Numerical control system for ultraprecise shape control machining of complex and tiny component and machining method of numerical control system

Abstract

The invention discloses a numerical control system for ultra-precision shape control machining of a complex and tiny component and a machining method of the numerical control system, and relates to the technical field of ultra-precision machining of complex and tiny components. The method is provided for solving the digital control problem generated by the nanoscale precision of a micro-component under the disturbance influence of narrow space constraint, system weak rigidity introduced by small-scale tools and workpieces and the like which cannot be met by a current machining system control mode for removing basic contour features and single microstructure precise materials. According to the technical key points, a feature structure machining upper computer program is written according to the size of a to-be-machined micro component and actual process requirements, an upper computer numerical control system generates microstructure machining point set coordinates, and optimal machining path planning is completed; the hardware control unit drives the tail end executive component X / Y / Z axis motion unit, the hydraulic B axis motion unit and the C axis motion unit to execute corresponding instruction programs through the motion controller and the driver; a grating ruler of an auxiliary part of the system feeds back the position of each motion unit in real time so as to achieve online compensation of displacement of each shaft, a hydraulic pump continuously outputs stable and high-pressure hydraulic oil for the machining system so as to support each motion unit, and a water cooling machine circularly outputs a constant-temperature and constant-flow cooling medium so as to cool each heating part. The double high-resolution industrial cameras achieve tool setting before machining and all-around monitoring of the machining process. And the milling shaft independent control module is used for accurately controlling the adjustable rotating speed of the milling shaft. The method is especially suitable for ultra-precision forming of complex and tiny components.

Description

Technical Field

[0001] The present invention relates to the technical field of ultra-precision machining of complex micro-components, and particularly relates to a numerical control system and a machining method for ultra-precision shape control machining of complex micro-components. Background Art

[0002] With the development of the national defense industry and its affiliated civilian industries, various high-performance and integrated complex micro-components are in short supply. Among them, the energy detection field is the most typical, and the demand for high-precision and cross-scale polymer thin-walled spherical shell complex micro-components is increasing. The diameter of such components is 1 mm to 5 mm, the shell thickness is 20 μm to 120 μm, and there are dozens to more than a hundred cross-scale special-shaped feature structures on the surface. The high-precision machining process requirements such as micron-level surface shape accuracy, nanometer-level surface roughness, and micron-level uniformity error directly determine their service performance. Among the material removal methods with relatively high technology maturity, such as micro-EDM, micro-precision laser machining, and ultra-precision cutting machining, the ultra-precision multi-axis linkage micro-milling process has become one of the important machining methods for special-shaped structures due to its high machining flexibility, removal efficiency, and significant generation accuracy. The machining accuracy of the micro-milling process is closely related to the hardware structure of the multi-axis linkage system, the control mode of the numerical control system, and the achievable accuracy. Therefore, carrying out the research on the development of the numerical control system for ultra-precision shape control machining of complex micro-components and the control method is of extremely important significance for improving the machining performance of micro-milling, optimizing the machining surface quality, and improving the service characteristics of micro-components in practical engineering applications.

[0003] In the high-precision and ultra-precision micro-milling shape control machining process of complex micro-components, several key technologies are involved, such as the adsorption and clamping of micro-components and negative pressure regulation, tool setting and monitoring of the machining process state, uniform distribution of micro-structure coordinates and CNC program writing, turning clamping and feature structure recognition, etc. The corresponding CNC system needs to include real-time display of the status of each axis with a high refresh rate, jogging and continuous motion control, and be equipped with a safety self-locking function, program editing, an image monitoring module, operation logs, and real-time control units. At the same time, considering the disturbance effects such as narrow space constraints, micro-material removal amount, weak system rigidity introduced by small-scale tools and workpieces, there is a high and urgent demand for the stability and interpolation accuracy of the CNC system. Currently, the common CNC system has a low module integration degree, a relatively single control mode, poor system flexibility and stability, interpolation accuracy that cannot meet the requirements, and high requirements for the environment and the experience of operators. It can only be applied to the digital control of precision-level material removal for basic contour features and single micro-structures, and cannot meet the control requirements for high-precision, stable and controllable removal of ultra-precision shape control machining of complex micro-components. Therefore, aiming at the high-precision machining process requirements for the creation of nano-level accuracy of cross-scale micro-structures on the surface of millimeter-scale micro-components, it is urgently necessary to develop and design a dedicated ultra-precision shape control machining CNC system to achieve high-precision intelligent control of stable and controllable removal of special-shaped feature structures to meet the actual engineering application requirements. Summary of the Invention

[0004] The technical problem to be solved by the present invention is:

[0005] Aiming at the problem that the current control method of the machining system for basic contour features and single micro-structure precision-level material removal cannot meet the digital control problem of nano-level accuracy creation of micro-components under the disturbance effects such as narrow space constraints and weak system rigidity introduced by small-scale tools and workpieces, a CNC system and its machining method for ultra-precision shape control machining of complex micro-components are further proposed.

[0006] The technical solution adopted by the present invention to solve the above technical problem is:

[0007] A CNC system for ultra-precision shape control machining of complex micro-components, the CNC system includes a software control unit, a hardware control unit, an end effector, and a system auxiliary component. The software control unit sends control instructions to the hardware control unit, and the hardware control unit then sends control electrical signals to the corresponding end effector to execute the corresponding instruction actions. The software control unit also sends control instructions to the system auxiliary component;

[0008] The software control unit includes a program editing module, a motion control module, a status display module, and a process monitoring module; the program editing module is used for offline import of numerical control programs, online program editing, saving, and program downloading, and is used for recording motion logs and real-time control; the motion control module is used for program / manual control during the machining process; the status display module is used for displaying parameters such as position and speed during the machining process and the status of each auxiliary component, including a PVF real-time display window and an active status display window; the process monitoring module is used for online image monitoring of the tool-workpiece contact situation during the machining process;

[0009] The hardware control unit includes a drive control module, a weak current control module, and a limit control module; the drive control module is based on a UMAC controller and is used to control each end effector to execute corresponding instruction actions according to the numerical control program file of the upper computer; the weak current control module is based on a plc logic controller and is used to realize the start-stop, on-off, emergency stop, and other safety instruction controls of the ultra-precision shape control machining equipment; the limit control module relies on software limits, photoelectric switch limits, and hard limits to realize the constraint of the unit stroke of linear motion and effectively ensure operation safety;

[0010] The end effectors include a linear motion unit, a rotary motion unit, and a milling axis motion unit (milling axis independent unit);

[0011] The system auxiliary components are used to achieve precise feedback of the machining process position and precise regulation of environmental conditions, and include a grating scale component, a hydraulic pump component, a water chiller component, and an industrial camera component; the grating scale component is equipped with high-precision linear grating scales for the X / Y / Z axis linear motion units, and the rotary motion unit is equipped with a high-precision circular grating for real-time feedback of the motion unit position; the hydraulic pump component is used to continuously output stable and high-pressure hydraulic oil for the ultra-precision shape control machining equipment for micro-components to support each motion unit; the water chiller component is used to circulate and output a constant-temperature and constant-flow cooling medium to cool each heating component of the ultra-precision shape control machining equipment; the industrial camera component is used to realize tool setting before machining and online monitoring of the tool-workpiece contact situation during the machining process.

