Novel plasma detection assay device

Abstract

The application provides a novel plasma detection and analysis device, which comprises an ion extraction module, a transient sampling module, a focusing module, a quadrupole rod area and a signal collection module, the ion extraction module is connected to an ion source, the transient sampling module is connected to the ion extraction module, the focusing module is connected to the transient sampling module, the quadrupole rod area is connected to the focusing module, the quadrupole rod area comprises two groups of electrodes, and the signal collection module is connected to the quadrupole rod area. By adopting the same hardware structure, three kinds of ion analysis applications are realized through different electric field operations and signal collection modes; meanwhile, when mass spectrum energy spectrum mixed analysis is carried out, an energy selection window is not used to filter out ions with different energies, but time of flight is used to distinguish the energy of ions; for ions with different initial energies, only those passing through the pulse gate are measured and counted, so that the measured ion energy spectrum truly represents the energy spectrum of ions in the plasma, thereby obtaining the ability of simultaneously analyzing ion mass and energy.

Description

Technical Field

[0001] This invention relates to the field of plasma detection technology, and in particular to a novel plasma detection and analysis device. Background Technology

[0002] Plasma is widely used in semiconductor manufacturing, such as in plasma etching equipment, plasma-enhanced thin film deposition equipment, and ion implantation equipment. The state of the plasma affects the stability of the manufacturing process; therefore, it is necessary to monitor changes in plasma density and composition in real time to ensure the consistency of plasma states across similar equipment. Simultaneously measuring the ratio of ion energy (E) to ion mass (M) provides information on multiple aspects of plasma excitation, equilibrium, and decay, which is highly helpful for the research and development of plasma processes. Furthermore, analyzers that measure ion energy and mass can provide more refined and valuable data for plasma monitoring.

[0003] Existing analytical equipment for plasma monitoring typically only provides ion mass percentage data (mass spectrometry) or ion energy percentage data (energy dispersive spectroscopy). To obtain both ion mass percentage and energy percentage data simultaneously, separate energy and mass analyses are usually required. Therefore, the equipment needs to include two independent and non-interfering analytical devices. In such a device, during energy analysis, ions of different masses must have energies within a selected range to pass through; during mass analysis, ions of different energies must have masses within a selected range to pass through. At the final receiver, only ion signals with both energy and mass within the selected range are received. For example, plasma contains ions with energies ranging from 2 eV to 60 eV and ion masses ranging from 1 amu to 200 amu (one atomic mass unit is 1 amu, 1 amu = 1.66 x 10⁻²⁷ kg). Assuming the resolution of the ion energy analyzer is 0.2 eV and the resolution of the ion mass analyzer is 0.5 amu. When the energy scan reaches 10 eV, ions of all masses, as long as their energy is between 9.9 eV and 10.1 eV, can pass through the energy analyzer. Once in the mass analyzer, if the current mass scan is 40 amu, only ions with masses between 39.75 amu and 40.25 amu will be received. If the user is only interested in ions at 40 amu (such as argon ions Ar+), the mass analyzer can be fixed at 40 amu, and the energy analyzer can be set to collect ion signals at 2 eV, 2.2 eV, 2.4 eV, ..., 59.8 eV, 60 eV, thus obtaining the energy spectrum of 40 amu ions. However, this fixed-mass-scan energy analysis mode has a significant drawback: ion signals of different energies are collected at different times. If the plasma itself is very stable and remains constant within the signal collection time range, then the collected signal can indeed represent the true ion energy spectrum. If the plasma is unstable, this collection mode cannot obtain a true ion energy spectrum. The number of ions at E=2eV is measured earlier than at E=60eV, and they are not compared at the same time. Therefore, it is impossible to make accurate analysis of the plasma that changes over time.

[0004] Therefore, a new solution is needed. Summary of the Invention

[0005] The purpose of this invention is to address the problems of existing analytical devices that simultaneously measure ion energy and mass often being large in size, complex in structure, and low in accuracy, and to provide a novel plasma detection and analysis device.

