Surface acoustic wave resonance device, forming method thereof and filter

Abstract

The invention discloses a surface acoustic wave resonance device, a forming method thereof and a filter. The device comprises a piezoelectric layer; the electrode structure is located on the piezoelectric layer and comprises a first bus and a second bus, the first bus is connected with a first electrode strip, the second bus is connected with a second electrode strip, and the first electrode strip and the second electrode strip are arranged in a staggered mode; the first electrode strip comprises a first part, a first finger folding part and a second part, the first part is connected with the first bus, one end of the first finger folding part is connected with the first part, the other end of the first finger folding part is connected with the second part, the second part comprises a second knuckle part and a first knuckle part, and the first knuckle part is located between the first finger folding part and the second knuckle part; the second electrode strip comprises a third part, a second finger folding part and a fourth part, the third part is connected with the second bus, one end of the second finger folding part is connected with the third part, the other end of the second finger folding part is connected with the fourth part, the fourth part comprises a fourth knuckle part and a third knuckle part, and the third knuckle part is located between the second finger folding part and the fourth knuckle part; a first slow-speed area is arranged between an overlapping area and a first interval area, a second slow-speed area is arranged between the overlapping area and a second interval area, and a first finger folding part and a part of a fourth part located in the first slow-speed area are utilized, so that the mass of the first slow-speed area is increased, and the propagation speed of sound waves in the first slow-speed area is reduced; the mass of the second slow-speed area is increased and the propagation speed of sound waves in the second slow-speed area is reduced by using the second finger folding part and part of the second part in the second slow-speed area, so that a piston mode is formed, and a transverse parasitic mode is effectively inhibited.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a surface acoustic wave resonator device and a forming method thereof, and a filter. Background Art

[0002] The RF front-end chips of wireless communication devices include power amplifiers, antenna switches, RF filters, multiplexers, and low-noise amplifiers, etc. Among them, RF filters include piezoelectric surface acoustic wave (SAW) filters, piezoelectric bulk acoustic wave (BAW) filters, micro-electro-mechanical system (MEMS) filters, integrated passive devices (IPD) filters, etc.

[0003] The quality factor (Q value) of the SAW resonator is relatively high. The RF filter made of SAW resonator has low insertion loss and high out-band rejection, that is, SAW filter, which is the mainstream RF filter used in wireless communication devices such as mobile phones and base stations. The SAW resonator has a negative temperature coefficient of frequency (TCF), that is, when the temperature rises, the resonant frequency of the resonator decreases, and when the temperature decreases, the resonant frequency increases. This reduces the reliability and stability of the SAW filter. In order to improve the characteristics of the resonant frequency of the SAW resonator drifting with the operating temperature, a temperature compensation layer is added to the piezoelectric layer. The temperature compensation layer has a frequency temperature coefficient opposite to that of the piezoelectric layer. The combination of the two makes the overall frequency temperature coefficient of the resonator tend to zero, improving the reliability and stability of the filter. This SAW resonator containing a temperature compensation layer is called a temperature compensated SAW (TC-SAW) resonator, and the filter composed of TC-SAW resonators is called a TC-SAW filter.

[0004] However, there are still many problems with surface acoustic wave resonator devices. Summary of the invention

[0005] The problem solved by the present invention is to provide a surface acoustic wave resonance device and a forming method thereof, and a filter to suppress the lateral parasitic mode.

[0006] To solve the above problems, the technical solution of the present invention provides a surface acoustic wave resonance device, including: a piezoelectric layer; an electrode structure located on the piezoelectric layer, the electrode structure including a first bus and a second bus arranged in parallel along a first direction, the first bus connecting a plurality of first electrode strips arranged in parallel along a second direction, the second bus connecting a plurality of second electrode strips arranged in parallel along the second direction, the first direction is perpendicular to the second direction, and the first electrode strips and the second electrode strips are alternately arranged; the first electrode strip includes a first portion, a first finger portion and a second portion, the first portion is connected to the first bus, one end of the first finger portion is connected to the first portion, and the other end of the first finger portion is connected to the second portion, the second portion includes a second finger joint portion and a first finger joint portion, and the first finger joint portion is located between the first finger joint portion and the second finger joint portion; the second electrode strip includes a third portion, a second finger joint portion and a fourth portion, the third portion is connected to the second bus, and one end of the second finger portion is connected to the third portion, The other end of the second finger-folding part is connected to the fourth part, and the fourth part includes a fourth finger joint part and a third finger joint part, and the third finger joint part is located between the second finger-folding part and the fourth finger joint part; the connection between the first finger-folding part and the first part has an angle, the connection between the first finger-folding part and the second part has an angle, the connection between the second finger-folding part and the third part has an angle, and the connection between the second finger-folding part and the fourth part has an angle; there are a first spacing area, a first slow speed area, an overlapping area, a second slow speed area and a second spacing area arranged in sequence along the first direction between the first bus and the second bus, the first part is located in the first spacing area, the first finger joint part is located in the overlapping area, the second finger joint part is located in the second slow speed area, the third part is located in the second spacing area, the third finger joint part is located in the overlapping area, and the fourth finger joint part is located in the first slow speed area, the first finger joint part and the third finger joint part in the overlapping area overlap along the second direction, the first finger-folding part is located in the first slow speed area, and the second finger-folding part is located in the second slow speed area.

[0007] Optionally, in the first slow speed zone, the first finger fold portion overlaps with the fourth finger joint portion along the second direction; in the second slow speed zone, the second finger fold portion overlaps with the second finger joint portion along the second direction.

[0008] Optionally, the second finger joint portion is also located in the second spacing area, and in the second spacing area, the second finger joint portion partially overlaps with the third portion along the second direction; the fourth finger joint portion is also located in the first spacing area, and in the first spacing area, the fourth finger joint portion partially overlaps with the first portion along the second direction.

[0009] Optionally, a size of the first portion in the second direction is equal to or smaller than a size of the second portion in the second direction, and a size of the third portion in the second direction is equal to or smaller than a size of the fourth portion in the second direction.

[0010] Optionally, the size of the first folded finger portion in the first direction is greater than the size of the second portion in the second direction, and the size of the second folded finger portion in the first direction is greater than the size of the fourth portion in the second direction.

[0011] Optionally, the electrode structure also includes: a plurality of first auxiliary electrodes connected to the first bus, the first auxiliary electrodes are located in the first spacing area, the first auxiliary electrodes are staggered with the first part, and the first auxiliary electrodes correspond to the fourth part; a plurality of second auxiliary electrodes connected to the second bus, the second auxiliary electrodes are located in the second spacing area, the second auxiliary electrodes are staggered with the third part, and the second auxiliary electrodes correspond to the second part.

[0012] Optionally, the electrode structure also includes: a plurality of third auxiliary electrodes connected to the first bus, the third auxiliary electrodes are located in the first spacing area, the third auxiliary electrodes are staggered with the first part, and the third auxiliary electrodes correspond to the second part; a plurality of fourth auxiliary electrodes connected to the second bus, the fourth auxiliary electrodes are located in the second spacing area, the fourth auxiliary electrodes are staggered with the third part, and the fourth auxiliary electrodes correspond to the fourth part.

[0013] Optionally, the first electrode strip further includes: a first extension portion, the first extension portion is connected to the first portion, and the first extension portion extends along the second direction to correspond to the fourth portion; and a third extension portion, the third extension portion is connected to the third portion, and the third extension portion extends along the second direction to correspond to the second portion.

[0014] Optionally, the first extension portion is connected to the first bus, and / or the third extension portion is connected to the second bus.

[0015] Optionally, the first electrode strip also includes: a second extension portion, the second extension portion is connected to the first portion, and the second extension portion extends along the second direction to correspond to the second portion; and a fourth extension portion, the fourth extension portion is connected to the third portion, and the fourth extension portion extends along the second direction to correspond to the fourth portion.

[0016] Optionally, the second extension portion is connected to the first bus, and / or the fourth extension portion is connected to the second bus.

[0017] Optionally, the electrode structure also includes: a fifth auxiliary electrode, which is cross-connected with the first part, the fifth auxiliary electrode is located in the first spacing area, and the fifth auxiliary electrode is close to the first folded finger part; a sixth auxiliary electrode, which is cross-connected with the third part, the sixth auxiliary electrode is located in the second spacing area, and the sixth auxiliary electrode is close to the second folded finger part.

