Motor control device and method for semiconductor processing equipment

Abstract

The invention relates to a motor control device and method for semiconductor processing equipment. Disclosed are a motor control device and method for semiconductor processing equipment, which can grasp an error portion related to an operation signal of a motor by applying a signal processing means of a transmission mode and execute sensorless control of the motor by compensating for the error portion. The motor control method of the semiconductor processing equipment comprises the following steps: a motor operation feedback step of applying a control signal to a motor and feeding back an operation signal of the motor based on the control signal to obtain a feedback operation signal; a component signal generation step of generating a positive sequence component signal and a negative sequence component signal of the feedback working signal; and an error judgment step of judging an error part of the feedback working signal relative to a normal working signal of the motor based on the negative sequence component signal and corresponding to the control signal.

Description

Technical Field

[0001] The present invention relates to a motor control device and method for semiconductor process equipment, and more specifically to a motor control technology for semiconductor process equipment that can apply signal processing means of a transmission method to grasp the error part related to the working signal of the motor and perform sensorless control of the motor by compensating for the error part. Background Art

[0002] Semiconductors can generally be manufactured through eight major processes: wafer process, oxidation process, photolithography process, etching process, thin film process, wiring process, testing process and packaging process.

[0003] Each process executes detailed processes, and many devices used to execute each process are connected to form semiconductor process equipment.

[0004] Semiconductor manufacturing processes are performed in nanometer ultra-fine units, so each device needs to be precisely controlled to match them.

[0005] Each device that performs semiconductor manufacturing process is a component that performs process work through a plurality of motors.

[0006] However, there is a problem that as the motor rotates at a higher speed, it becomes difficult to obtain accurate data due to the influence of noise and signal delay caused by inductance.

[0007] The conventional technology has the problem that the higher the speed of the motor, the slower the processing speed of the inductance component of the motor and the control data, and the lower the responsiveness. For example, when the motor is controlled by a current control algorithm, if the speed of the motor increases, a delay in the current signal occurs, which causes a counter torque to be applied to the permanent magnet synchronous motor that needs to apply a current command according to the rotor position of the motor. This causes the efficiency and torque of the motor to decrease, and accurate control cannot be achieved.

[0008] In particular, even if the algorithm for controlling the motor is changed based on the counter-generating power, it is difficult to accurately detect the rotor position due to harmonics and waveform distortion, thereby reducing the reliability of the motor operation.

[0009] Such sensorless control driven by inaccurate data cannot track the exact position, thus causing a reduction in the output and efficiency of the motor. If the error continues to accumulate, the motor may lose controllability and cause malfunction in serious cases. Summary of the invention

[0010] The present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to disclose a means for reducing errors generated when performing sensorless control of a permanent magnet synchronous motor driven at high speed.

[0011] In particular, the purpose is to solve the following problem: sensorless control driven by inaccurate data cannot track the exact position, thus causing the output and efficiency of the motor to decrease. If the error continues to accumulate, the controllability of the motor may be lost and erroneous operation may occur in serious cases.

[0012] The objects of the present invention are not limited to the foregoing, and other objects and advantages of the present invention not mentioned can be understood from the following description.

[0013] An embodiment of a motor control method for semiconductor process equipment according to the present invention for solving the above-mentioned problems may include: a motor working feedback step of applying a control signal to the motor and feeding back the working signal of the motor based on the control signal to obtain a feedback working signal; a component signal generating step of generating a positive sequence component signal and a negative sequence component signal of the feedback working signal; and an error judgment step of judging the error part of the feedback working signal relative to the normal working signal of the motor based on the negative sequence component signal and corresponding to the control signal.

[0014] Preferably, the component signal generating step may generate a positive sequence component signal that directly responds to the feedback working signal, and generate a negative sequence component signal that inverts the feedback working signal.

[0015] As an example, the component signal generating step may generate a positive sequence component signal and a negative sequence component signal by using a differential signal of the feedback working signal.

[0016] Furthermore, the error determination step may be to combine the normal working signal with the negative sequence component signal to determine the error portion of the feedback working signal.

[0017] As an example, the error determination step may combine the normal operation signal and the negative sequence component signal to generate an error signal.

[0018] Preferably, the motor control method of the semiconductor process equipment further includes: a working signal compensation step, determining a compensation component of the positive sequence component signal based on the error portion, and compensating the feedback working signal based on the compensation component.