[0006] This invention provides a novel plasma detection and analysis device, comprising an ion extraction module, an instantaneous sampling module, a focusing module, a quadrupole region, and a signal collection module. The ion extraction module is connected to an ion source, the instantaneous sampling module is connected to the ion extraction module, the focusing module is connected to the instantaneous sampling module, the quadrupole region is connected to the focusing module, the quadrupole region includes two sets of electrodes, and the signal collection module is connected to the quadrupole region. The ion extraction module extracts plasma from the ion source and guides it into an electric field.

[0007] In the first working mode of mass spectrometry analysis, a pulse voltage is applied to the instantaneous sampling module so that plasmas of different energies within the same pulse time window enter the focusing module. An accelerating voltage is applied to the two sets of electrodes in the focusing module and the quadrupole region so that plasmas of different masses are accelerated and focused and then fly to the signal collection module for collection. The signal collection module calculates the ion mass based on the flight time.

[0008] In the second working mode of mass spectrometry analysis, a low DC voltage is applied to the instantaneous sampling module and the focusing module to allow the plasma to fly freely into the quadrupole region. A DC voltage and a radio frequency voltage with the same amplitude but opposite phase are applied to the two sets of electrodes in the quadrupole region to allow the plasma within a preset mass range to be collected by the signal collection module.

[0009] In the third operating mode, which simultaneously performs mass spectrometry and energy dispersive spectroscopy, a pulse voltage is applied to the instantaneous sampling module, allowing plasmas of different energies within the same pulse time window to enter the focusing module. A DC voltage V, identical to the center potential of the quadrupole region, is then applied to the focusing module. c The voltage applied to the first set of electrodes in the horizontal direction is V1 = V c +U+V*cos(ωt), the voltage applied to the second set of electrodes in the vertical direction is V2=V c -UV*cos(ωt), the plasmas of different energies enter the quadrupole region through the focusing module and move along the axial direction of the quadrupole region while reciprocating between the two sets of electrodes for filtering, so that the plasma within the preset mass window is collected by the signal collection module, and the signal collection module analyzes the ion energy according to the time of flight.

[0010] In the novel plasma detection and analysis device provided by the present invention, the ion extraction module includes a pinhole electrode and a suction electrode, wherein the pinhole electrode is connected between the ion source and the suction electrode.

[0011] In the novel plasma detection and analysis device provided by the present invention, the ion extraction module includes a pinhole electrode and an extraction electrode. The incident end of the pinhole electrode is connected to the ion source, and the extraction electrode is disposed in the cavity of the pinhole electrode, with the exit end of the pinhole electrode and the exit end of the extraction electrode fixedly connected.

[0012] In the novel plasma detection and analysis device provided by the present invention, the diameter of the incident end of the pinhole electrode is b, and the ratio of the distance between the incident end of the extraction electrode and the incident end of the pinhole electrode to the diameter of the incident end of the pinhole electrode ranges from 5:1 to 30:1.

[0013] In the novel plasma detection and analysis device provided by the present invention, the signal collection module adopts the MCP single-particle counting mode in the first working mode and the third working mode; and adopts the Faraday cup current metering mode in the second working mode.

[0014] In the novel plasma detection and analysis device provided by this invention, in the third operating mode, the initial energy E1 of the plasma and the flight time t of the plasma in the quadrupole region are... M The relationship is,

[0015]

[0016] Where M is the ion mass, L is the length of the quadrupole region, and V F This represents the suspension potential of the plasma.

[0017] Implementing the embodiments of the present invention has the following beneficial effects: In the novel plasma detection and analysis device provided by the present invention, three ion analysis applications are realized by using the same hardware structure but different electric field operation and signal acquisition modes; at the same time, when performing mass spectrometry and energy spectrum mixed analysis, energy selection windows are not used to filter out ions of different energies, but time-of-flight is used to distinguish the ion energies; for ions with different initial energies, as long as they pass through the pulse gate, they will be measured and counted, so the measured ion energy spectrum truly represents the energy spectrum of ions in the plasma, thereby obtaining the ability to analyze ion mass and energy simultaneously; thus, the disadvantage of ion energy being collected at different times in similar technologies is avoided, and for plasmas that change over time, this analytical capability can provide more valuable data. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 The diagram shown is a schematic of the novel plasma detection and analysis device provided by the present invention.