[0012] A machining method for complex micro-components, which is realized based on the above numerical control system for ultra-precision shape control machining of complex micro-components, specifically:

[0013] Identify the diameter D 1 and wall thickness T h and other characteristic parameters of the micro-component to be machined by an offline optical microscope, together with the number N of the surface to-be-machined characteristic structures, and input them into the software - program editing module of the upper computer numerical control system. The numerical control system embeds a click generation and microstructure distribution uniformity optimization algorithm and a machining path planning method to obtain the machining coordinates N i (x i ,yi , z i , b i , c i ), generate the CNC program code P for micro-structure machining rog (i); The host computer program download module realizes the communication between software and hardware based on the FTP file transfer protocol by calling the dynamic link library of the UMAC controller, downloads the above program file to the controller program buffer, and the host computer software motion control module realizes the start-stop control of the machining process; The UMAC controller receives the program instructions of the host computer software, converts them into corresponding control instructions, and controls the driver to dynamically regulate the motion of the end effector X / Y / Z axis motion unit, hydraulic B axis motion unit, and C axis motion unit through analog signals; Each end effector is equipped with a grating scale / circular grating to feedback the real-time motion position of the effector to the UMAC controller, realizing closed-loop communication and real-time position compensation regulation with the host computer software; The milling axis motion unit is equipped with an independent hardware control system and host computer software, and can be precisely regulated through the control panel integrated on the operation console; Load the external program into the plc logic controller through the RS232 communication port to realize the start-stop, on-off, and safety control of the special equipment for profile control through the jog button integrated on the operation console;

[0014] Linear motion units X / Y / Z axes are equipped with grating scales, and the rotary motion unit is equipped with a ring grating, which all feedback the motion positions of each axis in real time and form a closed loop with the host computer control system; The hydraulic pump assembly adopts an external water-cooling method, with the output oil pressure fluctuation ≤ ±0.1 MPa and the output flow ≤ 20 L / min, continuously outputting stable flow and high-pressure hydraulic oil to support the guide rails of the X / Y / Z axis linear motion units and the bearings of the hydraulic B axis; The water chiller assembly adopts an air-cooled refrigeration type, with its control temperature range of 18 - 22 °C, temperature fluctuation ≤ ±0.1 °C, and maximum output flow of 27 L / min, circulating nearly constant-temperature cooling medium to cool the high-speed milling axis motion unit and the bearings of the hydraulic B axis unit; Horizontal and vertical CCD cameras respectively observe the contact situation between the tool and the workpiece in the Y m O m Z m and X m O m Z m plane from the horizontal and vertical directions.

[0015] The present invention has the following beneficial technical effects:

[0016] This invention focuses on describing the composition and control mode of the numerical control system, as well as the specific processing method (working method) of the proposed system when facing the ultra-precision shape control processing requirements of complex micro-components. The system and method described in this invention are for special equipment for ultra-precision shape control processing of complex micro-components, mainly including a software control unit, a hardware control unit, an end effector, and system auxiliary components. According to the size of the micro-component to be processed and the actual process requirements, an upper computer program for feature structure processing is written. The upper computer numerical control system generates the coordinate set of micro-structure processing points to complete the optimal processing path planning. The upper computer loads the processing instructions, and the hardware control unit drives the X / Y / Z axis motion units, hydraulic B axis motion unit, and C axis motion unit of the end effector to execute the corresponding instruction program through the motion controller and driver. The grating ruler of the system auxiliary component real-time feedbacks the positions of each motion unit to achieve online compensation of the displacement of each axis. The hydraulic pump continuously outputs stable and high-pressure hydraulic oil for the processing system to support each motion unit. The water chiller circulates and outputs a constant temperature and constant flow cooling medium to cool each heating component. The dual high-resolution industrial cameras realize tool setting before processing and full-round monitoring during the processing. The milling axis independent control module realizes precise control of the adjustable speed of the milling axis. This numerical control system integrates functions such as online editing of motion programs, real-time compensation adjustment of the position difference of the execution components, dynamic monitoring of the processing process, and precise control of environmental factors, and can achieve high-precision processing of special-shaped feature structures under complex working conditions, especially suitable for ultra-precision forming of complex micro-components.

[0017] The specific advantages of this invention are as follows:

[0018] a) Aiming at the intelligent control problem that the current control mode of the processing system for basic contour features and single micro-structure precision-level material removal cannot meet the high-precision creation of micro-components under the constraint of narrow space, this method proposes a special equipment for ultra-precision shape control processing of complex micro-components, and realizes the creation of nano-level precision of micro-components through program-driven control, weak electricity logic control, and limit control methods.

[0019] b) The software control system of this method uses a UMAC motion controller with a high working main frequency (1GHz), 64-bit (double-precision) floating-point calculation in hardware, high calculation speed, support for larger memory, excellent openness and stable controllability, and can achieve high-precision control for material removal of dozens to more than a hundred cross-scale special-shaped feature structures distributed on the surface of micro-components with a ball diameter of 1mm to 5mm and a shell thickness of 20μm to 120μm.

[0020] c) This method is equipped with system auxiliary components such as a hydraulic pump and a water chiller with high stability and reliability, and the output oil pressure fluctuation ≤ ±0.1MPa, temperature fluctuation ≤ ±0.1°C, providing a stable external environment for high-precision, stable and controllable material removal.

[0021] d) This method is based on the FTP file transfer protocol for the transfer of executable program codes between the host computer and the controller. This protocol supports resume from breakpoint. Through the error detection and retransmission mechanism, the reliability and stability of the code transfer are ensured.

[0022] e) This method has a certain universality. It is not only applicable to the intelligent control of the nano-level precision generation process of the cross-scale feature structure on the surface of complex micro-components, but can also be further extended to the specific practice of process control when precision multi-axis linkage machine tools are used to process components such as micro-steps, micro-arrays, and free-form surfaces. Description of the Drawings

[0023] Figure 1 Schematic diagram of the overall structure of the special equipment for ultra-precision shape control machining of complex micro-components;

[0024] Figure 2 Block diagram of the hardware control unit faced by the numerical control system and its processing method (working method) of the present invention. In the figure: 13 - radiator, 14 - UMAC controller, 15 - plc logic controller, 16 - fuse, 17 - terminal block, 18 - 24V linear power supply, 19 - 48V linear power supply, 20 - air switch, 21 - relay, 22 - contactor, 23 - power filter, 24 - main switch, 25 - workpiece C-axis driver, 26 - linear motion unit driver.

[0025] Figure 3 Block diagram of the numerical control system for ultra-precision shape control machining of complex micro-components; [Instruction control] process from the software control unit to the system auxiliary components), used to control the grating scale component and industrial camera component in the system auxiliary components

[0026] Figure 4 Operation flowchart of the numerical control system and its working method for ultra-precision shape control machining of complex micro-components (i.e., operation flowchart block diagram of the ultra-precision shape control machining method of complex micro-components realized by using the numerical control system for ultra-precision shape control machining of complex micro-components);

[0027] Figure 5 Schematic diagram of the control process of the numerical control system and its working method for ultra-precision shape control machining of complex micro-components;

[0028] Figure 6 Screenshot of the operation interface of the numerical control system for ultra-precision shape control machining of complex micro-components;

[0029] Figure 7 Schematic diagram of the I / O of the plc logic controller;

[0030] Figure 8 Simulation diagram of the micro-structure topography processed by the numerical control system and its working method based on feature structure machining. Detailed Embodiment

[0031] Combined with the attached Figure 1-8 , a numerical control system and its processing method for ultra-precision shape control machining of complex micro-components according to the present invention will be elaborated in detail:

[0032] The numerical control system and its processing method (working method) provided by the present invention are for a special equipment for ultra-precision shape control machining of complex micro-components, such as Figure 1 shown. The special equipment for ultra-precision shape control machining of complex micro-components belongs to the category of prior art. The software part of the numerical control system provided by the present invention is configured in the controller of the special equipment for ultra-precision shape control machining of complex micro-components to achieve its control function.

[0033] The numerical control system and processing method are proposed for a special equipment for ultra-precision shape control machining of complex micro-components. The equipment adopts a T-shaped layout and a "five-axis +" configuration, as Figure 1 shown. It mainly consists of a marble table 1, an X-axis movement unit 2, a Y-axis movement unit 3, a workpiece C-axis 4, a vacuum adsorption fixture 5, a vertical CCD camera 6, a horizontal CCD camera 7, a micro-diameter tool 8, a milling shaft 9, a hydraulic B-axis 10, a Z-axis movement unit 11, and a complex micro-component 12. The marble table 1 is located on the machine tool bed through vibration isolation air cushions. The horizontal X-axis movement unit 2 and the Z-axis movement unit 11 are arranged perpendicular to each other on the marble table 1; the vertical Y-axis movement unit 3 is located on the carriage of the X-axis movement unit 2; the X-axis / Y-axis / Z-axis movement units are all supported by hydrostatic guides and driven by linear motors; the workpiece C-axis 4 is connected to the carriage of the Y-axis movement unit 3 and can move with the Y-axis. It is supported by aerostatic bearings and feedback-controlled by a circular grating; the hydraulic B-axis 10 is located on the carriage of the Z-axis movement unit 11. It adopts a hydrostatic bearing and is feedback-controlled by a circular grating. The complex micro-component 12 is connected to the end of the workpiece C-axis 3 by a negative pressure adsorption method through a vacuum adsorption fixture 5; the micro-diameter tool 8 is connected to the end of the milling shaft 9 by a pneumatic clamping method and can rotate with the hydraulic B-axis 10.