[0019] As an example, the working signal compensation step may be to use the error portion as a compensation component of the feedback working signal, combine the compensation component with the positive sequence component signal to generate a compensation signal, and compensate the feedback working signal based on the compensation signal.

[0020] Furthermore, the motor control method of the semiconductor process equipment may further include: a working signal compensation step, adding the error signal to the positive sequence component signal to generate a compensation signal, and compensating the feedback working signal based on the compensation signal.

[0021] Furthermore, the motor control method of the semiconductor process equipment may further include: a normal working signal storage step of storing a normal working signal of the motor based on the application of the control signal.

[0022] In addition, an embodiment of the motor control device of the semiconductor process equipment according to the present invention may be that a control signal is applied to the motor of the semiconductor process equipment that performs the semiconductor process to perform the work of the motor, and the working signal of the motor corresponding to the control signal is fed back to obtain a feedback working signal, and a positive sequence component signal and a negative sequence component signal of the feedback working signal are generated through signal processing of the transmission method, and the error part of the feedback working signal of the normal working signal of the motor is judged based on the negative sequence component signal and corresponding to the control signal, and the error part is compensated to control the motor.

[0023] Preferably, the motor control device of the semiconductor process equipment includes: a motor controller, which applies a control signal to the motor of the semiconductor process equipment to control the operation of the motor, and feeds back the working signal of the motor corresponding to the control signal to obtain a feedback working signal; and a working signal compensator, which generates a positive-sequence component signal and a negative-sequence component signal of the feedback working signal through signal processing of a transmission method, and judges the error part of the feedback working signal of the normal working signal of the motor corresponding to the control signal based on the negative-sequence component signal, and judges the compensation component of the positive-sequence component signal based on the error part to compensate the feedback working signal.

[0024] Furthermore, the working signal compensator may include: a signal extraction unit, which generates a positive sequence component signal that directly reflects the feedback working signal and a negative sequence component signal that inverts the feedback working signal; and an error judgment unit, which combines the normal working signal of the motor corresponding to the control signal with the negative sequence component signal to judge the error part of the feedback working signal.

[0025] As an example, the signal extraction unit may generate a positive-sequence component signal and a negative-sequence component signal using a differential signal of the feedback operation signal.

[0026] As an example, the error determination unit may combine the normal operation signal and the negative sequence component signal to generate an error signal.

[0027] Furthermore, the working signal compensator may include: a signal compensating unit for determining a compensation component of the positive sequence component signal based on the error portion, and compensating the feedback working signal based on the compensation component.

[0028] As an example, the working signal compensator may use the error portion as a compensation component of the feedback working signal, combine the compensation component with the positive sequence component signal to generate a compensation signal, and compensate the feedback working signal based on the compensation signal.

[0029] As an example, the working signal compensator may add the error signal and the positive sequence component signal to generate a compensation signal, and compensate the feedback working signal based on the compensation signal.

[0030] Preferably, the signal extraction unit may store a normal operating signal of the motor based on application of the control signal.

[0031] Furthermore, it may be that the motor control device of the semiconductor process equipment individually controls each of the multiple motors provided in the semiconductor process equipment to obtain a feedback working signal, generates a component signal for each feedback working signal through signal processing in a transmission manner, and compensates for the error portion of the working signal of each motor based on the component signal.

[0032] A preferred embodiment of the motor control method of semiconductor process equipment according to the present invention may be, comprising: a motor working feedback step, applying a control signal to the motor and feeding back the working signal of the motor based on the control signal to obtain a feedback working signal; a component signal generating step, generating a positive sequence component signal directly reflecting the feedback working signal and a negative sequence component signal inverting the feedback working signal through the differential signal of the feedback working signal; an error judgment step, judging the error part of the feedback working signal corresponding to the normal working signal of the control signal to the motor combined with the negative sequence component signal, and combining the normal working signal and the negative sequence component signal to generate an error signal; and a working signal compensation step, treating the error part as a compensation component of the feedback working signal, adding the error signal to the positive sequence component signal to generate a compensation signal, and compensating the feedback working signal based on the compensation signal.

[0033] According to the present invention as described above, it is possible to prevent errors that occur when performing sensorless control of a permanent magnet synchronous motor that is driven at high speed.