[0018] Optionally, the fifth auxiliary electrode is a continuous structure extending along the second direction, and the sixth auxiliary electrode is a continuous structure extending along the second direction.

[0019] Optionally, the fifth auxiliary electrode includes a plurality of fifth auxiliary electrode portions arranged along the second direction, each of the fifth auxiliary electrode portions corresponding to one of the second portions; the sixth auxiliary electrode includes a plurality of sixth auxiliary electrode portions arranged along the second direction, each of the sixth auxiliary electrode portions corresponding to one of the fourth portions.

[0020] Optionally, the fifth auxiliary electrode includes a plurality of fifth auxiliary electrode portions arranged along the second direction, each fifth auxiliary electrode portion corresponding to one of the fourth portions; the sixth auxiliary electrode includes a plurality of sixth auxiliary electrode portions arranged along the second direction, each sixth auxiliary electrode portion corresponding to one of the second portions.

[0021] Optionally, the second knuckle portion includes a first sub-portion and a second sub-portion, the first sub-portion is located between the first knuckle portion and the second sub-portion, the first sub-portion and the first knuckle portion have an angle at their connection, and the first sub-portion and the second sub-portion have an angle at their connection; the fourth knuckle portion includes a third sub-portion and a fourth sub-portion, the third sub-portion is located between the third knuckle portion and the fourth sub-portion, the third sub-portion and the third knuckle portion have an angle at their connection, and the third sub-portion and the fourth sub-portion have an angle at their connection.

[0022] Optionally, the first sub-portion has a size larger than the first finger joint portion along the second direction, and the third sub-portion has a size larger than the third finger joint portion along the second direction.

[0023] Correspondingly, the present invention also provides a method for forming a surface acoustic wave resonance device, comprising: providing a piezoelectric layer; forming an electrode structure on the piezoelectric layer; wherein forming the electrode structure comprises: forming a first bus and a second bus arranged in parallel along a first direction, wherein the first bus and the second bus have a first spacing area, a first slow area, an overlapping area, a second slow area and a second spacing area arranged in sequence along the first direction; forming a plurality of first electrode strips arranged in parallel along the second direction, wherein the first bus connects the plurality of first electrode strips, and the first direction is perpendicular to the second direction; forming a plurality of second electrode strips arranged in parallel along the second direction, wherein the second bus connects the plurality of second electrode strips, and the first electrode strips and the second electrode strips are alternately arranged; wherein forming the first electrode strips comprises: forming a first portion, a first folded finger portion and a second portion, wherein the first portion is connected to the first bus, one end of the first folded finger portion is connected to the first portion, and the other end of the first folded finger portion is connected to the second portion, and the second portion includes a second finger joint portion and a first finger joint portion, and the first finger joint portion The part is located between the first folding finger part and the second finger joint part; forming the second electrode strip includes: forming the third part, the second folding finger part and the fourth part, the third part is connected to the second bus, one end of the second folding finger part is connected to the third part, and the other end of the second folding finger part is connected to the fourth part, the fourth part includes the fourth finger joint part and the third finger joint part, and the third finger joint part is located between the second folding finger part and the fourth finger joint part; the connection between the first folding finger part and the first part has an angle, the connection between the first folding finger part and the second part has an angle, the connection between the second folding finger part and the third part has an angle, and the connection between the second folding finger part and the fourth part has an angle; wherein, the first part is located in the first spacing area, the first finger joint part is located in the overlap area, the second finger joint part is located in the second slow speed area, the third part is located in the second spacing area, the third finger joint part is located in the overlap area, the fourth finger joint part is located in the first slow speed area, the first finger joint part and the third finger joint part in the overlap area overlap along the second direction, the first folding finger part is located in the first slow speed area, and the second folding finger part is located in the second slow speed area.

[0024] Optionally, in the first slow speed zone, the first finger fold portion overlaps with the fourth finger joint portion along the second direction; in the second slow speed zone, the second finger fold portion overlaps with the second finger joint portion along the second direction.

[0025] Optionally, the second finger joint portion is also located in the second spacing area, and in the second spacing area, the second finger joint portion partially overlaps with the third portion along the second direction; the fourth finger joint portion is also located in the first spacing area, and in the first spacing area, the fourth finger joint portion partially overlaps with the first portion along the second direction.

[0026] Optionally, forming the electrode structure also includes: forming a plurality of first auxiliary electrodes connected to the first bus, the first auxiliary electrodes are located in the first spacing area, the first auxiliary electrodes are staggered with the first part, and the first auxiliary electrodes correspond to the fourth part; forming a plurality of second auxiliary electrodes connected to the second bus, the second auxiliary electrodes are located in the second spacing area, the second auxiliary electrodes are staggered with the third part, and the second auxiliary electrodes correspond to the second part.

[0027] Optionally, forming the electrode structure also includes: forming a plurality of third auxiliary electrodes connected to the first bus, the third auxiliary electrodes are located in the first spacing area, the third auxiliary electrodes are staggered with the first part, and the third auxiliary electrodes correspond to the second part; forming a plurality of fourth auxiliary electrodes connected to the second bus, the fourth auxiliary electrodes are located in the second spacing area, the fourth auxiliary electrodes are staggered with the third part, and the fourth auxiliary electrodes correspond to the fourth part.

[0028] Optionally, forming the first electrode strip also includes: forming a first extension portion, the first extension portion is connected to the first portion, and the first extension portion extends along the second direction to correspond to the fourth portion; forming a third extension portion, the third extension portion is connected to the third portion, and the third extension portion extends along the second direction to correspond to the second portion.

[0029] Optionally, forming the first electrode strip also includes: forming a second extension portion, the second extension portion is connected to the first portion, and the second extension portion extends along the second direction to correspond to the second portion; forming a fourth extension portion, the fourth extension portion is connected to the third portion, and the fourth extension portion extends along the second direction to correspond to the fourth portion.

[0030] Optionally, forming the electrode structure also includes: forming a fifth auxiliary electrode, wherein the fifth auxiliary electrode is connected to the first part, the fifth auxiliary electrode is located in the first spacing area, and the fifth auxiliary electrode is close to the first folded finger part; forming a sixth auxiliary electrode, wherein the sixth auxiliary electrode is connected to the third part, the sixth auxiliary electrode is located in the second spacing area, and the sixth auxiliary electrode is close to the second folded finger part.

[0031] Optionally, the second phalanx portion includes a first sub-portion and a second sub-portion, the first sub-portion is located between the first phalanx portion and the second sub-portion, the first sub-portion and the first phalanx portion have an angle at their connection, and the first sub-portion and the second sub-portion have an angle at their connection; the fourth phalanx portion includes a third sub-portion and a fourth sub-portion, the third sub-portion is located between the third phalanx portion and the fourth sub-portion, the third sub-portion and the third phalanx portion have an angle at their connection, and the third sub-portion and the fourth sub-portion have an angle at their connection.

[0032] Correspondingly, the present invention also provides a filter, comprising: any one of the above-mentioned surface acoustic wave resonance devices.

[0033] Compared with the prior art, the technical solution of the present invention has the following advantages:

[0034] In the surface acoustic wave resonance device of the technical solution of the present invention, the electrode structure on the piezoelectric layer includes a first bus and a second bus arranged in parallel along a first direction, the first bus connects a number of first electrode strips arranged in parallel along the second direction, the second bus connects a number of second electrode strips arranged in parallel along the second direction, the first electrode strips and the second electrode strips are alternately arranged, the first electrode strip includes a first part, a first folded finger part and a second part, the second electrode strip includes a third part, a second folded finger part and a fourth part, by setting a first slow zone between the overlap area and the first spacing area, and setting a second slow zone between the overlap area and the second spacing area, by using the first folded finger part and part of the fourth part located in the first slow zone, the mass of the first slow zone is increased, and the propagation speed of the sound wave in the first slow zone is reduced, and by using the second folded finger part and part of the second part located in the second slow zone, the mass of the second slow zone is increased, and the propagation speed of the sound wave in the second slow zone is reduced, thereby forming a piston mode, which effectively suppresses the high-order lateral parasitic modes generated in the overlap area.