[0034] The composition of the hardware control unit for a numerical control system and its working method for ultra-precision shape control machining of complex micro-components provided is as Figure 2As shown in the figure. The hardware control unit of the numerical control system for ultra-precision shape control machining of complex micro-components mainly includes a UMAC controller 14, a plc logic controller 15, a 24V linear power supply 18, a 48V linear power supply 19, a workpiece C-axis driver 25, a linear motion unit driver 26, and electrical components. The three-phase five-wire main power supply is connected to the bottom of the above-mentioned hardware control unit and transmitted to the linear power supplies 18 and 19 through the inner wall. After being converted into DC power by the linear power supplies, it is extended through terminal blocks to provide stable DC power for components such as the UMAC controller 14, the plc logic controller 15, the workpiece C-axis driver 25, and the linear motion unit driver 26.

[0035] The composition of a numerical control system for ultra-precision shape control machining of complex micro-components is as Figure 3 shown. The operation process of the machining method (working method) implemented by using the numerical control system for ultra-precision shape control machining of complex micro-components is as Figure 4 shown.

[0036] The control process of the ultra-precision shape control machining method of complex micro-components by using the numerical control system for ultra-precision shape control machining of complex micro-components is as Figure 5 shown.

[0037] The working principle and operation method of the present invention:

[0038] This part of the content includes four parts: 1. Software control unit; 2. Hardware control unit; 3. End effector; 4. System auxiliary components. The following description is also presented separately from these four aspects.

[0039] The above-mentioned numerical control system for ultra-precision shape control machining of complex micro-components and its working method are for a special equipment for ultra-precision shape control machining of complex micro-components ( Figure 1 ), and mainly consists of a software control unit, a hardware control unit, an end effector, and system auxiliary components, as Figure 3 shown. The software control unit includes a program editing module, a motion control module, a status display module, and a process monitoring module. In the hardware control unit, it mainly includes units such as a UMAC controller, a plc logic controller, a driver, a linear power supply, and electrical components, as Figure 2 shown. The control process of the numerical control system and its working method is as Figure 5 shown. The diameter D 1 and wall thickness T h of the micro-component to be machined, etc., together with the number N of the surface features to be machined, are input into the program editing module of the upper computer numerical control system software. The numerical control system is embedded with a click generation and microstructure distribution uniformity optimization algorithm and a machining path planning method to obtain the machining coordinates N of the full-surface microstructurei (x i , y i , z i , b i , c i ), generate the CNC program code P for micro-structure machining rog (i). The host computer program download module realizes the communication between software and hardware based on the FTP file transfer protocol by calling the dynamic link library of the UMAC controller, downloads the above program file to the controller program buffer, and the host computer software motion control module realizes the start-stop control of the machining process. The UMAC controller receives the program instructions from the host computer software, converts them into corresponding control instructions, and controls the driver to dynamically regulate the motion of the end effector X / Y / Z axis motion units, hydraulic B axis motion unit, and C axis motion unit through analog signals. Each end effector is equipped with a grating scale / circular grating to feedback the real-time motion position of the effector to the UMAC controller, realizing closed-loop communication and real-time position compensation regulation with the host computer software. The milling axis motion unit is equipped with an independent hardware control system and host computer software, and can be precisely regulated through the control panel integrated on the operation console. The external program is loaded into the plc logic controller through the RS232 communication port to realize the start-stop, on-off, and safety control of the special equipment for shape control machining through the jog button integrated on the operation console.

[0040] The main system auxiliary components involved in the CNC system and its working method for ultra-precision shape control machining of complex micro-components mainly include grating scale components, hydraulic pump components, water chiller components, industrial camera components, and other auxiliary accessories. Grating scales are installed on the linear motion units X / Y / Z axes, and circular gratings are installed on the rotary motion units, which all feedback the motion positions of each axis in real time and form a closed loop with the host computer control system. The hydraulic pump component adopts an external water-cooling method, with an output oil pressure fluctuation ≤ ±0.1 MPa and an output flow ≤ 20 L / min, continuously outputting stable flow and high-pressure hydraulic oil to support the guide rails of the X / Y / Z axis linear motion units and the bearings of the hydraulic B axis. The water chiller component adopts an air-cooled refrigeration type, with a controlled temperature range of 18 - 22 °C, a temperature fluctuation ≤ ±0.1 °C, and a maximum output flow of 27 L / min, circulating a nearly constant-temperature cooling medium to cool the high-speed milling axis motion unit and the bearings of the hydraulic B axis unit. The horizontal and vertical CCD cameras respectively observe the contact situation between the tool and the workpiece in the Y m O m Z m and X m O m Z m plane during tool setting and material removal.

[0041] The specific description and operation process are as follows:

[0042] I. Composition of the numerical control system: The software control unit of a numerical control system for ultra-precision shape control machining of complex micro-components mainly includes a program editing unit, a motion control module, a status display module, and a process monitoring unit. (1) The program editing unit includes a program editing window, a motion log, and a real-time control window; (2) The motion control module includes a manual mode window, an enable and homing window; (3) The status display module includes a PVF real-time display window, an active status display window; (4) The process monitoring unit includes an image monitoring window, a shortcut menu window, as Figure 6 shown, meeting the high-precision control requirements for creating nano-level accuracy of micro-components.

[0043] (1) The program editing unit is mainly used for offline import, online editing, saving, and program downloading of numerical control programs, including a program editing window, a motion log, and a real-time control window, etc.

[0044] Explanation 1.1: The program editing window consists of controls such as opening a program, saving a program, program downloading, program path display, and a program editing text box, and is used to realize in / offline editing and loading of machining programs.

[0045] Explanation (1): The said program opening control is used to open a program file stored locally, synchronously display the program content in the program editing text box of this window, and initiate FTP communication. At the same time, in the program path text box, the local location of the opened file is synchronously displayed, and the program file opening status is displayed in the operation log.

[0046] Furthermore, this numerical control system supports online / offline program editing, and limits the extension of the offline program file to.pmc. When opening a program, file transfer protocol (FTP) communication is initiated to open a transmission channel for downloading the program to the multi-axis controller.

[0047] Explanation (2): The said program saving control saves the program in the program editing text box of this window and synchronizes the modification to the local file.

[0048] Explanation (3): The said program downloading control is used to download the program in the program editing text box to the multi-axis motion controller, and the download progress is displayed through a download progress bar.

[0049] Explanation (4): The said program path display control is used to display the local folder where the current program is located, facilitating users to copy the program during offline editing.

[0050] Explanation (5): The said program editing text box is used to display the program text content or perform online program editing.

[0051] Description 1.2: The motion log and real-time control window are composed of modules such as the operation log, terminal control, and real-time control, which are used for the real-time display of control instructions and system feedback during the processing, the input of terminal commands, and the control of the program processing process.

[0052] Description (1): The operation log control is used to record and display the operation instructions and real-time feedback of the system during the software operation, and generate a log document with the extension.txt in a fixed directory for later query by users.

[0053] Furthermore, the maximum number of displayed lines of this control is 100 lines. When it reaches 100 lines, the program automatically clears and rediscovers the count.

[0054] Description (2): The terminal control control is used to input shortcut instructions to implement the shortcut instructions for each motion axis of the terminal. It includes a terminal instruction input text box, a text box clearing button, and an instruction sending button. Users can clear the content of the operation log text box by clearing the command. Clicking on the terminal will send the content in the instruction input text box to the multi-axis controller to execute the corresponding instruction action.

[0055] Furthermore, the terminal control is suitable for software developers or users who are proficient in using this control software. The default text "Real-time control of terminal commands! Use with caution" is displayed in the instruction input text box. When the user clicks on the text box with the mouse, this default content will disappear, and the user can input the control instructions they need. At the same time, the instruction input text box has a memory association function, and new instructions will be saved in a local document in the.txt text format. When inputting instructions, the system will automatically match the content in the document and can be quickly displayed by clicking with the mouse.

[0056] Description (3): The real-time control control can implement functions such as work origin setting, running, pausing, continuing, and stopping control.