[0034] In particular, in the present invention, the error size and position of the working signal are identified by signal processing of the transmission mode, and the error is compensated according to the compensation component, thereby minimizing the loss.

[0035] Furthermore, according to the present invention, the error is compensated in the low speed rotation area and the high speed rotation area of ​​the motor to follow the accurate position value of the sensorless control, thereby improving the accuracy and reliability of the motor control.

[0036] The effects of the present invention are not limited to those mentioned above, and other effects not mentioned can be clearly understood from the following description by a person having ordinary knowledge in the technical field to which the present invention belongs. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 A schematic diagram showing the flow of a semiconductor manufacturing process is shown.

[0038] Figure 2 as well as Figure 3 A structural diagram showing an embodiment of a motor control device according to the present invention.

[0039] Figure 4 A structural diagram showing an embodiment of an operating signal compensator for a motor control device according to the present invention.

[0040] Figure 5 A diagram showing an operating configuration of an embodiment of an operating signal compensator for a motor control device according to the present invention.

[0041] Figure 6 A flow chart showing an embodiment of a motor control method according to the present invention is shown.

[0042] Figure 7 A flow chart showing an embodiment of applying transmission-type signal processing to compensate for errors in working signals in a motor control method according to the present invention.

[0043] Figure 8 The working process of an embodiment of the motor control method according to the present invention is shown.

[0044] Fig. 9 An example of controlling a motor using the present invention is shown below.

[0045] Fig.10 An example of applying the present invention to compensate for an operating error of a motor is shown.

[0046] (Explanation of Reference Numerals)

[0047] 100: Semiconductor process equipment,

[0048] 110: Electric motor,

[0049] 200: control device,

[0050] 210: Motor controller,

[0051] 230: working signal compensator,

[0052] 231: Signal extraction unit,

[0053] 233: Error judgment unit,

[0054] 235: Signal compensation unit. DETAILED DESCRIPTION

[0055] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, but the present invention is not limited to or restricted to the embodiments.

[0056] In order to illustrate the present invention and the advantages of the present invention and the objectives achieved by the implementation of the present invention, the preferred embodiments of the present invention are shown below by way of example and are viewed with reference to them.

[0057] First, the terms used in this application are only used to illustrate specific embodiments and are not intended to limit the present invention. Singular expressions may include plural expressions unless otherwise expressly stated in the context. In addition, in this application, the terms "including" or "having" should be understood to refer to the existence of features, numbers, steps, operations, constituent elements, accessories, or combinations thereof recorded in the specification, and do not preclude the existence or additional possibility of one or more other features or numbers, steps, operations, constituent elements, accessories, or combinations thereof.

[0058] In the description of the present invention, when it is determined that the detailed description of the relevant well-known structure or function may obscure the main points of the present invention, the detailed description will be omitted.

[0059] The present invention discloses a technology for controlling a permanent magnet synchronous motor of a semiconductor process equipment.

[0060] Figure 1 A schematic diagram showing the flow of a semiconductor manufacturing process is shown.

[0061] The semiconductor manufacturing process consists of eight major processes, including wafer process, oxidation process, photolithography process, etching process, thin film process, metal wiring process, EDS, and packaging.

[0062] Wafer processing is the process of manufacturing wafers, which are materials used to make semiconductor integrated circuits. Wafers made of silicon as the main component are made through wafer processing.

[0063] The oxidation process is a process for forming an oxide film on the surface of a wafer. It is a process in which oxygen or water vapor chemically reacts with the surface of a silicon wafer at a high temperature of 800 to 1200 degrees to form a thin and uniform silicon oxide film.

[0064] The oxidation process may be used to protect the wafer surface from various contaminants generated during semiconductor processes or impurities generated from chemical substances.

[0065] The photolithography process is a process that uses light to illuminate electronic circuit patterns on a wafer. The photolithography process is carried out in the order of photosensitive liquid coating, exposure process, and development process.

[0066] The etching process is a process of removing unnecessary parts other than the electronic circuit pattern drawn by the photolithography process. The etching process can be dry etching or wet etching depending on the situation.

[0067] The thin film evaporation process is a process of forming an insulating film between circuit layers to prevent them from affecting each other when multiple circuit layers are stacked on a wafer undergoing an etching process. Physical vapor deposition and chemical vapor deposition are used as evaporation methods.

