining equipment, and optimize the design of the key machining point coordinates, machining paths, and the generation method of executable program files, and then form a high-precision generation strategy. Since the diameter of the thin-walled spherical shell micro-component is relatively small (1 mm to 5 mm), and the diameter difference between the thin-walled spherical shells in the same batch is relatively large, a relatively high requirement is put forward for the calculation accuracy of multi-point machining coordinates. How to obtain the optimized spatial coordinates of the evenly distributed micro-structures on the full surface, complete the planning of the full-surface machining sequence, realize the coordinate transformation of multi-point milling of micro-structures and the generation of milling paths, and then obtain an executable numerical control program file according to the marked diameter of the micro-component, the number of micro-structures, the depth to be milled, and the safety distance range is the key to ensuring the machining quality of the full-surface micro-structures of the thin-walled spherical shell micro-component. In the prior art, the multi-axis linkage ultra-precision milling process mainly aims at the removal of single / array structure features such as plane, cylinder and other regular basic contours, micro-grooves, micro-pits, etc., and has relatively low requirements for the uniformity of micro-structure distribution, the calculation accuracy of point coordinates, the machining sequence, etc. Relatively speaking, the equipment and generation process for the stable and controllable removal of materials with complex basic contours and spatially evenly distributed feature structures are still in the technical blank stage.

[0004] Therefore, there is an urgent need to propose a design method (generation strategy) for the multi-point milling path of the full-surface feature structure of micro-components to meet the high-precision machining engineering requirements of thin-walled spherical shell micro-components under narrow space constraints, so as to realize the generation of spatially distributed complex multi-point milling paths and the stable and controllable removal of materials, filling the domestic technical gap. Summary of the Invention

[0005] The technical problem to be solved by the present invention is that the current five-axis precision manufacturing technology with a relatively high technological maturity and the ultra-precision manufacturing technology mainly based on two-axis and three-axis cannot meet the process requirements for the high-precision, stable and controllable removal of the full-surface feature structure of small thin-walled spherical shell components under micro-space scale constraints due to factors such as insufficient manufacturing process capabilities and insufficient coupling degree between manufacturing processes and equipment. A design method for the multi-point milling path of the full-surface feature structure of small thin-walled spherical shell components is provided.

[0006] The technical solution adopted by the present invention to solve the above technical problem is as follows:

[0007] A design method for the multi-point milling path of the full-surface feature structure of thin-walled spherical shell micro-components, the method is established based on an ultra-precision shape control processing equipment for thin-walled spherical shell micro-components, and the implementation process of the method includes:

[0008] Spatial distribution of feature structures, planning of micro-structure processing sequences, and generation of multi-point milling paths;

[0009] Spatial distribution of feature structures: First, observe the thin-walled spherical shell micro-component offline through an optical microscope to obtain the coordinate O of the feature points on the contour edge of the micro-component s1 (x 1 , y 1 ), O s2 (x 2 , y 2 ), O s3 (x 3 , y 3 ), fit to obtain the diameter D of the micro-component 1 ; taking the center of the sphere of the micro-component as the coordinate origin, establish a workpiece coordinate system O w -X w Y w Z w , distribute N micro-structure process requirements around the surface of the micro-component, and based on the Fibonacci sequence principle, obtain the original points P of N evenly distributed micro-structures on the full surface of the micro-component 2 Spatial coordinates N wi-P2 (x w-i , y w-i , z w-i ), and optimize the uniformity of the micro-structures by a uniformity optimization method;

[0010] Microstructure machining sequence planning: Based on the secondary development platform of UG software, a microstructure machining sequence planning method driven by "the shortest machining path d" is established to complete the calibration of the microstructure machining sequence; p "

[0011] Multi-point milling path generation: Based on the point set coordinates optimized by the spherical point set uniform distribution iterative algorithm and the machining sequence driven by "the shortest machining path", combined with the configuration characteristics of the ultra-precision shape control machining equipment and the requirements of the microstructure machining process, the coordinates of several uniformly distributed point sets with the center of the micro-component sphere as the origin are converted into the machining coordinate system with the tool setting point as the origin to obtain the original coordinates of the microstructure point set and the corresponding characteristic angles; From the milling depth and safety distance of the microstructure, through the coordinate transformation and milling path planning methods, the coordinates of the points to be machined and the safety point coordinates in the machining coordinate system are obtained to complete the multi-point milling coordinate transformation and milling path generation; Based on the multi-point milling path design method, the coordinates of N uniformly distributed microstructure point sets N w (x wi-P2 (x i ,y i ,z i ) with the center of the micro-component sphere O m as the origin are converted into the machining coordinate system O m -X m Y m Z m to obtain the original point positions P 2 coordinates N cotm-P2 (x i ,y i ,z i ) of the microstructure point set in the machining coordinate system and the corresponding characteristic angle α wi ; From the milling depth a p and the safety distance d s , through the coordinate transformation method, the coordinates N m -X m Y m Z m of the points to be machined P 3 and the safety point P mi-P3 (x mi-P3 ,y mi-P3 ,z mi-P3 ) in the machining coordinate system O 1 are obtained. mi-P1 (x mi-P1 ,y mi-P1 ,z mi-P1 ) of the safety point P

[0012] The present invention has the following beneficial technical effects:

[0013] The present invention focuses on explaining the multi-point milling path generation, path design method and executable file generation method of original points, points to be processed, safety points, etc. during multi-point milling of the full-surface characteristic structure of thin-walled spherical shell micro-components, and fully introduces the microstructure creation / processing strategy.

[0014] This method and strategy is based on the ultra-precision shape-control processing equipment for micro-components. The diameter of the thin-walled spherical shell micro-component to be processed is observed and marked offline through an optical microscope. The workpiece coordinate system is established with the center of the micro-component as the coordinate origin. The spatial coordinates of the characteristic structure uniformly distributed on the entire surface of the micro-component are obtained by the Fibonacci algorithm and uniformity optimization method (this method is the basis for the subsequent multi-point milling path optimization, which has been explained in ZL202111063284.5); based on the UG software secondary development platform, the spatial uniform characteristic structure processing sequence planning is completed. Further, the multi-point milling path design method is used to complete the multi-point milling coordinate transformation and milling path generation with the original points, points to be processed, and safe points on the surface of the micro-component as the research objects; the processing program is written in combination with the configuration and process characteristics of the ultra-precision shape-control equipment mentioned above; the executable file type of the CNC system is matched to generate the processing CNC program file; based on the FTP protocol, the program file is downloaded and executed to achieve efficient, stable and controllable removal of the characteristic structure of the entire surface of the thin-walled spherical shell micro-component. The present invention provides a method for generating a multi-point milling path including original points, points to be processed, and safe points, as well as a method for generating an executable program file.