[0035] Furthermore, the size of the first folded finger portion in the first direction is larger than the size of the second portion in the second direction, and the size of the second folded finger portion in the first direction is larger than the size of the fourth portion in the second direction, thereby increasing the mass of the first folded finger portion and the second folded finger portion, further reducing the wave speed in the first slow zone and the second slow zone, and further suppressing the high-order lateral parasitic modes generated in the overlapping area.

[0036] In the method for forming a surface acoustic wave resonance device of the technical solution of the present invention, the electrode structure on the piezoelectric layer includes a first bus and a second bus arranged in parallel along a first direction, the first bus connects a number of first electrode strips arranged in parallel along a second direction, the second bus connects a number of second electrode strips arranged in parallel along the second direction, the first electrode strips and the second electrode strips are alternately arranged, the first electrode strip includes a first part, a first folded finger part and a second part, the second electrode strip includes a third part, a second folded finger part and a fourth part, by setting a first slow zone between the overlap area and the first spacing area, and setting a second slow zone between the overlap area and the second spacing area, the first folded finger part and part of the fourth part located in the first slow zone are used to increase the mass of the first slow zone and reduce the propagation speed of sound waves in the first slow zone, and the second folded finger part and part of the second part located in the second slow zone are used to increase the mass of the second slow zone and reduce the propagation speed of sound waves in the second slow zone, thereby forming a piston mode, which effectively suppresses high-order lateral parasitic modes generated in the overlap area.

[0037] Furthermore, the size of the first folded finger portion in the first direction is larger than the size of the second portion in the second direction, and the size of the second folded finger portion in the first direction is larger than the size of the fourth portion in the second direction, thereby increasing the mass of the first folded finger portion and the second folded finger portion, further reducing the wave speed in the first slow zone and the second slow zone, and further suppressing the high-order lateral parasitic modes generated in the overlapping area. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 and Figure 2 It is a schematic diagram of the structure of a surface acoustic wave resonance device;

[0039] Figure 3 to Figure 4 is a structural schematic diagram of each step of a method for forming a surface acoustic wave resonator device in one embodiment of the present invention;

[0040] Figure 5 is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention;

[0041] Figure 6 is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention;

[0042] Figure 7 is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention;

[0043] Figure 8 is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention;

[0044] Fig. 9 is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention;

[0045] Fig.10 is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention;

[0046] Fig.11 is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention;

[0047] Fig.12 is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention;

[0048] Fig.13 It is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention. DETAILED DESCRIPTION

[0049] As the background technology, there are still many problems with the surface acoustic wave resonance device, which will be described in detail below with reference to the accompanying drawings.

[0050] Figure 1 and Figure 2It is a structural schematic diagram of a surface acoustic wave resonance device.

[0051] Please refer to Figure 1 and Figure 2 , Figure 2 yes Figure 1 Schematic diagram of the sound velocity of the cross section along the AA line in FIG. 1 , a piezoelectric layer 100; an electrode structure located on the piezoelectric layer 100, the electrode structure 100 includes a first bus 101 and a second bus 102 arranged in parallel along a first direction X, the first bus 101 connects a plurality of first electrode strips 103 arranged in parallel along a second direction Y, the second bus 102 connects a plurality of second electrode strips 104 arranged in parallel along the second direction Y, the first direction X is perpendicular to the second direction Y, the first electrode strips 103 and the second electrode strips 104 are arranged alternately, the first electrode strips 103 include a first portion 1031 and a second portion 1032 connected along the first direction X The second electrode strip 104 includes a third portion 1041 and a fourth portion 1042 connected along the first direction X, the second portion 1032 and the third portion 1041 overlap in the second direction Y, and a first spacing area A1, an overlapping area B1, and a second spacing area A2 arranged along the first direction X are provided between the first bus 101 and the second bus 102, the overlapping area B1 is located between the first spacing area A1 and the second spacing area A2, the second portion 1032 and the third portion 1041 are located in the overlapping area B1, the first portion 1031 is located in the first spacing area A1, and the fourth portion 1042 is located in the second spacing area A2.

[0052] It should be noted that, in this embodiment, it also includes: a temperature compensation layer (not shown) located on the piezoelectric layer 100, the temperature compensation layer covers the electrode structure, and the temperature compensation layer and the piezoelectric layer 100 have opposite temperature frequency shift characteristics, which can reduce the temperature coefficient of frequency (Temperature Coefficient of Frequency, TCF) and tend to 0ppm / ℃, thereby improving the characteristic of the operating frequency of the surface acoustic wave resonator device drifting with the operating temperature, and having higher frequency-temperature stability. The surface acoustic wave resonator device including the temperature compensation layer is called a temperature compensated surface acoustic wave resonator device (i.e., TC-SAW resonator).

[0053] In this embodiment, since the arrangement density of the first electrode strips 103 and the second electrode strips 104 on the overlapping area B1 is relatively large, the wave velocity on the overlapping area B1 is smaller than the wave velocity on the first spacing area A1 and the second spacing area A2. Therefore, the wave velocity difference between the overlapping area B1 and the first spacing area A1 and the second spacing area A2 is used to confine the main frequency energy of the resonance device in the overlapping area B1 to form a standing wave.

[0054] Please continue to refer to Figure 2The sound velocity of the overlapping area B1 is smaller than the sound velocity of the first spacing area A1, and the sound velocity of the overlapping area B1 is also smaller than the sound velocity of the second spacing area A2. The sound velocity of the first spacing area A1 is equal to or similar to the sound velocity of the second spacing area A2. There is high-order sound wave energy in the overlapping area B1, and lateral parasitic resonance (spurious resonance) occurs, which in turn affects the performance of the resonant device.

[0055] On this basis, the present invention provides a surface acoustic wave resonance device and a method for forming the same, a filter, and a duplexer. The electrode structure on the piezoelectric layer includes a first bus and a second bus arranged in parallel along a first direction. The first bus connects a number of first electrode strips arranged in parallel along a second direction, and the second bus connects a number of second electrode strips arranged in parallel along the second direction. The first electrode strips and the second electrode strips are alternately arranged. The first electrode strip includes a first portion, a first folded finger portion, and a second portion. The second electrode strip includes a third portion, a second folded finger portion, and a fourth portion. By setting a first slow zone between the overlap zone and the first spacing zone, and setting a second slow zone between the overlap zone and the second spacing zone, the first folded finger portion and a portion of the fourth portion located in the first slow zone are used to increase the mass of the first slow zone and reduce the propagation speed of sound waves in the first slow zone. By using the second folded finger portion and a portion of the second portion located in the second slow zone, the mass of the second slow zone is increased and the propagation speed of sound waves in the second slow zone is reduced, thereby forming a piston mode, which effectively suppresses high-order lateral parasitic modes generated in the overlap zone.

[0056] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0057] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0058] Please refer to Figure 3 , providing a piezoelectric layer 200.

[0059] The material of the piezoelectric layer 200 includes: lithium tantalate, lithium niobate, lead zirconate titanate, lead magnesium niobate-lead titanate, aluminum nitride, aluminum nitride alloy, gallium nitride or zinc oxide.

[0060] In this embodiment, the material of the piezoelectric layer 200 is lithium niobate.

[0061] Please refer to Figure 4 , an electrode structure is formed on the piezoelectric layer 200.