[0057] Furthermore, the work origin setting command is used to set the processing origin after tool setting during the processing, taking the current position as the program processing origin;

[0058] Furthermore, the running command is used to implement the running of the program. Clicking on this button can implement the program running. After setting the work origin, execute the running operation to avoid safety accidents caused by improper setting of the processing origin;

[0059] Furthermore, the pause command is used to implement the pause of the program during the processing;

[0060] Furthermore, the continue command is used to start the system to complete the remaining program processing after the program pauses during the processing;

[0061] Further, the stop command is used to stop the running control program. After the program stops running, it cannot be restarted by clicking the continue command button.

[0062] (2) The motion control module is mainly used for program / manual control during the processing, including windows such as the manual mode window, enable and homing windows.

[0063] Description 2.1: The manual mode window consists of controls such as program lock, operation mode selection - continuous / jog, and motion buttons, and is used for manual displacement adjustment of each axis.

[0064] Description (1): The program lock control is used for program locking and unlocking in the manual mode to achieve program protection such as anti-touch. When the command button is in the black selected state, the program is locked, and operation commands such as continuous and jog in the manual mode cannot be executed. Clicking the command button can achieve state switching, and the system defaults to program locking.

[0065] Description (2): The operation mode selection - continuous / jog control is used for selecting the operation mode in the manual mode, including two manual control methods: continuous and jog.

[0066] Further, for the same axis, clicking the corresponding button for continuous or jog can achieve the selection of the control method, and the two operation methods are mutually exclusive, and only one action can be executed at the same time.

[0067] Description (3): The motion control is used to achieve the motion of each axis in the manual mode. Each motion unit is equipped with two motion buttons to respectively achieve the movement in the positive and negative directions (X / Y / Z) and the rotation of the B / C axes in the clockwise and counterclockwise directions. The buttons in the two directions are mutually exclusive, and only one action can be executed at the same time.

[0068] Description 2.2: The enable and homing window is used for enabling and homing each motion unit before processing, including modules such as the enable module for each axis and the homing for each axis.

[0069] Description (1): The enable control for each axis is used for independent enable operation of each axis. Clicking the radio button can achieve asynchronous enable control of each axis, and the user can perform selective enable operations according to actual needs. After each axis is enabled, the corresponding radio button is in the black selected state.

[0070] Description (2): The homing control for each axis is used for independent homing operation of each axis. Clicking the radio button can achieve asynchronous homing control of each axis, and the user can perform selective homing operations according to actual needs. After each axis is homed, the corresponding radio button is in the black selected state.

[0071] (3) The status display module is mainly used for displaying parameters such as position and speed during the processing and the status of each auxiliary component, including windows such as the PVF real-time display window and the active status display.

[0072] Description 3.1: The PVF real-time display window is used to display the motion positions and speeds of the X / Y / Z / B / C axes of the shape control processing system in real time, and to monitor the following error in real time.

[0073] Furthermore, after the industrial control computer establishes a communication connection with the multi-axis controller, the software system will automatically read the actual positions, actual speeds, and following errors of each axis and display them in the text box.

[0074] Furthermore, the default unit of the real-time position of the X, Y, and Z axes is mm, the default unit of the real-time speed is mm / s, and the default unit of the real-time following error is mm; the default unit of the real-time position of the B and C axes is °, the default unit of the real-time speed is ° / s, and the default unit of the real-time following error is °.

[0075] Description 3.2: The active status display window consists of controls such as the enabling status, homing status, linear axis limit, program compensation, and air pressure monitoring of each axis, and is used for the real-time feedback of the operation status of the equipment during the processing.

[0076] Description (1): The enabling status control of each axis is used for the judgment and display of the enabling status of each axis. After the host computer is connected to the controller, this module starts real-time refreshing to detect the enabling status of each axis.

[0077] Furthermore, when the axis is not enabled, the corresponding enabling indicator light is red; when the axis is enabled, its enabling indicator light turns green; when the enabling of the axis is disconnected, the axis enabling indicator light turns red.

[0078] Description (2): The homing status control is used to judge whether each axis has been homed. After the host computer is connected to the controller, this module starts real-time refreshing to detect the homing status of each axis.

[0079] Furthermore, when the axis is homed and the zero position reference is established, the corresponding homing indicator light turns green. When the homing operation has not been performed and the zero position reference has not been established, the corresponding homing indicator light is red.

[0080] Description (3): The linear axis limit control is used to give a real-time feedback on whether the linear axis reaches the limit. According to the positive and negative directions of the motion, the limit is divided into positive limit and negative limit. During the motion of the linear axis, the system refreshes the position of each axis in real time at a frequency of 50 ms.

[0081] Furthermore, when the axis touches the corresponding travel switch, the following two operations will be performed. On the one hand, the system will automatically stop the program execution, and each axis will stop at the position limited by the limit switch; on the other hand, the axis limit indicator light corresponding to this limit module turns red to prompt the user that this axis has reached the limit.

[0082] Description (4): The program compensation control is used to prompt whether the program compensation of the processing system is enabled. When the host computer is connected to the multi-axis controller, the system defaults to turning off the program compensation, and this indicator light is red. After the user performs the homing operation and enables the program compensation, this indicator light turns green.

[0083] Description (5): The gas pressure detection control is used to determine whether the supply pressure of the shape control processing system meets the requirements. When the actual pressure is within the system requirements range, this indicator light is green; when the actual supply pressure exceeds the required pressure range, this indicator light is red.

[0084] (4) The process monitoring unit is used for on-line monitoring of the tool-workpiece contact situation during the processing, and mainly consists of an image monitoring window.

[0085] Description 4.1: The image monitoring window integrates two high-resolution industrial cameras, the first and the second, which can display the real scene content captured by the images in real time, and can perform real-time control on the camera monitoring status through button commands such as open, collect, stop, close, and set, and is used for tool setting, turning, and full-process monitoring during the processing.

[0086] Description (1): The image monitoring window mainly consists of a first camera monitoring module and a second camera monitoring module. The first camera monitoring module is used for parameter configuration and image display of the horizontal industrial camera; the second camera monitoring module is used for parameter configuration and image display of the vertical industrial camera.

[0087] Description (2): The camera monitoring module contains commands such as camera open, collect, stop, close, set, device selection dropdown box, and collected image display panel.

[0088] Description (3): The device selection dropdown box control is used to select the camera for parameter configuration and collected image display in the current module.

[0089] Furthermore, after the host computer and the multi-axis controller are successfully connected, this control will automatically retrieve the industrial cameras connected to the host computer and display the camera model information in the form of a list.

[0090] II. System Control Principle The control process of a numerical control system (hardware control unit) for ultra-precision shape control processing of complex micro-components mainly includes three modules: drive control, weak current control, and limit control, etc. The drive control module is based on the UMAC controller and is used to control each end effector to execute corresponding instruction actions according to the numerical control program file of the host computer; the weak current control module is based on the plc logic controller and is used to realize the start-stop, on-off, emergency stop, and other safety instruction controls of the ultra-precision shape control processing equipment; the limit control module relies on software limit, photoelectric switch limit, and hard limit to realize the constraint of the unit stroke of the linear motion, effectively ensuring the operation safety, such as Figure 3As shown below. Each control method will be described in detail as follows:

[0091] (1) The drive control module relies on the UMAC motion controller to control each end effector to perform corresponding actions through program instructions. As Figure 5 shown, the specific control process is as follows:

[0092] Step 1.1: According to the micro-structure feature parameters to be processed, the host computer numerical control software writes a machining program to complete the generation of machining points and the planning of machining sequences;

[0093] Furthermore, the above-mentioned host computer uses an Advantech IPC610L series industrial computer with a 10th generation i7 CPU, 16G of running memory, a 1T mechanical hard disk as the main hard disk, and is equipped with two network ports, four USB3.0 ports, two RS232 ports, one VGA port and one DVI port, which can meet the actual control requirements of the micro-component feature structure.

[0094] Furthermore, the above-mentioned host computer numerical control system software is based on the.NET Framework 4.6.1 framework, uses the C# language, and is developed based on Visual Studio2017, which can achieve high-precision control of space micro-structure processing.

[0095] Furthermore, the above-mentioned machining program is written in an executable program language directly readable by the UMAC controller, which can be written online and offline, and realizes interpolation motion through the spline motion mode.