[0015] The specific advantages of the present invention are as follows:

[0016] 1. This method aims at the problem that the current five-axis precision manufacturing technology with high technical maturity and the ultra-precision manufacturing technology mainly based on two axes and three axes cannot meet the multi-point milling creation needs of the full surface feature structure of micro components under the constraints of micro space scale due to factors such as insufficient manufacturing process capabilities and insufficient coupling between manufacturing process and equipment. It proposes to obtain multi-point milling paths and executable program files through the steps of spatial uniform distribution of feature structures, microstructure processing sequence planning, multi-point milling path generation, and executable file writing, so as to achieve stable and controllable removal of feature structures;

[0017] 2. This method divides the milling path of the full surface feature structure of the micro-component into original points and points to be processed, and feeds through mixed linear interpolation, which greatly improves the efficiency of programming. It also sets the processing safety distance ds = 0.5 mm through the safety point, which can effectively avoid the tool-workpiece interference problem introduced by the B-axis rotation when processing adjacent feature structures, ensuring the safety of the operation.

[0018] 3. This method systematically sorts out the key processes and important operation methods existing in the machining process of the microstructures on the entire surface of micro-components. Through the multi-point milling path generation strategy, it can efficiently generate microstructures with a surface roughness better than 26 nm on the surface of thin-walled spherical shell micro-components with a diameter of 1 mm to 5 mm, and has broad application prospects in practical engineering;

[0019] 4. This method has a certain universality. It is not only applicable to the generation of milling paths and executable program files for the full-surface feature structures of thin-walled spherical shell micro-components, but can also be further extended to the specific practice of using precision multi-axis linkage machine tools for machining complex configuration parts such as micro-steps, micro-arrays, and free-form surfaces.

[0020] The present invention is used for the full-surface milling of thin-walled spherical shell micro-components. Brief Description of the Drawings

[0021] Figure 1 Schematic diagram of the ultra-precision shape control machining equipment for thin-walled spherical shell micro-components to realize the multi-point milling path design method for the full-surface feature structures of thin-walled spherical shell micro-components. In the figure: 1. Thin-walled spherical shell micro-component, 2. Workpiece axis, 3. Fixture, 4. Vertical industrial camera, 5. Horizontal industrial camera, 6. High-speed milling module, 7. Hydraulic axis, 8. Special tool, P1. Safe point, P2. Original point, P3. Point to be machined;

[0022] Figure 2 Flowchart of the multi-point milling path design method (generation strategy) for the full-surface feature structures of micro-components;

[0023] Figure 3 Flowchart of the machining path planning method;

[0024] Figure 4 Schematic diagram of the machining coordinates and characteristic angles corresponding to the original points of the micro-structures;

[0025] Figure 5 Schematic diagram of the multi-point milling of micro-structures. In the figure: (a) Tool setting point; (b) Safe point; (c) Original point; (d) Point to be machined;

[0026] Figure 6 Schematic diagram of the multi-point milling of micro-structures. In the figure: (a) Schematic diagram of the multi-point milling depth and safe distance of micro-structures; (b) Schematic diagram of the multi-point milling in the XwOwZw plane;

[0027] Figure 7 Schematic diagram of the microscopic morphology of the local micro-structures after the generation of multi-point milling. In the figure: The left figure (a) shows the microscopic morphology of the local micro-structures, and the right figure (b) shows the surface morphology of the micro-structures. Detailed Description of the Preferred Embodiment

[0028] As Figure 1-7As shown in the figure, the method for designing the multi-point milling path of the full-surface feature structure of the thin-walled spherical shell micro-components of the present invention is described as follows:

[0029] As Figure 1 shown, the method (generation strategy) for designing the multi-point milling path of the full-surface feature structure of a thin-walled spherical shell micro-component is realized based on an ultra-precision shape control processing equipment for thin-walled spherical shell micro-components. A uniformly distributed point set is generated on the full surface of the thin-walled spherical shell micro-component, the processing sequence is planned, the multi-point milling path is designed, and a system-readable program file is generated. The present invention is a high-precision generation strategy for micro-structures.

[0030] This method and strategy are based on an ultra-precision shape control processing equipment for micro-components, as Figure 1 shown. This equipment mainly consists of three groups of linear motion modules for the X / Y / Z axes, a hydraulic axis rotary motion unit 7, a workpiece axis rotary motion unit 2, a high-speed milling module 6, etc. The X / Z linear motion modules are located in the horizontal plane and are arranged perpendicular to each other, and are driven by linear motors. The Y-axis linear motion module is vertically arranged on the X-axis motion module and is driven by a double linear motor equipped with a balance cylinder. The positive direction of the X-axis motion module is away from the operation table, the positive direction of the Y-axis motion module is upward movement, and the positive direction of the Z-axis motion module is approaching the workpiece. The hydraulic axis rotary motion unit 7 is supported by a hydrostatic bearing and is arranged on the Z-axis motion module. The workpiece axis rotary motion unit 2 is supported by a gas static bearing and is arranged on the carriage of the Y-axis motion module and can move with the Y-axis. The rotary motion units are all driven by frameless torque motors and the real-time position is feedback by circular gratings. The high-speed milling module 6 is placed on the hydraulic axis rotary motion unit 7 with a special bushing offset. The special tool 8 is connected to the end of the high-speed milling module 6 through a pneumatic clamping module and maintains good coaxiality with its rotary center. The thin-walled spherical shell micro-component 1 is connected to the end of the workpiece axis rotary motion unit 2 through a vacuum adsorption fixture 3. The vacuum negative pressure is transmitted to the end of the fixture through the internal gas path channel of the workpiece axis rotary motion unit 2 to realize the stable adsorption of the micro-component 1. The 26 million high-resolution industrial camera 4 is connected to the carriage of the Y-axis motion module through a micro-displacement platform and a transition plate, and the 26 million high-resolution industrial camera 5 is fixed on the workbench of the hydraulic axis rotary motion unit 7 by a micro-displacement platform. The above two industrial cameras can be adjusted in pose through the micro-displacement platform to realize the omnidirectional monitoring of the tool-workpiece contact situation during tool setting and processing from the vertical and horizontal directions respectively. This equipment is equipped with a high-precision quick-change clamping module with a repeat positioning accuracy better than ±0.5μm, which is used for the high-precision turning and clamping of thin-walled spherical shell micro-components.