[0062] In this embodiment, forming the electrode structure includes: forming a first bus 201 and a second bus 202 arranged in parallel along a first direction X, wherein a first spacing area A1, a first slow area C1, an overlap area B, a second slow area C2, and a second spacing area A2 are sequentially arranged along the first direction X between the first bus 201 and the second bus 202; forming a plurality of first electrode strips 203 arranged in parallel along a second direction Y, wherein the first bus 201 connects the plurality of first electrode strips 203, and the first direction X is perpendicular to the second direction Y; forming a plurality of second electrode strips 204 arranged in parallel along the second direction Y, wherein the second bus 202 connects the plurality of second electrode strips 204, and the first electrode strips 203 and the second electrode strips 204 are alternately arranged, wherein the electrode structure is formed. The first electrode strip 203 includes a first portion 2031, a first folded finger portion 2033 and a second portion 2032, wherein the first portion 2031 is connected to the first bus 201, one end of the first folded finger portion 2033 is connected to the first portion 2031, and the other end of the first folded finger portion 2033 is connected to the second portion 2032, the second portion 2032 includes a second finger joint portion 2032b and a first finger joint portion 2032a, the first finger joint portion 2032a is located between the first folded finger portion 2033 and the second finger joint portion 2032b, the second finger joint portion 2032b is connected to the first finger joint portion 2032a, and the first finger joint portion 2032a is connected to the first folded finger portion 2033; the second electrode strip 204 includes a third portion 2041, a second The folding finger portion 2043 and the fourth portion 2042, the third portion 2041 is connected to the second bus 202, one end of the second folding finger portion 2043 is connected to the third portion 2041, the other end of the second folding finger portion 2043 is connected to the fourth portion 2042, the fourth portion 2042 includes a fourth finger joint portion 2042b and a third finger joint portion 2042a, the third finger joint portion 2042 is located between the second folding finger portion 2043 and the fourth finger joint portion 2042b, the fourth finger joint portion 2042b is connected to the third finger joint portion 2042a, and the third finger joint portion 2042a is connected to the second folding finger portion 2043; wherein the first portion 2031 is located in the first spacing area A1, the second finger joint portion 2032b is located in the second slow zone C2, and the first finger joint portion 2 032a is located in the overlapping area B, the third part 2041 is located in the second interval area A2, the fourth finger joint part 2042b is located in the first slow zone C1, the third finger joint part 2042a is located in the overlapping area B, the first finger joint part 2032a and the third finger joint part 2042a overlap along the second direction Y, the first folded finger part 2033 is located in the first slow zone C1, and the second folded finger part 2043 is located in the second slow zone C2; ​​the connection between the first folded finger part 2033 and the first part 2031 has an angle α, the connection between the first folded finger part 2033 and the second part 2032 has an angle α, the connection between the second folded finger part 2043 and the third part 2041 has an angle α, and the connection between the second folded finger part 2043 and the fourth part 2042 has an angle α.

[0063] In this embodiment, the first folded finger portion 2033 and a portion of the fourth portion 2042 located in the first slow zone C1 are utilized to increase the mass of the first slow zone C1 and reduce the propagation speed of the sound waves in the first slow zone C1. The second folded finger portion 2043 and a portion of the second portion 2032 located in the second slow zone C2 are utilized to increase the mass of the second slow zone C2 and reduce the propagation speed of the sound waves in the second slow zone C2, thereby forming a piston mode and effectively suppressing the high-order lateral parasitic modes generated in the overlapping area.

[0064] In this embodiment, in the first slow zone C1, the first folded finger portion 2033 overlaps with the fourth finger joint portion 2042b along the second direction Y; in the second slow zone C2, the second folded finger portion 2043 overlaps with the second finger joint portion 2032b along the second direction Y.

[0065] In other embodiments, in the first slow zone C1, the first folded finger portion 2033 partially overlaps with the fourth finger joint portion 2042b along the second direction Y; in the second slow zone C2, the second folded finger portion 2043 partially overlaps with the second finger joint portion 2032b along the second direction Y.

[0066] In other embodiments, the second finger joint portion 2032b is also located in the second spacing area A2, and in the second spacing area A2, the second finger joint portion 2032b partially overlaps with the third portion 2041 along the second direction Y; the fourth finger joint portion 2042b is also located in the first spacing area A1, and in the first spacing area A1, the fourth finger joint portion 2042b partially overlaps with the first portion 2031 along the second direction Y.

[0067] The angle α ranges from 90° to 179°, please refer to Figure 4 In this embodiment, the angle α is 90°.

[0068] In some embodiments, the angle α may also range from 1° to 89°. When the connection angle a ranges from 1° to 89°, part of the first portion 2031, the first folded finger portion 2033 and part of the second portion 2032 are located in the first slow zone Cl, thereby further increasing the overall mass of the first slow zone Cl, further reducing the propagation speed of the sound wave in the first slow zone Cl; correspondingly, part of the third portion 2041, the second folded finger portion 2043 and part of the fourth portion 2042 are located in the second slow zone C2, thereby further increasing the overall mass of the second slow zone C2, further reducing the propagation speed of the sound wave in the second slow zone C2, thereby further suppressing the high-order transverse parasitic modes generated in the overlap zone B.

[0069] In this embodiment, the first portion 2031 , the first folding finger portion 2033 , the second portion 2032 , the third portion 2041 , the second folding finger portion 2043 and the fourth portion 2042 are all single-layer structures with the same material and the same thickness.

[0070] In other embodiments, the thickness of the first folding finger portion 2033 and the second folding finger portion 2043 are respectively greater than the first portion 2031 , the second portion 2032 , the third portion 2041 and the fourth portion 2042 .

[0071] In this embodiment, the materials of the first portion 2031 , the first folding finger portion 2033 , the second portion 2032 , the third portion 2041 , the second folding finger portion 2043 and the fourth portion 2042 include: molybdenum, ruthenium, tungsten, platinum, copper, chromium, magnesium or scandium.

[0072] In this embodiment, the method for forming the first part 2031, the first folding finger part 2033, the second part 2032, the third part 2041, the second folding finger part 2043, and the fourth part 2042 includes: forming an electrode material layer on the piezoelectric layer 200; and performing graphing on the electrode material layer to form the first part 2031, the first folding finger part 2033, the second part 2032, the third part 2041, the second folding finger part 2043 and the fourth part 2042.

[0073] In this embodiment, the spacing between the first part 2031 and the adjacent fourth part 2042 in the second direction Y is smaller than the spacing between the second part 2032 and the adjacent fourth part 2042 in the second direction Y; the spacing between the third part 2041 and the adjacent second part 2032 in the second direction Y is smaller than the spacing between the fourth part 2042 and the adjacent second part 2032 in the second direction Y.

[0074] In this embodiment, the size of the first part 2031 in the second direction Y is equal to or smaller than the size of the second part 2032 in the second direction Y, and the size of the third part 2041 in the second direction Y is equal to or smaller than the size of the fourth part 2042 in the second direction Y.

[0075] In this embodiment, the size of the first folding finger portion 2033 in the first direction X is larger than the size of the second portion 2032 in the second direction Y, and the size of the second folding finger portion 2043 in the first direction X is larger than the size of the fourth portion 2042 in the second direction Y.

[0076] In some embodiments, the thickness of the second knuckle portion 2032b is greater than that of the first knuckle portion 2032a, and the thickness of the fourth knuckle portion 2042b is greater than that of the third knuckle portion 2042a; or, the dimension of the second knuckle portion 2032b along the second direction Y is greater than that of the first knuckle portion 2032a, and the dimension of the fourth knuckle portion 2042b along the second direction Y is greater than that of the third knuckle portion 2042a; or, the thickness of the second knuckle portion 2032b is greater than that of the first knuckle portion 2032a, and the dimension of the second knuckle portion 2032b along the second direction Y is greater than that of the first knuckle portion 2032a, the thickness of the fourth knuckle portion 2042b is greater than that of the third knuckle portion 2042a, and the dimension of the fourth knuckle portion 2042b along the second direction Y is greater than that of the third knuckle portion 2042a.