[0020] Figure 2 The diagram shown is a structural schematic of the novel plasma detection and analysis device provided in Embodiment 1 of the present invention;

[0021] Figure 3 The diagram illustrates the working principle of obtaining ion energy distribution using time-of-flight measurement.

[0022] Figure 4 The diagram shown is a schematic diagram of the connection between the small-hole electrode and the extraction electrode in the novel plasma detection and analysis device provided in Embodiment 2 of the present invention. Detailed Implementation

[0023] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings. Typical embodiments of this application are shown in the drawings. However, this application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0025] To better understand the above technical solutions, the following will describe the above technical solutions in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the embodiments of the present invention and the specific features in the embodiments are detailed descriptions of the technical solutions of this application, rather than limitations on the technical solutions of this application. In the absence of conflict, the embodiments of the present invention and the technical features in the embodiments can be combined with each other.

[0026] Example 1

[0027] Figure 1 The diagram shown is a schematic of the novel plasma detection and analysis device provided by the present invention. Figure 2 The diagram shown is a structural schematic of the novel plasma detection and analysis device provided in Embodiment 1 of the present invention. Figure 1and Figure 2 As shown, the novel plasma detection and analysis device provided in this embodiment of the invention includes an ion extraction module 100, an instantaneous sampling module 200, a focusing module 300, a quadrupole region 400, and a signal collection module 500 connected in sequence. The quadrupole region 400 includes two sets of electrodes. The ion extraction module 100 includes a pinhole electrode 110 and a suction electrode 120. The pinhole electrode 110 is connected between the ion source 600 and the suction electrode 120, extracting plasma from the ion source and guiding it into an electric field. Further, the pinhole electrode 110 is used to extract ions from the ion source and form a preliminary ion beam, controlling the initial shape and direction of the beam. The suction electrode 120 is used to further extract and accelerate ions, optimizing the transmission efficiency of the ion beam; simultaneously, it preliminarily focuses the ion beam, reducing divergence.

[0028] Specifically, in this embodiment, during the first working mode of mass spectrometry analysis, a pulse voltage is applied to the instantaneous sampling module, causing plasmas of different energies within the same pulse time window to enter the focusing module. An accelerating voltage is applied to both the focusing module and the two sets of electrodes in the quadrupole region, allowing plasmas of different masses to be accelerated and focused before flying to the signal collection module for collection. The signal collection module calculates the ion mass based on the flight time. In this embodiment, the flight time is used to separate plasmas of different masses. By accelerating the ions immediately after the pulse gate electrode of the instantaneous sampling module, the accelerating voltage is made much greater than the energy difference of the ions in the plasma, allowing the ions to fly at a constant speed in the field-free region. By making the voltage on the quadrupole the same as the ion accelerating voltage, the time difference between the arrival times of ions of different masses at the receiver is sufficiently large, thereby obtaining the mass spectrum of the plasma. The signal collection module employs MCP single-event counting mode.

[0029] Specifically, in this embodiment, during the second working mode of mass spectrometry analysis, a low DC voltage is applied to the instantaneous sampling module and the focusing module, allowing the plasma to freely enter the quadrupole region. A DC voltage and a radio frequency voltage with the same amplitude but opposite phase are applied to the two sets of electrodes in the quadrupole region, respectively, so that plasma within a preset mass range is collected by the signal collection module. In this embodiment, pulse voltage is not used for instantaneous plasma sampling. Instead, a low DC voltage is applied to both the pulse gate electrode of the instantaneous sampling module and the accelerating focusing electrode of the focusing module, allowing all ions to freely enter the quadrupole region. The ion mass is selected by applying a DC voltage U and a radio frequency voltage V to the two sets of electrodes in the quadrupole region, allowing ions of a specific mass to pass through (unaffected by ion energy). Signal collection employs a Faraday cup current metering mode.