[0031] The multi-point milling path design method and generation strategy for the full-surface feature structure of thin-walled spherical shell micro-components provided by the present invention include four parts: uniform distribution of feature structures in space, planning of micro-structure processing sequence, generation of multi-point milling paths, and writing of executable program files. First, observe the thin-walled spherical shell micro-component offline through an optical microscope to obtain the coordinate O of the feature points on the contour edge of the micro-component s1 (x 1 ,y 1 ), O s2 (x 2 ,y 2 ), O s3 (x 3 ,y 3 ), fit to obtain the diameter D of the micro-component 1 ; taking the center of the sphere of the micro-component as the coordinate origin, establish the workpiece coordinate system O w -X w Y w Z w , distribute N micro-structure process requirements around the surface of the micro-component, and based on the principle of the Fibonacci sequence, obtain the original positions P 2 of N evenly distributed micro-structures on the full surface of the micro-component wi-P2 (x w-i ,y w-i ,z w-i ), and further optimize the uniformity of the micro-structures by the uniformity optimization method. Based on the secondary development platform of UG software, establish a micro-structure processing sequence planning method driven by "the shortest processing path d p " to complete the calibration of the micro-structure processing sequence. Further, based on the multi-point milling path design method, convert the coordinate N w of the set of N evenly distributed micro-structure points with the center of the sphere O of the micro-component as the origin wi-P2 (x i ,y i ,z i ) to the machining coordinate system O m with the tool setting point O m -X m Y m Z m , obtain the original positions P 2 of the micro-structure point set in the machining coordinate system and the corresponding feature angle α cotm-P2 (x i ,y i ,z i ); from the micro-structure milling depth a wi and the safety distance d p , through the coordinate transformation method, obtain the machining coordinate system O s -X m Y m Z m ​m The point P to be processed 3 Coordinate N mi-P3 (x mi-P3 , y mi-P3 , z mi-P3 ) and the safety point P 1 Coordinate N mi-P1 (x mi-P1 , y mi-P1 , z mi-P1 ). Combining the configuration of the ultra-precision shape control equipment and the characteristics of the processing technology, using the linear interpolation method, complete the programming of the multi-point machining program for N evenly distributed microstructures N on the entire surface of the micro-component with diameter D 1 、N mi-P3 、N mi-P1 、N mi-P2 . Further match the executable file type of the numerical control system to generate a machining numerical control program file; with the self-developed numerical control system, based on the FTP protocol, download and execute the program file to achieve efficient, stable and controllable removal of the characteristic structures on the entire surface of the thin-walled spherical shell micro-component.

[0032] The working principle and operation method of the multi-point milling path design method and generation strategy for the characteristic structures on the entire surface of the thin-walled spherical shell micro-component are as follows:

[0033] The multi-point milling path design method and generation strategy for the characteristic structures on the entire surface of the thin-walled spherical shell micro-component are established based on the ultra-precision shape control processing equipment for thin-walled spherical shell micro-components. Aiming at the urgent problem that the five-axis precision manufacturing technology with a relatively high current technology maturity and the ultra-precision manufacturing technology mainly based on two-axis and three-axis cannot meet the process requirements of high-precision, stable and controllable removal of the characteristic structures on the entire surface of thin-walled spherical shell micro-components under the micro-space scale constraint due to factors such as insufficient manufacturing process capabilities and insufficient coupling degree between manufacturing processes and equipment, a multi-point milling path design method and generation strategy for the characteristic structures on the entire surface of thin-walled spherical shell micro-components are proposed, including four parts: spatial uniform distribution of characteristic structures, planning of micro-structure processing sequence, generation of multi-point milling paths, and writing of executable program files, as Figure 2 shown. Based on the FTP protocol, load and execute the program file to achieve efficient, stable and controllable removal of the characteristic structures on the entire surface of the micro-component. The specific operation method is as Figure 2 shown:

[0034] (1) Spatial uniform distribution of characteristic structures Observe the thin-walled spherical shell micro-component to be processed offline with an optical microscope, obtain the coordinate of the characteristic points on the contour edge of the micro-component, and fit to obtain the diameter of the micro-component. Take the center of the sphere of the micro-component as the coordinate origin to establish a workpiece coordinate system. Distribute several micro-structure process requirements around the surface of the micro-component, and based on the principle of the Fibonacci sequence, obtain the spatial coordinates of the original points of the micro-structures on the entire surface of the micro-component. Further optimize the uniformity of the micro-structure distribution by the uniformity optimization method. The specific operation steps included are as follows:

[0035] Step 1: Use a silica gel rod to transport the thin-walled spherical shell micro-component to the electrostatic sticker, place it in the observation area of the optical microscope, and perform off-line observation. Manually adjust the Z-axis height of the optical microscope for optical focusing to make the outermost contour of the micro-sphere target clearly imaged in the field of view; taking the intersection point of the auxiliary lines of the optical microscope objective as the reference, move the horizontal micro-displacement platform to mark the edge feature points O s1 , O s2 , O s3 , and further obtain the diameter D of the micro-component by numerical fitting method 1 ;

[0036] Furthermore, in Step 1, the magnification of the optical microscope for off-line detection: objective lens × eyepiece = 2 × 100, and the image resolution is 0.1 μm;

[0037] Furthermore, in Step 1, the up and down movement direction of the optical microscope is defined as the Z-axis, and its adjustable range is -30 mm to 30 mm; it is driven by a manual micro-displacement platform in the horizontal plane, and the resolution is 1 μm;

[0038] Furthermore, in Step 1, the coordinates of the three edge feature points of the marked micro-component are O s1 (x 1 , y 1 ), O s2 (x 2 , y 2 ) and O s3 (x 3 , y 3 ), and the corresponding diameter D of the micro-component 1 is:

[0039]

[0040] Among them:

[0041] X = (gb - cf) / (eb - af); Y = (ag - ce)·(af - be) (1 - 1)

[0042]

[0043] Step 2: Connect the micro-component to the end of the workpiece axis rotary motion unit 2 through a vacuum adsorption fixture, taking the center O w of the micro-component as the coordinate origin, and establish a workpiece coordinate system O w -X w Y w Z w ;

[0044] Furthermore, in Step 2, the workpiece coordinate system O w -Xw Y w Z w Conforms to the principle of Cartesian coordinate system;

[0045] Furthermore, in step two, the positive direction of the workpiece coordinate X-axis is consistent with the positive direction of the X-axis motion module of the ultra-precision shape control processing equipment, the positive direction of the Y-axis is consistent with the positive direction of the Y-axis motion module, and the positive direction of the Z-axis is consistent with the negative direction of the Z-axis motion module;