[0077] Correspondingly, the present invention further provides a surface acoustic wave resonance device, comprising a piezoelectric layer 200; an electrode structure located on the piezoelectric layer 200, the electrode structure comprising: a first bus 201 and a second bus 202 arranged in parallel along a first direction X, a first spacing area A1, a first slow area C1, an overlap area B, a second slow area C2 and a second spacing area A2 arranged in sequence along the first direction X between the first bus 201 and the second bus 202; a plurality of first electrode strips 203 arranged in parallel along a second direction Y, the first bus 201 connecting the plurality of first electrode strips 203, the first direction X being perpendicular to the second direction Y; a plurality of second electrode strips 204 arranged in parallel along the second direction Y, the second bus 202 connecting the plurality of second electrode strips 204, the first electrode strips 203 arranged in parallel along the second direction Y, The electrode strip 203 and the second electrode strip 204 are arranged alternately, wherein the first electrode strip 203 includes a first portion 2031, a first folded finger portion 2033 and a second portion 2032, the first portion 2031 is connected to the first bus 201, one end of the first folded finger portion 2033 is connected to the first portion 2031, and the other end of the first folded finger portion 2033 is connected to the second portion 2032, the second portion 2032 includes a second finger joint portion 2032b and a first finger joint portion 2032a, the first finger joint portion 2032a is located between the first folded finger portion 2033 and the second finger joint portion 2032b, the second finger joint portion 2032b is connected to the first finger joint portion 2032a, and the first finger joint portion 2032a is connected to the first folded finger portion 2033; the second electrode strip 204 includes The third part 2041, the second finger part 2043 and the fourth part 2042 are included, the third part 2041 is connected to the second bus 202, one end of the second finger part 2043 is connected to the third part 2041, and the other end of the second finger part 2043 is connected to the fourth part 2042, the fourth part 2042 includes a fourth finger joint part 2042b and a third finger joint part 2042a, the third finger joint part 2042a is located between the second finger joint part 2043 and the fourth finger joint part 2042b, the fourth finger joint part 2042b is connected to the third finger joint part 2042a, and the third finger joint part 2042a is connected to the second finger joint part 2043; wherein the first part 2031 is located in the first interval area A1, the second finger joint part 2032b is located in the second slow zone C2, The first finger joint 2032a is located in the overlapping area B, the third part 2041 is located in the second spacing area A2, the fourth finger joint 2042b is located in the first slow area C1, the third finger joint 2042a is located in the overlapping area B, the first finger joint 2032a and the third finger joint 2042a overlap along the second direction Y, the first folded finger part 2033 is located in the first slow area C1, and the second folded finger part 2043 is located in the second slow area C2; the connection between the first folded finger part 2033 and the first part 2031 has an angle α, the connection between the first folded finger part 2033 and the second part 2032 has an angle α, the connection between the second folded finger part 2043 and the third part 2041 has an angle α, and the connection between the second folded finger part 2043 and the fourth part 2042 has an angle α.

[0078] The angle α ranges from 90° to 179°, please refer to Figure 4 In this embodiment, the angle α is 90°.

[0079] In some embodiments, the angle α may also range from 1° to 89°.

[0080] In this embodiment, the first folded finger portion 2033 and a portion of the fourth portion 2042 located in the first slow zone C1 are utilized to increase the mass of the first slow zone C1 and reduce the propagation speed of the sound waves in the first slow zone C1. The second folded finger portion 2043 and a portion of the second portion 2032 located in the second slow zone C2 are utilized to increase the mass of the second slow zone C2 and reduce the propagation speed of the sound waves in the second slow zone C2, thereby forming a piston mode and effectively suppressing the high-order lateral parasitic modes generated in the overlapping area.

[0081] Figure 5 It is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention.

[0082] In this embodiment, in the above embodiment ( Figure 4 ), the method for forming a surface acoustic wave resonator device is further described based on the above embodiment, which is different from the above embodiment in that: forming the electrode structure also includes: forming a plurality of first auxiliary electrodes and a plurality of second auxiliary electrodes. The following will be specifically described in conjunction with the accompanying drawings.

[0083] Please refer to Figure 5 , forming the electrode structure also includes: forming a plurality of first auxiliary electrodes 301 connected to the first bus 201, the first auxiliary electrodes 301 are located in the first spacing area A1, the first auxiliary electrodes 301 are alternately placed with the first part 2031, the first auxiliary electrodes 301 correspond to the fourth part 2042, and the first auxiliary electrodes 301 and the fourth part 2042 have a gap in the first direction X; forming a plurality of second auxiliary electrodes 302 connected to the second bus 202, the second auxiliary electrodes 302 are located in the second spacing area A2, the second auxiliary electrodes 302 are alternately placed with the third part 2041, the second auxiliary electrodes 302 correspond to the second part 2032, and the second auxiliary electrodes 302 and the second part 2032 have a gap in the first direction X.

[0084] In this embodiment, a plurality of first auxiliary electrodes 301 are located in the first spacing area A1 and connected to the first bus 201, and the first portion 2031 and the first auxiliary electrodes 301 are staggered; a plurality of second auxiliary electrodes 302 are located in the second spacing area A2 and connected to the second bus 202, and the second auxiliary electrodes 302 and the third portion 2041 are staggered. The leakage of acoustic energy can be reduced by forming a plurality of first auxiliary electrodes 301 in the first spacing area A1. Similarly, the leakage of acoustic energy can be reduced by forming a plurality of second auxiliary electrodes 302 in the second spacing area A2.

[0085] Correspondingly, the present invention also provides a surface acoustic wave resonance device, please refer to Figure 5 , Figure 5 The viewing direction and Figure 4 The viewing direction is the same, and the electrode structure also includes: a plurality of first auxiliary electrodes 301 connected to the first bus, the first auxiliary electrodes 301 are located in the first spacing area A1, the first auxiliary electrodes 301 are staggered with the first part 2031, the first auxiliary electrodes 301 correspond to the fourth part 2042, and the first auxiliary electrodes 301 and the fourth part 2042 have a gap in the first direction X; a plurality of second auxiliary electrodes 302 connected to the second bus 202, the second auxiliary electrodes 302 are located in the second spacing area A2, the second auxiliary electrodes 302 are staggered with the third part 2041, the second auxiliary electrodes 302 correspond to the second part 2032, and the second auxiliary electrodes 302 and the second part 2032 have a gap in the first direction X.

[0086] In this embodiment, a plurality of first auxiliary electrodes 301 are located in the first spacing area A1 and connected to the first bus 201, and the first portion 2031 and the first auxiliary electrodes 301 are staggered; a plurality of second auxiliary electrodes 302 are located in the second spacing area A2 and connected to the second bus 202, and the second auxiliary electrodes 302 and the third portion 2041 are staggered. The leakage of acoustic energy can be reduced by forming a plurality of first auxiliary electrodes 301 in the first spacing area A1. Similarly, the leakage of acoustic energy can be reduced by forming a plurality of second auxiliary electrodes 302 in the second spacing area A2.

[0087] Figure 6 It is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention.

[0088] Please refer to Figure 6, forming the electrode structure also includes: forming a plurality of third auxiliary electrodes 401 connected to the first bus 201, the third auxiliary electrodes 401 are located in the first spacing area A1, the third auxiliary electrodes 401 are staggered with the first part 2031, the third auxiliary electrodes 401 correspond to the second part 2032, and the third auxiliary electrodes 401 and the first folded finger part 2033 have a gap in the first direction X; forming a plurality of fourth auxiliary electrodes 402 connected to the second bus 202, the fourth auxiliary electrodes 402 are located in the second spacing area A2, the fourth auxiliary electrodes 402 are staggered with the third part 2041, the fourth auxiliary electrodes 402 correspond to the fourth part 2042, and the fourth auxiliary electrodes 402 and the second folded finger part 2043 have a gap in the first direction X.

[0089] In this embodiment, the leakage of acoustic energy can be reduced by forming a plurality of third auxiliary electrodes 401 in the first spacing area A1 . Similarly, the leakage of acoustic energy can be reduced by forming a plurality of fourth auxiliary electrodes 402 in the second spacing area A2 .

[0090] Accordingly, the present invention provides a surface acoustic wave resonance device, which is similar to the above embodiment ( Figure 5 ) is different in the position of the auxiliary electrode. For details, please refer to Figure 6 The electrode structure also includes: a plurality of third auxiliary electrodes 401 connected to the first bus 201, the third auxiliary electrodes 401 are located in the first spacing area A1, the third auxiliary electrodes 401 are alternately placed with the first part 2031, and the third auxiliary electrodes 401 correspond to the second part 2032; a plurality of fourth auxiliary electrodes 402 connected to the second bus 202, the fourth auxiliary electrodes 402 are located in the second spacing area A2, the fourth auxiliary electrodes 402 are alternately placed with the third part 2041, and the fourth auxiliary electrodes 402 correspond to the fourth part 2042.

[0091] Of course, in some other embodiments, both sides of the first portion 2031 and both sides of the third portion 2041 may have auxiliary electrodes at the same time, and the auxiliary electrodes correspond to the second portion and the fourth portion respectively.

[0092] Figure 7 It is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention.

[0093] In this embodiment, in the above embodiment ( Figure 4 ) is further described on the basis of the method for forming a surface acoustic wave resonance device, which is different from the above embodiment in that the structures of the first electrode strip 203 and the second electrode strip 204 are different.