[0068] The wiring process is a process of electrically connecting formed electronic circuit patterns.

[0069] The electrical testing process is a process for checking the electrical quality of each chip formed on a wafer.

[0070] The packaging process is the process of cutting and packaging the individual chips formed on the wafer.

[0071] Semiconductor chips can be manufactured through such processes, and each process uses various devices. Many motors are installed in semiconductor process devices, and precise control of the motors is required when executing the corresponding processes. When control errors occur, defective products are generated, which becomes a problem of reduced production.

[0072] As one of the motors suitable for semiconductor process equipment, a permanent magnet synchronous motor is a motor that operates with reluctance torque and electromagnetic torque.

[0073] When controlling a motor, the position and speed of the rotor are measured and the operation of the motor is controlled based on the position and speed of the rotor. The sensor that measures the position and speed of the rotor is affected by changes in the surrounding environment. For example, the performance of the sensor itself decreases due to the surrounding temperature or humidity, vibration of the sensing point, etc., resulting in sensing errors. In order to solve such problems, a sensorless control method is applied.

[0074] When the sensorless control method is applied, in the low-speed rotation area, the rotor's reverse electromotive force component is too small, which makes it difficult to accurately predict the rotor position. In addition, in the high-speed rotation area, due to the influence of noise and the signal delay caused by inductance, it is difficult to accurately sense.

[0075] The present invention discloses a scheme capable of accurately grasping errors caused in a low-speed rotation region and a high-speed rotation region and compensating for the errors.

[0076] In particular, the present invention discloses a motor control technology for semiconductor process equipment that can grasp an error portion related to an operating signal of a motor by applying a transmission-type signal processing means and perform sensorless control by compensating for the error portion.

[0077] Figure 2 as well as Figure 3 A structural diagram showing an embodiment of a motor control device according to the present invention.

[0078] The motor 110 is arranged in the semiconductor process equipment 100 to perform a process, and the motor 110 can be precisely controlled by the control device 200. A plurality of motors 110 can be arranged in the semiconductor process equipment 100, and one control device 200 can independently control each motor 110.

[0079] The control device 200 may control the motor 110 by applying a transmission signal processing method.

[0080] The control device 200 may include a motor controller 210 , a working signal compensator 230 , and the like.

[0081] The motor controller 210 may apply a control signal to the motor 110 to operate the motor 110, and provide an operation signal based on the operation of the motor 110 to the operation signal compensator 230 through feedback. Furthermore, the motor controller 210 may control the motor 110 based on the operation signal compensation of the operation signal compensator 230.

[0082] The working signal compensator 230 can determine the error of the feedback working signal and compensate the working signal based on the error determination result. Preferably, the working signal compensator 230 can apply a transmission signal processing method to determine the error of the working signal and compensate the working signal accordingly.

[0083] Figure 4 A structural diagram showing an embodiment of a working signal compensator of a motor control device according to the present invention is shown. Figure 5 A diagram showing an operating configuration of an embodiment of an operating signal compensator for a motor control device according to the present invention.

[0084] The working signal compensator 230 may include a signal extraction unit 231 , an error determination unit 233 , a signal compensation unit 235 , and the like.

[0085] The signal extraction unit 231 may receive the feedback operation signal FS of the controlled motor from the motor controller 210 and generate component signals NS and RS of the operation signal. The component signals of the operation signal may include a positive sequence component signal NS and a negative sequence component signal RS.

[0086] As an example, the signal extraction unit 231 may apply a transmission signal processing means to generate a positive sequence component signal NS and a negative sequence component signal RS by feeding back a differential signal of the working signal.

[0087] The error determination unit 233 can determine the error of the working signal. As an example, the error determination unit 233 can add the negative sequence component signal RS and the normal working signal OS to generate an error signal ES of the error part and determine the error of the feedback working signal FS based on the error signal ES. The normal working signal OS can be a signal obtained through a simulation result of the normal working of the motor based on the corresponding control signal or obtained from the repetitive normal working of the motor.

[0088] The signal compensating unit 235 may generate the compensation signal CS by compensating the feedback working signal FS based on the error determination result of the error determining unit 233. As an example, the signal compensating unit 235 may generate the compensation signal CS by adding the positive sequence component signal NS and the error signal ES of the error part.