[0046] Step three: Distribute N microstructure requirements around the surface of the micro-component. Based on the Fibonacci sequence principle, divide the thin-walled spherical shell of the micro-component into N layers evenly along the O w -Z w direction. The midpoint coordinates in the thickness direction of the i-th layer are:

[0047]

[0048] Furthermore, in step three, the N i layers divided with equal thickness are equivalent to toroidal surfaces on the side, and their area is πD 1 2 / N i , to ensure the uniformity of the Z w direction coordinates of the microstructure point set in the macroscopic distribution;

[0049] Step four: According to the Fibonacci principle, the X w direction and Y w direction coordinates follow an arithmetic progression distribution to obtain the X w direction and Y w direction coordinates of the micro-component:

[0050]

[0051]

[0052] Furthermore, in step four, x w-i and y w-i follow an arithmetic progression distribution to ensure the uniformity of the X w and Y w direction coordinates of the microstructure point set in the macroscopic distribution;

[0053] Furthermore, in step four, represents the golden ratio,

[0054] Step five: From step three and step four, obtain the original positions P 2 of N evenly distributed microstructures on the entire surface of the micro-component, and the spatial coordinates N wi-P2 (x w-i ,y w-i ,z w-i)。Further optimize the uniformity of the microstructure distribution by the uniformity optimization method;

[0055] Step Five-One: In Step Five, the uniformity optimization method assumes that there is a same-sex interaction force between any two of the N microstructure points on the entire surface of the micro-component, and the magnitude of the force is proportional to the square of the distance between the two points;

[0056] Further, in Step Five-One, each point set N i The acting force F i Can be decomposed into a radial force F w Passing through the origin O ri And a tangential force F perpendicular to the direction of O w N i ; ti ;

[0057] Further, calculate the T of the vector sum of the radial forces F of all evenly distributed points ri And the modulus T of the vector sum of the tangential forces F of all evenly distributed points 1 : ti : 2 :

[0058]

[0059] Step Five-Two: Based on T in Step Five-One 1 And T 2 The smaller they are, the better the uniformity of the microstructure distribution on the entire surface of the micro-component. Obtain the original spatial coordinates N of the N microstructure original points P on the entire surface of the optimized micro-component 2 Space coordinates N owi-P2 (x w-i , y w-i , z w-i ).

[0060] (2) Microstructure processing sequence planning Based on the secondary development platform of UG software, establish a method for planning the microstructure processing sequence driven by the "shortest processing path d p ", and complete the planning of the microstructure processing sequence on the entire surface of the above-mentioned micro-component. The specific operation steps are as follows:

[0061] Step One: Use the secondary development function of UG software to establish a method for planning the microstructure processing sequence driven by the "shortest processing path", which mainly includes steps such as constructing the microstructure processing process, setting the virtual safety distance, importing the optimized point set coordinates, and generating the shortest processing path, as Figure 3 Shown.

[0062] Step One-One: Based on the secondary development platform of UG software, construct a solid model of a thin-walled spherical shell with a diameter D 1 ;

[0063] Steps 1-2: Select the drilling process and a tool with a radius of 0.236 mm, and establish the machining process for the microstructures on the entire surface of the thin-walled spherical shell;

[0064] Step 1-3: Based on the drilling process, set the virtual safety distance d v to avoid interference between the tool and the workpiece during the simulated milling process;

[0065] Step 1-4: Import the original positions P of N microstructures on the entire surface of the optimized micro-component 2 space coordinates N owi-P2 (x w-i , y w-i , z w-i );

[0066] Step 1-5: Through the "shortest tool path" program instruction, generate the shortest machining paths for the original positions of N microstructures on the entire surface of the micro-component;

[0067] Step 2: Based on the shortest machining paths generated in Step 1-5, complete the planning of the machining sequence for the original positions of N microstructures on the entire surface of the optimized micro-component.

[0068] (3) Generation of multi-point milling paths Based on the optimized point set coordinates and the machining sequence driven by the "shortest machining path" of the spherical point set uniform distribution iteration algorithm, combined with the configuration characteristics of the ultra-precision shape control machining equipment and the requirements of the microstructure machining process, convert the coordinates of several uniformly distributed point sets with the center of the spherical micro-component as the origin to the machining coordinate system with the tool setting point as the origin, and obtain the original coordinates of the microstructure point set and the corresponding characteristic angles. From the milling depth and safety distance of the microstructure, through coordinate transformation and milling path planning methods, obtain the coordinates of the points to be machined and the safety point coordinates in the machining coordinate system, and complete the multi-point milling coordinate transformation and milling path generation. The specific operation steps are as follows:

[0069] Step 1: When machining microstructures based on the ultra-precision shape control machining equipment, for the unclamped weak hemispherical crown feature structure, first rotate the C-axis by a certain angle so that any arbitrary original position P in space 2 rotates to the X w O w Z w plane. For microstructures in different octants, based on the coordinate transformation method, obtain the octant coordinates N corresponding to any arbitrary original position P 2 (x cot-P2 , y w-i , z w-i , B w-i, , C w-i, , C w-i );

[0070] Furthermore, in Step 1, any arbitrary original position P of the microstructure in space 2 is located in the workpiece coordinate system Ow -X w Y w Z w within the defined octant space;

[0071] Furthermore, in step one, based on the coordinate transformation method, the octant coordinates N cot-P2 (x w-i , y w-i , z w-i, B w-i, C w-i ) corresponding to different octant microstructures can be expressed as:

[0072]

[0073] The detailed operation method of the coordinate transformation here has been described in detail in CN117733640A, and the result is directly given here.

[0074] Step two: Combining the configuration characteristics of the ultra-precision shape control processing equipment and the micro-structure processing technology requirements, transform the octant coordinates N cot-P2 (x w-i , y w-i , z w-i, B w-i, C w-i ) with the origin at the center of the micro-component to the machining coordinate system with the origin at the tool setting point, and define it as the machining coordinate N cotm-P2 (x i , y i , z i , B i , C i );

[0075] Furthermore, in step two, the machining coordinate system O m -X m Y m Z m The origin is located at the tool setting point of the machining. The positive direction of the X-axis is the same as the positive direction of the X-axis of the workpiece coordinate system. The positive direction of its Y-axis is the same as the positive direction of the Y-axis of the workpiece coordinate system. The positive direction of its Z-axis is the same as the negative direction of the Z-axis of the workpiece coordinate system;

[0076] Furthermore, in step two, the actual tool setting point is the farthest point in the Z direction on the surface of the micro-component in the workpiece coordinate system;

[0077] Furthermore, in step two, for any original point P 2 of the spatial micro-structure, the corresponding machining coordinate N cotm-P2 (x i , y i , z i , B i , C i ) is:

[0078]

[0079] y i = y w-i = 0 (13)

[0080]

[0081] Furthermore, obtain the machining coordinates N corresponding to the original points of any spatial microstructure from Step 2 cotm-P2 and the corresponding characteristic angle α wi = B w-i ; as Figure 4 shown;

[0082] Step 3: Based on the multi-point milling path design method, obtain the coordinates of the points to be machined and the coordinates of the safety points corresponding to the original points of the surface microstructure of the micro-component in the machining coordinate system and the workpiece coordinate system;

[0083] Furthermore, in Step 3, when machining the surface microstructure of the micro-component, after the special tool executes the tool setting program, it is linked to the safety point coordinates, and then the point to be machined of the microstructure is rotated to the X w O w Z w plane by the C-axis rotation. The tool is linked to the original point, and then the machining program is executed to move to the point to be machined, as Figure 5 shown;

[0084] Furthermore, in Step 3, for the original point P 2 of the surface microstructure of the micro-component, the corresponding machining coordinates N cotm-P2 are (x i , y i , z i , B i , C i ), and the corresponding milling depth is a p , and the set safety distance is d s , as Figure 6 shown;

[0085] Figure Furthermore, in Step 3, for the original point N cotm-P2 of the microstructure, the corresponding safety point P 1 in the workpiece coordinate system X w O w Z w can be expressed as: wi-P1

[0086]

[0087] Furthermore, in Step 3, for the original point N cotm-P2 ​The corresponding safety point P 1 In the machining coordinate system X m O m Z m The coordinate N in mi-P1 Can be expressed as:

[0088]

[0089] Furthermore, in step three, the original point N of the microstructure cotm-P2 The corresponding point P to be machined 3 In the workpiece coordinate system X w O w Z w The coordinate N in wi-P3 Can be expressed as:

[0090]

[0091] Furthermore, in step three, the original point N of the microstructure cotm-P2 The corresponding point P to be machined 3 In the machining coordinate system X m O m Z m The coordinate N in mi-P3 Can be expressed as:

[0092]

[0093] Furthermore, in step three, the multi-point milling path planning method is based on X w O w Z w The plane is developed. For the determined microstructure to be machined, the B-axis and C-axis coordinates of its original point, the point to be machined, and the safety point are equal, that is:

[0094] B mi-P1 = B mi-P3 = B i = B w-i (25)

[0095] C mi-P1 = C mi-P3 = C i = C w-i (26)

[0096] Furthermore, in step three, after the C-axis rotation, the spatial microstructure is transferred to the XwOwZo plane. For the determined microstructure to be machined, the Y-axis coordinates of its original point, the point to be machined, and the safety point are all 0, that is:

[0097] y mi-P1 = y mi-P3 = yi = 0 (27)

[0098] Step Four: Obtain the diameter D from Step Three 1 The original point coordinates P corresponding to N microstructures on the entire surface of the thin-walled spherical shell micro-component 2 (x i , y i , z i , B i , C i ), the coordinates of the point to be machined P 3 (x mi-P3 , y mi-P3,zmi-P3 , B mi-P3 , C mi-P3 ), and the coordinates of the safety point P 1 (x mi-P1 , y mi-P1 , z mi-P1 , B mi-P1 , C mi-P1 ), to complete the multi-point milling path design;

[0099] Furthermore, in Step Four, the path planning between N microstructures to be machined is carried out according to the above micro-structure machining sequence planning method;

[0100] Furthermore, in Step Four, for the machining of the N i th micro-structure, its machining sequence is carried out according to the above multi-point milling path planning method.

[0101] (IV) Writing of executable program files Combining the configuration characteristics of the ultra-precision shape control equipment and the micro-structure machining process requirements, using the linear interpolation method, complete the writing of the multi-point machining program for the micro-structures to be machined on the entire surface of the micro-component, and further match the executable file type of the numerical control system to generate the machining numerical control program file; with the self-developed numerical control system, based on the FTP protocol, download and execute the program file to achieve the efficient, stable and controllable removal of the characteristic structures on the entire surface of the thin-walled spherical shell micro-component. The specific operation steps included are as follows:

[0102] Step One: Based on the machining sequence of N micro-structures and their corresponding original points, points to be machined, and safety point coordinates, carry out the writing of the machining program;

[0103] Step Two: Combining the executable file type of the self-developed numerical control system, complete the writing of the machining numerical control program file;

[0104] Furthermore, in Step Two, when writing the program file, it is first necessary to define the coordinate system and associate the motor-axis;

[0105] Furthermore, in Step Two, the program code is cached in the established program structure;

[0106] Further, in Step 2, the program setting codes involved are as follows:

[0107]

[0108] Step 3: Based on the FTP protocol, download and execute the program files to achieve efficient, stable and controllable removal of the full-surface feature structure of the thin-walled spherical shell micro-components.

[0109] Implementation Case:

[0110] A multi-point milling path design method and generation strategy for the full-surface feature structure of thin-walled spherical shell micro-components is proposed to address the problems that the current five-axis precision manufacturing technology with a relatively high technological maturity and the ultra-precision manufacturing technology mainly based on two-axis and three-axis cannot meet the process requirements of high-precision, stable and controllable removal of the full-surface feature structure of thin-walled spherical shell micro-components under the micro-space scale constraint due to factors such as insufficient manufacturing process capabilities and insufficient coupling degree between manufacturing processes and equipment. The specific implementation cases are as follows:

[0111] Step 1: Use a silica gel rod to transfer the micro-component to the stage of the optical microscope, and adjust the Z-axis height of the optical microscope to obtain the edge feature points O s1 (0.4032, 0.2245), O s2 (-0.2165, 0.4076) and O s3 (-0.0197, 0.4611). The diameter D of the micro-component is obtained through formula (1) 1 = 0.9230 mm;

[0112] Step 2: Clamp the micro-component at the end of the workpiece axis rotary motion unit through a vacuum adsorption fixture. Taking the center of the sphere of the micro-component as the origin, establish the workpiece coordinate system O w -X w Y w Z w ;

[0113] Step 3: Distribute 16 micro-structure requirements around the surface of the micro-component. Based on the principle of the Fibonacci sequence, obtain the coordinates of the 16 micro-pit point sets distributed on the full surface of the micro-component in the workpiece coordinate system, as shown in Table 1;

[0114] Table 1 Coordinates of the 16 point sets on the full surface of the micro-component generated based on the Fibonacci principle

[0115]

[0116] Step 4: Based on the uniformity optimization method, further optimize the spatial distribution uniformity of the micro-structures to obtain the coordinates of the 16 micro-pit point sets with uniform distribution on the full surface of the optimized micro-component, as shown in Table 2:

[0117] Table 2 Coordinates of 16 point sets on the entire surface of the micro-component after optimization by the uniformity optimization method

[0118]

[0119]

[0120] Step 5: Based on the secondary development platform of UG software, establish a method for planning the machining sequence of microstructures driven by "the shortest machining path d p ", and complete the machining sequence planning of 16 microstructures on the entire surface of the above micro-component.