[0094] Please refer to Figure 7The first electrode strip 203 also includes a first extension portion 2031b, the first portion 2031 connects the first bus 201 and the first folding finger portion 2033, the first extension portion 2031b is connected to the first portion 2031, the first extension portion 2031b extends along the second direction to correspond to the fourth portion 2042, and there is a gap between the first extension portion 2031b and the fourth portion 2042; the second electrode strip 204 also includes a third extension portion 2041b, the third portion 2041 connects the second bus 202 and the second folding finger portion 2043, the third extension portion 2041b is connected to the third portion 2041, the third extension portion 2041b extends along the second direction to correspond to the second portion 2032, and there is a gap between the third extension portion 2041b and the second portion 2032.

[0095] In this embodiment, the first extension portion 2031b is located in the first spacing area A1, and the third extension portion 2041b is located in the second spacing area A2, which can reduce the leakage of acoustic energy.

[0096] In this embodiment, the first folding finger portion 2033 extends from the first portion 2031 toward the second portion 2032, and the extension direction of the first extension portion 2031b is opposite to the extension direction of the first folding finger portion 2033; the second folding finger portion 2043 extends from the third portion 2041 toward the fourth portion 2042, and the extension direction of the third extension portion 2041b is opposite to the extension direction of the second folding finger portion 2043.

[0097] In this embodiment, the first extension portion 2031 b is connected to the first bus 201 , and the third extension portion 2041 b is connected to the second bus 202 .

[0098] In other embodiments, there is a gap between the first extending portion 2031 b and the first bus 201 , and there is a gap between the third extending portion 2041 b and the second bus 202 .

[0099] Figure 7 The first portion and the extension portion are separated by a dotted line.

[0100] Figure 8 It is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention.

[0101] This embodiment is different from the above embodiment ( Figure 7 ) is that the position of the extension is different.

[0102] Please refer to Figure 8The first electrode strip 203 also includes a second extension portion 2031c, the first portion 2031 connects the first bus 201 and the first folding finger portion 2033, the second extension portion 2031c is connected to the first portion 2031, the second extension portion 2031c extends along the second direction to correspond to the second portion 2032, and there is a gap between the second extension portion 2031c and the first folding finger portion 2033; the second electrode strip 204 also includes a fourth extension portion 2041c, the third portion 2041 connects the second bus 202 and the second folding finger portion 2043, the fourth extension portion 2041c is connected to the third portion 2041, the fourth extension portion 2041c extends along the second direction to correspond to the fourth portion 2042, and there is a gap between the fourth extension portion 2041c and the second folding finger portion 2043.

[0103] In this embodiment, the second extension portion 2031c is located in the first spacing area A1, and the fourth extension portion 2041c is located in the second spacing area A2, which can reduce the leakage of acoustic energy.

[0104] In this embodiment, the first folding finger portion 2033 extends from the first portion 2031 toward the second portion 2032, and the extension direction of the second extension portion 2031c is the same as the extension direction of the first folding finger portion 2033; the second folding finger portion 2043 extends from the third portion 2041 toward the fourth portion 2042, and the extension direction of the fourth extension portion 2041c is the same as the extension direction of the second folding finger portion 2043.

[0105] In this embodiment, the second extending portion 2031 c is connected to the first bus 201 , and the fourth extending portion 2041 c is connected to the second bus 202 .

[0106] In other embodiments, a gap is formed between the second extending portion 2031 c and the first bus bar 201 , and a gap is formed between the fourth extending portion 2041 c and the second bus bar 202 .

[0107] Fig. 9 It is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention.

[0108] This embodiment is different from the above embodiment ( Figure 7 ) is that the positions of the extension parts are different, and the first part and the third part have extension parts on both sides at the same time, that is: the first electrode strip 203 includes the first part 2031, the first extension part 2031b and the second extension part 2031c, the first extension part 2031b and the second extension part 2031c are respectively located on both sides of the first part 2031, the first extension part 2031b extends along the second direction to correspond to the fourth part 2042, the second extension part 2031c extends along the second direction to correspond to the second part 2032, there is a gap between the second extension part 2031c and the first folding finger part 2033, and there is a gap between the first extension part 2031b and the fourth part 2042.

[0109] The second electrode strip 204 includes a third portion 2041, a third extension portion 2041b and a fourth extension portion 2041c. The third extension portion 2041b and the fourth extension portion 2041c are respectively located on both sides of the third portion 2041. The third extension portion 2041b extends along the second direction to correspond to the second portion 2032. The fourth extension portion 2041c extends along the second direction to correspond to the fourth portion 2042. There is a gap between the third extension portion 2041b and the second portion 2032. There is a gap between the fourth extension portion 2041c and the second folding finger portion 2043.

[0110] In this embodiment, the first extension portion 2031b and the second extension portion 2031c are located in the first spacing area A1, and the third extension portion 2041b and the fourth extension portion 2041c are located in the second spacing area A2, which can reduce the leakage of acoustic energy.

[0111] In this embodiment, the first extension portion 2031 b and the second extension portion 2031 c are both connected to the first bus 201 , and the third extension portion 2041 b and the fourth extension portion 2041 c are both connected to the second bus 202 .

[0112] In other embodiments, both the first extension portion 2031b and the second extension portion 2031c have a gap with the first bus 201, or one of the first extension portion 2031b and the second extension portion 2031c has a gap with the first bus 201; both the third extension portion 2041b and the fourth extension portion 2041c have a gap with the second bus 202, or one of the third extension portion 2041b and the fourth extension portion 2041c has a gap with the second bus 202.

[0113] Fig.10 It is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention.

[0114] In this embodiment, in the above embodiment ( Figure 4 ), the method for forming a surface acoustic wave resonator device is further described based on the embodiment, which is different from the above embodiment in that the electrode structure includes a fifth auxiliary electrode and a sixth auxiliary electrode.

[0115] Please refer to Fig.10 The electrode structure also includes: a fifth auxiliary electrode 303, the fifth auxiliary electrode 303 is cross-connected with the first part 2031, the fifth auxiliary electrode 303 is located in the first spacing area A1, and the fifth auxiliary electrode 303 is close to the first folded finger part 2033; a sixth auxiliary electrode 304, the sixth auxiliary electrode 304 is cross-connected with the third part 2041, the sixth auxiliary electrode 304 is located in the second spacing area A2, and the sixth auxiliary electrode 304 is close to the second folded finger part 2043.

[0116] In this embodiment, the fifth auxiliary electrode 303 is spaced from the first finger portion 2033 in the first direction X less than the first bus 201 ; similarly, the sixth auxiliary electrode 304 is spaced from the second finger portion 2043 in the first direction X less than the second bus 202 .

[0117] In this embodiment, the fifth auxiliary electrode 303 includes a plurality of fifth auxiliary electrode portions 303a arranged along the second direction Y, each fifth auxiliary electrode portion 303a corresponds to a first folded finger portion 2033 and a fourth portion 2042 adjacent to the first folded finger portion 2033; the sixth auxiliary electrode 304 includes a plurality of sixth auxiliary electrode portions 304a arranged along the second direction Y, each sixth auxiliary electrode portion 304a corresponds to a second folded finger portion 2043 and a second portion 2032 adjacent to the second folded finger portion 2043.

[0118] In this embodiment, the fifth auxiliary electrode 303 is located in the first spacing area A1, and the sixth auxiliary electrode 304 is located in the second spacing area A2, which can reduce the leakage of acoustic energy.

[0119] In other embodiments, the fifth auxiliary electrode portion 303a is connected to one side of the first portion 2031 , and each fifth auxiliary electrode portion 303a corresponds to a fourth portion 2042 ; the sixth auxiliary electrode portion 304a is connected to one side of the third portion 2041 , and each sixth auxiliary electrode portion 304a corresponds to a second portion 2032 .

[0120] In another embodiment, the fifth auxiliary electrode portion 303a is connected to one side of the first portion 2031 , and each fifth auxiliary electrode portion 303a corresponds to a second portion 2032 ; the sixth auxiliary electrode portion 304a is connected to one side of the third portion 2041 , and each sixth auxiliary electrode portion 304a corresponds to a fourth portion 2042 .

[0121] Fig.11 It is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention.

[0122] This embodiment is different from the above embodiment ( Fig.10 ) is that the fifth auxiliary electrode 303 and the sixth auxiliary electrode 304 are continuous structures extending along the second direction Y.

[0123] In the present embodiment, by forming the fifth auxiliary electrode 303 located in the first spacing area A1 and the sixth auxiliary electrode 304 located in the second spacing area A2 , the leakage of acoustic energy can be reduced.