[0030] Specifically, in this embodiment, during the third operating mode of simultaneously performing mass spectrometry and energy spectrum analysis, a pulse voltage is applied to the instantaneous sampling module to allow plasmas of different energies within the same pulse time window to enter the focusing module. A DC voltage V, identical to the center potential of the quadrupole region, is then applied to the focusing module. c The voltage applied to the first set of electrodes in the horizontal direction is V1 = V c +U+V*cos(ωt), the voltage applied to the second set of electrodes in the vertical direction is V2=V c -UV*cos(ωt), the plasmas of different energies enter the quadrupole region through the focusing module and move along the axial direction of the quadrupole region while simultaneously oscillating back and forth between the two sets of electrodes for filtering. This allows the plasma within a preset mass window to be collected by the signal collection module, which analyzes the ion energy based on the time of flight. In this embodiment, the instantaneous sampling module uses a pulsed voltage to instantaneously sample the plasma. After the plasma passes through the pulse gate electrode of the instantaneous sampling module, since a low DC voltage is still applied to the accelerating focusing electrode of the focusing module, there is no further acceleration, thus preserving the original energy difference of the ions in the plasma. This energy difference is used to extend the time it takes for the ions to fly through the quadrupole region. Since this low DC voltage is the same as the center potential of the quadrupole region, the ion flight speed in the axial direction of the quadrupole region is determined by the original ion energy. The oscillating movement of the ions in the two directions perpendicular to the quadrupole region does not affect the axial flight time. Therefore, when the ions are subjected to quality screening by the radio frequency voltage, the difference in original energy is also distinguished by the difference in flight time in the axial direction, thereby simultaneously completing mass analysis and energy analysis. Because pulse voltage sampling is used, the signal acquisition module also uses the MCP single-event counting mode.

[0031] Furthermore, in the third working mode, which simultaneously performs mass spectrometry and energy dispersive spectroscopy (EDS), the center potential of the quadrupole region is used to control the ion velocity within the quadrupole region. The z-axis is defined as the central axis pointing from the aperture to the signal collection module. The x-axis and y-axis are two other rectangular coordinate axes perpendicular to the z-axis. Assuming the x-axis points from quadrupole mass spectrometry electrode-3 to quadrupole mass spectrometry electrode-1, a positive voltage V is applied to both quadrupole mass spectrometry electrodes-3 and-1. 13 =U + V * cos(ωt), further assuming the y-axis points from quadrupole mass spectrometer electrode-4 to quadrupole mass spectrometer electrode-2, a negative voltage V is applied to quadrupole mass spectrometer electrode-4 and quadrupole mass spectrometer electrode-2. 24 = -UV*cos(ωt), at which point the center potential of the quadrupole region is zero: V0 = (V 13 +V 24 ) / 2 = 0. If V is given13 and V 24 Both provide a DC bias voltage V C Then we have:

[0032]

[0033] This allows the DC bias voltage V to be applied. C This is used to control the center potential V0 of the quadrupole region. V0, along with two other physical quantities, determines the velocity of an ion of mass M as it travels along the central axis of the quadrupole region. The first physical quantity is the plasma's levitation potential V. F The second physical quantity is the kinetic energy E1 of the ion moving in the plasma. If an ion is emitted from the edge of the plasma sheath with a kinetic energy of E1 towards the aperture, then the energy of the ion entering the aperture after passing through the plasma sheath is E1 + eV. F Where e is the charge of the ion (for a monovalent positive ion, e = 1.6 x 10⁻⁶). -19 When the ion (coulomb) enters the quadrupole region after passing through the extraction electrode, pulse gate electrode, and focusing electrode, the energy of the ion is E2 = E1 + eV. F -eV C If V C If the value is less than 0, the ion energy will increase further. A mass window (determined by U, V, and ω) is selected in the quadrupole region to allow ions of mass M to pass through, while ions of other masses are filtered out. Therefore, only the flight time of ions of mass M needs to be considered. Where L is the distance the ion travels in the quadrupole region, and V is the levitation potential. F V can be determined by other methods (such as using the Langmuir probe). C It is the center potential of the controllable quadrupole region. Except for E1, all other quantities in the formula are known. Therefore, t is obtained through time-of-flight measurement. M Then, the initial kinetic energy E1 of the ion can be calculated using the formula. When the initial kinetic energy of the ion is large, the flight time t M Shorter, therefore by measuring t M Energy distribution data for ion M were obtained. It is particularly important to note the measurement of t. M Instead of using an energy selection window to filter out ions of different energies, ions with different initial energies are all measured and counted as long as they pass through the pulse gate. Therefore, the measured ion energy spectrum truly represents the energy spectrum of ion M in the plasma, thus enabling the simultaneous analysis of ion mass and energy. For plasmas that change over time, this analytical capability provides even more valuable data.