[0121] Table 3 Machining sequence of 16 microstructures on the entire surface of the micro-component

[0122]

[0123] Step 6: For microstructures in different octants, taking the first 6 microstructures in the machining sequence planning as the research objects, based on the coordinate transformation method, obtain the octant coordinates corresponding to any original point position P 2 as shown in Table 4:

[0124] Table 4 Octant coordinates corresponding to any original point position (taking the first 6 in the machining sequence as an example)

[0125]

[0126] Step 7: Transform the octant coordinates N cot-P2 (x w-i ,y w-i ,z w-i ,B w-i ,C w-i ) with the center of the micro-component as the origin to the machining coordinate system with the tool setting point as the origin, and obtain the machining coordinates and characteristic angles corresponding to any original point position P 2 :

[0127] Table 5 Machining coordinates and characteristic angles corresponding to any original point position P 2 (taking the first 6 in the machining sequence as an example)

[0128]

[0129]

[0130] Step 8: Based on the multi-point milling path design method, select the milling depth a p = 0.02 mm and the safety distance d s = 0.5 mm to obtain the coordinates of the points to be machined corresponding to the original point positions of the micro-structures on the surface of the micro-component in the workpiece coordinate system:

[0131] Table 6 Coordinates of the points to be machined corresponding to the original points of the microstructures in the workpiece coordinate system (taking the first 6 in the machining sequence as an example)

[0132]

[0133] Step Nine: Based on the multi-point milling path design method, obtain the coordinates of the safety points corresponding to the original points of the microstructures on the surface of the micro-component in the workpiece coordinate system:

[0134] Table 7 Coordinates of the safety points corresponding to the original points of the microstructures in the workpiece coordinate system (taking the first 6 in the machining sequence as an example)

[0135]

[0136] Step Ten: Based on the multi-point milling path design method, obtain the coordinates of the points to be machined corresponding to the original points of the microstructures on the surface of the micro-component in the machining coordinate system:

[0137] Table 8 Coordinates of the points to be machined corresponding to the original points of the microstructures in the machining coordinate system (taking the first 6 in the machining sequence as an example)

[0138]

[0139] Step Eleven: Based on the multi-point milling path design method, obtain the coordinates of the safety points corresponding to the original points of the microstructures on the surface of the micro-component in the machining coordinate system:

[0140] Table 9 Coordinates of the safety points corresponding to the original points of the microstructures in the machining coordinate system (taking the first 6 in the machining sequence as an example)

[0141]

[0142]

[0143] Step Twelve: Based on the original point coordinates, coordinates of the points to be machined, and coordinates of the safety points corresponding to the 16 microstructures on the entire surface of the thin-walled spherical shell micro-component with a diameter of 0.9230 mm in the machining coordinate system, complete the multi-point milling path design;

[0144] Step Thirteen: Combine with the executable file type of the self-developed numerical control system to complete the writing of the machining numerical control program file;

[0145]

[0146] Step Fourteen: Based on the FTP protocol, download and execute the program file to achieve efficient, stable and controllable removal of the characteristic structures on the entire surface of the thin-walled spherical shell micro-component. After machining, the local microstructures and their microscopic morphologies are as shown in Figure 7

[0147] As shown in the figure, the surface roughness reaches 26 nm, indicating that the multi-point milling path design method and generation strategy for the full-surface feature structure of a thin-walled spherical shell micro-component proposed by the present invention have good service performance.

[0148] The method of the present invention divides the milling path of the full-surface feature structure of the micro-component into original points and points to be processed, and feeds by means of hybrid linear interpolation, greatly improving the programming efficiency of the machining program; and sets the machining safety distance d s = 0.5 mm, which can effectively avoid the tool-workpiece interference problem introduced by the rotation of the B-axis during the machining of adjacent feature structures and ensure the safety of the operation; through the multi-point milling path generation strategy of the present invention, the efficient generation of micro-structures with a surface roughness better than 26 nm for thin-walled spherical shell micro-components with a diameter of 1 mm to 5 mm can be realized, and it has broad application prospects in practical engineering.

[0149] It should be understood that various forms of the processes shown above can be used, steps can be reordered, added or deleted. For example, the steps recited in the present application can be executed in parallel, sequentially or in a different order, as long as the desired results of the technical solutions disclosed in the present application can be achieved, they are all within the protection scope of the present invention.

Claims

1. A multi-point milling path design method for the full surface feature structure of a thin-walled spherical shell micro-component, the method is based on an ultra-precision shape-control processing device for thin-walled spherical shell micro-components, and is characterized in that: The implementation process of the method includes: Uniform spatial distribution of characteristic structures, planning of microstructure processing sequence, and generation of multi-point milling paths; Uniform spatial distribution of characteristic structures: First, observe the thin-walled spherical shell micro-component offline through an optical microscope to obtain the coordinates of the characteristic points on the edge of the micro-component contour. s1 (x1,y1),O s2 (x2,y2),O s3 (x3, y3), fitting to obtain the diameter D1 of the micro-component; taking the center of the micro-component as the coordinate origin, establish the workpiece coordinate system O w -X w Y w Z w , N microstructure process requirements are distributed around the surface of the microcomponent, and based on the principle of the Fibonacci sequence, the spatial coordinates N of the original points of the N uniformly distributed microstructures on the entire surface of the microcomponent are obtained. wi-P2 (x w-i ,y w-i ,z w-i ), the uniformity of the microstructure is optimized by a uniformity optimization method; Microstructure processing sequence planning: Based on the secondary development platform of UG software, establish the "shortest processing path" p "The microstructure processing sequence planning method driven by the microstructure processing sequence calibration is completed; Multi-point milling path generation: Based on the point set coordinates optimized by the spherical point set uniform distribution iterative algorithm and the processing sequence driven by the "shortest processing path", combined with the configuration characteristics of ultra-precision shape control processing equipment and the microstructure processing process requirements, the coordinates of several uniformly distributed point sets with the micro-component sphere center as the origin are transformed into the processing coordinate system with the tool setting point as the origin, and the original coordinates of the microstructure point set and the corresponding characteristic angles are obtained; according to the microstructure milling depth and safety distance, the coordinates of the points to be processed and the coordinates of the safety points in the processing coordinate system are obtained through coordinate transformation and milling path planning methods, and the multi-point milling coordinate transformation and milling path generation are completed; based on the multi-point milling path design method, the micro-component sphere center O w The coordinates of N uniformly distributed microstructure points N are the origins wi-P2 (x i ,y i ,z i ) is converted to the tool point O m The origin of the machining coordinate system is O m -X m Y m Z m , obtain the original point P2 coordinate N of the microstructure point set in the processing coordinate system cotm-P2 (x i ,y i ,z i ) and the corresponding characteristic angle α wi ; By microstructure milling depth a p And safety distance d s , through the coordinate transformation method, the processing coordinate system O is obtained m -X m Y m Z m Coordinate N of the point to be processed P3 mi-P3 (x mi-P3 ,y mi-P3 ,z mi-P3 ) and safety point P1 coordinates N mi-P1 (x mi-P1 ,y mi-P1 ,z mi-P1 ).