[0124] Fig.12 It is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention.

[0125] In this embodiment, in the above embodiment ( Figure 4) is further described on the basis of the method for forming the surface acoustic wave resonator device, which is different from the above-mentioned embodiment in that the structures of the second finger joint part and the fourth finger joint part are different.

[0126] Please refer to Fig.12 The second finger joint portion 2032b includes a first sub-portion 2032b-1 and a second sub-portion 2032b-2, the first sub-portion 2032b-1 is located between the first finger joint portion 2032a and the second sub-portion 2032b-2, the first sub-portion 2032b-1 and the first finger joint portion 2032a have an angle at the connection, and the first sub-portion 2032b-1 and the second sub-portion 2032b-2 have an angle at the connection; the fourth finger joint portion 2042b includes a third sub-portion 2042b-1 and a fourth sub-portion 2042b-2, the third sub-portion 2042b-1 is located between the third finger joint portion 2042a and the fourth sub-portion 2042b-2, the third sub-portion 2042b-1 and the third finger joint portion 2042a have an angle at the connection, and the third sub-portion 2042b-1 and the fourth sub-portion 2042b-2 have an angle.

[0127] It should be noted that this embodiment can be combined with Figures 5 to 11 Any of the embodiments shown.

[0128] In this embodiment, the size of the first sub-portion 2032b-1 along the first direction X is larger than the size of the first finger portion 2032a along the second direction Y, and the size of the third sub-portion 2042b-1 along the first direction X is larger than the size of the third finger portion 2042a along the second direction Y.

[0129] In other embodiments, the size of the first sub-portion 2032b-1 along the second direction Y is larger than the size of the first joint portion 2032a along the second direction Y, and the size of the third sub-portion 2042b-1 along the second direction Y is larger than the size of the third joint portion 2042a along the second direction Y.

[0130] In other embodiments, the thickness of the first sub-portion 2032b-1 is greater than the thickness of the first joint portion 2032a, and / or the thickness of the second sub-portion 2032b-2 is greater than the thickness of the first joint portion 2032a.

[0131] Fig.13 It is a schematic structural diagram of a surface acoustic wave resonance device in another embodiment of the present invention.

[0132] In this embodiment, in the above embodiment ( Fig.12 ) based on which the method for forming the surface acoustic wave resonance device is further described.

[0133] This embodiment and Fig.12 The difference between the corresponding embodiments is that the present embodiment contains an auxiliary electrode.

[0134] Please refer to Fig.13 In this embodiment, it also includes a plurality of first auxiliary electrodes 301 connected to the first bus, the first auxiliary electrodes 301 correspond to the fourth portion 2042, and there is a gap between the first auxiliary electrodes 301 and the fourth portion 2042 in the first direction X; and a plurality of second auxiliary electrodes 302 connected to the second bus 202, the second auxiliary electrodes 302 correspond to the second portion 2032, and there is a gap between the second auxiliary electrodes 302 and the second portion 2032 in the first direction X.

[0135] In this embodiment, the first auxiliary electrode 301 corresponds to the fourth portion 2042 , and the second auxiliary electrode 302 corresponds to the second portion 2032 .

[0136] In some embodiments, the auxiliary electrode may also refer to Figure 6 , Fig.10 and Fig.11 The relevant description of the embodiment is set.

[0137] The present invention further provides a filter, comprising: a surface acoustic wave resonance device according to any one of the above embodiments.

[0138] It should be understood that the examples and embodiments herein are merely illustrative and that various modifications and corrections may be made by those skilled in the art without departing from the spirit and scope of the present invention as defined in this application and the appended claims.

Claims

1. A surface acoustic wave resonance device, characterized in that: include: Piezoelectric layer; an electrode structure located on the piezoelectric layer, the electrode structure comprising a first bus and a second bus arranged in parallel along a first direction, the first bus connecting a plurality of first electrode strips arranged in parallel along a second direction, the second bus connecting a plurality of second electrode strips arranged in parallel along the second direction, the first direction being perpendicular to the second direction, the first electrode strips and the second electrode strips being staggered; The first electrode strip includes a first portion, a first finger portion, and a second portion, the first portion is connected to the first bus, one end of the first finger portion is connected to the first portion, and the other end of the first finger portion is connected to the second portion, the second portion includes a first finger joint portion and a second finger joint portion, and the first finger joint portion is located between the first finger joint portion and the second finger joint portion; The second electrode strip includes a third portion, a second finger portion and a fourth portion, the third portion is connected to the second bus, one end of the second finger portion is connected to the third portion, the other end of the second finger portion is connected to the fourth portion, the fourth portion includes a third finger joint portion and a fourth finger joint portion, the third finger joint portion is located between the second finger joint portion and the fourth finger joint portion; The connection between the first folding finger portion and the first portion has an angle, the connection between the first folding finger portion and the second portion has an angle, the connection between the second folding finger portion and the third portion has an angle, and the connection between the second folding finger portion and the fourth portion has an angle; A first spacing area, a first slow area, an overlapping area, a second slow area and a second spacing area are arranged in sequence along the first direction between the first bus and the second bus, the first part is located in the first spacing area, the first finger joint part is located in the overlapping area, the second finger joint part is located in the second slow area, the third part is located in the second spacing area, the third finger joint part is located in the overlapping area, the fourth finger joint part is located in the first slow area, the first finger joint part and the third finger joint part in the overlapping area overlap along the second direction, the first folded finger part is located in the first slow area, and the second folded finger part is located in the second slow area.

2. The surface acoustic wave resonator device according to claim 1, characterized in that: In the first slow speed zone, the first finger folded portion overlaps with the fourth finger joint portion along the second direction; in the second slow speed zone, the second finger folded portion overlaps with the second finger joint portion along the second direction.

3. The surface acoustic wave resonator device according to claim 1, characterized in that: The second finger joint is also located in the second spacing area, and in the second spacing area, the second finger joint partially overlaps with the third part along the second direction; the fourth finger joint is also located in the first spacing area, and in the first spacing area, the fourth finger joint partially overlaps with the first part along the second direction.

4. The surface acoustic wave resonator device according to claim 1, characterized in that: The size of the first portion in the second direction is equal to or smaller than the size of the second portion in the second direction, and the size of the third portion in the second direction is equal to or smaller than the size of the fourth portion in the second direction.

5. The surface acoustic wave resonator device according to claim 1, characterized in that: The size of the first folding finger portion in the first direction is greater than the size of the second portion in the second direction, and the size of the second folding finger portion in the first direction is greater than the size of the fourth portion in the second direction.

6. The surface acoustic wave resonator device according to claim 1, characterized in that: The electrode structure also includes: a plurality of first auxiliary electrodes connected to the first bus, the first auxiliary electrodes are located in the first spacing area, the first auxiliary electrodes are staggered with the first part, and the first auxiliary electrodes correspond to the fourth part; a plurality of second auxiliary electrodes connected to the second bus, the second auxiliary electrodes are located in the second spacing area, the second auxiliary electrodes are staggered with the third part, and the second auxiliary electrodes correspond to the second part.

7. The surface acoustic wave resonator device according to claim 1, characterized in that: The electrode structure also includes: a plurality of third auxiliary electrodes connected to the first bus, the third auxiliary electrodes are located in the first spacing area, the third auxiliary electrodes are staggered with the first part, and the third auxiliary electrodes correspond to the second part; a plurality of fourth auxiliary electrodes connected to the second bus, the fourth auxiliary electrodes are located in the second spacing area, the fourth auxiliary electrodes are staggered with the third part, and the fourth auxiliary electrodes correspond to the fourth part.

8. The surface acoustic wave resonator device according to claim 1, characterized in that: The first electrode strip also includes: a first extension portion, the first extension portion is connected to the first portion, and the first extension portion extends along the second direction to correspond to the fourth portion; and a third extension portion, the third extension portion is connected to the third portion, and the third extension portion extends along the second direction to correspond to the second portion.

9. The surface acoustic wave resonator device according to claim 8, characterized in that: The first extension portion is connected to the first bus, and / or the third extension portion is connected to the second bus.

10. The surface acoustic wave resonator device according to claim 1, characterized in that: The first electrode strip also includes: a second extension portion, which is connected to the first portion and extends along the second direction to correspond to the second portion; and a fourth extension portion, which is connected to the third portion and extends along the second direction to correspond to the fourth portion.