[0096] Step 1.2: Based on the FTP file transfer protocol, call the dynamic link library of the UMAC controller to realize the communication between the host computer software and the controller hardware, download the above program file to the UMAC controller buffer, and the host computer software realizes the start and stop control of the machining program;

[0097] Furthermore, the UMAC controller is a Power Umac type motion controller of Delta Tau Company, with a high working main frequency (1GHz), 64-bit (double-precision) floating-point calculation in hardware, high calculation speed, and supports larger memory.

[0098] Furthermore, the FTP file transfer protocol is a reliable file transfer protocol, which supports resume from breakpoint, and ensures the reliability and stability of code transmission through error detection and retransmission mechanisms.

[0099] Step 1.3: The UMAC controller receives the program instructions from the host computer software and converts them into corresponding control instructions to control the driver to dynamically regulate the end effector to move according to the program instructions through analog quantities;

[0100] Further, the driver adopts the TA330 series driver of TRUST Company, with AB class push-pull amplification linear output, no zero dead zone, no crossover distortion, and no electromagnetic noise.

[0101] Further, the end effector includes X / Y / Z axis linear motion units, workpiece C axis, and hydraulic B axis motion units.

[0102] Further, the above X / Y / Z axes are driven by high-precision linear motors of the Parker series in the United States.

[0103] Further, the above C axis adopts a high-precision workpiece axis of the ISO5.5PG model of PI Company in the United States, which is supported by air bearings and has high axial and radial stiffness.

[0104] Further, the above B axis adopts a rotary table customized and produced by AMETEK PRECITECH Company in Germany, which is supported by a hydraulic bearing, has small radial error, high positioning accuracy, and can achieve high bearing capacity.

[0105] Step 1.4: The grating rulers / round gratings, which are position feedback elements installed inside each end effector, real-time feedback the actual motion positions of each axis to the UMAC controller;

[0106] Further, the grating ruler for position feedback of the linear motion unit is a high-precision open linear grating ruler of Heidenhain in Germany. It adopts the interference scanning method and has the characteristics of extremely small measurement step, high precision, and high repeatability.

[0107] Further, the round grating for position feedback of the rotary motion unit adopts an absolute grating of Heidenhain in Germany with high-precision serial communication.

[0108] Step 1.5: The UMAC controller receives the feedback position signal and displays it on the status display module of the host computer numerical control system; according to the difference between the actual position and the position of the program instruction, error compensation is carried out to form a closed-loop control for micro-component processing.

[0109] Further, the error compensation method uses the spiral compensation function of UMAC, its unique programming language, and error compensation table to perform real-time software compensation for the positioning error of the linear motor by establishing a spiral error table and programming.

[0110] (2) The weak current control module is based on a plc logic controller. The on-off of the weak current circuit is controlled by the operation buttons on the console panel through the plc logic controller. As Figure 2 shown, the plc weak current control hardware mainly includes the jog buttons, knobs, fuses, relays, and plc logic controllers located on the console panel. The specific control process is as follows:

[0111] Step 2.1: According to the actual control requirements, complete the I / O definition and allocation of the plc logic controller, as Figure 7 shown, and connect the lines; write the plc weak current control program in the WPLSoft 2.50 software, and write the weak current control program to the plc logic controller through the RS232 communication port;

[0112] Further, the above plc logic controller is a Delta DVP-24EC series logic controller, which supports an input current of 24VDC 7mA and can output a current of 2A / 1 point.

[0113] Further, when writing the program into the controller, if the ERROR indicator light of the controller does not flash, it means the program is legal, and wait for the operator to issue the RUN command in the next step.

[0114] Step 2.2: Connect the weak current lines according to the weak current control circuit diagram, press the start button on the control operation panel to connect the power supply of the weak current control device and the control cabinet, and turn on the host computer (industrial computer) and the industrial monitor;

[0115] Step 2.3: Turn the on / off knob of the weak current control lines of the X / Y / Z / B / C axes on the operation console panel to the ON position to connect the weak current circuit of the end effector.

[0116] Step 2.4: Press the jog buttons on the operation console panel in sequence to connect the power supplies of the main shaft, controller, motion axes, light source control, and milling axis independent control cabinets, and complete the control of the weak current system before processing.

[0117] (3) The limit control module relies on software limits, photoelectric limits, and hard limits to achieve safe constraints on the motion stroke of the linear motion unit.

[0118] Explanation 3.1: The software limit is set by setting the maximum and minimum values of the positive and negative strokes of each linear motion unit in the numerical control program. When the motion unit moves to the maximum or minimum position, the program executes the stop operation instruction;

[0119] Explanation 3.2: The photoelectric limit relies on a photoelectric switch, which is installed at the positive and negative position limits of the linear motion unit guide rail. A photoelectric baffle is equipped on the moving carriage. When the motion unit moves to the limit position, the baffle blocks the light receiver, generates an electrical signal and feeds it back to the controller to execute the stop operation;

[0120] Further, the photoelectric switch is an Omron EE-SX951-R series. Based on the photoelectric effect, it converts the input current into a light signal and emits it, and uses the occlusion or reflection of the light beam by the measured object to detect the presence of the object.

[0121] Description 3.3: The hard limit is a stop block installed at the positive and negative extreme positions of the guide rail. It restricts the further movement of the guide rail by relying on the collision between the guide rails to achieve the hard limit.

[0122] III. Auxiliary control method: The auxiliary control components of the described numerical control system (system auxiliary components) for ultra-precision shape control machining of complex micro-components mainly include a grating scale assembly, a hydraulic pump assembly, a water chiller assembly, an industrial camera assembly, and other auxiliary accessories, to achieve precise feedback of the position during the machining process and precise regulation of the environmental conditions. The control methods of each auxiliary component are described in detail below:

[0123] (1) The X / Y / Z-axis linear motion units of the grating scale assembly are equipped with high-precision linear grating scales, and the rotary motion units are equipped with high-precision circular gratings, which are used to provide real-time feedback on the positions of the motion units.

[0124] Furthermore, the grating scale is a high-precision open linear grating scale from Heidenhain in Germany, with the model number LIP281. It adopts an interference scanning method, featuring an extremely small measurement step, high precision, and high repeatability.

[0125] Furthermore, the circular grating is an absolute grating with high-precision serial communication from Heidenhain in Germany.

[0126] (2) The hydraulic pump assembly continuously outputs stable and high-pressure hydraulic oil for a special equipment for ultra-precision shape control machining of micro-components to support each motion unit.

[0127] Furthermore, the hydraulic pump adopts an external water-cooling method, with an output oil pressure fluctuation ≤ ±0.1 MPa and an output flow ≤ 20 L / min.

[0128] Furthermore, the hydraulic pump continuously outputs stable-flow and high-pressure hydraulic oil to support the guide rails of the X / Y / Z-axis linear motion units and the hydraulic B-axis bearings.

[0129] (3) The water chiller assembly circulates and outputs a cooling medium with constant temperature and constant flow to cool each heating component of the ultra-precision shape control machining equipment.

[0130] Furthermore, the water chiller assembly is an air-cooled refrigerated water chiller of the SMC brand SMC-HRS018 type. Its controlled temperature range is 18 - 22 °C, the temperature fluctuation ≤ ±0.1 °C, the maximum output flow is 27 L / min, the cooling capacity is 1700 W, and it is powered by single-phase AC 200 - 230 V;

[0131] Furthermore, the water chiller circulates a nearly constant-temperature cooling medium to cool the high-speed milling spindle motion unit and the hydraulic B-axis unit bearings.

[0132] (4) The industrial camera assembly is mainly used to realize the on - tooling before processing and the on - line monitoring of the tool - workpiece contact situation during the processing.

[0133] Furthermore, the industrial camera assembly includes horizontal and vertical CCD cameras, which respectively realize the observation of the tool - workpiece contact situation in the Y m O m Z m and X m O m Z m plane during tooling before processing and material removal.

[0134] Furthermore, the industrial camera adopts the Mercury II PRO - 26.2 million - pixel high - resolution CCD camera produced by Daheng Image, which can transmit image data through the USB3.0 data interface in various harsh environments.