2. A multi-point milling path design method for the full surface characteristic structure of a thin-walled spherical shell micro-component according to claim 1, characterized in that: The realization process of uniform distribution of feature structure space is as follows: Step 1: Use a silicone rod to carry the thin-walled spherical shell micro-component to the electrostatic sticker and place it in the optical microscope observation area for offline observation; adjust the Z-axis height of the optical microscope to perform manual optical focus so that the maximum outer contour of the microsphere target in the field of view can be clearly imaged; Taking the intersection of the auxiliary lines of the optical microscope objective as the reference, move the horizontal micro-displacement platform to mark the edge feature point O of the micro-component contour. s1 , O s2 , O s3 , and further obtain the micro-component diameter D1 by numerical fitting method; The magnification of the optical microscope used for offline detection is: objective lens × eyepiece = 2 × 100, and the image resolution is 0.1 μm; The up and down movement direction of the optical microscope is defined as the Z direction, and its adjustable range is -30mm to 30mm; the horizontal plane is driven by a manual micro-displacement platform with a resolution of 1μm; The coordinates of the three feature points on the edge of the identified micro-component are O s1 (x1,y1),O s2 (x2,y2) and O s3 (x3, y3), the corresponding micro-component diameter D1 is: in: X=(gb-cf) / (eb-af); Y=(ag-ce)·(af-be) (1-1) Step 2: The micro-component is connected to the end of the workpiece axis rotary motion unit 2 through a vacuum adsorption fixture, with the micro-component sphere center O w As the coordinate origin, establish the workpiece coordinate system O w -X w Y w Z w ; The workpiece coordinate system O w -X w Y w Z w Conform to the Cartesian coordinate system principle; The positive direction of the workpiece coordinate X-axis is consistent with the positive direction of the X-axis motion module of the ultra-precision shape control processing equipment, the positive direction of the Y-axis is consistent with the positive direction of the Y-axis motion module, and the positive direction of the Z-axis is consistent with the negative direction of the Z-axis motion module; Step 3: Distribute N microstructure requirements around the surface of the microcomponent, based on the principle of the Fibonacci sequence, along O w -Z w The thin-walled spherical shell of the micro-component is evenly divided into N layers, and the coordinates of the midpoint of the i-th layer in the thickness direction are: N divided by equal thickness i The side surface of the layer is equivalent to a torus, and its area is πD1 2 / N i , to ensure that the microstructure point set Z w Uniformity of the macroscopic distribution of directional coordinates; Step 4: According to the Fibonacci principle, X w Xiang and Y w The coordinates follow an arithmetic progression distribution, and the microcomponent X w Xiang Ji Y w Direction coordinates: x w-i and w-i Obey the arithmetic progression distribution to ensure that the microstructure point set X w and Y w Uniformity of the macroscopic distribution of directional coordinates; represents the golden ratio, Step 5: Based on steps 3 and 4, obtain the spatial coordinates N of the N uniformly distributed microstructure original points P2 on the entire surface of the micro-component wi-P2 (x w-i ,y w-i ,z w-i ), the uniformity of microstructure distribution is further optimized by uniformity optimization method; Step 51: The uniformity optimization method assumes that there is a homogeneous interaction force between any two of the N microstructure points on the entire surface of the microcomponent, and the magnitude of the force is proportional to the square of the distance between the two points; Every point set N i The force F i It can be decomposed into w Radial force F ri and perpendicular to O w N i The tangential force F ti ; Calculate the radial force F at all uniformly distributed points ri The vector sum T1 and the tangential force F at all uniformly distributed points ti The modulus T2 of the vector sum: Step 52: Based on the fact that the smaller T1 and T2 are in step 51, the better the uniformity of the microstructure distribution on the entire surface of the microcomponent, the spatial coordinates N of the original points P2 of the optimized microstructure on the entire surface of the microcomponent are obtained. owi-P2 (x w-i ,y w-i ,z w-i ).

3. A multi-point milling path design method for the full surface characteristic structure of a thin-walled spherical shell micro-component according to claim 1 or 2, characterized in that: The implementation process of microstructure processing sequence planning is as follows: Based on the secondary development platform of UG software, the "shortest processing path" is established. p The microstructure processing sequence planning method driven by " is used to complete the microstructure processing sequence planning of the full surface of the above-mentioned micro-component, and the specific operation steps are as follows: Step 1: Using the secondary development function of UG software, a microstructure machining sequence planning method driven by the "shortest machining path" is established, which mainly includes microstructure machining process construction, virtual safety distance setting, optimized point set coordinate import, and shortest machining path generation; Step 1: Based on the UG software secondary development platform, construct a solid model of a thin-walled spherical shell with a diameter of D1; Step 1 and 2: Select the drilling process and R0.236mm tool to establish the thin-walled spherical shell full surface microstructure processing procedure; Step 13: Set the virtual safety distance d based on the drilling process v , to avoid interference between the tool and the workpiece during simulated milling; Step 14: Import the optimized micro-component surface N micro-structure original point P2 spatial coordinates N owi-P2 (x w-i ,y w-i ,z w-i ); Step 15: Through the "shortest tool path" program instruction, the shortest processing path generation of N original points of microstructures on the entire surface of the micro-component is completed; Step 2: Based on the shortest processing path generated in step 5, complete the optimized processing sequence planning of N original points of microstructures on the entire surface of the micro-component.