11. The surface acoustic wave resonator device according to claim 10, characterized in that: The second extending portion is connected to the first bus, and / or the fourth extending portion is connected to the second bus.

12. The surface acoustic wave resonator device according to claim 1, characterized in that: The electrode structure also includes: a fifth auxiliary electrode, which is connected to the first part, located in the first spacing area, and close to the first folded finger part; a sixth auxiliary electrode, which is connected to the third part, located in the second spacing area, and close to the second folded finger part.

13. The surface acoustic wave resonator device according to claim 12, characterized in that: The fifth auxiliary electrode is a continuous structure extending along the second direction, and the sixth auxiliary electrode is a continuous structure extending along the second direction.

14. The surface acoustic wave resonator device according to claim 12, characterized in that: The fifth auxiliary electrode includes a plurality of fifth auxiliary electrode portions arranged along the second direction, each of the fifth auxiliary electrode portions corresponding to one of the fourth portions; the sixth auxiliary electrode includes a plurality of sixth auxiliary electrode portions arranged along the second direction, each of the sixth auxiliary electrode portions corresponding to one of the second portions.

15. The surface acoustic wave resonator device according to claim 12, characterized in that: The fifth auxiliary electrode includes a plurality of fifth auxiliary electrode portions arranged along the second direction, each of the fifth auxiliary electrode portions corresponding to one of the second portions; the sixth auxiliary electrode includes a plurality of sixth auxiliary electrode portions arranged along the second direction, each of the sixth auxiliary electrode portions corresponding to one of the fourth portions.

16. The surface acoustic wave resonator device according to claim 1, characterized in that: The second phalanx portion includes a first sub-portion and a second sub-portion, the first sub-portion is located between the first phalanx portion and the second sub-portion, the connection between the first sub-portion and the first phalanx portion has an angle, and the connection between the first sub-portion and the second sub-portion has an angle; the fourth phalanx portion includes a third sub-portion and a fourth sub-portion, the third sub-portion is located between the third phalanx portion and the fourth sub-portion, the connection between the third sub-portion and the third phalanx portion has an angle, and the connection between the third sub-portion and the fourth sub-portion has an angle.

17. The surface acoustic wave resonator device according to claim 16, characterized in that: The size of the first sub-portion along the first direction is larger than the size of the first finger joint portion along the second direction, and the size of the third sub-portion along the first direction is larger than the size of the third finger joint portion along the second direction.

18. A method for forming a surface acoustic wave resonator device, characterized in that: include: providing a piezoelectric layer; An electrode structure is formed on the piezoelectric layer; wherein, Forming the electrode structure includes: A first bus and a second bus are formed which are arranged in parallel along a first direction, wherein a first spacing area, a first slow area, an overlap area, a second slow area and a second spacing area are sequentially arranged along the first direction between the first bus and the second bus; forming a plurality of first electrode strips arranged in parallel along a second direction, wherein the first bus connects the plurality of first electrode strips, and the first direction is perpendicular to the second direction; A plurality of second electrode strips are formed and arranged in parallel along the second direction, the second bus connects the plurality of second electrode strips, and the first electrode strips and the second electrode strips are placed alternately; wherein forming the first electrode strips comprises: A first portion, a first finger portion and a second portion are formed, wherein the first portion is connected to the first bus, one end of the first finger portion is connected to the first portion, and the other end of the first finger portion is connected to the second portion, and the second portion includes a first finger joint portion and a second finger joint portion, and the first finger joint portion is located between the first finger joint portion and the second finger joint portion; Forming the second electrode strips comprises: A third part, a second finger part and a fourth part are formed, wherein the third part is connected to the second bus, one end of the second finger part is connected to the third part, and the other end of the second finger part is connected to the fourth part, wherein the fourth part includes a third finger joint part and a fourth finger joint part, and the third finger joint part is located between the second finger joint part and the fourth finger joint part; The connection between the first folding finger portion and the first portion has an angle, the connection between the first folding finger portion and the second portion has an angle, the connection between the second folding finger portion and the third portion has an angle, and the connection between the second folding finger portion and the fourth portion has an angle; wherein, the first portion is located in the first spacing area, the first finger joint portion is located in the overlapping area, the second finger joint portion is located in the second slow speed area, the third portion is located in the second spacing area, the third finger joint portion is located in the overlapping area, and the fourth finger joint portion is located in the first slow speed area, the first finger joint portion and the third finger joint portion in the overlapping area overlap along the second direction, the first folding finger portion is located in the first slow speed area, and the second folding finger portion is located in the second slow speed area.

19. The method for forming a surface acoustic wave resonator device according to claim 18, wherein: In the first slow speed zone, the first finger folded portion overlaps with the fourth finger joint portion along the second direction; in the second slow speed zone, the second finger folded portion overlaps with the second finger joint portion along the second direction.

20. The method for forming a surface acoustic wave resonator device according to claim 18, wherein: The second finger joint is also located in the second spacing area, and in the second spacing area, the second finger joint partially overlaps with the third part along the second direction; the fourth finger joint is also located in the first spacing area, and in the first spacing area, the fourth finger joint partially overlaps with the first part along the second direction.

21. The method for forming a surface acoustic wave resonator device according to claim 18, wherein: Forming the electrode structure also includes: forming a plurality of first auxiliary electrodes connected to the first bus, the first auxiliary electrodes are located in the first spacing area, the first auxiliary electrodes are staggered with the first part, and the first auxiliary electrodes correspond to the fourth part; forming a plurality of second auxiliary electrodes connected to the second bus, the second auxiliary electrodes are located in the second spacing area, the second auxiliary electrodes are staggered with the third part, and the second auxiliary electrodes correspond to the second part.

22. The method for forming a surface acoustic wave resonator device according to claim 18, wherein: Forming the electrode structure also includes: forming a plurality of third auxiliary electrodes connected to the first bus, the third auxiliary electrodes are located in the first spacing area, the third auxiliary electrodes are staggered with the first part, and the third auxiliary electrodes correspond to the second part; forming a plurality of fourth auxiliary electrodes connected to the second bus, the fourth auxiliary electrodes are located in the second spacing area, the fourth auxiliary electrodes are staggered with the third part, and the fourth auxiliary electrodes correspond to the fourth part.

23. The method for forming a surface acoustic wave resonator device according to claim 18, wherein: Forming the first electrode strip also includes: forming a first extension portion, the first extension portion is connected to the first portion, and the first extension portion extends along the second direction to correspond to the fourth portion; forming a third extension portion, the third extension portion is connected to the third portion, and the third extension portion extends along the second direction to correspond to the second portion.

24. The method for forming a surface acoustic wave resonator device according to claim 18, wherein: Forming the first electrode strip also includes: forming a second extension portion, the second extension portion is connected to the first portion, and the second extension portion extends along the second direction to correspond to the second portion; forming a fourth extension portion, the fourth extension portion is connected to the third portion, and the fourth extension portion extends along the second direction to correspond to the fourth portion.

25. The method for forming a surface acoustic wave resonator device according to claim 18, wherein: Forming the electrode structure also includes: forming a fifth auxiliary electrode, the fifth auxiliary electrode is connected to the first part, the fifth auxiliary electrode is located in the first spacing area, and the fifth auxiliary electrode is close to the first folded finger part; forming a sixth auxiliary electrode, the sixth auxiliary electrode is connected to the third part, the sixth auxiliary electrode is located in the second spacing area, and the sixth auxiliary electrode is close to the second folded finger part.

26. The method for forming a surface acoustic wave resonator device according to claim 18, wherein: The second phalanx portion includes a first sub-portion and a second sub-portion, the first sub-portion is located between the first phalanx portion and the second sub-portion, the connection between the first sub-portion and the first phalanx portion has an angle, and the connection between the first sub-portion and the second sub-portion has an angle; the fourth phalanx portion includes a third sub-portion and a fourth sub-portion, the third sub-portion is located between the third phalanx portion and the fourth sub-portion, the connection between the third sub-portion and the third phalanx portion has an angle, and the connection between the third sub-portion and the fourth sub-portion has an angle.

27. A filter, characterized in that: include: A surface acoustic wave resonator device as claimed in any one of claims 1 to 17.

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