[0089] In the above-mentioned embodiment, it is described that the control device 200 includes the working signal compensator 230. The working signal compensator 230 may also be an independent device structure, but preferably, the working signal compensator 230 may also be implemented by an algorithm program and installed in the motor controller 210.

[0090] As described above, in the present invention, the control device using the transmission signal processing means can compensate for the distorted waveform caused by the error of the working signal, thereby enabling the motor to be controlled to follow the normal operation.

[0091] Furthermore, it is possible that a plurality of motors are provided in the semiconductor process equipment, and the control device 200 independently controls each of the plurality of motors to obtain a feedback working signal, generates a component signal for each feedback working signal through signal processing in a transmission manner, and compensates for the error portion of the working signal of each motor based on the component signal.

[0092] In addition, in the present invention, the method of controlling a motor by the motor control device discussed above is disclosed, and the motor control method according to the present invention is discussed below through embodiments.

[0093] The motor control method according to the present invention is implemented by the motor control device according to the present invention described above, so reference will be made to the embodiments of the motor control device described above.

[0094] Figure 6 A flow chart showing an embodiment of a motor control method according to the present invention is shown.

[0095] The control device 200 may apply a control signal to the motor 110 of the semiconductor process equipment 100 ( S100 ) to control the motor 110 of the semiconductor process equipment 100 .

[0096] The control device 200 may obtain the operating signal of the motor 110 based on the control signal through feedback ( S200 ).

[0097] The control device 200 may analyze the feedback working signal to generate a component signal (S300). Preferably, the control device 200 may generate a positive sequence component signal and a negative sequence component signal of the feedback working signal, and determine the error part of the working signal based on the component signal (S400).

[0098] Furthermore, the control device 200 may use the grasped error portion as a compensation component for the feedback working signal, combine the compensation component with the positive sequence component signal to generate a compensation signal, and compensate the feedback working signal based on the compensation signal (S500).

[0099] In particular, the motor control method according to the present invention applies a transmission signal processing means to grasp the error part of the working signal and performs sensorless control of the motor by compensating the error part. Figure 7 as well as Figure 8 Let's look at the embodiments in more detail.

[0100] Figure 7 A flow chart showing an embodiment of applying transmission-type signal processing to compensate for errors in working signals in a motor control method according to the present invention. Figure 8 The working process of an embodiment of the motor control method according to the present invention is shown.

[0101] The signal extraction unit 231 of the working signal compensator 230 can generate a positive sequence component signal NS and a negative sequence component signal RS by feeding back a differential signal of the working signal FS (S310). As an example, the signal extraction unit 231 can generate a positive sequence component signal NS that directly reflects the feedback working signal FS and a negative sequence component signal RS that inverts the feedback working signal FS. Preferably, the signal extraction unit 231 can generate a positive sequence component signal NS and a negative sequence component signal RS by feeding back a differential signal of the working signal FS.

[0102] The error judgment unit 233 of the working signal compensator 230 can add the negative sequence component signal RS to the normal working signal OS (S410), and judge the error part based on the addition result (S430). The normal working signal OS is a signal obtained by a simulation result of the normal working of the motor based on the corresponding control signal or obtained from the normal working of the motor, and the signal extraction unit 231 can store and save the normal working signal OS corresponding to the corresponding control signal.

[0103] For example, when the result of adding the normal working signal OS and the negative sequence component signal RS continuously calculates a signal with a magnitude of 0 or continuously calculates a signal with a magnitude within a set range, the error judging unit 233 can judge that there is no error part in the feedback working signal FS. If, when the result of adding the normal working signal OS and the negative sequence component signal RS exceeds a set value in a specific part, the error judging unit 233 can judge that there is an error in the corresponding part.

[0104] Furthermore, the error determination unit 233 may generate an error signal ES based on the determination result of the error portion (S510). As an example, the error determination unit 233 may add the normal operation signal OS and the negative sequence component signal RS to generate the error signal ES.

[0105] The signal compensating unit 235 of the working signal compensator 230 may add the error signal ES and the positive sequence component signal NS ( S530 ) to generate a compensation signal CS ( S550 ).

[0106] The error portion is determined based on the negative sequence component signal RS of the feedback working signal FS, and an error signal ES having a corresponding error portion is generated. Therefore, the error signal ES can be a signal that inverts the error portion of the positive sequence component signal NS.