4. A multi-point milling path design method for the full surface characteristic structure of a thin-walled spherical shell micro-component according to claim 3, characterized in that: The implementation process of multi-point milling path generation is as follows: Step 1: When performing microstructure processing based on ultra-precision shape control processing equipment, for the unclamped weak hemispherical crown feature structure, first rotate the C axis by a certain angle so that any original point P2 in space is rotated to the X axis. w O w Z w For different hexagram microstructures, based on the coordinate transformation method, the hexagram coordinate N corresponding to any original point P2 is obtained. cot-P2 (x w-i ,y w-i ,z w-i, B w-i, C w-i ); The original point P2 of the arbitrary microstructure in space is located in the workpiece coordinate system O w -X w Y w Z w Within the defined hexagram space; Based on the coordinate transformation method, the hexagram coordinates N corresponding to different hexagram microstructures cot-P2 (x w-i ,y w-i ,z w-i, B w-i, C w-i ) is expressed as: y w-i ＝0 (10) Step 2: Combined with the configuration characteristics of ultra-precision shape-controlled processing equipment and the requirements of microstructure processing technology, the hexagram coordinate N with the center of the micro-component as the origin cot-P2 (x w-i ,y w-i ,z w-i, B w-i, C w-i ) is converted into the machining coordinate system with the tool setting point as the origin and defined as the machining coordinate N cotm-P2 (x i ,y i ,z i ,B i ,C i ); The processing coordinate system O m -X m Y m Z m The origin is located at the machining point, the positive direction of the X-axis is consistent with the positive direction of the X-axis of the workpiece coordinate system, the positive direction of the Y-axis is consistent with the positive direction of the Y-axis of the workpiece coordinate system, and the positive direction of the Z-axis is consistent with the negative direction of the Z-axis of the workpiece coordinate system; The actual tool setting point is the farthest point in the Z direction of the micro-component surface in the workpiece coordinate system; The processing coordinate N corresponding to the original point P2 of any spatial microstructure cotm-P2 (x i ,y i ,z i ,B i ,C i )for: and i =and w-i =0 (13) The processing coordinate N corresponding to the original point of any spatial microstructure is obtained by step 2 cotm-P2 And the corresponding characteristic angle α wi =B w-i ; Step 3: Based on the multi-point milling path design method, the coordinates of the points to be processed and the coordinates of the safety points corresponding to the original points of the microstructure on the surface of the micro-component in the processing coordinate system and the workpiece coordinate system are obtained; When processing the microstructure of the micro-component surface, the special tool is linked to the safe point coordinate after executing the tool setting program, and then the C-axis rotation is used to rotate the microstructure point to be processed to the X w O w Z w In the surface, the tool moves to the original point, then executes the processing program and moves to the point to be processed; The processing coordinate N corresponding to the original point P2 of the microstructure on the surface of the micro-component cotm-P2 is (x i ,y i ,z i ,B i ,C i ), the corresponding milling depth is a p , set the safety distance to d s ; Microstructure original point N cotm-P2 The corresponding safety point P1 is in the workpiece coordinate system X w O w Z w The coordinates N in wi-P1 It is expressed as: Microstructure original point N cotm-P2 The corresponding safety point P1 is in the processing coordinate system X m O m Z m The coordinates N in mi-P1 Expressed as: Microstructure original point N cotm-P2 The corresponding processing point P3 is in the workpiece coordinate system X w O w Z w The coordinates N in wi-P3 Expressed as: Microstructure original point N cotm-P2 The corresponding processing point P3 is in the processing coordinate system X m O m Z m The coordinates N in mi-P3 Expressed as: The multi-point milling path planning method is based on X w O w Z w For the determined microstructure to be processed in the plane, the B-axis and C-axis coordinates of the original point, the point to be processed and the safety point are equal, that is: B mi-P1 =B mi-P3 =B i =B w-i (25) C mi-P1 =C mi-P3 =C i =C w-i (26) After the C-axis rotation, the spatial microstructure is transferred to the XwOwZo plane. For the determined microstructure to be processed, the Y-axis coordinates of the original point, the point to be processed and the safety point are all 0, that is: and mi-P1 =and mi-P3 =and i =0 (27) Step 4: Based on step 3, obtain the original point coordinates P2 (x i ,y i ,z i ,B i ,C i ), coordinates of the point to be processed P3(x mi-P3 ,y mi-P3,zmi-P3 ,B mi-P3 ,C mi-P3 ) and safety point coordinates P1(x mi-P1 ,y mi-P1 ,z mi-P1 ,B mi-P1 ,C mi-P1 ), complete the multi-point milling path design; Path planning is performed between N microstructures to be processed according to the above-mentioned microstructure processing sequence planning method; For the Nth i The processing sequence of each microstructure is carried out according to the multi-point milling path planning method mentioned above.

5. The method for designing multi-point milling paths for full-surface characteristic structures of thin-walled spherical shell micro-components according to claim 1 is characterized in that: The implementation process of the method also includes writing an executable program file; Writing executable program files: In combination with the configuration characteristics of ultra-precision shape control equipment and the requirements of microstructure processing technology, linear interpolation is used to complete the writing of multi-point processing programs for the microstructure to be processed on the entire surface of the microcomponent, match the executable file type of the CNC system, and generate processing CNC program files; download and execute program files to achieve efficient, stable and controllable removal of the full surface feature structure of thin-walled spherical shell microcomponents.

6. A multi-point milling path design method for the full surface characteristic structure of a thin-walled spherical shell micro-component according to claim 5, characterized in that: The process of writing an executable program file is as follows: Combined with the ultra-precision shape control equipment configuration and processing technology characteristics, linear interpolation is used to complete N uniformly distributed microstructures N on the entire surface of the micro-component with diameter D1. mi-P3 、N mi-P1 、N mi-P2 The writing of multi-point machining programs further matches the executable file type of the CNC system to generate machining CNC program files; The steps include: Step 1: Write a processing program based on the N microstructure processing sequences and their corresponding original points, points to be processed, and safe points coordinates; Step 2: Combine the executable file type of the self-developed CNC system to complete the writing of the CNC program file; When writing a program file, it is first necessary to define a coordinate system and associate the motor-axis; the program code is cached in the established program structure; Step 3: Based on the FTP protocol, the program file is downloaded and executed to achieve efficient, stable and controllable removal of the full-surface feature structure of the thin-walled spherical shell micro-component.

7. A multi-point milling path design system for the full surface feature structure of thin-walled spherical shell micro-components, characterized by: The system has a program module corresponding to the steps of any one of claims 1 to 4 above, and executes the steps in the multi-point milling path design method for the full-surface characteristic structure of thin-walled spherical shell micro-components when running.

8. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and the computer program is configured to implement the steps of the multi-point milling path design method for the full-surface characteristic structure of a thin-walled spherical shell micro-component described in any one of claims 1-4 when called by a processor.

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