[0034] Figure 3 The diagram illustrates the working principle of obtaining ion energy distribution using time-of-flight measurements. Figure 3As shown, the electrical pulse applied to the gate electrode allows 15 ions to pass through within a time interval (0, t0), where t0 is a very short time (e.g., t0 = 100 ns). The red vertical line represents an ion with a high initial energy E1, the cyan vertical line represents an ion with a medium initial energy E1, and the green vertical line represents an ion with a low initial energy E1. After flying a distance L, all ions are in the (t0, t0) time interval. min , t max Ions with different initial energies arrive at the signal receiving module within a certain time frame. Due to the different flight times of ions with different initial energies, ions with higher E1 arrive at the signal receiving module earlier, while ions with lower E1 arrive at the signal collecting module later. They all arrive at the signal receiving module within the time frame (t). min , t max The data was collected and statistically analyzed within a specific time window.

[0035] In this embodiment, three ion analysis applications were implemented using the same hardware structure but different electric field operation and signal acquisition modes. Furthermore, during mass spectrometry and energy spectrum mixed analysis, instead of using an energy selection window to filter out ions of different energies, time-of-flight was utilized to distinguish ion energies. Ions with different initial energies were all measured and counted as long as they passed through the pulse gate, thus the measured ion energy spectrum truly represents the energy spectrum of ions in the plasma, thereby achieving the ability to simultaneously analyze ion mass and energy. This avoids the drawback of similar technologies where ion energy is collected at different times, and provides more valuable data for plasmas that change over time.

[0036] Example 2

[0037] Figure 4 The diagram shown is a schematic representation of the connection between the small-hole electrode and the extraction electrode in the novel plasma detection and analysis device provided in Embodiment 2 of the present invention. Figure 4 As shown, the difference from Embodiment 1 is that in this embodiment, the ion extraction module 100 includes a pinhole electrode 110 and an extraction electrode 120. The incident end of the pinhole electrode is connected to the ion source, and the extraction electrode is disposed within the cavity of the pinhole electrode, with the exit end of the pinhole electrode and the exit end of the extraction electrode fixedly connected. Thus, the incident end of the extraction electrode is close to the pinhole electrode, which can directly accelerate the positive ions passing through the pinhole. The electric field between the pinhole electrode and the extraction electrode creates a focusing effect on the positive ion beam, maintaining a high degree of parallelism in the detected ion beam. Simultaneously, the pinhole at the tip of the extraction electrode creates a differential pumping effect. This differential pumping reduces the gas pressure after the extraction electrode, resulting in a higher vacuum level in the vacuum pumping-2 channel. This higher vacuum level reduces the probability of ions colliding with neutral gas molecules, reducing the chance of ions being missed due to neutralization (charge transfer to neutral molecules).

[0038] Furthermore, in this embodiment, in order to prevent gas discharge near the orifice, the diameter of the incident end of the orifice electrode is b, and the ratio of the distance between the incident end of the extraction electrode and the incident end of the orifice electrode to the diameter of the incident end of the orifice electrode is in the range of 5:1 to 30:1.

[0039] In the plasma detection device of Example 1, the pinhole electrode is at the same potential as the vacuum chamber (grounded), and the extraction electrode is connected to a negative voltage. After passing through the pinhole, ions drift through the field-free region. When detecting plasma under low pressure / high ionization or high pressure / low ionization conditions, positive ions repel each other during drift, resulting in severe ion beam divergence after passing through the pinhole. Ions with excessively large divergence angles will be missed, reducing the efficiency of analysis and detection. In this example, by placing the extraction electrode close to the pinhole, positive ions passing through the pinhole are directly accelerated. At the same time, the pinhole electrode adopts a Pierce source structure, which can suppress positive ion beam divergence. A differential pumping effect can be formed between the extraction electrode and the pinhole electrode, thereby suppressing ion neutralization.