[0135] 4. System working method The operation process of a numerical control system for ultra - precision shape control machining of complex micro - components and its working method is as Figure 4 shown. The specific operation steps are as follows:

[0136] Step 4.1: After checking that the hardware connections are correct, start the weak - current control system according to the program, and turn on the weak - current program control before machining the characteristic structure of the micro - component;

[0137] Step 4.2: Check whether the compressed air supply of each path of the ultra - precision shape control machining equipment is within a reasonable range;

[0138] Furthermore, the air pressure range of the start - up locking module of the X / Y / Z linear motion unit is 0.15 Mpa - 0.40 Mpa, the air pressure range required for the workpiece C - axis is 0.35 - 0.70 Mp, the air pressure range required for the milling axis is 0.40 Mpa - 0.7 Mpa, the air pressure range required for the hydraulic B - axis locking is 0.30 Mpa - 0.65 Mpa, the air pressure range required for the vacuum generator is 0.20 Mpa - 0.40 Mpa, and the pressure range required for the vibration isolation air cushion is 0.40 Mpa - 0.65 Mpa.

[0139] Furthermore, if it is not within the reasonable range, adjust the air pressure.

[0140] Step 4.3: Open the characteristic structure processing control software of the upper computer, conduct controller communication connection, and observe whether there is any abnormality in the status display module;

[0141] Step 4.4: Move the X / Y / Z linear motion unit to a suitable position to ensure that there is no interference between the rotary axes; enable it with one key, and sequentially complete the zero - return operations of the X / Y / Z / B / C axes, and turn on the program compensation;

[0142] Step 4.5: Install the cutting tool at the end of the milling shaft according to reasonable operating specifications, install the workpiece on the fixture, and at the same time turn on the horizontal and vertical CCD cameras, and adjust the micro-displacement platform to make the cameras image clearly;

[0143] Step 4.6: Manually control through the motion control module - manual mode window, and observe through the horizontal / vertical CCD cameras to complete the tool setting operation of the system before machining and set the working origin;

[0144] Step 4.7: Complete the program editing and machining path planning according to the size of the micro-structure to be machined and the process requirements, and perform program downloading and running.

[0145] Furthermore, during the program movement, observe the material removal situation in the workpiece-tool contact area through the horizontal / vertical CCD cameras.

[0146] Step 4.8: After machining, manually control through the motion control module - manual mode window, move each axis to a safe position, release the vacuum negative pressure, and remove the workpiece for observing and characterizing the machining quality.

[0147] Implementation case:

[0148] A numerical control system for ultra-precision shape control machining of complex micro-components and its working method are proposed to address the digital control problem that the current machining system control methods for basic contour features and single micro-structure precision-level material removal cannot meet the requirements of micro-component nano-level accuracy creation under the influence of disturbances such as narrow space constraints and weak system rigidity introduced by small-scale tools and workpieces. The specific implementation case is as follows:

[0149] Step 6.1: Identify the diameter D of the micro-component to be machined by an optical microscope 1 = 0.9230 mm, and determine the number N of micro-structures to be machined on the surface of the micro-component as 16;

[0150] Step 6.2: Open the host computer system control software, perform the enabling of each axis and the program zero return operation; clamp the cutting tool pneumatically and clamp the workpiece through a vacuum adsorption fixture;

[0151] Step 6.3: Generate the coordinates of the evenly distributed point set to be machined according to the structural characteristics and process requirements of the ultra-precision shape control machining equipment, and complete the calibration of the machining sequence, as shown in Table 1.

[0152] Table 1 Coordinates and machining sequence of 16 feature structure point sets on the surface of the micro-component

[0153]

[0154] Step 6.4: The host computer numerical control software is used to write the feature structure processing program code to obtain the executable program code of the feature structure (taking the first 6 point sets in the processing sequence as an example).

[0155]

[0156] Step 6.5: Download the executable program file based on the FTP file transfer protocol to complete the micro-structure processing. The local feature structure and its morphology after processing are as Figure 8 shown, and the surface roughness reaches 26 nm, indicating that the numerical control system and its working method for ultra-precision shape control machining of complex micro-components proposed by the present invention have good service performance.

[0157] Specific advantages of the present invention:

[0158] Aiming at the intelligent control problem that the current control method of the processing system for basic contour features and single micro-structure precision-level material removal cannot meet the high-precision generation of micro-components under the constraint of narrow space, a special equipment for ultra-precision shape control machining of complex micro-components is proposed, and the nano-level precision generation of micro-components is realized through program-driven control, weak-current logic control and limit control methods.

[0159] The software control system of this method uses a UMAC motion controller with a high working main frequency (1 GHz), 64-bit (double-precision) floating-point calculation in hardware, high calculation speed, support for larger memory, excellent openness and stable controllability, and can achieve high-precision control of material removal for micro-components with spherical diameters of 1 mm to 5 mm and shell thicknesses of 20 μm to 120 μm, with dozens to more than a hundred cross-scale special-shaped feature structures distributed on the surface.

[0160] This method is equipped with system auxiliary components such as a hydraulic pump and a water chiller with high stability and reliability, and the output oil pressure fluctuation ≤ ±0.1 MPa, and the temperature fluctuation ≤ ±0.1 °C, providing a stable external environment for the high-precision, stable and controllable removal of materials.

[0161] This method is based on the FTP file transfer protocol to transfer the executable program code between the host computer and the controller. This protocol supports resume from breakpoint, and through the error detection and retransmission mechanism, it ensures the reliability and stability of the code transmission.

[0162] This method has a certain universality, and is not only applicable to the intelligent control of the nano-level precision generation process of cross-scale feature structures on the surface of complex micro-components, but can also be further promoted to the specific practice of process control when precision multi-axis linkage machine tools are used to process components such as micro-steps, micro-arrays, and free-form surfaces.

[0163] It should be understood that the various forms of processes shown above can be used, with steps reordered, added or deleted. For example, the steps described in the present application can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution disclosed in the present application can be achieved, and all are within the protection scope of the present invention.

Claims

1. A numerical control system for ultra-precision shape control processing of complex micro-components, characterized in that: The numerical control system includes a software control unit, a hardware control unit, an end-effector and a system auxiliary unit. The software control unit sends a control instruction to the hardware control unit, and the hardware control unit sends a control electrical signal to the corresponding end-effector to execute the corresponding instruction action. The software control unit also sends a control instruction to the system auxiliary unit. The software control unit includes a program editing module, a motion control module, a status display module and a process monitoring module; the program editing module is used for offline import of CNC programs, online editing, saving and downloading of programs, and for recording motion logs and real-time control; the motion control module is used for program / manual control of the machining process; the status display module is used for displaying parameters such as position and speed and the status of each auxiliary component during the machining process, including a PVF real-time display window and an activity status display window; the process monitoring module is used for online image monitoring of the tool-workpiece contact situation during the machining process; The hardware control unit includes a drive control module, a weak current control module and a limit control module; the drive control module is based on the UMAC controller, which is used to control each terminal execution component to execute corresponding command actions according to the upper computer CNC program file; the weak current control module is based on the plc logic controller, which is used to realize the start and stop, on and off, emergency stop and other safety command controls of ultra-precision shape control processing equipment; the limit control module relies on software limit, photoelectric switch limit and hard limit to realize the constraint of linear motion unit stroke, effectively ensuring operation safety; The system auxiliary components are used to achieve accurate feedback on the position of the processing process and precise control of environmental conditions, including grating scale components, hydraulic pump components, water cooler components, and industrial camera components; the grating scale component X / Y / Z axis linear motion unit is equipped with a high-precision linear grating scale, and the rotary motion unit is equipped with a high-precision circular grating, which is used to feedback the position of the motion unit in real time; the hydraulic pump component is used to continuously output stable, high-pressure hydraulic oil for the special equipment for ultra-precision shape control processing of tiny components to support each motion unit; the water cooler component is used to circulate and output constant temperature and constant flow cooling medium to cool the various heat-generating components of the ultra-precision shape control processing equipment; the industrial camera component is used to realize online monitoring of tool setting before processing and tool-workpiece contact during processing.