[0107] Therefore, the signal compensating section 235 may generate the compensation signal CS by removing the error portion from the positive sequence component signal NS by adding the error signal ES to the positive sequence component signal NS.

[0108] As described above, in the present invention, the error portion of the feedback operation signal is determined, and a corresponding compensation component is reflected in the error portion to compensate for it, thereby compensating for the distorted signal waveform and controlling it to follow the normal signal.

[0109] Fig. 9 An example of applying the present invention to control a motor is shown. Fig.10 An example of applying the present invention to compensate for an operating error of a motor is shown.

[0110] Said Fig. 9Theta AT of the motor to which the present invention is not applied and Theta LT of the motor to which the present invention is applied are shown. Fig.10 The rotation speed of the motor to which the present invention is not applied and the rotation speed of the motor to which the present invention is applied are shown.

[0111] In the present invention, the signal processing of the transmission method described above is applied to identify the size and position of the error and compensate for it, thereby compensating for the distorted waveform.

[0112] In particular, in the low-speed rotation area LS of the motor, the conventional technology is difficult to control to follow the normal operation of the motor because the position of the rotor cannot be accurately predicted, but the present invention can control the motor to stably follow the normal operation in the low-speed rotation area LS. In addition, in the high-speed rotation area HS of the motor, due to the influence of noise and the signal delay phenomenon caused by inductance, the conventional technology does not form accurate induction and the operation of the motor produces errors, but in the present invention, the motor can be controlled according to the control signal to follow the normal operation.

[0113] According to the present invention viewed above, it is possible to prevent errors that occur when performing sensorless control of a permanent magnet synchronous motor driven at high speed.

[0114] In particular, in the present invention, the error size and position of the working signal are identified by signal processing of the transmission mode, and the error is compensated according to the compensation component, thereby minimizing the loss.

[0115] Furthermore, according to the present invention, the error is compensated in the low speed rotation area and the high speed rotation area of ​​the motor to follow the accurate position value of the sensorless control, thereby improving the accuracy and reliability of the motor control.

[0116] The above description is only an illustrative description of the technical concept of the present invention, and a person with common knowledge in the technical field to which the present invention belongs can make various modifications and deformations without departing from the essential features of the present invention. Therefore, the embodiments recorded in the present invention are used to illustrate the technical concept of the present invention rather than to limit the technical concept of the present invention, and the technical concept of the present invention is not limited to such embodiments. The protection scope of the present invention should be interpreted by the attached claims, and should be interpreted as all technical concepts within the scope equivalent thereto are included in the scope of rights of the present invention.

Claims

1. A motor control method for semiconductor process equipment, characterized in that: include: a motor operation feedback step of applying a control signal to the motor and feeding back an operation signal of the motor based on the control signal to obtain a feedback operation signal; A component signal generating step, generating a positive sequence component signal and a negative sequence component signal of the feedback working signal; as well as The error judging step is to judge the error portion of the feedback working signal relative to the normal working signal of the motor based on the negative sequence component signal and corresponding to the control signal.

2. The motor control method of semiconductor process equipment according to claim 1, characterized in that: The component signal generating step generates a positive sequence component signal that directly reflects the feedback working signal, and generates a negative sequence component signal that inverts the feedback working signal.

3. The motor control method of semiconductor process equipment according to claim 2, characterized in that: The component signal generating step generates a positive sequence component signal and a negative sequence component signal by using a differential signal of the feedback working signal.

4. The motor control method of semiconductor process equipment according to claim 1, characterized in that: The error determination step combines the negative sequence component signal with the normal working signal to determine the error portion of the feedback working signal.

5. The motor control method of semiconductor process equipment according to claim 4, characterized in that: The error determination step combines the normal operation signal and the negative sequence component signal to generate an error signal.

6. The motor control method of semiconductor process equipment according to claim 1, characterized in that: The motor control method of the semiconductor process equipment further includes: The working signal compensation step determines a compensation component of the positive sequence component signal based on the error portion, and compensates the feedback working signal based on the compensation component.

7. The motor control method of semiconductor process equipment according to claim 6, characterized in that: The working signal compensation step uses the error portion as a compensation component of the feedback working signal, combines the compensation component with the positive sequence component signal to generate a compensation signal, and compensates the feedback working signal based on the compensation signal.