[0040] Numerous specific details are set forth in the specification provided herein. However, it will be understood that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0041] Similarly, it should be understood that, in order to simplify this disclosure and aid in understanding one or more of the various aspects of the invention, in the above description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof. However, this method of disclosure should not be construed as reflecting an intention that the claimed invention requires more features than are expressly recited in each claim. Rather, as reflected in the following claims, inventive aspects lie in fewer than all features of a single foregoing disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into this detailed description, wherein each claim itself is a separate embodiment of the invention.

[0042] Furthermore, those skilled in the art will understand that although some embodiments herein include certain features included in other embodiments but not others, combinations of features from different embodiments are intended to be within the scope of the invention and form different embodiments. For example, in the following claims, any of the claimed embodiments can be used in any combination.

[0043] It should be noted that the above embodiments are illustrative of the invention and not restrictive, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The word "comprising" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The invention can be implemented by means of hardware comprising several different elements and by means of a suitably programmed computer. In the unit claims enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

Claims

1. A novel plasma detection and analysis device, characterized in that, The system includes an ion extraction module, an instantaneous sampling module, a focusing module, a quadrupole region, and a signal collection module. The ion extraction module is connected to the ion source, the instantaneous sampling module is connected to the ion extraction module, the focusing module is connected to the instantaneous sampling module, the quadrupole region includes two sets of electrodes, and the signal collection module is connected to the quadrupole region. The ion extraction module extracts plasma from the ion source and guides it into an electric field. In the first working mode of mass spectrometry analysis, a pulse voltage is applied to the instantaneous sampling module so that plasmas of different energies within the same pulse time window enter the focusing module. An accelerating voltage is applied to the two sets of electrodes in the focusing module and the quadrupole region so that plasmas of different masses are accelerated and focused and then fly to the signal collection module for collection. The signal collection module calculates the ion mass based on the flight time. In the second working mode of mass spectrometry analysis, a low DC voltage is applied to the instantaneous sampling module and the focusing module to allow the plasma to fly freely into the quadrupole region. A DC voltage U with the same amplitude but opposite phase and a radio frequency voltage V are applied to the two sets of electrodes in the quadrupole region to allow the plasma within a preset mass range to be collected by the signal collection module. In the third operating mode, which simultaneously performs mass spectrometry and energy dispersive spectroscopy, a pulse voltage is applied to the instantaneous sampling module, allowing plasmas of different energies within the same pulse time window to enter the focusing module. A DC voltage V, identical to the center potential of the quadrupole region, is then applied to the focusing module. c The voltage applied to the first set of electrodes in the horizontal direction is The voltage applied to the second set of electrodes in the vertical direction is After the plasmas of different energies enter the quadrupole region through the focusing module, they move along the axial direction of the quadrupole region while reciprocating between the two sets of electrodes for filtering. This allows the plasmas within a preset mass window to be collected by the signal collection module, which analyzes the ion energy based on the time of flight.

2. The novel plasma detection and analysis device according to claim 1, characterized in that, The ion extraction module includes a pinhole electrode and an extraction electrode, wherein the pinhole electrode is connected between the ion source and the extraction electrode.

3. The novel plasma detection and analysis device according to claim 1, characterized in that, The ion extraction module includes a pinhole electrode and an extraction electrode. The incident end of the pinhole electrode is connected to the ion source, and the extraction electrode is disposed in the cavity of the pinhole electrode, with the exit end of the pinhole electrode and the exit end of the extraction electrode fixedly connected.

4. The novel plasma detection and analysis device according to claim 3, characterized in that, The diameter of the incident end of the pinhole electrode is b, and the ratio of the distance between the incident end of the extraction electrode and the incident end of the pinhole electrode to the diameter of the incident end of the pinhole electrode ranges from 5:1 to 30:

1.

5. The novel plasma detection and analysis device according to claim 1, characterized in that, In the first and third operating modes, the signal collection module adopts the MCP single-particle counting mode; in the second operating mode, the signal collection module adopts the Faraday cup current metering mode.

6. The novel plasma detection and analysis device according to claim 1, characterized in that, In the third operating mode, the initial energy E1 of the plasma and the flight time t of the plasma in the quadrupole region are... M The relationship is, Where M is the ion mass, L is the length of the quadrupole region, and V F denoted as ρ, where ρ is the suspension potential of the plasma, and e is the charge carried by the ion.

Images