2. A processing method for complex micro-components, characterized in that: The processing method is realized based on a numerical control system for ultra-precision shape-controlled processing of complex micro-components, specifically: The diameter D1 and wall thickness T of the micro-component to be processed are marked by an offline optical microscope. h The characteristic parameters, together with the number of surface feature structures to be processed N, are input into the upper computer CNC system software-program editing module. The CNC system has built-in click generation and microstructure distribution uniformity optimization algorithm and processing path planning method to obtain the full surface microstructure processing coordinates N i (x i ,y i ,z i ,b i ,c i ), generate microstructure machining NC program code P rog (i) The host computer program download module, based on the FTP file transfer protocol, realizes the communication between the software and the hardware by calling the dynamic link library of the UMAC controller, downloads the above program files to the controller program buffer, and the host computer software motion control module realizes the start and stop control of the processing process; the UMAC controller receives the program instructions of the host computer software and converts them into corresponding control instructions to control the driver to dynamically adjust the program instruction movement of the terminal execution components X / Y / Z axis motion unit, hydraulic B axis motion unit, and C axis motion unit through analog quantity; each terminal execution component is equipped with a grating ruler / circular grating to feed back the real-time motion position of the execution component to the UMAC controller to realize closed-loop communication and real-time position compensation and control with the host computer software; the milling axis motion unit is equipped with an independent hardware control system and host computer software, which can be precisely controlled by the control panel integrated in the operating table; the external program is loaded into the plc logic controller through the RS232 communication port to realize the start, stop, on and off and safety control of the special equipment for shape control processing through the inching button integrated in the operating table; The linear motion unit X / Y / Z axis is equipped with a grating ruler, and the rotary motion unit is equipped with a ring grating, which can provide real-time feedback on the motion position of each axis and form a closed loop with the host computer control system; the hydraulic pump assembly adopts external water cooling, with an output oil pressure fluctuation of ≤±0.1MPa and an output flow rate of ≤20L / min, and continuously outputs stable flow and high-pressure hydraulic oil to support the X / Y / Z axis linear motion unit guide rails and hydraulic B axis bearings; the water cooler assembly adopts air cooling and refrigeration, with a control temperature range of 18-22℃, a temperature fluctuation of ≤±0.1℃, a maximum output flow rate of 27L / min, and a nearly constant temperature cooling medium to achieve cooling of the high-speed milling axis motion unit and the hydraulic B axis unit bearings; the horizontal and vertical CCD cameras realize the tool setting and material removal of the tool-workpiece in the Y direction from the horizontal and vertical directions respectively. m O m Z m and X m O m Z m Observation of contact conditions within the plane.

3. A processing method for complex micro-components according to claim 2, characterized in that: The working process of the program editing module: 1.

1. The program editing window consists of controls such as opening program, saving program, downloading program, program path display and program editing text box, which realizes online / offline editing and loading of machining programs; (1) The open program control is used to open a program file stored locally, and synchronously display the program content in the program edit text box in this window, and start FTP communication. At the same time, the local location of the opened file is synchronously displayed in the program path text box, and the program file opening status is displayed in the operation log; The CNC system supports online / offline program editing, and limits the extension of offline program files to .pmc. When the program is opened, the file transfer protocol (FTP) communication is enabled to open the transmission channel for downloading the program to the multi-axis controller. (2) The save program control saves the program in the program edit text box of this window and synchronizes the changes to the local file; (3) The program download control is used to download the program in the program editing text box to the multi-axis motion controller, and the download progress is displayed through the download progress bar; (4) The program path display control is used to display the local folder where the current program is located, so that the user can copy the program when editing offline; (5) The program editing text box is used to display the program text content or perform online program editing; 1.

2. The motion log and real-time control window consists of modules such as operation log, terminal control, and real-time control. It is used for real-time display of control instructions and system feedback during processing, input of terminal commands, and program processing control; (1) The operation log control is used to record and display the operation instructions and real-time feedback of the system during the software operation process, and generate a log file with the extension .txt in a fixed directory for the user to query later; The maximum number of rows displayed by this control is 100. When 100 rows are reached, the program automatically clears and redisplays the count. (2) The terminal control control is used to input shortcut commands to implement shortcut commands for each motion axis of the terminal, and includes a terminal command input text box, a text box clear button, and a command send button. The user can clear the contents of the running log text box by clearing the command, and click the terminal to send the contents of the command input text box to the multi-axis controller to execute the corresponding command action; Terminal control is suitable for software developers or users who are familiar with the control software. The command input text box displays the text "Terminal command real-time control! Use with caution" by default. When the user clicks the text box with the mouse, the default content disappears and the user needs to enter the control command. At the same time, the command input text box has a memory association function, and the new command will be saved in a local document in .txt text format. When entering a command, the system will automatically match the content in the document and can be quickly displayed by clicking the mouse. (3) The real-time control component can realize the work origin setting, operation, pause, continue, and stop control; The work origin setting command is used to set the machining origin after tool setting is completed during machining, so that the current position is used as the program machining origin; The Run command is used to run the program. Click this button to run the program. After setting the work origin, execute the run operation to avoid safety accidents caused by improper setting of the processing origin. The pause command is used to pause the program during the processing; The continue command is used to start the system to complete the processing of the remaining program after the program is paused during the processing; The stop command is used to stop the running control program. After the program stops, it cannot be restarted by the continue command button.

4. A method for processing complex micro-components according to claim 3, characterized in that: The motion control module is used for program / manual control of the machining process, including the manual mode window, enable and zero return window. Its working process is as follows: 2.1: The manual mode window consists of program lock, operation mode selection - continuous / jog, motion buttons and other controls, which are used for manual displacement adjustment of each axis; (1) The program lock control is used to lock and open the program in manual mode to achieve program protection such as anti-touch. When the command button is in black selected state, the program is locked, and continuous and inching operation commands in manual mode cannot be executed. Clicking the command button can achieve state switching, and the system defaults to program lock; (2) The operation mode selection - continuous / jog control is used to select the operation mode in manual mode, including two manual control modes: continuous and jog; For the same axis, click the corresponding button of continuous or inching to select the control mode. The two operation modes are mutually exclusive, and only one behavior can be executed at the same time; (3) The motion control is used to realize the movement of each axis in manual mode. Each motion unit is equipped with two motion buttons, which respectively realize the movement in the positive and negative directions (X / Y / Z) and the rotation of the axis in the forward and reverse directions (B / C). The buttons in the two directions are mutually exclusive, and only one action can be executed at the same time; 2.2: The enable and return to zero window is used to enable and return to zero of each motion unit before processing, including modules such as each axis enable module and each axis return to zero module; (1) The axis enable control is used to enable each axis independently. Clicking the radio button can realize the asynchronous enable control of each axis. The user can perform selective enable operation according to actual needs. After each axis is enabled, the corresponding radio button is in black selected state. (2) The axis return to zero control is used for independent return to zero operation of each axis. Clicking the radio button can realize asynchronous return to zero control of each axis. The user can perform selective return to zero operation according to actual needs; after each axis returns to zero, the corresponding radio button is in black selected state.

5. A method for processing complex micro-components according to claim 4, characterized in that: The working process of the status display module is: 3.

1. The PVF real-time display window is used to display the X / Y / Z / B / C axis motion position and speed of the shape control processing system in real time, and to monitor the following error in real time; After the industrial computer and the multi-axis controller establish a communication connection, the software system will automatically read the actual position, actual speed and following error of each axis and display them in the text box; The default real-time position unit of X, Y and Z axes is mm, the default real-time speed unit is mm / s, and the default real-time following error unit is mm; the default real-time position unit of B and C axes is °, the default real-time speed unit is ° / s, and the default real-time following error unit is °; 3.

2. The active status display window consists of controls such as the enable status of each axis, return to zero status, linear axis limit, program compensation and air pressure monitoring, which are used for real-time feedback of the operating status of the equipment during the processing; (1) The enable status control of each axis is used to determine and display the enable status of each axis; after the host computer is connected to the controller, the module starts real-time refresh to detect the enable status of each axis; When the axis is not enabled, the corresponding enable indicator light is red; when the axis is enabled, its enable indicator light turns green; when the axis enable is disconnected, the axis enable indicator light turns red; (2) The zero return status control is used to determine whether each axis has returned to zero; after the host computer is connected to the controller, the module starts real-time refresh to detect the zero return status of each axis; When the axis returns to zero and establishes the zero reference, the corresponding return to zero indicator turns green; when the return to zero operation is performed and the zero reference has not yet been established, the corresponding return to zero indicator turns red; (3) The linear axis limit control is used to provide real-time feedback on whether the linear axis has reached the limit; the limit is divided into positive limit and negative limit according to the positive and negative directions of the movement; during the movement of the linear axis, the system refreshes the position of each axis in real time at a frequency of 50ms; When the axis touches the corresponding travel switch, the following two operations will be performed: on the one hand, the system automatically stops the program execution, and each axis stops at the limit switch limit position; on the other hand, the limit indicator light of the corresponding axis of the limit module turns red, prompting the user that the axis has reached the limit; (4) The program compensation control is used to indicate whether the program compensation of the machining system is turned on. When the host computer is connected to the multi-axis controller, the system turns off program compensation by default, and the indicator light is red; After the user completes the zero return operation and starts program compensation, the indicator turns green; (5) The gas pressure detection control is used to determine whether the supply pressure of the control processing system meets the requirements. When the actual pressure is within the system requirement range, the indicator light is green; when the actual supply pressure exceeds the required pressure range, the indicator light is red.