8. The motor control method of semiconductor process equipment according to claim 5, characterized in that: The motor control method of the semiconductor process equipment further includes: The working signal compensation step adds the error signal to the positive sequence component signal to generate a compensation signal, and compensates the feedback working signal based on the compensation signal.

9. The motor control method of semiconductor process equipment according to claim 1, characterized in that: The motor control method of the semiconductor process equipment further includes: The normal operating signal storing step stores a normal operating signal of the motor based on the application of the control signal.

10. A motor control device for semiconductor process equipment, characterized in that: A control signal is applied to a motor of a semiconductor process equipment that performs a semiconductor process to perform the work of the motor, and a working signal of the motor corresponding to the control signal is fed back to obtain a feedback working signal, a positive sequence component signal and a negative sequence component signal of the feedback working signal are generated through signal processing of a transmission method, an error portion of the feedback working signal of the normal working signal of the motor is judged based on the negative sequence component signal and corresponding to the control signal, and the error portion is compensated to control the motor.

11. The motor control device for semiconductor process equipment according to claim 10, characterized in that: The motor control device of the semiconductor process equipment comprises: a motor controller that applies a control signal to a motor of a semiconductor process device to control the operation of the motor, and feeds back an operation signal of the motor corresponding to the control signal to obtain a feedback operation signal; and The working signal compensator generates a positive-sequence component signal and a negative-sequence component signal of the feedback working signal by signal processing of the transmission mode, and judges the error part of the feedback working signal of the normal working signal of the motor corresponding to the control signal based on the negative-sequence component signal, and judges the compensation component of the positive-sequence component signal based on the error part to compensate the feedback working signal.

12. The motor control device for semiconductor process equipment according to claim 11, characterized in that: The working signal compensator comprises: a signal extraction unit, generating a positive sequence component signal directly reflecting the feedback working signal and a negative sequence component signal inverting the feedback working signal; and The error determination unit determines an error portion of the feedback operation signal by combining a normal operation signal to the motor corresponding to the control signal with the negative sequence component signal.

13. The motor control device for semiconductor process equipment according to claim 12, characterized in that: The signal extraction unit generates a positive sequence component signal and a negative sequence component signal by using a differential signal of the feedback operation signal.

14. The motor control device for semiconductor process equipment according to claim 12, characterized in that: The error determination unit combines the normal operation signal and the negative sequence component signal to generate an error signal.

15. The motor control device for semiconductor process equipment according to claim 14, characterized in that: The working signal compensator comprises: The signal compensating unit determines a compensation component of the positive sequence component signal based on the error portion, and compensates the feedback working signal based on the compensation component.

16. The motor control device for semiconductor process equipment according to claim 15, characterized in that: The working signal compensator regards the error portion as a compensation component of the feedback working signal, combines the compensation component with the positive sequence component signal to generate a compensation signal, and compensates the feedback working signal based on the compensation signal.

17. The motor control device for semiconductor process equipment according to claim 15, characterized in that: The working signal compensator adds the error signal and the positive sequence component signal to generate a compensation signal, and compensates the feedback working signal based on the compensation signal.

18. The motor control device for semiconductor process equipment according to claim 12, characterized in that: The signal extraction unit stores a normal operation signal of the motor based on application of a control signal.

19. The motor control device for semiconductor process equipment according to claim 10, characterized in that: Each of the plurality of motors provided in the semiconductor process equipment is individually controlled to obtain a feedback working signal, a component signal is generated for each feedback working signal through transmission-type signal processing, and an error portion of the working signal of each motor is compensated based on the component signal.

20. A motor control method for semiconductor process equipment, characterized in that: include: a motor operation feedback step of applying a control signal to the motor and feeding back an operation signal of the motor based on the control signal to obtain a feedback operation signal; A component signal generating step, generating a positive sequence component signal directly reflecting the feedback working signal and a negative sequence component signal inverting the feedback working signal through a differential signal of the feedback working signal; an error judgment step, corresponding to the normal working signal of the control signal to the motor combined with the negative sequence component signal to judge the error part of the feedback working signal, and combining the normal working signal and the negative sequence component signal to generate an error signal; as well as The working signal compensation step takes the error part as a compensation component of the feedback working signal, adds the error signal to the positive sequence component signal to generate a compensation signal, and compensates the feedback working signal based on the compensation signal.

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