6. A method for processing complex micro-components according to claim 5, characterized in that: The working process of the process monitoring module is: The image monitoring window integrates the first and second high-resolution industrial cameras to display the real-life content captured by the image in real time. The camera monitoring status can be controlled in real time through button commands such as open, capture, stop, close and set, which is used for tool setting, turning and whole process monitoring during processing. (1): The image monitoring window is mainly composed of a first camera monitoring module and a second camera monitoring module; the first camera monitoring module is used for horizontal industrial camera parameter configuration and image display; the second camera monitoring module is used for vertical industrial camera parameter configuration and image display; (2) The camera monitoring module includes commands such as camera opening, acquisition, stop, close, setting, device selection drop-down box and acquisition image display panel; (3) The device selection drop-down box control is used to select the camera for parameter configuration and image acquisition display of the current module; after the host computer and the multi-axis controller are successfully connected, the control will automatically retrieve the industrial cameras connected to the host computer and display the camera model information in the form of a list.

7. A method for processing complex micro-components according to claim 6, characterized in that: The drive control module relies on the UMAC motion controller to control each terminal execution component to perform corresponding actions through program instructions, specifically: Step 1.1: Based on the characteristic parameters of the microstructure to be processed, the upper computer numerical control software writes the processing program to complete the processing point generation and processing sequence planning; The host computer is Advantech IPC610L series industrial computer, with a 10th generation i7 CPU, 16G running memory, a 1T mechanical hard disk, two network ports, four USB3.0 ports, two RS232 ports, one VGA port and one DVI port, which can meet the actual control requirements of the characteristic structure of tiny components. The above-mentioned upper computer numerical control system software is based on the .NET Framework 4.6.1 framework, adopts C# language, and is developed based on VisualStudio2017 to achieve high-precision control of spatial microstructure processing; The above machining programs are written in an executable programming language directly read by the UMAC controller, written online and offline, and interpolation motion is achieved by spline motion mode; Step 1.2: Based on the FTP file transfer protocol, the dynamic link library of the UMAC controller is called to realize the communication between the host computer software and the controller hardware, and the above program files are downloaded to the buffer of the UMAC controller, and the host computer software realizes the start and stop control of the processing program; The UMAC controller is a Power Umac motion controller from Delta Tau; The FTP file transfer protocol is a reliable file transfer protocol that supports breakpoint resuming and ensures the reliability and stability of code transmission through error detection and retransmission mechanisms; Step 1.3: The UMAC controller receives the program instructions from the host computer software and converts them into corresponding control instructions to control the driver to dynamically adjust the end-effector to move according to the program instructions through analog quantities; The driver adopts TRUST company's TA330 series driver, AB class push-pull amplification linear output; The end-effector includes X / Y / Z-axis linear motion units, workpiece C-axis, and hydraulic B-axis motion units; The above X / Y / Z axes are driven by Parker series high-precision linear motors; The above C-axis adopts PI's ISO5.5PG model high-precision workpiece axis, which is supported by air bearing; The B-axis is a custom-made rotary table from AMETEK PRECITECH, supported by hydraulic bearings. Step 1.4: The position feedback element grating scale / circular grating installed inside each end-effector feeds back the actual motion position of each axis to the UMAC controller in real time; The linear motion unit position feedback grating ruler is a Heidenhain high-precision open linear grating ruler, which adopts an interference scanning method; The circular grating for position feedback of the rotary motion unit adopts Heidenhain high-precision serial communication absolute grating; Step 1.5: The UMAC controller receives the feedback position signal and displays it on the status display module of the upper computer numerical control system; according to the difference between the actual position and the program command position, error compensation is performed to form a closed-loop control of micro-component processing; The error compensation method utilizes the spiral compensation function of UMAC and its unique programming language and error compensation table, and performs real-time software compensation on the positioning error of the linear motor by establishing a spiral error table and compiling a program.

8. A method for processing complex micro-components according to claim 7, characterized in that: The weak current control module is based on the PLC logic controller. The operation buttons on the operation console panel control the on and off of the weak current line through the PLC logic controller. The specific control process is as follows: Step 2.1: According to the actual control requirements, complete the PLC logic controller I / O definition and allocation, and connect the lines; write the PLC weak current control program in WPLSoft 2.50 software, and write the weak current control program to the PLC logic controller through the RS232 communication port; Furthermore, the above-mentioned plc logic controller is a Delta brand DVP-24EC series logic controller, which supports an input current of 24VDC 7mA and can output a current of 2A / 1 point; Furthermore, when writing the program into the controller, if the ERROR indicator of the controller does not flash, it means that the program is legal and is waiting for the operator to issue the RUN command in the next step; Step 2.2: Connect the weak current line according to the weak current control circuit diagram, press the start button on the control operation panel, connect the weak current control device and the control cabinet power supply, and connect the host computer (industrial computer) and industrial-grade display; Step 2.3: Turn the X / Y / Z / B / C axis weak current control circuit on the operation panel to the ON position to connect the weak current circuit of the terminal actuator; Step 2.4: Press the jog buttons on the operation console panel in sequence to connect the power supply of the spindle, controller, motion axis, light source control and milling axis independent control cabinet to complete the weak current system control before processing.

9. A method for processing complex micro-components according to claim 8, characterized in that: The limit control module relies on software limit, photoelectric limit and hard limit to realize the safety constraint of the linear motion unit's motion stroke, specifically: 3.1: Software limit sets the maximum positive and negative strokes of each linear motion unit in the CNC program. When the motion unit moves to the maximum position, the program stops the operation instruction; 3.2: The photoelectric limit relies on a photoelectric switch, which is installed at the positive and negative position limits of the linear motion unit guide rail. A photoelectric block is equipped on the movable carriage. When the motion unit moves to the limit position, the block blocks the light receiver, generates an electrical signal and feeds it back to the controller to execute the stop operation; The photoelectric switch is an Omron EE-SX951-R series, which is based on the photoelectric effect, converts the input current into a light signal and emits it, and uses the obstruction or reflection of the light beam by the object to detect the existence of the object; 3.3: Hard limit is a stopper installed at the positive and negative limit positions of the guide rail. It relies on the collision between the guide rails to limit the further movement of the guide rail to achieve hard limit.

10. A method for processing complex micro-components according to claim 9, characterized in that: The grating ruler is a Heidenhain high-precision open linear grating ruler, model LIP281, which adopts interference scanning and has the characteristics of extremely small measurement step, high precision and high repeatability; The hydraulic pump adopts external water cooling, the output oil pressure fluctuation is ≤±0.1MPa, and the output flow rate is ≤20L / min; the hydraulic pump continuously outputs stable flow and high-pressure hydraulic oil to support the X / Y / Z axis linear motion unit guide rail and hydraulic B axis bearing; The water chiller assembly is an SMC brand SMC-HRS018 air-cooled refrigerated water chiller, which has a controlled temperature range of 18-22°C, a temperature fluctuation of ≤±0.1°C, a maximum output flow of 27L / min, a cooling capacity of 1700W, and is powered by a single-way AC200-230V. The water chiller circulates a nearly constant temperature cooling medium to achieve cooling of the high-speed milling axis motion unit and the hydraulic B-axis unit bearings; The industrial camera assembly includes horizontal and vertical CCD cameras, which respectively realize the Y coordinates of the tool and the workpiece during machining and material removal in the horizontal and vertical directions. m O m Z m and X m O m Z m Observation of contact conditions within a plane; the industrial camera adopts the Mercury II PRO-26.2 million pixel high-resolution CCD camera produced by Daheng Image.

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